Piezoelectric thin film resonator and its manufacturing method

Abstract

To provide a piezoelectric thin-film resonator capable of suppressing characteristic degradation.SOLUTION: A piezoelectric thin-film resonator comprises a substrate 10, a lower electrode 12 on the substrate 10, a piezoelectric layer 14 on the lower electrode 12, a top electrode 16 on the piezoelectric layer 14 that sandwiches at least a portion of the piezoelectric layer 14 between the lower electrode 12 and the top electrode to form a resonance region 50, and an acoustic reflective film 30 provided between the substrate 10 and the lower electrode 12 and consisting of alternating layers of one or more first layers 31 in which the end faces 34 are inclined so that the first face on the lower electrode 12 side is larger than the second face on the substrate 10 side and the end 64 is located outside the resonance region 50, and second layers 32 made of a different material than the one or more first layers 31.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a piezoelectric thin film resonator and a manufacturing method thereof, and more particularly to a piezoelectric thin film resonator having an acoustic reflection film and a manufacturing method thereof. [Background technology]

[0002] BAW (Bulk Acoustic Wave) resonators such as SMR (Solid Mounted Resonators) are used as filters and duplexers for high-frequency circuits in wireless terminals such as mobile phones. BAW resonators are called film bulk acoustic resonators. Film bulk acoustic resonators have a structure in which a lower electrode and an upper electrode are provided with a piezoelectric layer sandwiched between them, and the resonance region where the lower electrode and the upper electrode face each other with at least a portion of the piezoelectric layer sandwiched between them is the region in which elastic waves resonate. It is known to stack a first layer and a second layer with different acoustic impedances under the lower electrode as an acoustic reflection film that reflects elastic waves (for example, Patent Documents 1 to 3). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2009-22052 [Patent Document 2] Japanese Patent Application Publication No. 2019-092096 [Patent Document 3] Japanese Patent Application Publication No. 2020-205574 Summary of the Invention [Problem to be solved by the invention]

[0004] In Patent Document 1, the end face of the first layer of the acoustic reflection film, which has a large acoustic impedance, is inclined in a forward tapered shape. The inclination of the end face of the first layer can prevent voids from forming in the second layer near the end face of the first layer. It also improves adhesion between the first and second layers. However, the end face of the first layer may be inclined in a reverse tapered shape. For example, as in Patent Document 2, when the first and second layers are stacked on the lower surface of the piezoelectric layer, the end face of the first layer becomes in a reverse tapered shape. If the end face of the first layer is in a reverse tapered shape, the characteristics of the piezoelectric thin film resonator may deteriorate.

[0005] The present invention has been made in view of the above problems, and has an object to suppress deterioration of characteristics. [Means for solving the problem]

[0006] The present invention relates to a piezoelectric element comprising: a substrate; a lower electrode provided on the substrate; a piezoelectric layer provided on the lower electrode; an upper electrode provided on the piezoelectric layer, sandwiching at least a portion of the piezoelectric layer between the upper electrode and the lower electrode to form a resonance region; and an end face provided between the substrate and the lower electrode, the end face being inclined so that, when observed in cross section, the length of a first face on the lower electrode side is greater than the length of a second face on the substrate side, the end being located outside the resonance region, the position where the end face and the second face meet substantially coincides with the end of the resonance region, and the angle formed by the end face and the first face being 30° or less. Under The piezoelectric thin film resonator includes an acoustic reflection film in which one or more first layers and a plurality of second layers made of a material different from that of the one or more first layers are alternately stacked.

[0008] In the above configuration, the distance between an edge of the one or more first layers and an edge of the resonance region may be equal to or greater than the thickness of the corresponding first layer.

[0009] The present invention is a piezoelectric thin film resonator comprising: a substrate; a lower electrode provided on the substrate; a piezoelectric layer provided on the lower electrode; an upper electrode provided on the piezoelectric layer and sandwiching at least a portion of the piezoelectric layer between the upper electrode and the lower electrode to form a resonance region; and an acoustic reflection film provided between the substrate and the lower electrode, the end face of which is inclined so that a first face on the lower electrode side is larger than a second face on the substrate side, the angle formed between the end face and the first face being 45° or more, the first layer having an end substantially coinciding with an end of the resonance region or located within the resonance region, and a second layer made of a material different from the first layer or layers, stacked alternately.

[0010] In the above configuration, the distance between an edge of the one or more first layers and an edge of the resonance region may be equal to or less than the thickness of the corresponding first layer.

[0011] In the above configuration, the acoustic impedance of the one or more first layers may be greater than the acoustic impedance of the plurality of second layers.

[0012] In the above configuration, the piezoelectric layer may be a single crystal substrate, provided continuously over the plurality of resonance regions, and have a substantially flat surface facing the acoustic reflection film.

[0013] The present invention relates to a piezoelectric element in which one or more first layers and a plurality of second layers made of a material different from that of the one or more first layers are alternately laminated on a surface of a piezoelectric layer on which a lower electrode is provided, and when a cross section is observed, an end face of the one or more first layers is inclined so that the length of a first face on the lower electrode side of the corresponding first layer is greater than the length of a second face opposite to the first face, and the angle formed between the end face and the first face is 30° or more. UnderA method for manufacturing a piezoelectric thin film resonator includes the steps of: forming an acoustic reflection film; bonding the acoustic reflection film onto a substrate; and forming the upper electrode on the surface of the piezoelectric layer opposite the surface on which the lower electrode is provided so that, when observed in cross section, an end of the one or more first layers is located outside a resonance region where the lower electrode and upper electrode face each other, sandwiching at least a portion of the piezoelectric layer, and the position where the end face and the second surface contact substantially coincides with the edge of the resonance region.

[0014] The present invention is a method for manufacturing a piezoelectric thin film resonator, including the steps of: forming an acoustic reflection film in which one or more first layers and multiple second layers made of a material different from that of the one or more first layers are alternately stacked on a surface of a piezoelectric layer on which a lower electrode is provided, and end faces of the one or more first layers are inclined so that a first face of the corresponding first layer on the side of the lower electrode facing the first layer is larger than a second face opposite the first face, and the angle between the end face and the first face is 45° or more; bonding the acoustic reflection film onto a substrate; and forming the upper electrode on the surface of the piezoelectric layer opposite the surface on which the lower electrode is provided so that the end of the one or more first layers approximately coincides with the end of a resonance region in which the lower electrode and upper electrode face each other, sandwiching at least a portion of the piezoelectric layer, or is located within the resonance region.

[0015] In the above configuration, the step of forming the acoustic reflection film includes the steps of: forming one second layer of the plurality of second layers so as to overlap at least a part of a region of the piezoelectric layer where the lower electrode is provided; forming one first layer of the one or more first layers on the one second layer; etching the one first layer to leave the one first layer in the resonance region and tilt an end face of the one first layer; and forming the one second layer and the one first layer on the one second layer and the one first layer. Multiple and forming another second layer from the second layers. [Effects of the Invention]

[0016] According to the present invention, deterioration of characteristics can be suppressed. [Brief explanation of the drawings]

[0017] [Figure 1] FIG. 1 is a cross-sectional view of a piezoelectric thin film resonator according to a first embodiment. [Figure 2] FIG. 2(a) is an enlarged plan view of the vicinity of the resonance region of the piezoelectric thin film resonator according to the first embodiment, and FIG. 2(b) is a cross-sectional view taken along the line AA of FIG. 2(a). [Figure 3] 3(a) to 3(c) are cross-sectional views (part 1) illustrating a method for manufacturing the film bulk acoustic resonator according to the first embodiment. [Figure 4] 4(a) to 4(c) are cross-sectional views (part 2) illustrating a method for manufacturing the film bulk acoustic resonator according to the first embodiment. [Figure 5] 5(a) to 5(c) are cross-sectional views (part 3) illustrating a method for manufacturing the film bulk acoustic resonator according to the first embodiment. [Figure 6] 6(a) and 6(b) are cross-sectional views (part 4) illustrating a method for manufacturing the film bulk acoustic resonator according to the first embodiment. [Figure 7] 7(a) and 7(b) are cross-sectional views (part 5) illustrating a method for manufacturing the film bulk acoustic resonator according to the first embodiment. [Figure 8] 8(a) and 8(b) are cross-sectional views (part 6) illustrating the method for manufacturing the film bulk acoustic resonator according to the first embodiment. [Figure 9] 9(a) to 9(c) are cross-sectional views showing a method for laminating acoustic reflection films in Comparative Example 1, and FIG. 9(d) is a cross-sectional view showing a method for laminating acoustic reflection films in Example 1. FIG. [Figure 10] 10(a) is a plan view of a piezoelectric thin film resonator according to a first modification of the first embodiment, and FIG. 10(b) is a cross-sectional view taken along the line AA of FIG. 10(a). [Figure 11] 11(a) and 11(b) are enlarged cross-sectional views of the vicinity of the end of the first layer of samples A1 and B1 in the simulation. [Figure 12] FIG. 12 is a diagram showing ΔY versus angle θ for samples A1 and B1 in the simulation. [Figure 13]13(a) and 13(b) are enlarged cross-sectional views of the vicinity of the end of the first layer of samples A2 and B2 in the simulation. [Figure 14] FIG. 14 is a diagram showing ΔY versus angle θ for samples A2 and B2 in the simulation. [Figure 15] 15(a) and 15(b) are enlarged cross-sectional views of the vicinity of the end of the first layer of samples A3 and B3 in the simulation. [Figure 16] FIG. 16 is a diagram showing ΔY versus angle θ for samples A3 and B3 in the simulation. [Figure 17] FIG. 17(a) is a circuit diagram of a filter according to the second embodiment, and FIG. 17(b) is a circuit diagram of a duplexer according to a first modification of the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0018] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. [Example]

[0019] 1 is a cross-sectional view of a piezoelectric thin film resonator according to Example 1. The normal direction to the surface of the piezoelectric layer 14 as viewed in the thickness direction is defined as the Z direction, the leading direction of the upper electrode 16 in the planar direction of the piezoelectric layer 14 is defined as the +X direction, and the direction perpendicular to the X direction is defined as the Y direction. The piezoelectric thin film resonator provided in the left region 54 is, for example, a series resonator S of a ladder-type filter, and the piezoelectric thin film resonator provided in the right region 56 is a parallel resonator P.

[0020] As shown in FIG. 1, a lower electrode 12 is provided on a substrate 10. A piezoelectric layer 14 is provided on the lower electrode 12. An upper electrode 16 is provided on the piezoelectric layer 14. A resonance region 50 is defined by the region where the lower electrode 12 and the upper electrode 16 face each other, sandwiching at least a portion of the piezoelectric layer 14. In the parallel resonator P, additional films 20a and 20b are provided below the lower electrode 12 and on the upper electrode 16, respectively. By providing the additional films 20a and 20b, the resonance frequency of the parallel resonator P becomes lower than the resonance frequency of the series resonator S. It is sufficient that either the additional films 20a or 20b is provided.

[0021] An additional film 22 is provided on the upper electrode 16 in the peripheral region of the resonance region 50. The additional film 22 is provided to suppress spurious emissions. The additional film 22 need only be provided in at least a portion of the peripheral region of the resonance region 50, and does not necessarily have to be provided at all. When high-frequency power is applied between the lower electrode 12 and the upper electrode 16, an elastic wave is excited in the piezoelectric layer 14 in the resonance region 50. The wavelength of the elastic wave is approximately twice the total thickness of the lower electrode 12, the piezoelectric layer 14, and the upper electrode 16. The interface between the substrate 10 and the second layer 32 is approximately flat, and the upper and lower surfaces of the piezoelectric layer 14 are approximately flat.

[0022] An acoustic reflection film 30 is provided in a resonance region 50 between the substrate 10 and the lower electrode 12. In the acoustic reflection film 30, one or more first layers 31 and multiple second layers 32 made of a material different from that of the first layers 31 are alternately laminated. In Example 1, the acoustic impedance of the first layers 31 is higher than the acoustic impedance of the second layers 32. In a plan view, the acoustic reflection film 30 overlaps with and is large in the resonance region 50. In the region 52 between the resonance regions 50, no first layer 31 is provided, and only the second layer 32 is provided. The number of first layers 31 and the number of second layers 32 can be set as appropriate.

[0023] A metal layer 24 is provided below the lower electrode 12 outside the resonance region 50. A metal layer 26 is provided which penetrates the piezoelectric layer 14 and contacts the metal layer 24. A metal layer 28 is provided which contacts the upper electrode 16 outside the resonance region 50. The metal layers 26 and 28 function as pads for electrically connecting the lower electrode 12 and the upper electrode 16 to the outside, respectively, and / or as wiring for electrically connecting the lower electrode 12 and the upper electrode 16 to other piezoelectric thin film resonators.

[0024] 2(a) is an enlarged plan view of the vicinity of the resonance region of the piezoelectric thin film resonator according to the first embodiment, and FIG. 2(b) is a cross-sectional view taken along the line AA in FIG. 2(a). As shown in FIGS. 2(a) and 2(b), the sum T1+T2 of the thickness T1 of one first layer 31 and the thickness T2 of one second layer 32 is set to approximately 1 / 2 the wavelength of the elastic wave. For example, the thickness T1 of one first layer 31 and the thickness T2 of one second layer 32 are each set to 1 / 4 the wavelength of the elastic wave. As a result, the elastic wave excited in the piezoelectric layer 14 is reflected by the acoustic reflection film 30.

[0025] The end face 34 of the first layer 31 is inclined with respect to the upper surface of the substrate 10 so that the upper face 35a (first face on the lower electrode 12 side) of the first layer 31 is larger than the lower face 35b (second face opposite the first face). That is, the end face 34 of the first layer 31 is inverted tapered. The angle θ between the end face 34 and the upper face 35a of the first layer 31 is, for example, 1° to 89°. The planar shape of the acoustic reflection film 30 is larger than the resonance region 50. The end (outer periphery) 64 of the first layer 31 (i.e., the end of the upper face 35a of the first layer 31) is located outside the (outer periphery) end 60 of the resonance region 50. The contact point 62 between the end face 34 and the lower face 35b is located approximately coincident with or outside the end 60 of the resonance region 50 within a manufacturing tolerance.

[0026] The substrate 10 is, for example, a silicon substrate, and may also be, for example, a sapphire substrate, an alumina substrate, a spinel substrate, a quartz substrate, a quartz substrate, a glass substrate, a ceramic substrate, or a GaAs (gallium arsenide) substrate. The piezoelectric layer 14 is, for example, a single-crystal lithium tantalate layer, a single-crystal lithium niobate layer, or a single-crystal quartz substrate. When the piezoelectric layer 14 is single-crystal lithium tantalate or single-crystal lithium niobate, the piezoelectric layer 14 has a thickness Slip The piezoelectric layer 14 may be, for example, a polycrystalline aluminum nitride layer, a zinc oxide layer, a lead zirconate titanate (PZT) layer, or a lead titanate (PbTiO3) layer. In this case, thickness longitudinal vibration is excited in the piezoelectric layer 14.

[0027] The lower electrode 12 and the upper electrode 16 are, for example, aluminum (Al) films, and are single-layer films or laminated films of, for example, ruthenium (Ru), chromium (Cr), titanium (Ti), copper (Cu), molybdenum (Mo), tungsten (W), tantalum (Ta), platinum (Pt), rhodium (Rh), iridium (Ir), etc. The additional film 22 may be a metal film exemplified for the lower electrode 12 and the upper electrode 16, or an insulating film such as a silicon oxide film, a silicon nitride film, an aluminum oxide film, a tantalum oxide film, or a niobium oxide film.

[0028] The first layer 31 is made of a material with a high acoustic impedance, such as tungsten, tantalum, molybdenum, or ruthenium. Materials with a high acoustic impedance have a high density, such as a high-melting-point metal (e.g., a metal with a dielectric constant higher than the melting point of platinum). The second layer 32 is made of a material with a low acoustic impedance, such as silicon oxide or silicon nitride. Materials with a low acoustic impedance are primarily insulators. The metal layer 24 is a low-resistance layer, such as an aluminum layer, a gold layer, or a copper layer. The metal layers 26 and 28 are low-resistance layers, such as a gold layer, a copper layer, or an aluminum layer. The metal layers 24, 26, and 28 may include an adhesive film, such as a titanium film, a chromium film, or a nickel film, that contacts the bottom electrode 12 or the top electrode 16.

[0029] For example, the thickness of the piezoelectric layer 14 is Slip An example of vibration will be described. The piezoelectric layer 14 is a rotated Y-cut lithium niobate substrate. In this case, the normal direction (Z direction) of the upper surface of the piezoelectric layer 14 is the direction within the Y-axis / Z-axis plane of the crystal orientation. This causes thickness-shear vibration in the planar direction of the piezoelectric layer 14. Furthermore, the X direction is the X-axis direction in the crystal orientation, and the Z direction is the direction rotated 105° from the Z-axis direction toward the Y-axis direction within the Y-axis / Z-axis plane of the crystal orientation. This causes the direction of thickness-shear vibration to be the Y direction.

[0030] As another example, the piezoelectric layer 14 is an X-cut lithium tantalate substrate. In this case, the normal direction (Z direction) of the top surface of the piezoelectric layer 14 is the X-axis direction of the crystal orientation. As a result, thickness-shear vibration occurs in the planar direction of the piezoelectric layer 14. Furthermore, the Y direction is rotated 42° from the +Y-axis direction of the crystal orientation to the -Z-axis direction. As a result, the direction of thickness-shear vibration becomes the Y direction.

[0031] For example, when the resonant frequency is set to 3.7 GHz, the piezoelectric layer 14 is a rotated Y-cut lithium niobate substrate with a thickness of 460 nm, and the bottom electrode 12 and the top electrode 16 are each aluminum layers with a thickness of 44 nm. The thicknesses of the bottom electrode 12 and the top electrode 16 are each 1% to 20% of the thickness of the piezoelectric layer 14. The width of the resonance region 50 in the X direction is, for example, 10 μm to 500 μm.

[0032] [Manufacturing method of Example 1] Figures 3(a) to 8(b) are cross-sectional views showing a method for manufacturing the piezoelectric thin film resonator according to Example 1. In Figures 3(a) to 6(a), the Z direction is illustrated downward, which is upside down compared to Figure 1, and in Figures 6(b) to 8(b), the Z direction is illustrated upward, as in Figure 1.

[0033] As shown in FIG. 3(a), a piezoelectric substrate is prepared as the piezoelectric layer 14. A lower electrode 12 is formed on the piezoelectric layer 14 in regions 54 and 56. An additional film 20a is formed on the lower electrode 12 in region 56. The additional film 20a is not formed on the lower electrode 12 in region 54. The lower electrode 12 and the additional film 20a are formed by, for example, sputtering, vacuum deposition, or CVD (Chemical Vapor Deposition). The lower electrode 12 and the additional film 20a are patterned into a desired shape using photolithography and etching.

[0034] As shown in FIG. 3(b), the additional film on the bottom electrode 12 in region 54 and in region 56 20a A metal layer 24 is formed on the metal layer 24. The metal layer 24 is formed by, for example, sputtering, vacuum deposition, or CVD. The metal layer 24 is patterned into a desired shape by photolithography and etching.

[0035] As shown in FIG. 3(c), the lower electrode 12, the additional film 20a A second layer 32a is formed on the entire piezoelectric layer 14 so as to cover the metal layer 24. The second layer 32a is formed by, for example, sputtering, vacuum deposition, or CVD. When the second layer 32a is a silicon oxide film or silicon nitride, the second layer 32a is formed by, for example, CVD.

[0036] 4(a), the first layer 31a is formed on the second layer 32a. The first layer 31a is formed by, for example, sputtering, vacuum deposition, or CVD. When the first layer 31a is made of a high-melting-point metal such as tungsten, tantalum, molybdenum, or ruthenium, the first layer 31a is formed by, for example, sputtering.

[0037] As shown in Figure 4(b), the first layer 31a is patterned into a desired shape using photolithography and etching. If the first layer 31a is made of tungsten, the first layer 31a is etched using, for example, dry etching using a fluorine-based gas (such as SF6 or CF4). By selecting appropriate etching conditions, the end faces of the first layer 31a become forward tapered.

[0038] 4(c), a second layer 32b is formed on the second layer 32a and the first layer 31a. The method for forming the second layer 32b is the same as the method for forming the second layer 32a.

[0039] As shown in FIG. 5(a), a first layer 31b is formed on a second layer 32b. The method for forming the first layer 31b is the same as the method for forming the first layer 31a. As shown in FIG. 5(b), the first layer 31b is patterned into a desired shape. The method for patterning the first layer 31b is the same as the method for patterning the first layer 31a. As shown in FIG. 5(c), a second layer 32c is formed on the second layer 32b and the first layer 31b. The method for forming the second layer 32c is the same as the method for forming the second layers 32a and 32b.

[0040] As shown in FIG. 6(a), the upper surface of the second layer 32c is planarized. For example, CMP (Chemical Mechanical Polishing) is used to planarize the second layer 32c. As a result, an acoustic reflection film 30 is formed in which the first layers 31a and 31b and the second layers 32a to 32c are alternately stacked. As shown in FIG. 6(b), the structure is turned upside down, and the lower surface of the second layer 32c is bonded to the upper surface of the substrate 10. For example, a surface activation method is used for bonding. A bonding layer such as a silicon film or an aluminum oxide film may be provided between the substrate 10 and the second layer 32c.

[0041] As shown in FIG. 7(a), the piezoelectric layer 14 is thinned. For example, grinding and / or CMP are used to thin the piezoelectric layer 14. For example, grinding is used to make the piezoelectric layer 14 approximately the desired thickness, and the upper surface is flattened using CMP. As a result, the upper surface of the piezoelectric layer 14 becomes approximately flat within the manufacturing tolerances.

[0042] As shown in FIG. 7(b), an upper electrode 16 is formed on the piezoelectric layer 14 in regions 54 and 56. An additional film 20b is formed on the upper electrode 16 in region 56. The additional film 20b is not formed on the upper electrode 16 in region 54. The upper electrode 16 and the additional film 20b are formed by, for example, sputtering, vacuum deposition, or CVD. The upper electrode 16 and the additional film 20b are patterned into the desired shape using photolithography and etching. This forms the resonance region 50 in regions 54 and 56.

[0043] As shown in FIG. 8(a), an additional film 22 is formed from the periphery of the resonance region 50 to the outside of the resonance region 50. The additional film 22 is formed by, for example, sputtering, vacuum deposition, or CVD. The additional film 22 is patterned into a desired shape using photolithography and etching. As a result, a series resonator S and a parallel resonator P are formed in regions 54 and 56, respectively. An opening 25 is provided in the additional film 22, through which the top surface of the upper electrode 16 is exposed.

[0044] As shown in FIG. 8(b), a through-hole 23 is formed outside the resonance region 50, penetrating the piezoelectric layer 14. The through-hole 23 penetrates the lower electrode 12 and the additional film 20a and reaches the metal layer 24. The through-hole 23 is formed, for example, by etching. The metal layer 24 functions as an etching stopper when forming the through-hole 23. Thereafter, a metal layer 26 is formed in the through-hole 23, electrically connected to the lower electrode 12 and the metal layer 24, and a metal layer 28 is formed in the opening 25, electrically connected to the upper electrode 16. In this way, the piezoelectric thin-film resonator according to the first embodiment is manufactured.

[0045] The problem that occurs when the end face 34 of the first layer 31 is not inclined will be explained using Comparative Example 1 as an example. FIGS. 9(a) to 9(c) are cross-sectional views showing a method for laminating an acoustic reflection film in Comparative Example 1. As shown in FIG. 9(a), a second layer 32a is formed on a piezoelectric layer 14. A first layer 31a is formed on the second layer 32a. As shown in FIG. 9(b), a patterned Mask LayerThe first layer 31a is etched using this as a mask. The angle θ between the end face 34 and the top face 35a of the first layer 31a is 90°. As shown in FIG. 9(c), Mask Layer After removing the first layer 31a, the second layer 32b is formed on the second layer 32a so as to cover the first layer 31a. At this time, voids 36 of the second layer 32b are formed outside the end face 34 of the first layer 31a.

[0046] Fig. 9(d) is a cross-sectional view showing a lamination method of the acoustic reflection film in Example 1. As shown in Fig. 9(d), in Example 1, the angle θ is smaller than 90°, so that the coverage of the second layer 32b is improved and voids 36 are less likely to be formed.

[0047] When the end faces 34 of the first layers 31a and 31b are tapered, if the acoustic reflection film 30 is formed sequentially from the bottom surface of the piezoelectric layer 14, the end faces 34 will be inversely tapered. If the acoustic reflection film 30 is formed sequentially from the top surface of the substrate 10, the end faces 34 will be forwardly tapered. It may be preferable to form the acoustic reflection film 30 sequentially from the bottom surface of the piezoelectric layer 14. For example, if the piezoelectric layer 14 is a piezoelectric substrate, the piezoelectric layer 14 and the substrate 10 will be bonded together. If the acoustic reflection film 30 is formed on the substrate 10 and then bonded to the piezoelectric layer 14, a step will be created in the lower electrode 12, making bonding difficult. Therefore, as in Example 1, the acoustic reflection film 30 is formed on the bottom surface of the piezoelectric layer 14, and the acoustic reflection film 30 is then bonded to the substrate 10.

[0048] [Modification 1 of Example 1] FIG. 10(a) is a plan view of a piezoelectric thin film resonator according to Variation 1 of Example 1, and FIG. 10(b) is a cross-sectional view taken along the line AA of FIG. 10(a). As shown in FIGS. 10(a) and 10(b), the end face 34 of the first layer 31 is inverted tapered. The angle θ between the end face 34 of the first layer 31 and the top face 35a is, for example, 45° or greater. The planar shape of the acoustic reflection film 30 is below the resonance region 50. The end 64 of the first layer 31 is approximately aligned with the end 60 of the resonance region 50 within a manufacturing tolerance, or is located inside the end 60. The other configurations are the same as those of Example 1, and therefore a description thereof will be omitted.

[0049] [simulation] Simulations were performed to investigate the conditions under which a reversely tapered end face 34 of the first layer 31 would provide characteristics equal to or better than those obtained when the end face 34 is forwardly tapered. The simulations were performed using a two-dimensional finite element method on the XY plane. The simulation conditions were as follows: Substrate 10: silicon (Si) substrate First layer 31: tungsten (W) film with a thickness T1 of 152 nm Second layer 32: Silicon oxide (SiO2) film with a thickness T2 of 194 nm Lower electrode 12: Aluminum (Al) film with a thickness of 46 nm Piezoelectric layer 14: Single crystal lithium niobate substrate with a thickness of 460 nm Upper electrode 16: Aluminum (Al) film with a thickness of 46 nm Additional film 22: Not provided Width of the resonance region 50 in the X direction: 30 μm

[0050] 11(a) and 11(b) are enlarged cross-sectional views of the vicinity of the end of the first layer of samples A1 and B1 in the simulation. As shown in FIGS. 11(a) and 11(b), in samples A1 and B1, the end 64 of the first layer 31 is located outside the end 60 of the resonance region 50. The distance L1 between the ends 60 and 64 is 1 μm (1.08λ). λ corresponds to the wavelength of the elastic wave and is twice the thickness of the piezoelectric layer 14. In sample A1, the end face 34 of the first layer 31 is inversely tapered, while in sample B1, the end face 34 of the first layer 31 is forwardly tapered. In sample A1, the angle between the end face 34 and the upper surface 35a is θ, and in sample B1, the angle between the end face 34 and the lower surface 35b is θ.

[0051] 12 is a graph showing ΔY versus angle θ for samples A1 and B1 in the simulation. ΔY is the difference in admittance between the resonant frequency and the antiresonant frequency. The larger ΔY is, the better the characteristics of the piezoelectric thin film resonator are.

[0052] As shown in Figure 12, for samples A1 and B1, the change in ΔY is 0.5 dB or less even when θ is reduced from 90°. The difference in ΔY between samples A1 and B1 is 0.5 dB or less. Thus, for both samples A1 and B1, ΔY remains almost unchanged even when the angle θ is reduced from 90°.

[0053] 13(a) and 13(b) are enlarged cross-sectional views of the vicinity of the end of the first layer of samples A2 and B2 in the simulation. As shown in FIGS. 13(a) and 13(b), in samples A2 and B2, the end 64 of the first layer 31 substantially coincides with the end 60 of the resonance region 50. When the angle θ is 90°, the end 60 substantially coincides with the position 62 of contact between the end face 34 and the upper surface 35a or the lower surface 35b. When the angle θ is less than 90°, the distance L2 between the end 60 and the position 62 increases. In sample A2, the end face 34 of the first layer 31 is inversely tapered, while in sample B2, the end face 34 is forwardly tapered.

[0054] FIG. 14 is a diagram showing ΔY versus angle θ for samples A2 and B2 in the simulation. As shown in FIG. 14, for sample B2, the change in ΔY is less than 0.5 dB as θ decreases from 90° to 15°. When θ is 60° or greater, the ΔY of sample A2 is approximately the same as the ΔY of sample B2. When θ is 45°, the ΔY of sample A2 is slightly smaller than the ΔY of sample B2. When θ is 30° or less, the ΔY of sample A2 is more than 1 dB smaller than the ΔY of sample B2. Thus, when θ decreases below 45°, the ΔY of sample A2 becomes smaller than the ΔY of sample B2.

[0055] 15(a) and 15(b) are enlarged cross-sectional views of the vicinity of the end of the first layer of samples A3 and B3 in the simulation. As shown in FIGS. 15(a) and 15(b), in samples A3 and B3, position 62 of first layer 31 substantially coincides with end 60 of resonance region 50. When angle θ is 90°, end 64 substantially coincides with end 60. When angle θ is less than 90°, distance L1 between end 60 and end 64 increases. In sample A3, end surface 34 of first layer 31 is inversely tapered, while in sample B3, end surface 34 is forwardly tapered.

[0056] Fig. 16 is a diagram showing ΔY versus angle θ for samples A3 and B3 in a simulation. As shown in Fig. 16, the difference in ΔY between samples A3 and B3 at each angle θ is 1 dB or less. For both samples A3 and B3, ΔY is smallest when θ is 45°, and ΔY improves as θ becomes smaller than 45°. In particular, ΔY when θ is 15° is larger than ΔY when θ is 30° to 75°.

[0057] In Figure 16, as θ decreases, ΔY increases. For this reason, it is believed that ΔY increases when edge 64 of first layer 31 is positioned further outward. In Figure 14, in sample A2, ΔY decreases as θ decreases. For this reason, it is believed that ΔY increases when position 62 of first layer 31 is positioned further outward.

[0058] 11(a) to 12, one or more ends 64 of the first layer 31 are positioned outside the resonance region 50. This provides characteristics comparable to those of sample B1, in which the end faces 34 are forward tapered.

[0059] When observing the cross section, a position 62 where the end face 34 and the lower face 35b of one or more first layers 31 meet is located substantially at the edge 60 of the resonance region 50 or outside the resonance region 50. This can further improve the characteristics. Considering the alignment margin between position 62 and edge 60 of the resonance region 50 and manufacturing errors, the distance between position 62 and edge 60 is preferably equal to or greater than the thickness T1 of the first layer 31, and more preferably equal to or greater than twice the thickness T1.

[0060] In FIG. 16, when θ is 45°, the distance L1 in FIG. 15(a) corresponds to the thickness T1 of the first layer 31. Therefore, the distance L1 between the edge 64 of one or more first layers 31 and the edge 60 of the resonance region 50 is preferably equal to or greater than the thickness T1 of the corresponding first layer 31. The distance L1 is preferably equal to or greater than twice the thickness T1 of the first layer 31, more preferably equal to or greater than four times, and even more preferably equal to or greater than ten times. The distance L1 is, for example, equal to or greater than 0.5 times the wavelength of the elastic wave (twice the thickness of the piezoelectric film 14), and even more preferably equal to or greater than 1 time. To suppress voids 36, the angle θ is preferably equal to or less than 85°, more preferably equal to or less than 80°. To improve the characteristics as shown in FIG. 16, the angle θ is preferably equal to or less than 45°, more preferably equal to or less than 30°, and even more preferably equal to or less than 15°. If the angle θ is too small, the acoustic reflection film 30 becomes large. From this perspective, the angle θ is preferably equal to or greater than 5°.

[0061] In the first embodiment, as the distance L1 increases, the acoustic reflection film 30 becomes larger. Therefore, the distance L1 is preferably 100 times or less, and more preferably 50 times or less, the thickness T1 of the first layer 31. This allows the acoustic reflection film 30 to be made smaller, and the piezoelectric thin film resonator to be miniaturized.

[0062] In a first modification of the first embodiment, the edges 64 of one or more first layers 31 are positioned substantially coincident with the resonance region 50 or within the resonance region 50. This allows the acoustic reflection film 30 to be smaller, thereby miniaturizing the piezoelectric thin film resonator. As shown in FIG. 14, the angle θ between the edge 34 and the top surface 35a is set to 45° or more. This improves the characteristics. The angle θ is preferably 60° or more, and more preferably 70° or more. To suppress voids 36, the angle θ is preferably 85° or less, and more preferably 80° or less.

[0063] 14, when θ is 45°, the distance L1 in FIG. 13(a) is set to be equal to or less than the thickness T1 of the corresponding first layer 31. This can improve the characteristics. It is more preferable that the distance L1 is equal to or less than ½ of the thickness T1 of the first layer 31.

[0064] The acoustic impedance of the first layer 31 may be smaller than the acoustic impedance of the second layer 32, but is preferably larger than the acoustic impedance of the second layer 32. The acoustic impedance of the first layer 31 is more preferably 1.5 times or more, and even more preferably 2 times or more, the acoustic impedance of the second layer 32. This allows the acoustic reflecting film 30 to reflect elastic waves excited in the piezoelectric layer 14.

[0065] The piezoelectric layer 14 is a single-crystal substrate and is provided continuously over the multiple resonance regions 50, and the surface of the piezoelectric layer 14 facing the acoustic reflection film 30 is approximately flat. In this case, as shown in FIGS. 3(c) to 6(a), the acoustic reflection film 30 is formed in at least a part of the region of the piezoelectric layer 14 where the lower electrode 12 is provided. As shown in FIG. 6(b), the acoustic reflection film 30 is bonded onto the substrate 10. As shown in FIG. 7(b), an upper electrode 16 is formed on the surface of the piezoelectric layer 14 opposite to the surface where the lower electrode 12 is provided. This makes the end face 34 of the first layer 31 inversely tapered, thereby suppressing voids 36 as shown in FIG. 9(c).

[0066] In the step of forming the acoustic reflection film, as shown in FIG. 3(c), one second layer 32a of the multiple second layers 32a-32c is formed on the surface of the piezoelectric layer 14 on which the lower electrode 12 is provided. As shown in FIG. 4(a), one first layer 31a of one or more first layers 31a-31b is formed on one second layer 32a. As shown in FIG. 4(b), one first layer 31a is etched, so that one first layer 31a remains in the resonance region 50 and the end face 34 of the one first layer 31a is inclined. As shown in FIG. 4(c), another second layer 32b of one or more second layers 32a-32c is formed on the one second layer 32a and one first layer 31a. This allows the end face 34 of the first layer 31a to be formed with an inverse tapered shape.

[0067] When the piezoelectric layer 14 is made of lithium niobate, the thickness of the piezoelectric layer 14 is Slip In order to excite the elastic waves of vibration, the piezoelectric layer 14 is made of, for example, a rotated Y-cut lithium niobate substrate. When the piezoelectric layer 14 is made of lithium tantalate, the thickness of the piezoelectric layer 14 is Slip In order to excite the elastic waves of vibration, the piezoelectric layer 14 is, for example, an X-cut lithium tantalate substrate. [Example]

[0068] Example 2 is an example of a filter and a duplexer using the piezoelectric thin film resonators of Example 1 and its modified examples. Fig. 17(a) is a circuit diagram of the filter according to Example 2. As shown in Fig. 17(a), one or more series resonators S1 to S4 are connected in series between the input terminal Tin and the output terminal Tout. One or more parallel resonators P1 to P4 are connected in parallel between the input terminal Tin and the output terminal Tout. The piezoelectric thin film resonators of Example 1 and its modified examples can be used for at least one of the one or more series resonators S1 to S4 and the one or more parallel resonators P1 to P4. The number of resonators in the ladder-type filter can be set as appropriate.

[0069] FIG. 17(b) is a circuit diagram of a duplexer according to a first modification of the second embodiment. As shown in FIG. 17(b), a transmit filter 40 is connected between a common terminal Ant and a transmit terminal Tx. A receive filter 42 is connected between the common terminal Ant and a receive terminal Rx. The transmit filter 40 passes signals in the transmit band, among the signals input from the transmit terminal Tx, to the common terminal Ant as transmit signals, and suppresses signals of other frequencies. The receive filter 42 passes signals in the receive band, among the signals input from the common terminal Ant, to the receive terminal Rx as receive signals, and suppresses signals of other frequencies. At least one of the transmit filter 40 and the receive filter 42 can be the filter of the second embodiment.

[0070] Although a duplexer has been described as an example of a multiplexer, a triplexer or a quadplexer may also be used.

[0071] Although the embodiments of the present invention have been described in detail above, the present invention is not limited to such specific embodiments, and various modifications and variations are possible within the scope of the gist of the present invention as defined in the claims. [Explanation of symbols]

[0072] 10 Substrate 12 Lower electrode 14 Piezoelectric layer 16 Upper electrode 20a, 20b, 22 Additional membranes 24, 26, 28 metal layer 30 Acoustic reflective film 31, 31a, 31b 1st layer 32, 32a~32c 2nd layer 40 Transmission Filter 42 Receive Filter 50 resonance area 60, 64 end 50 resonance area

Claims

1. A substrate; a lower electrode provided on the substrate; a piezoelectric layer provided on the lower electrode; an upper electrode provided on the piezoelectric layer, the upper electrode sandwiching at least a portion of the piezoelectric layer between the lower electrode and the upper electrode to form a resonance region; an acoustic reflection film, which is formed by alternately stacking one or more first layers and a plurality of second layers made of a material different from that of the one or more first layers, the first layers having inclined end faces such that, when observed in cross section, the length of a first face on the lower electrode side is greater than the length of a second face on the substrate side, the end faces being located outside the resonance region, the positions where the end faces and the second faces meet substantially coincide with the ends of the resonance region, and the angle between the end faces and the first faces being 30° or less; and A piezoelectric thin film resonator comprising:

2. 2. The piezoelectric thin film resonator according to claim 1, wherein a distance between an edge of the one or more first layers and an edge of the resonance region is equal to or greater than the thickness of the corresponding first layer.

3. A substrate; a lower electrode provided on the substrate; a piezoelectric layer provided on the lower electrode; an upper electrode provided on the piezoelectric layer, the upper electrode sandwiching at least a portion of the piezoelectric layer between the lower electrode and the upper electrode to form a resonance region; an acoustic reflection film provided between the substrate and the lower electrode, the end face of which is inclined so that a first face on the lower electrode side is larger than a second face on the substrate side, the angle between the end face and the first face being 45° or more, the end face being aligned with an end of the resonance region or being located within the resonance region, and one or more first layers and a plurality of second layers made of a material different from that of the one or more first layers being alternately stacked; A piezoelectric thin film resonator comprising:

4. 4. The piezoelectric thin film resonator according to claim 3, wherein the distance between an edge of the one or more first layers and an edge of the resonance region is equal to or less than the thickness of the corresponding first layer.

5. 5. The piezoelectric thin film resonator according to claim 1, wherein the acoustic impedance of the one or more first layers is greater than the acoustic impedance of the plurality of second layers.

6. 6. The piezoelectric thin film resonator according to claim 1, wherein the piezoelectric layer is a single crystal substrate, is provided continuously over the plurality of resonance regions, and has a substantially flat surface on the acoustic reflection film side.

7. a step of forming an acoustic reflection film in which one or more first layers and a plurality of second layers made of a material different from that of the one or more first layers are alternately stacked on a surface of the piezoelectric layer on which a lower electrode is provided, and in which, when a cross section is observed, end faces of the one or more first layers are inclined so that a first face on the lower electrode side of the corresponding first layer has a length greater than a length of a second face opposite to the first face, and an angle formed between the end face and the first face is 30° or less; bonding the acoustic reflection film onto a substrate; forming the upper electrode on a surface of the piezoelectric layer opposite to a surface on which the lower electrode is provided so that, when a cross section is observed, an end of the one or more first layers is located outside a resonance region where the lower electrode and the upper electrode face each other with at least a portion of the piezoelectric layer interposed therebetween, and a position where the end surface contacts the second surface substantially coincides with an end of the resonance region; A method for manufacturing a piezoelectric thin film resonator, comprising:

8. a step of forming an acoustic reflection film in which one or more first layers and a plurality of second layers made of a material different from that of the one or more first layers are alternately stacked on a surface of the piezoelectric layer on which the lower electrode is provided, the end faces of the one or more first layers being inclined so that a first surface on the lower electrode side of the corresponding first layer is larger than a second surface opposite to the first surface, and the angle formed between the end face and the first surface is 45° or more; bonding the acoustic reflection film onto a substrate; forming the upper electrode on a surface of the piezoelectric layer opposite to a surface on which the lower electrode is provided so that an end of the one or more first layers is positioned substantially coincident with an end of a resonance region where the lower electrode and the upper electrode face each other, with at least a portion of the piezoelectric layer interposed therebetween, or within the resonance region; A method for manufacturing a piezoelectric thin film resonator, comprising:

9. The step of forming the acoustic reflection film includes: forming one second layer of the plurality of second layers so as to overlap at least a portion of a region of the piezoelectric layer where the lower electrode is provided; forming a first layer of the one or more first layers on the one second layer; a step of etching the one first layer to leave the one first layer in the resonance region and to incline an end face of the one first layer; forming another second layer of the plurality of second layers on the one second layer and the one first layer; 9. The method for manufacturing a piezoelectric thin film resonator according to claim 7, further comprising:

Images