Filter device

Abstract

To provide a filter device which allows a user to quickly grasp clogging, and suppresses reduction of a passage flow rate of steam when clogging occurs.SOLUTION: A filter device 5 comprises: a gas chamber 54 in which, a first chamber 541 in which steam flows and a second chamber 542 in which the steam flows from the first chamber 541 through a communication passage 543, are partitioned; a first filter 56 which is provided in the first chamber 541 and through which the steam in the first chamber 541 passes and then exits outside of the gas chamber 54; a second filter 57 which is provided in the second chamber 542 and through which the steam in the second chamber 542 passes and then exits to outside of the gas chamber 54; and a valve mechanism 58 for opening the communication passage 543 when a pressure in the first chamber 541 becomes equal to or greater than a threshold value. The second filter 57 is configured so that, a magnitude of a passage sound per a unit passage flow rate of the steam is greater than that in the first filter 56.SELECTED DRAWING: Figure 2

Description

Technical Field

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[0001] The technology of the present disclosure relates to a filter device.

Background Art

[0002] Conventionally, as disclosed in Patent Document 1 for example, a filter device used in gas-using equipment such as a clean oven is known. In this clean oven, gases such as air and nitrogen supplied for the production of semiconductors and liquid crystal panels are passed through a filter device, and dust is separated and removed to be purified.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, in the gas-using equipment such as the above-described clean oven, when clogging occurs in the filter device, there is a risk that the gas flow rate passing through will significantly decrease or become zero. Therefore, it is desirable to detect such clogging as soon as possible and perform measures such as cleaning or replacing the filter device. On the other hand, when clogging occurs in the filter device, there is a desire to suppress a decrease in the gas flow rate passing through.

[0005] The technology of the present disclosure has been made in view of such points, and its object is to quickly detect clogging and suppress a decrease in the gas flow rate when clogging occurs.

Means for Solving the Problems

[0006] The filter device of this disclosure comprises a gas chamber, a first filter, a second filter, and a valve mechanism. The gas chamber is divided into a first chamber through which gas flows in and a second chamber through which gas flows in from the first chamber via a connecting passage. The first filter is provided in the first chamber and allows the gas in the first chamber to pass through and out of the gas chamber. The second filter is provided in the second chamber and allows the gas in the second chamber to pass through and out of the gas chamber. The valve mechanism opens the connecting passage when the pressure in the first chamber exceeds a threshold. The second filter has a higher noise level per unit flow rate of gas than the first filter. [Effects of the Invention]

[0007] According to the aforementioned filter device, clogging can be detected quickly, and the decrease in gas flow rate when clogging occurs can be suppressed. [Brief explanation of the drawing]

[0008] [Figure 1] Figure 1 shows a schematic diagram of a steam oven. [Figure 2] Figure 2 is a cross-sectional view showing the schematic configuration of the filter nozzle. [Figure 3] Figure 3 shows the filter nozzle in Figure 2 viewed from the right side. [Figure 4] Figure 4 is a cross-sectional view of the XX line shown in Figure 2. [Figure 5] Figure 5 is an enlarged cross-sectional view showing the configuration of the valve mechanism of the filter nozzle. [Figure 6] Figure 6 is a cross-sectional view of the YY line shown in Figure 5. [Figure 7] Figure 7 is a diagram equivalent to Figure 5, showing the valve mechanism in its open state. [Modes for carrying out the invention]

[0009] The following exemplary embodiments will be described in detail with reference to the drawings.

[0010] Figure 1 shows a schematic configuration of the steam oven 100. The steam oven 100 is installed, for example, in a food processing plant and is used to cook food by baking or steaming it with steam. Specifically, in the steam oven 100, food is cooked by steam flowing out from the filter nozzle 5.

[0011] In this example, steam is an example of a gas. The steam oven 100 is an example of a gas-using device that performs various processes using gas. The filter nozzle 5 is an example of a filter device.

[0012] The steam oven 100 comprises a casing 1, a fan 3, a heater 4, and a filter nozzle 5.

[0013] A cooking chamber 11 and a circulation channel 14 are formed inside the casing 1. The cooking chamber 11 contains the food to be heated and cooked. The circulation channel 14 circulates the steam flowing out from the filter nozzle 5 between the casing and the cooking chamber 11. Specifically, one end of the circulation channel 14, which is the outlet end, is connected to the inlet 12 of the cooking chamber 11, and the other end, which is the inlet end, is connected to the outlet 13 of the cooking chamber 11. In the cooking chamber 11, steam flows in from the circulation channel 14 through the inlet 12, while steam flows out into the circulation channel 14 from the outlet 13.

[0014] The circulation channel 14 is equipped with a filter nozzle 5, a heater 4, and a fan 3 in that order, starting from the outlet 13 side. In other words, in the circulation channel 14, steam passes through the filter nozzle 5, the heater 4, and the fan 3 in that order.

[0015] A steam supply pipe 6 is connected to the filter nozzle 5. The filter nozzle 5 causes the steam supplied from the supply pipe 6 to flow out into the circulation channel 14. More specifically, the filter nozzle 5 blows out the steam from the supply pipe 6. The heater 4 heats the steam flowing out of the filter nozzle 5 to a predetermined temperature. The heater 4 is, for example, an electric heater. The heater 4 may also be a heat exchanger such as a heating coil in which a heat transfer medium exchanges heat with the steam to heat it.

[0016] The fan 3 sucks in the steam heated by the heater 4 and blows it out toward the inlet 12 side of the cooking chamber 11. That is, the fan 3 forms a circulating flow of steam in which the steam flowing out of the cooking chamber 11 is mixed with the new steam flowing out of the filter nozzle 5 and returns to the cooking chamber 11. By forming such a circulating flow of steam, the food ingredients in the cooking chamber 11 are heated and cooked by the steam.

[0017] Next, the configuration of the filter nozzle 5 will be described in detail. FIG. 2 is a cross-sectional view showing the schematic configuration of the filter nozzle 5. FIG. 3 is a view showing the filter nozzle 5 in FIG. 2 as viewed from the right side. FIG. 4 is a cross-sectional view taken along the line X-X shown in FIG. 2.

[0018] The filter nozzle 5 is a nozzle having a steam filtering function. Specifically, the filter nozzle 5 includes a partitioning member 50, a first filter 56, a second filter 57, and a valve mechanism 58.

[0019] The partitioning member 50 partitions and forms a gas chamber 54. The gas chamber 54 is a space into which steam from the supply pipe 6 can flow in. The partitioning member 50 forms the approximate outer contour of the filter nozzle 5. The partitioning member 50 is formed in a columnar shape, specifically, a substantially cylindrical shape. That is, the gas chamber 54 is formed in a columnar shape, specifically, a substantially cylindrical shape.

[0020] The partitioning member 50 has a first partition wall 51 and a second partition wall 52 located at both ends in the axial direction. And in this example, the first filter 56 and the second filter 57 form the peripheral wall around the axis in the partitioning member 50. Thus, the gas chamber 54 is partitioned by the first partition wall 51 and the second partition wall 52 and the first filter 56 and the second filter 57.

[0021] The gas chamber 54 is divided into a first chamber 541 into which steam flows in, and a second chamber 542 into which steam flows in from the first chamber 541 via a connecting passage 543. Specifically, the first chamber 541 and the second chamber 542 are separated in the axial direction of the gas chamber 54 by a partition wall 53 in which the connecting passage 543 is formed. In other words, the partition wall 53 is located between the first partition wall 51 and the second partition wall 52 in the axial direction of the partition member 50. Furthermore, the first partition wall 51, the partition wall 53, and the second partition wall 52 are provided coaxially with each other.

[0022] The first filter 56 is installed between the first partition wall 51 and the partition wall 53, forming the peripheral wall of the first room 541. In other words, the first filter 56 is installed in the first room 541. The second filter 57 is installed between the partition wall 53 and the second partition wall 52, forming the peripheral wall of the second room 542. In other words, the second filter 57 is installed in the second room 542.

[0023] More specifically, both the first filter 56 and the second filter 57 are formed in a cylindrical shape. The first filter 56 is sandwiched between the first partition wall 51 and the partition wall 53, and the second filter 57 is sandwiched between the partition wall 53 and the second partition wall 52. Thus, the first chamber 541 is partitioned by the first partition wall 51, the partition wall 53 and the first filter 56. The second chamber 542 is partitioned by the partition wall 53, the second partition wall 52 and the second filter 57.

[0024] A supply pipe 6 is connected to the first compartment wall 51. An inlet 55 is formed in the first compartment wall 51, which opens into the first chamber 541. In other words, the inlet 55 connects the supply pipe 6 and the first chamber 541. Steam from the supply pipe 2 flows into the first chamber 541 through the inlet 55. The inlet 55 is formed coaxially with the compartment member 50 and the gas chamber 54.

[0025] As described above, the connecting passage 543 is formed in the partition wall 53. The connecting passage 543 connects the first chamber 541 and the second chamber 542. In other words, the connecting passage 543 opens to both the first chamber 541 and the second chamber 542. The connecting passage 543 is formed coaxially with the partition member 50 and the gas chamber 54. In this example, the opening area of ​​the connecting passage 543 is smaller than the opening area of ​​the inlet 55.

[0026] The first filter 56 allows the steam from the first chamber 541 to pass through and out of the gas chamber 54. The second filter 57 allows the steam from the second chamber 542 to pass through and out of the gas chamber 54. In this example, the area outside the gas chamber 54 is the circulation path 14. In other words, the first filter 56 forms the outlet for the first chamber 541, and the second filter 57 forms the outlet for the second chamber 542. The first filter 56 and the second filter 57 are filter media that separate and remove foreign matter from the steam as it passes through.

[0027] In the partition member 50, the first partition wall 51 and the partition wall 53 are connected by a first shaft 50a, and the partition wall 53 and the second partition wall 52 are connected by a second shaft 50b. Specifically, each of the first shaft 50a and the second shaft 50b extends in the axial direction of the partition member 50. Multiple first shafts 50a are arranged around the outer circumference of the first filter 56. Multiple second shafts 50b are arranged around the outer circumference of the second filter 57.

[0028] Male threads are formed at both ends of the first shaft 50a and the second shaft 50b. As shown in Figures 2 and 4, one end of the first shaft 50a is screwed into a through hole formed in the periphery of the partition wall 53. The other end of the first shaft 50a is inserted into a through hole formed in the periphery of the first compartment wall 51 and fastened with a nut 50c. By connecting the first compartment wall 51 and the partition wall 53 in this way, the first filter 56 is sandwiched between the first compartment wall 51 and the partition wall 53. As shown in Figures 2 and 3, one end of the second shaft 50b is screwed into a through hole formed in the periphery of the partition wall 53. The other end of the second shaft 50b is inserted into a through hole formed in the periphery of the second compartment wall 52 and fastened with a nut 50c. In this way, the partition wall 53 and the second compartment wall 52 are connected, and the second filter 57 is sandwiched between the partition wall 53 and the second compartment wall 52.

[0029] With the partition member 50 configured in this way, for example, when replacing the first filter 56, the first filter 56 can be removed by unscrewing the nut 50c and pulling the first partition wall 51 off the first shaft 50a. Similarly, when replacing the second filter 57, the second filter 57 can be removed by unscrewing the nut 50c and pulling the second partition wall 52 off the second shaft 50b.

[0030] The valve mechanism 58, when the first filter 56 becomes clogged, allows steam to flow from the first chamber 541 into the second chamber 542 and out through the second filter 57. The valve mechanism 58 opens the connecting passage 543 when the pressure in the first chamber 541 exceeds a threshold. In other words, the valve mechanism 58 closes the connecting passage 543 when the pressure in the first chamber 541 is below the threshold. Therefore, when the pressure in the first chamber 541 exceeds a threshold due to clogging of the first filter 56, the connecting passage 543 is opened.

[0031] Figure 5 is an enlarged cross-sectional view showing the configuration of the valve mechanism 58 of the filter nozzle 5. The valve mechanism 58 is located in the second chamber 542. The valve mechanism 58 includes a valve body 581, a valve seat 582, a spring 583, and a spring retainer 584.

[0032] The valve body 581 opens and closes the communication passage 543. The valve body 581 is housed in the second chamber 542 and is formed in a disc shape coaxial with the communication passage 543. The valve body 581 is provided so as to be displaceable in the axial direction of the second chamber 542 (i.e., the gas chamber 54). In other words, the valve body 581 opens and closes the communication passage 543 by being displaced in the axial direction of the second chamber 542.

[0033] The valve seat 582 is formed in the partition wall 53. Specifically, the valve seat 582 is provided on the periphery of the opening end of the communication passage 543 on the second chamber 542 side. The valve seat 582 is formed in an annular shape. The valve body 581 moves in the axial direction of the second chamber 542, causing it to seat on and off the valve seat 582, thereby opening and closing the communication passage 543. In other words, the valve body 581 closes the communication passage 543 by seating on the valve seat 582 and opens the communication passage 543 by moving away from the valve seat 582.

[0034] The spring 583 biases the valve body 581 in the closing direction. The spring 583 is formed, for example, by a coil spring. The spring 583 is located in the second chamber 542 on the side of the second compartment wall 52 that is closer to the valve body 581. One end of the spring 583 is connected to the valve body 581. More specifically, one end of the spring 583 is fitted into an annular recess formed in the valve body 581. The other end of the spring 583 is supported by a spring receiver 584.

[0035] Figure 6 is a cross-sectional view of the YY line shown in Figure 5. The valve mechanism 58 is provided with a guide portion 585 for the valve body 581. The guide portion 585 is formed in a cylindrical shape coaxial with the valve body 581 and is provided on the outer circumference side of the valve body 581 in the second chamber 542. More specifically, the guide portion 585 is integrally formed with the partition wall 53. The valve body 581 is slidably mounted on the inner circumferential surface of the guide portion 585. In other words, the valve body 581 is displaced in the axial direction of the second chamber 542 along the inner circumferential surface of the guide portion 585. A ring-shaped stopper 586 is provided on the inner circumferential surface of the guide portion 585. The stopper 586 restricts the displacement of the valve body 581 toward the second partition wall 52.

[0036] Furthermore, a flow section 581a for circulating steam is formed between the guide section 585 and the valve body 581. Multiple flow sections 581a are provided in the circumferential direction of the valve body 581. The flow sections 581a are formed by partially cutting off the periphery of the valve body 581. With this configuration, steam flowing from the communication passage 543 into the second chamber 542 flows through the flow sections 581a and flows out from the second filter 57.

[0037] Furthermore, the valve mechanism 58 is provided with an adjustment screw 588 for adjusting the biasing force of the spring 583. The adjustment screw 588 penetrates the second compartment wall 52 in the axial direction of the second chamber 542. More specifically, the adjustment screw 588 is screwed into the second compartment wall 52 so as to be able to move back and forth in the axial direction of the second chamber 542. By moving the adjustment screw 588 back and forth, the spring receiver 584 is displaced in the axial direction of the second chamber 542. The biasing force of the spring 583 is changed as the spring receiver 584 is displaced. Specifically, when the spring receiver 584 is displaced toward the valve body 581, the biasing force of the spring 583 increases, and when the spring receiver 584 is displaced toward the second compartment wall 52, the biasing force of the spring 583 decreases.

[0038] Furthermore, the valve mechanism 58 is provided with a guide portion 587 for the spring retainer 584. The guide portion 587 is formed in a cylindrical shape coaxial with the valve body 581 and is provided on the outer circumference side of the spring retainer 584 in the second chamber 542. The guide portion 587 is integrally formed with the second compartment wall 52. The spring retainer 584 is displaced along the inner circumferential surface of the guide portion 587.

[0039] In the valve mechanism 58, for example, if the pressure in the first chamber 541 exceeds a threshold due to clogging of the first filter 56, the valve body 581 is displaced in the opening direction against the biasing force of the spring 583. As a result, the valve body 581 separates from the valve seat 582, and the communication passage 543 is opened. This allows steam to flow from the first chamber 541 into the second chamber 542 and out through the second filter 57. Also, in the valve mechanism 58, if the pressure in the first chamber 541 falls below a threshold, the valve body 581 is displaced in the closing direction by the biasing force of the spring 583. As a result, the valve body 581 seats on the valve seat 582, and the communication passage 543 is closed. In this case, there is virtually no clogging of the first filter 56, and the steam from the first chamber 541 flows out through the first filter 56.

[0040] Thus, under normal conditions when the first filter 56 is not clogged, the steam flows out through the first filter 56, and in the emergency situation when the first filter 56 becomes clogged, the steam flows out through the second filter 57. In other words, in the filter nozzle 5, the first filter 56 functions as the main filter under normal conditions, and the second filter 57 functions as a backup filter in emergencies. With this configuration, even when the first filter 56 becomes clogged in the filter nozzle 5, the decrease in the gas flow rate is suppressed.

[0041] The second filter 57 has a higher noise level per unit steam flow rate than the first filter 56. Steam noise is an abnormal noise generated when steam passes through the first filter 56 or the second filter 57.

[0042] Specifically, the first filter 56 and the second filter 57 are of different types. In this example, the first filter 56 is a sintered metal filter. The second filter 57 is a non-sintered metal filter, i.e., a filter that is not made of sintered metal. A sintered metal filter is a metal filter material made by sintering multiple types of metal powders with different particle sizes. The second filter 57 is, for example, a wire mesh or a perforated plate. A wire mesh is a metal filter material made by weaving together vertical and horizontal metal wires. A perforated plate is a metal filter material made by punching out a large number of holes in a steel plate. In this example, the pore size of the first filter 56 is smaller than the pore size of the second filter 57.

[0043] Furthermore, the second filter 57 has a smaller vapor passage area than the first filter 56. Specifically, as shown in Figure 2, the volume of the first chamber 541 is larger than the volume of the second chamber 542. More specifically, the axial length of the first chamber 541 is longer than the axial length of the second chamber 542. Therefore, the axial length of the first filter 56 is longer than the axial length of the second filter 57. Consequently, the inner surface area of ​​the first filter 56 is larger than that of the second filter 57. In this example, the first filter 56 and the second filter 57 have approximately the same diameter.

[0044] In the filter nozzle 5 configured as described above, steam from the supply pipe 6 flows into the first chamber 541. In this state, the pressure in the first chamber 541 is below the threshold, and the communication passage 543 is closed by the valve mechanism 58. The steam in the first chamber 541 passes through the first filter 56 and flows out into the circulation passage 14 (see the arrow in Figure 2). As the steam passes through the first filter 56, foreign matter in the steam is separated and removed. In this way, clean steam is supplied from the filter nozzle 5 to the circulation passage 14.

[0045] Figure 7 is a diagram corresponding to Figure 5, showing the open state of the valve mechanism 58. Here, if the first filter 56 becomes clogged, the pressure in the first chamber 541 may rise above a threshold. When the pressure in the first chamber 541 exceeds the threshold, the valve mechanism 58 opens, as shown in Figure 7, and the communication passage 543 is opened. As a result, the steam that had been stagnant in the first chamber 541 flows into the second chamber 542 via the communication passage 543. The steam that has flowed into the second chamber 542 passes through the second filter 57 and flows out into the circulation passage 14 (see the arrow in Figure 7). When the steam passes through the second filter 57, foreign matter in the steam is separated and removed. In this way, clean steam is supplied from the filter nozzle 5 to the circulation passage 14.

[0046] Thus, in the filter nozzle 5, when the first filter 56 becomes clogged, the steam passes through the second filter 57 and flows out into the circulation channel 14. Therefore, in the filter nozzle 5, a decrease in the steam flow rate through the filter is suppressed. As a result, a decrease in the supply flow rate of clean steam to the circulation channel 14 is suppressed.

[0047] Furthermore, since the sound of steam passing through the second filter 57 is louder than the sound of steam passing through the first filter 56, when steam passes through the second filter 57, the sound of the steam passing through it can be clearly heard by the user. As a result, clogging of the first filter 56 is indicated by the sound of the steam passing through it. Therefore, clogging of the first filter 56 can be quickly identified. Consequently, cleaning or replacement of the first filter 56 can be carried out promptly. In this way, clogging of the filter is quickly identified, and the reduction in steam flow rate when clogging occurs is suppressed.

[0048] Furthermore, because the steam passage area of ​​the second filter 57 is smaller than that of the first filter 56, the steam flow velocity in the second filter 57 is greater than that in the first filter 56. As a result, the steam noise passing through the second filter 57 may increase. Therefore, it is possible to reliably detect that clogging has occurred in the first filter 56.

[0049] As described above, the filter nozzle 5 of the embodiment comprises a gas chamber 54, a first filter 56, a second filter 57, and a valve mechanism 58. The gas chamber 54 is divided into a first chamber 541 through which steam flows in, and a second chamber 542 through which steam flows in from the first chamber 541 via a connecting passage 543. The first filter 56 is provided in the first chamber 541, and the steam from the first chamber 541 passes through it and flows out to the outside of the gas chamber 54. The second filter 57 is provided in the second chamber 542, and the steam from the second chamber 542 passes through it and flows out to the outside of the gas chamber 54. The valve mechanism 58 opens the connecting passage 543 when the pressure in the first chamber 541 exceeds a threshold. The second filter 57 has a higher noise level per unit flow rate of steam than the first filter 56.

[0050] In this configuration, when the first filter 56 becomes clogged and the pressure in the first chamber 541 exceeds a threshold, the connecting passage 543 is opened. As a result, steam flows from the first chamber 541 into the second chamber 542 and out through the second filter 57. Therefore, even when clogging occurs, a decrease in the steam flow rate can be suppressed. In addition, since the sound of steam passing through the second filter 57 is louder than the sound of steam passing through the first filter 56, the sound of steam passing through the second filter 57 can be clearly heard by the user. Therefore, clogging of the first filter 56 can be quickly detected by the sound of steam passing through. In this way, clogging of the filter can be quickly detected, and a decrease in the steam flow rate when clogging occurs can be suppressed.

[0051] Furthermore, since the clogging of the first filter 56 can be detected by the sound of steam passing through the second filter 57, the second filter 57 also serves as a notification mechanism for clogging of the first filter 56. Therefore, it is not necessary to provide a separate notification mechanism.

[0052] Furthermore, in the filter nozzle 5 of the above embodiment, the second filter 57 has a smaller vapor passage area than the first filter 56.

[0053] With this configuration, the steam flow velocity through the second filter 57 becomes greater than the steam flow velocity through the first filter 56. Therefore, the sound of steam passing through the second filter 57 can be increased. Consequently, it is possible to reliably detect when clogging occurs in the first filter 56.

[0054] Furthermore, in the filter nozzle 5 of the above embodiment, the valve mechanism 58 is provided in the second chamber 542 and includes a valve body 581 that opens and closes the communication passage 543, and a spring 583 that biases the valve body 581 in the closing direction. When the pressure in the first chamber 541 exceeds a threshold, the valve body 581 is displaced in the opening direction against the biasing force of the spring 583.

[0055] In this configuration, the connecting passage 543 is opened and closed based on the relative magnitudes of the pressure in the first chamber 541 and the biasing force of the spring 583. Therefore, electrical equipment such as a pressure sensor to detect the pressure in the first chamber 541, and a solenoid valve to open and close the connecting passage 543 based on the detected value of the pressure sensor, are unnecessary. Consequently, it is possible to prevent situations in which the connecting passage 543 cannot be opened due to electrical equipment failure or the like.

[0056] Furthermore, in the filter nozzle 5 of the above embodiment, the first filter 56 is a sintered metal filter, and the second filter 57 is a non-sintered metal filter.

[0057] With this configuration, the noise level per unit steam flow rate of the second filter 57 can be easily increased to be greater than that of the first filter 56.

[0058] Other embodiments As described above, the embodiments described herein have been presented as examples of the technology disclosed in this application. However, the technology in this disclosure is not limited thereto and can be applied to embodiments that have been modified, replaced, added, or omitted as appropriate. Furthermore, it is possible to combine the components described in the embodiments above to create new embodiments. In addition, the components described in the attached drawings and detailed description may include not only components essential for solving the problem, but also components that are not essential for solving the problem, in order to illustrate the technology. Therefore, the mere presence of such non-essential components in the attached drawings and detailed description should not be immediately assumed to mean that those non-essential components are essential.

[0059] For example, the partitioning configuration of the first chamber 541 and the second chamber 542 in the gas chamber 54 is not limited to those described above, and any partitioning configuration in which the first chamber 541 and the second chamber 542 are connected via the connecting passage 543 is acceptable.

[0060] Furthermore, the first filter 56 and the second filter 57 may have the same steam passage area. Also, the steam passage area of ​​the first filter 56 may be smaller than the steam passage area of ​​the second filter 57.

[0061] Furthermore, if the noise level per unit flow rate of steam in the second filter 57 can be made greater than that of the first filter 56, the type of filter and the size of the pore diameter are not limited to those mentioned above.

[0062] Furthermore, the valve mechanism 58 may be formed by an electric valve or a solenoid valve.

[0063] Furthermore, the gas handled by the filter device of this disclosure is not limited to vapor, but may also be air, for example.

[0064] Furthermore, the filter device of this disclosure may be used in steam-using equipment other than the steam oven 100, or in equipment that uses gases other than steam.

[0065] Furthermore, although the filter device of this disclosure was used as a steam nozzle for blowing out steam, it may also be installed in the middle of a steam supply pipe in a steam system and used as a filter to purify the steam flowing through the supply pipe. [Industrial applicability]

[0066] As described above, the technology of this disclosure is useful for filter devices. [Explanation of Symbols]

[0067] 5. Filter nozzle (filter device) 53 Partition wall 54 Gas Chamber 541 Room 1 542 Room 2 543 Communication path 56. First Filter 57. Second filter 58 Valve mechanism 581 Valve body 583 Spring

Claims

1. A gas chamber is divided into a first chamber into which gas flows in, and a second chamber into which gas flows in from the first chamber via a connecting passage, A first filter is provided in the first chamber, through which the gas in the first chamber passes and flows out to the outside of the gas chamber, A second filter is provided in the second chamber, through which the gas in the second chamber passes and flows out to the outside of the gas chamber, The device includes a valve mechanism that opens the communication passage when the pressure in the first chamber exceeds a threshold, The second filter has a higher noise level per unit flow rate of gas than the first filter. The second filter has a smaller gas passage area than the first filter. A filter device characterized by the following features.

2. In the filter device according to claim 1, The gas chamber is formed in a columnar shape, The first chamber and the second chamber are separated in the axial direction of the gas chamber by a partition wall in which the connecting passage is formed. The first filter forms the peripheral wall of the first chamber, The second filter forms the peripheral wall of the second chamber. A filter device characterized by the following features.

3. In the filter device according to claim 1 or 2, The valve mechanism is provided in the second chamber and includes a valve body that opens and closes the communication passage, and a spring that biases the valve body in the closing direction. When the pressure in the first chamber exceeds the threshold, the valve body is displaced in the opening direction against the biasing force of the spring. A filter device characterized by the following features.

4. In the filter device according to any one of claims 1 to 3, The first filter is a sintered metal filter, The second filter is a non-sintered metal filter. A filter device characterized by the following features.

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