Fluid processing equipment

Abstract

To provide a fluid treatment device capable of efficiently advancing ultraviolet irradiation to a fluid to be treated.SOLUTION: A fluid treatment device includes an inner tube, an outer tube surrounding the inner tube, a discharge space formed by filling a discharge gas in the space sandwiched between the inner tube and the outer tube, a first electrode and a second electrode for applying a voltage to the discharge space, and a channel provided inside the inner pipe through which the fluid to be treated flows, and the channel includes a fluid control portion that guides the fluid to be treated closer to the inner peripheral wall of the inner tube.SELECTED DRAWING: Figure 1A

Description

Technical Field

[0001] The present invention relates to a fluid treatment device, and particularly to a device that irradiates a fluid with ultraviolet light for treatment.

Background Art

[0002] Conventionally, in order to decompose trace amounts of organic components (TOC: Total Organic Carbon) contained in a fluid, a device that decomposes TOC in a solution using ultraviolet light with a wavelength of 200 nm or less is known. For example, in Patent Document 1 below, a treatment device is described in which a liquid to be treated is circulated inside an excimer lamp, and ultraviolet light is irradiated from around the flow path.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The excimer lamp of Patent Document 1 has a structure in which a discharge space is formed between an inner tube and an outer tube, and a fluid to be treated is circulated inside the inner tube. However, since the transmittance of ultraviolet light is low, it has been difficult to efficiently advance the irradiation of ultraviolet light to the fluid to be treated.

[0005] The present invention has been made in view of the above problems, and an object thereof is to provide a fluid treatment device capable of efficiently advancing the irradiation of ultraviolet light to a fluid to be treated.

Means for Solving the Problems

[0006] The fluid treatment device according to the present invention includes an inner tube, an outer tube provided so as to surround the inner tube, a discharge space filled with a discharge gas in a space sandwiched between the inner tube and the outer tube, A first electrode and a second electrode for applying a voltage to the discharge space, The inner tube is provided with a flow path through which the fluid to be processed flows, The flow path has a fluid control unit that guides the fluid to be processed so that it approaches the inner circumferential wall of the inner tube.

[0007] With this configuration, the fluid to be treated can be circulated close to the inner circumferential wall of the inner tube, making it easier for ultraviolet light from the inner tube to irradiate the fluid. As a result, ultraviolet irradiation of the fluid to be treated can be carried out efficiently.

[0008] Furthermore, in the fluid processing apparatus according to the present invention, the flow path may be configured to consist of a flow path pipe inserted into the inner pipe.

[0009] With this configuration, the flow channel is constructed as a separate unit from the inner tube, so the fluid being processed does not come into contact with the inner tube, and the inner tube is less susceptible to pressure and thermal changes from the fluid being processed.

[0010] Furthermore, in the fluid processing apparatus according to the present invention, the flow path may extend in the direction of the axial direction of the inner pipe, and the fluid control unit may be inserted into the flow path and occupy 1 / 2 or more of the cross-sectional area of ​​the flow path when viewed in the direction of the axial direction of the pipe.

[0011] In this configuration, the fluid to be processed in the flow path flows around the fluid control unit, and therefore flows close to the inner circumferential wall of the inner pipe.

[0012] Furthermore, in the fluid processing apparatus according to the present invention, the fluid control unit may be provided in a region of the flow path that faces the discharge space, in a region of 20% or more in the direction of the pipe axis.

[0013] This configuration allows the fluid control unit to function effectively.

[0014] Also, in the fluid treatment apparatus according to the present invention, the fluid control unit may be a baffle plate intermittently provided in the pipe axis direction.

[0015] According to this configuration, since the fluid to be treated easily stays in the flow path due to the baffle plate, the ultraviolet irradiation of the fluid to be treated can be efficiently advanced.

[0016] Also, in the fluid treatment apparatus according to the present invention, the inner pipe and the flow path pipe may be arranged so as to have a gap.

[0017] According to this configuration, even when the inner pipe expands thermally or the flow path pipe expands due to water pressure, the load on both can be alleviated.

[0018] Also, in the fluid treatment apparatus according to the present invention, the outer pipe may be covered with an ultraviolet reflection part.

[0019] According to this configuration, the ultraviolet rays radiated outward from the outer pipe can be reflected to the inner pipe side, and the utilization efficiency of ultraviolet rays can be increased.

[0020] Also, in the fluid treatment apparatus according to the present invention, the first electrode may be provided on the outer pipe, and the second electrode may be provided on the inner pipe, a high voltage may be applied to the second electrode, and a low voltage may be applied to the first electrode.

[0021] Since a high voltage is applied to the second electrode, it becomes hotter than the first electrode. However, since the heat of the second electrode is taken away by the fluid to be treated passing through the opposing flow path, the overall temperature is leveled, and the effect of reducing the stress due to thermal expansion generated in the inner pipe can be obtained.

[0022] Also, in the fluid treatment apparatus according to the present invention, the fluid control unit may be configured such that a flow formation part for maintaining the flow of the fluid to be treated is formed at an end in the pipe axis direction.

[0023] According to this configuration, the fluid to be processed can be continuously processed.

[0024] Further, in the fluid processing apparatus according to the present invention, the flow path tube may be longer than the inner tube and protrude from both ends in the tube axis direction of the inner tube.

[0025] According to this configuration, the utilization efficiency of the ultraviolet rays radiated from the inner tube can be increased. Also, it is easy to fix the flow path tube at both ends of the inner tube.

[0026] Further, in the fluid processing apparatus according to the present invention, the flow path tube may be provided with fluid introduction parts and fluid discharge parts at both ends respectively, and the flow path diameters of the fluid introduction parts and the fluid discharge parts may be smaller than the flow path diameter of the flow path tube.

[0027] According to this configuration, even when a fluid control part that can move in the tube axis direction is provided in the flow path tube, the movement of the fluid control part can be restricted by the ends of the fluid introduction part and the fluid discharge part.

[0028] [[ID=2​​​​​​​​​​​​​​​​​

[0032] [Figure 1A] schematic cross-sectional view of the fluid processing apparatus according to the first embodiment. [Figure 1B] Perspective view of the fluid control unit and flow path pipe. [Figure 2] Perspective view of the fluid control unit and flow path pipe according to the second embodiment. [Figure 3] Perspective view of the fluid control unit and flow path pipe according to the third embodiment [Figure 4] Perspective view of the fluid control unit and flow path pipe according to the fourth embodiment. [Figure 5] Perspective view of the fluid control unit and flow path pipe according to the fifth embodiment. [Figure 6] Perspective view of the fluid control unit and flow path pipe according to the sixth embodiment. [Figure 7] Perspective view of the fluid control unit and flow path pipe according to the seventh embodiment. [Figure 8] Perspective view of the fluid control unit and flow path pipe according to the eighth embodiment. [Figure 9] Perspective view of the fluid control unit and flow path pipe according to the ninth embodiment. [Figure 10] Schematic cross-sectional view of the fluid processing apparatus according to the tenth embodiment. [Figure 11] Schematic cross-sectional view of the fluid processing apparatus according to the eleventh embodiment. [Modes for carrying out the invention]

[0033] Embodiments of the fluid processing apparatus according to the present invention will be described with reference to the drawings. Note that the following drawings are schematic illustrations, and the dimensional ratios shown in the drawings do not necessarily correspond to the actual dimensional ratios, nor do the dimensional ratios necessarily correspond between the drawings.

[0034] [First Embodiment] Figure 1A is a schematic cross-sectional view of a fluid processing apparatus according to the first embodiment. The fluid processing apparatus 1 comprises an inner tube 11 and an outer tube 12 provided so as to surround the inner tube 11. The fluid processing apparatus 1 also comprises a flow channel pipe 13 inserted inside the inner tube 11. The fluid to be processed flows through the flow channel pipe 13. The inner tube 11, the outer tube 12, and the flow channel pipe 13 are all made of quartz glass.

[0035] A predetermined discharge gas is filled into the discharge space 10 sandwiched between the inner tube 11 and the outer tube 12. In this embodiment, xenon gas is filled as the discharge gas in the closed space between the inner tube 11 and the outer tube 12, and the discharge space is formed accordingly.

[0036] A first electrode 21 is provided on the outer circumferential wall of the outer tube 12. A second electrode 22 is provided on the inner circumferential wall of the inner tube 11. The first electrode 21 is connected to the low-voltage side of the power supply, and the second electrode 22 is connected to the high-voltage side of the power supply. The second electrode 22 has a smaller contact area with the discharge space 10 than the first electrode 21 and is connected to the high-voltage side of the power supply, so it becomes hotter than the first electrode 21. However, the second electrode 22 loses heat due to the fluid passing through the opposing flow channel 13, thus leveling the overall temperature and reducing the stress caused by thermal expansion in the inner tube 11. This makes it possible to suppress the occurrence of thermal distortion in the inner tube 11.

[0037] When a predetermined voltage is applied between the first electrode 21 and the second electrode 22, a voltage is applied to the discharge space 10, and a discharge plasma is generated. The discharge gas used is one that emits vacuum ultraviolet light with a wavelength of 200 nm or less when discharged when a voltage is applied. For example, when Xe gas is used as the discharge gas, the Xe atoms in the discharge space 10 are excited by this plasma, and excimer-excited molecules Xe2 are generated. * This excited molecule Xe2 is generated. * It emits excimer light when it returns to its ground state. The Xe excimer light exhibits a spectrum with a peak at 172 nm.

[0038] The inner tube 11 and the outer tube 12 are cylindrical tubes. Preferably, the outer diameter of the inner tube 11 is in a ratio of 0.5 or more to the inner diameter of the outer tube 12. This allows the thickness of the discharge space 10 to be reduced, which increases the efficiency of ultraviolet light intake into the inner tube 11 and allows ultraviolet light to be efficiently irradiated onto the flow channel tube 13.

[0039] The outer tube 12 is covered with an ultraviolet reflective layer. This reflects ultraviolet rays emitted outward from the outer tube 12 towards the inner tube 11, thereby increasing the efficiency of ultraviolet utilization. An example of an ultraviolet reflective layer is a reflective coating formed on the outer circumferential wall of the outer tube 12. However, the first electrode 21 may also function as an ultraviolet reflective layer.

[0040] Furthermore, it is preferable that the outer surface of the outer tube 12 is provided with an attenuation section 14 that attenuates ozone-generating light (ultraviolet light of 200 nm or less). Since ozone is generated by ozone-generating light and oxygen, the attenuation section 14 is not particularly limited as long as it has light-shielding properties that prevent ozone-generating light from coming into contact with the outside air. Examples of the attenuation section 14 include those in which alumina and silica are coated on the outer surface of the outer tube 12.

[0041] The first electrode 21 is made of a metal tape or the like. As described above, the first electrode 21 is preferably made of a material that reflects ultraviolet light in order to have the function of an ultraviolet light reflecting part.

[0042] The second electrode 22 is made of a shape and material that transmits ultraviolet light or has a small light-shielding area. The second electrode 22 is made of a metal having a shape such as a mesh, net, or coil.

[0043] In this embodiment, the flow channel 13 is not integrated with the inner tube 11 but is a separate component. Because the flow channel 13 is configured as a separate part from the inner tube 11, the fluid to be processed does not come into contact with the inner tube 11, and the inner tube 11 is less susceptible to the effects of pressure and thermal changes from the fluid to be processed. In addition, the inner tube 11 is not supercooled by the fluid to be processed, and the effects of thermal distortion are reduced. Furthermore, because the light-emitting part (discharge space 10) and the flow part (flow channel 13) are separated, even if the light-emitting part is damaged, the fluid to be processed will not leak to the outside.

[0044] In conventional designs where the inner tube 11 also serves as the flow channel, it was necessary to use thick-walled quartz glass to increase the durability of the inner tube 11. However, while increased glass thickness improves durability, it also reduces the transmittance of ultraviolet light. By making the flow channel 13 a separate component from the inner tube 11, the glass thickness of the inner tube 11 can be reduced, thus avoiding this problem.

[0045] A gap is provided between the flow channel pipe 13 and the inner pipe 11. This allows for the reduction of stress on both even if the inner pipe 11 expands due to thermal expansion or the flow channel pipe 13 expands due to water pressure. A second electrode 22 is positioned in the gap between the flow channel pipe 13 and the inner pipe 11.

[0046] The flow channel tube 13 is longer than the inner tube 11. Furthermore, the flow channel tube 13 is positioned to protrude from both ends of the inner tube 11. This increases the efficiency of utilizing the ultraviolet light emitted from the inner tube 11. Additionally, it makes it easier to fix the flow channel tube 13 at both ends of the inner tube 11.

[0047] The flow channel pipe 13 is equipped with a fluid inlet 131 and a fluid outlet 132 at both ends. The fluid inlet 131 and the fluid outlet 132 are both cylindrical pipes. The pipe diameter (flow channel diameter) of the fluid inlet 131 and the fluid outlet 132 is smaller than the pipe diameter (flow channel diameter) of the flow channel pipe 13. A joint (not shown) is connected to the fluid inlet 131 and the fluid outlet 132. The flow channel pipe 13 is equipped with a stepped section 133 connected to the fluid inlet 131 and the fluid outlet 132.

[0048] The fluid inlet 131 and fluid outlet 132 each have recesses 131a and 132a formed in their outer circumferential walls. The recessed recesses 131a and 132a are recessed in a direction perpendicular to the axial direction of the flow channel pipe 13. Recess 131a is formed along the circumferential direction of the fluid inlet 131. Similarly, recess 132a is formed along the circumferential direction of the fluid outlet 132. This prevents the joint from coming loose from the fluid inlet 131 and fluid outlet 132 due to fluid pressure.

[0049] A fluid control unit 30 is provided inside the flow channel pipe 13, along the axial direction of the flow channel pipe 13. Figure 1B is a perspective view of the fluid control unit 30 and the flow channel pipe 13. Note that in Figure 1B, the flow channel pipe 13 is shown as a cross-section along its axial direction.

[0050] The fluid control unit 30 has the function of guiding the fluid to be treated so that it approaches the inner circumferential wall of the inner pipe 11. By circulating the fluid to be treated near the inner circumferential wall of the inner pipe 11, that is, near the inner circumferential wall of the flow channel pipe 13, ultraviolet light from the inner pipe 11 is more likely to irradiate the fluid to be treated. In particular, when ultraviolet light with a wavelength of 200 nm or less, and ultraviolet light with a main wavelength of 172 nm is irradiated, the transmittance is extremely low, so in order to decompose and remove organic matter in the fluid to be treated, it is important to shorten the distance of the ultraviolet rays within the fluid.

[0051] A main shaft 31 is inserted through the flow channel 13, extending along the axial direction of the flow channel 13. The main shaft 31 is positioned substantially coaxially with the flow channel 13. As a result, the fluid to be processed in the flow channel 13 flows around the main shaft 31, and therefore flows close to the inner circumferential wall of the flow channel 13. In other words, in the first embodiment, the main shaft 31 corresponds to the fluid control unit 30. The main shaft 31 is not fixed to the flow channel 13 and is movable within the flow channel 13.

[0052] The fluid control unit 30 preferably occupies 1 / 2 or more of the cross-sectional area of ​​the flow channel pipe 13 when viewed in the direction of the pipe axis, and more preferably occupies 2 / 3 or more. In the first embodiment, the outer diameter of the main shaft 31 is 9 mm, and the inner diameter of the flow channel pipe 13 is 11 mm.

[0053] The fluid control unit 30 is preferably provided in an area of ​​the flow channel 13 facing the discharge space 10 that accounts for 20% or more of the area in the direction of the tube axis, more preferably in an area of ​​40% or more, and particularly preferably in an area of ​​60% or more. By providing the fluid control unit 30 in an area of ​​the flow channel 13 facing the discharge space 10 that accounts for 20% or more of the area in the direction of the tube axis, the function of the fluid control unit 30 is effectively performed. The first embodiment is an example in which the fluid control unit 30 (main shaft 31) is provided in an area of ​​the flow channel 13 facing the discharge space 10 that accounts for approximately 100% of the area in the direction of the tube axis.

[0054] Furthermore, the main shaft 31 has a plurality of projections 310 that protrude radially from the outer circumferential surface of the main shaft 31. The projections 310 are ridges that extend along the pipe axis direction. Multiple projections 310 are provided at the same position in the pipe axis direction. In this embodiment, four projections 310 are provided at equal intervals in the circumferential direction of the main shaft 31. In addition, three projections 310 are provided in the pipe axis direction. Because the main shaft 31 has multiple projections 310, even when the projections 310 are in contact with the inner circumferential wall of the flow channel pipe 13, a gap can be formed between the outer circumferential surface of the main shaft 31 and the inner circumferential wall of the flow channel pipe 13.

[0055] The main shaft 31 has a flow groove 32 (an example of a flow-forming part of the present invention) formed at its end in the direction of the pipe axis. The flow groove 32 extends in a direction perpendicular to the direction of the pipe axis and opens to the outer circumferential surface of the main shaft 31. As a result, even when the end face of the main shaft 31 comes into contact with the stepped portion 133, the outer circumferential surface of the main shaft 31 and the end face remain in communication. Consequently, the fluid introduction portion 131 and the fluid discharge portion 132 are always in communication with the gap between the outer circumferential surface of the main shaft 31 and the inner circumferential wall of the flow channel pipe 13 via the flow groove 32, thus maintaining the flow of the fluid to be processed.

[0056] [Second Embodiment] The second embodiment is the same as the first embodiment except for the configuration of the fluid control unit 30, so a detailed explanation will be omitted. Figure 2 is a perspective view of the fluid control unit 30 and the flow path pipe 13 according to the second embodiment.

[0057] A main shaft 31 extending along the axial direction of the flow channel 13 is inserted through the flow channel 13, and the main shaft 31 is equipped with a plurality of baffle plates 34 intermittently provided in the axial direction of the flow channel 13. In the second embodiment, five baffle plates 34 are supported at equal intervals relative to the main shaft 31.

[0058] The main shaft 31 is positioned substantially coaxially with the flow channel pipe 13. The main shaft 31 has axial ends 31a and a central part 31b that is narrower than the ends 31a. The baffle plate 34 is supported by the central part 31b. The ends 31a have a plurality of radially projecting protrusions 310. Flow grooves 32 are also formed in the ends 31a.

[0059] The baffle plate 34 is disc-shaped, and its outer diameter is smaller than the inner diameter of the flow channel pipe 13. Therefore, the fluid to be processed can flow through the gap formed between the outer surface of the baffle plate 34 and the inner wall of the flow channel pipe 13. In other words, in the second embodiment, the baffle plate 34 corresponds to the fluid control unit 30.

[0060] Furthermore, the baffle plate 34 generates turbulence in the fluid being treated flowing through the flow channel 13. This makes it easier to retain the fluid being treated within the flow channel 13.

[0061] The fluid control unit 30 preferably occupies more than half of the cross-sectional area of ​​the flow channel pipe 13 when viewed in the direction of the pipe axis, and more preferably occupies more than two-thirds. In the second embodiment, the outer diameter of the baffle plate 34 is 9 mm, and the inner diameter of the flow channel pipe 13 is 11 mm.

[0062] The outer diameter of the baffle plate 34 is approximately the same as the outer diameter of both ends 31a. That is, both ends 31a of the main shaft 31 can also function as a fluid control unit 30. Furthermore, the baffle plate 34 may have multiple radially projecting protrusions 310, similar to both ends 31a of the main shaft 31.

[0063] The fluid control unit 30 is preferably provided in an area of ​​the flow channel 13 facing the discharge space 10 that accounts for 20% or more of the area in the direction of the tube axis, more preferably in an area of ​​40% or more, and particularly preferably in an area of ​​60% or more. By providing the fluid control unit 30 in an area of ​​the flow channel 13 facing the discharge space 10 that accounts for 20% or more of the area in the direction of the tube axis, the function of the fluid control unit 30 is effectively performed. Specifically, in the second embodiment, it is preferable that the sum of the length (thickness) of the multiple baffle plates 34 in the direction of the tube axis and the length (thickness) of both ends 31a of the main shaft 31 is 20% or more of the length in the direction of the tube axis in the area of ​​the flow channel 13 facing the discharge space 10. In the second embodiment, the area of ​​the fluid control unit 30 can be easily adjusted by changing the thickness and number of baffle plates 34.

[0064] Furthermore, the main shaft 31, which is arranged substantially coaxially with the flow channel 13, is provided with a plurality of fluid control units 30 that occupy more than half of the cross-sectional area of ​​the flow channel 13. Preferably, the fluid control units 30 are provided in an area of ​​20% or more of the longitudinal direction of the main shaft 31, more preferably in an area of ​​40% or more, and particularly preferably in an area of ​​60% or more.

[0065] [Third Embodiment] The third embodiment is the same as the first embodiment except for the configuration of the fluid control unit 30, so a detailed explanation will be omitted. Figure 3 is a perspective view of the fluid control unit 30 and the flow path pipe 13 according to the third embodiment.

[0066] In the third embodiment, the projection 310a provided at the axial end of the main shaft 31 extends outward beyond the end face of the main shaft 31. As a result, even when the end face of the main shaft 31 approaches the stepped portion 133, the projection 310a contacts the stepped portion 133, so the outer surface and end face of the main shaft 31 are in communication. In other words, the projection 310a in the third embodiment functions as a flow-forming portion.

[0067] [Fourth Embodiment] The fourth embodiment is the same as the first embodiment except for the configuration of the fluid control unit 30, so a detailed explanation will be omitted. Figure 4 is a perspective view of the fluid control unit 30 and the flow path pipe 13 according to the fourth embodiment.

[0068] In the fourth embodiment, the projection 310b provided at the axial end of the main shaft 31 is formed continuously in the circumferential direction of the main shaft 31 and is ring-shaped.

[0069] A first hole 35 is formed near the end of the main shaft 31, penetrating in a direction perpendicular to the pipe axis direction. Furthermore, a second hole 36 is formed at the center of the end face of the main shaft 31, extending in the pipe axis direction. The second hole 36 communicates with the first hole 35. As a result, even when the end face of the main shaft 31 abuts against the stepped portion 133, the outer surface of the main shaft 31 and the end face remain in communication. In other words, the first hole 35 and the second hole 36 in the fourth embodiment function as flow-forming portions.

[0070] [Fifth Embodiment] The fifth embodiment is the same as the fourth embodiment except for the configuration of the flow channel 13, so a detailed explanation will be omitted. Figure 5 is a perspective view of the fluid control unit 30 and the flow channel 13 according to the fifth embodiment.

[0071] In the fifth embodiment, unlike the fourth embodiment, the flow channel pipe 13 does not have a fluid inlet 131 and a fluid outlet 132 at both ends, which have a smaller diameter than the flow channel pipe 13. Therefore, the flow channel pipe 13 also does not have a stepped portion 133 connected to the fluid inlet 131 and the fluid outlet 132. In the fourth embodiment, the movement of the main shaft 31 in the direction of the pipe axis is restricted by the stepped portion 133, but in the fifth embodiment, it is restricted by a protrusion 134 formed on the inner circumferential wall of the flow channel pipe 13. The protrusion 134 is formed by heating the flow channel pipe 13 and creating a recess from the outside.

[0072] [Sixth Embodiment] The sixth embodiment is the same as the first embodiment except for the configuration of the fluid control unit 30, so a detailed explanation will be omitted. Figure 6 is a perspective view of the fluid control unit 30 and the flow path pipe 13 according to the sixth embodiment.

[0073] In the sixth embodiment, the spindle 31 has coils 37 positioned at both ends of the spindle 31. The inner diameter of the coils 37 is larger than the outer diameter of the spindle 31, and the outer diameter of the coils 37 is smaller than the inner diameter of the flow channel 13. As a result, the coils 37 function as spacers to form a gap between the spindle 31 and the inner circumferential wall of the flow channel 13. In addition, the coils 37 are positioned to protrude beyond both end faces of the spindle 31. As a result, even when the end face of the spindle 31 approaches the stepped portion 133, the coils 37 come into contact with the stepped portion 133, so that the outer circumferential surface and the end face of the spindle 31 are in communication. In other words, the coils 37 function as flow-forming portions.

[0074] [Seventh Embodiment] The seventh embodiment is the same as the first embodiment except for the configuration of the fluid control unit 30, so a detailed explanation will be omitted. Figure 7 is a perspective view of the fluid control unit 30 and the flow path pipe 13 according to the seventh embodiment.

[0075] The main shaft 31 has a spiral projection 311 extending from its outer circumferential surface. This allows for an increased path length for the fluid flowing between the outer circumferential surface of the main shaft 31 and the inner circumferential wall of the flow channel pipe 13.

[0076] [Eighth Embodiment] The eighth embodiment is the same as the seventh embodiment except for the configuration of the fluid control unit 30, so a detailed explanation will be omitted. Figure 8 is a perspective view of the fluid control unit 30 and the flow path pipe 13 according to the eighth embodiment.

[0077] The main shaft 31 has spiral projections 312 and 313 extending from its outer circumferential surface. This allows for a longer path length for the fluid flowing between the outer circumferential surface of the main shaft 31 and the inner circumferential wall of the flow channel pipe 13.

[0078] Furthermore, the spiral directions of the protrusions 312 and 313 are opposite to each other. As a result, when the fluid to be processed flows between the outer surface of the main shaft 31 and the inner wall of the flow channel 13, the rotational force applied to the main shaft 31 due to the flow along the protrusion 312 and the rotational force applied to the main shaft 31 due to the flow along the protrusion 313 cancel each other out, thereby preventing the fluid control unit 30 from rotating.

[0079] [Ninth Embodiment] The ninth embodiment is the same as the first embodiment except for the configuration of the fluid control unit 30, so a detailed explanation will be omitted. Figure 9 is a perspective view of the fluid control unit 30 and the flow path pipe 13 according to the ninth embodiment.

[0080] Coils 38 are connected to both ends of the main shaft 31. In the example shown in Figure 9, the coils 38 are integrally formed from the same wire as the main shaft 31. In addition, a plurality of baffle plates 39 are supported on the main shaft 31. The baffle plates 39 are welded to the main shaft 31, for example. The baffle plates 39 may have a plurality of radially projecting protrusions 390.

[0081] The ninth embodiment is an example in which, because the baffle plate 39 is thin, the total length of the fluid control unit 30 (baffle plate 39) in the axial direction is less than 20% of the length in the axial direction of the flow channel 13 in the region facing the discharge space 10. However, because the baffle plate 39 makes it easier for the fluid to be treated to remain in the flow channel 13, ultraviolet irradiation of the fluid to be treated can be advanced efficiently.

[0082] [Tenth Embodiment] The tenth embodiment is the same as the first embodiment except for the configuration of the flow channel pipe 13 and the fluid control unit 30, so a detailed explanation will be omitted. Figure 10 is a schematic cross-sectional view of the fluid processing apparatus 1 according to the tenth embodiment.

[0083] In the tenth embodiment, the fluid control unit 30 is integrally formed with the flow channel pipe 13. The flow channel pipe 13 is a cylindrical pipe with one end 13a closed and the other end 13b open. A fluid outlet 132 is connected to the other end 13b of the flow channel pipe 13. A fluid introduction 135 is also connected near the other end 13b of the flow channel pipe 13.

[0084] Inside the main flow channel 13, a secondary flow channel 136 is arranged, with both ends open. The secondary flow channel 136 is joined to the other end 13b of the main flow channel 13. The diameter of the secondary flow channel 136 is equal to the diameter of the fluid outlet section 132.

[0085] The fluid to be treated, introduced from the fluid introduction section 135, flows through the gap between the main flow pipe 13 and the sub-flow pipe 136 towards one end 13a of the main flow pipe 13. As a result, the fluid to be treated in the main flow pipe 13 flows close to the inner circumferential wall of the main flow pipe 13. In other words, the sub-flow pipe 136 functions as a fluid control unit 30 that guides the fluid to be treated closer to the inner circumferential wall of the main pipe 11. The fluid to be treated, once it reaches one end 13a of the main flow pipe 13, is discharged to the outside through the sub-flow pipe 136 and out of the fluid outlet section 132.

[0086] [Eleventh Embodiment] The eleventh embodiment is the same as the first embodiment except for the configuration of the flow channel pipe 13 and the fluid control unit 30, so a detailed explanation will be omitted. Figure 11 is a schematic cross-sectional view of the fluid processing apparatus 1 according to the eleventh embodiment.

[0087] In the eleventh embodiment, a sub-flow channel pipe 137 is arranged inside the flow channel pipe 13, with one end 137a closed and the other end 137b open. The other end 137b of the sub-flow channel pipe 137 is joined to the other end 13b of the flow channel pipe 13. A through hole 137c is formed in the sub-flow channel pipe 137 near the other end 137b.

[0088] The fluid to be treated, introduced from the fluid introduction section 131, flows through the gap between the main flow pipe 13 and the sub-flow pipe 137 towards the other end 13b of the main flow pipe 13. As a result, the fluid to be treated in the main flow pipe 13 flows close to the inner circumferential wall of the main flow pipe 13. In other words, the sub-flow pipe 137 functions as a fluid control unit 30 that guides the fluid to be treated closer to the inner circumferential wall of the main pipe 11. The fluid to be treated, having reached the other end 13b of the main flow pipe 13, flows into the sub-flow pipe 137 through the through hole 137c and is discharged to the outside from the fluid outlet section 132.

[0089] Although embodiments of the present invention have been described above with reference to the drawings, it should be understood that the specific configuration is not limited to these embodiments. The scope of the present invention is indicated not only by the above-described embodiments but also by the claims, and further includes all modifications within the meaning and scope of equivalence to the claims.

[0090] The structures used in each of the above embodiments can be adopted in any other embodiment. The specific configuration of each part is not limited to the embodiments described above, and various modifications are possible without departing from the spirit of the present invention. Furthermore, one or more of the configurations and methods, etc., related to the various modified examples described below can be arbitrarily selected and adopted in the configurations and methods, etc., of the embodiments described above.

[0091] In the above embodiment, the flow channel 13 is a separate component from the inner tube 11, but the embodiment is not limited to this. For example, the inner tube 11 may also serve as the flow channel 13, that is, the fluid to be processed may be directly circulated inside the inner tube 11. In this case, the second electrode 22 is provided on the outer circumferential wall of the inner tube 11. [Explanation of symbols]

[0092] 1: Fluid processing equipment 10:Discharge space 11: Inner tube 12:Outer tube 13: Flow channel 14: Damping section 21:First electrode 22:Second electrode 30: Fluid Control Unit 31: Spindle 32: Distribution groove 34: Baffle plate 35: First hole 36:Second hole 37: Coil 38: Coil 39: Baffle board 131: Fluid introduction section 131a: recess 132: Fluid outlet 132a: Recess 133: Stepped section 134: Convex part 135: Fluid introduction section 136: Sub-channel pipe 137: Sub-channel pipe 310: Protrusion 310a: protrusion 310b: Protrusion 311: Projection 312: protrusion 313: Projection 390: Protrusion

Claims

1. Inner tube and An outer tube is provided so as to surround the inner tube, A discharge space is formed by filling the space between the inner tube and the outer tube with discharge gas, A first electrode and a second electrode for applying a voltage to the discharge space, The inner tube is provided with a flow path through which the fluid to be processed flows, The flow path includes a fluid control unit that guides the fluid to be processed so as to approach the inner circumferential wall of the inner tube. The aforementioned flow path is composed of a flow path tube inserted into the inner tube, The inner tube and the flow channel tube are arranged to have a gap between them. A fluid processing apparatus in which the first electrode is provided in the outer tube and the second electrode is provided in the inner tube, and a high voltage is applied to the second electrode and a low voltage is applied to the first electrode.

2. The fluid apparatus according to claim 1, wherein the flow path extends in the direction of the inner pipe axis, and the fluid control unit is inserted into the flow path and occupies 1 / 2 or more of the cross-sectional area of ​​the flow path when viewed in the direction of the pipe axis.

3. The fluid control unit is provided in a region of the flow path that faces the discharge space, comprising 20% ​​or more of the region in the direction of the pipe axis, according to claim 2.

4. The fluid control unit is a baffle plate intermittently provided in the axial direction of the pipe, as described in claim 2.

5. The fluid apparatus according to claim 1, wherein the outer tube is covered with an ultraviolet reflective portion.

6. The fluid processing apparatus according to claim 2, wherein the fluid control unit has a flow-forming section formed at the end of the pipe in the axial direction to maintain the flow of the fluid to be processed.

7. The fluid apparatus according to claim 1, wherein the flow channel pipe is longer than the inner pipe and protrudes from both ends of the inner pipe in the axial direction.

8. The aforementioned flow channel pipe is equipped with a fluid introduction section and a fluid discharge section at both ends, The fluid apparatus according to claim 1, wherein the flow path diameters of the fluid introduction section and the fluid discharge section are smaller than the flow path diameter of the flow pipe.

9. The fluid apparatus according to claim 8, wherein at least one of the fluid introduction section and the fluid discharge section has a recess formed in a direction perpendicular to the axial direction of the flow channel pipe.

10. The fluid apparatus according to claim 1, wherein the outer surface of the outer tube is provided with an attenuation section for attenuating ozone-generating light.

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