Non-contact probe and shape measuring device

Abstract

To provide a contactless probe with which it is possible to drive a mirror in a stable attitude with a compact galvano-motor.SOLUTION: A contactless probe 10 comprises: an irradiation unit 20 for irradiating laser light; an irradiation-side mirror 40 for causing laser light from the irradiation unit 20 to be reflected toward a workpiece; a light receiving-side mirror 42 for causing reflected light from the workpiece to be reflected; and a galvano-motor 44 capable of oscillating the irradiation-side mirror 40 and the light receiving-side mirror 42 together. The irradiation-side mirror 40 is provided on one axial end side of a motor shaft 45 that extends to both sides of the galvano-motor 44, and the light receiving-side mirror 42 is provided on the other axial end side of the motor shaft 45.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a non-contact probe and a shape measuring device. [Background technology]

[0002] The shape measuring device is provided with a non-contact probe that irradiates a workpiece with a laser beam to detect the shape of the workpiece without contact. The non-contact probe is provided with a mirror that reflects the laser beam from an irradiating unit toward the workpiece and reflects the light reflected from the workpiece toward a light receiving unit. This mirror is arranged so that it can be swung by a galvanometer motor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 8-29134 Summary of the Invention [Problem to be solved by the invention]

[0004] Since the mirror has the functions of reflecting the laser light from the irradiation unit and reflecting the light reflected from the workpiece, the mirror surface becomes large, and the galvanometer motor that drives the mirror also becomes large. Furthermore, since the galvanometer motor supports the mirror at one end, the mirror position may become unstable.

[0005] The present invention has been made in view of these points, and has as its object to provide a non-contact probe that can drive a mirror in a stable position using a small galvanometer motor. [Means for solving the problem]

[0006] In a first aspect of the present invention, there is provided a non-contact probe comprising: an irradiation unit that irradiates laser light; a first mirror that reflects the laser light from the irradiation unit toward a workpiece; a second mirror that reflects the light reflected from the workpiece; and a galvanometer motor that can oscillate both the first mirror and the second mirror, wherein the first mirror is provided at one axial end of a motor shaft that extends on both sides of the galvanometer motor, and the second mirror is provided at the other axial end of the motor shaft.

[0007] The size of the first mirror may be half or less of the size of the second mirror.

[0008] The motor may further include a rotary encoder provided on the motor shaft between the motor body and the first mirror.

[0009] The optical system may further include a frame portion on which the irradiation portion and the galvanometer motor are supported, at least one reflecting mirror spaced apart from each other and configured to reflect the light reflected by the second mirror toward a light receiving portion, and a fixed plate member disposed on the frame portion and to which the reflecting mirror is fixed, wherein the linear expansion coefficient of the fixed plate member is smaller than the linear expansion coefficient of the frame portion.

[0010] The reflecting mirror may be fixed to the fixed plate member via a support member having heat insulating properties.

[0011] The fixing plate member may be provided with a deformation portion at a position away from the portion where the reflecting mirror is fixed, the deformation portion being deformed when the frame portion thermally expands.

[0012] The fixed plate member may have a plurality of holes formed therein, and the deformation portion may have a plurality of narrow portions adjacent to the holes.

[0013] The irradiation section may be located at one end of the frame section in the longitudinal direction, and the reflection mirror may be located at the other end of the frame section in the longitudinal direction.

[0014] The rotary encoder may be an absolute encoder that outputs an absolute signal and is capable of measuring absolute values ​​of the rotation angles of the first mirror and the second mirror.

[0015] The galvanometer motor may also have a regulating block provided on the stator side and abutting portion provided on the rotor side that abuts against the regulating block when oscillating, and the rotary encoder may output a signal indicating the position where the abutting portion abuts against the regulating block.

[0016] In a second aspect of the present invention, there is provided a shape measuring device including a non-contact probe having an irradiation unit that irradiates laser light, a first mirror that reflects the laser light from the irradiation unit toward a workpiece, a second mirror that reflects the light reflected from the workpiece toward a light receiving unit, and a galvanometer motor that can oscillate both the first mirror and the second mirror, and a calculation unit that calculates the shape of the workpiece based on the output of the light receiving unit, wherein the first mirror is provided at one axial end of a motor shaft extending on both sides of the galvanometer motor, and the second mirror is provided at the other axial end of the motor shaft. [Effects of the Invention]

[0017] According to the present invention, it is possible to achieve the effect of driving a mirror in a stable position using a small galvano motor. [Brief explanation of the drawings]

[0018] [Figure 1] 1 is a schematic diagram for explaining an overview of a shape measuring device 1. FIG. [Figure 2] FIG. 2 is a schematic perspective view for explaining the internal configuration of the non-contact probe 10. [Figure 3] FIG. 3 is a front view of FIG. 2. [Figure 4]FIG. 3 is a plan view of FIG. 2. [Figure 5] 2 is a schematic diagram for explaining the configuration of an illumination-side mirror 40, a light-receiving-side mirror 42, and a galvanometer motor 44. FIG. [Figure 6] FIG. 10 is a schematic diagram for explaining a modified example. [Figure 7] 3 is a schematic diagram for explaining the detailed configuration of a fixed plate member 60. FIG. [Figure 8] 10 is a schematic diagram for explaining the state of a deformation portion 65 when a frame portion 15 thermally expands. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0019] <Outline of shape measurement device> An overview of a shape measuring device including a non-contact probe according to one embodiment will be described with reference to FIG.

[0020] Fig. 1 is a schematic diagram for explaining an overview of a shape measuring apparatus 1. The shape measuring apparatus 1 is, for example, a three-dimensional shape measuring apparatus that measures the three-dimensional shape of a workpiece that is a measurement object. As shown in Fig. 1, the shape measuring apparatus 1 has a non-contact probe 10, a movement mechanism 80, and a control device 90.

[0021] The non-contact probe 10 irradiates a workpiece placed on a surface plate with laser light and captures an image of the workpiece based on the light reflected from the surface of the workpiece. The non-contact probe 10 has an irradiation unit 20, a light receiving unit 30, and a probe control unit 70. The detailed configuration of the non-contact probe 10 will be described later.

[0022] The irradiation unit 20 irradiates the workpiece with laser light. The irradiation unit 20 has a light source 22. The light source 22 is configured, for example, with an LD (Laser Diode) or the like, and generates and emits laser light of a predetermined wavelength.

[0023] The light receiving unit 30 receives the laser light reflected by the workpiece and functions as an imaging unit that captures an image of the workpiece. The light receiving unit 30 has an imaging element 32. The imaging element 32 is an image sensor that captures an image of the workpiece. For example, a CMOS image sensor is used as the image sensor.

[0024] The probe control unit 70 controls the operation of the non-contact probe 10. The probe control unit 70 controls the irradiation of laser light by the light source 22 of the irradiation unit 20 and the imaging of an image of the workpiece by the imaging element 32 of the light receiving unit 30.

[0025] The movement mechanism 80 moves the non-contact probe 10 relative to the workpiece. For example, the movement mechanism 80 moves the non-contact probe 10 in three axis directions that are perpendicular to one another. The non-contact probe 10 is detachably attached to the movement mechanism 80.

[0026] The control device 90 controls the operations of the non-contact probe 10 and the movement mechanism 80. For example, the control device 90 performs measurements using the non-contact probe 10 while moving the non-contact probe 10 using the movement mechanism 80. The control device 90 includes a memory unit 92, a control unit 94, and a calculation unit 96.

[0027] The storage unit 92 includes, for example, a read-only memory (ROM) and a random access memory (RAM). The storage unit 92 stores various data and programs that can be executed by the control unit 94. For example, the storage unit 92 stores the results of measurements performed by the non-contact probe 10.

[0028] The control unit 94 is, for example, a CPU (Central Processing Unit). The control unit 94 controls the operation of the non-contact probe 10 via the probe control unit 70 by executing a program stored in the storage unit 92. Specifically, the control unit 94 controls the irradiation of the laser light by the irradiation unit 20 onto the workpiece.

[0029] The calculation unit 96 calculates the shape of the workpiece to be irradiated with laser light by the non-contact probe 10. The calculation unit 96 acquires the output of the light receiving unit 30 and calculates the shape of the workpiece.

[0030] <Internal structure of the non-contact probe> The internal configuration of the non-contact probe 10 will be described with reference to FIGS.

[0031] FIG. 2 is a schematic perspective view for explaining the internal configuration of the non-contact probe 10. FIG. 3 is a front view of FIG. 2. FIG. 4 is a plan view of FIG. 2. FIG. 5 is a schematic view for explaining the configuration of the irradiation-side mirror 40, the receiving-side mirror 42, and the galvanometer motor 44. For ease of explanation, the outer cover of the non-contact probe 10 is omitted from FIGS. 2 to 4. In addition, in FIG. 5, the traveling direction of the laser light is indicated by a dashed arrow.

[0032] 2, the non-contact probe 10 has a frame section 15, an irradiation section 20, a light-receiving section 30, an irradiation-side mirror 40, a light-receiving-side mirror 42, a galvanometer motor 44, reflecting mirrors 50 and 53, a fixed plate member 60, and a condenser lens 68. In this embodiment, the irradiation-side mirror 40 corresponds to the first mirror, and the light-receiving-side mirror 42 corresponds to the second mirror.

[0033] The frame 15 is a part that forms the framework of the non-contact probe 10 and is made of a metal material. An opening is formed in the frame 15 to allow the laser light emitted by the irradiation unit 20 and the light reflected from the workpiece to pass through. The frame 15 supports the irradiation unit 20, the light-receiving unit 30, the galvanometer motor 44, the condenser lens 68, and other components. Specifically, the galvanometer motor 44 is supported inside the frame 15, and the irradiation unit 20, the light-receiving unit 30, and the condenser lens 68 are supported on the top of the frame 15. The frame 15 can be made of aluminum, magnesium alloy, engineering plastics such as polycarbonate, carbon fiber reinforced plastic, or the like. This allows the non-contact probe 10 to be lightweight.

[0034] 3, the irradiation unit 20 is located at one end in the longitudinal direction of the frame unit 15. Inside the irradiation unit 20, a light source 22 (FIG. 1) and lenses such as a collimator lens are arranged.

[0035] 3, the light receiving unit 30 is located at one end in the longitudinal direction of the frame unit 15. The light receiving unit 30 is provided with an imaging element 32 (FIG. 1) that receives reflected light from the workpiece (specifically, reflected light that has passed through the condenser lens 68).

[0036] The irradiation-side mirror 40 is a mirror that reflects the laser light from the irradiation unit 20 toward the workpiece. As shown in FIG. 3, the irradiation-side mirror 40 is located at one end in the longitudinal direction within the frame unit 15 and directly below the irradiation unit 20. The irradiation-side mirror 40 is swingable so that the irradiation direction of the laser light can be adjusted. The laser light reflected by the irradiation-side mirror 40 passes through an opening in the frame unit 15 and reaches the workpiece.

[0037] The light-receiving side mirror 42 is a mirror that reflects light reflected from the workpiece. As shown in FIG. 3, the light-receiving side mirror 42 is located at the other end in the longitudinal direction within the frame unit 15. The light-receiving side mirror 42 is able to swing in conjunction with the illumination side mirror 40. The light reflected by the light-receiving side mirror 42 passes through an opening in the frame unit 15 and reaches the reflecting mirror 50.

[0038] The galvanometer motor 44 is a motor that can oscillate both the illumination-side mirror 40 and the light-receiving-side mirror 42. Specifically, the galvanometer motor 44 simultaneously oscillates the illumination-side mirror 40 and the light-receiving-side mirror 42. As shown in FIG. 3, the galvanometer motor 44 has a motor shaft 45 that extends from both sides of a motor body 44a.

[0039] An illumination-side mirror 40 is provided at one axial end of the motor shaft 45, and a light-receiving-side mirror 42 is provided at the other axial end of the motor shaft 45. Specifically, the illumination-side mirror 40 is fixed to a D-cut portion at one axial end of the motor shaft 45, and the light-receiving-side mirror 42 is fixed to a D-cut portion at the other axial end of the motor shaft 45. In other words, the motor shaft 45 supports the illumination-side mirror 40 and the light-receiving-side mirror 42 at both ends.

[0040] When the illumination-side mirror 40 and the light-receiving-side mirror 42 are arranged on both sides of the motor shaft 45 in this way, the weight of each mirror can be reduced compared to when the illumination-side mirror 40 and the light-receiving-side mirror 42 are arranged integrally on one side of the motor shaft 45, and the load torque of the galvanometer motor 44 can be reduced, making it easier to make the galvanometer motor 44 more compact. Furthermore, when the motor shaft 45 supports the illumination-side mirror 40 and the light-receiving-side mirror 42 at both ends, the orientations of the illumination-side mirror 40 and the light-receiving-side mirror 42 are more stable compared to when the motor shaft 45 supports them at one end. As a result, laser light can be emitted and reflected light can be received with high precision (in other words, errors in the receiving position of the reflected light at the light-receiving unit 30 can be suppressed).

[0041] The size of the illumination-side mirror 40 is smaller than the size of the receiving-side mirror 42. Preferably, the size of the illumination-side mirror 40 is equal to or less than half the size of the receiving-side mirror 42. This is because the illumination unit 20 irradiates the illumination-side mirror 40 with laser light as a spot, and the reflection position of the laser light on the illumination-side mirror 40 hardly fluctuates even when the mirror 40 oscillates, so the illumination-side mirror 40 is made small. By making the illumination-side mirror 40 small in this way, the load torque of the galvanometer motor 44 can be further reduced.

[0042] A rotary encoder 48 is attached to the motor shaft 45. The rotary encoder 48 detects the rotational position and rotational speed of the galvanometer motor 44. The rotary encoder 48 is provided on the motor shaft 45 between the motor main body 44a and the illumination-side mirror 40. In other words, the rotary encoder 48 is disposed on the illumination-side mirror 40 side, which is smaller in size. This makes it possible to reduce the difference in weight between one end and the other end as viewed from the motor main body 44a, making it easier to stabilize the rotation of the galvanometer motor 44.

[0043] The rotary encoder 48 can be configured as a rotary encoder (absolute encoder) of a type capable of outputting an absolute signal. Because an absolute encoder is an encoder that outputs the absolute value of the rotation angle, the rotary encoder 48 can measure the absolute values ​​of the rotation angles of the irradiation-side mirror 40 and the receiving-side mirror 42. This eliminates the need to set the reference position of the rotary encoder 48 at startup, making it possible to shorten the initial setup time required for startup. The rotary encoder 48 is not limited to the above, and may be configured as a rotary encoder of a type that can output an incremental signal and a Z-phase signal (reference position signal), for example.

[0044] FIG. 6 is a schematic diagram illustrating a modified example. As shown in FIG. 6, a regulating block 49a may be provided on the stator side of the galvanometer motor 44, and abutment 49b may be provided on the rotor side. The regulating block 49a is formed by cutting out a portion of a cylindrical block. The abutment 49b is attached to the motor shaft 45 so as to be swingable together with the motor shaft 45. When the galvanometer motor 44 swings the illumination-side mirror 40 and the light-receiving-side mirror 42, the abutment 49b abuts against the regulating block 49a, thereby restricting the swing. In this case, the rotary encoder 48 may output a signal indicating the position where the abutment 49b abuts against the regulating block 49a to determine the reference position. This allows for accurate determination of the reference position at startup. Furthermore, the size and weight can be made more compact than absolute-type rotary encoders, and the cost is also lower.

[0045] The reflecting mirrors 50 and 53 are provided above the light-receiving side mirror 42 and reflect the light reflected by the light-receiving side mirror 42 toward the light-receiving unit 30. Specifically, the reflecting mirror 50 reflects the light reflected by the light-receiving side mirror 42 toward the reflecting mirror 53, and the reflecting mirror 53 reflects the reflected light toward the condenser lens 68. The reflecting mirrors 50 and 53 are provided at positions spaced apart from each other on the frame unit 15.

[0046] 3, the reflecting mirrors 50, 53 are located on the other end side in the longitudinal direction of the frame unit 15. In other words, the reflecting mirrors 50, 53 are located on the opposite side from the irradiation unit 20. Therefore, they are less affected by heat generated by the irradiation unit 20. Note that by arranging the irradiation-side mirror 40 and the light-receiving-side mirror 42 separately on both sides of the motor shaft 45, the degree of freedom in the installation positions of the reflecting mirrors 50, 53 and the irradiation unit 20 is increased.

[0047] The reflecting mirror 50 is supported by a support member 51, and the reflecting mirror 53 is supported by a support member 54. The support members 51 and 54 are made of, for example, ceramics and have heat insulating properties. Since the support members 51 and 54 have heat insulating properties, heat transfer from the frame portion 15 to the reflecting mirrors 50 and 53 can be suppressed.

[0048] The reflecting mirrors 50, 53 are not supported directly by the frame portion 15, but are supported via a fixed plate member 60. The fixed plate member 60 is provided on the frame portion 15. Specifically, the fixed plate member 60 is supported at two points on the upper portion of the other end side in the longitudinal direction of the frame portion 15. The reflecting mirrors 50, 53 are fixed to the fixed plate member 60. In the above, two reflecting mirrors 50, 53 are provided, but this is not limited to this, and there may be only one reflecting mirror that reflects the reflected light reflected by the light-receiving side mirror 42 toward the light-receiving unit 30.

[0049] In this embodiment, the linear expansion coefficient of the fixed plate member 60 is smaller than that of the frame portion 15. Specifically, the fixed plate member 60 is made of a titanium plate, and the linear expansion coefficient of the titanium plate is smaller than that of the material constituting the frame portion 15. Therefore, even if the temperature rises, the degree of thermal change in the fixed plate member 60 is small, so that changes in the relative positions of the reflecting mirrors 50, 53 fixed to the fixed plate member 60 can be suppressed. As a result, the occurrence of errors in the light receiving position of the reflected light at the light receiving unit 30 can be suppressed.

[0050] 7 is a schematic diagram illustrating the detailed configuration of the fixed plate member 60. The fixed plate member 60 has a flat plate portion 61, a plurality of holes 62a, 62b, and 62c, a plurality of narrow portions 63a, 63b, 63c, and 63d, and a connecting portion 64.

[0051] The flat plate portion 61 is formed from a metal plate of a predetermined thickness. The holes 62a, 62b, and 62c are formed in the flat plate portion 61 at positions away from the portions where the reflecting mirrors 50 and 53 are fixed. The holes 62a to 62c are formed adjacent to each other at one corner of the flat plate portion 61.

[0052] Narrow portions 63a, 63b, 63c, and 63d are portions with narrower widths and are adjacent to hole portions 62a to 62c. The width of narrow portions 63a to 63d is, for example, equal to or less than the thickness of flat plate portion 61. Narrow portions 63a to 63d have lower rigidity than other portions and are therefore more likely to deform when a force is applied.

[0053] The connecting portion 64 is a portion that connects to the four narrow portions 63a to 63d. The holes 62a to 62d are located around the connecting portion 64. In this embodiment, the four narrow portions 63a to 63d and the connecting portion 64 function as a deformation portion 65 that deforms when the frame portion 15 thermally expands.

[0054] FIG. 8 is a schematic diagram illustrating the state of the deforming portion 65 when the frame portion 15 thermally expands. When the frame portion 15 thermally expands, the deforming portion 65, which has low rigidity and is part of the fixing plate member 60 in contact with the frame portion 15, receives a force from the frame portion 15 and deforms as shown in FIG. 8. In FIG. 8, the narrow portions 63a to 63d deform in a bending manner, and the connecting portion 64 is positioned so as to bulge relative to the flat plate portion 61. The deformation of the deforming portion 65 allows the fixing plate member 60 to absorb the thermal expansion of the frame portion 15. Therefore, even if the frame portion 15 thermally expands, changes in the relative positions of the reflecting mirrors 50 and 53 can be suppressed.

[0055] The condenser lens 68 condenses the light onto the light receiving unit 30. Specifically, the condenser lens 68 condenses the light onto the imaging surface of the imaging element 32.

[0056] <Effects of this embodiment> In the non-contact probe 10 of this embodiment, an irradiation-side mirror 40 that reflects laser light from the irradiation unit 20 toward the workpiece is provided at one axial end of a motor shaft 45 that extends on both sides of a galvanometer motor 44, and a light-receiving-side mirror 42 that reflects light reflected from the workpiece is provided at the other axial end of the motor shaft 45. In other words, the motor shaft 45 supports the irradiation-side mirror 40 and the light-receiving-side mirror 42 at both ends. When the illumination side mirror 40 and the light-receiving side mirror 42 are arranged on both sides of the motor shaft 45, the weight of each mirror can be reduced and the load torque of the galvanometer motor 44 can be reduced compared to when the illumination side mirror 40 and the light-receiving side mirror 42 are arranged integrally with one of the mirrors, making it easier to miniaturize the galvanometer motor 44. Furthermore, when the motor shaft 45 supports the illumination side mirror 40 and the light-receiving side mirror 42 at both ends, the orientation of the illumination side mirror 40 and the light-receiving side mirror 42 is more stable than when the motor shaft 45 supports them at one end.

[0057] The present invention has been described above using embodiments, but the technical scope of the present invention is not limited to the scope described in the above embodiments, and various modifications and changes are possible within the scope of the gist of the present invention. For example, all or part of the device can be configured by functionally or physically distributing or integrating any unit. Furthermore, new embodiments resulting from any combination of multiple embodiments are also included in the embodiments of the present invention. The effects of the new embodiments resulting from the combination also have the effects of the original embodiments. [Explanation of symbols]

[0058] 1 Shape measuring device 10 Non-contact probe 15 Frame section 20 Irradiation unit 30 Light receiving section 40 Irradiation side mirror 42 Receiving mirror 44 Galvano motor 44a Motor body 45 motor shaft 48 rotary encoder 49a Restriction Block 49b End 50 Reflective Mirror 51 Support member 53 Reflective mirror 54 Support member 60 Fixed plate member 62a, 62b, 62c, 62d holes 63a, 63b, 63c narrow part 65 Deformed part 96 Arithmetic section

Claims

1. an irradiation unit that irradiates laser light; a first mirror that reflects the laser light from the irradiation unit toward a workpiece; A second mirror that reflects the light reflected from the workpiece; a galvanometer motor capable of oscillating both the first mirror and the second mirror; Equipped with the first mirror is provided on one end side of a motor shaft extending on both sides of the galvanometer motor in the axial direction, the second mirror is provided on the other end side of the motor shaft in the axial direction, a frame portion on which the irradiation portion and the galvanometer motor are supported; at least one reflecting mirror that is spaced apart from each other and that reflects the light reflected by the second mirror toward the light receiving unit; a fixing plate member provided on the frame portion and to which the reflecting mirror is fixed, the coefficient of linear expansion of the fixed plate member is smaller than the coefficient of linear expansion of the frame portion; a deformation portion that deforms when the frame portion thermally expands is provided in the fixed plate member at a position away from a portion where the reflecting mirror is fixed; Non-contact probe.

2. The size of the first mirror is half or less of the size of the second mirror. The non-contact probe of claim 1 .

3. the reflecting mirror is fixed to the fixed plate member via a support member having heat insulation properties; The non-contact probe of claim 1 .

4. The fixing plate member has a plurality of holes formed therein, The deformation portion has a plurality of narrow portions adjacent to the hole portion. The non-contact probe of claim 1 .

5. the irradiation unit is located on one end side of the frame unit in the longitudinal direction, The reflecting mirror is located on the other end side in the longitudinal direction. The non-contact probe of claim 1 .

6. The weight of the first mirror is lighter than the weight of the second mirror, a rotary encoder provided on the motor shaft between a motor body and the first mirror; the rotary encoder is an absolute encoder that outputs an absolute signal and is capable of measuring absolute values ​​of rotation angles of the first mirror and the second mirror; The non-contact probe of claim 1 .

7. The galvanometer motor has a restriction block provided on a stator side and a contact portion provided on a rotor side that contacts the restriction block when the rotor swings, The rotary encoder outputs a signal indicating the position where the abutting portion abuts against the regulating block. The non-contact probe of claim 6.

8. a non-contact probe including an irradiation unit that irradiates laser light, a first mirror that reflects the laser light from the irradiation unit toward a workpiece, a second mirror that reflects the light reflected from the workpiece toward a light receiving unit, and a galvanometer motor that can swing both the first mirror and the second mirror; A calculation unit that calculates the shape of the workpiece based on the output of the light receiving unit; Including, the first mirror is provided on one end side of a motor shaft extending on both sides of the galvanometer motor in the axial direction, the second mirror is provided on the other end side of the motor shaft in the axial direction, a frame portion on which the irradiation portion and the galvanometer motor are supported; at least one reflecting mirror that is spaced apart from each other and that reflects the light reflected by the second mirror toward the light receiving unit; a fixing plate member provided on the frame portion and to which the reflecting mirror is fixed, the coefficient of linear expansion of the fixed plate member is smaller than the coefficient of linear expansion of the frame portion; a deformation portion that deforms when the frame portion thermally expands is provided in the fixed plate member at a position away from a portion where the reflecting mirror is fixed; Shape measuring device.

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