Laser processing machine

Abstract

To provide an improved, non-coupling, cancelable linear motor-driven laser processing machine with a simpler overall configuration of the moving device. [Solution] The first moving device 1 is mounted on a mounting base 3. The first moving device 1 includes a moving body 11, a cancellation moving body 12, a linear motor 13, a linear motor 14, a linear guide 15, and a linear guide 6, each of which is simply arranged parallel to the direction of movement of the moving body 11. The second moving device 2 is mounted on the first moving body 11. The second moving device 2 includes a moving body 21, a cancellation moving body 22, a linear motor 23, a linear motor 24, a linear guide 25, and a linear guide 26, each of which is simply arranged parallel to the direction of movement of the moving body 21.

Description

Technical Field

[0001] The present invention relates to a laser processing machine provided with a moving device driven by a linear motor that reciprocates in the horizontal linear one-axis direction. In particular, the present invention relates to a laser processing machine provided with a mechanism for suppressing the vibration of the machine body that occurs in a moving device driven by a linear motor.

Background Art

[0002] In a general laser processing machine, as a method of irradiating a laser beam to a predetermined position, a method of irradiating the laser beam while relatively moving the irradiated object and the laser head by a moving body, and a method of scanning the laser beam by a galvanometer scanner are well known. In the following description, the method of relatively moving the irradiated object and the laser head is referred to as the moving body method, and the method of irradiating the laser beam by a galvanometer scanner is referred to as the galvanometer method.

[0003] A laser processing machine of the galvanometer method can scan the laser beam at a higher speed than a laser processing machine of the moving body method. However, since the laser beam cannot be irradiated perpendicular to the irradiated surface at almost all irradiation positions, the irradiation accuracy at each irradiation position is reduced to some extent. In particular, in processing for cutting an irradiated object with a relatively large plate thickness or processing with a relatively large processing amount per unit time such as forming a deep hole, the magnitude of the error due to the reduction in irradiation accuracy may not be acceptable. In addition, the area of the upper surface of the work piece that can be processed may be limited to be smaller than the area of the upper surface of the work piece that can be processed by a laser processing machine of the moving body method.

[0004] In a laser processing machine of the moving body method, by providing a moving device driven by a linear motor, the acceleration and speed of the moving body can be increased, and the scanning speed of the laser beam can be improved. However, when trying to move the moving body at a high speed with a relatively large acceleration, vibration occurs from the moving body due to a sudden change in the posture of the moving body that accelerates and moves, and the vibration is transmitted to the machine body, causing the machine body to vibrate.

[0005] Patent Document 1 discloses a numerical control device that includes an acceleration setting unit that superimposes a second acceleration in the same direction as the first acceleration on the first acceleration, with timing and magnitude that suppress vibrations that occur when the first acceleration is applied. According to the invention of Patent Document 1, vibrations in the feed control system are suppressed by superimposing a second acceleration on a moving body accelerating with a first acceleration at a predetermined timing.

[0006] Patent Document 2 discloses a mobile laser processing machine equipped with a vibration sensor on the machine body or floor surface, as well as a vibration generating means for generating vibrations that cancel out vibrations generated as the mobile body moves. According to the invention of Patent Document 2, it is possible to generate vibration waves that cancel out vibrations according to the degree of vibration actually generated in the machine body or mobile body, even with a relatively simple configuration.

[0007] Patent Document 3 discloses a machine tool of the mobile type, which has a mobile body and a pair of canceling mobile bodies parallel to the mobile body on the upper side of the machine body. The machine tool invention of Patent Document 3 is a non-connected canceling type linear motor drive system mobile device that has excellent controllability and tracking ability, and has a compact structure despite being a machine with a relatively large size for the machine body or mobile body. [Prior art documents] [Patent Documents]

[0008] [Patent Document 1] Japanese Patent Publication No. 2002-341916 [Patent Document 2] Japanese Patent Publication No. 2002-35967 [Patent Document 3] Japanese Patent Publication No. 2007-75902 [Overview of the project] [Problems that the invention aims to solve]

[0009] In some technologies that actively eliminate vibrations occurring in an aircraft or mobile body, timing the generation of a vibration wave to cancel out the vibration wave occurring in the aircraft is difficult. In particular, when detecting vibrations in an aircraft or mobile body and attempting to generate a vibration wave to cancel out the vibration wave at that time, timing the generation of the cancelout vibration wave becomes even more difficult.

[0010] In a cancel-type linear motor drive system, the moving body and the cancel-moving body can be controlled simultaneously according to the same control signal calculated in theory, making it relatively easy to time the movement of the cancel-moving body to suppress vibrations. However, since all linear motors that move the moving body and the cancel-moving body must be of the same type with the same output and mass, there are significant constraints on the placement of each moving body, making the machine design more difficult. In the case of relatively large laser processing machines, even stacking two moving bodies on top of each other is not easy.

[0011] The primary objective of the present invention is to provide an improved, non-coupling, cancelable linear motor-driven laser processing machine in which the overall configuration of the moving device is simpler. Several advantages that can be obtained by the present invention are specifically shown in the embodiments. [Means for solving the problem]

[0012] To solve the above problems, the laser processing machine of the present invention includes a movable body (11) that is mounted on a mounting base (3) and moves back and forth in a single horizontal linear axis direction, a stator (13A) mounted on the mounting base (3) and a movable element (13B) provided on the movable body (11), and moves the movable body (11). 2 of Same type corelessA linear motor (13), a pair of cancellation moving bodies (12) provided symmetrically with respect to the first line (α) such that the centroid (G2) of each pair passes through two lines parallel to the first line (α), passing through a point (P1) on a perpendicular line drawn vertically from a position equidistant (L1) from the first line (α) in a direction that is both horizontal and perpendicular to the first line (α), and on a mounting base (3) away from the moving body (11) at its initial position, the first line (α) is defined as the first line (α), and the second line (β) is defined as two lines parallel to the first line (α). The stator (14A) and the cancellation moving bodies (12) are provided on the mounting base (3). It serves the purpose of A pair of movable elements (14B) that move the canceling moving body (12) Same type coreless A linear motor (14), a linear guide (15) provided on a mounting base (3) coaxially with a first straight line (α) to position and guide the moving body (11), and a third straight line (γ) parallel to the first straight line (α) and provided on both sides of the linear guide (15) parallel to the linear guide (15). Mobile object (11) Two linear guides (15) for positioning and guiding A total of three linear guides (15) The system comprises a pair of linear guides (16) provided on a mounting base (3) for each of the pair of cancellation moving bodies (12), arranged symmetrically on the left and right sides of the cancellation moving body (12) with respect to the central axis of the cancellation moving body (12) along a fourth straight line (δ) parallel to the first straight line (α), for positioning and guiding the cancellation moving body (12).

[0013] The laser processing machine of the present invention has a linear motor (13) that moves the moving body (11) so that the moving body (11) moves to a target position with a predetermined acceleration and velocity. control The system includes a first drive control device that outputs a signal to generate a predetermined thrust, and a second drive control device that outputs a second control signal in the opposite phase to the first control signal to each of a pair of linear motors (13) that move a pair of cancellation moving bodies (12) so that each of the cancellation moving bodies (12) moves at a predetermined acceleration and velocity to suppress vibrations generated by the moving body (11), thereby generating the required thrust.

[0014] Preferably, the laser processing machine of the present invention is such that each of the pair of cancellation moving bodies (12) is a movable element (14B) of a linear motor (14) that moves the cancellation moving bodies (12). It also includes one or more weight plates (14C) having a predetermined mass that are loaded onto each of the pair of cancellation moving bodies (12) to adjust the mass of the cancellation moving bodies (12).

[0015] Furthermore, the laser processing machine of the present invention includes a first moving body (11) and a second moving body (21) mounted on the first moving body (11) with the first moving body (11) as the mounting base; the second moving body (21) reciprocates in another horizontal line axis direction perpendicular to the horizontal line axis direction which is the direction of movement of the first moving body (11), and includes two identical coreless linear motors (23) that move the second moving body (21), each comprising a stator (23A) mounted on the first moving body (11) and a movable element (23B) mounted on the second moving body (21); and a first cancel moving body (12) and a first line extending in the direction of movement of the second moving body (21) at the initial position of the second moving body (21), with the first line being a line that is horizontal and perpendicular to the first line, and located at an equidistant distance from that first line. A pair of second cancellation moving bodies (22) are provided symmetrically with respect to the first line such that their centers of gravity pass through the second lines, passing through a point on a perpendicular line drawn vertically from the position and passing through two lines parallel to the first line, and the second lines passing through these second lines; a pair of identical coreless linear motors that move the second cancellation moving bodies (22), each including a stator (24A) provided on the first moving body (11) and a movable element (24B) that also serves as the second cancellation moving body (22); a linear guide (25) provided on the first moving body (11) coaxially with the first line to position and guide the second moving body (21); and provided on both sides of the linear guide (25) parallel to the linear guide (25) along a third line parallel to the first line. Re 2 movement Moving object (2 1Three linear guides (25) in total, including two linear guides (25) for positioning and guiding [[ID=]], and a pair of linear guides (26) provided symmetrically about the central axis of the second canceling moving body (22) along a fourth straight line parallel to the first straight line in each of the pair of second canceling moving bodies (22) on the first moving body (11) for positioning and guiding the second canceling moving body (22).

[0016] The laser processing machine of the present invention includes a first drive control device that outputs a first signal to a linear motor (23) that moves the second moving body (21) so that the second moving body (21) moves to a target position with a predetermined acceleration and speed, and generates a predetermined thrust. A pair of second canceling moving bodies (22) move with a predetermined acceleration and speed so as to suppress vibrations generated by the second moving body (21). A pair of linear motors (24) that move the pair of second canceling moving bodies (22) respectively output second control signals having a reverse phase with respect to the first control signal to generate required thrusts. control And a second drive control device.

[0017] More preferably, each of the pair of second canceling moving bodies (22) is a mover (24B) of a linear motor (24) that moves the second canceling moving body (22). Further, one or more weight plates having a predetermined mass for adjusting the mass of the second canceling moving body (22) are mounted on each of the pair of second canceling moving bodies (22). 24C ) are included.

Advantages of the Invention

[0018] In the laser processing machine of the present invention, excluding accessory components such as a position detection device that has almost no influence on mass, or the irradiated object which is the workpiece, the main components constituting the indispensable moving device are a moving body, a linear motor that moves the moving body, a guide that guides the movement of the moving body, a canceling moving body installed independently of the moving body, a linear motor that moves the canceling moving body, and a guide that guides the movement of the canceling moving body.

[0019] At this time, the moving body and the canceling moving body are simply arranged side by side along the moving direction of the moving body on the same common installation table. Also, each linear motor that moves the moving body and the canceling moving body is simply provided in parallel along the moving direction of the moving body on the same installation table.

[0020] In addition, a plurality of linear guides that guide the movement of the moving body and the canceling moving body are also simply arranged side by side and arranged in parallel along the moving direction of the moving body on the same installation table. In particular, the guiding device for positioning and guiding the moving body consists of a linear guide provided coaxially with the moving body and two linear guides provided on both sides of the linear guide along a straight line parallel to the linear guide.

[0021] Therefore, it is easy to accurately arrange the relative positional relationship between the center of gravity of the moving body including the irradiated object with different masses for each processing mounted on the moving body and the canceling moving body. And, it is not required that the linear motor that moves the moving body and the linear motor that moves the canceling moving body are of the same type. By simply applying a control signal with an inverse phase of a relative magnitude to the linear motor of the canceling moving body simultaneously with the control signal applied to the linear motor that moves the moving body, the vibration of the machine body can be suppressed. As a result, according to the laser processing machine of the present invention, even for a relatively large moving device, the overall configuration can be made simpler while effectively suppressing the vibration of the machine body.

Brief Description of the Drawings

[0022] [Figure 1] It is a perspective view of the laser processing machine of the present invention. [Figure 2] Figure 1 is a cross-sectional view of the moving mechanism in the laser processing machine shown, when the machine body is viewed from the front. [Figure 3] Figure 1 is a schematic plan view of the moving mechanism, showing the saddle and cancellation moving body when viewed from above in the laser processing machine. [Modes for carrying out the invention]

[0023] Figure 1 shows a typical embodiment of the laser processing machine of the present invention. In the laser processing machine of this embodiment, the side of the machine facing towards the viewer in Figure 1 is defined as the front of the machine. Figure 2 shows a cross-section of the moving device, including the moving body and the cancellation moving body, as viewed from the front of the machine in the laser processing machine shown in Figure 1. Figure 3 schematically shows the saddle plane as viewed from above the machine in the laser processing machine of this embodiment. In the present invention, the control axis of the feed control system of the laser processing machine, which is a single horizontal linear axis in the front-to-back direction, is defined as the Y-axis. The control axis of the feed control system of the laser processing machine, which is a single horizontal linear axis in the left-to-right direction, perpendicular to the Y-axis, is defined as the X-axis.

[0024] The laser processing machine of the present invention includes a linear motor-driven moving device that includes a moving body that reciprocates in a single horizontal linear axis direction and a linear motor that moves the moving body. The laser processing machine of the present invention includes at least one linear motor-driven moving device.

[0025] The laser processing machine of the embodiment shown in Figure 1 is equipped with two moving devices, each containing a moving body that reciprocates in a single horizontal linear axis direction. The first moving device 1 is a Y-axis moving device. The second moving device 2 is an X-axis moving device. In particular, the laser processing machine of the embodiment has a structure in which the second moving device 2 is mounted on top of the first moving device 1. For example, the first moving device may be an X-axis moving device and the second moving device may be a Y-axis moving device, with the Y-axis moving device mounted on top of the X-axis moving device.

[0026] The laser processing machine in the embodiment shown in Figure 1 has a gantry-type structure. The laser processing machine comprises a bed 3 on which a first moving device 1 and a second moving device 2 are stacked, two support columns 4, and one beam 5. At least a laser head 6 and a laser oscillator 7 are provided on the beam 5. The laser head 6 can move in one vertical linear axis direction (Z-axis direction).

[0027] The first moving device 1 includes a moving body 11, a cancellation moving body 12, a linear motor 13, a linear motor 14, a linear guide 15, and a linear guide 16. In Figure 1, essential accessory components of the moving device, including position detection devices such as linear scales provided on the moving body 11 and the cancellation moving body 12 respectively for driving and controlling the linear motors, have only a slight effect on the variation in the mass of the moving bodies such as the moving body 11 and the cancellation moving body 12, and are therefore not illustrated in the diagram.

[0028] The moving body 11 of the first moving device 1 is a saddle that reciprocates in the Y-axis direction. The pair of cancellation moving bodies 12 are provided independently of the moving body 11, without being coupled to it. Therefore, each cancellation moving body 12 can reciprocate by a desired amount in a desired direction along a horizontal straight line parallel to the Y-axis (V-axis direction) while the moving body 11 reciprocates by a predetermined amount in a predetermined direction along the Y-axis.

[0029] The pair of cancellation moving bodies 12 each have the same size and mass. In particular, in the laser processing machine of this embodiment, each cancellation moving body 12 is a movable element 14B of a linear motor 14 that reciprocates in the V-axis direction. More specifically, the cancellation moving body 12 is made by loading a metal weight plate 14C having a predetermined mass on the movable element 14B of the linear motor 14, and the mass of the cancellation moving body 12 can be adjusted by loading the weight plate 14C. For this reason, in the laser processing machine of this embodiment, the configuration of the first moving device 1 is simplified.

[0030] As shown in Figure 3, in the initial positions of the moving body 11 and the cancellation moving body 12 of the first moving device 1, if we define the first straight line α as the straight line passing through the center of gravity G1 of the moving body 11 and extending in the direction of movement of the moving body 11, and define the second straight line β as two straight lines parallel to the first straight line α, passing through a point on a perpendicular line drawn vertically from a position P1 equidistant L1 from the first straight line α in a direction horizontal and perpendicular to the first straight line α, then the pair of cancellation moving bodies 12 are provided symmetrically on the left and right sides of the machine with respect to the first straight line α, such that their centers of gravity G2 each pass through the second straight line β.

[0031] The linear motor 13 is a power source for moving the mobile body 11. In the laser processing machine of the embodiment shown in Figure 1, the linear motor 13 is a coreless synchronous servo motor. In the laser processing machine of the present invention, the first moving device 1 includes one or more motors for moving one mobile body 11.

[0032] In particular, in the laser processing machine of this embodiment, two identical linear motors 13 of the first moving device 1 form a single drive unit. A pair of linear motors 13 is advantageous compared to a configuration in which a single linear motor forms the drive unit in that it can better control the correct posture of the moving body 11 and suppress vibrations. Furthermore, a position detection device such as a linear scale can be provided along the centerline of the moving body 11, so a better position detection signal can be obtained.

[0033] The primary excitation winding of the linear motor 13 is a coreless coil and is located on the stator 13A side, as shown in Figure 2. In the stator 13A of the linear motor 13, multiple coreless coils are arranged on both sides of the stator body, which is erected on the bed 3, which is the mounting base, along the direction of movement of the movable body 11. The secondary permanent magnets of the linear motor 13 are located on the movable element 13B side. The movable element 13B is located on the lower surface of the movable body 11. In the movable element 13B, multiple permanent magnets are arranged on both inner sides of the downward-opening box-shaped movable element body, facing the coreless coils on the stator 13A side, along the direction of movement of the movable body 11.

[0034] The linear motor 14 is a power source for moving the cancellation moving body 12. In the laser processing machine of the embodiment shown in Figure 1, the linear motor 14 is a coreless synchronous servo motor. In the laser processing machine of the present invention, the first moving device 1 includes one or more motors for moving one moving body 11. In particular, in the laser processing machine of the embodiment, a pair of linear motors 14 of the first moving device 1 form a single drive device.

[0035] The primary excitation windings of the pair of linear motors 14 are coreless coils and are provided on the stator 14A side. On the stator 14A of the linear motor 14, multiple coreless coils are arranged along the direction of movement of the movable body 11 on both sides of the main body, which is erected on the same mounting base, bed 3, on which the main body of the stator 13A of the linear motor 13 is erected. The secondary permanent magnets of the linear motor 14 are provided on the movable body 14B side. On the movable body 13B, multiple permanent magnets are arranged along the direction of movement of the movable body 11 on both inner sides of the box-shaped main body, facing the primary excitation windings on the stator 14A side.

[0036] In particular, in the laser processing machine of this embodiment, the secondary movable element 14B of the linear motor 14 also serves as the cancellation moving body 12. The cancellation moving body 12 has its mass adjusted in accordance with the relationship between the mass of the moving body 11, the second moving device 2 loaded on the moving body 11, and the object to be irradiated, and the distance L1 from the center of gravity G1 of the moving body 11, by loading a weight plate 14C onto the secondary movable element 14B of the linear motor 14.

[0037] The linear guide 15 positions and guides the moving body 11. The linear guide 15 mainly consists of a guide rail 15A and a bearing 15B. In the laser processing machine of this embodiment, three linear guides 15 are provided. One linear guide 15 is provided coaxially with a first straight line α on a horizontal plane, as shown in Figure 3, and the other two linear guides 15 are provided along third straight lines γ that are parallel to the first straight line α. The configuration with three linear guides 15 is advantageous in that it can more stabilize the posture of the moving body 11 in the first moving device 1, in which the moving body 11 is moved by a pair of linear motors 13.

[0038] The linear guide 16 positions and guides the movable element 14B of the canceling moving body 12 or the linear motor 14. The linear guide 16 mainly consists of a guide rail 16A and a bearing 16B. As shown in Figure 3, in the laser processing machine of this embodiment, a pair of guide rails 16A are provided for each of the pair of canceling moving bodies 12 or the movable element 14B of the linear motor 14, symmetrically on both sides with respect to the central axis of the canceling moving body 12 or the movable element 14B of the linear motor 14, along a fourth straight line δ parallel to a first straight line α.

[0039] In the laser processing machine of this embodiment, when the drive device is formed by two linear motors 13, as shown in Figure 3, when the initial position of the first moving device 1, if the fifth line ε is defined as two lines parallel to the first line α and passing through a point on a perpendicular line drawn vertically from a position P2 equidistant L2 away from the first line α in a direction that is horizontal and perpendicular to the first line α, then the pair of linear motors 13 are provided symmetrically on the left and right sides of the machine body with respect to the first line α, such that the center of gravity G2 of their movable parts passes through the fifth line ε.

[0040] In the laser processing machine of this embodiment, a first drive control device (not shown) drives and controls a linear motor 13 as the first drive device to move the mobile body 11. A second drive control device (not shown) simultaneously drives and controls a pair of linear motors 14 as the second drive device to move the cancellation mobile body 12. The first drive control device and the second drive control device are, in substance, a single control device that synchronously drives and controls the linear motor 13 as the first drive device and the pair of linear motors 14 as the second drive device.

[0041] The first drive control device controls the linear motor 13 to move the mobile body 11 to a target position with a predetermined acceleration and velocity. control The first drive control device outputs a signal to generate a predetermined thrust. The second drive control device also outputs a second control signal to each of the pair of linear motors 14 that is in the opposite phase to the first control signal to generate the required thrust so that the cancellation mobile body 12 moves at a predetermined acceleration and velocity in order to suppress vibrations generated by the mobile body 11.

[0042] The first drive control device is control When a signal is output and the moving body 11 moves a predetermined distance with a predetermined acceleration and velocity, the second drive control device is simultaneously given the first control By outputting a drive signal that is out of phase with the signal, vibrations can be effectively suppressed by canceling out the vibration waves of vibrations caused to the machine by the movement of the mobile body 11 with vibration waves of vibrations caused by the movement of the mobile body 12.

[0043] As described above, the moving body 11 and the cancellation moving body 12 of the first moving device 1 are simply installed parallel to each other on a common mounting base. Furthermore, the multiple linear motors 13 and linear motors 14 that move the moving body 11 and the cancellation moving body 12 of the first moving device 1 are all simply installed parallel to each other on a common mounting base. In addition, all the linear guides 15 and linear guides 16 that guide the moving body 11 and the cancellation moving body 12 are also simply installed parallel to each other along the direction of movement of the moving body 11. Therefore, according to the laser processing machine of this embodiment, the overall configuration of the moving device is simpler.

[0044] The second moving device 2 includes a moving body 21, a cancellation moving body 22, a linear motor 23, a linear motor 24, a linear guide 25, and a linear guide 26. In Figure 1, essential accessory components of the moving device, including position detection devices such as linear scales provided on each moving body to drive and control the linear motors, have only a slight effect on the mass fluctuations of the moving bodies such as the moving body 21 and the cancellation moving body 22, and are therefore not illustrated in the diagram.

[0045] The moving body 21 of the second moving device 2 is a table that reciprocates in the X-axis direction. The pair of cancellation moving bodies 22 are provided independently of the moving body 21, without being coupled to it. Therefore, each cancellation moving body 22 can reciprocate by a desired amount in a desired direction along a horizontal straight line parallel to the X-axis (U-axis direction) while the moving body 21 reciprocates by a predetermined amount in a predetermined direction along the X-axis.

[0046] The pair of cancellation moving bodies 22 each have the same size and mass. In particular, in the laser processing machine of this embodiment, each cancellation moving body 22 is a movable element 24B of a linear motor 24 that reciprocates in the U-axis direction. More specifically, the cancellation moving body 22 is made by loading a metal weight plate 24C having a predetermined mass on the movable element 24B of the linear motor 24, and the mass of the cancellation moving body 22 can be adjusted by loading the weight plate 24C. For this reason, in the laser processing machine of this embodiment, the configuration of the second moving device 2 is simplified.

[0047] Since the arrangement of the moving body 21 and the canceling moving body 22 of the second moving device 2 is basically the same as that of the first moving device 1, the first moving device 1 in Figure 3 can be replaced with the second moving device 2 for reference.

[0048] In the initial positions of the moving body 21 and the cancellation moving body 22 of the second moving device 2, a straight line passing through the center of gravity of the moving body 21 and extending in the direction of movement of the moving body 21 is defined as the first straight line, and two straight lines passing through points on perpendicular lines drawn from equidistant positions in a direction horizontal and perpendicular to the first straight line, and parallel to the first straight line, are defined as the second straight lines. The pair of cancellation moving bodies 22 are provided symmetrically on the front and rear of the machine with respect to the first straight line, such that their centers of gravity each pass through the second straight line.

[0049] The linear motor 23 is a power source for moving the mobile body 21. In the laser processing machine of the embodiment shown in Figure 1, the linear motor 23 is a coreless synchronous servo motor. In the laser processing machine of the present invention, the second moving device 2 includes two or more motors for moving one mobile body 21.

[0050] In particular, in the laser processing machine of this embodiment, two identical linear motors 23 of the second moving device 2 form a single drive unit. A pair of linear motors 23 is advantageous compared to a configuration in which a single linear motor forms the drive unit in that it can better control the correct posture of the moving body 21 and suppress vibrations. Furthermore, a position detection device such as a linear scale can be provided along the centerline of the moving body 21, thereby obtaining a better position detection signal.

[0051] The primary excitation winding of the linear motor 23 is a coreless coil and is located on the stator 23A side. In the stator 23A of the linear motor 23, multiple coreless coils are arranged on both sides of the stator body, which is erected on the saddle, which is the movable body 11 that serves as the mounting base, along the direction of movement of the movable body 21. The secondary permanent magnets of the linear motor 23 are located on the movable element 23B side. The movable element 23B is located on the lower surface of the movable element 21. In the movable element 23B, multiple permanent magnets are arranged on both inner sides of the downward-opening box-shaped movable element body, facing the coreless coils on the stator 23A side, along the direction of movement of the movable element 21.

[0052] The linear motor 24 is a power source for moving the cancellation moving body 22. In the laser processing machine of the embodiment shown in Figure 1, the linear motor 24 is a coreless synchronous servo motor. In the laser processing machine of the present invention, the second moving device 2 includes one or more motors for moving one moving body 21. In particular, in the laser processing machine of the embodiment, the first moving device 1 A pair of linear motors 24 form a single drive unit.

[0053] The primary excitation windings of the pair of linear motors 24 are coreless coils and are provided on the stator 24A side. In the stator 24A of the linear motor 24, multiple coreless coils are arranged along the direction of movement of the movable body 21 on both sides of the body, which is erected on the same mounting base, the movable body 11, which is a saddle, as the stator 23A of the linear motor 23. The secondary permanent magnets of the linear motor 24 are provided on the movable body 24B side. In the movable body 23B, multiple permanent magnets are arranged along the direction of movement of the movable body 21 on both inner sides of the box-shaped body, facing the primary excitation windings on the stator 24A side.

[0054] In particular, in the laser processing machine of this embodiment, the secondary movable element 24B of the linear motor 24 also serves as the cancellation movable body 22. The mass of the cancellation movable body 22 is adjusted in accordance with the relationship between the mass of the movable body 21 and the object to be irradiated and the distance from the center of gravity of the movable body 21 to the movable body 21, by loading a weight plate 24C onto the secondary movable element 24B of the linear motor 24.

[0055] The linear guide 25 positions and guides the moving body 21. The linear guide 25 mainly consists of a guide rail (not shown) and a bearing. In the laser processing machine of this embodiment, three linear guides 25 are provided. One linear guide 25 is provided coaxially on a horizontal plane with respect to a first straight line that passes through the center of gravity of the moving body 21 and extends in the direction of movement of the moving body 21, and the other two linear guides 25 are provided along third straight lines that are parallel to the first straight line. The configuration with three linear guides 25 is advantageous in that it can more stabilize the posture of the moving body 21 in the second moving device 2, in which the moving body 21 is moved by a pair of linear motors 23.

[0056] The linear guide 26 positions and guides the movable element 24B of the cancel moving body 22 or linear motor 24. The linear guide 26 mainly consists of a guide rail (not shown) and a bearing. In the laser processing machine of this embodiment, for each of the pair of cancel moving bodies 22 or movable element 24B of the linear motor 24, a pair of guide rails 26A are provided symmetrically on both sides with respect to the central axis of the cancel moving body 22 or movable element 24B, along a fourth straight line parallel to a first straight line that passes through the center of gravity of the moving body 21 and extends in the direction of movement of the moving body 21.

[0057] In the case where the drive device is formed by two linear motors 23, as in the second moving device 2 of the laser processing machine of the embodiment, when the initial position of the second moving device 2, if the fifth line is defined as two lines parallel to the first line that pass through a point on a perpendicular line drawn vertically from a position equidistant from a position horizontal and perpendicular to the first line that passes through the center of gravity of the moving body 21 and extends in the direction of movement of the moving body 21, then the pair of linear motors 23 are provided symmetrically on the front and rear of the machine body with respect to the first line, such that the centers of gravity of their movable parts pass through the fifth line.

[0058] In the laser processing machine of this embodiment, a first drive control device (not shown) drives and controls a linear motor 23 as the first drive device to move the mobile body 21. A second drive control device (not shown) simultaneously drives and controls a pair of linear motors 24 as the second drive device to move the cancellation mobile body 22. The first drive control device and the second drive control device are, in substance, a single control device that synchronously drives and controls the linear motor 23 as the first drive device and the pair of linear motors 24 as the second drive device.

[0059] The first drive control device controls the linear motor 23 to move the mobile body 21 to a target position with a predetermined acceleration and speed. controlThe first drive control device outputs a signal to generate a predetermined thrust. The second drive control device also outputs a second control signal to each of the pair of linear motors 24 that is in the opposite phase to the first control signal to generate the required thrust so that the cancellation mobile body 22 moves at a predetermined acceleration and velocity in order to suppress vibrations generated by the mobile body 21.

[0060] The first drive control device is control When a signal is output and the moving body 21 moves a predetermined distance with a predetermined acceleration and velocity, the first drive control device is sent to the second drive control device at the same timing. control By outputting a drive signal that is out of phase with the signal, vibrations can be effectively suppressed by canceling out the vibration waves of vibrations caused by the movement of the mobile body 22 with the vibration waves of vibrations caused by the movement of the mobile body 21.

[0061] As described above, the moving body 21 and the cancellation moving body 22 of the second moving device 2 are simply installed parallel to each other on a common mounting base. Furthermore, the multiple linear motors 23 and linear motors 24 that move the moving body 21 and the cancellation moving body 22 of the second moving device 2 are all simply installed parallel to each other on a common mounting base. In addition, all the linear guides 25 and linear guides 26 that guide the moving body 21 and the cancellation moving body 22 are also simply installed parallel to each other along the direction of movement of the moving body 21. For this reason, the overall configuration of the moving device is simpler according to the laser processing machine of this embodiment.

[0062] In particular, the laser processing machine of the embodiment shown in Figure 1 has a structure in which a second moving device 2 is mounted on a first moving device 1, and the first moving device 1 and the second moving device 2 have substantially the same structure, and vibration can be suppressed with a simple configuration for each. Therefore, according to the laser processing machine of this embodiment, the overall configuration of the moving device is even simpler.

[0063] In this embodiment of the laser processing machine, the first moving device 1 and the second moving device 2 each have a first drive control device and a second drive control device, but each of the first drive control device and the second drive control device is included in a single control device. The control device can simultaneously distribute and output drive signals to the linear motors 13, 14, 23, and 24 through each of the first drive control device and the second drive control device, and by synchronously controlling the linear motors 13 and 23, the moving body 11 and the moving body 21 can be simultaneously moved in a desired direction and positioned at a desired position.

[0064] The laser processing machine of the present invention is not limited to the embodiments already described, and can be implemented by combining known technologies or other inventions to the extent that the objectives and effects of the present invention can be achieved without departing from the technical concept of the present invention. Furthermore, although several examples have already been shown, various modifications, substitutions, and combinations are possible. For example, the present invention can be implemented even in a structure in which the second moving device is not mounted on the first moving device. [Industrial applicability]

[0065] This invention is applicable to non-connected cancellation type laser processing machines. According to this invention, non-connected cancellation type laser processing machines are improved, and the overall configuration of the moving device is simpler. This invention contributes to the development of laser processing machines. [Explanation of symbols]

[0066] 1. First mobile device 2. Second mobile device 3 beds 4 pillars 5 beams 6 Laser Heads 7 light source 11 Mobile Unit 12 Cancel Mobile Unit 13 Linear motor 14 Linear motor 15 Linear Guide 16 Linear Guide 21 Mobile Unit 22 Cancel Mobile Unit 23 Linear motor 24 Linear motor twenty five Linear guide 26 Linear guide

Claims

[Claim 1] A first movable body mounted on a base and moving back and forth in a single horizontal linear direction, Two identical coreless linear motors for moving the first moving body, each comprising a stator provided on the mounting base and a movable element provided on the first moving body, A pair of first cancelling moving bodies are provided on the mounting base, away from the first moving body, such that the center of gravity of each of the two first cancelling moving bodies passes through the second lines, with the first cancelling moving body being provided symmetrically with respect to the first line, passing through a point on a perpendicular line drawn vertically from a position equidistant from the first line in a direction that is horizontal and perpendicular to the first line, and the center of gravity of each of the two first cancelling moving bodies passing through the second lines, respectively, the first cancelling moving bodies being provided symmetrically with respect to the first line, the first cancelling moving body being provided symmetrically with respect to the first line, the first cancelling moving body being provided symmetrically with respect to the first line, the first cancelling moving body being provided symmetrically with respect to the first line, the first cancelling moving body being provided symmetrically with respect to the first line, the first cancelling moving body being provided symmetrically with respect to the first line, the first cancelling moving body being provided symmetrically with respect to the first line, the first cancelling moving body being provided symmetrically with respect to the first line, the second cancelling moving body being provided symmetrically with respect to the first A pair of identical coreless linear motors, each comprising a stator mounted on the aforementioned mounting base and a movable element that also serves as the first cancellation moving body, for each of which moves the first cancellation moving body, One or more weight plates having a predetermined mass to be loaded onto each of the pair of first cancellation moving bodies to adjust the mass of the first cancellation moving bodies, A total of three linear guides are provided on the mounting base, coaxially with the first straight line and positioned and guides the first moving body, and two linear guides provided parallel to the linear guide on both sides of the linear guide, along third straight lines parallel to the first straight line and parallel to the linear guide, and positioned and guides the first moving body. On the mounting base, a pair of linear guides are provided on each of the pair of first cancellation moving bodies, symmetrically arranged on the left and right sides of the central axis of the first cancellation moving body along a fourth straight line parallel to the first straight line, for positioning and guiding the first cancellation moving body, A second mobile body is provided on the first mobile body, with the first mobile body serving as a mounting base. The second moving body moves back and forth in another horizontal line axis direction that is perpendicular to the horizontal line axis direction which is the direction of movement of the first moving body. Two identical coreless linear motors for moving the second moving body, each comprising a stator provided on the first moving body and a movable element provided on the second moving body, A pair of second cancelling moving bodies are provided symmetrically with respect to the first line such that the center of gravity of each second cancelling moving body passes through two lines parallel to the first line, passing through a point on a perpendicular line drawn vertically from a position equidistant from the first line in a direction that is horizontal and perpendicular to the first line at the initial position of the second moving body, and the center of gravity of each second cancelling moving body passes through the second lines. A pair of identical coreless linear motors, each comprising a stator mounted on the first moving body and a movable element that also serves as the second canceling moving body, for each of which moves the second canceling moving body, One or more weight plates having a predetermined mass to be loaded onto each of the pair of second cancellation moving bodies to adjust the mass of the second cancellation moving bodies, A total of three linear guides: a linear guide provided on the first moving body coaxially with the first straight line for positioning and guiding the second moving body, and two linear guides provided parallel to the linear guide on both sides of the linear guide along third straight lines parallel to the first straight line, respectively, for positioning and guiding the second moving body; A pair of linear guides are provided on the first moving body, on each of the pair of second canceling moving bodies, symmetrically arranged on the left and right sides of the central axis of the second canceling moving body along a fourth straight line parallel to the first straight line, for positioning and guiding the second canceling moving body, A first drive control device that outputs a first control signal to the linear motor that moves the first moving body and the linear motor that moves the second moving body so that the first moving body and the second moving body move to a target position with predetermined acceleration and velocity, thereby generating a predetermined thrust; and a second drive control device that outputs a second control signal in the opposite phase to the first control signal to the pair of linear motors that moves the pair of first cancellation moving bodies and the pair of linear motors that move the pair of second cancellation moving bodies so that the pair of first cancellation moving bodies and the pair of second cancellation moving bodies move to a predetermined acceleration and velocity, respectively, so that vibrations generated by the first moving body and the second moving body are suppressed, thereby generating a required thrust; A laser processing machine equipped with [a specific feature / equipment].

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