Semiconductor Devices

Abstract

The present invention provides a semiconductor device that has excellent electrical characteristics. The present invention moreover provides a semiconductor device that has high reliability. The present invention moreover provides a semiconductor device having stabilized electrical characteristics. The semiconductor device has a semiconductor layer, a gate insulation layer, a gate electrode, a first insulation layer, a second insulation layer, and an electrically conductive layer. The gate insulation layer is in contact with an upper surface and a side surface of the semiconductor layer, and the gate electrode has a region that overlaps the semiconductor layer with the gate insulation layer interposed therebetween. The first insulation layer has an inorganic material, and is in contact with an upper surface of the gate insulation layer and with an upper surface and a side surface of the gate electrode. The gate insulation layer and the first insulation layer have a first opening in the region overlapping the semiconductor layer. The second insulation layer has an organic material and has a second opening inside of the first opening. The second insulation layer is in contact with an upper surface and a side surface of the first insulation layer and with a side surface of the gate insulation layer. The electrically conductive layer is electrically connected to the semiconductor layer via the second opening.

Description

[Technical Field]

[0001] BACKGROUND OF THE INVENTION 1. Field of the Invention One embodiment of the present invention relates to a semiconductor device and a manufacturing method thereof.

[0002] Note that one embodiment of the present invention is not limited to the above technical field. Examples of the technical field of one embodiment of the present invention disclosed in this specification and the like include semiconductor devices, display devices, light-emitting devices, power storage devices, memory devices, electronic devices, lighting devices, input devices, input / output devices, driving methods thereof, and manufacturing methods thereof. A semiconductor device refers to any device that can function by utilizing semiconductor characteristics. [Background technology]

[0003] As a semiconductor material applicable to transistors, oxide semiconductors using metal oxides have attracted attention. For example, Patent Document 1 discloses a semiconductor device in which a plurality of oxide semiconductor layers are stacked, and an oxide semiconductor layer serving as a channel contains indium and gallium, and the proportion of indium is made higher than the proportion of gallium, thereby increasing the field-effect mobility (sometimes simply referred to as mobility, or μFE).

[0004] Metal oxides that can be used for the semiconductor layer can be formed by sputtering or the like, and therefore can be used for the semiconductor layer of transistors that constitute large display devices. Furthermore, since it is possible to use a part of the production equipment for transistors that use polycrystalline silicon or amorphous silicon by modifying it, capital investment can be reduced. Furthermore, transistors that use metal oxides have higher field-effect mobility than transistors that use amorphous silicon, and therefore high-performance display devices that include driver circuits can be realized. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-7399 Summary of the Invention [Problem to be solved by the invention]

[0006] An object of one embodiment of the present invention is to provide a semiconductor device with favorable electrical characteristics.An object of one embodiment of the present invention is to provide a highly reliable semiconductor device.An object of one embodiment of the present invention is to provide a semiconductor device with stable electrical characteristics.An object of one embodiment of the present invention is to provide a novel semiconductor device.An object of one embodiment of the present invention is to provide a highly reliable display device.An object of one embodiment of the present invention is to provide a novel display device.

[0007] Note that the description of these problems does not preclude the existence of other problems. Note that one embodiment of the present invention does not necessarily solve all of these problems. Note that problems other than these can be extracted from the description of the specification, drawings, claims, etc. [Means for solving the problem]

[0008] One embodiment of the present invention is a semiconductor device including a semiconductor layer, a gate insulating layer, a gate electrode, a first insulating layer, a second insulating layer, and a conductive layer. The gate insulating layer is in contact with an upper surface and a side surface of the semiconductor layer, and the gate electrode has a region overlapping with the semiconductor layer with the gate insulating layer interposed therebetween. The first insulating layer contains an inorganic material and is in contact with an upper surface of the gate insulating layer and an upper surface and a side surface of the gate electrode. The gate insulating layer and the first insulating layer have a first opening in a region overlapping with the semiconductor layer. The second insulating layer contains an organic material and has a second opening inside the first opening. The second insulating layer is in contact with an upper surface and a side surface of the first insulating layer and a side surface of the gate insulating layer. The conductive layer is electrically connected to the semiconductor layer through the second opening.

[0009] One embodiment of the present invention is a semiconductor device including a semiconductor layer, a gate insulating layer, a gate electrode, a first insulating layer, a second insulating layer, and a conductive layer. The gate insulating layer is in contact with an upper surface of the semiconductor layer, and the gate electrode has a region overlapping with the semiconductor layer with the gate insulating layer interposed therebetween. The first insulating layer contains an inorganic material and is in contact with an upper surface and a side surface of the semiconductor layer, a side surface of the gate insulating layer, and an upper surface and a side surface of the gate electrode. The first insulating layer has a first opening in a region overlapping with the semiconductor layer. The second insulating layer contains an organic material and has a second opening inside the first opening. The second insulating layer is in contact with an upper surface and a side surface of the first insulating layer. The conductive layer is electrically connected to the semiconductor layer through the second opening.

[0010] In the above-described semiconductor device, the angle formed between the side surface of the second insulating layer and the top surface of the semiconductor layer is preferably equal to or greater than 45 degrees and less than 90 degrees.

[0011] In the semiconductor device, the second insulating layer preferably has a region in contact with the upper surface of the semiconductor layer, and the width of the region is preferably 50 nm or more and 3000 nm or less.

[0012] In the semiconductor device described above, the transmittance of the second insulating layer in the wavelength range of 200 nm to 350 nm is preferably 0.01% to 70%.

[0013] In the above-described semiconductor device, the transmittance of the organic material in the wavelength range of 200 nm to 350 nm is preferably 0.01% to 70%.

[0014] In the above-described semiconductor device, the organic material preferably contains one or more of an acrylic resin, a polyimide resin, an epoxy resin, a polyamide resin, a polyimideamide resin, a siloxane resin, a benzocyclobutene-based resin, a phenolic resin, a novolac resin, and precursors of these resins.

[0015] The semiconductor device preferably includes a third insulating layer. The third insulating layer preferably includes an inorganic material and has a third opening inside the second opening. The third insulating layer preferably contacts the top and side surfaces of the second insulating layer. [Effects of the Invention]

[0016] According to one embodiment of the present invention, a semiconductor device with favorable electrical characteristics can be provided. Alternatively, a highly reliable semiconductor device can be provided. Alternatively, a semiconductor device with stable electrical characteristics can be provided. Alternatively, a novel semiconductor device can be provided. Alternatively, a highly reliable display device can be provided. Alternatively, a novel display device can be provided.

[0017] Note that the description of these effects does not preclude the existence of other effects. Note that one embodiment of the present invention does not necessarily have all of these effects. Note that effects other than these can be extracted from the description in the specification, drawings, claims, etc. [Brief explanation of the drawings]

[0018] 1A to 1C are diagrams showing examples of the configuration of a transistor. FIG. 2 is a diagram illustrating an example of the configuration of a transistor. 3A and 3B are diagrams showing examples of the configuration of a transistor. 4A and 4B are diagrams showing examples of the configuration of a transistor. 5A and 5B are diagrams showing a comparative example. 6A and 6B are diagrams showing examples of the configuration of a transistor. FIG. 7 is a diagram illustrating an example of the configuration of a transistor. 8A to 8C are diagrams showing examples of the configuration of a transistor. 9A and 9B are diagrams showing examples of the configuration of a transistor. FIG. 10 is a diagram illustrating an example of the configuration of a transistor. 11A and 11B are diagrams showing examples of the configuration of a transistor. 12A and 12B are diagrams showing examples of the configuration of a transistor. 13A to 13C are diagrams showing examples of the configuration of a transistor. 14A and 14B are diagrams showing examples of the configuration of a transistor. 15A and 15B are diagrams showing examples of the configuration of a transistor. 16A to 16C are diagrams showing examples of the configuration of a transistor. 17A and 17B are diagrams showing examples of the configuration of a transistor. 18A to 18C are diagrams showing examples of the configuration of a transistor. FIG. 19 is a diagram illustrating an example of the configuration of a transistor. 20A and 20B are diagrams showing examples of the configuration of a transistor. 21A to 21D are diagrams illustrating a method for fabricating a transistor. 22A to 22D illustrate a method for manufacturing a transistor. 23A to 23C illustrate a method for manufacturing a transistor. 24A to 24C illustrate a method for manufacturing a transistor. 25A to 25D illustrate a method for manufacturing a transistor. 26A to 26C illustrate a method for manufacturing a transistor. 27A to 27C illustrate a method for manufacturing a transistor. 28A to 28C illustrate a method for manufacturing a transistor. 29A and 29B illustrate a method for manufacturing a transistor. 30A to 30C illustrate a method for manufacturing a transistor. 31A to 31C illustrate a method for manufacturing a transistor. 32A to 32C are top views of the display device. FIG. 33 is a cross-sectional view of the display device. FIG. 34 is a cross-sectional view of the display device. FIG. 35 is a cross-sectional view of the display device. FIG. 36 is a cross-sectional view of the display device. 37A and 37B are diagrams showing configuration examples of a display device. Figure 38A is a block diagram of a display device, and Figures 38B and 38C are circuit diagrams of the display device. Figures 39A, 39C, and 39D are circuit diagrams of the display device, and Figure 39B is a timing chart. 40A and 40B are diagrams showing configuration examples of a display module. 41A and 41B are diagrams showing configuration examples of electronic devices. 42A to 42E are diagrams showing configuration examples of electronic devices. 43A to 43G are diagrams showing configuration examples of electronic devices. 44A to 44D are diagrams showing configuration examples of electronic devices. 45A to 45C are schematic diagrams showing the structure of a sample according to an example. FIG. 46 is a diagram showing the resistance of the sample according to the example. FIG. 47 is a diagram showing the transmittance of the sample according to the example. FIG. 48 is a diagram showing the transmittance of the sample according to the example. 49A to 49C are diagrams showing the structure of a sample according to an example. FIG. 50 is a diagram showing the threshold voltage of the transistor according to the example. FIG. 51 is a diagram showing the Id-Vg characteristics of the transistor according to the example. 52A and 52B are cross-sectional STEM images of the sample according to the example. 53A and 53B are cross-sectional STEM images of the sample according to the example. 54A and 54B are cross-sectional STEM images of the sample according to the example. 55A and 55B are diagrams showing the transmittance of samples according to the example. FIG. 56 is a diagram showing the resistance of the sample according to the example. FIG. 57 is a diagram showing the resistance of the sample according to the example. FIG. 58 is a diagram showing the resistance of the sample according to the example. DETAILED DESCRIPTION OF THE INVENTION

[0019] Hereinafter, embodiments will be described with reference to the drawings. However, it will be readily understood by those skilled in the art that the embodiments can be implemented in many different ways and that various changes in form and details can be made without departing from the spirit and scope of the present invention. Therefore, the present invention should not be interpreted as being limited to the following description of the embodiments.

[0020] In each figure described herein, the size of each component, layer thickness, or area may be exaggerated for clarity.

[0021] The ordinal numbers "first," "second," and "third" used in this specification are used to avoid confusion of components and are not intended to limit the number.

[0022] In this specification, terms indicating position, such as "above" and "below," are used for convenience in describing the positional relationship between components with reference to the drawings. Furthermore, the positional relationship between components changes as appropriate depending on the direction in which each component is depicted. Therefore, the terms are not limited to those described in the specification, and can be rephrased appropriately depending on the situation.

[0023] In this specification and the like, the functions of the source and drain of a transistor may be interchanged when transistors of different polarities are used, or when the direction of current flow changes during circuit operation, etc. Therefore, the terms source and drain can be used interchangeably.

[0024] In this specification, the channel length direction of a transistor refers to one of the directions parallel to the line connecting the source region and the drain region at the shortest distance. In other words, the channel length direction corresponds to one of the directions of current flowing through the semiconductor layer when the transistor is in an on-state. The channel width direction refers to the direction perpendicular to the channel length direction. Depending on the structure or shape of the transistor, the channel length direction and the channel width direction may not be defined as one.

[0025] In this specification, "electrically connected" includes a connection via "something that has some kind of electrical function." Here, "something that has some kind of electrical function" is not particularly limited as long as it allows electrical signals to be transmitted and received between the connected objects. For example, "something that has some kind of electrical function" includes electrodes or wiring, as well as switching elements such as transistors, resistive elements, inductors, capacitors, and other elements with various functions.

[0026] In this specification and the like, the terms "film" and "layer" are interchangeable. For example, the term "conductive layer" may be interchangeable with the term "conductive film." The term "insulating layer" may be interchangeable with the term "insulating film."

[0027] In this specification, unless otherwise specified, the off-state current refers to the drain current when a transistor is in an off state (also called a non-conducting state or a cut-off state). Unless otherwise specified, the off-state current refers to the drain current when a transistor is in an off state (also called a non-conducting state or a cut-off state) when a voltage V between the gate and source of an n-channel transistor is applied. gs is the threshold voltage V th (For p-channel transistors, V th This refers to a state of being (higher than)

[0028] In this specification and the like, a display panel, which is one aspect of a display device, has a function of displaying (outputting) images etc. on a display surface, and therefore the display panel is one aspect of an output device.

[0029] In this specification, a display panel having a connector such as an FPC (Flexible Printed Circuit) or a TCP (Tape Carrier Package) attached to the substrate, or having an IC (Integrated Circuit) mounted on the substrate using a COG (Chip On Glass) method or the like, may be referred to as a display panel module, display module, or simply a display panel.

[0030] In this specification and the like, a touch panel, which is one aspect of a display device, has a function of displaying an image or the like on a display surface and a function as a touch sensor that detects a detected object touching, pressing, or approaching the display surface. Therefore, the touch panel is one aspect of an input / output device. Examples of the detected object include a finger and a stylus.

[0031] A touch panel can also be called, for example, a display panel (or display device) with a touch sensor or a display panel (or display device) with a touch sensor function. A touch panel can have a configuration including a display panel and a touch sensor panel. Alternatively, the touch panel can have a touch sensor function inside or on the surface of the display panel.

[0032] In this specification, a touch panel substrate on which one or more connectors or ICs are mounted may be referred to as a touch panel module, a display module, or simply a touch panel.

[0033] (Embodiment 1) In this embodiment, a semiconductor device according to one embodiment of the present invention and a manufacturing method thereof will be described. In particular, in this embodiment, a transistor including an oxide semiconductor in a semiconductor layer in which a channel is formed will be described as an example of a semiconductor device.

[0034] One embodiment of the present invention is a transistor including a semiconductor layer, a gate insulating layer, a gate electrode, a first insulating layer, a second insulating layer, and a conductive layer. The semiconductor layer preferably contains a metal oxide (hereinafter also referred to as an oxide semiconductor) that exhibits semiconductor characteristics. The gate insulating layer is in contact with a top surface and a side surface of the semiconductor layer, and the gate electrode has a region that overlaps with the semiconductor layer with the gate insulating layer interposed therebetween.

[0035] The first insulating layer preferably includes an inorganic material and is in contact with an upper surface of the gate insulating layer and an upper surface and side surfaces of the gate electrode. The gate insulating layer and the first insulating layer have a first opening in a region overlapping with the semiconductor layer.

[0036] The second insulating layer preferably has a second opening inside the first opening. The second insulating layer is in contact with the top and side surfaces of the first insulating layer and the side surfaces of the gate insulating layer. That is, the second insulating layer is provided so as to cover the first insulating layer and the gate insulating layer. The second insulating layer preferably has low transmittance of ultraviolet light (also called ultraviolet light). For example, an organic material can be suitably used for the second insulating layer.

[0037] The conductive layer functioning as a source electrode or a drain electrode is electrically connected to the semiconductor layer through the second opening. The conductive layer has a region in contact with the second insulating layer. On the other hand, it is preferable that the conductive layer does not have a region in contact with either the first insulating layer or the gate insulating layer.

[0038] Here, ultraviolet light may be generated in a film formation apparatus when a conductive film that becomes a conductive layer is formed. If the ultraviolet light reaches a channel formation region, it may adversely affect the electrical characteristics and reliability of the transistor. In a transistor according to one embodiment of the present invention, the first insulating layer and the gate insulating layer are covered with a second insulating layer that has low transmittance of ultraviolet light, thereby reducing the amount of ultraviolet light that reaches the channel formation region. Therefore, the transistor can have favorable electrical characteristics and reliability.

[0039] A more specific example of the configuration of a transistor will be described below.

[0040] <Configuration example 1> FIG. 1A is a top view of a transistor 100, FIG. 1B corresponds to a cross-sectional view taken along dashed-dotted line A1-A2 in FIG. 1A, and FIG. 1C corresponds to a cross-sectional view taken along dashed-dotted line B1-B2 in FIG. 1A. Note that FIG. 1A omits some of the components of the transistor 100 (such as a gate insulating layer). The direction of dashed-dotted line A1-A2 corresponds to the channel length direction, and the direction of dashed-dotted line B1-B2 corresponds to the channel width direction. As with FIG. 1A, the top views of the transistors in the following drawings will also omit some of the components. Also, FIG. 2 shows an enlarged view of region P enclosed by the dashed-dotted line in FIG. 1B.

[0041] The transistor 100 is provided over a substrate 102 and includes a semiconductor layer 108, an insulating layer 110, a conductive layer 112, an insulating layer 118, an insulating layer 130, and the like. The island-shaped semiconductor layer 108 is provided over the substrate 102. The insulating layer 110 is provided in contact with the top surface of the substrate 102 and the top surface and side surfaces of the semiconductor layer 108. The conductive layer 112 is provided over the insulating layer 110 and has a region overlapping with the semiconductor layer 108. The insulating layer 110 functions as a gate insulating layer. The conductive layer 112 functions as a gate electrode. The transistor 100 is a so-called top-gate transistor in which a gate electrode is provided over the semiconductor layer 108.

[0042] The semiconductor layer 108 contains a metal oxide (hereinafter also referred to as an oxide semiconductor) that exhibits semiconductor characteristics. The semiconductor layer 108 preferably contains at least indium and oxygen. When the semiconductor layer 108 contains an oxide of indium, carrier mobility can be increased. For example, a transistor that can pass a larger current than a transistor using amorphous silicon can be realized.

[0043] A region of the semiconductor layer 108 that overlaps with the conductive layer 112 functions as a channel formation region. The semiconductor layer 108 preferably has a pair of low-resistance regions 108N sandwiching the channel formation region. The low-resistance regions 108N have a higher carrier concentration than the channel formation region and function as a source region and a drain region.

[0044] The low-resistance region 108N can also be described as a region with lower resistance than the channel formation region, a region with a high carrier concentration, a region with a large amount of oxygen vacancy, a region with a high hydrogen concentration, a region with a high impurity concentration, or an n-type region.

[0045] 1A, 1B, 1C, and 2, the insulating layer 118 is provided to cover the upper surface of the insulating layer 110 and the upper and side surfaces of the conductive layer 112. The insulating layer 110 and the insulating layer 118 have openings 141a and 141b in regions overlapping with the low-resistance region 108N.

[0046] The insulating layer 118 functions as a protective layer that protects the transistor 100. The insulating layer 118 can be preferably formed using an inorganic material. Examples of suitable inorganic materials include oxide and nitride. More specifically, the insulating layer 118 can be formed using one or more of silicon oxide, silicon oxynitride, silicon nitride, silicon nitride oxide, aluminum oxide, aluminum oxynitride, aluminum nitride, hafnium oxide, and hafnium aluminate. The insulating layer 118 may be formed using a stack of the above materials.

[0047] In this specification, an oxynitride refers to a material whose composition contains more oxygen than nitrogen, and a nitride oxide refers to a material whose composition contains more nitrogen than oxygen. For example, silicon oxynitride refers to a material whose composition contains more oxygen than nitrogen, and silicon nitride oxide refers to a material whose composition contains more nitrogen than oxygen.

[0048] In this specification, when an oxynitride and a nitride oxide containing the same elements are described, the oxynitride includes a material that satisfies either or both of the following: a higher oxygen content and a lower nitrogen content than the nitride oxide. Similarly, the nitride oxide includes a material that satisfies either or both of the following: a lower oxygen content and a higher nitrogen content than the oxynitride. For example, when silicon oxynitride and silicon nitride oxide are described, the silicon oxynitride includes a material that has a higher oxygen content and a lower nitrogen content than the silicon nitride oxide. Similarly, the silicon nitride oxide includes a material that has a lower oxygen content and a higher nitrogen content than the silicon oxynitride.

[0049] The insulating layer 118 can be formed by, for example, sputtering, chemical vapor deposition (CVD), vacuum evaporation, pulsed laser deposition (PLD), atomic layer deposition (ALD), etc. CVD methods include plasma enhanced chemical vapor deposition (PECVD) and thermal CVD. One type of thermal CVD method is metal organic chemical vapor deposition (MOCVD).

[0050] In particular, it is preferable to form the insulating layer 118 by the PECVD method.

[0051] 1A, 1B, 1C, and 2 show an example in which the top surface shape of the insulating layer 110 and the top surface shape of the insulating layer 118 are roughly the same.

[0052] In this specification, the phrase "top surface shapes generally match" means that at least a portion of the contours of stacked layers overlap. For example, this includes cases where the upper and lower layers are processed using the same mask pattern or a portion of the same mask pattern. However, strictly speaking, the contours may not overlap, and the upper layer may be located inside the lower layer, or outside the lower layer. In these cases, the phrase "top surface shapes generally match" also applies.

[0053] The insulating layer 130 is provided to cover the top surface and side surfaces of the insulating layer 118 and the side surfaces of the insulating layer 110. The insulating layer 130 functions as a protective layer to protect the transistor 100. The insulating layer 130 has an opening 143a and an opening 143b. The opening 143a is located inside the opening 141a, and the opening 143b is located inside the opening 141b. The insulating layer 130 may have a region in contact with the top surface of the semiconductor layer 108. It can also be said that the insulating layer 130 has an end portion on the semiconductor layer 108.

[0054] The transistor 100 may include a conductive layer 120a and a conductive layer 120b over the insulating layer 130. The conductive layer 120a and the conductive layer 120b function as a source electrode and a drain electrode. The conductive layer 120a and the conductive layer 120b are electrically connected to the low-resistance region 108N through an opening 143a or an opening 143b provided in the insulating layer 130, respectively. The conductive layer 120a and the conductive layer 120b each have a region in contact with the insulating layer 130. Furthermore, the conductive layer 120a and the conductive layer 120b each do not have a region in contact with the insulating layer 110 or a region in contact with the insulating layer 118.

[0055] Here, the formation of the conductive film that will become the conductive layer 120a and the conductive layer 120b will be described. When the conductive film that will become the conductive layer 120a and the conductive layer 120b is formed on the insulating layer 130, ultraviolet light is generated in the film formation device, and the ultraviolet light reaches the semiconductor layer 108, causing oxygen vacancies V in the semiconductor layer 108. O Furthermore, if hydrogen exists in the semiconductor layer 108, oxygen vacancies V O The state where hydrogen is added to the OH) may be formed. O H can be a carrier generation source and can adversely affect the electrical characteristics and reliability of transistors. In particular, oxygen vacancies V in the channel formation region O , and V O It is preferable that H is small.

[0056] An example of an apparatus that generates ultraviolet light during processing is an apparatus that generates plasma in a processing chamber.Specific examples of apparatus that generate ultraviolet light during processing include dry etching apparatuses, sputtering apparatuses, and plasma CVD apparatuses.

[0057] The insulating layer 130 preferably has a low transmittance of ultraviolet light. By covering the insulating layer 118 and the insulating layer 110 with the insulating layer 130 having a low transmittance of ultraviolet light, the amount of ultraviolet light that reaches the semiconductor layer 108 can be reduced. Therefore, the oxygen vacancy V in the channel formation region can be reduced. O , and V O The increase in H can be suppressed, and a transistor with good electrical characteristics and reliability can be obtained.

[0058] In this specification and the like, ultraviolet light refers to light having one or more peaks in the wavelength range of 200 nm or more and 400 nm or less.

[0059] The insulating layer 130 preferably includes a material with low transmittance to ultraviolet light. For example, the insulating layer 130 can be preferably made of a material that absorbs ultraviolet light.

[0060] The insulating layer 130 can be preferably made of an organic material. It is preferable to use an organic material with low transmittance, particularly for ultraviolet light, for the insulating layer 130. For example, the insulating layer 130 can be made of one or more of a photocurable resin or a thermosetting resin. More specifically, the insulating layer 130 can be made of one or more of acrylic resin, polyimide resin, epoxy resin, polyamide resin, polyimideamide resin, siloxane resin, benzocyclobutene resin, phenolic resin, novolac resin, and precursors of these resins. The insulating layer 130 may be made of a laminate of multiple materials described above. Alternatively, the insulating layer 130 may have a laminate structure of the organic material and the inorganic material described above.

[0061] It is not necessary to set a lower limit for the ultraviolet light transmittance of the material used for the insulating layer 130, because it is preferable that the transmittance be as low as possible. However, if a lower limit is set, it is preferable that the ultraviolet light transmittance of the material used for the insulating layer 130 be 0.01% or more, for example.

[0062] The transmittance of the material used for the insulating layer 130 in the wavelength range of 200 nm to 400 nm is preferably 0.01% to 80%, more preferably 0.01% to 75%, and even more preferably 0.01% to 70%.

[0063] Furthermore, the transmittance of the material used for insulating layer 130 in the wavelength range of 200 nm or more and 350 nm or less is preferably 0.01% or more and 70% or less, even more preferably 0.01% or more and 60% or less, even more preferably 0.01% or more and 50% or less, even more preferably 0.01% or more and 40% or less, even more preferably 0.01% or more and 30% or less, even more preferably 0.01% or more and 20% or less, even more preferably 0.01% or more and 10% or less.

[0064] When the insulating layer 130 has a laminated structure, it is preferable that the transmittance of at least one of the constituent layers is in the above-mentioned range.

[0065] Since the thicker the material, the lower the transmittance, the transmittance of the material used in this specification is the transmittance when the material has a thickness of 2 μm. If the transmittance of a material when the material has a thickness of less than 2 μm is a certain value, it can be said that the transmittance when the material has a thickness of 2 μm is equal to or less than that value.

[0066] Enlarged views of openings 141a, 143a, and their vicinity are shown in Figures 3A and 3B. Figure 3A is a top view, and Figure 3B corresponds to a cross-sectional view taken along dashed line D1-D2 in Figure 3A. Note that hatching is omitted in Figure 3B to avoid cluttering the drawing. Since the descriptions of openings 141b and 143b can be referenced for openings 141a and 143a, detailed descriptions of openings 141b and 143b will be omitted.

[0067] In any straight line crossing opening 141a and opening 143a, bottom width 143W of opening 143a is preferably smaller than bottom width 141W of opening 141a. Furthermore, in low-resistance region 108N, width 151 of the region in contact with insulating layer 130 is preferably 50 nm to 3000 nm, more preferably 100 nm to 2500 nm, even more preferably 200 nm to 2000 nm, even more preferably 300 nm to 1500 nm, even more preferably 300 nm to 1200 nm, even more preferably 300 nm to 1000 nm, even more preferably 400 nm to 1000 nm, even more preferably 400 nm to 800 nm, even more preferably 450 nm to 800 nm.

[0068] If the width 151 is small, the effect of reducing ultraviolet light may be insufficient, which may result in deterioration of the electrical characteristics and reliability of the transistor 100. On the other hand, if the width 151 is large, the size of the transistor 100 may be large. By setting the width 151 within the above range, a transistor having good electrical characteristics and reliability and a small size can be obtained. The width 151 may be determined taking into account the accuracy of alignment of an apparatus used to form the insulating layer 130.

[0069] Note that by using a material with low transmittance of ultraviolet light for the insulating layer 130, the amount of ultraviolet light that reaches the semiconductor layer 108 can be reduced even if the value of the width 151 is small. If the value of the width 151 can be increased, a material with high transmittance of ultraviolet light may be used for the insulating layer 130. Furthermore, the value of the width 151 may be determined depending on the transmittance of the material used for the insulating layer 130. The material used for the insulating layer 130 may be determined depending on the value of the width 151.

[0070] The transmittance of the insulating layer 130 in the wavelength range of 200 nm to 400 nm is preferably 0.01% to 80%, more preferably 0.01% to 75%, and even more preferably 0.01% to 70%.

[0071] Furthermore, the transmittance of the insulating layer 130 in the wavelength range of 200 nm or more and 350 nm or less is preferably 0.01% or more and 70% or less, even more preferably 0.01% or more and 60% or less, even more preferably 0.01% or more and 50% or less, even more preferably 0.01% or more and 40% or less, even more preferably 0.01% or more and 30% or less, even more preferably 0.01% or more and 20% or less, and even more preferably 0.01% or more and 10% or less.

[0072] Since it is preferable that the amount of ultraviolet light transmitted through insulating layer 130 is as small as possible, it is preferable that the transmittance of the region in opening 141a where insulating layer 130 has the smallest thickness be within the aforementioned range.Similarly, it is preferable that the transmittance of the region in opening 141b where insulating layer 130 has the smallest thickness be within the aforementioned range.

[0073] The end of the insulating layer 110 is preferably tapered. Specifically, the angle θ1 of the end of the insulating layer 110 is preferably less than 90 degrees. The angle θ1 is preferably 45 degrees or more and less than 90 degrees, more preferably 50 degrees or more and 85 degrees or less, even more preferably 55 degrees or more and 85 degrees or less, even more preferably 60 degrees or more and 85 degrees or less, even more preferably 60 degrees or more and 80 degrees or less, even more preferably 65 degrees or more and 80 degrees or less, and even more preferably 70 degrees or more and 80 degrees or less. By setting the angle θ1 of the end of the insulating layer 110 within the above range, the step coverage of a layer (e.g., insulating layer 130) formed on the insulating layer 110 is improved, and defects such as step discontinuities or voids in the layer can be suppressed.

[0074] Similarly, the end of the insulating layer 130 preferably has a tapered shape. Specifically, the angle θ2 of the end of the insulating layer 130 is preferably less than 90 degrees. The angle θ2 is preferably 45 degrees or more and less than 90 degrees, more preferably 50 degrees or more and 85 degrees or less, even more preferably 55 degrees or more and 85 degrees or less, even more preferably 60 degrees or more and 85 degrees or less, even more preferably 60 degrees or more and 80 degrees or less, even more preferably 65 degrees or more and 80 degrees or less, and even more preferably 70 degrees or more and 80 degrees or less. By setting the angle θ2 of the end of the insulating layer 130 within the above range, the step coverage of the layers (e.g., the conductive layers 120a and 120b) formed on the insulating layer 130 is improved, and defects such as step discontinuities or voids in the layers can be suppressed.

[0075] In this specification and the like, the corner of the edge of a layer refers to the angle formed by the side surface of the layer and the surface on which the layer is formed.

[0076] Here, the effect of ultraviolet light on the semiconductor layer 108 will be described.

[0077] FIG. 4A shows a cross-sectional view of the transistor 100 before the conductive layers 120a and 120b are formed. FIG. 4B shows an enlarged view of a region Q surrounded by a dashed line in FIG. 4A. FIG. 4B shows a schematic diagram of the ultraviolet light generated in the film formation apparatus when the conductive film that becomes the conductive layers 120a and 120b is formed, with white arrows indicating the ultraviolet light entering the openings 141a and 143a.

[0078] 4B, when ultraviolet light enters opening 143a, it is incident on insulating layer 130 and is absorbed by insulating layer 130, preventing it from reaching semiconductor layer 108. Therefore, only ultraviolet light that directly enters the region of semiconductor layer 108 exposed at opening 143a reaches semiconductor layer 108, and the amount of ultraviolet light that reaches semiconductor layer 108 can be reduced.

[0079] A transistor of a comparative example is shown in Figures 5A and 5B. Figure 5A is a cross-sectional view of the transistor of the comparative example. Figure 5B is an enlarged view of a region R surrounded by a dashed line in Figure 5A.

[0080] 5A and 5B, the openings 143a and 143b in the insulating layer 130 are provided over the insulating layer 118. Unlike the transistor of one embodiment of the present invention, the insulating layer 130 in the comparative example does not cover the side surfaces of the insulating layer 110 and the insulating layer 118, and the side surfaces of the insulating layer 110 and the insulating layer 118 are exposed in the openings 143a and 143b.

[0081] 5B , ultraviolet light incident on the opening 141a is transmitted through the insulating layer 110 or the insulating layer 118. Furthermore, the ultraviolet light may reach the semiconductor layer 108 due to refraction at the interface between the insulating layer 110, the insulating layer 118, or the semiconductor layer 108. Therefore, the amount of ultraviolet light reaching the semiconductor layer 108 is larger in the transistor of the comparative example than in the transistor of one embodiment of the present invention.

[0082] In the transistor 100 of one embodiment of the present invention, the insulating layer 130 covers the side surfaces of the insulating layer 110 and the insulating layer 118, so that the amount of ultraviolet light reaching the semiconductor layer 108 can be reduced, and the transistor can have favorable electrical characteristics and reliability.

[0083] 1A and the like show an example in which the width 151 of the opening 143a and the width 151 of the opening 143b are approximately the same value, but this is not a limitation of one embodiment of the present invention. The width 151 of the opening 143a may have a different value. Similarly, the width 151 of the opening 143b may have a different value.

[0084] Enlarged views of opening 141a, opening 143a, and their vicinity are shown in Figures 6A and 6B. Figure 6A is a top view, and Figure 6B corresponds to a cross-sectional view taken along dashed line D1-D2 shown in Figure 6A. Note that hatching has been omitted in Figure 6B to avoid cluttering the drawing.

[0085] 6A and 6B, opening 143a may have width 151 of different values. Note that it is preferable that the minimum width 151 of opening 143a and opening 143b is within the above-mentioned range. Furthermore, opening 143a and opening 143b may have different width 151 values.

[0086] 3B shows an example in which the angle θ1 at the end of the insulating layer 110 and the angle θ2 at the end of the insulating layer 130 have approximately the same value, but this is not a limitation of one embodiment of the present invention. The angle θ1 and the angle θ2 may have different values.

[0087] An enlarged view of opening 141a, opening 143a, and their vicinity is shown in Fig. 7. For a top view, see Fig. 3A. Fig. 7 corresponds to a cross-sectional view taken along dashed line D1-D2 in Fig. 3A. Note that hatching has been omitted in Fig. 7 to avoid cluttering the drawing.

[0088] 7, the angle θ1 at the end of the insulating layer 110 and the angle θ2 at the end of the insulating layer 130 may have different values. For example, the angle θ2 can be set to a value larger than the angle θ1. By setting the angle θ2 to a value larger than the angle θ1, the step coverage of the layer (e.g., the conductive layer 120a) formed on the insulating layer 130 is improved, and defects such as step discontinuities or voids in the layer can be suppressed.

[0089] 1A and other figures show an example in which the shapes of the openings 141a, 141b, 143a, and 143b in a plan view are rectangular with arc-shaped corners, but this is not a limitation of one embodiment of the present invention. The shapes of the openings 141a, 141b, 143a, and 143b may be rectangular, polygonal, circular, or elliptical. Furthermore, the shapes of the openings 141a, 141b, 143a, and 143b may be a combination of curved and straight lines.

[0090] The crystallinity of the semiconductor material used for the semiconductor layer 108 is not particularly limited, and any of an amorphous semiconductor, a single crystal semiconductor, and a semiconductor having crystallinity other than single crystal (a microcrystalline semiconductor, a polycrystalline semiconductor, or a semiconductor having a crystalline region in part) may be used. Use of a single crystal semiconductor or a crystalline semiconductor is preferable because it can suppress deterioration of transistor characteristics.

[0091] The semiconductor layer 108 preferably includes a metal oxide (also referred to as an oxide semiconductor). Alternatively, the semiconductor layer 108 may include silicon. Examples of silicon include amorphous silicon, crystalline silicon (such as low-temperature polysilicon or single-crystal silicon), and the like.

[0092] When a metal oxide is used for the semiconductor layer 108, it is preferable that the semiconductor layer 108 contains, for example, indium, an element M (the element M is one or more elements selected from gallium, aluminum, silicon, boron, yttrium, tin, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium), and zinc. In particular, the element M is preferably one or more elements selected from aluminum, gallium, yttrium, and tin.

[0093] In particular, it is preferable to use an oxide containing indium (In), gallium (Ga), and zinc (Zn) (hereinafter also referred to as IGZO) for the semiconductor layer 108.

[0094] In addition to indium, gallium, and zinc, an oxide containing one or more of aluminum, silicon, boron, yttrium, tin, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium can also be used for the semiconductor layer 108. In particular, it is preferable to use an oxide containing one or more of tin, aluminum, and silicon in addition to indium, gallium, and zinc for the semiconductor layer because a transistor with high field-effect mobility can be achieved.

[0095] When the semiconductor layer 108 is an In-M-Zn oxide, the atomic ratio of In to the element M is preferably equal to or greater than 1. Specific examples include In:M:Zn=1:1:1, In:M:Zn=1:1:1.2, In:M:Zn=2:1:3, In:M:Zn=3:1:2, In:M:Zn=4:2:3, In:M:Zn=4:2:4.1, In:M:Zn=5:1:3, In:M:Zn=5:1:6, In:M:Zn=5:1:7, In:M:Zn=5:1:8, In:M:Zn=6:1:6, In:M:Zn=5:2:5, In:M:Zn=10:1:3, In:M:Zn=10:1:6, and In:M:Zn=10:1:8. In the above, when two or more types of elements are contained as the element M, the proportion of M in the atomic ratio corresponds to the sum of the numbers of atoms of the two or more metal elements.

[0096] When describing an atomic ratio of In:M:Zn=4:2:3 or thereabout, this includes a case where, when In is 4, M is 1 or more and 3 or less, and Zn is 2 or more and 4 or less. When describing an atomic ratio of In:M:Zn=5:1:6 or thereabout, this includes a case where, when In is 5, M is more than 0.1 and 2 or less, and Zn is 5 or more and 7 or less. When describing an atomic ratio of In:M:Zn=1:1:1 or thereabout, this includes a case where, when In is 1, M is more than 0.1 and 2 or less, and Zn is more than 0.1 and 2 or less.

[0097] Here, the composition of the semiconductor layer 108 will be described. The semiconductor layer 108 preferably contains a metal oxide containing at least indium and oxygen. The semiconductor layer 108 may also contain zinc in addition to these elements. The semiconductor layer 108 may also contain gallium.

[0098] Here, the composition of the semiconductor layer 108 greatly affects the electrical characteristics and reliability of the transistor 100. For example, by increasing the indium content in the semiconductor layer 108, carrier mobility is improved, and a transistor with high field-effect mobility can be realized.

[0099] One of the indicators for evaluating transistor reliability is the gate bias stress test (GBT), in which an electric field is applied to the gate and the test is held at high temperature. Among these tests, a test in which a positive potential is applied to the gate relative to the source and drain potentials and the test is held at high temperature is called a PBTS (Positive Bias Temperature Stress) test, and a test in which a negative potential is applied to the gate and the test is held at high temperature is called an NBTS (Negative Bias Temperature Stress) test. Furthermore, the PBTS and NBTS tests, which are conducted under illumination with light such as white LED light, are called PBTIS (Positive Bias Temperature Illumination Stress) and NBTIS (Negative Bias Temperature Illumination Stress), respectively.

[0100] In particular, in an n-type transistor using an oxide semiconductor, a positive potential is applied to the gate when the transistor is turned on (a state in which current flows), and therefore, the amount of change in threshold voltage in the PBTS test is one of the important items to focus on as an index of the reliability of the transistor.

[0101] Here, by using a metal oxide film that does not contain gallium or has a low gallium content as the composition of the semiconductor layer 108, the amount of variation in threshold voltage in the PBTS test can be reduced. Furthermore, when gallium is contained, it is preferable that the gallium content be smaller than the indium content in the composition of the semiconductor layer 108. This makes it possible to realize a highly reliable transistor.

[0102] One of the factors that causes the threshold voltage to fluctuate in the PBTS test is defect levels at or near the interface between the semiconductor layer and the gate insulating layer. The greater the defect level density, the more significant the degradation in the PBTS test. The generation of these defect levels can be suppressed by reducing the gallium content in the part of the semiconductor layer that contacts the gate insulating layer.

[0103] The following is a possible reason why PBTS degradation can be suppressed by eliminating or reducing the gallium content. Gallium contained in the semiconductor layer 108 has the property of attracting oxygen more easily than other metal elements (e.g., indium or zinc). Therefore, it is presumed that at the interface between the metal oxide film containing a large amount of gallium and the insulating layer 110 containing oxide, gallium bonds with excess oxygen in the insulating layer 110, making it easier to generate carrier (here, electron) trap sites. Therefore, when a positive potential is applied to the gate, carriers are trapped at the interface between the semiconductor layer and the gate insulating layer, which is thought to cause a fluctuation in the threshold voltage.

[0104] More specifically, when an In-Ga-Zn oxide is used for the semiconductor layer 108, a metal oxide film in which the atomic ratio of In is greater than the atomic ratio of Ga can be used for the semiconductor layer 108. It is more preferable to use a metal oxide film in which the atomic ratio of Zn is greater than the atomic ratio of Ga. In other words, it is preferable to use a metal oxide film in which the atomic ratios of metal elements satisfy In>Ga and Zn>Ga for the semiconductor layer 108.

[0105] For example, the semiconductor layer 108 can be a metal oxide film having an atomic ratio of metal elements of In:Ga:Zn=2:1:3, In:Ga:Zn=3:1:2, In:Ga:Zn=4:2:3, In:Ga:Zn=4:2:4.1, In:Ga:Zn=5:1:3, In:Ga:Zn=5:1:6, In:Ga:Zn=5:1:7, In:Ga:Zn=5:1:8, In:Ga:Zn=6:1:6, In:Ga:Zn=10:1:3, In:Ga:Zn=10:1:6, In:Ga:Zn=10:1:8, In:Ga:Zn=5:2:5, or a ratio close to these.

[0106] When a metal oxide film containing indium and gallium is used as the semiconductor layer 108, the ratio of the number of gallium atoms to the number of atoms of metal elements contained in the metal oxide (atomic ratio) can be set to more than 0 and less than 50%, preferably 0.05% to 30%, more preferably 0.1% to 15%, and more preferably 0.1% to 5%. Note that the inclusion of gallium in the semiconductor layer 108 has the effect of making oxygen vacancies less likely to occur.

[0107] A metal oxide film containing no gallium may be used for the semiconductor layer 108. For example, In-Zn oxide may be used for the semiconductor layer 108. In this case, increasing the atomic ratio of In to the atomic number of metal elements contained in the metal oxide film can increase the field-effect mobility of the transistor. On the other hand, increasing the atomic ratio of Zn to the atomic number of metal elements contained in the metal oxide results in a metal oxide film with high crystallinity, thereby suppressing fluctuations in the electrical characteristics of the transistor and improving reliability. Alternatively, a metal oxide film containing no gallium or zinc, such as indium oxide, may be used for the semiconductor layer 108. Using a metal oxide film containing no gallium at all can significantly reduce fluctuations in threshold voltage, particularly in a PBTS test.

[0108] For example, an oxide containing indium and zinc can be used for the semiconductor layer 108. In this case, a metal oxide film having an atomic ratio of metal elements of, for example, In:Zn=2:3, In:Zn=4:1, or a ratio close to these can be used.

[0109] In the transistor 100 of one embodiment of the present invention, a metal oxide film with a low gallium content or a metal oxide film containing no gallium is used for the semiconductor layer 108, and further, a film formed by a deposition method that reduces damage to the semiconductor layer 108 is used for the insulating layer 110 in contact with the top surface of the semiconductor layer 108. Therefore, the density of defect states at the interface between the semiconductor layer 108 and the insulating layer 110 is reduced, and the transistor 100 can have high reliability.

[0110] Although gallium has been described as a representative example here, the present invention can also be applied to a case where an element M (wherein M is one or more elements selected from aluminum, silicon, boron, yttrium, tin, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium) is used instead of gallium. In particular, it is preferable that M is one or more elements selected from gallium, aluminum, yttrium, and tin.

[0111] In particular, it is preferable to use a metal oxide film in which the atomic ratio of In is larger than the atomic ratio of the element M for the semiconductor layer 108. It is also preferable to use a metal oxide film in which the atomic ratio of Zn is larger than the atomic ratio of the element M.

[0112] It is preferable to use a crystalline metal oxide film for the semiconductor layer 108. For example, a metal oxide film having a c-axis aligned crystal (CAAC) structure, a nanocrystal (nc) structure, a polycrystalline structure, a microcrystalline structure, or the like, which will be described later, can be used. By using a crystalline metal oxide film for the semiconductor layer 108, the density of defect states in the semiconductor layer 108 can be reduced, and a highly reliable semiconductor device can be realized.

[0113] The higher the crystallinity of the semiconductor layer 108, the more the density of defect states in the film can be reduced. On the other hand, by using a metal oxide film with low crystallinity, a transistor capable of passing a large current can be realized.

[0114] When a metal oxide film is formed by sputtering, the higher the substrate temperature (stage temperature) during film formation, the higher the crystallinity of the formed metal oxide film. Furthermore, the higher the ratio of the flow rate of oxygen gas to the total film formation gas used during film formation (also referred to as the oxygen flow rate ratio), the higher the crystallinity of the formed metal oxide film. Thus, the crystallinity of the formed metal oxide film can be controlled by the substrate temperature and the oxygen flow rate ratio in the film formation gas.

[0115] The low-resistance region 108N of the semiconductor layer 108 may be a region containing an impurity element. Examples of the impurity element include hydrogen, boron, carbon, nitrogen, fluorine, phosphorus, sulfur, arsenic, aluminum, and rare gases. Typical examples of rare gases include helium, neon, argon, krypton, and xenon. The low-resistance region 108N preferably contains boron or phosphorus. The low-resistance region 108N may also contain two or more of these elements.

[0116] The process of adding impurities to the low-resistance region 108N can be performed through the insulating layer 110, using the conductive layer 112 as a mask.

[0117] The low resistance region 108N has an impurity concentration of 1×10 19 atoms / cm 3 That's it, 1×10 23 atoms / cm 3 Less than or equal to 5 x 10 19 atoms / cm 3 That's it, 5 x 10 22 atoms / cm 3 Less than or equal to 1×10 20 atoms / cm 3 That's it, 1×10 22 atoms / cm 3 It is preferred to include a region in which:

[0118] The concentration of impurities contained in the low-resistance region 108N can be analyzed by, for example, secondary ion mass spectrometry (SIMS), X-ray photoelectron spectroscopy (XPS), etc. When XPS analysis is used, the concentration distribution in the depth direction can be analyzed by combining ion sputtering from the front side or the back side with XPS analysis.

[0119] In the low-resistance region 108N, the impurity element is preferably present in an oxidized state. For example, it is preferable to use an easily oxidized element such as boron, phosphorus, magnesium, aluminum, or silicon as the impurity element. Such easily oxidized elements can be bonded to oxygen in the semiconductor layer 108 and exist stably in an oxidized state, and therefore are prevented from being desorbed even when high temperatures (e.g., 400°C or higher, 600°C or higher, or 800°C or higher) are applied in subsequent processes. Furthermore, the impurity element removes oxygen from the semiconductor layer 108, generating many oxygen vacancies in the low-resistance region 108N. These oxygen vacancies combine with hydrogen in the film to serve as a carrier supply source, resulting in an extremely low resistance state for the low-resistance region 108N.

[0120] For example, if boron is used as an impurity element, the boron contained in the low-resistivity region 108N may exist in a state bonded with oxygen. This can be confirmed by observing a spectral peak due to the B2O3 bond in XPS analysis. Furthermore, in XPS analysis, the spectral peak due to the state in which the boron element exists alone is not observed, or the peak intensity is so small that it is buried in the background noise observed near the lower limit of measurement.

[0121] The insulating layer 110 functioning as a gate insulating layer has a region in contact with a channel formation region of the semiconductor layer 108, that is, a region overlapping with the conductive layer 112. The insulating layer 110 also has a region in contact with the low-resistance region 108N of the semiconductor layer 108 and not overlapping with the conductive layer 112.

[0122] The insulating layer 110 in contact with the semiconductor layer 108 preferably includes an oxide insulating film. The insulating layer 110 more preferably includes a region containing oxygen in excess of the stoichiometric composition. In other words, the insulating layer 110 preferably includes an insulating film that can release oxygen. For example, oxygen can be supplied to the insulating layer 110 by forming the insulating layer 110 in an atmosphere containing oxygen, performing heat treatment or plasma treatment on the formed insulating layer 110 in an atmosphere containing oxygen, or forming an oxide film over the insulating layer 110 in an atmosphere containing oxygen.

[0123] The insulating layer 110 can be formed using the same method that can be used to form the insulating layer 118. In particular, it is preferable to form the insulating layer 110 by the PECVD method.

[0124] The region of the insulating layer 110 overlapping with the low-resistance region 108N may contain the above-described impurity element. In this case, like the low-resistance region 108N, the impurity element in the insulating layer 110 is preferably present in a state bonded with oxygen. Such easily oxidizable elements can be stably present in an oxidized state by bonding with oxygen in the insulating layer 110, and thus are prevented from being desorbed even when high temperatures are applied in a later process. Particularly when the insulating layer 110 contains oxygen (also referred to as excess oxygen) that can be desorbed by heating, the excess oxygen and the impurity element are stabilized by bonding, thereby preventing oxygen from being supplied from the insulating layer 110 to the low-resistance region 108N. Furthermore, a portion of the insulating layer 110 containing an oxidized impurity element is in a state where oxygen is difficult to diffuse. This prevents oxygen from being supplied to the low-resistance region 108N from above the insulating layer 110 through the insulating layer 110, thereby preventing the low-resistance region 108N from becoming high-resistance.

[0125] A conductive film containing a metal or an alloy is preferably used for the conductive layer 112 because electrical resistance can be reduced. Note that a conductive film containing an oxide may also be used for the conductive layer 112.

[0126] As in the case of forming the conductive film that will become the conductive layer 120a and the conductive layer 120b, ultraviolet light may be generated in the film forming apparatus when forming the conductive film that will become the conductive layer 112. When the ultraviolet light passes through the insulating layer 110 and reaches the semiconductor layer 108, oxygen vacancies V in the semiconductor layer 108 are formed. O , and V O In particular, oxygen vacancies in the channel formation region V O , and V O H may adversely affect the electrical characteristics and reliability of a transistor. Therefore, when a conductive film to be the conductive layer 112 is formed, it is preferable that the amount of ultraviolet light reaching the semiconductor layer 108 be small.

[0127] 8A is a cross-sectional view of the transistor 100 before the conductive film that becomes the conductive layer 112 is formed. In FIG. 8A, the white arrows indicate ultraviolet light generated in a film formation apparatus when the conductive film that becomes the conductive layer 112 is formed, and the ultraviolet light is shown as transmitting through the insulating layer 110 and reaching the semiconductor layer 108.

[0128] The amount of ultraviolet light that reaches the semiconductor layer 108 is determined by the product of the intensity (also referred to as illuminance) of the ultraviolet light and the time during which the ultraviolet light reaches the semiconductor layer 108. That is, when the intensity of the ultraviolet light is high, the amount of ultraviolet light that reaches the semiconductor layer 108 increases, and when the time during which the ultraviolet light reaches the semiconductor layer 108 increases, the amount of ultraviolet light also increases. When ultraviolet light is generated in a film formation apparatus that forms the conductive film that becomes the conductive layer 112, it is preferable to use a material that has low transmittance for ultraviolet light for the conductive layer 112. By using a material with low transmittance for the conductive layer 112, when a conductive film that becomes the conductive layer 112 with a certain thickness is formed on the semiconductor layer 108, the conductive film blocks ultraviolet light, and the amount of ultraviolet light that reaches the semiconductor layer 108 can be reduced.

[0129] 8B is a diagram schematically illustrating an initial state of film formation in which the thickness of the conductive film 112m that becomes the conductive layer 112 has not yet reached a thickness that can block ultraviolet light. While the thickness of the conductive film 112m has not yet reached a thickness that can block ultraviolet light, ultraviolet light passes through the conductive film 112m and reaches the semiconductor layer 108. FIG. 8C is a diagram schematically illustrating a state after the thickness of the conductive film 112m has reached a thickness that can block ultraviolet light. After the thickness of the conductive film 112m has reached a thickness that can block ultraviolet light, ultraviolet light is blocked by the conductive film 112m and does not reach the semiconductor layer 108.

[0130] Next, the conditions for forming the conductive film will be described. If the power during the formation of the conductive film is high, the intensity of the generated ultraviolet light may increase. However, if the power during the formation of the film is increased, the film formation speed increases, and the time required to form a conductive film thick enough to block ultraviolet light can be shortened. Therefore, the time required for the ultraviolet light to reach the semiconductor layer 108 is shortened, and the amount of ultraviolet light reaching the semiconductor layer 108 can be reduced.

[0131] Note that if the power used during deposition of the conductive film is low, the deposition rate will be slow, and it may take a long time to form a conductive film thick enough to block ultraviolet light. However, if the power used during deposition is low, the intensity of the ultraviolet light generated may be reduced, and the amount of ultraviolet light reaching the semiconductor layer 108 may be reduced. Therefore, the power used during deposition may be set in consideration of the intensity of the ultraviolet light generated and the deposition rate so as to reduce the amount of ultraviolet light reaching the semiconductor layer 108. Although the power used during deposition has been described as an example, it is also preferable to set conditions other than power (e.g., pressure) in consideration of the intensity of the ultraviolet light generated and the deposition rate.

[0132] The case where the conductive layer 112 has a stacked structure will be described. Here, the conductive layer 112 has a two-layer stacked structure, and the conductive film to be the conductive layer 112 has a stacked structure of a first conductive film and a second conductive film over the first conductive film.

[0133] As described above, the first conductive film is preferably formed under conditions that reduce the amount of ultraviolet light that reaches the semiconductor layer 108. In addition, the first conductive film is preferably formed using a material and thickness that can block ultraviolet light. When the second conductive film is formed, the first conductive film can block ultraviolet light, thereby reducing the amount of ultraviolet light that reaches the semiconductor layer 108. The first conductive film can be formed using one or more of a metal element selected from chromium, copper, aluminum, gold, silver, zinc, molybdenum, tantalum, titanium, tungsten, manganese, nickel, iron, and cobalt, an alloy containing any of the above metal elements, or an alloy combining any of the above metal elements.

[0134] Since the lower the transmittance of the first conductive film to ultraviolet light, the better, there is no need to set a lower limit for the transmittance. However, if a lower limit is set, the transmittance of the first conductive film to ultraviolet light is preferably 0.01% or more, for example.

[0135] The transmittance of the first conductive film in the wavelength range of 200 nm to 400 nm is preferably 0.01% to 80%, more preferably 0.01% to 75%, and even more preferably 0.01% to 70%.

[0136] Furthermore, the transmittance of the first conductive film in the wavelength range of 200 nm or more and 350 nm or less is preferably 0.01% or more and 70% or less, even more preferably 0.01% or more and 60% or less, even more preferably 0.01% or more and 50% or less, even more preferably 0.01% or more and 40% or less, even more preferably 0.01% or more and 30% or less, even more preferably 0.01% or more and 20% or less, even more preferably 0.01% or more and 10% or less.

[0137] The thickness of the first conductive film is preferably set so that the transmittance of ultraviolet light falls within the aforementioned range. Furthermore, the thickness of the first conductive film is preferably set in consideration of the resistance required for the conductive layer 112, which functions as a gate electrode. Furthermore, if the first conductive film is made thick, the conductive layer 112 also becomes thick, which may cause defects such as discontinuities or voids in the insulating layer 118 formed on the conductive layer 112. The thickness of the first conductive film is preferably 20 nm to 200 nm, more preferably 30 nm to 150 nm, even more preferably 40 nm to 120 nm, even more preferably 50 nm to 100 nm, and even more preferably 70 nm to 100 nm. Setting the thickness of the first conductive film within the aforementioned range can reduce the amount of ultraviolet light reaching the semiconductor layer 108, improve the step coverage of the insulating layer 118, and prevent defects such as discontinuities or voids in the insulating layer 118.

[0138] A description will be given of a configuration example of a transistor having a configuration partially different from that of the above-described Configuration Example 1. Note that, in the following, descriptions of parts that overlap with Configuration Example 1 may be omitted. Also, in the drawings shown below, parts that have the same functions as Configuration Example 1 may be indicated with the same hatching pattern and may not be assigned reference numerals.

[0139] <Configuration example 2> 9A is a top view of the transistor 100A, and FIG. 9B is a cross-sectional view of the transistor 100A in the channel length direction. Note that FIG. 1C can be used for a cross-sectional view of the transistor 100A in the channel width direction. FIG. 10 shows an enlarged view of a region S surrounded by a dashed line in FIG. 9B.

[0140] The transistor 100A differs from the transistor 100 shown in FIG. 1A etc. mainly in that the top surface shape of the insulating layer 110 and the top surface shape of the insulating layer 118 do not match.

[0141] The insulating layer 110 has openings 145a and 145b in a region overlapping with the low-resistance region 108N. The insulating layer 118 has openings 147a and 147b in a region overlapping with the low-resistance region 108N. Furthermore, opening 145a is located inside opening 147a, and opening 145b is located inside opening 147b.

[0142] Insulating layer 130 is provided to cover the upper and side surfaces of insulating layer 118 and insulating layer 110. Insulating layer 130 has openings 143a and 143b, with opening 143a located inside opening 145a and opening 143b located inside opening 145b.

[0143] 11A and 11B show enlarged views of openings 143a, 145a, and 147a, as well as their vicinity. Fig. 11A is a top view, and Fig. 11B corresponds to a cross-sectional view taken along dashed line D1-D2 in Fig. 11A. Note that hatching has been omitted in Fig. 11B to avoid cluttering the drawing.

[0144] In any straight line that crosses openings 143a, 145a, and 147a, bottom width 145W of opening 145a is preferably smaller than bottom width 147W of opening 147a. This configuration improves the step coverage of layers (e.g., insulating layer 130) formed on insulating layer 118 and insulating layer 110, thereby preventing defects such as step discontinuities or voids in the layers. Furthermore, bottom width 143W of opening 143a is preferably smaller than bottom width 145W of opening 145a.

[0145] The angle θ1, the angle θ2, and the width 151 can be determined from the above description, and therefore detailed description thereof will be omitted.

[0146] <Configuration example 3> 12A is a cross-sectional view of the transistor 100B in the channel length direction, and FIG. 12B is a cross-sectional view of the transistor 100B in the channel width direction. For a top view of the transistor 100B, refer to FIG. 1A.

[0147] The transistor 100B differs from the transistor 100 shown in FIG. 1 mainly in that the insulating layer 110 has a different configuration.

[0148] The insulating layer 110 has a layered structure in which an insulating film 110a, an insulating film 110b, and an insulating film 110c are stacked in this order from the substrate 102 side. The insulating film 110a has a region in contact with the channel formation region of the semiconductor layer 108. The insulating film 110c has a region in contact with the conductive layer 112. The insulating film 110b is located between the insulating films 110a and 110c.

[0149] The insulating films 110a, 110b, and 110c are preferably insulating films containing oxides, and are preferably formed successively using the same film formation apparatus.

[0150] The insulating films 110a, 110b, and 110c can be, for example, insulating layers containing one or more of a silicon oxide film, a silicon oxynitride film, a silicon nitride oxide film, an aluminum oxide film, a hafnium oxide film, an yttrium oxide film, a zirconium oxide film, a gallium oxide film, a tantalum oxide film, a magnesium oxide film, a lanthanum oxide film, a cerium oxide film, and a neodymium oxide film.

[0151] The insulating layer 110 in contact with the semiconductor layer 108 preferably has a stacked-layer structure of oxide insulating films. The insulating layer 110 preferably has a region containing oxygen in excess of the stoichiometric composition. In other words, the insulating layer 110 includes an insulating film capable of releasing oxygen. For example, oxygen can be supplied to the insulating layer 110 by forming the insulating layer 110 in an oxygen-containing atmosphere, performing heat treatment in an oxygen-containing atmosphere after the formation of the insulating layer 110, performing plasma treatment or the like in an oxygen-containing atmosphere after the formation of the insulating layer 110, or forming an oxide film on the insulating layer 110 in an oxygen-containing atmosphere. Note that in each of the above treatments for supplying oxygen, an oxidizing gas may be used instead of or in addition to oxygen. Examples of the oxidizing gas include dinitrogen monoxide and ozone. Note that multiple types of oxidizing gases may be used.

[0152] The insulating films 110a, 110b, and 110c can be formed by, for example, sputtering, CVD, vacuum deposition, PLD, ALD, or the like.

[0153] In particular, it is preferable that the insulating films 110a, 110b, and 110c be formed by plasma CVD.

[0154] The insulating film 110a is preferably formed under conditions that minimize damage to the semiconductor layer 108 because it is formed over the semiconductor layer 108. For example, the insulating film 110a can be formed under conditions that minimize damage to the semiconductor layer 108. For example, the insulating film 110a can be formed under conditions that provide a sufficiently low film formation rate.

[0155] For example, when a silicon oxynitride film is formed as the insulating film 110a by plasma CVD, damage to the semiconductor layer 108 can be made extremely small by forming the film under low power conditions.

[0156] The deposition gas used to form a silicon oxynitride film can be a source gas containing a deposition gas containing silicon, such as silane or disilane, and an oxidizing gas, such as oxygen, ozone, nitrous oxide, or nitrogen dioxide. In addition to the source gas, a dilution gas, such as argon, helium, or nitrogen, can also be used.

[0157] For example, by reducing the ratio of the flow rate of the deposition gas to the total flow rate of the film-forming gas (hereinafter simply referred to as the flow rate ratio), the film-forming rate can be reduced, and a dense film with few defects can be formed.

[0158] The insulating film 110b is preferably formed under conditions that allow for a higher film formation rate than the insulating film 110a, thereby improving productivity.

[0159] For example, the insulating film 110b can be formed under conditions in which the flow rate of the deposition gas is higher than that of the insulating film 110a, thereby increasing the film formation rate.

[0160] The insulating film 110c is preferably an extremely dense film with reduced surface defects and low adsorption of impurities such as water contained in the atmosphere. For example, like the insulating film 110a, the insulating film 110c can be formed under conditions where the film formation rate is sufficiently low.

[0161] Because the insulating film 110c is formed on the insulating film 110b, the insulating film 110c has a smaller effect on the semiconductor layer 108 during deposition than the insulating film 110a. Therefore, the insulating film 110c can be deposited under higher power conditions than the insulating film 110a. By reducing the flow rate ratio of the deposition gas and depositing the insulating film at relatively high power, a dense film with reduced surface defects can be obtained.

[0162] That is, stacked films formed under conditions in which the film formation rate is highest for the insulating film 110b, followed by the insulating film 110a and the insulating film 110c, can be used for the insulating layer 110. Furthermore, for the insulating layer 110, the etching rate under the same wet etching or dry etching conditions is highest for the insulating film 110b, followed by the insulating film 110a and the insulating film 110c, in that order.

[0163] The insulating film 110b is preferably formed thicker than the insulating films 110a and 110c. By forming the insulating film 110b, which has the fastest film formation rate, thick, the time required for the film formation process of the insulating layer 110 can be shortened.

[0164] Here, the boundary between insulating films 110a and 110b, and the boundary between insulating films 110b and 110c may be unclear, and therefore these boundaries are indicated by dashed lines in Figure 12A etc. Note that, because insulating films 110a and 110b have different film densities, these boundaries may be observed as differences in contrast in a transmission electron microscope image of a cross section of insulating layer 110. Similarly, the boundary between insulating films 110b and 110c may also be observed as differences in contrast.

[0165] In the transistor 100B of one embodiment of the present invention, a metal oxide film with a low gallium content or a metal oxide film containing no gallium is preferably used for the semiconductor layer 108. Furthermore, the insulating film 110a in contact with the top surface of the semiconductor layer 108 is preferably formed by a film formation method that reduces damage to the semiconductor layer 108. This reduces the density of defect states at the interface between the semiconductor layer 108 and the insulating layer 110, thereby enabling the transistor 100B to have high reliability.

[0166] <Configuration Example 4> 13A is a top view of the transistor 100C, FIG. 13B is a cross-sectional view of the transistor 100C in the channel length direction, and FIG. 13C is a cross-sectional view of the transistor 100C in the channel length direction.

[0167] 1 and the like in that the transistor 100C includes a conductive layer 106 and an insulating layer 103 between the substrate 102 and the semiconductor layer 108. The conductive layer 106 has a region that overlaps with the conductive layer 112 with the semiconductor layer 108 interposed therebetween.

[0168] In the transistor 100C, the conductive layer 112 functions as a second gate electrode (also referred to as a top gate electrode), and the conductive layer 106 functions as a first gate electrode (also referred to as a bottom gate electrode). Part of the insulating layer 110 functions as a second gate insulating layer, and part of the insulating layer 103 functions as a first gate insulating layer.

[0169] A portion of the semiconductor layer 108 that overlaps with at least one of the conductive layer 112 and the conductive layer 106 functions as a channel formation region. Note that for ease of explanation, the portion of the semiconductor layer 108 that overlaps with the conductive layer 112 will be referred to as a channel formation region in some cases below. However, in reality, a channel can also be formed in a portion that does not overlap with the conductive layer 112 but overlaps with the conductive layer 106 (a portion including the low-resistance region 108N).

[0170] 13C, the conductive layer 106 may be electrically connected to the conductive layer 112 through the insulating layer 110 and the opening 142 provided in the insulating layer 103. This allows the conductive layer 106 and the conductive layer 112 to be applied with the same potential. Applying the same potential to the conductive layer 112 and the conductive layer 106 can increase the current that can flow when the transistor 100C is in an on state.

[0171] The conductive layer 106 can be formed using a material similar to that of the conductive layer 112, the conductive layer 120a, or the conductive layer 120b. In particular, it is preferable to use a material containing copper for the conductive layer 106 because wiring resistance can be reduced.

[0172] 13A and 13C, it is preferable that the conductive layer 112 and the conductive layer 106 protrude outward in the channel width direction beyond the end portions of the semiconductor layer 108. In this case, as shown in Fig. 13C, the entire semiconductor layer 108 in the channel width direction is covered with the conductive layer 112 and the conductive layer 106 via the insulating layer 110 and the insulating layer 103.

[0173] With this structure, the semiconductor layer 108 can be electrically surrounded by an electric field generated by the pair of gate electrodes. In this case, it is particularly preferable to apply the same potential to the conductive layer 106 and the conductive layer 112. This allows an electric field for inducing a channel in the semiconductor layer 108 to be effectively applied, thereby increasing the on-state current of the transistor 100C. This also enables miniaturization of the transistor 100C.

[0174] Note that the conductive layer 112 and the conductive layer 106 may not be connected to each other. In this case, a constant potential may be applied to one of the pair of gate electrodes, and a signal for driving the transistor 100C may be applied to the other. In this case, the threshold voltage when the transistor 100C is driven by the other gate electrode can also be controlled by the potential applied to one gate electrode.

[0175] The conductive layer 106 may be electrically connected to the conductive layer 120a or the conductive layer 120b. In this case, the conductive layer 120a or the conductive layer 120b may be electrically connected to the conductive layer 106 through openings provided in the insulating layer 118, the insulating layer 110, and the insulating layer 103.

[0176] The insulating layer 103 can be formed using a method that can be used to form the insulating layer 118. In particular, it is preferable to form the insulating layer 103 by the PECVD method.

[0177] The insulating layer 103 functioning as the second gate insulating layer preferably satisfies one or more of the following requirements: high withstand voltage, low film stress, low hydrogen release, low water release, few defects in the film, and suppression of diffusion of metal elements contained in the conductive layer 106, and most preferably satisfies all of these requirements.

[0178] 13B and 13C show an example in which the insulating layer 103 has a stacked structure of an insulating film 103a and an insulating film 103b over the insulating film 103a. The insulating film 103a in contact with the conductive layer 106 is preferably an insulating film through which metal elements contained in the conductive layer 106 are not easily diffused. The insulating film 103a is preferably a silicon nitride film, a silicon nitride oxide film, an aluminum oxide film, or a hafnium oxide film, for example. The insulating film 103b in contact with the semiconductor layer 108 is preferably an insulating film containing oxygen. The insulating film 103b is preferably a silicon oxide film or a silicon oxynitride film, for example.

[0179] 13B and 13C show the insulating layer 103 having a two-layer structure of the insulating film 103a and the insulating film 103b, but one embodiment of the present invention is not limited to this. The insulating layer 103 may have a single-layer structure or a stacked structure of three or more layers. Furthermore, each of the insulating film 103a and the insulating film 103b may have a stacked structure of two or more layers.

[0180] When the insulating layer 103 has a stacked structure, the insulating films included in the insulating layer 103 are preferably formed successively without exposure to the air. For example, the insulating films included in the insulating layer 103 are preferably formed successively using a plasma CVD apparatus without exposure to the air.

[0181] <Configuration example 5> 14A is a cross-sectional view of the transistor 100D in the channel length direction, and FIG. 14B is a cross-sectional view of the transistor 100D in the channel length direction. For a top view of the transistor 100D, refer to FIG. 13A.

[0182] The transistor 100D differs from the transistor 100C shown in FIG. 13 and the like mainly in that the transistor 100D has a metal oxide layer 114 between the insulating layer 110 and the conductive layer 112.

[0183] The conductive layer 112 and the metal oxide layer 114 are processed so that their top surfaces generally match each other. The metal oxide layer 114 can be formed, for example, by processing using a resist mask for processing the conductive layer 112.

[0184] The metal oxide layer 114 has a function of supplying oxygen to the insulating layer 110. When a conductive film containing a metal or alloy that is easily oxidized is used as the conductive layer 112, the metal oxide layer 114 can also function as a barrier layer that prevents the conductive layer 112 from being oxidized by oxygen in the insulating layer 110. Note that the metal oxide layer 114 may be removed before the conductive layer 112 is formed, so that the conductive layer 112 and the insulating layer 110 are in contact with each other. Note that the metal oxide layer 114 may not be provided if it is not necessary.

[0185] The metal oxide layer 114 located between the insulating layer 110 and the conductive layer 112 functions as a barrier film that prevents oxygen contained in the insulating layer 110 from diffusing toward the conductive layer 112. The metal oxide layer 114 also functions as a barrier film that prevents impurities, including hydrogen elements, contained in the conductive layer 112 from diffusing toward the insulating layer 110. Examples of hydrogen elements as impurities include hydrogen and water. For example, the metal oxide layer 114 is preferably made of a material that is less permeable to oxygen and hydrogen than the insulating layer 110.

[0186] The metal oxide layer 114 can prevent oxygen from diffusing from the insulating layer 110 to the conductive layer 112, even when a metal material that easily absorbs oxygen is used for the conductive layer 112. Furthermore, even when the conductive layer 112 contains hydrogen, it can prevent hydrogen from diffusing from the conductive layer 112 to the semiconductor layer 108 through the insulating layer 110. As a result, the carrier concentration in the channel formation region of the semiconductor layer 108 can be made extremely low. Note that examples of metal materials that easily absorb oxygen include aluminum and copper.

[0187] An insulating material or a conductive material can be used for the metal oxide layer 114. When the metal oxide layer 114 has insulating properties, the metal oxide layer 114 functions as a part of the gate insulating layer. On the other hand, when the metal oxide layer 114 has conductive properties, the metal oxide layer 114 functions as a part of the gate electrode.

[0188] It is preferable to use an insulating material having a higher dielectric constant than silicon oxide for the metal oxide layer 114. In particular, it is preferable to use an aluminum oxide film, a hafnium oxide film, a hafnium aluminate film, or the like, because the driving voltage can be reduced.

[0189] Conductive oxides such as indium oxide, indium tin oxide (ITO), or silicon-containing indium tin oxide (ITSO) can also be used as the metal oxide layer 114. Conductive oxides containing indium are particularly preferred because of their high conductivity.

[0190] The metal oxide layer 114 is preferably formed using an oxide material containing one or more of the same elements as those of the semiconductor layer 108. In particular, it is preferable to use an oxide semiconductor material that can be used for the semiconductor layer 108. In this case, it is preferable to use a metal oxide film formed using the same sputtering target as that for the semiconductor layer 108 as the metal oxide layer 114, because this allows the use of common equipment.

[0191] The metal oxide layer 114 is preferably formed using a sputtering apparatus. For example, when an oxide film is formed using a sputtering apparatus, oxygen can be suitably added to one or both of the insulating layer 110 and the semiconductor layer 108 by forming the oxide film in an atmosphere containing oxygen gas.

[0192] Note that a metal oxide film that can be used for the metal oxide layer 114 may be formed, and then the metal oxide film may be removed after oxygen is supplied to the insulating layer 110. Furthermore, the metal oxide layer 114 or a metal oxide film that can be used for the metal oxide layer 114 does not have to be provided if it is not necessary.

[0193] <Configuration Example 6> 15A is a cross-sectional view of the transistor 100E in the channel length direction, and FIG. 15B is a cross-sectional view of the transistor 100E in the channel length direction. Note that FIG. 13A can be referred to for a top view of the transistor 100E.

[0194] The transistor 100E differs from the transistor 100C shown in FIG. 13 and other figures mainly in that the configuration of the insulating layer 110 is different.

[0195] The insulating layer 110 is processed so that its top surface shape is approximately the same as that of the conductive layer 112. The insulating layer 110 can be formed by processing using a resist mask for processing the conductive layer 112, for example.

[0196] The insulating layer 118 contacts the top and side surfaces of the semiconductor layer 108, the side surfaces of the insulating layer 110, and the top and side surfaces of the conductive layer 112. The insulating layer 118 has openings 141a and 141b in a region overlapping with the semiconductor layer 108.

[0197] The insulating layer 118 preferably has a tapered edge. For the corner of the edge of the insulating layer 118, the above description of the angle θ1 can be referred to, and therefore detailed description thereof will be omitted.

[0198] The insulating layer 130, the conductive layer 120a, and the conductive layer 120b can be referred to in the above description, and therefore detailed description thereof will be omitted.

[0199] <Configuration Example 7> 16A is a top view of the transistor 100F, FIG. 16B is a cross-sectional view of the transistor 100F in the channel length direction, and FIG. 16C is a cross-sectional view of the transistor 100F in the channel length direction.

[0200] The transistor 100F differs mainly from the transistor 100E shown in FIG. 15 and other figures in that the configuration of the insulating layer 110 is different.

[0201] The end of the conductive layer 112 is located inside the end of the insulating layer 110. In other words, the insulating layer 110 has a portion that protrudes outside the end of the conductive layer 112 at least on the semiconductor layer 108.

[0202] The semiconductor layer 108 has a pair of regions 108L sandwiching a channel formation region therebetween and a pair of low-resistance regions 108N outside the regions 108L. The regions 108L are regions of the semiconductor layer 108 that overlap with the insulating layer 110 but do not overlap with the conductive layer 112.

[0203] The region 108L functions as a buffer region for alleviating the drain electric field. The region 108L does not overlap with the conductive layer 112, and therefore, a channel is hardly formed in the region 108L even when a gate voltage is applied to the conductive layer 112. The region 108L preferably has a higher carrier concentration than the channel formation region. This allows the region 108L to function as an LDD (Lightly Doped Drain) region.

[0204] The region 108L can also be referred to as a region having the same or lower resistance, the same or higher carrier concentration, the same or higher oxygen defect density, or the same or higher impurity concentration compared to the channel formation region.

[0205] Region 108L can also be said to be a region with the same or higher resistance, the same or lower carrier concentration, the same or lower oxygen defect density, or the same or lower impurity concentration as low-resistance region 108N.

[0206] In this way, by providing the region 108L that functions as an LDD region between the channel formation region and the low-resistance region 108N that functions as a source region or a drain region, a highly reliable transistor can be realized that has both a high drain breakdown voltage and a high on-current.

[0207] The low-resistance region 108N functions as a source region or a drain region, and is the region with the lowest resistance compared to other regions of the semiconductor layer 108. Alternatively, the low-resistance region 108N can also be said to be the region with the highest carrier concentration, the highest oxygen defect density, or the highest impurity concentration compared to other regions of the semiconductor layer 108.

[0208] The lower the electrical resistance of the low resistance region 108N, the more preferable. For example, the sheet resistance of the low resistance region 108N is 1 Ω / □ or more and 1×10 3 Less than Ω / □, preferably 1Ω / □ or more 8×10 2 It is preferable to set it to Ω / □ or less.

[0209] The higher the electrical resistance of the channel formation region in a state where a channel is not formed, the more preferable it is. For example, the sheet resistance of the channel formation region is 1×10 9 Ω / □ or more, preferably 5×10 9 Ω / □ or more, preferably 1×10 10 It is preferably Ω / □ or more.

[0210] Since the electrical resistance of the channel formation region in a state where a channel is not formed is preferably as high as possible, there is no need to set an upper limit. However, if an upper limit is set, the sheet resistance of the channel formation region may be, for example, 1×10 9 Ω / □ or more 1×10 12 Ω / □ or less, preferably 5×109 Ω / □ or more 1×10 12 Ω / □ or less, more preferably 1×10 10 Ω / □ or more 1×10 12 It is preferably Ω / □ or less.

[0211] The sheet resistance value of the region 108L is, for example, 1×10 3 Ω / □ or more 1×10 9 Ω / □ or less, preferably 1×10 3 Ω / □ or more 1×10 8 Ω / □ or less, more preferably 1×10 3 Ω / □ or more 1×10 7 Ω / □. By setting the resistance in this range, a transistor with good electrical characteristics and high reliability can be obtained. The sheet resistance can be calculated from the resistance value. By providing such region 108L between the low-resistance region 108N and the channel formation region, the source-drain breakdown voltage of the transistor 100F can be increased.

[0212] The electrical resistance of the channel formation region in a state where a channel is not formed is 1×10 6 1×10 times more 12 times or less, preferably 1 x 10 6 1×10 times more 11 times or less, more preferably 1×10 6 1×10 times more 10 It can be twice or less.

[0213] The electrical resistance of the channel formation region in the state where a channel is not formed is 1×10 0 1×10 times more 9 times or less, preferably 1 x 10 1 1×10 times more 8 times or less, more preferably 1×10 2 1×10 times more 7 It can be twice or less.

[0214] The electrical resistance of the region 108L is 1×10 01×10 times more 9 times or less, preferably 1 x 10 1 1×10 times more 8 times or less, more preferably 1×10 1 1×10 times more 7 It can be twice or less.

[0215] The carrier concentration in the semiconductor layer 108 is preferably lowest in the channel formation region and increases in the order of the region 108L and the low-resistance region 108N. By providing the region 108L between the channel formation region and the low-resistance region 108N, the carrier concentration in the channel formation region can be kept extremely low even if impurities such as hydrogen diffuse from the low-resistance region 108N during the manufacturing process, for example.

[0216] The lower the carrier concentration in the channel formation region that functions as a channel formation region, the better. 18 cm -3 Preferably, it is 1×10 or less. 17 cm -3 More preferably, it is 1×10 or less. 16 cm -3 More preferably, it is 1×10 or less. 13 cm -3 More preferably, it is 1×10 or less. 12 cm -3 The lower limit of the carrier concentration in the channel formation region is not particularly limited, but is preferably 1×10 -9 cm -3 It can be said that:

[0217] On the other hand, the carrier concentration in the low resistance region 108N is, for example, 5×10 18 cm -3 or more, preferably 1 × 10 19 cm -3 More preferably, 5 × 10 19 cm -3 The upper limit of the carrier concentration in the low-resistance region 108N is not particularly limited, but may be, for example, 5×10 21cm -3 , or 1 × 10 22 cm -3 etc.

[0218] The carrier concentration in the region 108L can be set to a value between that of the channel formation region and that of the low resistance region 108N. For example, 1×10 14 cm -3 More than 1×10 20 cm -3 It is sufficient to set the value in the range below.

[0219] The carrier concentration in the region 108L may not be uniform, and may have a gradient such that the carrier concentration decreases from the low-resistance region 108N side to the channel-forming region. For example, either the hydrogen concentration or the oxygen vacancy concentration, or both, in the region 108L may have a gradient such that the concentration decreases from the low-resistance region 108N side to the channel-forming region side.

[0220] A portion of the end of the insulating layer 110 is located on the semiconductor layer 108. The insulating layer 110 has a region that overlaps with the conductive layer 112 and functions as a gate insulating layer, and a region that does not overlap with the conductive layer 112 (i.e., a region that overlaps with the region 108L).

[0221] <Configuration Example 8> 17A is a cross-sectional view of the transistor 100G in the channel length direction, and FIG. 17B is a cross-sectional view of the transistor 100G in the channel length direction. Note that FIG. 13A can be referred to for a top view of the transistor 100G.

[0222] The transistor 100G differs from the transistor 100E shown in FIG. 15 and other figures mainly in that the transistor 100G has an insulating layer 116.

[0223] The insulating layer 116 is provided in contact with the conductive layer 112 of the semiconductor layer 108 and the top surface and side surface that are not covered with the insulating layer 110. The insulating layer 116 is provided to cover the top surface of the insulating layer 103, the side surface of the insulating layer 110, and the top surface and side surface of the conductive layer 112.

[0224] The insulating layer 116 has a function of lowering the resistance of the low-resistance region 108N. As such an insulating layer 116, an insulating film that can supply impurities into the low-resistance region 108N by heating during or after the formation of the insulating layer 116 can be used. Alternatively, an insulating film that can cause oxygen vacancies in the low-resistance region 108N by heating during or after the formation of the insulating layer 116 can be used.

[0225] For example, the insulating layer 116 can be an insulating film that functions as a supply source for supplying impurities to the low-resistance region 108N. In this case, the insulating layer 116 is preferably a film that releases hydrogen when heated. By forming such an insulating layer 116 in contact with the semiconductor layer 108, impurities such as hydrogen can be supplied to the low-resistance region 108N, thereby reducing the resistance of the low-resistance region 108N.

[0226] The insulating layer 116 is preferably formed using a gas containing an impurity element such as a hydrogen element as a deposition gas. The lower the deposition temperature of the insulating layer 116, the more impurity elements can be effectively supplied to the semiconductor layer 108. The deposition temperature of the insulating layer 116 is preferably, for example, 200° C. to 500° C., more preferably 220° C. to 450° C., and further preferably 230° C. to 400° C.

[0227] Deposition of the insulating layer 116 under reduced pressure and heating can promote desorption of oxygen from the region that will become the low-resistance region 108N in the semiconductor layer 108. Supplying impurities such as hydrogen to the semiconductor layer 108, which has many oxygen vacancies, increases the carrier concentration in the low-resistance region 108N, and can more effectively reduce the resistance of the low-resistance region 108N.

[0228] For the insulating layer 116, for example, an insulating film containing a nitride, such as silicon nitride, silicon nitride oxide, silicon oxynitride, aluminum nitride, or aluminum nitride oxide, can be suitably used. In particular, silicon nitride has a blocking property against both hydrogen and oxygen, and can therefore prevent both diffusion of hydrogen from the outside to the semiconductor layer and desorption of oxygen from the semiconductor layer to the outside, thereby realizing a highly reliable transistor.

[0229] The insulating layer 116 may be an insulating film that has a function of absorbing oxygen in the semiconductor layer 108 and generating oxygen vacancies. In particular, the insulating layer 116 is preferably formed using a metal nitride such as aluminum nitride.

[0230] When a metal nitride is used for the insulating layer 116, it is preferable to use a nitride of aluminum, titanium, tantalum, tungsten, chromium, or ruthenium. In particular, it is preferable to use aluminum or titanium. For example, an aluminum nitride film formed by a reactive sputtering method using aluminum as a sputtering target and a nitrogen-containing gas as a deposition gas can have extremely high insulating properties and extremely high blocking properties against both hydrogen and oxygen by appropriately controlling the flow rate of nitrogen gas relative to the total flow rate of the deposition gas. Therefore, providing an insulating film containing such a metal nitride in contact with a semiconductor layer can not only reduce the resistance of the semiconductor layer but also effectively prevent oxygen from being released from the semiconductor layer and hydrogen from diffusing into the semiconductor layer.

[0231] When aluminum nitride is used as the metal nitride, the thickness of the insulating layer containing the aluminum nitride is preferably 5 nm or more. Even with such a thin film, it is possible to achieve both high blocking properties against hydrogen and oxygen and the function of reducing the resistance of the semiconductor layer. Note that the thickness of the insulating layer may be any thickness, but considering productivity, it is preferable to set it to 500 nm or less, preferably 200 nm or less, and more preferably 50 nm or less.

[0232] When an aluminum nitride film is used for the insulating layer 116, the composition formula is AlN x (x is a real number greater than 0 and less than or equal to 2, preferably greater than 0.5 and less than or equal to 1.5) is preferably used. This allows the film to have excellent insulating properties and thermal conductivity, thereby improving the dissipation of heat generated when the transistor 100B is driven.

[0233] Alternatively, the insulating layer 116 can be an aluminum titanium nitride film, a titanium nitride film, or the like.

[0234] By providing such an insulating layer 116 in contact with the low-resistance region 108N, the insulating layer 116 can absorb oxygen in the low-resistance region 108N and form oxygen vacancies in the low-resistance region 108N. Furthermore, by performing heat treatment after forming such an insulating layer 116, more oxygen vacancies can be formed in the low-resistance region 108N, thereby promoting low resistance. Furthermore, when a film containing a metal oxide is used for the insulating layer 116, the insulating layer 116 may absorb oxygen in the semiconductor layer 108, resulting in the formation of a layer containing an oxide of a metal element (e.g., aluminum) contained in the insulating layer 116 between the insulating layer 116 and the low-resistance region 108N.

[0235] When a metal oxide film containing indium is used as the semiconductor layer 108, a region where indium oxide is precipitated or a region with a high indium concentration may be formed near the interface of the low-resistance region 108N on the insulating layer 116 side. This allows the low-resistance region 108N to have extremely low resistance. The presence of such a region may be observed by an analysis method such as X-ray photoelectron spectroscopy (XPS).

[0236] Note that although the insulating layer 116 is used as a film for reducing the resistance of part of the semiconductor layer 108 in this example, the insulating layer 118 may be provided in contact with part of the semiconductor layer 108 to reduce the resistance of the part of the semiconductor layer 108. That is, a structure without providing the insulating layer 116 is also possible. In this case, an insulating film containing oxide, such as a silicon oxide film or a silicon oxynitride film, can also be used as the insulating layer 118 in contact with part of the semiconductor layer 108.

[0237] <Configuration Example 9> Fig. 18A is a top view of the transistor 100H, Fig. 18B is a cross-sectional view of the transistor 100H in the channel length direction, and Fig. 18C is a cross-sectional view of the transistor 100H in the channel length direction. Fig. 19 shows an enlarged view of a region T surrounded by a dashed line in Fig. 18B.

[0238] The transistor 100H differs from the transistor 100C shown in FIG.

[0239] The insulating layer 132 is provided to cover the top surface and side surfaces of the insulating layer 130. The insulating layer 132 has an opening 149a inside the opening 143a and an opening 149b inside the opening 143b. Furthermore, the insulating layer 132 may have a region in contact with the top surface of the semiconductor layer 108.

[0240] The conductive layer 120a and the conductive layer 120b are electrically connected to the low resistance region 108N through an opening 149a or an opening 149b provided in the insulating layer 132, respectively.

[0241] The insulating layer 132 can be formed using a material that can be used for the insulating layer 118. By providing the insulating layer 132 between the insulating layer 130 and the conductive layer 120a and the conductive layer 120b and configuring the conductive layer 120a and the conductive layer 120b to be in contact with the insulating layer 132, the adhesiveness between the conductive layer 120a and the conductive layer 120b can be improved. Note that the insulating layer 132 can also be applied to other structural examples.

[0242] Enlarged views of openings 149a, 143a, and 141a, as well as their vicinity, are shown in Fig. 20A and Fig. 20B. Fig. 20A is a top view, and Fig. 20B corresponds to a cross-sectional view taken along dashed line D1-D2 shown in Fig. 20A. Note that hatching has been omitted in Fig. 20B to avoid cluttering the drawing.

[0243] In any straight line crossing openings 149a, 143a, and 141a, bottom width 143W of opening 143a is preferably smaller than bottom width 141W of opening 141a. Also, bottom width 149W of opening 149a is preferably smaller than bottom width 143W of opening 143a.

[0244] The angle θ1, the angle θ2, and the width 151 can be determined from the above description, and therefore detailed description thereof will be omitted.

[0245] <Production method example 1> An example of a method for manufacturing a transistor of one embodiment of the present invention will be described below, taking the transistor 100C shown in FIG. 13 as an example.

[0246] Thin films (insulating films, semiconductor films, conductive films, etc.) that constitute semiconductor devices can be formed using methods such as sputtering, CVD, vacuum deposition, PLD, and ALD. CVD methods include PECVD and thermal CVD. One type of thermal CVD method is MOCVD.

[0247] Thin films (insulating films, semiconductor films, conductive films, etc.) that constitute semiconductor devices can be formed by methods such as spin coating, dipping, spray coating, inkjet printing, dispensing, screen printing, offset printing, doctor knife, slit coating, roll coating, curtain coating, and knife coating.

[0248] When processing a thin film that constitutes a semiconductor device, it can be processed using a photolithography method or the like. Alternatively, the thin film may be processed using a nanoimprint method, a sandblasting method, a lift-off method or the like. Furthermore, an island-shaped thin film may be directly formed by a film formation method using a shielding mask such as a metal mask.

[0249] There are two typical photolithography methods: One is a method in which a resist mask is formed on the thin film to be processed, the thin film is processed by etching or the like, and then the resist mask is removed. The other is a method in which a photosensitive thin film is formed, and then the thin film is exposed to light and developed to be processed into the desired shape.

[0250] In photolithography, the light used for exposure can be, for example, i-line (wavelength 365 nm), g-line (wavelength 436 nm), h-line (wavelength 405 nm), or a mixture of these. Other light sources that can be used include ultraviolet light, KrF laser light, and ArF laser light. Exposure can also be performed using immersion exposure technology. Extreme ultraviolet (EUV) light or X-rays can also be used as the light used for exposure. Instead of light used for exposure, an electron beam can also be used. Extreme ultraviolet light, X-rays, or an electron beam are preferred because they enable extremely fine processing. When exposure is performed by scanning a beam such as an electron beam, a photomask is not required.

[0251] For etching the thin film, dry etching, wet etching, sandblasting, or the like can be used.

[0252] 21A to 24C show cross sections of the transistor 100C in the channel length direction and the channel width direction at each stage of a manufacturing process.

[0253] [Formation of Conductive Layer 106] A conductive film is formed on a substrate 102 and processed by etching to form a conductive layer 106 that functions as a gate electrode (FIG. 21A).

[0254] At this time, it is preferable to process the conductive layer 106 so that the end portion thereof has a tapered shape, as shown in Fig. 21A, which can improve the step coverage of the insulating layer 103 to be formed next.

[0255] By using a conductive film containing copper as the conductive layer 106, wiring resistance can be reduced. For example, when the conductive film is applied to a large display device or a display device with high resolution, it is preferable to use a conductive film containing copper. Even when a conductive film containing copper is used for the conductive layer 106, the insulating layer 103 prevents copper from diffusing toward the semiconductor layer 108, so that a highly reliable transistor can be realized.

[0256] [Formation of insulating layer 103] Subsequently, an insulating layer 103 is formed to cover the substrate 102 and the conductive layer 106 (FIG. 21B). The insulating layer 103 can be formed using a PECVD method, an ALD method, a sputtering method, or the like.

[0257] Here, insulating films 103a and 103b are stacked to form insulating layer 103. In particular, it is preferable that each insulating film constituting insulating layer 103 be formed by the PECVD method.

[0258] The insulating film 103a can be, for example, an insulating film containing nitrogen, such as a silicon nitride film, a silicon nitride oxide film, an aluminum nitride film, or a hafnium nitride film. In particular, it is preferable to use a dense silicon nitride film formed using a PECVD apparatus as the insulating film 103a. By using such an insulating film containing nitrogen, even if the insulating film is thin, it is possible to suitably suppress diffusion of impurities from the surface on which the film is to be formed.

[0259] By using an insulating film containing nitrogen as the insulating film 103a, it is possible to prevent oxygen in the insulating film 103b from diffusing into the conductive layer 106 and the like, thereby preventing a decrease in the amount of oxygen contained in the insulating film 103b and preventing the conductive layer 106 and the like from being oxidized.

[0260] The insulating film 103b in contact with the semiconductor layer 108 is preferably formed using an insulating film containing oxide. In particular, an oxide film is preferably used for the insulating film 103b. The insulating film 103b is preferably a dense insulating film whose surface is less likely to adsorb impurities such as water. Furthermore, the insulating film 103b is preferably an insulating film with as few defects as possible and with reduced impurities including hydrogen elements.

[0261] The insulating film 103b can be, for example, an insulating film containing one or more of a silicon oxide film, a silicon oxynitride film, a silicon nitride oxide film, an aluminum oxide film, a hafnium oxide film, an yttrium oxide film, a zirconium oxide film, a gallium oxide film, a tantalum oxide film, a magnesium oxide film, a lanthanum oxide film, a cerium oxide film, and a neodymium oxide film. In particular, it is preferable to use a silicon oxide film or a silicon oxynitride film as the insulating film 103b.

[0262] The insulating film 103b preferably has a region containing oxygen in excess of the stoichiometric composition. In other words, the insulating film 103b is preferably an insulating film that can release oxygen by heating. For example, oxygen can be supplied to the insulating film 103b by forming the insulating film 103b in an oxygen-containing atmosphere, performing heat treatment on the formed insulating film 103b in an oxygen-containing atmosphere, performing plasma treatment or the like in an oxygen-containing atmosphere after the formation of the insulating film 103b, or forming an oxide film on the insulating film 103b in an oxygen-containing atmosphere. Note that in each of the above treatments for supplying oxygen, an oxidizing gas may be used instead of or in addition to oxygen. Alternatively, oxygen may be supplied to the insulating film 103b by forming an insulating film that can release oxygen by heating on the insulating film 103b and then performing heat treatment on the insulating film. Alternatively, oxygen may be supplied to the insulating film 103b by plasma ion doping or ion implantation.

[0263] Here, the insulating film 103b is preferably formed thicker than the insulating film 103a. This increases the amount of oxygen that can be released from the insulating film 103b by heating, and reduces the amount of hydrogen released from the insulating film 103a. This makes it possible to supply a large amount of oxygen while suppressing the supply of hydrogen to the semiconductor layer 108, thereby achieving a highly reliable transistor. The thickness of the insulating film 103b is preferably from 2 to 50 times, preferably from 3 to 30 times, more preferably from 5 to 20 times, and even more preferably from 7 to 15 times, the thickness of the insulating film 103a.

[0264] When the metal oxide film to be the semiconductor layer 108 is formed by a sputtering method in an oxygen-containing atmosphere, oxygen can be supplied to the insulating film 103b. After the metal oxide film to be the semiconductor layer is formed, heat treatment may be performed. By the heat treatment, oxygen in the insulating film 103b can be more effectively supplied to the metal oxide film, and oxygen vacancies in the metal oxide film can be reduced.

[0265] When the insulating layer 103 is formed using a PECVD apparatus, after the insulating layer 103 is formed, plasma treatment may be performed in a treatment chamber at a lower power than that used for forming the insulating layer 103 to remove static electricity accumulated on the substrate 102. This plasma treatment can be called a static elimination treatment. The static elimination treatment can be performed in an atmosphere containing one or more of nitrogen, nitrous oxide, nitrogen dioxide, hydrogen, ammonia, and a rare gas. For example, an argon gas atmosphere can be suitably used for the static elimination treatment. Alternatively, a mixed gas containing the above-mentioned gases may be used for the static elimination treatment.

[0266] After the insulating layer 103 is formed, the surface of the insulating layer 103 may be removed. The above-described static elimination treatment may cause defects on the surface of the insulating layer 103. If defects exist in the insulating layer 103, which functions as the first gate insulating layer of the transistor 100C, they may become carrier trap sites, which may deteriorate the reliability of the transistor 100C. Therefore, by removing the surface of the insulating layer 103 having defects, the reliability of the transistor 100C can be improved. To remove the surface of the insulating layer 103, for example, cleaning with a cleaning solution containing hydrofluoric acid can be used.

[0267] Heat treatment may be performed after the insulating layer 103 is formed. The heat treatment can reduce defects in the insulating layer 103. Furthermore, impurities containing hydrogen elements in the insulating layer 103 can be reduced. Examples of impurities containing hydrogen elements include hydrogen and water.

[0268] The temperature of the heat treatment is preferably 150°C or higher and lower than the strain point of the substrate, more preferably 250°C or higher and 450°C or lower, and further preferably 300°C or higher and 450°C or lower. The heat treatment can be performed in an atmosphere containing one or more of a rare gas, nitrogen, or oxygen. As the nitrogen-containing atmosphere or the oxygen-containing atmosphere, dry air (CDA: Clean Dry Air) may be used. Note that the atmosphere preferably contains as little hydrogen, water, or the like as possible. As the atmosphere, it is preferable to use a high-purity gas with a dew point of -60°C or lower, preferably -100°C or lower. Using an atmosphere with as little hydrogen, water, or the like as possible can prevent hydrogen, water, or the like from being taken into the insulating layer 103. The heat treatment can be performed in an oven, a rapid thermal annealing (RTA) apparatus, or the like. Using an RTA apparatus can shorten the heat treatment time.

[0269] The heat treatment may be performed after the surface of the insulating layer 103 is removed.

[0270] Subsequently, a process for supplying oxygen to the insulating layer 103 may be performed. The oxygen supply process supplies oxygen radicals, oxygen atoms, oxygen atomic ions, oxygen molecular ions, or the like to the insulating layer 103 by ion doping, ion implantation, plasma treatment, or the like. Alternatively, a film that suppresses oxygen desorption may be formed over the insulating layer 103, and then oxygen may be added to the insulating layer 103 through the film. The film is preferably removed after oxygen is added. The film that suppresses oxygen desorption may be a conductive film or a semiconductor film containing one or more of indium, zinc, gallium, tin, aluminum, chromium, tantalum, titanium, molybdenum, nickel, iron, cobalt, or tungsten.

[0271] [Formation of Semiconductor Layer 108] Subsequently, a metal oxide film 108f is formed on the insulating layer 103 (FIG. 21D).

[0272] The metal oxide film 108f is preferably formed by sputtering using a metal oxide target.

[0273] The metal oxide film 108f is preferably a dense film with as few defects as possible. Furthermore, the metal oxide film 108f is preferably a high-purity film in which impurities including hydrogen are reduced as much as possible. In particular, it is preferable to use a crystalline metal oxide film as the metal oxide film 108f.

[0274] It is preferable to use oxygen gas when forming the metal oxide film 108f. FIG. 21C shows a schematic cross-sectional view of the inside of a sputtering apparatus when forming the metal oxide film 108f on the insulating layer 103. FIG. 21C also shows a target 193 installed inside the sputtering apparatus and a plasma 194 formed below the target 193. By using oxygen gas when forming the metal oxide film 108f, oxygen can be suitably supplied into the insulating layer 103. For example, when an oxide is used for the insulating film 103a, oxygen can be suitably supplied into the insulating film 103a. Note that in FIG. 21C, the oxygen supplied to the insulating layer 103 is indicated by an arrow.

[0275] By supplying oxygen to the insulating layer 103, oxygen is supplied to the semiconductor layer 108 in a later process, and oxygen vacancies V O , and V O H can be reduced.

[0276] When forming a metal oxide film, oxygen gas may be mixed with an inert gas (e.g., helium gas, argon gas, xenon gas, etc.). Note that the higher the ratio of oxygen gas to the total deposition gas when forming the metal oxide film (hereinafter also referred to as the oxygen flow ratio), the higher the crystallinity of the metal oxide film can be, and a highly reliable transistor can be realized. On the other hand, the lower the oxygen flow ratio, the lower the crystallinity of the metal oxide film can be, and a transistor with a higher on-state current can be obtained.

[0277] When forming a metal oxide film, the higher the substrate temperature, the higher the crystallinity and density of the metal oxide film, whereas the lower the substrate temperature, the lower the crystallinity and electrical conductivity of the metal oxide film.

[0278] The deposition conditions for the metal oxide film are a substrate temperature of room temperature or higher and 250° C. or lower, preferably room temperature or higher and 200° C. or lower, and more preferably room temperature or higher and 140° C. or lower. For example, a substrate temperature of room temperature or higher and lower than 140° C. is preferred because it increases productivity. Furthermore, by depositing a metal oxide film at room temperature or without heating the substrate, the crystallinity can be reduced.

[0279] Before forming the metal oxide film 108f, it is preferable to perform at least one of a treatment for desorbing water, hydrogen, organic substances, and the like adsorbed on the surface of the insulating layer 103 and a treatment for supplying oxygen into the insulating layer 103. For example, heat treatment can be performed at a temperature of 70°C to 200°C in a reduced-pressure atmosphere. Alternatively, plasma treatment can be performed in an oxygen-containing atmosphere. Alternatively, oxygen can be supplied to the insulating layer 103 by plasma treatment in an atmosphere containing an oxidizing gas such as nitrous oxide (NO). The plasma treatment containing nitrous oxide gas can supply oxygen while suitably removing organic substances on the surface of the insulating layer 103. After such a treatment, it is preferable to continuously form the metal oxide film 108f without exposing the surface of the insulating layer 103 to the air.

[0280] In addition, when the semiconductor layer 108 has a stacked structure in which a plurality of semiconductor layers are stacked, it is preferable to deposit a metal oxide film first and then deposit a subsequent metal oxide film without exposing the surface of the first metal oxide film to the air.

[0281] Subsequently, the metal oxide film 108f is partially etched to form an island-shaped semiconductor layer 108 (FIG. 22A).

[0282] The metal oxide film 108f may be processed by wet etching, dry etching, or both. At this time, a part of the insulating layer 103 that does not overlap with the semiconductor layer 108 may be etched and thinned. For example, the insulating film 103b of the insulating layer 103 may be removed by etching, and the surface of the insulating film 103a may be exposed.

[0283] Here, heat treatment is preferably performed after the metal oxide film 108f is formed or after the metal oxide film 108f is processed into the semiconductor layer 108. The heat treatment can remove hydrogen or water contained in or adsorbed on the surface of the metal oxide film 108f or the semiconductor layer 108. Furthermore, the heat treatment may improve the film quality of the metal oxide film 108f or the semiconductor layer 108 (for example, reduce defects or improve crystallinity).

[0284] The heat treatment can also supply oxygen from the insulating layer 103 to the metal oxide film 108f or the semiconductor layer 108. In this case, it is more preferable to perform the heat treatment before processing into the semiconductor layer 108.

[0285] The temperature of the heat treatment can typically be 150°C or higher and lower than the strain point of the substrate, or 200°C or higher and 500°C or lower, or 250°C or higher and 450°C or lower, or 300°C or higher and 450°C or lower.

[0286] The heat treatment can be performed in an atmosphere containing a rare gas or nitrogen. Alternatively, after heating in the atmosphere, heating can be performed in an atmosphere containing oxygen. Alternatively, heating can be performed in a dry air atmosphere. Note that it is preferable that the atmosphere for the heat treatment contains as little hydrogen, water, or the like as possible. The heat treatment can be performed using an electric furnace, an RTA apparatus, or the like. Using an RTA apparatus can shorten the heat treatment time.

[0287] Note that this heat treatment does not have to be performed if it is not necessary. Alternatively, the heat treatment may be omitted here and may be combined with a heat treatment performed in a later step. Furthermore, there are cases where a high-temperature treatment in a later step (e.g., a film formation step) can also serve as the heat treatment.

[0288] [Formation of insulating layer 110] Subsequently, an insulating layer 110 is formed to cover the insulating layer 103 and the semiconductor layer 108 (FIG. 22B).

[0289] Here, the insulating layer 110 is formed by stacking an insulating film 110a, an insulating film 110b, and an insulating film 110c.

[0290] In particular, it is preferable to form the insulating films constituting the insulating layer 110 by the PECVD method. The methods for forming the layers constituting the insulating layer 110 can be the same as those described in Configuration Example 3 above.

[0291] Before the insulating layer 110 is formed, it is preferable to perform plasma treatment on the surface of the semiconductor layer 108. The plasma treatment can reduce impurities such as water adsorbed to the surface of the semiconductor layer 108. Therefore, impurities at the interface between the semiconductor layer 108 and the insulating layer 110 can be reduced, thereby realizing a highly reliable transistor. This is particularly suitable when the surface of the semiconductor layer 108 is exposed to the air between the formation of the semiconductor layer 108 and the formation of the insulating layer 110. The plasma treatment can be performed in an atmosphere of oxygen, ozone, nitrogen, nitrous oxide, argon, or the like, for example. Furthermore, it is preferable to perform the plasma treatment and the formation of the insulating layer 110 successively without exposure to the air.

[0292] Here, heat treatment is preferably performed after the insulating layer 110 is formed. The heat treatment can remove hydrogen or water contained in or adsorbed to the surface of the insulating layer 110. Furthermore, defects in the insulating layer 110 can be reduced.

[0293] The conditions for the heat treatment may be as described above.

[0294] Note that this heat treatment does not have to be performed if it is not necessary. Alternatively, the heat treatment may be omitted here and may be combined with a heat treatment performed in a later step. Furthermore, there are cases where a high-temperature treatment in a later step (e.g., a film formation step) can also serve as the heat treatment.

[0295] [Formation of opening 142] Subsequently, the insulating layer 110 and a portion of the insulating layer 103 are etched to form an opening 142 that reaches the conductive layer 106 (FIG. 22C). This allows the conductive layer 106 to be electrically connected to the conductive layer 112, which will be formed later, through the opening 142.

[0296] [Formation of Conductive Layer 112] Subsequently, a conductive film 112f that will become the conductive layer 112 is formed on the insulating layer 110 (FIG. 22D).

[0297] The conductive film 112f is preferably formed using a low-resistance metal or alloy material. Furthermore, the conductive film 112f is preferably formed using a material that does not easily release hydrogen and from which hydrogen does not easily diffuse. Furthermore, the conductive film 112f is preferably formed using a material that does not easily oxidize.

[0298] For example, the conductive film 112f is preferably formed by a sputtering method using a sputtering target containing a metal or an alloy.

[0299] For example, the conductive film 112f is preferably a stacked film in which a conductive film that is resistant to oxidation and through which hydrogen does not easily diffuse and a conductive film with low resistance are stacked.

[0300] Subsequently, the conductive film 112f is partially etched to form the conductive layer 112 (FIG. 23A). The conductive film 112f may be processed by either wet etching or dry etching, or both.

[0301] In this way, by forming a structure in which the top surface and side surface of the semiconductor layer 108 and the insulating layer 103 are covered without etching the insulating layer 110, it is possible to prevent the semiconductor layer 108 and the insulating layer 103 from being partially etched and thinned when etching the conductive film 112f and the like.

[0302] [Fueling of impurity elements] Next, using the conductive layer 112 as a mask, a process of supplying (also referred to as adding or injecting) the impurity element 140 to the semiconductor layer 108 through the insulating layer 110 is performed ( FIG. 23B ). As a result, a low-resistance region 108N can be formed in a region of the semiconductor layer 108 that is not covered with the conductive layer 112. At this time, it is preferable to determine conditions for the process of supplying the impurity element 140 in consideration of the material and thickness of the conductive layer 112 and the like that serve as a mask so that the impurity element 140 is not supplied to a region of the semiconductor layer 108 that overlaps with the conductive layer 112 as much as possible. As a result, a channel formation region with a sufficiently reduced impurity concentration can be formed in the region of the semiconductor layer 108 that overlaps with the conductive layer 112.

[0303] The impurity element 140 can be preferably supplied by plasma ion doping or ion implantation. These methods allow the concentration profile in the depth direction to be controlled with high precision by adjusting the ion acceleration voltage, dose, etc. The use of plasma ion doping can increase productivity. Furthermore, the use of ion implantation using mass separation can increase the purity of the supplied impurity element.

[0304] In the supplying process of the impurity element 140, it is preferable to control the processing conditions so that the concentration is highest at the interface between the semiconductor layer 108 and the insulating layer 110, or in a portion close to the interface in the semiconductor layer 108, or in a portion close to the interface in the insulating layer 110. This allows the impurity element 140 to be supplied at an optimum concentration to both the semiconductor layer 108 and the insulating layer 110 in a single process.

[0305] Examples of the impurity element 140 include hydrogen, boron, carbon, nitrogen, fluorine, phosphorus, sulfur, arsenic, aluminum, magnesium, silicon, and rare gases. Typical examples of rare gases include helium, neon, argon, krypton, and xenon. In particular, it is preferable to use boron, phosphorus, aluminum, magnesium, or silicon.

[0306] The source gas for the impurity element 140 can be a gas containing the above impurity element. When supplying boron, one or more of B2H6 gas and BF3 gas can be typically used. When supplying phosphorus, PH3 gas can be typically used. Alternatively, a mixed gas obtained by diluting these source gases with a rare gas can be used.

[0307] Other usable source gases include CH4, N2, NH3, AlH3, AlCl3, SiH4, Si2H6, F2, HF, H2, (C5H5)2Mg, and rare gases. The ion source is not limited to gas, and a solid or liquid vaporized by heating may also be used.

[0308] The addition of the impurity element 140 can be controlled by setting conditions such as acceleration voltage and dose amount in consideration of the composition, density, thickness, and the like of the insulating layer 110 and the semiconductor layer 108 .

[0309] For example, when adding boron by ion implantation or plasma ion doping, the acceleration voltage can be set to, for example, 5 kV to 100 kV, preferably 7 kV to 70 kV, and more preferably 10 kV to 50 kV. The dose can be, for example, 1×10 13 ions / cm 2 More than 1×10 17 ions / cm 2 Less than 1 × 10 14 ions / cm 2 5x10 or more 16 ions / cm 2 Less than or equal to 1×10 15 ions / cm 2That's it, 3 x 10 16 ions / cm 2 The range can be as follows:

[0310] When phosphorus ions are added by ion implantation or plasma ion doping, the acceleration voltage can be set to, for example, 10 kV or more and 100 kV or less, preferably 30 kV or more and 90 kV or less, and more preferably 40 kV or more and 80 kV or less. The dose can be set to, for example, 1×10 13 ions / cm 2 More than 1×10 17 ions / cm 2 Less than 1 × 10 14 ions / cm 2 5x10 or more 16 ions / cm 2 Less than or equal to 1×10 15 ions / cm 2 3x10 or more 16 ions / cm 2 The range can be as follows:

[0311] The method for supplying the impurity element 140 is not limited to this, and may be, for example, a plasma treatment or a treatment using thermal diffusion by heating. In the case of the plasma treatment, the impurity element can be added by generating plasma in a gas atmosphere containing the impurity element to be added and performing the plasma treatment. The apparatus for generating the plasma may be a dry etching apparatus, an ashing apparatus, a plasma CVD apparatus, a high-density plasma CVD apparatus, or the like.

[0312] For example, by performing plasma treatment in an atmosphere containing hydrogen gas using a plasma CVD apparatus, hydrogen can be supplied as the impurity element 140 to a region of the semiconductor layer 108 that does not overlap with the conductive layer 112. Furthermore, by using a plasma CVD apparatus for the supplying treatment of the impurity element 140 and for forming the insulating layer 118, the supplying treatment of the impurity element 140 and the formation of the insulating layer 118 can be performed successively within the apparatus, thereby improving productivity.

[0313] In one embodiment of the present invention, the impurity element 140 can be supplied to the semiconductor layer 108 through the insulating layer 110. Therefore, even when the semiconductor layer 108 has crystallinity, damage to the semiconductor layer 108 when the impurity element 140 is supplied can be reduced, and loss of crystallinity can be suppressed. Therefore, this is preferable in cases where electrical resistance increases due to a decrease in crystallinity.

[0314] [Formation of insulating layer 118] Subsequently, an insulating layer 118 is formed to cover the insulating layer 110 and the conductive layer 112 (FIG. 23C).

[0315] If the deposition temperature of the insulating layer 118 is too high, impurities contained in the low-resistance region 108N and the like may diffuse into the peripheral portion including the channel formation region of the semiconductor layer 108, and the electrical resistance of the low-resistance region 108N may increase. Therefore, the deposition temperature of the insulating layer 118 may be determined taking these factors into consideration.

[0316] For example, the deposition temperature of the insulating layer 118 is preferably 150° C. to 400° C., preferably 180° C. to 360° C., more preferably 200° C. to 250° C. By depositing the insulating layer 118 at a low temperature, good electrical characteristics can be imparted even to a transistor with a short channel length.

[0317] After the insulating layer 118 is formed, heat treatment may be performed. The heat treatment may make the low-resistance region 108N more stable and low-resistance. For example, the heat treatment may cause the impurity element 140 to diffuse appropriately and become locally uniform, thereby forming the low-resistance region 108N having an ideal impurity element concentration gradient. Note that if the temperature of the heat treatment is too high (for example, 500° C. or higher), the impurity element 140 may diffuse into the channel formation region, which may cause deterioration in the electrical characteristics and reliability of the transistor.

[0318] The conditions for the heat treatment may be as described above.

[0319] Note that this heat treatment does not have to be performed if it is not necessary. Alternatively, the heat treatment may be omitted here and may be combined with a heat treatment performed in a later step. Furthermore, if there is a high-temperature treatment (e.g., a film formation step) in a later step, this heat treatment may be combined with the heat treatment.

[0320] [Formation of openings 141a and 141b] Subsequently, the insulating layer 118 and the insulating layer 110 are partially etched to form openings 141a and 141b that reach the low-resistance region 108N (FIG. 24A).

[0321] [Formation of insulating layer 130] Subsequently, an insulating layer 130 is formed on the insulating layer 118 so as to cover the openings 141a and 141b (FIG. 24B).

[0322] The insulating layer 130 has an opening 143a and an opening 143b, and the insulating layer 130 is formed so that the opening 143a is located inside the opening 141a and the opening 143b is located inside the opening 141b.

[0323] For example, when a photosensitive organic material is used for the insulating layer 130, a composition containing the organic material is applied by spin coating, and then selectively exposed and developed to form the insulating layer 130. As other formation methods, one or more of a sputtering method, a vapor deposition method, a droplet discharge method (inkjet method), screen printing, and offset printing may be used.

[0324] Here, heat treatment is preferably performed after the insulating layer 130 is formed. When an organic material is used for the insulating layer 130, the organic material can be cured by the heat treatment.

[0325] The heat treatment temperature is preferably lower than the heat resistance temperature of the organic material. For example, the heat treatment temperature is preferably 150°C or higher and 350°C or lower, more preferably 180°C or higher and 300°C or lower, even more preferably 200°C or higher and 270°C or lower, even more preferably 200°C or higher and 250°C or lower, and even more preferably 220°C or higher and 250°C or lower.

[0326] The heat treatment can be performed in an atmosphere containing a rare gas or nitrogen. Alternatively, the heat treatment may be performed in a dry air atmosphere. Note that it is preferable that the heat treatment atmosphere does not contain hydrogen, water, or the like as much as possible. The heat treatment can be performed using an electric furnace, an RTA apparatus, or the like.

[0327] [Formation of Conductive Layer 120a and Conductive Layer 120b] Subsequently, a conductive film is formed on the insulating layer 130 so as to cover the openings 143a and 143b, and the conductive film is processed into a desired shape to form the conductive layers 120a and 120b (FIG. 24C).

[0328] Through the above steps, the transistor 100A can be manufactured. For example, when the transistor 100C is used in a pixel of a display device, a subsequent step of forming one or more of a protective insulating layer, a planarizing layer, a pixel electrode, and a wiring may be added.

[0329] This concludes the description of Example 1 of the manufacturing method.

[0330] Note that when manufacturing the transistor 100 illustrated in Configuration Example 1, the steps of forming the conductive layer 106, the insulating layer 103, and the opening 142 in Manufacturing Method Example 1 can be omitted. The transistor 100 and the transistor 100C can be formed over the same substrate through the same steps.

[0331] <Production method example 2> 14A and 14B, a manufacturing method of the transistor 100D will be described. Note that a description of the same parts as those described above will be omitted, and only different parts will be described.

[0332] Note that explanations of parts that overlap with Preparation Method Example 1 will be omitted, and only differences will be explained in detail.

[0333] First, the process is performed up to the formation of the insulating layer 110 (FIG. 22B) in the same manner as in Fabrication Method Example 1. Since the above description can be referred to for the process up to the formation of the insulating layer 110, detailed description will be omitted.

[0334] [Formation of Metal Oxide Film 114f] Subsequently, a metal oxide film 114f is formed on the insulating layer 110 (FIG. 25B).

[0335] The metal oxide film 114f is preferably formed in, for example, an atmosphere containing oxygen. In particular, it is preferably formed by sputtering in an atmosphere containing oxygen. FIG. 25A shows a cross-sectional view of the inside of a sputtering apparatus when the metal oxide film 114f is formed on the insulating layer 110. FIG. 25A also shows a target 195 installed inside the sputtering apparatus and a plasma 196 formed below the target 195. By using oxygen gas when forming the metal oxide film 114f, oxygen can be suitably supplied into the insulating layer 110. Note that in FIG. 25A, the oxygen being supplied to the insulating layer 110 is indicated by an arrow.

[0336] By supplying oxygen to the insulating layer 110, oxygen is supplied to the semiconductor layer 108 in a later process, and oxygen vacancies V O , and V O H can be reduced.

[0337] When the metal oxide film 114f is formed by a sputtering method using an oxide target containing the same metal oxide as that of the semiconductor layer 108, the above description can be used.

[0338] For example, the metal oxide film 114f may be formed by reactive sputtering using oxygen as a deposition gas and a metal target. When aluminum is used as the metal target, an aluminum oxide film can be formed.

[0339] During deposition of the metal oxide film 114f, the higher the ratio of the oxygen flow rate to the total flow rate of the deposition gas introduced into the deposition chamber of the deposition apparatus (oxygen flow rate ratio) or the higher the oxygen partial pressure in the deposition chamber, the more oxygen can be supplied to the insulating layer 110. The oxygen flow rate ratio or oxygen partial pressure is, for example, 50% to 100%, preferably 65% ​​to 100%, more preferably 80% to 100%, and even more preferably 90% to 100%. In particular, it is preferable to set the oxygen flow rate ratio to 100% and to set the oxygen partial pressure in the deposition chamber as close to 100% as possible.

[0340] In this way, by forming the metal oxide film 114f by a sputtering method in an atmosphere containing oxygen, oxygen can be supplied to the insulating layer 110 during the formation of the metal oxide film 114f, and oxygen can be prevented from being released from the insulating layer 110. As a result, a large amount of oxygen can be trapped in the insulating layer 110.

[0341] After the metal oxide film 114f is formed, heat treatment is preferably performed. By the heat treatment, oxygen contained in the insulating layer 110 can be supplied to the semiconductor layer 108. By performing heat treatment while the insulating layer 110 is covered with the metal oxide film 114f, oxygen is prevented from being released from the insulating layer 110 to the outside, and a large amount of oxygen can be supplied to the semiconductor layer 108. As a result, oxygen vacancies in the semiconductor layer 108 can be reduced, and a highly reliable transistor can be realized.

[0342] The conditions for the heat treatment may be as described above.

[0343] Note that this heat treatment does not have to be performed if it is not necessary. Alternatively, the heat treatment may be omitted here and may be combined with a heat treatment performed in a later step. Furthermore, there are cases where a high-temperature treatment in a later step (e.g., a film formation step) can also serve as the heat treatment.

[0344] After the metal oxide film 114f is formed or after the heat treatment, the metal oxide film 114f may be removed.

[0345] [Formation of opening 142] Subsequently, the metal oxide film 114f, the insulating layer 110, and a portion of the insulating layer 103 are etched to form an opening 142 that reaches the conductive layer 106 (FIG. 25C).

[0346] [Formation of Conductive Layer 112] Subsequently, a conductive film 112f that will become the conductive layer 112 is formed on the metal oxide film 114f (FIG. 25D). The above description can be referred to for the conductive film 112f, and therefore a detailed description thereof will be omitted.

[0347] Next, the conductive film 112f and the metal oxide film 114f are partly etched to form the conductive layer 112 and the metal oxide layer 114 (FIG. 26A). The conductive film 112f and the metal oxide film 114f are preferably processed using the same resist mask. Alternatively, the metal oxide film 114f may be etched using the etched conductive layer 112 as a hard mask.

[0348] It is particularly preferable to use a wet etching method for etching the conductive film 112f and the metal oxide film 114f.

[0349] This allows the formation of the conductive layer 112 and the metal oxide layer 114 whose top surface shapes are roughly the same.

[0350] [Fueling of impurity elements] Next, using the conductive layer 112 as a mask, a process of supplying (also referred to as adding or injecting) the impurity element 140 to the semiconductor layer 108 through the insulating layer 110 is performed (FIG. 26B). This allows a low-resistance region 108N to be formed in a region of the semiconductor layer 108 that is not covered with the conductive layer 112. The above description can be referred to for the process of supplying the impurity element, and therefore detailed description thereof will be omitted.

[0351] [Formation of insulating layer 118] Subsequently, an insulating layer 118 is formed to cover the insulating layer 110, the metal oxide layer 114, and the conductive layer 112 (FIG. 26C). The formation of the insulating layer 118 can be referred to in the above description, and therefore a detailed description thereof will be omitted.

[0352] Heat treatment may be performed after the insulating layer 118 is formed. The above description can be referred to for the heat treatment, and therefore detailed description thereof will be omitted.

[0353] [Formation of openings 141a and 141b] Subsequently, the insulating layer 118 and the insulating layer 110 are partially etched to form openings 141a and 141b that reach the low-resistance region 108N (FIG. 27A).

[0354] [Formation of insulating layer 130] Subsequently, insulating layer 130 is formed on insulating layer 118 so as to cover openings 141a and 141b (FIG. 27B). For the formation of insulating layer 130, the above description can be referred to, and therefore a detailed description will be omitted.

[0355] [Formation of Conductive Layer 120a and Conductive Layer 120b] Subsequently, a conductive film is formed on the insulating layer 130 so as to cover the openings 143a and 143b, and the conductive film is processed into a desired shape to form the conductive layers 120a and 120b (FIG. 27C).

[0356] Through the above steps, the transistor 100D can be manufactured.

[0357] <Production method example 3> 17A and 17B, a method for manufacturing the transistor 100G will be described. Note that a description of the same parts as those described above will be omitted, and only differences will be described.

[0358] First, the conductive film 112f is formed (FIG. 22D) in the same manner as in Fabrication Method Example 1. Since the above description can be referred to for the formation of the conductive film 112f, detailed description will be omitted.

[0359] Next, a portion of the conductive film 112f is etched to form a conductive layer 112, and further a portion of the insulating layer 110 is etched to expose a portion of the semiconductor layer 108 (FIG. 28A). This allows the formation of the conductive layer 112 and the insulating layer 110 whose top surface shapes are approximately the same.

[0360] The insulating layer 110 is preferably etched using a resist mask for etching the conductive film 112f. The insulating layer 110 may be etched in the same step as the etching of the conductive film 112f, or may be etched by a different etching method after the etching of the conductive film 112f.

[0361] For example, the conductive film 112f can be etched by wet etching, and then the insulating layer 110 can be etched by dry etching. In particular, when the conductive film 112f is processed by dry etching, reaction products containing metal are generated, which may contaminate the semiconductor layer 108 or the insulating layer 110. Therefore, it is preferable to process the conductive film 112f by wet etching before etching the insulating layer 110.

[0362] Depending on the etching conditions, the ends of the conductive layer 112 and the insulating layer 110 may not coincide with each other. For example, the end of the conductive layer 112 may be located inside or outside the end of the insulating layer 110.

[0363] When the insulating layer 110 is etched, a part of the exposed semiconductor layer 108 may be etched and thinned. At this time, the semiconductor layer 108 may have a shape in which the thickness of the low-resistance region 108N is thinner than the thickness of the channel formation region.

[0364] When the insulating layer 110 is etched, a part of the insulating layer 103 that is not covered by the semiconductor layer 108 may be etched and thinned. For example, the insulating film 103b in the region that is not covered by the semiconductor layer 108 may disappear.

[0365] [Formation of insulating layers 116 and 118] Next, insulating layer 116 is formed in contact with the exposed portion of semiconductor layer 108, followed by forming insulating layer 118 (FIG. 28B). By forming insulating layer 116, the exposed portion of semiconductor layer 108 becomes low-resistance, and low-resistance region 108N is formed.

[0366] The insulating layer 116 can be an insulating film that releases an impurity element that has a function of reducing the resistance of the semiconductor layer 108. In particular, it is preferable to use an inorganic insulating film that can release hydrogen, such as a silicon nitride film, a silicon nitride oxide film, or a silicon oxynitride film. In this case, it is preferable to use a plasma CVD method using a deposition gas containing hydrogen, because hydrogen can be supplied to the semiconductor layer 108 even during the formation of the insulating layer 116.

[0367] When silicon nitride is used for the insulating layer 116, it is preferable to form the insulating layer 116 by a PECVD method using a mixed gas containing a silicon-containing gas, such as silane, and a nitrogen-containing gas as a deposition gas. In this case, it is preferable that the silicon nitride film to be formed contains hydrogen. This makes it easy to reduce the resistance of part of the semiconductor layer 108 by diffusing the hydrogen in the insulating layer 116 into the semiconductor layer 108. Note that examples of the nitrogen-containing gas include ammonia and dinitrogen monoxide.

[0368] The insulating layer 116 can also be an insulating film that has a function of generating oxygen vacancies in the semiconductor layer 108. In particular, it is preferable to use an insulating film containing a metal nitride. For example, it is preferable to form the insulating layer 116 by a reactive sputtering method using a sputtering target containing a metal and a mixed gas of nitrogen gas and a diluent gas such as a rare gas as a deposition gas. This makes it easy to control the film quality of the insulating layer 116 by controlling the flow rate ratio of the deposition gas.

[0369] When an aluminum nitride film formed by reactive sputtering using an aluminum target is used for the insulating layer 116, the flow rate of nitrogen gas relative to the total flow rate of the film formation gas is preferably 30% or more and 100% or less, more preferably 40% or more and 100% or less, and even more preferably 50% or more and 100% or less.

[0370] Here, the insulating layers 116 and 118 are preferably formed in succession without exposure to the air.

[0371] Note that when the insulating layer 118 is provided in contact with the semiconductor layer 108, the step of forming the insulating layer 116 may be omitted.

[0372] Heat treatment may be performed after the insulating layer 116 or the insulating layer 118 is formed. Heat treatment can promote the reduction in resistance of the low-resistance region 108N.

[0373] The conditions for the heat treatment may be as described above.

[0374] Note that this heat treatment does not have to be performed if it is not necessary. Alternatively, the heat treatment may be omitted here and may be combined with a heat treatment performed in a later step. Furthermore, there are cases where a high-temperature treatment in a later step (e.g., a film formation step) can also serve as the heat treatment.

[0375] [Formation of openings 141a and 141b] Subsequently, openings 141a and 141b are formed in the insulating layer 118 and the insulating layer 116, respectively, reaching the low-resistance region 108N (FIG. 28C).

[0376] [Formation of insulating layer 130] Subsequently, insulating layer 130 is formed on insulating layer 118 so as to cover openings 141a and 141b (FIG. 29A). For the formation of insulating layer 130, the above description can be referred to, and therefore a detailed description will be omitted.

[0377] [Formation of Conductive Layer 120a and Conductive Layer 120b] Subsequently, a conductive film is formed on the insulating layer 130 so as to cover the openings 143a and 143b, and the conductive film is processed into a desired shape to form the conductive layers 120a and 120b (FIG. 29B).

[0378] Through the above steps, the transistor 100G can be manufactured.

[0379] Note that the transistor 100E shown in FIGS. 15A and 15B can be manufactured by omitting the formation of the insulating layer 116.

[0380] <Production Method Example 4> A method for manufacturing the transistor 100F shown in Fig. 16 will be described below. Note that descriptions of parts that overlap with those described above will be omitted, and only differences will be described.

[0381] First, the conductive film 112f is formed (FIG. 22D) in the same manner as in Fabrication Method Example 3. Since the above description can be referred to for the formation of the conductive film 112f, detailed description will be omitted.

[0382] [Formation of insulating layer 110 and conductive layer 112] Subsequently, a resist mask 115 is formed over the conductive film 112f (FIG. 30A). After that, the conductive film 112f is removed in a region not covered with the resist mask 115, and a conductive layer 112 is formed (FIG. 30B).

[0383] When the conductive layer 112 is formed, the conductive layer 112 is processed so that an edge of the conductive layer 112 is positioned inside the outline of the resist mask 115. A wet etching method can be suitably used to form the conductive layer 112. For example, an etchant containing hydrogen peroxide can be used for the wet etching method. For example, an etchant containing one or more of phosphoric acid, acetic acid, nitric acid, hydrochloric acid, and sulfuric acid can be used. In particular, when a material containing copper is used for the conductive layer 112, an etchant containing phosphoric acid, acetic acid, and nitric acid can be suitably used. The width of the region 108L can be controlled by adjusting the etching time.

[0384] The conductive layer 112 may be formed by etching the conductive film 112f by anisotropic etching and then etching the side surfaces of the conductive film 112f by isotropic etching to recess the end faces (also referred to as side etching). This allows the conductive layer 112 to be formed on the inner side of the insulating layer 110 in a plan view.

[0385] Subsequently, the insulating layer 110 in the region not covered with the resist mask 115 is removed to form the insulating layer 110 (FIG. 30C). To form the insulating layer 110, either a wet etching method or a dry etching method, or both, can be used. Note that the insulating layer 110 may be formed after removing the resist mask 115, but by leaving the resist mask 115, the thickness of the conductive layer 112 can be prevented from becoming thin.

[0386] After the insulating layer 110 is formed, the resist mask 115 is removed.

[0387] [Plasma Treatment] Subsequently, plasma treatment may be performed. By the plasma treatment, oxygen vacancies V are formed in the semiconductor layer 108 in the region that does not overlap with the conductive layer 112. O can be formed.

[0388] The plasma treatment can be performed in an atmosphere containing one or more of nitrogen, hydrogen, and rare gases. For example, an argon gas atmosphere can be suitably used for the plasma treatment. Alternatively, the plasma treatment can be performed in a mixed gas containing the above-mentioned gases. For example, a mixed gas atmosphere of argon gas and nitrogen gas can be suitably used for the plasma treatment.

[0389] Oxygen vacancies V formed in the semiconductor layer 108 O is V due to hydrogen in the semiconductor layer 108. O H, which increases the carrier concentration of the semiconductor layer 108 in the region that does not overlap with the conductive layer 112. In other words, by performing the plasma treatment, it is possible to lower the resistance of the region that becomes the region 108L and the low-resistance region 108N (see FIG. 16B).

[0390] Since the region 108L is subjected to plasma treatment via the insulating layer 110, the oxygen vacancies V formed are smaller than those in the low-resistance region 108N. O Therefore, the region 108L has a carrier concentration that is the same as or lower than that of the low-resistance region 108N.

[0391] When the insulating layer 118 is formed using a PECVD apparatus, the plasma treatment can be performed using the same apparatus. Furthermore, the plasma treatment and the formation of the insulating layer 118 can be performed successively in the treatment chamber in which the insulating layer 118 is formed.

[0392] Subsequently, the insulating layer 118 is formed. The process after the formation of the insulating layer 118 can be referred to in the above-described Manufacturing Method Example 3, and therefore detailed description thereof will be omitted.

[0393] Through the above steps, the transistor 100F can be manufactured.

[0394] <Production method example 5> 18A to 18C, a method for manufacturing the transistor 100H will be described. Note that descriptions of parts that overlap with those described above will be omitted, and only differences will be described.

[0395] First, the process is performed up to forming the insulating layer 130 (FIG. 24B) in the same manner as in Fabrication Method Example 1. Since the above description can be referred to for the process up to forming the insulating layer 130, detailed description will be omitted.

[0396] [Formation of insulating layer 132] Subsequently, insulating layer 132 is formed on insulating layer 118 so as to cover openings 143a and 143b (FIG. 31A).

[0397] The film formation temperature of the insulating layer 132 is preferably lower than the heat resistance temperature of the organic material. For example, the heat treatment temperature is preferably 150°C or higher and 350°C or lower, more preferably 180°C or higher and 300°C or lower, even more preferably 200°C or higher and 270°C or lower, even more preferably 200°C or higher and 250°C or lower, and even more preferably 220°C or higher and 250°C or lower.

[0398] [Formation of openings 149a and 149b] Subsequently, openings 149a and 149b are formed in the insulating layer 132, reaching the low-resistance region 108N (FIG. 31B).

[0399] [Formation of Conductive Layer 120a and Conductive Layer 120b] Subsequently, a conductive film is formed on the insulating layer 132 so as to cover the openings 149a and 149b, and the conductive film is processed into a desired shape to form the conductive layers 120a and 120b (FIG. 31C).

[0400] Through the above steps, the transistor 100H can be manufactured.

[0401] <Components of semiconductor device> The components included in the semiconductor device of this embodiment will be described below.

[0402] 〔substrate〕 Although there are no significant limitations on the material of the substrate 102, it is necessary that the substrate 102 has at least heat resistance sufficient to withstand subsequent heat treatment. For example, a single crystal semiconductor substrate made of silicon or silicon carbide, a polycrystalline semiconductor substrate, a compound semiconductor substrate such as silicon germanium, an SOI substrate, a glass substrate, a ceramic substrate, a quartz substrate, a sapphire substrate, or the like may be used as the substrate 102. Furthermore, any of these substrates on which semiconductor elements are provided may also be used as the substrate 102.

[0403] A flexible substrate may be used as the substrate 102, and the semiconductor device may be formed directly on the flexible substrate. Alternatively, a peeling layer may be provided between the substrate 102 and the semiconductor device. The peeling layer can be used to separate a semiconductor device, after a part or all of the semiconductor device is completed thereon, from the substrate 102 and transfer the semiconductor device to another substrate. In this case, the semiconductor device can also be transferred to a substrate with poor heat resistance or a flexible substrate.

[0404] [Conductive film] The conductive layer 112 and the conductive layer 106 functioning as a gate electrode, and the conductive layer 120a functioning as one of a source electrode and a drain electrode, and the conductive layer 120b functioning as the other, can each be formed using one or more of a metal element selected from chromium, copper, aluminum, gold, silver, zinc, molybdenum, tantalum, titanium, tungsten, manganese, nickel, iron, and cobalt, an alloy containing any of the above metal elements, or an alloy combining any of the above metal elements.

[0405] The conductive layer 112, the conductive layer 106, the conductive layer 120a, and the conductive layer 120b may be made of an oxide conductor or a metal oxide such as In-Sn oxide, In-W oxide, In-W-Zn oxide, In-Ti oxide, In-Ti-Sn oxide, In-Zn oxide, In-Sn-Si oxide, or In-Ga-Zn oxide.

[0406] Here, oxide conductors (OC) will be explained. For example, when oxygen vacancies are formed in a metal oxide having semiconductor properties and hydrogen is added to the oxygen vacancies, a donor level is formed near the conduction band. As a result, the metal oxide becomes more conductive and becomes an electric conductor. A metal oxide that has become an electric conductor can be called an oxide conductor.

[0407] The conductive layer 112 or the like may have a stacked structure of a conductive film containing the above oxide conductor (metal oxide) and a conductive film containing a metal or an alloy. By using a conductive film containing a metal or an alloy, wiring resistance can be reduced. In this case, it is preferable to use a conductive film containing an oxide conductor on the side in contact with an insulating layer that functions as a gate insulating layer.

[0408] The conductive layer 112, the conductive layer 106, the conductive layer 120a, and the conductive layer 120b preferably contain one or more of the above-mentioned metal elements, particularly titanium, tungsten, tantalum, and molybdenum. A tantalum nitride film is particularly preferable. The tantalum nitride film is conductive, has high barrier properties against copper, oxygen, or hydrogen, and releases little hydrogen from itself. Therefore, the tantalum nitride film can be preferably used as a conductive film in contact with the semiconductor layer 108 or in the vicinity of the semiconductor layer 108.

[0409] [Semiconductor layer] When the semiconductor layer 108 is an In-M-Zn oxide, examples of the atomic ratio of metal elements in a sputtering target used to deposit the In-M-Zn oxide include In:M:Zn=1:1:1, In:M:Zn=1:1:1.2, In:M:Zn=2:1:3, In:M:Zn=3:1:2, In:M:Zn=4:2:3, In:M:Zn=4:2:4.1, In:M:Zn=5:1:3, In:M:Zn=5:1:6, In:M:Zn=5:1:7, In:M:Zn=5:1:8, In:M:Zn=6:1:6, In:M:Zn=5:2:5, In:M:Zn=10:1:3, In:M:Zn=10:1:6, and In:M:Zn=10:1:8. In the above, when two or more types of elements are contained as the element M, the proportion of M in the atomic ratio corresponds to the sum of the numbers of atoms of the two or more metal elements.

[0410] The sputtering target preferably contains a polycrystalline oxide, because this facilitates the formation of a crystalline semiconductor layer 108. The atomic ratio of the semiconductor layer 108 to be formed varies within a range of ±40% of the atomic ratio of the metal elements contained in the sputtering target. For example, if the composition of the sputtering target used for the semiconductor layer 108 is In:Ga:Zn=4:2:4.1 [atomic ratio], the composition of the semiconductor layer 108 to be formed may be close to In:Ga:Zn=4:2:3 [atomic ratio].

[0411] The semiconductor layer 108 has an energy gap of 2 eV or more, preferably 2.5 eV or more. By using a metal oxide having a wider energy gap than silicon, the off-state current of the transistor can be reduced.

[0412] The semiconductor layer 108 preferably has a non-single-crystal structure. Examples of the non-single-crystal structure include a CAAC structure, a polycrystalline structure, a microcrystalline structure, and an amorphous structure, which will be described later. Among the non-single-crystal structures, the amorphous structure has the highest density of defect states, and the CAAC structure has the lowest density of defect states.

[0413] Below, we explain about CAAC (c-axis aligned crystal), which is an example of a crystal structure.

[0414] The CAAC structure is a type of crystalline structure, such as in thin films, that contains multiple nanocrystals (crystalline regions with a maximum diameter of less than 10 nm), characterized by the c-axis of each nanocrystal oriented in a specific direction, the a-axis and b-axis not being oriented, and the nanocrystals being continuously connected without forming grain boundaries. In particular, thin films with the CAAC structure are characterized by the c-axis of each nanocrystal tending to be oriented in the thickness direction of the thin film, the normal direction to the surface on which it is formed, or the normal direction to the surface of the thin film.

[0415] CAAC-OS (oxide semiconductor) is an oxide semiconductor with high crystallinity. On the other hand, because no clear crystal grain boundaries are observed in CAAC-OS, it can be said that a decrease in electron mobility due to crystal grain boundaries is unlikely to occur. Furthermore, since the crystallinity of an oxide semiconductor can be reduced by the inclusion of impurities or the generation of defects, CAAC-OS can also be said to be an oxide semiconductor with few impurities and defects (such as oxygen vacancies). Therefore, oxide semiconductors with CAAC-OS have stable physical properties. Therefore, oxide semiconductors with CAAC-OS are heat-resistant and highly reliable.

[0416] In crystallography, it is common to define a unit cell with a specific axis as the c-axis, out of the three axes (crystal axes) that make up the unit cell: the a-axis, the b-axis, and the c-axis. In particular, for crystals with a layered structure, it is common to define the two axes parallel to the plane of the layers as the a-axis and the b-axis, and the axis intersecting the layers as the c-axis. A typical example of a crystal with such a layered structure is graphite, which is classified as a hexagonal crystal system. The a-axis and b-axis of the unit cell are parallel to the cleavage plane, and the c-axis is perpendicular to the cleavage plane. For example, InGaZnO4 crystals, which have a layered YbFe2O4-type crystal structure, can be classified as a hexagonal crystal system. The a-axis and b-axis of the unit cell are parallel to the plane of the layers, and the c-axis is perpendicular to the layers (i.e., the a-axis and b-axis).

[0417] In an oxide semiconductor film having a microcrystalline structure (microcrystalline oxide semiconductor film), crystal parts may not be clearly visible in a TEM image. The crystal parts contained in a microcrystalline oxide semiconductor film often have a size of 1 nm to 100 nm, or 1 nm to 10 nm. In particular, an oxide semiconductor film having nanocrystals (nc), which are microcrystals with a size of 1 nm to 10 nm, or 1 nm to 3 nm, is called an nc-OS (nanocrystalline oxide semiconductor) film. Furthermore, in an nc-OS film, for example, crystal grain boundaries may not be clearly visible in a TEM image.

[0418] The nc-OS film has periodic atomic arrangement in a microscopic region (for example, a region of 1 nm to 10 nm, particularly a region of 1 nm to 3 nm). Furthermore, the nc-OS film does not exhibit regularity in the crystal orientation between different crystalline regions. Therefore, the film as a whole lacks orientation. Therefore, depending on the analytical method, the nc-OS film may be indistinguishable from an amorphous oxide semiconductor film. For example, when the nc-OS film is subjected to structural analysis using an XRD apparatus that uses X-rays with a diameter larger than that of the crystalline region, peaks indicating crystal planes are not detected by the out-of-plane analysis. Furthermore, when the nc-OS film is subjected to electron diffraction (also known as selected-area electron diffraction) using an electron beam with a probe diameter larger than that of the crystalline region (for example, 50 nm or larger), a halo-like diffraction pattern is observed. On the other hand, when electron diffraction (also known as nanobeam electron diffraction) is performed on an nc-OS film using an electron beam with a probe diameter (e.g., 1 nm to 30 nm) close to or smaller than the size of the crystalline portion, a ring-shaped region of high brightness is observed, and multiple spots may be observed within the ring-shaped region.

[0419] The nc-OS film has a lower density of defect states than an amorphous oxide semiconductor film. However, the nc-OS film lacks regularity in the crystal orientation between different crystal parts. Therefore, the nc-OS film has a higher density of defect states than the CAAC-OS film. Therefore, the nc-OS film may have a higher carrier concentration and electron mobility than the CAAC-OS film. Therefore, a transistor using the nc-OS film may exhibit high field-effect mobility.

[0420] The nc-OS film can be formed by lowering the oxygen flow rate during film formation compared to the CAAC-OS film. The nc-OS film can also be formed by lowering the substrate temperature during film formation compared to the CAAC-OS film. For example, the nc-OS film can be formed at a relatively low substrate temperature (e.g., 130°C or lower) or without heating the substrate. This makes the nc-OS film suitable for use on large glass or resin substrates, thereby improving productivity.

[0421] An example of the crystal structure of a metal oxide will be described. A metal oxide formed by sputtering using an In-Ga-Zn oxide target (In:Ga:Zn=4:2:4.1 [atomic ratio]) at a substrate temperature of 100°C to 130°C tends to have either an nc (nano crystal) structure or a CAAC structure, or a mixed structure of these. On the other hand, a metal oxide formed at a substrate temperature of room temperature tends to have an nc crystal structure. Note that room temperature here includes the temperature when the substrate is not heated.

[0422] <Metal oxide composition> The structure of a cloud-aligned composite (CAC)-OS that can be used for the transistor disclosed in one embodiment of the present invention will be described below.

[0423] Note that CAAC (c-axis aligned crystal) represents an example of a crystal structure, and CAC (Cloud-Aligned Composite) represents an example of a function or material configuration.

[0424] CAC-OS or CAC-metal oxide has a conductive function in part of the material and an insulating function in part of the material, and functions as a semiconductor as a whole. When CAC-OS or CAC-metal oxide is used in the active layer of a transistor, the conductive function is a function of allowing electrons (or holes) to flow as carriers, and the insulating function is a function of preventing the flow of electrons as carriers. By making the conductive function and the insulating function act complementarily, a switching function (on / off function) can be imparted to CAC-OS or CAC-metal oxide. By separating the respective functions in CAC-OS or CAC-metal oxide, both functions can be maximized.

[0425] CAC-OS or CAC-metal oxide has conductive regions and insulating regions. The conductive regions have the above-mentioned conductive function, and the insulating regions have the above-mentioned insulating function. In addition, the conductive regions and the insulating regions may be separated at the nanoparticle level in the material. In addition, the conductive regions and the insulating regions may be unevenly distributed in the material. In addition, the conductive regions may be observed as connected in a cloud-like shape with the periphery blurred.

[0426] In the CAC-OS or CAC-metal oxide, the conductive regions and the insulating regions may be dispersed in the material with sizes of 0.5 nm to 10 nm, preferably 0.5 nm to 3 nm.

[0427] CAC-OS or CAC-metal oxide is composed of components with different band gaps. For example, CAC-OS or CAC-metal oxide is composed of a component with a wide gap due to an insulating region and a component with a narrow gap due to a conductive region. In this configuration, when carriers flow, the carriers mainly flow in the component with the narrow gap. Furthermore, the component with the narrow gap acts complementarily with the component with the wide gap, and carriers also flow in the component with the wide gap in conjunction with the component with the narrow gap. Therefore, when the CAC-OS or CAC-metal oxide is used in the channel formation region of a transistor, the transistor can achieve high current driving power in the on state, i.e., a large on-state current, and high field-effect mobility.

[0428] That is, CAC-OS or CAC-metal oxide can also be called a matrix composite or a metal matrix composite.

[0429] The above is the explanation of the configuration of the metal oxide.

[0430] At least a part of the configuration examples exemplified in this embodiment and the corresponding drawings can be implemented by appropriately combining with other configuration examples or drawings.

[0431] This embodiment mode can be implemented by appropriately combining at least a part thereof with other embodiment modes described in this specification.

[0432] (Embodiment 2) In this embodiment, an example of a display device including the transistor described in the above embodiment will be described.

[0433] <Configuration example> 32A shows a top view of a display device 700. The display device 700 has a first substrate 701 and a second substrate 705 attached to each other with a sealant 712. A pixel portion 702, a source driver circuit portion 704, and a gate driver circuit portion 706 are provided on the first substrate 701 in a region sealed by the first substrate 701, the second substrate 705, and the sealant 712. The pixel portion 702 is provided with a plurality of display elements.

[0434] An FPC terminal portion 708 to which an FPC (Flexible Printed Circuit) 716 is connected is provided in a portion of the first substrate 701 that does not overlap with the second substrate 705. Various signals and the like are supplied by the FPC 716 to each of the pixel portion 702, the source driver circuit portion 704, and the gate driver circuit portion 706 via the FPC terminal portion 708 and signal lines 710.

[0435] There may be a plurality of gate driver circuits 706. The gate driver circuits 706 and the source driver circuits 704 may each be formed separately on a semiconductor substrate or the like and may be in the form of a packaged IC chip. The IC chip can be mounted on the first substrate 701 or the FPC 716.

[0436] The transistor that is a semiconductor device of one embodiment of the present invention can be used as the transistor included in the pixel portion 702, the source driver circuit portion 704, and the gate driver circuit portion 706.

[0437] Examples of the display element provided in the pixel portion 702 include a liquid crystal element and a light-emitting element. The liquid crystal element may be a transmissive liquid crystal element, a reflective liquid crystal element, or a semi-transmissive liquid crystal element. Examples of the light-emitting element include a self-luminous light-emitting element such as an LED (Light Emitting Diode), an OLED (Organic LED), a QLED (Quantum-dot LED), or a semiconductor laser. Display elements using a shutter type or optical interference type MEMS (Micro Electro Mechanical Systems) element, a microcapsule type, an electrophoresis type, an electrowetting type, or an electronic liquid powder (registered trademark) type may also be used.

[0438] Display device 700A shown in FIG. 32B is an example of a display device that uses flexible resin layer 743 instead of first substrate 701 and can be used as a flexible display.

[0439] In the display device 700A, the pixel portion 702 is not rectangular, but has arc-shaped corners. Furthermore, as shown in region P1 in FIG. 32B , the pixel portion 702 and the resin layer 743 have cutouts formed by cutting out parts of the pixel portion 702 and the resin layer 743. A pair of gate driver circuit units 706 are provided on both sides of the pixel portion 702. The gate driver circuit units 706 are also provided at the corners of the pixel portion 702 along the arc-shaped contour.

[0440] The resin layer 743 has a protruding shape at a portion where the FPC terminal portion 708 is provided. In addition, a portion of the resin layer 743, including the FPC terminal portion 708, can be folded back to the rear side in region P2 in FIG. 32B. By folding back a portion of the resin layer 743, the display device 700A can be mounted on an electronic device with the FPC 716 disposed on the rear side of the pixel portion 702, thereby enabling space saving of the electronic device.

[0441] An IC 717 is mounted on an FPC 716 connected to the display device 700A. The IC 717 functions as, for example, a source driver circuit. In this case, the source driver circuit unit 704 in the display device 700A can be configured to include at least one of a protection circuit, a buffer circuit, a demultiplexer circuit, etc.

[0442] 32C is a display device that can be suitably used in electronic devices having large screens, such as televisions, monitors, personal computers (including notebook and desktop computers), tablet terminals, and digital signage.

[0443] The display device 700B includes a plurality of source driver ICs 721 and a pair of gate driver circuit units 722.

[0444] The plurality of source driver ICs 721 are each attached to an FPC 723. One terminal of each of the plurality of FPCs 723 is connected to the first substrate 701, and the other terminal is connected to a printed circuit board 724. By bending the FPC 723, the printed circuit board 724 can be disposed on the back side of the pixel section 702 and mounted on the electronic device, thereby enabling space saving of the electronic device.

[0445] On the other hand, the gate driver circuit section 722 is formed on the first substrate 701. This makes it possible to realize an electronic device with a narrow frame.

[0446] This configuration makes it possible to realize a large-sized, high-resolution display device. For example, a display device with a diagonal screen size of 30 inches or more, 40 inches or more, 50 inches or more, or 60 inches or more can be realized. Also, a display device with an extremely high resolution, such as 4K2K or 8K4K, can be realized.

[0447] <Example of cross-sectional configuration> Below, a configuration using liquid crystal elements and a configuration using EL elements as display elements will be described with reference to Figs. 33 to 36. Figs. 33 to 35 are cross-sectional views of display device 700 taken along dashed line QR in Fig. 32A. Fig. 36 is a cross-sectional view of display device 700A taken along dashed line ST in Fig. 32B. Figs. 33 and 34 show configurations using liquid crystal elements as display elements, and Figs. 35 and 36 show configurations using EL elements.

[0448] [Explanation of common parts of the display device] 33 to 36 includes a lead wiring portion 711, a pixel portion 702, a source driver circuit portion 704, and an FPC terminal portion 708. The lead wiring portion 711 includes a signal line 710. The pixel portion 702 includes a transistor 750 and a capacitor 790. The source driver circuit portion 704 includes a transistor 752. FIG. 34 shows a case where the capacitor 790 is not included.

[0449] The transistors described as examples in Embodiment 1 can be used as the transistors 750 and 752.

[0450] The transistor used in this embodiment includes a highly purified oxide semiconductor film in which oxygen vacancies are suppressed. The off-state current of the transistor can be reduced. Therefore, the retention time of an electric signal such as an image signal can be increased, and the interval between writing of the image signal can also be set longer. Therefore, the frequency of a refresh operation can be reduced, thereby achieving an effect of reducing power consumption.

[0451] The transistor used in this embodiment has a relatively high field-effect mobility and can therefore be driven at high speed. For example, by using such a transistor capable of high-speed driving in a display device, a switching transistor in a pixel portion and a driver transistor used in a driver circuit portion can be formed over the same substrate. That is, a configuration without using a driver circuit formed using a silicon wafer or the like is possible, and the number of components in the display device can be reduced. Furthermore, by using a transistor capable of high-speed driving in the pixel portion, a high-quality image can be provided.

[0452] The capacitor 790 shown in FIGS. 33, 35, and 36 includes a lower electrode formed by processing the same film as the first gate electrode of the transistor 750, and an upper electrode formed by processing the same metal oxide as the semiconductor layer. The upper electrode has low resistance, similar to the source and drain regions of the transistor 750. A part of an insulating film functioning as the first gate insulating layer of the transistor 750 is provided between the lower and upper electrodes. That is, the capacitor 790 has a stacked structure in which an insulating film functioning as a dielectric film is sandwiched between a pair of electrodes. The upper electrode is connected to a wiring obtained by processing the same film as the source and drain electrodes of the transistor.

[0453] A planarization insulating film 770 is provided over the transistor 750 , the transistor 752 , and the capacitor 790 .

[0454] The transistor 750 included in the pixel portion 702 and the transistor 752 included in the source driver circuit portion 704 may have different structures. For example, a top-gate transistor may be used for one of them, and a bottom-gate transistor may be used for the other. Note that, similar to the source driver circuit portion 704, the gate driver circuit portion 706 may also use a transistor having the same structure as the transistor 750 or a transistor having a different structure.

[0455] The signal line 710 is formed using the same conductive film as the source electrode and drain electrode of the transistor 750 or the transistor 752. In this case, it is preferable to use a low-resistance material such as a material containing copper because signal delay due to wiring resistance is small and display on a large screen is possible.

[0456] The FPC terminal portion 708 includes a wiring 760, a part of which functions as a connection electrode, an anisotropic conductive film 780, and an FPC 716. The wiring 760 is electrically connected to a terminal of the FPC 716 via the anisotropic conductive film 780. Here, the wiring 760 is formed using the same conductive film as the source electrode and drain electrode of the transistor 750 or the transistor 752.

[0457] A flexible substrate such as a glass substrate or a plastic substrate can be used as the first substrate 701 and the second substrate 705. When a flexible substrate is used as the first substrate 701, an insulating layer having a barrier property against impurities including hydrogen elements is preferably provided between the first substrate 701 and the transistor 750, etc.

[0458] On the second substrate 705 side, a light-shielding film 738, a colored film 736, and an insulating film 734 in contact with these are provided.

[0459] [Configuration example of a display device using a liquid crystal element] The display device 700 shown in FIG. 33 includes a liquid crystal element 775. The liquid crystal element 775 includes a conductive layer 772, a conductive layer 774, and a liquid crystal layer 776 between them. The conductive layer 774 is provided on the second substrate 705 side and functions as a common electrode. The conductive layer 772 is electrically connected to a source electrode or a drain electrode of the transistor 750. The conductive layer 772 is formed over a planarization insulating film 770 and functions as a pixel electrode.

[0460] A material that transmits or reflects visible light can be used for the conductive layer 772. For example, an oxide material containing indium, zinc, tin, or the like can be used as the light-transmitting material. For example, a material containing aluminum, silver, or the like can be used as the reflective material.

[0461] When a reflective material is used for the conductive layer 772, the display device 700 becomes a reflective liquid crystal display device. On the other hand, when a light-transmitting material is used for the conductive layer 772, the display device becomes a transmissive liquid crystal display device. In the case of a reflective liquid crystal display device, a polarizing plate is provided on the viewing side. On the other hand, in the case of a transmissive liquid crystal display device, a pair of polarizing plates is provided to sandwich the liquid crystal element.

[0462] A structure 778 is provided between the first substrate 701 and the second substrate 705. The structure 778 is a columnar spacer, and is provided to control the distance (cell gap) between the first substrate 701 and the second substrate 705. Note that a spherical spacer may also be used as the structure 778.

[0463] 34 shows an example of a display device 700 using a horizontal field mode (e.g., FFS mode) liquid crystal element 775. A conductive layer 774 functioning as a common electrode is provided over a conductive layer 772 with an insulating layer 773 interposed therebetween. The alignment state of a liquid crystal layer 776 can be controlled by an electric field generated between the conductive layer 772 and the conductive layer 774.

[0464] 34, a storage capacitor can be formed using a stacked structure of a conductive layer 774, an insulating layer 773, and a conductive layer 772. Therefore, there is no need to provide a separate capacitor, and the aperture ratio can be increased.

[0465] 33 and 34, an alignment film may be provided in contact with the liquid crystal layer 776. Furthermore, optical members (optical substrates) such as a polarizing member, a phase difference member, and an anti-reflection member, and light sources such as a backlight and a sidelight may be provided as appropriate.

[0466] Thermotropic liquid crystal, low molecular weight liquid crystal, polymer liquid crystal, polymer dispersed liquid crystal (PDLC), polymer network liquid crystal (PNLC), ferroelectric liquid crystal, antiferroelectric liquid crystal, etc. can be used for the liquid crystal layer 776. When the in-plane switching mode is adopted, liquid crystal that exhibits a blue phase without using an alignment film may also be used.

[0467] The liquid crystal element modes that can be used include TN (Twisted Nematic) mode, VA (Vertical Alignment) mode, IPS (In-Plane-Switching) mode, FFS (Fringe Field Switching) mode, ASM (Axially Symmetric aligned Micro-cell) mode, OCB (Optically Compensated Birefringence) mode, ECB (Electrically Controlled Birefringence) mode, and guest-host mode.

[0468] A scattering type liquid crystal such as a polymer dispersed liquid crystal or a polymer network liquid crystal may be used for the liquid crystal layer 776. In this case, a black and white display may be performed without providing the colored film 736, or a color display may be performed by using the colored film 736.

[0469] The liquid crystal element may be driven by a time-sequential display method (also called a field-sequential driving method) that performs color display based on a time-sequential additive color mixture method. In this case, the color film 736 may not be provided. When the time-sequential display method is used, there is no need to provide sub-pixels that exhibit the respective colors of R (red), G (green), and B (blue), which has the advantage of improving the pixel aperture ratio and increasing the resolution.

[0470] [Display device using light-emitting elements] 35 includes a light-emitting element 782. The light-emitting element 782 includes a conductive layer 772, an EL layer 786, and a conductive film 788. The EL layer 786 includes a light-emitting material such as an organic compound or an inorganic compound.

[0471] The light-emitting material may be a fluorescent material, a phosphorescent material, a thermally activated delayed fluorescence (TADF) material, or an inorganic compound (such as a quantum dot material).

[0472] 35, an insulating film 730 that covers part of a conductive layer 772 is provided over a planarization insulating film 770. Here, the light-emitting element 782 is a top-emission light-emitting element that includes a light-transmitting conductive film 788. Note that the light-emitting element 782 may have a bottom-emission structure in which light is emitted to the conductive layer 772 side, or a dual-emission structure in which light is emitted to both the conductive layer 772 side and the conductive film 788 side.

[0473] The colored film 736 is provided at a position overlapping with the light-emitting element 782. The light-shielding film 738 is provided at a position overlapping with the insulating film 730, in the lead-out wiring portion 711, and in the source driver circuit portion 704. The colored film 736 and the light-shielding film 738 are covered with an insulating film 734. The space between the light-emitting element 782 and the insulating film 734 is filled with a sealing film 732. Note that when the EL layer 786 is formed in an island shape for each pixel or in a striped shape for each pixel column, that is, when the EL layer 786 is formed by coloring, the colored film 736 may not be provided.

[0474] A configuration of a display device that can be suitably applied to a flexible display is shown in Fig. 36. Fig. 36 is a cross-sectional view taken along dashed line ST in display device 700A shown in Fig. 32B.

[0475] 36 has a stacked structure of a supporting substrate 745, an adhesive layer 742, a resin layer 743, and an insulating layer 744, instead of the first substrate 701 shown in FIG. 35. A transistor 750, a capacitor 790, and the like are provided over the insulating layer 744 provided over the resin layer 743.

[0476] The support substrate 745 is a substrate containing an organic resin, glass, or the like, and is thin enough to be flexible. The resin layer 743 is a layer containing an organic resin such as polyimide resin or acrylic resin. The insulating layer 744 contains an inorganic insulating film such as silicon oxide, silicon oxynitride, or silicon nitride. The resin layer 743 and the support substrate 745 are bonded together by an adhesive layer 742. The resin layer 743 is preferably thinner than the support substrate 745.

[0477] A display device 700A shown in Fig. 36 has a protective layer 740 instead of the second substrate 705 shown in Fig. 35. The protective layer 740 is bonded to a sealing film 732. A glass substrate, a resin film, or the like can be used as the protective layer 740. Furthermore, an optical member such as a polarizing plate or a scattering plate, an input device such as a touch sensor panel, or a configuration in which two or more of these are stacked may be used as the protective layer 740.

[0478] The EL layer 786 of the light-emitting element 782 is provided in an island shape over the insulating film 730 and the conductive layer 772. By forming the EL layer 786 so that each subpixel emits a different light color, color display can be achieved without using the colored film 736. A protective layer 741 is provided to cover the light-emitting element 782. The protective layer 741 has a function of preventing impurities such as water from diffusing into the light-emitting element 782. The protective layer 741 is preferably an inorganic insulating film. More preferably, the protective layer 741 has a stacked structure including at least one inorganic insulating film and at least one organic insulating film.

[0479] FIG. 36 shows a bendable region P2. In region P2, in addition to a support substrate 745 and an adhesive layer 742, there is a portion where no inorganic insulating film, such as an insulating layer 744, is provided. Furthermore, in region P2, a resin layer 746 is provided to cover the wiring 760. By providing as little inorganic insulating film as possible in the bendable region P2 and using a configuration in which only a conductive layer containing a metal or alloy and a layer containing an organic material are stacked, it is possible to prevent cracks from occurring when the display device 700A is bent. Furthermore, by not providing a support substrate 745 in region P2, a portion of the display device 700A can be bent with an extremely small radius of curvature.

[0480] An input device may be provided in the display device 700 or the display device 700A shown in Figures 33 to 36. Examples of the input device include a touch sensor.

[0481] For example, the sensor may be of various types, such as a capacitance type, a resistive film type, a surface acoustic wave type, an infrared type, an optical type, or a pressure-sensitive type, or may be a combination of two or more of these types.

[0482] The touch panel may have a configuration such as an in-cell type touch panel in which the input device is formed between a pair of substrates, an on-cell type touch panel in which the input device is formed on the display device 700, or an out-cell type touch panel in which the input device is attached to the display device 700.

[0483] [Modification] Below, a modified example will be described in which the configuration is partially different from that of the above display device.

[0484] 37A is a schematic cross-sectional view of a display device 800. The display device 800 has a light-emitting element 820R, a light-emitting element 820G, and a light-emitting element 820B on a substrate 801. The light-emitting element 820R is a light-emitting element that exhibits red color, the light-emitting element 820G is a light-emitting element that exhibits green color, and the light-emitting element 820B is a light-emitting element that exhibits blue color. Note that the light-emitting elements 820R, 820G, and 820B may be collectively referred to as light-emitting element 820.

[0485] A circuit substrate having a transistor, a wiring, or the like can be used as the substrate 801. For example, the semiconductor device described in Embodiment 1 can be suitably used. Note that when a passive matrix system or a segment system can be applied, an insulating substrate such as a glass substrate can be used as the substrate 801. The substrate 801 is a substrate provided with a circuit for driving each light-emitting element (also referred to as a pixel circuit) or a semiconductor circuit that functions as a driver circuit for driving the pixel circuit.

[0486] Light-emitting element 820R has a conductive layer 811, a reflective layer 812, an insulating layer 813, a conductive layer 814R, an EL layer 815, and a conductive layer 816. Light-emitting element 820G has a conductive layer 811, a reflective layer 812, an insulating layer 813, a conductive layer 814G, an EL layer 815, and a conductive layer 816. Light-emitting element 820B has a conductive layer 811, a reflective layer 812, an insulating layer 813, a conductive layer 814B, an EL layer 815, and a conductive layer 816. Note that conductive layer 814R, conductive layer 814G, and conductive layer 814B may be collectively referred to as conductive layer 814.

[0487] The conductive layer 811 functions as a lower electrode, and the conductive layer 816 functions as an upper electrode. The reflective layer 812 provided over the conductive layer 811 has a function of reflecting visible light. The insulating layer 813 and the conductive layer 814 have a function of transmitting visible light, and the conductive layer 816 has transmissivity and reflectivity for visible light. The EL layer 815 contains a light-emitting compound.

[0488] The conductive layer 814 provided in each light-emitting element 820 has a different thickness for each light-emitting element. Of the three conductive layers 814, conductive layer 814B is the thinnest, and conductive layer 814R is the thickest. Here, as shown in FIG. 37A, the distance between the upper surface of reflective layer 812 and the lower surface of conductive layer 816 (i.e., the interface between conductive layer 816 and EL layer 815) in each light-emitting element is defined as distance D R , distance D G , distance D B Then, the distance D R is the largest, and the distance DB is the smallest. Distance D R , distance D G , distance D B The difference corresponds to the difference in optical distance (optical path length) between the respective light emitting elements.

[0489] Of the three light-emitting elements, light-emitting element 820R has the longest optical path length and therefore emits light R, in which light of the longest wavelength is intensified. On the other hand, light-emitting element 820B has the shortest optical path length and therefore emits light B, in which light of the shortest wavelength is intensified. Light-emitting element 820G emits light G, in which light of an intermediate wavelength is intensified. For example, light R can be light in which red light is intensified, light G can be light in which green light is intensified, and light B can be light in which blue light is intensified.

[0490] With this configuration, it is not necessary to create separate EL layers for the light-emitting element 820 for each light-emitting element of a different color, and color display with high color reproducibility can be achieved using elements with the same configuration. Also, it becomes possible to arrange the light-emitting elements 820 at an extremely high density. For example, a display device with a resolution of more than 5000 ppi can be realized.

[0491] The substrate 801 and the conductive layer 811 of the light emitting element 820 are electrically connected via a plug 831. The plug 831 is formed so as to be embedded in an opening provided in the insulating layer 821. The conductive layer 811 is provided in contact with the upper surface of the plug 831.

[0492] In the display device 800, the EL layer 815 and the conductive layer 816 are separated between adjacent light-emitting elements of different colors. This prevents leakage current from flowing through the EL layer 815 between adjacent light-emitting elements of different colors. This suppresses light emission caused by the leakage current, enabling a high-contrast display. Furthermore, even when the resolution is increased, a highly conductive material can be used for the EL layer 815, thereby broadening the range of material options and facilitating improved efficiency, reduced power consumption, and improved reliability.

[0493] The EL layer 815 and the conductive layer 816 may be formed into island patterns by film formation using a shadow mask such as a metal mask, but it is preferable to use a processing method that does not use a metal mask. This makes it possible to form extremely fine patterns, thereby improving the definition and aperture ratio compared to formation methods that use metal masks. A typical processing method that can be used is photolithography. Other formation methods that can be used include nanoimprinting and sandblasting.

[0494] In this specification, a device that uses a metal mask or an FMM (fine metal mask, high-resolution metal mask) may be referred to as an MM (metal mask) structure. In addition, in this specification, a device that does not use a metal mask or an FMM may be referred to as an MML (metal maskless) structure.

[0495] The display device 800 is manufactured by first depositing the EL layer 815 and the conductive layer 816 without using a metal mask, and then forming a resist mask over the conductive layer 816. After that, parts of the EL layer 815 and the conductive layer 816 that are not covered with the resist mask are removed by etching, and then the resist mask is removed. Then, the insulating layer 118 is formed. In this manner, the display device 800 can be manufactured.

[0496] In the display device 800, an insulating layer 818 is provided to cover the light-emitting elements 820B, 820G, and 820R. Part of the insulating layer 818 between adjacent light-emitting elements is in contact with the top surface of the insulating layer 817. The insulating layer 818 functions as a protective layer that prevents impurities such as water from diffusing into the light-emitting elements. The insulating layer 818 is preferably an inorganic insulating film with low moisture permeability, such as a silicon oxide film, a silicon nitride film, or an aluminum oxide film.

[0497] Display device 800A shown in FIG. 37B differs from display device 800 described above mainly in that it has plugs 830 and in that the configurations of conductive layers 814R, 814G, and 814B are different.

[0498] In the display device 800A, a reflective layer 812, an insulating layer 813, and a conductive layer 814 are stacked in this order on a conductive layer 811 formed at a distance from each other. The conductive layer 814 has a different thickness for each light-emitting element. The conductive layer 814 is electrically connected to the conductive layer 811 via a plug 830, and therefore, it is not necessary to provide the conductive layer 814 larger than the conductive layer 811. With this configuration, the conductive layer 811 that functions as a pixel electrode can be provided larger, and further, since there is no need to provide a contact between the conductive layer 814 and the conductive layer 811, the aperture ratio of the pixel can be increased.

[0499] 37B illustrates a structure in which the plug 830 is embedded in the insulating layer 813 and the reflective layer 812; however, one embodiment of the present invention is not limited to this. The plug 830 may be embedded in the insulating layer 813 and in contact with the reflective layer 812. In this case, the reflective layer 812 and the plug 830 may be in contact with each other without providing the conductive layer 811. However, when the reflective layer 812 is thin, for example, the reflective layer 812 may be penetrated when an opening for forming the plug 830 is formed in the insulating layer 813. Therefore, it is preferable to provide the conductive layer 811.

[0500] In the display device 800 and the display device 800A, the EL layer 815 and the conductive layer 816 are preferably processed so as to be continuous without being separated between pixels of the same color. For example, the EL layer 815 and the conductive layer 816 can be processed into a striped shape. This allows the conductive layers 816 of all light-emitting elements to be applied with a predetermined potential without being in a floating state.

[0501] 37A and 37B illustrate an example in which the EL layer 815 emits light of different colors for each of the R, G, and B pixels (also referred to as a side-by-side (SBS) structure). However, one embodiment of the present invention is not limited to this. For example, each of the R, G, and B pixels may have a white-light-emitting EL layer, and a colored layer (a so-called color filter) may be provided on the side from which light is emitted from the white-light-emitting EL layer. Note that the white-light-emitting EL layer may have a structure (also referred to as a tandem structure) in which a plurality of light-emitting units are connected in series via an intermediate layer (charge generation layer). The tandem structure makes it possible to provide a light-emitting element that can emit light with high luminance. In this specification and the like, a light-emitting element having a white-light-emitting EL layer may be referred to as a white-light-emitting element.

[0502] When comparing the above-mentioned white light-emitting device (single structure or tandem structure) with a light-emitting device with an SBS structure, the light-emitting device with an SBS structure can reduce power consumption compared to the white light-emitting device. When it is desired to keep power consumption low, it is preferable to use a light-emitting device with an SBS structure. On the other hand, the manufacturing process of a white light-emitting device is simpler than that of a light-emitting device with an SBS structure, so it is preferable because it can reduce manufacturing costs or increase manufacturing yields.

[0503] The above is a description of the modified example.

[0504] At least a part of the configuration examples exemplified in this embodiment and the corresponding drawings can be implemented by appropriately combining with other configuration examples or drawings.

[0505] This embodiment mode can be implemented by appropriately combining at least a part thereof with other embodiment modes described in this specification.

[0506] (Embodiment 3) In this embodiment, a display device including a semiconductor device of one embodiment of the present invention will be described with reference to FIGS. 38A to 38C.

[0507] 38A includes a pixel portion 502, a driver circuit portion 504, a protective circuit 506, and a terminal portion 507. Note that the protective circuit 506 may not be provided.

[0508] The transistor of one embodiment of the present invention can be applied to the transistor included in the pixel portion 502 and the transistor included in the driver circuit portion 504. The transistor of one embodiment of the present invention may also be applied to the protection circuit 506.

[0509] The pixel section 502 has a plurality of pixel circuits 501 arranged in X rows and Y columns (X and Y are each independently a natural number of 2 or more). Each pixel circuit 501 has a circuit for driving a display element.

[0510] The driver circuit unit 504 includes driver circuits such as a gate driver 504a that outputs scan signals to the gate lines GL_1 to GL_X and a source driver 504b that supplies data signals to the data lines DL_1 to DL_Y. The gate driver 504a may include at least a shift register. The source driver 504b may include, for example, a plurality of analog switches. Alternatively, the source driver 504b may include a shift register.

[0511] The terminal portion 507 is a portion provided with terminals for inputting power, control signals, image signals, and the like from an external circuit to the display device.

[0512] The protection circuit 506 is a circuit that, when a potential outside a certain range is applied to a wiring connected to the protection circuit 506, brings the wiring into a conductive state with another wiring. The protection circuit 506 shown in Fig. 38A is connected to various wirings, such as a gate line GL that is a wiring between the gate driver 504a and the pixel circuit 501, or a data line DL that is a wiring between the source driver 504b and the pixel circuit 501. Note that in Fig. 38A, the protection circuit 506 is hatched to distinguish it from the pixel circuit 501.

[0513] The gate driver 504a and the source driver 504b may be provided on the same substrate as the pixel unit 502, or a substrate on which a gate driver circuit or a source driver circuit is separately formed (for example, a drive circuit substrate formed of a single crystal semiconductor or a polycrystalline semiconductor) may be mounted on the substrate on which the pixel unit 502 is provided by COG or TAB (Tape Automated Bonding).

[0514] The plurality of pixel circuits 501 shown in FIG. 38A can have the configuration shown in FIG. 38B or FIG. 38C, for example.

[0515] 38B includes a liquid crystal element 570, a transistor 550, and a capacitor 560. The pixel circuit 501 is connected to a data line DL_n, a gate line GL_m, a potential supply line VL, and the like.

[0516] The potential of one of the pair of electrodes of the liquid crystal element 570 is set as appropriate according to the specifications of the pixel circuit 501. The orientation state of the liquid crystal element 570 is set by written data. Note that a common potential may be applied to one of the pair of electrodes of the liquid crystal element 570 included in each of the plurality of pixel circuits 501. Alternatively, a different potential may be applied to one of the pair of electrodes of the liquid crystal element 570 in the pixel circuits 501 in each row.

[0517] 38C includes a transistor 552, a transistor 554, a capacitor 562, and a light-emitting element 572. The pixel circuit 501 is connected to a data line DL_n, a gate line GL_m, a potential supply line VL_a, a potential supply line VL_b, and the like.

[0518] A high power supply potential VDD is applied to one of the potential supply lines VL_a and VL_b, and a low power supply potential VSS is applied to the other. The current flowing through the light-emitting element 572 is controlled in accordance with the potential applied to the gate of the transistor 554, thereby controlling the luminance of light emitted from the light-emitting element 572.

[0519] At least a part of the configuration examples exemplified in this embodiment and the corresponding drawings can be implemented by appropriately combining with other configuration examples or drawings.

[0520] This embodiment mode can be implemented by appropriately combining at least a part thereof with other embodiment modes described in this specification.

[0521] (Fourth embodiment) A pixel circuit including a memory for correcting a gray scale displayed in a pixel and a display device including the pixel circuit will be described below. The transistors described in Embodiment 1 can be applied to transistors used in the pixel circuits described below.

[0522] <Circuit configuration> 39A shows a circuit diagram of a pixel circuit 400. The pixel circuit 400 includes a transistor M1, a transistor M2, a capacitor C1, and a circuit 401. The pixel circuit 400 is connected to a wiring S1, a wiring S2, a wiring G1, and a wiring G2.

[0523] The transistor M1 has a gate connected to the wiring G1, one of a source and a drain connected to the wiring S1, and the other connected to one electrode of the capacitor C1. The transistor M2 has a gate connected to the wiring G2, one of a source and a drain connected to the wiring S2, and the other connected to the other electrode of the capacitor C1 and the circuit 401.

[0524] The circuit 401 is a circuit including at least one display element. Various elements can be used as the display element, but representative examples include light-emitting elements such as organic EL elements and LED elements, liquid crystal elements, and MEMS (Micro Electro Mechanical Systems) elements.

[0525] The node connecting the transistor M1 and the capacitor C1 is referred to as a node N1, and the node connecting the transistor M2 and the circuit 401 is referred to as a node N2.

[0526] In the pixel circuit 400, the potential of the node N1 can be maintained by turning off the transistor M1. In addition, the potential of the node N2 can be maintained by turning off the transistor M2. In addition, by writing a predetermined potential to the node N1 via the transistor M1 while the transistor M2 is in the off state, the potential of the node N2 can be changed in accordance with the change in the potential of the node N1 due to capacitive coupling via the capacitor C1.

[0527] Here, the transistor including an oxide semiconductor described in Embodiment 1 can be used as one or both of the transistors M1 and M2. Therefore, the potential of the node N1 or the node N2 can be held for a long period of time due to an extremely low off-state current. Note that when the period for holding the potential of each node is short (specifically, when the frame frequency is 30 Hz or higher), a transistor including a semiconductor such as silicon may be used.

[0528] <Driving method example> Next, an example of an operation method of pixel circuit 400 will be described with reference to Fig. 39B. Fig. 39B is a timing chart relating to the operation of pixel circuit 400. Note that, to simplify the explanation, the influence of various resistances such as wiring resistance, parasitic capacitance of transistors or wiring, and threshold voltage of transistors will not be taken into consideration here.

[0529] 39B, one frame period is divided into period T1 and period T2. Period T1 is a period in which a potential is written to node N2, and period T2 is a period in which a potential is written to node N1.

[0530] [Period T1] In the period T1, a potential that turns on the transistor is applied to both the wiring G1 and the wiring G2. In addition, a fixed potential V ref is supplied to the line S2, and the first data potential V w supply.

[0531] The node N1 is connected to the line S1 via the transistor M1. ref The node N2 is supplied with a first data potential V w Therefore, the capacitance C1 has a potential difference V w -V ref is maintained.

[0532] [Period T2] Subsequently, in a period T2, a potential that turns on the transistor M1 is applied to the wiring G1, and a potential that turns off the transistor M2 is applied to the wiring G2. data A predetermined constant potential is applied to the wiring S2, or the wiring S2 may be in a floating state.

[0533] The node N1 receives a second data potential V data At this time, the second data potential V data In other words, the potential of the node N2 changes by a potential dV in response to the first data potential V w The potential obtained by adding the second data potential V to the potential dV is input. Note that although the potential dV is shown as a positive value in FIG. 39B, it may be a negative value. That is, the second data potential V data is the potential V ref It may be lower.

[0534] Here, the potential dV is roughly determined by the capacitance value of the capacitor C1 and the capacitance value of the circuit 401. When the capacitance value of the capacitor C1 is sufficiently larger than the capacitance value of the circuit 401, the potential dV is equal to the second data potential V data The potential is close to

[0535] In this way, the pixel circuit 400 can combine two types of data signals to generate a potential to be supplied to the circuit 401 including a display element, and therefore, gray scale correction can be performed within the pixel circuit 400.

[0536] The pixel circuit 400 can generate a potential exceeding the maximum potential that can be supplied by a source driver connected to the wirings S1 and S2. For example, when a light-emitting element is used, high dynamic range (HDR) display or the like can be performed. Furthermore, when a liquid crystal element is used, overdrive driving or the like can be realized.

[0537] <Application example> [Example using liquid crystal element] The pixel circuit 400LC shown in Figure 39C includes a circuit 401LC. The circuit 401LC includes a liquid crystal element LC and a capacitor C2.

[0538] The liquid crystal element LC has one electrode connected to the node N2 and one electrode of the capacitor C2, and the other electrode connected to the potential V com2 The capacitor C2 is connected to the wiring where the other electrode is at potential V com1 Connect with the wiring given.

[0539] The capacitor C2 functions as a storage capacitor. Note that the capacitor C2 can be omitted if not required.

[0540] The pixel circuit 400LC can supply a high voltage to the liquid crystal element LC, which makes it possible to, for example, achieve high-speed display by overdriving, apply a liquid crystal material with a high driving voltage, etc. Furthermore, by supplying a correction signal to the line S1 or the line S2, it is possible to correct the gradation in accordance with the operating temperature or the deterioration state of the liquid crystal element LC, etc.

[0541] [Example using light-emitting element] The pixel circuit 400EL shown in Fig. 39D includes a circuit 401EL. The circuit 401EL includes a light-emitting element EL, a transistor M3, and a capacitor C2.

[0542] The transistor M3 has a gate connected to the node N2 and one electrode of the capacitor C2, and one of its source and drain connected to the potential V H The other electrode of the capacitor C2 is connected to a wiring to which a potential V comThe other electrode of the light-emitting element EL is connected to a wiring to which a potential V L Connect with the wiring given.

[0543] The transistor M3 has a function of controlling the current supplied to the light-emitting element EL. The capacitor C2 functions as a storage capacitor. The capacitor C2 can be omitted if it is not necessary.

[0544] Although the anode side of the light-emitting element EL is connected to the transistor M3 in this example, the transistor M3 may be connected to the cathode side. H and potential V L The value of can be changed as appropriate.

[0545] In the pixel circuit 400EL, a large current can be passed through the light-emitting element EL by applying a high potential to the gate of the transistor M3, thereby realizing, for example, HDR display. Furthermore, by supplying a correction signal to the wiring S1 or the wiring S2, variations in the electrical characteristics of the transistor M3 and the light-emitting element EL can be corrected.

[0546] It should be noted that the circuits are not limited to those illustrated in FIGS. 39C and 39D, and may be configured to include additional transistors or capacitors.

[0547] This embodiment mode can be implemented by appropriately combining at least a part thereof with other embodiment modes described in this specification.

[0548] (Embodiment 5) In this embodiment, a display module that can be manufactured using one embodiment of the present invention will be described.

[0549] A display module 6000 shown in FIG. 40A has a display device 6006 connected by an FPC 6005, a frame 6009, a printed circuit board 6010, and a battery 6011 between an upper cover 6001 and a lower cover 6002.

[0550] For example, a display device manufactured using one embodiment of the present invention can be used as the display device 6006. The display device 6006 can provide a display module with extremely low power consumption.

[0551] The shape or dimensions of the upper cover 6001 and the lower cover 6002 can be changed appropriately to match the size of the display device 6006.

[0552] The display device 6006 may have a function as a touch panel.

[0553] The frame 6009 may have a function of protecting the display device 6006, a function of blocking electromagnetic waves generated by the operation of the printed circuit board 6010, a function as a heat sink, and the like.

[0554] The printed circuit board 6010 has a power supply circuit, a signal processing circuit for outputting video signals and clock signals, a battery control circuit, and the like.

[0555] FIG. 40B is a cross-sectional schematic diagram of a display module 6000 with an optical touch sensor.

[0556] The display module 6000 has a light emitting section 6015 and a light receiving section 6016 provided on a printed circuit board 6010. The display module 6000 also has a pair of light guiding sections (light guiding section 6017a, light guiding section 6017b) in an area surrounded by an upper cover 6001 and a lower cover 6002.

[0557] The display device 6006 is provided so as to overlap the printed circuit board 6010 and the battery 6011 with the frame 6009 interposed therebetween. The display device 6006 and the frame 6009 are fixed to the light guide portions 6017a and 6017b.

[0558] Light 6018 emitted from light-emitting unit 6015 passes through light-guiding unit 6017a, passes through the upper part of display device 6006, and reaches light-receiving unit 6016 through light-guiding unit 6017b. For example, a touch operation can be detected when light 6018 is blocked by a detectable object such as a finger or a stylus.

[0559] A plurality of light-emitting units 6015 are provided, for example, along two adjacent sides of the display device 6006. A plurality of light-receiving units 6016 are provided at positions facing the light-emitting units 6015. This makes it possible to obtain information about the position where a touch operation is performed.

[0560] The light-emitting unit 6015 may be a light source such as an LED element, and it is particularly preferable to use a light source that emits infrared light. The light-receiving unit 6016 may be a photoelectric element that receives the light emitted by the light-emitting unit 6015 and converts it into an electrical signal. Preferably, a photodiode that can receive infrared light may be used.

[0561] The light guiding portions 6017a and 6017b that transmit light 6018 allow the light emitting portion 6015 and the light receiving portion 6016 to be disposed below the display device 6006, thereby preventing external light from reaching the light receiving portion 6016 and causing the touch sensor to malfunction. In particular, using a resin that absorbs visible light and transmits infrared light can more effectively prevent the touch sensor from malfunctioning.

[0562] This embodiment mode can be implemented by appropriately combining at least a part thereof with other embodiment modes described in this specification.

[0563] (Sixth embodiment) In this embodiment, examples of electronic devices to which the display device of one embodiment of the present invention can be applied will be described.

[0564] Electronic device 6500 shown in FIG. 41A is a portable information terminal that can be used as a smartphone.

[0565] The electronic device 6500 includes a housing 6501, a display portion 6502, a power button 6503, a button 6504, a speaker 6505, a microphone 6506, a camera 6507, and a light source 6508. The display portion 6502 has a touch panel function.

[0566] The display device of one embodiment of the present invention can be applied to the display portion 6502.

[0567] FIG. 41B is a schematic cross-sectional view including the end of the housing 6501 on the microphone 6506 side.

[0568] A light-transmitting protective member 6510 is provided on the display surface side of the housing 6501, and a display panel 6511, optical members 6512, a touch sensor panel 6513, a printed circuit board 6517, a battery 6518, etc. are arranged in the space surrounded by the housing 6501 and the protective member 6510.

[0569] A display panel 6511, an optical member 6512, and a touch sensor panel 6513 are fixed to the protective member 6510 by adhesive layers (not shown).

[0570] A part of the display panel 6511 is folded back in an area outside the display unit 6502. An FPC 6515 is connected to the folded back part. An IC 6516 is mounted on the FPC 6515. The FPC 6515 is also connected to a terminal provided on a printed circuit board 6517.

[0571] The flexible display panel of one embodiment of the present invention can be applied to the display panel 6511. Therefore, an extremely lightweight electronic device can be realized. Furthermore, since the display panel 6511 is extremely thin, a large-capacity battery 6518 can be mounted thereon while keeping the thickness of the electronic device small. Furthermore, by folding back a part of the display panel 6511 and arranging a connection portion with the FPC 6515 on the back side of the pixel portion, an electronic device with a narrow frame can be realized.

[0572] This embodiment mode can be implemented by appropriately combining at least a part thereof with other embodiment modes described in this specification.

[0573] (Embodiment 7) In this embodiment, electronic devices including a display device manufactured using one embodiment of the present invention will be described.

[0574] The electronic devices exemplified below each include a display device according to one embodiment of the present invention in a display portion. Therefore, the electronic devices can achieve high resolution. Furthermore, the electronic devices can also have both high resolution and a large screen.

[0575] The display portion of the electronic device of one embodiment of the present invention can display images with a resolution of, for example, full high definition, 4K2K, 8K4K, 16K8K, or higher.

[0576] Examples of electronic devices include electronic devices with relatively large screens such as television devices, notebook personal computers, monitor devices, digital signage, pachinko machines, and game machines, as well as digital cameras, digital video cameras, digital photo frames, mobile phones, portable game machines, personal digital assistants, and sound playback devices.

[0577] An electronic device to which one embodiment of the present invention is applied can be incorporated along a flat or curved surface of an inner or outer wall of a house or building, or the interior or exterior of an automobile or the like.

[0578] FIG. 42A is a diagram showing the appearance of the camera 8000 with the viewfinder 8100 attached.

[0579] The camera 8000 includes a housing 8001, a display unit 8002, operation buttons 8003, a shutter button 8004, etc. The camera 8000 also has a detachable lens 8006 attached thereto.

[0580] The camera 8000 may have the lens 8006 and the housing integrated together.

[0581] The camera 8000 can capture an image by pressing a shutter button 8004 or touching a display unit 8002 that functions as a touch panel.

[0582] The housing 8001 has a mount with electrodes, and can be connected to a finder 8100 as well as a strobe device and the like.

[0583] The finder 8100 includes a housing 8101, a display portion 8102, a button 8103, and the like.

[0584] The housing 8101 is attached to the camera 8000 by a mount that engages with the mount of the camera 8000. The viewfinder 8100 can display an image received from the camera 8000 on a display unit 8102.

[0585] The button 8103 has a function such as a power button.

[0586] The display device of one embodiment of the present invention can be applied to a display portion 8002 of a camera 8000 and a display portion 8102 of a finder 8100. Note that the camera 8000 may have a built-in finder.

[0587] FIG. 42B is a diagram showing the appearance of the head mounted display 8200.

[0588] The head-mounted display 8200 includes a mounting portion 8201, a lens 8202, a main body 8203, a display portion 8204, and a cable 8205. The mounting portion 8201 has a built-in battery 8206.

[0589] A cable 8205 supplies power from a battery 8206 to the main body 8203. The main body 8203 includes a wireless receiver or the like, and can display received video information on a display portion 8204. The main body 8203 also includes a camera, and can use information on the movement of the user's eyeballs or eyelids as an input means.

[0590] The wearing unit 8201 may have a function of recognizing the line of sight by providing a plurality of electrodes at positions that come into contact with the user and capable of detecting a current that flows in accordance with the movement of the user's eyeballs. The wearing unit 8201 may also have a function of monitoring the user's pulse rate based on the current that flows through the electrodes. The wearing unit 8201 may also have various sensors such as a temperature sensor, a pressure sensor, and an acceleration sensor, and may have one or more functions of displaying the user's biological information on the display unit 8204 and changing the image displayed on the display unit 8204 in accordance with the movement of the user's head.

[0591] The display device of one embodiment of the present invention can be applied to the display portion 8204.

[0592] 42C, 42D, and 42E are diagrams showing the appearance of a head mounted display 8300. The head mounted display 8300 includes a housing 8301, a display unit 8302, a band-shaped fixture 8304, and a pair of lenses 8305.

[0593] A user can view the display on the display portion 8302 through the lens 8305. Note that it is preferable to arrange the display portion 8302 in a curved manner because the user can feel a high sense of presence. In addition, by viewing different images displayed in different regions of the display portion 8302 through the lens 8305, it is possible to perform 3D display using parallax. Note that the present invention is not limited to a configuration in which one display portion 8302 is provided, and two display portions 8302 may be provided, with one display portion being provided for each eye of the user.

[0594] Note that the display device of one embodiment of the present invention can be applied to the display portion 8302. The display device including the semiconductor device of one embodiment of the present invention has extremely high definition; therefore, even when an image is enlarged using the lens 8305 as in FIG. 42E, pixels are not visible to a user, and more realistic images can be displayed.

[0595] The electronic device shown in Figures 43A to 43G has a housing 9000, a display unit 9001, a speaker 9003, operation keys 9005 (including a power switch or an operation switch), a connection terminal 9006, a sensor 9007 (including a function to measure force, displacement, position, speed, acceleration, angular velocity, rotation speed, distance, light, liquid, magnetism, temperature, chemical substance, sound, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, odor or infrared rays), a microphone 9008, etc.

[0596] 43A to 43G have various functions. For example, they may have a function to display various information (still images, videos, text images, etc.) on a display unit, a touch panel function, a function to display a calendar, date, or time, a function to control processing using various software (programs), a wireless communication function, a function to read and process programs or data recorded on a recording medium, etc. Note that the functions of the electronic device are not limited to these, and the electronic device may have various other functions. The electronic device may have multiple display units. Furthermore, the electronic device may have a function to include a camera or the like to capture still images or videos and store them on a recording medium (external or built-in to the camera), a function to display the captured images on the display unit, etc.

[0597] The electronic devices shown in FIGS. 43A to 43G will be described in detail below.

[0598] 43A is a perspective view showing a television device 9100. The television device 9100 can incorporate a display unit 9001 with a large screen, for example, 50 inches or more, or 100 inches or more.

[0599] FIG. 43B is a perspective view showing a mobile information terminal 9101. The mobile information terminal 9101 can be used as, for example, a smartphone. The mobile information terminal 9101 may be provided with a speaker 9003, a connection terminal 9006, a sensor 9007, and the like. The mobile information terminal 9101 can display one or more pieces of text or image information on multiple surfaces. FIG. 43B shows an example in which three icons 9050 are displayed. Information 9051, indicated by a dashed rectangle, can also be displayed on another surface of the display unit 9001. Examples of the information 9051 include notifications of incoming emails, SNS messages, phone calls, etc., the title of the email or SNS message, the sender's name, the date and time, the remaining battery level, and the strength of antenna reception. Alternatively, an icon 9050 or the like may be displayed in the position where the information 9051 is displayed.

[0600] 43C is a perspective view showing mobile information terminal 9102. Mobile information terminal 9102 has a function of displaying information on three or more sides of display unit 9001. Here, an example is shown in which information 9052, information 9053, and information 9054 are displayed on different sides. For example, while mobile information terminal 9102 is placed in a breast pocket of clothes, the user can check information 9053 displayed in a position that can be observed from above mobile information terminal 9102. The user can check the display without taking mobile information terminal 9102 out of the pocket and decide, for example, whether to answer a call.

[0601] 43D is a perspective view showing a wristwatch-type mobile information terminal 9200. The display surface of the display unit 9001 is curved, and a display can be displayed along the curved display surface. The mobile information terminal 9200 can also perform hands-free conversations by communicating with, for example, a headset capable of wireless communication. The mobile information terminal 9200 can also perform data transmission and reception with other information terminals or charge itself via a connection terminal 9006. Charging may be performed by wireless power supply.

[0602] 43E, 43F, and 43G are perspective views showing a foldable mobile information terminal 9201. FIG. 43E is a perspective view of the mobile information terminal 9201 in an unfolded state, FIG. 43G is a perspective view of the mobile information terminal 9201 in a folded state, and FIG. 43F is a perspective view of a state in the process of changing from one of FIG. 43E and FIG. 43G to the other. The mobile information terminal 9201 is highly portable when folded, and has a seamless, wide display area when unfolded, providing excellent viewability of the display. The display unit 9001 of the mobile information terminal 9201 is supported by three housings 9000 connected by hinges 9055. For example, the display unit 9001 can be bent with a curvature radius of 1 mm or more and 150 mm or less.

[0603] 44A shows an example of a television device. A television device 7100 has a display unit 7500 built into a housing 7101. Here, the housing 7101 is supported by a stand 7103.

[0604] 44A can be operated using operation switches provided on the housing 7101 or a separate remote control 7111. Alternatively, a touch panel may be applied to the display portion 7500, and the television 7100 may be operated by touching the touch panel. The remote control 7111 may have a display portion in addition to operation buttons.

[0605] The television device 7100 may also include a television broadcast receiver or a communication device for network connection.

[0606] 44B shows a laptop personal computer 7200. The laptop personal computer 7200 includes a housing 7211, a keyboard 7212, a pointing device 7213, an external connection port 7214, and the like. A display portion 7500 is incorporated in the housing 7211.

[0607] 44C and 44D show an example of digital signage.

[0608] 44C includes a housing 7301, a display unit 7500, and a speaker 7303. The digital signage 7300 may further include an LED lamp, operation keys (including a power switch or an operation switch), a connection terminal, various sensors, a microphone, and the like.

[0609] 44D shows a digital signage 7400 attached to a cylindrical pillar 7401. The digital signage 7400 has a display unit 7500 provided along the curved surface of the pillar 7401.

[0610] The larger the display unit 7500, the more information can be provided at one time, and the larger the display unit 7500 is, the more easily it will catch people's attention, which will have the effect of increasing the advertising effectiveness of advertisements, for example.

[0611] It is preferable that a touch panel be applied to the display unit 7500 so that the user can operate it. This allows the display unit 7500 to be used not only for advertising purposes but also for providing information desired by the user, such as route information, traffic information, or guidance information for commercial facilities.

[0612] 44C and 44D, it is preferable that the digital signage 7300 or the digital signage 7400 can wirelessly communicate with an information terminal 7311 such as a smartphone carried by a user. For example, advertising information displayed on the display unit 7500 can be displayed on the screen of the information terminal 7311. For example, the display on the display unit 7500 can be switched by operating the information terminal 7311.

[0613] A game using the information terminal device 7311 as an operation means (controller) can also be executed on the digital signage 7300 or the digital signage 7400. This allows an unspecified number of users to simultaneously participate in and enjoy the game.

[0614] The display device of one embodiment of the present invention can be applied to the display portion 7500 in FIGS. 44A to 44D.

[0615] Although the electronic devices in this embodiment have a display portion, one embodiment of the present invention can also be applied to electronic devices that do not have a display portion.

[0616] This embodiment mode can be implemented by appropriately combining at least a part thereof with other embodiment modes described in this specification. [Example]

[0617] In this example, the effect of ultraviolet light on metal oxide films was evaluated. Three types of samples (Sample 1A, Sample 1B, and Sample 1C) having metal oxide films were prepared. A schematic cross-sectional view of Sample 1A is shown in FIG. 45A, a schematic cross-sectional view of Sample 1B is shown in FIG. 45B, and a schematic cross-sectional view of Sample 1C is shown in FIG. 45C.

[0618] <Sample preparation> First, a first metal oxide film 908 having a thickness of 30 nm was formed on a substrate 902. The first metal oxide film 908 was formed by sputtering using an In-Ga-Zn oxide target (In:Ga:Zn=4:2:4.1 [atomic ratio]). The pressure during film formation was 0.6 Pa, the source power was 2.5 kW, and the substrate temperature was room temperature. A mixed gas of oxygen gas and argon gas was used as the film formation gas, and the oxygen flow rate ratio was 10%. A glass substrate was used as the substrate 902.

[0619] Next, heat treatment was performed in a nitrogen gas atmosphere at 370°C for 1 hour, and then heat treatment was performed in a mixed atmosphere of nitrogen gas and oxygen gas at 370°C for 1 hour. The mixed atmosphere of nitrogen gas and oxygen gas had a nitrogen gas:oxygen gas = 4:1 (volume ratio). An oven was used for the heat treatment.

[0620] Subsequently, a silicon oxynitride film 910 having a thickness of 140 nm was formed on the first metal oxide film 908.

[0621] Subsequently, a heat treatment was carried out in a nitrogen gas atmosphere at 370° C. for 1 hour using an oven.

[0622] Subsequently, a second metal oxide film having a thickness of 20 nm was formed on the silicon oxynitride film 910. The second metal oxide film was formed by sputtering using an In-Ga-Zn oxide target (In:Ga:Zn=4:2:4.1 [atomic ratio]). The pressure during film formation was 0.8 Pa, the source power was 3.5 kW, and the substrate temperature was room temperature. Oxygen gas was used as the film formation gas (oxygen flow rate ratio 100%).

[0623] Subsequently, heat treatment was carried out for 1 hour at 370°C in a mixed atmosphere of nitrogen gas and oxygen gas. The mixed atmosphere of nitrogen gas and oxygen gas was nitrogen gas:oxygen gas = 4:1 (volume ratio). An oven was used for the heat treatment.

[0624] Subsequently, the second metal oxide film was removed.

[0625] Subsequently, a heat treatment was carried out in a nitrogen gas atmosphere at 370° C. for 1 hour using an oven.

[0626] Next, Sample 1B and Sample 1C were subjected to plasma treatment in a dry etching apparatus. Carbon tetrachloride gas was used for the plasma treatment, and the ICP power was 6000 W, the bias power was 500 W, and the pressure was 0.67 Pa. During the plasma treatment, masks were placed on Sample 1B and Sample 1C, respectively, to prevent Sample 1B and Sample 1C from being exposed to plasma. For Sample 1B, a quartz substrate 920 was used as the mask. For Sample 1C, a mask with a light-shielding film 930 provided on the quartz substrate 920 was used, preventing exposure to ultraviolet light. A 200-nm-thick aluminum film was used as the light-shielding film 930.

[0627] 45B shows a cross-sectional view of Sample 1B during plasma processing, and FIG. 45C shows a cross-sectional view of Sample 1C during plasma processing. 45B and 45C show schematic views of ultraviolet light 940 generated by the plasma.

[0628] Sample 1A was not subjected to plasma treatment.

[0629] Subsequently, the silicon oxynitride film 910 was removed to expose the first metal oxide film 908.

[0630] <Sheet resistance measurement> Subsequently, the sheet resistance of the sample prepared above was measured to evaluate the resistance of the first metal oxide film 908.

[0631] The sheet resistance values ​​of the first metal oxide film 908 of each sample are shown in Fig. 46. In Fig. 46, the horizontal axis indicates the sample name, whether or not plasma treatment was performed, and the mask conditions used during the plasma treatment, and the vertical axis indicates the sheet resistance (Rs) of the first metal oxide film 908.

[0632] As shown in Figure 46, the resistance of Sample 1B, which was exposed to UV light by plasma treatment, was lower than that of Sample 1A, which was not subjected to plasma treatment and was not exposed to UV light. On the other hand, the resistance of Sample 1C, which was not exposed to UV light by plasma treatment, was equivalent to that of Sample 1A.

[0633] These results indicate that ultraviolet light generated by plasma treatment reduces the resistance of metal oxide films, and that the reduction in resistance of metal oxide films can be suppressed by preventing the metal oxide films from being exposed to ultraviolet light during plasma treatment. [Example]

[0634] Example 1 In this example, the transmittance of an organic material that can be used in one embodiment of the present invention was evaluated. In this example, eight types of samples (Samples 2A to 2H) using different organic materials were fabricated.

[0635] <Sample preparation> For sample 2A, organic material A was formed to a thickness of 1.5 μm on a glass substrate. As organic material A, acrylic resin (JEM-549 manufactured by JSR Corporation) was used.

[0636] For sample 2B, a 1.5 μm-thick layer of organic material B was formed on a glass substrate. As organic material B, a polyimide resin (DL-1603 manufactured by Toray Industries, Inc.) was used.

[0637] For sample 2C, organic material C was formed to a thickness of 1.5 μm on a glass substrate. Novolac resin (RG-300 manufactured by Merck) was used as organic material C. Organic material C is a material that can also be used as a resist in, for example, a photolithography process.

[0638] For sample 2D, organic material D was formed to a thickness of 1.2 μm on a glass substrate. Novolac resin (TELR-P003PM manufactured by Tokyo Ohka Kogyo Co., Ltd.) was used as organic material D. Organic material D was brown in color.

[0639] For sample 2E, organic material E was formed to a thickness of 0.6 μm on a glass substrate. An acrylic resin (BK-4611 manufactured by Tokyo Ohka Kogyo Co., Ltd.) was used as organic material E. Organic material E was black in color and could also be used as a light-shielding layer, for example.

[0640] For sample 2F, organic material F was formed to a thickness of 1.5 μm on a glass substrate. An acrylic resin (CR-7001W manufactured by Fujifilm Electronic Materials Co., Ltd.) was used as organic material F. Organic material F exhibited a red color and was a material that could be used, for example, for a red colored layer.

[0641] For sample 2G, a 1.5 μm-thick organic material G was formed on a glass substrate. An acrylic resin (CG-7001W manufactured by Fujifilm Electronic Materials Co., Ltd.) was used as the organic material G. The organic material G exhibited a green color and could be used, for example, for a green colored layer.

[0642] For sample 2H, a 1.5 μm thick layer of organic material H was formed on a glass substrate. An acrylic resin (CB-7001W manufactured by Fujifilm Electronic Materials Co., Ltd.) was used as organic material H. Organic material H exhibited a blue color and could be used, for example, for a blue colored layer.

[0643] Next, Samples 2A to 2H were subjected to heat treatment at 250° C. An oven was used for the heat treatment. Samples 2A to 2C and Samples 2F to 2H were subjected to the treatment in a nitrogen gas atmosphere for 1 hour. Sample 2D was subjected to the treatment in an air atmosphere for 1 hour. Sample 2E was subjected to the treatment in a nitrogen gas atmosphere for 30 minutes. An oven was used for the heat treatment of all samples.

[0644] Sample 2I and Sample 2J were prepared as comparative samples. Sample 2I was a glass substrate, and Sample 2J was a quartz substrate.

[0645] <Transmittance measurement> Next, the transmittance of the sample prepared above was measured.

[0646] The measurement results of the transmittance of each sample are shown in Figures 47 and 48. In Figures 47 and 48, the horizontal axis represents wavelength λ, and the vertical axis represents transmittance T.

[0647] As shown in FIGS. 47 and 48, it was confirmed that Samples 2A to 2H had low transmittance in the ultraviolet wavelength region. [Example]

[0648] In this example, a transistor was fabricated and its electrical characteristics were evaluated.

[0649] In this example, Sample 3A, which is a transistor of one embodiment of the present invention, and Samples 3B and 3C, which are comparative transistors, were fabricated. The structure of Sample 3A can be referred to the description of the transistor 100 in Embodiment 1 and FIGS. 1A to 1C.

[0650] 49A shows a schematic cross-sectional view of Sample 3B, which is a comparative example, in the channel direction. Sample 3B differs from Sample 3A in that openings 143a and 143b in insulating layer 130 are located outside openings 141a and 141b in insulating layer 110 and insulating layer 118, and conductive layers 120a and 120b contact the side surfaces of insulating layer 110 and insulating layer 118.

[0651] 49B shows a schematic cross-sectional view of Sample 3C, a comparative example, in the channel direction. Sample 3C differs from Sample 3A in that it does not have the insulating layer 130 and that the conductive layers 120a and 120b contact the side surfaces of the insulating layer 110 and the insulating layer 118.

[0652] <Sample preparation> First, a metal oxide film having a thickness of approximately 30 nm was formed on the substrate 102. The metal oxide film was formed by sputtering using a sputtering target having an atomic ratio of metal elements of In:Ga:Zn=1:1:1. The substrate 102 was a glass substrate.

[0653] Subsequently, a heat treatment was carried out in a dry air atmosphere at 340° C. for 2 hours. An oven was used for the heat treatment.

[0654] Subsequently, a metal oxide film was formed and processed to obtain the semiconductor layer 108.

[0655] Subsequently, a silicon oxynitride film having a thickness of about 140 nm was formed by plasma CVD as the insulating layer 110 that functions as a gate insulating layer.

[0656] Subsequently, a heat treatment was carried out in a dry air atmosphere at 340° C. for 1 hour. An oven was used for the heat treatment.

[0657] Subsequently, a titanium film having a thickness of about 50 nm, an aluminum film having a thickness of about 200 nm, and a titanium film having a thickness of about 50 nm were formed by sputtering, and then each conductive film was processed to obtain a conductive layer 112 that functions as a gate electrode.

[0658] Subsequently, after performing plasma treatment in a hydrogen atmosphere, a silicon nitride oxide film with a thickness of approximately 300 nm was formed as the insulating layer 118. The plasma treatment and the formation of the silicon nitride oxide film were performed consecutively using a plasma CVD apparatus. By the plasma treatment, a low-resistance region 108N was formed in a region of the semiconductor layer 108 that did not overlap with the conductive layer 112.

[0659] Subsequently, parts of the insulating layer 110 and the insulating layer 118 were removed by etching to form openings 141a and 141b.

[0660] Next, an insulating layer 130 was formed in Sample 3A and Sample 3B. A polyimide resin with a thickness of 1.5 μm was used as the insulating layer 130. At this time, in Sample 3A, which is a transistor of one embodiment of the present invention, the insulating layer 130 was formed so that the opening 143a of the insulating layer 130 was located inside the opening 141a and the opening 143b of the insulating layer 130 was located inside the opening 141b, as shown in FIG. 1B . In this manner, the side surfaces of the insulating layer 110 and the insulating layer 118 on the low-resistance region 108N were covered with the insulating layer 130.

[0661] In sample 3B, which is a comparative example, insulating layer 130 was formed so that opening 143a of insulating layer 130 was located outside opening 141a and opening 143b of insulating layer 130 was located outside opening 141b, as shown in Fig. 49A. In this way, the side surfaces of insulating layer 110 and insulating layer 118 on low-resistance region 108N were not covered with insulating layer 130. In sample 3C, as shown in Fig. 49B, insulating layer 130 was not formed.

[0662] Subsequently, a heat treatment was carried out in a nitrogen gas atmosphere at 250° C. for 1 hour using an oven.

[0663] Subsequently, a titanium film having a thickness of about 50 nm, an aluminum film having a thickness of about 300 nm, and a titanium film having a thickness of about 50 nm were formed by sputtering, respectively, and then each conductive film was processed to obtain conductive layers 120a and 120b that function as a source electrode and a drain electrode.

[0664] Through the above steps, Samples 3A to 3C were obtained.

[0665] <Transistor Id-Vg characteristics> Next, the Id-Vg characteristics of the transistors in Samples 3A to 3C fabricated as described above were measured.

[0666] The Id-Vg characteristics of the transistor were measured by applying a voltage to the gate electrode (hereinafter also referred to as gate voltage (VG)) in 0.25 V increments from -15 V to +15 V. The voltage applied to the source electrode (hereinafter also referred to as source voltage (VS)) was set to 0 V (comm), and the voltage applied to the drain electrode (hereinafter also referred to as drain voltage (VD)) was set to 0.1 V and 10 V.

[0667] Here, the measurements were taken on transistors with a design value of 6 μm channel length and 100 μm channel width, and the number of measurements was 20 for each sample.

[0668] 50 shows the threshold voltages Vth of the transistors of Samples 3A to 3C. In FIG. 50, the horizontal axis represents the sample name, and the vertical axis represents the threshold voltage Vth.

[0669] 50, Sample 3B including the insulating layer 130 had a threshold voltage Vth on the positive side compared to Sample 3C without the insulating layer 130. Furthermore, Sample 3A including the transistor of one embodiment of the present invention had a threshold voltage Vth on the positive side compared to Sample 3B, and was confirmed to have favorable normally-off electrical characteristics. [Example]

[0670] In this example, a transistor was fabricated and its electrical characteristics were evaluated.

[0671] In this example, Sample 4A and Sample 4B, which are transistors of one embodiment of the present invention, and Sample 4C, which is a comparative transistor, were fabricated. For the structures of Sample 4A and Sample 4B, refer to the description of the transistor 100C in Embodiment 1 and FIGS. 13A to 13C.

[0672] 49C shows a schematic cross-sectional view of Sample 4C, which is a comparative example, in the channel direction. Sample 4C differs from Samples 4A and 4B in that openings 143a and 143b in insulating layer 130 are located outside openings 141a and 141b in insulating layers 110 and 118, and conductive layers 120a and 120b contact side surfaces of insulating layer 110 and insulating layer 118.

[0673] <Sample preparation> First, a tungsten film having a thickness of about 100 nm was formed on a glass substrate by sputtering, and then processed to obtain a conductive layer 106 that functions as a first gate electrode.

[0674] Next, an insulating layer 103 functioning as a first gate insulating layer was formed. The insulating layer 103 had a stacked structure of insulating films 103a and 103b. The insulating film 103a had a stacked structure of a silicon nitride film with a thickness of approximately 30 nm and a silicon nitride oxide film with a thickness of approximately 280 nm. The insulating film 103b was a silicon oxynitride film with a thickness of approximately 20 nm.

[0675] Subsequently, a metal oxide film with a thickness of approximately 30 nm was formed by sputtering using a sputtering target with an atomic ratio of metal elements of In:Ga:Zn=1:1:1.

[0676] Subsequently, a heat treatment was carried out in a dry air atmosphere at 340° C. for 2 hours. An oven was used for the heat treatment.

[0677] Subsequently, a metal oxide film was formed and processed to obtain the semiconductor layer 108.

[0678] Subsequently, a silicon oxynitride film having a thickness of about 140 nm was formed by plasma CVD as an insulating layer 110 that functions as a second gate insulating layer.

[0679] Subsequently, a heat treatment was carried out in a dry air atmosphere at 340° C. for 1 hour. An oven was used for the heat treatment.

[0680] Subsequently, a titanium film having a thickness of about 50 nm, an aluminum film having a thickness of about 200 nm, and a titanium film having a thickness of about 50 nm were formed by sputtering, and then each conductive film was processed to obtain a conductive layer 112 that functions as a second gate electrode.

[0681] Subsequently, after performing plasma treatment in a hydrogen atmosphere, a silicon nitride oxide film with a thickness of approximately 300 nm was formed as the insulating layer 118. The plasma treatment and the formation of the silicon nitride oxide film were performed consecutively using a plasma CVD apparatus. By the plasma treatment, a low-resistance region 108N was formed in a region of the semiconductor layer 108 that did not overlap with the conductive layer 112.

[0682] Subsequently, parts of the insulating layer 110 and the insulating layer 118 were removed by etching to form openings 141a and 141b.

[0683] Next, the insulating layer 130 was formed. In Sample 4A and Sample 4C, a polyimide resin with a thickness of 2.0 μm was used as the insulating layer 130. In Sample 4B, an acrylic resin with a thickness of 2.0 μm was used as the insulating layer 130. In Sample 4A and Sample 4B, which are transistors of one embodiment of the present invention, the insulating layer 130 was formed so that the opening 143a of the insulating layer 130 was located inside the opening 141a and the opening 143b of the insulating layer 130 was located inside the opening 141b, as shown in FIG. 13B . In this manner, the side surfaces of the insulating layer 110 and the insulating layer 118 on the low-resistance region 108N were covered with the insulating layer 130.

[0684] 49C, in sample 4C, which is a comparative example, insulating layer 130 is formed so that opening 143a of insulating layer 130 is located outside opening 141a and opening 143b of insulating layer 130 is located outside opening 141b. In this way, the side surfaces of insulating layer 110 and insulating layer 118 on low-resistance region 108N are not covered with insulating layer 130.

[0685] Subsequently, a heat treatment was carried out in a nitrogen gas atmosphere at 250° C. for 1 hour using an oven.

[0686] Subsequently, a titanium film having a thickness of about 50 nm, an aluminum film having a thickness of about 300 nm, and a titanium film having a thickness of about 50 nm were formed by sputtering, respectively, and then each conductive film was processed to obtain conductive layers 120a and 120b that function as a source electrode and a drain electrode.

[0687] Through the above steps, Samples 4A to 4C were obtained.

[0688] <Transistor Id-Vg characteristics> Next, the Id-Vg characteristics of the transistors in Samples 4A to 4C fabricated as described above were measured.

[0689] The Id-Vg characteristics of the transistor were measured by applying a voltage to the gate electrode (hereinafter also referred to as gate voltage (VG)) from -15 V to +15 V in 0.25 V increments. The voltage applied to the source electrode (hereinafter also referred to as source voltage (VS)) was set to 0 V (comm), and the voltage applied to the drain electrode (hereinafter also referred to as drain voltage (VD)) was set to 0.1 V and 10 V. The Id-Vg characteristics were measured by applying the same gate voltage to the first gate electrode and the second gate electrode.

[0690] Here, the measurements were taken on transistors with a design value of 3 μm channel length and 50 μm channel width, and the number of measurements was 20 for each sample.

[0691] Figure 51 shows the Id-Vg characteristics of Samples 4A to 4C. Figure 51 shows the Id-Vg characteristics of 20 transistors, each overlaid. Figure 51 also shows the average (ave.) and standard deviation (3σ) of the threshold voltage Vth of each sample.

[0692] 51, it was confirmed that Samples 4A and 4B, which are embodiments of the present invention, have threshold voltages Vth on the positive side compared to Sample 4C (comparison example). Furthermore, it was confirmed that Sample 4A has a threshold voltage Vth that is even more positive than Sample 4B, and has good normally-off electrical characteristics.

[0693] <Cross-section observation> Next, the sample was sliced ​​using a focused ion beam (FIB), and the cross section was observed using a scanning transmission electron microscope (STEM).

[0694] STEM images of the cross section of sample 4A are shown in FIGS. 52A and 52B. STEM images of the cross section of sample 4B are shown in FIGS. 53A and 53B. STEM images of the cross section of sample 4C are shown in FIGS. 54A and 54B. FIGS. 52A, 53A, and 54A are transmitted electron (TE) images at a magnification of 8,000 times. FIGS. 52B, 53B, and 54B are transmitted electron (TE) images at a magnification of 25,000 times, enlarging the opening 143a and its vicinity.

[0695] 52A to 54B, it was confirmed that each sample had a good shape. Furthermore, width 151 of the region of insulating layer 130 in contact with semiconductor layer 108 (low-resistance region 108N) was approximately 490 nm (left side of FIG. 52B) and approximately 460 nm (right side of FIG. 52B) for sample 4A, and approximately 630 nm (left side of FIG. 53B) and approximately 650 nm (right side of FIG. 53B) for sample 4B. [Example]

[0696] In this example, the transmittance of a conductive film that can be used in one embodiment of the present invention was evaluated.

[0697] <Sample preparation> A titanium film was formed on a quartz substrate by sputtering. In this example, six types of titanium films were fabricated with different thicknesses (20 nm, 35 nm, 50 nm, 70 nm, 100 nm, and 200 nm).

[0698] <Transmittance measurement> Next, the transmittance of the sample prepared above was measured.

[0699] The measurement results of the transmittance of each sample are shown in Figure 55A. A graph in which the vertical axis of Figure 55A is enlarged is shown in Figure 55B. In Figures 55A and 55B, the horizontal axis represents wavelength λ, and the vertical axis represents transmittance T.

[0700] As shown in FIGS. 55A and 55B, it was found that the thicker the titanium film, the lower the transmittance of ultraviolet light. [Example]

[0701] In this example, the influence of ultraviolet light on a metal oxide film during the formation of a conductive film was evaluated. Six types of samples were prepared, each with a different thickness of conductive film formed on the metal oxide film. In addition, one type of sample without a conductive film was prepared as a reference sample.

[0702] <Sample preparation> First, a silicon nitride film having a thickness of 120 nm was formed on a glass substrate.

[0703] Subsequently, a first silicon oxynitride film was formed to a thickness of 150 nm.

[0704] Next, a metal oxide film with a thickness of 30 nm was formed. The metal oxide film was formed by sputtering using an In-Ga-Zn oxide target (In:Ga:Zn=5:1:3 [atomic ratio]). The pressure during film formation was 0.4 Pa, the power supply was 1.0 kW, and the substrate temperature was room temperature. A mixed gas of oxygen gas and argon gas was used as the film formation gas, and the oxygen flow rate ratio was 50%.

[0705] Subsequently, heat treatment was carried out in a dry air (CDA) atmosphere at 320° C. for 1 hour, and then at 340° C. for 1 hour. An oven was used for the heat treatment.

[0706] Subsequently, a second silicon oxynitride film was formed to a thickness of 140 nm.

[0707] Subsequently, a heat treatment was carried out in a dry air (CDA) atmosphere at 340°C for 1 hour. An oven was used for the heat treatment.

[0708] Next, a conductive film was formed on the second silicon oxynitride film by sputtering. The conductive film had a stacked structure of a first titanium film, an aluminum film on the first titanium film, and a second titanium film on the aluminum film. Six types of samples were fabricated, each with a different thickness for the first titanium film (20 nm, 35 nm, 50 nm, 70 nm, 100 nm, and 200 nm). The thickness of the aluminum film was 200 nm, and the thickness of the second titanium film was 50 nm. In one type of sample, no conductive film was formed.

[0709] Subsequently, the conductive film was removed by wet etching.

[0710] Subsequently, the second silicon oxynitride film was removed to expose the metal oxide film by dry etching.

[0711] <Sheet resistance measurement> Subsequently, the sheet resistance of the sample prepared above was measured to evaluate the resistance of the metal oxide film.

[0712] The sheet resistance values ​​of the metal oxide film of each sample are shown in Figure 56. In Figure 56, the horizontal axis represents the thickness of the first titanium film, and the vertical axis represents the sheet resistance (Rs) of the metal oxide film. Note that samples on which no conductive film was formed are marked "none" on the horizontal axis of Figure 56.

[0713] As shown in Figure 56, it was found that the formation of a conductive film reduces the resistance of the metal oxide film. Furthermore, the resistance of the metal oxide film decreases as the thickness of the first titanium film increases, and no difference in the resistance of the metal oxide film was observed when the thickness of the first titanium film was 70 nm or more. In the formation of the conductive film, the resistance of the metal oxide film decreases in the early stages of film formation as ultraviolet light reaches the metal oxide film, but as the conductive film becomes thicker, the ultraviolet light is blocked by the conductive film, and no difference in the resistance of the metal oxide film is observed. [Example]

[0714] In this example, the influence of ultraviolet light on a metal oxide film during the formation of a conductive film was evaluated. Nine types of samples were prepared under different conditions for forming a conductive film on the metal oxide film. In addition, one type of sample without a conductive film was prepared as a reference sample.

[0715] <Sample preparation> First, a silicon nitride film having a thickness of 120 nm was formed on a glass substrate.

[0716] Subsequently, a first silicon oxynitride film was formed to a thickness of 150 nm.

[0717] Next, a metal oxide film with a thickness of 30 nm was formed. The metal oxide film was formed by sputtering using an In-Ga-Zn oxide target (In:Ga:Zn=5:1:3 [atomic ratio]). The pressure during film formation was 0.4 Pa, the power supply was 1.0 kW, and the substrate temperature was room temperature. A mixed gas of oxygen gas and argon gas was used as the film formation gas, and the oxygen flow rate ratio was 50%.

[0718] Subsequently, heat treatment was carried out in a dry air (CDA) atmosphere at 320° C. for 1 hour, and then at 340° C. for 1 hour. An oven was used for the heat treatment.

[0719] Subsequently, a second silicon oxynitride film was formed to a thickness of 140 nm.

[0720] Subsequently, a heat treatment was carried out in a dry air (CDA) atmosphere at 340°C for 1 hour. An oven was used for the heat treatment.

[0721] Next, a conductive film was formed on the second silicon oxynitride film by sputtering. The conductive film had a stacked structure of a first titanium film, an aluminum film on the first titanium film, and a second titanium film on the aluminum film. The thickness of the first titanium film was 50 nm, the thickness of the aluminum film was 200 nm, and the thickness of the second titanium film was 50 nm. Nine types of samples were fabricated using different deposition conditions for the first titanium film. The deposition conditions for the first titanium film included three pressure conditions (0.3 Pa, 0.6 Pa, and 0.85 Pa) and three power conditions (8 kW, 29 kW, and 58 kW). One type of sample did not have a conductive film formed.

[0722] Subsequently, the conductive film was removed by wet etching.

[0723] Subsequently, the second silicon oxynitride film was removed to expose the metal oxide film by dry etching.

[0724] <Sheet resistance measurement> Subsequently, the sheet resistance of the sample prepared above was measured to evaluate the resistance of the metal oxide film.

[0725] The sheet resistance values ​​of the metal oxide film of each sample are shown in Figure 57. In Figure 57, the horizontal axis represents the film formation conditions for the first titanium film, and the vertical axis represents the sheet resistance (Rs) of the metal oxide film. Note that samples on which no conductive film was formed are marked "none" on the horizontal axis of Figure 57.

[0726] As shown in Figure 57, it was found that the resistance of the metal oxide film was reduced by forming a conductive film. It was also found that the resistance of the metal oxide film increased by increasing the power during the formation of the first titanium film. When the power during the formation of the first titanium film was high, the film formation speed increased, which shortened the time it took for UV light to reach the metal oxide film. As a result, the amount of UV light reaching the metal oxide film was reduced, which is thought to have suppressed the decrease in the resistance of the metal oxide film. Furthermore, no difference was observed in the resistance of the metal oxide film depending on the pressure during the formation of the first titanium film. [Example]

[0727] In this example, the influence of ultraviolet light on a metal oxide film during the formation of a conductive film was evaluated. Nine types of samples were prepared under different conditions for forming a conductive film on the metal oxide film. In addition, one type of sample without a conductive film was prepared as a reference sample.

[0728] <Sample preparation> First, a silicon nitride film having a thickness of 120 nm was formed on a glass substrate.

[0729] Subsequently, a first silicon oxynitride film was formed to a thickness of 150 nm.

[0730] Next, a metal oxide film with a thickness of 30 nm was formed. The metal oxide film was formed by sputtering using an In-Ga-Zn oxide target (In:Ga:Zn=5:1:3 [atomic ratio]). The pressure during film formation was 0.4 Pa, the power supply was 1.0 kW, and the substrate temperature was room temperature. A mixed gas of oxygen gas and argon gas was used as the film formation gas, and the oxygen flow rate ratio was 50%.

[0731] Subsequently, heat treatment was carried out in a dry air (CDA) atmosphere at 320° C. for 1 hour, and then at 340° C. for 1 hour. An oven was used for the heat treatment.

[0732] Subsequently, a second silicon oxynitride film was formed to a thickness of 140 nm.

[0733] Subsequently, a heat treatment was carried out in a dry air (CDA) atmosphere at 340°C for 1 hour. An oven was used for the heat treatment.

[0734] Next, a conductive film was formed on the second silicon oxynitride film by sputtering. The conductive film had a stacked structure of a first titanium film, an aluminum film on the first titanium film, and a second titanium film on the aluminum film. The thickness of the first titanium film was 50 nm, the thickness of the aluminum film was 200 nm, and the thickness of the second titanium film was 50 nm. Nine types of samples were fabricated using different aluminum film deposition conditions. The aluminum film deposition conditions included three pressure conditions (0.3 Pa, 0.6 Pa, and 0.85 Pa) and three power conditions (10 kW, 36 kW, and 78 kW). One type of sample did not have a conductive film formed.

[0735] Subsequently, the conductive film was removed by wet etching.

[0736] Subsequently, the second silicon oxynitride film was removed to expose the metal oxide film by dry etching.

[0737] <Sheet resistance measurement> Subsequently, the sheet resistance of the sample prepared above was measured to evaluate the resistance of the metal oxide film.

[0738] The sheet resistance values ​​of the metal oxide film of each sample are shown in Figure 58. In Figure 58, the horizontal axis shows the film formation conditions for the aluminum film, and the vertical axis shows the sheet resistance (Rs) of the metal oxide film. Note that samples on which no conductive film was formed are marked "none" on the horizontal axis of Figure 58.

[0739] As shown in Figure 58, it was found that the resistance of the metal oxide film was reduced by forming a conductive film. It was also found that the resistance of the metal oxide film increased by increasing the power during aluminum film formation. When the power during aluminum film formation was high, the film formation speed increased, which shortened the time it took for UV light to reach the metal oxide film. As a result, the amount of UV light reaching the metal oxide film was reduced, which is thought to have suppressed the decrease in the resistance of the metal oxide film. Furthermore, no difference was observed in the resistance of the metal oxide film depending on the pressure during aluminum film formation. [Explanation of symbols]

[0740] DL_1: data line, DL_n: data line, DL_Y: data line, DL: data line, GL_1: gate line, GL_m: gate line, GL_X: gate line, GL: gate line, LC: liquid crystal element, VL_a: potential supply line, VL_b: potential supply line, 100A: transistor, 100B: transistor, 100C: transistor, 100D: transistor, 100E: transistor, 100F: transistor, 100G: transistor, 100H: transistor, 100: transistor, 102: substrate, 103a: insulating film, 103b: insulating film, 103: insulating layer, 106 : conductive layer, 108f: metal oxide film, 108L: region, 108N: low resistance region, 108: semiconductor layer, 110a: insulating film, 110b: insulating film, 110c: insulating film, 110: insulating layer, 112f: conductive film, 112: conductive layer, 112m: conductive film, 114f: metal oxide film, 114: metal oxide layer, 116: insulating layer, 118: insulating layer, 120a: conductive layer, 120b: conductive layer, 130: insulating layer, 132: insulating layer, 140: impurity element, 141a: opening, 141b: opening, 141W: width, 142: opening, 143a: opening, 143b: opening, 143W: width, 145a: opening , 145b: opening, 145W: width, 147a: opening, 147b: opening, 147W: width, 149a: opening, 149b: opening, 149W: width, 151: width, 193: target, 194: plasma, 195: target, 196: plasma, 400EL: pixel circuit, 400LC: pixel circuit, 400: pixel circuit, 401EL: circuit, 401LC: circuit, 401: circuit, 501: pixel circuit, 502: pixel section, 504a: gate driver, 504b: source driver, 504: drive circuit section, 506: protection circuit, 507: terminal section, 550: transistor, 552: transistor transistor, 554: transistor, 560: capacitance element, 562: capacitance element, 570: liquid crystal element, 572: light-emitting element, 700A: display device, 700B: display device, 700: display device, 701: first substrate, 702: pixel portion, 704: source driver circuit portion, 705: second substrate, 706: gate driver circuit portion, 708: FPC terminal portion, 710: signal line, 711: routing wiring portion, 712: sealing material, 716: FPC, 717: IC, 721: source driver IC, 722: gate driver circuit portion, 723: FPC, 724: printed circuit board, 730: insulating film,732: sealing film, 734: insulating film, 736: colored film, 738: light-shielding film, 740: protective layer, 741: protective layer, 742: adhesive layer, 743: resin layer, 744: insulating layer, 745: supporting substrate, 746: resin layer, 750: transistor, 752: transistor, 760: wiring, 770: planarizing insulating film, 772: conductive layer, 773: insulating layer, 774: conductive layer, 775: liquid crystal element, 776: liquid crystal layer, 778: structure, 780: anisotropic conductive film, 782: light-emitting element, 786: EL layer, 788: conductive film, 790: capacitance element, 800A: display device, 800: display device, 801: substrate plate, 811: conductive layer, 812: reflective layer, 813: insulating layer, 814B: conductive layer, 814G: conductive layer, 814R: conductive layer, 814: conductive layer, 815: EL layer, 816: conductive layer, 817: insulating layer, 818: insulating layer, 820B: light-emitting element, 820G: light-emitting element, 820R: light-emitting element, 820: light-emitting element, 821: insulating layer, 830: plug, 831: plug, 902: substrate, 908: first metal oxide film, 910: silicon oxynitride film, 920: quartz substrate, 930: light-shielding film, 940: ultraviolet light, 6000: display module, 6001: upper cover, 6002: lower cover bar, 6005: FPC, 6006: display device, 6009: frame, 6010: printed circuit board, 6011: battery, 6015: light emitting unit, 6016: light receiving unit, 6017a: light guiding unit, 6017b: light guiding unit, 6018: light, 6500: electronic device, 6501: housing, 6502: display unit, 6503: power button, 6504: button, 6505: speaker, 6506: microphone, 6507: camera, 6508: light source, 6510: protective member, 6511: display panel, 6512: optical member, 6513: touch sensor panel, 6515: FPC, 6516: IC, 65 17: Printed circuit board, 6518: Battery, 7100: Television device, 7101: Housing, 7103: Stand, 7111: Remote control device, 7200: Notebook personal computer, 7211: Housing, 7212: Keyboard, 7213: Pointing device, 7214: External connection port, 7300: Digital signage, 7301: Housing, 7303: Speaker, 7311: Information terminal device, 7400: Digital signage, 7401: Pillar, 7500: Display unit, 8000: Camera, 8001: Housing, 8002: Display unit, 8003: Operation button,8004: Shutter button, 8006: Lens, 8100: Viewfinder, 8101: Housing, 8102: Display, 8103: Button, 8200: Head-mounted display, 8201: Mounting part, 8202: Lens, 8203: Main body, 8204: Display, 8205: Cable, 8206: Battery, 8300: Head-mounted display, 8301: Housing, 8302: Display, 8304: Fixture, 8305: Lens, 9000: housing, 9001: display unit, 9003: speaker, 9005: operation keys, 9006: connection terminal, 9007: sensor, 9008: microphone, 9050: icon, 9051: information, 9052: information, 9053: information, 9054: information, 9055: hinge, 9100: television device, 9101: portable information terminal, 9102: portable information terminal, 9200: portable information terminal, 9201: portable information terminal,

Claims

1. a semiconductor layer, a gate insulating layer, a gate electrode, a first insulating layer, a second insulating layer, a third insulating layer, and a conductive layer; the gate insulating layer is in contact with an upper surface and a side surface of the semiconductor layer; the gate electrode has a region overlapping with the semiconductor layer via the gate insulating layer, the first insulating layer comprises an inorganic material; the first insulating layer is in contact with an upper surface of the gate insulating layer and an upper surface and a side surface of the gate electrode; the gate insulating layer and the first insulating layer have a first opening in a region overlapping with the semiconductor layer; the second insulating layer comprises an organic material; the second insulating layer has a second opening inside the first opening; the second insulating layer is in contact with an upper surface and a side surface of the first insulating layer and a side surface of the gate insulating layer; the conductive layer is electrically connected to the semiconductor layer through the second opening; the third insulating layer comprises an inorganic material; the third insulating layer has a third opening inside the second opening; The third insulating layer is in contact with an upper surface and a side surface of the second insulating layer.

2. a semiconductor layer, a gate insulating layer, a gate electrode, a first insulating layer, a second insulating layer, a third insulating layer, and a conductive layer; the gate insulating layer is in contact with an upper surface of the semiconductor layer; the gate electrode has a region overlapping with the semiconductor layer via the gate insulating layer, the first insulating layer comprises an inorganic material; the first insulating layer is in contact with an upper surface and a side surface of the semiconductor layer, a side surface of the gate insulating layer, and an upper surface and a side surface of the gate electrode; the first insulating layer has a first opening in a region overlapping with the semiconductor layer; the second insulating layer comprises an organic material; the second insulating layer has a second opening inside the first opening; the second insulating layer is in contact with an upper surface and a side surface of the first insulating layer; the conductive layer is electrically connected to the semiconductor layer through the second opening; the third insulating layer comprises an inorganic material; the third insulating layer has a third opening inside the second opening; The third insulating layer is in contact with an upper surface and a side surface of the second insulating layer.

3. In claim 1 or claim 2, The semiconductor device, wherein an angle formed between the side surface of the second insulating layer and the top surface of the semiconductor layer is equal to or greater than 45 degrees and less than 90 degrees.

4. In any one of claims 1 to 3, the second insulating layer has a region in contact with an upper surface of the semiconductor layer, The width of the region is 50 nm or more and 3000 nm or less.

5. In any one of claims 1 to 4, The semiconductor device, wherein the transmittance of the second insulating layer in a wavelength range of 200 nm to 350 nm is 0.01% to 70%.

6. In any one of claims 1 to 5, The semiconductor device, wherein the transmittance of the organic material in a wavelength range of 200 nm to 350 nm is 0.01% to 70%.

7. In any one of claims 1 to 6, The organic material comprises one or more of an acrylic resin, a polyimide resin, an epoxy resin, a polyamide resin, a polyimideamide resin, a siloxane resin, a benzocyclobutene-based resin, a phenolic resin, a novolac resin, and precursors of these resins.

Images