X-ray detector for X-ray diffraction analyzer

Abstract

An X-ray detector for an X-ray diffraction analysis apparatus includes a sensor, a readout circuit, a processor, and a display output unit configured to communicate a display signal to a display device. The sensor detects X-ray photons by converting X-ray photons incident on the sensor into a sensor output signal. The readout circuit receives the sensor output signal from the sensor and counts the sensor output signal to determine the number of X-ray photon counts. The processor is configured to calculate an X-ray intensity value using the number of X-ray photon counts and generate a display signal for displaying an image representing the X-ray intensity value. The display output unit is configured to communicate the display signal to a display device for displaying the X-ray intensity value.

Description

Technical Field

[0001] The present invention relates to an X-ray detector for an X-ray diffractometer for analyzing materials, an X-ray diffractometer, and a method of using an X-ray diffractometer. In particular, the present invention relates to an X-ray detector for displaying X-ray diffraction information.

Background Art

[0002] Some X-ray diffractometers include a housing in which an X-ray source, a sample stage, a goniometer, and an X-ray detector are housed. The housing is designed to protect the user from X-rays during operation, and this protection is achieved by preventing X-rays scattered by the sample or the X-ray diffractometer from being emitted from the housing. Usually, when an X-ray diffractometer is manufactured, various components of the X-ray analyzer are assembled into the housing by those skilled in the art. Thereby, it is ensured that the components of the X-ray analyzer are properly aligned with each other. It is particularly important to ensure proper alignment between the X-ray detector and the X-ray source.

[0003] The X-ray analyzer may include other components such as a collimator or a filter. These components may be attached to an actuator for moving the components in and out of the X-ray beam.

[0004] The components of the X-ray diffraction analyzer are connected to a central system controller via wired connections. The system controller controls the components and processes the signals output by the X-ray detectors. The primary system controller controls each component, including the secondary X-ray detector, in one direction. The system controller processes the signals from the X-ray detectors to acquire measurement data and stores this data. The system controller also communicates the measurement data to an external computer (e.g., a PC). In other words, the system controller communicates the measurement data to a computer located outside the enclosure. The user relies on X-ray analysis software installed on the computer to display the measurement data and interpret it as needed. The X-ray analysis software can analyze the measurement data (for example, by identifying sets of peaks corresponding to crystalline phases) and display the analysis results to the user.

[0005] If the system is not functioning correctly, it is desirable to be able to quickly and reliably identify the reason for the system malfunction. Potential causes of errors include malfunctions in one or more components of the X-ray analyzer (e.g., X-ray source, X-ray detector, or system controller), faulty connections between any of the components and the system controller, or faulty connections between the system controller and an external computer.

[0006] It would also be desirable to provide an X-ray analyzer that allows for easy alignment. [Overview of the Initiative] [Means for solving the problem]

[0007] According to one aspect of the present invention, an X-ray detector for an X-ray diffraction analyzer is provided. This X-ray detector comprises a sensor that converts X-ray photons incident on the sensor into a sensor output signal; a readout circuit configured to determine the number of X-ray photons by counting the sensor output signal; and a processor configured to determine an X-ray intensity value using the number of X-ray photons and to generate a display signal for displaying an image representing the X-ray intensity value. The X-ray detector further comprises a display output unit, which is configured to communicate a display signal to a display device for displaying an image representing the X-ray intensity value.

[0008] The X-ray intensity value is determined by the X-ray detector, and a display signal is generated by the X-ray detector, which can be output directly from the X-ray detector to a display device. The X-ray detector may also have a display device. Alternatively, the X-ray detector may not have a display device. This allows the user to directly determine whether the X-ray detector is functioning correctly (the measurement data output by the X-ray detector does not go through a separate system controller). In addition, it is possible to obtain feedback of the measurement value very quickly. This can help the operator to easily align the X-ray detector with other components of the X-ray analyzer, such as the X-ray source. When a photon enters the sensor, the sensor generates a current, which produces a pulse (i.e., a sensor output signal). The readout circuit may have a digital counter for counting the pulses. The processor may determine the X-ray intensity value (e.g., counts per second) based on the count output by the readout circuit. The image representing the X-ray intensity value may represent the magnitude of the X-ray intensity value as a graphic image rather than text. Alternatively, the image may be text.

[0009] The X-ray detector may further include an environmental sensor configured to measure environmental parameters and a non-volatile memory. In this case, the X-ray detector is configured to store a plurality of measurements obtained by the environmental sensor as environmental data, and the processor is configured to generate a display signal for displaying the environmental data.

[0010] An environmental sensor may be configured to measure a single environmental parameter, or it may be configured to measure multiple environmental parameters. An X-ray detector may comprise multiple environmental sensors, each measuring a different environmental parameter. In an alternative embodiment, the X-ray detector may comprise a first environmental sensor configured to measure a first environmental parameter, and a second environmental sensor configured to measure one or more additional environmental parameters. Environmental factors can affect the performance and accuracy of the detector. In some embodiments, the measurements obtained by the environmental sensors are stored in non-volatile memory so that the environmental data can be accessed even after the power supply to the X-ray detector is switched off. In this way, it is possible to store a history of environmental data in the X-ray detector. Furthermore, it is possible for the user to access these measurements directly from the X-ray detector. The environmental parameters may be temperature, humidity, or atmospheric pressure.

[0011] The environmental sensor may have a temperature sensor for measuring the temperature of the X-ray detector. The temperature sensor may be configured to measure the temperature when the X-ray analysis measurement is performed. The X-ray detector may be configured to measure and record the temperature over a long period of time (e.g., one month or one year). The X-ray detector may have multiple temperature sensors. In some embodiments, the X-ray detector may have at least one of the following: a temperature sensor, a humidity sensor, and an atmospheric pressure sensor.

[0012] The X-ray detector may further include a display device configured to display an image representing X-ray intensity values. Preferably, the image is a graphic image. The display output unit of the X-ray detector communicates a display signal generated by the processor to the display device. As a result, the display device displays an image representing the X-ray intensity values. The display device can be connected to the display output unit and can receive a display signal from the processor to display an image representing the X-ray intensity values. The display device may also be configured to display environmental data. The display device may be configured to display graphic information, alphanumeric information, or both. If the display device is configured to display a graphic image, it preferably has at least (128 × 64) pixels.

[0013] The display device may have a touchscreen, a liquid crystal display, or both. The touchscreen may be configured to control the display device, for example, by turning the display device on / off or by controlling the content displayed on the display device. For example, it may allow the user to scroll between multiple display screens showing different content. If provided, the liquid crystal display (LCD) device has an array of pixels. The size of the pixel array is at least 5 cm². 2 This may also be the case. In a preferred embodiment, the display device has at least (128 × 64) pixels.

[0014] The X-ray detector may include a housing that accommodates the sensor, a readout circuit, and a processor, and in this case, the display device is mounted on the housing. In some embodiments, the display device may be integrated into the housing. In other embodiments, the display device may be detachable from the housing. The sensor, readout circuit, and processor may be housed within the housing, and the display device may be mounted outside the housing.

[0015] The sensor may have an array of multiple detection cells and may be configured to detect X-ray photons in a manner that senses position. A one-dimensional array of detection cells senses position in the direction of the array. A two-dimensional array senses position in the two directions that define the array.

[0016] The processor may be configured to determine multiple X-ray intensity values ​​and output an image representing the relative magnitudes of the multiple X-ray intensity values, with each of the multiple X-ray intensity values ​​corresponding to a different detection cell.

[0017] The X-ray detector may be a microstrip detector having multiple detection cells, each of which has a strip electrode. Relative magnitude refers to the relative magnitude of the X-ray intensity value compared to the values ​​of other detection cells in the image. The image may be an image of a subset of the detection cells. For example, the image may be an image of the detection cells in the central region of the sensor. An image of the central region of the detection cells may assist in performing tilt calibration of the X-ray detector.

[0018] The processor may be configured to determine the total count of X-ray photons received by the sensor. For example, the processor may be configured to sum the counts of X-ray photons output by a readout circuit to determine the total count of X-ray photons since the X-ray detector was first used. The processor may also be configured to help the user determine the remaining lifespan of the sensor. The processor may be configured to output an image representing this information, or, instead, the processor may be configured to determine the remaining sensor lifespan based on the calculated total X-ray count value and output an image representing the remaining sensor lifespan.

[0019] The X-ray detector may be a microstrip detector having multiple detection cells, each of which has a corresponding strip electrode.

[0020] The X-ray detector may also be a solid-state detector.

[0021] The sensor may have a sensing element that may include a semiconductor. When X-ray photons are incident on the sensing element, the X-ray photons generate a plurality of charge carriers. When an electric field is applied to the sensor, the charge carriers are driven towards the electrodes.

[0022] The sensing element may include highly doped silicon. The sensor may be a silicon microstrip detector.

[0023] In one embodiment, there is provided an X-ray analyzer including a housing, an X-ray detector as described above, and a goniometer for supporting an X-ray source and the X-ray detector, wherein the goniometer and the X-ray detector are disposed inside the housing.

[0024] When the X-ray detector of the X-ray analyzer includes a display device, the display device is inside the housing.

[0025] The X-ray analyzer may further include an X-ray source mounted on the goniometer and an alignment adjustment mechanism for changing the position of the X-ray detector relative to the X-ray source.

[0026] The alignment adjustment member may have a threaded member for fixing the X-ray detector or the X-ray source. The alignment adjustment mechanism may be operable to move the X-ray detector, or may be operable to move the X-ray source. In order to enable the user to separately adjust the positions of both the X-ray source and the X-ray detector, the alignment adjustment mechanism may have an X-ray source alignment structure and an X-ray detector alignment structure.

[0027] The housing may further have an X-ray protection viewing window. The X-ray protection viewing window may have lead glass.

[0028] According to another aspect of the present invention, there is provided a method of using an X-ray analyzer as described above, the method including the steps of generating X-rays for irradiating an X-ray detector, receiving X-rays from an X-ray source by the X-ray detector, and displaying an image representing X-ray intensity values.

[0029] The method may include the step of directly receiving from the X-ray source. In this case, the X-rays may form a linear X-ray beam. Alternatively, instead of this, the method may include the step of irradiating a sample, the X-ray detector receiving X-rays diffracted by the sample from the X-ray source.

[0030] The method may further include the step of changing the position of the X-ray source or the X-ray detector based on the displayed image.

[0031] The method may further include the step of determining a plurality of X-ray intensity values, each of the plurality of X-ray intensity values corresponding to a detection cell, and the step of displaying an image representing the relative magnitudes of the X-ray intensity values. The position of the X-ray source / X-ray detector may be adjusted based on the image representing the relative magnitudes of the X-ray intensity values.

[0032] Next, embodiments of the present invention will be described by way of illustration with reference to the accompanying drawings.

Brief Description of the Drawings

[0033] [Figure 1] A perspective view shows a schematic diagram illustrating an X-ray detector in an embodiment of the present invention. [Figure 2] A schematic diagram illustrates the electronic equipment of the X-ray detector of FIG. 1. [Figure 3] A schematic diagram illustrates the electronic equipment of the X-ray detector in another embodiment of the present invention. [Figure 4] A schematic diagram illustrates an X-ray diffraction analyzer in an embodiment of the present invention. [Figure 5]Figures 5A to 5D schematically illustrate the arrangement of detection cells in two different alignment states in an X-ray detector, and the corresponding images representing the X-ray intensity values ​​measured by the detection cells. [Figure 6] This is a schematic diagram illustrating how to use an X-ray diffraction analyzer. [Modes for carrying out the invention]

[0034] It should be noted that these figures are illustrative and not drawn to scale. Some of the relative dimensions and proportions in these figures are exaggerated or reduced for clarity and convenience in the drawings.

[0035] Figure 1 illustrates an X-ray detector for an X-ray diffraction analyzer in one embodiment of the present invention.

[0036] The X-ray detector 4 comprises a housing 2 and a sensor for detecting X-rays (i.e., an X-ray sensor) (not shown), which is a solid-state X-ray sensor or the like, and is located inside the housing 2. The X-ray detector 4 also includes a display device 5. The display device 5 is a liquid crystal display (LCD) and is integrated into the housing 2.

[0037] During operation, the X-ray detector is positioned to receive X-rays diffracted by the sample. The diffracted X-rays enter the X-ray detector through the detection window 3 and irradiate the X-ray sensor. The X-ray sensor has a semiconductor sensing element, such as silicon. During operation, the sensing element is under bias, so when an X-ray photon is incident on the sensing element, the sensing element generates an electrical pulse. The X-ray sensor outputs the electrical pulse as a sensor output signal. By counting the pulses output by the sensor, the intensity of the diffracted X-rays (counts per second, cps) can be calculated.

[0038] The X-ray detector includes a readout circuit and a processor (neither of which are shown in Figure 1). The readout circuit is configured to receive the sensor output signal from the sensor, count the electrical pulses (representing X-ray photons), and output the X-ray photon count (i.e., the readout circuit is configured to output the number of electrical pulses output by the sensor). The processor receives the X-ray photon count, calculates the X-ray intensity value based on the X-ray photon count, and stores the X-ray intensity value. This process is repeated when the X-ray detector is moved to a different position to obtain X-ray intensity values ​​at various diffraction angles. For example, when performing X-ray analysis of a sample in a geometric position using an X-ray analyzer, as the angle θ of the incident X-ray beam relative to the surface of the sample changes, the X-ray detector can also be moved by changing the position 2θ. 2θ is the angle between the incident X-ray beam and the diffracted X-rays (as illustrated in Figure 4).

[0039] Based on the stored X-ray intensity values, the processor generates a display signal. Upon receiving the display signal, the display device 5 displays an image representing the X-ray intensity values. For example, in Figure 1, the display device displays an image showing the relative X-ray intensity for a set of measurements obtained over different angles 2θ. Because the display signal is generated by the X-ray detector 4 and not by the central X-ray analyzer control system, it is possible to directly determine from the X-ray detector 4 whether it is functioning correctly. Therefore, if the X-ray analyzer is not functioning correctly, the user can quickly and easily determine whether the X-ray detector 4 is detecting X-rays. In contrast, with an X-ray analyzer where the X-ray detector is controlled by a centralized X-ray analysis control system, it may be necessary to clarify whether the connection between the X-ray detector and the centralized control system is working correctly, or whether another component is causing a malfunction in the centralized control system, before it is possible to determine whether the X-ray detector is detecting X-rays.

[0040] The display device 5 can display other types of information in addition to X-ray diffraction measurement data. For example, the display device 5 may be configured to show information about operating conditions such as ambient temperature, relative humidity of the operating environment, and atmospheric pressure. The X-ray detector 4 may be equipped with environmental sensors to acquire this information, or it may acquire the information from an external information source. Furthermore, the X-ray detector 4 may be configured to display information such as information identifying the X-ray detector, error messages, information indicating whether the X-ray detector is connected to a computer network, and the IP address to which the X-ray detector is connected.

[0041] The display device 5 is configured to display various screens, which can be scrolled using the control buttons 7. Alternatively, the display device 5 may be a touchscreen, which can scroll through various screens in response to touch input.

[0042] Figure 2 is a schematic diagram illustrating the sensing and processing of the electronic equipment of the X-ray detector shown in Figure 1.

[0043] The electronic device that performs the sensing includes an X-ray sensor 9 and a readout circuit 11, the readout circuit having a counter for counting the X-ray photons incident on the sensing element 10 of the X-ray sensor 9.

[0044] The sensing element 10 has a linear arrangement of detection cells 8. In one embodiment, the X-ray detector is a microstrip X-ray detector. The sensing element 10 has a main body 24 made of semiconductor material, and the surface of the main body 24 is provided with strip-shaped electrodes 23 arranged in a linear pattern. Each of the detection cells 8 has a strip electrode 23.

[0045] In response to the detection cell 8 of the X-ray sensor 9 being irradiated by an X-ray photon, the sensor 9 outputs a sensing signal 12. The sensing signal is a transient current pulse caused by the free charge flow generated in the sensing element (under bias) by the X-ray photon. The readout circuit 11 has electronic equipment for converting the current pulse generated by the X-ray photon into a voltage pulse that is proportional to the time integral of the current pulse (and therefore proportional to the X-ray photon energy). The voltage pulse is sent to a comparator to determine whether the pulse corresponds to an X-ray photon. This comparator is configured to determine whether the pulse is within a predetermined energy window. If the amplitude of the voltage pulse (corresponding to the energy of the X-ray photon) is greater than the first threshold and less than the second threshold, the counter increments the number by one. The readout circuit outputs an X-ray photon count 13 for each detection cell, for example, every 320 nanoseconds.

[0046] The processor 14 receives the X-ray photon count 13 for each detection cell 8, and determines the X-ray intensity value 16 using the X-ray intensity calculator 15 based on the total X-ray photon count and the rate at which the readout circuit 11 outputs the X-ray photon count 13. As the X-ray detector 4 moves across the measurement angle range of the X-ray diffraction measurement, X-ray intensity values ​​corresponding to various angular positions are stored in the memory 18.

[0047] One advantage of using a microstrip detector is that it allows for the simultaneous measurement of multiple 2θ angles. As the X-ray detector moves through a 2θ arc, the detection cell (or "strip") passes through the 2θ positions (e.g., 0–60°) of the target. The measurements obtained from each detection cell while at a particular 2θ position contribute to the final measurement for that position. For example, as the X-ray detector moves, the X-ray intensity is measured at a 2θ angle (e.g., 15°) in the first strip (within the first measurement cycle). When an adjacent strip moves to a 2θ position of 15°, the X-ray detector measures the X-ray intensity (within the second measurement cycle). This continues for the third strip and subsequent strips.

[0048] The image generator 19 receives X-ray intensity data 20 from the memory 18 and generates a display signal 21 for displaying an image representing the X-ray intensity values. For example, the image may show the X-ray intensity values ​​(in units of cps) relative to an axis (which may represent the 2θ position of the X-ray detector when the angular position of the X-ray detector changes during measurement). The display device 5 receives the display signal 21 output by the image generator and displays the image. The image generator 19 may generate a new image when a measurement is performed. For example, the image generator 19 may update the image by generating a new image each time a new X-ray intensity value is calculated. In this way, the X-ray measurement data can be viewed in "real time". Alternatively, the image generator 19 may generate new images less frequently, for example, every second. In embodiments where the X-ray detector is a microstrip detector, the image generator 19 may generate a new image after a predetermined number of measurement cycles, for example, after every 5 to 10 measurement cycles. Once the measurement is complete, the image generator 19 may generate a display signal for displaying the results, along with a message indicating that the measurement is complete.

[0049] In an alternative embodiment, the image generator 19 only needs to generate an image after the measurement is complete (i.e., once X-ray intensity values ​​have been obtained over the measurement angle range). In this case, the image displaying the measurement results may also include a message indicating that the measurement is complete.

[0050] Furthermore, the processor 14 may be configured to identify operational errors and display information identifying these errors on the display device 5. For example, if there is a fault in the connection from another component in the X-ray analyzer to the X-ray detector 4, the display device 5 of the X-ray detector may display an error message indicating that there is a connection error. These error messages may be stored in the non-volatile memory of the X-ray detector 4, and the image generator 19 may be configured to generate a display signal for displaying an image representing the error message on the display device.

[0051] The processor 14 may be configured to measure the leakage current of each detection cell of the sensor while the power is on and to output this information to the image generator 19. The image generator 19 may receive the leakage current information and generate a display signal for displaying an image representing this information on the display device 5.

[0052] Figure 3 is a schematic diagram illustrating the sensing and processing of electronic equipment in an X-ray detector 4 in another embodiment of the present invention. In this embodiment, the X-ray detector includes the sensing and processing of electronic equipment described above in relation to Figure 2. Furthermore, the X-ray detector 4 comprises an environmental sensor, shown as a temperature sensor 31 in this embodiment, and a temperature stabilization control circuit 33. The temperature sensor 31 is arranged to measure the temperature of the X-ray sensor 10.

[0053] The temperature sensor 31 outputs a temperature reading, which is stored in the non-volatile memory 22. The image generator 19 is configured to receive the temperature reading 35 from the non-volatile memory 22 and generate a display signal (not shown) for displaying the temperature reading. By providing an image generator 19 configured to store the temperature reading in the non-volatile memory 22 of the X-ray detector and to generate a display signal for displaying the temperature reading, it becomes possible to directly access the temperature history record of the X-ray detector from the X-ray detector. This helps the user diagnose problems with the X-ray detector.

[0054] The image generator 19 may be configured to display information regarding the current temperature of the X-ray detector. It may also be configured to indicate whether the current temperature is within a desired range. For example, it may display an icon indicating whether the temperature is outside or within the desired range, or it may display the temperature in a different color if it is outside the desired range compared to when the temperature is within the desired range.

[0055] The temperature stabilization circuit 33 is configured to receive a temperature reading from the temperature sensor, process this reading, and determine whether the temperature is within a predetermined range, for example, 24-25°C.

[0056] The temperature stabilization circuit includes a fan and a Peltier element. If the temperature reading is too high, the temperature stabilization circuit 33 sends a control signal to at least one of the fan and the Peltier element to cool the X-ray detector. If the temperature reading is too low, the temperature stabilization circuit 33 sends a control signal to the Peltier element to heat the X-ray detector. By stabilizing the temperature of the X-ray detector in this way, the X-ray diffraction results obtained by the X-ray detector become more reliable.

[0057] Figure 4 illustrates a cross-sectional view of an X-ray diffraction analyzer 40 in one embodiment of the present invention. The X-ray diffraction analyzer 40 comprises a housing 41, which houses an X-ray source 42, a sample holder 43 for holding a sample 46, and an X-ray detector 44. The housing is constructed using an X-ray absorbing material to prevent X-rays from leaking out of the housing during operation. The housing may have a door for accessing the housing. When the door is open (i.e., when the housing is open), the user can insert a sample 46 and reposition any component of the X-ray analyzer. In a closed configuration, the user cannot access the housing and X-rays cannot leak out of the housing.

[0058] The enclosure may have a window (not shown) which is opaque to X-rays, allowing the user to see the X-ray analyzer even when the enclosure is closed.

[0059] As shown in Figure 4, the X-ray source 42 and the X-ray detector 44 are mounted on the goniometer 49. The X-ray detector is mounted on the goniometer by a position adjustment member 48. The X-ray detector is mounted on a support stand, which is mounted on the goniometer by a screw 48. This allows the position of the X-ray detector to be adjusted.

[0060] During use, the X-ray source 42 irradiates the sample 46 with X-rays at a certain angle θ to the surface of the sample. The X-rays are diffracted by the sample 46 and received by the X-ray detector 44. The X-ray detector is positioned at position 2θ by a goniometer (i.e., the X-ray detector can receive X-rays diffracted at angle 2θ, and this angle 2θ is the angle between the incident X-rays and the diffracted X-rays). The X-ray detector 44 detects the X-rays and generates an image showing the X-ray intensity data. This image is displayed on the integrated display 45.

[0061] To obtain accurate and reproducible results, it is important to properly align the X-ray detector 44 and the X-ray source 42 before performing measurements on the sample. To align the X-ray source 42 and the X-ray detector 44, the X-ray source 42 is positioned to irradiate the X-ray detector 44 with an X-ray source operating in linear focus mode (i.e., the X-ray beam seen in the sample is linear). In this way, the X-ray source 42 irradiates a rectangular area of ​​the sensor of the X-ray detector. If the X-ray detector 44 and the X-ray source 42 are well aligned, the X-ray intensities measured in two consecutive detection cells will be approximately the same.

[0062] Figure 5 illustrates how an image displayed on a display device can assist in aligning the X-ray source and the X-ray detector. In this embodiment, the X-ray detector has a two-dimensional array of detection cells 50. Therefore, the X-ray detector is "two-dimensional" ("2D"). The X-ray detector is position-sensitive in two directions (in the direction in which the detection cells are arranged).

[0063] Figure 5A shows the arrangement of the detection cells 50 irradiated by the X-ray beam 52 when the X-ray detector and the X-ray source are properly aligned.

[0064] Figure 5B shows the arrangement of the detection cells 50 irradiated by the X-ray beam 52 when the X-ray detector and the X-ray source are not properly aligned.

[0065] Figure 5C shows the image displayed on the X-ray detector's screen based on the expected intensity measurements obtained in Figure 5A. In the image, each detection cell is represented by a rectangle 55. The magnitude of the intensity measurement corresponding to each detection cell is represented by color and intensity. In Figure 5C, the darkest detection cell indicates a high X-ray intensity value, while lighter detection cells indicate a relatively low X-ray intensity value. In Figure 5C, which shows a well-aligned detector, the intensity pattern is symmetrical and decreases from the central detection cell.

[0066] Figure 5D shows the image displayed on the X-ray detector's screen based on the expected intensity measurements obtained in Figure 5B. In Figure 5D, the intensity pattern is not symmetrical, and the intensity range is wider.

[0067] Figure 6 illustrates a method of using an X-ray analyzer according to one embodiment of the present invention. In this embodiment, the X-ray detector has a two-dimensional linear arrangement of detection cells. In irradiation step 60, the X-ray source generates an X-ray beam for irradiating the X-ray detector. In detection step 62, the X-ray detector receives X-rays from the X-ray source. The X-ray detector determines the X-ray intensity value for each detection cell and generates a display signal for displaying an image representing these X-ray intensity values. For example, the X-ray detector may generate an image representing the detection cells of the X-ray detector, in which case the image of the detection cells represents the intensity value for each detection cell. For example, the image may represent the relative intensity values ​​of the detection cells. In display step 64, the X-ray detector displays the image. If the X-ray intensity values ​​for the detection cells indicate that the X-ray detector is not properly aligned, the position of the X-ray detector should be adjusted. This adjustment may be performed in alignment step 66 by changing the position of the X-ray detector or the X-ray source or both.

[0068] In some embodiments, the sensing element does not have to contain silicon. Instead, the sensing element may contain, for example, cadmium telluride, or any other material capable of sensing X-rays.

[0069] In some embodiments, the X-ray detector does not have to be a microstrip detector. In at least some of these embodiments, each detection cell is a pixel (square detection cell) of the X-ray detector.

[0070] In some embodiments, the X-ray detector is a one-dimensional X-ray detector. In other embodiments, the X-ray detector is a two-dimensional X-ray detector having a two-dimensional array of detection cells. For example, if the X-ray detector is a microstrip detector, it may have an array of (2 × n) detection cells (where n ≥ 2). For example, the X-ray detector may have an array of (2 × 128) detection cells.

[0071] In some embodiments, the X-ray detector may have a two-dimensional array of detection cells, in which case the X-ray detector is configured to control the detection cells so that only a subset of the detection cells is active. In this way, the X-ray detector can operate in a one-dimensional or zero-dimensional manner.

[0072] In some embodiments, the display device does not have to be integrated with the housing of the X-ray detector. Alternatively, the display device may be mountable to the housing of the X-ray detector. Alternatively, the display device may be separate from the X-ray detector and can be connected to the display output section of the X-ray detector by wired or wireless connection.

[0073] In some embodiments, the display signal may cause a display device to display an alphanumeric image.

[0074] In addition to or instead of this, the image generator may be configured to generate a graphic image, and the display device may be configured to display the graphic image.

[0075] The display device may have at least a (128 × 64) pixel array. The pixel array is at least 5 cm².2 Area, preferably 50 cm² 2 It may extend to an area less than [amount missing].

[0076] In some embodiments, the display device is a thin-film transistor LCD (TFT LCD). In some embodiments, the display device is not an LCD type display device. Instead, the display device may be any other type of display device. Examples include LED display devices such as OLED display devices.

[0077] In some embodiments, the environmental sensor is not a temperature sensor. Instead, the environmental sensor may be any type of sensor for sensing environmental operating conditions, such as a humidity sensor or an atmospheric pressure sensor.

[0078] In some embodiments, the display device is a touchscreen. Therefore, the display device may be configured to receive user input by detecting the user's touch. For example, the display device may have capacitive touch buttons at scroll positions on the screen. In this case, the display device is configured to scroll between screens when the user touches the scroll position.

[0079] Furthermore, the embodiments mentioned above are illustrative rather than limiting, and those skilled in the art can design many alternative embodiments without departing from the scope of the appended claims. Any reference numerals in parentheses in the claims should not be construed as limiting the claims. The words “comprising” do not exclude the existence of elements or steps other than those described in the claims. “A” or “an” preceding a component does not exclude the existence of multiple such components. Embodiments may be implemented by hardware having several distinct components. In apparatus claims listing several means, some of these means may be implemented by the same hardware. The mere fact that several means are described in different dependent claims does not mean that combinations of these means cannot be used advantageously. Moreover, in the appended claims, any listing including “at least one of A, B, and C” should be construed as (A or B or C or a combination thereof).

[0080] Furthermore, various embodiments may generally be implemented in hardware, special-purpose circuits, software, logic, or any combination thereof. For example, some embodiments may be implemented in hardware, while others may be implemented in firmware or software that can be executed by a controller, microprocessor, or other computing element. However, these are not limiting embodiments. The various embodiments described herein may be illustrated and described by block diagrams, flowcharts, or any other graphical representation, but it is well understood that these blocks, devices, systems, techniques, or methods described herein may be implemented in non-limiting embodiments in hardware, software, firmware, special-purpose circuits or logic, general-purpose hardware or controllers or other computing elements, or any combination thereof.

[0081] The memory may be of any type as long as it is appropriate for the local technical environment, and may implement any of the following, provided that it is a suitable data storage technology: semiconductor-based memory devices, magnetic memory devices and systems, optical memory devices and systems, fixed memory, removable memory, etc. The data processor may be of any type as long as it is appropriate for the local technical environment. In addition, the data processor may comprise, in non-limiting embodiments, one or more of the following: a general-purpose computer, a special-purpose computer, a microprocessor, a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a gate-level circuit and processor based on a multi-core processor architecture.

[0082] The embodiments described herein may be implemented in various components, such as integrated circuit modules. Integrated circuit design is generally a highly automated process. Complex and powerful software tools are available to translate logic-level designs into semiconductor circuit designs that can be etched onto semiconductor substrates.

Claims

1. An X-ray analyzer, The enclosure and, X-ray detector and A goniometer for supporting the X-ray source and the X-ray detector Equipped with, The goniometer and the X-ray detector are arranged inside the housing. The aforementioned X-ray detector is A sensor that converts X-ray photons incident on the sensor into a sensor output signal, A readout circuit configured to determine the count of X-ray photons by counting the sensor output signals, Display device and, A processor configured to determine an X-ray intensity value using the count of X-ray photons and to generate a display signal for displaying an image representing the X-ray intensity value. Equipped with The X-ray detector further includes a display output unit, The display output unit is configured to communicate the display signal to the display device, which is configured to display the image representing the X-ray intensity value. The aforementioned X-ray detector further comprises a housing, The housing accommodates the sensor, the read circuit, and the processor. The display device is mounted in the housing. X-ray analyzer.

2. An X-ray analyzer according to claim 1, The aforementioned X-ray detector is An environmental sensor configured to measure environmental parameters, Non-volatile memory and Furthermore, The X-ray detector is configured to store multiple measurement values ​​obtained by the environmental sensor as environmental data. The processor is configured to generate a display signal for displaying the environmental data. X-ray analyzer.

3. An X-ray analyzer according to claim 2, The environmental sensor has a temperature sensor for measuring the temperature of the X-ray detector. X-ray analyzer.

4. An X-ray analyzer according to any one of claims 1 to 3, The aforementioned image is a graphic image. X-ray analyzer.

5. An X-ray analyzer according to claim 4, The display device is a touchscreen, a liquid crystal display device, or both. X-ray analyzer.

6. An X-ray analyzer according to any one of claims 1 to 5, The sensor has an array of multiple detection cells, and The sensor is configured to detect X-ray photons in a manner that senses position. X-ray analyzer.

7. An X-ray analyzer according to claim 6, The aforementioned processor, To determine multiple X-ray intensity values, To output an image representing the relative magnitudes of the multiple X-ray intensity values. It is composed of, Each of the aforementioned multiple X-ray intensity values ​​corresponds to the respective detection cell. X-ray analyzer.

8. An X-ray analyzer according to any one of claims 1 to 7, The sensor is a microstrip detector having multiple detection cells, Each of the aforementioned detection cells has a corresponding strip electrode. X-ray analyzer.

9. An X-ray analyzer according to any one of claims 1 to 8, The aforementioned X-ray detector is a solid-state detector. X-ray analyzer.

10. An X-ray analyzer according to claim 1, The X-ray source attached to the aforementioned goniometer, A position adjustment mechanism for changing the position of the X-ray detector relative to the X-ray source, Furthermore, it is equipped with X-ray analyzer.

11. An X-ray analyzer according to claim 1, The aforementioned enclosure further has an X-ray protective viewing window. X-ray analyzer.

12. A method using an X-ray analyzer, The X-ray analyzer comprises a housing, an X-ray detector, and a goniometer for supporting the X-ray source and the X-ray detector, wherein the goniometer and the X-ray detector are arranged inside the housing. The X-ray detector comprises a sensor that converts X-ray photons incident on the sensor into a sensor output signal, a readout circuit configured to determine the number of X-ray photons by counting the sensor output signal, and a processor configured to determine an X-ray intensity value using the X-ray photon count and to generate a display signal for displaying an image representing the X-ray intensity value. The X-ray detector further comprises a display output unit, the display output unit configured to communicate the display signal to a display device. The aforementioned method, The steps include generating X-rays for irradiating the aforementioned X-ray detector, The steps include receiving X-rays from the X-ray source with the X-ray detector, The steps include displaying an image representing the X-ray intensity value, The steps include changing the position of the X-ray source or the X-ray detector based on the displayed image. A method that includes this.

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