Ion exchange resin column

Abstract

To provide an ion exchange resin column capable of obtaining treatment water of a predetermined water quality by ensuring sufficient capacity of a column body, while maintaining a small differential pressure when water to be treated flows through it.SOLUTION: An ion exchange resin column 1 includes: a main body member 2 consisting of a resin filling part 21 filled with ion exchange resin etc., and reduced diameter parts 22A, 22B having an inner diameter smaller than an inner diameter of the resin filling part 21 continuous from the resin filling part 21; and an upper side connection member 3A and a lower side connection member 3B consisting of reduced diameter parts 32A, 32B connected to the reduced diameter parts 22A, 22B, and piping parts 31A, 31B continuous from the reduced diameter parts 32A, 32B and having an inner diameter smaller than an inner diameter of the reduced diameter parts 32A, 32B. A ratio (D / d) between the inner diameter (D) of the resin filling part 21 and the inner diameter (d) of the piping parts 31A, 31B is 5 to 8.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a small ion exchange resin column in which an ion exchange resin is filled in a cylindrical container body.

Background Art

[0002] Conventionally, an ion exchange resin column filled with an ion exchange resin or a catalyst resin carrying a platinum group metal such as palladium or platinum on the ion exchange resin is introduced with treated water from the upper part of a cylindrical container body having a cylindrical axis direction as the vertical direction, and after being brought into contact with the ion exchange resin or the like, the treated water is taken out from the lower part of the cylindrical container body.

[0003] For example, in order to produce process water for a semiconductor manufacturing apparatus, using secondary pure water (ultra-pure water) of an ultra-pure water manufacturing apparatus as raw material water and aiming to remove trace amounts of hydrogen peroxide remaining in this ultra-pure water, an ion exchange resin apparatus in which a catalyst resin carrying a platinum group metal or the like on an ion exchange resin is filled in an ion exchange resin column is used. Since the amount of this process water used is small, the flow rate in the ion exchange resin apparatus may be a small flow rate of about 10 to 20 L / min. In addition, since such an ion exchange resin apparatus is often installed in a housing-type ultra-pure water manufacturing apparatus or a process water manufacturing apparatus, the columns of existing ion exchange resin apparatuses cannot be used, and compact ones are used. An example of such a conventional small flow rate type ion exchange resin apparatus is shown in FIG. 5.

[0004] In FIG. 5, the ion exchange resin column 71 includes a cylindrical column body 72 filled with an ion exchange resin or the like, piping members 73A and 73B continuous from this column body 72, flange members 74A and 74B provided at the upper limit ends of the column body 72 connecting the column body 72 and the piping members 73A and 73B, respectively, and flange members (此处原文有误,推测应该是75A、75B)75A and 75B provided at the ends of the piping members 73A and 73B. The piping members 73A and 73B are connected to a piping 77 for treated water (ultra-pure water) W and a piping 78 for treated water W1 via union joints 76A and 76B, respectively. [Overview of the project] [Problems that the invention aims to solve]

[0005] The small ion exchange resin columns 71 used to produce process water for conventional semiconductor manufacturing equipment, as described above, are often installed inside housing-type ultrapure water production equipment or process water production equipment. In such cases, there are limitations on the size of the diameters of the pipes 77 and 78 (they cannot be made too large), while the height (H) of the column body 72 of the ion exchange resin column 71 must be secured in order to ensure the amount of ion exchange resin and catalyst resin to be packed in. For this reason, the ratio (H) between the inner diameter (d) of the pipes 77 and 78 and the height of the resin-packed section was made very large, for example, 20 or more. As a result, the differential pressure during the flow of the water to be treated W becomes large, making it difficult to secure the flow rate in the ion exchange resin column 71, and this effect is particularly large when the flow rate is small, around 10 to 20 L / min.Therefore, it is conceivable to reduce the ratio between the inner diameter (d) of the pipes 77 and 78 and the height (H) of the resin-packed section, but this presents the problem that it becomes difficult to secure a sufficient volume for the column body 72.

[0006] The present invention has been made in view of the above problems, and aims to provide an ion exchange resin column that can obtain treated water of a predetermined quality while maintaining a small differential pressure when the water to be treated is passed through it, and while ensuring sufficient volume of the column body. [Means for solving the problem]

[0007] To achieve the above objective, the present invention provides an ion exchange resin column comprising a cylindrical resin-filled section and a piping section having an inner diameter smaller than the inner diameter of the resin-filled section and communicating with the resin-filled section, wherein the resin-filled section is filled with an ion exchange resin, and water to be treated introduced from one side of the piping section comes into contact with the ion exchange resin in the resin-filled section, after which the treated water is taken out from the other side of the piping section, wherein the ratio D / d of the inner diameter of the resin-filled section (D) to the inner diameter of the piping section (d) is 5 to 8 (Invention 1).

[0008] According to this invention (Invention 1), by making the diameter of the resin-filled section larger than the diameter of the piping section into which the water to be treated flows within a predetermined range, it is possible to maintain a small differential pressure when the water to be treated flows through the ion exchange resin column, while ensuring sufficient volume of the column body and obtaining treated water of a predetermined quality.

[0009] In the above invention (Invention 1), it is preferable that a reduced diameter portion is formed between the resin-filled portion and the piping portion, which is smaller than the inner diameter of the resin-filled portion and larger than the inner diameter of the piping portion (Invention 2).

[0010] According to this invention (Invention 2), since a reduced diameter section having an intermediate diameter between the resin-filled section and the piping section is provided, the non-water-permeable region of the resin filled in the column body can be reduced, thereby enabling effective utilization of the ion exchange resin.

[0011] In the above invention (Invention 2), it is preferable that the reduced diameter portion is divided into a resin-filled portion side member and a piping portion side member, and that these two members are joined by a flange member (Invention 3). In the above invention (Invention 3), it is preferable that the outer diameter of the resin-filled portion is approximately equal to the outer diameter of the flange member (Invention 4).

[0012] According to these inventions (Inventions 3 and 4), by making the outer diameter of the ion exchange resin column approximate the outer diameter of the flange member, the installation space does not increase even if the diameter of the ion exchange resin column is increased.

[0013] Furthermore, in the above invention (Invention 3), it is preferable that a strainer member is inserted into the reduced diameter portion (Invention 5).

[0014] According to this invention (Invention 5), it is possible to prevent the outflow of the ion exchange resin filled in the cylindrical resin-filled section. Moreover, since the strainer member is inserted into the reduced diameter section, the volume of the container body is not reduced.

[0015] In the above invention (Invention 1), it is preferable that the ratio H / D of the inner diameter (D) of the resin-filled portion to the internal height (H) of the resin-filled portion is 1 to 3 (Invention 6).

[0016] According to this invention (Invention 6), the ion exchange resin column can be made more compact by making the internal height (H) of the resin-filled section less than or equal to a predetermined ratio of the internal diameter (d) of the piping section.

[0017] Furthermore, in the above inventions (Inventions 1 to 6), it is preferable that the internal volume of the resin-filled section is 3 to 10 L (Invention 7).

[0018] According to the present invention (Invention 7), the present inventions (Inventions 1 to 6) are particularly suitable for making small ion exchange resin columns. [Effects of the Invention]

[0019] The ion exchange resin column of the present invention has a resin-filled section with a diameter that is larger than the diameter of the piping section into which the water to be treated flows, within a predetermined range. This allows for maintaining a small differential pressure when the water to be treated flows through the ion exchange resin column, while ensuring sufficient volume of the column body to obtain treated water of a predetermined quality. [Brief explanation of the drawing]

[0020] [Figure 1] This is a front view showing an ion exchange resin column according to one embodiment of the present invention. [Figure 2] This is a longitudinal section showing the ion exchange resin column. [Figure 3] This is a front view showing the structure of the strainer of the ion exchange resin column according to the above embodiment. [Figure 4] This is a bottom view showing the structure of the strainer. [Figure 5] This is a schematic diagram showing a conventional ion exchange resin column. [Modes for carrying out the invention]

[0021] Hereinafter, the ion exchange resin column of the present invention will be described in detail with reference to the accompanying drawings.

[0022] <Ion exchange resin column> Figs. 1 and 2 show an ion exchange resin column according to an embodiment of the present invention. In Figs. 1 and 2, the ion exchange resin column 1 comprises a main body member 2 composed of a cylindrical resin filling portion 21 filled with an ion exchange resin or the like and reduced diameter portions 22A and 22B having an inner diameter smaller than the inner diameter of the resin filling portion 21 continuous with the resin filling portion 21, and upper connection members 3A and lower connection members 3B each composed of reduced diameter portions 32A and 32B connected to the reduced diameter portions 22A and 22B and piping portions 31A and 31B having an inner diameter smaller than the inner diameter of the reduced diameter portions 32A and 32B continuous with the reduced diameter portions 32A and 32B. Flange members 23A and 23B are respectively attached to the ends of the reduced diameter portions 22A and 22B of these main body members, while flange members 33A and 33B are respectively attached to the lower end of the upper connection member 3A and the upper end portion of the lower connection member 3B, and these are joined by abutting the flange members 23A, 33A and the flange members 23B, 33B and fastening them with screws and bolts or the like. Further, union joints 4A and 4B are respectively attached to the upper end of the upper connection member 3A and the lower end of the lower connection member 3B, and a water to be treated pipe (ultra-pure water pipe) 5A and a treated water pipe 5B are respectively connected to these union joints 4A and 4B.

[0023] In addition, strainers 6 are inserted into the reduced-diameter portions 22A and 22B of the main body member 2, respectively. As shown in FIGS. 3 and 4, this strainer 6 includes an elliptical columnar insertion portion 61, a flange portion 62 that abuts against the flange members 23A and 23B, and a ring 63 for blocking the space between the side surface of the strainer 6 and the inner wall surfaces of the reduced-diameter portions 22A and 22B. Ten water passage holes 64 are formed in the longitudinal direction in the insertion portion 61, and eleven through holes 65 are formed in the lateral direction on the upper side of the ring 63 (four or three are visible in the figure, but eleven in total around the circumference) in five rows and eleven in the lower side in three rows. Note that 62A is a hole for fastening the flange members 23A and 23B and the flange portion 62 with screws, bolts, etc., and 66A, 66B, 66C, and 66D are welding margins.

[0024] In the ion exchange resin column 1 as described above, the ratio (D / d) of the inner diameter (D) of the resin filling portion 21 to the inner diameters (d) of the piping portions 31A and 31B is 5 to 8. When D / d is less than 5, the effect of reducing the differential pressure during the flow of the treated water W cannot be sufficiently obtained. On the other hand, when D / d exceeds 8, the diameter of the main body member 2 of the ion exchange resin column 1 becomes too large, not only making it impossible to make the column 1 more compact, but also making the non-water passage area of the filled ion exchange resin non-negligible. This D / d may be set so as to obtain a desired differential pressure when the treated water W flows through the ion exchange resin column 1 to obtain the treated water W1. For example, it may be set so that the differential pressure is 0.02 MPa or less.

[0025] In particular, it is preferable that the outer diameter of the resin filling portion 21 is approximately the same as the outer diameters of the flange members 23A and 23B. By approximating the outer diameter of the ion exchange resin column to the outer diameter of the flange member, even if the outer diameter of the resin filling portion 21 is increased, the installation space will not be increased.

[0026] Also, it is preferable that the ratio (H / D) of the inner diameter (D) of the resin filling portion 21 to the height (H) inside the resin filling portion 21 is 1 to 3. When H / D is less than 1, the volume of the resin filling portion 21 cannot be sufficiently ensured. On the other hand, when H / D exceeds 3, the main body member 2 of the ion exchange resin column 1 becomes too large, which is not preferable.

[0027] The ion exchange resin column 1 of this embodiment, as described above, is suitable for use in small ion exchange resin columns with a packing volume of ion exchange resin (volume of the resin-packed section 21) of about 3 to 10 L. Furthermore, it is preferable to use a material that has low elution and for which a welding method has been established, such as PVDF piping. In addition, it is preferable to construct it by combining general-purpose piping.

[0028] <Ion exchange resin> In this embodiment, the ion exchange resin used to fill the resin-filled section 21 can be an anion exchange resin or a cation exchange resin. Furthermore, while not limited to anion exchange resins and cation exchange resins, a catalyst resin is preferred in which a catalyst metal such as a platinum group metal is supported on these ion exchange resins (for example, an anion exchange resin). In addition, a boron-selective adsorption resin may also be used.

[0029] <Water treatment method using ion exchange resin column> The water treatment method using the ion exchange resin column 1 described above will be explained using an example where, as the ion exchange resin, a mixed resin of anion exchange resin and cation exchange resin is packed from the bottom of the resin packing section 21, followed by a catalyst resin on which a platinum group metal is supported, and then a small amount of inert resin (which is lighter than water) is packed on top to cover the very top. There are no particular restrictions on the ratio (volume ratio) of the mixed resin and the catalyst resin; a ratio of 1:5 to 5:1, especially 1:3 to 1:1, is acceptable, for example, 1:2.

[0030] First, as shown in Figure 2, ultrapure water is supplied as treated water W from the treated water piping 5A. This treated water W flows into the resin-filled section 21 in a state where the flow is slightly diffused in the narrowed diameter section 22A. Subsequently, in the resin-filled section 21, trace amounts of hydrogen peroxide contained in the ultrapure water W are decomposed and removed in the catalyst resin layer. Then, anionic and cationic impurities are removed in the mixed resin layer, and treated water W1 with hydrogen peroxide reduced to the absolute minimum can be obtained from the treated water piping 5B.

[0031] In this embodiment, the ratio (D / d) of the inner diameter (D) of the resin-filled section 21 to the inner diameter (d) of the piping sections 31A and 31B is 5 to 8. Therefore, even if the flow of the water to be treated W is obstructed because the resin-filled section 21 is filled with ion exchange resin, the flux can be kept to a minimum.

[0032] Furthermore, since an inert resin lighter than water is placed in the uppermost layer of the resin-filled section 21, the catalyst resin is less likely to float. Moreover, in this embodiment, strainers 6 are inserted into the reduced diameter sections 22A and 22B, respectively, preventing the ion exchange resin from clogging the reduced diameter sections 22A and 22B. In particular, by providing a ring 63 on the strainer 6, the structure prevents resin from entering the gap between the inner surface of the reduced diameter section 22A and the outer surface of the strainer 6, thus preventing the lighter inert resin from blocking the reduced diameter section 22A. In addition, since through holes 65 are formed in the lateral direction of the strainer 6, the strainer 6 itself has excellent water permeability.

[0033] Although the present invention has been described above based on the embodiments described above, the present invention is not limited to the embodiments described above, and various modifications are possible. For example, the ion exchange resin column 1 of this embodiment is suitable as a small ion exchange device with an internal volume of about 3 to 10 L in the resin-packed section 21, but it is not limited to this, and can be applied to ion exchange devices of various sizes as long as the ratio D / d of the inner diameter (D) of the resin-packed section 21 to the inner diameter (d) of the piping sections 31A and 31B is 5 to 8. In addition, the ion exchange resin packed into the ion exchange resin column 1 can be changed in various ways. [Examples]

[0034] The present invention will be described in more detail by the following specific examples.

[0035] [Example 1] An ion exchange resin column 1 was prepared as shown in Figures 1 to 4. This ion exchange resin column 1 was made of PVDF resin, with an inner diameter (D) of 150.2 mm for the cylindrical resin-filled section 21, an internal height (H) of 265 mm for the packed section 21, and a volume of 4.7 L for the resin-filled section 21. The inner diameters of the reduced-diameter sections 22A and 22B were 58.2 mm, and the inner diameters (d) of the piping sections 31A and 31B were 27.2 mm, resulting in a ratio of D / d ≈ 5.5. The outer diameters of the flange members 23A and 23B were 155 mmΦ, and the outer diameter (D1) of the resin-filled section 21 was 160 mm.

[0036] After thoroughly washing the ion exchange resin column 1, 975 mL of conditioned mixed ion exchange resin (anion exchange resin + cation exchange resin) and 1950 mL of catalyst resin (anion exchange resin supported with platinum group metals) were sequentially packed into it. Furthermore, inert resin (spherical inert resin with a specific gravity lower than water) was packed on top of the catalyst resin, leaving a gap of about 1 cm between it and the lower end surface of the strainer 6, thereby constructing the water treatment apparatus.

[0037] The treated water (ultrapure water) W was supplied at a rate of 13 L / min from the treated water pipe 5A (inlet side) of this water treatment device, and the treated water W1 was discharged from the treated water pipe 5B (outlet side). The pressure of the water passing through the treated water pipe 5A and the treated water pipe 5B during this process was measured.

[0038] After water flow for a predetermined time, the differential pressure (ΔP) between the treated water pipe 5A and the treated water pipe 5B was calculated using the following formula, and the differential pressure (ΔP) was 0.02 MPa or less. ΔP=(P inlet, when water is flowing - P outlet, when water is flowing) - (P inlet, when stopped - P outlet, when stopped)

[0039] [Comparative Example 1] An ion exchange resin column 71, as shown in Figure 5, was prepared. This ion exchange resin column 71 was made of PVDF resin, with an inner diameter (D) of 65.2 mm for the cylindrical column body 72, an internal height (H) of 780 mm for the column body 72, and a volume of 2.6 L for the column body 72. The inner diameter (d) of the piping sections 73A and 73B was 27.2 mm, resulting in a ratio of D / d ≈ 2.2.

[0040] After thoroughly washing the ion exchange resin column 71, the conditioned mixed ion exchange resin and catalyst resin were sequentially packed into it, and then an inert resin was packed on top of the catalyst resin to form a water treatment apparatus.

[0041] Ultrapure water W was supplied at a rate of 13 L / min from the ultrapure water pipe 77 (inlet side) of this water treatment device, and treated water W1 was discharged from the treated water pipe 78 (outlet side). The pressure of the water passing through the ultrapure water pipe 77 and the treated water pipe 78 during this process was measured.

[0042] After water flow for a predetermined time, the differential pressure (ΔP) between the ultrapure water piping 77 and the treated water piping 78 was calculated using the following formula, and the differential pressure (ΔP) was found to be greater than 0.02 MPa.

[0043] [Comparative Example 2] In Example 1, an ion exchange resin column 71 was manufactured with an internal height (H) of 480 mm for the column body 72.

[0044] After thoroughly washing the ion exchange resin column 71, the conditioned mixed ion exchange resin and catalyst resin were sequentially packed into it, and then an inert resin was packed on top of the catalyst resin to form a water treatment apparatus.

[0045] Ultrapure water W was supplied at a rate of 13 L / min from the ultrapure water pipe 77 (inlet side) of this water treatment device, and treated water W1 was discharged from the treated water pipe 78 (outlet side). The pressures in the ultrapure water pipe 77 and treated water pipe 78 during this process were measured in the same manner as in Example 1.

[0046] After water flow for a predetermined time, the differential pressure (ΔP) between the ultrapure water piping 77 and the treated water piping 78 was calculated using the following formula. The differential pressure (ΔP) was less than 0.02 MPa. However, the capacity of the ion exchange resin column 71 was only about 1.6 L, which was insufficient to fill with a sufficient amount of resin. Therefore, it was necessary to change the water supply conditions and other factors. [Explanation of symbols]

[0047] 1. Ion exchange resin column 2 Main body components 21 Resin-filled section 22A,22B Reduced diameter part 23A, 23B Flange members 3A Upper connecting member 3B Lower connecting member 31A,31B Piping section 32A,32B Reduced diameter part 33A, 33B Flange members 4A, 4B Union Fittings 5A Water treatment piping 5B Treated water piping 6 Strainer 61 Insertion part 62 Flange section 63 Rings 64 Water passage holes 65 through holes W: Water to be treated W1 treated water D Inner diameter of the resin-filled section H Column Body Internal Height d Inner diameter of the piping section

Claims

1. An ion exchange resin column comprising a cylindrical resin-filled section and a piping section having an inner diameter smaller than the inner diameter of the resin-filled section, wherein the resin-filled section is filled with ion exchange resin, and water to be treated is introduced from one side of the piping section, comes into contact with the ion exchange resin in the resin-filled section, and the treated water is then withdrawn from the other side of the piping section. The ratio D / d of the inner diameter (D) of the resin-filled section to the inner diameter (d) of the piping section is 5 to 8. The ratio H / D of the inner diameter (D) of the resin-filled portion to the internal height (H) of the resin-filled portion is 1 to 3. A reduced-diameter portion is formed between the resin-filled portion and the piping portion, which is smaller than the inner diameter of the resin-filled portion and larger than the inner diameter of the piping portion. The reduced diameter portion is divided into a resin-filled portion side member and a piping portion side member, and these two members are joined together by a flange member, in an ion exchange resin column.

2. The ion exchange resin column according to claim 1, wherein the outer diameter of the resin-filled portion is approximately the same as the outer diameter of the flange member.

3. The ion exchange resin column according to claim 1, wherein a strainer member is inserted into the diameter-reduced portion.

4. The ion exchange resin column according to any one of claims 1 to 3, wherein the internal volume of the resin-filled section is 3 to 10 L.

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