Burn-in testing equipment

Abstract

To provide a burn-in testing device the occupied area of which is relatively small.SOLUTION: The burn-in testing device includes two combinatorial sets 10, 11 in which test chambers 3a, 3b, power conduction device arrangement chambers 21a, 21b, and a cooling device that adjusts the temperature in the test chambers constitute one set. Each combinatorial set includes body regions 13a, 13b in which the power conduction device arrangement chambers 21a, 21b are arranged in the rear of the test chambers, and cooling device regions 15a, 15b in which at least the compressors of the cooling device are arranged, with the body region 13a belonging to one combinatorial set 10 and the body region 13b belonging to the other combinatorial set 11 being arranged with a space therebetween, the cooling device region 15a belonging to one combinatorial set and the cooling device region 15b belonging to the other combinatorial set being arranged in a longitudinally swapped state between the body regions 13a, 13b of both.SELECTED DRAWING: Figure 1

Description

Technical Field

[0003]

[0001] The present invention relates to a burn-in test apparatus that places an electronic device or the like in a predetermined environment and performs a test of energizing the electronic device or the like in this state.

Background Art

[0002] A test called a burn-in test may be performed on electronic devices such as ICs and LSIs. The burn-in test is a test performed by placing an electronic device in a predetermined environment such as a high temperature and inputting a power supply voltage or a predetermined signal to the electronic device.

[0003] In the burn-in test, since it is necessary to place the electronic device in a predetermined environment or the like, a test chamber capable of maintaining the predetermined environment is provided. And in the burn-in test, an electronic device as a specimen is placed in the test chamber, and the inside of the test chamber is maintained at a predetermined environment by a heater or a cooling device. That is, a specimen such as an electronic device is placed in the test chamber and exposed to a predetermined environment, and in this state, power supply power and a signal are input from the outside to the electronic device to test the function of the electronic device. A specific burn-in test apparatus is disclosed in, for example, Patent Document No. 1.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] A burn-in test apparatus is a combination of three elements: a test chamber in which an electronic device as a specimen is placed and the inside can be maintained at a predetermined environment, a power supply device that supplies power and signals to the specimen, and air conditioning equipment such as a heater and a cooling device. By the way, some users have a large production volume of electronic equipment and require multiple burn-in testing devices. Traditionally, such users would often purchase, for example, two burn-in testing devices of the same structure and install them side by side.

[0006] Because multiple burn-in testing devices were installed side-by-side, it was necessary to secure a large installation space. This invention provides a burn-in testing apparatus that occupies a relatively small area. [Means for solving the problem]

[0007] An embodiment for solving the above-mentioned problems is a burn-in test apparatus having a test chamber for arranging a test specimen and a cooling device for adjusting the temperature inside the test chamber, wherein there are two sets of combinations, each consisting of a test chamber, a power supply device room for installing a power supply device for supplying power to the test specimen inside the test chamber, and the cooling device for adjusting the temperature inside the test chamber, and each of the cooling devices in the combination sets has a compressor, a condenser, an expansion means, and an evaporator, and each of the combination sets has a main body area where the power supply device room is located at the back of the test chamber and a cooling device area where at least the compressor is located, and the main body area belonging to one combination set and the main body area belonging to the other combination set are spaced apart, and the cooling device area belonging to one combination set and the cooling device area belonging to the other combination set are arranged in a staggered manner in the front-to-back direction between the two main body areas. Another embodiment for solving the above-mentioned problems is a burn-in test apparatus having a test chamber for arranging a test specimen and a cooling device for adjusting the temperature inside the test chamber, wherein the apparatus has two sets of combinations, each of which consists of a test chamber, a power supply device room for installing a power supply device for supplying power to the test specimen inside the test chamber, and the cooling device, and each of the cooling devices in the combination set has a compressor, a condenser, an expansion means, and an evaporator, and each of the combination sets has a main body region where the test chamber located at the front and the power supply device room located at the rear of the test chamber are arranged, and a cooling device region located on the side of the main body region, and at least a compressor is arranged in the cooling device region, and the main body region belonging to one combination set and the main body region belonging to the other combination set are arranged with a gap between them, and the cooling device region belonging to one combination set and the cooling device region belonging to the other combination set are arranged in a staggered manner in the front-to-back direction between the two main body regions.

[0008] The burn-in test apparatus of this embodiment has two sets of combinations, each consisting of a test chamber, a power supply room for installing a power supply device that supplies power to the test specimen in the test chamber, and a cooling device for regulating the temperature in the test chamber. Therefore, the burn-in test apparatus of this embodiment has the configuration of essentially two burn-in test apparatuses. The burn-in test apparatus in this embodiment is characterized by the arrangement and layout of each piece of equipment. In this embodiment of the burn-in test apparatus, the main body area belonging to one combination set and the main body area belonging to the other combination set are arranged with a gap between them. Between them, the cooling device area belonging to one combination set and the cooling device area belonging to the other combination set are arranged in a staggered manner in the front-to-back direction. Therefore, the width required to install this embodiment of the burn-in test apparatus is only the width of the two main body areas plus the width of one cooling device area. Consequently, this embodiment of the burn-in test apparatus occupies less area compared to a conventional layout in which two burn-in test apparatuses are arranged in parallel.

[0009] In the above-described embodiment, it is desirable that each combination set is unitized and separable.

[0010] The burn-in test apparatus in this embodiment is easy to ship from the manufacturing plant to the user because the combination set is unitized and separable.

[0011] In the above-described embodiment, it is desirable that the test chambers belonging to each combination set be independently temperature-controllable.

[0012] The burn-in testing apparatus of this embodiment can create different environments in two test chambers. Therefore, the burn-in testing apparatus of this embodiment is easy to use and has a wide range of applications.

[0013] In the above-described embodiment, it is desirable that each cooling device area is divided into at least two upper and lower areas, with the compressor provided in the lower area and the control device provided in the upper area.

[0014] The burn-in test apparatus in this embodiment utilizes space three-dimensionally and occupies a small area.

[0015] In the above-described embodiment, it is desirable that the cooling device area has an opening that can be opened on at least one side, with one of the combination sets having the opening on the front side and the other combination set having the opening on the back side.

[0016] The burn-in test apparatus of this aspect has openings on the front and back surfaces of the apparatus, facilitating maintenance of the cooling device and the like. As described above, in the burn-in test apparatus of this aspect, between the two main body regions, the cooling device regions belonging to one combination set and the cooling device regions belonging to the other combination set are arranged in an alternating manner in the front-rear direction. According to this layout, the devices constituting the cooling device will be arranged front and back when viewed from the front. Therefore, if there is only an opening on the front side, it will be difficult to reach the devices on the back side and maintenance will be difficult. The burn-in test apparatus of this aspect solves this problem. One combination set has an opening on the front side, and the other combination set has an opening on the back side. Therefore, the cooling device belonging to one combination set can be maintained from the front side, and the cooling device belonging to the other combination set can be maintained from the back side.

[0017] In the above aspect, the cooling device has a water-cooled condenser. One combination set has a cooling water introduction part, and in the one combination set, the piping is branched so that cooling water is supplied to the condenser of this combination set and the condenser of the other combination set, which is desirable.

[0018] In the burn-in test apparatus of this aspect, one combination set has a cooling water introduction part, and the piping is branched inside so that cooling water is supplied to the two condensers. Therefore, it is easy to connect the external piping of the cooling water. Another embodiment for solving the above-mentioned problems is a combination set comprising a test chamber for placing a test specimen, a cooling device for adjusting the temperature inside the test chamber, and a power supply room for installing a power supply device that supplies power to the test specimen inside the test chamber, which can be combined with other combination sets to constitute the burn-in test apparatus described in any of the above-mentioned sets.

Effect of the Invention

[0019] The burn-in test apparatus of the present invention has a small occupied area.

Brief Description of the Drawings

[0020] [Figure 1] It is a perspective view of the burn-in test apparatus of the embodiment of the present invention as viewed from the front side. [Figure 2] It is a perspective view of the burn-in test device shown in FIG. 1 as seen from the back side. [Figure 3] It is a perspective view showing the state in which the burn-in test device shown in FIG. 1 is divided into units. [Figure 4] It is a cross-sectional view taken along line A-A in FIG. 1, schematically showing the outline of the main body region. [Figure 5] It is a cross-sectional view taken along line B-B in FIG. 1, schematically showing the outline of the cooling device region. [Figure 6] (a) is a cross-sectional view taken along line C-C in FIG. 1, schematically showing the planar layout of each member of the burn-in test device, and (b) shows the state of being divided into units. [Figure 7] It is a perspective view schematically showing the cooling device region in FIG. 1. [Figure 8] It is a front view (or rear view) conceptually showing the state in which the opening at the bottom on the front side (or back side) of the cooling device region in FIG. 1 is opened.

Embodiments for Carrying Out the Invention

[0021] Hereinafter, embodiments of the present invention will be described. In the following description, the front side and the back side follow the indications of "front side" and "back side" in FIGS. 1 and 2. Also, the front side may be referred to as the front and the back side may be referred to as the rear. The left-right relationship is observed from the front side in all cases. The burn-in test device 1 of this embodiment has, as shown in FIGS. 1, 2, and 6(a), seemingly one housing 2, and inside the housing 2, a first test chamber 3a and a second test chamber 3b, a first power supply device arrangement chamber 21a and a second power supply device arrangement chamber 21b, and a first air conditioner 6a and a second air conditioner 6b are provided. As will be described later, a large number of first power supply devices 5a for supplying power and the like to the test specimen 100 in the first test chamber 3a are arranged in the first power supply device arrangement chamber 21a. Similarly, a large number of second power supply devices 5b for supplying power and the like to the test specimen 100 in the second test chamber 3b are arranged in the second power supply device arrangement chamber 21b.

[0022] As shown in Figure 1, there is a first environmental setting device 7a for setting the temperature of the first test chamber 3a, and a second environmental setting device 7b for setting the temperature of the second test chamber 3b. Furthermore, as shown in Figure 5, there is a first energization control device 8a for controlling the energization of the test specimen 100 during the burn-in test in the first test chamber 3a, and a second energization control device 8b for controlling the energization of the test specimen 100 during the burn-in test in the second test chamber 3b.

[0023] The general layout of the burn-in test apparatus 1 is shown in Figures 1, 2, 4, and 6. As shown in Figures 1 and 2, the burn-in test apparatus 1 is divided into a right area 200, an intermediate area 201, and a left area 202 when viewed from the front. At the far right of the right area 200 is the first environmental setting device 7a, and in the center of the right area 200 is the first test room 3a. As shown in Figures 4 and 6, at the back of the first test room 3a is the first power supply device placement room 21a. The first power supply device 5a is located in the first power supply device placement room 21a.

[0024] At the far left of left area 202 is the second environmental setting device 7b, and in the center of the left area is the second test room 3b. As shown in Figure 6, at the back of the second test room 3b is the second power supply device installation room 21b. The second power supply device 5b is installed in the second power supply device installation room 21b.

[0025] The intermediate area 201 is divided into front and back sections as shown in Figure 5. The front side contains most of the first air conditioning unit 6a and the first power control device 8a, while the rear side contains most of the second air conditioning unit 6b and the second power control device 8b.

[0026] In this embodiment, the burn-in test apparatus 1 is configured as follows, as shown in Figures 3 and 6(b): it is divided into a first combination set 10 and a second combination set 11, with the two sets of combination sets 10 and 11 appearing as a single integrated unit. Furthermore, the first combination set 10 and the second combination set 11 are each unitized and can be separated from each other.

[0027] The first combination set 10 is a combination of at least the first test room 3a, the first power supply device room 21a, and the first air conditioning device 6a. The first combination set 10 is further combined with the first environment setting device 7a and the first control device room 33a (see Figure 5). The first power supply device room 21a is the area where the first power supply device 5a is located, and the first control device room 33a is the area where the first power supply control device 8a is located. The second combination set 11 is a combination of at least the second test room 3b, the second power supply device room 21b, and the second air conditioning device 6b. The second combination set 11 is further combined with the second environment setting device 7b and the first control device room 33b. The second power supply device room 21b is the area where the second power supply device 5ab is located, and the second control device room 33b is the area where the second power supply control device 8b is located.

[0028] In this embodiment, the first combination set 10 is externally divided into a first main body area 13a and a first cooling device area 15a. The first main body area 13a is the area where the first test chamber 3a, the first power supply device room 21a, and the first environmental setting device 7a are located. The first cooling device area 15a is the area where at least a part of the first air conditioning device 6a and the first control device room 33b are located.

[0029] As shown in Figure 4, the first test room 3a is an insulated storage space where test specimens 100 such as electronic devices are placed. The first test room 3a has an opening and closing door 18a on the front side. Also as shown in Figure 4, the back wall 12 of the first test room 3a is provided with numerous slots 20 for connecting the terminals of the test specimens 100. The first test room 3a is provided with shelves (not shown) for holding the test specimens 100. A blower 27 is installed on the ceiling 37 of the first test chamber 3a. The first test room 3a is constructed with insulated walls, including the opening and closing door 18a.

[0030] The first main body area 13a, located at the back of the first test chamber 3a, is the first power supply device arrangement room 21a. The first power supply device arrangement room 21a is equipped with numerous first power supply devices 5a that supply power and other signals to the test specimen 100 in the first test chamber 3a. The first power supply devices 5a are motherboards that can input current and signals to the test specimen 100, and some of them have the aforementioned slots 20.

[0031] The upper area of ​​the first main body area 13a is the first control equipment room 23a. Electronic equipment for adjusting the environment of the first test room 3a is located in the first control equipment room 23a. The electronic equipment in the first control equipment room 23a is well known, so its description is omitted. A first environment setting device 7a is provided at the right end of the first main body area 13a. The first environment setting device 7a sets the environment (temperature, humidity, etc.) to be created in the first test chamber 3a.

[0032] The first cooling device area 15a is an area that houses at least a portion of the first air conditioning device 6a that regulates the temperature inside the first test chamber 3a. The first air conditioning unit 6a includes a heater (not shown) and a first cooling unit 30a. The first cooling unit 30a includes a first compressor 25a, a first condenser 16a, an expansion means (not shown), and an evaporator (not shown), which are connected in a ring shape by piping and contain a refrigerant that undergoes a phase change. In this embodiment, the first compressor 25a is a sealed compressor, and the first condenser 16a is a water-cooled condenser. The first cooling device 30a is equipped with instruments such as a pressure gauge 40.

[0033] The first cooling device area 15a is divided into two sections vertically. The lower section is the first compressor installation chamber 17a, where the first compressor 25a and the first condenser 16a are located. The front side of the first compressor chamber 17a has a first opening 31a, and a first cover (front cover) 50a is provided. The first cover 50a can be removed by a predetermined operation. Therefore, the first opening 31a can be opened by removing the first cover 50a. The first cover 50a is fitted with several small blowers 32, which ventilate the first compressor chamber 17a by driving the blowers 32, preventing the temperature inside the first compressor chamber 17a from rising excessively and affecting the electronic equipment in the upper section. In this embodiment, as shown in Figures 5 and 6, the first compressor 25a is located at the back of the first cooling device area 15a, and the first condenser 16a is located at the front. Instruments such as the pressure gauge 40 are installed facing the first open section 31a.

[0034] As shown in Figure 5, the upper part of the first cooling device area 15a is the first control device room 33a, which houses the first energization control device 8a that controls the burn-in test. The first energization control device 8a controls the current and signals supplied to the test specimen 100. The first control device room 33a has an opening 35a into which the monitor screen 36 of the first power supply control device 8a is fitted. In front of the first cooling device area 15a, there is a shelf 38a for placing keyboards and the like.

[0035] An air conditioning channel (not shown) is connected to the first test chamber 3a, and the evaporator (not shown) and heater (not shown) of the first air conditioning unit 6a are built into the air conditioning channel. In this embodiment, air circulates between the air conditioning channel and the first test chamber 3a, maintaining the first test chamber 3a at a desired temperature.

[0036] In the first combination set 10, the planar layout of the first main body area 13a and the first cooling device area 15a is as shown in Figure 6(b), with the first cooling device area 15a located to the left of the first main body area 13a, closer to the front. To explain in terms of the relationship between the first test chamber 3a and the first power supply device arrangement room 21a, the first cooling device area 15a is located next to the first test chamber 3a. Since the length of the first cooling device area 15a in the depth direction is approximately half that of the first main body area 13a, the first cooling device area 15a is located to the left of the first main body area 13a, in the area that occupies half of the depth direction on the side closer to the front. As described above, the first cooling device area 15a is located near the front, and both the upper opening 35a and the lower first opening 31a of the first cooling device area 15a are located on the front side of the first combination set 10.

[0037] An overview of the first combination set 10 reveals that a small rectangular prism-shaped first cooling device region 15a is attached to a large rectangular prism-shaped first main body region 13a, with the small rectangular prism-shaped first cooling device region 15a positioned towards the front. The first combination set 10 has outer walls on the front, back, top, and right sides, but no outer wall on the left side.

[0038] Next, the second combination set 11 will be described. Visually, the second combination set 11 is divided into a second main area 13b, which contains the second test room 3b, the second power supply device room 21b, and the second environmental setting device 7b, and a second cooling device area 15b, which contains at least a part of the second air conditioning device 6b and the second power supply control device 8b. Since the individual shapes and functions of the components of the second combination set 11 are the same as those of the first combination set 10, the same numbers are assigned to the same components, and the letters attached to the numbers are changed to "b" to omit detailed explanations and only the differences between the two will be explained.

[0039] The individual components of the second combination set 11 are the same as those of the first combination set 10 described above, with only the arrangement of each component being different. The planar layout of the second main body area 13b and the second cooling device area 15b in the second combination set 11 is as shown in Figure 6(b), with the second cooling device area 15b located to the right of the second main body area 13b, closer to the back side. In terms of the relationship between the second test chamber 3b and the second power supply device arrangement chamber 21b, the second cooling device area 15b is located next to the second power supply device arrangement chamber 21b. Since the depth of the second cooling device area 15b is approximately half that of the second main body area 13b, the second cooling device area 15b is located to the right of the second main body area 13b, in the area that occupies half of the depth on the side closer to the back side. The upper opening 35b and the lower second opening 31b of the second cooling device area 15b are both located on the back side of the second combination set 11.

[0040] An overview of the second combination set 11 reveals that a smaller rectangular prism second cooling device region 15b is attached to a larger rectangular prism second main body region 13b, with the smaller rectangular prism second cooling device region 15b located towards the back side. The second combination set 11 has exterior walls on the front, back, top, and left sides. The second combination set 11 has an exterior wall 53 on at least a portion of the right side.

[0041] The burn-in test apparatus 1 of this embodiment is a combination of the first combination set 10 and the second combination set 11. As described above, the first combination set 10 has a form in which a small rectangular first cooling device area 15a is attached to a large rectangular first main body area 13a, and the small rectangular first cooling device area 15a is located towards the front side. The other second combination set 11 has a form in which a second cooling device area 15b is attached to a second main body area 13b, and the second cooling device area 15b is located towards the back side. In this embodiment, the burn-in test apparatus 1 is formed by integrating the left side of the first combination set 10 and the right side of the second combination set 11, and in the intermediate area 201, the first cooling device area 15a and the second cooling device area 15b are arranged in a staggered manner in the front-to-back direction. The first combination set 10 and the second combination set 11 are connected by a plurality of fasteners 49. In this embodiment, the base portion 51a of the first combination set 10 and the base portion 51b of the second combination set 11 are connected by fasteners 49. Also, the top surface 52a of the first combination set 10 and the top surface 52b of the second combination set 11 are connected by fasteners 49.

[0042] The first compressor 25a and the second compressor 25b are both positioned midway in the front-to-back direction between the first cooling device area 15a and the second cooling device area 15b, respectively, and the two compressors 25 are positioned back-to-back as shown in Figures 5 and 6. In other words, the two compressors 25 are positioned symmetrically with respect to the mating surface between the first cooling device area 15a and the second cooling device area 15b. Similarly, instruments such as the pressure gauge 40 are arranged symmetrically with respect to the mating surface between the first cooling device area 15a and the second cooling device area 15b. That is, instruments such as the pressure gauge 40 are installed facing either the first opening 31a or the second opening 31b, and as shown in Figure 8, instruments such as the pressure gauge 40 can be easily viewed by opening either the first opening 31a or the second opening 31b.

[0043] When the first combination set 10 and the second combination set 11 are combined, the entire perimeter is covered with an exterior wall.

[0044] The assembled burn-in test apparatus 1 has two sets of combination sets 10 and 11, each consisting of a test chamber 3, a power supply device room 21 for installing a power supply device 5 that supplies power to the test specimen 100 in the test chamber 3, and a cooling device 30 for adjusting the temperature inside the test chamber 3. The cooling device 30 in each combination set 10 and 11 has a compressor 25, a condenser 16, an expansion means, and an evaporator. Each combination set 10 and 11 has a main area 13 with a power supply device room 21 located at the back of the test chamber 3, and a compressor room 17 with at least a compressor 25 located therein. A first main body region 13a belonging to one combination set 10 and a second main body region 13b belonging to the other combination set 11 are arranged with a gap between them, and a cooling device region 15 belonging to one combination set 10, 11 and a cooling device region 15 belonging to the other combination set 10, 11 are arranged in a staggered manner in the front-to-back direction between the two main body regions 13a, 13b.

[0045] In the burn-in test apparatus 1 of this embodiment, the first combination set 10 and the second combination set 11 are both independent and each is a unitized burn-in test apparatus, allowing the environment of each test chamber 3 to be set individually. Specifically, the temperature and other parameters in the first test room 3a can be set using the first environmental setting device 7a. Similarly, the temperature and other parameters in the second test room 3b can be set using the second environmental setting device 7b. In the burn-in test apparatus 1 of this embodiment, there is a first opening 31a of the first cooling device area 15a on the front side, and the first opening 31a of the first cooling device area 15a can be opened by removing the first cover (front side cover) 50a. As a result, the main part of the first air conditioning unit 6a can be touched, and instruments such as the pressure gauge 40 can be visually inspected from the front side. On the other hand, in the burn-in test apparatus 1 of this embodiment, there is a second opening 31b of the second cooling device area 15b on the back side, and the second opening 31b of the second cooling device area 15b can be opened by removing the second cover (front side cover) 50b. As a result, the main part of the second air conditioning device 6b can be touched, and instruments such as the pressure gauge 40 can be visually inspected from the back side. Thus, the burn-in test apparatus 1 of this embodiment is easy to maintain.

[0046] The burn-in test apparatus 1 of this embodiment is assembled as a whole at the factory and subjected to operational testing. Then it is separated into a first combination set 10 and a second combination set 11 and transported to the destination. In this embodiment, the burn-in test apparatus 1 consists of two independent units: the first combination set 10 and the second combination set 11. Therefore, it is easy to separate the first combination set 10, which is the first unit, and the second combination set 11, which is the second unit. Since each separated unit is smaller than the original unit, it is easy to transport. In particular, in this embodiment, since the refrigerant piping is included in the unit, it is easy to separate the first combination set 10 and the second combination set 11 when shipping from the factory.

[0047] Furthermore, installation work is easy at the destination. In this embodiment, each unit has an independent cooling device 30a, 30b, and the respective refrigerant piping is incorporated within each unit. Specifically, the compressor 25, condenser 16, expansion means (not shown), and evaporator (not shown) are already piped within each unit. Therefore, there is no need to connect the refrigerant piping at the destination, making installation work easy. Furthermore, the burn-in test apparatus 1 can be assembled at the destination by combining the first unit, the first combination set 10, and the second unit, the second combination set 11. Therefore, the burn-in test apparatus 1 of this embodiment is easy to transport and install.

[0048] In the burn-in test apparatus 1 of this embodiment, both the first condenser 16a and the second condenser 16b of the cooling device are water-cooled condensers. Therefore, it is necessary to connect the cooling device, such as a cooling tower, to the first condenser 16a and the second condenser 16b with piping. In this embodiment, the burn-in test apparatus 1, as shown in Figure 7, has a cooling water inlet 41 and a cooling water outlet 42 in one combination set, and the piping is branched within one combination set to supply cooling water to the condenser 16b of that combination set and the condenser 16a of the other combination set.

[0049] In this embodiment, the cooling water inlet 41 and cooling water outlet 42 are located on the back side of the second combination set 11. Specifically, the cooling water inlet 41 and cooling water outlet 42 are located on the back side of the burn-in test apparatus 1, in the second cooling device area 15b. The water supply pipe 45 connected to the cooling water inlet 41 is connected to the water inlet of the first condenser 16a. A water supply branch pipe 46 branches off from the water supply pipe 45, and the water supply branch pipe 46 is connected to the water inlet of the second condenser 16b. Furthermore, a drain pipe 47 is connected to the drain port of the first condenser 16a, and the drain pipe 47 is connected to the cooling water discharge section 42. A drain branch pipe 48 is connected to the drain port of the second condenser 16b, and the drain branch pipe 48 is connected to the drain pipe 47 between the drain port of the first condenser 16a and the cooling water discharge section 42. Therefore, cooling water is supplied to the first condenser 16a by the water supply pipe 45 and drained by the drain pipe 47. Cooling water is supplied to the second condenser 16b by a water supply branch pipe 46 that branches off from the water supply pipe 45 and drained via the drain pipe 47 which merges with the drain branch pipe 48. In this respect as well, the burn-in test apparatus 1 of this embodiment is easy to transport and install.

[0050] When performing a burn-in test using the burn-in test apparatus 1 of this embodiment, the test specimen 100 is placed in the first test chamber 3a or the second test chamber 3b, and the terminals of the test specimen 100 are engaged with the slot 20 to electrically connect the test specimen 100 to the first power supply device 5a or the second power supply device 5b. Then, the first air conditioning device 6a or the second air conditioning device 6b is started to maintain the desired environment inside the first test chamber 3a or the second test chamber 3b, and current and signals are input to the test specimen 100 from the first power supply device 5a or the second power supply device 5b to observe the changes in the test specimen 100.

[0051] The burn-in test apparatus 1 described above consists of a first combination set 10 and a second combination set 11, which are unitized and can be easily separated. However, this configuration is not essential, and the first combination set 10 and the second combination set 11 may not be separable. The burn-in test apparatus 1 described above can individually set the environment of the first test chamber 3a and the environment of the second test chamber 3b, but it may also be possible to set them to the same environment.

[0052] Focusing on the joint surfaces of the first combination set 10 and the second combination set 11 of the burn-in test apparatus 1 described above, the second combination set 11 has an outer wall 53, while the first combination set 10 does not. In the burn-in test apparatus 1, the outer wall 53 on the right side of the second combination set 11 serves as a partition wall between the first combination set 10 and the second combination set 11. The presence or absence of a partition wall at the joint surface is optional, and a partition wall is not required. In the burn-in test apparatus 1, the outer wall 53 on the right side of the second combination set 11 serves as a partition wall, but an outer wall may be provided on the first combination set 10 and used as a partition wall. Both the first combination set 10 and the second combination set 11 may have outer walls.

[0053] In the embodiments described above, the first combination set 10 and the second combination set 11 are identical except for the layout, etc. That is, both have power supply control devices 8a and 8b, and can individually control the current and signals supplied to the test specimens 100 in each test chamber 3a and 3b. With the burn-in test apparatus 1, different currents and different signals can be input to the test specimens 100 in the first test chamber 3a and the test specimens 100 in the second test chamber 3b, so it can handle a variety of burn-in tests. However, in reality, the same current or signal is often applied to the test specimen 100 in the first test room 3a and the test specimen 100 in the second test room 3b.

[0054] Therefore, as one variation, a structure in which the power supply control device 8 is present in only one combination set and not in the other is also recommended. For example, only the first combination set 10 has a power supply control device 8a, and this power supply control device 8a controls the current supplied to the test specimens 100 in the first test room 3a and the test specimens 100 in the second test room 3b. When this structure is adopted, the upper section of the second cooling device area 15b of the second combination set 11 omits many components compared to the upper section of the first cooling device area 15a of the first combination set 10. Specifically, in the first combination set 10, the upper section is the first control device placement room 33a, which houses the first power supply control device 8a that controls the burn-in test, but there is no power supply control device in the upper section of the second cooling device area 15b. Furthermore, there is no control device placement room 33 itself, and there is no opening corresponding to the opening 35a of the first combination set 10, nor are there any components corresponding to the monitor screen 36 and shelf 38a on the back side.

[0055] As described above, burn-in testing is a test performed by placing electronic equipment in a predetermined environment such as high temperature and inputting a power supply voltage or predetermined signal to the electronic equipment. In the burn-in testing apparatus 1 described above, the environment setting devices 7a and 7b set the temperature in the test chambers 3a and 3b, and the current supply control devices 8a and 8b control the current and signals supplied to the test specimen 100. Thus, in the burn-in testing apparatus 1, the environment setting and the input setting of the supply current etc. are performed by separate devices, but it may also be configured so that they are performed by a single device. For example, the current supply control devices 8a and 8b may be given the function of setting the environment and / or the control function, and the current supply control devices 8a and 8b may be used to control the temperature in the test chambers 3a and 3b.

[0056] The burn-in test apparatus 1 described above comprises a first test chamber 3a and a second test chamber 3b, a first power supply device 5a and a second power supply device 5b, and a first air conditioning device 6a and a second air conditioning device 6b. The burn-in test apparatus 1 also comprises a first environment setting device 7a and a second environment setting device 7b, and a first power supply control device 8a and a second power supply control device 8b. Here, the first power supply device 5a and the second power supply device 5b, and the first power supply control device 8a and the second power supply control device 8b may be installed by the user at the destination. Therefore, the burn-in test device 1 at the stage of shipment from the factory may be without the first power supply device 5a and the second power supply device 5b, the first power supply control device 8a and the second power supply control device 8b, etc. Accordingly, in the above case, the burn-in test apparatus 1 shipped from the factory is a burn-in test apparatus 1 having test chambers 3a and 3b for arranging the test specimen 100, and a cooling device for adjusting the temperature inside the test chambers 3a and 3b, and having two sets of combination sets 10 and 11, each of which consists of test chambers 3a and 3b, power supply device arrangement chambers 21a and 21b for installing power supply devices for supplying power to the test specimen 100 inside the test chambers 3a and 3b, and a cooling device for adjusting the temperature inside the test chambers 3a and 3b, and each combination set 10 and 11's cooling device consists of compressors 25a and 25b, condensers 16a and 16b, and expansion means Each combination set 10 and 11 has an evaporator, and each combination set 10 and 11 has a main body area 13a and 13b where the power supply device area 21a and 21b are located at the back of the test chambers 3a and 3b, and a cooling device area 15a and 15b where at least the compressors 25a and 25b are located. The main body area 13a belonging to one combination set 10 and the main body area 13b belonging to the other combination set 11 are spaced apart, and the cooling device area 15a belonging to one combination set 10 and the cooling device area 15b belonging to the other combination set 11 are arranged in a staggered manner in the front-to-back direction between the two main body areas 13a and 13b. [Explanation of Symbols]

[0057] 1. Burn-in test apparatus 2 cabinets 3a Examination Room 1 3b Second Examination Room 5a 1st energizing device 5b Second energizing device 6a 1st air conditioner 6b 2nd air conditioner 8a First power supply control device 8b Second power supply control device 10. First combination set 11. Second combination set 13a 1st body area 13b 2nd body area 15a 1st cooling device area 15b 2nd cooling system area 16a Condenser 16b Condenser 25a First Compressor 25b Second Compressor 30 Cooling device 31a 1st opening 31b 2nd opening 41 Cooling water inlet 100 specimen

Claims

1. A burn-in test apparatus having a test chamber for placing test specimens and a cooling device for adjusting the temperature inside the test chamber, The facility comprises the aforementioned test room, a power supply room for installing power supply devices that supply power to the test specimens in the test room, and two sets of the aforementioned cooling devices, Each of the above combination sets of cooling devices includes a compressor, a condenser, an expansion means, and an evaporator. Each of the aforementioned combination sets comprises a main body region in which the test chamber located at the front and the power supply device arrangement chamber located at the rear of the test chamber are arranged, and a cooling device region located on the side of the main body region, wherein at least a compressor is arranged in the cooling device region. A burn-in test apparatus characterized in that a main body region belonging to one combination set and a main body region belonging to the other combination set are arranged with a gap between them, and a cooling device region belonging to one combination set and a cooling device region belonging to the other combination set are arranged in a staggered manner in the front-to-back direction between the two main body regions.

2. The burn-in test apparatus according to claim 1, characterized in that each of the aforementioned combination sets is unitized and separable from each of the aforementioned combination sets.

3. The burn-in test apparatus according to claim 1, characterized in that the test chambers belonging to each of the aforementioned combination sets are independently temperature-controllable.

4. The burn-in test apparatus according to claim 1, characterized in that each cooling device area is divided into at least two upper and lower areas, the compressor is provided in the lower area, and the control device is provided in the upper area.

5. The burn-in test apparatus according to claim 1, characterized in that the cooling device area has an opening that can be opened on at least one side, one of the combination sets has the opening on the front side, and the other combination set has the opening on the back side.

6. The burn-in test apparatus according to claim 1, characterized in that the cooling device has a water-cooled condenser, one combination set has a cooling water inlet, and the piping is branched in the one combination set so that cooling water is supplied to the condenser of the said combination set and the condenser of the other combination set.

7. A combination set comprising a test chamber for arranging a test specimen, a cooling device for adjusting the temperature inside the test chamber, and a power supply device installation chamber for installing a power supply device for supplying power to the test specimen inside the test chamber, which, when combined with other combination sets, constitutes the burn-in test apparatus described in any one of Claims 1 to 6.

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