Actuator and method for manufacturing the actuator

Abstract

To provide an actuator having constitution in which a magnetic drive mechanism revolving, around a fixed body, a movable body holding an optical element, and in which even when the movable body can be held at a predetermined position in the direction of revolving movement of the movable body around the fixed body when the drive coil of the magnetic drive mechanism is in an unpowered state, and which enables reduction of the cost of the actuator even the actuator has the aforementioned constitution.SOLUTION: In an actuator 1, a magnetic attraction force for holding a movable body 3 at a given position in the direction of rotational movement of the movable body when a drive coil 16 is an unpowered state is generated between a magnetic plate 8 which is formed in a tabular shape and a holding magnet 7. A magnetic plate arrangement hole 4e is formed in a fixed body 4, in which hole the magnetic plate 8 is arranged and fixed in place, the face of the magnetic plate arrangement hole 4e on the holding magnet 7 side constituting a contact face 4f that the magnetic plate 8 is brought into contact by the magnetic attraction force generated between the magnetic plate 8 and the holding magnet 7. A concave portion 4g which is recessed toward the holding magnet 7 side is formed in the contact face 4f.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to an actuator for rotating an optical element, and to a method for manufacturing such an actuator. [Background technology]

[0002] Conventionally, there is known an image shifting device for vibrating a glass plate (optical glass) through which projection light passes (see, for example, Patent Document 1). The image shifting device described in Patent Document 1 is mounted on a projector. This image shifting device includes a glass frame to which the glass plate is fixed, a base that rotatably holds the glass frame, and a drive unit that rotates the glass frame relative to the base. The drive unit includes a drive magnet fixed to the glass frame and a drive coil that is disposed opposite the drive magnet and fixed to the base.

[0003] Furthermore, the image shifting device described in Patent Document 1 includes a braking unit for holding the glass frame at a fixed position in the direction of rotation of the glass frame relative to the base (i.e., for holding the glass frame at a fixed posture relative to the base) when the driving coil is in a non-energized state. The braking unit includes one frame-side braking magnet fixed to the glass frame and two base-side braking magnets fixed to the base. The frame-side braking magnet is sandwiched between two base-side braking magnets. When the driving coil is in a non-energized state, the glass frame is held at a fixed position in the direction of rotation of the glass frame relative to the base by the magnetic repulsive force generated between the frame-side braking magnet and the two base-side braking magnets.

[0004] Furthermore, in the image shifting device described in Patent Document 1, the position of the base-side braking magnet can be adjusted using a set screw, making it possible to adjust the distance between the frame-side braking magnet and the base-side braking magnet. That is, in this image shifting device, the set screw makes it possible to adjust the magnetic repulsive force generated between the frame-side braking magnet and the base-side braking magnet. Therefore, in this image shifting device, it is possible to adjust the position of the glass frame in the rotation direction of the glass frame relative to the base when the drive coil is in a non-energized state. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2019-215466 Summary of the Invention [Problem to be solved by the invention]

[0006] The image shifting device described in Patent Document 1 is equipped with a braking unit, which enables the image shifting device to hold the glass frame in a fixed position in the direction of rotation of the glass frame relative to the base when the drive coil is in a non-energized state. However, this image shifting device requires three braking magnets to hold the glass frame in a fixed position in the direction of rotation of the glass frame relative to the base when the drive coil is in a non-energized state, which increases the cost of the image shifting device.

[0007] Therefore, an object of the present invention is to provide an actuator that includes a movable body that holds an optical element, a fixed body that rotatably holds the movable body, and a magnetic drive mechanism that rotates the movable body relative to the fixed body, which can reduce costs even when the movable body can be held at a fixed position in the rotation direction of the movable body relative to the fixed body when the drive coil of the magnetic drive mechanism is in a non-energized state. Another object of the present invention is to provide a method for manufacturing such an actuator. [Means for solving the problem]

[0008] In order to solve the above problems, the actuator of the present invention includes a movable body that holds an optical element, a fixed body that is formed in a frame shape and arranged on the inner periphery of the movable body and rotatably holds the movable body, a magnetic drive mechanism that rotates the movable body in a direction in which the movable body is tilted relative to the fixed body, and a holding magnet and a magnetic plate that hold the movable body at a fixed position relative to the fixed body in a movable body rotation direction that is the rotation direction of the movable body relative to the fixed body, the magnetic drive mechanism includes a drive magnet and a drive coil that is arranged opposite the drive magnet, the holding magnet is fixed to either the movable body or the fixed body, the magnetic plate is formed in a flat plate shape and is arranged on one side of the holding magnet in the thickness direction of the magnetic plate, the other of the movable body and the fixed body is made of a non-magnetic material, the other of the movable body and the fixed body has a magnetic plate arrangement hole in which the magnetic plate is arranged and fixed, and the holding magnet is polarized in a first direction that is perpendicular to the thickness direction of the magnetic plate. The magnetic plate arrangement hole is formed by two magnetized portions, and when the drive coil is in a non-energized state, a magnetic attraction force is generated between the magnetic plate and the holding magnet to hold the movable body at a fixed position in the direction of rotation of the movable body, and the position of the magnetic plate in the first direction is determined by the position of the magnetic plate in the direction of rotation of the movable body when the drive coil is in a non-energized state. If one side in the first direction is defined as the first side in the first direction and the other side in the first direction is defined as the other side in the first direction, the magnetic plate arrangement hole opens at least at the one end in the first direction of either the movable body or the fixed body, and the surface of the magnetic plate arrangement hole facing the holding magnet is a contact surface with which the magnetic plate comes into contact due to the magnetic attraction force generated between the magnetic plate and the holding magnet, and a recess is formed in the contact surface that is recessed toward the holding magnet side, and the recess is formed in a straight line from the one end in the first direction of the magnetic plate arrangement hole toward the other end in the first direction, and is formed at least to the one end in the first direction of the magnetic plate.

[0009] The actuator of the present invention includes a holding magnet and a magnetic plate for holding the movable body at a fixed position relative to the fixed body in the movable body rotation direction, which is the direction in which the movable body rotates relative to the fixed body. A magnetic attraction force is generated between the flat magnetic plate and the holding magnet to hold the movable body at a fixed position in the movable body rotation direction when the drive coil is de-energized. Therefore, in the present invention, the flat magnetic plate and the holding magnet enable the movable body to be held at a fixed position in the movable body rotation direction when the drive coil is de-energized. Therefore, in the present invention, even though the movable body can be held at a fixed position in the movable body rotation direction when the drive coil is de-energized, the cost of the actuator can be reduced compared to the image shifting device described in Patent Document 1, which has three braking magnets.

[0010] In addition, in the present invention, the position of the movable body in the direction of rotation of the movable body when the drive coil is in a non-energized state is determined by the position of the magnetic plate in a first direction perpendicular to the thickness direction of the magnetic plate.Therefore, by adjusting the position of the magnetic plate in the first direction during manufacture of the actuator, it is possible to adjust the position of the movable body in the direction of rotation of the movable body when the drive coil is in a non-energized state.

[0011] In addition, in the present invention, the magnetic plate arrangement hole in which the magnetic plate is arranged and fixed is open on at least one side in the first direction of either the movable body or the fixed body, so that when manufacturing the actuator, it is possible to adjust the position of the magnetic plate in the first direction by inserting a rod-shaped jig into the magnetic plate arrangement hole from one side in the first direction of the magnetic plate arrangement hole, and bringing the tip surface of the jig into contact with the end surface on one side in the first direction of the magnetic plate arranged in the magnetic plate arrangement hole before fixing, thereby moving the magnetic plate to the other side in the first direction.

[0012] Furthermore, in the present invention, the surface of the magnetic plate arrangement hole facing the holding magnet serves as a contact surface with which the magnetic plate comes into contact due to the magnetic attraction force generated between the magnetic plate and the holding magnet, and a recess is formed on the contact surface that is recessed toward the holding magnet. Also, in the present invention, the recess is formed linearly from one end of the magnetic plate arrangement hole in the first direction toward the other end in the first direction, and is formed at least to one end of the magnetic plate in the first direction.

[0013] Therefore, in the present invention, even if the thickness of the magnetic plate is very thin or the edge of the tip surface of the rod-shaped jig is chamfered, it is possible to reliably bring the tip surface of the jig, a part of which is placed in the recess, into contact with the end surface of the magnetic plate on one side in the first direction during the manufacture of the actuator. Therefore, in the present invention, even if the thickness of the magnetic plate is very thin or the edge of the tip surface of the rod-shaped jig is chamfered, it is possible to easily adjust the position of the magnetic plate in the first direction using the jig during the manufacture of the actuator.

[0014] In the present invention, it is preferable that the recesses are formed at multiple locations with gaps between them in a second direction perpendicular to the thickness direction of the magnetic plate and the first direction. With this configuration, during the manufacture of the actuator, it is easy to move the magnetic plate toward the other side in the first direction using multiple rod-shaped jigs arranged with gaps between them in the second direction. Therefore, during the manufacture of the actuator, it is possible to more easily adjust the position of the magnetic plate in the first direction.

[0015] In the present invention, it is preferable that the magnetic plate arrangement hole is a through hole that penetrates the other of the movable body and the fixed body in the first direction, and the recess is formed over the entire area of ​​the magnetic plate arrangement hole in the first direction. With this configuration, when the tip surface of the jig is brought into contact with the end surface of the magnetic plate on one side in the first direction to move the magnetic plate toward the other side in the first direction, even if the magnetic plate is moved too far toward the other side in the first direction, it is possible to insert the jig into the magnetic plate arrangement hole from the other side in the first direction of the magnetic plate arrangement hole, and reliably bring the tip surface of the jig, which is partly disposed in the recess, into contact with the end surface of the magnetic plate on the other side in the first direction to return the magnetic plate to the one side in the first direction.

[0016] In the present invention, if one side of the magnetic plate in the thickness direction is defined as the one side in the thickness direction and the other side of the magnetic plate in the thickness direction is defined as the other side in the thickness direction, the surface on the other side in the thickness direction of the magnetic plate arrangement hole serves as a contact surface, and a second recess is formed on the surface on the one side in the thickness direction of the magnetic plate arrangement hole, recessed toward the one side in the thickness direction, and the second recess is preferably formed at the same position as the recess in a second direction perpendicular to the thickness direction of the magnetic plate and the first direction, and in the same range as the recess in the first direction. With this configuration, even if the width of the magnetic plate arrangement hole in the thickness direction of the magnetic plate is narrow, it is possible to insert a jig into the magnetic plate arrangement hole and move the magnetic plate toward the one side in the first direction by utilizing the recess and the second recess.

[0017] In the present invention, for example, the actuator includes a flat second magnetic plate for holding the movable body at a fixed position relative to the fixed body in the direction of rotation of the movable body, the drive magnet and the holding magnet are fixed to the movable body, the drive coil, the magnetic plate, and the second magnetic plate are fixed to the fixed body, the drive magnet is composed of two magnetized portions polarized in a first direction, a magnetic attraction force for holding the movable body at a fixed position in the direction of rotation of the movable body is generated between the drive magnet and the second magnetic plate when the drive coil is in a non-energized state, and a positioning portion for positioning the second magnetic plate in the first direction is formed on the fixed body. In this case, since the position of the second magnetic plate in the first direction is not adjusted, the manufacturing process of the actuator can be simplified.

[0018] The actuator of the present invention is manufactured by an actuator manufacturing method that includes, for example, a magnetic plate position adjustment step in which a rod-shaped jig, a portion of which is placed in a recess, is inserted into a magnetic plate arrangement hole from one side in a first direction, and the tip surface of the jig is brought into contact with the end surface on one side in the first direction of the magnetic plate that is placed in the magnetic plate arrangement hole before fixing, thereby moving the magnetic plate to the other side in the first direction, thereby adjusting the position of the magnetic plate in the first direction, and a magnetic plate fixing step in which the magnetic plate is fixed in the magnetic plate arrangement hole after the magnetic plate position adjustment step. [Effects of the Invention]

[0019] As described above, in the present invention, in an actuator comprising a movable body that holds an optical element, a fixed body that rotatably holds the movable body, and a magnetic drive mechanism that rotates the movable body relative to the fixed body, it is possible to reduce the cost of the actuator even if it is possible to hold the movable body at a fixed position in the rotation direction of the movable body relative to the fixed body when the drive coil of the magnetic drive mechanism is in a non-energized state. [Brief explanation of the drawings]

[0020] [Figure 1] 1 is a perspective view of an actuator according to an embodiment of the present invention; [Figure 2] FIG. 2 is a plan view of the actuator shown in FIG. [Figure 3] FIG. 2 is an exploded perspective view of the actuator shown in FIG. [Figure 4] 3A is a cross-sectional view of the EE section of FIG. 2, and FIG. 3B is a cross-sectional view of the FF section of FIG. [Figure 5] FIG. 3 is an enlarged view of part G in FIG. 2. [Figure 6] 5A is a diagram for explaining a method for adjusting the vertical position of the magnetic plate shown in FIG. 4(B). FIG. [Figure 7] 10A and 10B are diagrams illustrating the configuration of a magnetic plate arrangement hole according to another embodiment of the present invention. [Figure 8] 10A and 10B are diagrams illustrating the configuration of a magnetic plate arrangement hole according to another embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0021] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0022] (Overall configuration of the actuator) Fig. 1 is a perspective view of an actuator 1 according to an embodiment of the present invention. Fig. 2 is a plan view of the actuator 1 shown in Fig. 1. Fig. 3 is an exploded perspective view of the actuator 1 shown in Fig. 1. Fig. 4(A) is a cross-sectional view of the EE section of Fig. 2, and Fig. 4(B) is a cross-sectional view of the FF section of Fig. 2.

[0023] In the following description, as shown in Fig. 1 etc., three mutually orthogonal directions are referred to as the X direction, Y direction, and Z direction, with the X direction being the left-right direction, the Y direction being the front-to-back direction, and the Z direction being the up-to-down direction. Furthermore, the X1 direction side in Fig. 1 etc., which is one side of the left-to-right direction, is referred to as the "right" side, the opposite X2 direction side in Fig. 1 etc., is referred to as the "left" side, the Y1 direction side in Fig. 1 etc., which is one side of the front-to-back direction, is referred to as the "front" side, the opposite Y2 direction side in Fig. 1 etc., is referred to as the "rear" side, the Z1 direction side in Fig. 1 etc., which is one side of the up-to-down direction, is referred to as the "up" side, and the opposite Z2 direction side in Fig. 1 etc., is referred to as the "down" side.

[0024] The actuator 1 of this embodiment is a device for vibrating an optical element, an optical glass 2, and is mounted on a projector for use. The optical glass 2 is a light-transmitting glass plate formed in a square flat plate shape. The optical glass 2 constitutes part of the projection optical system of the projector. In order to improve the image quality of the image projected by the projector, the actuator 1 vibrates the optical glass 2 by a certain angle at a predetermined frequency, periodically changing the orientation of the optical glass 2. For example, the actuator 1 vibrates the optical glass 2 at 60 Hz.

[0025] The actuator 1 is formed as a flat rectangular parallelepiped with a thin thickness in the vertical direction as a whole. The actuator 1 includes a movable body 3 that holds optical glass 2 and a fixed body 4 that rotatably holds the movable body 3. The movable body 3 and fixed body 4 are formed in a frame shape. The optical glass 2 is located on the inner periphery of the movable body 3. The movable body 3 is located on the inner periphery of the fixed body 4. The actuator 1 also includes a magnetic drive mechanism 5 that rotates the movable body 3 in a direction that tilts the movable body 3 relative to the fixed body 4, thereby vibrating the optical glass 2, a fulcrum portion 6 that serves as a fulcrum for the rotation of the movable body 3 relative to the fixed body 4, and a holding magnet 7 and magnetic plates 8 and 9 that hold the movable body 3 in a fixed position relative to the fixed body 4 in the movable body rotation direction, which is the direction in which the movable body 3 rotates relative to the fixed body 4. The magnetic plate 9 in this embodiment is a second magnetic plate.

[0026] In this embodiment, when no current is supplied to a drive coil 16 (described below) that constitutes part of the magnetic drive mechanism 5 (i.e., when the drive coil 16 is in a non-energized state), the movable body 3 is disposed at a predetermined reference position relative to the fixed body 4 in the direction in which the movable body rotates. When the movable body 3 is disposed at the reference position relative to the fixed body 4 in the direction in which the movable body rotates, the thickness direction of the optical glass 2 coincides with the up-down direction.

[0027] Furthermore, when the movable body 3 is disposed at a reference position relative to the fixed body 4 in the movable body rotation direction, in the actuator 1 mounted on the projector, the thickness direction of the optical glass 2 coincides with the optical axis direction of the projection optical system of the projector, and the optical axis of the projection optical system of the projector passes through the center of the optical glass 2. Note that the rotation angle of the movable body 3 relative to the fixed body 4 when the optical glass 2 vibrates is very small, for example, less than 0.5°. Therefore, regardless of whether the optical glass 2 is vibrating or not, the thickness direction of the optical glass 2 substantially coincides with the up-down direction.

[0028] The movable body 3 is rotatable relative to the fixed body 4 in a direction inclined relative to the fixed body 4 when viewed from the outer periphery of the fixed body 4. The movable body 3 is rotatable relative to the fixed body 4 with a first orthogonal direction (direction V in FIG. 2) perpendicular to the thickness direction of the optical glass 2 as the axial direction of the rotation. That is, the movable body 3 is rotatable relative to the fixed body 4 around an axis L1 (see FIG. 2) whose axial direction is the first orthogonal direction. The first orthogonal direction is perpendicular to the up-down direction. When viewed from above, the first orthogonal direction is offset 45° clockwise in FIG. 2 from the front-to-back direction. When viewed from the thickness direction of the optical glass 2, the axis L1 passes through the center of the optical glass 2. The fulcrums 6 are located on both ends of the movable body 3 in the first orthogonal direction.

[0029] The movable body 3 is a glass holder that holds the optical glass 2. The movable body 3 is made of a non-magnetic material. The movable body 3 is also made of a resin material. The movable body 3 is formed in a frame shape as described above. Specifically, the movable body 3 is formed in a square or rectangular frame shape. When the movable body 3 is disposed at a reference position relative to the fixed body 4 in the movable body rotation direction, two of the four sides that make up the outer peripheral surface of the movable body 3, which has a square or rectangular outer shape, are parallel to the left-right direction, and the remaining two sides are parallel to the front-rear direction.

[0030] The movable body 3 is formed with a magnet arrangement recess 3a in which a drive magnet 15 (described below) constituting part of the magnetic drive mechanism 5 is arranged, and a magnet arrangement recess 3b in which a holding magnet 7 is arranged. The magnet arrangement recess 3a is recessed from the right end of the movable body 3 toward the left. The magnet arrangement recess 3b is recessed from the left end of the movable body 3 toward the right. The magnet arrangement recesses 3a and 3b are formed over the entire movable body 3 in the thickness direction of the optical glass 2. Furthermore, as shown in FIG. 3, the movable body 3 is formed with protrusions 3c that protrude toward both sides in the first orthogonal direction. The protrusions 3c are formed in a cylindrical shape. The axial direction of the cylindrical protrusions 3c coincides with the first orthogonal direction.

[0031] As described above, the optical glass 2 is disposed on the inner periphery of the movable body 3. The optical glass 2 is fixed to the movable body 3. When the movable body 3 is disposed at a reference position relative to the fixed body 4 in the direction of rotation of the movable body, two of the four sides of the outer periphery of the square-shaped optical glass 2 are parallel to the left-right direction, and the remaining two sides are parallel to the front-rear direction.

[0032] The fixed body 4 is made of a non-magnetic material. The fixed body 4 is also made of a resin material. The fixed body 4 is formed in a frame shape as described above. Specifically, the fixed body 4 is formed in a square or rectangular frame shape. Two of the four sides constituting the outer surface of the fixed body 4, which has a square or rectangular outer shape, are parallel to the left-right direction, and the remaining two sides are parallel to the front-rear direction. The fixed body 4 is formed with a coil arrangement recess 4a in which a drive coil 16 (described below) constituting part of the magnetic drive mechanism 5 is arranged, and a magnetic plate arrangement recess 4b in which a magnetic plate 9 is arranged.

[0033] The coil arrangement recess 4a and the magnetic plate arrangement recess 4b are formed on the right side of the fixed body 4. The coil arrangement recess 4a is recessed from the left end of the right side of the fixed body 4 towards the right side. The coil arrangement recess 4a is formed over the entire vertical area of ​​the fixed body 4. The magnetic plate arrangement recess 4b is formed to the right of the coil arrangement recess 4a. The magnetic plate arrangement recess 4b is recessed to the right of the coil arrangement recess 4a. The magnetic plate arrangement recess 4b is not formed over the entire vertical area of ​​the fixed body 4, and a magnetic plate mounting portion 4c on which the magnetic plate 9 is placed is formed at the lower end of the right side of the fixed body 4. The upper surface of the magnetic plate mounting portion 4c is a flat surface perpendicular to the vertical direction.

[0034] The fixed body 4 is also formed with a spring arrangement portion 4d in which a leaf spring 13 (described later) constituting part of the fulcrum portion 6 is arranged, and a magnetic plate arrangement hole 4e in which a magnetic plate 8 is arranged and fixed. The spring arrangement portion 4d is formed at two corners on one diagonal of the fixed body 4, which is formed in a square frame shape. Specifically, the spring arrangement portion 4d is formed at a corner at the right rear end and a corner at the left front end of the fixed body 4. The magnetic plate arrangement hole 4e is formed on the left side of the fixed body 4. The magnetic plate arrangement hole 4e is a through hole that penetrates the fixed body 4 in the up-down direction. The magnetic plate arrangement hole 4e is also a rectangular hole that is elongated in the front-to-rear direction. The specific configuration of the magnetic plate arrangement hole 4e will be described later.

[0035] The fulcrum portion 6 includes a spherically formed sphere (ball) 11, a sphere holding member 12 for holding the sphere 11, and a leaf spring 13 having a concavely curved contact surface 13a (see FIG. 3) that contacts a portion of the sphere 11 with a predetermined contact pressure. The sphere 11 is made of ceramics. The sphere holding member 12 is made of a metal material. The sphere holding member 12 is formed in the shape of a cylinder with a bottom, having a cylindrical portion formed in a cylindrical shape and a bottom portion connected to one end of the cylindrical portion. The inner diameter of the sphere holding member 12 is larger than the outer diameter of the sphere 11.

[0036] The sphere holding member 12 is fixed to the protrusion 3c of the movable body 3. The protrusion 3c is lightly press-fitted into the inner peripheral side of the sphere holding member 12 from the inside in the first orthogonal direction. The sphere holding member 12 is fixed to the protrusion 3c with an adhesive. The sphere 11 is arranged on the inner peripheral side of the sphere holding member 12. The bottom of the sphere holding member 12 is arranged further outward in the first orthogonal direction than the tip surface of the protrusion 3c. A gap is formed between the tip surface of the protrusion 3c and the bottom of the sphere holding member 12 to place the sphere 11.

[0037] A through hole is formed in the bottom of the sphere holding member 12 to allow a portion of the sphere 11, which is arranged on the inner periphery of the sphere holding member 12, to be positioned outside the sphere holding member 12. The inner diameter of this through hole is smaller than the outer diameter of the sphere 11. The sphere 11 contacts the bottom surface of a recess formed on the tip surface of the protrusion 3c and also contacts the edge of the through hole. A portion of the sphere 11 is positioned outside the bottom of the sphere holding member 12 in the first orthogonal direction and is positioned outside the sphere holding member 12. The sphere 11 is held by the movable body 3 by the protrusion 3c and the sphere holding member 12.

[0038] The leaf springs 13 are formed by bending a metal plate, such as a stainless steel plate, having spring properties into a predetermined shape. The leaf springs 13 are formed in a U-shape. The leaf springs 13 are arranged in the spring arrangement section 4d so that the leaf springs 13 have a U-shape when viewed from the top-bottom direction. When viewed in the thickness direction of the optical glass 2, the leaf spring 13 arranged at the right rear end and the leaf spring 13 arranged at the left front end are arranged point-symmetrically with respect to the center of the optical glass 2. The leaf springs 13 are fixed to the spring arrangement section 4d in a positioned state. The contact surface 13a of the leaf spring 13 contacts a portion of the sphere 11 arranged outside the sphere holding member 12 from the outside in the first orthogonal direction with a predetermined contact pressure. The leaf springs 13 bias the sphere 11 inward in the first orthogonal direction.

[0039] The magnetic drive mechanism 5 includes a drive magnet 15 and a drive coil 16 arranged opposite the drive magnet 15. The drive magnet 15 is fixed to the movable body 3. Specifically, the drive magnet 15 is arranged in the magnet arrangement recess 3a and fixed to the right surface side of the movable body 3. The drive magnet 15 is formed in the shape of a rectangular parallelepiped that is elongated in the front-rear direction. The drive magnet 15 is composed of two magnetized portions 15a that are polarized in the up-down direction. More specifically, the drive magnet 15 is composed of two magnetized portions 15a that are polarized in the thickness direction of the optical glass 2.

[0040] The drive coil 16 is, for example, an air-core coil formed by winding a conductive wire around an air core. The drive coil 16 is mounted on a flexible printed circuit board 17. The drive coil 16 is disposed in the coil arrangement recess 4a. The flexible printed circuit board 17 is fixed to the fixed body 4. The drive coil 16 is fixed to the fixed body 4 via the flexible printed circuit board 17. The drive magnet 15 and the drive coil 16 face each other in the left-right direction.

[0041] The magnetic drive mechanism 5 rotates the movable body 3 relative to the fixed body 4 with the first orthogonal direction as the axis of rotation. A Hall sensor (not shown) for detecting the rotational position of the movable body 3 relative to the fixed body 4 is mounted on the flexible printed circuit board 17. The Hall sensor is disposed opposite the drive magnet 15. A current is supplied to the drive coil 16 based on the detection result of the Hall sensor.

[0042] The holding magnet 7 is fixed to the movable body 3. Specifically, the holding magnet 7 is arranged in the magnet arrangement recess 3b and is fixed to the left side of the movable body 3. The holding magnet 7 is formed in the shape of a rectangular parallelepiped that is elongated in the front-to-rear direction. The holding magnet 7 is configured similarly to the drive magnet 15, and is composed of two magnetized portions 7a that are polarized in the up-down direction. More specifically, the holding magnet 7 is composed of two magnetized portions 7a that are polarized in the thickness direction of the optical glass 2.

[0043] 2, the center of the holding magnet 7 in the front-rear direction and the center of the drive magnet 15 in the front-rear direction are offset in the front-rear direction. Specifically, the center of the holding magnet 7 in the front-rear direction is located rearward of the center of the drive magnet 15 in the front-rear direction. In this embodiment, when viewed from the thickness direction of the optical glass 2, the holding magnet 7 and the drive magnet 15 are arranged point-symmetrically with respect to the center of the movable body 3. When viewed from the thickness direction of the optical glass 2, the holding magnet 7 and the drive magnet 15 are also arranged point-symmetrically with respect to the center of the optical glass 2.

[0044] The magnetic plate 8 is made of a magnetic metal material. The magnetic plate 8 is formed in a flat plate shape. Specifically, the magnetic plate 8 is formed in a long, narrow rectangular flat plate shape. The magnetic plate 8 is thin. For example, the thickness of the magnetic plate 8 is about 0.1 to 0.2 (mm), which is very thin. The magnetic plate 8 is arranged so that the thickness direction of the magnetic plate 8 coincides with the left-right direction. In other words, the left-right direction (X direction) in this embodiment coincides with the thickness direction of the magnetic plate 8. Furthermore, the magnetic plate 8 is arranged so that the long side direction of the magnetic plate 8, which is formed in a rectangular flat plate shape, coincides with the front-rear direction.

[0045] The magnetic plate 8 is disposed in the magnetic plate mounting hole 4e and fixed in the magnetic plate mounting hole 4e. That is, the magnetic plate 8 is fixed to the fixed body 4. The magnetic plate 8 is fixed to the fixed body 4 with an adhesive. For example, the magnetic plate 8 is fixed to the fixed body 4 with a thermosetting adhesive. The magnetic plate 8 is also disposed on the left side of the holding magnet 7. That is, the magnetic plate 8 is disposed on one side of the holding magnet 7 in the thickness direction of the magnetic plate 8. The left side of the holding magnet 7 is a plane that is approximately perpendicular to the left-right direction and is magnetized with two poles in the vertical direction. When the drive coil 16 is in a non-energized state, the vertical center of the left side of the holding magnet 7 and the vertical center of the magnetic plate 8 are designed to coincide in the vertical direction. In this embodiment, as described below, the position of the magnetic plate 8 in the vertical direction is adjusted before fixing the magnetic plate 8 to the fixed body 4.

[0046] The left side (X2 direction side) of this embodiment is one side in the thickness direction of the magnetic plate 8, and the right side (X1 direction side) is the other side in the thickness direction of the magnetic plate 8. Furthermore, the up-down direction (Z direction) of this embodiment is a first direction that is perpendicular to the thickness direction of the magnetic plate 8, and the front-rear direction (Y direction) is a second direction that is perpendicular to the thickness direction of the magnetic plate 8 and the first direction. Furthermore, the bottom side (Z2 direction side) of this embodiment is one side in the first direction, and the top side (Z1 direction side) is the other side in the first direction.

[0047] The magnetic plate 9 has the same configuration as the magnetic plate 8 and is formed in a flat plate shape. The magnetic plate 9 is arranged so that the thickness direction of the magnetic plate 9 coincides with the left-right direction. Furthermore, the magnetic plate 9 is arranged so that the long side direction of the magnetic plate 9, which is formed in the shape of a rectangular flat plate, coincides with the front-to-rear direction. The magnetic plate 9 is arranged in the magnetic plate arrangement recess 4b. As shown in FIG. 4(A), the magnetic plate 9 is placed on the magnetic plate placement portion 4c, and the lower end surface of the magnetic plate 9 is in contact with the upper surface of the magnetic plate placement portion 4c. In other words, the magnetic plate 9 is positioned in the up-down direction.

[0048] The magnetic plate mounting portion 4c in this embodiment serves as a positioning portion for positioning the magnetic plate 9 in the up-down direction, which is the first direction. That is, the fixed body 4 is formed with the magnetic plate mounting portion 4c, which serves as a positioning portion for positioning the magnetic plate 9 in the first direction. The magnetic plate 9 is fixed to a flexible printed circuit board 17, and is fixed to the fixed body 4 via the flexible printed circuit board 17. The magnetic plate 9 is disposed on the right side of the drive magnet 15. The right side surface of the drive magnet 15 is a plane that is approximately perpendicular to the left-right direction, and is magnetized with two poles in the up-down direction. When the drive coil 16 is in a non-energized state, the vertical center of the right side surface of the drive magnet 15 and the vertical center of the magnetic plate 9 are designed to coincide in the up-down direction.

[0049] In this embodiment, when the drive coil 16 is in a non-energized state, magnetic attraction forces for holding the movable body 3 at a fixed position in the direction of rotation of the movable body (i.e., for holding the movable body 3 in a fixed posture relative to the fixed body 4) are generated between the magnetic plate 8 and the holding magnet 7 and between the magnetic plate 9 and the drive magnet 15. Specifically, when the drive coil 16 is in a non-energized state, magnetic attraction forces for holding the movable body 3 at a reference position in the direction of rotation of the movable body are generated between the magnetic plate 8 and the holding magnet 7 and between the magnetic plate 9 and the drive magnet 15.

[0050] Furthermore, in this embodiment, by adjusting the position of magnetic plate 8 in the vertical direction, it is possible to adjust the position of movable body 3 in the direction of rotation of the movable body when drive coil 16 is in a non-energized state. That is, in this embodiment, the position of movable body 3 in the direction of rotation of the movable body when drive coil 16 is in a non-energized state is determined by the vertical position of magnetic plate 8. Note that, in this embodiment, changing the sizes of magnetic plates 8 and 9 changes the magnetic attractive force generated between magnetic plate 8 and holding magnet 7, and the magnetic attractive force generated between magnetic plate 9 and drive magnet 15. Furthermore, by changing the magnetic attractive force generated between magnetic plate 8 and holding magnet 7, and the magnetic attractive force generated between magnetic plate 9 and drive magnet 15, it is possible to change the resonant frequency of actuator 1 when vibrating optical glass 2.

[0051] (Configuration of magnetic plate placement holes) FIG. 5 is an enlarged view of part G in FIG.

[0052] As described above, the magnetic plate arrangement hole 4e is a through-hole that penetrates the fixed body 4 in the vertical direction. That is, the magnetic plate arrangement hole 4e is open at the upper end and the lower end of the fixed body 4. Also, as described above, the magnetic plate arrangement hole 4e is a rectangular hole that is elongated in the front-to-rear direction. The left-to-right width of the magnetic plate arrangement hole 4e is wider than the thickness of the magnetic plate 8, and the front-to-rear length of the magnetic plate arrangement hole 4e is longer than the front-to-rear length (length in the long side direction) of the magnetic plate 8. The right surface of the magnetic plate arrangement hole 4e is the contact surface 4f with which the magnetic plate 8 comes into contact due to the magnetic attractive force generated between the magnetic plate 8 and the holding magnet 7. That is, the surface of the magnetic plate arrangement hole 4e facing the holding magnet 7 is the contact surface 4f. The contact surface 4f is a flat surface that is perpendicular to the left-to-right direction.

[0053] The contact surface 4f has a recess 4g formed therein that is recessed toward the right side (i.e., toward the holding magnet 7). The recess 4g is formed in a straight line from the lower end of the magnetic plate arrangement hole 4e toward the upper side. That is, the recess 4g is formed in a straight line parallel to the vertical direction. In this embodiment, the recess 4g is formed over the entire vertical area of ​​the magnetic plate arrangement hole 4e, from the lower end of the magnetic plate arrangement hole 4e to the upper end of the magnetic plate arrangement hole 4e. Furthermore, the recess 4g is formed in multiple locations with intervals in the front-to-rear direction. In this embodiment, the recess 4g is formed in two locations, at the front end and the rear end of the contact surface 4f. When viewed from the vertical direction, the side surface of the recess 4g is an arc-shaped concave curved surface.

[0054] The left side surface 4h, which is the surface on the left side of the magnetic plate arrangement hole 4e, is a plane perpendicular to the left-right direction. A recess 4j is formed on the left side surface 4h as a second recess recessed toward the left. The recess 4j is formed in a straight line from the lower end of the magnetic plate arrangement hole 4e to the upper end of the magnetic plate arrangement hole 4e. In other words, the recess 4j is formed in a straight line parallel to the up-down direction. The recess 4j is formed in the same position as the recess 4g in the front-rear direction. In other words, the recess 4j is formed in two places. Furthermore, as described above, the recess 4j is formed from the lower end of the magnetic plate arrangement hole 4e to the upper end of the magnetic plate arrangement hole 4e, and is formed in the same range as the recess 4g in the up-down direction.

[0055] When viewed from above and below, the side surface of the recess 4j is an arc-shaped concave curved surface. The radius of curvature of the side surface of the recess 4j is equal to the radius of curvature of the side surface of the recess 4g. Furthermore, when viewed from above and below, the center of curvature of the side surface of the recess 4j coincides with the center of curvature of the side surface of the recess 4g.

[0056] (Actuator manufacturing method) FIG. 6 is a diagram for explaining a method for adjusting the vertical position of magnetic plate 8 shown in FIG. 4(B).

[0057] In this embodiment, even if there are variations in the components that make up actuator 1 and variations in the manufacturing of actuator 1, the vertical position of magnetic plate 8 relative to fixed body 4 is adjusted in the final stage of the manufacturing process of actuator 1 so that the thickness direction of optical glass 2 coincides with the vertical direction when drive coil 16 is in a non-energized state. When the vertical position of magnetic plate 8 is adjusted, optical glass 2, holding magnet 7, and movable body 3 to which drive magnet 15 are fixed, and fulcrum part 6 are attached to fixed body 4, and magnetic plate 9, drive coil 16, and flexible printed circuit board 17 are also attached to fixed body 4.

[0058] A rod-shaped jig 20 is used to adjust the vertical position of the magnetic plate 8. The jig 20 is formed in a cylindrical shape. The radius (half of the outer diameter) of the jig 20 is approximately equal to the radius of curvature of the side surfaces of the recesses 4g and 4j. In this embodiment, two jigs 20 are used to adjust the vertical position of the magnetic plate 8. The two jigs 20 are arranged so that the axial direction of the jig 20 coincides with the vertical direction. The two jigs 20 are also arranged with a gap between them in the front-rear direction. The pitch between the two jigs 20 in the front-rear direction is equal to the pitch between the two recesses 4g in the front-rear direction. The two jigs 20 are connected to an elevation mechanism (not shown) that raises and lowers the jigs 20. The jig 20 is inserted into the magnetic plate arrangement hole 4e at the locations where the recesses 4g and 4j are formed. The edges of the tip surfaces of the jigs 20 are chamfered.

[0059] Furthermore, when the vertical position of the magnetic plate 8 is adjusted, the magnetic plate 8 is placed in the magnetic plate placement hole 4e. The magnetic plate 8 is in contact with the contact surface 4f due to the magnetic attractive force generated between the magnetic plate 8 and the holding magnet 7. Even when the magnetic plate 8 is not glued and fixed in the magnetic plate placement hole 4e, the magnetic attractive force generated between the magnetic plate 8 and the holding magnet 7 holds the magnetic plate 8 in a fixed position in the vertical direction.

[0060] Before the vertical position adjustment, the magnetic plate 8 is positioned lower than the vertical position of the designed magnetic plate 8. In this state, as shown in Fig. 6(A), a jig 20, a portion of which is to be placed in the recesses 4g and 4j, is inserted from below into the magnetic plate arrangement hole 4e (i.e., the jig 20, with its tip surface facing upward, is inserted from below into the portion of the magnetic plate arrangement hole 4e where the recesses 4g and 4j are formed), and the tip surface of the jig 20 is brought into contact with the lower end surface of the magnetic plate 8 before fixation that is placed in the magnetic plate arrangement hole 4e, thereby moving the magnetic plate 8 upward and adjusting the position of the magnetic plate 8 in the vertical direction (magnetic plate position adjustment process).

[0061] In the magnetic plate position adjustment step, for example, the magnetic plate 8 is gradually moved upward while checking the tilt of the optical glass 2 with a laser displacement meter. When the thickness direction of the optical glass 2 and the vertical direction are aligned, the vertical position adjustment of the magnetic plate 8 is complete. Once the vertical position adjustment of the magnetic plate 8 is complete, the magnetic plate 8 is fixed in the magnetic plate arrangement hole 4e (magnetic plate fixing step). In other words, after the magnetic plate position adjustment step, the magnetic plate 8 is fixed in the magnetic plate arrangement hole 4e. Specifically, the magnetic plate 8 is fixed in the magnetic plate arrangement hole 4e with an adhesive.

[0062] Furthermore, if the magnetic plate 8 is moved too far upward in the magnetic plate position adjustment step, before fixing the magnetic plate 8 in the magnetic plate arrangement hole 4e, as shown in Figure 6(B), a jig 20, a portion of which is to be placed in the recesses 4g and 4j, is inserted into the magnetic plate arrangement hole 4e from above (i.e., the jig 20, with its tip surface facing downward, is inserted from above into the portion of the magnetic plate arrangement hole 4e where the recesses 4g and 4j are formed), and the tip surface of the jig 20 is brought into contact with the upper end surface of the magnetic plate 8 that is to be fixed and placed in the magnetic plate arrangement hole 4e, thereby moving the magnetic plate 8 downward and adjusting the position of the magnetic plate 8 in the vertical direction. After the adjustment of the position of the magnetic plate 8 in the vertical direction is completed, the magnetic plate 8 is fixed in the magnetic plate arrangement hole 4e.

[0063] (Main effect of this form) As described above, in this embodiment, magnetic attraction forces for holding the movable body 3 at a reference position in the movable body rotation direction when the drive coil 16 is de-energized are generated between the magnetic plate 8 and the holding magnet 7 and between the magnetic plate 9 and the drive magnet 15. Therefore, in this embodiment, the two thin, flat magnetic plates 8 and 9, the one holding magnet 7, and the drive magnet 15 constituting part of the magnetic drive mechanism 5 can hold the movable body 3 at a reference position in the movable body rotation direction when the drive coil 16 is de-energized. Therefore, in this embodiment, even though it is possible to hold the movable body 3 at a fixed position in the movable body rotation direction when the drive coil 16 is de-energized, it is possible to reduce the cost of the actuator 1 compared to the image shifting device described in Patent Document 1, which has three braking magnets and three drive magnets.

[0064] In this embodiment, the position of the movable body 3 in the movable body rotation direction when the drive coil 16 is in a non-energized state is determined by the vertical position of the magnetic plate 8. Furthermore, in this embodiment, during the manufacture of the actuator 1, a jig 20, a portion of which is to be placed in the recesses 4g and 4j, is inserted from below into the magnetic plate arrangement hole 4e, and the leading end surface of the jig 20 is brought into contact with the lower end surface of the magnetic plate 8 before it is fixed and placed in the magnetic plate arrangement hole 4e, thereby moving the magnetic plate 8 upward and adjusting the position of the magnetic plate 8 in the vertical direction. Therefore, in this embodiment, it is possible to adjust the position of the movable body 3 in the movable body rotation direction so that the thickness direction of the optical glass 2 and the vertical direction coincide with each other when the drive coil 16 is in a non-energized state.

[0065] Furthermore, in this embodiment, a recess 4g recessed toward the left is formed on the contact surface 4f with which the magnetic plate 8 comes into contact due to the magnetic attractive force generated between the magnetic plate 8 and the holding magnet 7, and the recess 4g is formed linearly from the lower end to the upper end of the magnetic plate arrangement hole 4e. Therefore, in this embodiment, even if the thickness of the magnetic plate 8 is very thin or even if the edge of the tip surface of the rod-shaped jig 20 is chamfered, it is possible to reliably bring the tip surface of the jig 20, a portion of which is placed in the recess 4g, into contact with the lower end surface of the magnetic plate 8. Therefore, in this embodiment, even if the thickness of the magnetic plate 8 is very thin or even if the edge of the tip surface of the jig 20 is chamfered, it is possible to easily adjust the vertical position of the magnetic plate 8 using the jig 20.

[0066] In this embodiment, the recesses 4g are formed in two locations spaced apart in the front-to-rear direction. Therefore, in this embodiment, the magnetic plate 8 can be easily moved in the up-and-down direction using two jigs 20 arranged spaced apart in the front-to-rear direction. Therefore, in this embodiment, the up-and-down position of the magnetic plate 8 can be more easily adjusted.

[0067] In this embodiment, the magnetic plate arrangement hole 4e is a through-hole that penetrates the fixed body 4 in the vertical direction, and the recess 4g is formed over the entire area of ​​the magnetic plate arrangement hole 4e in the vertical direction. Therefore, in this embodiment, as described above, even if the magnetic plate 8 is moved too far upward in the magnetic plate position adjustment step, it is possible to return the magnetic plate 8 to the downward side by inserting the jig 20, with its tip surface facing downward, from above into the part of the magnetic plate arrangement hole 4e where the recesses 4g, 4j are formed, and reliably bringing the tip surface of the jig 20 into contact with the upper end surface of the magnetic plate 8 that is placed in the magnetic plate arrangement hole 4e before being fixed.

[0068] In this embodiment, a recess 4j recessed toward the left is formed on the left side surface 4h of the magnetic plate arrangement hole 4e, and the recess 4j is formed at the same position as the recess 4g in the front-to-rear direction and is formed across the entire area of ​​the magnetic plate arrangement hole 4e in the up-down direction. Therefore, in this embodiment, even if the width of the magnetic plate arrangement hole 4e in the left-to-right direction is narrow, the recesses 4g and 4j can be used to insert the jig 20 into the magnetic plate arrangement hole 4e and move the magnetic plate 8 in the up-down direction.

[0069] In this embodiment, the magnetic plate 9 is placed on the magnetic plate placing portion 4c of the fixed body 4 and is positioned in the vertical direction, and no vertical position adjustment is performed on the magnetic plate 9. Therefore, in this embodiment, it is possible to simplify the manufacturing process of the actuator 1 compared to when the vertical position adjustment of the magnetic plate 9 is performed.

[0070] (Other embodiments) The above-described embodiment is one example of a preferred embodiment of the present invention, but the present invention is not limited to this embodiment and various modifications can be made without departing from the spirit of the present invention.

[0071] In the above-described embodiment, the recess 4g is formed over the entire vertical area of ​​the magnetic plate arrangement hole 4e, but it is sufficient that the recess 4g is formed at least in the range from the lower end of the magnetic plate arrangement hole 4e to the lower end of the magnetic plate 8 when it is fixed in the magnetic plate arrangement hole 4e, and in the range from the upper end of the magnetic plate arrangement hole 4e to the upper end of the magnetic plate 8 when it is fixed in the magnetic plate arrangement hole 4e.

[0072] In the embodiment described above, the entire magnetic plate arrangement hole 4e penetrates the fixed body 4 in the vertical direction. However, only a portion of the magnetic plate arrangement hole 4e may penetrate the fixed body 4 in the vertical direction. For example, as shown in FIG. 7, only the portion of the magnetic plate arrangement hole 4e where the recesses 4g and 4j are formed may penetrate the fixed body 4 in the vertical direction. In this case, for example, the upper end of the portion of the magnetic plate arrangement hole 4e that penetrates in the vertical direction is a round hole, so that a jig 20 can be inserted into the portion of the magnetic plate arrangement hole 4e that penetrates in the vertical direction from above the fixed body 4 to move the magnetic plate 8 downward. Note that FIG. 7(B) is a cross-sectional view of the HH cross section of FIG. 7(A), and FIG. 7(C) is a cross-sectional view of the JJ cross section of FIG. 7(A).

[0073] 8, for example, only a portion of the magnetic plate arrangement hole 4e that does not have the recesses 4g and 4j may penetrate the fixed body 4 in the vertical direction. In this case, for example, the upper end of the portion of the magnetic plate arrangement hole 4e that penetrates in the vertical direction is a round hole, and this portion is formed with a recess 4p recessed to the right of the contact surface 4f and a recess 4r recessed to the left of the left side surface 4h.

[0074] Even in this case, it is possible to insert a jig 20 from above the fixed body 4 into the portion of the magnetic plate arrangement hole 4e that penetrates in the vertical direction, and move the magnetic plate 8 downward. In this case, the recess 4g may be formed over the entire vertical area of ​​the magnetic plate arrangement hole 4e, but it is sufficient that it is formed at least in the range from the lower end of the magnetic plate arrangement hole 4e to the lower end of the magnetic plate 8 that is fixed in the magnetic plate arrangement hole 4e. Note that Figure 8(B) is a cross-sectional view of the KK cross section of Figure 8(A).

[0075] In the embodiment described above, the magnetic plate arrangement hole 4e does not have to penetrate the fixed body 4 in the vertical direction. In this case, the magnetic plate arrangement hole 4e is formed, for example, so as to be recessed upward from the lower end of the fixed body 4, and is open only at the lower end of the fixed body 4. Also, in this case, the recess 4g may be formed, for example, over the entire area of ​​the magnetic plate arrangement hole 4e in the vertical direction, but it is sufficient that the recess 4g is formed at least in the range from the lower end of the magnetic plate arrangement hole 4e to the lower end of the magnetic plate 8 in a state where it is fixed in the magnetic plate arrangement hole 4e.

[0076] Furthermore, when the magnetic plate arrangement hole 4e does not penetrate the fixed body 4 in the vertical direction, the magnetic plate arrangement hole 4e may be formed so as to be recessed downward from the upper end of the fixed body 4, and may be open only at the upper end of the fixed body 4. In this case, the upper side (Z1 direction side) is one side in the first direction, and the lower side (Z2 direction side) is the other side in the first direction.

[0077] In the above-described embodiment, the jig 20 does not have to be formed in a cylindrical shape. For example, the jig 20 may be formed in a prismatic shape. In this case, the shape of the side surfaces of the recesses 4g, 4j when viewed from the top-bottom direction corresponds to the shape of the jig 20. In addition, in the above-described embodiment, the recesses 4g, 4j may be formed in three or more locations spaced apart in the front-to-back direction. Alternatively, the recesses 4g, 4j may be formed in only one location.

[0078] In the above-described embodiment, the recess 4j does not have to be formed on the left side surface 4h as long as the magnetic plate arrangement hole 4e has a wide width in the left-right direction and the jig 20 can be inserted into the magnetic plate arrangement hole 4e even if the recess 4j is not formed on the left side surface 4h. Also, the magnetic plate arrangement hole 4e may be open at the left end of the fixed body 4. Also, in the above-described embodiment, the actuator 1 does not have to include the magnetic plate 9. In this case, a magnetic attraction force is generated between the magnetic plate 8 and the holding magnet 7 to hold the movable body 3 at a fixed position in the movable body rotation direction when the drive coil 16 is in a non-energized state.

[0079] In the above-described embodiment, the holding magnet 7 may be fixed to the fixed body 4, and the magnetic plate 8 may be fixed to the movable body 3. In this case, a magnetic plate arrangement hole in which the magnetic plate 8 is arranged and fixed is formed in the movable body 3. In the above-described embodiment, the driving magnet 15 may be fixed to the fixed body 4, and the driving coil 16 and the magnetic plate 9 may be fixed to the movable body 3. Furthermore, in the above-described embodiment, the magnetic driving mechanism 5 may include, in addition to the driving coil 16, a driving coil arranged opposite the holding magnet 7. In this case, the holding magnet 7 constitutes part of the magnetic driving mechanism 5 and functions as a driving magnet.

[0080] In the above-described embodiment, the actuator 1 may be mounted on and used in a device other than a projector. In this case, an optical element other than the optical glass 2 may be held by the movable body 3. For example, an optical element such as a lens, a prism, a reflector, or an optical filter may be held by the movable body 3. An imaging element may also be held by the movable body 3. When an imaging element is held by the movable body 3, the actuator 1 is mounted on, for example, a camera. In this specification, the term "optical element" also includes an imaging element. [Explanation of symbols]

[0081] 1 actuator 2. Optical glass (optical elements) 3 Movable body 4 Fixed body 4c Magnetic plate placement part (positioning part) 4e Magnetic plate placement hole 4f contact surface 4g recess 4h Left side (surface on one side of the thickness direction of the magnetic plate placement hole) 4j recess (second recess) 5 Magnetic drive mechanism 7 Holding magnet 7a Magnetized part 8 Magnetic plate 9 Magnetic plate (second magnetic plate) 15 Drive magnet 15a Magnetized part 16 Drive coil 20 Jig X: Thickness direction of magnetic plate X1 Other side in thickness direction X2 One side in thickness direction Y Second direction Z 1st direction Z1 1st direction other side Z2 One side in the first direction

Claims

1. the optical element is held by a movable body; a fixed body formed in a frame shape and arranged on the inner periphery of the movable body, and rotatably holding the movable body; a magnetic drive mechanism that rotates the movable body in a direction in which the movable body is tilted relative to the fixed body; and a holding magnet and a magnetic plate that hold the movable body at a fixed position relative to the fixed body in a movable body rotation direction, which is the rotation direction of the movable body relative to the fixed body; the magnetic drive mechanism includes a drive magnet and a drive coil disposed opposite the drive magnet; the holding magnet is fixed to either the movable body or the fixed body, the magnetic plate is formed in a flat plate shape and is disposed on one side of the holding magnet in a thickness direction of the magnetic plate, the other of the movable body and the fixed body is made of a non-magnetic material, the other of the movable body and the fixed body is formed with a magnetic plate arrangement hole in which the magnetic plate is arranged and fixed; the holding magnet is composed of two magnetized portions polarized in a first direction perpendicular to the thickness direction of the magnetic plate, a magnetic attraction force for holding the movable body at a fixed position in the rotating direction of the movable body is generated between the magnetic plate and the holding magnet when the driving coil is in a non-energized state, and the position of the magnetic plate in the first direction determines the position of the movable body in the rotating direction of the movable body when the driving coil is in a non-energized state, When one side of the first direction is defined as a first direction one side and the other side of the first direction is defined as a first direction other side, the magnetic plate arrangement hole is open at least at one end in the first direction of the other of the movable body and the fixed body, a surface of the magnetic plate arrangement hole on the side of the holding magnet serves as a contact surface with which the magnetic plate comes into contact due to a magnetic attraction force generated between the magnetic plate and the holding magnet, The contact surface is formed with a recess recessed toward the holding magnet, An actuator characterized in that the recess is formed in a straight line from one end of the magnetic plate arrangement hole in the first direction toward the other end in the first direction, and is formed at least to the one end of the magnetic plate in the first direction.

2. 2. The actuator according to claim 1, wherein the recesses are formed at a plurality of locations spaced apart from one another in a second direction perpendicular to the thickness direction of the magnetic plate and the first direction.

3. the magnetic plate arrangement hole is a through hole that penetrates the other of the movable body and the fixed body in the first direction, 3. The actuator according to claim 1, wherein the recess is formed over the entire area of ​​the magnetic plate placement hole in the first direction.

4. When one side of the magnetic plate in the thickness direction is defined as one thickness direction side and the other side of the magnetic plate in the thickness direction is defined as the other thickness direction side, the surface of the magnetic plate arrangement hole on the other side in the thickness direction serves as the contact surface, a second recess recessed toward the one side in the thickness direction is formed on a surface of the magnetic plate arrangement hole on the one side in the thickness direction; An actuator as described in any one of claims 1 to 3, characterized in that the second recess is formed at the same position as the recess in a second direction perpendicular to the thickness direction of the magnetic plate and the first direction, and is formed in the same range as the recess in the first direction.

5. a second magnetic plate having a flat plate shape for holding the movable body at a fixed position relative to the fixed body in the rotating direction of the movable body; the drive magnet and the holding magnet are fixed to the movable body, the drive coil, the magnetic plate, and the second magnetic plate are fixed to the fixed body; the drive magnet is composed of two magnetized portions polarized in the first direction, When the drive coil is in a non-energized state, a magnetic attraction force for holding the movable body at a fixed position in the rotating direction of the movable body is generated between the drive magnet and the second magnetic plate, 5. The actuator according to claim 1, wherein the fixed body is formed with a positioning portion for positioning the second magnetic plate in the first direction.

6. A method for manufacturing the actuator according to any one of claims 1 to 5, comprising the steps of: A method for manufacturing an actuator, characterized by comprising: a magnetic plate position adjustment process in which a rod-shaped jig, a portion of which is placed in the recess, is inserted into the magnetic plate arrangement hole from one side in the first direction, and the tip surface of the jig is brought into contact with the end surface of the magnetic plate, which is placed in the magnetic plate arrangement hole before being fixed, on the one side in the first direction, thereby moving the magnetic plate to the other side in the first direction, thereby adjusting the position of the magnetic plate in the first direction; and a magnetic plate fixing process in which the magnetic plate is fixed in the magnetic plate arrangement hole after the magnetic plate position adjustment process.

Images