An electronic self-calibration system and method for an ultraviolet photoelectron spectrometer

Abstract

The application discloses an electronic self-calibration system and method of an ultraviolet photoelectron spectrum analyzer, and belongs to the technical field of photoelectron detection and measurement. The average dark current of a Faraday cup, the dark current and count of a channel electron multiplier are obtained; the DC mode uncertainty at each measurement is confirmed; the pulse mode relative proportion at each measurement is confirmed; the calibration accuracy of each measurement is determined based on the DC mode uncertainty or the pulse mode relative proportion; if each measurement meets the calibration accuracy, the measurement is ended; if any measurement does not meet the calibration accuracy, the related steps are cyclically executed until the calibration accuracy is met. The application improves photoelectric detection precision and reliability, improves cross-wavelength consistency and long-term stability, and is suitable for the field of high-precision photoelectric detection of material surface analysis. Through multi-mode collaborative calibration, the problems of dark noise drift, spectrum deviation and common-mode interference are solved, and the photoelectric detection precision and reliability in the field of material surface analysis are improved.

Description

Technical Field

[0001] This application belongs to the field of optoelectronic detection and measurement technology, and relates to an electronic self-calibration system and electronic self-calibration method for an ultraviolet photoelectron spectroscopy analyzer. Background Technology

[0002] Ultraviolet photoelectron spectroscopy (UVP) analyzers, as instruments for analyzing the fine electronic structure of material surfaces, include two main functions: yield spectrum and energy spectrum. They possess advantages such as high energy resolution and a wide yield spectrum testing range, and are widely used in fields such as semiconductor material band structure design, charged analysis of exposed aerospace materials, and material modification. The number of photoelectrons is a key physical parameter for calculating the yield spectrum, and its accurate measurement is crucial for accurate yield spectrum calculation.

[0003] In existing technologies, the calibration of pulse counting modules in electronic systems often employs a standard signal generator or function generator to output a standard waveform. Calibration is then performed by interpolating the measured and output values ​​through three measurements. However, there is currently no comprehensive calibration method for DC mode in electronic systems. Furthermore, there are no calibration methods specifically for DC mode and pulse mode of channel electron multipliers (CEMs). Most tests rely on manual data analysis, lacking feedback mechanisms and repeatability. Summary of the Invention

[0004] In view of the above problems, this application proposes an electronic self-calibration system and electronic self-calibration method for an ultraviolet photoelectron spectroscopy analyzer to overcome the shortcomings of the prior art.

[0005] In a first aspect, embodiments of this application provide an electronic self-calibration method for an ultraviolet photoelectron spectroscopy analyzer, applied to an electronic self-calibration system for an ultraviolet photoelectron spectroscopy analyzer. The system includes: a driving device, an electron gun, a Faraday cup, a channel electron multiplier, an electrometer, a single-photon counter, and a photoelectron counting module. The electronic self-calibration method includes: When the electron gun is not turned on, the control drive adjusts the distance between the Faraday cup, the channel electron multiplier, and the standard gold sample on the sample stage; Obtain the average dark current of the Faraday cup, the dark current of the channel electron multiplier, and the count within a first preset time period; The first adjustment operation of the electron gun beam is received so that the target data emitted by the surface of the standard gold sample is weak current data. The weak current data emitted by the surface of the standard gold sample is continuously collected by the electrometer and photoelectron counting module, and the DC mode uncertainty of each measurement is confirmed by combining the average dark current of the Faraday cup and the dark current of the channel electron multiplier. The second adjustment operation of the electron gun beam is received so that the target data emitted by the surface of the standard gold sample is photoelectron data. The photoelectron data emitted by the surface of the standard gold sample is continuously collected by a single photon counter and a photoelectron counting module, and the relative proportion of the pulse mode during each measurement is confirmed by combining the photoelectron data and the count of the channel electron multiplier. The calibration accuracy of each measurement is determined based on the DC mode uncertainty or the relative proportion of the pulse modes. If each measurement meets the calibration accuracy, the measurement ends; if any measurement does not meet the calibration accuracy, the process of shutting down the electron gun, adjusting the distance between the channel electron multiplier and the standard gold sample, adjusting the pulse mode threshold of the photoelectron counting module, and then proceeding to the steps of acquiring the average dark current of the Faraday cup, the dark current of the channel electron multiplier, and the count within a first preset time period is executed.

[0006] Optionally, during the process of receiving the first adjustment operation of the electron gun beam, so that the target data emitted by the surface of the standard gold sample is weak current data, the weak current data emitted by the surface of the standard gold sample is continuously collected using an electrometer and a photoelectron counting module, and the DC mode uncertainty at each measurement is confirmed by combining the average dark current of the Faraday cup and the dark current of the channel electron multiplier, including: The beam current of the electron gun is set and adjusted so that the beam current is adjusted upward from a first target value at preset intervals. The first target value makes the target data emitted by the surface of the standard gold sample a weak current data. Each measurement is taken from the first target value and each adjustment of the beam current upwards. Each time, the driving device is controlled to move the Faraday cup and the channel electron multiplier to a preset distance according to the standard gold sample. At a constant time interval within a second preset time, the weak current data emitted from the surface of the standard gold sample are continuously collected by the electrometer and the photoelectron counting module to obtain the weak current time series of the Faraday cup and the weak current time series of the multiplier at each measurement. The DC mode uncertainty for each measurement is calculated based on the Faraday cup weak current time series, the multiplier weak current time series, the average dark current of the Faraday cup, and the dark current of the channel electron multiplier.

[0007] Optionally, during the process of receiving a second adjustment operation on the electron gun beam, so that the target data emitted from the surface of the standard gold sample is photoelectron data, the photoelectron data emitted from the surface of the standard gold sample is continuously acquired using a single-photon counter and a photoelectron counting module, respectively, to obtain the photoelectron time series of the multiplier at each measurement. The relative proportion of the pulse mode at each measurement is confirmed by combining the counting operation of the channel electron multiplier, including: The electron gun beam is set and adjusted so that the beam is adjusted from the minimum value to the second target value at preset intervals; the second target value and values ​​below it make the target data emitted by the surface of the standard gold sample photoelectron data. Each measurement is taken from the minimum value and each time the beam is adjusted upwards until the second target value. Each time, the driving device is controlled to move the channel electron multiplier to a preset distance according to the standard gold sample. Within a second preset time, the photoelectron data emitted from the surface of the standard gold sample is continuously collected by the single photon counter and the photoelectron counting module at constant time intervals to obtain the photoelectron time sequence of the multiplier during each measurement. The relative proportion of pulse modes for each measurement is calculated based on the photoelectron time sequence of the multiplier and the count of the channel electron multiplier.

[0008] Optionally, each adjustment of the beam current from the first target value upwards is considered a measurement. Each time, the driving device is controlled to move the Faraday cup and the channel electron multiplier to a preset distance from the standard gold sample. Within a second preset time period, at constant time intervals, the weak current data emitted from the surface of the standard gold sample are continuously collected using an electrometer and a photoelectron counting module, respectively, to obtain the time series of the weak current from the Faraday cup and the channel electron multiplier for each measurement, including: During each measurement, the control terminal controls the drive device to move the Faraday cup to a preset distance from the standard gold sample. During a second preset time period, the electrometer continuously collects the weak current data emitted from the surface of the standard gold sample at constant time intervals, forming a time series of weak currents of the Faraday cup during that measurement. The control terminal controls the drive device to move the channel electron multiplier to a preset distance according to the standard gold sample. During a second preset time period, the electrometer and photoelectron counting module continuously collect the weak current data emitted from the surface of the standard gold sample at constant time intervals, forming a time series of weak current of the channel electron multiplier during this measurement. The time series of weak current of the channel electron multiplier includes: the electrometer current time series and the counting module current time series.

[0009] Optionally, each measurement is taken from the minimum value and each upward adjustment of the beam current until the second target value. Each time, the drive device is controlled to move the channel electron multiplier to a preset distance from the standard gold sample. Within a second preset time period, photoelectron data emitted from the surface of the standard gold sample is continuously acquired at constant time intervals using a single-photon counter and a photoelectron counting module, respectively. This yields the Faraday cup photoelectron time series and the channel electron multiplier photoelectron time series for each measurement, including: During each measurement, the control terminal controls the drive device to move the channel electron multiplier to a preset distance according to the standard gold sample. Within a second preset time period, the single-photon counter and the photoelectron counting module continuously collect the photoelectron data emitted from the surface of the standard gold sample at constant time intervals, respectively, to obtain the channel electron multiplier photoelectron time sequence for each measurement. The channel electron multiplier photoelectron time sequence includes: the single-photon counter photoelectron time sequence and the counting module photoelectron time sequence.

[0010] Optionally, based on the Faraday cup weak current time series, the channel electron multiplier weak current time series, and the average dark current of the Faraday cup and the dark current of the channel electron multiplier, the DC mode uncertainty for each measurement is calculated, including: Based on the time series of weak currents from the channel electron multiplier and the gain of the channel electron multiplier obtained during each measurement, the average weak current emitted from the surface of the standard gold sample during each measurement is calculated. The measurement uncertainty of the channel electron multiplier current for each measurement is calculated based on the magnitude of the average weak current. The measurement uncertainty of the Faraday cup current at each measurement is obtained by calculating the time series of the weak current at each measurement. Based on the measurement uncertainty of the channel electron multiplier current and the Faraday cup current at each measurement, as well as the average dark current of the Faraday cup and the dark current of the channel electron multiplier, the DC mode uncertainty at each measurement is calculated.

[0011] Optionally, the channel electron multiplier photoelectron time series includes: a single-photon counter photoelectron time series and a counting module photoelectron time series; Based on the photoelectron time series of the channel electron multiplier and the count of the channel electron multiplier, the relative proportion of pulse modes for each measurement is calculated, including: The first difference value is obtained by performing a difference operation between the photoelectron time series of the counting module and the count of the channel electron multiplier. The second difference value is obtained by performing a difference operation between the photoelectron time series of the single-photon counter and the count of the channel electron multiplier. Divide the first difference and the second difference to obtain the relative proportion of the pulse mode for each measurement.

[0012] Optionally, the condition for determining that each measurement meets the calibration accuracy is: when the DC mode uncertainty obtained in each calculation is not greater than 0.05, the calibration accuracy in the DC mode is determined to be met. When the relative proportion of the pulse pattern obtained in each calculation is not less than 0.95 and not greater than 1.05, it is determined that the calibration accuracy in the pulse pattern is met. If the DC mode uncertainty obtained in any measurement is greater than 0.05, it is determined that the calibration accuracy in DC mode is not met; or if the relative proportion of the pulse mode obtained in any measurement is less than 0.95 or greater than 1.05, it is determined that the calibration accuracy in pulse mode is not met.

[0013] Optionally, during the process of receiving the first adjustment operation of the electron gun beam so that the target data emitted from the surface of the standard gold sample is weak current data, the Faraday cup and the channel electron multiplier operate in DC mode. During the process of both operating in DC mode, dark noise zero-point calibration and photocurrent dynamic calibration are performed. The dark noise zero-point calibration eliminates background noise by remotely acquiring the output current of the Faraday cup or the channel electron multiplier under a light-shielded environment. Before processing the target data acquired by the channel electron multiplier in DC operating mode, the photoelectron counting module is calibrated by establishing a dark noise baseline threshold and a calibration curve of photoelectron pulse count rate versus voltage amplitude using a single-photon counter and an electrometer.

[0014] Optionally, during the process of receiving a second adjustment operation on the electron gun beam so that the target data emitted from the surface of the standard gold sample is photoelectronic data, the Faraday cup and the channel electron multiplier operate in pulse mode. During the process of both operating in pulse mode, dark noise zero-point calibration and photoelectronic dynamic calibration are performed. The dark noise zero-point calibration is achieved by remotely acquiring the output pulses of the Faraday cup or the channel electron multiplier under a light-shielded environment to eliminate background noise. Before processing the target data acquired by the channel electron multiplier in pulse mode, the photoelectron counting module performs dark noise baseline calibration and photoelectron pulse calibration. Dark noise baseline calibration counts the pulse count rate of the photoelectron counting module under no-light conditions and sets a dynamic threshold to eliminate false trigger signals. Photoelectron pulse calibration synchronously acquires single-photon events through a single-photon counter, establishes a nonlinear mapping relationship between the output pulse amplitude of the photoelectron counting module and the number of photons, and generates a compensation coefficient table for photoelectron pulse calibration.

[0015] Optionally, before measurement, the sample transfer rod is controlled to send the standard gold sample to the sample injection chamber for sample cleaning, and the cleaned standard gold sample is placed on the sample stage.

[0016] Optionally, the Faraday cup uses a dual-focusing voltage during measurement; The selection of dual focusing voltage includes: applying a negative pressure to the standard gold sample while not applying pressure to the Faraday cup; or, not applying pressure to the standard gold sample while applying a positive pressure to the Faraday cup.

[0017] Secondly, this application proposes an electronic self-calibration system for an ultraviolet photoelectron spectroscopy analyzer, applied to the electronic self-calibration method of the first aspect, comprising: The electron gun, sample stage, sample transfer rod, Faraday cup, and channel electron multiplier all extend into the analysis chamber; Both the single-photon counter and the photoelectron counting module are connected to the channel electron multiplier; A standard gold sample is placed on the sample stage during measurement; An electrometer is connected to the Faraday cup; The analysis chamber is used to provide standard environmental conditions after vacuuming. The sample stage is used to hold the standard gold sample; The sample transfer rod is controlled by a control terminal and is used to place the cleaned standard gold sample on the sample stage during measurement. The Faraday cup is controlled by the control terminal and collects target data emitted from the surface of the standard gold sample during measurement. The channel electron multiplier is controlled by the control terminal and collects target data emitted from the surface of the standard gold sample during measurement. The electrometer, the single-photon counter, and the photoelectron counting module are all used to process the target data during measurement to obtain specific weak current data or photoelectron data. The control terminal controls the movement of the sample transfer rod, the Faraday cup, and the channel electron multiplier through a drive device, controls the electron gun to generate a beam, and calibrates the channel electron multiplier to operate in DC mode and pulse mode based on the weak current data and the photoelectron data.

[0018] Optionally, the analysis chamber is connected in series with a molecular pump via a mechanical pump; When the molecular pump is operating, it works in conjunction with the mechanical pump to evacuate the analysis chamber, achieving a vacuum level of 1×10⁻⁶. -5 Pa, to provide the standard environmental conditions.

[0019] Optionally, the Faraday cup and the channel electron multiplier are respectively fixed on two sets of mounting cylinders. The front end of each mounting cylinder is fixed to the Faraday cup and the channel electron multiplier by threads. Each mounting cylinder has a zero potential, and polyetheretherketone material is added directly in front of the Faraday cup and the channel electron multiplier.

[0020] Optionally, the Faraday cup includes: an input port, a traction electrode, and an output port; The input port is connected to the traction electrode and the output port, respectively; The input port is used to collect electronic signals; The traction electrode is used to supply traction voltage to the input port; The output electrical port is used to convert the collected electronic signals into weak current signals.

[0021] This application creatively proposes a novel electronic self-calibration system. Addressing the issues of dark noise drift, spectral bias, and common-mode interference in traditional optoelectronic acquisition systems' multi-mode calibration systems, it improves the accuracy and reliability of photoelectric detection. After all components are assembled into the electronic self-calibration system, high-precision calibration across the entire process is achieved using Faraday cups, channel electron multipliers, and other technologies. This enables dark noise zero-point calibration, dynamic optoelectronic calibration, and multi-wavelength photocurrent dynamic calibration.

[0022] By establishing calibration curves and compensation coefficient tables, the counting uncertainty of the photoelectronic counting module was reduced to 0.05. A novel approach was proposed: using DC mode uncertainty and relative proportion values ​​as evaluation indicators. This effectively calibrated the pulse mode and DC mode of the electronic system, differing from traditional indicators that only assess differences. The entire measurement process is highly automated and can be embedded in ultraviolet spectroscopy equipment as a self-calibration module. The measurement environment is suitable for vacuum ultraviolet, the system structure is complete, and the results output is standardized, facilitating engineering integration and industrialization. The entire electronic self-calibration system integrates DC calibration and pulse counting calibration, overcoming the limitations of traditional single calibration modes. Through multi-mode collaborative calibration, it solves problems such as dark noise drift, spectral bias, and common-mode interference, significantly improving the accuracy and reliability of photoelectric detection in fields such as surface analysis of materials under test. It has broad application prospects and high practicality. Attached Figure Description

[0023] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of the electronic self-calibration system of an ultraviolet photoelectron spectroscopy analyzer according to an embodiment of this application; Figure 2 This is a flowchart of an electronic self-calibration system for an ultraviolet photoelectron spectroscopy analyzer according to an embodiment of this application. Detailed Implementation

[0024] The embodiments of this application will now be described in detail. Examples of these embodiments are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0025] The electronic self-calibration system for an ultraviolet photoelectron spectroscopy analyzer proposed in this application refers to... Figure 1 The system structure diagram shown includes: analysis chamber 10, electron gun 11, sample stage 12, sample transfer rod 13, Faraday cup 14, channel electron multiplier 15, photoelectron counting module 16, electrometer 17, and single photon counter 18.

[0026] Electron gun 11, sample stage 12, sample transfer rod 13, Faraday cup 14, and channel electron multiplier 15 all extend into the analysis chamber 10; single-photon counter 18 and photoelectron counting module 16 are both connected to channel electron multiplier 15; electrometer 17 is connected to Faraday cup 14; standard gold sample ( Figure 1 (Not shown in the image) refers to a sample that has homogeneity, stability, accuracy, and traceability, and is placed on the sample stage during measurement.

[0027] The analysis chamber 10 is used to provide standard environmental conditions after vacuuming; generally, the standard environmental conditions require a vacuum level of 10. -6 Pa. The sample stage 12 is used to place the standard gold sample; the sample transfer rod 13 is controlled by the control terminal ( Figure 1 (Not shown in the image) Before measurement, push the standard gold sample onto the sample stage 12.

[0028] The Faraday cup 14 is controlled by the control terminal and collects target data emitted from the surface of the standard gold sample during measurement; the channel electron multiplier 15 is controlled by the control terminal and collects target data emitted from the surface of the standard gold sample during measurement; the electrometer 17, the single-photon counter 18, and the photoelectron counting module 16 are all used to process the target data during measurement to obtain specific weak current data or photoelectron data.

[0029] The control terminal controls the movement of the sample transfer rod 13, Faraday cup 14, and channel electron multiplier 15 via a drive device, controls the electron gun 11 to generate a beam, and calibrates the channel electron multiplier 15 to operate in DC mode and pulsed mode. Furthermore, a monochromatic light generation system is required to emit a light signal to the standard gold sample for measurement to be performed. Figure 1The diagram also shows a monochromatic light generating system A, which includes: a deuterium lamp 1-1 and / or a xenon lamp 1-2, a ring mirror 2, a filter wheel 3, a monochromator 4, a straight mirror 5, a beam splitter 7, an electronic shutter 8, and a focusing mirror 9. The collimating mirror 5 is located at the incident end of the beam splitter 7, and the focusing mirror 9 is located at the exit end of the beam splitter 7.

[0030] Preferably, the ultraviolet light source can be a high-power, high-stability deuterium lamp 1-1, or a high-power, wide-bandwidth, high-stability xenon lamp 1-2. The low incident energy effectively reduces damage to the sample surface caused by ultraviolet irradiation and avoids charging issues in the insulating sample during testing. This embodiment is a preferred embodiment. Figure 1 The ultraviolet photoelectron spectroscopy analyzer provided can be equipped with both a deuterium lamp 1-1 and a xenon lamp 1-2.

[0031] Preferably, the monochromator 4 is a holographic concave grating structure with a wavelength resolution of 0.070 nm @ 254 nm (mercury lamp characteristic spectral lines). The structural design of using either a deuterium lamp 1-1 or a xenon lamp 1-2 in conjunction with the vacuum ultraviolet monochromator 4 enables continuously adjustable output wavelengths from 115 nm to 400 nm. This overcomes the problems of fixed wavelength bands and discrete wavelength adjustment in traditional ultraviolet light sources, allowing for a series of ultraviolet photoelectron spectral tests at different incident energies, eliminating spurious peaks, and improving test accuracy.

[0032] Preferably, the annular mirror 2 can optimize light intensity and energy, the filter wheel 3 can filter out higher-order diffraction light, the collimating mirror 5 can collimate monochromatic light into parallel light, and the focusing mirror 9 is installed above the sample stage 12 for focusing the light spot at the position of the sample stage 12.

[0033] Preferably, an electronic shutter 8 is provided in the main optical path. The electronic shutter 8 is used to control the duration of the transmitted light irradiating the sample. The electronic shutter 8 can control the time of the ultraviolet monochromatic light incident on the sample to achieve on-demand exposure. Compared with the traditional testing system that uses a conventional ultraviolet light source to continuously irradiate the sample, it can precisely control the exposure time, effectively avoid thermal effects and photo-induced damage to the sample during the testing process, and improve the controllability of the experiment.

[0034] In one embodiment of this application, the Faraday cup 14 and the channel electron multiplier 15 can operate in DC mode. During DC operation, both perform dark noise zero-point calibration and photocurrent dynamic calibration. Dark noise zero-point calibration refers to eliminating background noise by remotely acquiring the output current of the Faraday cup 14 or the channel electron multiplier 15 under a darkened environment.

[0035] Before processing the target data acquired by the channel electron multiplier 15 in DC operating mode, the photoelectron counting module 16 needs to establish a dark noise baseline threshold and a calibration curve of photoelectron pulse count rate versus voltage amplitude using the single-photon counter 18 and the electrometer 17, thereby calibrating the photoelectron counting module 16. This results in more accurate processing results from the photoelectron counting module 16, which is beneficial for improving the accuracy of subsequent self-calibration.

[0036] In one embodiment of this application, the analysis chamber 10 is connected in series with a molecular pump via a mechanical pump; when the molecular pump is operating, the mechanical pump can be used to evacuate the analysis chamber 10, thereby achieving a vacuum level of 1×10⁻⁶. -5 Pa, thus providing standard environmental conditions.

[0037] In one embodiment of this application, the Faraday cup 14 and the channel electron multiplier 15 are respectively fixed on two sets of mounting cylinders. The front end of each mounting cylinder is fixed with the Faraday cup 14 and the channel electron multiplier 15 by threads. Each mounting cylinder has a zero potential, and polyetheretherketone material is added to the front of the Faraday cup 14 and the channel electron multiplier 15. The addition of polyetheretherketone material can prevent the electric field of the Faraday cup 14 and the channel electron multiplier 15 from affecting their respective collection of photoelectrons when they are working.

[0038] In one embodiment of this application, the Faraday cup 14 includes: an input port, a traction electrode, and an output port; the input port is connected to the traction electrode and the output port respectively. The input port is used to collect electronic signals; the traction electrode is used to supply traction voltage to the input port; and the output port is used to convert the collected electronic signals into a weak current signal.

[0039] In one embodiment of this application, the Faraday cup 14 and the channel electron multiplier 15 can also operate in pulse mode. During pulse mode operation, both perform dark noise zero-point calibration and photoelectron dynamic calibration. The dark noise zero-point calibration is the same as described above, involving remotely acquiring the output pulses of the Faraday cup 14 or the channel electron multiplier 15 under a light-shielded environment to eliminate background noise. Before processing the target data acquired by the channel electron multiplier 15 in pulse mode, the photoelectron counting module 16 performs dark noise baseline calibration and photoelectron pulse calibration. Dark noise baseline calibration refers to: counting the pulse count rate of the photoelectron counting module 16 under no-light conditions and setting a dynamic threshold to eliminate false trigger signals. Photoelectron pulse calibration refers to: synchronously acquiring single-photon events through a single-photon counter, establishing a nonlinear mapping relationship between the output pulse amplitude of the photoelectron counting module 16 and the number of photons, and generating a compensation coefficient table for photoelectron pulse calibration.

[0040] In one embodiment of this application, before measurement, the control terminal controls the sample transfer rod 13 to send the standard gold sample to the sample injection chamber for cleaning, and then places the cleaned standard gold sample on the sample stage 12. This ensures that the standard gold sample is clean and will not affect the measurement data.

[0041] In one embodiment of this application, the Faraday cup 14 selects a dual-focusing voltage during measurement; selecting the dual-focusing voltage includes: applying a negative pressure only to the standard gold sample, while not applying pressure to the Faraday cup 14; or, not applying pressure to the standard gold sample, and only applying a positive pressure to the Faraday cup 14.

[0042] The proposed electronic self-calibration system for ultraviolet photoelectron spectroscopy analyzers addresses issues such as dark noise drift, spectral bias, and common-mode interference in traditional photoelectron acquisition systems, improving the accuracy and reliability of photoelectric detection. After all components are assembled into the electronic self-calibration system, high-precision end-to-end calibration is achieved using Faraday cups and channel electron multipliers. This enables dark noise zero-point calibration, dynamic photoelectron calibration, and multi-wavelength photocurrent dynamic calibration.

[0043] By establishing calibration curves and compensation coefficient tables, the counting uncertainty of the photoelectron counting module is reduced to 0.05. The entire measurement process is highly automated and can be embedded in ultraviolet spectroscopy equipment as a self-calibration module. The measurement environment is suitable for vacuum ultraviolet, the system structure is complete, and the results output is standardized, facilitating engineering integration and industrialization. The entire electronic self-calibration system integrates DC calibration and pulse counting calibration, overcoming the limitations of traditional single calibration modes. Through multi-mode collaborative calibration, it solves problems such as dark noise drift, spectral bias, and common-mode interference, significantly improving the accuracy and reliability of photoelectric detection in fields such as surface analysis of materials under test.

[0044] Based on the aforementioned electronic self-calibration system for ultraviolet photoelectron spectroscopy (UVPS) analyzers, this application also proposes an electronic self-calibration system for UVPS analyzers. This electronic self-calibration method is applied to any of the aforementioned electronic self-calibration systems, with reference to... Figure 2 The flowchart shown illustrates an electronic self-calibration method, which includes the following steps: Step 201: With the electron gun off, control the drive device to adjust the distance between the Faraday cup, the channel electron multiplier, and the standard gold sample; Step 202: Obtain the average dark current of the Faraday cup, the dark current of the channel electron multiplier, and the count within the first preset time period.

[0045] First, the electronic self-calibration system of the ultraviolet photoelectron spectroscopy analyzer is set up. Then, before the electron gun is turned on, i.e., before measurement begins, the drive device (controlled by the control terminal) is used to bring the Faraday cup close to the standard gold sample. The average dark current of the Faraday cup is measured for a first preset time. For example, if the first preset time is 1 minute, the Faraday cup is brought close to the standard gold sample and the measurement is performed for 1 minute to obtain the average dark current of the Faraday cup. Similarly, the drive device (also controlled by the control terminal) is used to bring the channel electron multiplier close to the standard gold sample. Using a traceable electrometer (since both the electrometer 17 and the single-photon counter are traceable, they will be described as traceable electrometer and traceable single-photon counter in the following text) and the photoelectron counting module, the dark current and count of the channel electron multiplier are measured respectively. Again, the measurement is performed for a first preset time, for example, 1 minute. The traceable electrometer measures for 1 minute to obtain the dark current and count of the channel electron multiplier, denoted as I. A0 and N A0 The photoelectron counting module measures the dark current and count of the channel electron multiplier for one minute, denoted as I. Dnt_DC0 and N Dnt_Pl0 .

[0046] Step 203: Receive the first adjustment operation of the electron gun beam so that the target data emitted by the surface of the standard gold sample is weak current data, and use the electrometer and photoelectron counting module to continuously collect the weak current data emitted by the surface of the standard gold sample, and combine the average dark current of the Faraday cup and the dark current of the channel electron multiplier to confirm the DC mode uncertainty of each measurement.

[0047] Following step 202, the first adjustment operation of the electron gun beam is received, setting and adjusting the electron gun beam current, typically using a control terminal. The beam current can be adjusted upwards from a first target value at preset intervals, or upwards from a minimum value to a second target value at preset intervals. The first target value ensures that the target data emitted from the surface of the standard gold sample is weak current data (referring to the data corresponding to weak DC below, corresponding to DC mode); the second target value and values ​​below ensure that the target data emitted from the surface of the standard gold sample is photoelectron data.

[0048] In other words, by adjusting the beam current, the emission from the surface of the standard gold sample can be either a weak DC or a pulse. For example, generally, 0.6 μA is used as a criterion. If the electron gun beam current is <0.6 μA, the emission from the surface of the standard gold sample is considered to be in pulse form. In this case, the electronic self-calibration system operates in pulse mode, and pulse mode calibration is required. If the electron gun beam current is ≥0.6 μA, the emission from the surface of the standard gold sample is considered to be a weak DC. In this case, the electronic self-calibration system operates in DC mode, and DC mode calibration is required.

[0049] Assuming the preset value is 0.1 μA, the electron gun beam current is set and adjusted using the control terminal, increasing from 0.6 μA every 0.1 μA until the maximum beam current, such as 1 μA, is reached. Since the electronics self-calibration system operates in DC mode, DC mode calibration is required to ensure the UV photoelectron spectroscopy analyzer obtains accurate values ​​for weak DC signals. Conversely, if the electron gun beam current is set and adjusted using the control terminal, increasing from the minimum value of 0 to 0.6 μA every 0.1 μA, and the electronics self-calibration system operates in pulse mode, pulse mode calibration is required to ensure the UV photoelectron spectroscopy analyzer obtains accurate values ​​for the number of photoelectrons.

[0050] Preferably, during the process of setting and adjusting the electron gun beam current so that the target data emitted from the surface of the standard gold sample is weak current data, the weak current data emitted from the surface of the standard gold sample is continuously collected using an electrometer and a photoelectron counting module, and the DC mode uncertainty of each measurement is confirmed by combining the average dark current of the Faraday cup and the dark current of the channel electron multiplier, including: Step S1: Set and adjust the beam current of the electron gun so that the beam current is adjusted upward from the first target value at preset intervals. The first target value makes the target data emitted by the surface of the standard gold sample a weak current data. Step S2: Each adjustment of the beam current from the first target value upwards is considered a measurement. Each time, the drive device is controlled to move the Faraday cup and the channel electron multiplier to a preset distance from the standard gold sample. Within a second preset time period, the weak current data emitted from the surface of the standard gold sample are continuously collected at constant time intervals using the traceable electrometer and photoelectron counting module, respectively, to obtain the time series of the weak current of the Faraday cup and the time series of the weak current of the channel electron multiplier for each measurement.

[0051] For weak DC conditions, each adjustment of the beam current from the first target value upwards is considered a measurement process. During each measurement process, the drive device is controlled to move the Faraday cup and the channel electron multiplier to a preset distance from the standard gold sample. At a constant time interval within a second preset time period, the weak current data emitted from the surface of the standard gold sample are continuously collected using the traceable electrometer and photoelectron counting module, respectively, to obtain the time series of weak current of the Faraday cup and the time series of weak current of the channel electron multiplier for each measurement.

[0052] Following the example above, assuming the second preset time is 10 minutes, the constant time interval is 1 second, and the preset distance is 30 mm, then starting from 0.6 μA, which is taken as one measurement, the control drive device moves the Faraday cup 14 to 30 mm from the standard gold sample. Within 10 minutes, at 1-second intervals, the weak current data emitted from the surface of the standard gold sample are continuously collected using a traceable electrometer, and the time series of the weak current of the Faraday cup during this measurement is obtained, denoted as I. F ={I F0 , I F1 , …, I Fn} Then, the control drive device moves the channel electron multiplier to 30 mm from the standard gold sample. Within 10 minutes, at 1-second intervals, the traceable electrometer and photoelectron counting module continuously collect the weak current data emitted from the surface of the standard gold sample, obtaining the time series of the weak current of the channel electron multiplier during this measurement. Therefore, the time series of the weak current of the channel electron multiplier includes: the electrometer current time series, I A ={I A0 , I A1 , …, I An The current time series of the counting module is denoted as I. Dnt_DC ={I Dnt_DC0 ,I Dnt_DC1 , …, I Dnt_DCnAfterwards, the beam current was adjusted to 0.7 μA, and another measurement was performed. First, the drive device was controlled to move the Faraday cup 14 to 30 mm from the standard gold sample. At 1-second intervals within 10 minutes, the traceable electrometer continuously collected the weak current data emitted from the surface of the standard gold sample, obtaining the time series of the weak current of the Faraday cup during this measurement. Then, the drive device was controlled to move the channel electron multiplier to 30 mm from the standard gold sample. At 1-second intervals within 10 minutes, the traceable electrometer and photoelectron counting module continuously collected the weak current data emitted from the surface of the standard gold sample, respectively, obtaining the time series of the weak current of the channel electron multiplier during this measurement. Similarly, the time series of the weak current of the channel electron multiplier includes: the electrometer current time series and the counting module current time series. This process continues until the beam current is adjusted to 1 μA. A final measurement is then performed. The control drive moves the Faraday cup 30 mm from the standard gold sample. Within 10 minutes, at 1-second intervals, the traceable electrometer continuously collects the weak current data emitted from the surface of the standard gold sample, obtaining the time series of the weak current from the Faraday cup during this measurement. Then, the channel electron multiplier is moved 30 mm from the standard gold sample. Within 10 minutes, at 1-second intervals, the traceable electrometer and photoelectron counting module 16 continuously collect the weak current data emitted from the surface of the standard gold sample, obtaining the time series of the weak current from the channel electron multiplier during this measurement.

[0053] Step S3: Calculate the DC mode uncertainty for each measurement based on the time series of the weak current of the Faraday cup, the time series of the weak current of the channel electron multiplier, the average dark current of the Faraday cup, and the dark current of the channel electron multiplier.

[0054] After obtaining the time series of the weak currents of the Faraday cup and the channel electron multiplier, and combining this with the average dark current of the Faraday cup and the dark current of the channel electron multiplier, the DC mode uncertainty for each measurement can be calculated. Specifically: Based on the time series of weak currents from the channel electron multiplier and the gain of the channel electron multiplier obtained during each measurement, the average weak current emitted from the surface of the standard gold sample during each measurement is calculated. The uncertainty of the multiplier current measurement for each measurement is calculated based on the magnitude of the average weak current. The measurement uncertainty of the Faraday cup current at each measurement is obtained by calculating the time series of the weak current at each measurement. Based on the measurement uncertainty of the channel electron multiplier current and the Faraday cup current at each measurement, as well as the average dark current of the Faraday cup and the dark current of the channel electron multiplier, the DC mode uncertainty at each measurement is calculated.

[0055] In the specific calculations, the gain of the channel electron multiplier remains constant during the test. The formula for calculating the average weak current emitted from the surface of the standard gold sample during each measurement is as follows:

[0056]

[0057] In the above formula, G represents the gain of channel electron multiplier 15. I A-in This represents the current measured by the Faraday cup. I Dnt_Dc_in This indicates the current measured by the counting module in DC mode.

[0058] The uncertainty of the Tradition cup current measurement is δI F :

[0059] In the above formula, Indicates the noise current of the electrometer; This represents the uncertainty caused by current drift; This represents the quantization error in analog-to-digital conversion.

[0060] Let the uncertainty of the current measurement of the channel electron multiplier be... δI A :

[0061] In the above formula, This indicates the uncertainty caused by the gain instability of the channel electron multiplier; This indicates the measurement error of the electrometer. This represents the uncertainty caused by dark current fluctuations.

[0062] The formula for calculating the uncertainty in DC mode is as follows:

[0063] In the above formula U This represents the uncertainty in the DC mode.

[0064] Step 204: Receive the second adjustment operation of the electron gun beam so that the target data emitted from the surface of the standard gold sample is photoelectron data, and use a single photon counter and a photoelectron counting module to continuously collect the photoelectron data emitted from the surface of the standard gold sample, and combine the photoelectron data and the count of the channel electron multiplier to confirm the relative proportion of the pulse mode during each measurement.

[0065] Similar to step 203, the beam current of the electron gun is first set and adjusted so that the beam current is adjusted from the minimum value to the second target value every preset size; the second target value and the values ​​below it make the target data emitted by the surface of the standard gold sample photoelectron data.

[0066] Starting from the minimum value, and each time the beam current is adjusted upwards until the second target value, it is considered as one measurement process. During each measurement process, the drive device is controlled to move the channel electron multiplier to a preset distance according to the standard gold sample. Within a second preset time, the photoelectron data emitted from the surface of the standard gold sample is continuously collected at constant time intervals using the traceable single-photon counter and photoelectron counting module, respectively, to obtain the photoelectron time series of the channel electron multiplier during each measurement.

[0067] Similar to the DC mode, each measurement is taken from the minimum value and each time the beam current is adjusted upwards until the second target value. This corresponds to the pulse mode. During each measurement, the control terminal controls the drive device to move the Faraday cup 30 mm away from the standard gold sample. Within 10 minutes, at 1-second intervals, the photoelectron data emitted from the surface of the standard gold sample is continuously collected using a traceable single-photon counter to form a Faraday cup photoelectron time series for each measurement.

[0068] During each measurement, the control terminal controls the drive device to move the channel electron multiplier to 30 mm from the standard gold sample. Within 10 minutes, at 1-second intervals, the traceable single-photon counter and photoelectron counting module continuously collect photoelectron data emitted from the surface of the standard gold sample, obtaining the channel electron multiplier photoelectron time series for each measurement. This channel electron multiplier photoelectron time series includes: the single-photon counter photoelectron time series, denoted as N. A ={N A0 , N A1 , …,N An The photoelectron time series of the counting module is denoted as N. Dnt_Pl ={N Dnt_Pl0 , N Dnt_Pl1 , …, N Dnt_Pln}

[0069] Then, based on the photoelectron time series and the counts of the channel electron multiplier, the relative proportion of the pulse mode for each measurement is calculated. Specifically: After obtaining the photoelectron time series of the channel electron multiplier in pulse mode, and combining it with the channel electron multiplier count, the relative proportion of the pulse mode for each measurement can be calculated. Specifically: The photoelectron time series of the channel electron multiplier includes: the photoelectron time series of the single-photon counter N. A ={N A0 N A1, …, N An} and the photoelectron time series of the counting module N Dnt_Pl ={N Dnt_Pl0 , N Dnt_Pl1 , …, N Dnt_Pln}

[0070] The difference between the photoelectron time series of the counting module and the count of the channel electron multiplier is calculated to obtain the first difference; the difference between the photoelectron time series of the single-photon counter and the count of the channel electron multiplier is calculated to obtain the second difference; the first difference and the second difference are divided to obtain the relative proportion of the pulse mode for each measurement. The corresponding formula is:

[0071] In the above formula, R represents the relative proportion of the pulse mode.

[0072] Step 205: Determine the calibration accuracy for each measurement based on the DC mode uncertainty or the pulse mode relative proportion.

[0073] Following the preceding steps, if the UV-Vis photoelectron spectrometer operates in DC mode, there is a corresponding DC mode uncertainty; if the UV-Vis photoelectron spectrometer operates in pulsed mode, there is a corresponding pulsed mode relative proportion. The values ​​of these two parameters serve as the basis for determining whether each measurement meets the calibration accuracy requirements.

[0074] The conditions for determining whether each measurement meets the calibration accuracy are as follows: when the DC mode uncertainty obtained from each calculation is not greater than 0.05, the calibration accuracy in DC mode is determined to be met; when the relative proportion value of the pulse mode obtained from each calculation is not less than 0.95 and not greater than 1.05, the calibration accuracy in pulse mode is determined to be met.

[0075] If the DC mode uncertainty obtained in any measurement is greater than 0.05, it is determined that the calibration accuracy in DC mode is not met; or if the relative proportion of the pulse mode obtained in any measurement is less than 0.95 or greater than 1.05, it is determined that the calibration accuracy in pulse mode is not met.

[0076] Step 206: If each measurement meets the calibration accuracy, the measurement ends; if any measurement does not meet the calibration accuracy, the process of shutting down the electron gun, adjusting the distance between the channel electron multiplier and the standard gold sample, adjusting the pulse mode threshold of the photoelectron counting module, and then proceeding to the steps of acquiring the average dark current of the Faraday cup, the dark current of the channel electron multiplier, and the count within the first preset time period is repeated.

[0077] The judgment result is naturally either satisfied or not satisfied, specifically: If each measurement meets the calibration accuracy, the entire measurement process is complete, and both DC mode and pulse mode self-calibration are finished. For example, if each measurement at a beam current of 0.6 μA, 0.7 μA, ... 1 μA meets the calibration accuracy, then the DC mode self-calibration is complete; if each measurement at a beam current of 0.1 μA, 0.2 μA, ... 0.5 μA meets the calibration accuracy, then the pulse mode self-calibration is complete. However, if any measurement fails to meet the calibration accuracy, for example, if each measurement at a beam current of 0.6 μA and 0.7 μA meets the calibration accuracy, but the measurement at a beam current of 0.8 μA fails to meet the calibration accuracy, then the channel electron multiplier needs to stop supplying voltage, wait for it to return to its initial state, adjust the distance between the channel electron multiplier and the standard gold sample, and adjust the pulse mode threshold of the photoelectron counting module. Repeat steps 201 to 206 until the calibration accuracy is met. That is, if any measurement fails to meet the calibration accuracy, the channel electron multiplier needs to stop supplying voltage and wait for it to return to its initial state. Then, the distance between the channel electron multiplier and the standard gold sample, and the pulse mode threshold of the photoelectron counting module need to be adjusted. The average dark current of the Faraday cup, the dark current and count of the channel electron multiplier need to be reacquired within the first preset time. Naturally, the electron gun needs to be turned off and the drive device needs to be controlled to adjust the distance between the Faraday cup, the channel electron multiplier and the standard gold sample. The average dark current of the Faraday cup, the dark current and count of the channel electron multiplier need to be reacquired within the first preset time, and so on. Steps 201 to 206 are repeated until the calibration accuracy is met.

[0078] The electronic self-calibration method of the entire ultraviolet photoelectron spectrometer described above can be simply summarized as follows, taking a specific example: Before the measurement begins, the sample transfer rod sends the standard gold sample to the sample injection chamber, the standard gold sample is cleaned with an argon ion gun, and the cleaned standard gold sample is then sent back to the sample stage in the analysis chamber by the sample transfer rod to prepare for measurement.

[0079] When the measurements were conducted, the vacuum level in the analysis chamber had reached 10. -6 Pa, the ultraviolet light electron spectrometer was completely shielded to ensure that the standard gold sample would not be excited by external light. The Faraday cup and channel electron multiplier were moved to a distance of 30 mm from the standard gold sample, and the test was conducted for one minute to obtain the average dark count and dark current.

[0080] The electron gun beam current is adjusted to 0.1 μA, and the electron beam hits the standard gold sample to excite secondary electrons. Pulse mode calibration is carried out, and the channel electron multiplier outputs a signal. Through a three-terminal converter, the signal enters the photoelectron counting module and the traceable single-photon counter.

[0081] Tests were performed every 0.1 μA at a beam current of 0.1–0.5 μA, with 800 data points collected per test. Data recording was completed in pulse mode.

[0082] The electron gun beam current is then adjusted to 0.6 μA, DC mode calibration is performed, the channel electron multiplier outputs a signal, and through a three-terminal converter, the signal enters the photoelectron counting module and the traceable electrometer.

[0083] At a beam current of 0.6–1 μA, tests were performed every 0.1 μA, with 800 data points collected per test. Relevant data recording was completed in DC mode.

[0084] Through the calculations of the control terminal, the pulse mode correlation ratio and DC mode uncertainty were calculated respectively, and the accuracy of the electronic system of the ultraviolet photoelectron spectroscopy analyzer was evaluated.

[0085] In summary, this application creatively proposes a novel electronic self-calibration system. Addressing the issues of dark noise drift, spectral bias, and common-mode interference in traditional optoelectronic acquisition systems' multi-mode calibration systems, it improves the accuracy and reliability of photoelectric detection. After all components are assembled into the electronic self-calibration system, high-precision calibration across the entire process is achieved using Faraday cups, channel electron multipliers, and other technologies. This enables dark noise zero-point calibration, dynamic optoelectronic calibration, and multi-wavelength photocurrent dynamic calibration.

[0086] By establishing calibration curves and compensation coefficient tables, the counting uncertainty of the photoelectronic counting module was reduced to 0.05. A novel approach was proposed: using DC mode uncertainty and relative proportion values ​​as evaluation indicators. This effectively calibrated the pulse mode and DC mode of the electronic system, differing from traditional indicators that only assess differences. The entire measurement process is highly automated and can be embedded in ultraviolet spectroscopy equipment as a self-calibration module. The measurement environment is suitable for vacuum ultraviolet, the system structure is complete, and the results output is standardized, facilitating engineering integration and industrialization. The entire electronic self-calibration system integrates DC calibration and pulse counting calibration, overcoming the limitations of traditional single calibration modes. Through multi-mode collaborative calibration, it solves problems such as dark noise drift, spectral bias, and common-mode interference, significantly improving the accuracy and reliability of photoelectric detection in fields such as surface analysis of materials under test. It has broad application prospects and high practicality.

[0087] Although preferred embodiments of the present application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the embodiments of the present application.

[0088] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or terminal device that includes said element.

[0089] The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit and scope of the claims. All of these forms are within the protection scope of this application.

Claims

1. An electronic self-calibration method for an ultraviolet light electron spectrometer, characterized in that, An electronic self-calibration system for an ultraviolet photoelectron spectroscopy analyzer, the system comprising: a driving device, an electron gun, a Faraday cup, a channel electron multiplier, an electrometer, a single-photon counter, and a photoelectron counting module; the electronic self-calibration method comprising: When the electron gun is not turned on, the control drive adjusts the distance between the Faraday cup, the channel electron multiplier, and the standard gold sample on the sample stage; Obtain the average dark current of the Faraday cup, the dark current of the channel electron multiplier, and the count within a first preset time period; The first adjustment operation of the electron gun beam is received so that the target data emitted by the surface of the standard gold sample is weak current data. The weak current data emitted by the surface of the standard gold sample is continuously collected by the electrometer and photoelectron counting module, and the DC mode uncertainty of each measurement is confirmed by combining the average dark current of the Faraday cup and the dark current of the channel electron multiplier. The second adjustment operation of the electron gun beam is received so that the target data emitted by the surface of the standard gold sample is photoelectron data. The photoelectron data emitted by the surface of the standard gold sample is continuously collected by a single photon counter and a photoelectron counting module, and the relative proportion of the pulse mode during each measurement is confirmed by combining the photoelectron data and the count of the channel electron multiplier. The calibration accuracy of each measurement is determined based on the DC mode uncertainty or the relative proportion of the pulse modes. If each measurement meets the calibration accuracy, the measurement ends; if any measurement does not meet the calibration accuracy, the process of shutting down the electron gun, adjusting the distance between the channel electron multiplier and the standard gold sample, adjusting the pulse mode threshold of the photoelectron counting module, and then proceeding to the steps of acquiring the average dark current of the Faraday cup, the dark current of the channel electron multiplier, and the count within a first preset time period is executed.

2. The electronic self-calibration method according to claim 1, characterized in that, During the process of receiving the first adjustment operation of the electron gun beam, so that the target data emitted from the surface of the standard gold sample is weak current data, the weak current data emitted from the surface of the standard gold sample is continuously collected using an electrometer and a photoelectron counting module, and the DC mode uncertainty at each measurement is confirmed by combining the average dark current of the Faraday cup and the dark current of the channel electron multiplier, including: The beam current of the electron gun is set and adjusted so that the beam current is adjusted upward from a first target value at preset intervals. The first target value makes the target data emitted by the surface of the standard gold sample a weak current data. Each measurement is taken from the first target value and each adjustment of the beam current upwards. Each time, the driving device is controlled to move the Faraday cup and the channel electron multiplier to a preset distance according to the standard gold sample. At a constant time interval within a second preset time, the weak current data emitted from the surface of the standard gold sample are continuously collected by the electrometer and the photoelectron counting module to obtain the weak current time series of the Faraday cup and the weak current time series of the multiplier at each measurement. The DC mode uncertainty for each measurement is calculated based on the Faraday cup weak current time series, the multiplier weak current time series, the average dark current of the Faraday cup, and the dark current of the channel electron multiplier.

3. The electronic self-calibration method according to claim 1, characterized in that, During the process of receiving a second adjustment operation on the electron gun beam, so that the target data emitted from the surface of the standard gold sample is photoelectron data, the photoelectron data emitted from the surface of the standard gold sample is continuously acquired using a single-photon counter and a photoelectron counting module, respectively, to obtain the photoelectron time sequence of the multiplier for each measurement. The relative proportion of the pulse mode for each measurement is confirmed by combining the counting operation of the channel electron multiplier, including: The electron gun beam is set and adjusted so that the beam is adjusted from the minimum value to the second target value at preset intervals; the second target value and values ​​below it make the target data emitted by the surface of the standard gold sample photoelectron data. Each measurement is taken from the minimum value and each time the beam is adjusted upwards until the second target value. Each time, the driving device is controlled to move the channel electron multiplier to a preset distance according to the standard gold sample. Within a second preset time, the photoelectron data emitted from the surface of the standard gold sample is continuously collected by the single photon counter and the photoelectron counting module at constant time intervals to obtain the photoelectron time sequence of the multiplier during each measurement. The relative proportion of pulse modes for each measurement is calculated based on the photoelectron time sequence of the multiplier and the count of the channel electron multiplier.

4. The electronic self-calibration method according to claim 2, characterized in that, Each measurement is performed based on the first target value and each subsequent adjustment of the beam current upwards. Each measurement involves controlling the drive device to move the Faraday cup and channel electron multiplier to a preset distance from the standard gold sample. Within a second preset time period, at constant time intervals, the weak current data emitted from the surface of the standard gold sample are continuously collected using an electrometer and a photoelectron counting module. This yields the time series of the weak current from the Faraday cup and the channel electron multiplier for each measurement, including: During each measurement, the control terminal controls the drive device to move the Faraday cup to a preset distance from the standard gold sample. During a second preset time period, the electrometer continuously collects the weak current data emitted from the surface of the standard gold sample at constant time intervals, forming a time series of weak currents of the Faraday cup during that measurement. The control terminal controls the drive device to move the channel electron multiplier to a preset distance according to the standard gold sample. During a second preset time period, the electrometer and photoelectron counting module continuously collect the weak current data emitted from the surface of the standard gold sample at constant time intervals, forming a time series of weak current of the channel electron multiplier during this measurement. The time series of weak current of the channel electron multiplier includes: the electrometer current time series and the counting module current time series.

5. The electronic self-calibration method according to claim 3, characterized in that, Each measurement is taken from the minimum value and each upward adjustment of the beam current until the second target value. Each time, the drive device moves the channel electron multiplier to a preset distance from the standard gold sample. Within a second preset time period, photoelectron data emitted from the surface of the standard gold sample is continuously collected at constant time intervals using a single-photon counter and a photoelectron counting module, respectively. This yields the Faraday cup photoelectron time series and the channel electron multiplier photoelectron time series for each measurement, including: During each measurement, the control terminal controls the drive device to move the channel electron multiplier to a preset distance according to the standard gold sample. Within a second preset time period, the single-photon counter and the photoelectron counting module continuously collect the photoelectron data emitted from the surface of the standard gold sample at constant time intervals, respectively, to obtain the channel electron multiplier photoelectron time sequence for each measurement. The channel electron multiplier photoelectron time sequence includes: the single-photon counter photoelectron time sequence and the counting module photoelectron time sequence.

6. The electronic self-calibration method according to claim 1, characterized in that, The condition for determining that each measurement meets the calibration accuracy is: when the DC mode uncertainty obtained in each calculation is not greater than 0.05, the calibration accuracy in the DC mode is determined to be met. When the relative proportion of the pulse pattern obtained in each calculation is not less than 0.95 and not greater than 1.05, it is determined that the calibration accuracy in the pulse pattern is met. If the DC mode uncertainty obtained in any measurement is greater than 0.05, it is determined that the calibration accuracy in DC mode is not met; or if the relative proportion of the pulse mode obtained in any measurement is less than 0.95 or greater than 1.05, it is determined that the calibration accuracy in pulse mode is not met.

7. The electronic self-calibration method according to claim 1, characterized in that, During the process of receiving the first adjustment operation of the electron gun beam so that the target data emitted from the surface of the standard gold sample is weak current data, the Faraday cup and the channel electron multiplier operate in DC mode. During the process of both operating in DC mode, dark noise zero-point calibration and photocurrent dynamic calibration are performed. The dark noise zero-point calibration eliminates background noise by remotely acquiring the output current of the Faraday cup or the channel electron multiplier under a light-shielded environment. Before processing the target data acquired by the channel electron multiplier in DC operating mode, the photoelectron counting module is calibrated by establishing a dark noise baseline threshold and a calibration curve of photoelectron pulse count rate versus voltage amplitude using a single-photon counter and an electrometer.

8. The electronic self-calibration method according to claim 1, characterized in that, During the process of receiving the second adjustment operation of the electron gun beam so that the target data emitted from the surface of the standard gold sample is photoelectronic data, the Faraday cup and the channel electron multiplier operate in pulse mode. During the process of both operating in pulse mode, dark noise zero-point calibration and photoelectronic dynamic calibration are performed. The dark noise zero-point calibration is achieved by remotely acquiring the output pulses of the Faraday cup or the channel electron multiplier under a light-shielded environment to eliminate background noise. Before processing the target data acquired by the channel electron multiplier in pulse mode, the photoelectron counting module performs dark noise baseline calibration and photoelectron pulse calibration. Dark noise baseline calibration counts the pulse count rate of the photoelectron counting module under no-light conditions and sets a dynamic threshold to eliminate false trigger signals. Photoelectron pulse calibration synchronously acquires single-photon events through a single-photon counter, establishes a nonlinear mapping relationship between the output pulse amplitude of the photoelectron counting module and the number of photons, and generates a compensation coefficient table for photoelectron pulse calibration.

9. The electronic self-calibration method according to claim 1, characterized in that, The Faraday cup uses a dual-focusing voltage during measurement. The selection of dual focusing voltage includes: applying a negative voltage to the standard gold sample, while not applying pressure to the Faraday cup; Alternatively, the standard gold sample may be unpressurized, while positive pressure may be applied to the Faraday cup.

10. An electronic self-calibration system for an ultraviolet photoelectron spectroscopy analyzer, characterized in that, The electronic self-calibration method as described in any one of claims 1-9 includes: The electron gun, sample stage, sample transfer rod, Faraday cup, and channel electron multiplier all extend into the analysis chamber; Both the single-photon counter and the photoelectron counting module are connected to the channel electron multiplier; A standard gold sample is placed on the sample stage during measurement; An electrometer is connected to the Faraday cup; The analysis chamber is used to provide standard environmental conditions after vacuuming. The sample stage is used to hold the standard gold sample; The sample transfer rod is controlled by a control terminal and is used to place the cleaned standard gold sample on the sample stage during measurement. The Faraday cup is controlled by the control terminal and collects target data emitted from the surface of the standard gold sample during measurement. The channel electron multiplier is controlled by the control terminal and collects target data emitted from the surface of the standard gold sample during measurement. The electrometer, the single-photon counter, and the photoelectron counting module are all used to process the target data during measurement to obtain specific weak current data or photoelectron data. The control terminal controls the movement of the sample transfer rod, the Faraday cup, and the channel electron multiplier through a drive device, controls the electron gun to generate a beam, and calibrates the channel electron multiplier to operate in DC mode and pulse mode based on the weak current data and the photoelectron data.

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