Liquid circulation system, substrate processing apparatus and liquid circulation method

Abstract

To provide a technology which enables an ionic liquid to continuously circulate in a vacuum.SOLUTION: A liquid circulation system according to one embodiment of the disclosure recovers an ionic liquid supplied to a vacuum vessel and returns the ionic liquid to the vacuum vessel again. The liquid circulation system has: a storage tank which has an opening communicating with the vacuum vessel and in which the ionic liquid taken out from the vacuum vessel through the opening is stored; a viscous pump provided below the storage tank in a vertical direction; and a pipe which sends the ionic liquid in the storage tank to the vacuum vessel.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a liquid circulation system, a substrate processing apparatus, and a liquid circulation method. [Background technology]

[0002] A technique for supplying an ionic liquid into a vacuum chamber using a liquid pump is known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-239220 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique that enables continuous circulation of an ionic liquid in a vacuum. [Means for solving the problem]

[0005] A liquid circulation system according to one aspect of the present disclosure is a liquid circulation system that recovers ionic liquid supplied into a vacuum container and returns it to the vacuum container, and includes a storage tank having an opening that communicates with the inside of the vacuum container and that stores ionic liquid that is removed from the vacuum container through the opening, a viscosity pump that is provided vertically below the storage tank, and piping that sends the ionic liquid in the storage tank into the vacuum container. [Effects of the Invention]

[0006] According to the present disclosure, ionic liquid can be continuously circulated in a vacuum. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a diagram illustrating an example of a substrate processing apparatus according to an embodiment; [Figure 2] FIG. 1 is a cross-sectional perspective view showing an example of a liquid circulation system according to an embodiment. [Figure 3] An enlarged perspective cross-sectional view of a portion of a viscous pump. [Figure 4] FIG. 1 is a diagram showing an example of the position of a joint provided on a pipe; [Figure 5] 1 is a cross-sectional view showing an example of a connection between a viscous pump and a pipe. [Figure 6] FIG. 10 is a cross-sectional view showing another example of a connection portion between a viscous pump and a pipe. [Figure 7] An example of the ionic liquid regeneration mechanism [Figure 8] Cross-sectional view of an example of a high-temperature gate valve (1) [Figure 9] Cross-sectional view of an example of a high-temperature gate valve (2) [Figure 10] Cross-sectional view showing an example of a high-temperature rotating seal DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, non-limiting exemplary embodiments of the present disclosure will be described with reference to the accompanying drawings. In all the accompanying drawings, the same or corresponding reference numerals are used to designate the same or corresponding members or components, and redundant descriptions will be omitted.

[0009] [Circulation of ionic liquids in an ultra-high vacuum environment] Demand for mechanisms capable of nano-level movement in ultra-high vacuum environments is increasing in the semiconductor manufacturing field. Mechanical elements that enable smooth nano-level movement include magnetic bearings and fluid bearings. This is because magnetic bearings and fluid bearings move by floating, so there is no vibration or resistance due to mechanical friction. The lack of vibration and resistance also contributes to easier nano-level positioning control and the elimination of wear debris contamination, making them suitable for the semiconductor manufacturing field, which requires nano-level processing precision in a clean environment. Fluid bearings in particular have higher bearing rigidity than magnetic bearings and emit less magnetic field, so they are already widely used in this field.

[0010] In recent years, the increasing volume of information has led to a demand for finer semiconductor lithography. Therefore, there has been a growing trend to use extreme ultraviolet radiation (EUV) and electron beams (EB) as lithography light sources (beam sources). Because these low-wavelength beams are absorbed and scattered by gas molecules, lithography must be performed in an ultra-high vacuum environment. Therefore, the object to be processed must also be positioned in an ultra-high vacuum environment.

[0011] However, due to the use of gas or liquid, fluid bearings have the problem of being difficult to handle in a vacuum. An example of a fluid bearing for high vacuum is a differential pumping seal. A differential pumping seal works by using pressurized gas to float the bearing, and then sucking out the gas with a vacuum pump before it is released into the ultra-high vacuum environment. By using a differential pumping seal, nano-level positioning accuracy can be achieved in an ultra-high vacuum environment. However, differential pumping seals have the problem of being complicated, expensive, and large in size.

[0012] Magnetic bearings are also used as fluid bearings for high vacuum applications. However, magnetic bearings tend to deteriorate the vacuum level because the coils generate heat and bake the ultra-high vacuum environment. -3 The beam irradiation area is placed in a low vacuum of 10 Pa and sealed with a differential pumping seal. -5 Sealing is performed on the Pa stand.

[0013] As a result of extensive research, the present inventors have discovered a liquid circulation system that can continuously circulate an ionic liquid in a vacuum, and have found that use of this liquid circulation system makes it possible to realize a fluid bearing that allows for a simplified mechanism, miniaturization, and cost reduction. This is explained in detail below.

[0014] [Substrate Processing Apparatus] An example of a substrate processing apparatus according to an embodiment will be described with reference to Fig. 1. The substrate processing apparatus according to an embodiment is an apparatus that performs various semiconductor processes on substrates such as semiconductor wafers and glass substrates.

[0015] The substrate processing apparatus includes a processing vessel 1, an exhaust unit 2, a liquid utilization unit 3, and a liquid circulation system 4.

[0016] The processing chamber 1 is a vacuum chamber capable of maintaining a predetermined degree of vacuum inside. The predetermined degree of vacuum is, for example, an ultra-high vacuum (10 -8 Pa~10 -5 Pa), high vacuum (10 -5 Pa~10 -1 Pa).

[0017] The exhaust unit 2 reduces the pressure to a predetermined vacuum level by exhausting the inside of the processing chamber 1. The exhaust unit 2 includes a vacuum pump, an exhaust pipe, and a pressure control valve.

[0018] The liquid utilization unit 3 is provided in the processing vessel 1. The liquid utilization unit 3 is an object in which the ionic liquid sent from the liquid circulation system 4 is utilized. The liquid utilization unit 3 is, for example, a vacuum seal, an object to be temperature-controlled, or an object to be neutralized.

[0019] Examples of vacuum seals include a fluid bearing that seals a gate valve that opens and closes the loading / unloading port for loading and unloading substrates into and from the processing vessel 1, and a fluid bearing that seals the rotation shaft that rotates the rotary stage that rotatably holds the substrate inside the processing vessel 1. Because ionic liquids are nonvolatile in a vacuum and at high temperatures, they can be supplied to a fluid bearing placed in a vacuum and at high temperatures. This allows for a vacuum seal to be achieved at high temperatures (e.g., 240°C or higher) where it is difficult to use an O-ring.

[0020] An example of the object to be temperature-controlled is a vacuum-insulated member (hereinafter referred to as a "vacuum insulation member") provided in the processing vessel 1. Examples of the vacuum insulation member include a motor and a substrate. Since ionic liquid is non-volatile in a vacuum and at high temperatures, it is possible to supply ionic liquid to a vacuum insulation member placed in a vacuum. This allows the vacuum insulation member to be cooled by supplying low-temperature ionic liquid to the vacuum insulation member. In addition, the vacuum insulation member can be heated by supplying high-temperature ionic liquid to the vacuum insulation member.

[0021] An example of the object to be neutralized is an electrically floating member (hereinafter referred to as "floating member") provided in the processing vessel 1. Since ionic liquid is non-volatile in a vacuum, it is possible to supply the ionic liquid to the floating member placed in a vacuum. Furthermore, since ionic liquid is conductive, supplying the ionic liquid to the floating member allows neutralization of the floating member via the ionic liquid.

[0022] The liquid circulation system 4 is configured to circulate the ionic liquid by recovering the ionic liquid supplied to the liquid utilization section 3 in the processing vessel 1 and returning it to the liquid utilization section 3. Details of the liquid circulation system 4 will be described later.

[0023] [Liquid Circulation System] An example of a liquid circulation system according to an embodiment will be described with reference to FIGS.

[0024] The liquid circulation system 4 has a storage tank 41, a viscosity pump 42, a diaphragm pump 43, piping 44, a discharge pressure sensor 45, a flow rate controller 46, a supply pressure sensor 47, a liquid recovery tray 48, a temperature regulator 49, a splash shielding member 50, a measurement unit 51 and a frame 52.

[0025] The storage tank 41 stores the ionic liquid IL. The storage tank 41 has a cylindrical shape. An opening 41a at the top of the storage tank 41 communicates with the interior of the processing vessel 1. As a result, the ionic liquid IL is collected from the processing vessel 1 into the storage tank 41 through the opening 41a, and the liquid level LL of the ionic liquid IL in the storage tank 41 is exposed to a vacuum. Furthermore, because the ionic liquid IL is stored in a vacuum without being exposed to the atmosphere, deterioration of the properties of the ionic liquid IL can be suppressed, resulting in a reduced frequency of replacement of the ionic liquid. Furthermore, an opening 41b at the bottom of the storage tank 41 communicates with the interior of the viscous pump 42. In the storage tank 41, the ionic liquid IL falls toward the opening 41b at the bottom due to gravity and is sent to the viscous pump 42. Air bubbles that may be contained in the ionic liquid IL rise toward the liquid level LL due to buoyancy and are degassed at the liquid level LL. This prevents air bubbles that may be contained in the ionic liquid IL from entering the viscous pump 42. The ionic liquid IL can be degassed while the viscosity pump 42 is running, or can be degassed while the viscosity pump 42 is stopped. There are no limitations on the type of ionic liquid IL, but for example, ammonium, imidazolium, or pyridinium types can be used.

[0026] The viscosity pump 42 is provided vertically below the storage tank 41. In this embodiment, the viscosity pump 42 includes a housing 421, a rotor 422, a stator 423, a bearing 424, and a rotation speed detector 425.

[0027] The housing 421 has a cylindrical shape with a central axis in the vertical direction. The upper end of the housing 421 is connected to the lower end of the storage tank 41, and an opening 421a at the upper end of the housing 421 communicates with an opening 41b at the lower end of the storage tank 41. As a result, the ionic liquid IL in the storage tank 41 falls into the housing 421 through openings 41b and 421a due to gravity, and the housing 421 is filled with the ionic liquid IL. In this way, the ionic liquid is transferred from the storage tank 41 into the housing 421 without using negative pressure or gas for pushing out the liquid. Therefore, when a predetermined amount of liquid is transferred from the housing 421 to the pipe 44, the same amount of ionic liquid is supplied from the storage tank 41 into the housing 421 due to gravity.

[0028] Furthermore, the housing 421 is provided coaxially with the storage tank 41, and has an inner diameter that is the same as or smaller than that of the storage tank 41. This allows air bubbles generated in the housing 421 to move vertically upward toward the processing vessel 1 without accumulating at the connection between the storage tank 41 and the housing 421. As a result, air bubbles in the housing 421 can be efficiently removed. Furthermore, when the inner diameter of the housing 421 is smaller than that of the storage tank 41, it is preferable to provide an inclined surface whose diameter increases from the housing 421 side toward the storage tank 41 side. This particularly prevents air bubbles from accumulating at the connection between the storage tank 41 and the housing 421.

[0029] The rotor 422 is provided in the housing 421 and immersed in the ionic liquid IL. That is, the rotor 422 is provided vertically below the liquid level LL of the ionic liquid IL. The rotor 422 has a cylindrical shape with the central axis of the housing 421 as its axis of rotation. The axial length of the rotor 422 is, for example, two to three times its diameter. The rotor 422 rotates within the housing 421, thereby sending the ionic liquid in the housing 421 to the pipe 44 by utilizing the viscosity of the ionic liquid. A gap G1 (FIG. 3) is provided between the outer circumferential surface of the rotor 422 and the inner circumferential surface of the housing 421. The gap G1 is, for example, 0.01 mm to 0.5 mm, and is 0.25 mm as an example. A spiral liquid sending groove 422a (FIG. 3) is formed on the outer circumferential surface of the rotor 422, with the rotation axis of the rotor 422 as its spiral axis. The depth D1 of the liquid delivery groove 422a is, for example, 0.01 mm to 1 mm, and is, for example, 0.22 mm.

[0030] Stator 423 is provided on the outside of rotor 422 and generates a force for rotating rotor 422. Stator 423 is, for example, a permanent magnet type stator.

[0031] The bearing 424 includes an upper bearing block 424a and a lower bearing block 424b. The upper bearing block 424a supports the upper part of the rotating body 422, and the lower bearing block 424b supports the lower part of the rotating body 422. The bearing 424 is preferably a fluid bearing. This prevents contamination and enables the rotating body 422 to rotate at high speed. However, the bearing 424 may also be a rolling bearing.

[0032] The rotation speed detector 425 includes a sensor rotation side 425 a and a sensor fixed side 425 b , and detects the rotation speed of the rotor 422 .

[0033] The diaphragm pump 43 is provided between the viscous pump 42 and the pipe 44. In this embodiment, the diaphragm pump 43 is connected to the lower part of the viscous pump 42. The diaphragm pump 43 sends the ionic liquid IL sent from the viscous pump 42 to the pipe 44. Note that the diaphragm pump 43 does not necessarily have to be provided, and FIG. 2 shows a case where the diaphragm pump 43 is not provided.

[0034] One end of the pipe 44 is airtightly connected to the diaphragm pump 43, and the other end is inserted into the processing vessel 1 through the bottom plate 11 of the processing vessel 1. In this way, the pipe 44 sends the ionic liquid IL sent from the diaphragm pump 43 into the processing vessel 1 and supplies it to the liquid utilization unit 3. The pipe 44 is, for example, composed of a single pipe. However, as shown in FIG. 4, the pipe 44 may be composed of multiple pipes, for example, four pipes 441 to 444. When the pipe 44 is composed of four pipes 441 to 444, it is preferable that joints 445 to 447 connecting the pipes 441 to 444 together are provided on the pipes extending in the vertical direction.

[0035] For example, as shown in FIG. 5, when vertically extending pipes P1 and P2 are connected to each other, bubbles generated in the groove T1, to which the O-ring R1 is attached, rise due to buoyancy and move to the flow path FP in the pipes P1 and P2. This allows the bubbles in the groove T1 to be removed. Also, as shown in FIG. 5, it is preferable to provide a drain DR on a portion of the inner circumferential surface of the groove T1 in the circumferential direction. The drain DR extends vertically from the bottom surface to the top surface of the groove T1 and communicates with the flow path FP on the top surface. This allows bubbles in the region A1 surrounded by the inner circumferential surface of the groove T1, the bottom surface of the groove T1, and the O-ring R1 to move through the drain DP to the flow path FP. This allows the bubbles in the groove T1 to be removed efficiently.

[0036] 6, when the horizontally extending pipes P3 and P4 are connected to each other, bubbles generated in the region A2 of the groove T2 where the O-ring R2 is attached, which is located vertically above the flow path FP in the pipes P3 and P4, do not move to the flow path FP, and therefore the bubbles in the groove T2 cannot be completely removed.

[0037] A discharge pressure sensor 45, a flow rate controller 46, and a supply pressure sensor 47 are installed in the piping 44 in this order from the diaphragm pump 43 side.

[0038] The discharge pressure sensor 45 is disposed in the pipe 44, and detects the discharge pressure of the ionic liquid IL discharged from the diaphragm pump 43. The discharge pressure sensor 45 transmits the detected discharge pressure to the flow rate controller .

[0039] The flow rate controller 46 is disposed in the pipe 44. The flow rate controller 46 controls the flow rate of the ionic liquid IL flowing through the pipe 44 based on at least one of the discharge pressure detected by the discharge pressure sensor 45 and the supply pressure detected by the supply pressure sensor 47.

[0040] The supply pressure sensor 47 is disposed in the pipe 44 and detects the supply pressure of the ionic liquid IL, the flow rate of which is controlled by the flow rate controller 46 and which is supplied into the processing chamber 1. The supply pressure sensor 47 transmits the detected supply pressure to the flow rate controller 46.

[0041] The liquid recovery tray 48 is provided on the bottom plate 11 of the processing vessel 1, and has a funnel shape that slopes toward the opening 41a of the storage tank 41. The liquid recovery tray 48 collects the ionic liquid IL used in the liquid utilization unit 3 and recovers it in the opening 41a of the storage tank 41. By providing the liquid recovery tray 48, the ionic liquid IL becomes a thin liquid film as it passes over the inclined surface of the liquid recovery tray 48, increasing its surface area, and thus facilitating degassing from the ionic liquid IL.

[0042] The temperature regulator 49 measures and adjusts the temperature of the ionic liquid IL in the storage tank 41. For example, when the liquid utilization unit 3 is the temperature-control target and the temperature-control target is to be cooled, the temperature regulator 49 controls the temperature of the ionic liquid IL in the storage tank 41 to decrease. Alternatively, when the liquid utilization unit 3 is the temperature-control target and the temperature-control target is to be heated, the temperature regulator 49 controls the temperature of the ionic liquid IL in the storage tank 41 to increase. Alternatively, the viscosity pump 42 may be cooled by the temperature regulator 49 controlling the temperature of the ionic liquid IL in the storage tank 41 to decrease.

[0043] The splash shielding member 50 is provided at the opening 41a of the storage tank 41. The splash shielding member 50 prevents splashes generated by bubbles breaking at the liquid surface LL when the ionic liquid IL in the storage tank 41 is degassed from entering the processing vessel 1 from inside the storage tank 41. In this embodiment, the splash shielding member 50 includes an upper shielding plate 501 and a lower shielding plate 502. However, the splash shielding member 50 may be composed of only one shielding plate, or may be composed of three or more shielding plates.

[0044] The upper shielding plate 501 has a disk shape with an outer diameter substantially the same as the diameter of the opening 41a, and is provided so as to close the opening 41a. This prevents splashes from entering the processing vessel 1 from inside the storage tank 41. A plurality of through-holes 501a are formed in the upper shielding plate 501. This allows the ionic liquid IL collected in the liquid recovery tray 48 to pass through the plurality of through-holes 501a and fall vertically downward.

[0045] The lower shielding plate 502 is provided vertically below the upper shielding plate 501 with a gap therebetween. The lower shielding plate 502 has a disk shape with an outer diameter substantially the same as the diameter of the opening 41a, and is provided so as to block the opening 41a. This prevents splashes from entering the processing vessel 1 from inside the storage tank 41. A plurality of through holes 502a are formed in the lower shielding plate 502. As a result, the ionic liquid IL that has passed through the upper shielding plate 501 passes through the plurality of through holes 502a, falls vertically downward, and flows into the storage tank 41. It is preferable that the plurality of through holes 502a be provided at positions different from the plurality of through holes 501a in a plan view. As a result, even if the droplets pass through the plurality of through holes 502a, the upper shielding plate 501 blocks the droplets from scattering vertically upward, so that the intrusion of the droplets from the storage tank 41 into the processing vessel 1 can be particularly suppressed.

[0046] The measurement unit 51 monitors the state of the ionic liquid IL in the storage tank 41. The measurement unit 51 monitors the degree to which the ionic liquid IL has absorbed moisture or oxidizing gases in a vacuum, for example, by measuring the resistivity or colorimetric value of the ionic liquid IL. This makes it easier to grasp the degree of deterioration of the entire ionic liquid IL compared to a method in which a portion of the ionic liquid IL is sampled to monitor the state of the ionic liquid IL.

[0047] The frame 52 holds each element of the liquid circulation system 4. For example, the frame 52 is attached to the viscosity pump 42 and holds the discharge pressure sensor 45, the flow controller 46, and the supply pressure sensor 47.

[0048] As described above, in the liquid circulation system 4 of this embodiment, the viscosity pump 42 is provided vertically below the storage tank 41. As a result, the ionic liquid IL is sent from the storage tank 41 to the viscosity pump 42 by gravity, and any air bubbles that may be contained in the ionic liquid IL rise due to buoyancy and are degassed. This makes it possible to prevent air bubbles that may be contained in the ionic liquid IL from entering the viscosity pump 42. As a result, the ionic liquid IL can be continuously circulated in a vacuum while any air bubbles that may be contained in the ionic liquid IL are removed.

[0049] Furthermore, according to the liquid circulation system 4 of the embodiment, the ionic liquid IL is circulated in a vacuum and sealed state, so the ionic liquid does not come into contact with gas, and the quality of the ionic liquid can be maintained. Therefore, the frequency with which the ionic liquid introduced into the liquid circulation system 4 needs to be replaced can be reduced.

[0050] Furthermore, according to the liquid circulation system 4 of the embodiment, there is no suction / discharge process due to the opening and closing of an on-off valve, and the ionic liquid IL is circulated continuously and at a fixed amount, so that low-frequency pulsation in the discharge pressure can be prevented.

[0051] Furthermore, according to the liquid circulation system 4 of the embodiment, all of the flow paths for the ionic liquid IL are in a vacuum, and the ionic liquid IL is circulated without using a differential pressure, so a seal structure (such as a differential pumping seal) for sealing out the pressure difference is not required, which contributes to the miniaturization and simplification of the liquid circulation system 4.

[0052] Furthermore, the liquid circulation system 4 of the embodiment circulates the ionic liquid IL without using a differential pressure, and therefore has a fail-safe structure in which the circulation of the ionic liquid IL simply stops even in the event of a loss of power due to a power outage, etc. In contrast, when the ionic liquid IL is circulated using a differential pressure, there is a concern that the inflow and outflow of the ionic liquid IL into and from the processing vessel 1 cannot be stopped if power is lost.

[0053] 7, the liquid circulation system 4 of the embodiment may have a liquid regeneration mechanism 53. The liquid regeneration mechanism 53 includes a distillation device 531, a pipe 532, an on-off valve 533, and a diaphragm pump 534.

[0054] The distillation device 531 heats the ionic liquid IL to, for example, 150°C to 400°C, thereby selectively evaporating and removing impurities (for example, water) contained in the ionic liquid IL.

[0055] Pipe 532 connects storage tank 41 and distillation apparatus 531. Pipe 532 is provided with an on-off valve 533 and a diaphragm pump 534 in this order from the storage tank 41 side.

[0056] The on-off valve 533 is disposed in the pipe 532 and opens and closes the flow path in the pipe 532. The on-off valve 533 is opened when regenerating the ionic liquid IL and is closed otherwise. The on-off valve 533 is, for example, a manual valve, but may also be a solenoid valve.

[0057] Diaphragm pump 534 is provided in pipe 532. Diaphragm pump 534 is configured to send ionic liquid IL in storage tank 41 to distillation apparatus 531, and is also configured to return ionic liquid IL from distillation apparatus 531 to storage tank 41.

[0058] When regenerating the ionic liquid IL using the liquid regeneration mechanism 53, first, the pressure inside the processing vessel 1 is adjusted to the same pressure as the pressure inside the distillation apparatus 531 or to a pressure slightly higher than the pressure inside the distillation apparatus 531. Next, the on-off valve 533 is opened and the diaphragm pump 534 is driven to send the ionic liquid IL from the storage tank 41 into the distillation apparatus 531. Next, the ionic liquid IL is heated in the distillation apparatus 531 to selectively evaporate and remove impurities contained in the ionic liquid IL. Next, the diaphragm pump 534 is driven to return the ionic liquid IL from the distillation apparatus 531 to the storage tank 41. After the ionic liquid IL has been returned from the distillation apparatus 531 to the storage tank 41, the diaphragm pump 534 is stopped and the on-off valve 533 is closed. Through the above process, the ionic liquid IL is regenerated.

[0059] [High temperature gate valve] An example of a high-temperature gate valve to which the liquid circulation system of the embodiment can be applied will be described with reference to Figures 8 and 9. Figure 8 is a cross-sectional view showing the high-temperature gate valve with the gate shutter closed, and Figure 9 is a cross-sectional view showing the high-temperature gate valve with the gate shutter open.

[0060] The high-temperature compatible gate valve opens and closes an opening 151 formed in a chamber wall 150 of a vacuum chamber. The interior of the vacuum chamber is maintained at, for example, an ultra-high vacuum or a high vacuum. A heater 152 is embedded inside the chamber wall 150, and the chamber wall 150 is heated to a high temperature. The high-temperature compatible gate valve has a seal portion 110 and a liquid circulation system 120.

[0061] The seal portion 110 includes a housing 111 , a gate shutter 112 , a float holder 113 , a float 114 , a fluid bearing pad 115 , a fluid bearing 116 , a liquid recovery groove 117 , and O-rings 118 and 119 .

[0062] The housing 111 accommodates the gate shutter 112 so that it can move horizontally. An inclined surface 111a is provided in the portion of the housing 111 where the tip of the gate shutter 112 is accommodated. This allows the gate shutter 112 to be smoothly accommodated within the housing 111.

[0063] The gate shutter 112 closes the opening 151 by moving to a position (closed position) where it overlaps with the opening 151 in a plan view within the housing 111 (FIG. 8). This airtightly seals the inside of the vacuum chamber. On the other hand, the gate shutter 112 opens the opening 151 by moving to a position (open position) where it does not overlap with the opening 151 in a plan view (FIG. 9). This allows communication between the inside and outside of the vacuum chamber. An O-ring 118 is provided on the upper surface of the gate shutter 112 to airtightly seal the gap with the underside of the levitation body 114.

[0064] The levitation body holding part 113 is installed on the housing 111. The levitation body holding part 113 holds the levitation body 114 when the gate shutter 112 is moved to the open position. An O-ring 119 is provided on the inner peripheral surface of the levitation body holding part 113 to airtightly seal the gap between the inner peripheral surface of the levitation body 114 and the levitation body holding part 113.

[0065] When the gate shutter 112 moves to the closed position, the levitation body 114 is pressed vertically upward by the gate shutter 112 and moves away from the levitation body holding part 113 (FIG. 8). On the other hand, when the gate shutter 112 moves to the open position, the pressing force of the gate shutter 112 is eliminated, so the levitation body 114 moves vertically downward and lands on the levitation body holding part 113 (FIG. 9).

[0066] The fluid bearing pad 115 is connected to the lower surface of the chamber wall 150 via a metal gasket 115a. The fluid bearing pad 115 is formed with a flow path 115b for supplying the ionic liquid IL sent from the pipe 123 to the fluid bearing 116.

[0067] The fluid bearing 116 supports the floater 114 in a non-contact manner by supplying pressurized ionic liquid IL from a liquid circulation system 120 to a bearing gap 116 a formed between the fluid bearing pad 115 and the floater 114 .

[0068] The liquid recovery groove 117 is formed in the floating body 114 and the fluid bearing pad 115, and is a flow path for returning the ionic liquid IL supplied to the bearing gap 116a to the liquid circulation system 120.

[0069] The liquid circulation system 120 includes a storage tank 121 , a viscosity pump 122 , piping 123 , a temperature regulator 124 , a pressure adjustment mechanism 125 , and a degassing hole 126 .

[0070] The storage tank 121 is an area surrounded by the floatation body holding portion 113, the floatation body 114, and the fluid bearing pads 115, and stores the ionic liquid IL. The ionic liquid IL flows into the storage tank 121 from the liquid recovery groove 117.

[0071] The viscous pump 122 is provided vertically below the storage tank 121. This allows the ionic liquid IL in the storage tank 121 to fall into the viscous pump 122 by gravity, filling the viscous pump 122 with the ionic liquid IL. The viscous pump 122 may have a configuration similar to that of the above-described viscous pump 42. A diaphragm pump may also be provided downstream of the viscous pump 122.

[0072] One end of the pipe 123 is airtightly connected to the viscous pump 122, and the other end is connected to the flow path 115b. The pipe 123 sends the ionic liquid IL sent from the viscous pump 122 into the flow path 115b. The pipe 123 may have a configuration similar to that of the pipe 44 described above. A temperature regulator 124 and a pressure adjustment mechanism 125 are provided in the pipe 123, in this order from the viscous pump 122 side.

[0073] The temperature regulator 124 is disposed in the pipe 123. The temperature regulator 124 measures and adjusts the temperature of the ionic liquid IL flowing through the pipe 123. For example, the temperature regulator 124 cools the ionic liquid IL flowing through the pipe 123 to supply low-temperature ionic liquid IL to the fluid bearing 116. This allows the floater 114 to be cooled, and therefore the temperature of the floater 114 can be maintained within a temperature range in which the O-ring can be used.

[0074] The pressure adjustment mechanism 125 is disposed in the pipe 123. The pressure adjustment mechanism 125 adjusts the pressure of the ionic liquid IL supplied to the pipe 123. The pressure adjustment mechanism 125 adjusts the pressure of the ionic liquid IL supplied to the fluid bearing 116, thereby enabling accurate control of the vertical position of the floater 114. For example, by adjusting the pressure of the ionic liquid IL supplied to the fluid bearing 116, the floater 114 can be spaced away from the high-temperature side (fluid bearing pad 115), thereby reducing the heat transferred from the high-temperature side to the O-ring via the floater 114. Furthermore, the amount of heat escaping from the high-temperature chamber wall 150 can be reduced.

[0075] The vent hole 126 is a through-hole that penetrates the chamber wall 150 and is located vertically above the storage tank 121. The vent hole 126 connects the inside of the storage tank 121 with the inside of the vacuum chamber. Bubbles contained in the ionic liquid IL in the storage tank 121 move into the vacuum chamber through the vent hole 126 and are exhausted by an exhaust unit (not shown) connected to the vacuum chamber.

[0076] As described above, in the high-temperature gate valve, the contact surfaces of the O-rings 118 and 119 are provided on the independent levitation body 114, which is not mechanically fastened, preventing the O-rings 118 and 119 from being directly heated. When the gate shutter 112 moves to the closed position, the levitation body 114 is pressed vertically upward by the gate shutter 112. At this time, the fluid bearing 116 on the upper surface of the levitation body 114 supports the levitation body 114 so as to push back the pressing force. The levitation body 114 stops at a position where the pressing force of the gate shutter 112 and the levitation force of the fluid bearing 116 are balanced. As a result, the levitation body 114 does not come into mechanical contact with the high-temperature side due to the bearing gap 116a, which is supported by the fluid bearing 116 without contact. As a result, the gate shutter 112 can open and close the opening 151 in the chamber wall 150, which has been heated to a high temperature, using the O-rings 128 and 129.

[0077] Furthermore, the high-temperature gate valve has a temperature regulator 124 that adjusts the temperature of the ionic liquid IL supplied to the bearing gap 116a. As a result, the ionic liquid IL supplied to the bearing gap 116a is adjusted by the temperature regulator 124, thereby cooling the floater 114 and maintaining the temperature of the floater 114 within a temperature range in which the O-rings 118 and 119 can be used.

[0078] [High temperature resistant rotating seal] An example of a high-temperature rotating seal to which the liquid circulation system of the embodiment can be applied will be described with reference to FIG.

[0079] The high-temperature resistant rotary seal airtightly seals a rotary shaft 253 that rotates a rotary stage 252 provided in a vacuum chamber 251. The interior of the vacuum chamber 251 is maintained at, for example, an ultra-high vacuum or a high vacuum. A heating reactor 254 is provided in the vacuum chamber 251, and the rotary stage 252 is adjusted to a high temperature by the heating reactor 254. A substrate 255 to be processed is placed on the rotary stage 252. The rotary shaft 253 is connected to the bottom of the rotary stage 252 and rotated by a motor 256 around a vertical axis. The rotary shaft 253 is supported by a thrust bearing 257. The high-temperature resistant rotary seal includes a high-temperature seal 210 and a liquid circulation system 220.

[0080] The high temperature seal 210 includes a bearing housing 211 , a fluid bearing 212 , a liquid circulation channel 213 , and a shaft seal 214 .

[0081] The bearing housing 211 has a hollow shape, and the rotary shaft 253 is inserted into the hollow portion. The bearing housing 211 forms a liquid circulation channel 213.

[0082] The fluid bearing 212 supports the rotating shaft 253 in a non-contact manner by supplying the ionic liquid IL pressurized by the liquid circulation system 220 to a bearing gap formed by the rotating shaft 253 and the bearing housing 211 .

[0083] The liquid circulation flow path 213 is formed by the bearing housing 211 and is a flow path for returning the ionic liquid IL supplied to the bearing gap to the liquid circulation system 220.

[0084] The shaft seal 214 is provided in a storage tank 221, which will be described later, and is immersed in the ionic liquid IL. The shaft seal 214 rotatably and airtightly seals the rotating shaft 253 relative to the bearing housing 211. The shaft seal 214 is an O-ring, a magnetic fluid seal, or the like.

[0085] The liquid circulation system 220 includes a storage tank 221 , a viscosity pump 222 , piping 223 , a temperature regulator 224 , and a pressure adjustment mechanism 225 .

[0086] The storage tank 221 is formed inside the bearing housing 211 and stores the ionic liquid IL. The ionic liquid IL flows into the storage tank 221 from the liquid circulation channel 213.

[0087] The viscosity pump 222 is provided vertically below the storage tank 221. As a result, the ionic liquid IL in the storage tank 221 falls into the viscosity pump 222 by gravity, and the viscosity pump 222 is filled with the ionic liquid IL. The viscosity pump 222 may have a configuration similar to that of the above-mentioned viscosity pump 42. A diaphragm pump may also be provided downstream of the viscosity pump 222.

[0088] One end of the pipe 223 is airtightly connected to the viscous pump 222, and the other end is inserted into the fluid bearing 212, horizontally penetrating the bearing housing 211. The pipe 223 sends the ionic liquid IL sent from the viscous pump 222 into the fluid bearing 212. The pipe 223 may have a configuration similar to that of the pipe 44 described above. A temperature regulator 224 and a pressure adjustment mechanism 225 are installed in the pipe 223, in this order from the viscous pump 222 side.

[0089] The temperature regulator 224 is disposed in the pipe 223. The temperature regulator 224 measures and adjusts the temperature of the ionic liquid IL flowing through the pipe 223. For example, the temperature regulator 224 cools the ionic liquid IL flowing through the pipe 223 to supply low-temperature ionic liquid IL to the fluid bearing 212. This makes it possible to cool the rotating shaft 253 and also to cool the shaft seal 214 immersed in the storage tank 221. Therefore, the temperature of the portion that comes into contact with the shaft seal 214 becomes the usable temperature of the O-ring, and therefore an O-ring can be used as the shaft seal 214.

[0090] The pressure adjustment mechanism 225 is provided in the pipe 223. The pressure adjustment mechanism 225 adjusts the pressure of the ionic liquid IL supplied to the pipe 223.

[0091] As described above, according to the high-temperature resistant rotary seal, shaft seal 214 is immersed in ionic liquid IL to cool rotating shaft 253 to a temperature at which shaft seal 214 can be used. This eliminates the need for a long shaft as rotating shaft 253, and allows rotating shaft 253 to be made smaller.

[0092] Furthermore, with the high-temperature resistant rotary seal, the temperature regulator 224 measures and adjusts the temperature of the circulating ionic liquid IL. This makes it possible to omit temperature measurement elements (for example, thermocouples) provided on the chamber wall of the vacuum chamber 251 and the rotary shaft 253, thereby reducing the number of temperature measurement elements.

[0093] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive, and the above-described embodiments may be omitted, substituted, or modified in various ways without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0094] 1. Processing container 4. Liquid Circulation System 41 Storage Tank 41a aperture 42 Viscous Pump 44 Piping IL ionic liquid

Claims

1. A liquid circulation system that recovers an ionic liquid supplied into a vacuum vessel and returns it to the vacuum vessel, a storage tank having an opening communicating with the inside of the vacuum container and configured to store the ionic liquid recovered from the vacuum container through the opening; a viscosity pump provided vertically below the storage tank; a pipe for transferring the ionic liquid in the storage tank into the vacuum vessel; A liquid circulation system comprising:

2. the viscosity pump is connected to the lower end of the reservoir tank; The liquid circulation system of claim 1 .

3. The viscosity pump includes a cylindrical housing and a rotor that rotates within the housing around a central axis of the housing as a rotation axis.

3. A liquid circulation system according to claim 1 or 2.

4. The rotor is provided vertically below the liquid surface of the ionic liquid. The liquid circulation system of claim 3 .

5. A spiral groove is formed on the outer circumferential surface of the rotor.

5. A liquid circulation system according to claim 3 or 4.

6. A gap is provided between the outer circumferential surface of the rotating body and the inner circumferential surface of the housing. A liquid circulation system according to any one of claims 3 to 5.

7. The storage tank has a cylindrical shape and an inner diameter that is the same as or larger than the inner diameter of the housing. A liquid circulation system according to any one of claims 3 to 6.

8. a diaphragm pump provided between the viscosity pump and the piping; A liquid circulation system according to any one of claims 1 to 7.

9. A flow rate controller for controlling the flow rate of the ionic liquid flowing through the pipe is provided. A liquid circulation system according to any one of claims 1 to 8.

10. a sensor for detecting the pressure inside the pipe; The flow rate controller controls the flow rate based on the pressure detected by the sensor.

10. The liquid circulation system of claim 9.

11. a splash shielding member provided at the opening of the storage tank to prevent splashes from entering the vacuum vessel from inside the storage tank; A liquid circulation system according to any one of claims 1 to 10.

12. A temperature regulator for adjusting the temperature of the ionic liquid in the storage tank is provided. A liquid circulation system according to any one of claims 1 to 11.

13. The inside of the vacuum vessel is an ultra-high vacuum (10 －５ Pa to 10 －８ Pa), A liquid circulation system according to any one of claims 1 to 12.

14. a vacuum chamber for processing the substrate; a liquid circulation system for recovering the ionic liquid supplied into the vacuum vessel and returning it to the vacuum vessel; Equipped with The liquid circulation system comprises: a storage tank having an opening communicating with the inside of the vacuum container and configured to store the ionic liquid taken out of the vacuum container through the opening; a viscosity pump provided vertically below the storage tank; a pipe for transferring the ionic liquid in the storage tank into the vacuum vessel; having Substrate processing equipment.

15. a gate valve for opening and closing an opening formed in a chamber wall of the vacuum vessel; The gate valve is a gate shutter that moves between a position that closes the opening and a position that opens the opening; a levitation body that is pressed vertically upward by the gate shutter; a fluid bearing that supports the levitation body by pressing the levitation body vertically downward when an ionic liquid is supplied from the liquid circulation system; having The substrate processing apparatus according to claim 14 .

16. a rotary stage provided within the vacuum chamber; a rotation shaft connected to a lower portion of the rotation stage and rotating the rotation stage; a bearing housing having a hollow shape and through which the rotating shaft is inserted; a fluid bearing that supports the rotating shaft relative to the bearing housing by supplying an ionic liquid from the liquid circulation system; Equipped with The substrate processing apparatus according to claim 14 .

17. A liquid circulation method for recovering an ionic liquid supplied into a vacuum vessel and returning it to the vacuum vessel, comprising: recovering and storing the ionic liquid in a storage tank from the vacuum container through an opening communicating with the vacuum container; sending the ionic liquid into the vacuum vessel through a pipe using a viscosity pump provided vertically below the storage tank; A liquid circulation method comprising:

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