Two-way magnetic measurement sensor, two-way magnetic measurement method, and two-way magnetic measurement device

Abstract

To provide bidirectional magnetic measuring means capable of simultaneously and independently measuring a component perpendicular to the surface and a component parallel to the surface of magnetic flux on an iron core surface even in a narrow gap such as within a gap of a motor.SOLUTION: A bidirectional magnetic measurement sensor is provided with a first conductor loop pattern consisting of a thin-layer conductor formed on one side of a substrate, a second conductor loop pattern consisting of a thin-layer conductor formed on each side of the substrate, a first conductor connection unit connected so that the first conductor loop pattern is in the same circumferential direction, a first terminal unit with a first signal output line connected to a pair of first terminals disposed at both ends of the first conductor loop pattern to which the first conductor connection unit is connected, a second conductor connection unit connected so that the second conductor loop pattern is in the same circumferential direction, and a second terminal unit with a second signal output line connected to a pair of second terminals disposed at both ends of the second conductor loop pattern to which the second conductor connection unit is connected.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a two-way magnetic field measuring sensor, a two-way magnetic field measuring method, and a two-way magnetic field measuring device. More specifically, the present invention relates to a technique for measuring magnetism in two directions in magnetic components such as iron cores and magnets used in electromagnetic devices such as motors, transformers, and reactors. [Background technology]

[0002] Electromagnetic devices such as motors, transformers, and reactors are widely used in various fields, including industry and home appliances. In recent years, the use of electromagnetic devices in electric vehicles, hybrid vehicles, and other vehicles has rapidly expanded. For electromagnetic devices installed in electric vehicles, hybrid vehicles, and other vehicles, high efficiency, high energy density, compactness, and high reliability are important. For this reason, it is important to properly measure and control the magnetic flux density and magnetic flux strength generated in iron cores, which have a strong impact on the performance of the iron cores used in electromagnetic devices.

[0003] In particular, it is known that in motors, the strength and distribution of magnetic flux in the gap between the rotor and stator directly affect the drive torque of the motor. For example, Non-Patent Document 1 discloses that gap magnetic flux harmonics have a strong effect on torque ripple, cogging, and mechanical vibration of the motor. That is, Non-Patent Document 1 describes that the radial and tangential components of the gap magnetic flux mainly affect the drive torque, torque ripple, cogging, and mechanical vibration of the motor.

[0004] As a method for measuring the magnetic flux in each part of an iron core used in an electromagnetic device, Patent Document 1 discloses a technology for measuring the magnetic flux density in the X and Y directions of an electromagnetic steel sheet on the outermost surface of an iron core by configuring four probes to contact the iron core surface at the vertices of a square. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2011-27475 [Non-patent literature]

[0006] [Non-Patent Document 1] Ryoichi Takahata: Doctoral dissertation "Research on loss reduction technology of interior permanent magnet synchronous motors for compressors" (Tohoku University, published September 16, 2015) Summary of the Invention [Problem to be solved by the invention]

[0007] However, the above-mentioned conventional techniques have the following problems. Specifically, the magnetic flux density measurement method described in Patent Document 1 can only measure the component of magnetic flux density parallel to the steel sheet surface inside the steel sheet. As a result, in motors, the radial component of the gap magnetic flux density, which has a strong influence on motor drive torque, torque ripple, cogging, and mechanical vibration, cannot be measured. Furthermore, the method of measuring magnetic flux density described in Patent Document 1 positions the probe for magnetic flux measurement in a direction extending perpendicular to the steel sheet surface, making it particularly difficult to install the probe for magnetic flux measurement in a narrow gap such as the inside of a motor gap.

[0008] The present invention has been made in view of the above circumstances to solve the above problems, and aims to provide a means for measuring two-way magnetic fields that can simultaneously and independently measure the components perpendicular to the surface and the components parallel to the surface of the magnetic flux on the iron core surface, even in a narrow gap such as the inside of a motor gap. [Means for solving the problem]

[0009] The two-way magnetic measurement sensor of the present invention, which advantageously solves the above problem, is characterized by comprising: a first conductor loop pattern made of a thin layer conductor formed on one side of a substrate; a second conductor loop pattern made of a thin layer conductor formed on both sides of the substrate; a first conductor connection portion to which the first conductor loop patterns are connected so that they have the same winding direction; a first terminal portion in which a first signal output line is connected to a pair of first terminals located at both ends of the first conductor loop pattern to which the first conductor connection portion is connected; a second conductor connection portion to which the second conductor loop pattern is connected so that they have the same winding direction; and a second terminal portion in which a second signal output line is connected to a pair of second terminals located at both ends of the second conductor loop pattern to which the second conductor connection portion is connected.

[0010] The two-way magnetic measurement sensor according to the present invention is (a) the base material includes a first thin plate base material and a second thin plate base material, the first conductor loop pattern is formed on one side of the first thin plate base material and is connected to the first conductor connection portion, and the second conductor loop pattern is formed on both sides of the second thin plate base material and is connected to the second conductor connection portion by passing through an end face of the second thin plate base material or a through hole provided in the second thin plate base material; (b) the second conductor loop pattern is provided on a plane perpendicular to the substrate; (c) The total thickness of the main body of the two-way magnetic measurement sensor, which is tightly integrated by bonding together the substrate, a first conductor loop pattern consisting of a thin-layer conductor formed on one side of the substrate, a second conductor loop pattern consisting of a thin-layer conductor formed on both sides of the substrate, a first conductor connection part to which the first conductor loop patterns are connected so as to have the same winding direction, and a second conductor connection part to which the second conductor loop patterns are connected so as to have the same winding direction, is 250 μm or less; (d) When installed on the inner surface of the stator facing the gap portion of the motor, it is considered that a more preferable solution would be to form the center of the first conductor loop pattern and the center of the second conductor loop pattern so that they coincide with the center of the tooth end face of the stator.

[0011] Furthermore, the two-directional magnetic measurement method according to the present invention includes: (e) A two-way magnetic measurement method capable of measuring magnetic flux generated on the surface of a magnetic body in two directions using the two-way magnetic measurement sensor described in any one of the above, comprising the steps of connecting a first signal output line to the first terminal portion and connecting a second signal output line to the second terminal portion, converting a first output signal output from the first signal output line into a first magnetic flux signal and converting a second output signal output from the second signal output line into a second magnetic flux signal, and recording the first magnetic flux signal and the second magnetic flux signal independently.

[0012] Furthermore, the two-directional magnetic flux measuring device according to the present invention is (f) a sensor unit including the two-way magnetometric sensor described above; a first signal output line connected to the first terminal portion and a second signal output line connected to the second terminal portion; a first magnetic flux signal converter that converts a first output signal output from the first signal output line into a first magnetic flux signal; The measuring unit includes a second magnetic flux signal conversion unit that converts the second output signal output from the second signal output line into a second magnetic flux signal, and a magnetic flux signal recording unit that records the first magnetic flux signal and the second magnetic flux signal independently. [Effects of the Invention]

[0013] According to the present invention, the magnetic field of an iron core used in an electromagnetic device can be measured and controlled by simultaneously and independently measuring the component of magnetic flux perpendicular to the surface and the component parallel to the surface on the iron core surface in two directions. [Brief explanation of the drawings]

[0014] [Figure 1] 1A and 1B are schematic diagrams showing the configuration of a two-way magnetometry sensor according to an embodiment of the present invention, in which Fig. 1A is a front view of the two-way magnetometry sensor, and Fig. 1B is a side view of the two-way magnetometry sensor. [Figure 2]3 shows a laminated structure in a cross section of a main body portion of a two-way magnetic measurement sensor according to the present embodiment. [Figure 3] The figure shows the installation of a two-way magnetic measurement sensor in the R-θ direction and RZ direction in the air gap formed by the stator teeth of the motor. [Figure 4] FIG. 1 is a diagram showing an overview of a two-way magnetic measurement device according to this embodiment, which is equipped with a two-way magnetic measurement sensor unit, a magnetic flux signal conversion unit, and a measurement unit that measures and records magnetic flux signals. [Figure 5] 10 is magnetic flux waveform data showing the change over time in the two-way magnetic flux density of a motor measured using the two-way magnetic field measurement device according to the present embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0015] The two-way magnetic measurement sensor according to the present embodiment will be described below with reference to the drawings. The drawings are schematic and may differ from the actual sensor. The following embodiments are merely examples of devices and methods for embodying the technical concept of the present invention, and are not intended to limit the configurations thereof. In other words, the technical concept of the present invention can be modified in various ways within the technical scope defined in the claims.

[0016] [First embodiment] A two-way magnetic measurement sensor according to a first embodiment will be described. The two-way magnetic measurement sensor according to the present invention can be applied to any electromagnetic device such as a motor, a transformer, a reactor, etc. In this embodiment, a two-way magnetic measurement sensor 100 will be described, which is particularly applicable when the electromagnetic device is a motor.

[0017] The two-way magnetic measurement sensor of this embodiment comprises a first conductor loop pattern made of a thin layer conductor formed on one side of a substrate, a second conductor loop pattern made of a thin layer conductor formed on both sides of the substrate, a first conductor connection portion to which the first conductor loop patterns are connected so that they have the same winding direction, a first terminal portion to which a first signal output line is connected to a pair of first terminals arranged at both ends of the first conductor loop pattern to which the first conductor connection portion is connected, a second conductor connection portion to which the second conductor loop pattern is connected so that they have the same winding direction, and a second terminal portion to which a second signal output line is connected to a pair of second terminals arranged at both ends of the second conductor loop pattern to which the second conductor connection portion is connected. Hereinafter, each of the components constituting the two-way magnetic measurement sensor according to this embodiment will be described.

[0018] 1 is a schematic diagram showing the configuration of a two-way magnetic measurement sensor 100 according to this embodiment. As shown in FIG. 1, a first conductor loop pattern 102 and a second conductor loop pattern 106 included in the two-way magnetic measurement sensor 100 according to this embodiment are each formed on a substrate 101. The first conductor loop pattern 102 is formed on the front surface 101a of the substrate 101, which is one surface of the substrate 101, and the second conductor loop pattern 106 is formed across the front surface 101a and the back surface 101b of the substrate through two through holes opened in the substrate 101. The configuration of the two-way magnetic measurement sensor 100 will be described in detail below.

[0019] Fig. 1(a) is a front view of a two-way magnetic measurement sensor 100. As shown in Fig. 1(a), the two-way magnetic measurement sensor 100 according to this embodiment includes a first conductor loop pattern 102 made of a thin-layer conductor formed on a substrate front surface 101a, which is one surface of a substrate 101. The substrate front surface 101a and the substrate back surface 101b are surfaces that face the measurement surface of a magnetic body whose magnetism is to be measured. The substrate 101 is a substrate that serves as a base for forming the first conductive loop pattern 102 and the second conductive loop pattern 106. Examples of the substrate 101 include a bulk substrate, a thin plate substrate, and a thin film sheet. The material for the substrate 101 can be a polyimide resin or the like, which has strength and flexibility, but is not limited to this as long as conductor patterning is possible on its surface. The substrate 101 is made of a material that is not affected by magnetic fields. Furthermore, the substrate 101 is made of a material that does not easily conduct electricity. In other words, the substrate 101 must be made of a non-magnetic and non-conductive material. This is to prevent losses due to leakage of magnetic field lines generated by electromagnetic devices such as motors, unnecessary heat generation, etc.

[0020] Furthermore, it is preferable that the substrate 101 has both toughness and flexibility. This is because the substrate 101 has both toughness and flexibility, which allows the construction of a two-way magnetic measurement sensor that is excellent in durability and can be installed in a narrow gap such as inside the gap of a motor, etc. From this perspective, the material constituting the substrate 101 is preferably polyimide resin, polyesterimide resin, low-dielectric-constant polyimide resin, low-expansion polyimide resin, or the like.

[0021] The thickness of the substrate 101 is preferably 5.0 to 100 μm. If the thickness of the substrate 101 is 5.0 μm or more, the first conductor loop pattern 102 can be stably formed on the substrate 101, which is preferable. If the thickness of the substrate 101 is 100 μm or less, the two-way magnetic measurement sensor 100 can be made thinner, which is preferable.

[0022] The substrate 101 has a first conductor loop pattern 102 made of a thin-layer conductor formed on one surface, the substrate front surface 101a. The first conductor loop pattern 102 is a conductor loop pattern for measuring the magnetic flux component in the direction perpendicular to the surface of the magnetic flux (R direction) among the two-directional magnetic fluxes that can be measured by the two-directional magnetic measurement sensor 100. The first conductor loop patterns 102 are formed so that the first conductor loop patterns 102 have the same winding direction. The pattern shape of the first conductor loop pattern 102 can be set appropriately depending on the shape of the magnetic pole face that is the target of magnetic measurement, and specific pattern shapes of the first conductor loop pattern 102 include square, rectangle, trapezoid, pentagon, hexagon, circle, ellipse, etc. The pattern width of the first conductor loop pattern 102 is preferably 1.0 mm or less, for example, 0.1 to 0.6 mm. The first conductor loop pattern 102 is connected to a first conductor connecting portion 103. The first conductor connecting portion 103 is further connected to a first terminal portion 104, and the first terminal portion 104 is connected to a first signal output line 105.

[0023] The thickness of the first conductor loop pattern 102 is preferably 10 to 100 μm. If the thickness of the first conductor loop pattern 102 is 10 μm or more, it is preferable because the mechanical strength of the thin-film conductor can be maintained. On the other hand, if the thickness of the first conductor loop pattern 102 is 100 μm or less, it is preferable because the two-way magnetic measurement sensor can be installed in a narrow gap such as inside the gap of a motor, etc.

[0024] The conductive material for forming the first conductor loop pattern 102 can be a conductive metal foil such as copper or aluminum, but other conductive and non-magnetic materials can also be used. That is, the first conductor loop pattern 102 is not particularly limited as long as it is made of a material that is both conductive and non-magnetic. The material for forming the first conductor loop pattern 102 is preferably at least one metal selected from copper, aluminum, gold, silver, and iron. Alternatively, the material for forming the first conductor loop pattern 102 may be a non-metal such as carbon or a conductive polymer.

[0025] The method for forming the conductor patterning that constitutes first conductor loop pattern 102 is not particularly limited as long as it is a method that can form a conductor pattern, and any liquid-phase, gas-phase, or solid-phase method can be used, such as photoetching using a photoresist, conductor plating, or copper foil cladding. Bonding of first conductor loop pattern 102 to front surface 101a of substrate 101 may be performed by providing an adhesive layer containing an adhesive, or by providing an adhesive layer using adhesive tape or the like.

[0026] That is, to integrate the multilayer body consisting of the substrate 101, the first conductor loop pattern 102, and the second conductor loop pattern 106 (described later) into a bidirectional magnetic measurement sensor body, an adhesive layer made of an adhesive or the like can be sandwiched into the gaps formed between the substrate 101, the first conductor loop pattern 102, and the second conductor loop pattern 106 to integrate them. When the adhesive layer is formed using an adhesive, known non-magnetic, non-conductive adhesives such as epoxy resins, acrylic resins, and urethane resins can be used, but the adhesive is not limited to these. The adhesive layer is formed by applying an adhesive to the substrate 101, the first conductor loop pattern 102, and the second conductor loop pattern 106 in advance. When the adhesive layer is formed using an adhesive tape, examples of the adhesive tape that can be used include polyester film tape and fluororesin film tape.

[0027] Furthermore, the substrate 101 is provided with second conductor loop patterns 106 made of thin-layer conductors formed on the substrate front surface 101a and the substrate back surface 101b. The second conductor loop patterns 106 include a second conductor loop pattern 106a formed on the substrate front surface 101a of the substrate 101 and a second conductor loop pattern 106b formed on the substrate back surface 101b of the substrate 101. The second conductor loop patterns 106 are conductor loop patterns for measuring magnetic flux components in directions parallel to the surface of the magnetic flux (for example, the θ direction or the Z direction) of the two-directional magnetic flux that can be measured by the two-directional magnetic measurement sensor 100. The second conductor loop patterns 106 are formed so that the second conductor loop patterns 106 have the same winding direction. The pattern shape of second conductor loop pattern 106 is appropriately set depending on the shape of the magnetic pole surface whose magnetic field is to be measured. Specific examples of the pattern shape of second conductor loop pattern 106 include a square, a rectangle, and a trapezoid. The pattern width of second conductor loop pattern 106 is preferably 1.0 mm or less, for example, 0.1 to 0.6 mm. Second conductor loop pattern 106 is connected to second conductor connecting portion 107. Second conductor connecting portion 107 is further connected to second terminal portion 108, and second terminal portion 108 is connected to second signal output line 109.

[0028] The second conductor loop pattern 106a is formed on the same surface as the front surface 101a of the substrate on which the first conductor loop pattern 102 is formed. The second conductor loop pattern 106a is formed on the front surface 101a of the substrate so as not to overlap with the first conductor loop pattern 102.

[0029] For example, the second conductor loop pattern 106a may be formed at a position on the front surface 101a of the substrate that is not formed with the first conductor loop pattern 102. The second conductor loop pattern 106a may also be formed in a selected region of the front surface 101a of the substrate other than the region where the first conductor loop pattern 102 is formed.

[0030] The second conductor loop pattern 106b is formed by passing the second conductor loop pattern 106a through a side edge surface of the substrate 101 or through a through hole provided in the substrate 101. Specifically, the second conductor loop pattern 106a is passed through a through hole provided in the upper end of the substrate 101, forming the second conductor loop pattern 106a on the substrate front surface 101a. Then, the second conductor loop pattern 106a is passed through a through hole provided in the lower end of the substrate 101, forming the second conductor loop pattern 106b on the substrate back surface 101b of the substrate 101. In this way, the second conductor loop pattern 106a is formed on the substrate front surface 101a of the substrate 101, and the second conductor loop pattern 106b is formed on the substrate back surface 101b of the substrate 101.

[0031] If the second conductor loop pattern 106a is formed by passing through the end face of the substrate 101, it is not necessary to provide a through hole. If the substrate 101 does not have a through hole, the second conductor loop pattern 106a and the second conductor loop pattern 106b are formed on the front substrate surface 101a and the back substrate surface 101b of the substrate 101, passing through the upper end face and the lower end face of the substrate 101.

[0032] Furthermore, the second conductor loop pattern 106a may be formed to pass through the upper end surface of the substrate 101 without providing a through hole at the upper end surface of the substrate 101. Alternatively, the second conductor loop pattern 106a may be formed to pass through the lower end surface of the substrate 101 without providing a through hole at the lower end surface of the substrate 101, and the second conductor loop pattern 106b may be formed on the rear surface 101b of the substrate. Alternatively, the second conductor loop pattern 106a may be formed to pass through the upper end surface of the substrate 101 and through a through hole provided at the lower end surface of the substrate 101, and the second conductor loop pattern 106b may be formed on the rear surface 101b of the substrate. Alternatively, the second conductor loop pattern 106a may be formed to pass through a through hole provided at the upper end surface of the substrate 101 and through the lower end surface of the substrate 101, and the second conductor loop pattern 106b may be formed on the rear surface 101b of the substrate. The size of the through holes is set to be equal to or shorter than the widthwise length of second conductor loop patterns 106a and 106b.

[0033] FIG. 1B is a side view of the two-way magnetic sensor. As shown in FIG. 1B, the substrate 101 may include a first thin plate substrate 111 and a second thin plate substrate 112. When the substrate 101 includes the first thin plate substrate 111 and the second thin plate substrate 112, the first thin plate substrate back surface 111b, which is one side of the first thin plate substrate 111 on which the first conductive loop pattern is not formed, faces the second thin plate substrate front surface 112a of the second thin plate substrate 112 on which the second conductive loop pattern 106a is formed. For example, an adhesive layer may be provided between the first thin plate substrate 111 and the second thin plate substrate 112, so that the first thin plate substrate 111 and the second thin plate substrate 112 are bonded together and then adhered together.

[0034] FIG. 2 shows the laminated structure of the main body of the two-way magnetic sensor in a cross section according to this embodiment. As shown in FIG. 2, the two-way magnetic sensor 100 includes a coverlay 110a, a first conductor loop pattern 102, a first thin plate substrate 111, a second conductor loop pattern 106a, a second thin plate substrate 112, a second conductor loop pattern 106b, and a coverlay 110b, arranged in this order from a magnetic pole surface S, which is the surface that comes into contact with magnetic flux generated in an electromagnetic device such as a motor, toward a direction away from the magnetic flux. For example, the two-way magnetic sensor 100 may include an adhesive layer 115 between each of these components to bond them together and secure them in close contact. The second thin plate substrate 112 has a through-hole 113a at its upper end and a through-hole 113b at its lower end. The second conductor loop pattern 106a passes through the through-hole 113a, is attached to the front surface 112a of the second thin plate substrate, and passes through the through-hole 113b. The second conductor loop pattern 106b that has passed through the through-hole 113b is attached to the rear surface 112b of the second thin plate substrate.

[0035] Here, the portion formed by the first conductor loop pattern 102 and the first thin plate substrate 111 is formed to measure the magnetic flux component in the direction perpendicular to the surface of the magnetic flux (R direction) among the two-directional magnetic fluxes that can be measured by the two-directional magnetic measurement sensor 100. The portion formed by the second conductor loop pattern 106a, the second thin plate substrate 112, and the second conductor loop pattern 106b is formed to measure the magnetic flux component in the direction parallel to the surface of the magnetic flux (θ direction) among the two-directional magnetic fluxes that can be measured by the two-directional magnetic measurement sensor 100.

[0036] The mechanical strength of the two-way magnetic sensor may be enhanced by providing a coverlay layer on the outer surfaces on both sides of the multilayer structure forming the main body of the two-way magnetic sensor, which includes the first thin plate substrate 111, the second thin plate substrate 112, the first conductor loop pattern 102, and the second conductor loop pattern 106. This is particularly advantageous for enhancing the necessary flexibility when the two-way magnetic sensor is installed in a curved portion, such as the tip surface of the tooth of a motor core. The coverlay layer can be formed by bonding a thin film of polyimide, polyethylene terephthalate, or other material, or by applying an epoxy resin, urethane resin, or the like.

[0037] That is, the coverlays 110a and 110b are used to protect the outer surfaces on both sides of the multilayer body that forms the main body of the two-way magnetic sensor 100. They are made of a material that allows the two-way magnetic sensor 100 to be thinned and has excellent flexibility, heat resistance, and dimensional stability. The coverlays 110a and 110b can be manufactured, for example, by applying an adhesive to one side of a polyimide film to form an adhesive layer, and then laminating a separator to protect the surface of the adhesive layer. Non-halogen cover films, ultra-thin cover films, etc. can also be used as the coverlays 110a and 110b.

[0038] In the two-way magnetic measurement sensor 100, it is preferable that the total thickness of the main body portion of the two-way magnetic measurement sensor, which is composed of a first thin plate substrate 111, a first conductor loop pattern 102 consisting of a thin layer conductor formed on the first thin plate substrate front surface 111a of the first thin plate substrate 111, a second conductor loop pattern 106a consisting of a thin layer conductor formed on the second thin plate substrate front surface 112a, a second conductor loop pattern 106b consisting of a thin layer conductor formed on the second thin plate substrate back surface 112b, and the second thin plate substrate 112, is 250 μm or less. Specifically, the total thickness of the two-way magnetic measurement sensor body is preferably 50 to 250 μm, and more preferably 75 to 150 μm. If the total thickness of the two-way magnetic measurement sensor body is 50 to 250 μm, the measurement sensor can be provided with sufficient flexibility required for normal use, and the magnetic flux component in the direction perpendicular to the surface of the magnetic flux (R direction) and the magnetic flux component in the direction parallel to the surface of the magnetic flux (θ direction) can be measured with good sensitivity. Furthermore, if the total thickness of the two-way magnetic measurement sensor body is 75 to 150 μm, the two-way magnetic measurement sensor can be installed in a narrow gap such as inside the gap of a motor, etc., which is preferable. Furthermore, if the two-way magnetic measurement sensor main body portion after tight integration comprises coverlays 110a and 110b, it is preferable that the total thickness of the magnetic measurement sensor main body portion including these coverlays is 300 μm or less.

[0039] In another embodiment of the present invention, the first thin plate substrate 111 is made of polyimide with a thickness of 12.5 μm or less, the one or more first conductor loop patterns 102, the one or more second conductor loop patterns 106, the one or more first conductor connecting portions 103, and the one or more second conductor connecting portions 107 are all made of copper foil with a thickness of 18 μm or less, and the adhesive layers that tightly and integrally bond the first thin plate substrate 111, the one or more first conductor loop patterns 102, the one or more second conductor loop patterns 106, the one or more first conductor connecting portions 103, and the one or more second conductor connecting portions 107 are all made of adhesive layers 115 with a thickness of 20 μm or less, and the total thickness of the main body of the two-way magnetic measurement sensor after the above components are tightly and integrally bonded is 250 μm or less. By limiting the total thickness of the main body of the two-way magnetic measurement sensor 100 to 250 μm or less, sufficient flexibility required for normal use can be provided to the two-way magnetic measurement sensor 100.

[0040] Figure 3 shows the two-directional magnetic field in the R-θ and RZ directions in the stator teeth of the motor. 3 shows the installation state of the measurement sensor 100. As shown in FIG. 3, the two-way magnetic measurement sensor 100 according to this embodiment can be installed in a motor 200 including a rotor 201 and a stator 202. The two-way magnetic measurement sensor 100 according to this embodiment is made of a material that can be thinned and has excellent flexibility, heat resistance, and other properties. Therefore, it can be bent in the direction indicated by the arrow. It can be installed in a narrow gap 204 formed between the outer edge of the rotor 201 and the inner sidewall of the stator 202 facing the outer edge of the rotor 201. The first signal output line 105 and the second signal output line of the two-way magnetic measurement sensor 100 can also be inserted into a stator inner gap 205 formed by the stator teeth 203 forming the left sidewall, the stator teeth 203 forming the right sidewall, the inner sidewall of the stator 202, and the outer sidewall of the outer peripheral stator 202.

[0041] 3, at the tip of the stator tooth 203 of the electromagnetic device (motor) 200, the component of the magnetic flux parallel to the surface of the first thin plate substrate 111 of the substrate 101 can be changed to be parallel to the circumferential direction (θ direction) of the rotor or to be parallel to the axial direction (Z direction) of the rotor 201. Such a change in position is possible by rotating the direction in which the two-way magnetic measurement sensor 100 is installed at the tip of the stator tooth 203 of the motor 200.

[0042] Another aspect of the present invention is a two-way magnetic measurement sensor 100 in which, when the two-way magnetic measurement sensor 100 is installed on the inner surface side of the stator 202 facing the gap portion of the motor 200, the centers of the one or more first conductor loop patterns 102 and the one or more second conductor loop patterns 106 coincide with the centers of the teeth end faces of the stator 202. In this way, by forming a pattern in which the centers of the first conductor loop patterns 102 and the one or more second conductor loop patterns 106 provided in the two-way magnetic measurement sensor 100 coincide with the centers of the teeth end faces of the stator 202, it is possible to improve the accuracy of the measurement position.

[0043] Furthermore, in the two-way magnetic measurement sensor 100 of this embodiment, the two-way magnetic measurement sensor 100 is installed on the magnetic body contact surface S, and a signal corresponding to the component of the magnetic flux at the magnetic body contact surface S that is perpendicular to the magnetic body contact surface S and a signal corresponding to the component of the magnetic flux at the magnetic body contact surface S that is parallel to the surface can be simultaneously output, thereby obtaining a signal corresponding to the two-way magnetic flux. At this time, a voltage corresponding to the magnetic flux component perpendicular to the magnetic material contact surface S is induced in the first conductor loop pattern 102, and a voltage corresponding to the magnetic flux component parallel to the magnetic material contact surface S is induced in the second conductor loop pattern 106, so by simultaneously detecting both voltages, it is possible to measure magnetic flux in two directions. When two or more first conductor loop patterns 102 or second conductor loop patterns 106 are provided, connecting them in series is more preferable because this further increases the signal strength and improves the S / N ratio.

[0044] The directions of the two-way magnetic flux that can be measured by the two-way magnetic measurement sensor 100 are assumed to be parallel to the sensor surface and in the thickness direction of the sensor. By appropriately modifying the configuration of the two-way magnetic measurement sensor 100, it is possible to measure magnetic flux density in three or more directions of magnetic flux. The direction of the magnetic flux parallel to the plane of the two-way magnetic sensor 100 can be changed by rotating the installation direction of the sensor 100 within the sensor plane. Furthermore, when measuring the two-way magnetic flux in the gap between the rotor 201 and the stator 202 of the motor 200, the two-way magnetic sensor 100 will deform along a part of the cylindrical side surface of the stator 202 located on the rotor 201 side. Even in such a case, by providing the two-way magnetic sensor 100 with strength and flexibility and by making the thickness of the main body of the two-way magnetic sensor 100 sufficiently thin, the two-way magnetic sensor 100 can withstand a configuration in which the sensor plane of the two-way magnetic sensor 100 is rotated.

[0045] Furthermore, another aspect of the present invention is the two-way magnetic measurement sensor 100, in which all of the one or more second conductor loop patterns 106 are on planes perpendicular to the substrate 101, and the planes are all parallel to each other. When the second conductor loop patterns 106 are on the same plane, which is perpendicular to the substrate 101, the induced electromotive forces generated in the first conductor loop pattern 102 and the second conductor loop pattern 106 can be separated into components corresponding to magnetic flux components perpendicular to the substrate 101 surface and magnetic flux components parallel to the substrate 101 surface.

[0046] As described above, the two-way magnetic measurement sensor of this embodiment comprises a first conductor loop pattern consisting of a thin layer conductor formed on one side of a thin plate substrate, and a second conductor loop pattern consisting of a thin layer conductor formed on both sides of the thin plate substrate.Therefore, even in a narrow gap such as inside the gap of a motor, etc., the magnetic flux in a local area of ​​an iron core used in electromagnetic equipment can be measured and controlled by simultaneously and independently measuring the components perpendicular to the surface and the components parallel to the surface of the magnetic flux on the iron core surface.

[0047] [Second embodiment] A two-way magnetic measurement method according to a second embodiment will be described. That is, another aspect of the present invention is a two-way magnetic measurement method using the two-way magnetic measurement sensor, connecting first and second signal output lines to the first and second terminal portions, respectively, converting output signals from the first and second signal output lines into first and second magnetic flux signals, respectively, and recording the first and second magnetic flux signals independently.

[0048] That is, the two-way magnetic measurement method of the second embodiment is a two-way magnetic measurement method that can measure magnetic flux generated on the surface of a magnetic body locally and in two directions using a two-way magnetic measurement sensor, and is characterized by including the steps of: (i) connecting a first signal output line to the first terminal portion and connecting a second signal output line to the second terminal portion; (ii) converting a first output signal output from the first signal output line into a first magnetic flux signal and converting a second output signal output from the second signal output line into a second magnetic flux signal; and (iii) independently recording the first magnetic flux signal and the second magnetic flux signal. Hereinafter, each step included in the two-way magnetic measurement method according to this embodiment will be described.

[0049] <Step (i): Step of connecting a signal output line to the terminal portion> The two-way magnetic measurement method according to this embodiment includes the step of (i) connecting a first signal output line to the first terminal portion and connecting a second signal output line to the second terminal portion. The two-way magnetic measurement sensor according to the above embodiment includes a first terminal portion 104 consisting of two first terminals and a second terminal portion 108 consisting of two second terminals. In step (i), a first signal output line 105 is connected to the first terminal portion 104 and a second signal output line 109 is connected to the second terminal portion 108. Step (i) is a preparatory step for constructing a measurement system for measuring the magnetism measured by the two-way magnetic measurement sensor 100.

[0050] <Step (ii): Step of converting the output signal output from the signal output line into a magnetic flux signal> The two-way magnetic measurement method according to this embodiment includes the steps of converting the first output signal output from the first signal output line into a first magnetic flux signal and converting the second output signal output from the second signal output line into a second magnetic flux signal. Step (ii) is a step of converting the output signals from each signal output line into magnetic flux signals. The method of converting the first and second signal outputs output from the first signal output line 105 and the second signal output line 109 of the two-way magnetic measurement sensor 100 into magnetic flux signals is not particularly limited as long as the first and second signal outputs can be acquired as induced electromotive force waveforms in the gap between the rotor and stator of a motor, for example. For example, the first and second signal outputs output from the first signal output line 105 and the second signal output line 109 can be converted into the respective magnetic flux signals by a method of time-integrating the first and second signal outputs using a digital storage oscilloscope, a method of inputting the output voltage waveform into a computer using an analog-to-digital converter and numerically integrating it over time, a method of inputting it into a digital storage oscilloscope (DSO) and integrating it over time using internal calculations of the DSO, etc. After the time integration process, gradient correction process and centering correction process may be performed.

[0051] <Step (iii): Step of Recording Magnetic Flux Signals> The two-way magnetic measurement method according to this embodiment includes a step of independently recording the first magnetic flux signal and the second magnetic flux signal. That is, step (iii) is a step of independently evaluating and recording the component perpendicular to the surface of the magnetic flux and the component parallel to the surface of the magnetic flux acquired in step (ii). In step (iii), the method of recording the magnetic flux signal is not particularly limited as long as it can independently record the component perpendicular to the surface of the magnetic flux and the component parallel to the surface of the magnetic flux.

[0052] Generally, the induced electromotive force in the gap between the rotor and stator of a motor is very small. Therefore, in step (iii), by appropriately amplifying the first and second signal outputs using a voltage amplifier, it is possible to obtain a more accurate output voltage waveform signal, and ultimately a more accurate magnetic flux waveform signal.

[0053] As described above, the two-way magnetic measurement method according to this embodiment uses the two-way magnetic measurement sensor, and therefore can simultaneously and independently measure the components perpendicular to the surface and the components parallel to the surface of the magnetic flux on the surface of the core, even in a narrow gap such as inside the gap of a motor, etc., thereby making it possible to measure and control the magnetism in a localized region of an iron core used in electromagnetic equipment.

[0054] [Third embodiment] A two-way magnetic measurement device according to a third embodiment will be described. That is, another aspect of the present invention is a two-way magnetic measurement device that includes a two-way magnetic measurement sensor, first and second magnetic flux signal converters that convert output signals from the first and second signal output lines into first and second magnetic flux signals, respectively, and first and second magnetic flux signal recorders that independently record the first and second magnetic flux signals, and measures two-way magnetic flux by the above-mentioned method.

[0055] That is, the two-way magnetic measurement device according to this embodiment includes a sensor unit including a two-way magnetic measurement sensor, a first signal output line connected to the first terminal unit and a second signal output line connected to the second terminal unit, and a first magnetic flux signal conversion unit that converts a first output signal output from the first signal output line into a first magnetic flux signal. The magnetic flux signal converter is characterized by comprising a second magnetic flux signal converter that converts the second output signal output from the second signal output line into a second magnetic flux signal, and a magnetic flux signal recorder that records the first magnetic flux signal and the second magnetic flux signal independently. Hereinafter, each member included in the two-directional magnetic measurement device 300 according to this embodiment will be described.

[0056] FIG. 4 is a diagram showing an overview of a two-directional magnetic measurement device 300 according to this embodiment. As shown, the two-way magnetic measurement device 300 of this embodiment comprises a sensor unit 301 including a two-way magnetic measurement sensor 100, and a measurement unit 302 including a magnetic flux signal conversion unit 321 and a measurement unit 322 that measures and records magnetic flux signals.

[0057] The two-way magnetic measurement device 300 according to this embodiment includes a sensor unit 301 including a two-way magnetic measurement sensor 100. The two-way magnetic measurement sensor 100 included in the sensor unit 301 is the two-way magnetic measurement sensor 100 according to the above embodiment. The two-way magnetic measurement sensor 100 includes a substrate 101, a first conductor loop pattern 102, a second conductor loop pattern 106, a first conductor connection portion 103, a first terminal portion 104 to which a first signal output line 105 is connected, a second conductor connection portion 107, and a second terminal portion 108 to which a second signal output line 109 is connected.

[0058] The two-way magnetic measurement device 100 included in the sensor unit 301 of the two-way magnetic measurement device 300 according to this embodiment has a first signal output line 105 connected to the first terminal unit 104 and a second signal output line 109 connected to the second terminal unit 108. The first signal output line 105 and the second signal output line 109 connect the sensor unit 301 and the measurement unit 302. The output signals output from the first signal output line 105 and the second signal output line 109 are amplified in the measurement unit 302. Furthermore, the first output signal and the second output signal amplified in the measurement unit 302 are integrated.

[0059] The measurement unit 302 provided in the two-way magnetic measurement device according to this embodiment includes a magnetic flux signal converter 321 having a first magnetic flux signal converter that converts the first output signal output from the first signal output line 105 into a first magnetic flux signal, and a second magnetic flux signal converter that converts the second output signal output from the second signal output line 109 into a second magnetic flux signal. The first magnetic flux signal converter that converts the first and second signal outputs into first magnetic flux signals, and the second magnetic flux converter that converts the second output signal output from the second signal output line 109 into a second magnetic flux signal can be a device that performs time integration using a digital storage oscilloscope, a device that uses an analog-to-digital converter to input the output voltage waveform into a computer and numerically integrate it over time, or a device that inputs it into a digital storage oscilloscope (DSO) and performs time integration using internal calculations within the DSO.

[0060] The two-way magnetic measurement device 300 according to this embodiment includes a measurement unit 322 including a magnetic flux signal recording unit that independently records the magnetic flux signals converted by the magnetic flux signal conversion unit 321. The measurement unit 322 including the magnetic flux signal recording unit that independently records the magnetic flux signals converted by the magnetic flux signal conversion unit 321 may be, for example, a central processing unit.

[0061] As described above, the two-way magnetic measurement device of the third embodiment is equipped with the two-way magnetic measurement sensor of the above embodiment, and therefore can simultaneously and independently measure the components perpendicular to the surface and the components parallel to the surface of the magnetic flux on the surface of the iron core, even in a narrow gap such as inside the gap of a motor, etc., thereby measuring and controlling the magnetic flux in a local area of ​​the iron core used in electromagnetic equipment.

[0062] Furthermore, a computer program used to implement the two-way magnetic measurement method according to the above embodiment can be exemplified. This computer program can also be realized as a program describing the processing content for realizing each function of the two-way magnetic measurement device according to the above embodiment, or as a storage medium on which the program is recorded. Therefore, it should be understood that these are also included in the technical scope of the present invention.

[0063] The computer program may be supplied directly or remotely to a system or device. Therefore, the technical scope of the present invention also includes a program installed on a computer to implement the above-described embodiments of the present invention, a medium storing the program, and a WWW (World Wide Web) server from which the program can be downloaded. Furthermore, the technical scope of the present invention also includes a non-transitory computer-readable medium storing a program that causes a computer to execute the processing steps for implementing the two-way magnetic measurement method according to the above-described embodiments.

[0064] As described above, the computer program is configured to be able to realize each step of the two-way magnetic measurement method according to the embodiment, and therefore, even in a narrow gap such as inside the gap of a motor, etc., it is possible to measure and control the magnetic flux in a local region of an iron core used in an electromagnetic device by simultaneously and independently measuring the components perpendicular to the surface and the components parallel to the surface of the magnetic flux on the iron core surface.

[0065] [Other embodiments] Although the present invention has been described above with reference to the embodiments, the present invention is not limited to the above embodiments. Various modifications that can be understood by those skilled in the art can be made to the configuration and details of the present invention within the technical scope of the present invention. [Example]

[0066] The two-way magnetic measurement sensor was applied to measure the magnetic flux at the tip of the stator tooth of a motor. As an example of compatibility, a 13-layer structure is shown in Table 1. Table 1 also shows the layer number, the material that makes up each layer, and the thickness (μm) of each layer.

[0067] [Table 1]

[0068] A 12.5 μm thick polyimide sheet is used as a two-layer base material for the non-magnetic, non-conductive substrate, three layers of 18 μm thick rolled copper foil are used as the material for the first and second conductor loop patterns, and two layers of 12.5 μm thick polyimide sheet are used as the coverlay, with each layer bonded together with a 20 μm thick adhesive layer.

[0069] The structure of the two-way magnetic sensor conforms to that shown in Figures 1 and 2. The second conductor loop pattern is formed by linking the magnetic flux in the surface direction of the substrate through a through-hole opened in the polyimide substrate. The total thickness of the two-way magnetic sensor after tight integration is 224 μm, which is less than 250 μm.

[0070] The test motor used was an interior permanent magnet synchronous motor with a rated output of 2kW. The magnetic flux in the stator / rotor gap was measured using an R-θ two-way magnetic measurement sensor attached to the tip of the stator tooth of the test motor. The motor was driven under continuous rotation conditions with a torque output of 2Nm and a rotation speed of 2000rpm.

[0071] The two-way magnetic measurement sensor is capable of outputting signals in two directions, the R and θ directions, at two locations on the tooth tip. The centers of the R and θ conductor loop patterns are aligned. Each of the two R and θ conductor loop patterns forms a one-turn loop. R1, θ1, R2, and θ2 indicate the R and θ directions. The four channels of induced electromotive force output from the two R and θ conductor loop patterns were input to a digital storage oscilloscope and time-integrated. The induced electromotive force signals were continuously collected in synchronization with the rotor rotation position using a rotary encoder signal, and averaged to improve the S / N ratio. Figure 5 shows the results of measuring the magnetic flux of a motor using the above-described two-way magnetic measurement device.

[0072] Figure 5 shows bidirectional magnetic flux waveform data measured in the stator / rotor gap of a motor when the magnetic flux of the motor is measured using the bidirectional magnetic measurement device according to the present invention. As is clear from Figure 5, the magnetic flux signal (after conversion to magnetic flux density) in the stator / rotor gap measured by the above-mentioned magnetic flux measurement method shows that the phase difference corresponding to the rotor rotation speed is appropriately measured between R1 / R2 and θ1 / θ2 depending on the measurement position.

[0073] In this way, by using a measuring device equipped with a two-way magnetic measurement sensor according to the present invention, the magnetic flux of an interior permanent magnet synchronous motor can be measured locally and in two directions. [Industrial Applicability]

[0074] The present invention is applicable to technology for local and bidirectional measurement of magnetic flux in magnetic components of various electromagnetic devices, and is suitable for use in the design, inspection, etc. of electromagnetic devices, making it extremely useful in industries such as the steel industry and the electrical equipment industry. [Explanation of symbols]

[0075] 100 Two-way magnetic measurement sensor 101 Base material 101a Base material front 101b Back side of base material 102 First conductor loop pattern 103 First conductor connection part 104 1st terminal section 105 First signal output line 106 Second conductor loop pattern 106a Second conductor loop pattern 106b Second conductor loop pattern 107 Second conductor connection part 108 2nd terminal section 109 Second signal output line 110 Coverlay 110a Coverlay (pole face side) 110b Coverlay (outer side of pole face) S Magnetic material contact surface 111 First thin plate base material 111a First thin plate base material front 111b Back side of 1st thin plate base material 112 Second thin plate base material 112a 2nd thin plate base material front 112b Back side of second thin plate base material 113 2nd thin plate base material through hole 113a Second thin plate base material upper end through hole 113b Second thin plate base material lower end through hole 114 2nd thin board end 114a Upper end of second thin board 114b Upper end of second thin board 115 Adhesive layer 200 Electromagnetic equipment (motors) 201 Rotor 202 Stator 203 Stator teeth 204 Gap Internal Narrow Gap 205 Stator internal gap 300 Two-way magnetic measurement device 301 Sensor unit 302 Measurement Department 321 Magnetic flux signal converter (DSO) 322 Measurement Unit (Central Processing Unit)

Claims

1. a first conductor loop pattern made of a thin layer conductor formed on a front surface of the base substrate facing a measurement surface of the magnetic body whose magnetic field is to be measured; a second conductor loop pattern formed on the front surface of the base substrate and the rear surface of the base substrate, the second conductor loop pattern being made of a thin layer conductor; a first conductor connection portion to which the first conductor loop pattern is connected; a first terminal portion in which a first signal output line is connected to a pair of first terminals arranged at both ends of the first conductor loop pattern to which the first conductor connection portion is connected; a second conductor connection portion to which the second conductor loop pattern is connected; a second terminal portion in which a second signal output line is connected to a pair of second terminals arranged at both ends of the second conductor loop pattern to which the second conductor connection portion is connected, A two-way magnetic measurement sensor, characterized in that the total thickness of a main body of the two-way magnetic measurement sensor consisting of the base substrate, the first conductor loop pattern, and the second conductor loop pattern is 250 μm or less.

2. The device is configured to include a first thin plate substrate and a second thin plate substrate, a first conductor loop pattern made of a thin layer conductor formed on a front surface of the first thin plate substrate facing a measurement surface of a magnetic body whose magnetic field is to be measured; a second conductor loop pattern consisting of a thin layer conductor formed on a second thin plate substrate front surface of the second thin plate substrate facing the first thin plate substrate back surface of the first thin plate substrate and on a second thin plate substrate back surface of the second thin plate substrate; a first conductor connection portion to which the first conductor loop pattern is connected; a first terminal portion in which a first signal output line is connected to a pair of first terminals arranged at both ends of the first conductor loop pattern to which the first conductor connection portion is connected; a second conductor connection portion to which the second conductor loop pattern is connected; a second terminal portion in which a second signal output line is connected to a pair of second terminals arranged at both ends of the second conductor loop pattern to which the second conductor connection portion is connected, a total thickness of a two-directional magnetic measurement sensor body portion including the first thin plate substrate, the first conductor loop pattern formed on the front surface of the first thin plate substrate, the second conductor loop pattern formed on the front surface of the second thin plate substrate, the second conductor loop pattern formed on the back surface of the second thin plate substrate, and the second thin plate substrate, is 250 μm or less; A two-way magnetic measurement sensor characterized in that the second conductor loop pattern is connected to the second conductor connection portion by passing through an end face of the second thin plate substrate or a through hole provided in the second thin plate substrate.

3. The two-way magnetic measurement sensor according to claim 1, characterized in that the second conductor loop pattern is formed without overlapping with the first conductor loop pattern formed on the front surface of the base substrate, and is arranged on a plane perpendicular to the first conductor loop pattern formed on the front surface of the base substrate.

4. The two-way magnetic measurement sensor according to claim 2, characterized in that the second conductor loop pattern formed on the front surface and the back surface of the second thin plate substrate is arranged on a plane perpendicular to the first conductor loop pattern formed on the front surface of the first thin plate substrate.

5. 3. The two-way magnetic measuring sensor according to claim 2, further comprising a coverlay layer provided on the outer surfaces of both sides of the two-way magnetic measuring sensor body.

6. A two-way magnetic measurement method capable of measuring magnetic flux generated on a surface of a magnetic body in two directions using the two-way magnetic measurement sensor according to claim 1 or 2, connecting a first signal output line to the first terminal portion and a second signal output line to the second terminal portion; converting a first output signal output from the first signal output line into a first magnetic flux signal, and converting a second output signal output from the second signal output line into a second magnetic flux signal; and recording the first magnetic flux signal and the second magnetic flux signal independently.

7. a sensor unit including the two-way magnetic measurement sensor according to claim 1 or 2; a first signal output line connected to the first terminal portion and a second signal output line connected to the second terminal portion; a first magnetic flux signal converter that converts a first output signal output from the first signal output line into a first magnetic flux signal; a measurement unit including a second magnetic flux signal conversion unit that converts a second output signal output from the second signal output line into a second magnetic flux signal, and a magnetic flux signal recording unit that independently records the first magnetic flux signal and the second magnetic flux signal.

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