Sensors and Inspection Equipment

Abstract

To provide a sensor and an inspection device capable of suppressing noise.SOLUTION: A sensor comprises an element portion. The element portion includes a first magnetic element, a second magnetic element, a first conductive member, and a second conductive member. The first magnetic element includes a first end portion and a first other end portion. A direction from the first end portion to the first other end portion is along a first direction. The second magnetic element includes a second end portion and a second other end portion. A direction from the second end portion to the second other end portion is along the first direction. The first other end portion is electrically connected to the second end portion. The first conductive member includes a first portion, a first other portion, a second portion, and a second other portion. The second conductive member includes a first conductive portion, a first other conductive portion, a second conductive portion, and a second other conductive portion. The first other conductive portion is electrically connected to the second conductive portion.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION The present invention relates to a sensor and an inspection device. [Background technology]

[0002] For example, there is a sensor using a magnetic layer, and it is desirable to suppress noise in the sensor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-207167 Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE INVENTION Embodiments of the present invention provide a sensor and an inspection device that can suppress noise. [Means for solving the problem]

[0005] According to an embodiment of the present invention, a sensor includes an element unit. The element unit includes a first magnetic element, a second magnetic element, a first conductive member, and a second conductive member. The first magnetic element includes a first end and a first other end. A direction from the first end to the first other end is along a first direction. The second magnetic element includes a second end and a second other end. A direction from the second end to the second other end is along the first direction. The first other end is electrically connected to the second end. The first conductive member includes a first portion, a first other portion, a second portion, and a second other portion. The first portion corresponds to the first end, the first other portion corresponds to the first other end, the second portion corresponds to the second end, and the second other portion corresponds to the second other end. The first other portion is electrically connected to the second portion. The second conductive member includes a first conductive portion, a first other conductive portion, a second conductive portion, and a second other conductive portion. The first conductive portion corresponds to the first end portion, the first other conductive portion corresponds to the first other end portion, the second conductive portion corresponds to the second end portion, and the second other conductive portion corresponds to the second other end portion. The first other conductive portion is electrically connected to the second conductive portion. [Brief explanation of the drawings]

[0006] [Figure 1] 1(a) to 1(c) are schematic plan views illustrating the sensor according to the first embodiment. [Figure 2] 2(a) to 2(d) are schematic cross-sectional views illustrating the sensor according to the first embodiment. [Figure 3] 3(a) to 3(d) are schematic cross-sectional views illustrating the sensor according to the first embodiment. [Figure 4] 4(a) to 4(c) are schematic views illustrating the operation of the sensor according to the first embodiment. [Figure 5] 5(a) to 5(c) are schematic views illustrating the operation of the sensor according to the first embodiment. [Figure 6] 6(a) to 6(d) are schematic cross-sectional views illustrating the sensor according to the first embodiment. [Figure 7] FIG. 7 is a schematic perspective view showing an inspection device according to the second embodiment. [Figure 8] FIG. 8 is a schematic plan view showing an inspection device according to the second embodiment. [Figure 9] FIG. 9 is a schematic diagram showing a sensor and an inspection device according to the embodiment. [Figure 10] FIG. 10 is a schematic diagram showing an inspection device according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) 1(a) to 1(c) are schematic plan views illustrating the sensor according to the first embodiment. 2(a) to 2(d) and 3(a) to 3(d) are schematic cross-sectional views illustrating the sensor according to the first embodiment. In FIG. 1(b) and FIG. 1(c), some elements are extracted and depicted. 1(a), a sensor 110 according to the embodiment includes an element unit 10S. The element unit 10S includes a first magnetic element 11, a second magnetic element 12, a first conductive member 21, and a second conductive member 22. The element unit 10S may further include a third magnetic element 13 and a fourth magnetic element 14. The third magnetic element 13 and the fourth magnetic element 14 will be described later.

[0009] 1(a), the first magnetic element 11 includes a first end 11e and a first other end 11f. The direction from the first end 11e to the first other end 11f is along a first direction D1.

[0010] The first direction D1 is defined as the Y-axis direction. A direction perpendicular to the Y-axis direction is defined as the Z-axis direction. A direction perpendicular to the Y-axis direction and the Z-axis direction is defined as the X-axis direction.

[0011] The second magnetic element 12 includes a second end 12e and a second other end 12f. The direction from the second end 12e to the second other end 12f is along the first direction D1. The first other end 11f is electrically connected to the second end 12e.

[0012] As shown in FIG. 1( a ), the first conductive member 21 and the second conductive member 22 overlap with the first magnetic element 11 and the second magnetic element 12 .

[0013] FIG. 1(b) illustrates the first conductive member 21. The first conductive member 21 includes a first portion p1e, a first other portion p1f, a second portion p2e, and a second other portion p2f. The first portion p1e corresponds to the first end portion 11e. The first other portion p1f corresponds to the first other end portion 11f. The second portion p2e corresponds to the second end portion 12e. The second other portion p2f corresponds to the second other end portion 12f. The first other portion p1f is electrically connected to the second portion p2e. The first other portion p1f may be continuous with the second portion p2e.

[0014] FIG. 1(c) illustrates the second conductive member 22. The second conductive member 22 includes a first conductive portion c1e, a first other conductive portion c1f, a second conductive portion c2e, and a second other conductive portion c2f. The first conductive portion c1e corresponds to the first end portion 11e. The first other conductive portion c1f corresponds to the first other end portion 11f. The second conductive portion c2e corresponds to the second end portion 12e. The second other conductive portion c2f corresponds to the second other end portion 12f. The first other conductive portion c1f is electrically connected to the second conductive portion c2e. The first other conductive portion c1f may be continuous with the second conductive portion c2e.

[0015] 2(a), 2(b), 3(a), and 3(b), for example, a second direction D2 from the first conductive member 21 to the first magnetic element 11 and the second magnetic element 12 intersects with the first direction D1. The second direction D2 is, for example, the Z-axis direction.

[0016] As shown in Figures 2(a), 2(b), 3(a) and 3(b), for example, the direction from the second conductive member 22 to the first magnetic element 11 and the second magnetic element 12 is along the second direction D2.

[0017] As shown in Figures 1(b) and 1(c), a first current i1 can be supplied to the first conductive member 21, and a second current i2 can be supplied to the second conductive member 22. The relative directions of these currents are opposite in the first magnetic element 11 and the second magnetic element 12. This allows the detection of the target magnetic field Hs while suppressing noise. According to the embodiment, a sensor capable of suppressing noise can be provided.

[0018] 1(b), the element unit 10S may include a first terminal T1 and a second terminal T2. The first terminal T1 is electrically connected to the first other portion p1f and the second other portion p2e. The second terminal T2 is electrically connected to the first other portion p1e and the second other portion p2f. In this example, the second terminal T2 is electrically connected to the first other portion p1e and the second other portion p2f via a third magnetic element 13 and a fourth magnetic element 14, which will be described later.

[0019] 1(c), the element portion 10S may include a third terminal T3 and a fourth terminal T4. The third terminal T3 is electrically connected to the first conductive portion c1e. The fourth terminal T4 is electrically connected to the second other conductive portion c2f.

[0020] 1(b), a first current i1 can be supplied between the first terminal T1 and the second terminal T2. The first current i1 includes an AC component. For example, the sensor 110 may include a first circuit 71 that supplies the first current i1 to the first conductive member 21. For example, the first circuit 71 may apply an AC voltage Vac between the first terminal T1 and the second terminal T2.

[0021] 1(c), a second current i2 can be supplied between the third terminal T3 and the fourth terminal T4. The second current i2 includes, for example, a DC component. The sensor 110 may include a second circuit 72 that supplies the second current i2 to the second conductive member 22. For example, the second circuit 72 may apply a DC voltage Vdc between the third terminal T3 and the fourth terminal T4.

[0022] For example, when the first current i1 flows from the first terminal T1 to the second terminal T2, the second current i2 flows from the third terminal T3 to the fourth terminal T4 or from the fourth terminal T4 to the third terminal T3.

[0023] The relationship between the direction of the first current i1 and the direction of the second current i2 is reversed at the position corresponding to the first magnetic element 11 and the position corresponding to the second magnetic element 12. As a result, the magnetic fields caused by these currents act in canceling directions, as will be described later.

[0024] 1(b), 2(a), 2(b), 3(a), and 3(b), the first conductive member 21 includes a first region rg1 and a second region rg2. The first region rg1 overlaps with the first magnetic element 11. The second region rg2 overlaps with the second magnetic element 12. For example, the first region rg1 overlaps with the first magnetic element 11 in the second direction D2. The second region rg2 overlaps with the second magnetic element 12 in the second direction D2.

[0025] 1(c), 2(a), 2(b), 3(a), and 3(b), the second conductive member 22 includes a third region rg3 and a fourth region rg4. The third region rg3 overlaps with the first magnetic element 11. The fourth region rg4 overlaps with the second magnetic element 12. For example, the third region rg3 overlaps with the first magnetic element 11 in the second direction D2. The fourth region rg4 overlaps with the second magnetic element 12 in the second direction D2.

[0026] As described above, a first current i1 can be supplied to the first conductive member 21. A second current i2 can be supplied to the second conductive member 22. When the direction of the first current i1 flowing through the first region rg1 is the same as the direction of the second current i2 flowing through the third region rg3, the direction of the first current i1 flowing through the second region rg2 is opposite to the direction of the second current i2 flowing through the fourth region rg4.

[0027] Such first current i1 and second current i2 are supplied, and magnetic fields based on these currents are applied to the first magnetic element 11 and the second magnetic element 12. A magnetic field Hs to be detected is further applied to these magnetic elements.

[0028] The first electric resistance of the first magnetic element 11 is variable in response to the magnetic field Hs to be detected. The second electric resistance of the second magnetic element 12 is variable in response to the magnetic field Hs to be detected.

[0029] The magnetic field to be detected Hs includes, for example, a component along a third direction D3. The third direction D3 intersects with a plane including the first direction D1 and the second direction D2. The third direction D3 is, for example, the X-axis direction.

[0030] As shown in FIG. 1(a), the sensor 110 may further include a third circuit 73 and a fourth circuit 74. The third circuit 73 can supply a detection voltage Vs or a detection current between the first connection point CP1 and the second connection point CP2. The detection voltage Vs causes the detection current to flow. The first connection point CP1 is electrically connected to the first end 11e. The second connection point CP2 is electrically connected to the second other end 12f.

[0031] The fourth circuit 74 can output a value corresponding to a change in potential at the third connection point CP3. The third connection point CP3 is a connection point between the first other end 11f and the second end 12e. The change in potential at the third connection point CP3 corresponds to a change in the first electrical resistance of the first magnetic element 11. The change in potential at the third connection point CP3 corresponds to a change in the second electrical resistance of the second magnetic element 12. The magnetic field Hs to be detected can be detected by detecting a value corresponding to the change in potential at the third connection point CP3.

[0032] The electrical resistance of the magnetic element depends on the change in the magnetization direction of the magnetic layer included in the magnetic element. As shown in Figures 2(a) and 3(a), the first magnetic element 11 includes a first magnetic layer 11a. In this example, the first magnetic element 11 further includes a first opposing magnetic layer 11b and a first non-magnetic layer 11n. The first non-magnetic layer 11n is located between the first magnetic layer 11a and the first opposing magnetic layer 11b.

[0033] In this example, the first opposing magnetic layer 11b is located between the first conductive member 21 and the first magnetic layer 11a. The first conductive member 21, the first magnetic layer 11a, and the first opposing magnetic layer 11b may be arranged in any order.

[0034] For example, the first magnetic layer 11a is a magnetization reference layer, and the first opposing magnetic layer 11b is a magnetization free layer. The first magnetic layer 11a may be a magnetization free layer, and the first opposing magnetic layer 11b may be a magnetization reference layer. In the following, the first magnetic layer 11a is the magnetization reference layer, and the first opposing magnetic layer 11b is the magnetization free layer. The magnetization 11bM of the first opposing magnetic layer 11b is more easily changed than the first magnetization 11M of the first magnetic layer 11a.

[0035] 1(a) and 2(a), the first magnetization 11M of the first magnetic layer 11a includes a first component in a first direction. The first direction is along the direction from the first end 11e to the first other end 11f, or along the direction from the first other end 11f to the first end 11e. In this example, the first direction is along the direction from the first end 11e to the first other end 11f.

[0036] The orientation of the magnetization 11bM of the first opposing magnetic layer 11b changes in response to an external magnetic field. This changes the angle between the magnetization 11bM and the first magnetization 11M. The change in the first electrical resistance corresponds to, for example, the change in the angle between these magnetizations. The external magnetic field includes the magnetic field to be detected Hs, a magnetic field based on the first current i1, and a magnetic field based on the second current i2.

[0037] 2(b) and 3(b), the second magnetic element 12 includes a second magnetic layer 12a. In this example, the second magnetic element 12 further includes a second opposing magnetic layer 12b and a second non-magnetic layer 12n. The second non-magnetic layer 12n is located between the second magnetic layer 12a and the second opposing magnetic layer 12b.

[0038] In this example, the second opposing magnetic layer 12b is located between the first conductive member 21 and the second magnetic layer 12a. The first conductive member 21, the second magnetic layer 12a, and the second opposing magnetic layer 12b may be arranged in any order.

[0039] For example, the second magnetic layer 12a is a magnetization reference layer, and the second opposing magnetic layer 12b is a magnetization free layer. The second magnetic layer 12a may be a magnetization free layer, and the second opposing magnetic layer 12b may be a magnetization reference layer. In the following, the second magnetic layer 12a is the magnetization reference layer, and the second opposing magnetic layer 12b is the magnetization free layer. The magnetization 12bM of the second opposing magnetic layer 12b is more easily changed than the second magnetization 12M of the second magnetic layer 12a.

[0040] As shown in FIGS. 1(a) and 2(b), the second magnetization 12M of the second magnetic layer 12a includes the second component in the first direction.

[0041] The orientation of the magnetization 12bM of the second opposing magnetic layer 12b changes in response to an external magnetic field. This changes the angle between the magnetization 12bM and the second magnetization 12M. The change in the second electrical resistance corresponds to, for example, the change in the angle between these magnetizations. The external magnetic field includes the magnetic field to be detected Hs, a magnetic field based on the first current i1, and a magnetic field based on the second current i2.

[0042] The first magnetic element 11 and the second magnetic element 12 are, for example, GMR (Giant Magneto Resistive effect) elements.

[0043] As described above, the first current i1 includes an AC component. The AC magnetic field based on the first current i1 functions as a carrier signal for detecting the target magnetic field Hs. The AC magnetic field is used to shift the frequency to a higher frequency. This suppresses the effects of 1 / f noise.

[0044] An example of the first electrical resistance of the first magnetic element 11 and the second electrical resistance of the second magnetic element 12 will be described below.

[0045] 4(a) to 4(c) are schematic views illustrating the operation of the sensor according to the first embodiment. FIG. 4(a) corresponds to the first magnetic element 11. FIG. 4(b) corresponds to the second magnetic element 12. The horizontal axis in these figures represents the strength of the external magnetic field H applied to the magnetic element. The vertical axis in FIG. 4(a) represents the first electrical resistance RR1 of the first magnetic element 11. The vertical axis in FIG. 4(b) represents the second electrical resistance RR2 of the second magnetic element 12.

[0046] 4(a), the first electric resistance RR1 varies as an even function with respect to the magnetic field H. As shown in FIG. 4(b), the second electric resistance RR2 varies as an even function with respect to the magnetic field H.

[0047] 4(a), the magnetic field H includes a magnetic field Hs to be detected and an AC magnetic field Hac based on the first current i1. In response to this magnetic field H, the first electrical resistance RR1 changes by a first resistance change Rv1.

[0048] 4(b), the magnetic field H includes a magnetic field Hs to be detected and an AC magnetic field Hac based on the first current i1. In response to this magnetic field H, the second electrical resistance RR2 changes by a second resistance change Rv2.

[0049] 1(b), the direction of the first current i1 flowing through the first region rg1 corresponding to the first magnetic element 11 is opposite to the direction of the first current i1 flowing through the second region rg2 corresponding to the second magnetic element 12. Therefore, the phase of the AC magnetic field Hac applied to the second magnetic element 12 is shifted by 180 degrees from the phase of the AC magnetic field Hac applied to the first magnetic element 11. The AC magnetic fields Hac of opposite phases are applied to the first magnetic element 11 and the second magnetic element 12.

[0050] 4(c) schematically shows the first resistance change Rv1 and the second resistance change Rv2. As shown in FIG. 4(c), the combination (e.g., difference) of the first resistance change Rv1 and the second resistance change Rv2 cancels the influence of the AC magnetic field Hac. For example, the AC magnetic field Hac (carrier signal) can be effectively used to shift the frequency to a higher frequency to suppress the influence of 1 / f noise.

[0051] It was found that noise due to the magnetic field based on the second current i2 could be further suppressed. This characteristic will be explained below. Below, the characteristics will be explained when the magnetic field based on the second current i2 flowing through the second conductive member 22 is applied to one magnetic element (for example, the first magnetic element 11).

[0052] 5(a) to 5(c) are schematic views illustrating the operation of the sensor according to the first embodiment. The horizontal axis of these figures is the DC voltage Vdc1. The DC voltage Vdc1 corresponds to the DC voltage Vdc from the second circuit 72 (see FIG. 1(c)). The DC voltage Vdc1 is normalized. The vertical axis of FIG. 5(a) is the output voltage VR1 of the electrical signal obtained from the first magnetic element 11. The output voltage VR1 corresponds to the first electrical resistance RR1 of the first magnetic element 11. The output voltage VR1 is normalized. The vertical axis of FIG. 5(b) is the noise intensity N1 in the electrical signal obtained from the first magnetic element 11. The noise intensity N1 is normalized. The vertical axis of FIG. 5(c) is the SNR (Signal-to-Noise Ratio) of the electrical signal obtained from the first magnetic element 11. A high SNR is preferable.

[0053] As shown in FIG. 5(a), the output voltage VR1 changes symmetrically with respect to the polarity of the DC voltage Vdc1. On the other hand, as shown in FIG. 5(b), the noise intensity N1 changes asymmetrically with respect to the polarity of the DC voltage Vdc1. As shown in FIG. 5(c), the SNR changes asymmetrically with respect to the polarity of the DC voltage Vdc1. The asymmetric change is thought to be related to, for example, the magnetic properties of the magnetic layer. The asymmetric change may be due to various factors.

[0054] By utilizing such characteristics, it is possible to obtain detection results with a high SNR. In the embodiment, the second current i2 including a DC component is supplied to the second conductive member 22, thereby obtaining the effect of improving the SNR.

[0055] In the embodiment, the direction of the second current i2 is set to the same direction in the regions corresponding to the first magnetic element 11 and the second magnetic element 12.

[0056] For example, the second current i2 flows from the third terminal T3 to the fourth terminal T4. For example, the second current i2 flows from the first conductive portion c1e to the first other conductive portion c1f. The second current i2 flows from the second conductive portion c2e to the second other conductive portion c2f.

[0057] Alternatively, the second current i2 flows from the fourth terminal T4 to the third terminal T3. For example, the second current i2 flows from the first other conductive portion c1f to the first conductive portion c1e. The second current i2 flows from the second other conductive portion c2f to the second conductive portion c2e.

[0058] For example, the first magnetization 11M of the first magnetic layer 11a includes a first component in a first direction, and the second magnetization 12M of the second magnetic layer 12a includes a second component in the first direction. The first direction is along the direction from the first end 11e to the first other end 11f or the direction from the first other end 11f to the first end 11e.

[0059] For example, the first electrical resistance RR1 of the first magnetic element 11 when the second current i2 flows is either higher or lower than the first electrical resistance RR1 of the first magnetic element 11 when the second current i2 does not flow. At this time, the second electrical resistance RR2 of the second magnetic element 12 when the second current i2 flows is either higher or lower than the second electrical resistance RR2 of the second magnetic element 12 when the second current i2 does not flow.

[0060] For example, the first magnetic element 11 is electrically connected in series with the second magnetic element 12. When the second current i2 flows through the third region rg3, the first electrical resistance RR1 of the first magnetic element 11 is either higher or lower than the first electrical resistance RR1 when the second current i2 does not flow. When the second current i2 flows through the fourth region rg4, the second electrical resistance RR2 of the second magnetic element 12 is either higher or lower than the second electrical resistance RR2 when the second current i2 does not flow.

[0061] When the second current i2 flows, the electrical resistance increases in both the first magnetic element 11 and the second magnetic element 12. Alternatively, when the second current i2 flows, the electrical resistance decreases in both the first magnetic element 11 and the second magnetic element 12. The effect of improving the SNR can be obtained in both magnetic elements. According to the embodiment, a sensor capable of suppressing noise can be provided.

[0062] On the other hand, the first current i1 flows through the regions corresponding to the first magnetic element 11 and the second magnetic element 12 in the opposite direction.

[0063] As shown in FIG. 1(a), the element unit 10S may further include a third magnetic element 13 and a fourth magnetic element .

[0064] The third magnetic element 13 includes a third end portion 13e and a third other end portion 13f. The direction from the third end portion 13e to the third other end portion 13f is along the first direction D1. The third end portion 13e is electrically connected to the first end portion 11e.

[0065] The fourth magnetic element 14 includes a fourth end portion 14e and a fourth other end portion 14f. The direction from the fourth end portion 14e to the fourth other end portion 14f is along the first direction D1. The third other end portion 13f is electrically connected to the fourth end portion 14e. The fourth other end portion 14f is electrically connected to the second other end portion 12f.

[0066] 1(b), the first conductive member 21 further includes a third portion p3e, a third other portion p3f, a fourth portion p4e, and a fourth other portion p4f. The third portion p3e corresponds to the third end portion 13e. The third other portion p3f corresponds to the third other end portion 13f. The fourth portion p4e corresponds to the fourth end portion 14e. The fourth other portion p4f corresponds to the fourth other end portion 14f.

[0067] The third other portion p3f is electrically connected to the fourth portion p4e. The third portion p3e is electrically connected to the first portion p1e. The fourth other portion p4f is electrically connected to the second other portion p2f.

[0068] 1(c), the second conductive member 22 further includes a third conductive portion c3e, a third other conductive portion c3f, a fourth conductive portion c4e, and a fourth other conductive portion c4f. The third conductive portion c3e corresponds to the third end portion 13e. The third other conductive portion c3f corresponds to the third other end portion 13f. The fourth conductive portion c4e corresponds to the fourth end portion 14e. The fourth other conductive portion c4f corresponds to the fourth other end portion 14f.

[0069] The third other conductive portion c3f is electrically connected to the fourth conductive portion c4e. The third conductive portion c3e is electrically connected to the first conductive portion c1e. The fourth other conductive portion c4f is electrically connected to the second other conductive portion c2f.

[0070] As shown in FIG. 1(b), the second terminal T2 is electrically connected to the first portion p1e and the second other portion p2f via the third other portion p3f, the third portion p3e, the fourth portion p4e, and the fourth other portion p4f.

[0071] 1(c), the third terminal T3 is further electrically connected to the third conductive portion c3e, and the fourth terminal T4 is further electrically connected to the fourth other conductive portion c4f.

[0072] As shown in FIGS. 2(c) and 3(c), the direction from the first conductive member 21 to the third magnetic element 13 and the fourth magnetic element 14 is along the second direction D2. The third magnetic element 13 includes a third magnetic layer 13a. The third magnetization 13M of the third magnetic layer 13a includes a third component in the first direction. In this example, the third magnetic element 13 further includes a third opposing magnetic layer 13b and a third non-magnetic layer 13n. The third non-magnetic layer 13n is located between the third magnetic layer 13a and the third opposing magnetic layer 13b. For example, the third magnetic layer 13a is a magnetization reference layer, and the third opposing magnetic layer 13b is a magnetization free layer. The magnetization 13bM of the third opposing magnetic layer 13b is more easily changed than the third magnetization 13M.

[0073] As shown in FIGS. 2(d) and 3(d), the direction from the second conductive member 22 to the third magnetic element 13 and the fourth magnetic element 14 is along the second direction D2. The fourth magnetic element 14 includes a fourth magnetic layer 14a. The fourth magnetization 14M of the fourth magnetic layer 14a includes a fourth component in the first direction. In this example, the fourth magnetic element 14 further includes a fourth opposing magnetic layer 14b and a fourth non-magnetic layer 14n. The fourth non-magnetic layer 14n is located between the fourth magnetic layer 14a and the fourth opposing magnetic layer 14b. For example, the fourth magnetic layer 14a is a magnetization reference layer, and the fourth opposing magnetic layer 14b is a magnetization free layer. The magnetization 14bM of the fourth opposing magnetic layer 14b is more easily changed than the fourth magnetization 14M.

[0074] 1(b), a first circuit 71 is provided that can supply a first current i1 to a first conductive member 21. A second circuit 72 is provided that can supply a second current i2 to a second conductive member 22.

[0075] As shown in FIG. 1(a), a third circuit 73 and a fourth circuit 74 are provided. The third circuit 73 can supply a detection voltage Vs or a detection current between a first connection point CP1 and a second connection point CP2. The first connection point CP1 is electrically connected to the first end 11e (and the third end 13e). The second connection point CP2 is electrically connected to the second other end 12f (and the fourth other end 14f).

[0076] The fourth circuit 74 is capable of outputting a value corresponding to a change in the potential of the potential difference between the third connection point CP3 of the first other end 11f and the second end 12e and the fourth connection point CP4 of the third other end 13f and the fourth end 14e.

[0077] The bridge circuit, which includes four magnetic elements, enables highly accurate detection with reduced noise.

[0078] For example, the distance between the first portion p1e and the first end 11e is shorter than the distance between the first portion p1e and the first other end 11f, and shorter than the distance between the first other portion p1f and the first end 11e. For example, the distance between the first other portion p1f and the first other end 11f is shorter than the distance between the first portion p1e and the first other end 11f, and shorter than the distance between the first other portion p1f and the first end 11e.

[0079] For example, the distance between the second portion p2e and the second end 12e is shorter than the distance between the second portion p2e and the second other end 12f, and shorter than the distance between the second other portion p2f and the second end 12e. For example, the distance between the second other portion p2f and the second other end 12f is shorter than the distance between the second portion p2e and the second other end 12f, and shorter than the distance between the second other portion p2f and the second end 12e.

[0080] For example, the distance between the first conductive portion c1e and the first end 11e is shorter than the distance between the first conductive portion c1e and the first other end 11f, and shorter than the distance between the first other conductive portion c1f and the first end 11e. For example, the distance between the first other conductive portion c1f and the first other end 11f is shorter than the distance between the first conductive portion c1e and the first other end 11f, and shorter than the distance between the first other conductive portion c1f and the first end 11e.

[0081] For example, the distance between the second conductive portion c2e and the second end 12e is shorter than the distance between the second conductive portion c2e and the second other end 12f, and shorter than the distance between the second other conductive portion c2f and the second end 12e. For example, the distance between the second other conductive portion c2f and the second other end 12f is shorter than the distance between the second conductive portion c2e and the second other end 12f, and shorter than the distance between the second other conductive portion c2f and the second end 12e.

[0082] For example, the distance between the third portion p3e and the third end 13e is shorter than the distance between the third portion p3e and the third other end 13f, and is shorter than the distance between the third other portion p3f and the third end 13e. The distance between the third other portion p3f and the third other end 13f is shorter than the distance between the third portion p3e and the third other end 13f, and is shorter than the distance between the third other portion p3f and the third end 13e.

[0083] For example, the distance between the fourth portion p4e and the fourth end 14e is shorter than the distance between the fourth portion p4e and the fourth other end 14f, and is shorter than the distance between the fourth other portion p4f and the fourth end 14e. For example, the distance between the fourth other portion p4f and the fourth end 14e is shorter than the distance between the fourth portion p4e and the fourth other end 14f, and is shorter than the distance between the fourth other portion p4f and the fourth end 14e.

[0084] For example, the distance between the third conductive portion c3e and the third end 13e is shorter than the distance between the third conductive portion c3e and the third other end 13f, and is shorter than the distance between the third other conductive portion c3f and the third end 13e. For example, the distance between the third other conductive portion c3f and the third other end 13f is shorter than the distance between the third conductive portion c3e and the third other end 13f, and is shorter than the distance between the third other conductive portion c3f and the third end 13e.

[0085] For example, the distance between the fourth conductive portion c4e and the fourth end 14e is shorter than the distance between the fourth conductive portion c4e and the fourth other end 14f, and is shorter than the distance between the fourth other conductive portion c4f and the fourth end 14e. For example, the distance between the fourth other conductive portion c4f and the fourth other end 14f is shorter than the distance between the fourth conductive portion c4e and the fourth other end 14f, and is shorter than the distance between the fourth other conductive portion c4f and the fourth end 14e.

[0086] In the embodiment, the first conductive member 21 may be located between the second conductive member 22 and the first magnetic element 11. The second conductive member 22 may be located between the first conductive member 21 and the first magnetic element 11. Any configuration that can obtain the effect of improving the SNR by the second current i2 supplied to the second conductive member 22 may be applied. For example, the effect of improving the SNR can be obtained even when one magnetic element is directed.

[0087] 6(a) to 6(d) are schematic cross-sectional views illustrating the sensor according to the first embodiment. As shown in Fig. 6(a) to 6(d), in the sensor 111 according to the embodiment, the element unit 10S includes a first magnetic part 51, a first opposing magnetic part 51A, a second magnetic part 52, a second opposing magnetic part 52A, a third magnetic part 53, a third opposing magnetic part 53A, a fourth magnetic part 54, and a fourth opposing magnetic part 54A.

[0088] The direction from the first magnetic part 51 to the first opposing magnetic part 51A is along the third direction D3. The position of at least a part of the first magnetic element 11 in the third direction D3 is between the position of the first magnetic part 51 in the third direction D3 and the position of the first opposing magnetic part 51A in the third direction D3.

[0089] The direction from the second magnetic part 52 to the second opposing magnetic part 52A is along the third direction D3. The position of at least a part of the second magnetic element 12 in the third direction D3 is between the position of the second magnetic part 52 in the third direction D3 and the position of the second opposing magnetic part 52A in the third direction D3.

[0090] The direction from the third magnetic part 53 to the third opposing magnetic part 53A is along the third direction D3. The position of at least a part of the third magnetic element 13 in the third direction D3 is between the position of the third magnetic part 53 in the third direction D3 and the position of the third opposing magnetic part 53A in the third direction D3.

[0091] The direction from the fourth magnetic part 54 to the fourth opposing magnetic part 54A is along the third direction D3. The position of at least a part of the fourth magnetic element 14 in the third direction D3 is between the position of the fourth magnetic part 54 in the third direction D3 and the position of the fourth opposing magnetic part 54A in the third direction D3.

[0092] The magnetic field collected by the magnetic member and the opposing magnetic member is applied to the magnetic element, enabling efficient detection. These magnetic member and the opposing magnetic member function as, for example, an MFC (Magnetic Flux Concentrator).

[0093] (Second embodiment) The second embodiment relates to an examination device, which may include a diagnostic device, as will be described later.

[0094] FIG. 7 is a schematic perspective view showing an inspection device according to the second embodiment. As shown in Fig. 7, an inspection device 710 according to the second embodiment includes a sensor 150a (magnetic sensor) and a processing unit 770. The sensor 150a may be the sensor according to the first embodiment or a variation thereof. The processing unit 770 processes an output signal obtained from the sensor 150a. The processing unit 770 may compare the signal obtained from the sensor 150a with a reference value. The processing unit 770 can output an inspection result based on the processing result.

[0095] For example, the test object 680 is tested by the test device 710. The test object 680 is, for example, an electronic device (including a semiconductor circuit, etc.). The test object 680 may also be, for example, a battery 610.

[0096] For example, the sensor 150a according to the embodiment may be used together with the battery 610. For example, the battery system 600 includes the battery 610 and the sensor 150a. The sensor 150a can detect a magnetic field generated by a current flowing through the battery 610.

[0097] FIG. 8 is a schematic plan view showing an inspection device according to the second embodiment. 8, the sensor 150a includes, for example, a plurality of sensors according to the embodiment. In this example, the sensor 150a includes a plurality of sensors (such as element portions 10S of the sensor 110). The plurality of sensors are arranged, for example, along two directions (such as the X-axis direction and the Y-axis direction). The plurality of sensors 110 are provided, for example, on a substrate.

[0098] The sensor 150a can detect a magnetic field generated by a current flowing through the inspection target 680 (which may be, for example, a battery 610). For example, when the battery 610 approaches an abnormal state, an abnormal current may flow through the battery 610. By detecting the abnormal current with the sensor 150a, it is possible to know a change in the state of the battery 610. For example, with the sensor 150a placed close to the battery 610, the entire battery 610 can be inspected in a short time using sensor group driving means in two directions. The sensor 150a may be used to inspect the battery 610 during the manufacture of the battery 610.

[0099] The sensor according to the embodiment can be applied to an inspection device 710 such as a diagnostic device, for example. FIG. 9 is a schematic diagram showing a sensor and an inspection device according to the embodiment. 9, a diagnostic device 500, which is an example of an inspection device 710, includes a sensor 150. The sensor 150 includes the sensors described in relation to the first embodiment and variations thereof.

[0100] In the diagnostic device 500, the sensor 150 is, for example, a magnetoencephalograph. The magnetoencephalograph detects magnetic fields emitted by cranial nerves. When the sensor 150 is used in a magnetoencephalograph, the size of the magnetic element included in the sensor 150 is, for example, 1 mm or more and less than 10 mm. This size is, for example, the length including the MFC.

[0101] As shown in Fig. 9, the sensor 150 (magnetoencephalograph) is worn on, for example, the head of a human body. The sensor 150 (magnetoencephalograph) includes a sensor unit 301. The sensor 150 (magnetoencephalograph) may include a plurality of sensor units 301. The number of the plurality of sensor units 301 is, for example, approximately 100 (for example, not less than 50 and not more than 150). The plurality of sensor units 301 are provided on a flexible base 302.

[0102] The sensor 150 may include, for example, a circuit for differential detection, etc. The sensor 150 may also include a sensor (for example, a potential terminal or an acceleration sensor) separate from the sensor.

[0103] The size of the sensor 150 is smaller than that of a conventional SQUID sensor. This makes it easy to install multiple sensor units 301. It also makes it easy to install multiple sensor units 301 together with other circuits. It also makes it easy for multiple sensor units 301 to coexist with other sensors.

[0104] The base 302 may include an elastic material such as silicone resin. For example, a plurality of sensor units 301 are connected to the base 302. The base 302 can be attached to the head, for example.

[0105] The input / output cord 303 of the sensor unit 301 is connected to a sensor driving unit 506 and a signal input / output unit 504 of the diagnostic device 500. The sensor unit 301 performs magnetic field measurement based on power from the sensor driving unit 506 and a control signal from the signal input / output unit 504. The measurement result is input to the signal input / output unit 504. The signal obtained by the signal input / output unit 504 is supplied to a signal processing unit 508. The signal processing unit 508 performs processing such as noise removal, filtering, amplification, and signal calculation. The signal processed by the signal processing unit 508 is supplied to a signal analysis unit 510. The signal analysis unit 510 extracts, for example, a specific signal for magnetoencephalography. The signal analysis unit 510 performs signal analysis, for example, to align the signal phase.

[0106] The output of the signal analysis unit 510 (data after signal analysis) is supplied to a data processing unit 512. The data processing unit 512 performs data analysis. In this data analysis, for example, image data such as MRI (Magnetic Resonance Imaging) can be incorporated. In this data analysis, for example, scalp potential information such as EEG (Electroencephalogram) can be incorporated. By the data analysis, for example, neural firing point analysis or inverse problem analysis can be performed.

[0107] The results of the data analysis are supplied to, for example, the imaging diagnostic unit 516. Imaging is performed in the imaging diagnostic unit 516. The imaging assists diagnosis.

[0108] The above series of operations is controlled, for example, by a control mechanism 502. For example, necessary data such as primary signal data or metadata during data processing is stored in a data server. The data server and the control mechanism may be integrated.

[0109] The diagnostic device 500 according to the embodiment includes a sensor 150 and a processing unit that processes an output signal obtained from the sensor 150. The processing unit includes, for example, at least one of a signal processing unit 508 and a data processing unit 512. The processing unit includes, for example, a computer.

[0110] In the sensor 150 shown in Fig. 9, the sensor unit 301 is placed on the head of the human body. The sensor unit 301 may also be placed on the chest of the human body. This allows for cardiac magnetism measurement. For example, the sensor unit 301 may be placed on the abdomen of a pregnant woman. This allows for fetal heart rate testing.

[0111] The sensor device including the subject is preferably placed in a shielded room, which can suppress the influence of, for example, geomagnetism or magnetic noise.

[0112] For example, a mechanism may be provided to locally shield the measurement site on the human body or the sensor unit 301. For example, a shielding mechanism may be provided in the sensor unit 301. For example, effective shielding may be performed in signal analysis or data processing.

[0113] In the embodiment, the substrate 302 may be flexible or may not have substantial flexibility. In the example shown in FIG. 9, the substrate 302 is a continuous film processed into a hat shape. The substrate 302 may be net-shaped. This may provide, for example, good wearability. For example, the substrate 302 may adhere better to the human body. The substrate 302 may be helmet-shaped and hard.

[0114] FIG. 10 is a schematic diagram showing an inspection device according to an embodiment. In the example shown in FIG. 10, a sensor section 301 is provided on a flat hard substrate 305 .

[0115] In the example shown in Fig. 10, the input and output of signals obtained from the sensor unit 301 are the same as the input and output described with reference to Fig. 9. In the example shown in Fig. 10, the processing of signals obtained from the sensor unit 301 is the same as the processing described with reference to Fig. 9.

[0116] There is a reference example in which a SQUID (Superconducting Quantum Interference Device) sensor is used as a device to measure weak magnetic fields such as those generated by living organisms. However, because this reference example uses superconductivity, the device is large and consumes a lot of power, which places a heavy burden on the subject (patient) to be measured.

[0117] According to the embodiment, the device can be made smaller. Power consumption can be reduced. The burden on the measurement subject (patient) can be reduced. According to the embodiment, the signal-to-noise ratio of magnetic field detection can be improved. Sensitivity can be improved.

[0118] The embodiment may include the following configurations (for example, technical solutions). (Configuration 1) a first magnetic element including a first end and a first other end, the first magnetic element extending from the first end to the first other end along a first direction; a second magnetic element including a second end and a second other end, the direction from the second end to the second other end being along the first direction, and the first other end being electrically connected to the second end; a first conductive member including a first portion, a first other portion, a second portion, and a second other portion, wherein the first portion corresponds to the first end portion, the first other portion corresponds to the first other end portion, the second portion corresponds to the second end portion, the second other portion corresponds to the second other end portion, and the first other portion is electrically connected to the second portion; a second conductive member including a first conductive portion, a first other conductive portion, a second conductive portion, and a second other conductive portion, wherein the first conductive portion corresponds to the first end portion, the first other conductive portion corresponds to the first other end portion, the second conductive portion corresponds to the second end portion, the second other conductive portion corresponds to the second other end portion, and the first other conductive portion is electrically connected to the second conductive portion; A sensor having an element portion including:

[0119] (Configuration 2) a second direction from the first conductive member to the first magnetic element and the second magnetic element intersects with the first direction; 2. The sensor of claim 1, wherein a direction from the second conductive member to the first magnetic element and the second magnetic element is along the second direction.

[0120] (Configuration 3) The element portion is a first terminal electrically connected to the first other portion and the second portion; a second terminal electrically connected to the first portion and the second other portion; a third terminal electrically connected to the first conductive portion; a fourth terminal electrically connected to the second other conductive portion; further comprising a first current including an AC component can be supplied between the first terminal and the second terminal; a second current including a DC component can be supplied between the third terminal and the fourth terminal; The sensor of configuration 2, wherein when the first current flows from the first terminal to the second terminal, the second current flows from the third terminal to the fourth terminal or from the fourth terminal to the third terminal.

[0121] (Configuration 4) the first magnetic element includes a first magnetic layer; the first magnetization of the first magnetic layer includes a first component in a first orientation; the first direction is along a direction from the first end to the first other end, or along a direction from the first other end to the first end, the second magnetic element includes a second magnetic layer; 4. The sensor of configuration 3, wherein the second magnetization of the second magnetic layer includes a second component in the first orientation.

[0122] (Configuration 5) a first circuit capable of supplying the first current to the first conductive member; a second circuit capable of supplying the second current to the second conductive member; 5. The sensor of claim 3 or 4, further comprising:

[0123] (Configuration 6) further comprising a third circuit and a fourth circuit; the third circuit is capable of supplying a detection voltage or a detection current between a first connection point electrically connected to the first end and a second connection point electrically connected to the second other end, The sensor according to configuration 5, wherein the fourth circuit is capable of outputting a value corresponding to a change in potential at a third connection point of the first other end and the second end.

[0124] (Configuration 7) The element portion is a third magnetic element; a fourth magnetic element; and further comprising the third magnetic element includes a third end and a third other end, a direction from the third end to the third other end is along the first direction; the third end is electrically connected to the first end, the fourth magnetic element includes a fourth end and a fourth other end, a direction from the fourth end to the fourth other end is along the first direction; the third other end is electrically connected to the fourth end, the fourth other end is electrically connected to the second other end, the first conductive member further includes a third portion, a third other portion, a fourth portion, and a fourth other portion; the third portion corresponds to the third end portion, the third other portion corresponds to the third other end portion, the fourth portion corresponds to the fourth end portion, and the fourth other portion corresponds to the fourth other end portion; the third other portion is electrically connected to the fourth portion, the third portion is electrically connected to the first portion; the fourth other portion is electrically connected to the second other portion, the second conductive member further includes a third conductive portion, a third other conductive portion, a fourth conductive portion, and a fourth other conductive portion; the third conductive portion corresponds to the third end portion, the third other conductive portion corresponds to the third other end portion, the fourth conductive portion corresponds to the fourth end portion, and the fourth other conductive portion corresponds to the fourth other end portion; the third other conductive portion is electrically connected to the fourth conductive portion, the third conductive portion is electrically connected to the first conductive portion, The sensor according to configuration 4, wherein the fourth other conductive portion is electrically connected to the second other conductive portion.

[0125] (Configuration 8) a direction from the first conductive member to the third magnetic element and the fourth magnetic element is along the second direction; 8. The sensor of claim 7, wherein a direction from the second conductive member to the third magnetic element and the fourth magnetic element is along the second direction.

[0126] (Configuration 9) the second terminal is electrically connected to the first portion and the second other portion via the third other portion, the third portion, the fourth portion, and the fourth other portion; the third terminal is further electrically connected to the third conductive portion, The sensor of configuration 8, wherein the fourth terminal is further electrically connected to the fourth other conductive portion.

[0127] (Configuration 10) the third magnetic element includes a third magnetic layer; the third magnetization of the third magnetic layer includes a third component in the first orientation; the fourth magnetic element includes a fourth magnetic layer; 9. The sensor of claim 8, wherein the fourth magnetization of the fourth magnetic layer includes a fourth component in the first orientation.

[0128] (Configuration 11) a first circuit capable of supplying the first current to the first conductive member; a second circuit capable of supplying the second current to the second conductive member; The sensor according to any one of configurations 7 to 10, further comprising:

[0129] (Configuration 12) further comprising a third circuit and a fourth circuit; the third circuit is capable of supplying a detection voltage or a detection current between a first connection point electrically connected to the first end and a second connection point electrically connected to the second other end, The sensor of configuration 11, wherein the fourth circuit is capable of outputting a value corresponding to a change in potential of a potential difference between a third connection point of the first other end and the second end and a fourth connection point of the third other end and the fourth end.

[0130] (Configuration 13) a first electrical resistance of the first magnetic element when the second current flows is one of higher and lower than the first electrical resistance when the second current does not flow; The sensor of configuration 4, wherein the second electrical resistance of the second magnetic element when the second current flows is one of higher and lower than the second electrical resistance when the second current does not flow.

[0131] (Configuration 14) a first electrical resistance of the first magnetic element that is variable in response to a magnetic field to be detected; 5. The sensor according to any one of configurations 2 to 4, wherein the second electrical resistance of the second magnetic element is variable in response to the magnetic field to be detected.

[0132] (Configuration 15) 15. The sensor of claim 14, wherein the magnetic field to be detected includes a component along a third direction that intersects a plane that includes the first direction and the second direction.

[0133] (Configuration 16) a distance between the first portion and the first end portion is shorter than a distance between the first portion and the first other end portion, and is shorter than a distance between the first other portion and the first end portion; A sensor described in any one of configurations 1 to 15, wherein the distance between the first conductive portion and the first end portion is shorter than the distance between the first conductive portion and the first other end portion, and shorter than the distance between the first other conductive portion and the first end portion.

[0134] (Configuration 17) a first magnetic element; a second magnetic element; a first conductive member, the first conductive member including a first region overlapping the first magnetic element and a second region overlapping the second magnetic element; a second conductive member, the second conductive member including a third region overlapping the first magnetic element and a fourth region overlapping the second magnetic element; an element portion including a first current can be supplied to the first conductive member; a second current can be supplied to the second conductive member; A sensor wherein when the direction of the first current flowing through the first region is the same as the direction of the second current flowing through the third region, the direction of the first current flowing through the second region is opposite to the direction of the second current flowing through the fourth region.

[0135] (Configuration 18) the first magnetic element is electrically connected in series with the second magnetic element; a first electrical resistance of the first magnetic element when the second current flows through the third region is one of higher and lower than the first electrical resistance when the second current does not flow; A sensor as described in configuration 17, wherein the second electrical resistance of the second magnetic element when the second current flows through the fourth region is one of higher and lower than the second electrical resistance when the second current does not flow.

[0136] (Configuration 19) the first magnetic element includes a first magnetic layer; the second magnetic element includes a second magnetic layer; 19. The sensor of any one of configurations 17-18, wherein the first magnetization of the first magnetic layer has the same orientation as the second magnetization of the second magnetic layer.

[0137] (Configuration 20) The sensor according to any one of configurations 1 to 19, a processing unit for processing an output signal obtained from the sensor; An inspection device equipped with:

[0138] According to the embodiment, a sensor and an inspection device that can improve characteristics can be provided.

[0139] The embodiments of the present invention have been described above with reference to examples. However, the present invention is not limited to these examples. For example, the specific configurations of the elements included in the sensor or inspection device, such as the magnetic layer, magnetic element, conductive member, control unit, and processing unit, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0140] Any combination of two or more elements of each example within the scope of technical feasibility is also included within the scope of the present invention as long as it encompasses the gist of the present invention.

[0141] All sensors and inspection devices that can be implemented by a person skilled in the art by appropriately modifying the design based on the sensor and inspection device described above as embodiments of the present invention also fall within the scope of the present invention, as long as they include the gist of the present invention.

[0142] Within the scope of the concept of the present invention, a person skilled in the art may conceive of various modifications and alterations, and it is understood that these modifications and alterations also fall within the scope of the present invention.

[0143] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0144] 10S: element unit, 11-14: first to fourth magnetic elements, 11M-14M: first to fourth magnetizations, 11a-14a: first to fourth magnetic layers, 11b-14b: first to fourth opposing magnetic layers, 11bM-14bM: magnetization, 11e-14e: first to fourth end portions, 11f-14f: first to fourth other end portions, 11n-14n: first to fourth non-magnetic layers, 21, 22: first and second conductive members, 51-54: first to fourth magnetic portions, 51A-54A: first to fourth opposing magnetic portions, 71-74: first to fourth circuits, 110, 111, 150, 150a: sensor, 301: sensor unit, 302: base, 303: input / output code, 305: base, 500: diagnostic device, 502: control mechanism, 504: signal input / output section, 506: sensor driving section, 508: signal processing section, 510: signal analysis section, 512: data processing section, 516: imaging diagnostic section, 600: battery system, 610: battery, 680: inspection object, 710: inspection device, 770: processing section, CP1 to CP4: first to fourth connection points, D1 to D3: first to third directions, H: magnetic field, Ha: AC magnetic field, Hs: magnetic field to be detected, N1: noise intensity, RR1, RR2: first and second electrical resistances, Rv1, Rv2: first and second resistance changes, T1 to T4: first to fourth terminals, VR1: output voltage, Vac: AC voltage, Vdc, Vdc1: DC voltage, Vs: detection voltage c1e~c4e: 1st~4th conductive part, c1f~c4f: 1st~4th other conductive part, i1, i2: 1st, 2nd current, p1e~p4e: 1st~4th part, p1f~p4f: 1st~4th other part, rg1~rg4: 1st~4th region

Claims

1. a first magnetic element including a first end and a first other end, the first magnetic element extending from the first end to the first other end along a first direction; a second magnetic element including a second end and a second other end, the direction from the second end to the second other end being along the first direction, and the first other end being electrically connected to the second end; a first conductive member including a first portion, a first other portion, a second portion, and a second other portion, wherein the first portion corresponds to the first end portion, the first other portion corresponds to the first other end portion, the second portion corresponds to the second end portion, the second other portion corresponds to the second other end portion, and the first other portion is electrically connected to the second portion; a second conductive member including a first conductive portion, a first other conductive portion, a second conductive portion, and a second other conductive portion, wherein the first conductive portion corresponds to the first end portion, the first other conductive portion corresponds to the first other end portion, the second conductive portion corresponds to the second end portion, the second other conductive portion corresponds to the second other end portion, and the first other conductive portion is electrically connected to the second conductive portion; an element portion including a second direction from the first conductive member to the first magnetic element and the second magnetic element is perpendicular to the first direction; a direction from the second conductive member to the first magnetic element and the second magnetic element is along the second direction; the element portion includes a first magnetic portion, a first opposing magnetic portion, a second magnetic portion, and a second opposing magnetic portion, The direction from the first magnetic portion to the first opposing magnetic portion is the first direction and the second direction. along a third direction intersecting the containing plane, a position of at least a part of the first magnetic element in the third direction is between a position of the first magnetic portion in the third direction and a position of the first opposing magnetic portion in the third direction, a direction from the second magnetic portion to the second opposing magnetic portion is along the third direction; a position of at least a part of the second magnetic element in the third direction is between a position of the second magnetic portion in the third direction and a position of the second opposing magnetic portion in the third direction, a position of the first magnetic element in the second direction is between a position of the first conductive member in the second direction and a position of the second conductive member in the second direction, and a position of the first magnetic portion in the second direction and a position of the first opposing magnetic portion in the second direction, A sensor in which the position of the second magnetic element in the second direction is between the position of the first conductive member in the second direction and the position of the second conductive member in the second direction, and the position of the second magnetic portion in the second direction and the position of the second opposing magnetic portion in the second direction.

2. a first magnetic element including a first end and a first other end, the first magnetic element extending from the first end to the first other end along a first direction; a second magnetic element including a second end and a second other end, the direction from the second end to the second other end being along the first direction, and the first other end being electrically connected to the second end; a first conductive member including a first portion, a first other portion, a second portion, and a second other portion, wherein the first portion corresponds to the first end portion, the first other portion corresponds to the first other end portion, the second portion corresponds to the second end portion, the second other portion corresponds to the second other end portion, and the first other portion is electrically connected to the second portion; a second conductive member including a first conductive portion, a first other conductive portion, a second conductive portion, and a second other conductive portion, wherein the first conductive portion corresponds to the first end portion, the first other conductive portion corresponds to the first other end portion, the second conductive portion corresponds to the second end portion, the second other conductive portion corresponds to the second other end portion, and the first other conductive portion is electrically connected to the second conductive portion; an element portion including a second direction from the first conductive member to the first magnetic element and the second magnetic element is perpendicular to the first direction; a direction from the second conductive member to the first magnetic element and the second magnetic element is along the second direction; the first conductive member is between the second conductive member and the first magnetic element and between the second conductive member and the second magnetic element; or The sensor, wherein the second conductive member is between the first conductive member and the first magnetic element and between the first conductive member and the second magnetic element.

3. The element portion is a first terminal electrically connected to the first other portion and the second portion; a second terminal electrically connected to the first portion and the second other portion; a third terminal electrically connected to the first conductive portion; a fourth terminal electrically connected to the second other conductive portion; further comprising a first current having an AC component can be supplied between the first terminal and the second terminal; a second current including a DC component can be supplied between the third terminal and the fourth terminal; 2. The sensor of claim 1, wherein when the first current flows from the first terminal to the second terminal, the second current flows from the third terminal to the fourth terminal or from the fourth terminal to the third terminal.

4. the first magnetic element includes a first magnetic layer; the first magnetization of the first magnetic layer includes a first component in a first orientation; the first direction is along a direction from the first end to the first other end, or along a direction from the first other end to the first end, the second magnetic element includes a second magnetic layer; The sensor of claim 3 , wherein the second magnetization of the second magnetic layer includes a second component in the first orientation.

5. a first circuit capable of supplying the first current to the first conductive member; a second circuit capable of supplying the second current to the second conductive member; The sensor of claim 3 further comprising:

6. further comprising a third circuit and a fourth circuit; the third circuit is capable of supplying a detection voltage or a detection current between a first connection point electrically connected to the first end and a second connection point electrically connected to the second other end, The sensor according to claim 5 , wherein the fourth circuit is capable of outputting a value corresponding to a change in potential at a third connection point of the first other end and the second end.

7. a first electrical resistance of the first magnetic element when the second current flows is one of higher and lower than the first electrical resistance when the second current does not flow; The sensor of claim 4 , wherein a second electrical resistance of the second magnetic element when the second current flows is one of higher and lower than the second electrical resistance when the second current does not flow.

8. a distance between the first portion and the first end portion is shorter than a distance between the first portion and the first other end portion, and is shorter than a distance between the first other portion and the first end portion; 2. The sensor according to claim 1, wherein a distance between the first conductive portion and the first end portion is shorter than a distance between the first conductive portion and the first other end portion, and is shorter than a distance between the first other conductive portion and the first end portion.

9. A sensor according to any one of claims 1 to 8; a processing unit for processing an output signal obtained from the sensor; An inspection device equipped with:

Images