probe

Abstract

To provide a probe that improves inspection accuracy of a connector.SOLUTION: A probe 1 that is used for an inspection of a connector 100 having a plurality of contacts 1001 comprises: a conductive plunger 4 having a tip part 42 containing a plurality of probe pins 3 provided so as to correspond to the plurality of contacts 1001; a conductive housing 8 that is provided so as to contain the tip part 42 and that has a bottom 82 where an inner bottom surface 823 extends so as to face a tip surface 423 of the tip part 42 in an end part 84, and where a plurality of openings 82H for exposing the plurality of probe pins 3 to the outside is formed; and a conductive contact auxiliary part that is provided between the tip surface 423 of the tip part 42 and the inner bottom surface 823 of the bottom 82 and that is configured so as to be contactable to both the tip surface 423 and the inner bottom surface 823 at least between the plurality of probe pins 3.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to a probe used in inspecting a connector. [Background technology]

[0002] Patent Document 1 discloses a probe in which, when inspecting a connector, a fixed plunger is brought into contact with the conductive shell of the connector to establish a ground connection, and multiple probe pins are brought into contact with each contact of the connector. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2019 / 069576 Summary of the Invention [Problem to be solved by the invention]

[0004] In the probe as exemplified in Patent Document 1, since the ground is not secured in the area between the probe pins, signals between the probe pins may interfere with each other, which results in the conventional probe hindering high-precision inspection of connectors.

[0005] Therefore, the present disclosure provides a probe that improves the accuracy of connector inspection. [Means for solving the problem]

[0006] A probe according to one aspect of the present disclosure is a probe used for inspecting a connector having a plurality of contacts, and comprises: a conductive plunger having a tip portion containing a plurality of probe pins arranged to correspond to the plurality of contacts; a conductive housing arranged to contain the tip portion, with an inner bottom surface extending at an end portion so as to face the tip surface of the tip portion, and having a bottom portion formed with a plurality of openings for exposing the plurality of probe pins to the outside; and a conductive abutment auxiliary portion arranged between the tip surface of the tip portion and the inner bottom surface of the bottom portion, and configured to be able to contact both the tip surface and the inner bottom surface at least between a plurality of probe pins.

[0007] In a probe according to one aspect of the present disclosure, the contact assisting portion is configured to be able to contact (ground contact) both the tip surface of the tip portion and the inner bottom surface of the bottom portion between the plurality of probe pins. This prevents a gap (clearance) from occurring between the tip portion and the bottom portion, resulting in an insufficient ground connection, at least between the plurality of probe pins. This suppresses signal interference between the plurality of probe pins, which is a problem when the ground connection is not established between the plurality of probe pins. As a result, the inspection accuracy of the connector can be improved. [Effects of the Invention]

[0008] According to the present disclosure, it is possible to provide a probe that improves the inspection accuracy of a connector. [Brief explanation of the drawings]

[0009] [Figure 1] 1A is a plan view, FIG. 1B is a perspective view, FIG. 1C is a side view, and FIG. 1D is a bottom view of a probe according to a first embodiment. [Figure 2] 2(a) and 2(b) are diagrams showing the appearance of a probe and a connector, with Fig. 2(a) being a side view and Fig. 2(b) being a perspective view. [Figure 3] 2 is a cross-sectional view taken along line AA in FIG. 1(a) before the probe comes into contact with the connector. FIG. [Figure 4] 4(a) is a plan view, FIG. 4(b) is a perspective view, and FIG. 4(c) is a side view showing the appearance of the device when the substrate is housed in the tip portion. [Figure 5] FIG. 2 is an exploded perspective view showing the appearance of the substrate before it is housed in the tip portion. [Figure 6] FIG. 5 is a cross-sectional view taken along line BB in FIG. 4(a). [Figure 7] 7A, 7B, and 7C are diagrams showing the appearance of a spacer (contact auxiliary portion), in which Fig. 7A is a plan view, Fig. 7B is a perspective view, and Fig. 7C is a side view. [Figure 8] 2 is a cross-sectional view showing a cross section along line AA in FIG. 1(a) in a state where the probe is in contact with the connector. FIG. [Figure 9] FIG. 2 is a cross-sectional view showing a cross section along line AA in FIG. 1(a) in a stroke state. [Figure 10] 10 is an enlarged cross-sectional view of a range F in FIG. 9. FIG. [Figure 11] FIG. 10 is a cross-sectional view showing a cross section of a probe according to a second embodiment. [Figure 12] FIG. 10 is a cross-sectional view showing a cross section of a probe according to a third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, the embodiments will be described in detail with reference to the drawings. In the description, the same elements or elements having the same functions are denoted by the same reference numerals, and redundant description will be omitted.

[0011] [First embodiment] FIG. 1 is a diagram showing the appearance of a probe 1 in a first embodiment. FIG. 1(a) is a plan view, FIG. 1(b) is a perspective view, FIG. 1(c) is a side view, and FIG. 1(d) is a bottom view. The shape of the probe 1 when viewed from above (see FIG. 1(a)) and the shape of the probe 1 when viewed from below (see FIG. 1(d)) both approximate a rectangle. Hereinafter, the direction along the long side of the rectangle will be referred to as the X-axis direction, and the direction along the short side of the rectangle will be referred to as the Y-axis direction. The height direction, which is perpendicular to the X-axis and Y-axis, will be referred to as the Z-axis direction. The X-axis, Y-axis, and Z-axis are perpendicular to one another. The probe 1 has a generally columnar shape extending in the Z-axis direction as a whole.

[0012] FIG. 2 shows the appearance of the probe 1 and the connector 100. FIG. 2(a) is a side view, and FIG. 2(b) is a perspective view. The probe 1 is a tool used to inspect the connector 100. The connector 100 is a multi-core connector including a plurality of contacts 1001, 1001 (see FIG. 3). The plurality of contacts 1001, 1001 are arranged, for example, along a plurality of rows. In this embodiment, the connector 100 includes two contacts 1001, 1001 arranged in two rows, and an insulating housing 1003 that fixes the contacts 1001, 1001. The connector 100 also includes a shell 1002 (see FIG. 3) that surrounds the outer periphery of the insulating housing 1003 and separates the plurality of contacts 1001, 1001. The shell 1002 functions as a ground connection portion. The connector 100 is disposed on a printed circuit board (not shown) and is electrically connected to the printed circuit board. During testing, the connector 100 is electrically connected to the probe 1. In addition to the connector 100, various other components may be arranged on the printed circuit board.

[0013] The probe 1 and the connector 100 are electrically connected by the probe 1 moving in the Z-axis direction. Hereinafter, within the Z-axis direction, the direction in which the connector 100 is located as seen from the probe 1 will be referred to as "downward," and the direction in which the probe 1 is located as seen from the connector 100 will be referred to as "upward." The probe 1 is positioned upward as seen from the connector 100. When the probe 1 and the connector 100 are connected, a force pressing upward on the probe 1 (hereinafter referred to as "pressure") is applied as a reaction to the force pressing the probe 1 downward. The state in which no pressure is being applied to the probe 1 is referred to as the initial state, and the state in which a pressure is being applied is referred to as the stroke state.

[0014] The configuration of the probe 1 will be described with reference to Fig. 3. Fig. 3 is a cross-sectional view taken along line AA in Fig. 1(a) before the probe 1 comes into contact with the connector 100. The probe 1 includes a conductive portion 2, a probe pin 3, a plunger 4, a substrate 5, a flange 6, a spring 7, a housing 8, a cap 9, and a spacer 10 (contact assist portion).

[0015] The conductive portion 2 is electrically connected to the probe pin 3. Here, "electrically connected" refers not only to the case where the conductive portion 2 and the probe pin 3 are electrically connected by being directly physically connected to each other, but also to the case where the conductive portion 2 and the probe pin 3 are electrically connected to each other by being indirectly connected to each other via a conductive component (e.g., substrate 5) disposed between the conductive portion 2 and the probe pin 3. The conductive portion 2 is also electrically connected to, for example, external testing equipment.

[0016] For example, the conductive portion 2 has a plurality of (e.g., two) coaxial cables 21 and a plurality of (e.g., two) conductive members 22. The coaxial cables 21 are conductors covered with an insulator that extend in the Z-axis direction. The conductive members 22 are conductive parts (e.g., conductors or wiring made of metal) that extend in the Z-axis direction. The coaxial cables 21 are electrically connected to the conductive members 22. The conductive portion 2 may be composed of at least one of the coaxial cables 21 and the conductive members 22.

[0017] The probe pin 3 is a needle-shaped conductive part, such as a pogo pin. A plurality of (for example, two) probe pins 3 are provided so as to correspond one-to-one with the plurality of contacts 1001, 1001 of the connector 100, and extend along the Z-axis direction. The tip of the probe pin 3 faces the connector 100 in the Z-axis direction. In this embodiment, "facing" also includes the case where another member or the like is present between the facing objects.

[0018] The substrate 5 is a substantially cylindrical component that electrically connects the conductive portion 2 and the plurality of probe pins 3 to each other. The substrate 5 has a first main surface 51 and a second main surface 52 facing the first main surface 51. The substrate 5 is electrically connected to the conductive portion 2 on the first main surface 51. The substrate 5 is electrically connected to the plurality of probe pins 3 on the second main surface 52. Details of the substrate 5 will be described later.

[0019] The plunger 4 is a conductive component having a main body 41 and a tip 42. The main body 41 is formed in a substantially cylindrical shape and contains at least a portion of the conductive portion 2. Specifically, the main body 41 contains portions of the multiple coaxial cables 21 and multiple conductive members 22, and extends in the Z-axis direction along these components. The main body 41 has a cylindrical top surface 411, a bottom surface 412, and a side surface 413 extending in the Z-axis direction from the top surface 411 to the bottom surface 412. The main body 41 has multiple through holes 41H formed along the Z-axis direction from the top surface 411 to the bottom surface 412. Insulators D, each containing the conductive members 22 and other components constituting the conductive portion 2, are disposed in the multiple through holes 41H. For example, the coaxial cables 21 are inserted into the plurality of through-holes 41H from the top surface 411 along the Z-axis direction, and the gaps at the insertion points of the coaxial cables 21 are filled with collars C. The bottom surface 412 faces the substrate 5 in the Z-axis direction. The tips of the conductive parts 2 (e.g., conductive members 22) are exposed from the bottom surface 412.

[0020] A circular plate-shaped protruding portion 416 is formed on the lower portion 415 of the main body portion 41. Note that the lower portion 415 here does not refer only to the lower end of the main body portion 41, but also includes the vicinity of the lower end (the area close to the lower end). The protruding portion 416 has the side surface 413 as its base end and protrudes outward in the X-axis direction. An upper surface 4161 of the circular plate-shaped protruding portion 416 faces a lower surface 622 of the circular portion 62, which will be described later, in the Z direction. A lower surface 4162 of the protruding portion 416 faces an upper surface 821 of the bottom portion 82, which will be described later, in the Z direction.

[0021] The tip portion 42 is formed in a columnar shape, is disposed at the lower portion 415 of the main body portion 41, and is fixed to the main body portion 41. The tip portion 42 contains the plurality of probe pins 3 and also houses the substrate 5, and extends in the Z-axis direction along the plurality of probe pins 3. The substrate 5 is disposed so as to be sandwiched between the main body portion 41 and the tip portion 42.

[0022] The tip portion 42, the substrate 5, and the probe pins 3 will be described with reference to FIGS. 4 to 6. FIG. 4 shows the external appearance of the tip portion 42 when the substrate 5 is housed therein. FIG. 4(a) is a plan view, FIG. 4(b) is a perspective view, and FIG. 4(c) is a side view. The tip portion 42 has a support portion 421 and a holding portion 422. The support portion 421 is formed in a cylindrical shape with a bottom and houses the substrate 5. The holding portion 422 is formed in a columnar shape and extends in the Z-axis direction (downward) from a base end (upper end) connected to the support portion 421, and houses multiple probe pins 3. The tip portion 42 has a tip surface 423, which is the lower end surface in the Z-axis direction. The holding portion 422 holds the multiple probe pins 3 so that the tips (lower ends) of the multiple probe pins 3 are exposed from the tip surface 423.

[0023] 5 is an exploded perspective view showing the appearance of the substrate 5 before it is accommodated in the tip portion 42. The substrate 5 has a signal conductive portion 53 and a ground conductive portion 54. The signal conductive portion 53 is provided across the first main surface 51 and the second main surface 52. The signal conductive portion 53 contacts the plurality of conductive members 22 on the first main surface 51 and contacts the plurality of probe pins 3 on the second main surface 52, thereby electrically connecting the conductive portion 2 and the plurality of probe pins 3. The ground conductive portion 54 is a conductive layer provided on each of the first main surface 51 and the second main surface 52.

[0024] The support portion 421 has an upper surface 4211, a recess 4212 formed by recessing the upper surface 4211, and an inner bottom surface 4213 which is the bottom surface of the recess 4212. The recess 4212 accommodates the substrate 5. In other words, the recess 4212 functions as a tray for the substrate 5. The inner bottom surface 4213 faces the second main surface of the substrate 5. The upper ends (other ends) of the multiple probe pins 3 are exposed on the inner bottom surface 4213.

[0025] 6 is a cross-sectional view taken along line BB in FIG. 4(a). The substrate 5 of this embodiment is a build-up substrate. For example, the substrate 5 is composed of a base layer BL and a plurality of build-up layers UL that sandwich the base layer BL and form a first main surface 51 and a second main surface 52.

[0026] The signal conductive portion 53 has a first signal conductive portion 531 provided in the buildup layer UL and a second signal conductive portion 532 provided in the base layer BL. The first signal conductive portion 531 provided in the buildup layer UL that forms the first main surface 51 is electrically connected to the conductive member 22. The first signal conductive portion 531 provided in the buildup layer UL that forms the second main surface 52 is electrically connected to the probe pin 3. The second signal conductive portion 532 relays the electrical connection between the first signal conductive portion 531 provided in the buildup layer UL that forms the first main surface 51 and the first signal conductive portion 531 provided in the buildup layer UL that forms the second main surface 52.

[0027] The substrate 5 converts the pitch of the conductive portions 2 and the pitch of the multiple probe pins 3. For example, the pitch of the multiple conductive members 22 is larger than the pitch of the multiple probe pins 3. Corresponding to this difference in pitch, the pitch of the first signal conductive portions 531 on the first main surface 51 is larger than the pitch of the first signal conductive portions 531 on the second main surface 52. That is, the first signal conductive portions 531 convert the pitch of the conductive portions 2 and the pitch of the multiple probe pins 3 in accordance with their positions on the first main surface 51 and their positions on the second main surface 52.

[0028] The diameter of the first signal conductive portion 531 is smaller than the diameter of the second signal conductive portion 532. For example, the diameter of the second signal conductive portion 532 in the base layer BL is formed by a through via. And the diameter of the first signal conductive portion 531 in the buildup layer UL is formed by a laser via. The laser via can be formed to have a smaller hole diameter than the through via.

[0029] As a comparative example, a substrate formed only with through vias will be described. In this case, holes are formed at the same pitch on each side of the substrate. Then, wiring or the like that changes the pitch is provided on one side of the substrate, resulting in unnecessary portions (stubs) on that side. In contrast, the substrate 5 of this embodiment is a build-up substrate, and can be manufactured without stubs. For example, as shown in FIG. 6, the substrate 5 of this embodiment does not have stubs in the position of range S, while the substrate of the comparative example has stubs in the position corresponding to range S. The substrate 5 of this embodiment has improved signal reflection characteristics (return loss) in the high-frequency range (e.g., 5 GHz or higher) compared to the substrate of the comparative example.

[0030] The ground conductive portion 54 includes a first ground conductive portion 541 exposed on the first principal surface 51 and a second ground conductive portion 542 exposed on the second principal surface 52. The first ground conductive portion 541 and the second ground conductive portion 542 have a multilayer structure formed by, for example, plating. The first ground conductive portion 541 surrounds the signal conductive portion 53 (first signal conductive portion 531) on the first principal surface 51. For example, when the substrate 5 is viewed from above as shown in FIG. 5 , a plurality of (for example, two) first signal conductive portions 531 are provided on the first principal surface 51 near both ends in the X-axis direction, and the first ground conductive portion 541 is provided to surround the periphery of the first signal conductive portion 531. The second ground conductive portion 542 surrounds the signal conductive portion 53 (first signal conductive portion 531) on the second principal surface 52. For example, when the substrate 5 is viewed from the bottom, the second main surface 52 has a plurality of (e.g., two) first signal conductive portions 531 provided near both ends in the X-axis direction, and the second ground conductive portion 542 is provided so as to surround the periphery of the first signal conductive portion 531 (not shown).

[0031] 6, the height of the substrate 5 is greater than the depth of the recess 4212 of the support portion 421. More specifically, the distance H1 between the first main surface 51 and the second main surface 52 of the substrate 5 is greater than the distance H2 between the upper surface 4211 and the inner bottom surface 4213 of the support portion 421. Therefore, when the substrate 5 is accommodated in the recess 4212, the first main surface 51 of the substrate 5 protrudes beyond the upper surface 4211 of the support portion 421.

[0032] Returning to FIG. 3 , the flange 6 includes a plate-shaped member 61 and a circular ring portion 62 formed separately from the plate-shaped member 61. The plate-shaped member 61 is a plate-shaped component for fixing the probe 1 to the testing equipment. The plate-shaped member 61 has a substantially rectangular shape in a plan view. The plate-shaped member 61 has an upper surface 611 and a lower surface 612. A through-hole 61H is formed in the plate-shaped member 61, extending from the center of the upper surface 611 to the center of the lower surface 612. When the upper surface 611 is viewed in a plan view or when the lower surface 612 is viewed from the bottom, the area where the through-hole 61H is formed is hollowed out in a circular shape. In addition, a pair of holes 61W are formed in the plate-shaped member 61 at both ends along the X-axis direction, extending from the upper surface 611 to the lower surface 612, so as to sandwich the through-hole 61H. The flange 6 fixes the probe 1 to the testing equipment by screws fastened through the holes 61W. The holes 61W may be so-called screw holes (see FIGS. 1(a) and 1(d)).

[0033] An upper surface 611 of the plate-shaped member 61 fixes a rod-shaped pin P formed separately from the plate-shaped member 61. The pin P has an upper end P1 and a lower end P2 fixed to the upper surface 611.

[0034] The annular portion 62 is a circular plate-shaped component and is made of a material with high slidability, such as polyacetal resin. The annular portion 62 has an upper surface 621 and a lower surface 622. The annular portion 62 is disposed on the lower surface 612 of the plate-shaped member 61 along the outer periphery of the through-hole 61H of the plate-shaped member 61. The annular portion 62 also surrounds the side surface 413 at the upper portion 414 of the main body 41.

[0035] A through-hole 62H is formed in the annular portion 62 from the upper surface 621 to the lower surface 622. A plurality of (for example, four) through-holes 62H are formed at predetermined intervals along the circumferential direction of the annular portion 62 (see FIG. 2(b)). A rib 83 of the housing 8, which will be described later, is inserted into the through-hole 62H from the lower surface 622.

[0036] The spring 7 includes a first spring 71 and a second spring 72. The first spring 71 is a coil spring. The first spring 71 is disposed between the annular portion 62 of the flange 6 and the protruding portion 416 of the plunger 4. Specifically, the first spring 71 is disposed so as to be sandwiched between the lower surface 622 of the annular portion 62 and the upper surface 4161 of the protruding portion 416. The first spring 71 biases the protruding portion 416 in a direction away from the annular portion 62, thereby biasing the plunger 4 in a direction away from the flange 6. In the initial state, the first spring 71 applies a downward biasing force to the plunger 4 from the lower surface 622 of the annular portion 62. The first spring 71 keeps the plunger 4 at an initial position spaced a predetermined distance from the flange 6. In the stroke state, the first spring 71 is compressed in the Z-axis direction.

[0037] The second spring 72 is a coil spring. The second spring 72 is disposed between the protrusion 416 of the plunger 4 and a bottom 82 of the housing 8, which will be described later. Specifically, the second spring 72 is disposed so as to be sandwiched between a lower surface 4162 of the protrusion 416 and an upper surface 821 of the bottom 82, which will be described later. The second spring 72 biases the bottom 82 in a direction away from the protrusion 416, thereby biasing the housing 8 in a direction away from the plunger 4. In the initial state, the second spring 72 applies a downward biasing force to the bottom 82 from the lower surface 4162 of the protrusion 416. The second spring 72 keeps the housing 8 in an initial position at a predetermined distance from the plunger 4. In the stroke state, the second spring 72 is compressed in the Z-axis direction.

[0038] The first spring 71 and the second spring 72 surround the side surface 413 of the main body 41 and are arranged concentrically. Here, "concentrically" means that the radial center of the first spring 71 and the radial center of the second spring 72 are on the same axial line. The axial line is a line along the Z-axis direction.

[0039] The housing 8 is a conductive member formed in a substantially cylindrical shape and extending along the Z-axis direction. The housing 8 accommodates the plunger 4, the first spring 71, and the second spring 72. The housing 8 has a base 81, a bottom 82, and a rib 83.

[0040] The base 81 is formed in a generally cylindrical shape with a bottom, and has a bottom surface 811 on one side (lower) in the extension direction. A hole 81H is formed near the center of the bottom surface 811. The bottom 82 is provided at an end 84 (one end) on one side (lower) in the extension direction of the housing 8, such that a rectangular tube extends downward along the Z-axis direction from a plate-like member 822 extending along the bottom surface 811 of the base 81, via the hole 81H in the base 81. The bottom 82 has an upper surface 821, which is the surface opposite to the surface on which the rectangular tube is provided. The upper surface 821 faces the lower surface 4162 of the protrusion 416 and sandwiches the second spring 72. The bottom 82 has an inner bottom surface 823 at one end 84 that extends so as to face the tip surface 423 of the tip portion 42. The bottom 82 also has a plurality of openings 82H for exposing the tips of the plurality of probe pins 3 to the outside. The portions of the bottom 82 between the plurality of openings 82H come into contact with a shell 1002 that separates the plurality of contacts 1001, 1001 in the connector 100. This contact makes ground contact between the connector 100 and the housing 8.

[0041] The housing 8 is provided to enclose the tip portion 42, and further has a guide portion 86 at the end portion 84 that positions the connector 100. The guide portion 86 is fitted to the connector 100. The tip (lower end) portion of the guide portion 86 is tapered so that the thickness becomes thinner (the opening becomes larger) toward the tip. For example, the guide portion 86 is provided with a pair of tapered shapes in the X-axis direction and a pair of tapered shapes in the Y-axis direction. When the guide portion 86 approaches the connector 100 in the Z-axis direction, it adjusts the position of the connector 100 along the slope of the tapered shapes.

[0042] The rib 83 is provided contiguous to the base 81 at the other (upper) end 85 in the extension direction of the housing 8. For example, the rib 83 is a plate-like protrusion provided so as to extend upward along the Z-axis direction with the base 81 as its base end. A plurality of ribs 83 (for example, four ribs) are provided at predetermined intervals along the circumferential direction of the base 81 (see FIG. 2(b)). The rib 83 is inserted into the through-hole 62H from the lower surface 622 of the annular portion 62.

[0043] The cap 9 is a substantially rectangular parallelepiped component. The cap 9 is disposed so as to surround the periphery of the rib 83 of the housing 8. The cap 9 has a top surface 91 and a bottom surface 92. The cap 9 has a hole 9H formed along the Z-axis direction from the center of the top surface 91 to the center of the bottom surface 92. When the top surface 91 is viewed from above or the bottom surface 92 is viewed from below, the area where the hole 9H is formed is hollowed out in a circular shape. The diameter of the hole 9H in the top surface 91 is smaller than the diameter of the hole 9H in the bottom surface 92. The bottom surface 92 faces the top surface 611 of the plate-like member 61. The hole 9H in the bottom surface 92 communicates with the through-hole 61H in the top surface 611 of the plate-like member 61. The rib 83 of the housing 8 is inserted into the hole 9H from the bottom surface 92 and comes into contact with the lower end 93 of the top surface 91. The lower end portion 93 may be indirectly in contact with the rib 83 by being in contact with an insulator E attached to the rib 83 .

[0044] A plurality of (for example, two) pin holes 92H are formed in the bottom surface 92 of the cap 9 at both ends in the X-axis direction. The pin holes 92H are formed from the bottom surface 92 toward the top surface 91 (upward), but do not reach (pierce) the top surface 91. A hole bottom 94 is formed at the deepest part of the pin hole 92H. A pin P is arranged on the top surface 611 of the plate-like member 61 so as to correspond to the pin hole 92H. In the stroke state, an upper end P1 of the pin P is separated from the hole bottom 94.

[0045] The spacer 10 provided below the probe 1 is a conductive component made of an elastically deformable plate-like member. The spacer 10 is a member separate (independent) from the plunger 4 and the housing 8. The spacer 10 is provided between the tip surface 423 of the tip portion 42 and the inner bottom surface 823 of the bottom portion 82. The spacer 10 is configured to be able to contact both the tip surface 423 and the inner bottom surface 823 at least between the plurality of probe pins 3 (areas sandwiched between the probe pins 3 in the X-axis direction). For example, the spacer 10 electrically contacts the tip surface 423 and the inner bottom surface 823 when the probe 1 is in a stroke state. In other words, the spacer 10 is an abutment assisting portion that assists the tip surface 423 and the inner bottom surface 823 in abutting contact.

[0046] 7A and 7B are diagrams showing the appearance of the spacer 10. FIG. 7A is a plan view, FIG. 7B is a perspective view, and FIG. 7C is a side view. The shape of the spacer 10 in plan view (see FIG. 7A) approximates a rectangle. The spacer 10 has a plurality of openings 10H for inserting a plurality of probe pins 3. The spacer 10 has an upper surface 101 and a lower surface 102. The upper surface 101 faces the tip surface 423 of the tip portion 42. The lower surface 102 faces the inner bottom surface 823 of the bottom portion 82. The upper surface 101 contacts the tip surface 423 when the probe 1 is in a stroke state. The upper surface 101 does not contact the tip surface 423 when the probe 1 is in an initial state. The lower surface 102 contacts the inner bottom surface 823 when the probe 1 is in an initial state and a stroke state.

[0047] [stroke] Next, the initial state and stroke state of the probe 1 will be described with reference to Figures 8 and 9. Figure 8 is a cross-sectional view showing a cross section along line AA in Figure 1(a) in a state where the connector 100 is in contact with the probe 1. In Figure 8, the probe 1 is not pressed against the connector 100. That is, Figure 8 shows the initial state of the probe 1.

[0048] The plunger 4 is configured to be movable between a first position where the tip of the probe pin 3 is not exposed from the opening 82H in the bottom 82 of the housing 8, and a second position where the tip of the probe pin 3 is exposed from the opening 82H in the bottom 82 of the housing 8, according to the elastic force of the second spring 72. In an initial state, the plunger 4 is disposed at the first position.

[0049] In the initial state, the upper end P1 of the pin P abuts against the hole bottom 94. This engages the flange 6 and the cap 9. The probe 1 is fixed in its movement in the X-axis, Y-axis, and Z-axis directions, so the initial position of the probe 1 is determined. Specifically, in the initial position of the probe 1, the position of the cap 9 relative to the flange 6 is determined. Furthermore, the movement of the rib 83 of the housing 8, which is in direct or indirect contact with the lower end 93 of the cap 9, is restricted, so the initial position of the housing 8 is determined.

[0050] Fig. 9 is a cross-sectional view taken along line AA in Fig. 1(a) in the stroke state, showing a state in which a pressing force is applied so that the probe 1 is pressed against the connector 100 from the state shown in Fig. 8.

[0051] In the stroke state, the plunger 4 moves downward in the Z-axis direction. In this state, the plunger 4 moves to the second position where the tip of the probe pin 3 is exposed from the opening 82H in the bottom 82 of the housing 8. In other words, by moving the plunger 4 to the second position, the tip of the probe pin 3 is exposed to the outside from the opening 82H. Then, the probe pin 3 is connected to the connector 100.

[0052] In the stroke state, the housing 8 moves upward. Because the rib 83 of the housing 8 is in direct or indirect contact with the lower end 93 of the cap 9, the cap 9 is pushed by the rib 83, and the cap 9 also moves upward. In addition, the upper end P1 of the pin P moves away from the hole bottom 94, creating a gap inside the pin hole 92H. This allows the probe 1 to move in the X-axis, Y-axis, and Z-axis directions. This allows the probe 1 to adjust the axial misalignment between the probe 1 and the connector 100.

[0053] In this embodiment, the spring constant of the first spring 71 is smaller than the spring constant of the second spring 72. When a pressing force is applied to the probe 1, the first spring 71 elastically deforms faster than the second spring 72. In other words, the first spring 71 contracts in the Z-axis direction faster than the second spring 72. When the first spring 71 elastically deforms and the second spring 72 does not, the plunger 4 is in a first position where the tip of the probe pin 3 is not exposed from the opening 82H in the bottom 82 of the housing 8. When the first spring 71 is contracted in the Z-axis direction, the first spring 71 adjusts the axial misalignment between the probe 1 and the connector 100. When further pressing force is applied to the probe 1, the second spring 72 contracts in the Z-axis direction. At this time, the plunger 4 moves to a second position, and the tip of the probe pin 3 is exposed to the outside. The elastic deformation of the first spring 71 and the second spring 72 in this order allows the axial misalignment to be adjusted while the tip of the probe pin 3 is protected.

[0054] Ground Contact FIG. 10 is an enlarged cross-sectional view of the structure of the probe 1, showing a range F shown in FIG.

[0055] The spacer 10 is provided over substantially the entire area where the tip surface 423 and the inner bottom surface 823 face each other. The spacer 10 is configured to be able to contact both the tip surface 423 and the inner bottom surface 823 not only between the plurality of probe pins 3 but also in a position surrounding the plurality of probe pins 3. For example, the spacer 10 is sandwiched between the tip surface 423 and the inner bottom surface 823 in a stroke state, and elastically deforms along each surface. The spacer 10 establishes a ground connection in an area A1 between the plurality of probe pins 3 on the tip surface 423 and the inner bottom surface 823. The spacer 10 also establishes a ground connection in an area A2 surrounding the plurality of probe pins 3 on the tip surface 423 and the inner bottom surface 823.

[0056] Moving upward, the main body 41 further includes a first ground contact portion 417 that is located between the conductive portions 2 and that contacts the first ground conductive portion 541. The first ground contact portion 417 is integrally formed with the main body 41. The first ground contact portion 417 provides a ground connection in a region A3 between the conductive portions 2 in the first ground conductive portion 541.

[0057] The tip portion 42 further includes second ground contact portions 424 that are located between the plurality of probe pins 3 and that contact the second ground conductive portion 542. The second ground contact portions 424 are configured integrally with the tip portion 42. For example, the second ground contact portions 424 may be a partial area of ​​the inner bottom surface 4213. The second ground contact portions 424 establish a ground connection in an area A4 between the plurality of probe pins 3 in the second ground conductive portion 542. The inner bottom surface 4213 also establishes a ground connection in an area A5 that surrounds the plurality of probe pins 3 in the second ground conductive portion 542.

[0058] The first ground contact portion 417 and the second ground contact portion 424 are in contact with the first ground conductive portion 541 and the second ground conductive portion 542, respectively, in the initial state and the stroke state of the probe 1.

[0059] [Effects of this embodiment] A probe 1 according to one aspect of this embodiment is a probe 1 used for inspecting a connector 100 having a plurality of contacts 1001, 1001, and comprises: a conductive plunger 4 having a tip portion 42 containing a plurality of probe pins 3 arranged to correspond to the plurality of contacts 1001, 1001; a guide portion 86 arranged to contain the tip portion 42 and to position it relative to the connector 100 at an end 84; a conductive housing 8 having a bottom portion 82 whose inner bottom surface 823 extends to face the tip surface 423 of the tip portion 42 at the end 84 and in which a plurality of openings 82H are formed for exposing the plurality of probe pins 3 to the outside; and a conductive spacer 10 arranged between the tip surface 423 of the tip portion 42 and the inner bottom surface 823 of the bottom portion 82, and configured to be able to contact both the tip surface 423 and the inner bottom surface 823 at least between a plurality of probe pins 3.

[0060] In the probe 1 according to one aspect of the present embodiment, the spacer 10 is configured to be able to make contact (ground contact) with both the tip surface 423 of the tip portion 42 and the inner bottom surface 823 of the bottom portion 82 between the plurality of probe pins 3. This prevents a situation in which a gap (clearance) occurs between the tip portion 42 and the bottom portion 82, resulting in an insufficient ground, at least between the plurality of probe pins 3. This prevents signal interference between the plurality of probe pins 3, which is a problem when a ground is not established between the plurality of probe pins 3. As a result, the inspection accuracy of the connector 100 can be improved.

[0061] In the probe 1, the spacer 10 is made of an elastically deformable material. With this configuration, even if the components constituting the probe 1 are not parallel to each other, the spacer 10 can flexibly change shape, enabling stable ground contact. This further improves the inspection accuracy of the connector 100.

[0062] In the probe 1, the spacer 10 is provided over substantially the entire area where the tip surface 423 and the inner bottom surface 823 face each other, and is in contact with both the tip surface 423 and the inner bottom surface 823 even in a position surrounding a plurality of probe pins 3, thereby bringing the tip surface 423 into contact with the inner bottom surface 823. With this configuration, ground contact is further made so as to surround the probe pins 3. Since ground contact can be reliably made at multiple points, the inspection accuracy of the connector can be further improved.

[0063] In the probe 1, the spacer 10 is a member different from the plunger 4 and the housing 8. With this configuration, the spacer 10 is a member independent from the plunger 4 and the housing 8, which makes it easier to design the spacer 10.

[0064] In the probe 1, the portions between the plurality of openings 82H in the bottom portion 82 come into contact with the shell 1002 that separates the plurality of contacts 1001, 1001 in the connector 100. With this configuration, ground contact is made between the connector 100 and the housing 8, thereby further improving the inspection accuracy of the connector.

[0065] [Second embodiment] 11 is a cross-sectional view showing a cross section of a probe 1A in the second embodiment. The following mainly describes the differences from the probe 1 in the first embodiment. The probe 1A has a protrusion 10A (abutment auxiliary portion) instead of the spacer 10 in the probe 1.

[0066] The protrusion 10A is formed integrally with the tip portion 42 and is formed to protrude from the tip surface 423 toward the inner bottom surface 823. For example, the protrusion 10A is configured to protrude from the tip surface 423 toward the inner bottom surface 823 at least between the plurality of probe pins 3 and to be able to come into contact with the inner bottom surface 823 in the stroke state. The protrusion 10A may be configured to be elastically deformable. The protrusion 10A may be provided over substantially the entire area where the tip surface 423 and the inner bottom surface 823 face each other. The protrusion 10A may also be configured to protrude from the tip surface 423 toward the inner bottom surface 823 at a position surrounding the plurality of probe pins 3 and to be able to come into contact with the inner bottom surface 823 in the stroke state.

[0067] According to the probe 1A, ground contact is made by the protruding portions between the multiple probe pins 3. Since stable ground contact is possible, the inspection accuracy of the connector can be further improved. In addition, the number of parts is reduced, resulting in a simpler configuration.

[0068] [Third embodiment] 12 is a cross-sectional view showing a cross section of a probe 1B according to the third embodiment. The following mainly describes the differences from the probe 1 according to the first embodiment. The probe 1A has a protrusion 10B (abutment auxiliary portion) instead of the spacer 10 in the probe 1.

[0069] The protrusion 10B is formed integrally with the bottom portion 82 and is formed to protrude from the inner bottom surface 823 toward the tip surface 423. For example, the protrusion 10B is configured to protrude from the inner bottom surface 823 toward the tip surface 423 at least between the plurality of probe pins 3 and to be able to come into contact with the tip surface 423 in the stroke state. The protrusion 10B may be configured to be elastically deformable. The protrusion 10B may be provided over substantially the entire area where the tip surface 423 and the inner bottom surface 823 face each other. The protrusion 10B may also be configured to protrude from the inner bottom surface 823 toward the tip surface 423 at a position surrounding the plurality of probe pins 3 and to be able to come into contact with the tip surface 423 in the stroke state.

[0070] According to the probe 1B, ground contact is made by the protruding portions between the multiple probe pins 3. Since stable ground contact is possible, the inspection accuracy of the connector can be further improved. In addition, the number of parts is reduced, resulting in a simple configuration.

[0071] [Variations] Although the embodiments have been described above, the present disclosure is not necessarily limited to the above-described embodiments, and various modifications are possible without departing from the spirit of the present disclosure.

[0072] In this embodiment, the connector 100 includes two contacts 1001 arranged in two rows, but multiple rows of contacts may be provided in each of the X-axis direction and the Y-axis direction. Also, the shell 1002 separating the multiple contacts 1001 may separate the multiple rows of contacts.

[0073] In the above embodiment, the pin P is fixed to the upper surface 611 of the flange 6, but the pin P may be provided on the cap 9.

[0074] In the above embodiment, the substrate 5 is described as being housed in the tip portion 42, but the substrate 5 may be housed in the main body portion 41. For example, the recess 4212 for housing the substrate 5 may be provided so that the lower portion 415 of the main body portion 41 is recessed.

[0075] The contact assisting portion may bring the tip surface 423 into contact with the inner bottom surface 823 when the probe pin 3 is exposed to the outside of the housing 8. Since it is only necessary for the ground contact to be made when the probe pin 3 is exposed to the outside of the housing 8 (when the connector 100 can be inspected), the contact assisting portion can be configured to be miniaturized. [Explanation of symbols]

[0076] 1, 1A, 1B...probe, 2...conductive portion, 3...probe pin, 4...plunger, 5...substrate, 6...flange, 7...spring, 8...housing, 9...cap, 10...spacer (contact auxiliary portion), 10A, 10B...protrusion (contact auxiliary portion), 41...main body portion, 42...tip portion, 51...first main surface, 52...second main surface, 53...signal conductive portion, 54...ground conductive portion, 82...bottom, 84...end portion, 86...guide portion, 82H...opening, 100...connector, 417...first ground contact portion, 423...tip surface, 424...second ground contact portion, 531...first signal conductive portion, 532...second signal conductive portion, 541...first ground conductive portion, 542...second ground conductive portion, 823...inner bottom surface, 4212...recess, P...pin, BL...base layer, UL...build-up layer.

Claims

1. A probe used to test a connector having a plurality of contacts, a conductive plunger having a columnar tip portion for holding a plurality of probe pins provided to correspond to the plurality of contacts in an insulated state; a conductive housing provided to enclose the tip portion, the housing having an inner bottom surface extending at an end thereof to face a tip surface of the tip portion, and a bottom portion having a plurality of openings formed therein for exposing the plurality of probe pins to the outside; a conductive contact assisting portion provided between the tip surface of the tip portion and the inner bottom surface of the bottom portion, the contact assisting portion being configured to be able to come into contact with both the tip surface and the inner bottom surface at least between the plurality of probe pins; Equipped with the plurality of probe pins and the plurality of openings are not in contact with each other; the tip portion holds the plurality of probe pins such that the tips of the plurality of probe pins are exposed from the tip surface through through holes into which the plurality of probe pins are inserted, respectively; probe.

2. A probe used to inspect a connector having a plurality of contacts, a conductive plunger having a columnar tip portion for holding a plurality of probe pins provided to correspond to the plurality of contacts in an insulated state; a conductive housing provided to enclose the tip portion, the housing having an inner bottom surface extending at an end thereof to face a tip surface of the tip portion, and a bottom portion having a plurality of openings formed therein for exposing the plurality of probe pins to the outside; a conductive contact assisting portion that is integrally formed with the tip portion, protrudes from the tip surface toward the inner bottom surface, and is configured to be able to contact the inner bottom surface at least between the plurality of probe pins; Equipped with the plurality of probe pins and the plurality of openings are not in contact with each other; the tip portion holds the plurality of probe pins such that the tips of the plurality of probe pins are exposed from the tip surface through through holes into which the plurality of probe pins are inserted, respectively; probe.

3. A probe used to inspect a connector having a plurality of contacts, a conductive plunger having a columnar tip portion for holding a plurality of probe pins provided to correspond to the plurality of contacts in an insulated state; a conductive housing provided to enclose the tip portion, the housing having an inner bottom surface extending at an end thereof to face a tip surface of the tip portion, and a bottom portion having a plurality of openings formed therein for exposing the plurality of probe pins to the outside; a conductive contact assisting portion that is integrally formed with the bottom portion, that protrudes from the inner bottom surface toward the tip surface, and that is configured to be able to come into contact with the tip surface at least between the plurality of probe pins; Equipped with the plurality of probe pins and the plurality of openings are not in contact with each other; the tip portion holds the plurality of probe pins such that the tips of the plurality of probe pins are exposed from the tip surface through through holes into which the plurality of probe pins are inserted, respectively; probe.

4. The probe according to any one of claims 1 to 3, wherein the contact assisting portion is configured to be elastically deformable.

5. The probe according to claim 1, wherein the contact assisting portion is provided over substantially the entire area where the tip surface and the inner bottom surface face each other, and is configured to be able to contact both the tip surface and the inner bottom surface even at a position surrounding the plurality of probe pins.

6. The probe according to claim 1 , wherein the contact assisting portion is a member different from the plunger and the housing.

7. The probe according to claim 1 , wherein the portions of the bottom between the plurality of openings are formed flat and come into contact with a shell that separates the plurality of contacts in the connector.

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