Cutting device and method for manufacturing cut products

Abstract

To provide a cutting device that can more reliably discharge an end material.SOLUTION: A cutting device comprises: a processing table that can be moved along the linear movement direction; a cutting mechanism that cuts a cutting object arranged on the processing table; a receiving member that is formed along the movement direction on the lower side of the processing table and has a groove that can receive an end material generated by cutting the cutting object by the cutting mechanism; a movable body that can be moved along the movement direction; and a removal member that is provided in the movable body, arranged so as to be in contact with the groove and removes the end material from the groove.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a cutting device and a method for manufacturing a cut product. [Background technology]

[0002] Patent Document 1 discloses a cutting machine equipped with a scrap processing device for discharging scraps generated by cutting a package substrate. Specifically, the scrap processing device described in Patent Document 1 can push scraps downstream by spraying cleaning water from a cleaning nozzle onto scraps that have fallen into a water case that houses a chuck table. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2020-129580 Summary of the Invention [Problem to be solved by the invention]

[0004] In a cutting machine such as that described in Patent Document 1, scraps that have fallen into the water case may accumulate. Because the accumulated scraps are heavy, the cleaning water from the cleaning nozzle may not be able to wash them away. Furthermore, if the liquid between the scraps that have fallen into the water case and the bottom of the water case dries, the scraps may adhere to the water case, making it impossible to wash them away with the cleaning water from the cleaning nozzle.

[0005] The present invention has been made in consideration of the above-mentioned circumstances, and the problem it aims to solve is to provide a cutting device and a method for manufacturing cut products that can more reliably discharge scrap material. [Means for solving the problem]

[0006] The problem to be solved by the present invention is as described above, and in order to solve this problem, a cutting device according to the present invention comprises: a processing table movable along a linear movement direction; a cutting mechanism that cuts an object placed on the processing table; a receiving member that is formed below the processing table along the movement direction and has a groove that can receive scraps generated when the object is cut by the cutting mechanism; a movable body that is movable along the movement direction; and a removal member that is provided on the movable body and is arranged so as to come into contact with the groove, and that removes the scraps from the groove. and a storage section disposed on one side of the receiving member in the movement direction and capable of storing the scrap material, wherein the removal member includes an attachment section attached to the moving body so as to be swingable, and a main body section disposed so as to be inclined downward from the attachment section toward the storage section and in contact with the groove section. It is something.

[0007] In addition, the method for manufacturing cut products of the present invention is a method for manufacturing cut products using the cutting device, and includes the steps of placing the object to be cut on the processing table, and cutting the object to be cut by moving the cutting mechanism and the processing table relative to each other. [Effects of the Invention]

[0008] According to the present invention, scraps can be more reliably discharged. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a schematic plan view showing the overall configuration of a cutting device according to a first embodiment. [Figure 2] FIG. 2 is a plan view showing the configuration of a cutting module. [Figure 3] S1-S1 cross section. [Figure 4] FIG. 10 is a plan view showing the lower part of the cutting module. [Figure 5] S2-S2 cross section. [Figure 6] 1A is an enlarged plan view showing a first removal member, and FIG. 1B is an enlarged side cross-sectional view showing the first removal member. [Figure 7] FIG. 10 is a side cross-sectional view showing the first removal member moving forward. [Figure 8]10(a) is a side cross-sectional view showing a cutting device according to a second embodiment, and FIG. 10(b) is a side cross-sectional view showing a cutting device according to a third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] In the following description, the directions indicated by arrows U, D, L, R, F, and B in the drawings are defined as the upward, downward, leftward, rightward, forward, and backward directions, respectively. In addition, the rotation direction around the vertical rotation axis is defined as the θ direction.

[0011] <Configuration of cutting device 100 according to first embodiment> First, a configuration of the cutting device 100 according to the first embodiment will be described. In this embodiment, the configuration of the cutting device 100 will be described in the case where, for example, a sealed substrate W in which a substrate on which a semiconductor chip is fixed is sealed with resin is used as an object to be cut by the cutting device 100.

[0012] Examples of the encapsulated substrate W include a BGA (Ball Grid Array) package substrate, a CSP (Chip Size Package) package substrate, and an LED (Light Emitting Diode) package substrate. The object to be cut may not only be the encapsulated substrate W, but also a encapsulated lead frame formed by resin-encapsulating a lead frame to which a semiconductor chip is fixed. The object to be cut may also be a wiring board to which no electronic element or electronic component is fixed and which has single-layer or multi-layer wiring.

[0013] The cutting apparatus 100 shown in Fig. 1 is a processing apparatus that cuts an encapsulated substrate W, which is an object to be cut, into a plurality of cut pieces (products P). The cutting apparatus 100 includes, as components, a substrate supply module A, a cutting module B, and a storage module C. Each component is detachable and replaceable with respect to the other components.

[0014] <Substrate supply module A> The substrate supply module A is mainly provided with a substrate supply mechanism 1 and a control unit CTL.

[0015] The sealed substrate W, which is the object to be cut, is carried out from the substrate supply mechanism 1 and transferred by a transfer mechanism (not shown) to the cutting module B. The sealed substrate W transferred to the cutting module B is placed on a cutting table 15, which will be described later.

[0016] The control unit CTL controls the operation of each part of the cutting device 100. The control unit CTL controls each part of the cutting device 100, thereby enabling the loading of the sealed substrate W, cutting of the sealed substrate W, inspection of the product P, unloading of the product P, etc. The control unit CTL can also be provided in a module other than the substrate supply module A. The control unit CTL can also be divided into multiple units. For example, a control unit CTL can be provided in each module, and the control units CTL can be linked together to control each part.

[0017] <Cutting Module B> The cutting module B shown in FIG. 1 is mainly provided with a moving mechanism 13, a cutting table 15, a rotating mechanism 17, and a spindle unit .

[0018] This embodiment illustrates a twin-cut table type cutting device 100 having two cutting tables 15. The cutting table 15 can be moved in the front-rear direction by a movement mechanism 13, and can be rotated in the θ direction by a rotation mechanism 17.

[0019] Furthermore, this embodiment exemplifies the cutting device 100 having a twin spindle configuration having two spindle parts 23. The two spindle parts 23 are movable in the left-right direction and the up-down direction independently of each other.

[0020] In the cutting module B, the sealed substrate W is held on the cutting table 15, and the cutting table 15 and the two spindle units 23 are moved relative to each other to cut the sealed substrate W into individual pieces. A blade 23a is attached to the spindle units 23. The blade 23a cuts the sealed substrate W held on the cutting table 15 by rotating in a plane including the front-to-back and up-to-down directions. At this time, the sealed substrate W can also be cut while cutting water is sprayed toward the blade 23a from a cutting nozzle 23b (see FIG. 3), which will be described later.

[0021] <Storage Module C> The storage module C is mainly provided with an inspection table 2 and a tray 3.

[0022] An assembly of a plurality of products P, which have been cut into individual pieces from the sealed substrate W, is placed on the inspection table 2. The plurality of products P are inspected by an inspection camera (not shown) and sorted into non-defective products and defective products. The selected non-defective products are stored in a tray 3. The selected defective products are stored in a separately prepared tray (not shown) and are excluded from the products P. Note that it is not necessarily necessary to inspect the products P in the storage module C.

[0023] <Details of Cutting Module B> Next, the specific configuration of the cutting module B will be described with reference to Figures 2 to 6. Note that Figure 4 illustrates only the lower part of the cutting module B, omitting the illustration of members provided at the top of the cutting module B (such as the second receiving member 14, cutting table 15, rear cover member 18, front cover member 19, and upper cover member 20, which will be described later). Furthermore, since the device configurations of the left and right cutting tables 15 are generally the same, the device configuration of the left cutting table 15 will be mainly described in detail below.

[0024] The cutting module B mainly comprises a first receiving member 11, a storage section 12, a moving mechanism 13, a second receiving member 14, a cutting table 15, a rotation mechanism 17, a rear cover member 18, a front cover member 19, an upper cover member 20, a first removal member 21, a cleaning nozzle 22 and a spindle section 23.

[0025] The first receiving member 11 shown in FIGS. 2 to 5 is a member that receives scraps E generated when cutting the sealed substrate W. The first receiving member 11 is one embodiment of the receiving member of the present application. The first receiving member 11 is formed in a box shape that is open upward and backward. The first receiving member 11 can receive scraps E that have fallen from the cutting table 15 (described later), the second receiving member 14, etc. The first receiving member 11 mainly includes a protrusion 11a, an opening 11b, an inclined groove 11c, and a side portion 11d.

[0026] 3 to 5 is a portion formed so as to bulge upward on the bottom surface of the first receiving member 11. A pair of protrusions 11a are formed on the left and right so as to correspond to the cutting table 15. The protrusions 11a are formed so as to extend in the front-rear direction.

[0027] 4 and 5 is a portion formed to penetrate vertically through the bottom surface of the first receiving member 11. The opening 11b is formed on the upper surface of the protruding portion 11a. The opening 11b is formed to extend in the front-rear direction across both the front and rear ends of the protruding portion 11a.

[0028] The inclined groove portion 11c shown in Figures 3 to 5 is a portion of the bottom surface of the first receiving member 11 formed so as to be inclined downward toward the rear. The inclined groove portion 11c is one embodiment of the groove portion of the present application. The inclined groove portion 11c is formed on both the left and right sides of the protrusion portion 11a. Specifically, the inclined groove portion 11c is formed in a total of three locations: between the left and right protrusion portions 11a, and between the left and right protrusion portions 11a and side portions 11d described below. The inclined groove portion 11c is formed so as to extend along the front-rear direction. The upper surface of the inclined groove portion 11c is formed so as to be inclined downward toward the rear.

[0029] The side portion 11d is a portion that forms the side surface of the first receiving member 11. The side portion 11d is formed so as to surround the protrusion 11a, the opening portion 11b, and the inclined groove portion 11c from both the left and right sides and the front. The side portion 11d is formed so as to have an appropriate vertical width.

[0030] The storage section 12 is a section that collects scrap material E discharged from the first receiving member 11. The storage section 12 is formed in a box shape that is open at the top. The storage section 12 is arranged at the rear end of the first receiving member 11. For convenience, in this embodiment, in Figure 3 and the like, the storage section 12 and the first receiving member 11 are illustrated as being integrally formed, but it is also possible to form the first receiving member 11 and the storage section 12 as separate members and configure the storage section 12 so that it can be attached and detached to the first receiving member 11.

[0031] The moving mechanism 13 is for moving the cutting table 15 back and forth. The moving mechanism 13 mainly includes a moving member 13a, a connecting portion 13b, a nut 13c, and a screw shaft 13d.

[0032] The moving member 13a supports the cutting table 15 and is movable back and forth. The moving member 13a is one embodiment of the moving body of the present application. The moving member 13a is formed in, for example, a rectangular parallelepiped shape. The moving member 13a is disposed above the protruding portion 11a.

[0033] The connecting portion 13b is a portion that connects the moving member 13a and the nut 13c. The connecting portion 13b is formed in a longitudinal shape (for example, a cylindrical shape) that extends vertically. The connecting portion 13b is disposed so as to extend from below to above the first receiving member 11 through the opening 11b. The upper end of the connecting portion 13b is fixed to the moving member 13a.

[0034] The nut 13c and the screw shaft 13d constitute a ball screw mechanism. The screw shaft 13d is disposed below the opening 11b. The screw shaft 13d is disposed with its longitudinal direction facing horizontally (front-to-back). The screw shaft 13d can be rotated by a driving force from a driving source (not shown) such as a motor. The nut 13c is fitted onto the screw shaft 13d. A number of balls (not shown) are interposed between the nut 13c and the screw shaft 13d. The lower end of the connecting portion 13b is fixed to the upper part of the nut 13c. The nut 13c is prevented from rotating around the screw shaft 13d.

[0035] In the moving mechanism 13, when the screw shaft 13d rotates, the nut 13c fitted to the screw shaft 13d moves linearly in a direction (either forward or backward) corresponding to the rotation direction of the screw shaft 13d. When the nut 13c moves, the moving member 13a connected to the nut 13c via the connecting portion 13b also moves linearly together with the nut 13c.

[0036] 2 and 3 is a member that receives scraps E generated when cutting the sealed substrate W. The second receiving member 14 is formed in a box shape that is open upward and backward. The second receiving member 14 is fixed to the upper part of the moving member 13a. The second receiving member 14 can receive scraps E that fall from the cutting table 15.

[0037] The cutting table 15 is a portion on which the sealed substrate W, which is the object to be cut, is placed. The cutting table 15 is one embodiment of the processing table of the present application. The cutting table 15 is placed above the first receiving member 11 and the second receiving member 14. The cutting table 15 is supported by the moving member 13a via a rotation mechanism 17, which will be described later.

[0038] The rotation mechanism 17 is for rotating the cutting table 15 in the θ direction. The rotation mechanism 17 is interposed between the moving member 13a and the cutting table 15. The rotation mechanism 17 can rotate the cutting table 15 by a driving force from a driving source (not shown) such as a motor.

[0039] The rear cover member 18 shown in Figures 3 and 5 covers the opening 11b from above behind the movable member 13a. The rear cover member 18 is disposed above the protrusion 11a. The rear cover member 18 is formed in an accordion shape and is configured to be able to expand and contract in the front-to-rear direction. The front part of the rear cover member 18 is connected to the movable member 13a. As a result, the rear cover member 18 expands and contracts in the front-to-rear direction in accordance with the movement of the movable member 13a in the front-to-rear direction.

[0040] The front cover member 19 shown in Figures 2, 3, and 5 covers the opening 11b from above in front of the movable member 13a. The front cover member 19 is disposed on top of the protrusion 11a. The front cover member 19 is formed in an accordion shape and is configured to be able to expand and contract in the front-to-rear direction. The rear of the front cover member 19 is connected to the movable member 13a. As a result, the front cover member 19 expands and contracts in the front-to-rear direction in accordance with the movement of the movable member 13a in the front-to-rear direction.

[0041] The upper cover member 20 covers the rear cover member 18 from above. The upper cover member 20 mainly includes a plurality of plate-like members 20a and connecting portions 20b.

[0042] The multiple plate-shaped members 20a are formed in the shape of rectangular plates. The multiple plate-shaped members 20a are arranged in a line in the front-to-rear direction above the upper cover member 20. The multiple plate-shaped members 20a are arranged so that at least a portion of each plate-shaped member 20a overlaps in the up-down direction with the adjacent plate-shaped members 20a in the front-to-rear direction. The adjacent plate-shaped members 20a are connected to each other so that they can move relative to each other. The multiple plate-shaped members 20a are arranged so as to span both the front and rear ends of the rear cover member 18. The rear end of the plate-shaped member 20a arranged at the rearmost position is arranged so as to overlap with the storage section 12 in the up-down direction.

[0043] The connecting portion 20b connects the plate-like members 20a and the second receiving member 14. The connecting portion 20b is fixed to the bottom surface of the rear end portion of the second receiving member 14. The connecting portion 20b is connected to the plate-like member 20a that is arranged at the forefront. This allows the multiple plate-like members 20a to expand and contract in the front-to-rear direction as the second receiving member 14 (moving member 13a) moves in the front-to-rear direction.

[0044] The first removal member 21 shown in Figures 2 and 3 is for discharging scrap material E from the first receiving member 11 (inclined groove portion 11c) into the storage portion 12. The first removal member 21 is one embodiment of the removal member of the present application. The first removal member 21 is provided on each of the left and right side surfaces of the moving member 13a. For convenience, the first removal member 21 is shown in a simplified form in figures other than Figure 6, so the configuration of the first removal member 21 will be described below using Figure 6. The first removal member 21 mainly comprises a support portion 21a, an attachment portion 21b, and a main body portion 21c.

[0045] The support portion 21a is a portion that supports the mounting portion 21b and the main body portion 21c, which will be described later, so that they can swing. The support portion 21a is fixed to each of the left and right side surfaces of the moving member 13a. The support portion 21a is provided so as to protrude to both the left and right sides from the moving member 13a (at positions that overlap with the inclined groove portion 11c in the vertical direction). The support portion 21a is formed with through holes 21d that penetrate the support portion 21a in the vertical direction. The number of through holes 21d formed corresponds to the number of mounting portions 21b, which will be described later (in this embodiment, two through holes 21d are formed for one support portion 21a).

[0046] The mounting portion 21b is a member that is attached to the moving member 13a so as to be able to swing. The mounting portion 21b is formed in a substantially cylindrical shape. The diameters of both upper and lower ends of the mounting portion 21b are larger than the diameter of the upper and lower intermediate portions. The diameters of the upper and lower intermediate portions of the mounting portion 21b are smaller than the inner diameter of the through-hole 21d of the support portion 21a. The diameters of both upper and lower ends of the mounting portion 21b are larger than the inner diameter of the through-hole 21d of the support portion 21a.

[0047] The upper and lower intermediate portions of the mounting portion 21b are inserted into the through-hole 21d of the support portion 21a. Because the diameters of both the upper and lower ends of the mounting portion 21b are larger than the inner diameter of the through-hole 21d, the mounting portion 21b will not fall off the support portion 21a. In this state, there is a gap between the upper and lower intermediate portions of the mounting portion 21b and the through-hole 21d, so the mounting portion 21b is supported so as to be swingable within a predetermined movable range relative to the support portion 21a.

[0048] Although Figure 6 shows a simplified structure of mounting portion 21b, in reality, mounting portion 21b may be made up of multiple separable members (e.g., bolts and nuts) in order to insert mounting portion 21b into through-hole 21d.

[0049] The main body portion 21c is a member arranged to contact the inclined groove portion 11c. The main body portion 21c is formed in the shape of a rectangular plate with its longitudinal direction facing forward and backward in a plan view. The front end portion of the main body portion 21c is fixed to the lower part of the attachment portion 21b below the support portion 21a. The rear portion of the main body portion 21c is arranged to extend rearward and downward from the attachment portion 21b. Because the attachment portion 21b is swingable, the main body portion 21c falls downward under its own weight until its rear end contacts the upper surface of the inclined groove portion 11c.

[0050] It is desirable that at least the portion of the main body 21c that comes into contact with the inclined groove 11c (tip 21e) be made of an elastic material such as rubber. For example, the tip 21e of the main body 21c may be made of an elastic material, and the other portions may be made of a metal plate. Alternatively, the entire main body 21c may be made of an elastic material.

[0051] The main body 21c is swingably attached to the moving member 13a via the attachment portion 21b. Because the main body 21c swings downward due to its own weight, it can follow the inclined groove portion 11c and always be in contact with the inclined groove portion 11c even when the first removal member 21 moves back and forth as described below.

[0052] Because the inclined groove portion 11c is inclined with respect to the movement direction (horizontal direction) of the movable member 13a, the angle α formed between the main body portion 21c of the first removal member 21 and the inclined groove portion 11c changes depending on the position of the movable member 13a (first removal member 21). In this embodiment, regardless of the position of the movable member 13a, the angle α formed between the main body portion 21c and the inclined groove portion 11c is set to be 45 degrees or less.

[0053] In this way, the first removal members 21 are provided on both the left and right sides of the moving member 13a, and are arranged so as to correspond to the three inclined groove portions 11c, respectively.

[0054] The cleaning nozzle 22 shown in Figures 2 to 4 is for spraying cleaning water onto the inclined groove portion 11c. The cleaning nozzle 22 is disposed above the front portion of the inclined groove portion 11c and facing rearward. The cleaning nozzle 22 can spray cleaning water from its front end (rear end). The cleaning water sprayed from the cleaning nozzle 22 can wash away scraps E from the inclined groove portion 11c and wash away dirt such as cutting chips.

[0055] 2 and 3 is for cutting the sealed substrate W, which is the cutting target. The spindle unit 23 is one embodiment of the cutting mechanism of the present application. A blade 23a that rotates in a plane including the front-rear direction and the up-down direction is attached to the spindle unit 23. A cutting nozzle 23b is provided near the spindle unit 23 to supply cutting water when cutting the sealed substrate W. The cutting nozzle 23b can move integrally with the spindle unit 23.

[0056] <Discharge of scrap E> Hereinafter, with reference to FIGS. 3 and 7, a description will be given of how the scrap material E that has fallen into the inclined groove portion 11c is discharged in the cutting device 100 configured as described above.

[0057] When cutting the sealed substrate W, the moving member 13a can be moved back and forth by rotating the screw shaft 13d of the moving mechanism 13, and further the cutting table 15 can be moved in the front-to-back direction. By combining the movement of the cutting table 15 in the front-to-back direction by the moving mechanism 13, the rotation of the cutting table 15 in the θ direction by the rotation mechanism 17, and the movement of the spindle part 23 in the left-to-right and up-to-down directions, the sealed substrate W placed on the cutting table 15 can be cut into individual pieces by the blade 23a.

[0058] Scraps E, cutting chips, etc. generated by cutting the sealed substrate W may fall from the cutting table 15 into the inclined groove portion 11c of the first receiving member 11. In response to this, when cutting the sealed substrate W, cleaning water is sprayed continuously or intermittently from the cleaning nozzle 22. This cleaning water can wash away the scraps E, cutting chips, etc. that have fallen into the inclined groove portion 11c toward the storage portion 12.

[0059] Furthermore, in this embodiment, the first removal member 21 can more reliably discharge the scraps E and the like that have fallen into the inclined groove portion 11c into the storage portion 12. Specifically, when the cutting table 15 moves back and forth when cutting the sealed substrate W, the first removal member 21 provided on the moving member 13a also moves back and forth accordingly.

[0060] 3, when the first removal member 21 moves rearward, scrap material E that has fallen behind the first removal member 21 is pushed from the front toward the storage unit 12 by the first removal member 21. As a result, even scrap material E that cannot be washed away with the cleaning water from the cleaning nozzle 22 can be more reliably discharged into the storage unit 12 using the first removal member 21. Note that by providing a gap between the attachment portion 21b and the through-hole 21d of the support portion 21a, and by providing the tip portion 21e formed of an elastic body on the main body portion 21c, it is possible to prevent excessive load or resistance from being applied to the first removal member 21 when pushing out the scrap material E.

[0061] Furthermore, as shown in FIG. 7, when the first removal member 21 moves forward and comes into contact with scrap E that has fallen in front of the first removal member 21, the first removal member 21 swings upward and can pass above the scrap E from rear to front. In this manner, in this embodiment, the first removal member 21 is configured to be swingable. Furthermore, the angle α formed between the main body portion 21c and the inclined groove portion 11c is 45 degrees or less. Therefore, the force pushing the scrap E back forward is smaller than the force pushing the scrap E rearward. As a result, when the first removal member 21 moves forward, the scrap E can be prevented from being pushed back in a direction away from the storage portion 12.

[0062] The above describes the first embodiment of the present invention, but the present invention is not limited to the above embodiment and can be modified as appropriate within the scope of the technical idea of ​​the invention described in the claims.

[0063] For example, the configuration (shape, arrangement, number, etc.) of each part of the cutting device 100 described in this embodiment is not particularly limited and can be changed as desired.

[0064] Furthermore, the configuration of first removal member 21 shown in this embodiment is an example, and the present invention is not limited to this. For example, the configuration for swingably supporting main body portion 21c is not limited to the configuration using support portion 21a and mounting portion 21b as in this embodiment (see FIG. 6). As another example of a configuration, it is also possible to use a horizontally arranged swing shaft to swingably support main body portion 21c.

[0065] In addition, in this embodiment, tip portion 21e of main body portion 21c is formed of an elastic body, but the material of main body portion 21c is not particularly limited. In this embodiment, first removal member 21 is positioned so that the angle α between main body portion 21c and inclined groove portion 11c is 45 degrees or less, but the posture of first removal member 21 is not limited to this and can be changed as desired.

[0066] Furthermore, in this embodiment, an example has been shown in which the first removal member 21 is provided on the moving member 13a, but the present invention is not limited to this, and the first removal member 21 can also be provided on another member that moves integrally with the cutting table 15. For example, the first removal member 21 can also be provided on the second receiving member 14, the connecting portion 13b, etc.

[0067] Furthermore, in this embodiment, the first removal member 21 moves integrally with the cutting table 15 via the moving member 13a, but the present invention is not limited to this, and it is also possible to configure the first removal member 21 and the cutting table 15 to move independently of each other. In this case, it is possible to provide a moving mechanism for moving the first removal member 21 separately from the moving mechanism 13 for moving the cutting table 15.

[0068] Second Embodiment The cutting device 100 according to the second embodiment will be described below with reference to Fig. 8(a). The cutting device 100 according to the second embodiment differs from the cutting device 100 according to the first embodiment (see Fig. 3, etc.) in that it includes a second removal member 24. Therefore, the following description will mainly focus on the second removal member 24.

[0069] The second removal member 24 is for discharging scrap material E on the upper cover member 20 into the storage section 12. The second removal member 24 is formed of an elastic material such as rubber. The second removal member 24 is formed in a plate shape. With the second removal member 24 sandwiched between the rear portion of the second receiving member 14 and a fixing plate-like member 14a, the plate-like member 14a is fixed to the second receiving member 14 with a fixing device such as a bolt, thereby fixing the second removal member 24 to the rear portion of the second receiving member 14. The second removal member 24 is arranged to extend rearward and downward from the second receiving member 14. The tip portion (rear end portion) of the second removal member 24 is arranged to contact the upper cover member 20.

[0070] When the cutting table 15 moves back and forth when cutting the sealed substrate W, the second removal member 24 provided on the second receiving member 14 also moves back and forth accordingly. When the second removal member 24 moves rearward, the scrap material E that has fallen onto the upper cover member 20 is pushed from the front by the second removal member 24 toward the storage section 12, and is discharged from the upper cover member 20 into the storage section 12. This prevents the scrap material E from falling through the gaps between the plate-like members 20a onto the rear cover member 18, which would otherwise damage the rear cover member 18.

[0071] 8(a), the position of the second removal member 24 is adjusted so that when the cutting table 15 is moved to the rearmost position, the second removal member 24 is positioned rearward of the rear end of the upper cover member 20. This allows the scrap E to be discharged into the storage section 12 more reliably.

[0072] <Third embodiment> The cutting device 100 according to the third embodiment will be described below with reference to Fig. 8(b). The cutting device 100 according to the third embodiment differs from the cutting device 100 according to the second embodiment (see Fig. 8(a)) in that it includes a third removal member 25 instead of the second removal member 24. Therefore, the following description will mainly focus on the third removal member 25.

[0073] The third removal member 25 is for discharging scrap material E on the upper cover member 20 into the storage section 12. The third removal member 25 is composed of a brush with bundled bristles. The bristles of the third removal member 25 may be made of synthetic fiber, for example. The third removal member 25 is provided on the bottom surface of the rear part of the second receiving member 14. The tip (lower end) of the third removal member 25 is positioned so as to contact the upper cover member 20.

[0074] The third removal member 25 configured in this manner can push out and discharge scrap material E that has fallen onto the upper cover member 20 toward the storage section 12, similar to the second removal member 24 of the second embodiment.

[0075] <Additional Notes> The cutting device 100 according to the first aspect of the present disclosure comprises: a cutting table 15 (processing table) that is movable along a linear movement direction; a spindle unit 23 (cutting mechanism) that cuts the sealed substrate W (cutting object) placed on the cutting table 15; a first receiving member 11 (receiving member) that is formed below the cutting table 15 along the movement direction and has an inclined groove portion 11c (groove portion) that can receive scraps E generated when the sealed substrate W is cut by the spindle portion 23; a moving member 13a (moving body) that is movable along the movement direction; a first removal member 21 (removal member) provided on the moving member 13a and arranged to contact the inclined groove portion 11c, and configured to remove the scrap material E from the inclined groove portion 11c; Equipped with. According to the cutting device 100 of the first aspect of the present disclosure, it is possible to more reliably discharge scraps E. That is, the scraps E that have fallen into the inclined groove portion 11c can be directly pushed out and discharged by the first removal member 21 that moves together with the moving member 13a. This allows scraps E that cannot be completely discharged with cleaning water (scraps E that have accumulated or adhered to the inclined groove portion 11c) to be more reliably discharged from the inclined groove portion 11c.

[0076] In the cutting device 100 of the second aspect according to the first aspect, The moving member 13a is movable integrally with the cutting table 15 along the movement direction. According to the cutting device 100 of the second aspect of the present disclosure, the mechanism for moving the cutting table 15 (moving mechanism 13) can also serve as a mechanism for moving the first removal member 21.

[0077] The cutting device 100 of the third aspect according to the first or second aspect comprises: Further provided is a storage section 12 that is arranged on one side of the first receiving member 11 in the movement direction and is capable of storing the scrap material E, The first removal member 21 is a mounting portion 21b that is attached to the moving member 13a so as to be swingable; a main body portion 21c that is disposed so as to be inclined downward from the attachment portion 21b toward the accommodation portion 12 and that is in contact with the inclined groove portion 11c; Equipped with. According to the cutting device 100 of the third aspect of the present disclosure, it is possible to prevent excessive load from being applied to the first removal member 21 when pushing out the scrap E. Furthermore, when the first removal member 21 moves in a direction away from the storage unit 12, the main body portion 21c can be swung so as to climb over the scrap E, thereby preventing the scrap E from being pushed back in a direction away from the storage unit 12.

[0078] In a fourth aspect of the cutting device 100 according to the third aspect, The main body portion 21c is arranged so that the angle α formed between the main body portion 21c and the inclined groove portion 11c is 45 degrees or less. According to the cutting device 100 of the fourth aspect of the present disclosure, the scrap material E can be easily pushed out toward the storage section 12.

[0079] A cutting device 100 according to a fifth aspect of the third or fourth aspect, The main body 21c has a portion (tip 21e) that comes into contact with the inclined groove 11c formed of an elastic material. According to the cutting device 100 of the fifth aspect of the present disclosure, it is possible to prevent excessive load from being applied to the first removal member 21 when pushing out the scrap E. It is also possible to prevent damage (such as wear) to the inclined groove portion 11c that contacts the main body portion 21c.

[0080] A sixth aspect of the cutting device 100 according to the third to fifth aspects, The inclined groove portion 11c is formed so as to be inclined downward as it approaches the storage portion 12 side. According to the cutting device 100 of the sixth aspect of the present disclosure, it is possible to easily discharge the scrap material E toward the storage section 12. Furthermore, since cleaning water and the like are less likely to remain in the inclined groove section 11c, it is possible to prevent the scrap material E from adhering to the inclined groove section 11c.

[0081] The cutting device 100 of the seventh aspect according to the first to sixth aspects includes: a screw shaft 13d disposed below the moving member 13a and extending along the moving direction; a nut 13c that is movable along the screw shaft 13d in response to rotation of the screw shaft 13d; a connecting portion 13b that connects the nut 13c and the moving member 13a; Equipped with. According to the cutting device 100 of the seventh aspect of the present disclosure, the moving member 13a can be moved with a simple configuration.

[0082] A method for producing a cut product according to an eighth aspect of the present disclosure includes: A method for manufacturing a cut product using the cutting device 100 according to any one of the first to seventh aspects, a step of placing the sealed substrate W on the cutting table 15; a step of cutting the sealed substrate W by moving the spindle unit 23 and the cutting table 15 relatively; Includes: According to the method for manufacturing cut products according to the eighth aspect of the present disclosure, the scraps E can be more reliably discharged. [Explanation of symbols]

[0083] 11 First support member 11c Slanted groove 12 Storage section 13a Moving member 13b Connection part 13c nut 13d screw shaft 15 Cutting Table 21 First removal member 21b Mounting part 21c Main body 21e Tip 23 Spindle section 100 cutting equipment

Claims

1. a processing table that is movable along a linear movement direction; a cutting mechanism that cuts an object placed on the processing table; a receiving member formed below the processing table along the movement direction and having a groove portion capable of receiving scraps generated when the cutting object is cut by the cutting mechanism; a moving body that is movable along the movement direction; a removal member that is provided on the movable body and is arranged to contact the groove portion and removes the scrap material from the groove portion; Equipped with Further, a storage portion is provided on one side of the receiving member in the moving direction and capable of storing the scrap material. The removal member is a mounting portion that is swingably mounted to the moving body; a main body portion that is inclined downward from the attachment portion toward the accommodation portion and that contacts the groove portion; A cutting device comprising:

2. the movable body is movable integrally with the processing table along the movement direction; 2. The cutting device of claim 1.

3. The main body portion is positioned so that the angle between the main body portion and the groove portion is 45 degrees or less.

2. The cutting device of claim 1.

4. The portion of the main body that comes into contact with the groove is formed of an elastic material.

2. The cutting device of claim 1.

5. The groove portion is formed so as to slope downward as it approaches the storage portion side.

2. The cutting device of claim 1.

6. A screw shaft disposed below the moving body and extending along the moving direction; a nut that is movable along the screw shaft in response to rotation of the screw shaft; a connecting portion that connects the nut and the moving body; Equipped with 2. The cutting device of claim 1.

7. A method for manufacturing a cut product using the cutting device according to any one of claims 1 to 6, placing the workpiece on the processing table; cutting the object by moving the cutting mechanism and the processing table relatively; A method for manufacturing a cut product, comprising:

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