Piezoelectric Vibration Device

Abstract

In a crystal oscillator 101, hermetic sealing is performed by sandwiching a crystal vibration plate 2, on which first and second excitation electrodes 221, 222 are formed, between first and second sealing members 3, 4 disposed above and below the crystal vibration plate, and joining respective sealing portions thereof. In the first sealing member 3, a fourth through-hole 323 penetrating from a first principal surface 311 side to a second principal surface 312 side is formed, the opening area of an opening 323a on the first principal surface 311 side of the fourth through-hole 323 is formed larger than the opening area of an opening 323b on the second principal surface 312 side, and the width W2 of a sealing surface-side opening peripheral electrode 323c is larger than the width W1 of an outer surface-side opening peripheral electrode 37a in a Z'-axis direction.

Description

[Technical Field]

[0001] The present invention relates to a piezoelectric vibration device. [Background technology]

[0002] In recent years, the operating frequencies of various electronic devices have been increasing and their packages have become smaller (especially lower profile). As a result, piezoelectric resonator devices (such as quartz crystal resonators and crystal oscillators) are also being required to accommodate these trends.

[0003] This type of piezoelectric resonator device has a housing configured as a roughly rectangular parallelepiped package. This package is configured, for example, by sandwiching a quartz crystal resonator plate on which excitation electrodes are formed between quartz crystal sealing plates arranged above and below the plate, and the interior (internal space) of the package is hermetically sealed by joining the sealing parts of each plate (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-252051 Summary of the Invention [Problem to be solved by the invention]

[0005] In the piezoelectric resonator device described above, a through-hole is formed in the quartz crystal sealing plate, penetrating from the outer surface to the sealing surface. A conductive path to the excitation electrode is realized by an inner wall electrode formed on the inner wall of the through-hole and an aperture perimeter electrode formed around the opening of the through-hole. The aperture perimeter electrode not only serves as a conductive path, but also acts as a seal to maintain airtightness from the external environment by being tightly bonded to the electrode formed on the quartz crystal resonator plate.

[0006] The inner wall electrodes and aperture-periphery electrodes of the above-mentioned through-holes are configured by stacking a surface main electrode layer made of Au on top of a base electrode layer made of Ti, for example. However, because the through-holes formed in the quartz crystal sealing plate placed above the quartz crystal vibrating plate are exposed to the outside, moisture and other substances may penetrate through the through-hole openings, potentially corroding the base electrode layer (Ti layer) of the inner wall electrodes and aperture-periphery electrodes. Furthermore, in high-temperature, high-humidity environments or after many years of use, corrosion of the inner wall electrodes and aperture-periphery electrodes may progress and reach the internal space, potentially destroying the airtightness of the internal space of the package.

[0007] The present invention has been made in consideration of the above-mentioned circumstances, and has an object to provide a piezoelectric vibration device that can suppress the progression of corrosion of the electrode surrounding the opening of the through-hole. [Means for solving the problem]

[0008] The present invention provides a piezoelectric resonator device that is hermetically sealed by sandwiching a quartz crystal resonator plate with excitation electrodes between quartz crystal sealing plates arranged above and below the quartz crystal resonator plate and joining the sealing portions of the two plates together. The quartz crystal sealing plates have through-holes that penetrate from the outer surface side to the sealing surface side. The through-holes have inner wall electrodes formed on the inner wall surfaces and a periphery of the opening on the outer surface side. All around The outer surface side opening periphery electrode formed on the sealing surface side All around and a sealing surface side opening periphery electrode formed on the through hole, and the through hole has a hollow penetrating portion, the opening area of ​​the opening on the outer surface side of the through hole is formed larger than the opening area of ​​the opening on the sealing surface side, and the width of the sealing surface side opening periphery electrode is larger in the Z'-axis direction than the width of the outer surface side opening periphery electrode.

[0009] The above configuration, in which the width of the sealing surface peripheral electrode of the through-hole is larger in the Z'-axis direction than the width of the outer surface peripheral electrode, suppresses corrosion of the sealing surface peripheral electrode compared to when the widths of the outer surface peripheral electrode and the sealing surface peripheral electrode are the same, thereby ensuring maximum airtightness of the package interior. Furthermore, the width of the outer surface peripheral electrode of the through-hole is smaller than the width of the sealing surface peripheral electrode, which simplifies wiring design on the outer surface side of the quartz sealing plate compared to when the widths of the outer surface peripheral electrode and the sealing surface peripheral electrode are the same, contributing to package miniaturization.

[0010] Here, if the opening area of ​​the through hole on the outer surface side and the opening area of ​​the through hole on the sealing surface side are the same, ensuring the width of the sealing surface-side opening peripheral electrode requires expanding the volume of the entire component, including the through hole and the peripheral electrode. In contrast, with the above configuration, by establishing a relationship between the opening areas of the through holes and making the opening area of ​​the sealing surface side opening smaller than the opening area of ​​the outer surface side opening, extra space is created around the through hole, making it easier to ensure the width of the sealing surface-side opening peripheral electrode. This configuration avoids unnecessary expansion of the volume of the entire component, including the through hole and the peripheral electrode, and is advantageous for miniaturization. As a result, the width of the sealing surface-side opening peripheral electrode can be increased, allowing the area of ​​the sealing portion provided by the sealing surface-side opening peripheral electrode to be stably secured without being too small. This also suppresses corrosion progression compared to when the sealing portion area cannot be secured.

[0011] Furthermore, when wet etching an AT-cut quartz crystal plate, the anisotropy of the quartz causes the through-holes to tilt along the Z' axis, which can lead to design deviations that make it difficult to ensure a sufficient width for the peripheral electrode. In contrast, the above configuration makes it easier to address these issues by making the sealing surface opening peripheral electrode larger in the Z' axis direction, contributing to stable airtightness and electrical continuity.

[0012] In the above configuration, it is preferable that the width of the sealing surface side opening peripheral electrode be larger in the X-axis direction than the width of the outer surface side opening peripheral electrode. This makes the width of the sealing surface side opening peripheral electrode of the through hole larger than the width of the outer surface side opening peripheral electrode not only in the Z'-axis direction but also in the X-axis direction, so that corrosion of the sealing surface side opening peripheral electrode can be suppressed compared to when the widths of the outer surface side opening peripheral electrode and the sealing surface side opening peripheral electrode are the same, and the airtightness of the internal space of the package can be ensured as much as possible.

[0013] The present invention also provides a piezoelectric resonator device in which a quartz crystal resonator plate having excitation electrodes is sandwiched between quartz crystal sealing plates arranged above and below the quartz crystal resonator plate and hermetically sealed by joining the sealing portions of the two plates. The quartz crystal sealing plates have through-holes that penetrate from the outer surface side to the sealing surface side, and the through-holes have inner wall electrodes formed on the inner wall surface and a periphery of the opening on the outer surface side. All around The outer surface side opening periphery electrode formed on the sealing surface side All around and a sealing surface side opening periphery electrode formed on the through hole, the through hole having a hollow penetrating portion, the opening area of ​​the opening on the outer surface side of the through hole being larger than the opening area of ​​the opening on the sealing surface side, and the width of the sealing surface side opening periphery electrode is larger in the X-axis direction than the width of the outer surface side opening periphery electrode.

[0014] The above configuration, because the width of the sealing surface peripheral electrode of the through-hole is larger in the X-axis direction than the width of the outer surface peripheral electrode, reduces corrosion of the sealing surface peripheral electrode compared to when the outer surface peripheral electrode and the sealing surface peripheral electrode are the same, thereby ensuring the maximum airtightness of the package interior. Furthermore, because the width of the outer surface peripheral electrode of the through-hole is smaller than the width of the sealing surface peripheral electrode, wiring design on the outer surface side of the quartz sealing plate is easier compared to when the outer surface peripheral electrode and the sealing surface peripheral electrode are the same, contributing to package miniaturization.

[0015] Here, if the opening area of ​​the through hole on the outer surface side and the opening area of ​​the through hole on the sealing surface side are the same, ensuring the width of the sealing surface-side opening peripheral electrode requires expanding the volume of the entire component, including the through hole and the peripheral electrode. In contrast, with the above configuration, by establishing a relationship between the opening areas of the through holes and making the opening area of ​​the sealing surface side opening smaller than the opening area of ​​the outer surface side opening, extra space is created around the through hole, making it easier to ensure the width of the sealing surface-side opening peripheral electrode. This configuration avoids unnecessary expansion of the volume of the entire component, including the through hole and the peripheral electrode, and is advantageous for miniaturization. As a result, the width of the sealing surface-side opening peripheral electrode can be increased, allowing the area of ​​the sealing portion provided by the sealing surface-side opening peripheral electrode to be stably secured without being too small. This also suppresses corrosion progression compared to when the sealing portion area cannot be secured.

[0016] In the above configuration, the bonding is preferably an Au-to-Au diffusion bonding, and the sealing surface opening peripheral electrode preferably includes a surface main electrode layer made of Au and a base electrode layer made of Ti. This prevents corrosion of the base electrode layer of the sealing surface opening peripheral electrode of the through-hole, ensuring the maximum airtightness of the package's internal space. Furthermore, Au-to-Au diffusion bonding (Au-Au bonding) reduces the gap between the quartz crystal vibrating plate and the quartz crystal sealing plate, contributing to a lower package height. Furthermore, because no gas or other substances resulting from the bonding material are generated during bonding, the internal space of the package is kept airtight, reducing the risk of adverse effects on the electrical characteristics of the quartz crystal vibrating plate.

[0017] In the above configuration, the center of the opening of the through-hole on the outer surface side overlaps the opening edge of the opposing through-hole on the sealing surface side, and the center of the opening of the through-hole on the sealing surface side overlaps the opening edge of the opposing through-hole on the outer surface side. This allows the through-holes to be reliably formed in the quartz crystal sealing plate by wet etching, and also contributes to the miniaturization of the package because the volume of the through-holes is not unnecessarily large.

[0018] In the above configuration, the through-hole has a central opening with the smallest cross-sectional area at the middle of the thickness of the quartz-crystal sealing plate. The center of the through-hole on the outer surface side overlaps the central opening, and the center of the through-hole on the sealing surface side overlaps the central opening. This allows the through-hole to be reliably formed in the quartz-crystal sealing plate using wet etching, and contributes to package miniaturization by preventing the through-hole from becoming unnecessarily large in volume. It also prevents breakage of the through-hole's inner wall electrode, the outer surface opening peripheral electrode, and the sealing surface opening peripheral electrode.

[0019] In the above configuration, the outer peripheral edge of the sealing surface opening peripheral electrode is located outside the opening edge on the outer surface side of the through hole, which eliminates gaps between the sealing materials, allowing for more reliable Au-Au bonding and stabilizing the airtightness of the internal space of the package. [Effects of the Invention]

[0020] According to the present invention, the width of the sealing surface side opening surrounding electrode of the through hole is larger than the width of the outer surface side opening surrounding electrode, so that the progression of corrosion of the sealing surface side opening surrounding electrode can be suppressed compared to when the width of the outer surface side opening surrounding electrode and the width of the sealing surface side opening surrounding electrode are the same, and the airtightness of the internal space of the package can be ensured as much as possible. [Brief explanation of the drawings]

[0021] [Figure 1] 1 is a schematic diagram showing each component of a crystal oscillator according to an embodiment of the present invention; [Figure 2] 2 is a schematic plan view of the first main surface side of the first sealing member of the crystal oscillator. FIG. [Figure 3] 3 is a schematic plan view of the second main surface side of the first sealing member of the crystal oscillator. FIG. [Figure 4] 2 is a schematic plan view of a first main surface side of a quartz crystal plate of the quartz crystal oscillator. FIG. [Figure 5] 2 is a schematic plan view of the second main surface side of the crystal vibration plate of the crystal oscillator. FIG. [Figure 6] 3 is a schematic plan view of the first main surface side of the second sealing member of the crystal oscillator. FIG. [Figure 7] 4 is a schematic plan view of the second main surface side of the second sealing member of the crystal oscillator. FIG. [Figure 8] 10 is a diagram showing an example of a cross-sectional shape of a fourth through hole formed in the first sealing member. FIG. [Figure 9] 9 is a cross-sectional view taken along line X1-X1 of FIG. 8. [Figure 10] 9 is a cross-sectional view taken along line X2-X2 of FIG. 8. [Figure 11] 10 is a diagram for explaining the size of a fourth through hole, etc. FIG. [Figure 12] 10A and 10B are diagrams showing other cross-sectional shapes of the fourth through hole. [Figure 13] 10 is a schematic plan view of a first main surface side of a tuning-fork type crystal vibrating plate of a crystal oscillator according to another embodiment 1. FIG. [Figure 14] FIG. 10 is a schematic diagram illustrating each component of a crystal resonator according to another embodiment 2. [Figure 15] 15 is a diagram showing an example of a cross-sectional shape of a through-hole formed in a second sealing member of the quartz crystal resonator of FIG. 14. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0022] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following embodiments, a crystal vibration device to which the present invention is applied is described as a crystal oscillator. Note that the crystal vibration device to which the present invention is applicable is not limited to a crystal oscillator, and the present invention may also be applied to a crystal resonator.

[0023] 1, the crystal oscillator 101 according to this embodiment is configured to include a crystal diaphragm 2, a first sealing member 3, a second sealing member 4, and an IC chip 5. In this crystal oscillator 101, the crystal diaphragm 2 is bonded to the first sealing member 3, and the crystal diaphragm 2 is bonded to the second sealing member 4, thereby forming a package 12 with a substantially rectangular parallelepiped sandwich structure. The IC chip 5 is mounted on the main surface of the first sealing member 3 opposite to the surface bonded to the crystal diaphragm 2. The IC chip 5, which serves as an electronic component, is a one-chip integrated circuit element that, together with the crystal diaphragm 2, forms an oscillator circuit.

[0024] In the quartz crystal vibration plate 2, a first excitation electrode 221 is formed on one of the principal surfaces, that is, a first principal surface 211, and a second excitation electrode 222 is formed on the other principal surface, that is, a second principal surface 212. In the quartz crystal oscillator 101, a first sealing member 3 and a second sealing member 4 are bonded to both of the principal surfaces (first principal surface 211, second principal surface 212) of the quartz crystal vibration plate 2, respectively, to form an internal space of the package 12, and a vibrating part 22 (see FIGS. 4 and 5) including the first excitation electrode 221 and the second excitation electrode 222 is hermetically sealed in the internal space.

[0025] The crystal oscillator 101 according to this embodiment has a package size of, for example, 1.0 × 0.8 mm, and is designed to be compact and low-profile. To accommodate this miniaturization, the package 12 does not have castellations, but rather uses through-holes (described later) to provide electrical continuity between the electrodes. Castellations, which are formed on the outer surface of the package 12, can easily change the external dimensions of the package 12, reducing its mechanical strength. Furthermore, because castellations are exposed to the outside, they are prone to breakage due to contact with other elements. However, in this embodiment, the electrodes are provided with electrical continuity through through-holes, thereby avoiding such problems.

[0026] Next, the crystal vibration plate 2, the first sealing member 3, and the second sealing member 4 of the crystal oscillator 101 will be described with reference to Figures 1 to 7. Note that the following description focuses on the individual components that are not joined together and are configured as individual components.

[0027] As shown in Figures 4 and 5, the quartz crystal vibrating plate 2 is a piezoelectric substrate made of quartz crystal, and both of its main surfaces (first main surface 211 and second main surface 212) are flat and smooth (mirror-finished). In this embodiment, an AT-cut quartz crystal plate that vibrates in thickness-shear mode is used as the quartz crystal vibrating plate 2. In the quartz crystal vibrating plate 2 shown in Figures 4 and 5, both main surfaces 211 and 212 of the quartz crystal vibrating plate 2 are in the XZ' plane. In this XZ' plane, the direction parallel to the short side (short side) of the quartz crystal vibrating plate 2 is the X-axis direction, and the direction parallel to the long side (long side) of the quartz crystal vibrating plate 2 is the Z'-axis direction. Note that AT-cut is a processing technique in which artificial quartz crystal is cut at an angle of 35°15' around the X-axis with respect to the Z-axis, one of the three crystal axes of the artificial quartz crystal: the electrical axis (X-axis), the mechanical axis (Y-axis), and the optical axis (Z-axis). In an AT-cut quartz crystal plate, the X-axis coincides with the crystal axis of the quartz crystal. The Y' and Z' axes are inclined 35°15' from the Y and Z crystal axes of the quartz. The Y' and Z' axis directions correspond to the cutting direction when cutting an AT-cut quartz plate.

[0028] A pair of excitation electrodes (first excitation electrode 221, second excitation electrode 222) are formed on both main surfaces 211, 212 of the quartz crystal vibration plate 2. The quartz crystal vibration plate 2 has a substantially rectangular vibrating portion 22, an outer frame portion 23 that surrounds the outer periphery of the vibrating portion 22, and a holding portion 24 that holds the vibrating portion 22 by connecting the vibrating portion 22 and the outer frame portion 23. In other words, the quartz crystal vibration plate 2 has a configuration in which the vibrating portion 22, the outer frame portion 23, and the holding portion 24 are integrally provided, and a through portion is formed between the outer frame portion 23 and the vibrating portion 22.

[0029] In this embodiment, the holding portion 24 is provided at only one location between the vibrating portion 22 and the outer frame portion 23. Furthermore, the vibrating portion 22 and the holding portion 24 are formed to be thinner than the outer frame portion 23. Due to this difference in thickness between the outer frame portion 23 and the holding portion 24, the natural frequencies of the piezoelectric vibrations of the outer frame portion 23 and the holding portion 24 differ, making it difficult for the outer frame portion 23 to resonate with the piezoelectric vibration of the holding portion 24. Note that the location where the holding portion 24 is formed is not limited to one location, and the holding portion 24 may be provided at two locations between the vibrating portion 22 and the outer frame portion 23 (for example, on both sides in the -Z'-axis direction).

[0030] The holding portion 24 extends (protrudes) in the -Z' direction from only one corner of the vibrating portion 22, which is located in the +X direction and the -Z' direction. In this way, the holding portion 24 is provided at a corner of the outer periphery of the vibrating portion 22, where the displacement of the piezoelectric vibration is relatively small. Therefore, compared to when the holding portion 24 is provided at a portion other than the corner (the center of the side), it is possible to prevent the piezoelectric vibration from leaking to the outer frame portion 23 via the holding portion 24, and it is possible to more efficiently piezoelectrically vibrate the vibrating portion 22. Furthermore, compared to when two or more holding portions 24 are provided, it is possible to reduce the stress acting on the vibrating portion 22, thereby reducing the frequency shift of the piezoelectric vibration caused by such stress and improving the stability of the piezoelectric vibration.

[0031] The first excitation electrode 221 is provided on the first main surface 211 side of the vibrating section 22, and the second excitation electrode 222 is provided on the second main surface 212 side of the vibrating section 22. Lead wiring (first lead wiring 223, second lead wiring 224) for connecting these excitation electrodes to external electrode terminals is connected to the first excitation electrode 221 and the second excitation electrode 222. The first lead wiring 223 is led out from the first excitation electrode 221 and connected to a connection bonding pattern 27 formed on the outer frame section 23 via the holding section 24. The second lead wiring 224 is led out from the second excitation electrode 222 and connected to a connection bonding pattern 28 formed on the outer frame section 23 via the holding section 24. In this way, the first lead wiring 223 is formed on the first main surface 211 side of the holding section 24, and the second lead wiring 224 is formed on the second main surface 212 side of the holding section 24.

[0032] Both main surfaces (first main surface 211 and second main surface 212) of the quartz crystal plate 2 are provided with vibration-side sealing portions for bonding the quartz crystal plate 2 to the first sealing member 3 and the second sealing member 4, respectively. The vibration-side sealing portion on the first main surface 211 is formed with a vibration-side first bonding pattern 251 for bonding to the first sealing member 3. The vibration-side sealing portion on the second main surface 212 is formed with a vibration-side second bonding pattern 252 for bonding to the second sealing member 4. The vibration-side first bonding pattern 251 and the vibration-side second bonding pattern 252 are provided on the outer frame portion 23 and are formed in an annular shape in a plan view. The first excitation electrode 221 and the second excitation electrode 222 are not electrically connected to the vibration-side first bonding pattern 251 and the vibration-side second bonding pattern 252.

[0033] As shown in FIGS. 4 and 5, the quartz crystal vibration plate 2 has five through holes formed between the first main surface 211 and the second main surface 212. Specifically, the four first through holes 261 are provided in the four corner regions of the outer frame portion 23. The second through hole 262 is provided in the outer frame portion 23 on one side in the Z′-axis direction of the vibration portion 22 (the −Z′ direction side in FIGS. 4 and 5). A connection bonding pattern 253 is formed around each of the first through holes 261. Furthermore, a connection bonding pattern 254 is formed on the first main surface 211 side around the second through hole 262, and a connection bonding pattern 28 is formed on the second main surface 212 side around the second through hole 262.

[0034] In the first through hole 261 and the second through hole 262, a through electrode for achieving electrical continuity between the electrodes formed on the first main surface 211 and the second main surface 212 is formed along the inner wall surface of each through hole. In addition, the central portion of each of the first through hole 261 and the second through hole 262 is a hollow through portion that penetrates between the first main surface 211 and the second main surface 212.

[0035] In the quartz crystal plate 2, the first excitation electrode 221, the second excitation electrode 222, the first lead wiring 223, the second lead wiring 224, the vibration-side first bonding pattern 251, the vibration-side second bonding pattern 252, and the connection bonding patterns 253, 254, 27, and 28 can be formed in the same process. Specifically, these can be formed from base films formed by physical vapor deposition on both main surfaces 211 and 212 of the quartz crystal plate 2, and bonding films formed by physical vapor deposition on the base films. In this embodiment, Ti (or Cr) is used for the base films, and Au is used for the bonding films.

[0036] 2 and 3, the first sealing member 3 is a rectangular parallelepiped substrate formed from a single quartz crystal wafer, and the second main surface 312 (the surface that bonds to the quartz crystal vibration plate 2) of this first sealing member 3 is formed as a flat, smooth surface (mirror-finished). As shown in Fig. 2, six electrode patterns 37 including mounting pads for mounting the IC chip 5, which is an oscillator circuit element, are formed on the first main surface 311 (the surface on which the IC chip 5 is mounted) of this first sealing member 3. The IC chip 5 is bonded to the electrode patterns 37 using metal bumps (e.g., Au bumps) 38 (see Fig. 1) by FCB (Flip Chip Bonding).

[0037] As shown in FIGS. 2 and 3, the first sealing member 3 has six through holes formed therein, each connected to one of the six electrode patterns 37 and penetrating between the first main surface 311 and the second main surface 312. Specifically, four third through holes 322 are provided in the four corner regions of the first sealing member 3. The fourth and fifth through holes 323 and 324 are provided in the A2 and A1 directions in FIGS. 2 and 3, respectively. The A1 and A2 directions in FIGS. 2, 3, 6, and 7 correspond to the -Z' and +Z' directions in FIGS. 4 and 5, respectively, and the B1 and B2 directions in FIGS. 2, 3, 6, and 7 correspond to the -X and +X directions in FIGS. 4 and 5, respectively.

[0038] In the third through hole 322 and the fourth and fifth through holes 323, 324, through electrodes (inner wall electrodes) for achieving electrical continuity between the electrodes formed on the first main surface 311 and the second main surface 312 are formed along the inner wall surfaces of the respective through holes. In addition, the central portions of the third through hole 322 and the fourth and fifth through holes 323, 324 form hollow through portions that penetrate between the first main surface 311 and the second main surface 312.

[0039] A sealing-side first bonding pattern 321 is formed on the second main surface 312 of the first sealing member 3 as a sealing-side first sealing portion for bonding to the quartz-crystal vibrating plate 2. The sealing-side first bonding pattern 321 is formed in a ring shape in a plan view.

[0040] Furthermore, on the second main surface 312 of the first sealing member 3, a connection joint pattern 34 is formed around each of the third through holes 322. A connection joint pattern 351 is formed around the fourth through hole 323, and a connection joint pattern 352 is formed around the fifth through hole 324. Furthermore, a connection joint pattern 353 is formed on the opposite side of the long axis direction of the first sealing member 3 from the connection joint pattern 351 (A1 direction side), and the connection joint pattern 351 and the connection joint pattern 353 are connected by a wiring pattern 33. Note that the connection joint pattern 353 is not connected to the connection joint pattern 352.

[0041] In the first sealing member 3, the sealing-side first bonding pattern 321, the connection bonding patterns 34, 351 to 353, and the wiring pattern 33 can be formed by the same process. Specifically, these can be formed from an underlayer formed by physical vapor deposition on the second main surface 312 of the first sealing member 3, and a bonding film formed by physical vapor deposition on the underlayer. In this embodiment, Ti (or Cr) is used for the underlayer, and Au is used for the bonding film.

[0042] 6 and 7, the second sealing member 4 is a rectangular parallelepiped substrate formed from a single quartz crystal wafer, and the first main surface 411 of this second sealing member 4 (the surface that bonds to the quartz crystal vibration plate 2) is formed as a flat, smooth surface (mirror-finished). A sealing-side second bonding pattern 421 is formed on the first main surface 411 of this second sealing member 4 as a sealing-side second sealing portion for bonding to the quartz crystal vibration plate 2. The sealing-side second bonding pattern 421 is formed in a ring shape in a plan view.

[0043] Four external electrode terminals 43 for electrical connection to the outside are provided on the second main surface 412 (the outer main surface not facing the quartz crystal plate 2) of the second sealing member 4. The external electrode terminals 43 are located at the four corners (corner portions) of the second sealing member 4, respectively.

[0044] As shown in FIGS. 6 and 7 , the second sealing member 4 has four through holes formed therein that penetrate between the first main surface 411 and the second main surface 412. Specifically, the four sixth through holes 44 are provided in the four corner (corner) regions of the second sealing member 4. In the sixth through holes 44, through electrodes for ensuring electrical connection between the electrodes formed on the first main surface 411 and the second main surface 412 are formed along the inner wall surfaces of the sixth through holes 44. Furthermore, the central portions of each sixth through hole 44 form hollow through portions that penetrate between the first main surface 411 and the second main surface 412. Furthermore, in the first main surface 411 of the second sealing member 4, connection bonding patterns 45 are formed around each sixth through hole 44.

[0045] In the second sealing member 4, the sealing-side second bonding pattern 421 and the connection bonding pattern 45 can be formed by the same process. Specifically, they can be formed from an underlayer formed by physical vapor deposition on the first main surface 411 of the second sealing member 4, and a bonding film formed by physical vapor deposition on the underlayer. In this embodiment, Ti (or Cr) is used for the underlayer, and Au is used for the bonding film.

[0046] In the crystal oscillator 101 including the crystal vibrating plate 2, first sealing member 3, and second sealing member 4 configured as described above, the crystal vibrating plate 2 and the first sealing member 3 are diffusion bonded together with the first vibration-side bonding pattern 251 and the first sealing-side bonding pattern 321 overlapping each other, and the crystal vibrating plate 2 and the second sealing member 4 are diffusion bonded together with the second vibration-side bonding pattern 252 and the second sealing-side bonding pattern 421 overlapping each other, thereby producing the sandwich-structured package 12 shown in Fig. 1. This hermetically seals the internal space of the package 12, i.e., the space housing the vibrating unit 22.

[0047] At this time, the above-mentioned connection bonding patterns are also diffusion bonded together while overlapping each other. By bonding the connection bonding patterns together, electrical continuity is obtained among the first excitation electrode 221, the second excitation electrode 222, the IC chip 5, and the external electrode terminal 43 in the crystal oscillator 101.

[0048] Specifically, the first excitation electrode 221 is connected to the IC chip 5 via the first escape wiring 223, the junction between the connection junction pattern 27 and the connection junction pattern 353, the wiring pattern 33, the connection junction pattern 351, the through electrode in the fourth through hole 323, and the electrode pattern 37, in that order. The second excitation electrode 222 is connected to the IC chip 5 via the second escape wiring 224, the connection junction pattern 28, the through electrode in the second through hole 262, the junction between the connection junction pattern 254 and the connection junction pattern 352, the through electrode in the fifth through hole 324, and the electrode pattern 37, in that order. In addition, the IC chip 5 is connected to the external electrode terminal 43 via the electrode pattern 37, the through electrode in the third through hole 322, the joint between the connection junction pattern 34 and the connection junction pattern 253, the through electrode in the first through hole 261, the joint between the connection junction pattern 253 and the connection junction pattern 45, and the through electrode in the sixth through hole 44, in that order.

[0049] In the sandwich-structured package 12 manufactured as described above, there is a gap of 1.00 μm or less between the first sealing member 3 and the quartz crystal plate 2, and a gap of 1.00 μm or less between the second sealing member 4 and the quartz crystal plate 2. In other words, the thickness of the bonding material between the first sealing member 3 and the quartz crystal plate 2 is 1.00 μm or less, and the thickness of the bonding material between the second sealing member 4 and the quartz crystal plate 2 is 1.00 μm or less (specifically, 0.15 μm to 1.00 μm for the Au-Au bonding of this embodiment). For comparison, the thickness of a conventional metal paste sealing material using Sn is 5 μm to 20 μm.

[0050] In the present embodiment, as described above, in the crystal oscillator 101, the crystal vibration plate 2 on which the first and second excitation electrodes 221 and 222 are formed is sandwiched between the first and second sealing members (crystal sealing plates) 3 and 4 arranged above and below the crystal vibration plate 2, and the sealing portions of the first and second sealing members 3 and 4 are joined together to form an airtight seal. The first sealing member 3 is formed with fourth and fifth through holes (through holes) 323 and 324 that penetrate from the first main surface 311 on the outer surface side to the second main surface 312 on the sealing surface side. The fourth and fifth through holes 323 and 324 are provided with through electrodes (inner wall electrodes) formed on the inner wall surfaces, outer surface opening peripheral electrodes formed around the openings on the outer surface side, and sealing surface opening peripheral electrodes formed around the openings on the sealing surface side, and the fourth and fifth through holes 323 and 324 have hollow through portions. The opening area of ​​the openings on the outer surface side of the fourth and fifth through holes 323, 324 is larger than the opening area of ​​the openings on the sealed surface side, and the width of the sealing surface side opening periphery electrode is larger in the Z'-axis direction than the width of the outer surface side opening periphery electrode. This point will be described with reference to FIGS. 8 to 12. Note that while the configuration of the fourth through hole 323 shown in FIGS. 8 to 12 will be described here, the fifth through hole 324 has a similar configuration. Note that FIG. 11 shows only the cross-sectional shape of the fourth through hole 323, and other components are not shown. Also, FIG. 12 does not show electrodes and the like formed around the fourth through hole 323.

[0051] Here, the first sealing member 3, which serves as a quartz crystal sealing plate, is formed from an AT-cut quartz crystal plate. Six through holes are formed in the rectangular quartz crystal plate by wet etching (see FIGS. 2 and 3). When wet etching is performed on both the first main surface 311 and the second main surface 312 of the first sealing member 3, through holes with cross-sectional shapes as shown in FIGS. 8 and 12 are formed in the first sealing member 3 due to the anisotropy of the quartz crystal. FIG. 8 shows a cross-sectional view of the fourth through hole 323 taken along a plane parallel to the Y′Z′ plane, and FIG. 12 shows a cross-sectional view of the fourth through hole 323 taken along a plane parallel to the XY′ plane. As shown in FIGS. 8 and 12, the fourth through hole 323 is not simply cylindrical, but rather has a shape that results from wet etching the first sealing member 3 from both the first main surface 311 and the second main surface 312 of the first sealing member 3. In the cross-sectional shape shown in Fig. 8, the fourth through hole 323 is inclined downward (towards the -Y' direction) and toward the internal space of the package 12 (towards the -Z' direction in Fig. 8). On the other hand, in the cross-sectional shape shown in Fig. 12, the fourth through hole 323 is shaped to extend along the approximately vertical direction.

[0052] In this embodiment, the outer surface opening peripheral electrode 37a formed around the opening 323a on the first principal surface 311 side of the fourth through-hole 323 is provided at one end of the above-mentioned electrode pattern 37. The sealing surface opening peripheral electrode 323c formed around the opening 323b on the second principal surface 312 side is formed by diffusion bonding (Au-Au bonding) between the above-mentioned connection bonding pattern 351 (see FIG. 3) and the connection bonding pattern 255 (see FIG. 4) formed on the first principal surface 211 of the quartz-crystal vibrating plate 2. The sealing surface opening peripheral electrode 323c includes a surface main electrode layer made of Au and a base electrode layer made of Ti.

[0053] The opening area of ​​the opening 323a of the fourth through-hole 323 on the first main surface 311 side (the area of ​​the portion inside the hatched portion in FIG. 9) is larger than the opening area of ​​the opening 323b on the second main surface 312 side (the area of ​​the portion inside the hatched portion in FIG. 10). The width W2 (FIG. 10) of the sealing surface side opening peripheral electrode 323c is larger in the Z′-axis direction than the width W1 (FIG. 9) of the outer surface side opening peripheral electrode 37a. The width W2 (FIG. 10) of the sealing surface side opening peripheral electrode 323c is also larger in the X-axis direction than the width W1 (FIG. 9) of the outer surface side opening peripheral electrode 37a. In this embodiment, the width W2 (FIG. 10) of the sealing surface side opening peripheral electrode 323c is larger than the width W1 (FIG. 9) of the outer surface side opening peripheral electrode 37a around the entire periphery.

[0054] According to the present embodiment, the width W2 of the sealing surface side opening peripheral electrode 323c of the fourth through hole 323 is larger than the width W1 of the outer surface side opening peripheral electrode 37a, which makes it possible to prevent corrosion of the underlying electrode layer (Ti layer) of the sealing surface side opening peripheral electrode 323c from progressing and reaching the internal space of the package 12, as compared to when the width W1 of the outer surface side opening peripheral electrode 37a and the width W2 of the sealing surface side opening peripheral electrode 323c are the same, thereby ensuring as much airtightness as possible of the internal space of the package 12. Furthermore, the width W1 of the outer surface side opening peripheral electrode 37a of the fourth through hole 323 is smaller than the width W2 of the sealing surface side opening peripheral electrode 323c, which makes it easier to design the wiring on the first main surface 311 of the first sealing member 3, as compared to when the width W1 of the outer surface side opening peripheral electrode 37a and the width W2 of the sealing surface side opening peripheral electrode 323c are the same, which contributes to miniaturization of the package 12.

[0055] Here, the width W1 of the outer surface opening peripheral electrode 37a and the width W2 of the sealing surface opening peripheral electrode 323c are preferably 10 μm to 30 μm. If the width W1 of the outer surface opening peripheral electrode 37a and the width W2 of the sealing surface opening peripheral electrode 323c are less than 10 μm, the stability of the sealing may be degraded. On the other hand, if the width W1 of the outer surface opening peripheral electrode 37a and the width W2 of the sealing surface opening peripheral electrode 323c are greater than 30 μm, it becomes difficult to design the wiring on the first main surface 311 and the second main surface 312 of the first sealing member 3, making it difficult to miniaturize the package 12.

[0056] Here, if the opening area of ​​the opening 323a of the fourth through hole 323 on the first principal surface 311 side and the opening area of ​​the opening 323b on the second principal surface 312 side are the same, ensuring the width W2 of the sealing surface-side opening peripheral electrode 323c requires increasing the volume of the entire component, including the fourth through hole 323 and the peripheral electrodes (the outer surface-side opening peripheral electrode 37a and the sealing surface-side opening peripheral electrode 323c). In contrast, according to the present embodiment, a size relationship is established between the opening areas of the openings 323a and 323b of the fourth through hole 323, and the opening area of ​​the opening 323b on the second principal surface 312 side is made smaller than the opening area of ​​the opening 323a on the first principal surface 311 side. This creates a surplus space around the fourth through hole 323, making it easier to ensure the width W2 of the sealing surface-side opening peripheral electrode 323c. Therefore, the volume of the entire component, including the fourth through hole 323 and the peripheral electrodes, is not unnecessarily increased, resulting in a configuration advantageous for miniaturization. As a result, the width W2 of the sealing surface-side opening peripheral electrode 323c can be increased, and the area of ​​the sealing portion formed by the sealing surface-side opening peripheral electrode 323c can be stably secured without becoming too small, which makes it possible to suppress the progress of corrosion compared to when the area of ​​the sealing portion cannot be secured.

[0057] Furthermore, when wet etching is performed on an AT-cut quartz crystal plate, the anisotropy of the quartz crystal causes the fourth through-hole 323 to tilt along the Z' axis, which can lead to design deviations and the inability to ensure a sufficient width for the peripheral electrode. In contrast, according to this embodiment, by making the sealing surface opening peripheral electrode 323c larger in the Z' axis direction, it becomes easier to address these issues and contributes to stable airtightness and electrical continuity.

[0058] In this embodiment, the center C1 ( FIG. 9 ) of the opening 323a of the fourth through hole 323 on the first main surface 311 side overlaps the vicinity of the opening edge of the opening 323b of the opposing fourth through hole 323 on the second main surface 312 side in a plan view. The center C2 ( FIG. 10 ) of the opening 323b of the fourth through hole 323 on the second main surface 312 side overlaps the vicinity of the opening edge of the opening 323a of the opposing fourth through hole 323 on the first main surface 311 side in a plan view. The center C1 ( FIG. 9 ) of the opening 323a of the fourth through hole 323 on the first main surface 311 side is a position determined by the center position of the length of the opening 323a in the X-axis direction and the center position of the length of the opening 323a in the Z′-axis direction. The vicinity of the opening edge of the opening 323a is preferably within 10 μm from the opening edge of the opening 323a. The vicinity of the opening edge of opening 323b is preferably within 10 μm from the opening edge of opening 323b. This allows fourth through hole 323 to be reliably formed in first sealing member 3 by wet etching, and also contributes to miniaturization of package 12 because the volume of fourth through hole 323 does not become unnecessarily large.

[0059] Furthermore, a central opening 323d (FIG. 12) having the smallest cross-sectional area is provided in the middle of the fourth through hole 323 in the thickness direction of the first sealing member 3. In this embodiment, the central opening 323d is provided in approximately the center of the first sealing member 3 in the thickness direction. The center C1 (FIG. 9) of the opening 323a of the fourth through hole 323 on the first main surface 311 side overlaps the central opening 323d in a plan view, and the center C2 (FIG. 10) of the opening 323b of the fourth through hole 323 on the second main surface 312 side overlaps the central opening 323d in a plan view. This allows the fourth through hole 323 to be reliably formed in the first sealing member 3 by wet etching, and furthermore, the volume of the fourth through hole 323 is not unnecessarily large, which contributes to miniaturization of the package 12. Furthermore, it is possible to prevent breakage of the through electrodes of the fourth through holes 323, the outer surface side opening peripheral electrodes 37a, and the sealing surface side opening peripheral electrodes 323c.

[0060] Furthermore, the outer peripheral edge (in this case, the outer peripheral edge on the -Z' direction side) of the sealing surface opening peripheral electrode 323c of the fourth through hole 323 is positioned outside the opening edge of the opening 323a on the first main surface 311 side of the fourth through hole 323. This eliminates gaps between the sealing objects, and pressure is applied vertically from the first main surface 311 to the surface of the sealing surface opening peripheral electrode 323c, thereby enabling more reliable Au-Au bonding and stabilizing the airtightness of the internal space of the package 12.

[0061] 11 , when the thickness T1 of the first sealing member 3 is 40 μm, the length in the Z′-axis direction (opening diameter) of the opening 323a of the fourth through hole 323 on the first main surface 311 side is defined as D1, and the length in the Z′-axis direction (opening diameter) of the opening 323b of the fourth through hole 323 on the second main surface 312 side is defined as D2, it is preferable that D1+D2 be 80 μm to 120 μm. It is preferable that the inclination angle α1 of the imaginary line L1 connecting the center C1 of the opening 323a of the fourth through hole 323 on the first main surface 311 side and the center C2 of the opening 323b of the fourth through hole 323 on the second main surface 312 side with respect to the vertical direction be 10° to 30°. It is preferable that the length D3 in the Z'-axis direction from the opening end of the opening 323a on the first main surface 311 side of the fourth through hole 323 to the opening end of the opening 323b on the second main surface 312 side on the -Z'-direction side is 55 μm to 75 μm.

[0062] The present invention can be embodied in various other forms without departing from its spirit, essence, or main features. Therefore, the above-described embodiments are merely illustrative in all respects and should not be interpreted as limiting. The scope of the present invention is defined by the claims and is not limited to the text of the specification. Furthermore, all modifications and variations within the equivalent range of the claims are within the scope of the present invention.

[0063] In the above embodiment, the width W2 (FIG. 10) of the sealing surface opening peripheral electrode 323c of the fourth through-hole 323 is larger than the width W1 (FIG. 9) of the outer surface opening peripheral electrode 37a around the entire circumference, but it does not necessarily have to be larger around the entire circumference. It is sufficient that the width W2 (FIG. 10) of the sealing surface opening peripheral electrode 323c of the fourth through-hole 323 is larger than the width W1 (FIG. 9) of the outer surface opening peripheral electrode 37a at least in the X-axis direction or the Z′-axis direction.

[0064] In the above embodiment, an AT-cut quartz crystal plate that performs thickness-shear vibration is used as the quartz crystal plate, but other quartz crystal plates (for example, an SC-cut quartz crystal plate, a Z-cut quartz crystal plate (quartz Z-plate), etc.) may also be used. For example, the present invention can be applied to a piezoelectric vibration device equipped with a tuning-fork type quartz crystal plate made of a Z-cut quartz crystal plate as shown in FIG.

[0065] The tuning-fork-type quartz crystal vibrating plate 6 shown in Fig. 13 includes a vibrating portion 62 formed in a tuning-fork shape, an outer frame portion 63 surrounding the outer periphery of the vibrating portion 62, and a holding portion 64 connecting the vibrating portion 62 and the outer frame portion 63 to hold the vibrating portion 62. The tuning-fork-type quartz crystal vibrating plate 6 is configured such that the vibrating portion 62, the outer frame portion 63, and the holding portion 64 are integrally formed, and a through portion 6a is formed between the outer frame portion 63 and the vibrating portion 62. Note that Fig. 13 shows the first main surface 611 of the tuning-fork-type quartz crystal vibrating plate 6. Also, first and second excitation electrodes formed on the vibrating portion 62, and lead-out wiring connected to the first and second excitation electrodes, etc. are not shown.

[0066] The vibrating unit 62 includes two legs 62a and 62b extending along the Y′-axis direction and a base 62c to which the ends of the legs 62a and 62b are connected. The legs 62a and 62b extend in the −Y′ direction from the −Y′-direction end of the base 62c. Recesses 62d and 62e are formed in the first and second main surfaces 611 and 62b, respectively, so that the cross sections of the legs 62a and 62b are formed in a substantially H-shape. The holding unit 64 is provided at only one location between the vibrating unit 62 and the outer frame 63. The holding unit 64 extends in the +Y′-direction end of the base 62c of the vibrating unit 62 from the center of the base 62c in the X-axis direction to the outer frame 63 in the +Y′-direction.

[0067] In the above embodiment, the first sealing member 3 and the quartz vibration plate 2, and the second sealing member 4 and the quartz vibration plate 2 are joined by metal-to-metal bonding, such as Au-Au bonding. However, the first sealing member 3 and the quartz vibration plate 2, and the second sealing member 4 and the quartz vibration plate 2 may also be joined using brazing material.

[0068] In the above embodiment, the present invention is described as being applied to the fourth and fifth through holes 323 of the first sealing member 3, but the present invention is not limited to this and may also be applied to the third through holes 322 provided at the four corners of the first sealing member 3. The present invention may also be applied to the sixth through hole 44 of the second sealing member 4. In the above embodiment, the first sealing member 3 and the second sealing member 4 as quartz sealing plates are formed from AT-cut quartz plates, but the present invention is not limited to this and the first sealing member 3 and the second sealing member 4 may be formed from other quartz vibration plates (for example, SC-cut quartz plates, Z-cut quartz plates, etc.) or may be formed from glass.

[0069] 14 and 15, the present invention can also be applied to a quartz crystal unit 102 (piezoelectric vibration device) in which through-holes are formed only in the second sealing member 4. In this quartz crystal unit 102, the quartz crystal plate 2 is formed from an AT-cut quartz crystal plate, while the first sealing member 3 and second sealing member 4, which serve as quartz crystal sealing plates, are formed from Z-cut quartz crystal plates.

[0070] In the quartz crystal unit 102, the quartz crystal vibrating plate 2 is bonded to the first sealing member 3, and the quartz crystal vibrating plate 2 is bonded to the second sealing member 4, thereby forming a package with a substantially rectangular sandwich structure, and the vibrating portion of the quartz crystal vibrating plate 2 is hermetically sealed in the internal space of the package. The quartz crystal vibrating plate 2, first sealing member 3, and second sealing member 4 have similar structures to the quartz crystal vibrating plate 2, first sealing member 3, and second sealing member 4 of the above-described embodiment (see FIGS. 2 to 7), but differ from the above-described embodiment in that through-holes 46 are formed only in the second sealing member 4. In this embodiment, no through-holes are formed in the quartz crystal vibrating plate 2 or the first sealing member 3, but through-holes 46 are formed in the four corners (corners) of the second sealing member 4.

[0071] In detail, as shown in FIG. 15, the second sealing member 4 has a through hole 46 formed therein that penetrates from the second main surface 412 on the outer surface side to the first main surface 411 on the sealing surface side, and the through hole 46 is provided with a through electrode (not shown) formed on the inner wall surface, an outer surface side opening peripheral electrode 46c formed around the opening 46a on the outer surface side, and a sealing surface side opening peripheral electrode 46d formed around the opening 46b on the sealing surface side, and the through hole 46 has a hollow through portion.

[0072] In this embodiment, the second sealing member 4 serving as a quartz-crystal sealing plate is formed from a Z-cut quartz crystal plate. The rectangular quartz crystal plate is wet-etched to form the through-hole 46. When wet-etching is performed on both the first and second main surfaces 411 and 412 of the second sealing member 4, the anisotropy of the quartz crystal causes the through-hole 46 to be formed in the second sealing member 4, as shown in FIG. 15 . FIG. 15 shows a cross-sectional view of the through-hole 46 cut along a plane parallel to the XZ′ plane. As shown in FIG. 15 , the through-hole 46 is not simply cylindrical, but rather has a shape that results from wet-etching the second sealing member 4 from both the first and second main surfaces 411 and 412 of the second sealing member 4. Because the crystal orientation of a Z-cut quartz crystal plate is different from that of an AT-cut quartz crystal plate, the state of the through-hole 46 formed during wet-etching differs from the fourth through-hole 323 (see FIG. 8 ) of the above embodiment. Specifically, the opening area of ​​the opening 46a on the outer surface side of the through-hole 46 is larger than the opening area of ​​the opening 46b on the sealing surface side, and the width W4 of the sealing surface side opening peripheral electrode 46d is larger in the X-axis direction than the width W3 of the outer surface side opening peripheral electrode 46c. Note that the present invention is not limited to the piezoelectric vibration device with a three-layer structure as described above, but can also be applied to piezoelectric vibration devices with a four-layer or more structure.

[0073] This application claims priority from Japanese Patent Application No. 2022-121680, filed on July 29, 2022, the entire contents of which are incorporated herein by reference. [Explanation of symbols]

[0074] 101 Crystal oscillator (piezoelectric oscillator device) 2. Quartz crystal diaphragm (piezoelectric diaphragm) 3 First sealing member (crystal sealing plate) 37a Outer surface opening surrounding electrode 221 1st excitation electrode 222 2nd excitation electrode 311 First main surface 312 Second main surface 323 4th through hole 323a Opening on the first main surface side 323b Opening on the second main surface side 323c Sealing surface side opening surrounding electrode W1 Width of outer surface opening surrounding electrode W2 Width of the electrode surrounding the opening on the sealing surface side

Claims

1. A piezoelectric vibration device in which a quartz crystal vibration plate on which an excitation electrode is formed is sandwiched between quartz crystal sealing plates arranged above and below the quartz crystal vibration plate, and the sealing portions of each plate are joined together to form an airtight seal, The crystal sealing plate has a through hole formed therein, which penetrates from the outer surface side to the sealing surface side, the through hole is provided with an inner wall electrode formed on an inner wall surface, an outer surface side opening peripheral electrode formed around the entire periphery of the opening on the outer surface side, and a sealing surface side opening peripheral electrode formed around the entire periphery of the opening on the sealing surface side, and the through hole has a hollow penetrating portion; The opening area of ​​the through hole on the outer surface side is larger than the opening area of ​​the through hole on the sealing surface side, A piezoelectric vibration device characterized in that the width of the sealing surface side opening periphery electrode is larger in the Z'-axis direction than the width of the outer surface side opening periphery electrode.

2. 2. The piezoelectric vibration device according to claim 1, A piezoelectric vibration device characterized in that the width of the sealing surface side opening periphery electrode is larger in the X-axis direction than the width of the outer surface side opening periphery electrode.

3. A piezoelectric vibration device in which a quartz crystal vibration plate on which an excitation electrode is formed is sandwiched between quartz crystal sealing plates arranged above and below the quartz crystal vibration plate, and the sealing portions of each plate are joined together to form an airtight seal, The crystal sealing plate has a through hole formed therein, which penetrates from the outer surface side to the sealing surface side, the through hole is provided with an inner wall electrode formed on an inner wall surface, an outer surface side opening peripheral electrode formed around the entire periphery of the opening on the outer surface side, and a sealing surface side opening peripheral electrode formed around the entire periphery of the opening on the sealing surface side, and the through hole has a hollow penetrating portion; The opening area of ​​the through hole on the outer surface side is larger than the opening area of ​​the through hole on the sealing surface side, A piezoelectric vibration device characterized in that the width of the sealing surface side opening periphery electrode is larger in the X-axis direction than the width of the outer surface side opening periphery electrode.

4. The piezoelectric vibration device according to any one of claims 1 to 3, The bonding is a diffusion bonding between Au and Au, The piezoelectric vibrating device is characterized in that the sealing surface opening peripheral electrode includes a surface main electrode layer made of Au and a base electrode layer made of Ti.

5. The piezoelectric vibration device according to any one of claims 1 to 3, the center of the opening of the through hole on the outer surface side overlaps the vicinity of the opening end of the opposing through hole on the sealing surface side, A piezoelectric vibration device characterized in that the center of the opening on the sealing surface side of the through hole is positioned overlapping the vicinity of the opening end on the outer surface side of the opposing through hole.

6. The piezoelectric vibration device according to any one of claims 1 to 3, a central opening having a smallest cross-sectional area is provided in the through hole at a middle portion of the through hole in the thickness direction of the quartz-crystal sealing plate; A piezoelectric vibration device characterized in that the center of the opening on the outer surface side of the through hole overlaps with the central opening, and the center of the opening on the sealing surface side of the through hole overlaps with the central opening.

7. The piezoelectric vibration device according to any one of claims 1 to 3, A piezoelectric vibrating device characterized in that the outer peripheral edge of the sealing surface side opening surrounding electrode is located outside the opening edge on the outer surface side of the through hole.

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