Adjustment of via openings using lamellar triblock copolymers, polymer nanocomposites, or mixed epitaxy

Abstract

To provide a method for forming via openings by using a lamellar triblock copolymer, a polymer nanocomposite, and a mixed epitaxy approach.SOLUTION: A method for forming via openings by using a lamellar triblock copolymer, a polymer nanocomposite, and a mixed epitaxy approach includes the steps of: forming a guiding pattern (e.g., a topographical guiding pattern, chemical guiding pattern, or mixed guiding pattern) on a surface of a layer of an IC device 400; forming lamellar structures 410 based on the guiding pattern by using the lamellar triblock copolymer or forming cylindrical structures based on the guiding pattern by using the polymer nanocomposite; and forming via openings by removing a lamella 430 from each of at least some of the lamellar structures or removing a nanoparticle from each of at least some of the cylindrical structures.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] [Cross - Reference to Related Applications] This application claims the benefit of U.S. Provisional Patent Application No. 63 / 128,264, filed on December 21, 2020, which is incorporated herein by reference in its entirety.

[0002] This disclosure generally relates to semiconductor devices, and more specifically, to via openings in semiconductor devices.

Background Art

[0003] Over the past several decades, feature scaling in integrated circuits has been a driving force behind the growing semiconductor industry. Scaling to ever - finer features enables an increase in the density of functional units on the limited area of a semiconductor chip. For example, by shrinking the transistor size, it becomes possible to incorporate a larger number of memory or logic devices on the chip, resulting in the production of products with increased capacity. However, the ever - increasing power of capacity is not without problems. The need to optimize the performance of each device and each interconnect is becoming increasingly important.

Brief Description of the Drawings

[0004] Embodiments will be readily understood by reading the following detailed description in conjunction with the accompanying drawings. For the sake of simplicity in the description here, like reference numerals refer to like structural elements. In the figures of the accompanying drawings, the embodiments are shown by way of example and not by way of limitation.

[0005] [Figure 1A] Showing a lamellar - phase triblock copolymer according to some embodiments. [Figure 1B] Showing a lamellar - phase triblock copolymer according to some embodiments.

[0006] [Figure 2]The process for forming via openings by using graphoepitaxy-based induced self-assembly (DSA) of lamellar triblock copolymers is shown in several embodiments. [Figure 3] The process for forming via openings by using graphoepitaxy-based induced self-assembly (DSA) of lamellar triblock copolymers is shown in several embodiments. [Figure 4] The process for forming via openings by using graphoepitaxy-based induced self-assembly (DSA) of lamellar triblock copolymers is shown in several embodiments. [Figure 5] The process for forming via openings by using graphoepitaxy-based induced self-assembly (DSA) of lamellar triblock copolymers is shown in several embodiments. [Figure 6] The process for forming via openings by using graphoepitaxy-based induced self-assembly (DSA) of lamellar triblock copolymers is shown in several embodiments.

[0007] [Figure 7A] Several embodiments of polymer nanocomposites are shown. [Figure 7B] Several embodiments of polymer nanocomposites are shown.

[0008] [Figure 8] This document describes a process for forming via openings using polymer nanocomposites, according to several embodiments. [Figure 9] This document describes a process for forming via openings using polymer nanocomposites, according to several embodiments. [Figure 10] This document describes a process for forming via openings using polymer nanocomposites, according to several embodiments. [Figure 11]A process for forming via openings by using a polymer nanocomposite according to some embodiments is shown.

[0009] [Figure 12] A process for forming via openings by using chemical epitaxy according to some embodiments is shown. [Figure 13] A process for forming via openings by using chemical epitaxy according to some embodiments is shown. [Figure 14] A process for forming via openings by using chemical epitaxy according to some embodiments is shown. [Figure 15] A process for forming via openings by using chemical epitaxy according to some embodiments is shown.

[0010] [Figure 16] A process for forming via openings based on the lattice pattern of a lattice layer according to some embodiments is shown. [Figure 17] A process for forming via openings based on the lattice pattern of a lattice layer according to some embodiments is shown. [Figure 18] A process for forming via openings based on the lattice pattern of a lattice layer according to some embodiments is shown. [Figure 19] A process for forming via openings based on the lattice pattern of a lattice layer according to some embodiments is shown. [Figure 20] A process for forming via openings based on the lattice pattern of a lattice layer according to some embodiments is shown.

[0011] [Figure 21] A process for forming via openings by using hybrid epitaxy according to some embodiments is shown. [Figure 22] A process for forming via openings by using hybrid epitaxy according to some embodiments is shown. [Figure 23]A process for forming via openings by using hybrid epitaxy according to some embodiments is shown. [Figure 24] A process for forming via openings by using hybrid epitaxy according to some embodiments is shown.

[0012] [Figure 25] It is a flowchart showing a process for adjusting via openings using a lamellar triblock copolymer according to various embodiments.

[0013] [Figure 26] It is a flowchart showing a process for adjusting via openings using a polymer nanocomposite according to various embodiments.

[0014] [Figure 27] It is a flowchart showing a process for adjusting via openings using hybrid epitaxy according to various embodiments.

[0015] [Figure 28A] It is a top view of a wafer and a die that may include one or more via openings according to any of the embodiments disclosed herein. [Figure 28B] It is a top view of a wafer and a die that may include one or more via openings according to any of the embodiments disclosed herein.

[0016] [Figure 29] It is a side cross-sectional view of an example of an exemplary IC package that may include one or more IC devices having one or more via openings according to any of the embodiments disclosed herein.

[0017] [Figure 30] It is a side cross-sectional view of an IC device assembly that may include components having one or more IC devices implementing one or more via openings according to any of the embodiments disclosed herein.

[0018] [Figure 31] This is a block diagram of an exemplary computing device which may include one or more integrated circuit (IC) devices having via openings tuned by using lamellar triblock copolymers, polymer nanocomposites, or mixed epitaxies, according to various embodiments. [Modes for carrying out the invention]

[0019] overview Integrated circuits generally include conductive microelectronic structures known in the art as vias for electrically connecting a metal wire or other interconnect above a via to a metal wire or other interconnect below the via. Vias are typically formed by a lithography process. Typically, a photoresist layer may be spin-coated onto a dielectric layer, the photoresist layer may be exposed to patterned actinic radiation through a patterned mask, and the exposed layer may then be developed to form an opening in the photoresist layer. The opening for the via may then be etched into the dielectric layer by using the opening in the photoresist layer as an etching mask. This opening is referred to as a via opening. An exemplary via opening is a contact hole. Finally, the via opening may be filled with one or more types of metal or other conductive materials to form a via. Vias can be plated through vias, blind vias (e.g., vias connecting the outermost circuit of a printed circuit board (PCB) to an adjacent inner layer), embedded vias (e.g., vias connecting circuit layers of a PCB but not reaching the outer layers of the PCB), or other types of vias.

[0020] In the past, via sizes and spacings have been gradually reduced, and in the future, it is predicted that via sizes and spacings for at least some types of integrated circuits (e.g., advanced microprocessors, chipset components, graphics chips, etc.) will continue to be gradually reduced. One measure of via size is the limiting dimension of the via opening (e.g., diameter, or some other cross-sectional dimension). One measure of via spacing is the via pitch, which represents the center-to-center distance between the nearest adjacent vias.

[0021] When patterning extremely small vias at extremely small pitches using this type of lithography, several challenges arise. One such challenge is that the overlays between the via and the upper interconnect, and between the via and the lower landing interconnect, need to be controlled within a high tolerance, generally on the order of a quarter of the via pitch. As the via pitch scales smaller over time, the tolerances for the overlays tend to scale with them at an even faster rate than the lithography equipment.

[0022] Another such challenge is that via aperture limit dimensions generally tend to scale faster than the resolution of the lithography scanner. Via aperture adjustment techniques exist to reduce via aperture limit dimensions. However, the amount of reduction tends to be limited by the minimum via pitch, as well as the ability of the via aperture adjustment process to ensure that the optical proximity correction (OPC) is sufficiently neutral, and tends not to significantly compromise linewidth roughness (LWR) and / or limit dimensional uniformity (CDU). Yet another such challenge is that, in order to maintain the same overall portion of the limit dimensional budget, the LWR and / or CDU properties of the photoresist generally need to improve as the via aperture limit dimensions decrease. However, currently, the LWR and / or CDU properties of most photoresists do not improve as quickly as the via aperture limit dimensions decrease.

[0023] A further challenge is that extremely small via pitches generally tend to fall below the resolution of even extreme ultraviolet (EUV) lithography scanners. As a result, two, three, or more different lithography masks may be used, which tends to increase costs. At some point, if the pitch continues to decrease, printing via openings for these extremely small pitches using an EUV scanner may be impossible, even with multiple masks. While EUV-defined via openings offer much design flexibility and help save on the number of masks, they exhibit considerable variability in LWR and / or CDU due to the probabilistic nature of the process. As the critical dimensions decrease, the variability increases. In addition, the critical dimensions of the required via openings exceed what EUV can currently do.

[0024] The current most advanced method for reducing the critical dimensions of EUV holes is to print relatively large holes and then tape them to the final dimensions using etching. Any variability in the initial hole dimensions persists after tapering, sometimes leading to hole disappearance. DSA-based via opening adjustment approaches have been used to scale CD to the final dimensions without etching tapering and to reduce CD variability. DSA-based via opening adjustment has been demonstrated in the past using cylindrical diblock copolymers. Cylindrical diblock copolymers form cylinders (or holes) but cannot form elongated via openings. One problem with cylindrical structures is that they limit design flexibility. Another problem is that diblock copolymers cannot accommodate variations in CD non-uniformity, also due to their flexibility (expansion and contraction) limits. As a result, the variability is not adequately adjusted.

[0025] Therefore, improved techniques are needed for adjusting via openings.

[0026] Embodiments of the present invention relate to an IC device comprising a first layer and a second layer. The second layer is adjacent to the first layer. The second layer comprises a lamellar structure. Each lamellar structure comprises vias between two lamellae. The two lamellae are electrically insulated, and the vias comprise a conductive material. The two lamellae may be two different blocks of a triblock copolymer. The two lamellae may comprise the same polymer. The vias comprise a conductive material. The vias may be through vias, blind vias, or embedded vias. In some embodiments, the first layer comprises a grid pattern which is an alternating pattern of first and second sections. The second section comprises a different material than the first section. The vias are located in the portion of the second layer adjacent to the first section of the first layer.

[0027] Embodiments of the present invention also relate to shaping via openings by using a triblock copolymer that forms a lamellar phase ("lamellar triblock copolymer"). Compared to diblock copolymers, lamellar triblock copolymers exhibit a greater degree of flexibility with respect to compression and expansion. Lamellar triblock copolymers can also form elongated via openings, which are desirable for IC devices. Compared to diblock copolymers, lamellar triblock copolymers exhibit a much wider process window with respect to variations in input patterns and can shape via openings with large variations in CD. In addition, lamellar triblock copolymers offer much greater flexibility with respect to the shape and size of the via openings. In various embodiments, the triblock copolymer molecule comprises two blocks of a first polymer and a block of a second polymer distinct from the first polymer. The block of the second polymer lies between the blocks of the first polymer. The lamellar phase of the triblock copolymer molecule comprises three lamellae, namely, two lamellae of the first polymer and a lamellar of the second polymer between the two lamellae of the first polymer. Lamellar triblock copolymers can self-assemble on the surface of a semiconductor layer and extend perpendicular to the surface of the semiconductor layer. The self-assembly of lamellar triblock copolymers can be based on graphoepitaxy, chemical epitaxy, or a combination of both. Lamellars of a second polymer can be removed from the lamellar triblock copolymer to form via openings. The dimensions of the via openings are at least partially based on the dimensions of the lamellae of the second polymer. In some embodiments, the first polymer is more rigid than the second polymer to control the uniformity of the via opening dimensions. Via openings prepared using such lamellar triblock copolymers may have better CDU compared to via openings prepared using diblock copolymers.

[0028] Further embodiments of the present invention relate to the preparation of via openings by using polymer nanocomposites. In various embodiments, the polymer nanocomposite molecule comprises nanoparticles and a polymer (e.g., a block copolymer). Polymer chains are attached to the nanoparticles. The nanoparticles may be surrounded by polymers of multiple dimensions. In one embodiment of the polymer nanocomposite, the nanoparticles form a cylindrical phase, and the polymer is a hollow cylinder surrounding the nanoparticle cylinder. Via openings may be formed by removing the nanoparticle cylinder from the polymer nanocomposite molecule. Since the dimensions of the via openings are based on the dimensions of the nanoparticles, the via openings may have the same or similar dimensions as long as the dimensions of the nanoparticles in the polymer nanocomposite molecule are consistent. Thus, the via openings may be independent of the variation in CD and may provide a single CD distribution. The shape of the polymer defines the CD.

[0029] Further embodiments of the present invention relate to adjusting via openings by using a mixed epitaxy technique. The mixed epitaxy technique is a combination of graphoepitaxy and chemical epitaxy. In some embodiments, graphoepitaxy is used to form a topographic guide pattern including openings between walls. Furthermore, chemical epitaxy is used to form a chemical guide pattern at each opening. Thus, the mixed epitaxy technique provides a mixed guide pattern including a topographic guide pattern and a chemical guide pattern within the topographic guide pattern. The mixed guide pattern can be used for DSA of diblock copolymers, triblock copolymers, or polymer nanocomposites. Such an approach can adjust any EPE (edge ​​placement error) that may occur during via placement and guide the vias to a desired via design. Compared to via opening adjustment based solely on graphoepitaxy, the mixed epitaxy technique can have a much wider process window and can tolerate and adjust much larger variations in CD non-uniformity of via openings. This approach can also offer greater flexibility in via opening design.

[0030] Various IC devices having one or more via openings, tuned by using lamellar triblock copolymers, polymer nanocomposites, or mixed epitaxy, as described herein, may be implemented in or associated with one or more components associated with the IC, or / and may be implemented among such various components. In various embodiments, components associated with the IC include, for example, transistors, diodes, power supplies, resistors, capacitors, inductors, sensors, transmitters, receivers, antennas, etc. Components associated with the IC may be mounted on the IC or connected to the IC. The IC may be either analog or digital and, depending on the components associated with the IC, may be used in many applications, such as microprocessors, optoelectronics, logic blocks, and audio amplifiers. The IC may be employed as part of a chipset to perform one or more associated functions in a computer.

[0031] In some embodiments, via openings prepared by using lamellar triblock copolymers, polymer nanocomposites, or mixed epitaxies as described herein may be used to form conductive vias in the metallization stack of an IC device. The term “metallization stack” (sometimes referred to as “interconnect stack”) may be used to refer to a stack of one or more interconnects for providing connections to different circuit components of an IC chip. The term “interconnect” may be used to describe any element formed from a conductive material for providing electrical connections to, and / or between, one or more components associated with an IC. Generally, “interconnect” may refer to both conductive wires / wirings (sometimes referred to as “wires” or “metal wires” or “trenches”) and conductive vias (sometimes referred to as “vias” or “metal vias”). Generally, the term “conductive wire” may be used to describe a conductive element insulated by a dielectric material, typically containing an interlayer low-k dielectric, provided within the plane of the IC chip. Such conductive wires are typically stacked in multiple levels, or in multiple layers of a metallization stack. On the other hand, the term "conductive via" may be used to describe a conductive element that interconnects two or more trench contacts at different levels. For this purpose, vias may be provided substantially perpendicular to the plane of the IC chip and may interconnect two conductive wires at adjacent levels, or two conductive wires that are not at adjacent levels.

[0032] For explanatory purposes, certain numbers, materials, and configurations are described to provide a complete understanding of multiple exemplary implementations. However, it will be obvious to those skilled in the art that this disclosure may be implemented without specific details, or / or that this disclosure may be implemented in only some of the embodiments described. In other cases, known features are omitted or simplified so as not to obscure exemplary implementations.

[0033] Furthermore, refer to the accompanying drawings, which form part of this application, illustrating possible embodiments. It should be understood that other embodiments may be utilized, and that structural or logical modifications may be made without departing from the scope of this disclosure. Therefore, the following detailed description should not be construed as restrictive.

[0034] The drawings are intended to show the relative arrangement of elements within them, and the device assemblies in these drawings may include other elements not specifically shown (e.g., various interface layers). Similarly, specific arrangements of materials are described with reference to the drawings, but intermediate materials may be included in the devices and assemblies in these drawings. Furthermore, some elements of the representation of various devices are shown in the drawings as rectangles on a plane or formed from cuboids, and some schematic diagrams of exemplary structures are shown with strict right angles and straight lines, but this is merely for the sake of clarity, and embodiments of these assemblies may be curved, rounded, or otherwise irregular in shape, sometimes inevitably resulting from the manufacturing processes used to produce semiconductor device assemblies. Therefore, it should be understood that such schematic diagrams may not reflect the limitations of the actual process, and that such limitations may cause features to appear less "ideal" when any of the structures described herein are verified, for example, using scanning electron microscope (SEM) images or transmission electron microscope (TEM) images. In such images of actual structures, possible process defects may also be observed, for example, imperfect straight edges of material, tapered vias or other openings, unintended rounded corners, or variations in the thickness of different material layers, occasional twists, edges, or combination transitions within crystalline regions, or occasional transition defects of a single atom or group of atoms. Other defects common in the field of device manufacturing, not listed herein, may also be present. For example, inspection of layout and mask data using an optical microscope, TEM, or SEM, and reverse engineering of parts of the device to reconstruct the circuit, or inspection of cross-sections of the device to detect the shape and position of various device elements described herein, for example, using physical defect analysis (PFA), allows for the determination of the presence of one or more transistor devices manufactured using placeholders for back-side contact formation as described herein.

[0035] In the manner that best contributes to understanding the claimed invention, various operations may be described as a series of distinct actions or operations performed in sequence. However, the order in which they are described should not be interpreted as suggesting that these operations are necessarily order-dependent. In particular, these operations do not have to be performed in the order presented. The operations described may be performed in a different order than in the described embodiments. Various additional operations may be performed, or the operations described may be omitted in additional embodiments.

[0036] For the purposes of this disclosure, the phrase "A and / or B" means (A), (B), or (A and B). For the purposes of this disclosure, "A, B, and / or C" means (A), (B), (C), (A and B), (A and C), (B and C), or (A, B, and C). When the term "between" is used in reference to a measurement range, it includes the end of the measurement range.

[0037] The descriptions use the phrases “in an embodiment” or “in embodiments,” which may refer to one or more identical or different embodiments, respectively. Terms such as “comprising,” “including,” and “having” as used in reference to embodiments of the disclosure are synonymous. The disclosure may use viewpoint-based descriptions, such as “top,” “bottom,” “upper,” “lower,” and “side,” to describe various features of the drawings, but these terms are merely for the purpose of facilitating description and do not suggest a preferred or required orientation. The accompanying drawings are not necessarily drawn to scale. Unless otherwise specified, the use of prefixes such as “first,” “second,” and “third” to describe common objects simply indicates that different instances of similar objects are being referred to, and is not intended to suggest that the objects described in this way must be in a given order in time, space, rank, or any other manner.

[0038] In the following detailed description, various exemplary implementations will be described using terminology commonly adopted by those skilled in the art to convey the essence of the work to others skilled in the art.

[0039] For example, some descriptions may refer to a specific source or drain region or contact that is either a source region / contact or a drain region / contact. However, unless otherwise specified, it is not important which region / contact of a transistor is considered a source region / contact and which is considered a drain region / contact, because under certain operating conditions, the source and drain designations are often interchangeable. Therefore, the descriptions provided herein may use the term "S / D region / contact" to indicate that a region / contact can be either a source region / contact or a drain region / contact.

[0040] In other instances, unless otherwise specified, the terms “package” and “IC package” are synonymous with the terms “die” and “IC die” when used, the term “insulation” means “electrical insulation,” and the term “conductivity” means “electrical conduction.” Certain elements may be referred to in the singular form herein; such elements may include multiple sub-elements. For example, “conductive material” may include one or more conductive materials.

[0041] In other examples, terms such as "oxidation," "carbide," and "nitride," when used, refer to compounds containing oxygen, carbon, nitrogen, etc., respectively; the term "high-k dielectric" refers to materials with a dielectric constant higher than silicon oxide; and the term "low-k dielectric" refers to materials with a dielectric constant lower than silicon oxide.

[0042] In yet another example, the term “connection” may be used to describe a direct electrical or magnetic connection between connected things, without any intermediate devices, while the term “coupling” may be used to describe either a direct electrical or magnetic connection between connected things, or an indirect connection through one or more intermediate passive or active devices. The term “circuit” may be used to describe one or more passive and / or active components arranged to work together to provide a desired function.

[0043] The terms “substantially,” “near,” “generally,” “near,” and “about” generally refer to being within + / - 5 to 20% of the target value, based on the context of specific values ​​described herein or known in the art. Similarly, terms indicating the orientation of various elements, such as “coplanar,” “perpendicular,” “orthogonal,” “parallel,” or any other angle between elements, generally refer to being within + / - 5 to 20% of the target value, based on the context of specific values ​​described herein or known in the art.

[0044] In addition, the terms “include,” “include,” “equip,” “have,” “possess,” “possess,” or any other variation thereof are intended to cover non-exclusive inclusion. For example, a method, process, device, or system that includes an enumeration of elements is not necessarily limited to those elements alone, but may include other elements not explicitly enumerated, or other elements specific to such a method, process, device, or system. Also, the term “or” refers to an inclusive “or” and not an exclusive “or.”

[0045] Each of the systems, methods, and devices disclosed herein has several innovative aspects, but none of them, alone, contribute to all of the desirable attributes disclosed herein. Details of one or more implementations of the subject matter described herein are described below in the accompanying drawings. Exemplary lamellar triblock copolymer

[0046] Figures 1A and 1B show lamellar triblock copolymers according to several embodiments. Lamellar triblock copolymers are also referred to as lamellar triblock copolymers. Lamellar triblock copolymers can be used to modify via openings (such as contact holes) through DSA based on graphoepitaxy, chemical epitaxy, or mixed epitaxy. Figure 1A shows molecule 100 of a triblock copolymer ("triblock copolymer molecule 100") according to several embodiments. Figure 1B shows the lamellar structure 130 of a triblock copolymer according to several embodiments.

[0047] A triblock copolymer molecule 100 is a polymer molecule formed from covalently bonded monomer chains. In a triblock copolymer, there are at least two different types of monomers, and these different types of monomers are mainly contained within different blocks or continuous rows of monomers. As shown in Figure 1A, the triblock copolymer molecule 100 contains two blocks 110 of polymer A and a block 120 of polymer B. The block 120 of polymer B is located between the two blocks 110 of polymer A. The blocks 110 of polymer A and the block 120 of polymer B are covalently bonded together. The blocks of polymer A and the blocks of polymer B may be approximately equal in length, or one block may be significantly longer than the other. The individual blocks of polymer A 110 mainly contain covalently bonded chains of monomer A (e.g., A-A-A-A-A...). On the other hand, the block 120 of polymer B mainly contains covalently bonded chains of monomer B (e.g., B-B-B-B-B...). Monomers A and B may represent any of the different types of monomers used in block copolymers known in the art. Examples of polymers A110 and B120 include polyethylene, polystyrene, polyvinyl chloride, polytetrafluoroethylene, polydimethylsiloxane, some polyester, some polyurethane, acrylic resin, epoxy, P(t-butyl acrylate), polyacrylic acid, polyacrylamide, maleic anhydride polymer, polyethylene, polypropylene, polyacrylonitrile, polybutadiene, polyvinyl acetate, polylactic acid, polybutyl acrylate, polycaprolactone, poly(ethylene glycol), polyisoprene, and the like. In other embodiments, polymer A110 or polymer B120 may be other polymers.

[0048] In Figure 1A, the triblock copolymer molecule 100 includes two blocks 110 of polymer A and a block 120 of polymer B. However, other embodiments of the triblock copolymer molecule 100 may include a block 110 of polymer A, a block 120 of polymer B, and a block of polymer C, where the polymer B block 120 lies between the polymer A block 110 and the polymer C block. Polymer C is a different polymer from polymers A110 and B120. Furthermore, individual blocks may contain different types of monomers. For example, an individual block itself may be a copolymer of two or more types of monomers.

[0049] In some embodiments, block 110 of polymer A and block 120 of polymer B have different chemical properties. In one example, one block may be relatively hydrophobic (e.g., averse to water), while the other may be relatively hydrophilic (averse to water). In another example, one block may be relatively similar to oil, while the other block may be relatively similar to water. Such differences in the chemical properties between different blocks of a polymer (differences in hydrophilicity and hydrophobicity, or other differences) can cause self-assembly of the triblock copolymer molecules 100. For example, self-assembly may be based on microphase separation of polymer blocks. Conceptually, this may be similar to the phase separation of oil and water, which are generally miscible. Similarly, differences in hydrophilicity between polymer blocks (e.g., one block is relatively hydrophobic and the other is relatively hydrophilic) can cause a roughly similar microphase separation, where the different polymer blocks tend to separate from each other due to the chemical aversion of the other.

[0050] However, because polymer blocks are covalently bonded to one another, they cannot be completely separated on a macroscopic scale. Rather, a given type of polymer block may tend to separate from or aggregate with polymer blocks of other molecules of the same type. Based on differences between hydrophobic and hydrophilic, or otherwise, the self-assembly of triblock copolymer molecules 100 can be used to form extremely small periodic structures (e.g., tightly spaced nanoscale structures). In some embodiments, triblock copolymers are used to form nanoscale lamellar structures (e.g., lamellar structures containing three lamellae formed from three polymer blocks), or other nanoscale structures that can be used to adjust via openings. The dimensions of the lamellae depend at least partially on the length of the polymer blocks. Triblock copolymers can self-assemble into nanostructures of other shapes, such as hexagonal close-packed cylinders and body-centered cubic spheres.

[0051] In the embodiment shown in Figure 1B, the self-assembly of the triblock copolymer molecule 100 forms a lamellar structure 130. As will be further described below, the lamellar structure 130 may be formed by using graphoepitaxy, chemical epitaxy, or mixed epitaxy. The lamellar structure 130 comprises two polymer A lamellae 140 and 160, as well as a polymer B lamellar 150. The polymer B lamellar 150 lies between the two polymer A lamellae 140 and 160. The lamellar structure 130 may be formed in a via opening of an IC device to adjust the via opening. By removing the polymer B lamellar 150, an adjusted via opening can be formed in the IC device. Thus, the dimensions of the polymer B lamellar 150 define, at least partially, the dimensions of the via opening.

[0052] In some embodiments, polymers A110 and B120 have different mechanical properties. For example, polymer A110 is stronger than polymer B120. Therefore, polymer A lamellae 140 and 160 are stronger than polymer B lamellae 150. In one embodiment, polymer A lamellae 140 and 160 of the lamellar structure 130 have a stiffness above a first threshold, while polymer B lamellae 150 has a stiffness below a second threshold, which is lower than the first threshold. Since polymer B120 is more flexible, when the triblock copolymer molecules 110 form the lamellar structure 130, blocks of polymer B120 can be stretched or compressed more easily between blocks of polymer A110. In one embodiment, during the self-assembly of the triblock copolymer molecules 110, blocks of polymer B120 fold on their own. The higher rigidity of polymer A lamellae 140 and 160 helps ensure uniform size of polymer B lamellae 150, and consequently helps ensure uniform size of the adjusted via opening. Furthermore, because polymer B lamellae 150 is relatively flexible, it can be removed through etching processes that do not etch polymer A lamellae 140 and 160, or etch very little, thereby further ensuring uniform size of the adjusted via opening. Therefore, via opening adjustment using lamellar triblock copolymers provides better CDU compared to methods of adjusting via openings using cylindrical deblock copolymers.

[0053] In some embodiments, the lamellar structure 130 is formed on the surface of layer 170. As shown in Figure 1B, the lamellar structure 130 has an orientation along the Y-axis, perpendicular to the surface of layer 170. Layer 170 may be a semiconductor substrate. In some embodiments, layer 170 includes a lattice pattern, e.g., an alternating pattern of first and second sections. The first section includes a different material from the second section. The lamellar structure 130 may be formed according to the lattice pattern. Further details regarding the formation of the lamellar structure according to the lattice pattern are described below in reference to Figures 16-20.

[0054] Figures 2 to 6 illustrate the process of forming via openings 520 by using graphoepitaxy-based DSA of lamellar triblock copolymers according to several embodiments. One embodiment of the lamellar triblock copolymer is the lamellar triblock copolymer described above in relation to Figures 1A to 1B.

[0055] Figure 2 shows an IC device 200 including an intermediate layer 220 on (for example, attached to) a substrate 210. The substrate 210 may include a semiconductor material. Examples of semiconductor materials include, for example, single-crystal silicon, polycrystalline silicon, silicon on an insulator (SOI), other suitable semiconductor materials, or some combination thereof. The substrate 210 may also include other materials such as metals, dielectrics, and dopants. In some embodiments, the substrate 210 may include various IC components such as transistors. In some embodiments, the substrate 210 is a general workpiece object used to manufacture integrated circuits.

[0056] The intermediate layer 220 may include a dielectric or insulating material. Examples of dielectric materials include, for example, silicon oxide (e.g., silicon dioxide (SiO)), doped silicon oxide, fluorinated silicon oxide, carbon-doped silicon oxide, various low-k dielectric materials known in the art, and combinations thereof. The dielectric layer may be formed by conventional techniques such as chemical vapor deposition (CVD), physical vapor deposition (PVD), or by other deposition methods. In one embodiment, the intermediate layer 220 includes a lattice pattern that guides the self-assembly of the lamellar triblock copolymer. Further information regarding the lattice pattern is described below in reference to Figures 16 to 20.

[0057] Figure 3 shows the IC device 300. The IC device 300 is manufactured by forming a guide pattern layer 310 on the IC device 200, for example, on the surface of the intermediate layer 220. The guide pattern layer 310 includes a topographic guide pattern. The topographic guide pattern induces the self-assembly of the lamellar triblock copolymer. In some embodiments, the topographic guide pattern induces the self-assembly of the lamellar triblock copolymer through mechanisms such as reducibility, lateral ordering, and confinement effects.

[0058] In Figure 3, the topography guide pattern is an alternating pattern of apertures 320 (individually referred to as "aperture 320") and guide walls 330 (individually referred to as "guide walls 330"). Each aperture 320 lies between two guide walls 330 that define the aperture 320. The guide pattern layer 310 can be formed using various lithography techniques, such as EUV, immersion lithography (e.g., by using ultraviolet (UV) light with a wavelength of 193 nm), and deep UV lithography (e.g., dry 193 nm photolithography). The apertures 320 can be via apertures. However, due to the technical challenges of the lithography techniques described above, via apertures do not have sufficient CDU. The size of the via apertures can vary significantly from the desired extent. Therefore, via apertures need to be adjusted, for example, through DSA of lamellar triblock copolymers.

[0059] In some embodiments, the guide pattern layer 310 may be physically fitted or chemically modified to impart different affinities to different polymer blocks of the lamellar triblock copolymer and implement an orientation of the lamellar triblock copolymer perpendicular to the intermediate layer 220. In other embodiments, a surface treatment may be performed to modify the guide pattern layer 310. The surface treatment may make a portion of the guide pattern layer 310 (e.g., the surface of the openings 320) chemically neutral or at least more neutral relative to different polymer blocks of the triblock copolymer. A non-neutral surface may have a greater tendency to interact (e.g., repulsion or attraction) with one polymer block than with another. And a non-neutral surface may tend to affect the self-assembly of the triblock copolymer in a way that may be undesirable. In some embodiments, the surface treatment may be the application of a coating having chemical properties (e.g., hydrophilic / hydrophobic properties) that are intermediate between different polymer blocks of the triblock copolymer. In some embodiments, the coating may be applied by spin coating, spray coating, dip coating, immersion coating, or by depositing or applying a relatively thin coating of a material having chemical properties (e.g., hydrophilicity) that are roughly between the corresponding chemical properties of different polymer blocks. Exemplary materials for the coating are copolymers having alternating monomers of different block copolymers. For example, for a triblock copolymer containing blocks of polymer A and blocks of polymer B, the coating may contain copolymers of A and B, where monomers A and B are highly mixed within the copolymer (e.g., ABABAB-AB-AB, AABBBABBAAA, etc.). Additionally, or alternately, other types of surface treatments (e.g., oxidation or deoxidation) may be used to modify the guide pattern layer 310.

[0060] Figure 4 shows an IC device 400 formed by filling the opening 320 of the IC device 300 with a lamellar triblock copolymer. In some embodiments, the opening 320 is filled with a molten triblock copolymer. The triblock copolymer self-assembles, induced by a guide pattern, for example, through microphase separation of three blocks in the triblock copolymer, to form a lamellar triblock copolymer. In one embodiment, the self-assembly of the triblock copolymer occurs through the rearrangement or repositioning of different polymer blocks of triblock copolymer molecules. The self-assembly of the triblock copolymer is induced by a topographic guide pattern. In one embodiment, the self-assembly of the triblock copolymer may be driven by surface forces, for example, tensile forces applied by a guide wall 330. During the self-assembly process, the lamellar structure 410 is aligned with respect to the guide wall 330. This can be used to achieve better alignment compared to lithographic alignment and thus to form very small (e.g., nanoscale) via openings.

[0061] In some embodiments, annealing treatments may be applied to the triblock copolymer to initiate, accelerate, or otherwise facilitate self-assembly. In some embodiments, the annealing treatment may be a solvent annealing treatment carried out in an atmosphere of solvent vapors. The solvent vapors may be acetone, tetrahydrofuran, or vapors of other types of organic solvents. Solvent annealing treatments may be intended for the diffusion and self-assembly kinetics of larger polymers, such as triblock copolymers. In other embodiments, the annealing treatment may include treatments that are operable to increase the temperature of the triblock copolymer. Examples of such treatments include heating the IC device 400 (e.g., in an oven or under a thermal lamp), applying infrared radiation to the triblock copolymer, or otherwise applying heat to the triblock copolymer or increasing the temperature of the triblock copolymer. Heating may help to provide energy to the molecules of the triblock copolymer to increase the rate of microphase separation, making them more fluid / flexible. Annealing is performed at a temperature high enough to increase the rate of microphase separation, but low enough to avoid damage to the triblock copolymer or other components of the IC device 400. In some embodiments, the annealing temperature is in the range of 50°C to 300°C.

[0062] As shown in Figure 3, the lamellar structures 410 (individually referred to as "lamellar structures 410") fill the openings 320 and are located between the guide walls 330. One embodiment of the lamellar structures 410 is the lamellar structure 130 in Figure 1B. In the embodiment of Figure 3, each opening 320 is filled with one triblock copolymer molecule, for example, the triblock copolymer molecule 100 in Figure 1A, which forms one lamellar structure 410. In other embodiments, each opening 320 may be filled with multiple triblock copolymer molecules that form multiple lamellar structures.

[0063] The lamellar structure 410 comprises a first lamellar 420, a second lamellar 430, and a third lamellar 440, which are formed from three blocks of a triblock copolymer. The second lamellar 430 lies between the first lamellar 420 and the third lamellar 440 and has a different polymer than the first lamellar 420 and the third lamellar 440. One embodiment of the first lamellar 420 is polymer lamellar A 140 in Figure 1B. One embodiment of the second lamellar 430 is polymer lamellar B 150 in Figure 1B. One embodiment of the third lamellar 440 is polymer lamellar A 160 in Figure 1B. Other embodiments of the lamellar structure 410 may include different lamellae. For example, the first lamellar 420 may contain a different polymer than the third lamellar 440. The first lamella 420, the second lamella 430, and the third lamella 440 extend perpendicularly to the intermediate layer 220 along the Y-axis, as shown in Figure 4. In Figure 4, the length of the lamellar structure 410 along the Y-axis is less than the length of the opening 320. In other embodiments, the length of the lamellar structure 410 may be the same as the length of the opening 320. The first lamella 420, the second lamella 430, and the third lamella 440 may have the same or different widths along the X-axis or Z-axis.

[0064] Through the self-assembly of the triblock copolymer molecules, the lamellar structure 410 can be substantially centered on the corresponding opening 320, for example, in the X and Z dimensions. The dimensions of the first lamellar 420 (such as the width along the X-axis or the length along the Z-axis), the second lamellar 430, or the third lamellar 440 can be at least partially based on the length of the corresponding block of the triblock copolymer. In embodiments where the polymer blocks for the first and third lamellae 420 and 440 are the same or similar in length, the second lamellar 430 can be positioned at or near the center of the opening 320. In various embodiments, the first lamellar 420 and the third lamellar 440 are more rigid than the second lamellar 430 and can define the space in which the second lamellar 430 is formed. In one embodiment where the space is large, the polymer block forming the second lamellar 430 can stretch to fill the space. In another embodiment where the space is small, the polymer block forming the second lamellar 430 can be compressed to fit into the space. For example, the polymer block forming the second lamellar 430 can bend on its own to fit into the space. By using such a triblock copolymer, the dimensions of the second lamellar 430 can be controlled by controlling the lengths of the polymer blocks forming the first and third lamellae 420.

[0065] Figure 5 shows an IC device 500 including a via opening layer 510 on which via openings 520 (each referred to as “via opening 510”) are formed. The via openings 520 are formed by removing a second lamellar 430 from a corresponding lamellar structure 410. The via openings 520 are defined by one or more via opening walls 530 (each referred to as “via opening wall 530”) and guide walls 330. The via opening walls 530 include the first lamellar 420 and third lamellar 440 of the corresponding lamellar structure 410, as well as one or more portions of the guide walls 330.

[0066] In some embodiments, the second lamellar 430 is removed by performing an etching process (e.g., selective etching) on ​​the lamellar structure 410. The second lamellar 430 is etched faster than the first lamellar 420 and the third lamellar 440. The first lamellar 420 and the third lamellar 440 remain completely or substantially unetched after the etching process. In one embodiment, the etching process includes isotropic chemical selective etching. In another embodiment, the etching process includes placing a hard mask over the lamellar structure 410. The hard mask includes holes corresponding to the second lamellar 430, so that the second lamellar 430 is exposed to etching, while the first and third lamellae 420 and 440 are not. The high rigidity of the first lamellar 420 and the third lamellar 440 also helps to remove or reduce etching of the first and third lamellae 420 and 440.

[0067] In some embodiments, the ratio of the length of the lamellar structure 410 along the Y-axis to the length of the via opening 430 along the Y-axis is in the range of 0.3 to 2.0. In one embodiment, the ratio of the length of the lamellar structure 410 to the length of the via opening 430 is in the range of 0.3 to 1.5. The embodiment in Figure 5 removes the second lamellar 430 from all of the lamellar structure 410. In other embodiments, the second lamellar 430 is removed from a subset of the lamellar structure 410. Figure 5 shows the removal of the entire second lamellar 430. In other embodiments, the via opening 520 may be formed by removing a portion of the second lamellar 430. As shown in Figure 6, the via opening 520 has a rectangular cross-section. In other embodiments, the cross-section of the via opening 520 may have other shapes, such as a square or curved shape.

[0068] Figure 6 shows a top view of the IC device 600 including vias 620. In some embodiments, via openings 520 are partially or completely filled with a conductive material such as metal or alloy to form the corresponding vias 620. Vias 620 can be through vias, blind vias, or embedded vias. The ratio of the length of the lamellar structure 410 along the Y-axis to the length of the vias 620 along the Y-axis can be in the range of 0.3 to 2.0.

[0069] Figures 7A and 7B show polymer nanocomposites according to several embodiments. Figure 7A shows molecule 700 of a polymer nanocomposite ("polymer nanocomposite molecule 700"). Polymer nanocomposite molecule 700 includes polymer 710 surrounding nanoparticles 720 in the X and Y dimensions. One or more chains of polymer 710 are attached to nanoparticles 720. Polymer 710 may be polyethylene, polystyrene, polyvinyl chloride, polytetrafluoroethylene, polydimethylsiloxane, some polyester, some polyurethane, acrylic resin, epoxy, P(t-butyl acrylate), polyacrylic acid, polyacrylamide, maleic anhydride polymer, polyethylene, polypropylene, polyacrylonitrile, polybutadiene, polyvinyl acetate, polylactic acid, polybutyl acrylate, polycaprolactone, poly(ethylene glycol), polyisoprene, etc. Nanoparticles 720 have a nanoscale size. For example, the size of the nanoparticles 720 in the X, Y, or Z dimension is in the range of 1 to 100 nanometers. The nanoparticles 720 may be made of inorganic materials. Exemplary materials for nanoparticles 720 include SiO2, Ag, Au, CdSe, Fe3O4, graphene, TiOx, SnOx, ZrOx, and silsesquioxane.

[0070] Figure 7B shows a cylindrical structure 740 formed by polymer nanocomposite molecules 700 on the surface of layer 730. In other embodiments, the cylindrical structure 740 may be formed by multiple polymer nanocomposite molecules 700. The cylindrical structure 740 extends along the Y-axis perpendicular to the surface of layer 730. The cylindrical structure 740 includes a polymer cylinder 750 formed from polymer 710 and a nanoparticle cylinder 760 formed from nanoparticles 720. The polymer cylinder 750 is hollow and surrounds the nanoparticle cylinder 760 in the X and Y dimensions. Thus, the inner diameter of the polymer cylinder 750 is the same as the diameter of the nanoparticle cylinder 760, and the outer diameter of the polymer cylinder 750 is greater than the diameter of the nanoparticle cylinder 760. The length of the polymer cylinder 750 along the Z-axis is the same as the length of the nanoparticle cylinder 760 along the Z-axis. In other embodiments, the length of the polymer cylinder 750 may be shorter or longer than the length of the nanoparticle cylinder 760.

[0071] Layer 170 may be a semiconductor substrate. In some embodiments, layer 730 includes a lattice pattern, for example, an alternating pattern of first and second sections. The first section includes a different material from the second section. The cylindrical structure 740 may be formed according to the lattice pattern.

[0072] Figures 8 to 11 illustrate the process of forming via openings 1020 by using polymer nanocomposites according to several embodiments. Figure 8 shows an IC device 800. The IC device 800 includes a substrate 810, an intermediate layer 820 (e.g., mounted) on the substrate 810, and a guide pattern layer 850 on the intermediate layer 820. In other embodiments, the IC device 800 may include different components. For example, the IC device 800 may not include the intermediate layer 820, and the guide pattern layer 850 may be formed on the substrate 810.

[0073] The substrate 810 may include semiconductor materials. Examples of semiconductor materials include, for example, single-crystal silicon, polycrystalline silicon, SOI, other suitable semiconductor materials, or some combination thereof. The substrate 810 may also include other materials such as metals, dielectrics, and dopants. In some embodiments, the substrate 810 may include various IC components such as transistors. In some embodiments, the substrate 810 is a general workpiece object used to manufacture integrated circuits.

[0074] The intermediate layer 820 comprises a dielectric or insulating material. Examples of dielectric materials include, for example, silicon oxide (e.g., silicon dioxide (SiO)), doped silicon oxide, fluorinated silicon oxide, carbon-doped silicon oxide, various low-k dielectric materials known in the art, and combinations thereof. The dielectric layer may be formed by conventional techniques, such as CVD, plasma-enhanced CVD, PVD, ALD (atomic layer deposition), plasma-enhanced ALD, spinning-on, annealing, or other deposition methods. In one embodiment, the intermediate layer 820 comprises a lattice pattern that guides the self-assembly of the lamellar triblock copolymer.

[0075] The guide pattern layer 850 includes a topographic guide pattern. In Figure 8, the topographic guide pattern is an alternating pattern of guide walls 830 (individually referred to as “guide wall 830”) and apertures 840 (individually referred to as “aperture 840”). Each aperture 840 lies between two guide walls 830 that define the aperture 840. In some embodiments, the guide pattern layer 850 is formed by using EUV, immersion lithography (e.g., by using ultraviolet light with a wavelength of 193 nm), deep UV lithography (e.g., dry 193 nm photolithography), or other types of lithography techniques. The topographic guide pattern is three-dimensional.

[0076] Figure 9 shows an IC device 900 formed by filling the openings 840 of the IC device 800 with cylindrical structures 940 (each individually referred to as "cylindrical structure 940"). One embodiment of the cylindrical structure 940 is the cylindrical structure 740 in Figure 7B. As shown in Figure 9, the cylindrical structure 940 is located between the guide walls 830. The cylindrical structure 940 is formed by applying a polymer nanocomposite onto the guide pattern layer 850, for example, within the openings 840 of the guide pattern layer 850.

[0077] The cylindrical structure 940 is formed from polymer nanocomposite molecules, for example, polymer nanocomposite molecule 700 in Figure 7A. The cylindrical structure 940 includes a polymer cylinder 950 and a nanoparticle cylinder 960. The polymer cylinder 950 is hollow and at least partially surrounds the nanoparticle cylinder 960 in the X and Z dimensions. In one embodiment, the polymer cylinder 950 is formed from polymer 710 in Figure 7A, and the nanoparticle cylinder 960 is formed from nanoparticles 720. The cylindrical structure 940 extends along the Y axis perpendicular to the intermediate layer 820, as shown in Figure 9. In Figure 9, the length of the cylindrical structure 940 along the Y axis is less than the length of the opening 840. In other embodiments, the length of the cylindrical structure 940 may be the same as the length of the opening 840. The polymer cylinder 950 may expand or contract to occupy the space within the via opening as efficiently as possible.

[0078] The topographic guide pattern in the guide pattern layer 850 induces polymer nanocomposite molecules to form cylindrical structures 940. In some embodiments, the topographic guide pattern induces the formation of cylindrical structures 940 through mechanisms such as reducibility, lateral ordering, and confinement effects. The formation of cylindrical structures 940 can be driven by surface forces applied by the guide wall 330, e.g., tensile forces. During the formation process, the cylindrical structures 940 are aligned with respect to the guide wall 830. This can be used to achieve better alignment compared to lithographic alignment and thus to form very small via openings (e.g., nanoscale). Also, since the nanoparticles are surrounded by a polymer (e.g., shown in Figure 7A), the nanoparticle cylinder 960 can be centered, or substantially centered, in the corresponding opening 840, for example, in the X and Z dimensions. The dimensions (e.g., outer diameter or length) of the polymer cylinder 950 can be based at least partially on the relative lengths of the polymer chains forming the polymer cylinder 950. The dimensions (e.g., diameter or length) of the nanoparticle cylinder 960 may be based at least in part on the dimensions of the nanoparticles forming the nanoparticle cylinder 960. The polymer in the polymer nanocomposite molecule may be designed such that the diameters of the polymer cylinder 950 and the nanoparticle cylinder 960, as well as the pitch (the distance between the centers of the nearest adjacent cylindrical structures 940) of the polymer cylinder 950 and the nanoparticle cylinder 960, are appropriate for a predetermined pitch.

[0079] In some embodiments, an annealing treatment may be applied to the cylindrical structure 940 to initiate, accelerate, or otherwise facilitate the formation of polymer cylinders 950 or nanoparticle cylinders 960. In some embodiments, the annealing treatment may be a solvent annealing treatment carried out in an atmosphere of solvent vapor. The solvent vapor may be acetone, tetrahydrofuran, or vapor of other types of organic solvents. The solvent annealing treatment may be intended for the diffusion and self-assembly kinetics of larger polymers, such as triblock copolymers. In other embodiments, the annealing treatment may include a treatment that is operable to increase the temperature of the cylindrical structure 940. An example of such a treatment is heating the IC device 900 (e.g., in an oven or under a thermal lamp), applying infrared radiation to the cylindrical structure 940, or otherwise applying heat to the cylindrical structure 940 or increasing its temperature. The annealing is performed at a temperature high enough to increase the rate of self-assembly, but low enough to avoid damage to the cylindrical structure 940 or other components of the IC device 900.

[0080] In some embodiments, the guide pattern layer 850 can be physically fitted or chemically modified to impart different affinities to the polymer and nanoparticles in the polymer nanocomposite and to implement the orientation of the polymer cylinder 950 and nanoparticle cylinder 960 perpendicular to the intermediate layer 820. In other embodiments, a surface treatment may be performed to modify the guide pattern layer 850. The surface treatment may make a portion of the guide pattern layer 850 (e.g., the surface of the opening 320) chemically neutral or at least more neutral than the polymer and nanoparticles. A non-neutral surface may have a greater tendency to interact (e.g., repulsion or attraction) with the polymer than with the nanocomposite. And the non-neutral surface may tend to affect the formation of the cylindrical structure 940 in a way that may be undesirable. In some embodiments, the surface treatment may be the application of a coating having chemical properties (e.g., hydrophilic / hydrophobic properties) that are intermediate between the polymer and the nanocomposite. In some embodiments, the coating may be applied by spin coating, spray coating, dip coating, immersion coating, or by depositing or applying a relatively thin coating of a material having chemical properties (e.g., hydrophilicity) that are roughly between the corresponding chemical properties of the polymer and nanocomposite. Additionally, or alternately, other types of surface treatments (e.g., oxidation or deoxidation) may be used to modify the guide pattern layer 850.

[0081] Figure 10 shows an IC device 1000 including a via opening layer 1010 on which via openings 1020 (individually referred to as "via openings 1020") are formed. Figure 11 shows a top view of the IC device 1000. Via openings 1020 are formed by removing nanoparticle cylinders 960 from cylindrical structures 940. Via openings 1020 are defined by corresponding via opening walls 1030, which are polymer cylinders 950. In the embodiment of Figure 10, nanoparticle cylinders 960 are removed from all cylindrical structures 940. In other embodiments, nanoparticle cylinders 960 are removed from a subset of cylindrical structures 940. Figure 10 shows the removal of all nanoparticle cylinders 960. In other embodiments, via openings 1020 may be formed by removing portions of nanoparticle cylinders 960. In some embodiments, the ratio of the length of the cylindrical structure 940 along the Y-axis to the length of the via openings 1020 along the Y-axis is in the range of 0.3 to 2.0. In some embodiments, some or all of the via openings 1020 may be partially or completely filled with a conductive material to form vias.

[0082] In some embodiments, the nanoparticle cylinder 960 is removed by performing an etching process (e.g., selective etching) on ​​the cylindrical structure 940. The nanoparticle cylinder 960 is etched faster than the polymer cylinder 950. The polymer cylinder 950 may remain substantially unetched after the etching process. In one embodiment, the etching process includes isotropic chemical selective etching. As shown in Figure 11, the via opening 1020 has a circular cross-section. In other embodiments, the cross-section of the via opening 1020 may have other shapes, such as a square or rectangle.

[0083] Figures 12–15 illustrate the process of forming via openings 1520 by chemical epitaxy according to several embodiments. Via opening formation may be performed using triblock copolymers (e.g., the triblock copolymers described above in relation to Figures 1A–1B) or polymer nanocomposites (e.g., the polymer nanocomposites described above in relation to Figures 7A–7B).

[0084] Figure 12 shows an IC device 1200 including an intermediate layer 1220 on a substrate 1210. The substrate 1210 may include a semiconductor material. Examples of semiconductor materials include, for example, single-crystal silicon, polycrystalline silicon, SOI, other suitable semiconductor materials, or some combination thereof. The substrate 1210 may also include other materials such as metals, dielectrics, and dopants. In some embodiments, the substrate 1210 may include various IC components such as transistors. In some embodiments, the substrate 1210 is a general workpiece object used to manufacture integrated circuits.

[0085] The intermediate layer 1220 comprises a dielectric or insulating material. Examples of dielectric materials include, for example, silicon oxide (e.g., silicon dioxide (SiO)), doped silicon oxide, fluorinated silicon oxide, carbon-doped silicon oxide, various low-k dielectric materials known in the art, and combinations thereof. The dielectric layer may be formed by conventional techniques such as CVD, PVD, or other deposition methods. In one embodiment, the intermediate layer 220 comprises a lattice pattern that guides the self-assembly of the lamellar triblock copolymer.

[0086] Figure 13 shows the IC device 1300. The IC device 1300 is formed on the IC device 1200, for example, by generating a guide pattern layer 1310 on the surface of the intermediate layer 1220. The guide pattern layer 1310 includes a chemical guide pattern. In Figure 13, the chemical guide pattern is an alternating pattern of first sections 1320 (each referred to as "first section 1320") and second sections 1330 (each referred to as "second section 1330"). Each second section 1330 lies between two first sections 1320 that define the second section 1330. The first sections 1320 have different chemical properties than the second sections 1330. In embodiments where a triblock copolymer is used, the first section 1320 or the second section 1330 implements the orientation of the lamellar triblock copolymer, having different chemistry affinities to different polymer blocks of the triblock copolymer and being perpendicular to the intermediate layer 1220. In embodiments in which polymer nanocomposites are used, the first section 1320 or the second section 1330 has different chemical affinities to the polymer and nanocomposites in the polymer nanocomposites. Thus, the chemical guide pattern can guide the self-assembly of the triblock copolymer and polymer nanocomposites. In one embodiment, the first section 1320 comprises a different material from the second section 1330.

[0087] Figure 14 shows an IC device 1400 produced by forming a repeating structure layer 1410 on a guide pattern layer 1310. The repeating structure layer 1410 comprises a plurality of structures 1420 (individually referred to as “structure 1420”). Structure 1420 comprises a first element 1430 and a second element 1440, the second material being at least partially surrounded by the first element 1430. Structure 1420 can be formed by applying a triblock copolymer or polymer nanocomposite onto the guide pattern layer 1310.

[0088] In some embodiments, the repeating structure layer 1410 is formed by using a triblock copolymer. Structure 1420 is a lamellar structure, for example, lamellar structure 130 in Figure 1B. The first element 1430 includes two lamellae of the lamellar structure, for example, polymer A lamellae 140 and 160 in Figure 1B. The second element 1440 may be polymer B lamellar 150 in Figure 1B. In one embodiment, the triblock copolymer is deposited on a guide pattern layer 1310. The chemical guide pattern of the guide pattern layer 1310 guides the microphase separation of the triblock copolymer. In one embodiment, the second section 1330 (or the first section 1320) of the guide pattern layer 1310 has different chemical affinities to different polymers in the triblock copolymer. For example, the second section 1330 has a stronger chemical affinity for polymer A than for polymer B. Thus, the lamellae of polymer A are formed on the second section 1330 at a faster rate than the lamellae of polymer B. Accordingly, the triblock copolymer self-assembles and forms a lamellar structure based on a chemical guide pattern. The self-assembly of the triblock copolymer is driven by the different chemical affinities of the second section 1330. During the self-assembly process, the lamellar structure is aligned with respect to the second section 1330. This can be used to achieve better alignment compared to lithographic alignment and thus to form very small via openings (e.g., nanoscale). In some embodiments, an annealing treatment may be applied to the triblock copolymer to initiate, accelerate, or otherwise facilitate self-assembly. The annealing treatment may include a treatment that can be operated to increase the temperature of the triblock copolymer. The annealing is performed at a temperature high enough to increase the rate of microphase separation, but low enough to avoid damage to the triblock copolymer or other components of the IC device 1400.

[0089] In other embodiments, the repeating structure layer 1410 may be formed by using a polymer nanocomposite. The structure 1420 is a cylindrical structure, for example, the cylindrical structure 740 in Figure 7B. The first element 1430 may be a polymer cylinder 750, and the second element 1440 may be a nanoparticle cylinder 760 in Figure 7B. The chemical guide pattern of the guide pattern layer 1310 guides the formation of the cylindrical structure. In one embodiment, the second section 1330 (or the first section 1320) of the guide pattern layer 1310 has different chemical affinities to the polymer and nanoparticles in the polymer nanocomposite. For example, the second section 1330 has a stronger chemical affinity to the polymer than to the nanoparticles. Thus, the polymer cylinder is formed on the second section 1330 at a faster rate than the nanoparticle cylinder. The cylindrical structure is aligned with respect to the second section 1330. This can be used to achieve better alignment compared to lithography alignment and thus to form very small via openings (e.g., nanoscale). In some embodiments, annealing treatments may be applied to polymer nanocomposites to initiate, accelerate, or otherwise facilitate the formation of cylindrical structures. The annealing treatment may include a treatment that is operable to increase the temperature of the polymer nanocomposites.

[0090] Figure 15 shows an IC device 1500 including a via opening layer 1510 on which via openings 1520 (individually referred to as "via openings 1520") are formed. The via openings 1520 are formed by removing a second element 1440 from a structure 1420. The via openings 1520 are defined by a corresponding via opening wall 1530. The via opening wall 1530 includes the first element 1430 of the structure 1420. In the embodiment of Figure 15, the second element 1440 is removed from all of the structure 1420. In other embodiments, the second element 1440 is removed from a subset of the structure 1420. Figure 15 shows the removal of the entire second element 1440. In other embodiments, the via openings 1520 may be formed by removing a portion of the second element 1440. In some embodiments, the ratio of the length of the structure 1420 along the Y-axis to the length of the via openings 1520 along the Y-axis is in the range of 0.3 to 2.0. In some embodiments, part or all of the via opening 1520 may be partially or completely filled with a conductive material to form a via.

[0091] In some embodiments, the second element 1440 is removed by performing an etching process (e.g., selective etching) on ​​the repeating structure layer 1410. The second element 1440 is etched faster than the first element 1430. The first element 1430 may remain substantially unetched after the etching process. In one embodiment, the etching process includes isotropic chemical selective etching.

[0092] Figures 16 to 20 illustrate the process of forming via openings 1910 based on the grid pattern of a grid layer 1600 according to several embodiments. Figure 16 is a perspective view of the grid layer 1600. The grid layer 1600 includes a first grid section 1610 (each referred to as “first grid section 1610”) and a second grid section 1620 (each referred to as “second grid section 1620”). The first grid section 1610 and the second grid section 1620 form a grid pattern that is an alternating pattern. For example, each second grid section 1620 is located between two first grid sections 1610. The grid pattern limits where the via openings 1910 are formed. In the embodiments of Figures 16 to 20, the via openings 1910 are formed on the first grid section 1610, and the via openings 1910 are not formed on the second grid section 1620. The lattice layer 1600 may be one embodiment of the intermediate layers 220, 820, or 1220.

[0093] The first lattice section 1610 contains a different material from the second lattice section 1620. In one embodiment, the first lattice section 1610 contains a dielectric material, and the second lattice section 1620 contains a non-dielectric material such as a metal or alloy. Examples of dielectric materials include silicon oxide, doped silicon oxide, fluorinated silicon oxide, carbon-doped oxides, etc. The second lattice section 1620 contains cobalt (Co), aluminum (Al), copper (Cu), Al-doped Cu, ruthenium (Ru), molybdenum (Mo), titanium (Ti), titanium nitride (TiN), aluminum oxide (AlO x ), hafnium oxide (HfO x ), zirconium oxide (ZrO x ), titanium dioxide (TiO xThe metal section includes metals or metal compounds such as ), tungsten (W), etc. In another embodiment, the first lattice section 1610 includes a dielectric material (e.g., the examples listed above), and the second lattice section 1620 includes a different dielectric material such as a metal oxide (e.g., alumina), carbon nitride, carbide, etc. In yet another embodiment, the first lattice section 1610 includes a resist material, and the second lattice section 1620 includes a non-resist material. In yet another embodiment, the first lattice section 1610 includes a positive-type photoresist material, and the second lattice section 1620 includes a negative-type photoresist material.

[0094] Figure 17 shows the formation of a guide pattern layer 1700 on a lattice layer 1600. The guide pattern layer 1700 has a guide pattern formed based on the lattice pattern of the lattice layer 1600. The guide pattern layer 1700 can be formed by modifying a portion of the lattice layer 1600. Alternatingly, the guide pattern layer 1700 is a coating formed on top of the lattice layer 1600. The guide pattern is an alternating pattern of a first material 1710 and a second material 1720. As shown in Figure 17, the first material 1710 is on the first lattice section 1610 and the second material 1720 is on the second lattice section 1620. The guide pattern layer 1700 may be a chemical guide pattern as described above in relation to Figures 12-15.

[0095] In some embodiments, the guide pattern layer 1700 is formed through surface treatment of the lattice layer 1600, for example, by optionally applying a surface treatment to the first lattice section 1610 or the second lattice section 1620 of the lattice layer 1600. In one embodiment, a polymer can be lattified into the lattice layer 1600, for example, by using end groups. Examples of end groups include polyethylene, polystyrene, polyvinyl chloride, polytetrafluoroethylene, polydimethylsiloxane, some polyester, some polyurethane, acrylic resin, epoxy, P(t-butyl acrylate), polyacrylic acid, polyacrylamide, maleic anhydride polymer, polyethylene, polypropylene, polyacrylonitrile, polybutadiene, polyvinyl acetate, polylactic acid, polybutyl acrylate, polycaprolactone, poly(ethylene glycol), polyisoprene, and the like. The polymer can be selectively lattified into the first lattice section 1610 or the second lattice section 1620.

[0096] In some embodiments, a mask may be placed on the lattice layer 1600 to cover the second lattice section 1620 but expose the first lattice section 1610 (or vice versa). After the mask is placed, a surface treatment is performed so that the first lattice section 1610 is treated but the second lattice section 1620 is not. The surface treatment can change the chemical affinity of the first lattice section 1610 or the second lattice section 1620 to a different material. Taking the second lattice section 1620 as an example, the second material 1720 on the second lattice section 1620 may have a stronger chemical affinity to the block of polymer A in a triblock copolymer than to the block of polymer B. As another example, the second material 1720 may have a stronger chemical affinity to the polymer in a polymer nanocomposite than to the nanoparticles in a polymer nanocomposite.

[0097] Figure 18 shows the formation of a repeating structure layer 1800 on the lattice layer 1600 based on a guide pattern. The repeating structure layer 1800 has a repeating structure comprising a first element 1810 and a second element 1820. The repeating structure corresponds to the guide pattern in the guide pattern layer 1700. As shown in Figure 18, the second element 1820 is formed on the first material 1710 but not on the second material 1720, for example, due to the stronger chemical affinity of the second element 1820 to the first material 1710.

[0098] The repeating structure layer 1800 may be the repeating structure layer 1410 described above in relation to Figures 12 to 15. In one embodiment, the repeating structure is a lamellar structure 130, where the first element 1810 is a lamellar 140 and 160 of polymer A, and the second element 1820 is a lamellar 150 of polymer B. In another embodiment, the repeating structure is a cylindrical structure 740, where the first element 1810 is a polymer cylinder 750, and the second element 1820 is a nanoparticle cylinder 760.

[0099] Figure 19 shows the formation of a via opening layer 1900 from a repeating structure layer 1800. Figure 20 is a top view of the via opening layer 1900. In Figure 19, a second element 1820 is removed from the repeating structure layer 1800 to form a via opening 1910. The via opening 1910 is defined by a via opening wall 1910 containing the first element 1810. Since the second element 1820 is on the first material 1710 which is on the first lattice section 1610, the via opening is formed on the first lattice section 1610 and not on the second lattice section 1620, as shown in Figure 20. Thus, the lattice pattern in the lattice layer 1600 defines the location of the via opening 1920. In some embodiments, a via may be formed by partially or completely filling part or all of the via opening 1910 with a conductive material, and as a result, the location of the via is also defined by the lattice pattern.

[0100] Figures 21 to 24 illustrate the process of forming via openings 2420 by using mixed epitaxy according to several embodiments. Mixed epitaxy is a combination of graphoepitaxy and chemical epitaxy. Figure 21 shows an IC device 2100. The IC device 2100 includes a substrate 2110, an intermediate layer 2120 on the substrate 2110 (e.g., attached thereto), and a guide pattern layer 2130 on the intermediate layer 2120. In other embodiments, the IC device 2100 may include different components. For example, the IC device 2100 may not include the intermediate layer 2120, and the guide pattern layer 2130 may be formed on the substrate 2110.

[0101] The substrate 2110 may include semiconductor materials. Examples of semiconductor materials include, for example, single-crystal silicon, polycrystalline silicon, SOI, other suitable semiconductor materials, or some combination thereof. The substrate 2110 may also include other materials such as metals, dielectrics, and dopants. In some embodiments, the substrate 2110 may include various IC components such as transistors. In some embodiments, the substrate 2110 is a general workpiece object used to manufacture integrated circuits.

[0102] The intermediate layer 2120 comprises a dielectric or insulating material. Examples of dielectric materials include, for example, silicon oxide (e.g., silicon dioxide (SiO)), doped silicon oxide, fluorinated silicon oxide, carbon-doped silicon oxide, various low-k dielectric materials known in the art, and combinations thereof. The dielectric layer may be formed by conventional techniques such as CVD, PVD, or other deposition methods. In one embodiment, the intermediate layer 2120 comprises a lattice pattern that guides the self-assembly of the lamellar triblock copolymer.

[0103] The guide pattern layer 2130 includes a topographic guide pattern. The topographic guide pattern induces the self-assembly of lamellar triblock copolymers, or the formation of cylindrical polymer composites. In some embodiments, the topographic guide pattern induces the self-assembly of lamellar triblock copolymers, or the formation of cylindrical polymer composites, through mechanisms such as reducibility, lateral ordering, and confinement effects. In Figure 21, the topographic guide pattern is an alternating pattern of guide walls 2140 (individually referred to as “guide wall 2140”) and openings 2150 (individually referred to as “opening 2150”). Each opening 2150 is located between two guide walls 2140 that define the opening 2150. In some embodiments, the guide pattern layer 2130 is formed by using EUV, immersion lithography (e.g., by using ultraviolet light with a wavelength of 193 nm), deep UV lithography (e.g., dry 193 nm photolithography), or other types of lithography techniques. The topographic guide pattern is three-dimensional. The opening 2150 provides space for DSA of the lamellar triblock copolymer. In some embodiments, the guide pattern layer 2130 can be physically fitted or chemically modified to impart different affinities to different polymer blocks of the lamellar triblock copolymer and implement the orientation of the lamellar triblock copolymer, which is perpendicular to the intermediate layer 2120.

[0104] Figure 22 shows an IC device 2200 including a mixed guide pattern layer 2210. The mixed guide pattern layer 2210 is formed by forming a chemical guide pattern at each of the openings 2150 of the IC device 2100. In Figure 22, the chemical guide pattern is an alternating pattern of first sections 2220 (each referred to as "first section 2220") and second sections 2230 (each referred to as "second section 2230"). Each second section 2230 lies between two first sections 2220 that define the second section 2230. The first sections 2220 have different chemical properties than the second sections 2230. In embodiments where a triblock copolymer is used, the first section 2220 or the second section 2230 implements the orientation of the lamellar triblock copolymer, having different chemistry to different polymer blocks of the triblock copolymer and being perpendicular to the intermediate layer 2120. In embodiments where polymer nanocomposites are used, the first section 2220 or the second section 2230 has different chemical affinities to the polymer and nanocomposites in the polymer nanocomposites. Thus, the chemical guide pattern can guide the self-assembly of the triblock copolymer and polymer nanocomposites. In one embodiment, the first section 2220 contains a different material from the second section 2230.

[0105] Figure 23 shows an IC device 2300 produced by forming a repeating structure layer 2310 based on a mixed guide pattern. The repeating structure layer 2310 comprises a plurality of structures 2320 (individually referred to as “structure 2320”) formed in an opening 2150. Structures 2320 can be formed by applying a triblock copolymer or polymer nanocomposite to an opening 2150 having a chemical guide pattern. In Figure 23, each opening 2510 is filled with three structures 2320. In other embodiments, an opening 2510 may be filled with a different number of structures 2320. Structures 2320 include a first element 2330 and a second element 2340.

[0106] In some embodiments, the repeating structure layer 2310 is formed by using a triblock copolymer. For example, the triblock copolymer is deposited at the opening 2150 of the mixed guide pattern layer 2210. The topography and chemical guide pattern of the mixed guide pattern layer 2210 guide the microphase separation of the triblock copolymer. The self-assembly of the triblock copolymer may be driven by the guide wall 2140 and the different chemistry of the first section 2220 or the second section 2230. In other embodiments, the repeating structure layer 2310 may be formed by using a polymer nanocomposite. The structure 2320 is a cylindrical structure, for example, the cylindrical structure 740 in Figure 7B. The first element 2330 may be a polymer cylinder 750, and the second element 2340 may be a nanoparticle cylinder 760 in Figure 7B. Topography and chemical guide pattern of the mixed guide pattern layer 2210. The cylindrical structure is aligned with respect to the guide wall 2140 and the second section 2230. This can achieve better alignment compared to lithography alignment and therefore can be used to form very small via openings (e.g., nanoscale).

[0107] The alignment of structure 2320 is based on both a topographic guide pattern and a chemical guide pattern, and may therefore be better than alignment based on either a topographic guide pattern or a chemical guide pattern alone. In some embodiments, an annealing treatment may be applied to the triblock copolymer or polymer nanocomposite to initiate, accelerate, or otherwise facilitate the formation of structure 2320. The annealing treatment may include a treatment that is operable to increase the temperature of the polymer nanocomposite.

[0108] Figure 24 shows an IC device 2400 including a via opening layer 2410 on which via openings 2420 (individually referred to as "via openings 2410") are formed. Via openings 2420 are defined by via opening walls 2430 (individually referred to as "via opening walls 2430"). Via openings 2420 are formed by removing a second element 2340 from the structure 2320. The via opening wall 2430 of via opening 2420 is the first element 2330 of the structure 2320. In the embodiment of Figure 24, the second element 2340 is removed from all of the structure 2320. In other embodiments, the second element 2340 is removed from a subset of the structure 2320. Figure 24 shows the removal of the entire second element 2340. In other embodiments, via openings 520 may be formed by removing a portion of the second element 2340. In some embodiments, the ratio of the length of the structure 2320 along the Y-axis to the length of the via opening 2420 along the Y-axis is in the range of 0.3 to 2.0. In some embodiments, vias can be formed by partially or completely filling some or all of the via openings 2420 with conductive material.

[0109] In some embodiments, the second element 2340 is removed by performing an etching process (e.g., selective etching) on ​​the repeating structural layer 2310. The second element 2340 is etched faster than the first element 2330. The first element 2330 may remain substantially unetched after the etching process. In one embodiment, the etching process includes isotropic chemical selective etching.

[0110] Figure 25 is a flowchart of process 2500 for adjusting via openings using a lamellar triblock copolymer according to various embodiments. Process 2500 includes forming a guide pattern on the surface of a layer of an IC device 2510. The process also includes forming a plurality of lamellar structures based on the guide pattern by applying a lamellar phase triblock copolymer to the surface of the layer 2520. Each of the plurality of lamellar structures includes a first lamellar, a second lamellar, and a third lamellar. The second lamellar is located between the first lamellar and the third lamellar. The process further includes forming via openings (such as contact holes) by removing at least some (e.g., all) lamellar structures from the second lamellar 2530.

[0111] Figure 26 is a flowchart showing a process 2600 for adjusting via openings using polymer nanocomposites according to various embodiments. The process 2600 includes forming a guide pattern on the surface of a layer of the IC device 2610. The process 2600 also includes forming a plurality of structures based on at least the guide pattern by applying a polymer nanocomposite material on the surface of the layer 2620. The polymer nanocomposite material includes nanoparticles and polymer chains attached to the nanoparticles. The process 2600 further includes forming via openings (such as contact holes) by removing nanoparticles from the structure 2630.

[0112] Figure 27 is a flowchart of a process 2700 for adjusting via openings using mixed epitaxy according to various embodiments. The process 2700 includes forming a topographic guide pattern 2710 on the surface of a first layer of an IC device, the topographic guide pattern comprising a plurality of openings (the topographic guide pattern may further comprise a plurality of guide walls defining the openings). The process 2700 also includes forming a chemical guide pattern 2720 in each of the openings of the topographic guide pattern (for example, the chemical guide pattern comprising a plurality of first sections and a plurality of second sections, the first sections comprising a first material and the second sections comprising a second material different from the first material). The process 2700 also includes forming a second layer 2730 by applying a block copolymer in the openings having the chemical guide pattern (for example, forming a second layer on the first layer). The process 2700 further includes forming via openings (such as contact holes) in the second layer 2740 by removing portions of the block copolymer from the second layer.

[0113] Figures 28A and 28B are top views of a wafer 2800 and a die 2802 which may include one or more via openings according to any embodiment disclosed herein. In some embodiments, the die 2802 may be included in an IC package according to any embodiment disclosed herein. For example, any of the dies 2802 may function as any of the dies 2256 in the IC package 2980 shown in Figure 29. The wafer 2800 may be composed of semiconductor material or may include one or more dies 2802 having an IC structure formed on the surface of the wafer 2800. Each of the dies 2802 may be an iterative unit of a semiconductor product containing any suitable IC (e.g., an IC including one or more via openings as described herein). After the manufacturing of the semiconductor product is complete (e.g., after the manufacturing of one or more via openings as described herein, e.g., after the manufacturing of any embodiment of the IC device as described herein), the wafer 2800 may undergo a singulation process. Here, each die 2802 is isolated from one another in order to provide discrete "chips" of semiconductor products. In particular, devices including one or more via openings disclosed herein may take the form of a wafer 2800 (e.g., unsingulated) or a die 2802 (e.g., singulated). A die 2802 may include one or more diodes, one or more transistors, and optionally include auxiliary circuits for routing electrical signals to the diodes and transistors, as well as any other IC components. In some embodiments, a wafer 2800 or die 2802 may implement an ESD protection device, an RF FE device, a memory device (e.g., a static random access memory (SRAM) device), a logic device (e.g., AND, OR, NAND, or NOR gates), or any other suitable circuit element. Multiple devices may be combined on a single die 2802.

[0114] Figure 29 is a side cross-sectional view of an example of an exemplary IC package 2900, which may include one or more IC devices having one or more via openings, according to any embodiment disclosed herein. In some embodiments, the IC package 2900 may be a system-in-package (SiP).

[0115] As shown in Figure 29, the IC package 2900 may include a package substrate 2952. The package substrate 2952 may be formed from a dielectric material (e.g., ceramic, glass, a combination of organic and inorganic materials, a build-up film, an epoxy film with filter particles, etc., and may have embedded portions having different materials) and may have conductive paths extending through the dielectric material between plane 2972 ​​and plane 2974, or between different locations on plane 2972, and / or between different locations on plane 2974.

[0116] The package substrate 2952 may include conductive contacts 2963 coupled to conductive paths 2962 through the package substrate 2952, allowing circuits within the die 2956 and / or interposer 2957 to be electrically coupled to various conductive contacts 2964 (or other devices included in the package substrate 2952, not shown).

[0117] The IC package 2900 may include an interposer 2957 coupled to conductive contacts 2961 vias 2952 of the package substrate 2952, a first-level interconnect 2965, and the conductive contacts 2963 of the package substrate 2952. The first-level interconnect 2965 shown in Figure 29 is a solder bump, but any preferred first-level interconnect 2965 may be used. In some embodiments, the interposer 2957 may not be included in the IC package 2900, and instead, the die 2956 may be directly coupled to the conductive contacts 2963 on the surface 2972 ​​by the first-level interconnect 2965.

[0118] The IC package 2900 may include one or more dies 2956 coupled to the interposer 2957 via conductive contacts 2954 of the die 2956, a first-level interconnect 2958, and conductive contacts 2960 of the interposer 2957. The conductive contacts 2960 may allow circuits within the die 2956 to be electrically coupled to various conductive contacts 2961 (or other devices (not shown) included in the interposer 2957) by coupling to a conductive path (not shown) through the interposer 2957. The first-level interconnect 2958 shown in Figure 29 is a solder bump, but any suitable first-level interconnect 2958 may be used. As used herein, “conductive contact” may refer to a portion of a conductive material (e.g., metal) that functions as an interface between different components. The conductive contact may be recessed into the surface of a component, coplanar with the surface, extend away from the surface, or take any suitable form (e.g., a conductive pad or socket).

[0119] In some embodiments, an underfill material 2966 may be placed between the package substrate 2952 and the interposer 2957 around the first level interconnect 2965, and a mold compound 2968 may be placed around the die 2956 and the interposer 2957 and in contact with the package substrate 2952. In some embodiments, the underfill material 2966 may be identical to the mold compound 2968. Exemplary materials that may be used for the underfill material 2966 and the mold compound 2968 are epoxy mold materials where appropriate. A second level interconnect 2970 may be coupled to a conductive contact 2964. The second level interconnect 2970 shown in Figure 29 is a solder ball (e.g., for a ball grid array arrangement), but any suitable second level interconnect 2970 (e.g., a pin in a pin grid array arrangement or a land in a land grid array arrangement) may be used. The second level interconnect 2970 may be used to connect IC package 2900 to a circuit board (e.g., a motherboard), an interposer, or another component such as another IC package known in the art and described below with reference to Figure 29.

[0120] Die 2956 may take any form of an embodiment of die 2802 described herein and may include any embodiment of an IC device having one or more via openings, for example, any of the IC devices described herein. In embodiments in which IC package 2900 includes multiple dies 2956, IC package 2900 may be referred to as a multichip package. Importantly, according to any embodiment described herein, even in such embodiments of MCP mounting of IC package 2900, one or more via openings may be provided on a single chip. Die 2956 may include circuitry for performing any desired function. For example, one or more of die 2956 may be ESD protection dies including one or more via openings described herein, one or more of die 2956 may be logic dies (e.g., silicon-based dies), one or more of die 2956 may be memory dies (e.g., high-bandwidth memory), etc. In some embodiments, any of the dies 2956 may include one or more via openings, such as those described above, and in some embodiments, at least a portion of the dies 2956 may not include any via openings.

[0121] The IC package 2900 shown in Figure 29 may be a flip-chip package, but other package architectures may be used. For example, the IC package 2900 may be a ball grid array (BGA) package, such as an embedded wafer-level ball grid array (eWLB) package. In another example, the IC package 2900 may be a wafer-level chip-scale package (WLCSP) or a panel fan-out (FO) package. Two dies 2956 are shown in the IC package 2900 of Figure 29, but the IC package 2900 may contain any desired number of dies 2956. The IC package 2900 may include additional passive components, such as surface-mount resistors, capacitors, and inductors, which are located on either the first or second surface 2974 of the package substrate 2952 or on the interposer 2957. More generally, the IC package 2900 may include any other active or passive components known in the art.

[0122] Figure 30 is a side cross-sectional view of an IC device assembly 3000 which may include a component having one or more IC devices that implement one or more via openings, according to any embodiment disclosed herein. The IC device assembly 3000 includes a number of components arranged on a circuit board 3002 (which may be, for example, a motherboard). The IC device assembly 3000 includes a number of components arranged on a first surface 3040 of the circuit board 3002 and on an opposing second surface 3042 of the circuit board 3002, and generally the components may be arranged on one or both of surfaces 3040 and 3042. In particular, any preferred component of the IC device assembly 3000 may include any of the IC devices that implement one or more via openings, according to any embodiment disclosed herein, for example, any of the IC packages described below with reference to the IC device assembly 3000 may take the form of any of the embodiments of the IC package 2900 described above with reference to Figure 29 (for example, the die 2956 may include one or more via openings).

[0123] In some embodiments, the circuit board 3002 may be a PCB comprising a plurality of metal layers separated from each other by layers of dielectric material and interconnected by conductive vias. One or more of these metal layers may be formed with a desired circuit pattern to transfer electrical signals (optionally in conjunction with other metal layers) between components coupled to the circuit board 3002. In other embodiments, the circuit board 3002 may be a non-PCB substrate.

[0124] The IC device assembly 3000 shown in Figure 30 includes a package-on-interposer structure 3036 coupled to a first surface 3040 of a circuit board 3002 by a coupling component 3016. The coupling component 3016 may electrically and mechanically couple the package-on-interposer structure 3036 to the circuit board 3002 and may include solder balls (e.g., shown in Figure 30), male and female sockets, adhesive, underfill material, and / or any other suitable electrical and / or mechanical coupling structures.

[0125] The package-on-interposer structure 3036 may include an IC package 3020 coupled to an interposer 3004 by a coupling component 3018. The coupling component 3018 can take any suitable form for the application, such as the form described above with reference to the coupling component 3016. The IC package 3020 may be, or include, for example, a die (die 2802 in Figure 28B), an IC device (e.g., the IC devices described above), or any other suitable component. In particular, the IC package 3020 may include one or more via openings as described herein. Although a single IC package 3020 is shown in Figure 30, multiple IC packages may be coupled to the interposer 3004, and in fact, additional interposers may be coupled to the interposer 3004. The interposer 3004 may provide an intervening substrate used to bridge the circuit board 3002 and the IC package 3020. Generally, the interposer 3004 may extend connections to a wider pitch or reroute connections to different connections. For example, the interposer 3004 may couple an IC package 3020 (e.g., a die) to the BGA of a coupling component 3016 for coupling with a circuit board 3002. In the embodiment shown in Figure 30, the IC package 3020 and the circuit board 3002 are mounted on opposite sides of the interposer 3004. In other embodiments, the IC package 3020 and the circuit board 3002 may be mounted on the same side of the interposer 3004. In some embodiments, three or more components may be interconnected by the interposer 3004.

[0126] The interposer 3004 may be formed from an epoxy resin, a glass fiber reinforced epoxy resin, a ceramic material, or a polymer material such as polyimide. In some implementations, the interposer 3004 may be formed from alternatingly overlapping rigid or flexible materials, which may include the same materials as those described above for use in semiconductor substrates, such as silicon, germanium, and other Group III-V and Group IV materials. The interposer 3004 may include a metal interconnect 3008 and vias 3010 including, but not limited to, through-silicon vias (TSVs) 3006. The interposer 3004 may further include embedded devices 3014, which include both passive and active devices. Such devices may include, but are not limited to, capacitors, decoupling capacitors, resistors, inductors, fuses, diodes, transformers, sensors, ESD protection devices, and memory devices. More complex devices such as additional RF devices, power amplifiers, power management devices, antennas, arrays, sensors, and micro-electromechanical systems (MEMS) devices may also be formed on the interposer 3004. In some embodiments, IC devices that implement one or more via openings described herein may also be implemented in / on the interposer 3004. The package-on-interposer structure 3036 may take any form of package-on-interposer structure known in the art.

[0127] The IC device assembly 3000 may include an IC package 3024 coupled to a first surface 3040 of a circuit board 3002 by a coupling component 3022. The coupling component 3022 may take any form of the embodiments described above with reference to coupling component 3016, and the IC package 3024 may take any form of the embodiments described above with reference to IC package 3020.

[0128] The IC device assembly 3000 shown in Figure 30 includes a package-on-package structure 3034 coupled to a second surface 3042 of a circuit board 3002 by a coupling component 3028. The package-on-package structure 3034 may include IC packages 3026 and 3032, which are coupled together by a coupling component 3030 such that IC package 3026 is positioned between the circuit board 3002 and IC package 3032. The coupling components 3028 and 3030 may take any form of the embodiment of the coupling component 3016 described above, and the IC packages 3026 and 3032 may take any form of the embodiment of the IC package 3020 described above. The package-on-package structure 3034 may be configured according to any package-on-package structure known in the art.

[0129] Figure 31 is a block diagram of an exemplary computing device 3100 which may include one or more components having one or more transistor devices manufactured using placeholders for back contact formation, according to any embodiment disclosed herein. For example, any preferred component of computing device 3100 may include a die (e.g., die 2802 in Figure 28B) including one or more via openings according to any embodiment disclosed herein. Any component of computing device 3100 may include an IC device (e.g., any embodiment of the IC device in Figures 1A to 24) and / or an IC package (e.g., IC package 2900 in Figure 29). Any component of computing device 3100 may include an IC device assembly (e.g., IC device assembly 3000 in Figure 30). Although numerous components are shown in Figure 31 as being included in computing device 3100, one or more of these components may be omitted or duplicated if appropriate for the application. In some embodiments, some or all of the components included in computing device 3100 may be mounted on one or more motherboards. In some embodiments, some or all of these components are manufactured on a single system-on-a-chip (SoC) die.

[0130] Additionally, in various embodiments, the computing device 3100 does not have to include one or more of the components shown in Figure 31, but it may include interface circuits for connecting one or more components. For example, the computing device 3100 does not have to include the display device 3106, but it may include a display device interface circuit (e.g., a connector and driver circuit) to which the display device 3106 can be connected. In another set of examples, the computing device 3100 does not have to include the audio input device 3118 or the audio output device 3108, but it may include an audio input or output device interface circuit (e.g., a connector and support circuit) to which the audio input device 3118 or the audio output device 3108 can be connected.

[0131] The computing device 3100 may include processing devices 3102 (e.g., one or more processing devices). As used herein, the terms “processing device” or “processor” may refer to any device or part of a device that processes electronic data from registers and / or memory and converts such electronic data into other electronic data that can be stored in registers and / or memory. The processing device 3102 may include one or more digital signal processors (DSPs), application-specific integrated circuits (ASICs), central processing units (CPUs), graphics processing units (GPUs), cryptographic processors (dedicated processors that execute cryptographic algorithms in hardware), server processors, or any other suitable processing devices. The computing device 3100 may include memory 3104, which itself may include one or more memory devices, such as volatile memory (e.g., DRAM), non-volatile memory (e.g., read-only memory (ROM)), flash memory, solid-state memory, and / or hard drives. In some embodiments, memory 3104 may include memory that shares a die with the processing device 3102.

[0132] In some embodiments, the computing device 3100 may include a communication chip 3112 (e.g., one or more communication chips). For example, the communication chip 3112 may be configured to manage wireless communication for transferring data to and from the computing device 3100. The term “wireless” and its derivatives may be used to describe circuits, devices, systems, methods, techniques, communication channels, etc., that can communicate data through the use of modulated electromagnetic radiation through a non-solid medium. While the relevant devices may not include wiring in some embodiments, the term does not imply that the relevant devices are free from any wiring.

[0133] The 3112 communication chip may implement any of many wireless standards or protocols, including, but are not limited to, Wi-Fi (IEEE 802.11 family), IEEE standards including the IEEE 802.16 standard (e.g., IEEE 802.16-2005 amendment), and the Long-Term Evolution (LTE) project, including any modifications, updates, and / or revisions (e.g., the Advanced LTE project, the Ultra Mobile Broadband (UMB) project (also known as "3GPP2")). Broadband radio access (BWA) networks compatible with IEEE 802.16 are commonly referred to as WiMAX® networks. This acronym stands for Worldwide Interoperability for Microwave Access and is a certification mark for products that have passed compliance and interoperability testing of the IEEE 802.16 standard. The communication chip 3112 may operate in accordance with Global System for Mobile Communications (GSM®), General-Purpose Packet Radio Service (GPRS), Universal Mobile Communications System (UMTS), High-Speed ​​Packet Access (HSPA), Advanced HSPA (E-HSPA), or LTE networks. The communication chip 3112 may operate in accordance with GSM® Advanced High-Speed ​​Data Transmission (EDGE), GSM® EDGE Radio Access Network (GERAN), Universal Terrestrial Radio Access Network (UTRAN), or Advanced UTRAN (E-UTRAN). The communication chip 3112 may operate in accordance with Code Division Multiple Access (CDMA), Time Division Multiple Access (TDMA), Digital Enhanced Cordless Telecommunications (DECT), Evolution Data Optimized (EV-DO) and their derivatives, as well as any other radio protocols designated as 3G, 4G, 5G, and later. In other embodiments, the communication chip 3112 may be made to operate in accordance with other radio protocols. The computing device 3100 may include an antenna 3122 for facilitating wireless communication and / or for receiving other wireless communications (such as AM or FM radio transmissions).

[0134] In some embodiments, the communication chip 3112 may manage wired communications such as electrical, optical, or any other suitable communication protocol (e.g., Ethernet®). As described above, the communication chip 3112 may comprise multiple communication chips. For example, the first communication chip 3112 may be dedicated to shorter-range wireless communications such as Wi-Fi® or Bluetooth®, and the second communication chip 3112 may be dedicated to longer-range wireless communications such as Global Positioning System (GPS), EDGE, GPRS, CDMA, WiMAX®, LTE, EV-DO, or others. In some embodiments, the first communication chip 3112 may be dedicated to wireless communications, and the second communication chip 3112 may be dedicated to wired communications.

[0135] The computing device 3100 may include a battery / power supply circuit 3114. The battery / power supply circuit 3114 may include a circuit for coupling components of the computing device 3100 to one or more energy storage devices (e.g., batteries or capacitors) and / or an energy source separate from the computing device 3100 (e.g., AC line power).

[0136] The computing device 3100 may include a display device 3106 (or the corresponding interface circuit described above). The display device 3106 may include any visual indicator, such as a head-up display, computer monitor, projector, touchscreen display, liquid crystal display (LCD), light-emitting diode display, or flat panel display.

[0137] The computing device 3100 may include an audio output device 3108 (or the corresponding interface circuit described above). The audio output device 3108 may include any device that generates an audible indicator, such as a speaker, headset, or earbuds.

[0138] The computing device 3100 may include an audio input device 3118 (or the corresponding interface circuit described above). The audio input device 3118 may include any device that generates a signal representing sound, such as a microphone, a microphone array, or a digital device (e.g., a device with a musical instrument digital interface (MIDI) output).

[0139] The computing device 3100 may include a GPS device 3116 (or the corresponding interface circuit described above). The GPS device 3116 may communicate with a satellite-based system and may receive the position of the computing device 3100 in a manner known in the art.

[0140] The computing device 3100 may include other output devices 3110 (or corresponding interface circuits as described above). Examples of other output devices 3110 may include audio codecs, video codecs, printers, wired or wireless transmitters for providing information to other devices, or additional storage devices.

[0141] The computing device 3100 may include other input devices 3120 (or corresponding interface circuits as described above). Examples of other input devices 3120 may include accelerometers, gyroscopes, compasses, imaging devices, cursor control devices such as keyboards and mice, styluses, touchpads, barcode readers, quick response (QR) code readers, any sensors, or radio frequency identification (RFID) readers.

[0142] The computing device 3100 may have any desired form factor, such as a handheld electric device or mobile computing device (e.g., a mobile phone, smartphone, mobile internet device, music player, tablet computer, laptop computer, netbook computer, ultrabook computer, personal digital assistant (PDA), ultramobile personal computer, etc.), a desktop computing device, a server device or other network-connected computing component, a printer, scanner, monitor, set-top box, entertainment control unit, vehicle control unit, digital camera, digital video recorder, or wearable computing device. In some embodiments, the computing device 3100 may be any other electronic device that processes data. [Example Selection]

[0143] The following paragraphs illustrate various examples of embodiments disclosed herein.

[0144] Example 1 provides an IC device. The IC device comprises a first layer, a second layer adjacent to the first layer, and a second layer comprising a plurality of lamellar structures, each lamellar structure comprising a first lamellar comprising a first block of a triblock copolymer, a second lamellar comprising a second block of a triblock copolymer, and vias between the first and second lamellae, wherein the first and second lamellae are electrically insulated, and the vias comprise a conductive material.

[0145] Example 2 provides an IC device according to claim 1, wherein the first lamellar and the second lamellar contain the same polymer.

[0146] Example 3 provides an IC device according to claim 2, wherein the same polymer is selected from the group consisting of polyethylene, polystyrene, polyvinyl chloride, polytetrafluoroethylene, polydimethylsiloxane, some polyester, some polyurethane, acrylic resin, epoxy, P(t-butyl acrylate), polyacrylic acid, polyacrylamide, maleic anhydride polymer, polyethylene, polypropylene, polyacrylonitrile, polybutadiene, polyvinyl acetate, polylactic acid, polybutyl acrylate, polylactic acid, polycaprolactone, poly(ethylene glycol), and polyisoprene.

[0147] Example 4 provides an IC device according to any of the above claims, wherein the first layer comprises a plurality of first sections comprising a first material and a plurality of second sections comprising a second material different from the first material, and vias are located in portions of the second layer adjacent to one of the first sections of the first layer.

[0148] Example 5 provides an IC device according to claim 4, wherein the first material is a dielectric material and the second material is a metal or a metallic compound.

[0149] Example 6 provides an IC device according to claim 4, wherein the first material is a resist material and the second material is a non-resist material.

[0150] Example 7 provides an IC device according to any of the above claims, wherein the orientation of the lamellar structure is perpendicular to the surface of the first layer.

[0151] Example 8 provides an IC device according to any of the above claims, wherein the ratio of the length of the lamellar structure perpendicular to the surface of the second layer to the length of the vias in the same direction is in the range of 0.3 to 2.0.

[0152] Example 9 provides an IC device according to any of the above claims, wherein the vias include a conductive material.

[0153] Example 10 provides an IC device according to any of the above claims, wherein the vias are through vias, embedded vias, or blind vias.

[0154] Example 11 provides an IC package, which includes an IC device according to any of the above claims and further IC components coupled to the IC device.

[0155] Example 12 provides an IC package according to claim 11, wherein further IC components include one of a package substrate, an interposer, or further IC dies.

[0156] Example 13 provides an IC package according to claim 11 or 12, wherein an IC device according to any one of claims 1 to 10 may include, or be part of, at least one of a memory device, a computing device, a wearable device, a handheld electronic device, and a wireless communication device.

[0157] Example 14 provides an electronic device. The electronic device comprises a carrier substrate, an IC device according to any one of claims 1 to 10 coupled to the carrier substrate, and one or more IC packages according to any one of claims 11 to 13.

[0158] Example 15 provides an electronic device according to claim 14, wherein the carrier board is a motherboard.

[0159] Example 16 provides an electronic device according to claim 14, wherein the carrier substrate is a PCB.

[0160] Example 17 provides an electronic device according to any one of claims 14 to 16, the electronic device being a wearable electronic device or a handheld electronic device.

[0161] Example 18 provides an electronic device according to any one of claims 14 to 17, the electronic device further comprising one or more communication chips and antennas.

[0162] Example 19 provides an electronic device according to any one of claims 14 to 18, the electronic device being an RF transceiver.

[0163] Example 20 provides an electronic device according to any one of claims 14 to 18, the electronic device being one of a switch, a power amplifier, a low-noise amplifier, a filter, a filter bank, a duplexer, an upconverter, or an RF communication device, such as a downconverter for an RF transceiver.

[0164] Example 21 provides an electronic device according to any one of claims 14 to 18, wherein the electronic device is a computing device.

[0165] Example 22 provides an electronic device according to any one of claims 14 to 21, the electronic device being included in a base station of a wireless communication system.

[0166] Example 23 provides an electronic device according to any one of claims 14 to 21, the electronic device being included in a user equipment device of a wireless communication system.

[0167] Example 24 provides a method for forming contact holes for an integrated circuit (IC) device, the method comprising the steps of: forming a guide pattern on the surface of a layer of the IC device; forming a plurality of lamellar structures based on the guide pattern by applying a triblock copolymer of lamellar phases to the surface of the layer, each of the plurality of lamellar structures comprising a first lamellar, a second lamellar, and a third lamellar, wherein the second lamellar is located between the first lamellar and the third lamellar; and forming a contact hole by removing the second lamellar from at least a portion of the lamellar structure.

[0168] Example 25 provides the method according to any one of claims 24, wherein both the first and third lamellae comprise the first polymer, and the second lamellae comprises a second polymer different from the first polymer.

[0169] Example 26 provides a method according to any one of claims 21 to 35, wherein the orientation of the lamellar structure is perpendicular to the surface of the layer.

[0170] Example 27 provides a method according to any one of claims 24 to 26, wherein the layer includes a lattice pattern, and the step of forming a plurality of lamellar structures based on at least a guide pattern by applying a triblock copolymer of lamellar phases onto the surface of the layer is:

[0171] The process includes the step of applying a lamellar phase triblock copolymer onto the surface of a layer to form multiple lamellar structures based on a guide pattern and a lattice pattern of the layer.

[0172] Example 28 provides a method according to claim 27, wherein the grid pattern comprises an alternating pattern of first and second sections, the first section comprising a first material, and the second section comprising a second material different from the first material.

[0173] Example 29 provides a method according to claim 28, wherein the contact hole is formed on at least a portion of the first section in the layer.

[0174] Example 30 provides the method according to any one of claims 24 to 29, wherein the ratio of the length of the lamellar structure perpendicular to the surface of the layer to the length of the contact holes in that direction is in the range of 0.3 to 2.0.

[0175] Example 31 provides a method according to any one of claims 24 to 30, wherein the guide pattern comprises an alternating pattern of first and second sections, the guide pattern is a chemical guide pattern, the first section comprises a first material, and the second section comprises a second material different from the first material.

[0176] Example 32 provides a method according to any one of claims 24 to 31, wherein the guide pattern comprises an alternating pattern of first and second sections, the guide pattern is a topographic guide pattern, the second section is an opening, and the first section is a guide wall defining the opening.

[0177] Example 33 provides a method according to claim 32, the step of forming a guide pattern on the surface of a layer of an IC device, the step of forming a chemical guide pattern in an opening, the chemical guide pattern comprising an alternating pattern of a third section and a fourth section, the third section comprising a third material, and the fourth section comprising a fourth material different from the third material.

[0178] Example 34 provides a method according to any one of claims 24 to 33, wherein the step of forming a contact hole by removing a second lamellar from at least a portion of the lamellar structure includes the step of performing an etching process on at least a portion of the lamellar structure to etch the second lamellar faster than etching the first and third lamellae.

[0179] Example 35 provides a method for forming contact holes for an integrated circuit (IC) device, the method comprising the steps of: forming a topography guide pattern on the surface of a first layer of the IC device, wherein the topography guide pattern comprises a plurality of openings; forming a chemical guide pattern in each of the openings of the topography guide pattern; forming a second layer by applying a block copolymer in the openings having the chemical guide pattern; and forming contact holes in the second layer by removing a portion of the block copolymer from the second layer.

[0180] Example 36 provides the method according to claim 35, wherein the block copolymer is a lamellar-phase triblock copolymer.

[0181] Example 37 provides a method according to claim 36, wherein the triblock copolymer of the lamellar phase comprises a first lamellar, a second lamellar, and a third lamellar, the second lamellar being located between the first and third lamellars, the first and third lamellars comprising a first polymer, and the second lamellar comprising a second polymer different from the first polymer.

[0182] Example 38 provides a method according to any one of claims 35 to 37, the step of forming a chemical guide pattern in each of the openings of a topographic guide pattern, the step of forming a chemical guide pattern in a first layer based on a grid pattern, wherein the grid pattern comprises alternating patterns of first and second sections.

[0183] Example 39 provides a method according to claim 38, wherein the step of forming a contact hole in the second layer by removing a portion of the block copolymer from the second layer includes the step of forming a contact hole in a portion of the second layer that is above at least a portion of the first section in the first layer.

[0184] Example 40 provides a method according to any one of the above claims, further including a process for forming an IC device according to any one of claims 1 to 10.

[0185] Example 41 provides a method according to any one of the above claims, further including a process for forming an IC package according to any one of claims 11 to 13.

[0186] Example 42 provides a method according to any one of the above claims, further comprising a process for forming an electronic device according to any one of claims 14 to 23.

[0187] The above description of the implementation of the disclosed information, including matters described in the abstract, is not intended to be exhaustive or to limit the disclosure to the exact form provided. While specific implementations and examples of the disclosed information are described herein for illustrative purposes, various equivalent modifications are possible within the scope of the disclosed information, as will be apparent to those skilled in the art. These variations may be made in view of the above detailed description. [Other possible items] (Item 1) Integrated circuit (IC) device, The first layer, A second layer adjacent to the first layer, the second layer comprising a plurality of lamellar structures, each of which comprises a first lamellar containing a first block of the triblock copolymer, a second lamellar containing a second block of the triblock copolymer, and vias between the first lamellar and the second lamellar, and An IC device comprising the first lamella and the second lamella being electrically insulated, and the vias containing a conductive material. (Item 2) The IC device according to item 1, wherein the first lamellar and the second lamellar contain the same polymer. (Item 3) The IC device according to item 2, wherein the same polymer described above includes at least one of polyethylene, polystyrene, polyvinyl chloride, polytetrafluoroethylene, polydimethylsiloxane, any polyester, any polyurethane, acrylic resin, epoxy, P(t-butyl acrylate), polyacrylic acid, polyacrylamide, maleic anhydride polymer, polyethylene, polypropylene, polyacrylonitrile, polybutadiene, polyvinyl acetate, polylactic acid, polybutyl acrylate, polylactic acid, polycaprolactone, poly(ethylene glycol), and polyisoprene. (Item 4) The IC device according to item 1, wherein the first layer comprises a plurality of first sections containing a first material and a plurality of second sections containing a second material different from the first material, and the vias are located in a portion of the second layer adjacent to one of the first sections of the first layer. (Item 5) The IC device described in item 4, wherein the first material is a dielectric material and the second material is a metal or a metallic compound. (Item 6) The IC device described in item 4, wherein the first material is a resist material and the second material is a non-resist material. (Item 7) The IC device according to item 1, wherein the orientation of the lamellar structure is perpendicular to the surface of the first layer. (Item 8) The IC device according to item 1, wherein the ratio of the length of the lamellar structure along the direction perpendicular to the surface of the second layer to the length of the via along the same direction is in the range of 0.3 to 2.0. (Item 9) The above multiple lamellar structures are based on the triblock copolymer of lamellar phases, as described in item 1. (Item 10) The above vias are through vias, buried vias, or blind vias, as defined in item 1 of the IC device. (Item 11) A method for forming via openings for integrated circuit (IC) devices, The steps include forming a guide pattern on the surface of the layer of the IC device, A step of forming a plurality of lamellar structures based on the guide pattern by applying a lamellar phase triblock copolymer to the surface of the above layer, wherein each of the plurality of lamellar structures comprises a first lamellar, a second lamellar, and a third lamellar, and the second lamellar is located between the first lamellar and the third lamellar, and The step of forming the via opening by removing the second lamellar from at least a portion of the lamellar structure described above. A method for providing this. (Item 12) The method according to item 11, wherein both the first lamellar and the third lamellar contain a first polymer, and the second lamellar contains a second polymer different from the first polymer. (Item 13) The method according to item 11, wherein the orientation of the lamellar structure is perpendicular to the surface of the layer. (Item 14) The above layer includes a lattice pattern, and the step of forming the above multiple lamellar structures based on at least the guide pattern by applying the above lamellar phase triblock copolymer onto the above surface of the above layer is as follows: The step of applying the triblock copolymer of the lamellar phase onto the surface of the above layer to form the plurality of lamellar structures based on the guide pattern and the lattice pattern of the above layer. The method described in item 11, including the method described in item 11. (Item 15) The method according to item 11, wherein the ratio of the length of the lamellar structure along the direction perpendicular to the surface of the above layer to the length of the via opening along the above direction is in the range of 0.3 to 2.0. (Item 16) A method for forming via openings for integrated circuit (IC) devices, A step of forming a topography guide pattern on the surface of the first layer of the IC device, wherein the topography guide pattern includes a plurality of openings. The steps include forming a chemical guide pattern at each of the openings of the topographic guide pattern described above, The steps include forming a second layer by applying a block copolymer to the opening having the above chemical guide pattern, The step of forming the via opening in the second layer by removing a portion of the block copolymer from the second layer. A method for providing this. (Item 17) The method according to item 16, wherein the block copolymer is a lamellar-phase triblock copolymer. (Item 18) The method according to item 17, wherein the triblock copolymer of the lamellar phase comprises a first lamellar, a second lamellar, and a third lamellar, the second lamellar being located between the first lamellar and the third lamellar, the first lamellar and the third lamellar comprising a first polymer, and the second lamellar comprising a second polymer different from the first polymer. (Item 19) The step of forming the chemical guide pattern in each of the openings of the topographic guide pattern is as follows: The method according to item 16, comprising the step of forming the chemical guide pattern based on a lattice pattern in the first layer, wherein the lattice pattern includes an alternating pattern of a first section and a second section. (Item 20) The step of forming the via opening in the second layer by removing a portion of the block copolymer from the second layer is as follows: The step of forming the via opening in a part of the second layer which is located above at least a part of the first section in the first layer. The method described in item 19, including the method described in item 19.

Claims

1. Integrated circuit (IC) device, The first layer, A second layer adjacent to the first layer, the second layer comprising a plurality of lamellar structures, each of which comprises a first lamellar containing a first block of the triblock copolymer, a second lamellar containing a second block of the triblock copolymer, and vias between the first lamellar and the second lamellar, the second layer and An IC device comprising, wherein the first lamella and the second lamella are electrically insulated, and the vias contain a conductive material.

2. The IC device according to claim 1, wherein the first surface of the via is in contact with the surface of the first lamellar, the second surface of the via is in contact with the surface of the second lamellar, and the first surface of the via faces the second surface of the via.

3. Further comprising a guide pattern layer including an opening and a guide wall, The IC device according to claim 1, wherein the second layer is disposed within the opening of the guide pattern layer.

4. The IC device according to any one of claims 1 to 3, wherein the first lamella and the second lamella comprise the same polymer.

5. The IC device according to claim 4, wherein the same polymer comprises at least one of polyethylene, polystyrene, polyvinyl chloride, polytetrafluoroethylene, polydimethylsiloxane, any polyester, any polyurethane, acrylic resin, epoxy, P(t-butyl acrylate), polyacrylic acid, polyacrylamide, maleic anhydride polymer, polyethylene, polypropylene, polyacrylonitrile, polybutadiene, polyvinyl acetate, polybutyl acrylate, polylactic acid, polycaprolactone, poly(ethylene glycol), and polyisoprene.

6. The IC device according to any one of claims 1 to 5, wherein the first layer comprises a plurality of first sections comprising a first material and a plurality of second sections comprising a second material different from the first material, and the via is located in a portion of the second layer adjacent to one of the plurality of first sections of the first layer.

7. The IC device according to claim 6, wherein the first material is a dielectric material and the second material is a metal or a metal compound.

8. The IC device according to claim 6, wherein the first material is a resist material and the second material is a non-resist material.

9. The orientation of the plurality of lamellar structures is perpendicular to the surface of the first layer, according to any one of claims 1 to 8.

10. The IC device according to any one of claims 1 to 9, wherein the ratio of the length of the plurality of lamellar structures along a direction perpendicular to the surface of the second layer to the length of the via along the said direction is in the range of 0.3 to 2.

0.

11. The IC device according to any one of claims 1 to 10, wherein the plurality of lamellar structures are based on the triblock copolymer of the lamellar phase.

12. The IC device according to any one of claims 1 to 11, wherein the via is a through via, a buried via, or a blind via.

13. An IC device according to any one of claims 1 to 12, Further IC components coupled to the aforementioned IC device An integrated circuit (IC) package that includes [a specific feature / feature].

14. The IC package according to claim 13, wherein the further IC component includes one of a package substrate, an interposer, or a further IC die.

15. The IC package according to claim 13 or 14, wherein the IC device according to any one of claims 1 to 10 may include, or be part of, at least one of a memory device, a computing device, a wearable device, a handheld electronic device, and a wireless communication device.

16. Carrier substrate and The carrier substrate is coupled to one or more IC devices according to any one of claims 1 to 12 and IC packages according to any one of claims 13 to 15. An electronic device equipped with the following features.

17. The electronic device according to claim 16, wherein the carrier board is a motherboard.

18. The electronic device according to claim 16, wherein the carrier substrate is a PCB.

19. The electronic device according to any one of claims 16 to 18, wherein the electronic device is a wearable electronic device or a handheld electronic device.

20. The electronic device according to any one of claims 16 to 19, further comprising one or more communication chips and antennas.

21. The electronic device according to any one of claims 16 to 20, wherein the electronic device is an RF transceiver.

22. The electronic device according to any one of claims 16 to 20, wherein the electronic device is one of a switch, a power amplifier, a low-noise amplifier, a filter, a filter bank, a duplexer, an upconverter, or an RF communication device, such as a downconverter for an RF transceiver.

23. The electronic device according to any one of claims 16 to 20, wherein the electronic device is a computing device.

24. The electronic device is included in a base station of a wireless communication system, as described in any one of claims 16 to 23.

25. The electronic device is included in the user equipment device of a wireless communication system, as described in any one of claims 16 to 23.

26. A method for forming contact holes for integrated circuit (IC) devices, The steps include forming a guide pattern on the surface of the layer of the IC device, A step of forming a plurality of lamellar structures based on the guide pattern by applying a lamellar phase triblock copolymer to the surface of the layer, wherein each of the plurality of lamellar structures comprises a first lamellar, a second lamellar, and a third lamellar, and the second lamellar is located between the first lamellar and the third lamellar, The step of forming the contact hole by removing the second lamellar from at least a portion of the plurality of lamellar structures. A method for providing this.

27. ​​The method according to claim 26, wherein the first lamella is opposite to the third lamella.

28. The step of forming the plurality of lamellar structures based on the guide pattern is: The method according to claim 26, further comprising the step of forming the plurality of lamellar structures based on the guide pattern inside the openings of the guide pattern.

29. The method according to any one of claims 26 to 28, wherein both the first lamellae and the third lamellae comprise a first polymer, and the second lamellae comprises a second polymer different from the first polymer.

30. The method according to any one of claims 26 to 29, wherein the orientation of the plurality of lamellar structures is perpendicular to the surface of the layer.

31. The step of forming the plurality of lamellar structures, at least based on the guide pattern, by applying the triblock copolymer of the lamellar phase onto the surface of the layer, includes a lattice pattern in the layer, The step of applying the triblock copolymer of the lamellar phase onto the surface of the layer to form the plurality of lamellar structures based on the guide pattern and the lattice pattern of the layer. The method according to any one of claims 26 to 30, including the method described in any one of claims 26 to 30.

32. The method according to claim 31, wherein the grid pattern includes an alternating pattern of a first section and a second section, the first section includes a first material, and the second section includes a second material different from the first material.

33. The method according to claim 32, wherein the contact holes are formed on at least a portion of the first section in the layer.

34. The method according to any one of claims 26 to 33, wherein the ratio of the length of the plurality of lamellar structures along a direction perpendicular to the surface of the layer to the length of the contact holes along that direction is in the range of 0.3 to 2.

0.

35. The guide pattern includes an alternating pattern of the first section and the second section. The aforementioned guide pattern is a chemical guide pattern. The first section includes the first material, The second section includes a second material different from the first material. The method according to any one of claims 26 to 34.

36. The guide pattern includes an alternating pattern of the first section and the second section. The aforementioned guide pattern is a topographic guide pattern. The second section is an opening, The first section is a guide wall that defines the opening. The method according to any one of claims 26 to 35.

37. The step of forming the guide pattern on the surface of the layer of the IC device is: A step of forming a chemical guide pattern in the opening, wherein the chemical guide pattern includes an alternating pattern of a third section and a fourth section. The above third section includes a third material, and the above fourth section includes a fourth material different from the above third material. The method according to claim 36.

38. The step of forming the contact hole by removing the second lamellar from at least a portion of the plurality of lamellar structures is: A step in which etching is performed on at least a portion of the plurality of lamellar structures to etch the second lamellar faster than etching the first lamellar and the third lamellar. The method according to any one of claims 26 to 37, including the method described in any one of claims 26 to 37.

39. A method for forming contact holes for integrated circuit (IC) devices, A step of forming a topography guide pattern on the surface of the first layer of the IC device, wherein the topography guide pattern includes a plurality of openings. The steps include forming a chemical guide pattern in each of the plurality of openings of the topographic guide pattern, The steps include forming a second layer by applying a block copolymer to the plurality of openings having the chemical guide pattern, The step of forming the contact holes in the second layer by removing a portion of the block copolymer from the second layer. A method for providing this.

40. The method according to claim 39, wherein the block copolymer is a lamellar-phase triblock copolymer.

41. The method according to claim 40, wherein the triblock copolymer of the lamellar phase comprises a first lamellar, a second lamellar, and a third lamellar, the second lamellar being located between the first lamellar and the third lamellar, the first lamellar and the third lamellar comprising a first polymer, and the second lamellar comprising a second polymer different from the first polymer.

42. The step of forming the chemical guide pattern in each of the plurality of openings of the topographic guide pattern is: The method according to any one of claims 39 to 41, comprising the step of forming the chemical guide pattern in the first layer based on a lattice pattern, wherein the lattice pattern includes an alternating pattern of a first section and a second section.

43. The step of forming the contact holes in the second layer by removing a portion of the block copolymer from the second layer is: The step of forming the contact hole in a portion of the second layer that is located on at least a portion of the first section of the first layer. The method according to claim 42, including the method described in claim 42.

44. The method according to any one of claims 26 to 42, further comprising a process for forming an IC device according to any one of claims 1 to 12.

45. The method according to any one of claims 26 to 42, further comprising a process for forming an IC package according to any one of claims 13 to 15.

46. The method according to any one of claims 26 to 42, further comprising a process for forming an electronic device according to any one of claims 16 to 25.

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