PCB transport robot

Abstract

To provide a substrate transfer robot capable of preventing interference with an external object as well as improving positioning accuracy.SOLUTION: First and second arm portions 36 and 37 are provided so as to be capable of relatively turning to each other. At a joint between the first and second arm portions 36 and 37, second turn-driving means 42 is provided. The second turn-driving means 42 has a second motor 76 and a second power transmission portion 77. The second motor 76 has a fixed part 78 fixed on the first arm portion 36, and a rotation part 79 that rotates with respect to the fixed part 78 around a rotation axis L22 substantially parallel to a direction in which the first arm portion 36 extends. The second power transmission portion 77 is interposed between the second motor 76 and the second arm portion 37 and transmits power of the second motor 76 from a rotation part 79 of the second motor 76 to the second arm portion 37. By such the second turn-driving means 42, the first and second arm portions 36 and 37 are turned and driven relative to each other.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a substrate transfer robot for transferring substrates such as wafers.

Background Art

[0002] Semiconductor processing equipment, which is substrate processing equipment, includes a wafer processing apparatus that is a substrate processing apparatus for processing a semiconductor wafer (hereinafter simply referred to as "wafer") as a substrate, and a wafer transfer apparatus that is a substrate transfer apparatus for transferring a wafer between a cassette that is a container for accommodating the wafer and the wafer processing apparatus. The cassette accommodates wafers before or after processing. As processes for the wafer, process processes such as heat treatment, impurity introduction treatment, thin film formation treatment, lithography treatment, cleaning treatment, and planarization treatment are assumed.

[0003] The wafer transfer apparatus includes a preparation space forming portion in which a preparation space is formed, a cassette opener, and a substrate transfer robot. The preparation space is filled with an atmosphere gas having a high degree of cleanliness. The cassette opener opens and closes each door provided in the cassette and the preparation space forming portion. The substrate transfer robot is disposed in the preparation space and transfers the wafer between the cassette and the wafer processing apparatus.

[0004] FIG. 13 is a diagram schematically showing the configuration of a substrate transfer robot 1 which is a first prior art. A technique similar to this prior art is disclosed in Patent Document 1. The substrate transfer robot 1 is realized by a scalar horizontal articulated robot. The substrate transfer robot 1 includes a robot arm 2, a base 3 to which a base end portion of the robot arm 2 is connected, and a robot hand 4 to which a tip end portion of the robot arm 2 is connected and which holds a wafer. The robot arm 2 has first and second arm portions 5 and 6.

[0005] A first arm section 5 is mounted on the base 3 so as to be rotatable around a first pivot axis L1. A second arm section 6 is mounted on the first arm section 5 so as to be rotatable around a second pivot axis L2. A robot hand 4 is mounted on the second arm section 6 so as to be rotatable around a third pivot axis L3. The second arm section 6 is driven to rotate by a first motor 7. The first arm section 5 and the robot hand 4 are driven to rotate by a second motor 8. The first and second motors 7 and 8 are mounted on the base 3.

[0006] A power transmission unit 10, including a belt 9, is interposed between the second arm 6 and the first motor 7. Power from the first motor 7 is transmitted to the robot hand 4 via the power transmission unit 10, thereby driving the second arm 6 to rotate. Another power transmission unit 12, including another belt 11, is interposed between the robot hand 4 and the second motor 8. Power from the second motor 8 is transmitted to the robot hand 4 via the other power transmission unit 12, thereby driving the robot hand 4 to rotate. In some cases, multiple gears may be used instead of belt 9 and the other belts 11.

[0007] In such a circuit board transport robot 1, the distance from the joint between the first and second arm sections 5 and 6 to the first motor 7 becomes longer, and therefore the number of parts in the power transmission section 10 increases, leading to a greater accumulation of errors in the power transmission section 10. This reduces the positioning accuracy of the tip of the robot arm 2, and consequently, the positioning accuracy of the robot hand 4 decreases. Furthermore, the distance from the joint between the second arm section 6 and the robot hand 4 to the second motor 8 becomes longer, and therefore the number of parts in the other power transmission section 12 increases, leading to a greater accumulation of errors in the other power transmission section 12. This reduces the accuracy of the posture of the robot hand 4.

[0008] Figure 14 is a simplified diagram showing the configuration of the second prior art substrate transfer robot 16. Since this substrate transfer robot 16 is similar to the substrate transfer robot 1 described above, the same reference numerals are used for corresponding parts, and only the differences will be explained.

[0009] The first arm section 5 is driven to rotate by the first motor 17. The first motor 17 is mounted on the base 3. The second arm section 6 is driven to rotate by the second motor 18. The second motor 18 is mounted on the first arm section 5. The robot hand 4 is driven to rotate by the third motor 19. The third motor 19 is mounted on the second arm section 6.

[0010] The first motor 17 has a fixed part that is fixed to the base 3 and a rotating part that rotates around a rotation axis L5 parallel to the first pivot axis L1 relative to the fixed part. A first power transmission unit 20, which acts as a reduction unit, is interposed between the first arm 5 and the first motor 17, and the power of the first motor 17 is transmitted to the first arm 5 via the first power transmission unit 20, thereby driving the first arm 5 to rotate.

[0011] The second motor 18 has a fixed part that is fixed to the first arm 5 and a rotating part that rotates around a rotation axis L6 parallel to the second pivot axis L2 relative to the fixed part. A second power transmission unit 21, which acts as a reduction unit, is interposed between the second arm 6 and the second motor 18, and the power of the second motor 18 is transmitted to the second arm 6 via the second power transmission unit 21, thereby driving the second arm 6 to pivot.

[0012] The third motor 19 has a fixed part that is fixed to the second arm 6 and a rotating part that rotates around a rotation axis L7 parallel to the third pivot axis L3 relative to the fixed part. A third power transmission unit 22, which acts as a reduction unit, is interposed between the robot hand 4 and the third motor 19, and the power of the third motor 19 is transmitted to the robot hand 4 via the third power transmission unit 22, thereby driving the robot hand 4 to rotate.

[0013] In such a substrate transport robot 16, the second motor 18 is positioned so that its rotating part rotates around a rotation axis L6 parallel to the second pivot axis L2. Therefore, in order to secure space for the second motor 18, a portion of the first arm 5 needs to protrude in its extending direction. Consequently, the first arm 5 becomes larger, which leads to interference problems between the first arm 5 and external objects. Similarly, the third motor 19 is positioned so that its rotating part rotates around a rotation axis L7 parallel to the third pivot axis L3. Therefore, in order to secure space for the third motor 19, a portion of the second arm 6 needs to protrude in its extending direction. Consequently, the second arm 6 becomes larger, which leads to interference problems between the second arm 6 and external objects.

[0014] As a third prior art, Patent Document 2 discloses a technology relating to a wrist mechanism for an industrial robot. In this prior art wrist mechanism, a wrist is tiltably connected to the tip of a rotating arm, and this wrist is tilted by a tilting motor. The tilting motor is installed inside the rotating arm, parallel to the axis of the arm, thereby shortening the distance from the tilting motor to the wrist.

[0015] Such conventional technologies aim to reduce inertia and improve rigidity in wrist movement, and do not take into account the problems that arise in the first and second conventional technologies. [Prior art documents] [Patent Documents]

[0016] [Patent Document 1] Japanese Patent Application Publication No. 11-10576 [Patent Document 2] Japanese Unexamined Patent Publication No. 1-92087 [Overview of the Initiative] [Problems that the invention aims to solve]

[0017] The objective of the present invention is to provide a substrate transport robot that can improve positioning accuracy and prevent interference with external objects. [Means for solving the problem]

[0018] This invention comprises a base and A robotic hand that grips the circuit board, A robotic arm having multiple hollow arm sections that extend outwards, each arm section being connected in a series, one end of the arm section being connected to a base, and the other end of the arm section being connected to a robot hand, and two connected arm sections being provided to be able to rotate relative to each other, It includes a pivot drive means provided at each joint between two interconnected arm portions, which rotates the two interconnected arm portions relative to each other. The pivot drive mechanism is, A motor is housed in the internal space of one of the two arm sections, having a fixed part that is fixed to one of the two arm sections that are connected to each other, and a rotating part that rotates around a rotation axis substantially parallel to the extending direction of the one arm section relative to the fixed part, The substrate transport robot is characterized by including a power transmission unit housed in the internal space of one of the arm sections, interposed between the motor and the other of the two arm sections connected to each other, and transmitting the motor's power from the motor's rotating part to the other arm section.

[0019] Furthermore, the present invention is characterized in that the one arm portion is the arm portion on the base side.

[0020] Furthermore, the present invention is characterized in that the power transmission unit transmits the power of the motor from the rotating part of the motor to the other arm part by a plurality of gears.

[0021] Furthermore, in this invention, the power transmission section is The motor's rotating part includes a first gear fixed coaxially with the rotation axis of the rotating part, The other arm portion is provided with a second gear fixed coaxially with the pivot axis of the one and the other arm portions, A plurality of intermediate gears interposed between the first and second gears, It is fixed to the one arm portion, and each intermediate gear has a gear housing box in which each intermediate gear is accommodated so as to be rotatable about the rotation axis of each intermediate gear.

[0022] The present invention also relates to a substrate transfer robot in which a robot hand is provided so as to be relatively rotatable with respect to the arm portion at the one end, including other turning drive means for relatively turning the robot hand with respect to the arm portion at the one end, The other turning drive means, has a fixed portion provided on the arm portion at the one end and a rotating portion that rotates about a rotation axis substantially parallel to the extending direction of the arm portion at the one end with respect to the fixed portion, and another motor housed in the internal space of the arm portion at the one end, and includes another power transmission portion that is housed in the internal space of the arm portion at the one end, is interposed between the other motor and the robot hand, and transmits the power of the other motor from the rotating portion of the other motor to the robot hand.

[0023] The present invention also relates to a substrate transfer robot that transfers a semiconductor wafer as a substrate, characterized in that it transfers a semiconductor wafer between a container in which the semiconductor wafer is accommodated and a processing device that processes the semiconductor wafer.

Advantages of the Invention

[0024] According to the present invention, the robot arm is configured by connecting a plurality of arm portions in series. Each arm portion is hollow and formed by extending. The arm portion at one end is connected to the base, and the arm portion at the other end is connected to the robot hand. Two arm portions connected to each other are provided so as to be relatively rotatable with respect to each other. A turning drive means is provided at the joint between the two arm portions connected to each other. The turning drive means is provided for each joint. The turning drive means relatively turns the two arm portions connected to each other. As a result, the robot hand is moved, and the substrate held by the robot hand is moved.

[0025] The pivot drive mechanism includes a motor and a power transmission unit. The motor has a fixed part that is fixed to one arm and a rotating part that rotates relative to the fixed part. The power transmission unit is interposed between the motor and the other arm and transmits the motor's power from the rotating part of the motor to the other arm. This drives the one and the other arm to pivot relative to each other.

[0026] Since the motor is mounted on one arm, the distance from the joint between the two arm sections to the motor is shorter compared to when it is mounted on the base. Therefore, the configuration of the power transmission section can be simplified, and the accumulation of errors in the power transmission section can be prevented. This improves the positioning accuracy of the tip of the robot arm, and consequently, the positioning accuracy of the robot hand.

[0027] In a motor, the dimensions of the rotating part in the direction parallel to the axis of rotation are larger than the dimensions of the rotating part in the direction perpendicular to the axis of rotation. Taking this into consideration, the motor is positioned so that the rotating part rotates around an axis of rotation that is substantially parallel to the extending direction of one of the arms. Because the motor is positioned in this way, it is not necessary to make a part of one of the arms protrude in a direction perpendicular to its extending direction in order to secure space for the motor. Therefore, it is possible to prevent the one arm from becoming larger, and thereby prevent interference between the one arm and external objects.

[0028] Furthermore, according to the present invention, one of the arm sections is the arm section on the base side, and therefore the motor is provided on the arm section on the base side. Consequently, the mass of the arm section on the robot hand side can be reduced compared to the case where the motor is provided on the arm section on the robot hand side. This makes it possible to rotate the arm section on the robot hand side relative to the arm section on the base side with a small force.

[0029] Furthermore, according to the present invention, the power of the motor is transmitted from the rotating part of the motor to the other arm part by multiple gears. Therefore, the positioning accuracy of the tip of the robot arm can be improved compared to when a belt is used for power transmission.

[0030] Furthermore, according to the present invention, a first gear is fixed to the rotating part of the motor coaxially with the rotation axis of the rotating part, and a second gear is fixed to the other arm part coaxially with the pivot axes of both the one and the other arm parts, with a plurality of intermediate gears interposed between the first and second gears. In this way, the power of the motor is transmitted from the rotating part of the motor to the other arm part.

[0031] Each intermediate gear is housed in a gear housing so that it can rotate around its own axis of rotation. This gear housing is fixed to one of the arms. Therefore, the installation process is simplified compared to the case where each intermediate gear is individually aligned and attached to one of the arms.

[0032] Furthermore, according to the present invention, the robot hand is provided so as to be rotatable relative to the arm portion at one end. The other rotational drive means rotates the robot hand relative to the arm portion at one end. This makes it possible to change the posture of the robot hand.

[0033] The other rotational drive means includes another motor and another power transmission unit. The other motor has a fixed part that is fixed to the arm at one end and a rotating part that rotates relative to the fixed part. The other power transmission unit is interposed between the other motor and the robot hand and transmits the power of the other motor from the rotating part of the other motor to the robot hand. This drives the robot hand to rotate relative to the arm at one end.

[0034] Since the other motors are mounted on the arm at one end, the distance from the joint between the arm and the robot hand to the other motors is shorter compared to when they are mounted on the base. Therefore, the configuration of the other power transmission parts can be simplified, preventing the accumulation of errors in the other power transmission parts. This improves the accuracy of the robot hand's posture.

[0035] In other motors, the dimensions of the rotating part in the direction parallel to the axis of rotation are larger than the dimensions of the rotating part in the direction perpendicular to the axis of rotation. Taking this into consideration, other motors are arranged so that the rotating part rotates around an axis of rotation that is substantially parallel to the extending direction of the arm at one end. Because other motors are arranged in this way, it is not necessary to make a part of the arm at one end protrude in a direction perpendicular to its extending direction in order to secure space for the other motor. Therefore, it is possible to prevent the arm at one end from becoming larger, thereby preventing interference between the arm at one end and external objects.

[0036] Furthermore, according to the present invention, the substrate is a semiconductor wafer, and the substrate transport robot transports the semiconductor wafer between a container containing the semiconductor wafer and a processing device for processing the semiconductor wafer. In this case, the substrate transport robot is placed in a space that is maintained at a predetermined level of cleanliness. This space is made as small as possible in order to easily achieve the predetermined level of cleanliness, so interference problems are likely to occur when transporting semiconductor wafers. As mentioned above, interference is prevented with the substrate transport robot, so it can be suitably used for transporting semiconductor wafers. [Brief explanation of the drawing]

[0037] [Figure 1] This is a simplified cross-sectional view showing the configuration of a substrate transport robot 31, which is a first embodiment of the present invention. [Figure 2] This is a plan view of the substrate transport robot 31 as seen from above in Figure 1. [Figure 3] This is a cross-sectional view showing the configuration of the second power transmission unit 77. [Figure 4]This is a plan view showing a part of the semiconductor processing equipment 101 equipped with a substrate transport robot 31. [Figure 5] This is a cross-sectional view showing a portion of the semiconductor processing equipment 101. [Figure 6] This is a simplified cross-sectional view showing the configuration of a substrate transport robot 161, which is a second embodiment of the present invention. [Figure 7] This is a plan view of the substrate transport robot 161 as seen from above in Figure 6. [Figure 8] This is a simplified cross-sectional view showing the configuration of a substrate transport robot 171, which is a third embodiment of the present invention. [Figure 9] Figure 8 is a plan view of the substrate transport robot 171 as seen from above. [Figure 10] This is a simplified cross-sectional view showing the configuration of a substrate transport robot 181, which is a fourth embodiment of the present invention. [Figure 11] This is a plan view of the substrate transport robot 181 as seen from above in Figure 10. [Figure 12] This is a cross-sectional view showing the configuration of the second power transmission unit 186 in a substrate transport robot, which is a fifth embodiment of the present invention. [Figure 13] This diagram shows a simplified configuration of the first conventional technology, a substrate transport robot 1. [Figure 14] This diagram shows a simplified configuration of the second conventional technology, a substrate transport robot 16. [Modes for carrying out the invention]

[0038] Figure 1 is a simplified cross-sectional view showing the configuration of a substrate transport robot 31, which is a first embodiment of the present invention. Figure 2 is a plan view of the substrate transport robot 31 as seen from above in Figure 1. The substrate transport robot 31 of this embodiment is used to transport a semiconductor wafer (hereinafter simply referred to as "wafer") 32, which is a substrate.

[0039] The substrate transfer robot 31 is implemented using a SCARA (Selective Compliance Assembly Robot Arm) type horizontal articulated robot. The substrate transfer robot 31 includes a robot arm 33, a base 34 to which the base end 33a of the robot arm 33 is connected, and a robot hand 35 to which the tip end 33b of the robot arm 33 is connected and which grips the wafer 32.

[0040] The robot arm 33 has first and second arm sections 36 and 37. The first and second arm sections 36 and 37 are hollow. The first and second arm sections 36 and 37 are formed to extend, in other words, to be longitudinal. These first and second arm sections 36 and 37 are connected in a series. The first arm section 36, which is the arm section at one end in the connection direction, is connected to the base 34, and the second arm section 37, which is the arm section at the other end in the connection direction, is connected to the robot hand 35.

[0041] The robot hand 35 has a structure capable of gripping a wafer 32. Gripping a wafer 32 means holding or grasping the wafer 32. Holding methods include suction, receiving, and suspension, while grasping methods include pinching, pinching, and gripping. In this embodiment, the robot hand 35 grasps the wafer 32 by receiving. The robot hand 35 is formed in a plate shape, and its shape when viewed from the thickness direction is roughly Y-shaped. The robot hand 35 has a hand body 38 that is roughly U-shaped when viewed from the thickness direction, and an extended portion 39 that is connected to and extends from the hand body 38.

[0042] The first and second arm sections 36, 37 and the robot hand 35 are mounted horizontally. The base 34 and the first arm section 36 are mounted so as to be able to pivot relative to each other. More specifically, the upper part 34a of the base 34 is mounted so as to be able to pivot one end 36a of the first arm section 36 in the extending direction around a first pivot axis L11 extending in the vertical direction Z. The first and second arm sections 36, 37 are mounted so as to be able to pivot relative to each other. More specifically, the other end 36b of the first arm section 36 in the extending direction is mounted so as to be able to pivot one end 37a of the second arm section 37 in the extending direction around a second pivot axis L12 parallel to the first pivot axis L11. The second arm portion 37 and the robot hand 35 are provided so as to be able to pivot relative to each other. More specifically, the other end 37b of the second arm portion 37 in the extending direction is provided with one end 39a of the robot hand 35 in the extending direction, which is opposite to the side connected to the hand body 38, so as to be able to pivot about a third pivot axis L13 parallel to the first and second pivot axes L11 and L12. Pivot refers to a movement that changes the axial direction of each member relative to the other member between two members.

[0043] The first and second arm sections 36, 37 and the robot hand 35 are positioned offset from each other in the vertical direction Z. The second arm section 37 is positioned above the first arm section 36. This prevents interference between the first arm section 36 and the second arm section 37, and therefore the second arm section 37 can move to a position that overlaps the first arm section 36 in the vertical direction Z. The robot hand 35 is also positioned above the second arm section 37. This prevents interference between the second arm section 37 and the robot hand 35, and therefore the robot hand 35 can move to a position that overlaps the second arm section 37 in the vertical direction Z.

[0044] A first pivot drive means 41 is provided at the joint between the base 34 and the first arm portion 36. The first pivot drive means 41 pivots the base 34 and the first arm portion 36 relative to each other, and more specifically, it pivots the first arm portion 36 relative to the base 34 around the first pivot axis L11.

[0045] A second pivoting drive means 42, which is a pivoting drive means, is provided at the joint between the first and second arm portions 36 and 37. The second pivoting drive means 42 pivots the first and second arm portions 36 and 37 relative to each other, and more specifically, it pivots the second arm portion 37 relative to the first arm portion 36 around the second pivot axis L12.

[0046] A third pivoting drive means 43, which is another pivoting drive means, is provided at the joint between the second arm 37 and the robot hand 35. The third pivoting drive means 43 pivots the second arm 37 and the robot hand 35 relative to each other, and more specifically, pivots the robot hand 35 relative to the second arm 37 around the third pivot axis L13.

[0047] The first and second rotational drive means 41 and 42 rotate the first and second arm sections 36 and 37, respectively, causing the position of the tip 33b of the robot arm 33 to change within a horizontal virtual plane, and consequently the position of the robot hand 35 to change within a horizontal virtual plane. In addition, the third rotational drive means 43 rotates the robot hand 35, causing the posture of the robot hand 35 to change.

[0048] The base 34 has a base portion 46 fixed to a predetermined installation surface 45, a movable portion 47 provided so as to be displaceable in the vertical direction Z relative to the base portion 46, and a lifting drive means 48 that drives the movable portion 47 to displace in the vertical direction Z relative to the base portion 46 (see Figure 5). The movable portion 47 is formed in a cylindrical shape and is provided so as to extend its axis in the vertical direction Z. The upper part of the movable portion 47 becomes the upper part 34a of the base 34. The lifting drive means 48 drives the movable portion 47 to displace, thereby changing the position of the tip portion 33b of the robot arm 33 vertically, and consequently changing the position of the robot hand 35 vertically.

[0049] A cylindrical one-end communication hole 52 is formed in the portion of the first arm portion 36 near one end 36a in the extending direction, communicating with the internal space 51 of the first arm portion 36. The axis of the one-end communication hole 52 extends in a direction perpendicular to the extending direction of the first arm portion 36. A cylindrical other-end communication hole 53 is formed in the portion of the first arm portion 36 near the other end 36b in the extending direction, communicating with the internal space 51 of the first arm portion 36. The axis of the other-end communication hole 53 is parallel to the axis of the one-end communication hole 52. The other-end communication hole 53 is open to the opposite side from the one-end communication hole 52.

[0050] A cylindrical one-end communication hole 55 is formed in the portion of the second arm portion 37 near one end 37a in the extending direction, communicating with the internal space 54 of the second arm portion 37, and a cylindrical projection 56 is also formed that protrudes outward. The axis of the one-end communication hole 55 extends in a direction perpendicular to the extending direction of the second arm portion 37. The inner hole 57 of the projection 56 is coaxial with the one-end communication hole 55 and communicates with the internal space 54 of the second arm portion 37 via the one-end communication hole 55. A cylindrical other-end communication hole 58 is formed in the portion of the second arm portion 37 near the other end 37b in the extending direction, communicating with the internal space 54 of the second arm portion 37. The axis of the other-end communication hole 58 is parallel to the axis of the one-end communication hole 55. The other-end communication hole 58 is open facing the opposite side from the one-end communication hole 55.

[0051] The extended portion 39 of the robot hand 35 is hollow. A cylindrical one-end communication hole 62 is formed in the portion of the extended portion 39 near one end 39a in the direction of extension, communicating with the internal space 61 of the extended portion 39, and a cylindrical projection 63 that protrudes outward is also formed. The axis of the one-end communication hole 62 extends in a direction parallel to the thickness direction of the robot hand 35. The inner hole 64 of the projection 63 is coaxial with the one-end communication hole 62 and communicates with the internal space 61 of the extended portion 39 via the one-end communication hole 62.

[0052] The upper part of the movable part 47, which is the upper part 34a of the base 34, is loosely inserted coaxially through the communication hole 52 at one end of the first arm part 36, thereby connecting the base 34 and the first arm part 36 so that they can pivot relative to each other around the first pivot axis L11. The axes of the communication hole 52 at one end and the movable part 47 form a straight line common to the first pivot axis L11. A bearing means is interposed between the upper part 34a of the base 34 and the forming part 52a of the communication hole 52 at one end of the first arm part 36, thereby enabling smooth rotation of the first arm part 36 relative to the base 34.

[0053] The protruding portion 56 of the second arm portion 37 is loosely inserted coaxially through the communication hole 53 at the other end of the first arm portion 36, thereby connecting the first and second arm portions 36 and 37 so that they can pivot relative to each other around the second pivot axis L12. The axes of the communication hole 53 at the other end and the protruding portion 56 form a straight line common to the second pivot axis L12. A bearing means is interposed between the protruding portion 56 of the second arm portion 37 and the forming portion 53a of the communication hole 53 at the other end of the first arm portion 36, thereby enabling smooth rotation of the second arm portion 37 relative to the first arm portion 36.

[0054] The protruding portion 63 of the extended portion 39 of the robot hand 35 is loosely inserted coaxially through the communication hole 58 at the other end of the second arm portion 37, thereby connecting the second arm portion 37 and the robot hand 35 so that they can pivot relative to each other around the third pivot axis L13. The axes of the communication hole 58 and the protruding portion 63 are aligned in a straight line with the third pivot axis L13. A bearing means is interposed between the protruding portion 63 of the extended portion 39 of the robot hand 35 and the forming portion 58a of the communication hole 58 at the other end of the second arm portion 37, thereby enabling smooth rotation of the robot hand 35 relative to the second arm portion 37.

[0055] The first rotation drive means 41 includes a first motor 71 and a first power transmission unit 72. The first motor 71 and the first power transmission unit 72 are housed in the internal space 51 of the first arm 36. Therefore, even if dust is generated from the first motor 71 and the first power transmission unit 72, it is possible to prevent this dust from spreading around the substrate transport robot 31, thereby preventing a decrease in the cleanliness of the area around the substrate transport robot 31.

[0056] The first motor 71 has a fixed part 73 that is fixed to the first arm 36, and a rotating part 74 that rotates around a rotation axis L21 substantially parallel to the extending direction of the first arm 36 relative to the fixed part 73. The first motor 71 is implemented by an electric motor, specifically a servo motor. The first motor 71 is provided with a first encoder 75 that detects the amount of rotation of the rotating part 74 relative to the fixed part 73. The first power transmission unit 72 is interposed between the first motor 71 and the base 34 and transmits the power of the first motor 71 from the rotating part 74 of the first motor 71 to the base 34. The base 34 and the first arm 36 are driven to rotate relative to each other by this first pivoting drive means 41.

[0057] The second rotation drive means 42 includes a second motor 76, which is a motor, and a second power transmission unit 77, which is a power transmission unit. The second motor 76 and the second power transmission unit 77 are housed in the internal space 51 of the first arm 36. Therefore, even if dust is generated from the second motor 76 and the second power transmission unit 77, it is possible to prevent this dust from spreading around the substrate transport robot 31, thereby preventing a decrease in the cleanliness of the area around the substrate transport robot 31.

[0058] The second motor 76 has a fixed part 78 that is fixed to the first arm 36, and a rotating part 79 that rotates around a rotation axis L22 substantially parallel to the extending direction of the first arm 36 relative to the fixed part 78. The second motor 76 is implemented by an electric motor, specifically a servo motor. The second motor 76 is provided with a second encoder 80 that detects the amount of rotation of the rotating part 79 relative to the fixed part 78. The second power transmission unit 77 is interposed between the second motor 76 and the second arm 37 and transmits the power of the second motor 76 from the rotating part 79 of the second motor 76 to the second arm 37. The first and second arm sections 36 and 37 are driven to rotate relative to each other by this second pivoting drive means 42.

[0059] The third rotation drive means 43 includes a third motor 81, which is another motor, and a third power transmission unit 82, which is another power transmission unit. The third motor 81 and the third power transmission unit 82 are housed in the internal space 54 of the second arm 37. Therefore, even if dust is generated from the third motor 81 and the third power transmission unit 82, it is possible to prevent this dust from spreading around the substrate transport robot 31, thereby preventing a decrease in the cleanliness of the area around the substrate transport robot 31.

[0060] The third motor 81 has a fixed part 83 that is fixed to the second arm 37, and a rotating part 84 that rotates around a rotation axis L23 substantially parallel to the extending direction of the second arm 37 relative to the fixed part 83. The third motor 81 is implemented by an electric motor, specifically a servo motor. The third motor 81 is provided with a third encoder 85 that detects the amount of rotation of the rotating part 84 relative to the fixed part 83. The third power transmission unit 82 is interposed between the third motor 81 and the robot hand 35 and transmits the power of the third motor 81 from the rotating part 84 of the third motor 81 to the robot hand 35. The second arm 37 and the robot hand 35 are driven to rotate relative to each other by this third rotation drive means 43.

[0061] The lifting drive mechanism 48 includes a fourth motor and a fourth power transmission unit. The fourth motor has a fixed part fixed to the base 46 of the base 34 and a rotating part that rotates relative to the fixed part. The fourth motor is implemented by an electric motor, specifically a servo motor. The fourth motor is provided with a fourth encoder that detects the amount of rotation of the rotating part relative to the fixed part. The fourth power transmission unit is interposed between the fourth motor and the movable part 47 of the base 34 and transmits the power of the fourth motor from the rotating part of the fourth motor to the movable part 47 of the base 34. The fourth power transmission unit converts the rotational motion of the rotating part of the fourth motor into linear motion in the vertical direction Z.

[0062] The first to fourth power transmission sections 72, 77, and 82 also function as reduction gears. Therefore, there is no need to provide a separate reduction gear, which reduces the number of parts.

[0063] Figure 3 is a cross-sectional view showing the configuration of the second power transmission unit 77. In Figure 3, the configuration of the second power transmission unit 77 is shown in a simplified manner to avoid complexity. Since the configurations of the first to third power transmission units 72, 77, and 82 are similar, only the configuration of the second power transmission unit 77 will be explained, and the explanations of the first and third power transmission units 72 and 82 will be omitted to avoid duplication.

[0064] The second power transmission unit 77 transmits power from the second motor 76 to the protruding portion 56 of the second arm portion 37 from the rotating portion 79 of the second motor 76 via a plurality of gears 91, 92, and 93. Therefore, compared to the case where a belt is used for power transmission, the positioning accuracy of the tip portion 33b of the robot arm 33 can be improved. In addition, since there is no deformation like that of a belt, vibration due to sudden stops is prevented, thereby enabling faster operation of the robot arm 33.

[0065] More specifically, the second power transmission unit 77 includes a first gear 91 fixed to the rotating part 79 of the second motor 76 coaxially with the rotation axis L22 of the rotating part 79, a second gear 92 fixed to the protruding part 56 of the second arm part 37 coaxially with the second pivot axis L12, a plurality of intermediate gears 93 interposed between the first and second gears 91 and 92, and a gearbox 94 fixed to the first arm part 36, which is a gear housing that houses each intermediate gear 93 in a state where it can rotate around the rotation axis of each intermediate gear 93.

[0066] In this configuration, the first gear 91 is fixed to the rotating part 79 of the second motor 76 coaxially with the rotation axis L22 of the rotating part 79, and the second gear 92 is fixed to the protruding part 56 of the second arm part 37 coaxially with the second pivot axis L12. Multiple intermediate gears 93 are interposed between the first and second gears 91 and 92. As a result, the power of the second motor 76 is transmitted from the rotating part 79 of the second motor 76 to the protruding part 56 of the second arm part 37.

[0067] Each intermediate gear 93 is housed in the gearbox 94 in a state where it can rotate around its own axis of rotation. This gearbox 94 is fixed to the first arm 36. Therefore, the installation work can be simplified compared to the case where each intermediate gear 93 is individually aligned and attached to the first arm 36.

[0068] Of the multiple gears 91 to 93, two gears that mesh with each other are implemented as bevel gears. Therefore, the rotation of the rotating part 79 of the second motor 76 around the rotation axis L22 or a rotation axis parallel to this rotation axis L22 can be converted into rotation around the second pivot axis L12 or a rotation axis parallel to this second pivot axis L12, thereby enabling the power of the second motor 76 to be transmitted from the rotating part 79 of the second motor 76 to the protruding part 56 of the second arm part 37. In this embodiment, the first gear 91 and the intermediate gear 93a that meshes with the first gear 91 among the intermediate gears 93 are implemented as bevel gears.

[0069] Figure 4 is a plan view showing a part of the semiconductor processing equipment 101 equipped with a substrate transport robot 31. Figure 5 is a cross-sectional view showing a section of the semiconductor processing equipment 101. In Figures 4 and 5, one example of the operating state of the substrate transport robot 31 is shown with a solid line, and other examples of the operating state are shown with a dashed line. The semiconductor processing equipment 101 is equipment for processing wafers 32.

[0070] The semiconductor processing equipment 101 is predetermined, for example, by SEMI (Semiconductor Equipment and Materials International) standards. In this case, the hoop 102 and hoop opener 118 described later will conform to specifications such as E47.1, E15.1, E57, E62, E63, and E84 of the SEMI standards. The configuration of the semiconductor processing equipment 101 may also be outside of the SEMI standards.

[0071] The wafers 32 before and after processing are housed in a container called a hoop 102 (Front Opening Unified Pod, abbreviated as FOUP) (hereinafter referred to as "hoop") 102. The hoop 102 is a substrate container for a mini-environment in a clean environment, relating to local cleanup technology. Multiple wafers 32 are housed in the hoop 102. Each wafer 32 housed in the hoop 102 is arranged horizontally with equal spacing in the vertical Z direction.

[0072] The hoop 102 has a hoop body 103, which is the container body, and a hoop-side door 104, which is a container-side door that is detachably attached to the hoop body 103. The hoop body 103 is formed in a substantially box shape, and an internal hoop space 105, which is a wafer storage space, is formed therein. The internal hoop space 105 is open on one side. The internal hoop space 105 is closed when the hoop-side door 104 is attached to the hoop body 103, and the internal hoop space 105 is opened when the hoop-side door 104 is detached from the hoop body 103.

[0073] The semiconductor processing equipment 101 includes a wafer processing device 106 for processing the wafer 32, and a wafer transport device 107, which is an Equipment Front End Module (EFEM) for transporting the wafer 32 between the hoop 102 and the wafer processing device 106. Processes such as heat treatment, impurity introduction, thin film formation, lithography, cleaning, and planarization are envisioned for the wafer 32. The wafer processing device 106 may perform processes other than those described above.

[0074] The wafer processing apparatus 106 includes a processing space forming unit 112 in which a processing space 111 is formed, a processing apparatus main body positioned in the processing space 111 for processing the wafer 32 within the processing space 111, and a processing space adjustment device for adjusting the atmospheric gas filling the processing space 111. The processing space adjustment device is implemented by a fan filter unit or the like.

[0075] The wafer transfer apparatus 107 includes a preparation space forming unit 117 in which a preparation space 116 is formed, a substrate transfer robot 31 positioned in the preparation space 116, a hoop opener 118 which is an opening and closing device for opening and closing the hoop 102, an aligner 119 positioned in the preparation space 116 to adjust the orientation of the wafer 32, and a preparation space adjustment device 120 which adjusts the atmospheric gas filling the preparation space 116. The preparation space adjustment device 120 is implemented by a fan filter unit or the like.

[0076] The processing space 111 and the preparation space 116 are filled with a highly clean atmospheric gas. The processing space 111 and the preparation space 116 are spaces where contamination control is performed, and the amount of suspended fine particles in the air is controlled to below a limited cleanliness level, and environmental conditions such as temperature, humidity, and pressure are also controlled as needed. In this embodiment, the processing space 111 and the preparation space 116 are maintained at a cleanliness level that does not adversely affect the processing of the wafer 32. As a cleanliness level, for example, CLASS 1 as defined by the International Organization for Standardization (ISO) is adopted. It will be done.

[0077] The processing space forming unit 112 and the preparation space forming unit 117 are arranged side by side in the front-to-back direction X, which is perpendicular to the vertical direction Z. Hereinafter, the direction from the processing space forming unit 112 toward the preparation space forming unit 117 in the front-to-back direction X will be referred to as the front X1, and the opposite direction will be referred to as the rear X2. The direction perpendicular to the vertical direction Z and the front-to-back direction X will be referred to as the left-to-right direction Y.

[0078] The preparation space forming section 117 is formed in the shape of a rectangular box, and a rectangular preparation space 116 is formed therein. The preparation space forming section 117 has a front wall 121 and a rear wall 122. The front wall 121 and the rear wall 122 are spaced apart in the front-to-back direction X. The rear wall 122 is positioned X2 behind the front wall 121 and separates the preparation space 116 from the processing space 111.

[0079] A front-side opening 131 is formed in the front wall 121, penetrating in the front-to-back direction X, which is the thickness direction of the front wall 121. The front-side opening 131 is formed so that a wafer 32 can pass through it. The wafer 32 is moved from the hoop inner space 105 to the preparation space 116, or from the preparation space 116 to the hoop inner space 105, through such a front-side opening 131. In this embodiment, four front-side openings 131 are provided. Each front-side opening 131 is arranged at equal intervals in the left-to-right direction Y.

[0080] A rear-side opening 132 is formed in the rear wall 122, penetrating in the front-to-back direction X, which is the thickness direction of the rear wall 122. The rear-side opening 132 is formed so that the wafer 32 can pass through it. The wafer 32 is moved from the preparation space 116 to the processing space 111, or from the processing space 111 to the preparation space 116, through such a rear-side opening 132. In this embodiment, two rear-side openings 132 are provided. Each rear-side opening 132 is spaced apart in the left-to-right direction Y.

[0081] The hoop opener 118 is positioned on the front X1 side of the preparation space forming section 117. The hoop opener 118 has a front plate 141 that forms part of the front wall 121 of the preparation space forming section 117 and on which the front opening 131 is formed, an opener-side door 142 that is detachably provided to the front plate 141, a hoop support section 143 that is positioned X1 in front of the preparation space 116 and supports the hoop 102 from below, and a door opening and closing mechanism 144 that opens and closes the opener-side door 142 and the hoop-side door 104. When the opener-side door 142 is attached to the front plate 141, the front opening 131 is closed, and when the opener-side door 142 is detached from the front plate 141, the front opening 131 is opened.

[0082] The hoop 102 is positioned and installed on the hoop support section 143. When the hoop 102 is installed on the hoop support section 143, the opening 103a of the hoop body 103 and the opening 141a of the front plate 141 are in contact all around. Therefore, in the installed state, even if the opener-side door 142 and the hoop-side door 104 are detached from their respective openings 141a and 103a, outside air is prevented from entering the hoop interior space 105 and the preparation space 116.

[0083] The door opening / closing mechanism 144 directly or indirectly grips the opener-side door 142 and the hoop-side door 104. The door opening / closing mechanism 144 moves each door 142 and 104 between the mounted position and the open position. In the mounted position, each door 142 and 104 is mounted to each opening 141a and 103a, respectively, thereby preventing communication between the hoop internal space 105 and the preparation space 116. In the open position, each door 142 and 104 is detached from each opening 141a and 103a, thereby allowing communication between the hoop internal space 105 and the preparation space 116. In this open position, each door 142 and 104 is positioned rear X2 and downward Z2 within the preparation space 116 relative to each opening 141a and 103a. The preparation space 116 is provided with a movable area 145 for moving each door 142, 104 between the installed position and the open position.

[0084] In this embodiment, four hoop openers 118 are provided. Each hoop opener 118 is arranged at equal intervals in the left-right direction Y. Each hoop opener 118 is configured to be individually operable. Figure 4 shows the state in which the leftmost front opening 131 is open, and the remaining front openings 131, excluding the leftmost front opening, are closed.

[0085] The preparation space forming section 117 further has a bottom wall section 126. The lower ends of the front wall section 121 and the rear wall section 122 are connected to the bottom wall section 126. The aligner 119 and the substrate transport robot 31 are fixed to this bottom wall section 126. The aligner 119 and the substrate transport robot 31 are spaced apart in the left-right direction Y.

[0086] The aligner 119 has a holding portion for holding the wafer 32. The aligner 119 rotates the wafer 32 held by the holding portion, thereby adjusting the orientation of the wafer 32 so that the notches or orientation flats formed on the wafer 32 face a predetermined direction.

[0087] The substrate transport robot 31 is positioned in the preparation space 116, closer to the rear wall 122. Furthermore, the substrate transport robot 31 is positioned centrally between the hoop opener 118 at one end of the left-right direction Y and the hoop opener 118 at the other end of the left-right direction Y. The base portion 46 of the base 34 of the substrate transport robot 31 is fixed to the bottom wall portion 126 of the preparation space forming section 117. The upper surface of the bottom wall portion 126 becomes the predetermined installation surface 45.

[0088] The substrate transport robot 31 further includes a controller 151. The controller 151 controls the first to third rotation drive means 41 to 43 and the lifting drive means 48 based on a predetermined operation program or a movement command input by the user and detection results from the first to fourth encoders 75, 80, and 85, thereby moving the robot hand 35. The controller 151 has a memory circuit in which a predetermined program is stored, an arithmetic circuit that calculates the program stored in the memory circuit, and an output means that provides signals indicating the calculation results of the arithmetic circuit to the first to third rotation drive means 41 to 43 and the lifting drive means 48. The memory circuit is implemented by RAM (Random Access Memory) and ROM (Read Only Memory), and the arithmetic circuit is implemented by a CPU (Central Processing Unit).

[0089] In the substrate transfer robot 31, the first to third rotation drive means 41 to 43 and the lifting drive means 48 are controlled by the controller 151, thereby moving the robot hand 35 to any position in the forward / backward direction X, left / right direction Y, and up / down direction Z within its range of motion. By moving the robot hand 35 in this way, the wafer 32 that is grasped by the robot hand 35 can be moved.

[0090] In such a semiconductor processing facility 101, the substrate transfer robot 31 primarily moves the wafer 32 in the preparation space 116. The substrate transfer robot 31 removes the wafer 32 from the hoop space 105 through the front opening 131 and inserts the wafer 32 into the hoop space 105 through the front opening 131. The substrate transfer robot 31 also removes the wafer 32 from the processing space 111 through the rear opening 132 and inserts the wafer 32 into the processing space 111 through the rear opening 132.

[0091] When transporting a wafer 32 from the hoop 102 to the wafer processing device 106, the substrate transport robot 31 first moves its robot hand 35 into the hoop's internal space 105 through the front opening 131. Then, the robot hand 35 grasps the wafer 32 that is placed in the wafer storage position within the hoop's internal space 105. Next, with the wafer 32 still grasped by the robot hand 35, the robot hand 35 moves through the preparation space 116 and then through the rear opening 132 into the processing space 111. Finally, the robot hand 35 places the wafer 32, which is being grasped by the robot hand 35, onto the wafer placement position 156 in the processing space 111.

[0092] Furthermore, when the substrate transfer robot 31 transfers the wafer 32 from the wafer processing apparatus 106 to the hoop 102, it first moves the robot hand 35 into the processing space 111 through the rear opening 132. Then, the robot hand 35 grasps the wafer 32 that is placed on the wafer placement position 156 in the processing space 111. Next, with the wafer 32 being grasped by the robot hand 35, the robot hand 35 moves through the preparation space 116 and then through the front opening 131 into the hoop inner space 105. Then, the wafer 32 being grasped by the robot hand 35 is placed on the wafer storage position in the hoop inner space 105.

[0093] When transporting wafers 32 from hoop 102 to wafer processing device 106, the substrate transport robot 31 first transports the wafers 32 removed from hoop 102 to aligner 119. Once transported to aligner 119, the wafers 32 are oriented by aligner 119. Therefore, wafers 32 can be inserted into wafer processing device 106 with their orientation adjusted, thereby ensuring that each wafer 32 is oriented identically during processing by wafer processing device 106.

[0094] According to this embodiment, the first motor 71 is arranged such that the rotating part 74 rotates around a rotation axis L21 that is substantially parallel to the extending direction of the first arm part 36. The first motor 71 is arranged as described above, taking into consideration that the dimension of the rotating part 74 in the direction parallel to the rotation axis L21 is larger than the dimension of the rotating part 74 in the direction perpendicular to the rotation axis L21. Therefore, in order to secure the space for the first motor 71, it is not necessary to make a part of the first arm part 36 protrude in a direction perpendicular to its extending direction. Consequently, the size of the first arm part 36 can be prevented, and thereby interference between the first arm part 36 and external objects can be prevented.

[0095] Furthermore, the second motor 76 is positioned such that the rotating part 79 rotates around a rotation axis L22 that is substantially parallel to the extending direction of the first arm 36. The second motor 76 is positioned as described above, taking into consideration that the dimension of the rotating part 79 in the direction parallel to the rotation axis L22 is larger than the dimension of the rotating part 79 in the direction perpendicular to the rotation axis L22. Therefore, in order to secure space for the second motor 76, it is not necessary to make a part of the first arm 36 protrude in a direction perpendicular to its extending direction. Consequently, the size of the first arm 36 can be prevented, thereby preventing interference between the first arm 36 and external objects.

[0096] Furthermore, the third motor 81 is positioned such that the rotating part 84 rotates around a rotation axis L23 that is substantially parallel to the extending direction of the second arm part 37. The third motor 81 is positioned as described above, taking into consideration that the dimension of the rotating part 84 in the direction parallel to the rotation axis L23 is larger than the dimension of the rotating part 84 in the direction perpendicular to the rotation axis L23. Therefore, in order to secure space for the third motor 81, it is not necessary to make a part of the second arm part 37 protrude in a direction perpendicular to its extending direction. Consequently, the size of the second arm part 37 can be prevented, thereby preventing interference between the second arm part 37 and external objects.

[0097] In this embodiment, the substrate transfer robot 31 is used in the semiconductor processing equipment 101 as described above. In this case, external objects include the front wall 121 and the back wall 122, as well as the hoop opener 118. The preparation space 116 is made as small as possible in order to easily achieve a predetermined level of cleanliness, so interference problems are likely to occur when transferring the wafer 32. As described above, the substrate transfer robot 31 of this embodiment prevents interference and can therefore be suitably used for transferring wafers 32 in the semiconductor processing equipment 101.

[0098] Furthermore, according to this embodiment, since the second motor 76 is provided on the first arm portion 36, the distance from the joint between the first and second arm portions 36 and 37 to the second motor 76 is shorter compared to the case where it is provided on the base 34. Therefore, the configuration of the second power transmission unit 77 can be simplified, and the accumulation of errors in the second power transmission unit 77 can be prevented. This improves the positioning accuracy of the tip portion 33b of the robot arm 33, and consequently improves the positioning accuracy of the robot hand 35. It also reduces hysteresis.

[0099] Furthermore, since the third motor 81 is provided on the second arm 37, the distance from the joint between the second arm 37 and the robot hand 35 to the third motor 81 is shorter compared to when it is provided on the base 34. Therefore, the configuration of the third power transmission unit 82 can be simplified, and the accumulation of errors in the third power transmission unit 82 can be prevented. This improves the accuracy of the posture of the robot hand 35 and reduces hysteresis.

[0100] In this embodiment, the substrate transfer robot 31 is used in the semiconductor processing equipment 101 as described above, and transfers the wafer 32 between the hoop 102 and the wafer processing equipment 106. In this case, it is necessary to increase the positioning accuracy and posture accuracy of the robot hand 35. For example, when the robot hand 35 enters the hoop 102, it is necessary to prevent the robot hand 35 from unintentionally contacting the wafer 32 inside the hoop 102 and damaging the wafer 32. As described above, the positioning accuracy and posture accuracy of the robot hand 35 are improved in the substrate transfer robot 31 of this embodiment, so it can be suitably used for transferring wafers 32 in the semiconductor processing equipment 101.

[0101] Furthermore, according to this embodiment, the second motor 76 is provided on the first arm portion 36, which is the arm portion on the base 34 side of the first and second arm portions 36 and 37. Therefore, the mass of the second arm portion 37 can be reduced compared to the case where the second motor 76 is provided on the second arm portion 37, which is the arm portion on the robot hand 35 side. As a result, the second arm portion 37 can be rotated relative to the first arm portion 36 with less force.

[0102] Figure 6 is a simplified cross-sectional view showing the configuration of a substrate transport robot 161, which is a second embodiment of the present invention. Figure 7 is a plan view of the substrate transport robot 161 as seen from above in Figure 6. The substrate transport robot 161 of this embodiment is similar to the substrate transport robot 31 of the first embodiment described above, so the same reference numerals are used for corresponding parts, and only the differences will be described.

[0103] A cylindrical other-end communication hole 162 is formed in the portion of the first arm portion 36 that is closer to the other end 36b in the extending direction, and a cylindrical projection 163 that protrudes outward is also formed. The axis of the other-end communication hole 162 is parallel to the axis of the one-end communication hole 52 of the first arm portion 36. The inner hole 164 of the projection 163 is coaxial with the other-end communication hole 162 and communicates with the internal space 51 of the first arm portion 36 via the other-end communication hole 162.

[0104] A cylindrical one-end communication hole 165 is formed in the portion of the second arm portion 37 near one end 37a in the extending direction, communicating with the internal space 54 of the second arm portion 37. The axis of the one-end communication hole 165 extends in a direction perpendicular to the extending direction of the second arm portion 37.

[0105] The protruding portion 163 of the first arm portion 36 is loosely inserted coaxially through the communication hole 165 at one end of the second arm portion 37, thereby connecting the first and second arm portions 36 and 37 so that they can pivot relative to each other around the second pivot axis L12. The axes of the communication hole 165 at one end and the protruding portion 163 form a straight line common to the second pivot axis L12. A bearing means is interposed between the protruding portion 163 of the first arm portion 36 and the forming portion 165a of the communication hole 165 at one end of the second arm portion 37, thereby enabling smooth rotation of the second arm portion 37 relative to the first arm portion 36.

[0106] The second motor 76 has a fixed part 78 that is fixed to the second arm part 37, and a rotating part 79 that rotates around a rotation axis L22 that is substantially parallel to the extending direction of the second arm part 37 relative to the fixed part 78. The second power transmission part 77 is interposed between the second motor 76 and the first arm part 36 and transmits the power of the second motor 76 from the rotating part 79 of the second motor 76 to the first arm part 36. The second pivot drive means 166 is configured including the second motor 76 and the second power transmission part 77. The first and second arm parts 36 and 37 are pivotally driven relative to each other by this second pivot drive means 166.

[0107] The second motor 76 and the second power transmission unit 77 are housed in the internal space 54 of the second arm unit 37. In this case as well, similar to the first embodiment described above, it is possible to prevent a decrease in the cleanliness of the area around the substrate transport robot 161.

[0108] According to this embodiment, the second motor 76 is positioned such that the rotating part 79 rotates around a rotation axis L22 that is substantially parallel to the extending direction of the second arm part 37. Therefore, in order to secure space for the second motor 76, it is not necessary to make a part of the second arm part 37 protrude in a direction perpendicular to its extending direction. Consequently, the size of the second arm part 37 can be prevented, thereby preventing interference between the second arm part 37 and external objects.

[0109] Furthermore, according to this embodiment, since the second motor 76 is provided on the second arm portion 37, the distance from the joint between the first and second arm portions 36, 37 to the second motor 76 is shorter compared to the case where it is provided on the base 34. Therefore, the configuration of the second power transmission unit 77 can be simplified, and the accumulation of errors in the second power transmission unit 77 can be prevented. As a result, similar to the first embodiment described above, the positioning accuracy of the tip portion 33b of the robot arm 33 can be improved, and consequently, the positioning accuracy of the robot hand 35 can be improved. Hysteresis can also be reduced.

[0110] Figure 8 is a simplified cross-sectional view showing the configuration of a substrate transport robot 171, which is a third embodiment of the present invention. Figure 9 is a plan view of the substrate transport robot 171 as seen from above in Figure 8. The substrate transport robot 171 of this embodiment is similar to the substrate transport robot 31 of the first embodiment described above, so the same reference numerals are used for corresponding parts, and only the differences will be described.

[0111] A cylindrical one-end communication hole 172 is formed in the portion of the first arm portion 36 near one end 36a in the extending direction, communicating with the internal space 51 of the first arm portion 36, and a cylindrical projection 173 is formed that protrudes outward. The axis of the one-end communication hole 172 is perpendicular to the extending direction of the first arm portion 36. The inner hole 174 of the projection 173 is coaxial with the one-end communication hole 172 and communicates with the internal space 51 of the first arm portion 36 via the one-end communication hole 172.

[0112] A cylindrical communication hole 176 is formed in the upper part of the movable part 47, which is the upper part 34a of the base 34, and communicates with the inner hole 175 of the movable part 47. The communication hole 176 is coaxial with the inner hole 175 of the movable part 47. The communication hole 176 is open to the upward.

[0113] The protruding portion 173 of the first arm portion 36 is loosely inserted coaxially through the communication hole 176 of the movable portion 47, thereby connecting the base 34 and the first arm portion 36 so that they can pivot relative to each other around the first pivot axis L11. The axes of the communication hole 176 and the protruding portion 173 form a straight line common to the first pivot axis L11. A bearing means is interposed between the protruding portion 173 of the first arm portion 36 and the formed portion 176a of the communication hole 176 of the movable portion 47, thereby enabling smooth rotation of the first arm portion 36 relative to the base 34.

[0114] The first motor 71 has a fixed part 73 that is fixed to the movable part 47 of the base 34, and a rotating part 74 that rotates around a rotation axis L21 parallel to the first pivot axis L11 relative to the fixed part 73. The first power transmission part 72 is interposed between the first motor 71 and the first arm part 36 and transmits the power of the first motor 71 from the rotating part 74 of the first motor 71 to the first arm part 36. The first pivot drive means 177 is formed by including the first motor 71 and the first power transmission part 72. The base 34 and the first arm part 36 are pivotally driven relative to each other by this first pivot drive means 177.

[0115] The first motor 71 and the first power transmission unit 72 are housed in the inner hole 175 of the movable part 47 of the base 34. In this case as well, similar to the first embodiment described above, it is possible to prevent a decrease in the cleanliness of the area around the substrate transport robot 171.

[0116] Figure 10 is a simplified cross-sectional view showing the configuration of a substrate transport robot 181, which is a fourth embodiment of the present invention. Figure 11 is a plan view of the substrate transport robot 181 as seen from above in Figure 10. The substrate transport robot 181 of this embodiment is similar to the substrate transport robots 31 of the first to third embodiments described above, so the same reference numerals are used for corresponding parts, and only the differences will be explained.

[0117] The substrate transport robot 181 of this embodiment basically has the same configuration as the substrate transport robot 31 of the first embodiment described above, the joint between the first and second arm sections 36 and 37 has the same configuration as the substrate transport robot 161 of the second embodiment described above, and the joint between the base 34 and the first arm section 36 has the same configuration as the substrate transport robot 171 of the third embodiment described above.

[0118] Figure 12 is a cross-sectional view showing the configuration of the second power transmission unit 186 in a substrate transport robot, which is a fifth embodiment of the present invention. In Figure 12, the configuration of the second power transmission unit 186 is shown in a simplified manner to avoid complexity. The substrate transport robot of this embodiment is similar to the substrate transport robot 31 of the first embodiment described above, so the same reference numerals are used for corresponding parts, and only the differences will be described.

[0119] In this embodiment, the second gear 92 and the intermediate gear 93b that meshes with the second gear 92 among the intermediate gears 93 are realized by bevel gears. In this embodiment as well, similar to the first embodiment described above, the power of the second motor 76 can be transmitted from the rotating part 79 of the second motor 76 to the protruding part 56 of the second arm part 37.

[0120] In this embodiment, the second gear 92 and the intermediate gear 93b that meshes with the second gear 92 among the intermediate gears 93 are realized by bevel gears. However, instead, two intermediate gears that mesh with each other among the intermediate gears 93 may be realized by bevel gears. Even in this case, the power of the second motor 76 can be transmitted from the rotating part 79 of the second motor 76 to the protruding part 56 of the second arm part 37.

[0121] The embodiments described above are merely illustrative of the present invention, and the configuration can be modified within the scope of the invention. For example, the robot arm 33 may be composed of multiple arm sections, and therefore the number of arm sections may not be limited to two, but may be three or more. In this case, two arm sections connected to each other are provided so as to be able to pivot relative to each other, and a pivot drive means is provided at each joint between the two arm sections connected to each other.

[0122] In the second power transmission section 77, two of the gears 91 to 93 that mesh with each other may be implemented by worm gears instead of bevel gears.

[0123] The second power transmission unit 77 may transmit power from the second motor 76 to the protruding portion 56 of the second arm portion 37 via a belt. In this case, the belt may be configured to convert the rotation of the second motor 76's rotating portion 79 around the rotation axis L22 or a rotation axis parallel to this rotation axis L22 into rotation around the second pivot axis L12 or a rotation axis parallel to this second pivot axis L12.

[0124] Multiple robot hands may be provided on the second arm 37. In this case, the number of wafers 32 that can be transported at one time can be increased, improving work efficiency. Each robot hand is provided so as to be able to rotate relative to the second arm 37. Other rotational drive means are provided for each robot hand, and each robot hand is individually rotated by each other rotational drive means. Each robot hand is offset in the vertical Z direction, thereby preventing interference between each robot hand even when each robot hand is rotated individually.

[0125] The substrate transfer robot can also be used in substrate processing equipment for processing substrates other than wafers 32. The substrate transfer robot transports substrates from a substrate container to a substrate processing device via a preparation space with a controlled atmospheric gas, and from the substrate processing device back to the substrate container via the preparation space. The substrate may be a semiconductor substrate or a glass substrate used in liquid crystal display devices, etc. The substrate transfer robot is preferably used in a cleanroom.

[0126] In this invention, substantially parallel includes parallel. [Explanation of Symbols]

[0127] 31,161,171,181 PCB transport robots 33 Semiconductor wafers 34 base 35 Robot Hand 36 First Arm Section 37 Second Arm Section 41,177 First Swivel Drive Means 42,166 Second pivot drive means 43 Third Swivel Drive Means 71 First Motor 72 First power transmission section 76 Second Motor 77,186 Second power transmission section 81 Third Motor 82 Third power transmission section

Claims

1. A substrate transport device, A first wall and a second wall are arranged with a gap between them in the first direction, Including a substrate transport robot, The aforementioned substrate transport robot is Base and, A robotic hand that grips the circuit board, A robot arm having an extending first arm portion and a second arm portion, the first arm portion and the second arm portion being connected to each other, the first arm portion being pivotably connected to the base, the second arm portion being pivotably connected to the robot hand, and the first arm portion and the second arm portion being connected to each other and provided to be pivotable relative to each other, The robot hand has a first arm portion, a second arm portion, and a drive means for rotating the robot hand relative to each other, The substrate transport robot is positioned closer to the first wall, Viewed from above, at least one end of the first arm portion and the second arm portion has a portion that tapers towards the end, An opening is formed in each of the first and second walls for loading and unloading the substrate by the substrate transport robot. When the direction perpendicular to the first direction and the vertical direction is defined as the second direction, the substrate transport robot is positioned at the center of the plurality of openings formed in the first wall or the second wall, between the opening at one end in the second direction and the opening at the other end.

2. A substrate transport device, A first wall and a second wall are arranged with a gap between them in the first direction, Including a substrate transport robot, The aforementioned substrate transport robot is Base and, A robotic hand that grips the circuit board, A robot arm having an extending first arm portion and a second arm portion, the first arm portion and the second arm portion being connected to each other, the first arm portion being pivotably connected to the base, the second arm portion being pivotably connected to the robot hand, and the first arm portion and the second arm portion being connected to each other and provided to be pivotable relative to each other, The robot hand has a first arm portion, a second arm portion, and a drive means for rotating the robot hand relative to each other, The substrate transport robot is positioned closer to the first wall, Looking from above, The first arm portion and the second arm portion each have an arc-shaped portion at at least one end, There is a portion that connects the aforementioned arc-shaped portion and both sides of the arm portion having the arc-shaped portion in a straight line, An opening is formed in each of the first and second walls for loading and unloading the substrate by the substrate transport robot. When the direction perpendicular to the first direction and the vertical direction is defined as the second direction, the substrate transport robot is positioned at the center of the plurality of openings formed in the first wall or the second wall, between the opening at one end in the second direction and the opening at the other end.

3. A substrate transport device, A first wall and a second wall are arranged with a gap between them in the first direction, Including a substrate transport robot, The aforementioned substrate transport robot is Base and, A robotic hand that grips the circuit board, A robot arm having an extending first arm portion and a second arm portion, the first arm portion and the second arm portion being connected to each other, the first arm portion being pivotably connected to the base, the second arm portion being pivotably connected to the robot hand, and the first arm portion and the second arm portion being connected to each other and provided to be pivotable relative to each other, The robot hand has a first arm portion, a second arm portion, and a drive means for rotating the robot hand relative to each other, The substrate transport robot is positioned closer to the first wall, Looking from above, The first arm portion and the second arm portion each have an arc-shaped portion at at least one end, The diameter of the arc-shaped portion is smaller than the distance between the sides of the side surfaces of the arm portion having the arc-shaped portion. An opening is formed in each of the first and second walls for loading and unloading the substrate by the substrate transport robot. When the direction perpendicular to the first direction and the vertical direction is defined as the second direction, the substrate transport robot is positioned at the center of the plurality of openings formed in the first wall or the second wall, between the opening at one end in the second direction and the opening at the other end.

4. The substrate transport device according to claim 2 or 3, wherein the arc-shaped portion is located at least on the tip side of the arm portion having the arc-shaped portion.

5. The substrate transport device according to claim 2 or 3, wherein the arc-shaped portion is located at least on the base end side of the arm portion having the arc-shaped portion.

6. Four openings are formed in one of the first wall and the second wall. The substrate transport apparatus according to any one of claims 1 to 5, wherein two openings are formed in the other of the first wall and the second wall.

7. The arm portion at one end of the robot arm can rotate around a first pivot axis set on the base. The four openings are arranged at equal intervals in the second direction. The two openings are spaced apart in the second direction. The substrate transport robot is positioned at the center of the openings at both ends of the four openings with respect to the second direction. The position of the first pivot axis in the second direction and the center position of each of the four openings in the second direction do not coincide. The position of the first pivot axis in the second direction and the center positions of each of the two openings in the second direction do not coincide. The first arm and the second arm, and the robot hand, are each driven by separate drive means. The substrate transport apparatus according to claim 6.

8. The arm portion at one end of the robot arm can rotate around a first pivot axis set on the base. The four openings are arranged at equal intervals in the second direction. The two openings are spaced apart in the second direction. The substrate transport robot is positioned in the second direction between the four openings, excluding the openings at both ends. The position of the first pivot axis in the second direction and the center position of each of the four openings in the second direction do not coincide. The position of the first pivot axis in the second direction and the center positions of each of the two openings in the second direction do not coincide. The first arm and the second arm, and the robot hand, are each driven by separate drive means. The substrate transport apparatus according to claim 6.

9. The arm portion at one end of the robot arm can rotate around a first pivot axis set on the base. The four openings are arranged at equal intervals in the second direction. The two openings are spaced apart in the second direction. The first pivot axis is set in the second direction, at the central position of the openings at both ends of the four openings, The position of the first pivot axis in the second direction and the center position of each of the four openings in the second direction do not coincide. The position of the first pivot axis in the second direction and the center positions of each of the two openings in the second direction do not coincide. The first arm and the second arm, and the robot hand, are each driven by separate drive means. The substrate transport apparatus according to claim 6.

10. The arm portion at one end of the robot arm can rotate around a first pivot axis set on the base. The four openings are arranged at equal intervals in the second direction. The two openings are spaced apart in the second direction. The first pivot axis is set with respect to the second direction between the four openings, excluding the openings at both ends. The position of the first pivot axis in the second direction and the center position of each of the four openings in the second direction do not coincide. The position of the first pivot axis in the second direction and the center positions of each of the two openings in the second direction do not coincide. The first arm and the second arm, and the robot hand, are each driven by separate drive means. The substrate transport apparatus according to claim 6.

11. A substrate transport apparatus according to any one of claims 1 to 10, A substrate processing apparatus for processing substrates, A substrate processing facility equipped with the following features.

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