Sealed structures and vacuum furnaces

Abstract

Examples of the present specification provide a sealing structure and a vacuum furnace, the sealing structure including: a baffle plate having a first through hole penetrating a first side and a second side of the baffle plate; a first structural member connected to the baffle plate having an inner hole through which a member to be sealed passes, at least a portion of the inner hole being located in the first through hole and at least a portion of the inner hole not parallel to both the first side and the second side; and a sealing assembly that seals a gap between the baffle plate and the first structural member, and seals a gap between the member to be sealed and the first structural member.

Description

Technical Field

[0001] [Cross-reference] This application claims the priority of a Chinese patent application with application number 202220578211.3 filed on March 15, 2022, and all of its contents are incorporated herein by reference.

[0002] This specification relates to the field of sealing processes, specifically to a sealing structure and a vacuum furnace applying the sealing structure.

Background Art

[0003] In industrial production, there are many scenarios where it is necessary to seal components with a sealing structure. For example, the coil of a vacuum furnace is located inside the furnace floor, and the coil head penetrates the furnace floor wall and the furnace body in sequence and then is connected to the power supply. The coil needs to be insulated from the furnace body to avoid short circuits, and in order to maintain the vacuum effect inside the vacuum furnace, it is necessary to take sealing measures at the location where the coil penetrates the furnace body.

Summary of the Invention

Problems to be Solved by the Invention

[0004] Therefore, how to improve the sealing effect of the sealing structure is a technical problem to be solved in this field.

Means for Solving the Problems

[0005] A sealing structure according to a first aspect of this specification includes: a baffle plate having a first through-hole formed therein through a first side surface and a second side surface of the baffle plate; a first structural member having an internal hole formed therein for a member to be sealed to pass through, the first structural member being connected to the baffle plate, at least a portion of the internal hole being located within the first through-hole, and at least a portion of the internal hole being not parallel to both the first side surface and the second side surface; and a sealing assembly for sealing the gap between the baffle plate and the first structural member, and sealing the gap between the member to be sealed and the first structural member.

[0006] In some embodiments, the first structural member penetrates the baffle plate through the first through-hole, and the sealing assembly includes a first sealing member for sealing the gap between the member to be sealed and the first structural member, the first sealing member being provided between the inner wall of the inner hole and the member to be sealed.

[0007] In some embodiments, the sealing assembly includes a second sealing member located at one end of the first through-hole, the second sealing member abutting against a first or second side of the baffle plate to seal the gap between the baffle plate and the first structural member.

[0008] In some embodiments, the sealing assembly further includes a third sealing member for sealing the gap between the baffle plate and the first structural member, the second and third sealing members being located at opposite ends of the first through-hole and abutting against the first and second sides of the baffle plate, respectively.

[0009] In some embodiments, the sealing assembly includes a fourth sealing member for sealing the gap between the baffle plate and the first structural member, wherein at least a portion of the fourth sealing member is provided between the inner wall of the first through-hole and the outer wall of the first structural member.

[0010] In some embodiments, the sealing structure further includes a first position limiting structure that limits the position of the first structural member in the first through-hole.

[0011] In some embodiments, the first position limiting structure includes a first nut and a first male thread, the first male thread being provided on the first structural member, and the first nut being screwed onto the first male thread of the first structural member on the side where the second side surface of the baffle plate is located.

[0012] In some embodiments, the sealing structure further includes a second structural member fitted onto the first structural member and positioned between the first nut and the third sealing member, the second structural member including a first main ring portion and a first retaining ring portion, the first main ring portion fitted onto the first structural member, the first retaining ring portion positioned at one end of the first main ring portion in the axial direction, the third sealing member and the first retaining ring portion both positioned between the baffle plate and the first main ring portion, and the third sealing member positioned at the inner ring of the first retaining ring portion.

[0013] In some embodiments, the first structural member includes a first main ring portion and a first retaining ring portion, the internal bore is formed in the first main ring portion, the first main ring portion penetrates the baffle plate through the first through hole, the first retaining ring portion is located on the side of the baffle plate where the first side surface is located, and the first retaining ring portion surrounds the outside of the first main ring portion, and the outer diameter of the first retaining ring portion is larger than the diameter of the first through hole.

[0014] In some embodiments, the first structural member further includes a second retaining ring portion, the second retaining ring portion being located on the side of the baffle plate where the first side surface is located, the second retaining ring portion being provided on the side of the first retaining ring portion facing the baffle plate, and the outer diameter of the second retaining ring portion being larger than the outer diameter of the first main ring portion.

[0015] In some embodiments, the ratio of the outer diameter of the first main ring portion to the inner diameter of the first main ring portion is 1.1 to 2.

[0016] In some embodiments, the ratio of the diameter of the first through hole to the inner diameter of the first main ring portion is 1.2 to 2.5.

[0017] In some embodiments, the sealing structure further includes a second position-restricting structure configured to restrict the position of the first sealing member within the inner hole.

[0018] In some embodiments, the second position limiting structure includes a second nut and a first female thread, the first female thread being located within the bore, and the second nut being connected to the first female thread in the bore on the side where the second side surface of the baffle plate is located.

[0019] In some embodiments, the second position-limiting structure includes a position-limiting boss provided in the inner bore, and the first sealing member is provided between the position-limiting boss and the second nut.

[0020] In some embodiments, a first gasket is provided between the first sealing member and the second nut.

[0021] In some embodiments, the sealing assembly includes at least two of the first sealing members, with a second gasket provided between at least two adjacent first sealing members.

[0022] In some embodiments, the first structural member is inserted into the first through-hole from the side where the second side surface of the baffle plate is located, and a position-limiting stopper is provided at one end of the first through-hole adjacent to the first side surface, the member to be sealed penetrates the first through-hole and the inner hole, and the sealing assembly includes a fifth sealing member, the fifth sealing member is provided in the first through-hole, fitted onto the member to be sealed, and positioned between the position-limiting stopper and the first structural member.

[0023] In some embodiments, a second male thread is provided on the outer wall of the first structural member, and a second female thread adapted to the second male thread is provided on the inner wall of the first through hole.

[0024] In some embodiments, the first structural member is formed of a conductive material, and an insulating layer is provided between the outer surface of the first structural member and the inner wall surface of the first through hole.

[0025] In some embodiments, the first structural member is formed of an insulating material, and / or the sealing assembly is formed of an insulating material.

[0026] The vacuum furnace according to the second aspect of the present specification includes a sealing structure and a furnace body. An opening is provided in the side wall of the furnace body, and the sealing structure is provided at the opening via the baffle plate.

[0027] In some embodiments, the baffle plate has a first side located inside the furnace body and a second side located outside the furnace body.

Brief Description of the Drawings

[0028] This specification is further described by exemplary embodiments, and these exemplary embodiments are described in detail by the accompanying drawings. These embodiments are not limiting, and in these embodiments, the same numbers represent the same structures.

[0029] [Figure 1] It is a schematic configuration diagram of a sealing structure according to some embodiments of this specification. [Figure 2] It is a schematic configuration diagram of a sealing structure according to some embodiments of this specification. [Figure 3] It is a schematic mounting diagram of a sealing assembly according to some embodiments of this specification. [Figure 4] It is another schematic mounting diagram of a sealing assembly according to some embodiments of this specification. [Figure 5] It is a further schematic mounting diagram of a sealing assembly according to some embodiments of this specification. [Figure 6] This is a further schematic diagram of another mounting of a sealing assembly according to some embodiments of this specification. [Figure 7] This is a schematic diagram of a fourth sealing member according to some embodiments of this specification. [Figure 8] This is a schematic diagram of a fourth sealing member according to another embodiment of this specification. [Figure 9] This is a schematic diagram of a first structural member according to some embodiments of this specification. [Figure 10A] This is a schematic diagram of a sealing structure according to another embodiment of this specification. [Figure 10B] This is a schematic diagram of a second structural member according to another embodiment of this specification. [Figure 11] This is a schematic diagram of a sealing structure according to yet another embodiment of this specification. [Figure 12] This is a schematic diagram showing the installation of a second position limiting structure according to some embodiments of this specification. [Figure 13] This is a schematic diagram of a second nut according to some embodiments of this specification. [Figure 14] This is a schematic diagram of a sealing structure according to yet another embodiment of this specification. [Figure 15] This is a schematic diagram of a vacuum furnace according to some embodiments of this specification. [Modes for carrying out the invention]

[0030] To more clearly illustrate the technical means of the embodiments described herein, the drawings that may be used in describing the embodiments are briefly described below. Clearly, the drawings described below are only a few examples or embodiments of this specification, and those skilled in the art can apply this specification to other similar situations without any creative work. To the extent that it is clear in the language context or otherwise stated, the same numbers in the figures represent the same structure or operation.

[0031] It should be understood that the terms “system,” “apparatus,” “unit,” and / or “module” as used herein are methods for distinguishing different components, elements, parts, sections, or assemblies at different levels. However, terms may be replaced by other expressions if other terms can achieve the same purpose.

[0032] As shown in this specification and patent claims, only in exceptional circumstances clearly indicated in the context, words such as “one,” “one,” “one kind,” and / or “the” may mean plural, not specifically singular. Generally, the terms “includes” and “includes” mean only to include steps and elements that have already been clearly identified, but these steps and elements cannot constitute an exclusive list, and a method or device may also include other steps and elements.

[0033] A vacuum furnace is equipment that provides a vacuum environment and can heat in a vacuum environment. A vacuum furnace may have a sealed hearth, which may be sealed by a metal cover or a quartz glass cover. The hearth can be connected to a vacuum device via a pipeline to create a vacuum environment within the hearth. A heating device may be provided within the hearth, which may include a coil. By energizing the coil, heating can be achieved within the hearth. Vacuum furnaces may be used for crystal growth, vacuum quenching, vacuum brazing, vacuum annealing, vacuum magnetic addition, vacuum tempering, vacuum sintering, vacuum diffusion welding, vacuum carburizing, and the like.

[0034] In a vacuum furnace, some components need to penetrate from inside to outside the hearth. These components include, for example, cables for signal transmission or coils for heating. The following example describes the case where a coil penetrates from inside to outside the hearth. In a vacuum furnace, a coil that heats the hearth needs to be energized to achieve heating, and the coil needs to exit the furnace through the furnace wall and be connected to a power source located outside the furnace. A through-hole may be formed in the furnace wall, and the coil outer tube (e.g., copper tube) can pass through this through-hole to exit from inside to outside the hearth. The coil is inserted into the coil outer tube, and the coil outer tube can serve to protect the coil. The coil outer tube may be fixed to the furnace wall by connecting members (e.g., nuts). In the above structure, gaps exist in the through-hole (e.g., between the inner wall of the through-hole and the coil outer tube, and between the coil outer tube and the coil), which may affect the vacuum level of the vacuum furnace.

[0035] The internal bore of the first structural member of the sealing structure according to the embodiment of this specification is through which the member to be sealed can pass. By providing a sealing assembly, the gap between the baffle plate and the first structural member and the gap between the member to be sealed and the first structural member are both sealed, thereby improving the sealing performance at the through-hole of the baffle plate. The sealing structure may be applied to a vacuum furnace to guarantee the degree of vacuum of the vacuum furnace. The sealing structure may be applied to a high-temperature furnace body such as an electric furnace or converter to guarantee the heat retention performance of the equipment such as an electric furnace or converter.

[0036] Figures 1 and 2 are schematic diagrams of sealing structures according to several embodiments of this specification, and the sealing structure will be described in detail below with reference to Figure 2. As shown in Figures 1 and 2, the sealing structure 1000 may include a baffle plate 100, a first structural member 200, and a sealing assembly 400. A first through-hole 110 is formed in the baffle plate 100, and the first through-hole 110 penetrates the first side surface 101 and the second side surface 102 of the baffle plate 100. That is, the first through-hole 110 may connect the side of the baffle plate 100 where the first side surface 101 is located and the side where the second side surface 102 is located. The first structural member 200 has an inner hole 201 through which the member to be sealed 300 passes. The first structural member 200 is connected to the baffle plate 100. At least a portion of the inner hole 201 is located within the first through-hole 110. That is, at least a portion of the first structural member 200 is located within the first through-hole 110, and when the first structural member 200 is connected to the baffle plate 100, at least a portion of the inner hole 201 is not parallel to both the first side surface 101 and the second side surface 102. The sealing assembly 400 seals the gap between the baffle plate 100 and the first structural member 200, and the gap between the member to be sealed 300 and the first structural member 200.

[0037] The baffle plate 100 may provide a mounting base to the first structural member 200, and when the sealing structure 1000 is used in a furnace body such as a vacuum furnace, electric furnace, or converter, the baffle plate can separate the internal environment from the external environment of the furnace body. The first through-hole 110 on the baffle plate 100 may be for the passage of other parts of the sealing structure 1000. The first side surface 101 and the second side surface 102 of the baffle plate 100 represent the two sides of the baffle plate 100. In some embodiments, when the sealing assembly 400 is used in a vacuum furnace, the side of the baffle plate 100 facing the inside of the furnace body may be the first side surface 101, and the side of the baffle plate 100 facing the outside of the furnace body may be the second side surface 102. In some embodiments, the baffle plate 100 may have a flat plate structure to facilitate sealing. In other embodiments, the baffle plate 100 may have other plate structures, such as an arc plate structure or a corrugated plate structure. In some embodiments, the first side surface 101 and the second side surface 102 may be essentially parallel. In other embodiments, there may be an angle greater than 0° between the first side surface 101 and the second side surface 102. For example, there may be an angle of 5°, 10°, etc., between the first side surface 101 and the second side surface 102. In some embodiments, the axis of the through hole 110 may be perpendicular to the first side surface 101 or the second side surface 102.

[0038] At least a portion of the first structural member 200 may be located within the first through-hole 110 of the baffle plate 100 and supported by the baffle plate 100 (for example, supported by the side wall of the first through-hole 110). The first structural member 200 may penetrate the first through-hole 110 or may simply enter without penetrating the first through-hole 110. The inner hole 201 of the first structural member 200 may be for penetrating the member to be sealed 300. The fact that at least a portion of the inner hole 201 is not parallel to both the first side surface 101 and the second side surface 102 can be understood as having an angle greater than 0° with either the first side surface 101 or the second side surface 102. This ensures that the member to be sealed 300 penetrates through the inner hole 201 from the side where the first side surface 101 of the baffle plate 100 is located to the side where the second side surface 102 of the baffle plate 100 is located. In some embodiments, the axis of the bore 201 is a straight line. The bore 201 may extend along direction B in Figure 2 and may have a constant angle with respect to direction B in Figure 2, for example, 5°, 10°, etc. In other embodiments, the axis of the bore 201 may be a polyline or a curve. In some embodiments, the axis of the bore 201 (or at least a portion of the axis of the bore 201) may be (basically) parallel to the axis of the first through hole 110, or (basically) overlap with it. In this specification, "basic" means that the deviation between one feature (e.g., basic overlap) and that feature (e.g., perfect overlap) is less than one threshold. The threshold may be an absolute number (e.g., distance difference values ​​are 1 cm, 5 mm) or a relative value (e.g., the threshold is 10%, 5% of the bore diameter of the first through hole 110).

[0039] The sealed component 300 may include coils, cables, etc., in the furnace body of a vacuum furnace, electric furnace, converter, etc. The sealed component 300 may also include an outer tube, and the coils, cables, etc., may penetrate the outer tube, and the outer tube can serve to protect the coils, cables, etc.

[0040] The gap between the baffle plate 100 and the first structural member 200 is formed in the first through-hole 110, and to seal the gap between the baffle plate 100 and the first structural member 200, the sealing assembly 400 may be located inside the first through-hole 110, at any end of the first through-hole 110, or at both ends of the first through-hole 110. The gap between the member to be sealed 300 and the first structural member 200 is formed in the inner hole 201, and to seal the gap between the member to be sealed 300 and the first structural member 200, the sealing assembly 400 may be located inside the inner hole 201, at any end of the inner hole 201, or at both ends of the inner hole 201. For the specific structure of the sealing assembly 400 and the components it includes, please refer to the related descriptions below. In Figure 2, the shape, structure, and installation position of the first structural member 200 and the sealing assembly 400 are merely illustrative, and in different embodiments, the shape, structure, and installation position of the first structural member 200 and the sealing assembly 400 may vary.

[0041] In some embodiments, the first structural member 200 penetrates the baffle plate 100 through a first through-hole 110. In this case, the length of the portion of the first structural member 200 that penetrates the first through-hole 110 is longer than the length of the first through-hole 110. The sealing assembly 400 may include a first sealing member 401. The first sealing member 401 seals the gap between the member to be sealed 300 and the first structural member 200. The first sealing member 401 is provided between the inner wall of the inner hole 201 and the member to be sealed 300. In some embodiments, the first sealing member 401 may be a sealing ring fitted to the outside of the member to be sealed 300. In some embodiments, the sealing effect of the first sealing member 401 can be improved by being compressed after being installed between the inner wall of the inner hole 201 and the member to be sealed 300. In another embodiment, the first sealing member 401 may be a sealant (for example, a sealant that becomes solid after solidification), and the sealant (first sealing member 401) may seal the gap between the first sealing member 401 and the member to be sealed 300 in the inner hole 201.

[0042] In some embodiments, when the first sealing member 401 is a sealing ring, the outer contour of the cross-section of the first sealing member 401 may be circular, elliptical, triangular, rectangular, polygonal, or irregular in shape.

[0043] Figure 3 is a schematic mounting diagram of a sealing assembly according to some embodiments of this specification, and Figure 4 is another schematic mounting diagram of a sealing assembly according to some embodiments of this specification. In some embodiments, as shown in Figures 3 and 4, the sealing assembly 400 includes a second sealing member 402 that abuts against the baffle plate 100. The second sealing member 402 is located at one end of the first through hole 110, thereby sealing the gap between the baffle plate 100 and the first structural member 200.

[0044] In some embodiments, as shown in Figure 3, the second sealing member 402 may abut against the first side surface 101 of the baffle plate 100. In some embodiments, as shown in Figure 4, the second sealing member 402 may abut against the second side surface 102 of the baffle plate 100. In some embodiments, the second sealing member 402 may include a sealing ring fitted onto the first structural member 200. In another embodiment, the second sealing member 402 may include a sealant (for example, a sealant that becomes solid after solidification) that can seal the gap between the baffle plate 100 and the first structural member 200 at the first through hole 110.

[0045] In some embodiments, when the second sealing member 402 is a sealing ring, the outer contour of the cross-section of the second sealing member 402 may be circular, elliptical, triangular, rectangular, polygonal, or irregular in shape.

[0046] By providing a second sealing member 402 that abuts against the baffle plate 100, the second sealing member 402 can effectively seal the gap between the baffle plate 100 and the first structural member 200. Furthermore, since the second sealing member 402 is provided at the end of the first through-hole 110 and abuts against the baffle plate 100 to achieve sealing, the placement of the second sealing member 402 is not basically limited by the size of the first through-hole 110, there are few restrictions on the shape and size of the second sealing member 402, and it is easy to install.

[0047] Figure 5 is a schematic diagram of a further mounting of a sealing assembly according to some embodiments of this specification. As shown in Figure 5, the sealing assembly 400 further includes a third sealing member 403 that abuts against the baffle plate 100. The third sealing member 403 seals the gap between the baffle plate 100 and the first structural member 200. The second sealing member 402 and the third sealing member 403 may be located at both ends of the first through hole 110, respectively. The second sealing member 402 and the third sealing member 403 may abut against the first side surface 101 and the second side surface 102 of the baffle plate 100, respectively. The structure and shape of the third sealing member 403 may be similar to that of the second sealing member 402, and specifically, refer to the relevant description of the second sealing member 402.

[0048] By providing the second sealing member 402 and the third sealing member 403 and sealing both ends of the first through hole 110, the gap between the baffle plate 100 and the first structural member 200 can be better sealed, and the arrangement of the second sealing member 402 and the third sealing member 403 is not basically limited by the size of the first through hole 110, and there are few restrictions on the shape and size of the second sealing member 402 and the third sealing member 403.

[0049] Figure 6 is a schematic diagram of yet another mounting of a sealing assembly according to some embodiments of this specification. As shown in Figure 6, the sealing assembly 400 may include a fourth sealing member 404. The fourth sealing member 404 may seal the gap between the baffle plate 100 and the first structural member 200. At least a portion of the fourth sealing member 404 is provided between the inner wall of the first through-hole 110 of the baffle plate 100 and the outer wall of the first structural member 200. That is, at least a portion of the fourth sealing member 404 is provided within the first through-hole 110 of the baffle plate 100.

[0050] In some embodiments, the fourth sealing member 404 may be a sealing ring. The sealing ring (fourth sealing member 404) may be located within the first through-hole 110 of the baffle plate 100 and fitted onto the outside of the first structural member 200. In another embodiment, the fourth sealing member 404 may be a sealant (for example, a sealant that becomes solid after solidification) that is filled within the first through-hole 110 of the baffle plate 100 and located between the inner wall of the first through-hole 110 of the baffle plate 100 and the outer wall of the first structural member 200, and the sealant (fourth sealing member 404) may seal the gap between the first structural member 200 and the baffle plate 100 within the first through-hole 110.

[0051] If the fourth sealing member 404 is a sealing ring, it may have several different shapes. The shape of the fourth sealing member 404 may be similar to the shape of the first sealing member 401. In the embodiment shown in Figure 6, the fourth sealing member 404 may have a regular annular structure and be located entirely within the first through-hole 110 of the baffle plate 100.

[0052] Figure 7 is a schematic diagram of a fourth sealing member according to some embodiments of this specification. In some embodiments, as shown in Figure 7, when the fourth sealing member 404 is a sealing ring, the fourth sealing member 404 has a cylindrical inner ring and a conical outer ring. By designing the outer ring to be conical and inserting the fourth sealing member 404 into the first through hole 110 from the end with the smaller diameter of the outer ring, the fourth sealing member 404 can be easily inserted into the first through hole 110. In some embodiments, the outer diameter of one end of the conical outer ring may be slightly smaller than the diameter of the first through hole 110, and the outer diameter of the other end of the conical outer ring may be basically equal to the diameter of the first through hole 110. The end with the larger diameter of the outer ring of the fourth sealing member 404 may be fitted into the inner wall of the first through hole 110 of the baffle plate 100, thereby improving the sealing effect of the fourth sealing member 404. In some embodiments, the outer diameter of one end of the conical outer ring may be slightly smaller than the diameter of the first through-hole 110, and the outer diameter of the other end of the conical outer ring may be larger than the diameter of the first through-hole 110. With such an arrangement, part of the fourth sealing member 404 may be located inside the first through-hole 110 of the baffle plate 100, and the other part may be located outside the first through-hole 110 of the baffle plate 100. With such an arrangement, a sealing effect can be ensured, and the fourth sealing member 404 can be prevented from moving along direction A in Figure 6.

[0053] Figure 8 is a schematic diagram of a fourth sealing member according to another embodiment of this specification. In some embodiments, as shown in Figure 8, a position limiting ring 4041 extending radially outward is provided at one end of the fourth sealing member 404, and the outer diameter of the position limiting ring 4041 is larger than the inner diameter of the first through hole 110 of the baffle plate 100, so that when the fourth sealing member 404 is installed, the position limiting ring 4041 cannot pass through the first through hole 110 of the baffle plate 100 and thus can serve as a position limiting mechanism. That is, the fourth sealing member 404 shown in Figure 8 can guarantee a sealing effect and prevent the fourth sealing member 404 from moving along direction A in Figure 6.

[0054] In some embodiments, if the fourth sealing member 404 is a sealing ring, the length of the fourth sealing member 404 along the axial direction of the sealing ring may be longer, shorter, or equal to the length of the first through-hole 110 of the baffle plate 100 along the axis of the first through-hole 110. If the length of the fourth sealing member 404 along the axial direction of the sealing ring is longer than the length of the first through-hole 110 along the axial direction of the first through-hole 110, both ends of the fourth sealing member 404 can extend beyond both ends of the first through-hole 110, thereby allowing the fourth sealing member 404 to completely cover the gap between the baffle plate 100 and the first structural member 200, which is advantageous for improving the sealing strength of the fourth sealing member 404.

[0055] In some embodiments, as shown in Figures 3 to 5, the sealing structure 1000 further includes a first position-restricting structure 800. The first position-restricting structure 800 can restrict the position of the first structural member 200 in the first through-hole 110 (for example, by restricting the relative position of the first structural member 200 with respect to the baffle plate 100). As can be understood, the first position-restricting structure 800 may restrict the position of the first structural member 200 in only one direction, i.e., it may restrict the movement of the first structural member 200 relative to the baffle plate 100 in only one direction. For example, the first position-restricting structure 800 in Figures 3 to 5 can prevent the first structural member 200 from moving in direction A in Figures 3 to 5. In some embodiments, the first position limiting structure 800, together with other structures, can connect the baffle plate 100 and the first structural member 200 by fixing the position of the first structural member 200 in the first through hole 110, thereby achieving a fixed relative position between the first structural member 200 and the baffle plate 100. For example, the first position limiting structure 800 can engage with the second retaining ring portion 203 of the first structural member 200 (described later) (the second retaining ring portion 203 can prevent the first structural member 200 from moving in the direction B in Figures 3 to 5), thereby fixing the position of the first structural member 200 in the first through hole 110 and achieving a fixed relative position between the first structural member 200 and the baffle plate 100.

[0056] In some embodiments, the first position limiting structure 800 may include a stopper block located on the side where the second side surface 102 of the baffle plate 100 is located. In some embodiments, as shown in Figure 3, the stopper block can abut against the baffle plate 100 to prevent the first structural member 200 from moving in direction A in Figures 3 to 5.

[0057] In some embodiments, as shown in Figure 4, both the second sealing member 402 and the retaining block are located on the side where the second side surface 102 of the baffle plate 100 is located, and the second sealing member 402 may be in contact with the second side surface 102 of the baffle plate 100, and the retaining block may be in contact with the second sealing member 402. With such an installation, the first position limiting structure 800 not only prevents the first structural member 200 from moving in direction A, but also applies pressure to the second sealing member 402, pressing it against the baffle plate 100, thereby providing a better sealing effect to the second sealing member 402.

[0058] In some embodiments, as shown in Figure 5, the second sealing member 402 and the third sealing member 403 are located on opposite sides of the baffle plate 100, and abut against the first side surface 101 and the second side surface 102 of the baffle plate 100, respectively. The stopper block may be located on the side where the second side surface 102 of the baffle plate 100 is located, and abut against the third sealing member 403. With such an installation, the first position limiting structure 800 not only prevents the first structural member 200 from moving in direction A, but also applies pressure to the third sealing member 403, pressing it against the baffle plate 100, thereby providing a better sealing effect to the third sealing member 403.

[0059] In some embodiments, the first position limiting structure 800 (the stopper block described above) and the first structural member 200 can achieve position limiting through multiple connectable methods such as locking and screwing.

[0060] In some embodiments, the first position limiting structure 800 achieves position limiting by a screw-in method. Figure 9 is a schematic configuration diagram of the first structural member according to some embodiments of this specification. As shown in Figures 3 to 5 and Figure 9, in some embodiments, the first position limiting structure 800 includes a first nut 801 and a first male screw 206. That is, the stopper block may be the first nut 801. The first male screw 206 is provided on the first structural member 200. After the first structural member 200 is inserted into the first through hole 110, at least a portion of the first male screw may be located on the side where the second side surface 102 of the baffle plate 100 is located. The first nut 801 is screwed onto the first male screw 206 of the first structural member 200 on the side where the second side surface 102 of the baffle plate 100 is located. By rotating the first nut 801, the first nut 801 is controlled to reciprocate on the first male screw 206, thereby causing the first nut 801 to approach or move away from the baffle plate 100. By controlling the first nut 801 to move toward the baffle plate 100, pressure can be applied to the baffle plate 100, the second sealing member 402, or the third sealing member 403 when the first nut 801 comes into contact with the baffle plate 100 (in the embodiment shown in Figure 3), the second sealing member 402 (in the embodiment shown in Figure 4), or the third sealing member 403 (in the embodiment shown in Figure 5). When the first nut 801 comes into contact with the second sealing member 402 (in the embodiment shown in Figure 4) or the third sealing member 403 (in the embodiment shown in Figure 5), the first nut 801 can be controlled to move toward the baffle plate 100, thereby correspondingly pressing against the second sealing member 402 or the third sealing member 403 and ensuring a sealing effect.

[0061] Figure 10A is a schematic diagram of a sealing structure according to another embodiment of this specification, and Figure 10B is a schematic diagram of a second structural member according to another embodiment of this specification. The second structural member 600 will be described in detail below with reference to Figures 10A and 10B. As shown in Figure 10A, the second structural member 600 is fitted onto the first structural member 200 and is located between the first nut 801 and the third sealing member 403. The second structural member 600 is fitted onto the first structural member 200 and is located between the first nut 801 and the third sealing member 403, and contacts the third sealing member 403 to restrict its position. In some embodiments, as shown in Figure 10B, the second structural member 600 may be provided with a second through hole 603. As shown in Figure 10A, the first structural member 200 may be inserted into the second through hole 603 of the second structural member 600.

[0062] In some embodiments, the second structural member 600 may include a first main ring portion 601 fitted onto the first structural member 200. The inner ring of the first main ring portion 601 may have a second through hole 603 formed therein for the first structural member 200 to pass through the second structural member 600. The side of the first main ring portion 601 away from the baffle plate 100 abuts against a first nut 801, and the second structural member 600 can be driven to move synchronously when the first nut 801 moves.

[0063] In some embodiments, the second structural member 600 may further include a first retaining ring portion 602. The first retaining ring portion 602 is provided at one end of the first main ring portion 601 in the axial direction. When the first main ring portion 601 is fitted onto the first structural member 200, the first retaining ring portion 602 is located on the side of the first main ring portion 601 that is close to the baffle plate. When the first main ring portion 601 is fitted onto the first structural member 200, both the third sealing member 403 and the first retaining ring portion 602 are located between the baffle plate 100 and the first main ring portion 601. The third sealing member 403 is located on the inner ring of the first retaining ring portion 602.

[0064] With the above structural design of the second structural member 600, the first main ring portion 601 can restrict the position of the third sealing member 403 in the axial direction of the first through hole 110 of the baffle plate 100. The first retaining ring portion 602 restricts the position of the third sealing member 403 in the radial direction of the first through hole 110 of the baffle plate 100. By providing the first main ring portion 601 and the first retaining ring portion 602 on the second structural member 600, the position of the third sealing member 403 can be restricted in the axial and radial directions of the first through hole 110, causing the third sealing member 403 to come into close contact with the first main ring portion 601 and the baffle plate 100, thereby effectively sealing the contact gap between the second structural member 600 and the baffle plate 100. Furthermore, the second structural member 600 effectively reduces wear on the third sealing member 403 by avoiding direct contact between the first nut 801 and the third sealing member 403, thereby extending the service life of the third sealing member 403.

[0065] In some embodiments, the second structural member 600 may be a partition plate having a second through-hole 603, and the partition plate may be fitted to the outside of the first structural member 200 by penetrating into the second through-hole 603 of the partition plate. In some embodiments, the side of the partition plate facing the baffle plate 100 may be provided with a groove having an arc-shaped bottom, and the third sealing member 403 may be provided in the groove of the partition plate, and the groove of the partition plate can provide positional constraint for the third sealing member 403.

[0066] To make it easier to understand, if the second sealing member 402 is provided on the side where the second side surface 102 of the baffle plate is located (i.e., the embodiment shown in Figure 4), the second structural member 600 may also be provided similarly in accordance with the above description.

[0067] The structure of the first structural member 200 will be described in detail below with reference to Figures 3-5 and Figure 9. As shown in Figure 9, the first structural member 200 includes a second main ring portion 202. The second main ring portion 202 may penetrate the baffle plate 100 through the first through hole 110 of the baffle plate 100. That is, the outer diameter of the second main ring portion 202 is smaller than the diameter of the first through hole 110, and the second main ring portion 202 may penetrate from the side of the baffle plate 100 where the first side surface 101 is located to the side where the second side surface 102 is located. The inner hole 201 is formed within the second main ring portion 202.

[0068] In some embodiments, the first structural member 200 may further include a second retaining ring portion 203. When the first structural member 200 is installed in the first through-hole 110 of the baffle plate 100, the second retaining ring portion 203 may be located on the side where the first side surface 101 of the baffle plate 100 is located and surround the second main ring portion 202. That is, the second retaining ring portion 203 may be provided on the outer circumferential surface of the second main ring portion 202, and the outer diameter of the second retaining ring portion 203 is larger than the diameter of the first through-hole 110, so that when the second main ring portion 202 penetrates the first through-hole 110 of the baffle plate 100, the second retaining ring portion 203 cannot penetrate the first through-hole 110. The second retaining ring portion 203 can serve to restrict the position of the first structural member 200. The second retaining ring portion 203 can prevent the first structural member 200 from moving in direction B as shown in Figures 3 to 5.

[0069] In some embodiments, as shown in Figures 3 and 5, when the second sealing member 402 is located on the side of the baffle plate 100 where the first side surface 101 is located, the second sealing member 402 may be fitted onto the second main ring portion 202 and also in contact with the second retaining ring portion 203. The second retaining ring portion 203 plays a role in restricting the position of the second sealing member 402 in the axial direction of the second main ring portion 202 (which is also the axial direction of the first through hole 110), thereby preventing the second sealing member 402 from coming off the second main ring portion 202.

[0070] In some embodiments, as shown in Figures 3-5 and 9, the first structural member 200 may further include a third retaining ring portion 204. The third retaining ring portion 204 is located on the side where the first side surface 101 of the baffle plate 100 is located and is provided on the side of the second retaining ring portion 203 facing the baffle plate 100, the inner diameter of the third retaining ring portion 204 is larger than the outer diameter of the second main ring portion 202, and an annular groove is formed between the third retaining ring portion 204 and the second main ring portion 202. In some embodiments, the outer diameter of the third retaining ring portion 204 may be equal to the outer diameter of the second retaining ring portion 203.

[0071] In some embodiments, as shown in Figures 3 and 5, the second sealing member 402 may be fitted onto the second main ring portion 202 and located in the inner ring of the third retaining ring portion 204. That is, the second sealing member 402 may be located in an annular groove formed between the third retaining ring portion 204 and the second main ring portion 202. The third retaining ring portion 204 restricts the position of the second sealing member 402 along the radial direction of the second main ring portion 202 (which is also the radial direction of the first through hole 110).

[0072] In another embodiment, the side of the second retaining ring portion 203 facing the baffle plate 100 may be provided with a recessed groove having an arc-shaped bottom, and the second sealing member 402 may be provided within the recessed groove of the second retaining ring portion 203, and the recessed groove of the second retaining ring portion 203 can provide positional restriction for the second sealing member 402. In yet another embodiment, by providing another positional restriction mechanism in the second main ring portion 202, the objective of preventing the first structural member 200 from moving in direction B shown in Figures 3 to 6 can be achieved. For example, a positional restriction block may be provided in the second main ring portion 202, and since the positional restriction block cannot enter the first through hole 110, it serves as a positional restriction.

[0073] In some embodiments, the outer diameter of the second main ring portion 202 may be 15 mm to 750 mm. In some embodiments, the inner diameter of the second main ring portion 202 may be 10 mm to 500 mm. The inner diameter of the second main ring portion 202 is the diameter of the inner hole 201. In some embodiments, the ratio of the outer diameter of the second main ring portion 202 to the inner diameter of the second main ring portion 202 may be 1.1 to 2. By setting the size of the second main ring portion 202 as described above, the structure of the first structural member 200 can be made more rational and compact.

[0074] In some embodiments, the diameter of the first through-hole 110 may be between 17 mm and 800 mm. In some embodiments, the ratio of the diameter of the first through-hole 110 to the inner diameter of the second main ring portion 202 is between 1.2 and 2.5. By combining the above information with the size design of the first through-hole 110 and the second main ring portion 202, the sealing structure can achieve a better sealing effect by better combining each component of the sealing structure.

[0075] Figure 11 is a schematic diagram of a sealing structure according to yet another embodiment of this specification. In some embodiments, as shown in Figure 11, the sealing structure further includes a second position-restricting structure 500. The second position-restricting structure 500 can improve the stability of the first sealing member 401 and prevent the first sealing member 401 from coming off by restricting the position of the first sealing member 401 within the inner hole 201. In some embodiments, the second position-restricting structure 500 may apply pressure to the first sealing member 401 to improve the sealing effect of the first sealing member 401.

[0076] Figure 12 is a schematic diagram of the mounting of a second position limiting structure according to some embodiments of this specification, and Figure 13 is a schematic configuration diagram of a second nut according to some embodiments of this specification. The second position limiting structure will be described in detail below with reference to Figures 12 and 13. As shown in Figures 12 and 13, the second position limiting structure 500 includes a second nut 501 and a first female thread 205. The second nut 501 is provided with a third male thread 504 that can be screwed into the first female thread 205. The first female thread 205 is provided in the inner hole 201 of the first structural member 200. The second nut 501 is connected to the first female thread 205 of the inner hole 201 on the side where the second side surface 102 of the baffle plate 100 is located. In some embodiments, after the first structural member 200 is installed in the first through hole 110, at least a portion of the first female thread 205 may be located on the side where the second side surface 102 of the baffle plate 100 is located.

[0077] The second nut 501, after contacting and screwing into the first sealing member 401, can restrict the movable space of the first sealing member 401. Furthermore, the second nut 501 can press against the first sealing member 401, thereby improving its sealing effect.

[0078] In some embodiments, a position-limiting protrusion ring 502 is provided on the second nut 501, and the outer diameter of the position-limiting protrusion ring 502 may be larger than the diameter of the inner hole 201, thereby limiting the length to which the second nut 501 enters the inner hole 201. In some embodiments, the outer diameter of the position-limiting protrusion ring 502 may be larger than the diameter of the first through hole 110 of the baffle plate 100.

[0079] In some embodiments, the second nut 501 may be provided with a third through-hole 505 extending along its axis, the third through-hole 505 for the sealing member 300 to pass through. By providing the third through-hole 505, the sealing member 300 can smoothly pass through to the side of the baffle plate 100 where the second side surface 102 is located, without being restricted by the second nut 501.

[0080] In some embodiments, as shown in Figures 9 and 11, the second position-restricting structure 500 further includes a position-restricting boss 207. The position-restricting boss 207 is provided at one end adjacent to the side of the inner bore 201 where the first side surface 101 of the baffle plate 100 is located. The first sealing member 401 is provided between the position-restricting boss 207 and the second nut 501. The first sealing member 401 may abut against the position-restricting boss 207, which can restrict the first sealing member 401 from moving toward the first side surface 101 of the baffle plate along the axial direction of the inner bore 201. After the second nut 501 abuts against the first sealing member 401, the first sealing member 401 can be pressed against the position-restricting boss 207, which is advantageous for improving the stability and sealing effect of the first sealing member 401.

[0081] The second position limiting structure 500 can have the effect of preventing the first sealing member 401 from coming off by a plurality of structures. In some embodiments, the second position limiting structure 500 may further include a first position limiting plug, which may be pushed directly into the inner hole 201 from the side where the second side surface 102 of the baffle plate 100 is located, so as to have the effect of preventing the first sealing member 401 from coming off. The first position limiting plug may be locked in the inner hole 201, or it may be fixed relative to the inner wall of the inner hole 201 by frictional force. The first position limiting plug can prevent the first sealing member 401 from coming off from the side where the second side surface 102 of the baffle plate 100 is located.

[0082] In another embodiment, the second position limiting structure 501 may further include a second position limiting plug or a third nut, the second position limiting plug and the third nut may be positioned in the inner hole 201 from the side where the first side surface 101 of the baffle plate 100 is located, and the first sealing member 401 can be prevented from coming off the side where the first side surface 101 of the baffle plate 100 is located. The method of providing the second position limiting plug may be similar to the method of providing the first position limiting plug, and the method of providing the third nut may be similar to the method of providing the second nut 501.

[0083] In some embodiments, the number of first sealing members 401 may be at least two. By providing at least two first sealing members 401, the gap between the first structural member 200 and the member to be sealed 300 can be sealed more effectively.

[0084] In some embodiments, a first gasket 4011 may be provided between the first sealing member 401 and the second nut 501. In some embodiments, the first gasket 4011 may be ring-shaped. The material of the first gasket 4011 includes, but is not limited to, copper and stainless steel. The first gasket 4011 may be replaced after wear. When the second nut 501 is screwed in, the second nut 501 abuts against the first gasket 4011 and drives the first gasket 4011 and the first sealing member 401 to move toward the position limiting boss 207, thereby pressing the first sealing member 401 between the position limiting boss 207 and the second nut 501.

[0085] By providing the first gasket 4011 between the second nut 501 and the first sealing member 401, the first sealing member 401 can be effectively protected from wear caused by the second nut 501, thereby extending the service life of the first sealing member 401.

[0086] In some embodiments, if there are multiple first sealing members 401, a second gasket 4012 may be provided between at least two of the first sealing members 401. The material of the second gasket 4012 includes, but is not limited to, copper and stainless steel. In some embodiments, a second gasket 4012 may be provided between some adjacent first sealing members 401, and not between other adjacent first sealing members 401.

[0087] By providing a second gasket 4012 between two adjacent first sealing members 401, direct contact between the first sealing members 401 can be avoided, and if there are multiple first sealing members 401, wear between the first sealing members 401 can be effectively reduced, thereby extending the service life of the first sealing members 401.

[0088] Figure 14 is a schematic diagram of a sealing structure according to yet another embodiment of this specification. The first structural member 200 will be described in detail below with reference to Figure 14. As shown in Figure 14, the first structural member 200 is inserted into the first through-hole 110 from the side where the second side surface 102 of the baffle plate 100 is located. The first structural member 200 does not penetrate the first through-hole 110. The member to be sealed 300 penetrates the through-hole and the internal hole 201. The sealing assembly includes a fifth sealing member 405.

[0089] A position-limiting stopper 103 is provided at one end of the first through-hole 110, adjacent to the side where the first side surface 101 is located. The fifth sealing member 405 is fitted onto the member to be sealed 300 and is located between the position-limiting stopper 103 and the first structural member 200. In some embodiments, the position-limiting stopper 103 can prevent the fifth sealing member 405 from disengaging from the first through-hole 110 on the side where the first side surface 101 is located. The position of the fifth sealing member 405 can be limited by the combined action of the position-limiting stopper 103 and the first structural member 200. In some embodiments, the first structural member 200 may apply pressure to the fifth sealing member 405 to ensure its sealing effect. The fifth sealing member 405 may not only seal the gap between the first structural member 200 and the member to be sealed 300, but may also seal the gap between the baffle plate 100 and the first structural member 200, thereby simplifying the structure of the sealing structure 1000.

[0090] The first structural member 200 is connected to the first through-hole 110 of the baffle plate 100. The first structural member 200 can be connected to the first through-hole 110 by a removable connection method such as locking or screwing.

[0091] In some embodiments, a second male thread 209 is provided on the outer wall of the first structural member 200, and a second female thread 111 that engages with the second male thread 209 is provided on the inner wall of the first through hole 110. The first structural member 200 and the first through hole 110 may be connected by screws, and the magnitude of the pressure can be easily controlled by applying pressure to the fifth sealing member 405 when the first structural member 200 is screwed in and by controlling the screwing distance.

[0092] In some embodiments, the number of fifth sealing members 405 may be at least two. By providing at least two fifth sealing members 405, the gap between the first structural member 200 and the member to be sealed 300 and the gap between the first structural member 200 and the member to be sealed 300 can be effectively sealed.

[0093] In some embodiments, a third gasket 4051 may be provided between the fifth sealing member 405 and the first structural member 200. The third gasket 4051 can extend the service life of the fifth sealing member 405 by preventing wear of the fifth sealing member 405 by the first structural member 200. The material of the third gasket 4051 includes, but is not limited to, copper and stainless steel.

[0094] In some embodiments, the number of fifth sealing members 405 may be multiple. A fourth gasket 4052 may be provided between at least two adjacent fifth sealing members 405. The material of the fourth gasket 4052 includes, but is not limited to, copper and stainless steel.

[0095] By providing a fourth gasket 4052 between two adjacent fifth sealing members 405, direct contact between the fifth sealing members 405 is avoided, and when there are multiple fifth sealing members 405, wear between the fifth sealing members 405 is effectively reduced, thereby extending the service life of the fifth sealing members 405.

[0096] In some embodiments, the first structural member 200 may be formed from a conductive material. In some embodiments, as shown in Figures 3 to 5, an insulating layer 700 is provided between the first structural member 200 and the inner wall surface of the first through-hole 110, and the insulating layer 700 insulates the baffle plate 100 from the first structural member 200, thereby improving the safety performance of the sealed structure. In some embodiments, the material of the first structural member may be a metallic conductive material with low magnetic permeability (for example, a relative permeability of less than 2), such as copper, stainless steel, or aluminum. The insulating layer 700 is manufactured from an insulating material. As the insulating material, a rubber-based elastic material having electrical insulating properties, such as polytetrafluoroethylene, fluororubber, nitrile rubber, or urethane rubber, may be used.

[0097] In some embodiments, the first structural member 200 may be formed from an insulating material. The specific material of the first structural member 200 may be similar to the material of the insulating layer 700. By using an insulating material as the material for the first structural member 200, it is not necessary to provide an insulating component (e.g., an insulating layer 700) between the first structural member 200 and the baffle plate 100. In this way, the number of components in the sealed structure can be simplified, which is advantageous for improving the sealing effect.

[0098] In some embodiments, the sealing assembly 400 may be formed from an insulating material. The specific material of the sealing assembly 400 may be similar to the material of the insulating layer 700. In some embodiments, the second sealing member 402 may be formed from an insulating material. In some embodiments, the insulating layer 700 and the second sealing member 402 may be an integrated structure. In some embodiments, the materials of the second sealing member 402 and the third sealing member 403 may both be insulating materials. In some embodiments, the insulating layer 700, the second sealing member 402 and the third sealing member 403 may be an integrated structure. In some embodiments, the material of the first sealing member 401 is an insulating material. The technical effects that can be achieved by the above embodiments include, but are not limited to, the ability to achieve insulation between the baffle plate 100 and the first structural member 200, the second structural member 600 and the member to be sealed 300 by using the insulating layer 700, the first sealing member 401, the second sealing member 402 and the third sealing member 403 made of insulating material.

[0099] In some embodiments, tool holes may be formed in the first structural member 200, the first nut 801, and / or the second nut 501. Tool holes are convenient for inserting an auxiliary tool (e.g., a latch) into them and then performing mounting operations (e.g., screwing, pushing, pulling, etc.) on the part having the tool hole.

[0100] In some embodiments, a first tool hole 208 may be formed in the first structural member 200. In some embodiments, as shown in Figure 9, the first tool hole 208 may be formed in the third retaining ring portion 204.

[0101] In some embodiments, a second tool hole 503 may be formed in the second nut 501, as shown in Figures 12 and 13.

[0102] In some embodiments, a third tool hole may be formed in the first nut 801, the third tool hole being shown and referring to the first tool hole 208 and the second tool hole 503. In some embodiments, the outer shape of the first nut 801 may be hexagonal or other.

[0103] The technical effects that can be achieved by the above-described embodiments include, but are not limited to, the ability to achieve very convenient and rapid installation and / or removal by forming tool holes in each component.

[0104] The beneficial effects that may be brought about by the sealing structures in the embodiments herein include, but are not limited to, (1) a better sealing effect can be achieved by sealing the gap between the baffle plate and the first structural member and the gap between the member to be sealed and the first structural member with the sealing assembly herein; (2) the sealing structure can enhance the sealing effect by simultaneously sealing both sides of the baffle plate with the sealing structure; (3) the connection between each structure in the sealing structure is simple and convenient, the sealing assembly can be quickly installed and replaced, flexibly adjusted, and the difficulty and cost of maintenance and repair can be reduced; and (4) safety performance can be improved by using insulating materials in the sealing assembly and structural members. The beneficial effects of different embodiments will differ, and in different embodiments, any one or more of the above may be combined, or any other possible effects may be present.

[0105] Figure 15 is a schematic diagram of a vacuum furnace according to some embodiments of this specification. The vacuum furnace will be described in detail below with reference to Figure 15. As shown in Figure 15, the vacuum furnace 2000 includes a sealed structure 1000, and the vacuum furnace includes a furnace body 2100. The furnace body 2100 is a furnace body that provides a vacuum environment. In some embodiments, the baffle plate 100 may be part of the side wall of the furnace body 2100, that is, it may be an integral structure with the side wall of the furnace body 2100. In another embodiment, first an opening may be provided in the side wall of the furnace body 2100, and then the baffle plate 100 may be attached to the opening. That is, the baffle plate 100 and the side wall of the furnace body are separate structures.

[0106] In some embodiments, the first side surface 101 of the baffle plate 100 is located inside the furnace body 2100, and the second side surface 102 of the baffle plate 100 is located outside the furnace body 2100. This arrangement allows for easy installation, removal, inspection, and replacement of the baffle plate from outside the vacuum furnace. For example, in the process of installing the first nut 801 and / or the second nut 501, since both the first nut 801 and the second nut 501 are located on the side where the second side surface 102 of the baffle plate 100 is located, the first nut 801 and / or the second nut 501 can be easily installed from outside the furnace body.

[0107] In some embodiments, there may be multiple openings on the furnace body 2100. For example, there may be two openings on the furnace body 2100, each used for the insertion and passage of a coil or cable. Each opening may be provided with the sealing structure 1000.

[0108] Having described the basic concepts above, it is clear to those skilled in the art that the above detailed disclosures are merely illustrative and do not limit this specification. Those skilled in the art may make various amendments, improvements, and modifications to this specification, even though they are not explicitly described herein. Since such amendments, improvements, and modifications are proposed herein, they still fall within the spirit and scope of the exemplary embodiments of this specification.

[0109] Furthermore, this specification uses specific terminology to describe the examples herein. “One Example,” “One Embodiment,” and / or “Several Examples” mean features, structures, or characteristics relating to at least one example herein. Therefore, “One Embodiment,” “One Embodiment,” or “Alternative Embodiment” mentioned more than once in different places herein does not necessarily refer to the same example. Moreover, several features, structures, or characteristics in one or more examples herein may be appropriately combined.

[0110] Similarly, in order to simplify the expressions disclosed herein and to aid in the understanding of embodiments of one or more inventions, various features may be combined in the preceding descriptions of embodiments herein, in one embodiment, drawing, or description thereof. However, this method of disclosure does not mean that the features necessary for the subject matter herein are greater than the features described in the claims. In fact, the features of the embodiments are fewer than all the features of a single embodiment disclosed above.

[0111] Finally, the examples described herein are merely principles for illustrating the examples herein. Other variations may also be included within the scope of this specification. Therefore, alternative configurations of the examples herein can be considered consistent with the teachings herein, not as limitations but as examples. Accordingly, the examples herein are not limited to those explicitly introduced and described herein. [Explanation of Symbols]

[0112] 1000 sealed structure 100 Baffle Plate 101 First aspect 102 Second aspect 103 Position restriction stopper 110 First through hole 111 Second female thread 200 First structural member 201 Internal bore 202 Second Main Ring Section 203 Second retaining ring section 204 Third retaining ring section 205 First female thread 206 First male thread 207 Boss with restricted position 208 1st tool hole 209 Second male screw 300 Sealed component 400 sealed assemblies 401 First sealing member 4011 First Gasket 4012 Second Gasket 402 Second sealing member 403 Third sealing member 404 Fourth sealing member 4041 Location restriction ring 405 Fifth sealing member 4051 Third Gasket 4052 Fourth Gasket 500 Second position limiting structure 501 Second Nut 502 Position-restricting convex ring 503 2nd tool hole 504 Third male thread 505 Third through hole 600 Second structural member 601 First main ring section 602 First retaining ring section 603 Second through hole 700 Insulating layer 800 First position restriction structure 801 First Nut 2000 vacuum furnace 2100 Furnace body

Claims

1. A baffle plate, wherein a first through-hole is formed that penetrates the first side surface and the second side surface of the baffle plate, A first structural member having an internal bore formed for a member to be sealed to pass through, the first structural member being connected to the baffle plate, at least a portion of the internal bore being located within the first through-hole, and at least a portion of the internal bore being not parallel to both the first side surface and the second side surface, A sealing assembly for sealing the gap between the baffle plate and the first structural member, and for sealing the gap between the member to be sealed and the first structural member, Includes, The sealing assembly includes a second sealing member for sealing the gap between the baffle plate and the first structural member. The first structural member comprises a second main ring portion, a second retaining ring portion, and a third stopper ring portion. The second main ring portion penetrates the baffle plate through the first through hole in the baffle plate, and the inner hole is formed within the second main ring portion. The second retaining ring portion and the third retaining ring portion are positioned on the side of the baffle plate where the first side surface is located, the second retaining ring portion surrounds the second main ring portion, and the third retaining ring portion is positioned on the side of the second retaining ring portion facing the baffle plate. The second sealing member is fitted onto the second main ring portion and contacts the second retaining ring portion. The second sealing member is located within an annular groove formed between the third retaining ring portion and the second main ring portion, forming a sealing structure.

2. The sealing assembly includes a first sealing member for sealing the gap between the member to be sealed and the first structural member, The sealing structure according to claim 1, wherein the first sealing member is provided between the inner wall of the inner hole and the member to be sealed.

3. The second sealing member is located at one end of the first through hole, The sealing structure according to claim 2, wherein the second sealing member abuts against the first or second side surface of the baffle plate to seal the gap between the baffle plate and the first structural member.

4. The sealing assembly further includes a third sealing member for sealing the gap between the baffle plate and the first structural member, The sealing structure according to claim 1, wherein the second sealing member and the third sealing member are each located at both ends of the first through hole and each abut against the first side surface and the second side surface of the baffle plate.

5. The sealing structure according to claim 2, wherein the sealing assembly includes a fourth sealing member for sealing the gap between the baffle plate and the first structural member, and at least a portion of the fourth sealing member is provided between the inner wall of the first through hole and the outer wall of the first structural member.

6. The sealing structure according to claim 4, further comprising a first position limiting structure for limiting the position of the first structural member in the first through-hole.

7. The sealing structure according to claim 2, wherein the first structural member includes a first main ring portion and a first retaining ring portion, the inner hole is formed in the first main ring portion, the first main ring portion penetrates the baffle plate through the first through hole, the first retaining ring portion is located on the side of the baffle plate where the first side surface is located, and the first retaining ring portion surrounds the outside of the first main ring portion, and the outer diameter of the first retaining ring portion is larger than the diameter of the first through hole.

8. The sealing structure according to claim 7, wherein the outer diameter of the second retaining ring portion is larger than the diameter of the first through hole.

9. The ratio of the outer diameter of the first main ring portion to the inner diameter of the first main ring portion is 1.1 to 2, and / or The sealing structure according to claim 7, wherein the ratio of the diameter of the first through hole to the inner diameter of the first main ring portion is 1.2 to 2.

5.

10. The sealing structure according to claim 2, further comprising a second position limiting structure configured to restrict the position of the first sealing member to the inner hole.

11. The sealing structure according to claim 2, wherein the sealing assembly includes at least two of the first sealing members, and a second gasket is provided between at least two adjacent first sealing members.

12. The first structural member is inserted into the first through-hole from the side where the second side surface of the baffle plate is located, and a position limiting stopper is provided at one end of the first through-hole that is close to the first side surface. The member to be sealed has the first through hole and the inner hole passing through it. The sealing structure according to claim 1, wherein the sealing assembly includes a fifth sealing member, the fifth sealing member being provided in the first through hole, fitted onto the member to be sealed, and positioned between the position limiting stopper and the first structural member.

13. The sealing structure according to claim 1, wherein the first structural member is formed from a conductive material, and an insulating layer is provided between the outer surface of the first structural member and the inner wall surface of the first through hole.

14. The sealing structure according to claim 1, wherein the first structural member is formed from an insulating material, and / or the sealing assembly is formed from an insulating material.

15. A vacuum furnace comprising a sealing structure according to any one of claims 1 to 14 and a furnace body, wherein an opening is provided in the side wall of the furnace body and the sealing structure is provided in the opening via the baffle plate.

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