Mist trap

The mist trap addresses the issue of powder accumulation in exhaust draw amplifiers by capturing and redirecting mist to clean the system, enhancing MTBC and maintaining efficiency.

JP7843849B2Active Publication Date: 2026-04-10EDWARDS LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
EDWARDS LTD
Filing Date
2022-12-21
Publication Date
2026-04-10

AI Technical Summary

Technical Problem

The Mean Time Between Cleaning (MTBC) of exhaust draw amplifiers in gas abatement systems is insufficient due to the accumulation of silica or silicon dioxide powder on the inner walls, which can cause system shutdowns and reduce effectiveness.

Method used

A mist trap is introduced to capture and redirect mist back to the wet scrubber, cleaning the ducts and inner surfaces of the exhaust draw amplifier, using a demisting chamber with a liquid capture surface and a baffle to separate mist droplets, allowing them to flow back into the system.

Benefits of technology

The mist trap effectively reduces powder accumulation, increasing MTBC and maintaining system efficiency by cleaning the exhaust draw amplifier and associated ducts.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present application relates to a mist trap for a wet scrubber abatement system. The mist trap includes a demisting chamber having a gas inlet for receiving mist-laden exhaust gas from the wet scrubber abatement system, a liquid capture surface where mist droplets can coalesce to form liquid, and a gas outlet where relatively dry gas can exit the chamber. The mist trap is configured such that at least a first portion of the trapped liquid exits the chamber via the gas inlet and returns to the wet scrubber abatement system. The present application also relates to a water collection baffle, an abatement system, and a method for mitigating particulate matter buildup in a primary flow path of an exhaust draw amplifier.
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Description

Technical Field

[0001] The present invention relates to a mist-trap, and more particularly to a mist-trap for a gas abatement system. The present invention further provides a water-collecting baffle for a mist-trap, a reduction system including the mist-trap, and a method for alleviating the accumulation of particulate matter in a primary flow channel of an exhaust draw amplification device.

Background Art

[0002] Reduction devices remove components of a process gas stream, such as compounds in a semiconductor or flat panel display manufacturing process, so that the removed gas stream can be released into the environment more safely.

[0003] The term "wet scrubber" represents various reduction devices that remove contaminants from furnace flue gas or other gas streams. In a wet scrubber, to remove contaminants, a liquid is sprayed into the contaminated gas stream, the contaminated gas stream is passed through a pool of liquid, or the contaminated gas stream is contacted with a scrubbing liquid such as water by some other contact method. A wet scrubber can also remove solid particles by capturing them in a liquid.

[0004] Droplets in the scrubbed exhaust gas stream are separated by a sub-component known as a mist eliminator, such as a mist filter or a cyclone separator, before exiting the wet scrubber. The stored scrubbing liquid and entrained contaminants are processed either prior to any final release or recycling within the plant.

[0005] Figure 1 is a simplified schematic diagram of a packed tower design wet scrubber (1). An illustrated mist filter (2) is placed inside the main chamber (3) of the packed tower. The mist filter (2) is positioned between the packing (5) and the outlet (4) of the main chamber (3) of the packed tower. Thus, virtually all mist can be removed from the exhaust gas flow (6) before it exits the main chamber (3) of the packed tower (1).

[0006] In some cases, an exhaust draw amplification device (EDAD) is employed downstream of the packed-stack wet scrubber. As its name suggests, the exhaust draw amplification device increases the gas flow velocity at the wet scrubber outlet and directs the exhaust along further ducts for processing and / or release into the atmosphere.

[0007] Referring to Figure 2, a typical example of an exhaust draw amplifier (10) includes a primary flow path (11) through which exhaust gas flows, surrounded by a plenum (7) having ports (8, 9) leading to the gas flow. These ports (8, 9) can introduce jets of high-speed compressed dry air into the flow to increase the overall gas velocity. [Overview of the project] [Problems that the invention aims to solve]

[0008] In this field, it has been reported that the Mean Time Between Cleaning (MTBC) indicated by the exhaust draw amplifier may not be sufficient. In some cases, the exhaust draw amplifier may accumulate powder on the inner walls of its primary flow path and / or jet port. This powder is usually a by-product of reduction and is generally in the form of silica or silicon dioxide. When the powder accumulates, it can change the shape of the device and reduce the effectiveness of the exhaust draw amplifier, especially when the gas flow velocity increases. In fact, it has been reported that the powder can accumulate to such an extent that the deterioration of pressure conditions causes the system to trigger an alarm and / or automatic shutdown.

[0009] This invention addresses, at least partially, these and other problems of the prior art. [Means for solving the problem]

[0010] Accordingly, in a first aspect, the present invention provides a mist trap for a wet scrubber reduction system. The mist trap includes a demisting chamber, which has a gas inlet for receiving mist-laden exhaust gas from the wet scrubber reduction system, a liquid capture surface on which mist droplets can fuse to form a liquid, and a gas outlet from which relatively dry gas can flow out of the chamber. The mist trap is configured such that at least a first portion of the captured liquid flows out of the chamber through the gas inlet and returns to the wet scrubber reduction system. Preferably, the liquid flows out of the chamber through the gas inlet.

[0011] An investigation into the above problem revealed that a relatively dry gas containing a small amount of powder may be discharged from the wet scrubber and pass through the exhaust draw amplifier. While not bound by any particular theory, it is thought that introducing compressed gas into the exhaust draw amplifier may cause the powder to flash dry and accumulate on the inner wall of the exhaust draw amplifier, where the powder steadily builds up and eventually causes blockage. The moisture content of the gas that has already passed through the mist filter is low, meaning that the transported powder is not moist enough to be washed away by any mist remaining in the exhaust gas. Furthermore, the gas does not have sufficient humidity to wet the surface of the EDAD and prevent evaporated powder from adhering to that surface.

[0012] By providing a separate mist trap, mist can be removed from the gas flow after it has passed through the exhaust draw amplifier, rather than before. The mist trap captures a portion of this mist and redirects it back to the wet scrubber as a liquid, allowing for cleaning of the duct / piping between the wet scrubber and the mist trap, including the inner surfaces of the exhaust draw amplifier (such as the primary flow path), thereby reducing the accumulation of powder there.

[0013] Therefore, the mist trap can be configured to communicate fluidly with the exhaust draw amplifier, so that the liquid flowing out of the chamber via the gas inlet is directed back into the exhaust draw amplifier. This allows the mist trap to prevent further powder adhesion.

[0014] The demist chamber may include at least one drainage outlet through which a second portion of the captured liquid flows out of the chamber. The demist chamber may include two or more such drainage outlets. Preferably, at least one drainage outlet is in fluid communication with a liquid storage tank, preferably a liquid storage tank used to supply liquid into a reduction system, such as within a packed column of a wet scrubber.

[0015] The mist-laden air can be supplied by a wet scrubber, specifically by an atomizer located within the packed-bed abatement chamber of the wet scrubber. Typically, a mist trap is used in combination with a wet scrubber in a gas reduction system that does not include a mist eliminator. The mist-laden air can flow out of the wet scrubber and pass through an exhaust draw amplifier. This has the advantage that the mist-laden gas can clean the side walls of the exhaust draw amplifier as it passes from the packed-bed abatement chamber to the mist trap. This cleaning action can be added to the cleaning action of the recovered liquid flowing in the reverse direction from the mist trap to the wet scrubber, preferably into the packed-bed abatement chamber.

[0016] Accordingly, in a further aspect, the present invention provides the use of an aqueous mist for washing powder deposits from an exhaust draw amplifier of a gas reduction system during use, preferably the aqueous mist being delivered from a packed column wet scrubber of the gas reduction system.

[0017] In a further aspect, the present invention provides a reduction system comprising an exhaust draw amplifier and a mist trap, wherein the exhaust draw amplifier is configured to direct mist-containing gas into the mist trap, and the mist trap is configured to remove liquid from the mist-containing gas. The mist trap is further configured so that at least a portion of the liquid removed from the mist-containing gas is directed back to the exhaust draw amplifier, preferably through the exhaust draw amplifier into a wet scrubber demist chamber. The mist-containing air is preferably supplied by a wet scrubber. The wet scrubber preferably includes a packed column that does not include a mist eliminator.

[0018] In this embodiment, the reduction system may include a mist trap according to the preceding embodiment.

[0019] Typically, the mist trap is positioned vertically above the exhaust draw amplifier and / or packed-bed demist chamber so that the liquid collected by the mist trap can flow back into the packed-bed demist chamber through the exhaust draw amplifier and / or into the packed-bed demist chamber under the influence of gravity.

[0020] In a further embodiment, the present invention provides a method for mitigating particulate matter accumulation in the primary channel of an exhaust draw amplifier of a gas reduction system. This process includes passing mist-containing air from a gas reduction process through the primary channel of an exhaust draw amplifier; removing liquid from the mist-containing gas flowing out of the exhaust draw amplifier; and passing the removed liquid back into the primary channel of the exhaust draw amplifier in the reverse direction.

[0021] The method can be carried out using a mist trap according to the first embodiment and / or a reduction system according to the preceding embodiment.

[0022] In all embodiments, the liquid trapping surface can be provided by a baffle that at least partially, preferably completely, blocks the gas outlet of the mist trap from the gas inlet of the mist trap. It is preferable that the exhaust gas flows around the baffle along its path from the gas inlet to the gas outlet. The baffle can define one or more apertures that provide a flow path from the inlet to the outlet. Typically, during use, the one or more apertures defined by the baffle provide the sole route from the gas inlet to the gas outlet.

[0023] In embodiments, the baffle may have one or more skirts, and the one or more apertures defined by the baffle are preferably provided by one or more skirts. Typically, the or each skirt is castellated. If it is castellated, an opening (groove) can provide the aperture. However, it will be understood that the one or more apertures are not necessarily limited to a specific external shape or form.

[0024] Thus, in a further aspect, the present invention provides a mist trap water collection baffle for a gas reduction system, comprising a generally planar body and a skirt extending from the body adjacent to the outer peripheral portion of the body, the skirt defining one or more apertures configured to allow gas to flow around the baffle during use, and the side surface of the planar body from which the skirt extends being configured to provide a liquid capture surface on which mist droplets can coalesce.

[0025] In all embodiments including the baffle, the size of the said or each aperture can be adjustable.

[0026] In an embodiment, the baffle can include a first portion including a skirt, which is nested within a second portion also including a skirt. Each said skirt can define one or more apertures of the baffle, and the first and second portions can be movable relative to each other to change the size of the one or more apertures. The first portion and the second portion preferably have a circular outer periphery, for example they can be disc-shaped and / or annular. The skirt is preferably in the form of a parapet. The first body is preferably rotatable relative to the second body to change the size of the one or more apertures.

[0027] In an embodiment, the baffle can be configured such that, in use, the tip (e.g., the lowermost end) of the skirt (singular or plural) is submerged in the liquid collected by the baffle.

[0028] The baffle of this aspect can also be employed in any of the embodiments including the baffle of the previous (singular or plural) aspect.

[0029] For the sake of avoiding misunderstanding, all aspects and embodiments can be combined with changes made where necessary.

[0030] Next, the present invention will be described with reference to the following figures, which are intended to be non-limiting. [Brief explanation of the drawing]

[0031] [Figure 1] This is a diagram showing a prior art wet scrubber. [Figure 2] This is a diagram of an exhaust draw amplifier (EDAD). [Figure 3] This figure shows the appearance of the mist trap according to the present invention. [Figure 4] This figure shows a cross-section of the mist trap according to the present invention. [Figure 5] This figure shows a baffle assembly according to the present invention. [Figure 6] This diagram shows the mist trap and EDAD in situ in a reduction system including a packed column wet scrubber. [Figure 7] This figure shows the method according to the present invention. [Modes for carrying out the invention]

[0032] The present invention provides a mist trap (12) for a gas reduction system with reference to Figure 3. The illustrated mist trap (12) includes a gas inlet (13) for receiving exhaust gas containing mist from a reduction system, such as a packed column of a wet scrubber.

[0033] The mist trap (12) further includes a main chamber (14) defined by a housing (15) and a gas outlet (16) from which relatively dry gas can flow out of the main chamber (14). Relatively dry gas means that some, preferably substantially all, of the mist has been removed from the gas by the mist trap. However, a relatively dry gas may still, though not necessarily, have a relatively high relative humidity.

[0034] Typically, the housing (15) and / or mist trap (12) as a whole have a polymer structure, and preferably an airtight structure. It is preferable that the entire exhaust gas flow passes through the mist trap (12).

[0035] The mist trap (12) further includes one or more drain ports (17, 18) from which a portion of the collected liquid can drain out of the main chamber (14) of the mist trap (12). As better shown in Figure 4, the mist trap (12) may include two or more such drain ports (17, 18). The liquid can drain out of the drain ports (17, 18) under the influence of gravity and / or pressure. Typically, the drain ports (17, 18) are located at the bottom of the mist trap (12). Preferably, the drain ports (17, 18) are located at the very bottom of the mist trap main chamber (14). As shown in Figure 4, the base (19) of the mist trap (12) may be configured to direct the liquid towards the drain ports (17, 18) to facilitate drainage. Furthermore, during use, the opening (20) of the gas inlet (13) may be raised relative to the drain holes (17, 18). In the illustrated example, the base (19) of the mist trap (12) is in the shape of a truncated cone. Drainage holes (17, 18) are located within a trench (21) at the base of the cone (19). The apex of the cone (19) includes an opening (20) for the gas inlet (13).

[0036] This arrangement has the advantage that the liquid can be accumulated (pooled) in the chamber (14) before it begins to flow back down the gas inlet (13) toward the exhaust draw amplifier (10) and / or toward the piping that returns to the packed column chamber.

[0037] As best shown in Figure 6, the drain ports (17, 18) are typically connected to a recovery reservoir (22) or tank, so that the liquid recovered in the mist trap (12) can be reused in the reduction process. Typically, (polymer) tubes (drain lines) (23, 24) are used to connect the drain ports to the recovery reservoir (22). The first end (25) of the drain lines (23, 24) can be connected to the drain ports of the mist trap, and the second end (26) of the same drain lines can be connected to the recovery reservoir (22), preferably below the liquid level (e.g., waterline) in the reservoir (22). It is preferable that the drain lines (23, 24) are connected to the recovery reservoir (22) below a lower level switch. Typically, the liquid moves along the drain lines (23, 24) under the influence of gravity and / or pressure into the recovery reservoir (22). As the flow rate applied to the exhaust draw amplifier (10) in the system increases, the pressure in the drain lines (23, 24) from the mist trap (10) to the tank (22) increases. Advantageously, any powder entrained in the recovered liquid can also be returned to the recovery reservoir (22) via the drain outlets (17, 18) along the drain lines (23, 24). The recovery reservoir can be the liquid supply reservoir for a wet scrubber.

[0038] The mist trap (12) further includes a water collection baffle (27). The baffle (27) includes a generally planar body (28), such as a disc-shaped body, and a skirt (29) adjacent to the outer circumference of the body (28), preferably extending from the body (28) on the outer circumference. The skirt (29) preferably extends from the outermost edge of the body (28). As can be seen better in Figure 5, the skirt (29) defines a series of apertures (30). During use, exhaust gas flows through the apertures (30), around the baffle (27), and toward the gas outlet (16). Liquid preferably fuses on the lower surface (31) of the baffle (27).

[0039] The skirt (29) is preferably configured to be at least partially submerged in the liquid pool at the bottom (21, 19) of the chamber (14) during use. The liquid pool in the outer casing (15) removes more mist from the exhaust gas by providing further resistance to the exhaust gas flow.

[0040] A computational fluid dynamics investigation of the illustrated mist trap (12) demonstrated that low-velocity and high-pressure zones are formed within the trap, creating vortices in the exhaust gas flow. Such velocity and flow turbulence separates the mist from the gas flow, allowing larger droplets to form that are too heavy to be transported by the gas flow. These larger droplets coalesce, for example, on the underside of the baffle, and accumulate at the bottom of the trap. This reservoir separates more mist by providing further resistance to the gas flow.

[0041] Preferably, the size of the aperture (30) can be changed. That is, the total cross-sectional area of ​​the flow path through the baffle (27) can be changed. The size of the aperture (30) can be changed manually, i.e., in response to user input, and / or automatically in response to the state of the reduction system and / or mist trap. Increasing the aperture size can reduce the pressure drop in the mist trap, while decreasing the aperture size can increase the fusion and capture rate of the mist in the mist trap.

[0042] In one embodiment, a window (e.g., a transparent tube) can be provided in the duct (44) downstream of the mist trap (12). If droplets appear on the window, it means that not all of the mist has been captured. Therefore, the size of the aperture (30) can be reduced until no droplets appear on the window. In another embodiment, an FTIR spectrometer can be used to analyze the exhaust gas and determine whether a satisfactory level of demisting has been achieved.

[0043] In addition to or instead of this, if the pressure in the reduction system rises, it may be desirable to open the aperture (30) to suppress the pressure drop through the mist trap (12).

[0044] In some embodiments, such decisions and aperture size adjustments can be performed automatically, i.e., without user input. For example, a processor can continuously monitor the amount of mist leaving the demister and / or the system pressure, make a decision regarding the preferred size of the (single or multiple) apertures, and instruct the controller to adjust the aperture size in response to this decision.

[0045] The baffle (27) can be configured so that, during use, the lowest (single or double) end (32) of the skirt (29) is submerged in the liquid collected on the base (21, 19) of the main chamber. In embodiments, the position of the baffle (27) relative to the base (19) of the main chamber (14) can be changed. Thus, the depth to which the lowest (single or double) end (32) of the skirt (29) is submerged can be changed, and / or the size of the aperture (single or double) can be changed. The movement of the baffle (27) relative to the base (19) of the chamber (14) can be controlled manually and / or automatically. In embodiments, the positioning of the baffle (27) can form part of the automatic determination and aperture size adjustment described above.

[0046] In the illustrated example, the baffle (27) has a two-part structure. Specifically, the illustrated baffle (27) includes a first part (33), which also includes a skirt (35), nested within a second part (34), which includes a skirt (29). The illustrated skirt (29, 35) is castle-like, providing a series of skirt segments (29, 35). In the illustrated example, both skirts (29, 35) define the aperture (30) of the baffle (27). The first part (33) and the second part (34) are movable relative to each other (e.g., rotatable) to change the size of the aperture (30). Specifically, the skirt segments (29) of the second part (34) can slide on the skirt segments (35) of the first part (33). Therefore, the skirt segments (35, 29) can exist in various configurations, such as side-by-side, overlapping, and radially aligned configurations, which allows the size of the aperture (30) of the baffle (27) to be changed.

[0047] In the illustrated example, the body (36) of the first part (33) is substantially disc-shaped, and the body (37) of the second part (34) is substantially annular, although the body (37) of the second part (34) may also be disc-shaped. Advantageously, the illustrated arrangement provides a recess (39) on the upper surface of the baffle (27) that can trap and subsequently remove powder particles.

[0048] As shown in Figure 4, the baffle (27) is suspended from the roof (40) of the mist trap main chamber (14). In this example, multiple support columns (41) connect the baffle (27) to the chamber roof (40). In the illustrated embodiment, annular fixing plates (38) are used to connect the support columns (41) to the roof (40). The exhaust gas passes around the support columns (41) before flowing out of the chamber (14) through the gas outlet (16). In the illustrated example, a first portion (33) is fixed to the roof (40) of the chamber (14). A second portion (34) is movable relative to the first portion (33) and the chamber wall (42). Powder particles that collide with the support columns (41) can collect on the upward-facing surface (39) of the baffle (27).

[0049] During use, mist-laden air enters the chamber (14) through the opening (20) of the gas inlet (13). The mist-laden gas collides with the lower surface (31) of the baffle (27), and the liquid from the mist fuses on the lower surface (31) of the baffle (27). The liquid then flows down the baffle skirt (29, 35), collects on the base (floor) (21, 19) of the chamber (14), and / or drips onto the base (19) of the main chamber and / or directly into the gas inlet (13). Mist droplets can also fuse on other surfaces of the mist trap (12) and similarly flow towards the base (19, 21) of the mist trap (12). When liquid begins to accumulate on the bottom (19, 21) of the main chamber (14), some of it flows into one or more drain outlets (17, 18).

[0050] Furthermore, the liquid flows out from the gas inlet (13) in the opposite direction to the exhaust gas flow direction. The direction of exhaust gas flow is indicated by arrow A. In this embodiment, the liquid flows along the inner surface of the duct located upstream of the mist trap (12), which includes the exhaust draw amplifier (10) (for example, back toward the packed tower (43)). The liquid may entrain any powder or other debris encountered along its path along the duct / piping. The liquid can continue to flow until it re-enters the packed tower (43) of the reduction system. Thus, powder is washed away from the duct / piping including the exhaust draw amplifier (10), and the accumulation of problematic powder is avoided.

[0051] Figure 2 shows an exhaust draw amplifier (10) suitable for use in the present invention. The exhaust draw amplifier includes a primary flow path (11) through which exhaust gas flows, surrounded by a plenum (7) having ports (8, 9) leading to the exhaust gas flow. These ports (8, 9) can introduce a jet of high-speed compressed dry air into the flow to increase the overall gas velocity.

[0052] In this embodiment, the primary flow path (11) of the exhaust draw amplifier is axially aligned with the gas inlet (13) of the mist trap (12). Preferably, the inlet flow path (13) of the mist trap (12) and the primary flow path (11) of the EDAD (10) are arranged to provide a continuous inward-facing surface.

[0053] As shown in Figure 6, in a preferred arrangement, the mist trap (12) is directly adjacent to the exhaust draw amplifier (10) in the exhaust gas reduction system, and preferably the mist trap (12) is positioned directly above the exhaust draw amplifier (10). The liquid collected by the mist trap (12) preferably flows immediately into the exhaust draw amplifier (10) under the influence of gravity.

[0054] In an alternative configuration, a mist filter can be placed between the exhaust draw amplifier and the mist trap and / or within the mist trap. Such a configuration has been shown to clean the exhaust draw amplifier while further improving exhaust gas drying.

[0055] In embodiments, additional liquid may be injected into the mist trap during use, preferably so that the liquid cascades over the baffle in the form of a weir, forcing all exhaust gas to pass through the liquid curtain. In addition to or instead of this, the liquid may be sprayed as an aerosol onto the underside of the baffle in the reverse direction into the incoming gas flow by one or more spray nozzles. The mist trap may be actively or passively cooled to a temperature substantially below the temperature of the gas entering the mist trap. The liquid introduced into the mist trap is preferably cooler than the exhaust gas entering the mist trap. Such an arrangement may have the advantages of cleaning the mist trap, further cooling the gas flow, reducing relative humidity, and removing more powder from the gas flow. In arrangements including a mist filter, the liquid injected into the mist trap also has the advantage of further cleaning the mist filter.

[0056] Typically, the gas outlet (16) is connected to piping. The demisted (relatively dry) exhaust gas can travel along the piping for further treatment, or more typically, be released into the atmosphere.

[0057] In this invention, mist refers to a liquid-in-gas aerosol. Typically, the aerosol has a diameter of about 1000 μm or less, preferably about 2.5 μm to about 450 μm, and preferably about 250 μm, measured using, for example, laser diffraction. Typically, the liquid is aqueous, such as water. Typically, the exhaust gas contains air. Generally, the mist is generated by an atomizer or the like in the packed column (43) of the wet scrubber and drawn along the piping into a mist trap. Typically, the temperature inside the mist trap is at or below ambient temperature. This temperature is preferably about 5°C to about 30°C, more preferably about 15°C to about 25°C, and in one example, 20°C. This temperature is preferably such that significant condensation does not occur in the piping downstream of the mist trap. Generally, the water temperature inside the packed column chamber is about 10°C to about 20°C, such as about 14°C to about 17°C. Typically, the gas temperature is around 10°C to 20°C, such as around 14°C to 15°C.

[0058] Those skilled in the art will understand that the dimensions of the mist trap can be modified according to the size of the rest of the reduction device (particularly the exhaust draw amplifier), the amount of mist to be removed, and the volume constraints at the site.

[0059] Generally, mist traps have a diameter larger than the diameter of the gas inlet and / or gas outlet. Typically, the main chamber of a mist trap has an inner diameter of less than about 100 cm, preferably less than about 50 cm. Generally, the diameter of the main chamber is greater than about 15 cm, preferably greater than about 25 cm. Typically, baffles have a diameter larger than the diameter of the gas outlet and / or gas inlet. The ratio of the baffle diameter to the diameter of the gas inlet and / or gas outlet is about 1:1 to about 5:1, preferably about 2:1 to about 3:1.

[0060] Referring to Figure 7, the present invention provides a method for mitigating particulate matter accumulation in the primary flow path of an exhaust draw amplifier in a gas reduction system.

[0061] The method includes the steps of passing mist-containing air from a gas reduction process through the primary channel of an exhaust draw amplifier (45), removing liquid from the mist-containing gas flowing out of the exhaust draw amplifier (46), and passing at least a portion of the removed liquid back into the primary channel of the exhaust draw amplifier in the reverse direction (47). Optionally, after step (47), the liquid is subsequently transferred to a packed column of a wet scrubber (48). The mist-containing air used in step (45) is preferably from a packed column of a wet scrubber. Optionally, the method includes directing a portion of the removed liquid to the wet scrubber without passing it through the exhaust draw amplifier.

[0062] It will be understood that the method of the present invention can be carried out using the apparatus disclosed herein.

[0063] The present invention is further illustrated by the following embodiments, which are intended to be non-limiting. [Examples]

[0064] Test 1 The Y35Atlas1200 reduction unit equipped with an EDAD was modified by removing the mist filter. This allowed mist from the spray generated in the packed column to move downstream. A transparent inspection tube was introduced into the duct above the EDAD. During use, water droplets appeared on the transparent tube, confirming that mist was passing through the EDAD. A drain pipe from the exhaust duct was required to remove excess water. During operation of the modified device, a significant decrease in EDAD occlusion and a marked increase in MTBC due to EDAD occlusion were recorded compared to the unmodified device.

[0065] Test 2 A mist trap, as shown in Figures 3 to 5, was directly connected to the EDAD of the Y35Atlas1200 reduction device located downstream of the EDAD. Here again, the reduction device was modified by removing the mist filter. As a result, the mist from the spray generated in the packed tower could be washed away from the EDAD and moved to the mist trap. A polymer drain pipeline was installed, extending from the mist trap's drain outlet to the drain tank below the packing tower of the reduction device. Transparent inspection tubes were connected to the mist trap's outlet and the downstream exhaust duct. When the mist trap baffle was set to fully open, no droplets were observed on the transparent polymer tube, indicating that the mist trap had removed all the mist. Liquid was observed flowing from the mist trap into the drain tank through the polymer drain pipeline. While operating this modified device in combination with a mist trap, a significant reduction in EDAD occlusion and a marked increase in MTBC due to EDAD occlusion were recorded compared to the unmodified device. [Explanation of symbols]

[0066] 1. Packed Column Wet Scrubber 2 Mist filters 3. Packed Column Main Chamber 4 Packing 5. Outlet of the packed tower main chamber 6. Exhaust gas flow 7 Plenum 8 ports 9 ports 10. Exhaust Draw Amplifier (EDAD) 11 Primary channel 12 Mist Traps 13 Gas Inlet 14 Mist trap main chamber 15 Housing 16 Gas outlet 17 Drain 18 Drain 19 Base 20 Gas inlet opening 21 Groove 22 Recovery Reservoir 23 Drainage pipeline 24 Drain pipes 25 First end of drain pipe 26. Second end of drain pipe 27 Mist Trap Baffle 28 Baffle Body 29 Baffle Skirt 30 (singular / plural) baffle apertures 31. Bottom of baffle 32. The lowest part of the skirt 33. First part of the baffle 34. Second part of the baffle 35 Skirt of the first part 36. Main body of the first part 37 The main body of the second part 38 Ring-shaped fixing plate 39 Recess on the upper surface of the baffle 40 Main chamber roof 41 (single and double) posts 42 Main Chamber Wall 43 Packed tower 44 ducts 45. The mist-containing air from the gas removal process is passed through the primary flow path of the exhaust draw amplifier. 46. ​​Remove liquid from the mist-containing gas leaking from the exhaust draw amplifier. 47 At least a portion of the removed liquid is passed back into the primary flow path of the exhaust draw amplifier in the reverse direction. 48 The liquid is then transferred to the packed column of the wet scrubber.

Claims

1. A mist trap for a wet scrubber reduction system, the mist trap comprising a demist chamber, the demist chamber having a gas inlet for receiving exhaust gas containing mist from the wet scrubber reduction system, a liquid-capturing surface from which mist droplets can fuse to form a liquid, and a gas outlet from which relatively dry gas can flow out of the chamber. The mist trap is configured such that at least a first portion of the captured liquid flows out of the chamber through the gas inlet and returns to the wet scrubber reduction system. The liquid trapping surface is provided by a baffle that at least partially blocks the gas outlet from the gas inlet. The baffle defines one or more apertures that provide a flow path from the gas inlet to the gas outlet. The size of the aperture is adjustable. The mist trap is located downstream of the exhaust draw amplifier. A mist trap characterized by the following features.

2. The baffle has one or more skirts, preferably the one or more apertures of the baffle are provided by the one or more skirts. The mist trap according to claim 1.

3. The demist chamber includes at least one drain port through which the second portion of the captured liquid flows out of the chamber. The mist trap according to claim 1.

4. A water-collecting baffle for a mist trap for a gas reduction system, the baffle comprising a generally planar body and a skirt extending from the body adjacent to the outer periphery of the body, the skirt defining one or more apertures configured to allow gas to flow around the baffle during use, and the side surface of the planar body from which the skirt extends is configured to provide a liquid-capturing surface from which mist droplets can fuse. The size of the aperture is adjustable. The mist trap is located downstream of the exhaust draw amplifier. A water-collecting baffle characterized by the following features.

5. Each of the aforementioned skirts is in the style of a castle wall. The mist trap according to claim 2.

6. The mist trap is in fluid communication with the exhaust draw amplifier and is configured so that the liquid that flows out of the chamber via the gas inlet is directed back into the exhaust draw amplifier. The mist trap according to claim 1.

7. A reduction system comprising an exhaust draw amplifier and a mist trap, wherein the exhaust draw amplifier is configured to direct mist-containing gas into the mist trap, the mist trap is configured to remove liquid from the mist-containing gas, and the mist trap is further configured so that at least a portion of the liquid removed from the mist-containing gas is directed back into the exhaust draw amplifier. The mist trap is as described in claim 1. A reduction system characterized by the following features.

8. The liquid passed through the exhaust draw amplifier returns to the packed bed demist chamber. The mist trap according to claim 6.

9. Including the mist trap baffle described in claim 4, The mist trap according to claim 1.

10. A method for mitigating particulate matter accumulation in the primary flow path of an exhaust draw amplifier in a gas reduction system, a. A step of passing air containing mist from the gas reduction process through the primary flow path of the exhaust draw amplifier, b. A step of removing liquid from the mist-containing gas discharged from the exhaust draw amplifier, c. The step of passing at least a portion of the removed liquid back into the primary flow path of the exhaust draw amplifier in the reverse direction, A method characterized by including the following.

11. The mist trap described in claim 1 is used to perform the following: The method according to claim 10.

12. The use of an aqueous mist for washing powder deposits from the exhaust draw amplifier of the gas reduction system during use, preferably the aqueous mist is delivered from the packed column wet scrubber of the gas reduction system. The method according to the present invention, characterized by the present invention.

Citation Information

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