Imaging device, electronic equipment, and imaging method

Abstract

To improve sensitivity and reduce a dark current, while reducing power consumption.SOLUTION: An imaging device includes: a plurality of photoelectric conversion elements each of which photoelectrically converts incident light to generate an electric signal; a detector configured to output a detection signal indicating whether or not an amount of change in the electric signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold value; a pixel signal generation unit configured to generate a pixel signal on a basis of the electric signal; a transfer controller configured to perform control to transfer the electric signal to the pixel signal generation unit; and an analog-to-digital converter configured to convert the pixel signal into a digital signal. A low-potential-side reference potential of the photoelectric conversion unit, a low-potential-side reference potential of the detector, a low-potential-side reference potential of the pixel signal generation unit, a low-potential-side reference potential of the analog-to-digital converter, and an off-potential of the transfer controller include three or more potentials having different potential levels.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to an imaging device, an electronic device, and an imaging method.

Background Art

[0002] In a conventional imaging device, it is common to use a synchronous imaging element that captures image data (frames) in synchronization with a synchronization signal such as a vertical synchronization signal. Since this type of synchronous imaging element can only acquire image data every period of the synchronization signal (for example, 1 / 60 seconds), it is not suitable for applications that require acquiring image data at a higher speed. Therefore, an asynchronous imaging element has been proposed in which an event detection circuit that detects in real time, for each pixel address, that the amount of light of that pixel has exceeded a threshold value as an event is provided for each pixel (see, for example, Patent Document 1). In this imaging element, a photodiode and a plurality of transistors for detecting events are arranged for each pixel.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] This disclosure provides an imaging device, electronic equipment, and imaging method that can improve sensitivity, reduce dark current, and lower power consumption. [Means for solving the problem]

[0006] To solve the above problems, the present disclosure provides a photoelectric conversion unit having a plurality of photoelectric conversion elements, each of which converts incident light into electrical signals, A detection unit that outputs a detection signal indicating whether the amount of change in the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold, A pixel signal generation unit that generates a pixel signal based on the aforementioned electrical signal, A transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit, The system includes an analog-to-digital converter that converts the aforementioned pixel signals into digital signals, An imaging device in which the low-potential side reference potential of the photoelectric conversion unit, the low-potential side reference potential of the detection unit, the low-potential side reference potential of the pixel signal generation unit, the low-potential side reference potential of the analog-to-digital converter, and the off-potential of the transfer control unit each include three or more potentials with different potential levels.

[0007] The low-potential side reference potential of the photoelectric conversion unit may be at a lower potential level than the low-potential side reference potential of the detection unit.

[0008] The low-potential side reference potential of the photoelectric conversion unit may be at a higher potential level than the off-potential of the transfer control unit.

[0009] The low-potential side reference potential of the photoelectric conversion unit may be at a lower potential level than the low-potential side reference potential of at least one of the pixel signal generation unit and the analog-to-digital converter.

[0010] At least one of the low-potential side reference potential of the photoelectric conversion unit, the low-potential side reference potential of the detection unit, the low-potential side reference potential of the pixel signal generation unit, the low-potential side reference potential of the analog-to-digital converter, and the off-potential of the transfer control unit may be the ground potential, and at least one of the others may be a first reference potential with a lower potential level than the ground potential, and at least one of the others may be a second reference potential with a lower potential level than the first reference potential.

[0011] The low-potential side reference potential of the photoelectric conversion unit is the second reference potential. The low-potential side reference potential of the detection unit, the pixel signal generation unit, and the analog-to-digital converter is the ground potential. The off-potential of the transfer control unit may be the second reference potential.

[0012] The aforementioned ground potential is 0V. The first reference potential is a negative potential. The second reference potential may be a negative potential with a lower potential level than the first reference potential.

[0013] The low-potential side reference potentials of the photoelectric conversion unit, the pixel signal generation unit, and the analog-to-digital converter may be approximately equal.

[0014] At least one of the low-potential side reference potential of the photoelectric conversion unit, the low-potential side reference potential of the detection unit, the low-potential side reference potential of the pixel signal generation unit, the low-potential side reference potential of the analog-to-digital converter, and the off potential of the transfer control unit is the ground potential, and at least one of the others is a first reference potential having a potential level higher than the ground potential, and at least one of the others may be a second reference potential having a potential level lower than the ground potential.

[0015] The low-potential side reference potential of the photoelectric conversion unit, the pixel signal generation unit, and the analog-to-digital converter is the ground potential, The low-potential side reference potential of the detection unit is the first reference potential, The off potential of the transfer control unit may be the second reference potential.

[0016] The ground potential is 0V, The first reference potential is a positive potential, The second reference potential may be a negative potential.

[0017] According to the present disclosure, a photoelectric conversion unit having a plurality of photoelectric conversion elements that each photoelectrically convert incident light to generate an electrical signal, A detection unit that outputs a detection signal indicating whether or not a change amount of each of the electrical signals of the plurality of photoelectric conversion elements exceeds a predetermined threshold value, A pixel signal generation unit that generates a pixel signal based on the electrical signal, A transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit, An analog-to-digital converter that converts the pixel signal into a digital signal, A potential selection unit that switches the low-potential side reference potential of the photoelectric conversion unit, is provided.

[0018] When the detection unit detects that the change amount exceeds the predetermined threshold value, the analog-to-digital converter converts the pixel signal into the digital signal, The potential selection unit may select a first reference potential within a period in which the detection unit detects whether or not the amount of change exceeds the predetermined threshold value, and may select a second reference potential having a higher potential level than the first reference potential within a period in which the analog-to-digital converter converts the pixel signal into the digital signal.

[0019] The first reference potential is a negative potential, The second reference potential may be a ground potential.

[0020] The reference potential on the low potential side of the photoelectric conversion unit, the reference potential on the low potential side of the detection unit, the reference potential on the low potential side of the pixel signal generation unit, the reference potential on the low potential side of the analog-to-digital converter, and the off potential of the transfer control unit may include two or more potentials having different potential levels.

[0021] The reference potential on the low potential side of the detection unit, the reference potential on the low potential side of the pixel signal generation unit, and the reference potential on the low potential side of the analog-to-digital converter are ground potentials, The off potential of the transfer control unit may be a negative potential.

[0022] A potential generation unit that generates at least one of the first reference potential and the second reference potential may be provided.

[0023] At least the detection unit may be disposed on a second substrate laminated on a first substrate on which the photoelectric conversion unit is disposed.

[0024] The back gate of the transistor in the transfer control unit may be set to a potential having the same potential level as the reference potential on the low potential side of the photoelectric conversion unit.

[0025] According to another aspect of the present disclosure, an imaging device that outputs captured image data, A processor that performs predetermined signal processing on the image data, and The imaging device, A photoelectric conversion unit having a plurality of photoelectric conversion elements that each photoelectrically convert incident light to generate an electrical signal, A detection unit that outputs a detection signal indicating whether the amount of change in the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold, A pixel signal generation unit that generates a pixel signal based on the aforementioned electrical signal, A transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit, The system includes an analog-to-digital converter that converts the aforementioned pixel signals into digital signals, An electronic device is provided in which the low-potential side reference potential of the photoelectric conversion unit, the low-potential side reference potential of the detection unit, the low-potential side reference potential of the pixel signal generation unit, the low-potential side reference potential of the analog-to-digital converter, and the off-potential of the transfer control unit each have three or more potentials with different potential levels.

[0026] According to another aspect of this disclosure, the steps include generating an electrical signal by photoelectrically converting incident light using a plurality of photoelectric conversion elements, The steps include outputting a detection signal indicating whether the amount of change in the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold, The steps include transferring the aforementioned electrical signal, The steps include generating a pixel signal based on the transmitted electrical signal, The process includes the step of converting the aforementioned pixel signal into a digital signal, An imaging method is provided in which the low-potential side reference potential during photoelectric conversion, the low-potential side reference potential when outputting the detection signal, the low-potential side reference potential when generating the pixel signal, the low-potential side reference potential when converting the pixel signal to a digital signal, and the off-potential when transferring the electrical signal each include three or more potentials with different potential levels, and these potentials are used to perform the steps of generating the electrical signal, outputting the detection signal, transferring the electrical signal, generating the pixel signal, and converting to a digital signal. [Brief explanation of the drawing]

[0027] [Figure 1]A block diagram showing one example configuration of the imaging device in the first embodiment. [Figure 2] A figure showing an example of a stacked structure of a solid-state image sensor in the first embodiment. [Figure 3] A block diagram showing one example configuration of a solid-state image sensor in the first embodiment. [Figure 4] A block diagram showing one example configuration of the pixel array section in the first embodiment. [Figure 5] A circuit diagram showing one example configuration of a pixel block in the first embodiment. [Figure 6] A block diagram showing a first configuration example of the address event detection unit. [Figure 7] A circuit diagram showing one example configuration of the current-voltage conversion unit in the first embodiment. [Figure 8] A circuit diagram showing an example configuration of a subtractor and a quantizer in the first embodiment. [Figure 9] A block diagram showing one example configuration of a column ADC in the first embodiment. [Figure 10] A timing chart showing an example of the operation of a solid-state image sensor in the first embodiment. [Figure 11] A flowchart illustrating an example of the operation of a solid-state image sensor in the first embodiment. [Figure 12] A diagram showing the low-potential side reference potential and off-potential used by each part of the imaging device according to the first embodiment. [Figure 13A] This figure shows an example of the potential level when the transfer transistor of the first embodiment is turned off. [Figure 13B] A diagram showing an example of the potential level when the transfer transistor of the first embodiment is turned on. [Figure 14] A diagram showing the low-potential side reference potential and off-potential used by each part of the imaging device according to the second embodiment. [Figure 15A] This figure shows an example of the potential level when the transfer transistor of the second embodiment is turned off. [Figure 15B] This figure shows an example of the potential level when the transfer transistor of the second embodiment is turned on. [Figure 16] A diagram showing the low-potential side reference potential and off-potential used by each part of the imaging device according to the third embodiment. [Figure 17] A block diagram showing a second configuration example of the address event detection unit. [Figure 18] A block diagram showing an example of the configuration of a scanning imaging device. [Figure 19] A block diagram showing a schematic configuration example of a vehicle control system, which is an example of a mobile object control system. [Figure 20] A diagram showing examples of installation locations for the imaging unit and the external information detection unit. [Modes for carrying out the invention]

[0028] Embodiments of the imaging device, electronic equipment, and imaging method will be described below with reference to the drawings. The following description will focus on the main components of the imaging device and electronic equipment, but there may be components and functions not shown or described in the illustrations or descriptions. The following description does not exclude any components or functions not shown or described.

[0029] <1. First Embodiment> [Example configuration of an imaging device] Figure 1 is a block diagram showing an example configuration of an imaging device 100 in a first embodiment of the present disclosure. This imaging device 100 comprises an imaging lens 110, a solid-state image sensor 200, a recording unit 120, and a control unit 130. Examples of imaging devices 100 include cameras mounted on industrial robots and in-vehicle cameras.

[0030] The imaging lens 110 focuses incident light and guides it to the solid-state image sensor 200. The solid-state image sensor 200 converts the incident light into photoelectric data to capture image data. The solid-state image sensor 200 performs predetermined signal processing, such as image recognition processing, on the captured image data and outputs data indicating the processing result and the detection signal of the address event to the recording unit 120 via the signal line 209. The method for generating the detection signal will be described later.

[0031] The recording unit 120 records data from the solid-state image sensor 200. The control unit 130 controls the solid-state image sensor 200 to capture image data.

[0032] [Example of a solid-state image sensor configuration] Figure 2 shows an example of a stacked structure of a solid-state image sensor 200 in a first embodiment of the present disclosure. This solid-state image sensor 200 comprises a detection chip 202 and a light-receiving chip 201 stacked on the detection chip 202. These chips are electrically connected via connection points such as vias. In addition to vias, they can also be connected by Cu-Cu junctions or bumps.

[0033] Figure 3 is a block diagram showing an example configuration of a solid-state image sensor 200 in a first embodiment of the present disclosure. This solid-state image sensor 200 includes a drive circuit 211, a signal processing unit 212, an arbiter 213, a column ADC 220, and a pixel array unit 300.

[0034] The pixel array section 300 has multiple pixels arranged in a two-dimensional grid. The pixel array section 300 is further divided into multiple pixel blocks, each consisting of a predetermined number of pixels. Hereinafter, a set of pixels or pixel blocks arranged horizontally will be referred to as a "row," and a set of pixels or pixel blocks arranged perpendicular to the row will be referred to as a "column."

[0035] Each pixel generates an analog signal as a pixel signal, which is a voltage corresponding to the photocurrent. Each pixel block also detects the presence or absence of an address event based on whether the change in photocurrent exceeds a predetermined threshold. When an address event occurs, the pixel block outputs a request to the arbiter 213.

[0036] The drive circuit 211 drives each pixel and outputs the pixel signal to the column ADC 220.

[0037] The arbiter 213 mediates requests from each pixel block and sends a response to the pixel block based on the mediation result. The pixel block that receives the response supplies a detection signal indicating the detection result to the drive circuit 211 and the signal processing unit 212.

[0038] The column ADC220 converts the analog pixel signals from each row of pixel blocks into digital signals. This column ADC220 supplies the digital signals to the signal processing unit 212.

[0039] The signal processing unit 212 performs predetermined signal processing, such as CDS (Correlated Double Sampling) processing and image recognition processing, on the digital signal from the column ADC 220. The signal processing unit 212 supplies data indicating the processing result and a detection signal to the recording unit 120 via the signal line 209.

[0040] [Example of pixel array configuration] Figure 4 is a block diagram showing an example configuration of the pixel array section 300 in a first embodiment of the present disclosure. The pixel array section 300 is divided into a plurality of pixel blocks 310. Each of the pixel blocks 310 has a plurality of pixels arranged in an I x J (I and J are integers) configuration.

[0041] Furthermore, the pixel block 310 comprises a pixel signal generation unit 320, a plurality of light receiving units 330 arranged in an I x J grid, and an address event detection unit 400. The plurality of light receiving units 330 within the pixel block 310 share the pixel signal generation unit 320 and the address event detection unit 400. A circuit consisting of the light receiving unit 330, the pixel signal generation unit 320, and the address event detection unit 400 at a given coordinate functions as a pixel at that coordinate. In addition, a vertical signal line VSL is wired for each column of the pixel block 310. If the number of columns in the pixel block 310 is m (where m is an integer), then m vertical signal lines VSL are arranged.

[0042] The light-receiving unit 330 converts incident light into photoelectric current to generate a photocurrent. This light-receiving unit 330 supplies the photocurrent to either the pixel signal generation unit 320 or the address event detection unit 400, according to the control of the drive circuit 211.

[0043] The pixel signal generation unit 320 generates a signal with a voltage corresponding to the photocurrent as a pixel signal SIG. The pixel signal generation unit 320 supplies the generated pixel signal SIG to the column ADC 220 via the vertical signal line VSL.

[0044] The address event detection unit 400 detects the presence or absence of an address event based on whether the change in the amount of photocurrent from each of the light receiving units 330 exceeds a predetermined threshold. This address event consists of, for example, an on-event indicating that the change amount has exceeded an upper threshold, and an off-event indicating that the change amount has fallen below a lower threshold. The address event detection signal consists of, for example, one bit indicating the detection result of the on-event and one bit indicating the detection result of the off-event. The address event detection unit 400 can also detect only on-events.

[0045] When an address event occurs, the address event detection unit 400 supplies a request to the arbiter 213 for the transmission of a detection signal. Upon receiving a response to the request from the arbiter 213, the address event detection unit 400 supplies a detection signal to the drive circuit 211 and the signal processing unit 212. The address event detection unit 400 is an example of the detection unit described in the claims.

[0046] [Example of pixel block configuration] Figure 5 is a circuit diagram showing an example configuration of a pixel block 310 in a first embodiment of the present disclosure. In the pixel block 310, the pixel signal generation unit 320 includes a reset transistor 321, an amplification transistor 322, a selection transistor 323, and a floating diffusion layer 324. Multiple light receiving units 330 within the pixel block 310 are commonly connected to an address event detection unit 400 via a connection node 340.

[0047] Furthermore, each of the light-receiving units 330 includes a transfer transistor 331, an OFG (Overflow Gate) transistor 332, and a photoelectric conversion element 333. If the number of pixels in the pixel block 310 is N (where N is an integer), then N transfer transistors 331, OFG transistors 332, and photoelectric conversion elements 333 are arranged. A transfer signal TRGn is supplied to the gate of the nth (where n is an integer from 1 to N) transfer transistor 331 in the pixel block 310 by the drive circuit 211. A control signal OFGn is supplied to the gate of the nth OFG transistor 332 by the drive circuit 211. In this specification, the transfer transistor 331 and OFG transistor 332 together are referred to as the transfer control unit 335, and the photoelectric conversion element is referred to as the photoelectric conversion unit 334.

[0048] Furthermore, for example, N-type MOS (Metal-Oxide-Semiconductor) transistors are used as the reset transistor 321, the amplification transistor 322, and the selection transistor 323. Similarly, N-type MOS transistors are used for the transfer transistor 331 and the OFG transistor 332.

[0049] Furthermore, each of the photoelectric conversion elements 333 is placed on the light receiving chip 201. All elements other than the photoelectric conversion elements 333 are placed on the detection chip 202. A modified configuration in which some of the elements other than the photoelectric conversion elements 333 are placed on the light receiving chip 201 is also conceivable.

[0050] The photoelectric conversion element 333 generates electric charge by photoelectric conversion of incident light. The transfer transistor 331 transfers charge from the corresponding photoelectric conversion element 333 to the floating diffusion layer 324 according to the transfer signal TRGn. The OFG transistor 332 supplies the electrical signal generated by the corresponding photoelectric conversion element 333 to the connection node 340 according to the control signal OFGn. Here, the supplied electrical signal is a photocurrent consisting of electric charge.

[0051] The floating diffusion layer 324 stores electric charge and generates a voltage corresponding to the amount of charge stored. The reset transistor 321 initializes the charge amount of the floating diffusion layer 324 according to the reset signal from the drive circuit 211. The amplification transistor 322 amplifies the voltage of the floating diffusion layer 324. The selection transistor 323 outputs the amplified voltage signal as a pixel signal SIG to the column ADC 220 via the vertical signal line VSL, according to the selection signal SEL from the drive circuit 211.

[0052] When the control unit 130 instructs the drive circuit 211 to start detecting address events, it drives the OFG transistors 332 of all pixels with the control signal OFGn to supply photocurrent to the connection node 340. As a result, the address event detection unit 400 is supplied with a current equal to the sum of the photocurrents of all light-receiving units 330 within the pixel block 310.

[0053] Then, when an address event is detected in a pixel block 310, the drive circuit 211 turns off all OFG transistors 332 in that block, stopping the supply of photocurrent to the address event detection unit 400. Next, the drive circuit 211 uses the transfer signal TRGn to sequentially drive each transfer transistor 331, transferring the charge to the floating diffusion layer 324. As a result, the pixel signals of each of the multiple pixels within the pixel block 310 are output sequentially.

[0054] In this way, the solid-state image sensor 200 outputs only the pixel signals of the pixel block 310 where an address event has been detected to the column ADC 220. This reduces the power consumption of the solid-state image sensor 200 and the amount of image processing required compared to outputting pixel signals for all pixels, regardless of whether an address event has occurred.

[0055] Furthermore, since multiple pixels share the address event detection unit 400, the circuit size of the solid-state image sensor 200 can be reduced compared to the case where an address event detection unit 400 is provided for each pixel.

[0056] [Example configuration of address event detection unit 400] Figure 6 is a block diagram showing a first configuration example of the address event detection unit 400 in the first embodiment of the present disclosure. This address event detection unit 400 comprises a current-voltage conversion unit 410, a buffer 420, a subtractor 430, a quantizer 440, and a transfer unit 450.

[0057] The current-voltage conversion unit 410 converts the photocurrent from the corresponding light receiving unit 330 into a logarithmic voltage signal. This current-voltage conversion unit 410 supplies the voltage signal to the buffer 420.

[0058] The buffer 420 corrects the voltage signal from the current-voltage conversion unit 410. The buffer 420 outputs the corrected voltage signal to the subtractor 430.

[0059] The subtractor 430 reduces the level of the voltage signal from the buffer 420 according to the row drive signal from the drive circuit 211. The subtractor 430 then supplies the reduced voltage signal to the quantizer 440.

[0060] The quantizer 440 quantizes the voltage signal from the subtractor 430 into a digital signal and outputs it to the transfer unit 450 as a detection signal.

[0061] The transfer unit 450 transfers the detection signal from the quantizer 440 to the signal processing unit 212 and the like. When an address event is detected, the transfer unit 450 supplies a request to the arbiter 213 to send a detection signal. When the transfer unit 450 receives a response to the request from the arbiter 213, it supplies the detection signal to the drive circuit 211 and the signal processing unit 212.

[0062] [Example of current-voltage conversion unit configuration] Figure 7 is a circuit diagram showing one example configuration of a current-voltage conversion unit 410 in a first embodiment of the present disclosure. This current-voltage conversion unit 410 comprises N-type transistors 411 and 413 and a P-type transistor 412. For example, MOS transistors are used as these transistors.

[0063] The source of the N-type transistor 411 is connected to the light-receiving unit 330, and its drain is connected to the power supply terminal. The P-type transistor 412 and the N-type transistor 413 are connected in series between the power supply terminal and the ground terminal. The connection nodes of the P-type transistor 412 and the N-type transistor 413 are connected to the gate of the N-type transistor 411 and the input terminal of the buffer 420. A predetermined bias voltage Vbias is applied to the gate of the P-type transistor 412.

[0064] The drains of the N-type transistors 411 and 413 are connected to the power supply side, and such a circuit is called a source follower. These two loop-connected source followers convert the photocurrent from the light-receiving unit 330 into a logarithmic voltage signal. Additionally, the P-type transistor 412 supplies a constant current to the N-type transistor 413.

[0065] [Example configuration of subtractor and quantizer] Figure 8 is a circuit diagram showing an example configuration of a subtractor 430 and a quantizer 440 in a first embodiment of the present disclosure. The subtractor 430 comprises capacitors 431 and 433, an inverter 432, and a switch 434. The quantizer 440 comprises a comparator 441.

[0066] One end of capacitor 431 is connected to the output terminal of buffer 420, and the other end is connected to the input terminal of inverter 432. Capacitor 433 is connected in parallel to inverter 432. Switch 434 opens and closes the path connecting both ends of capacitor 433 according to the drive signal.

[0067] The inverter 432 inverts the voltage signal input via the capacitor 431. The inverter 432 outputs the inverted signal to the non-inverting input terminal (+) of the comparator 441.

[0068] When switch 434 is turned on, the voltage signal Vinit is input to the buffer 420 side of capacitor 431, and the other side becomes a virtual ground terminal. For convenience, the potential of this virtual ground terminal is assumed to be zero. At this time, the potential Qinit stored in capacitor 431 is expressed by the following equation, where C1 is the capacitance of capacitor 431. On the other hand, since both ends of capacitor 433 are short-circuited, the stored charge is zero. Qinit = C1 × Vinit ... (1)

[0069] Next, consider the case where switch 434 is turned off and the voltage on the buffer 420 side of capacitor 431 changes to Vafter. The charge Qafter stored in capacitor 431 is expressed by the following equation. Qafter = C1 × Vafter ... (2)

[0070] On the other hand, the charge Q2 stored in capacitor 433 can be expressed by the following equation, where Vout is the output voltage. Q2 = -C2 × Vout ... (3)

[0071] In this case, the total charge of capacitors 431 and 433 does not change, so the following equation holds true. Qinit = Qafter + Q2 ... (4)

[0072] Substituting equations (1) through (3) into equation (4) and rearranging it yields the following equation. Vout=-(C1 / C2)×(Vafter-Vinit) ···(5)

[0073] Equation (5) represents the subtraction operation of the voltage signal, and the gain of the subtraction result is C1 / C2. Normally, it is desirable to maximize the gain, so it is preferable to design the capacitance C1 of capacitor 431 to be large and the capacitance C2 of capacitor 433 to be small. On the other hand, if C2 is too small, kTC noise will increase and the noise characteristics may deteriorate, so the reduction of the capacitance C2 is limited to a range in which noise can be tolerated. In addition, since an address event detection unit 400 including a subtractor 430 is mounted for each pixel block, there are area constraints on capacitances C1 and C2. The values ​​of capacitances C1 and C2 are determined taking these factors into consideration.

[0074] The comparator 441 compares the voltage signal from the subtractor 430 with a predetermined threshold voltage Vth applied to the inverting input terminal (-). The comparator 441 outputs a signal indicating the comparison result as a detection signal to the transfer unit 450.

[0075] Furthermore, the overall gain A of the address event detection unit 400 can be expressed by the following equation, where the conversion gain of the current-voltage conversion unit 410 is CGlog and the gain of the buffer 420 is "1".

number

[0076] In the above equation, iphoto_n is the photocurrent of the nth pixel, and its unit is, for example, amperes (A). N is the number of pixels in pixel block 310.

[0077] [Example configuration for column ADC220] Figure 9 is a block diagram showing an example configuration of a column ADC220 in the first embodiment of this disclosure. This column ADC220 includes an ADC230 for each column of the pixel block 310. The column ADC220 also includes a reference signal generation unit 223 and an output unit 222. The reference signal generation unit 223 generates a reference signal, such as a ramp signal, and supplies it to each of the ADC230s. A DAC (Digital to Analog Converter) or the like is used as the reference signal generation unit 223. The output unit 222 supplies the digital signal from the ADC230 to the signal processing unit 212.

[0078] The ADC230 converts an analog pixel signal SIG supplied via a vertical signal line VSL into a digital signal. The ADC230 comprises a comparator 236, a counter 237, a switch 238, and a memory 239. The comparator 236 compares a reference signal with the pixel signal SIG, and the counter 237 counts the value over a period until the comparison result reverses. The switch 238 supplies the count value to the memory 239 for retention, according to control such as a timing control circuit (not shown). The memory 239 supplies a digital signal indicating the count value to the output unit 222, according to control such as a horizontal drive unit (not shown). This configuration converts the pixel signal SIG into a digital signal with more bits than the detection signal. For example, if the detection signal is 2 bits, the pixel signal is converted into a digital signal with 3 or more bits (e.g., 16 bits). The ADC230 is an example of the analog-to-digital converter described in the claims.

[0079] [Example of operation of a solid-state image sensor] Figure 10 is a timing chart showing an example of the operation of the solid-state image sensor 200 in the first embodiment of this disclosure. At timing T0, when the control unit 130 instructs the start of address event detection, the drive circuit 211 sets all control signals OFGn to high level, turning on the OFG transistors 332 of all pixels. As a result, the sum of the photocurrents of all pixels is supplied to the address event detection unit 400. On the other hand, all transfer signals TRGn are at a low level, and the transfer transistors 331 of all pixels are in the off state.

[0080] Then, at timing T1, the address event detection unit 400 detects an address event and outputs a high-level detection signal. Here, the detection signal is assumed to be a 1-bit signal indicating the detection result of an on-event.

[0081] When the drive circuit 211 receives a detection signal, it sets all control signals OFGn to a low level at timing T2 to stop supplying photocurrent to the address event detection unit 400. The drive circuit 211 also sets the selection signal SEL to a high level and the reset signal RST to a high level for a certain pulse period to initialize the floating diffusion layer 324. The pixel signal generation unit 320 outputs this initialization voltage as the reset level, and the ADC 230 converts this reset level into a digital signal.

[0082] At timing T3 after the reset level conversion, the drive circuit 211 supplies a high-level transfer signal TRG1 for a certain pulse period, causing the first pixel to output a voltage as a signal level. The ADC 230 converts this signal level into a digital signal. The signal processing unit 212 determines the difference between the reset level and the signal level as the net pixel signal. This process is called CDS processing.

[0083] At timing T4 after the signal level conversion, the drive circuit 211 supplies a high-level transfer signal TRG2 for a certain pulse period to cause the second pixel to output a signal level. The signal processing unit 212 calculates the difference between the reset level and the signal level as the net pixel signal. The same process is then performed, and the pixel signals of each pixel in the pixel block 310 are output sequentially.

[0084] Once all pixel signals are output, the drive circuit 211 sets all control signals OFGn to high level, turning on the OFG transistors 332 for all pixels.

[0085] Figure 11 is a flowchart illustrating an example of the operation of the solid-state image sensor 200 in a first embodiment of the present disclosure. This operation is initiated, for example, when a predetermined application for detecting address events is executed.

[0086] Each of the pixel blocks 310 detects the presence or absence of an address event (step S901). The drive circuit 211 determines whether or not an address event occurred in any of the pixel blocks 310 (step S902). If an address event occurred (step S902: Yes), the drive circuit 211 sequentially outputs the pixel signals of each pixel in the pixel block 310 where the address event occurred (step S903).

[0087] If there is no address event (step S902: No), or after step S903, the solid-state image sensor 200 repeats steps S901 onwards. As described above, according to the first embodiment of this disclosure, the address event detection unit 400 detects the change in the photocurrent of each of the multiple (N) photoelectric conversion elements 333 (pixels), so the number of address event detection units 400 can be reduced to one for every N pixels. By sharing one address event detection unit 400 among the N pixels in this way, the circuit size can be reduced compared to a configuration in which an address event detection unit 400 is provided for each pixel without being shared.

[0088] The value of N mentioned above is arbitrary. For example, if reducing the circuit size is not a concern, N=1 may be used, and an address event detection unit 400 may be provided for each pixel.

[0089] In the first embodiment, the low-potential reference potential and off-potential used by each part of the imaging device 100 include three or more different potentials with varying potential levels. The low-potential reference potential and off-potential are typically the ground potential (GND), but in this embodiment, it is assumed that each part of the imaging device 100 uses a potential at a potential level other than the ground potential (GND).

[0090] More specifically, the low-potential reference potential of the photoelectric conversion unit 334, the low-potential reference potential of the detection unit, the low-potential reference potential of the pixel signal generation unit 320, the low-potential reference potential of the column ADC 220, and the off-potential of the transfer control unit 335 each include three or more potentials with different potential levels.

[0091] For example, the low-potential reference potential of the photoelectric conversion unit 334 may be at a lower potential level than the low-potential reference potential of the address event detection unit 400. Also, the low-potential reference potential of the photoelectric conversion unit 334 may be at a higher potential level than the off-potential of the transfer control unit 335. Furthermore, the low-potential reference potential of the photoelectric conversion unit 334 may be at a lower potential level than the low-potential reference potential of at least one of the pixel signal generation unit 320 and the column ADC 220.

[0092] Figure 12 shows the low-potential side reference potential and off-potential used by each part of the imaging device 100 according to the first embodiment. In Figure 12, an example is shown in which the low-potential side reference potential and off-potential used by each part of the imaging device 100 include three potentials, each with a different potential level. In the example in Figure 12, these three potentials are referred to as the ground potential, the first reference potential, and the second reference potential. The ground potential is, for example, 0V, the first reference potential is a negative potential with a potential level lower than the ground potential GND, and the second reference potential is a negative potential with an even lower potential level than the second reference potential.

[0093] The first and second reference potentials are supplied from the negative potential supply unit 235. The negative potential supply unit 235 generates the first and second reference potentials, which are lower than the ground potential (GND), for example, using a charge pump.

[0094] In the example shown in Figure 12, the low-potential side reference potential of the photoelectric conversion unit 334 is the first reference potential. The low-potential side reference potential of the address event detection unit 400, the pixel signal generation unit 320, and the column ADC 220 is the ground potential (GND). The off potential of the transfer control unit 335 is the second reference potential. The transfer control unit 335 consists of a transfer transistor 331 and an OFG transistor 332, and the off potential of the transfer control unit 335 refers to the potential required to turn off the gates of the transfer transistor 331 and the OFG transistor 332.

[0095] In Figure 12, by setting the low-potential side reference potential of the photoelectric conversion unit 334 to a negative second reference potential, the reverse bias of the photodiode (photoelectric conversion element) in the photoelectric conversion unit 334 becomes larger compared to the case where the low-potential side reference potential of the photoelectric conversion unit 334 is set to ground potential (GND). As a result, the sensitivity of the photodiode 311 is increased and the dark current can be reduced.

[0096] Furthermore, the back gates of the transfer transistor 331 and OFG transistor 332 in the transfer control unit 335 may be set to a negative potential Vn. This increases the threshold voltage of each transistor due to the substrate bias effect compared to when their potentials are used as the reference potential, preventing the gate-source voltage of these transistors from falling below zero. If the gate-source voltage falls below zero, a normal output cannot be obtained due to the circuit configuration of the pixel signal generation unit 320, so supplying a negative potential Vn to the back gate can suppress such a situation. In this way, the signal quality of the detection signal can be improved by increasing the sensitivity of the photodiode 311, reducing the dark current, and increasing the threshold voltage.

[0097] In Figure 12, the low-potential side reference potential (first reference potential) of the address event detection unit 400 is set to a higher potential level than the low-potential side reference potential (first reference potential) of the photoelectric conversion unit 334. If the low-potential side reference potential of the address event detection unit 400 were lower than the low-potential side reference potential of the photoelectric conversion unit 334, sufficient reverse bias would not be applied to the photodiode in the photoelectric conversion unit 334, potentially leading to increased leakage current, increased noise, and a slower response. As shown in Figure 12, by setting the low-potential side reference potential of the address event detection unit 400 to a higher potential level than the low-potential side reference potential of the photoelectric conversion unit 334, sufficient reverse bias can be applied to the photodiode, thereby reducing noise and improving response speed.

[0098] The OFG transistor 332 in the transfer control unit 335 is turned on when the address event detection unit 400 performs address event detection processing. At this time, the transfer transistor 331 must be off. When an address event is detected by the address event detection unit 400, the OFG transistor 332 turns off and the transfer transistor 331 turns on. When the transfer transistor 331 turns on, the electrical signal (photocurrent) converted by the photodiode is sent to the pixel signal generation unit 320 via the transfer transistor 331 to generate a pixel signal, which is then sent to the column ADC 220 to generate a digital signal.

[0099] In this way, the OFG transistor 332 and the transfer transistor 331 are switched on and off exclusively. To ensure that the OFG transistor 332 and the transfer transistor 331 operate mutually, it is desirable to apply a positive potential to the gate of the transistor that is turned on and a negative potential to the gate of the transistor that is turned off. For this reason, in Figure 12, the off potential of the transfer control unit 335 is set to a second reference potential, which is a negative potential.

[0100] Figures 13A and 13B show examples of specific potential levels for the low-potential reference potential and off-potential applied to each part of the imaging device 100 according to the first embodiment. Figure 13A shows the potential level when the transfer transistor is turned off, and Figure 13B shows the potential level when the transfer transistor is turned on. When address event detection is performed, the potential level is set to that of Figure 13A. Note that the potential levels in Figures 13A and 13B are examples, and various modifications are possible.

[0101] As shown in Figure 13A, when the transfer transistor is turned off, the anode of the photodiode is set to a negative potential of -0.6V. Also, the gate of the transfer transistor is set to a negative potential of -1.8V. This ensures that the transfer transistor is turned off. The gate of the reset transistor in the pixel signal generation unit 320 is set to 2.2V. This turns on the reset transistor and initializes the charge amount of the floating diffusion layer 324. The positive potential side reference potential of the pixel signal generation unit 320 is set to 2.8V.

[0102] Although not shown in Figure 13A, when address event detection is performed, the gate of the OFG transistor is set to approximately 2.2 to 2.8V. Furthermore, the low-potential reference potential of the address event detection unit 400 is set to ground potential GND (0V), which is higher than the anode potential of the photodiode. The positive-potential reference potential of the address event detection unit 400 is set to 2.2V.

[0103] As shown in Figure 13B, when the transfer transistor is turned on, the anode of the photodiode is also set to -0.6V. The gate of the transfer transistor is set to 2.2V. The gate of the reset transistor in the pixel signal generation unit 320 is set to a negative potential of -0.6V. The drain of the reset transistor is set to 2.2V. The drain of the amplification transistor 322 in the pixel signal generation unit 320 is set to 2.8V.

[0104] Although not shown in Figure 13A, the gate of the OFG transistor is set to -1.8V. The low-potential reference potential of the address event detection unit 400 is the same as in Figure 13A, which is the ground potential GND (0V).

[0105] Thus, in the first embodiment, the low-potential side reference potential and off-potential used by each part of the imaging device 100 include three or more different potential levels. This allows for optimization of the operation of each part of the imaging device 100. For example, by setting the low-potential side reference potential of the photoelectric conversion unit 334 as the reference potential, the sensitivity of the photodiode can be improved and the dark current can be reduced. Furthermore, by setting the low-potential side reference potential of the address event detection unit 400 higher than the low-potential side reference potential of the photoelectric conversion unit 334, sufficient reverse bias can be applied to the photodiode, thereby reducing noise and improving response speed. In addition, by setting the off-potential of the transfer control unit 335 to a negative potential, the transfer transistor and the OFG transistor can be reliably operated exclusively.

[0106] (Second embodiment) Figure 14 shows the low-potential side reference potential and off-potential used by each part of the imaging device 100 according to the second embodiment. In the example of Figure 14, three different reference potentials with varying potential levels are used as the low-potential side reference potential and off-potential used by each part of the imaging device 100, but the potential levels of these three reference potentials are different from those in Figure 12. More specifically, the first reference potential in Figure 14 is at a potential level higher than the ground potential GND, and the second reference potential is at a potential level lower than the ground potential GND.

[0107] The second reference potential is supplied from the negative potential supply unit 235. The first reference potential is supplied from a power supply unit (not shown).

[0108] In the example shown in Figure 14, the low-potential side reference potentials of the photoelectric conversion unit 334, the pixel signal generation unit 320, and the column ADC 220 are ground potential GND (0V). The low-potential side reference potential of the address event detection unit 400 is a first reference potential, which is a positive potential. The off-potential of the transfer control unit 335 is a second reference potential, which is a negative potential lower than the first reference potential.

[0109] In the case of Figure 14, by setting the low-potential side reference potential of the photoelectric conversion unit 334 lower than the low-potential side reference potential of the address event detection unit 400, the reverse bias of the photodiode in the photoelectric conversion unit 334 can be sufficiently large, thereby reducing noise and improving response speed. Furthermore, by setting the off-potential of the transfer control unit 335 to a second reference potential, which is a negative potential lower than the first reference potential, the transfer transistor and the OFG transistor can be reliably operated mutually exclusively.

[0110] Figures 15A and 15B show examples of specific potential levels for the low-potential reference potential and off-potential applied to each part of the imaging device 100 according to the second embodiment. Figure 15A shows the potential level when the transfer transistor is turned off, and Figure 15B shows the potential level when the transfer transistor is turned on.

[0111] As shown in Figure 15A, when the transfer transistor is turned off, the anode of the photodiode is set to the negative potential, ground potential GND (0V). Also, the gate of the transfer transistor is set to the negative potential, -1.2V. This ensures that the transfer transistor is turned off. The gate of the reset transistor in the pixel signal generation unit 320 is set to 2.8V. This turns on the reset transistor and initializes the charge amount of the floating diffusion layer 324. The positive potential side reference potential of the pixel signal generation unit 320 is set to 2.8V. The low potential side reference potential of the address event detection unit 400 is set to 0.6V, which is higher than the anode potential of the photodiode. The positive potential side reference potential of the address event detection unit 400 is set to 2.8V.

[0112] As shown in Figure 15B, when the transfer transistor is turned on, the anode of the photodiode is also set to ground potential GND (0V). The gate of the transfer transistor is set to 2.8V. The gate of the reset transistor in the pixel signal generation unit 320 is set to ground potential GND (0V). The drain of the reset transistor is set to 2.8V. The drain of the amplification transistor 322 in the pixel signal generation unit 320 is set to 2.8V.

[0113] In Figures 13A, 13B, 15A, and 15B, 2.2V and 2.8V are mixed as the positive potential reference potential, but this is just one example, and it is possible to standardize to a specific potential.

[0114] Thus, in the second embodiment, in addition to the ground potential GND, a first positive potential and a second negative potential are provided as low-potential-side reference potentials and off-potentials within the imaging device 100. This allows for setting the optimal voltage level of the low-potential-side reference potential for each part of the imaging device 100, thereby optimizing the operation of each part. In particular, by setting the low-potential-side reference potential of the address event detection unit 400 higher than the low-potential-side reference potential of the photoelectric conversion unit 334, sufficient reverse bias can be applied to the photodiode, thereby reducing noise and improving response speed. Furthermore, by setting the off-potential of the transfer control unit 335 to a negative potential, the transfer transistor and the OFG transistor can be reliably operated exclusively.

[0115] Furthermore, in the second embodiment, since only one type of negative potential is used as the low-potential side reference potential and the off-potential, the circuit configuration of the negative potential supply unit 235 can be simplified.

[0116] (Third embodiment) Figure 16 shows the low-potential side reference potential and off-potential used by each part of the imaging device 100 according to the third embodiment.

[0117] As shown in Figure 16, the imaging device 100 according to the third embodiment includes a potential selection unit 336 that switches the low-potential side reference potential of the photoelectric conversion unit 334. The potential selection unit 336 selects a first reference potential during the period in which the address event detection unit 400 detects whether the amount of change in the electrical signal (photocurrent) photoelectrically converted by the photodiode exceeds a predetermined threshold, and selects a second reference potential with a higher potential level than the first reference potential during the period in which the analog-to-digital converter converts the pixel signal into a digital signal.

[0118] In the third embodiment, the low-potential side reference potential and off-potential used by each part of the imaging device 100 are a first reference potential and a second reference potential, respectively, with different potential levels. In other words, the third embodiment has one fewer reference potential compared to the first and second embodiments.

[0119] In the third embodiment, the second reference potential is, for example, the ground potential GND (0V), and the first reference potential is a negative potential with a potential level lower than the ground potential GND. The first reference potential is supplied from the negative potential supply unit 235.

[0120] In the imaging device 100 shown in Figure 16, the low-potential side reference potential of the address event detection unit 400, the pixel signal generation unit 320, and the column ADC 220 is the ground potential GND (second reference potential). The off potential of the transfer control unit 335 is a negative potential (first reference potential).

[0121] The address event detection unit 400 needs to quickly detect address events based on the electrical signals converted photoelectrically by the photodiode in the photoelectric conversion unit 334. Therefore, during the period when the address event detection unit 400 is performing address event detection, the low-potential side reference potential of the photoelectric conversion unit 334 is lowered to a negative potential to improve the sensitivity of the photodiode and reduce dark current. On the other hand, when an address event is detected by the address event detection unit 400, the pixel signal generation unit 320 generates a pixel signal. During this period, there is no need to improve the sensitivity of the photodiode, so the low-potential side reference potential of the receiving unit is set to ground potential (GND) to reduce power consumption.

[0122] Thus, in the third embodiment, the low-potential reference potential of the photoelectric conversion unit 334 is switched depending on whether address event detection is performed or pixel signal generation is performed. This improves the sensitivity of the photodiode and reduces dark current when address event detection is performed, and also reduces power consumption when pixel signal generation is performed.

[0123] (Fourth embodiment) In the first to third embodiments described above, an imaging device 100 equipped with the address event detection unit 400 shown in Figure 6 was described, but the internal configuration of the address event detection unit 400 is not necessarily limited to Figure 6. Figure 17 is a block diagram showing a second configuration example of the address event detection unit 400. As shown in Figure 17, the address event detection unit 400 according to this configuration example has a current-voltage conversion unit 410, a buffer 420, a subtractor 430, a quantizer 440, and a transfer unit 450, as well as a storage unit 460 and a control unit 470.

[0124] The memory unit 460 is located between the quantizer 440 and the transfer unit 450, and stores the output of the quantizer 440, i.e., the comparison result of the comparator 441 within the quantizer 440, based on the sample signal supplied from the control unit 470. The memory unit 460 may be a sampling circuit such as a switch, plastic, or capacitor, or it may be a digital memory circuit such as a latch or flip-flop.

[0125] The control unit 470 applies a predetermined threshold voltage V to the inverting (-) input terminal of the comparator 441. th The control unit 470 supplies the threshold voltage V supplied to the comparator 441. th The voltage values ​​may vary in time division. For example, the control unit 470 may set a threshold voltage V corresponding to an on-event indicating that the change in photocurrent has exceeded the upper threshold. th1 , and the threshold voltage V corresponding to the off-event indicating that the amount of change has fallen below the lower threshold. th2By supplying these at different timings, a single comparator 441 can detect multiple types of address events.

[0126] The memory unit 460, for example, sends a threshold voltage V corresponding to an off-event to the inverting (-) input terminal of the comparator 441 from the control unit 470. th2 During the period in which it is supplied, the threshold voltage V corresponding to the on-event th1 The comparison results of the comparator 441 using this method may be stored. The storage unit 460 may be located inside or outside the pixel 30. Furthermore, the storage unit 460 is not an essential component of the address event detection unit 400. In other words, the storage unit 460 is optional.

[0127] [Imaging device 100 (scanning method) according to the second configuration example] The imaging device 10020 equipped with the first configuration example of the address event detection unit 400 shown in Figure 6 above is an asynchronous imaging device 100 that reads events using an asynchronous readout method. However, the event readout method is not limited to an asynchronous readout method, and a synchronous readout method may also be used. The imaging device 100 to which the synchronous readout method is applied is a scanning imaging device 100, the same as a normal imaging device 100 that performs imaging at a predetermined frame rate.

[0128] Figure 18 is a block diagram showing an example of the configuration of an imaging device 100 according to a second configuration example, i.e., a scanning type imaging device 100, which is used as an imaging device 10020 in an imaging system 10 to which the technology relating to this disclosure is applied.

[0129] As shown in Figure 18, the imaging device 10020 according to the second configuration example as the imaging device 100 of this disclosure comprises a pixel array unit 21, a drive unit 22, a signal processing unit 25, a readout area selection unit 27, and a signal generation unit 221.

[0130] The pixel array unit 21 includes a plurality of pixels 30. The plurality of pixels 30 output an output signal in response to a selection signal from the readout area selection unit 27. Each of the plurality of pixels 30 can be configured to have a quantizer within the pixel, for example, as shown in Figure 7. The plurality of pixels 30 output an output signal corresponding to the amount of change in light intensity. The plurality of pixels 30 may be arranged in a matrix in a two-dimensional arrangement, as shown in Figure 18.

[0131] The drive unit 22 drives each of the multiple pixels 30 and outputs the pixel signal generated by each pixel 30 to the signal processing unit 25. The drive unit 22 and the signal processing unit 25 are circuit units for acquiring grayscale information. Therefore, if only event information is to be acquired, the drive unit 22 and the signal processing unit 25 may be omitted.

[0132] The readout area selection unit 27 selects a portion of the multiple pixels 30 included in the pixel array unit 21. For example, the readout area selection unit 27 selects one or more rows from the structure of the two-dimensional matrix corresponding to the pixel array unit 21. The readout area selection unit 27 sequentially selects one or more rows according to a preset period. Alternatively, the readout area selection unit 27 may determine the selected area in response to requests from each pixel 30 of the pixel array unit 21.

[0133] The signal generation unit 221 generates an event signal corresponding to an active pixel that has detected an event among the selected pixels, based on the output signals of the pixels selected by the readout area selection unit 27. An event is an event in which the intensity of light changes. An active pixel is a pixel in which the amount of change in the intensity of light corresponding to the output signal exceeds or falls below a preset threshold. For example, the signal generation unit 221 compares the output signal of a pixel with a reference signal, detects an active pixel that outputs an output signal if it is greater than or less than the reference signal, and generates an event signal corresponding to that active pixel.

[0134] The signal generation unit 221 can be configured to include, for example, a column selection circuit that mediates the signals entering the signal generation unit 221. Furthermore, the signal generation unit 221 can be configured to output not only information about active pixels that have detected events, but also information about inactive pixels that have not detected events.

[0135] The signal generation unit 221 outputs address information and timestamp information (e.g., (X,Y,T)) of the active pixel that detected the event through the output line 15. However, the data output from the signal generation unit 221 may be in frame format (e.g., (0,0,1,0,···)) in addition to address information and timestamp information.

[0136] [Example of chip structure configuration] As shown in Figure 2, the chip (semiconductor integrated circuit) structure of the imaging device 10020 according to the first or second configuration example described above can be a stacked chip structure. The stacked chip structure, or so-called stacked structure, has a structure in which at least two chips, a first chip, which is a light-receiving chip 201, and a second chip, which is a detection chip 202, are stacked. In the circuit configuration of the pixel 30 shown in Figure 4, each of the light-receiving parts 330 is arranged on the light-receiving chip 201, and all elements other than the light-receiving element 311, as well as elements of other circuit parts of the pixel 30, are arranged on the detection chip 202. The light-receiving chip 201 and the detection chip 202 are electrically connected via connection parts such as vias, Cu-Cu junctions, and bumps.

[0137] In this example, the light-receiving element 311 is placed on the light-receiving chip 201, and elements other than the light-receiving element 311, as well as elements of other circuit parts of the pixel 30, are placed on the detection chip 202. However, the system is not limited to this configuration.

[0138] For example, in the circuit configuration of the pixel 30 shown in Figure 4, the elements of the light-receiving unit 330, and the reset transistor 321 and floating diffusion layer 324 of the pixel signal generation unit 32032 can be arranged on the light-receiving chip 201, while the other elements can be arranged on the detection chip 202. Alternatively, some of the elements constituting the address event detection unit 400 can be arranged on the light-receiving chip 201 together with the elements of the light-receiving unit 330.

[0139] [Example of column processing section configuration] Figure 9 illustrates an example configuration in which analog-to-digital converters (ADCs) 230 are arranged in a column ADC 220 in a one-to-one correspondence with the pixel rows of the pixel array section 21. However, the configuration is not limited to this example. For example, it is also possible to arrange analog-to-digital converters (ADCs) 230 in units of multiple pixel rows and use the analog-to-digital converters (ADCs) 230 in a time-division multiplexing manner among the multiple pixel rows.

[0140] The analog-to-digital converter (ADC) 230 converts the analog pixel signal SIG, supplied via the vertical signal line VSL, into a digital signal with more bits than the address event detection signal mentioned earlier. For example, if the address event detection signal is 2 bits, the pixel signal is converted into a digital signal with 3 or more bits (such as 16 bits). The analog-to-digital converter (ADC) 230 supplies the digital signal generated by the analog-to-digital conversion to the signal processing unit 25.

[0141] [About noise events] Incidentally, the imaging device 10020 according to the first configuration example is an asynchronous imaging device 100 called DVS, which is equipped with a detection unit (i.e., an address event detection unit 400) for each pixel 30 that detects in real time as an address event whether the amount of light of that pixel exceeds a predetermined threshold for each pixel address.

[0142] In the asynchronous imaging device 100 according to this first configuration example, data acquisition is performed when some event (i.e., a true event) occurs in the scene. However, in the asynchronous imaging device 100, data acquisition may be performed unnecessarily even in scenes where no true events occur, due to noise events (false events) such as sensor noise. This not only results in the reading of noise signals but also reduces the throughput of the signal output.

[0143] <Examples of application of the technology related to this disclosure> The technology described herein can be applied to a variety of products. More specific examples of applications are described below. For example, the technology described herein may be implemented as a rangefinder mounted on any type of mobile device, such as automobiles, electric vehicles, hybrid electric vehicles, motorcycles, bicycles, personal mobility devices, airplanes, drones, ships, robots, construction machinery, or agricultural machinery (tractors).

[0144] [Mobile] Figure 19 is a block diagram showing a schematic configuration example of a vehicle control system 7000, which is an example of a mobile control system to which the technology described herein can be applied. The vehicle control system 7000 comprises a plurality of electronic control units connected via a communication network 7010. In the example shown in Figure 19, the vehicle control system 7000 comprises a drive system control unit 7100, a body system control unit 7200, a battery control unit 7300, an external information detection unit 7400, an internal information detection unit 7500, and an integrated control unit 7600. The communication network 7010 connecting these plurality of control units may be an in-vehicle communication network conforming to any standard such as CAN (Controller Area Network), LIN (Local Interconnect Network), LAN (Local Area Network), or FlexRay®.

[0145] Each control unit comprises a microcomputer (processor) that performs calculations according to various programs, a storage unit that stores programs executed by the microcomputer or parameters used in various calculations, and a drive circuit that drives various controlled devices. Each control unit is equipped with a network interface for communication with other control units via the communication network 7010, and a communication interface for communication with devices or sensors inside or outside the vehicle via wired or wireless communication. Figure 19 illustrates the functional configuration of the integrated control unit 7600, which includes a microcomputer 7610, a general-purpose communication interface 7620, a dedicated communication interface 7630, a positioning unit 7640, a beacon receiver 7650, an in-vehicle equipment interface 7660, an audio / image output unit 7670, an in-vehicle network interface 7680, and a storage unit 7690. Other control units similarly include a microcomputer, a communication interface, and a storage unit.

[0146] The drivetrain control unit 7100 controls the operation of devices related to the vehicle's drivetrain according to various programs. For example, the drivetrain control unit 7100 functions as a control device for generating driving force for the vehicle, such as an internal combustion engine or a drive motor; a driving force transmission mechanism for transmitting driving force to the wheels; a steering mechanism for adjusting the steering angle of the vehicle; and a braking device for generating braking force for the vehicle. The drivetrain control unit 7100 may also function as a control device such as ABS (Antilock Brake System) or ESC (Electronic Stability Control).

[0147] A vehicle state detection unit 7110 is connected to the drivetrain control unit 7100. The vehicle state detection unit 7110 includes, for example, a gyro sensor for detecting the angular velocity of the vehicle's axial rotational motion, an acceleration sensor for detecting the vehicle's acceleration, or at least one of the sensors for detecting the amount of operation of the accelerator pedal, the amount of operation of the brake pedal, the steering angle of the steering wheel, the engine speed, or the rotational speed of the wheels. The drivetrain control unit 7100 performs calculations using signals input from the vehicle state detection unit 7110 and controls the internal combustion engine, drive motor, electric power steering system, brake system, etc.

[0148] The body system control unit 7200 controls the operation of various devices mounted on the vehicle body according to various programs. For example, the body system control unit 7200 functions as a control device for a keyless entry system, a smart key system, a power window system, or various lamps such as headlights, reverse lights, brake lights, turn signals, or fog lights. In this case, the body system control unit 7200 may receive radio waves transmitted from a portable device that replaces a key or signals from various switches. The body system control unit 7200 receives these radio waves or signals and controls the vehicle's door lock system, power window system, lamps, etc.

[0149] The battery control unit 7300 controls the secondary battery 7310, which is the power source for the drive motor, according to various programs. For example, the battery control unit 7300 receives information such as battery temperature, battery output voltage, or remaining battery capacity from the battery device equipped with the secondary battery 7310. The battery control unit 7300 uses these signals to perform calculations and controls the temperature of the secondary battery 7310 or the cooling device provided in the battery device.

[0150] The external information detection unit 7400 detects information from outside the vehicle equipped with the vehicle control system 7000. For example, at least one of the imaging unit 7410 and the external information detection unit 7420 is connected to the external information detection unit 7400. The imaging unit 7410 includes at least one of the following: a ToF (Time Of Flight) camera, a stereo camera, a monocular camera, an infrared camera, and other cameras. The external information detection unit 7420 includes at least one of the following: an environmental sensor for detecting the current weather or climate, or an ambient information detection sensor for detecting other vehicles, obstacles, or pedestrians around the vehicle equipped with the vehicle control system 7000.

[0151] The environmental sensor may be at least one of the following: a raindrop sensor for detecting rain, a fog sensor for detecting fog, a sunshine sensor for detecting the degree of sunlight, and a snow sensor for detecting snowfall. The ambient information detection sensor may be at least one of the following: an ultrasonic sensor, a radar device, and a LIDAR (Light Detection and Ranging, Laser Imaging Detection and Ranging) device. These imaging unit 7410 and external information detection unit 7420 may be provided as independent sensors or devices, or as a device in which multiple sensors or devices are integrated.

[0152] Here, Figure 20 shows examples of the installation locations of the imaging unit 7410 and the external information detection unit 7420. The imaging units 7910, 7912, 7914, 7916, and 7918 are installed, for example, at least one of the following locations on the vehicle 7900: the front nose, side mirrors, rear bumper, back door, and the upper part of the windshield inside the passenger compartment. The imaging unit 7910 installed on the front nose and the imaging unit 7918 installed on the upper part of the windshield inside the passenger compartment mainly acquire images of the front of the vehicle 7900. The imaging units 7912 and 7914 installed on the side mirrors mainly acquire images of the sides of the vehicle 7900. The imaging unit 7916 installed on the rear bumper or back door mainly acquires images of the rear of the vehicle 7900. The imaging unit 7918 installed on the upper part of the windshield inside the passenger compartment is mainly used for detecting preceding vehicles, pedestrians, obstacles, traffic lights, traffic signs, or lanes.

[0153] Figure 20 shows an example of the imaging range of each imaging unit 7910, 7912, 7914, and 7916. Imaging range a shows the imaging range of imaging unit 7910 located on the front nose, imaging ranges b and c show the imaging ranges of imaging units 7912 and 7914 located on the side mirrors, respectively, and imaging range d shows the imaging range of imaging unit 7916 located on the rear bumper or back door. For example, by superimposing the image data captured by imaging units 7910, 7912, 7914, and 7916, an overhead view image of the vehicle 7900 can be obtained.

[0154] The external information detection units 7920, 7922, 7924, 7926, 7928, and 7930, which are installed on the front, rear, sides, corners, and the upper part of the windshield inside the vehicle 7900, may be, for example, ultrasonic sensors or radar devices. The external information detection units 7920, 7926, and 7930, which are installed on the front nose, rear bumper, back door, and the upper part of the windshield inside the vehicle 7900, may be, for example, LIDAR devices. These external information detection units 7920 to 7930 are mainly used to detect preceding vehicles, pedestrians, or obstacles.

[0155] Returning to Figure 19, the explanation continues. The external information detection unit 7400 causes the imaging unit 7410 to capture images of the area outside the vehicle and receives the captured image data. The external information detection unit 7400 also receives detection information from the connected external information detection unit 7420. If the external information detection unit 7420 is an ultrasonic sensor, radar device, or LIDAR device, the external information detection unit 7400 emits ultrasonic waves or electromagnetic waves and receives information on the received reflected waves. Based on the received information, the external information detection unit 7400 may perform object detection processing such as detecting people, vehicles, obstacles, signs, or characters on the road surface, or distance detection processing. Based on the received information, the external information detection unit 7400 may perform environmental recognition processing to recognize rainfall, fog, or road surface conditions. Based on the received information, the external information detection unit 7400 may calculate the distance to an object outside the vehicle.

[0156] Furthermore, the external information detection unit 7400 may perform image recognition processing or distance detection processing to recognize people, vehicles, obstacles, signs, or characters on the road surface based on the received image data. The external information detection unit 7400 may perform distortion correction or alignment processing on the received image data, and may also synthesize image data captured by different imaging units 7410 to generate an overhead view image or a panoramic image. The external information detection unit 7400 may also perform viewpoint transformation processing using image data captured by different imaging units 7410.

[0157] The in-vehicle information detection unit 7500 detects information inside the vehicle. The in-vehicle information detection unit 7500 is connected to, for example, a driver status detection unit 7510 that detects the driver's state. The driver status detection unit 7510 may include a camera that images the driver, a biosensor that detects the driver's biometric information, or a microphone that collects sounds inside the vehicle. The biosensor is installed, for example, on the seat or steering wheel and detects the biometric information of a passenger sitting in the seat or a driver holding the steering wheel. Based on the detection information input from the driver status detection unit 7510, the in-vehicle information detection unit 7500 may calculate the driver's level of fatigue or concentration, or determine whether the driver is dozing off. The in-vehicle information detection unit 7500 may perform processing such as noise cancellation on the collected audio signals.

[0158] The integrated control unit 7600 controls the overall operation of the vehicle control system 7000 according to various programs. An input unit 7800 is connected to the integrated control unit 7600. The input unit 7800 is implemented by a device that can be operated by the passenger, such as a touch panel, buttons, a microphone, a switch, or a lever. The integrated control unit 7600 may also receive data obtained by voice recognition of voice input from the microphone. The input unit 7800 may be a remote control device using infrared or other radio waves, or an external device such as a mobile phone or PDA (Personal Digital Assistant) that is compatible with the operation of the vehicle control system 7000. The input unit 7800 may be a camera, in which case the passenger can input information by gesture. Alternatively, data obtained by detecting the movement of a wearable device worn by the passenger may be input. Furthermore, the input unit 7800 may include, for example, an input control circuit that generates an input signal based on the information input by the passenger using the above input unit 7800 and outputs it to the integrated control unit 7600. Passengers and others can input various data or instruct the vehicle control system 7000 to perform processing operations by operating this input unit 7800.

[0159] The memory unit 7690 may include a ROM (Read Only Memory) for storing various programs executed by a microcomputer, and a RAM (Random Access Memory) for storing various parameters, calculation results, or sensor values. The memory unit 7690 may also be implemented using a magnetic storage device such as an HDD (Hard Disk Drive), a semiconductor storage device, an optical storage device, or a magneto-optical storage device.

[0160] The general-purpose communication interface 7620 is a general-purpose communication interface that mediates communication between the vehicle and various devices present in the external environment 7750. The general-purpose communication interface 7620 may implement cellular communication protocols such as GSM (Global System of Mobile communications), WiMAX, LTE (Long Term Evolution), or LTE-A (LTE-Advanced), or other wireless communication protocols such as wireless LAN (also known as Wi-Fi (registered trademark)) or Bluetooth (registered trademark). The general-purpose communication interface 7620 may connect to devices (e.g., application servers or control servers) located on an external network (e.g., the Internet, a cloud network, or a carrier-specific network) via, for example, a base station or access point. The general-purpose communication interface 7620 may also connect to terminals located near the vehicle (e.g., terminals of drivers, pedestrians, or shops, or MTC (Machine Type Communication) terminals) using, for example, P2P (Peer To Peer) technology.

[0161] The Dedicated Communication I / F 7630 is a communication interface that supports communication protocols developed for use in vehicles. The Dedicated Communication I / F 7630 may implement standard protocols such as WAVE (Wireless Access in Vehicle Environment), DSRC (Dedicated Short Range Communications), or cellular communication protocols, which are combinations of lower-layer IEEE 802.11p and upper-layer IEEE 1609. The Dedicated Communication I / F 7630 typically performs V2X communication, a concept that includes one or more of the following: vehicle-to-vehicle communication, vehicle-to-infrastructure communication, vehicle-to-home communication, and vehicle-to-pedestrian communication.

[0162] The positioning unit 7640 performs positioning by receiving GNSS signals from GNSS (Global Navigation Satellite System) satellites (for example, GPS signals from GPS (Global Positioning System) satellites) and generates location information including the vehicle's latitude, longitude, and altitude. The positioning unit 7640 may also determine its current location by exchanging signals with a wireless access point, or it may acquire location information from a terminal such as a mobile phone, PHS, or smartphone that has a positioning function.

[0163] The beacon receiver 7650 receives radio waves or electromagnetic waves transmitted from, for example, a radio station installed on a road, and obtains information such as the current location, traffic congestion, road closures, or travel time. The functions of the beacon receiver 7650 may also be included in the dedicated communication interface 7630 described above.

[0164] The in-vehicle equipment interface (I / F) 7660 is a communication interface that mediates connections between the microcomputer 7610 and various in-vehicle equipment 7760 located inside the vehicle. The in-vehicle equipment interface (I / F) 7660 may establish a wireless connection using wireless communication protocols such as Wi-Fi, Bluetooth®, NFC (Near Field Communication), or WUSB (Wireless USB). The in-vehicle equipment interface (I / F) 7660 may also establish a wired connection such as USB (Universal Serial Bus), HDMI® (High-Definition Multimedia Interface), or MHL (Mobile High-Definition Link) via connection terminals (and cables if necessary) not shown. The in-vehicle equipment 7760 may include, for example, at least one of the following: a mobile device or wearable device owned by a passenger, or information equipment brought into or installed in the vehicle. The in-vehicle equipment 7760 may also include a navigation device that performs route searching to any destination. The in-vehicle equipment interface 7660 exchanges control signals or data signals with these in-vehicle equipment units 7760.

[0165] The in-vehicle network interface 7680 is an interface that mediates communication between the microcomputer 7610 and the communication network 7010. The in-vehicle network interface 7680 transmits and receives signals and other data in accordance with a predetermined protocol supported by the communication network 7010.

[0166] The microcomputer 7610 of the integrated control unit 7600 controls the vehicle control system 7000 according to various programs based on information acquired via at least one of the general-purpose communication I / F 7620, dedicated communication I / F 7630, positioning unit 7640, beacon receiver 7650, in-vehicle equipment I / F 7660, and in-vehicle network I / F 7680. For example, the microcomputer 7610 may calculate control target values ​​for the drive force generator, steering mechanism, or braking device based on acquired in-vehicle and out-of-vehicle information and output control commands to the drive system control unit 7100. For example, the microcomputer 7610 may perform coordinated control aimed at realizing ADAS (Advanced Driver Assistance System) functions, including vehicle collision avoidance or impact mitigation, following driving based on distance between vehicles, maintaining vehicle speed, vehicle collision warning, or vehicle lane departure warning. Furthermore, the microcomputer 7610 may perform cooperative control for purposes such as autonomous driving, where the vehicle drives autonomously without driver intervention, by controlling the drive force generating device, steering mechanism, or braking device, etc., based on the acquired information about the vehicle's surroundings.

[0167] The microcomputer 7610 may generate three-dimensional distance information between the vehicle and surrounding structures, people, and other objects based on information acquired via at least one of the general-purpose communication I / F 7620, dedicated communication I / F 7630, positioning unit 7640, beacon receiver 7650, in-vehicle equipment I / F 7660, and in-vehicle network I / F 7680, and create local map information including surrounding information of the vehicle's current location. Furthermore, the microcomputer 7610 may predict dangers such as vehicle collision, proximity of pedestrians, or entry into a closed road based on the acquired information, and generate a warning signal. The warning signal may, for example, be a signal to generate a warning sound or illuminate a warning lamp.

[0168] The audio-image output unit 7670 transmits at least one of audio and image output signals to an output device capable of visually or audibly notifying the vehicle's occupants or those outside the vehicle. In the example in Figure 19, the output devices are exemplified as an audio speaker 7710, a display unit 7720, and an instrument panel 7730. The display unit 7720 may include, for example, at least one of an onboard display and a head-up display. The display unit 7720 may also have an AR (Augmented Reality) display function. The output device may be other devices besides these, such as headphones, wearable devices such as glasses-type displays worn by occupants, projectors, or lamps. If the output device is a display device, the display device visually displays the results obtained from various processes performed by the microcomputer 7610 or information received from other control units in various formats such as text, images, tables, and graphs. If the output device is an audio output device, the audio output device converts the audio signal, consisting of reproduced audio data or sound data, into an analog signal and outputs it audibly.

[0169] In the example shown in Figure 19, at least two control units connected via the communication network 7010 may be integrated into a single control unit. Alternatively, individual control units may be composed of multiple control units. Furthermore, the vehicle control system 7000 may include other control units not shown. Also, in the above description, some or all of the functions performed by one control unit may be assigned to other control units. In other words, as long as information is transmitted and received via the communication network 7010, predetermined calculation processing may be performed by any of the control units. Similarly, a sensor or device connected to one control unit may be connected to another control unit, and multiple control units may transmit and receive detection information to each other via the communication network 7010.

[0170] The above describes an example of a vehicle control system to which the technology described herein can be applied. The technology described herein can be applied to, for example, the imaging units 7910, 7912, 7914, 7916, and 7918, the external information detection units 7920, 7922, 7924, 7926, 7928, and 7930, and the driver state detection unit 7510, among the configurations described above. Specifically, the imaging system 10 of Figure 1, which has the imaging device 100 of this disclosure, can be applied to these imaging units and detection units. By applying the technology described herein, the effects of noise events such as sensor noise can be mitigated, and the occurrence of true events can be reliably and quickly detected, thereby enabling safe vehicle operation.

[0171] Furthermore, this disclosure can take the following form. (1) A photoelectric conversion unit having a plurality of photoelectric conversion elements, each of which converts incident light into electrical signals, A detection unit that outputs a detection signal indicating whether the amount of change in the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold, A pixel signal generation unit that generates a pixel signal based on the aforementioned electrical signal, A transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit, The system includes an analog-to-digital converter that converts the aforementioned pixel signals into digital signals, An imaging device in which the low-potential side reference potential of the photoelectric conversion unit, the low-potential side reference potential of the detection unit, the low-potential side reference potential of the pixel signal generation unit, the low-potential side reference potential of the analog-to-digital converter, and the off-potential of the transfer control unit each include three or more potentials with different potential levels. (2) The imaging apparatus according to (1), wherein the low-potential side reference potential of the photoelectric conversion unit is at a lower potential level than the low-potential side reference potential of the detection unit. (3) The imaging apparatus according to (1) or (2), wherein the low-potential side reference potential of the photoelectric conversion unit is at a higher potential level than the off-potential of the transfer control unit. (4) The imaging apparatus according to any one of (1) to (3), wherein the low-potential side reference potential of the photoelectric conversion unit is at a lower potential level than the low-potential side reference potential of at least one of the pixel signal generation unit and the analog-to-digital converter. (5) The imaging apparatus according to any one of (1) to (4), wherein at least one of the low-potential side reference potential of the photoelectric conversion unit, the low-potential side reference potential of the detection unit, the low-potential side reference potential of the pixel signal generation unit, the low-potential side reference potential of the analog-to-digital converter, and the off-potential of the transfer control unit is the ground potential, and at least one of the others is a first reference potential with a potential level lower than the ground potential, and at least one of the others is a second reference potential with a potential level lower than the first reference potential. (6) The low-potential side reference potential of the photoelectric conversion unit is the second reference potential, The low-potential side reference potential of the detection unit, the pixel signal generation unit, and the analog-to-digital converter is the ground potential. The imaging apparatus according to (5), wherein the off-potential of the transfer control unit is the second reference potential. (7) The ground potential is 0V, The first reference potential is a negative potential. The imaging apparatus according to (5) or (6), wherein the second reference potential is a negative potential with a lower potential level than the first reference potential. (8) The imaging apparatus according to any one of (1) to (3), wherein the low-potential side reference potentials of the photoelectric conversion unit, the pixel signal generation unit, and the analog-to-digital converter are approximately equal. (9) The imaging apparatus according to any one of (1) to (3) and (8), wherein at least one of the low-potential side reference potential of the photoelectric conversion unit, the low-potential side reference potential of the detection unit, the low-potential side reference potential of the pixel signal generation unit, the low-potential side reference potential of the analog-to-digital converter, and the off-potential of the transfer control unit is the ground potential, and at least one of the others is a first reference potential with a potential level higher than the ground potential, and at least one of the others is a second reference potential with a potential level lower than the ground potential. (10) The low-potential side reference potential of the photoelectric conversion unit, the pixel signal generation unit, and the analog-to-digital converter is the ground potential, The low-potential side reference potential of the detection unit is the first reference potential. The imaging apparatus according to (9), wherein the off-potential of the transfer control unit is the second reference potential. (11) The ground potential is 0V, The aforementioned first reference potential is a positive potential. The imaging apparatus according to (9) or (10), wherein the second reference potential is a negative potential. (12) A photoelectric conversion unit having a plurality of photoelectric conversion elements, each of which converts incident light into electrical signals, A detection unit that outputs a detection signal indicating whether the amount of change in the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold, A pixel signal generation unit that generates a pixel signal based on the aforementioned electrical signal, A transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit, An analog-to-digital converter that converts the aforementioned pixel signal into a digital signal, An imaging device comprising a potential selection unit for switching the low-potential side reference potential of the photoelectric conversion unit. (13) When the detection unit detects that the amount of change exceeds the predetermined threshold, the analog-to-digital converter converts the pixel signal into the digital signal. The imaging apparatus according to (12), wherein the potential selection unit selects a first reference potential during the period in which the detection unit detects whether the amount of change exceeds a predetermined threshold, and selects a second reference potential with a higher potential level than the first reference potential during the period in which the analog-to-digital converter converts the pixel signal to the digital signal. (14) The first reference potential is a negative potential, The imaging apparatus described in (13), wherein the second reference potential is the ground potential. (15) The imaging apparatus according to any one of (12) to (14), wherein the low-potential side reference potential of the photoelectric conversion unit, the low-potential side reference potential of the detection unit, the low-potential side reference potential of the pixel signal generation unit, the low-potential side reference potential of the analog-to-digital converter, and the off-potential of the transfer control unit each include two or more potentials with different potential levels. (16) The low-potential side reference potential of the detection unit, the low-potential side reference potential of the pixel signal generation unit, and the low-potential side reference potential of the analog-to-digital converter are all at ground potential. The imaging apparatus according to any one of (12) to (15), wherein the off-potential of the transfer control unit is a negative potential. (17) The imaging apparatus according to any one of (5) to (7), (9) to (11), and (13), comprising a potential generating unit that generates at least one of the first reference potential and the second reference potential. (18) The imaging device according to any one of (1) to (17), wherein at least the detection unit is arranged on a second substrate laminated on a first substrate on which the photoelectric conversion unit is arranged. (19) The imaging apparatus according to any one of (1) to (18), wherein the back gate of the transistor in the transfer control unit is set to a potential at the same potential level as the low-potential side reference potential of the photoelectric conversion unit. (20) An imaging device that outputs captured image data, The system comprises a processor that performs predetermined signal processing on the image data, The imaging device is A photoelectric conversion unit having multiple photoelectric conversion elements, each of which converts incident light into electrical signals, A detection unit that outputs a detection signal indicating whether the amount of change in the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold, A pixel signal generation unit that generates a pixel signal based on the aforementioned electrical signal, A transfer control unit that controls the transfer of the electrical signal to the pixel signal generation unit, The system includes an analog-to-digital converter that converts the aforementioned pixel signals into digital signals, An electronic device in which the low-potential side reference potential of the photoelectric conversion unit, the low-potential side reference potential of the detection unit, the low-potential side reference potential of the pixel signal generation unit, the low-potential side reference potential of the analog-to-digital converter, and the off-potential of the transfer control unit each include three or more potentials with different potential levels. (21) A step of generating an electrical signal by photoelectrically converting incident light using multiple photoelectric conversion elements, The steps include outputting a detection signal indicating whether the amount of change in the electrical signal of each of the plurality of photoelectric conversion elements exceeds a predetermined threshold, The steps include transferring the aforementioned electrical signal, The steps include generating a pixel signal based on the transmitted electrical signal, The process includes the step of converting the aforementioned pixel signal into a digital signal, An imaging method in which the low-potential side reference potential during photoelectric conversion, the low-potential side reference potential when outputting the detection signal, the low-potential side reference potential when generating the pixel signal, the low-potential side reference potential when converting the pixel signal to a digital signal, and the off-potential when transferring the electrical signal each include three or more potentials with different potential levels, and these potentials are used to perform the steps of generating the electrical signal, outputting the detection signal, transferring the electrical signal, generating the pixel signal, and converting to a digital signal.

[0172] The aspects of this disclosure are not limited to the individual embodiments described above, but include various modifications that a person skilled in the art could conceive, and the effects of this disclosure are not limited to those described above. In other words, various additions, modifications, and partial deletions are possible, as long as they do not depart from the conceptual idea and spirit of this disclosure derived from the claims and their equivalents. [Explanation of Symbols]

[0173] 100 Imaging device, 110 Imaging lens, 120 Recording unit, 130 Control unit, 200 Solid-state image sensor, 201 Light-receiving chip, 202 Detection chip, 211 Drive circuit, 212 Signal processing unit, 213 Arbiter, 220 Column ADC, 221 Signal generation unit, 223 Reference signal generation unit, 222 Output unit, 230 ADC, 235 Negative potential supply unit, 236 Comparator, 237 Counter, 238 Switch, 239 Memory, 240 Differential amplifier circuit, 241, 242, 412 P-type transistor, 243, 244, 245, 411, 413 N-type transistor, 250 Counter, 300 Pixel array unit, 310 Pixel block, 311 Pixel, 312 Normal pixel, 313 Address event detection pixel, 320 Pixel signal generation unit, 321 Reset transistor, 322 Amplifier transistor, 323 Select transistor, 324 Floating diffusion layer, 330 Light receiving unit, 331 Transfer transistor, 332 OFG transistor, 333 Photoelectric conversion element, 334 Photoelectric conversion unit, 335 Transfer control unit, 400 Address event detection unit, 410 Current-voltage conversion unit, 420 Buffer, 430 Subtractor, 431, 433 Capacitor, 432 Inverter, 434 Switch, 440 Quantizer, 441 Comparator, 450 Transfer unit, 12031 Imaging unit

Claims

1. A photoelectric conversion unit having multiple photoelectric conversion elements, each of which converts incident light into electrical signals, A detection unit that outputs a detection signal indicating whether the amount of change in the electrical signal of at least some of the plurality of photoelectric conversion elements exceeds a predetermined threshold, A pixel signal generation unit that generates a pixel signal based on the electrical signals of at least some of the plurality of photoelectric conversion elements, A first transfer control unit that controls the transfer of electrical signals from at least some of the plurality of photoelectric conversion elements to the pixel signal generation unit, The system includes an analog-to-digital converter that converts the aforementioned pixel signals into digital signals, The low potential level of the photoelectric conversion unit, the low potential level of the detection unit, the low potential level of the pixel signal generation unit, and the off potential of the first transfer control unit each include three or more potentials with different potential levels. The low potential levels of the photoelectric conversion unit and the pixel signal generation unit are approximately equal. At least one of the low potential level of the photoelectric conversion unit, the low potential level of the detection unit, the low potential level of the pixel signal generation unit, and the off potential of the first transfer control unit is the ground potential, and at least one of the others is a first reference potential with a potential level higher than the ground potential, and at least one of the others is a second reference potential with a potential level lower than the ground potential. The low-potential side levels of the photoelectric conversion unit and the pixel signal generation unit are the ground potential. The low potential level of the detection unit is the first reference potential. The off-potential of the first transfer control unit is the second reference potential. Imaging device.

2. The aforementioned ground potential is 0V. The first reference potential is a positive potential. The second reference potential is a negative potential. The imaging apparatus according to claim 1.

3. The system includes a potential generation unit that generates at least one of the first reference potential and the second reference potential, The imaging apparatus according to either claim 1 or 2.

4. The system includes a drive circuit that causes the pixel signal generation unit to generate the pixel signal when the amount of change exceeds a predetermined threshold. The imaging apparatus according to any one of claims 1 to 3.

5. Multiple pixel signal generation units, At least one of the detection units, The system includes a drive circuit that, when the amount of change exceeds a predetermined threshold in any of the detection units, causes the pixel signal generation unit corresponding to the detection unit among the plurality of pixel signal generation units to generate the pixel signal. The imaging apparatus according to any one of claims 1 to 4.

6. At least the detection unit is located on a second substrate which is laminated on the first substrate on which the photoelectric conversion unit is located. The imaging apparatus according to any one of claims 1 to 5.

7. The back gate of the transistor in the first transfer control unit is set to a negative potential. The imaging apparatus according to any one of claims 1 to 6.

8. The system includes a second transfer control unit that controls the transfer of electrical signals from at least some of the plurality of photoelectric conversion elements to the detection unit, When the gate of either the transistor in the first transfer control unit or the transistor in the second transfer control unit is set to a negative potential level, the gate of the other transistor is set to a positive potential level. The imaging apparatus according to any one of claims 1 to 7.

9. An imaging device according to any one of claims 1 to 8 for capturing image data, The system comprises a processor that performs predetermined signal processing on the image data, electronic equipment.

Images