Probe holding cassette

Abstract

An aspect of the present invention relates to a probe cassette for holding a probe, such as an atomic force microscope probe, in a predetermined holding position for automated removal. The probe cassette comprises a body 3 including a support surface 4 for supporting the probe, and one or more physical confinement elements 50 formed along or attached to the support surface, the one or more physical confinement elements providing a plurality of engagement surfaces disposed along the periphery of the predetermined holding position, the engagement surfaces extending away from the support surface to define pockets 9 for holding the probes, the pockets being dimensioned to limit lateral displacement of the probe in any direction along the support surface.

Description

[Technical Field]

[0001] The present invention relates to a cassette for holding and storing probes in a probe-using system. In particular, the present invention relates to a technique for holding probes in predetermined positions to accommodate automatic removal of the probes. The present invention also relates to a method for manufacturing the probe cassette and components of the probe cassette. [Background technology]

[0002] Scanning probe microscopes are widely used to analyze sample properties through the interaction between a probe device and the sample. Scanning probe microscopes (e.g., atomic force microscopes) are fitted with a probe. While various types of probe devices exist, cantilever-based probes are commonly used. Cantilever-based probe devices have a tip near the end of the cantilever for localized measurement of one or more properties of the sample. Probe-based systems enable observation of small-scale sample features by monitoring the interaction between the sample and the tip of its associated probe device. Relative scanning motion between the tip and the associated probe device allows for surface and subsurface characterization and other sample-dependent data to be determined over specific regions of the sample. Furthermore, such probe systems can be used to modify the surface of a sample using the probe device.

[0003] It is known to place one or more probe devices in a cassette or storage box to facilitate transport and prevent damage to the probe devices during delivery to a user or customer. A cassette is a container or holder that includes a retention element to securely hold the probe devices in a substantially predetermined position to prevent damage to the probes during transport of the cassette (e.g., shipping, delivery to a site, handling, etc.). To this end, the retention element typically includes a gel (gel box) to hold the probe devices in place to position one or more probes. Summary of the Invention [Problem to be solved by the invention]

[0004] Typically, the probes used in scanning probe microscopes (SPMs) are very small, requiring delicate manipulation. Furthermore, to reduce the time required for local measurements, largely automated probe systems, such as atomic force microscopes, are used. The probe attachment and detachment operations, such as removing a probe from a storage box and attaching it to a probe holder, are typically performed manually, using, for example, tweezers. To reduce this manual effort, automated techniques for removing pre-loaded probe holders are known. However, such techniques tend to be costly. Furthermore, to achieve a certain level of automation, a certain number of replacement probes must be stored, for example, in dedicated holding positions, resulting in the probe holder occupying a significant surface area. Therefore, conventional storage boxes, such as those provided with gel to hold the probe device in place, can make it difficult to directly remove or place probes within them. [Means for solving the problem]

[0005] One aspect of the present invention relates to a cassette for holding probes in place for use in probe-utilizing systems, and is particularly advantageous for automated probe removal when used in systems with automated probe manipulation, such as, for example, an AFM system that includes automated or robotic probe exchange or a means for mechanical probe exchange.

[0006] The probe cassette comprises a body including a support surface for supporting the probes, and one or more physical confinement elements. Preferably, the one or more physical confinement elements are attached along the support surface. Alternatively, the one or more physical confinement elements are formed directly on the support surface. The one or more physical confinement elements provide a plurality of engagement surfaces arranged along the periphery of the predetermined retention location, the engagement surfaces extending away from the support surface, typically laterally, to define pockets for retaining the probes. In contrast to conventional storage boxes, such as gel boxes, which allow a relatively high degree of freedom of position and rotation of the probe (both relative to the container and adjacent probes), the probe cassette of the present invention provides a more secure means for retaining the probes. By limiting relative changes in probe position and orientation, the storage location of the probes can be more predictably and accurately controlled, which is particularly useful, for example, in automated probe exchange.

[0007] Preferably, the one or more physical confinement elements comprise a seat configured for reversible attachment to a support surface. Thus, the probe cassette comprises an assembly of a body including a support surface and one or more physical confinement elements disposed along an upper surface. In a preferred embodiment, the seat is provided with openings sized to provide multiple engagement surfaces. When a seat configured for attachment to a support surface, e.g., a seat with openings, is used, the seat and body can be manufactured independently (e.g., by machining), greatly simplifying the manufacture of the probe cassette. Advantageously, multiple seats can be manufactured, each corresponding to one or more specific types of probes to be held. These and other advantages are described in more detail herein below.

[0008] A further aspect of the present invention relates to a method for manufacturing a probe cassette for a probe system that holds probes in predetermined retention positions to accommodate automated removal of the probes. The method for manufacturing a probe cassette for holding probes in predetermined retention positions to accommodate automated removal by a probe-utilizing system includes providing a body including a support surface that supports the probes; and attaching one or more physical confinement elements along the support surface to provide a plurality of engagement surfaces disposed about the periphery of the predetermined retention positions, the engagement surfaces extending away from the support surface to define pockets for holding the probes, the pockets being dimensioned to limit lateral movement of the probes in all directions along the support surface. In a preferred embodiment, the one or more physical confinement elements are manufactured separately from the body. The one or more physical confinement elements that are separate from the body are, for example, machined with relatively greater accuracy and repeatability than the body including the support surface. Manufacturing the one or more physical confinement elements, e.g., sheets, using tooling that provides greater accuracy and repeatability compared to tooling used to manufacture the body advantageously reduces manufacturing complexity, cost, and time while maintaining a desired level of precision and tolerance in the pockets.

[0009] A further aspect of the present invention relates to parts and kits of parts for assembling the probe cassettes according to the present invention. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 shows a top view of a probe cassette. [Figure 2] 1 shows a portion of a probe cassette holding probes. [Figure 3A] FIG. 2 shows a plan view of a probe cassette. [Figure 3B] FIG. 3B shows a side cross-sectional view of the probe cassette (cross-sectional view taken along the line AA′ in FIG. 3A). [Figure 4] 1 shows a partial perspective view of a probe cassette in relation to possible removal means. [Figure 5A] FIG. 1 shows a perspective view of a physical containment element. [Figure 5B] 1 shows a plan view of a physical containment element. [Figure 6A] A side cross-sectional view (cross-section ii-ii of FIG. 5B) of the physical containment element is shown. [Figure 6B] 1 shows a side cross-sectional view of a physical containment element. [Figure 6C] 1 shows a side cross-sectional view of a physical containment element. [Figure 7] 10A and 10B illustrate a method for manufacturing a probe cassette. DETAILED DESCRIPTION OF THE INVENTION

[0011] These and other features, aspects, and advantages of the devices, systems, and methods of the present invention will become apparent from the following detailed description, the appended claims, and the accompanying drawings.

[0012] The terms used to describe particular embodiments are not intended to limit the invention. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms unless the context clearly dictates otherwise. The term "and / or" includes any and all combinations of one or more of the associated listed items. The terms "comprises" and "comprising" specify the presence of the stated features, but do not exclude the presence or addition of one or more other features. When a particular step in a method is described as following another step, unless otherwise specified, this indicates that the other step may follow immediately, or that one or more intermediate steps may be performed before the particular step is performed. Similarly, when connections between structures or components are described, this indicates that the connection is direct or via an intermediate structure or component, unless otherwise specified.

[0013] The present invention will now be described in more detail with reference to the accompanying drawings, which illustrate embodiments of the invention. In the drawings, the absolute and relative sizes of systems, components, layers, and regions may be exaggerated for illustrative purposes. The description of the embodiments refers to schematic and cross-sectional views of idealized embodiments and intermediate structures of the invention. Like numbers refer to like elements throughout the specification and drawings. Relative terms and their derivatives refer to the orientation currently being described or shown in the drawings corresponding to the description. These relative terms are used for illustrative purposes only and do not require the system to be constructed or operated in a particular orientation, unless specifically stated otherwise.

[0014] The probe cassette will be described in more detail with reference to FIGS. 1 and 2. FIG. 1 shows a top view of the probe cassette 1. The probe cassette comprises a body 3 including a support surface 4 that supports the probes. The support surface is provided with a plurality of physical confinement elements 5. The physical confinement elements provide a plurality of engagement surfaces 8 arranged along the periphery of a predetermined holding position to define pockets 9 for holding the probes, the pockets being dimensioned to limit lateral displacement of the probes in all directions along the support surface. In certain embodiments, for example as shown, at least a portion of the physical confinement elements 5 can be formed as protrusions, such as ridges. These protrusions extend away from the support surface 4, typically laterally. Thus, the engagement surfaces 8 arranged along the periphery of the predetermined holding positions of the physical confinement elements can be said to be formed by sidewall portions of the protrusions 5.

[0015] FIG. 2 shows a portion of a probe cassette holding a probe. This figure shows a portion of the probe cassette, with one probe 2 held in place. The probe includes a body 2-b and a cantilever 2-c extending from a central region 2-d having a flat surface. In this particular configuration, the edges of the probe body 2-b were damaged by tweezers in a previous operation, but it can be seen that the probe is trapped between the sidewalls, engagement surfaces 8, and ridges of the three physical confinement elements 5. At the bottom, the probe is trapped by the support surface. Typically, the cassette is used in an upright position, so that the probe rests on the support surface under gravity. For at least the removal or placement operation, the pocket opens from the top, and the probe can be properly placed into or lifted from the pocket by a removal or placement tool, such as a vacuum nozzle configured to engage the probe's, e.g., the flat upper surface of the probe body 2-b. The engagement surfaces 8 are provided around the periphery of the predetermined holding position, i.e., the periphery of the probe, so that the probe is laterally trapped within the pocket. Confining the probe between the physical confinement elements restricts lateral movement along the support surface. Furthermore, this confinement restricts rotation of the probe along the support surface. The probe is similarly restricted in translation and rotation toward the support surface 4 because it is constrained by the support surface on which its bottom rests. The effect of confining rotation and translation of a probe resting in a pocket under its own weight is further apparent with reference to FIG. 4 . From FIG. 4 , it can be seen that the physical confinement elements formed by the exemplary sheet 50 with multiple openings 51 restrict translation and rotation in all directions along the support surface 4 (X; Y; Rz). At the same time, the support surface 4 (Z; Rx; Ry) on which the probe rests restricts translation and rotation in directions lateral to the support surface. The support surface is typically flat, with a roughness less than the roughness of the support surface of the probe being held, but this is not intended to be limited to a flat surface. Other methods for supporting or restricting the probe's movement (Z; Rx; Ry) are also contemplated.For example, a number of appropriately positioned contact points (e.g., three contact points) may support the probe with the same effect. In this manner, the support surface may be understood to be comprised of a plurality of support contact points.

[0016] For example, in a preferred embodiment, as shown in FIGS. 1 and 2, the probe cassette 1 comprises a plurality of pockets 9, e.g., an array of pockets, each configured to hold a corresponding probe. In FIGS. 1 and 2, dashed lines indicate the plurality of pockets 9. Advantageously, the plurality of pockets can be formed from a predetermined number, or even a single physical containment element. Providing multiple pockets advantageously increases the number of probes that can be held in a single cassette, thereby reducing the need to replace or replenish the cassette as probes are consumed. In some embodiments, for example, as shown, the pockets are arranged in an array, with each row containing multiple pockets. In the embodiment shown in FIG. 1, a total of 18 rows contain 10 pockets each. It should be noted that the number and arrangement of pockets in a probe cassette can be varied.

[0017] The pockets are not limited to holding the particular types of probes shown, and other embodiments are envisioned, including embodiments holding different types of probes or combinations of probes, and the shape and dimensions of the pockets can be tailored to the size and shape of the probes in the combination they hold.

[0018] In some embodiments, the probe cassette includes a mount for reversibly connecting the probe cassette to a corresponding mount, such as a pick-and-place unit, on the probe-utilizing system. The mount may include a kinematic mount. Alternatively, the support surface, such as a bottom surface, of the probe cassette 1 may be configured to be positionable on a corresponding support surface in the probe-utilizing system, such as a vacuum stage or a pick-and-place unit. Alternatively, the cassette may include a reference marker, such as an optical marker, for aligning the cassette with the probe-utilizing system, such as the pick-and-place unit.

[0019] In one embodiment, the engagement surface 8 extends at a predetermined incline relative to the support surface, which corresponds to the incline of the corresponding sidewall of the probe to be held. Matching the incline of the engagement surface, e.g., the sidewall of one or more physical containment elements 5, to the incline of the probe to be held can provide for more accurate containment of tapered sidewall probes. Other aspects of pocket sizing and shaping are discussed below in conjunction with Figures 5A, B and 6A, B, C.

[0020] In one embodiment, as shown in FIG. 2, the probe cassette 1 further includes a clamping member configured to selectively hold the probe under a holding force. The clamping member advantageously holds the probe against the support surface 4, even if the cassette is tilted or inverted, for example, during transport. The clamping member may include a lid configured to press the probe in a closed position, for example, by a protrusion pressing against a flat upper surface of the probe body 2-d. Alternatively, the support surface 4 may include a gel layer, as is known in the art. However, providing a gel layer is generally less preferred because the gel can act as a potential source of contamination and its persistent holding force can hinder probe removal. Preferably, the clamping member is a switchable clamping member configured to hold the probe upright until removal, for example, after the lid is opened. More preferably, the clamping member is a switchable clamping member configured to reduce or release the clamping force when the probe is removed, for example, by a vacuum nozzle of a removal and placement tool. For example, in the preferred embodiment shown in FIG. 2 or FIGS. 3A and 3B, the probe cassette 1 includes a vacuum clamping member, which is provided with at least one opening 60. Note that in the embodiment shown in FIG. 2, the engagement surface 8 of the vacuum clamping member is formed along the support surface, whereas in the embodiment shown in FIGS. 3A and 3B, the engagement surface 8 is provided by a separately attachable containment element (e.g., a sheet, see FIG. 4). The opening 60 is fluidly connected to a fluid port 72 provided in the probe cassette 1, for example, via a vacuum chamber 71. The opening 60 is typically provided in the central region of the support surface of the pocket 9. To adjust the pressure, the opening connects to a corresponding interface, for example, on the system or on a separate unit associated therewith (e.g., a docking station). By adjusting the pressure, the holding force can be appropriately adjusted to hold or release the probe as needed. In some embodiments, the probe is held or released entirely.This allows the probe to remain fixed in position, for example, when the cassette is moved laterally. Releasing the pressure to reduce the retention force allows the target probe to be removed from the cassette, for example, using a vacuum nozzle of the removal means, without being hindered by the traditional retention force of the gel pack or without switching mechanical retention means such as clamps or springs. The remaining probes are held in place by gravity. Alternatively, the cassette may be configured to selectively retain and release the target probe while retaining the remaining probes, such as by a selectively actuable switch.

[0021] In a preferred embodiment, the probe cassette includes one or more alignment means, e.g., alignment pins 61, for associating (locating) the cassette in a predetermined position and orientation on the system, e.g., at a docking station. By providing alignment means, e.g., pins, the entire cassette may be mechanically aligned (by design) to the system. Alternatively, the alignment and orientation of the cassette relative to the system utilizing the probe may be determined visually (by a vision system), e.g., using as reference alignment markers as described above.

[0022] In another embodiment, as shown in FIGS. 3A, 3B, and 4, the probe cassette 1 includes one or more tilting bases 40. As shown in FIG. 4, each of the bases 40 is tilted at an angle corresponding to the orientation of the extraction means 80 of the system using the probe. For clarity, FIG. 4 shows only the component 80 (vacuum nozzle) located at each of two positions on the cassette, rather than the entire system using the probe. The tilt and number of bases can be changed depending on the application, such as the orientation of the extraction means. By providing multiple tilting bases, it becomes possible to hold a large number of probes at corresponding angles within a given overall height dimension of the probe cassette 1, compared to when the top surface of the cassette is continuously tilted.

[0023] In a highly preferred embodiment, as shown in Figures 4-6A, 6B, and 6C, the one or more physical containment elements 5 include a sheet 50. Such a sheet is configured for, preferably reversible, attachment to a support surface. The sheet also includes one or more openings 51 sized to provide multiple engagement surfaces. Defining pockets with a separately provided, reversibly attachable sheet, as opposed to providing permanent physical containment elements, enhances the versatility of the probe cassette 1, at least in that different, independently manufactured sheets can be combined with a single body. The sheets can be replaced as needed. The sheets can be manufactured as consumables tailored to the type of probes they hold. Furthermore, providing one or more physical containment elements as sheets, as opposed to gel-based storage boxes, enhances the cleanability of the probe cassette, e.g., by allowing cassette components to be washed independently and separately, thereby reducing probe contamination.

[0024] Importantly, providing one or more physical confinement elements as attachable sheets further enhances the overall manufacturability of the probe cassette 1. As will be described in more detail below with reference to Figures 5A and 5B and 6A, 6B, and 6C, the pockets are designed to very tight tolerances. Fabrication typically requires precision of 10 μm or better. While high-resolution methods for fabricating probe cassettes from single elements, such as photolithography and additive manufacturing, are known, these methods tend to be relatively costly and time-consuming. By providing one or more physical confinement elements as attachable sheets, the one or more physical confinement elements 5 can be fabricated independently from the main body. This allows the main body, including the support surface, to be manufactured using common, less precise manufacturing methods, such as milling and, in some cases, grinding and polishing, to improve the flatness of the support surface 4. Meanwhile, the physical confinement elements, e.g., sheets, can be manufactured with greater precision. The sheet, including the one or more apertures, can be suitably manufactured using a variety of methods, including known methods such as lithography and additive manufacturing. Preferably, the physical containment element is fabricated from a continuous sheet of material that is then suitably provided with openings or through-holes. In contrast to etching cavities, through-holes can be provided by relatively simple methods, such as cutting. Preferably, the openings are provided by laser cutting, another known high-resolution cutting method. Laser cutting advantageously provides high resolution and repeatability and can be applied to a variety of materials, including plastics, ceramics, glass, or metal sheets, such as aluminum or steel. Laser cutting machines typically provide positioning accuracy of about 10 micrometers and repeatability of about 5 micrometers, while surface finishes, typically as low as about 3 micrometers, have been found to be sufficient for typical probes.

[0025] Alternatively, the body may be manufactured to a relatively high degree of precision, which advantageously allows the attachable containment means (eg strips or sheets) to be manufactured to relatively loose tolerances.

[0026] After the individual components, e.g., a sheet including the body and one or more openings, are manufactured, the probe cassette 1 is assembled by attaching the sheet along the support surface 4 of the body. The sheet can be attached using a variety of known means, including, but not limited to, clamping, screwing, bolting, or gluing. In one embodiment, the sheet is provided with a plurality of holes 55 into which the sheet is secured onto the body 3, e.g., by depositing a quantity of adhesive therein.

[0027] To reduce the complexity of positioning the sheet relative to the body, these elements are preferably manufactured with corresponding alignment means. In one embodiment, as shown in Figures 3A, 3B, and 4, the alignment means include a ridge 32 or shoulder extending along the support surface of the body 3 and a corresponding cutout in the sheet, or vice versa. The ridges and cutouts can be provided in a variety of shapes. In a preferred embodiment, as shown in Figures 4 and 5A, the ridges 32 and cutouts include contact surfaces at corners and at a distance from the corners, allowing the sheet to be aligned relative to the body by sliding it against the ridges prior to installation.

[0028] In a preferred embodiment, the body, one or more physical containment elements, such as sheet 50, and the alignment means, if present, are formed from a sturdy, rigid, and / or chemically resistant material, or a combination of such materials, to allow the probe cassette to be cleaned. Cleaning includes, but is not limited to, rinsing the parts with a suitable solvent in combination with mechanical stimulation, such as rubbing or sonication. Suitable materials include metals such as aluminum, alloys such as steel, glass, and ceramics, such as aluminum oxide. In a specific embodiment, the sheet is formed from stainless steel. Using stainless steel sheets or strips can be cost-effective and offer a suitable combination of processing properties, including cuttability and rigidity. This allows for the handling of narrow strips containing apertures without substantial deformation.

[0029] In certain other embodiments, the sheet is formed as a strip having a row of apertures, each dimensioned to define a cavity for holding a probe once attached to the support surface of the body. The strip is particularly desirable in combination with a probe cassette including multiple platforms, as described, for example, in connection with FIG. 4. Alternatively, the strip may be formed to include multiple rows of apertures, for example, two or three rows, or more, for example, five rows, for example, in the range of 1 to 20 rows, for example, 10 rows.

[0030] As previously mentioned, the pocket (cavity) is sized to provide multiple engagement surfaces located around the perimeter of a predetermined retention location. Aspects related to pocket sizing are described with reference to Figures 5A, 5B and 6A, 6B, and 6C. Figures 5A and 5B show perspective and top views of an example physical containment element 5, and Figures 6A-6C show side cross-sectional views of physical containment element 5. Note that for clarity, dimensions in the figures are not drawn to scale.

[0031] FIG. 5A shows a perspective view of sheet 50 with a total of six openings 51 arranged in a row. Each opening is shaped and sized so that its sidewalls provide a plurality of engagement surfaces 8 arranged around the perimeter of a predetermined retention location, thereby defining a pocket for holding the probe. For example, as shown in FIG. 4, sheet 50 is provided with alignment means. The alignment means are provided in the form of cutouts 56 in the sidewalls and are configured to engage corresponding alignment means in the form of shoulders 32 on the body. Additionally, the sheet may include cutouts (not shown for simplicity) for attaching the sheet to support surface 4 of body 3, the cutouts being sized to contain a predetermined amount of adhesive, such as a cyanoacrylate adhesive.

[0032] The thickness "t" of the sheet preferably corresponds to the thickness of the probe to be held. The maximum height of the physical containment element, e.g., the sheet, is preferably smaller (within 10%) than the thickness of the probe to be held. This configuration of the sheet ensures unobstructed access to the probe from above, for example, during automated probe removal. The thickness of the sheet (cavity depth) varies depending on the type of probe to be held. Typically, the height of the containment means, e.g., the thickness "t" of the sheet, corresponds to the thickness of the probe to be held. In some embodiments, for example, in the case of a probe with sloping sidewalls, the thickness of the sheet is preferably at least 90% of the thickness of the probe, preferably between at least 95% and approximately 100%. For probes with nearly vertical sidewalls (relative to the bottom), the thickness may vary over a wider range, e.g., up to 80% of the thickness of the probe to be held, e.g., between 25% and 60%, or between 50% and 75%. The thickness of the sheet shown in Figures 4 and 5A is approximately 0.3 millimeters.

[0033] As shown schematically in the plan view of FIG. 5B, the sidewalls of the opening 51 do not necessarily need to match the entire contour of the retracted probe. Instead, a predetermined number of engagement surfaces 8-1, 8-2, and 8-3 are intentionally positioned along all edges of the probe body 2-d to restrict probe movement. Preferably, as shown in FIGS. 5B and 6A, in some embodiments, the opening includes a portion 52. The dimensions of this portion 52 are intentionally determined to avoid, for example, damage to the cantilever beam 2-c due to direct contact with the sidewalls. The portion 52 may be omitted if the height of the engagement surface 8, e.g., the thickness of the sheet, is significantly smaller than the thickness of the probe 7, as shown in FIG. 6B. Alternatively, the portion 52 may be provided by thinning the portion 50-a (height h2) of the sheet 50 (height h).

[0034] As shown, the aperture may further include one or more portions 53, 54 separating adjacent engagement surfaces. Portion 53 reduces manufacturing complexity, and portion 54 intentionally interrupts the engagement surface along one end of the probe, resulting in two short contact points, as opposed to a single long contact surface.

[0035] Typically, the pocket dimensions are determined to limit lateral movement of the probe in all directions along the support surface. This means that there is a consistent level of conformity between the probe and the pocket. The pocket is not limited to the illustrated probe, e.g., the elliptical probe shown. It can also be applied to probes of different shapes and sizes, such as probes with an overall rectangular shape, probes with springboard, triangular, or other shaped cantilever beams, probe tips with multiple cantilever beams, or even probes without a cantilever beam. Similarly, the shape and size of the pocket, and the size, shape, and number of portions 52, 53, and 54 can be varied to accommodate the shape and size of the body and the shape, size, and number of cantilevers of the probe to be held, respectively.

[0036] Generally, if the pocket dimensions are too large, the probe movement will not be restricted, and if the dimensions are too small, the probe will not fit at all. Therefore, the pocket dimensions are typically determined to minimize the distance between the engagement surface 8 and the sidewall of the probe. Preferably, the pocket dimensions are oversized relative to the probe, leaving a clearance between the retained probe and the engagement surface of the pocket. The overage (pocket dimensions divided by the probe dimensions) is preferably less than 1.1 (10%), and more preferably, less than, for example, 5%. The lower limit varies depending on the size of the probe to be accommodated. Typically, the overage is at least 0.5%. Because probes are typically generally rectangular in shape, the overhang can be understood as the pocket's first dimension "L1" (e.g., width) divided by the retaining probe's first dimension "Wp" (e.g., width), or the pocket's second dimension "L2" (e.g., length) divided by the probe's second dimension "Lp" (e.g., length). For a probe having a nominal width of approximately 1560 micrometers, as shown in FIG. 2, for example, the pocket is dimensioned so that opposing engagement surfaces 8 are 1595 micrometers apart. This results in an overhang of 2.2%, or a total separation distance of 35 micrometers.

[0037] The probe cassette 1 is particularly advantageously used in systems utilizing probes with automated removal means, so that the spacing "s1" between adjacent pockets is preferably minimized. Reducing the lateral spacing between probes increases the aerial density of stored probes, thereby reducing the overall size of a cassette configured to store a given number of probes. Typically, the spacing can be 5 millimeters or less, e.g., 2 millimeters or less, or 1 millimeter or less, e.g., in the range of 0.5 to 2.5 millimeters.

[0038] A further aspect of the present invention relates to a method of manufacturing the probe cassette disclosed herein. The cassette can be manufactured, for example, by machining from a single block of material, e.g., steel. However, it is preferred that the probe cassette be formed from an assembly of a separately manufactured body including a support surface 4 and one or more separate physical containment elements. Thus, a method of manufacturing such a cassette comprises providing a body including a support surface for supporting the probes, and attaching one or more physical containment elements along the support surface to provide a plurality of engagement surfaces disposed about the periphery of predetermined retention locations, the engagement surfaces extending away from the support surface to define pockets for retaining the probes, the pockets being dimensioned to limit lateral movement of the probes in any direction along the support surface.

[0039] In a preferred embodiment, the one or more physical containment elements are manufactured separately from the main body. The one or more physical containment elements manufactured in this manner are processed with relatively greater precision and repeatability than the process for manufacturing the main body, including the support surface. Assembling a probe cassette from separately manufactured components provides the aforementioned advantages of improved manufacturing cost, manufacturing time, and versatility for devices that hold a variety of probes, as well as other advantages.

[0040] In connection with the probe cassette and its manufacturing method, the present invention further relates to specific components that make up the cassette and a kit of parts for assembling a probe cassette that holds a probe in a predetermined holding position for automated removal by a system utilizing the probe. The kit includes a body including a support surface that supports the probe, and one or more physical confinement elements, the body and the one or more physical confinement elements being arranged relative to one another such that the one or more physical confinement elements are attached along the support surface. The one or more physical confinement elements provide a plurality of engagement surfaces arranged along the periphery of the predetermined holding position, the engagement surfaces extending away from the support surface to define pockets that hold the probes, the pockets being dimensioned to limit lateral movement of the probes in any direction along the support surface.

[0041] In a preferred embodiment, the physical containment element is provided in the form of a sheet, as shown in and described in conjunction with Figures 5A and 5B. The sheet 50 includes one or more openings 51, and the sheet is attached to the support surface of the body to provide a probe cassette 1 that holds the probes in a predetermined position for automatic removal by a probe-utilizing system. The one or more openings are also configured to provide a plurality of engagement surfaces extending away from the support surface to define pockets for holding the probes. The pockets are sized to limit lateral movement of the probes in any direction along the support surface.

[0042] A method 100 for manufacturing a probe cassette that holds the probes in a predetermined holding position for automated removal by a system that utilizes the probes, and the various steps associated with the cassette, is described below with reference to FIG.

[0043] Generally, method 100 comprises step 109 of providing a body including a support surface for supporting a probe, and step 111 of providing one or more physical containment elements along the support surface to provide a plurality of engagement surfaces arranged along the periphery of a predetermined holding position, the engagement surfaces extending away from the support surface to define pockets for holding the probes, the pockets being dimensioned to limit lateral movement of the probe in any direction along the support surface.

[0044] As previously mentioned, providing one or more physical confinement elements can be accomplished by a variety of methods. To ensure accurate positioning, confinement elements are typically manufactured with processes accurate to better than 10 μm. In certain embodiments, one or more physical confinement elements are formed directly on, in, or on the top surface of a single element, such as an aluminum block. Suitable processes include, but are not limited to, photolithography or additive manufacturing. In preferred embodiments, one or more physical confinement elements are attached along a support surface, for example, by attaching a separate sheet containing the physical confinement elements to the support surface. Attachment can be by bolting, screwing, magnetic means, adhesive, or the like. In certain embodiments, the separate sheet is adhered to the top surface of the main body using, for example, a cyanoacrylate adhesive. If a separate sheet containing the physical confinement elements is used, it is provided in a separate step 114. Advantageously, providing a sheet containing the physical confinement elements is performed separately from the main body, preferably by fabrication using high-resolution machining tools such as laser cutting. The separate sheet may be fabricated from any known suitable material, including, but not limited to, plastic, ceramic, glass, and metal sheets such as aluminum or steel. In one embodiment, the separate sheet is a strip, for example provided in the form of a stainless steel strip having a thickness of about 0.3 millimeters.

[0045] In a preferred embodiment, the method includes a step 110 of patterning, e.g., machining, the body. Machining includes polishing the top surface to reduce roughness. Patterning may include providing alignment markers. In a preferred embodiment, particularly when one or more physical confinement elements are provided as attachable sheets, the patterning includes providing alignment means configured to contact corresponding mating means provided on the sheet during attachment in order to align the sheet with the body. Advantageously, patterning the body can be performed by a relatively low-resolution process, e.g., milling. In another preferred embodiment, patterning the body includes providing one or more inclined platform portions, each with an inclination corresponding to the orientation of the extraction means of the probe-utilizing system or matching the orientation of another means of the probe-utilizing system, such as a probe holder.

[0046] In one embodiment, the step of patterning 110 the body, e.g., by machining, includes providing, e.g., by machining, a vacuum clamping member configured to selectively hold the probe under a holding force, the vacuum clamping member comprising at least one opening for fluid connection to a fluid port provided in the probe cassette.

[0047] In one embodiment, the method includes step 112 of placing one or more probes into the pocket. Advantageously, the probes can be placed using an automated tool, such as a pick-and-place tool including a vacuum pick-up means (nozzle) configured to selectively pick and release the probes. Using an automated tool to place the probes reduces manual manipulation of the probes (e.g., via tweezers), thereby reducing the risk of contamination or damage. Alternatively, the probes can be placed manually. Step 112 of placing the probes can be omitted or performed elsewhere, for example, at a customer site. Placing multiple probes allows the cassette to be used as a source of replacement probes for an automated scanning probe microscope. Empty pockets can be used to store used probes, for example, for post-measurement inspection.

[0048] For clarity and conciseness, features described herein may be described as part of the same or different embodiments. However, the scope of the present invention may include embodiments of all or any combination of the described features. For example, while embodiments have been described with a body including a pedestal, alternative methods may be envisioned by one of ordinary skill in the art, having the benefit of this invention, to achieve similar functions and results. For example, physical containment elements may be combined or separated into one or more alternative components. Various elements in the described and illustrated embodiments provide certain advantages, such as reduced translational and rotational degrees of freedom while maintaining free access to the probe during removal of the held probe. Of course, any one of the above embodiments or steps may be combined with one or more other embodiments or steps to achieve further improvements in design and advantage discovery and adaptation. The present invention is particularly advantageous in automated scanning probe microscopy and may be generally applicable to any application that would benefit from a probe cassette that aligns probes in a predetermined position for automated removal.

[0049] In interpreting the appended claims, the word "comprising" does not exclude the presence of elements or acts other than those listed in the claim, and the word "a" or "an" preceding an element does not exclude the presence of a plurality of elements. Any reference signs in the claims do not limit their scope. Multiple "means" may be represented by the same or different items or by implemented structures or functions. The disclosed apparatus or portions thereof may be combined or separated into further parts unless specifically stated otherwise. When a claim refers to another claim, it may indicate synergistic advantages achieved by the combination of the respective features. However, the fact that certain means are recited in mutually different claims does not indicate that the combination of these means cannot be advantageously used. Therefore, the present embodiments can essentially refer to the preceding claims unless clearly excluded by the context, and thus include all possible combinations of claims.

Claims

1. A probe cassette for holding a probe in a predetermined holding position for a system that uses the probe, to accommodate automatic removal, comprising: The probe cassette comprises: a body including a support surface for supporting the probe; one or more physical containment elements formed along or attached to the support surface; Equipped with the one or more physical containment elements provide a plurality of engagement surfaces disposed along a periphery of the predetermined retention location; the engagement surface extends away from the support surface to define a pocket for retaining the probe; the pocket is sized to limit lateral displacement of the probe in any direction along the support surface; the one or more physical containment elements are configured to attach to the support surface and include a sheet having apertures dimensioned to provide the plurality of engagement surfaces; A probe cassette comprising:

2. the body includes alignment means; said alignment means being configured to contact corresponding mating means provided on said sheet during installation to align said sheet with said body; 2. The probe cassette according to claim 1,

3. A plurality of the pockets are provided, each of the pockets is configured to hold a corresponding one of the probes; 3. The probe cassette according to claim 1 or 2,

4. the physical containment element is formed in a strip shape including a plurality of openings arranged in a line; The probe cassette according to any one of claims 1 to 3, characterized in that

5. a vacuum clamping member configured to hold the probe under a holding force; the vacuum clamping member having at least one opening fluidly connected to a fluid port provided in the probe cassette; The probe cassette according to any one of claims 1 to 4, characterized in that

6. the maximum height of the one or more physical confinement elements is less than the thickness of the probe that it holds; The probe cassette according to any one of claims 1 to 5,

7. the engagement surface extends at a predetermined inclination relative to the support surface; the predetermined inclination corresponds to the inclination of a corresponding side wall of the probe to be held; The probe cassette according to any one of claims 1 to 6, characterized in that

8. one or more ramp sections; each of the ramps has a slope corresponding to the orientation of a removal means of a system utilizing the probe; each of the ramps includes a corresponding one of the support surfaces; The probe cassette according to any one of claims 1 to 7, characterized in that

9. the sheet is formed in a strip shape with a plurality of the openings aligned in a line; The probe cassette according to any one of claims 1 to 8,

10. at least said support surface, said physical containment element, and said alignment means being formed from metal, preferably stainless steel; 3. The probe cassette according to claim 2, wherein:

11. A method for manufacturing a probe cassette that holds a probe in a predetermined holding position so as to accommodate automatic removal by a system that uses the probe, comprising: The method for manufacturing the probe cassette includes: providing a body including a support surface for supporting the probe; attaching one or more physical containment elements along the support surface to provide a plurality of engagement surfaces disposed about the periphery of the predetermined retention location; Equipped with the engagement surface extends away from the support surface to define a pocket for retaining the probe; the pocket is sized to limit lateral displacement of the probe in any direction along the support surface; the one or more physical containment elements are fabricated independently from the body; the one or more physical containment elements are configured to attach to the support surface and include a sheet having apertures dimensioned to provide the plurality of engagement surfaces; A method for manufacturing a probe cassette, comprising:

12. 1. A kit for forming a probe cassette that holds a probe in a predetermined holding position for automatic removal by a system that utilizes the probe, comprising: The kit comprises: a body including a support surface for supporting the probe; one or more physical containment elements; Equipped with the body and the one or more physical confinement elements are positioned relative to one another such that the one or more physical confinement elements are attached along the support surface; the one or more physical containment elements provide a plurality of engagement surfaces disposed along a periphery of the predetermined retention location; the engagement surface extends away from the support surface to define a pocket for retaining the probe; the pocket is sized to limit lateral displacement of the probe in any direction along the support surface; the one or more physical containment elements are configured to attach to the support surface and include a sheet having apertures dimensioned to provide the plurality of engagement surfaces; A kit characterized by:

13. A physical containment element in the form of a sheet provided with one or more apertures, which can be used in any of the kits of claim 12 and the probe cassettes of any one of claims 1 to 10, comprising: the sheet is attached to the support surface of the body of the probe cassette to provide the probe cassette with a probe that holds the probe in the predetermined holding position for automatic removal by a system that uses the probe; the one or more openings are each configured to provide a plurality of engagement surfaces extending away from the support surface to define the pockets for retaining the probes; the pocket is sized to limit lateral displacement of the probe in any direction along the support surface; A physical containment element characterized by:

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