Photoelectric conversion device, imaging device, control method, and computer program

Abstract

To provide technique materializing suppression of an increase in circuit scale and furthermore materializing suitable reading out of a pixel.SOLUTION: A photovoltaic device has: a photon counter that measures the number of photons incident on the pixel; a time counter that measures a time elapsing from the start of the measurement of photon counter starts measuring until the time when a measured value of the photon counter reaches a first threshold value; a switch that switches a photon counter that is connected to the photon counter among a plurality of the photon counters; and a request circuit that reads out the measured value of the time counter.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a photoelectric conversion device having a photoelectric conversion unit that outputs a signal according to incident photons, an imaging device, a control method, a computer program, and the like. [Background technology]

[0002] In recent years, a photoelectric conversion device has been proposed that digitally counts the number of photons incident on an avalanche photodiode and outputs the counted value from a pixel as a photoelectrically converted digital signal. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] U.S. Patent Publication No. 2015 / 0163429 Summary of the Invention [Problem to be solved by the invention]

[0004] Patent Document 1 proposes a structure that includes a photon counter that counts photons and a time counter that measures time. The time counter measures the time from when the photon counter starts measuring until the number of photons reaches a predetermined value, and calculates the pixel value from the measured time. However, Patent Document 1 requires a photon counter and a time counter for each pixel, which increases the circuit size.

[0005] The present invention has been made in view of the above problems, and has as its object to provide a technique for performing pixel readout processing in an appropriate manner while suppressing an increase in circuit scale. [Means for solving the problem]

[0006] The photoelectric conversion device according to the present invention, which solves the above problems, A photoelectric conversion device having pixels each equipped with a photoelectric conversion unit that outputs a signal in response to incident photons, the device comprising: a first measurement means for measuring the number of photons incident on the pixel; a second measurement means for measuring a time from when the first measurement means starts the measurement until the measurement value of the first measurement means reaches a first threshold; the second measurement means being connected to any one of a plurality of first measurement means; and a selection means for connecting, to the second measurement means, a first measurement means having the highest measurement value of the number of photons among the plurality of first measurement means not connected to the second measurement means when the first measurement means connected to the second measurement means reaches the first threshold, the second measurement means outputting the measurement value of the time. . [Effects of the Invention]

[0007] The present invention provides a technique for performing pixel readout processing in an appropriate manner while suppressing an increase in circuit scale. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a diagram illustrating an example of a hardware configuration of a photoelectric conversion device. [Figure 2] FIG. 1 is a diagram showing an example of a sensor chip of a photoelectric conversion device. [Figure 3] 1 is a diagram showing an example of a circuit chip of a photoelectric conversion device; [Figure 4] FIG. 1 is a diagram showing an example of an equivalent circuit of a pixel and a signal processing unit in a photoelectric conversion device. [Figure 5] FIG. 1 is a diagram showing an example of measurement using a photoelectric conversion device. [Figure 6] FIG. 1 is a block diagram illustrating an example of the functional configuration of an imaging device including a photoelectric conversion device. [Figure 7] 1 is a flowchart illustrating an example of the operation of a photoelectric conversion device. DETAILED DESCRIPTION OF THE INVENTION

[0009] The following describes in detail embodiments of the present invention. Note that the embodiments described below are examples for realizing the present invention, and should be modified or changed as appropriate depending on the configuration of the device to which the present invention is applied and various conditions, and the present invention is not limited to the following embodiments. Furthermore, parts having the same functions in all figures are designated by the same numerals, and repeated explanations thereof are omitted.

[0010] <Embodiment 1: Basic form> 1 is a diagram showing an example of the configuration of a photoelectric conversion device according to this embodiment. The photoelectric conversion device 100 is configured by stacking and electrically connecting two chips: a sensor chip 11 and a circuit chip 21. The sensor chip 11 includes a pixel region 12. The circuit chip 21 includes a pixel circuit region 22 that processes signals detected by each pixel in the pixel region 12 in parallel, and a peripheral circuit region 23 that reads signals from the pixel circuit region 22 and controls the pixel circuit region 22.

[0011] <Pixel substrate> FIG. 2 is a diagram showing an example of the configuration of the sensor chip 11. The pixel region 12 of the sensor chip 11 includes a plurality of pixels 201 arranged two-dimensionally across multiple rows and columns. Each pixel 201 has a photoelectric conversion unit 202 including an avalanche photodiode (hereinafter referred to as APD) that outputs a signal in response to incident photons. FIG. 2 shows 48 pixels 201 arranged in six rows from row 0 to row 5 and eight columns from column 0 to column 7, along with reference symbols indicating the row and column numbers. For example, the unit pixel 11 arranged in the first row and fourth column is labeled "P14." The number of rows and columns of the pixel array constituting the pixel region 12 is not particularly limited.

[0012] <Circuit board> 3 is a diagram showing an example of the configuration of the circuit chip 21. The circuit chip 21 includes a pixel circuit region 22 and a peripheral circuit region .

[0013] <Pixel circuit area> The pixel circuit region 22 includes a plurality of signal processing units 301 arranged two-dimensionally across multiple rows and columns, each corresponding to a pixel 201 of the sensor chip. FIG. 3 shows 12 signal processing units 301 arranged in three rows (rows 0 to 2) and four columns (columns 0 to 3), with reference numerals indicating the row and column numbers. For example, the signal processing unit 301 arranged in the second row and second column is designated by the reference numeral "S22." The number of rows and columns of the signal processing unit array constituting the pixel circuit region 22 is not particularly limited. The signal processing unit includes a photon counter 403 (first measurement means) that counts the number of photons and a time counter 406 (second measurement means) that measures time. In the photoelectric conversion device of this embodiment, a photon counter is provided for each pixel, but the time counter is shared by multiple pixels. That is, a group of pixels having different spectral sensitivities in the pixel region 12 is regarded as one partial pixel region, and photon counters 403a, b, c, and d are arranged for each pixel with a different spectral sensitivities, while a time counter 406 is arranged for each partial pixel region. This configuration makes it possible to reduce the circuit size. Details will be described later.

[0014] <Peripheral circuit area> The peripheral circuit region 23 includes a vertical scanning circuit 302, a column circuit 303, a horizontal scanning circuit 304, a control pulse generating unit 305, a signal restoring unit 306, and a signal output circuit 307. A vertical selection line 311VSEL is arranged in each row of the signal processing unit array in the pixel circuit region 22, extending in a first direction (the horizontal direction in FIG. 3). The vertical selection line 311VSEL is connected to each of the signal processing units 301 arranged in the first direction and forms a signal line. The first direction in which the vertical selection line 311VSEL extends may be referred to as the row direction or the horizontal direction. Note that in FIG. 3, the vertical selection line VSEL is shown together with a symbol indicating the row number. For example, the vertical selection line in the first row is labeled "VSEL[1]." The vertical selection line 311VSEL in each row is connected to the vertical scanning circuit 302. The vertical scanning circuit 302 supplies vertical selection signals for selectively driving the signal processing units 301 to the signal processing units 301 via vertical selection lines 311VSEL. In this embodiment, the vertical selection lines 311 are divided into readout vertical selection lines for reading out signals from the plurality of signal processing units 301 in each row and reset vertical selection lines for resetting signals from the plurality of signal processing units 301 in each row.

[0015] In each column of the signal processing unit array in the pixel circuit region 22, a vertical signal line 310 is arranged, extending in a second direction (the vertical direction in FIG. 3) intersecting the first direction. The vertical signal line 310 is connected to each of the signal processing units 301 arranged in the second direction and forms a common signal line. The second direction in which the vertical signal lines 310 extend may be referred to as the column direction or the vertical direction. Note that in FIG. 3, the vertical signal lines 310 are shown together with a symbol indicating the column number. For example, the vertical signal line 310 in the third column is labeled "POUT[3]." The vertical signal line 310 in each column includes n signal lines for outputting an n-bit digital signal.

[0016] The horizontal scanning circuit 304 supplies the horizontal selection circuit 303 with a horizontal selection signal for reading out signals from the column circuits 303. The horizontal scanning circuit 304 supplies a control signal to the horizontal selection circuit 303 of each column via a horizontal selection line 313HSEL. The column circuits 303 that receive the horizontal selection signal from the horizontal scanning circuit 304 sequentially output the held signals to the horizontal output circuit 307 via a signal line 312HSIG and a signal restoration unit 306. Note that in FIG. 3, the horizontal selection line HSEL is shown together with a symbol indicating the column number. For example, the horizontal selection line for the third column is assigned the symbol "HSEL[3]".

[0017] The control pulse generation unit 305 supplies control pulse signals that control the operation and timing of the vertical scanning circuit 302, the horizontal scanning circuit 304, and the column circuit 303. Note that at least some of the control pulse signals that control the operation and timing of the vertical scanning circuit 302, the horizontal scanning circuit 304, and the column circuit 303 may be supplied from outside the photoelectric conversion element. The signal restoration unit 306 calculates pixel values ​​from the value of the time counter 406 and outputs them to the horizontal output circuit 307. The horizontal output circuit 307 outputs a signal corresponding to the pixel value restored by the signal restoration unit 306 as the output signal SOUT of the photoelectric conversion device. Note that the signal restoration unit 306 may be configured to output the value of the time counter as is, i.e., may be configured to be provided outside the photoelectric conversion element.

[0018] <Pixel circuit> FIG. 4 shows an example of an equivalent circuit and a block diagram of the pixel 201 in FIG. 2 and the signal processing unit 301 in FIG. 3. FIG. 4 shows one signal processing unit 301 and four corresponding pixels 201a, 201b, 201c, and 201d. The four pixels have different spectral sensitivities. For example, pixel 201a is a white pixel, 201b is a red pixel, 201c is a blue pixel, and 201d is a green pixel. Here, different spectral sensitivities mean different quantum efficiencies at at least some of the wavelengths to which the photoelectric conversion unit 202 has sensitivity. Therefore, the spectral shapes of the spectral sensitivities may be different, or the spectral shapes may remain the same but the peak quantum efficiencies may be different. Below, an example will be described in which the sensitivity of pixel 201a is greater than that of pixels 201b, 201c, and 201d at all wavelengths to which the photoelectric conversion unit 202 has sensitivity. (For example, the condition is met if pixel 201a is a white pixel, 201b is a red pixel, 201c is a blue pixel, and 201d is a green pixel.) When it is necessary to distinguish between the four pixels, the symbols a, b, c, and d are assigned, and when there is no need to distinguish between them, the symbols are omitted. Here, a collection of multiple pixels with different spectral sensitivities is regarded as one partial pixel region, and photon counters 403a, b, c, and d are arranged for each pixel with a different spectral sensitivities, while a time counter 406 is arranged for each partial pixel region.

[0019] Each pixel 201 in the sensor chip 11 includes an APD 202, which is a photoelectric conversion unit. When a photon is incident on the APD 202, a charge pair is generated by photoelectric conversion. A voltage VL (first voltage) is supplied to the anode of the APD 202. A voltage VH (second voltage) higher than the voltage VL supplied to the anode is supplied to the cathode of the APD 202 via a switch element 408. A reverse bias voltage is supplied to the anode and cathode so that the APD 202 performs avalanche multiplication. With such a voltage supplied, charges generated by incident light undergo avalanche multiplication, generating an avalanche current.

[0020] When a reverse bias voltage is supplied, there are two modes: Geiger mode, in which the anode and cathode operate at a potential difference greater than the breakdown voltage, and linear mode, in which the anode and cathode operate at a potential difference close to or less than the breakdown voltage. APDs operating in Geiger mode are called SPADs (Single Photon Avalanche Diodes). For example, the voltage VL (first voltage) is -30V, and the voltage VH (second voltage) is 1V.

[0021] The signal processing unit 301 in the circuit chip 21 includes a quenching element 401 , a waveform shaping unit 402 , a photon counter 403 , a switch 404 , a decision circuit 405 , a time counter 406 , and a selection circuit 407 .

[0022] The quench element 401 is connected to a power supply that supplies a voltage VH and the APD 202. The quench element 401 has a function of converting a change in avalanche current generated in the APD 202 into a voltage signal. The quench element 401 functions as a load circuit (quench circuit) during signal multiplication by avalanche multiplication, and has the function of suppressing avalanche multiplication by suppressing the voltage supplied to the APD 202 (quench operation).

[0023] The waveform shaping unit 402 shapes the potential change of the cathode of the APD 202 obtained when a photon is detected, and outputs a pulse signal. The waveform shaping unit 402 may be, for example, an inverter circuit or a buffer circuit.

[0024] The photon counter 403 is a photon counter that measures the number of photons that have entered a pixel, and counts the pulse signal output from the waveform shaping unit 402 up to, for example, a first threshold value Cx. Furthermore, the photon counter 403 resets the measurement value when a predetermined control signal is supplied via the vertical selection line 311.

[0025] The APD 202, quench element 401, waveform shaping unit 402, and photon counter 403 described above are provided for each pixel. Meanwhile, the switch 404, decision circuit 405, and time counter 406 described below are provided one for four pixels (i.e., one partial pixel area). Furthermore, one selection circuit 407 is provided for each photon counter 403, and one selection circuit 407 is provided for the time counter 406 shared by the four pixels.

[0026] The switch 404 and a request circuit (not shown) serve to temporally switch between the four photon counters 403a, 403b, 403c, and 403d and connect them to the time counter 406. For example, at the start of counting, the switch 404 connects the photon counter 403a corresponding to the most sensitive pixel among the four pixels to the time counter 406. Then, when the measurement value of the photon counter 403a reaches a first threshold, the counter 403 (e.g., 403b) with the highest measurement value among the photon counters 403b, 403c, and 403d is connected to the time counter 406. After that, when the measurement value of the photon counter 403b reaches the first threshold, the counter 403 (e.g., 403c) with the highest measurement value among the photon counters 403c and 403d is connected to the time counter 406. Finally, after the photon counter 403c reaches the first threshold, the connection destination of the time counter 406 is switched to the photon counter 403d.

[0027] The decision circuit 405 decides whether the measurement value of the photon counter 403 connected to the time counter 406 has reached a first threshold Cx. The time counter 406 measures the time from when the photon counter 403 starts measurement until the measurement value (measured value) reaches the first threshold Cx, and outputs the measured time as a pixel value. That is, when the decision circuit 405 decides that the measurement value of the photon counter 403 has reached the first threshold Cx, the time counter 406 holds the time measurement value at that time as a pixel value. and,When a request signal is received from a request circuit (not shown), the measurement value held by time counter 406 is sent to the peripheral circuit. At the same time, the connection of time counter 406 is switched to another photon counter. This operation is repeated, and time counting continues until the measurement values ​​of photon counters 403a, 403b, 403c, and 403d all reach the first threshold. When all the measurement values ​​reach the first threshold, the time count is stopped and the value of time counter 406 is held, and the measurement value at which each of the four photon counters reached the first threshold is read out in accordance with the request signal.

[0028] <Explanation of effect> In this way, by switching the connection of the time counter, the time counter can be shared by four pixels, and the time at which each photon counter reaches the first threshold can be measured. Furthermore, even after the pixel connected to the time counter reaches the threshold, the time until other shared pixels reach saturation can be measured, allowing for accurate photon measurement. Note that the shorter the time until the first threshold is reached, the greater the amount of light incident on the pixel per unit time (the brighter the pixel). Therefore, by measuring the time until saturation, brightness information for each pixel can be obtained from the measurement value of the time counter. Details of the switching operation and the process of restoring pixel signals from the measurement value of the time counter will be described later.

[0029] <Selection circuit> The selection circuit 407 switches between electrical connection and disconnection between the time counter 406 and the vertical signal line 310 in response to a vertical selection signal VSEL for reading out the n-th row, which is supplied from the vertical scanning circuit 302 in FIG. 3 via a vertical selection line 311. The time measurement value is sent to the column circuit 303 via the vertical signal line 310 and output to the outside of the photoelectric conversion element 100 via the signal restoration unit 306 and the horizontal output circuit 307. After the selection circuit 407 reads out the time measurement value in response to a readout selection signal supplied from the vertical selection line 311, the photon counter 403 and the time counter 406 are reset by a reset signal supplied via the vertical selection line 311. The photon counter 403 and the time counter 406 then restart their respective counts.

[0030] <Switching counters> FIG. 5 is a schematic diagram illustrating the switching operation of the time counter connection in the photoelectric conversion device. In FIG. 5, the horizontal axis represents time and the vertical axis represents the counter output, represented as a pulse. At time T0, when counting begins, the time counter 406 is connected to the photon counter 403a. After counting begins, photons are incident on each pixel, and the counts of each photon counter increase according to the rate at which photons are incident. Then, at time T1, when the counts of the photon counter 403a reach a first threshold Cx, the time counter 406 stops counting and holds the measurement value T1. The held time measurement value T1 is read out to the peripheral circuit at time T2, when a request signal is received from a request circuit (not shown).

[0031] Also, at time T1, a decision circuit 405 is used to compare the photon measurement values ​​of photon counters 403b, 403c, and 403d, which are not connected to a time counter at time T1. As a result of the comparison, the connection of time counter 406 is switched to the photon counter with the highest measurement value. In Figure 5, the connection is switched to photon counter 403b at time T2, and this is represented by drawing the pulses of the time counter after time T2 with the same double line as the pulses of photon counter 403b.

[0032] Thereafter, at time T3 when the count number of photon counter 403b reaches the first threshold, time counter 406 stops counting time and holds the measurement value TR. As with photon counter 403a, the held time measurement value is read out to a peripheral circuit at time T4 when a request signal is received from a request circuit (not shown).

[0033] Similarly, at time T3, the measurement values ​​of photon counters 403c and 403d are compared using decision circuit 405. As a result of the comparison, the time counter is switched to the photon counter with the higher photon measurement value. In Figure 5, the connection of the time counter is switched to photon counter 403c at time T4, and the pulses of the time counter after time T4 are represented by the same dotted line as the pulses of photon counter 403c.

[0034] Then, at time T5 when the count number of photon counter 403c reaches the first threshold, time counter 406 stops counting time and holds the time measurement value TB. The held measurement value is read out to the peripheral circuit at time T6 when a request signal is received.

[0035] Finally, at time T6, the connection destination of the time counter is switched to the remaining photon counter 403d. Similarly, the pulses of the time counter after time T6 are represented by the same double dotted lines as the pulses of photon counter 403d.

[0036] Then, at time T7 when the count number of photon counter 403c reaches the first threshold, time counter 406 stops counting and holds the measurement value TG. The held measurement value is read out to the peripheral circuit at time T8 when a request signal is received. With this configuration, it is possible to measure the time until multiple photon counters are saturated using one time counter 406. In other words, the photoelectric conversion element of the present invention reduces the circuit size by sharing a time counter among multiple pixels. Furthermore, the issues that arise from sharing a time counter among multiple pixels are resolved by switching the connection destination of the time counter midway.

[0037] The time counter stops between time T1 and time T2, between time T3 and time T4, between time T5 and time T6, and between time T7 and time T8. Therefore, it is necessary to restore the measured values ​​for the periods where the time counter stopped. Specifically, as shown in Figure 5, this can be calculated as follows:

[0038] T3=TR+T2-T1 T5=TB+T4-T3+T2-T1 T7 = TG + T6 - T5 + T4 - T3 + T2 - T1 <Spectral sensitivity, Bayer array> 3 and 4 show an example in which one signal processing unit 301 is connected to four pixels 201, but the circuit scale can be reduced if two or more pixels are connected to one signal processing unit 301. Specifically, a photon counter may be provided for each pixel, and a time counter may be shared by multiple pixels.

[0039] However, in order to measure the time until multiple photon counters are saturated using the same time counter, the time until the photon counters are saturated must be different. Therefore, as mentioned above, the spectral sensitivities of the pixels that share the time counter must be different. The greater the difference in spectral sensitivities, the better.

[0040] Furthermore, since the initial connection destination of the time counter needs to be the pixel that saturates first, it is preferable that there is a pixel that is more sensitive than any of the other pixels among the pixels that share the time counter. For example, as shown in Figure 3, there are white, red, green, and blue pixels, and these four pixels can share the time counter.

[0041] <Signal restoration section> The signal restoration unit 306 restores the time measurement value counted by the time counter 406 into a pixel signal representing brightness information of the subject. When the times at which the four pixels 201a, 201b, 201c, and 201d reach the first threshold are T1, T2, T3, and T4, respectively, the pixel signal values ​​C1, C2, C3, and C4 can be calculated using the following equations. C1=K / T1, C2=K / T2 C3=K / T3, C4=K / T4 K is a natural number, and is preferably determined to be a value that prevents C1, C2, C3, and C4 from becoming less than 1 LSB. Specifically, K may be set to the maximum value of the time measurement value.

[0042] <Number of photon measurement comparisons> In the above example, the order of connecting the time counters was determined each time the count number of each photon counter reached the first threshold. Here, the order of connecting the time counters may be determined in advance at the time when the count number of photon counter 403a reaches the first threshold (time T1 in FIG. 5). Reducing the number of times the measured values ​​are compared can reduce power consumption.

[0043] However, particularly when the difference between the measurement values ​​of the multiple photon counters is small, it is preferable to determine the order of connecting the time counters each time the count number of each photon counter reaches the first threshold, because when the difference between the measurement values ​​of the multiple photon counters is small, it may be difficult to accurately predict which photon counter will saturate first due to the influence of photon shot noise.

[0044] Therefore, it is more preferable to determine the number of times the time counters are reconnected based on the difference between the measurement values ​​of multiple photon counters. Specifically, if the difference between the measurement values ​​of the other photon counters is less than a second threshold when the count value of photon counter 403a reaches a first threshold, the order in which the time counters are connected is reconnected multiple times. If the difference is equal to or greater than the second threshold, the order in which the time counters are connected is not reconnected. The reconnection can be performed, for example, by comparing the measurement values ​​of each photon counter a predetermined time after the connection is changed. The second threshold can be determined based on photon shot noise, for example, by the square root of the smallest value of the count values ​​of the other photon counters when the count value of photon counter 403a reaches the first threshold.

[0045] <Outputs photon measurement value after a certain time> The determination circuit 405 may be configured to stop the time counter 406 and output the photon count value at that time if the count value of the photon counter connected to the time counter does not reach the first threshold value even after a predetermined time (first predetermined time) has elapsed. This configuration can solve the problem of the frame rate slowing down when the brightness of the subject is very low. The predetermined time is preferably set to the maximum value of the time count.

[0046] Alternatively, the counting of the other photon counters may be stopped at the time when the measured value of the photon counter reaches the first threshold (for example, at any of times T1, T3, and T5 in FIG. 5). The following description will be given taking the case where the counting is stopped at time T1 as an example.

[0047] If time T1 is sufficiently close to the maximum time count value (second threshold), even if counting in the photon counter continues after time T1, the maximum time count value will be reached immediately. Therefore, it is preferable to omit switching the time counter and stop counting at time T1. For example, if time T1 is more than half the maximum time count value, it is preferable to stop photon counting in photon counters 403b, 403c, and 403d at time T1. In other words, if the difference between the time measurement value at the first connection destination of the time counter and the time counter threshold value is equal to or less than a predetermined value, the request circuit outputs the measurement value of the photon counter to which no time counter is connected.

[0048] If the measurement values ​​of photon counters 403b, 403c, and 403d are all sufficiently large (greater than or equal to a predetermined value) at time T1, it is determined that a desired SNR has been obtained. It is preferable to stop counting at time T1. For example, if the measurement values ​​of photon counters 403b, 403c, and 403d are all greater than or equal to half of the first threshold at time T1, it is preferable to stop photon counting by photon counters 403b, 403c, and 403d at time T1. It is also possible to check the measurement values ​​of each photon counter based on a specific timing or period, not limited to time T1, and determine whether to continue measurement. In other words, if the measurement values ​​of each photon counter at a first point in time or a specific timing are all greater than or equal to a predetermined value, the request circuit outputs the measurement value of each photon counter.

[0049] If, at time T1, the difference between the measurement values ​​of photon counters 403b, 403c, and 403d is very small and it is estimated that the measurement values ​​of photon counters 403b, 403c, and 403d will reach the first threshold at approximately the same time, it is preferable to stop counting at time T1. This is because, considering the time it takes to switch between time counts and the time it takes to read the time measurement values ​​to the peripheral circuit after receiving a request signal, it is difficult to accurately measure the timing at which the measurement values ​​of all photon counters reach the first threshold. Specifically, it is preferable to stop counting if it is estimated that the minimum difference between the times it takes for the measurement values ​​of photon counters 403b, 403c, and 403d to reach the first threshold is smaller than the sum of the time it takes to switch between time counts and the time it takes to read the time measurement values ​​to the peripheral circuit after receiving a request signal.

[0050] If, at time T1, the difference between the measurement values ​​of photon counters 403b, 403c, and 403d is very large, resulting in significantly different timings at which the measurement values ​​of photon counters 403b, 403c, and 403d reach the first threshold, it is preferable to stop counting at time T1 and output the measurement values ​​of each photon counter. This is because a large difference in accumulation time between each photon counter makes it more likely that motion blur will occur between colors. Specifically, it is preferable to stop counting if the ratio of the maximum time it takes for the measurement values ​​of photon counters 403b, 403c, and 403d to reach the first threshold to the minimum time exceeds 256.

[0051] Note that photon counting may be performed multiple times if the time at which all photon counters reach the first threshold is sufficiently smaller than the maximum time count. For example, if time T7 in FIG. 5 is less than half the maximum time count, photon counting can be performed twice before the maximum time count is reached. By performing photon counting multiple times during one frame and averaging the times at which the photon counters reach the first threshold, the accuracy of the time counter measurement values ​​is improved, thereby improving the accuracy of the brightness information for each pixel.

[0052] <Imaging device> FIG. 6 is a block diagram of an imaging device 500 using the photoelectric conversion device 100.

[0053] The imaging device 500 is, for example, a digital camera, and is an imaging device that includes the photoelectric conversion device 100, and includes a lens 501, an image processing unit 502, an optical control unit 503, a memory unit 504, and a wireless I / F (Interface) unit 505 as a communication unit.

[0054] The lens 501 forms an optical image of a subject and transmits the formed optical image to the imaging surface of the photoelectric conversion device 100, which is equipped with a focus lens, a zoom lens, an aperture, and the like. The photoelectric conversion device 100 captures the optical image formed by the lens 501. Signals read from the photoelectric conversion device 100 are output to an image processing unit 502. The image processing unit 502 performs processing on the signals output from the photoelectric conversion device 100, such as signal rearrangement, defective pixel correction, noise reduction, color conversion, white balance correction, gamma correction, and data compression, to generate an image. The image processing unit 502 includes a CPU as a computer and functions as a control unit that controls the operation of each component of the entire imaging device 500 based on a computer program stored in a memory as a storage medium. The image processing unit 502 also controls the pulse generation circuit 407 to control the sensitivity change of the pixel 201 from when the photon counter 403 starts measurement until the measurement value of the photon counter 403 reaches a first threshold Cx. The optical control unit 503 controls the focus lens, zoom lens, aperture, and the like provided in the lens 501. A recording medium (not shown) is attached to the recording unit 504, and the image output from the image processing unit is stored on the storage medium. For example, a memory card or the like is used as such a recording medium. Note that a hard disk or the like may also be used as the recording medium. A wireless I / F (Interface) unit 505 serving as a communication unit outputs the image signal generated by the image processing unit 502 to the outside of the imaging device 500. Reference numeral 506 denotes a network, which is composed of a plurality of routers, switches, cables, and the like that comply with communication standards such as Ethernet (registered trademark), and a client controls the imaging device 500 via the network 506.

[0055] <Flowchart> 7 is a flowchart illustrating the operation performed by the photoelectric conversion device. In the following description, each process (step) is denoted by adding an S to the beginning, and the process (step) is notated. In S700, switch 404 connects time counter 406 to photon counter 403a, which is the initial connection destination among multiple photon counters.

[0056] In S701, it is determined whether the measurement value of photon counter 403a has reached the first threshold. If the measurement value of photons has not reached the first threshold, the time counter remains initially connected and continues counting photons and time. If the measurement value of photons has reached the first threshold, the process proceeds to S702, where the measurement values ​​of photon counters 403b, 403c, and 403d are compared. In S703, the time counter is connected to the photon counter with the largest measurement value among photon counters 403b, 403c, and 403d. Note that if the connection order is predetermined, the comparison process of S703 is skipped, and the next photon counter to be connected is determined based on the predetermined order.

[0057] In S704, it is determined whether the photon measurement value of the photon counter to which the time counter is connected after the switch has reached the first threshold. If the photon measurement value has not reached the first threshold, photon counting and time counting continue, and if the photon measurement value has reached the first threshold, the process proceeds to S705 and the connection of the time counter is switched. By repeating S704 and S705, the time until the measurement values ​​of all photon counters reach the first threshold is measured. In S706, it is determined whether an end instruction has been received, and if an end instruction has not been received, the process returns to S701 and continues operation.

[0058] <Other embodiments> In the embodiment, the imaging device is described as being a digital camera, but the imaging device also includes electronic devices with imaging capabilities, such as digital movie cameras, smartphones with cameras, tablet computers with cameras, in-vehicle cameras, drone cameras, cameras mounted on robots, and network cameras.

[0059] The present invention has been described in detail above based on its preferred embodiments, but the present invention is not limited to the above embodiments, and various modifications are possible based on the gist of the present invention, and these modifications are not excluded from the scope of the present invention.

[0060] Note that a computer program that realizes part or all of the control in the embodiments and the functions of the above-described embodiments may be supplied to a photoelectric conversion device, an imaging device, or the like via a network or various storage media. Then, a computer (or a CPU, MPU, or the like) in the photoelectric conversion device, imaging device, or the like may read and execute the program. In this case, the program and the storage medium storing the program constitute the present invention. [Explanation of symbols]

[0061] 100 Photoelectric conversion device 500 Imaging device 501 Lens 502 Image processing unit 503 Optical control unit 504 Storage section 505 I / F section

Claims

1. A photoelectric conversion device having pixels each including a photoelectric conversion unit that outputs a signal in response to an incident photon, a first measuring means for measuring the number of photons incident on the pixel; a second measuring means for measuring the time from when the first measuring means starts the measurement until the measured value of the first measuring means reaches a first threshold value; the second measuring means is connected to any one of the plurality of first measuring means, a selection means for connecting, to the second measurement means, a first measurement means having the highest measurement value of the number of photons among the plurality of first measurement means not connected to the second measurement means when the first measurement means connected to the second measurement means reaches the first threshold, The photoelectric conversion device is characterized in that the second measurement means outputs a measurement value of the time.

2. the second measuring means is arranged for each partial pixel region made up of a plurality of the pixels having different spectral sensitivities, 2. The photoelectric conversion device according to claim 1, wherein the first measurement means is disposed in each of the plurality of pixels that form the partial pixel region.

3. 3. The photoelectric conversion device according to claim 2, wherein the selection means determines the first measurement means to which the second measurement means is connected based on a measurement value of the photons measured by the first measurement means arranged in each of the plurality of pixels included in the partial pixel region.

4. 4. The photoelectric conversion device according to claim 2, wherein the selection means, in an initial state, connects the second measurement means to the first measurement means corresponding to the pixel with the highest sensitivity among the pixels included in the partial pixel area.

5. A photoelectric conversion device according to any one of claims 1 to 4, characterized in that, when the measurement value of the time by the second measurement means reaches a specific value, if all of the measurement values ​​of the multiple first measurement means are equal to or greater than a predetermined value, the measurement value of each first measurement means is output.

6. 3. The photoelectric conversion device according to claim 2, wherein the partial pixel region has at least red, blue, green, and white pixels as the pixels.

7. 7. The photoelectric conversion device according to claim 1, wherein the second measurement means holds a measurement value of the time from when the measurement value of the first measurement means reaches the first threshold value until when a request signal is received.

8. 8. The photoelectric conversion device according to claim 7, wherein the first measurement means to be connected to the second measurement means is changed by the selection means after the request signal is received.

9. 9. The photoelectric conversion device according to claim 1, further comprising a signal restoration unit that restores a pixel signal based on the time measurement value of the second measurement unit.

10. 10. The photoelectric conversion device according to claim 9, wherein the signal restoration means restores the pixel signal by further using a time during which the measured value of the time by the second measurement means is held.

11. 11. The photoelectric conversion device according to claim 1, wherein the second measurement means measures the time from when the first measurement means starts measurement until when the first threshold value is reached a plurality of times during one frame.

12. 12. The photoelectric conversion device according to claim 1, wherein the photoelectric conversion unit includes an avalanche photodiode for detecting incident photons.

13. An imaging device comprising the photoelectric conversion device according to claim 1 .

14. a pixel including a photoelectric conversion unit that outputs a signal in response to incident photons; and a first measurement means that measures the number of the photons that have entered the pixel; a second measurement means configured to measure a time from when the first measurement means starts the measurement until when the measurement value of the first measurement means reaches a first threshold value, wherein the second measurement means is connected to any one of a plurality of the first measurement means, a selection step of connecting, to the second measurement means, a first measurement means having the highest measurement value of the number of photons among the plurality of first measurement means not connected to the second measurement means when the first measurement means connected to the second measurement means reaches the first threshold; and an output step of outputting the measurement value of the second measurement means.

15. A computer program for controlling each unit of the photoelectric conversion device according to any one of claims 1 to 12 or the imaging device according to claim 13 by a computer.

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