Shape measuring device and shape measuring method

Abstract

This improves the spatial resolution when a shape measuring device measures the shape of an object. [Solution] A shape measuring device 100 for measuring the surface shape of an object to be measured by relatively moving distance measuring sensors 11a to 11d along a circumference centered on a reference position, comprising: a distance measuring means having three or more distance measuring sensors arranged at three or more positions on the circumference at different distances from each other and measuring the distance to the object to be measured; a moving means for relatively moving the distance measuring means along the circumference; a correction means for generating a corrected measurement value by correcting the measurement value of any one of the three or more distance measuring sensors 11a to 11d based on the measurement values ​​of the remaining distance measuring sensors among the three or more distance measuring sensors; and a shape identifying means for identifying the surface shape of the object to be measured on the circumference based on a plurality of corrected measurement values ​​corresponding to a plurality of positions on the circumference.

Description

[Technical Field]

[0001] The present invention relates to a shape measuring device and a shape measuring method for measuring the shape of an object to be measured. [Background technology]

[0002] Shape measuring devices have been proposed for measuring the shape of an object having a curved surface under test. For example, Patent Document 1 describes measuring the shape of an object by moving three displacement sensors, which are evenly arranged on a straight line or circumference, relative to the surface under test in the scanning direction. [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2015-172541 [Overview of the Initiative] [Problems that the invention aims to solve]

[0004] The invention described in Patent Document 1 had the problem of reduced spatial resolution because it could not measure the shape of a wavelength having the same period as the spacing of the displacement sensors.

[0005] Therefore, the present invention has been made in view of these points, and aims to improve the spatial resolution when a shape measuring device measures the shape of an object to be measured. [Means for solving the problem]

[0006] A shape measuring device according to a first aspect of the present invention is a shape measuring device for measuring the surface shape of an object to be measured by moving a distance measuring sensor along a circumference centered on a reference position, comprising: a distance measuring means having three or more distance measuring sensors arranged at three or more positions on the circumference at different distances from each other, for measuring the distance to the object to be measured; a moving means for moving the distance measuring means relative to the circumference; a correction means for generating a corrected measurement value by correcting the measurement value of any one of the three or more distance measuring sensors based on the measurement values ​​of the remaining distance measuring sensors; and a shape identifying means for identifying the surface shape of the object to be measured on the circumference based on a plurality of corrected measurement values ​​corresponding to a plurality of positions on the circumference.

[0007] The shape measuring device comprises four or more distance measuring sensors, including three or more distance measuring sensors, and the correction means may generate the corrected measurement values ​​corresponding to the four or more distance measuring sensors by specifying the sum obtained by multiplying each of the measurement values ​​of the four or more distance measuring sensors by a weight corresponding to the positional relationship between the distance measuring sensor corresponding to the measurement value and the other distance measuring sensors among the four or more distance measuring sensors.

[0008] The correction means may generate a corrected measurement value obtained by correcting the measurement value of any one of the four or more distance measuring sensors so as not to include components that change due to the vertical movement of the distance measuring means, the rotational movement of the distance measuring means about the radial direction of the circumference as an axis, and the rotational movement of the distance measuring means about the tangential direction of the circumference as an axis.

[0009] The correction means may generate the corrected measurement value based on the constraint that the measurement value at the first position on the circumference coincides with the measurement value at the second position on the circumference after the distance measuring means has moved 360° along the circumference.

[0010] The moving means moves the distance measuring means along the circumference at regular intervals, and the distances between two adjacent distance measuring sensors among the three or more distance measuring sensors along the circumference may be distances obtained by multiplying the movement distance by relatively prime integers.

[0011] The distance measuring means has a plurality of contacts for contacting the object to be measured, and the moving means may move the distance measuring means relatively along the circumference while the plurality of contacts are in contact with the object to be measured by pressing the distance measuring means toward the object to be measured via an elastic connecting member. The moving means may also move the distance measuring means relatively along the circumference while the distance measuring means is not in contact with the object to be measured.

[0012] A shape measuring device according to a second aspect of the present invention is a shape measuring device for measuring the surface shape of an object to be measured by relatively moving a distance measuring sensor along a circumference centered on a reference position, comprising: a distance measuring means having four or more distance measuring sensors arranged at four or more positions on the circumference and measuring the distance to the object to be measured; a moving means for relatively moving the distance measuring means along the circumference; a correction means for generating corrected measurement values ​​corresponding to the four or more distance measuring sensors by specifying the sum obtained by multiplying each measurement value of the four or more distance measuring sensors by a weight corresponding to the positional relationship between the distance measuring sensor corresponding to the measurement value and the other distance measuring sensors among the four or more distance measuring sensors; and a shape identifying means for identifying the surface shape of the object to be measured on the circumference based on a plurality of corrected measurement values ​​corresponding to a plurality of positions on the circumference.

[0013] A third aspect of the present invention is a shape measurement method for measuring the surface shape of an object to be measured by moving a distance measuring sensor relatively along a circumference centered on a reference position, which is performed by a computer, and comprises the steps of: moving a distance measuring means having three or more distance measuring sensors arranged at three or more positions on the circumference at different distances from each other and measuring the distance to the object to be measured, relatively along the circumference; generating a corrected measurement value by correcting the measurement value of any one of the three or more distance measuring sensors based on the measurement values ​​of the remaining distance measuring sensors; and identifying the surface shape of the object to be measured on the circumference based on a plurality of corrected measurement values ​​corresponding to a plurality of positions on the circumference.

[0014] A fourth aspect of the present invention is a shape measurement method for measuring the surface shape of an object to be measured by relatively moving a distance measuring sensor along a circumference centered on a reference position, comprising the steps of: relatively moving a distance measuring means having four or more distance measuring sensors arranged at four or more positions on the circumference and measuring the distance to the object to be measured, along the circumference; generating corrected measurement values ​​corresponding to the four or more distance measuring sensors by specifying the sum obtained by multiplying each measurement value of the four or more distance measuring sensors by a weight corresponding to the positional relationship between the distance measuring sensor corresponding to the measurement value and the other distance measuring sensors among the four or more distance measuring sensors; and specifying the surface shape of the object to be measured on the circumference based on a plurality of corrected measurement values ​​corresponding to a plurality of positions on the circumference. [Effects of the Invention]

[0015] According to the present invention, the spatial resolution of the shape measuring device when measuring the shape of an object to be measured is improved. [Brief explanation of the drawing]

[0016] [Figure 1] This is a diagram illustrating the outline of the shape measuring device of the embodiment. [Figure 2] This is a diagram illustrating the outline of the shape measuring device of the embodiment. [Figure 3] The configuration of the shape measuring device is shown. [Figure 4] This shows the relationship between the placement of the distance measuring sensors and the measurement points. [Figure 5] Here is another example of a distance measuring unit. [Figure 6] This example shows a case where the distance measuring unit is equipped with three distance measuring sensors. [Figure 7] The shape identification unit indicates the surface shape of the object to be measured. [Figure 8] This shows the difference in the results of identifying the surface shape over five turns. [Figure 9] This shows the relationship between the placement of the distance measuring sensors and the signal-to-noise ratio. [Figure 10] This flowchart shows the procedure for determining the surface shape of an object W to be measured using a shape measuring device. [Modes for carrying out the invention]

[0017] [Overview of Shape Measuring Device] Figures 1 and 2 are diagrams illustrating the outline of the shape measuring device 100 of this embodiment. Figure 1 shows the configuration of the shape measuring device 100 of this embodiment. The shape measuring device 100 identifies the surface shape of the object to be measured W. In the example of Figure 1, the object to be measured W is an optical element such as a lens or mirror. The shape measuring device 100 comprises a distance measuring unit 1, a connecting member 2, a rigid body member 3, a rotational drive unit 4, a base 5, and a main body 6.

[0018] The distance measuring unit 1 has three or more distance measuring sensors 11a to 11d arranged on the circumference. In the example in Figure 1, the distance measuring unit 1 has four distance measuring sensors 11a to 11d, but it may have five or more distance measuring sensors. The distance measuring sensors 11a to 11d measure the distance to the object to be measured W.

[0019] In the distance measuring unit 1 shown in Figure 1, the spacing between adjacent distance measuring sensors 11 is different. By arranging the multiple distance measuring sensors 11 with uneven spacing in this way, when the surface shape (irregularities) of the surface of the object W to be measured fluctuates at a specific wavelength, the phases will not match even at shorter wavelengths compared to when the sensors are arranged at equal intervals. This prevents a substantial reduction in data that is effective for identifying the surface shape. As a result, the spatial resolution is improved.

[0020] The distance measuring unit 1 is provided with a plurality of contact elements 12a and 12b. The contact elements 12a and 12b are members for contacting the object to be measured W. The contact elements 12a and 12b make point contact with the surface of the object to be measured W. It is desirable that the contact elements 12a and 12b are made of a material softer than the surface of the object to be measured W. The tips of the contact elements 12a and 12b are provided with, for example, a plastic member having a spherical surface.

[0021] The contact elements 12a and 12b are parts that maintain a height and orientation that conforms to the shape of the surface of the object to be measured W by contacting the object W before the distance measuring sensors 11a to 11d. In the example in Figure 1, two contact elements 12a and 12b are shown, but the distance measuring unit 1 has one additional contact element 12c, which is not shown in Figure 1, in addition to the two contact elements 12a and 12b. The holder 13 is a support member that supports the distance measuring sensors 11a to 11d and the contact elements 12a to 12c. The holder 13 is made of a material that is resistant to thermal expansion.

[0022] The connecting member 2 is a member that, when connected to the rigid member 3, brings the distance measuring sensors 11a to 11d into contact with the object to be measured W. The rigid member 3 is a processing machine that can move on the base 5 on which the object to be measured W is placed, but it may also be a member that is installed in a stationary position. The connecting member 2 is connected to the rigid member 3 at one end so as to allow changes in posture and vertical movement when the holder is placed on the surface of the object to be measured W, but no other movement occurs. The other end of the connecting member 2 is connected to the holder 13.

[0023] The connecting member 2 is made of, for example, an elastic material. The connecting member 2 is formed of, for example, a thin aluminum plate. The connecting member 2 presses the distance measuring part 1 against the object to be measured W, thereby bringing the contact elements 12a to 12c into contact with the object to be measured W. Because the connecting member 2 is elastic, it is possible to suppress damage to the object to be measured W caused by the contact elements 12a to 12c.

[0024] The rotary drive unit 4 generates a driving force to rotate the platform 5 on which the object to be measured W is placed. When the shape measuring device 100 starts measuring the object to be measured W, the rotary drive unit 4 rotates, causing the platform 5 to rotate, and the object to be measured W placed on the platform 5 rotates together with the platform 5.

[0025] Figure 2 shows a top view of the object to be measured W and the distance measuring unit 1. For the sake of simplicity, Figure 2 omits all components of the shape measuring device 100 except for the distance measuring unit 1 and the base 5. The rotation drive unit 4 rotates the object to be measured W and the base 5 in the direction indicated by the dashed arrows in Figure 2, thereby moving the distance measuring unit 1 relative to the object to be measured W along a circle centered on the reference position O (see the dashed circle in Figure 2). The direction in which the distance measuring unit 1 moves relative to the object to be measured W along the circumference is indicated by the solid arrows in Figure 2.

[0026] The main body 6 in Figure 1 includes a control unit 61. The control unit 61 is, for example, a CPU (Central Processing Unit). The control unit 61 measures the surface shape of the object to be measured W by relatively moving the distance measuring sensors 11a to 11d along a circumference centered on a reference position O. The control unit 61 moves the distance measuring sensors 11a to 11d relative to the object to be measured W by, for example, starting a rotational movement of the rotation drive unit 4.

[0027] The control unit 61 identifies the surface shape of the object W to be measured at multiple positions on the circumference using distance measuring sensors 11a to 11d. For example, in order to check whether the object W to be measured is manufactured as designed, the control unit 61 identifies the error between the surface shape of the object W to be measured and the ideal shape that would occur if the object W were manufactured as designed.

[0028] The control unit 61 uses distance measuring sensors 11a to 11d, which are arranged so that they are not spaced evenly apart, to determine the surface shape of the object W to be measured. As will be described in detail later, the control unit 61 can use the measurement results of the other distance measuring sensors to correct for errors caused by changes in the posture of the holder 13. Therefore, the control unit 61 can improve the accuracy of determining the surface shape of the object W to be measured.

[0029] [Configuration of the shape measuring device] Figure 3 shows the configuration of the shape measuring device 100. The shape measuring device 100 comprises a rotation drive unit 4, distance measuring sensors 11a to 11d, a display unit 7, a storage unit 8, and a control unit 61. The control unit 61 comprises a moving unit (corresponding to a moving means) 611, an acquisition unit (corresponding to an acquisition means) 612, a correction unit (corresponding to a correction means) 613, a shape identification unit (corresponding to a shape identification means) 614, and an output unit 615.

[0030] The display unit 7 displays various characters or images. For example, the display unit 7 displays the surface shape of the object to be measured, which is output by the output unit 615.

[0031] The memory unit 8 is a storage medium including ROM (Read Only Memory) and RAM (Random Access Memory). The memory unit 8 stores the program that the control unit 61 executes. By executing the program stored in the memory unit 8, the control unit 61 functions as the movement unit 611, acquisition unit 612, correction unit 613, shape identification unit 614, and output unit 615.

[0032] The moving unit 611 moves the distance measuring unit 1 relative to the object to be measured W along the circumference (see Figure 2). For example, the moving unit 611 rotates the platform on which the object to be measured W is placed using the rotary drive unit 4, and moves the distance measuring unit 1 relative to the object to be measured W along the circumference (see Figure 2). The moving unit 611 may also move the distance measuring unit 1 along the circumference by moving the distance measuring unit 1 with a robot arm or the like.

[0033] The moving unit 611 moves the distance measuring unit 1 along the circumference at regular intervals (hereinafter also referred to as unit movement distance). For example, as shown in Figure 1, the moving unit 611 presses the distance measuring unit 1 toward the object to be measured W via an elastic connecting member 2, so that multiple contacts 12a to 12c are in contact with the object to be measured W. In this state, the moving unit 611 moves the distance measuring unit 1 relatively along the circumference. The moving unit 611 is not limited to the example in which the distance measuring unit 1 is in contact with the object to be measured W when moving the distance measuring unit 1. For example, the moving unit 611 may move the distance measuring unit 1 relatively along the circumference when the distance measuring unit 1 is not in contact with the object to be measured W. As an example, the moving unit 611 rotates the object to be measured W together with the base 5 in a state where the distance measuring unit 1 is not in contact with the object to be measured W, similar to the state in which the distance measuring unit 1 is in contact with the object to be measured W. This rotation causes the distance measuring unit 1 to move relative to the object W along its circumference.

[0034] The acquisition unit 612 acquires the distance to the object W measured by the distance measuring sensors 11a to 11d. For example, the acquisition unit 612 acquires the distance to the object W from the position of each distance measuring sensor 11a to 11d. The acquisition unit 612 acquires the distance to the object W for each measurement point reached when the movement unit 611 moves the distance measuring sensors 11a to 11d by a unit movement distance. The acquisition unit 612 outputs information indicating the distance to the object W measured by the distance measuring sensors 11a to 11d to the correction unit 613.

[0035] FIG. 4 shows the relationship between the arrangement of the distance measuring sensors 11a to 11d and the measurement points. The moving part 611 relatively moves the distance measuring sensors 11a to 11d along the dashed arc in FIG. 4. The plurality of black circles in FIG. 4 each indicate a measurement point.

[0036] Three or more distance measuring sensors 11a to 11d are arranged at three or more positions where the mutual distances on the circumference are different. In FIG. 4, four distance measuring sensors 11a to 11d are respectively arranged at four positions along the dashed arc. The intervals between the distance measuring sensors 11a to 11d along the circumference are not equal. That is, the angle φ 12 formed by the dashed line extending from the distance measuring sensor 11a to the center O of the arc and the dashed line extending from the distance measuring sensor 11b to the center O of the arc, 23 the angle φ 34 formed by the dashed line extending from the distance measuring sensor 11b to the center O of the arc and the dashed line extending from the distance measuring sensor 11c to the center O of the arc, 12 and the angle φ 23 formed by the dashed line extending from the distance measuring sensor 11c to the center O of the arc shown by the dashed line and the dashed line extending from the distance measuring sensor 11d to the center O of the arc, 34 among them, at least one angle is different from the remaining two angles. In this case, the angle φ

[0037] Among the three angles of the angle φ 12 the angle φ 23 and the angle φ 34 two of them may be the same, or all three may be different from each other.

[0037] More specifically, among three or more distance measuring sensors 11a to 11d arranged along the circumference, the plurality of distances between two adjacent distance measuring sensors are distances obtained by multiplying the unit movement distance by integers that are relatively prime to each other. Let the number of measurement points arranged at every unit predetermined distance on the circumference of the dashed circle shown in FIG. 2 be N. In this case, the above-mentioned angle φ 12 the angle φ 23 and the angle φ 34 are expressed as follows.

Equation

[0038] k 12 , k 23 , k 34 If the two values ​​are relatively prime integers, then when the surface shape has a wavelength longer than the unit travel distance, the phases at all distance sensors 11a to 11d will not coincide simultaneously. Therefore, the shape identification unit 614, described later, can identify the surface shape. In this case, the unit travel distance can be considered as the spatial resolution.

[0039] As shown in equation (1), angle φ 12 is, k 12 This is the angle corresponding to . As shown in equation (2), angle φ 23 is, k 23 This is the corresponding angle. As shown in equation (3), angle φ 34 is, k 34 This is the angle corresponding to φ. For example, angle φ 12 The angle is 4 degrees, and the angle φ 23 The angle is 5 degrees, and the angle φ 34 Let's assume that it is 4 degrees. In this case, if the unit distance traveled is 1 degree, then k 12 =4, k 23 =5, k 34 = 4, k 12 , k 23 , k 34 These are relatively prime integers. Therefore, the spatial resolution is 1 degree.

[0040] Angle φ 12 The angle is 2 degrees, and the angle φ 23 The angle is 4 degrees, and the angle φ 34 Let's assume that the angle is 6 degrees. If the unit distance traveled is 2 degrees, then k 12 =1, k 23 =2, k 34 =3, k 12 , k 23 , k 34 These are relatively prime integers. Therefore, the spatial resolution is 2 degrees.

[0041] Angle φ 12 The angle is 5.4 degrees, and the angle φ 23The angle is 3.9 degrees, and the angle φ 34 Let's assume that the angle is 2.7 degrees. If the unit distance traveled is 0.3 degrees, then k 12 =27, k 23 =13, k 34 = 9, k 12 , k 23 , k 34 These are relatively prime integers. Therefore, the spatial resolution is 0.3 degrees.

[0042] [Generating corrected measurements] The correction unit 613 generates a corrected measurement value by correcting the measurement value of any one of the three or more distance measuring sensors 11a to 11d based on the measurement values ​​of the remaining three or more distance measuring sensors 11a to 11d. The correction unit 613 generates a corrected measurement value that does not include components that change due to the vertical movement of the distance measuring unit 1, the rotational movement of the distance measuring unit 1 about the radial direction of the circumference (see Figure 2) on which the distance measuring sensors 11a to 11d move, and the rotational movement of the distance measuring means about the tangential direction of this circumference.

[0043] For example, the correction unit 613 identifies the sum obtained by multiplying each of the four or more distance measuring sensors 11a to 11d by a weight. The weights correspond to the positional relationship between the distance measuring sensor corresponding to each measurement and the other distance measuring sensors among the four or more distance measuring sensors 11a to 11d. By identifying this sum, the correction unit 613 generates corrected measurement values ​​corresponding to the four or more distance measuring sensors 11a to 11d.

[0044] Hereinafter, the positions of the distance measuring sensors 11a to 11d will be expressed in terms of the azimuth angle as viewed from the center of the circumference. When the movement unit 611 moves the distance measuring sensors 11a to 11d along the circumference one or more times, the correction unit 613 generates a corrected measurement value based on the constraint that the measurement value at the first position on the circumference and the measurement value at the second position on the circumference after the distance measuring unit 1 has moved 360° along this circumference must match. The first position and the second position are, for example, positions with the same azimuth angle.

[0045] Here, the distance measuring sensor 11b is at an azimuth angle θ. n When the distance measuring unit 1 is above, the vertical movement of the distance measuring unit 1, the rotation angle around the radial direction of the circle (pitching), and the rotation angle around the tangential direction (rolling) are respectively measured by z(θ). n ), p(θ n ), r(θ n Let θ be the value of θ. n It can be expressed by the following formula.

number

[0046] Output S of distance measuring sensors 11a, 11b, 11c, and 11d a (θ n ), S b (θ n ), S c (θ n ), S d (θ n ) and the surface shape f(θ) on the surface under test n The following relationships hold between ) and each other.

number

[0047] Output T(θ) is a corrected measurement value obtained by removing the motion and rotation of the distance measuring unit 1 from the outputs of the four distance measuring sensors 11a to 11d. n ) can be calculated as follows:

number

[0048] In formula (10), the measured value S a (θ n ) includes the angle φ based on the positional relationship between the distance measurement sensor 11a corresponding to it and the distance measurement sensors 11b to 11d other than the distance measurement sensor 11a 23 and φ 34 . In formula (11), the measured value S b (θ n ) includes the angle φ based on the positional relationship between the distance measurement sensor 11b corresponding to it and the distance measurement sensors 11a, 11c, and 11d other than the distance measurement sensor 11b 12 , φ 23 and φ 34 . In formula (12), the measured value S c (θ n ) includes the angle φ based on the positional relationship between the distance measurement sensor 11c corresponding to it and the distance measurement sensors 11a, 11b, and 11d other than the distance measurement sensor 11c 12 , φ 23 and φ 34 .

[0049] In formula (13), the measured value S d (θ n ) includes the angle φ based on the positional relationship between the distance measurement sensor 11d corresponding to it and the distance measurement sensors 11a, 11b, and 11c other than the distance measurement sensor 11d 12 and φ 23 . The correction unit 613 calculates the output T(θ n ) for each measurement point as a corrected measurement value when the moving unit 611 relatively moves the distance measurement sensors 11a to 11d along the circumference

[0050] As described above, the correction unit 613 corrects the outputs S a (θ n ), S b (θ n ), S c (θ n ), S d (θ nIt is possible to calculate the output T(θn) from which the movement and rotation of the distance measurement unit 1 have been removed. Therefore, the correction unit 613 can suppress a decrease in the accuracy of specifying the surface shape of the measurement object W due to the influence of the movement and rotation of the distance measurement unit 1.

[0051] Note that the acquisition unit 612 may acquire the distance to the measurement object W repeatedly at the same measurement point from the start to the end of the measurement. That is, the moving unit 611 moves the distance measurement sensors 11a to 11d one or more times along the circumference, and the acquisition unit 612 can acquire the distance to the measurement object W at the same measurement point multiple times. The correction unit 613 can improve the accuracy of generating the corrected measurement value by using a statistic such as the average value of the plurality of distances measured multiple times.

[0052] [Specification of surface shape] The shape specifying unit 614 specifies the surface shape on the circumference of the measurement object W based on a plurality of corrected measurement values corresponding to a plurality of positions on the circumference. As described above, since the distance measurement sensors 11a to 11d return to the same position by measuring one round of the circumference, f(θ N+i ) = f(θ i ) can be expressed. When the acquisition unit 612 repeatedly acquires the distance to the measurement object W at the same measurement point from the start to the end of the measurement, let the number of overlapping measurement points be M. The relational expressions of f(θ n ) and T(θ n ) at each measurement point can be expressed as follows using the matrix A. [Equation] <照原文,此处无翻译内容>

[0053] 12 (mod N)) indicates that (i + k 12 ) is the remainder obtained by dividing (i + k ‐1 ) by N. The same applies to the other (mod N) in Equation (14). The surface shape is expressed as follows using the output of the sensor and the pseudo-inverse matrix A

number

[0054] [Output of information based on surface shape] The output unit 615 outputs information based on the surface shape identified by the shape identification unit 614. For example, the output unit 615 outputs the surface shape identified by the shape identification unit 614 directly to the display unit 7. The output unit 615 may also output to the display unit 7 the error between the surface shape identified by the shape identification unit 614 and the ideal shape of the object W if it were manufactured as designed.

[0055] The output unit 615 may communicate with a user terminal (not shown), such as a personal computer, via a network. The output unit 615 may also output the surface shape identified by the shape identification unit 614 to the user terminal.

[0056] [Variations with different numbers or arrangements of distance measuring sensors] In the example shown in Figure 4, the acquisition unit 612 describes an example in which it acquires the distance to the object W measured by four distance measuring sensors 11a to 11d that are not spaced evenly apart. However, the acquisition unit 612 is not limited to acquiring the measurement results of distance measuring sensors 11a to 11d that are not spaced evenly apart, and may acquire the measurement results of distance measuring sensors 11a to 11d that are spaced evenly apart.

[0057] Figures 5(a) and 5(b) show examples of the distance measuring unit 1. Figure 5(a) shows an example in which the distance measuring unit 1 is equipped with four distance measuring sensors that are not spaced evenly apart, similar to Figure 4. Figure 5(b) shows an example in which the distance measuring unit 1 is equipped with four distance measuring sensors that are spaced evenly apart.

[0058] In the example shown in Figure 5(b), four distance measuring sensors are provided, similar to Figure 5(a). The correction unit 613 calculates the corrected measurement value T(θ) by removing the effects of vertical movement, pitching, and rolling of the distance measuring unit 1, as shown in equations (4) to (8). n This allows the calculation of the surface shape of the object W to be measured. Therefore, the shape identification unit 614 can improve the accuracy of identifying the surface shape of the object W to be measured.

[0059] Figure 6 shows an example where the distance measuring unit 1 is equipped with three distance measuring sensors. Similar to Figure 4, Figure 6 shows an example where the distance measuring unit 1 is equipped with three distance measuring sensors that are not spaced evenly apart. In the examples of Figures 5(a) and 6, because the distance measuring sensors are not spaced evenly apart, when the surface shape (irregularities) of the surface of the object W to be measured fluctuates at a specific wavelength, it is difficult for the phases corresponding to the positions of the multiple distance measuring sensors 11 to coincide. This prevents a substantial reduction in data that is effective for identifying the surface shape. As a result, measurement accuracy is improved.

[0060] [Examples] The shape measuring device 100 was used to measure the error between the surface shape of the free-form object W and the ideal shape if the object W were manufactured as designed. KEYENCE Corporation's "SI-F01" distance measuring sensors 11a to 11d were mounted on the distance measuring unit 1. A rigid member 3 was used as a processing machine that could move on a platform on which the object was placed.

[0061] First, the object to be measured W was placed on a table. Using a processing machine, the distance measuring unit 1 was set to a position that matched the inclination of the surface to be measured. Then, while the acquisition unit 612 acquired the distance from the distance measuring sensors 11a to 11d to the object to be measured W, the surface to be measured was rotated so that the distance measuring sensors 11a to 11d moved along the circumference at a predetermined scanning speed, and measurement data for 5 rotations was acquired.

[0062] Figures 7(a) and 7(b) show the surface shape of the object to be measured identified by the shape identification unit 614. Figure 7(a) shows the simulation result in which the shape identification unit 614 identified the surface shape of the object W along the circumference shown by the dashed line in Figure 2, assuming that the object W is an ideal shape manufactured according to the design. Figure 7(b) shows the surface shape of the object W actually identified by the shape identification unit 614 while moving the distance measuring unit 1 along the circumference shown by the dashed line in Figure 2. Figure 7(b) shows the results of identifying the surface shape of the object W for five rotations, with the distance measuring unit 1 relatively moved along the circumference, superimposed on each other.

[0063] The vertical axis in Figures 7(a) and 7(b) represents the surface irregularities of the object being measured. The unit of the vertical axis in Figures 7(a) and 7(b) is nanometers. The horizontal axis in Figures 7(a) and 7(b) represents the position of the object W on the circumference, expressed as an azimuth angle from the center O of the circumference. Figures 7(a) and 7(b) show almost identical shapes, indicating that the shape identification unit 614 has very high accuracy in identifying the surface shape of the object being measured.

[0064] Figure 8 shows the difference in the results of identifying the surface shape over five circumferences. The vertical axis of Figure 8 shows the difference between each of the five surface shape identification results and the average of the five surface shape identification results. The horizontal axis of Figure 8 shows the position of the object W on the circumference as viewed from the center O of the circumference by the azimuth angle. As shown in Figure 8, the error in the surface shape identification results is kept to 20 nanometers or less, indicating that the accuracy of the shape identification unit 614 in identifying the surface shape of the object W is very high.

[0065] Figure 9 shows the relationship between the arrangement of distance measuring sensors and the signal-to-noise ratio (S / N ratio). The four-point method (unequal spacing) in Figure 9, similar to Figure 4, shows an example where the distance measuring unit 1 is equipped with four distance measuring sensors that are not spaced evenly apart. The four-point method (equal spacing) in Figure 9, similar to Figure 5(b), shows an example where the distance measuring unit 1 is equipped with four distance measuring sensors that are spaced evenly apart. The three-point method (equal spacing) in Figure 9 shows an example where the distance measuring unit 1 is equipped with three distance measuring sensors that are spaced evenly apart. In the four-point method (equal spacing) example and the three-point method (equal spacing) example in Figure 9, the spacing of the distance measuring sensors is the same. As shown on the left side of Figure 9, in the low-frequency band, the S / N ratio is higher for the three-point method than for the four-point method when the sensor spacing is the same. The S / N ratio can be improved in the distance measuring unit 1 by widening the spacing of the distance measuring sensors. However, in the distance measuring unit 1, if distance measuring sensors are arranged at equal intervals from each other, there is a trade-off in that increasing the spacing between the distance measuring sensors will worsen the spatial resolution.

[0066] As shown in Figure 9, when the distance measuring unit 1 is equipped with three or four distance measuring sensors that are evenly spaced, the signal-to-noise ratio (S / N ratio) decreases significantly when the frequency is an integer multiple of the distance measuring sensor spacing. From this, it can be seen that the S / N ratio decreases significantly when the surface shape (irregularities) of the surface of the object to be measured W fluctuates at wavelengths that are integer multiples of the sensor spacing. In contrast, in the example equipped with four distance measuring sensors that are not evenly spaced, the phases corresponding to the positions of the multiple distance measuring sensors 11 are less likely to coincide, so the decrease in the S / N ratio is suppressed. Therefore, the measurement accuracy of the shape identification unit 614 in identifying the surface shape of the object to be measured W can be improved.

[0067] [Processing procedure for determining the shape using the shape measuring device 100] Figure 10 is a flowchart showing the process for determining the surface shape of an object W to be measured by the shape measuring device 100. This process begins, for example, when the operation reception unit (not shown) receives a user operation instructing the start of determining the surface shape of the object W to be measured.

[0068] First, the moving unit 611 rotates the object to be measured W so that the distance measuring sensors 11a to 11d move to the initial measurement point (S101). The acquisition unit 612 acquires the distance to the object to be measured W measured by the distance measuring sensors 11a to 11d (S102). The shape identification unit 614 determines whether the acquisition unit 612 has finished acquiring the distance to the object to be measured W (S103).

[0069] When the correction unit 613 determines that the process of acquiring the distance to the object W has finished by the acquisition unit 612 is complete (YES in S103), it generates a corrected measurement value by correcting the measurement values ​​of each of the three or more distance measuring sensors 11a to 11d based on the measurement values ​​of the remaining distance measuring sensors (S104). The shape identification unit 614 identifies the surface shape of the object to be measured based on the multiple corrected measurement values ​​corresponding to multiple measurement points on the circumference where the distance measuring sensors 11a to 11d have moved (S105). The output unit 615 outputs the surface shape identified by the shape identification unit 614 to the display unit 7 (S106), and the process ends.

[0070] If the moving unit 611 determines in the determination in S103 that the process of acquiring the distance to the object to be measured W by the acquisition unit 612 has not finished (NO in S103), it moves the distance measuring sensors 11a to 11d relative to the object to be measured W so that the distance measuring sensors 11a to 11d move to the next measurement point (S107), and returns to the process in S102.

[0071] In the example shown in Figure 10, the correction unit 613 generates a corrected measurement value by correcting the measurement values ​​of each of the three or more distance measuring sensors 11a to 11d based on the measurement values ​​of the remaining distance measuring sensors after the process of acquiring the distance to the object to be measured W by the acquisition unit 612 has finished. However, the present invention is not limited to this. For example, the correction unit 613 may generate a corrected measurement value by correcting the measurement value of any one of the three or more distance measuring sensors 11a to 11d based on the measurement values ​​of the remaining distance measuring sensors each time the distance to the object to be measured W measured by the distance measuring sensors 11a to 11d is acquired.

[0072] [Effects according to the present invention] According to the shape measuring device 100 of this embodiment, the correction unit 613 generates a corrected measurement value by correcting the measurement value of one of the three or more distance measuring sensors 11a to 11d, which are arranged so that their intervals from each other are not equal, based on the measurement values ​​of the remaining distance measuring sensors. Therefore, the correction unit 613 can suppress the inability to measure the shape of the wavelength corresponding to the interval between the distance measuring sensors 11a to 11d.

[0073] The correction unit 613 can correct for the effects of vertical movement, pitching, and rolling of the distance measuring unit 1 by determining the sum obtained by multiplying each measurement value of the four or more distance measuring sensors 11a to 11d by a weight corresponding to the positional relationship between the distance measuring sensor corresponding to that measurement value and the other distance measuring sensors among the four or more distance measuring sensors 11a to 11d. Therefore, the correction unit 613 can improve the measurement accuracy of the surface shape of the object being measured.

[0074] Although the present invention has been described above using embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments, and various modifications and changes are possible within the scope of its gist. For example, all or part of the apparatus can be configured by functionally or physically distributing and integrating in any unit. Furthermore, new embodiments resulting from any combination of multiple embodiments are also included in the embodiments of the present invention. The effects of the new embodiments resulting from the combinations are combined with the effects of the original embodiments. [Explanation of Symbols]

[0075] 1 Ranging section 2 Connecting members 3. Rigid Members 4. Rotary drive unit 5 units 6. Main body 7 Display section 8 Memory section 11a Distance measuring sensor 11b Distance measuring sensor 11c Distance Measuring Sensor 11d Distance measuring sensor 12a Contact 12b Contact 12c contact 61 Control Unit 100 Shape measuring device 611 Mobile Unit 612 Acquisition Department 613 Correction Unit 614 Shape identification part 615 Output section

Claims

1. A shape measuring device that measures the surface shape of an object by relatively moving a distance measuring sensor along a circumference centered on a reference position, A distance measuring means having three or more distance measuring sensors arranged at three or more positions on the circumference at different distances from each other, for measuring the distance to the object to be measured, A moving means for moving the distance measuring means relative to the circumference, Correction means for generating a corrected measurement value by correcting the measurement value of any one of the three or more distance measuring sensors based on the measurement values ​​of the remaining distance measuring sensors among the three or more distance measuring sensors, A shape identification means for identifying the surface shape of the object to be measured on the circumference based on a plurality of corrected measurement values ​​corresponding to a plurality of positions on the circumference, A shape measuring device equipped with the following features.

2. The system comprises four or more distance measuring sensors, including the three or more distance measuring sensors mentioned above. The correction means generates the corrected measurement value corresponding to the four or more distance measuring sensors by specifying the sum obtained by multiplying each of the measurement values ​​of the four or more distance measuring sensors by a weight corresponding to the positional relationship between the distance measuring sensor corresponding to the measurement value and the other distance measuring sensors among the four or more distance measuring sensors. The shape measuring device according to claim 1.

3. The correction means generates a corrected measurement value obtained by correcting the measurement value of any one of the four or more distance measuring sensors so as not to include components that change due to the vertical movement of the distance measuring means, the rotational movement of the distance measuring means about the radial direction of the circumference, and the rotational movement of the distance measuring means about the tangential direction of the circumference. The shape measuring device according to claim 2.

4. The correction means generates the corrected measurement value based on the constraint that the measurement value at the first position on the circumference and the measurement value at the second position on the circumference after the distance measuring means has moved 360° along the circumference coincide. The shape measuring device according to claim 1 or 2.

5. The moving means moves the distance measuring means along the circumference at regular intervals, The distances between two adjacent distance measuring sensors among the three or more distance measuring sensors along the circumference are distances obtained by multiplying the travel distance by relatively prime integers. The shape measuring device according to claim 1 or 2.

6. The distance measuring means has a plurality of contactors for contacting the object to be measured, The moving means moves the distance measuring means relative to the circumference of the object to be measured by pressing the distance measuring means toward the object to be measured via an elastic connecting member, so that the plurality of contacts are in contact with the object to be measured. The shape measuring device according to claim 1 or 2.

7. The moving means moves the distance measuring means relative to the object to be measured while the distance measuring means is not in contact with the object to be measured. The shape measuring device according to claim 1 or 2.

8. A shape measuring device that measures the surface shape of an object by relatively moving a distance measuring sensor along a circumference centered on a reference position, A distance measuring means having four or more distance measuring sensors arranged at four or more positions on the circumference and measuring the distance to the object to be measured, A moving means for moving the distance measuring means relative to the circumference, Correction means for generating corrected measurement values ​​corresponding to the four or more distance measuring sensors by specifying the sum obtained by multiplying each measurement value of the four or more distance measuring sensors by a weight corresponding to the positional relationship between the distance measuring sensor corresponding to the measurement value and the other distance measuring sensors among the four or more distance measuring sensors, A shape identification means for identifying the surface shape of the object to be measured on the circumference based on a plurality of corrected measurement values ​​corresponding to a plurality of positions on the circumference, A shape measuring device equipped with the following features.

9. A shape measurement method for measuring the surface shape of an object to be measured, which is performed by a computer and involves moving a distance measuring sensor relatively along a circumference centered on a reference position, A step of moving a distance measuring means having three or more distance measuring sensors arranged at three or more positions on the circumference at different distances from each other, and measuring the distance to the object to be measured, relative to the circumference, The steps include generating a corrected measurement value by correcting the measurement value of any one of the three or more distance measuring sensors based on the measurement values ​​of the remaining distance measuring sensors, A step of identifying the surface shape of the object to be measured on the circumference based on a plurality of corrected measurement values ​​corresponding to a plurality of positions on the circumference, A method for measuring shape.

10. A shape measurement method for measuring the surface shape of an object by relatively moving a distance measuring sensor along a circumference centered on a reference position, A step of moving a distance measuring means having four or more distance measuring sensors arranged at four or more positions on the circumference and measuring the distance to the object to be measured relatively along the circumference, The steps include: generating corrected measurement values ​​for the four or more distance measuring sensors by determining the sum obtained by multiplying each measurement value of the four or more distance measuring sensors by a weight corresponding to the positional relationship between the distance measuring sensor corresponding to the measurement value and the other distance measuring sensors among the four or more distance measuring sensors; A step of identifying the surface shape of the object to be measured on the circumference based on a plurality of corrected measurement values ​​corresponding to a plurality of positions on the circumference, A method for measuring shape.

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