Gas generating device, gas generating system, control device for gas generating device, control method, and control program

Abstract

To provide a gas generation device capable of properly generating a gas regardless of the quantity of a raw material gas to be supplied, a gas generation system, a control device of the gas generation device, and a control method and a control program thereof.SOLUTION: Provided is gas generation device comprising a substantially circular first electrode and a plurality of substantially fan-shaped second electrodes provided while facing the first electrode and being away therefrom and electrically insulated from each other, wherein a voltage can be applied selectively to any of the plurality of second electrodes, and a second gas is generated from the first gas by an electric discharge generated between the first electrode and the second electrode applied with the voltage when a first gas supplied from an outside passes through a gap of the first electrode and the second electrode applied with the voltage.SELECTED DRAWING: Figure 4A

Description

[Technical Field]

[0001] The present invention relates to a gas generating device, a gas generating system, a control device for a gas generating device, a control method, and a control program. [Background technology]

[0002] Patent Document 1 discloses an ozone generator that generates ozone gas from oxygen gas. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 4095758 Summary of the Invention [Problem to be solved by the invention]

[0004] An object of the present invention is to provide a gas generation device, a gas generation system, a control device for a gas generation device, a control method and a control program that can generate gas appropriately regardless of the amount of raw material gas supplied. [Means for solving the problem]

[0005] According to one aspect of the present invention, there is provided a gas generating device comprising a substantially circular first electrode and a plurality of substantially sector-shaped second electrodes that are opposed to and spaced apart from the first electrode and insulated from one another, wherein a voltage can be selectively applied to any of the plurality of second electrodes, and when a first gas supplied from outside passes through the gap between the first electrode and the second electrode to which a voltage is applied, a discharge occurs between the first electrode and the second electrode to which a voltage is applied, thereby generating a second gas from the first gas.

[0006] The first gas may be supplied in a direction from a predetermined position on the outer peripheral surface of the first electrode toward the center of the first electrode, and the plurality of second electrodes may be arranged symmetrically with respect to a line connecting the predetermined position and the center of the first electrode.

[0007] The first electrode may have an annular groove at a position facing the second electrode, and the first gas may be supplied from a predetermined position on the outer surface of the first electrode in a direction toward the center of the first electrode, and then reach the gap via the groove.

[0008] According to one aspect of the present invention, there is provided a gas generation system comprising: a substantially circular first electrode; a plurality of substantially sector-shaped second electrodes that are opposed to and spaced apart from the first electrode and insulated from one another; and a power source that can selectively apply a voltage to one or more of the plurality of second electrodes; wherein when a first gas supplied from outside passes through the gap between the first electrode and the second electrode to which a voltage is applied, a discharge occurs between the first electrode and the second electrode to which a voltage is applied, thereby generating a second gas from the first gas.

[0009] The gas generation system may include a control unit that controls the power supply to selectively apply a voltage to one or more of the plurality of second electrodes based on a flow rate of the supplied first gas.

[0010] The first gas is supplied in a direction from a predetermined position on the outer peripheral surface of the first electrode toward the center of the first electrode, and when a line connecting the predetermined position and the center of the first electrode is called a reference line, the plurality of second electrodes include, on the predetermined position side, a first single electrode whose center line is positioned directly on the reference line, two or more paired electrodes, each consisting of two electrodes positioned symmetrically with respect to the reference line, and a second single electrode on the opposite side of the predetermined position, whose center line is positioned directly on the reference line, and the control unit may simultaneously apply a voltage to the two electrodes constituting each paired electrode.

[0011] The gas supply system may further include a gas flow rate measuring unit that measures a gas flow rate of the first gas being supplied, and the control unit may acquire the flow rate of the first gas being supplied from the gas flow rate measuring unit.

[0012] The control unit may acquire the flow rate of the first gas being supplied from the gas flow rate measurement unit at regular time intervals.

[0013] The control unit may determine which of a plurality of divisions the flow rate of the supplied first gas falls within, and the number of the second electrodes may correspond to the number of divisions, and the control unit may control the power supply to selectively apply a voltage to a number of second electrodes according to which division the flow rate of the supplied first gas falls within.

[0014] The first gas is supplied in a direction from a predetermined position on the outer peripheral surface of the first electrode toward the center of the first electrode, and when a line connecting the predetermined position and the center of the first electrode is called a reference line, the plurality of second electrodes include, on the predetermined position side, a first single electrode whose center line is positioned directly on the reference line, two or more paired electrodes, each consisting of two electrodes positioned symmetrically with respect to the reference line, and a second single electrode on the opposite side of the predetermined position whose center line is positioned directly on the reference line, and the number of the sections and the number of the paired electrodes may be preset in the control unit.

[0015] The first gas is supplied in a direction from a predetermined position on the outer peripheral surface of the first electrode toward the center of the first electrode, and when a line connecting the predetermined position and the center of the first electrode is called a reference line, the plurality of second electrodes include, on the predetermined position side, a first single electrode whose center line is positioned directly on the reference line, two or more paired electrodes, each consisting of two electrodes positioned symmetrically with respect to the reference line, and a second single electrode on the opposite side of the predetermined position, whose center line is positioned directly on the reference line, and the control unit may receive the number of sections and the number of paired electrodes from a user.

[0016] The control unit may determine which of a plurality of sections the flow rate of the supplied first gas falls within, and a plurality of discharge regions may be formed between the first electrode and the plurality of second electrodes, the number of the discharge regions corresponding to the number of sections, and the control unit may control the power supply so that discharge occurs in a number of discharge regions corresponding to which section the flow rate of the supplied first gas falls within.

[0017] According to one aspect of the present invention, there is provided a control device for controlling the above-mentioned gas generation device, the control device comprising: a gas flow rate measuring unit that measures the gas flow rate of the first gas supplied to the gas generation device; and a control unit that determines to which of the plurality of second electrodes a voltage is to be applied based on the flow rate of the first gas supplied.

[0018] According to one aspect of the present invention, there is provided a control method for controlling the gas generation device, the control method comprising measuring a gas flow rate of the first gas supplied to the gas generation device, and determining to which of the plurality of second electrodes a voltage is to be applied based on the flow rate of the first gas supplied.

[0019] According to one aspect of the present invention, there is provided a control program for controlling the gas generating device, which causes a computer to function as a control unit that determines to which of the plurality of second electrodes a voltage is to be applied based on the gas flow rate of the first gas supplied to the gas generating device. [Effects of the Invention]

[0020] Gas can be generated appropriately regardless of the amount of raw material gas supplied. [Brief explanation of the drawings]

[0021] [Figure 1A] FIG. 1 is a perspective view of a conventional ozone generator. [Figure 1B] 1B is a cross-sectional view of the ozone generator of FIG. 1A. [Figure 2A]FIG. 2 is a diagram schematically showing the flow of the source gas on the discharge surface when the flow rate of the source gas being supplied is high. [Figure 2B] FIG. 2 is a diagram schematically showing the flow of the source gas on the discharge surface when the flow rate of the source gas being supplied is high. [Figure 3A] FIG. 2 is a diagram schematically showing the flow of source gas on the discharge surface when the flow rate of the source gas supplied is small. [Figure 3B] FIG. 2 is a diagram schematically showing the flow of source gas on the discharge surface when the flow rate of the source gas supplied is small. [Figure 4A] 1 is a perspective view of a gas generation device 100 according to a first embodiment. [Figure 4B] FIG. [Figure 4C] FIG. [Figure 5] FIG. [Figure 6] FIG. 2 is a diagram schematically illustrating the flow of gas in the gas generating device 100. [Figure 7] FIG. 2 is a block diagram showing a schematic configuration of a control device 4 of the gas generating device 100. [Figure 8] FIG. 3 is a diagram illustrating the connection relationship between a high-voltage power supply 43 and high-voltage electrodes 31 to 38. [Figure 9] 1 is a table showing the relationship between gas flow rate and the discharge region in which discharge occurs. [Figure 10] 4 is a flowchart showing an example of a processing operation of the control device 4. [Figure 11] FIG. 1 is a cross-sectional view of a conventional ozone generator. [Figure 12] FIG. 4 is a cross-sectional view of a gas generating device 101 according to a second embodiment. [Figure 13] 10 is a table showing the relationship between the gas flow rate, the discharge region in which the discharge occurs, and the open / closed state of the gas outlets 61a to 63a. [Figure 14] FIG. 13 is a cross-sectional view of a gas generating device 102 that is a modification of the device shown in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0022] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. (First embodiment) First, the problems with the ozone generator that the inventors have noticed will be described.

[0023] Fig. 1A is a perspective view of a conventional ozone generator. Fig. 1B is a cross-sectional view of the ozone generator of Fig. 1A. The ozone generator includes a ground electrode 91 that is grounded and a high-voltage electrode 92 to which a high voltage is applied. The high-voltage electrode 92 is composed of a metal layer applied to the back surface of a dielectric plate 92a, and is sandwiched between insulating plates 92b.

[0024] A source gas containing oxygen gas is supplied into the ground electrode 91 from a gas supply port 93 provided on the outer circumferential surface of the ground electrode 91. The source gas then passes through a gap between the ground electrode 91 and the high-voltage electrode 92 via a groove 94 formed in the ground electrode 91. At this time, the source gas is subjected to the action of an electric discharge generated between the ground electrode 91 and the high-voltage electrode 92 and is converted into ozone gas.

[0025] 2A and 2B are diagrams showing the flow of source gas on the discharge surface when the flow rate of the source gas supplied is high. When the flow rate is high, the source gas supplied from gas supply port 93 flows around to the opposite side of gas supply port 93 in groove 94, and the source gas flows into the entire gap between ground electrode 91 and high-voltage electrode 92. Therefore, ozone gas is generated throughout the entire gap between ground electrode 91 and high-voltage electrode 92.

[0026] 3A and 3B are diagrams schematically showing the flow of source gas on the discharge surface when the flow rate of the source gas supplied is low. When the flow rate is low, source gas supplied from gas supply port 93 does not flow around to the opposite side of gas supply port 93 in groove 94, but flows only near gas supply port 93 in the gap between ground electrode 91 and high-voltage electrode 92. Therefore, ozone gas is generated only near gas supply port 93 in the gap between ground electrode 91 and high-voltage electrode 92.

[0027] That is, in the gap between ground electrode 91 and high-voltage electrode 92, in an area away from gas supply port 93, discharge occurs without the presence of source gas. If this occurs, the energy of the discharge may damage the surfaces of ground electrode 91 and high-voltage electrode 92, accelerating the deterioration of the gas generator. Furthermore, discharge in the absence of source gas may decompose the generated ozone gas.

[0028] The above problems are not limited to ozone generators, but apply to any gas generator. Therefore, the inventors have devised the first embodiment illustrated below to appropriately generate gas regardless of the amount of raw material gas supplied.

[0029] Fig. 4A is a perspective view of gas generation apparatus 100 according to the first embodiment. Fig. 4B is a top view of gas generation apparatus 100. Fig. 4C is a cross-sectional view of gas generation apparatus 100 (a cross-sectional view perpendicular to the discharge plane passing through line L0 in Fig. 4B). Below, an example of gas generation apparatus 100 that generates ozone gas from a raw material gas containing oxygen gas will be described.

[0030] Gas generator 100 includes ground electrode 1, reinforcing plate 2, and multiple (eight in this example) high-voltage electrodes 31-38 that are insulated from one another. High-voltage electrodes 31-38 are made of a metal layer such as silver applied to the back surface of dielectric plate 3a such as sapphire, and are sandwiched between insulating plates 3b such as alumina. Reinforcing plate 2 covers dielectric plate 3a and insulating plate 3b. As shown in FIG. 4C, when high-voltage electrodes 31-38 are considered as a single circle, the diameter is smaller than the diameter of ground electrode 1, but for convenience, they are depicted with the same diameter in FIGS. 4A and 4B.

[0031] Although the following mainly describes high-voltage electrodes 31 to 38 provided above ground electrode 1, similar high-voltage electrodes (shown only in FIG. 4C) are also provided below ground electrode 1.

[0032] 5 is a perspective view of the ground electrode 1. The ground electrode 1 will be described with reference to FIGS. The ground electrode 1 is substantially circular, and is grounded when ozone gas is generated.

[0033] A gas supply port 1a is provided at a predetermined position on the outer circumferential surface of the ground electrode 1. A gas flow path 1b (see FIG. 4C) is formed extending horizontally (toward the surface of the ground electrode 1) from the gas supply port 1a toward the center of the ground electrode 1. Inside the ground electrode 1, the gas flow path 1b branches vertically (toward the surface of the ground electrode 1) toward the top and bottom surfaces of the ground electrode 1.

[0034] Furthermore, annular grooves 1c communicating with the gas flow paths 1b are formed on the upper and lower surfaces of the ground electrode 1. In other words, the gas flow paths 1b extend downward from the bottom surfaces of the grooves 1c. The upper and lower surfaces of the ground electrode 1 are wavy on the inside of the grooves 1c (toward the center of the ground electrode 1) as shown in FIG. 4C. A gap 1d is formed between this wavy portion and a dielectric plate 3a (described later). This gap 1d also serves as a flow path for the source gas.

[0035] In addition, an opening 1e is formed in the center of the ground electrode 1, penetrating from the top surface to the bottom surface of the ground electrode 1.

[0036] The ground electrode 1 is also provided with a gas outlet 1f at a predetermined position on its outer circumferential surface. A gas flow path 1g (see FIG. 4C) is formed extending horizontally from the gas outlet 1f toward the center of the ground electrode 1. The gas flow path 1g is connected to an opening 1e formed in the center of the ground electrode 1. In other words, the gas flow path 1g is formed from the inner circumferential surface of the opening 1e to the gas outlet 1f on the outer circumferential surface of the ground electrode 1. The positional relationship between the gas supply port 1a and the gas outlet 1f is arbitrary and is not particularly limited.

[0037] The dielectric plate 3a shown in FIG. 4C is disk-shaped and is placed on the top and bottom surfaces of the ground electrode 1. The radius of the dielectric plate 3a is longer than the distance between the center of the ground electrode 1 and the groove 1c. Therefore, the dielectric plate 3a covers the wavy portion of the ground electrode 1 and the groove 1c. The ground electrode 1 and the dielectric plate 3a are sealed on the outside of the ground electrode 1 by a sealing member 21 such as an O-ring.

[0038] As shown in Figures 4A and 4B, each of the high-voltage electrodes 31-38 is approximately sector-shaped. The multiple high-voltage electrodes 31-38 are arranged in a disk shape so as to face the ground electrode 1. There is a gap 1d between the ground electrode 1 and the high-voltage electrodes 31-38, so the high-voltage electrodes 31-38 are separated from the ground electrode 1. The high-voltage electrodes 31-38 are also insulated from each other. More specifically, an insulating sealant (not shown) that can withstand high voltages is provided between each high-voltage electrode and the adjacent high-voltage electrode. This prevents the source gas from leaking between the high-voltage electrodes 31-38.

[0039] When ozone gas is generated, a high voltage is applied to at least one of the multiple high-voltage electrodes 31-38. As will be described in detail later, regardless of the amount of raw material gas supplied, a high voltage is applied to the high-voltage electrode 31 closest to the gas supply port 1a. The greater the amount of raw material gas supplied, the higher the voltage applied to the high-voltage electrode farther from the gas supply port 1a. Note that the high voltage is a voltage that generates a discharge between the ground electrode 1 and the high-voltage electrodes 31-38 that converts the raw material gas passing through the gap 1d into ozone gas.

[0040] High-voltage electrodes 31 to 38 are provided symmetrically with respect to a line connecting gas supply port 1a and the center of ground electrode 1 (hereinafter referred to as "reference line L0"; see FIG. 4B).

[0041] Specifically, the centers (referring to the pointed inner parts of the sectors; the same applies below) of the high-voltage electrodes 31 to 38 are all located directly above the center of the ground electrode 1. The high-voltage electrodes 31 to 38 are configured and arranged as follows. (1) High-voltage electrode 31 (single electrode): On the gas supply port 1a side, the line (center line) connecting the center of the arc of high-voltage electrode 31 to the center of high-voltage electrode 31 is directly on reference line L0. Note that the region of gap 1d between ground electrode 1 and high-voltage electrode 31 is called the first discharge region. (2) High-voltage electrodes 32, 38 (paired electrodes): High-voltage electrode 32 and high-voltage electrode 38 are arranged as a pair symmetrically with respect to reference line L0. That is, high-voltage electrode 32 and high-voltage electrode 38 have the same shape and area. Note that the region of gap 1d between ground electrode 1 and high-voltage electrodes 32, 38 is called a second discharge region. (3) High-voltage electrodes 33, 37 (paired electrodes): High-voltage electrodes 33 and 37 are arranged as a pair symmetrically with respect to reference line L0. That is, high-voltage electrodes 33 and 37 have the same shape and area. Note that the region of gap 1d between ground electrode 1 and high-voltage electrodes 33, 37 is called a third discharge region. (4) High-voltage electrodes 34, 36 (paired electrodes): High-voltage electrode 34 and high-voltage electrode 36 are arranged as a pair symmetrically with respect to reference line L0. That is, high-voltage electrode 34 and high-voltage electrode 36 have the same shape and area. Note that the region of gap 1d between ground electrode 1 and high-voltage electrodes 34, 36 is called a fourth discharge region. (5) High-voltage electrode 35 (single electrode): On the side opposite to gas supply port 1a, the line (center line) connecting the center of the arc of high-voltage electrode 35 to the center of high-voltage electrode 35 is directly on reference line L0. Note that the region of gap 1d between ground electrode 1 and high-voltage electrode 35 is called a fifth discharge region. These eight high-voltage electrodes 31 to 38 can also be thought of as one circular electrode divided into eight radially arranged pieces. It is desirable that dielectric plate 3a is also divided in the same way as high-voltage electrodes 31 to 38. Dielectric plate 3b may be divided in the same way as high-voltage electrodes 31 to 38, or may be a single circular plate.

[0042] In this way, the high-voltage electrodes 31 to 38 of the gas generator 100 exemplified in this embodiment are composed of the above five types (1) to (5), and first to fifth discharge regions are formed corresponding to the respective types.

[0043] FIG. 6 is a diagram showing a schematic diagram of the gas flow in gas generator 100. The raw material gas supplied from gas supply port 1a passes through gas flow path 1b and groove 1c and reaches gap 1d. The raw material gas flowing through gap 1d is affected by the discharge generated between ground electrode 1 and high-voltage electrodes 31-38 and is converted into ozone gas. The ozone gas passes through opening 1e and gas flow path 1g and exits from gas outlet 1f.

[0044] 2A and 2B, when the flow rate of the supplied raw material gas is high, the raw material gas flows into the entire gap 1d between the ground electrode 1 and the high-voltage electrodes 31 to 38. On the other hand, when the flow rate of the supplied raw material gas is low, the raw material gas flows into only the vicinity of the gas supply port 1a in the gap 1d between the ground electrode 1 and the high-voltage electrodes 31 to 38, as shown in FIGS.

[0045] Therefore, in this embodiment, a high voltage can be selectively applied to any one of the high-voltage electrodes 31 to 38. When the flow rate of the source gas is high, a high voltage is applied to many high-voltage electrodes (i.e., the area where discharge occurs is enlarged). When the flow rate of the source gas is low, a high voltage is applied only to the high-voltage electrode near the gas supply port 1a. An example of a control device for performing such control will be described below.

[0046] 7 is a block diagram showing a schematic configuration of the control device 4 of the gas generation device 100. The gas generation system is configured by combining the gas generation device 100 and the control device 4. The control device 4 has a gas flow rate measuring unit 41, a control unit 42, and a high-voltage power supply 43.

[0047] Gas flow rate measuring unit 41 measures the flow rate of the raw material gas (for example, oxygen gas or a mixed gas obtained by adding carbon dioxide and / or nitrogen to oxygen gas) supplied to gas generation apparatus 100 and notifies control unit 42 of the measurement result. Control unit 42 controls high-voltage power supply 43 to selectively apply a high voltage to one or more of the plurality of high-voltage electrodes 31-38 based on the flow rate of the raw material gas supplied to gas generation apparatus 100. High-voltage power supply 43 is capable of selectively applying a high voltage to one or more of the plurality of high-voltage electrodes 31-38 in gas generation apparatus 100 in accordance with control from control unit 42. Note that some or all of the functions of control unit 42 may be realized by a computer executing a predetermined control program.

[0048] FIG. 8 is a diagram illustrating the connection relationship between high-voltage power supply 43 and high-voltage electrodes 31 to . High-voltage power supply 43 is connected to high-voltage electrode 31. High-voltage power supply 43 can selectively apply a voltage to high-voltage electrode 31, and can selectively generate a discharge in the first discharge region. That is, high-voltage power supply 43 can apply a high voltage to high-voltage electrode 31 regardless of whether a high voltage is applied to high-voltage electrodes 32 to 38, and can generate a discharge in the first discharge region regardless of whether a discharge is generated in the second to fifth discharge regions.

[0049] High-voltage power supply 43 is connected to high-voltage electrodes 32 and 38. High-voltage power supply 43 can selectively apply a voltage to high-voltage electrodes 32 and 38, and can selectively generate a discharge in the second discharge region. That is, high-voltage power supply 43 can simultaneously apply a high voltage to high-voltage electrodes 32 and 38 regardless of whether a high voltage is applied to high-voltage electrodes 31, 33 to 37, and can generate a discharge in the second discharge region regardless of whether a discharge is generated in the first and third to fifth discharge regions.

[0050] High-voltage power supply 43 is connected to high-voltage electrodes 33 and 37. High-voltage power supply 43 can selectively apply a voltage to high-voltage electrodes 33 and 37, and can selectively generate a discharge in the third discharge region. That is, high-voltage power supply 43 can simultaneously apply a high voltage to high-voltage electrodes 33 and 37 regardless of whether a high voltage is applied to high-voltage electrodes 31, 32, 34 to 36, and 38, and can generate a discharge in the third discharge region regardless of whether a discharge is generated in the first, second, fourth, and fifth discharge regions.

[0051] High-voltage power supply 43 is connected to high-voltage electrodes 34 and 36. High-voltage power supply 43 can selectively apply a voltage to high-voltage electrodes 34 and 36, and can selectively generate a discharge in the fourth discharge region. That is, high-voltage power supply 43 can simultaneously apply a high voltage to high-voltage electrodes 34 and 36 regardless of whether a high voltage is applied to high-voltage electrodes 31 to 33, 35, 37, and 38, and can generate a discharge in the fourth discharge region regardless of whether a discharge is generated in the first to third and fifth discharge regions.

[0052] High-voltage power supply 43 is connected to high-voltage electrode 35. High-voltage power supply 43 can selectively apply a voltage to high-voltage electrode 35, and can selectively generate a discharge in the fifth discharge region. That is, high-voltage power supply 43 can apply a high voltage to high-voltage electrode 35 regardless of whether a high voltage is applied to high-voltage electrodes 31 to 34, 36 to 38, and can generate a discharge in the fifth discharge region regardless of whether a discharge is generated in the first to fourth discharge regions.

[0053] FIG. 9 is a table showing the relationship between the gas flow rate and the discharge region in which the discharge occurs. As shown in the figure, the gas flow rate is divided into five categories. That is, if the gas flow rate is less than M1, the gas flow rate is category 1. If the gas flow rate is equal to or greater than M1 and less than M2, the gas flow rate is category 2. The same applies below. The number of categories is equal to the number of discharge regions. That is, the number of categories corresponds to the number of high-voltage electrodes. Generally, if there are n high-voltage electrodes (eight in this embodiment), two of which (high-voltage electrodes 31 and 35 in this embodiment) are on the reference line L0 and the others are paired on either side of the reference line L0, then the number of categories = 2 + (n - 2) / 2.

[0054] When the gas flow rate is in category 1, the gas flow rate is low. Therefore, most of the source gas passes through the first discharge region close to the gas supply port 1a and heads toward the opening 1e, and hardly reaches the other discharge regions. Therefore, high voltage is applied only to the high-voltage electrode 31 from the high-voltage power supply 43, and discharge is generated only in the first discharge region. Because no discharge is generated in the second to fifth discharge regions where almost no ozone gas is present, it is possible to prevent the generated ozone gas from being decomposed or from damaging the surfaces of the high-voltage electrodes 32 to 38.

[0055] When the gas flow rate is in section 2, the gas flow rate is higher than in section 1. Therefore, the source gas flowing toward the opening 1e reaches not only the first discharge region but also the second region a little distance away from the gas supply port 1a. Therefore, a high voltage is applied from the high-voltage power supply 43 to the high-voltage electrodes 31, 32, and 38, and discharge is generated only in the first and second discharge regions. As shown in FIG. 9, the higher the gas flow rate, the more discharges are generated in the discharge regions (farther away from the gas supply port 1a).

[0056] The number of sections and the number of high-voltage electrodes arranged at symmetrical positions across the reference line L0 may be set in advance in the control unit 42. Alternatively, the control unit 42 may receive from the user the number of sections and the number of high-voltage electrodes arranged at symmetrical positions across the reference line L0.

[0057] 10 is a flowchart showing an example of the processing operation of the control device 4. The control unit 42 acquires the flow rate of the source gas measured by the gas flow rate measurement unit 41 (step S1). Then, the control unit 42 determines whether the gas flow rate falls within one of predetermined categories (see FIG. 9) (step S2). Furthermore, the control unit 42 controls the high-voltage power supply 43 so that a high voltage is applied to the high-voltage electrode corresponding to the category that the gas flow rate falls within (step S3). The above process is repeated every predetermined time period (step S4).

[0058] In this way, in the first embodiment, a plurality of high-voltage electrodes 31 to 38 are provided which are insulated from one another and to which a voltage can be selectively applied. A high voltage is applied only to the high-voltage electrodes according to the flow rate of the source gas to be supplied.

[0059] That is, when the flow rate of the supplied source gas is low, a high voltage is applied only to the high-voltage electrode close to the gas supply port 1 a, and a high voltage is not applied to the high-voltage electrode far from the gas supply port 1 a. Therefore, no discharge occurs in the region where the source gas is not present, and it is possible to prevent the discharge energy from damaging the surfaces of the ground electrode 1 and the high-voltage electrode and from decomposing the generated ozone gas.

[0060] On the other hand, the greater the flow rate of the supplied raw material gas, the higher the voltage applied to the high-voltage electrode further away from the gas supply port 1 a. Therefore, when the raw material gas flow rate is high, discharge occurs over a wide area, allowing ozone gas to be generated efficiently.

[0061] (Second embodiment) The first embodiment described above is a parallel plate type ozone generator. In contrast, the second embodiment described below will be a coaxial cylinder type ozone generator. Below, explanations of commonalities with the first embodiment will be omitted or simplified, and differences will be mainly described.

[0062] Figure 11 is a cross-sectional view of a conventional ozone generator. The ozone generator is configured with a small-diameter ground electrode 95 and a large-diameter high-voltage electrode 96 arranged coaxially. A gas supply port 97 is formed at one end of the high-voltage electrode 96, and a gas outlet 98 is formed at the other end.

[0063] The source gas supplied from the gas supply port 97 passes through the gap between the outer surface of the ground electrode 95 and the inner surface of the high-voltage electrode 96. At this time, the source gas is subjected to the action of the discharge generated between the ground electrode 95 and the high-voltage electrode 96 and is converted into ozone gas.

[0064] As described in the first embodiment, in this ozone gas generator, when the flow rate of the source gas is small, discharge occurs in an area of ​​the gap between the ground electrode 95 and the high-voltage electrode 96 that the source gas does not reach. This can cause the energy of the discharge to damage the surfaces of the ground electrode 95 and the high-voltage electrode 96, accelerating deterioration of the gas generator. Furthermore, discharge in the absence of source gas can decompose the generated ozone gas. Therefore, the inventors have come up with the second embodiment illustrated below.

[0065] 12 is a cross-sectional view of a gas generator 101 according to the second embodiment. Gas generator 101 includes a ground electrode 50, a supply path forming member 60, and a plurality of (three are shown in the example) high-voltage electrodes 61-63 that are insulated from one another. This can be considered as the high-voltage electrode 96 in FIG. 11 being divided into supply path forming member 60 and high-voltage electrodes 61-63. The ground electrode 50 is substantially cylindrical.

[0066] The supply path forming member 60 has a cylindrical shape with a diameter larger than that of the ground electrode 50, and is located on one end side of the ground electrode 50. The supply path forming member 60 is provided with a gas supply port 60a.

[0067] High-voltage electrode 61 is cylindrical and has the same diameter as supply path forming member 60, and is provided adjacent to supply path forming member 60. High-voltage electrode 62 is cylindrical and has the same diameter as supply path forming member 60, and is provided next to high-voltage electrode 61. High-voltage electrodes 61 and 62 are electrically insulated from each other, but are sealed to prevent leakage of the internal gas. High-voltage electrode 63 is cylindrical and has the same diameter as supply path forming member 60, and is provided next to high-voltage electrode 62. High-voltage electrodes 62 and 63 are electrically insulated from each other, but are sealed to prevent leakage of the internal gas.

[0068] Gas outlets 61a to 63a are provided at the high-voltage electrodes 61 to 63, respectively. Valves (not shown) are provided at the gas outlets 61a to 63a, and can be opened and closed.

[0069] The area between the ground electrode 50 and the high-voltage electrode 61 is called the first discharge area, the area between the ground electrode 50 and the high-voltage electrode 62 is called the second discharge area, and the area between the ground electrode 50 and the high-voltage electrode 62 is called the third discharge area. Gas outlets 61a to 63a correspond to the first to third discharge areas, respectively. The control device shown in FIG. 7 can be used.

[0070] 13 is a table showing the relationship between the gas flow rate, the discharge region in which the discharge occurs, and the open / closed state of the gas outlets 61a to 63a. Since there are three discharge regions, there are three divisions of the gas flow rate.

[0071] When the gas flow rate is in category 1, the gas flow rate is low. Therefore, high voltage is applied only to high-voltage electrode 61 from high-voltage power supply 43, and discharge occurs only in the first discharge region. Also, only gas outlet 61a is opened. Since discharge does not occur in the second and third discharge regions where there is almost no ozone gas, it is possible to prevent the generated ozone gas from being decomposed and from damaging the surfaces of high-voltage electrodes 62, 63.

[0072] When the gas flow rate is in section 2, the gas flow rate is higher than in section 1. Therefore, the source gas flows not only toward the first discharge region, but also toward the second region that is slightly distant from the gas supply port 60a. Therefore, a high voltage is applied from the high-voltage power supply 43 to the high-voltage electrodes 61 and 62, and discharge is generated only in the first and second discharge regions. As shown in FIG. 13, the higher the gas flow rate, the more discharges are generated in the discharge regions (farther from the gas supply port 60a).

[0073] Fig. 14 is a cross-sectional view of gas generation device 102, which is a modification of Fig. 12. Gas generation device 102 includes a ground electrode 50' and a plurality of (three are shown in the example) high-voltage electrodes 61'-63' that are insulated from one another. As shown in the figure, the ground electrode 50 in Fig. 12 may be replaced with high-voltage electrodes 61'-63', and the supply path forming member 60 and high-voltage electrodes 61-63 in Fig. 12 may be replaced with ground electrode 50'. In this way, the second embodiment also provides a plurality of high-voltage electrodes 61-63 (61'-63') that are insulated from one another and can be selectively applied with a high voltage. A high voltage is applied only to the high-voltage electrodes that correspond to the flow rate of the source gas supplied.

[0074] That is, when the flow rate of the supplied source gas is low, high voltage is applied only to the high-voltage electrode close to the gas supply port 60a, and high voltage is not applied to the high-voltage electrode far from the gas supply port 60a. Therefore, no discharge occurs in the region where the source gas is not present, and it is possible to prevent the discharge energy from damaging the surfaces of the ground electrode 1 and the high-voltage electrode and from decomposing the generated ozone gas.

[0075] On the other hand, the greater the flow rate of the supplied raw material gas, the higher the voltage applied to the high-voltage electrode further away from the gas supply port 60a. Therefore, when the raw material gas flow rate is high, discharge occurs over a wide area, allowing ozone gas to be generated efficiently.

[0076] Any part or all of the functional units described in this specification may be realized by a program. The program mentioned in this specification may be distributed by being non-temporarily recorded on a computer-readable recording medium, or may be distributed via a communication line (including wireless communication) such as the Internet, or may be distributed in a state where it is installed on any terminal. Based on the above description, a person skilled in the art may be able to conceive additional effects and various modifications of the present invention, but the aspects of the present invention are not limited to the individual embodiments described above. Various additions, modifications, and partial deletions are possible within the scope of the conceptual idea and spirit of the present invention, which is derived from the content defined in the claims and their equivalents. For example, what is described herein as a single component (including what is depicted as a single device in the drawings) may be realized by multiple components. Conversely, what is described herein as multiple components (including what is depicted as multiple components in the drawings) may be realized by a single component. Alternatively, some or all of the functionality of a component may be included in another component. In the case of a rectangular parallel plate type ozone generator, the high voltage electrodes can be divided arbitrarily in the same manner as described above, and a voltage can be applied in accordance with the flow rate of the raw material gas.

[0077] Furthermore, not all of the features described in this specification are essential requirements. In particular, features described in this specification but not included in the claims can be considered optional additional features.

[0078] It should be noted that the applicant is merely aware of the inventions disclosed in the documents listed in the "Prior Art Documents" section of this specification, and the present invention does not necessarily aim to solve the problems of the disclosed inventions. The problem that the present invention aims to solve should be determined by taking into consideration the entire specification. For example, if this specification states that a specific configuration achieves a certain effect, it can also be said that the present invention solves a problem that is the reverse of that effect. However, it is not necessarily intended that such a specific configuration be an essential requirement. [Explanation of symbols]

[0079] 1 Ground electrode 1a Gas supply port 1b Gas flow path 1c groove 1d gap 1e aperture 1f Gas outlet 1g Gas flow path 2 Reinforcement plate 31~38 High voltage electrodes 3a Dielectric plate 3b Insulating plate 4. Control device 41 High voltage power supply 42 Gas flow measurement unit 43 Control Unit 5,50,50' Ground electrode 60 Supply path forming member 60a Gas supply port 61~63,61'~63' High voltage electrodes 61a~63a Gas outlet 91,95 Ground electrode 92,96 High voltage electrodes 93,97 Gas supply port 94 Groove 98 Gas outlet 100~102 Gas generator

Claims

1. A first electrode having a substantially circular shape with a gas supply port and a gas outlet formed on its outer peripheral surface and an opening formed in its center; a plurality of second electrodes each having a substantially sector shape, which are provided opposite to and spaced apart from the first electrodes and are insulated from one another; A voltage can be selectively applied to any of the plurality of second electrodes, when oxygen gas supplied from the gas supply port passes through a gap between the first electrode and the second electrode to which a voltage is applied, ozone is generated from the oxygen gas by a discharge generated between the first electrode and the second electrode to which a voltage is applied; The gas generating device is characterized in that the ozone exits the gas outlet through the opening.

2. the oxygen gas is supplied in a direction from a predetermined position on the outer peripheral surface of the first electrode toward the center of the first electrode, The gas generating device according to claim 1 , wherein the plurality of second electrodes are provided symmetrically with respect to a line connecting the predetermined position and the center of the first electrode.

3. The first electrode has an annular groove formed at a position facing the second electrode, 3. The gas generating device according to claim 2, wherein the oxygen gas is supplied from a predetermined position on the outer surface of the first electrode toward the center of the first electrode, and then reaches the gap via the groove.

4. A first electrode having a substantially circular shape with a gas supply port and a gas outlet formed on its outer peripheral surface and an opening formed in its center; a plurality of second electrodes each having a substantially sector shape, which are provided opposite to and spaced apart from the first electrodes and are insulated from one another; a power source capable of selectively applying a voltage to one or more of the plurality of second electrodes; when oxygen gas supplied from the gas supply port passes through a gap between the first electrode and the second electrode to which a voltage is applied, ozone is generated from the oxygen gas by a discharge generated between the first electrode and the second electrode to which a voltage is applied; The ozone exits the gas outlet through the opening.

5. 5. The gas generation system according to claim 4, further comprising a control unit that controls the power supply to selectively apply a voltage to one or more of the plurality of second electrodes based on a flow rate of the supplied oxygen gas.

6. the oxygen gas is supplied in a direction from a predetermined position on the outer peripheral surface of the first electrode toward the center of the first electrode, When a line connecting the predetermined position and the center of the first electrode is called a reference line, The plurality of second electrodes are a first single electrode on the predetermined position side, the center line of which is disposed directly above the reference line; two or more paired electrodes, each of which is composed of two electrodes arranged symmetrically with respect to the reference line; a second single electrode on the opposite side to the predetermined position, the second single electrode having a center line disposed directly above the reference line; The gas generation system according to claim 5 , wherein the control unit simultaneously applies a voltage to the two electrodes that make up each of the paired electrodes.

7. a gas flow rate measuring unit for measuring the flow rate of the oxygen gas to be supplied; The gas generation system according to claim 5 or 6, wherein the control unit acquires the flow rate of the supplied oxygen gas from the gas flow rate measurement unit.

8. The control unit measures the flow rate of the supplied oxygen gas at regular intervals.

8. The gas generating system of claim 7, wherein the gas generating system is obtained from

9. the control unit determines which of a plurality of categories the flow rate of the supplied oxygen gas falls within; the number of the second electrodes corresponds to the number of the sections; 9. The gas generation system according to claim 5, wherein the control unit controls the power supply to selectively apply a voltage to a number of second electrodes depending on which category the flow rate of the supplied oxygen gas falls within.

10. the oxygen gas is supplied in a direction from a predetermined position on the outer peripheral surface of the first electrode toward the center of the first electrode, When a line connecting the predetermined position and the center of the first electrode is called a reference line, The plurality of second electrodes are a first single electrode on the predetermined position side, the center line of which is disposed directly above the reference line; two or more paired electrodes, each of which is composed of two electrodes arranged symmetrically with respect to the reference line; a second single electrode on the opposite side to the predetermined position, the second single electrode having a center line disposed directly above the reference line; The gas generation system according to claim 9 , wherein the number of the sections and the number of the paired electrodes are preset in the control unit.

11. the oxygen gas is supplied in a direction from a predetermined position on the outer peripheral surface of the first electrode toward the center of the first electrode, When a line connecting the predetermined position and the center of the first electrode is called a reference line, The plurality of second electrodes are a first single electrode on the predetermined position side, the center line of which is disposed directly above the reference line; two or more paired electrodes, each of which is composed of two electrodes arranged symmetrically with respect to the reference line; a second single electrode on the opposite side to the predetermined position, the second single electrode having a center line disposed directly above the reference line; The gas generation system according to claim 9 , wherein the control unit receives the number of sections and the number of paired electrodes from a user.

12. the control unit determines which of a plurality of categories the flow rate of the supplied oxygen gas falls within; A plurality of discharge regions are formed between the first electrode and the plurality of second electrodes, the number of the discharge regions corresponds to the number of the sections; 9. The gas generation system according to claim 5, wherein the control unit controls the power source so that discharge occurs in a number of discharge regions corresponding to which category the flow rate of the supplied oxygen gas falls within.

13. A control device for controlling the gas generating device according to any one of claims 1 to 3, a gas flow rate measuring unit that measures the gas flow rate of the oxygen gas supplied to the gas generator; a control unit that determines to which of the plurality of second electrodes a voltage is to be applied based on a flow rate of the supplied oxygen gas.

14. A control method for controlling the gas generating device according to any one of claims 1 to 3, comprising: measuring a gas flow rate of the oxygen gas supplied to the gas generator; A method for controlling a gas generating apparatus, comprising determining to which of the plurality of second electrodes a voltage is to be applied based on a flow rate of the supplied oxygen gas.

15. A control program for controlling the gas generating apparatus according to any one of claims 1 to 3, comprising: a control unit that determines to which of the plurality of second electrodes a voltage is to be applied, based on a gas flow rate of the oxygen gas supplied to the gas generator.

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