PCB transport device and method of operating the PCB transport device

Abstract

The present invention relates to a substrate transfer device that senses a collision of an end - effector and a method of operating the substrate transfer device. The substrate transfer device includes an end - effector on which a substrate is supported, a motor that provides power for the movement of the end - effector, a collision sensing unit that senses a collision of the end - effector, and a control unit that controls the driving of the motor in response to the collision sensing by the collision sensing unit. The collision sensing unit may include a torque measurement unit that measures a torque value of the motor, a differential value calculation unit that calculates a torque differential value between two torque measurement values measured with a time difference, and a collision determination unit that determines a collision of the end - effector based on the torque differential value.

Description

Technical Field

[0001] The present invention relates to a substrate transfer device and an operation method of the substrate transfer device, and more particularly, to a substrate transfer device that senses a collision of an end effector and an operation method of the substrate transfer device.

Background Art

[0002] In the manufacturing processes of semiconductors and displays, in order to proceed with various unit processes such as vapor deposition, etching, and cleaning, a plurality of devices suitable for the respective process characteristics are provided, and each of these different devices is equipped with a substrate transfer device for transferring a substrate such as a wafer.

[0003] Generally, a substrate transfer device of semiconductor equipment serves to transfer a substrate from a load-lock chamber to a substrate storage member (for example, a FOUP (Front Opening Unified Pod, a sealed wafer / carrier (container) for transfer / storage), a carrier, etc.) or from the substrate storage member to the load-lock chamber.

[0004] Such a substrate transfer device performs mechanical movement using the power provided by a motor and operates within a defined movement area. If the substrate deviates from a defined position while moving within this area, if the end effector of the substrate transfer device is not in a defined position, or if an error occurs in the transfer program, there is a risk of collision with an obstacle due to some cause, which may cause damage to the substrate transfer device and / or the collision object (or obstacle) or defects in the substrate.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

[0006] The present invention provides a substrate transport device and a method for operating the substrate transport device that detects collisions with end-effectors and protects the end-effectors, the objects they collide with, and / or the substrate. [Means for solving the problem]

[0007] A substrate transport device according to one embodiment of the present invention comprises an end effector on which a substrate is supported, a motor that provides power for moving the end effector, a collision detection unit that detects collisions of the end effector, and a control unit that controls the driving of the motor in response to the collision detection by the collision detection unit, wherein the collision detection unit may include a torque measurement unit that measures the torque value of the motor, a difference value calculation unit that calculates the torque difference value between two torque measurement values ​​measured with a time difference, and a collision determination unit that determines a collision of the end effector based on the torque difference value.

[0008] The collision detection unit further includes a reference value setting unit for setting a collision judgment reference value, the collision judgment unit determines that the end effector has collided when the torque difference value is equal to or greater than the collision judgment reference value, and the control unit may stop driving the motor or drive the motor in the reverse direction when the collision judgment unit determines that the end effector has collided.

[0009] The collision sensing unit further includes a measurement position storage unit that records the measurement position of the torque value, and the control unit may stop driving the motor after driving it to the previous measurement position.

[0010] The collision sensing unit further comprises a measurement value storage unit that stores the measured torque value of the motor, the torque measuring unit measures the torque value of the motor at predetermined intervals, and the difference value calculation unit calculates the torque difference value between the torque measurement value of the current period and the torque measurement value of the previous period for each predetermined period.

[0011] The motor drive includes an acceleration drive that increases the motor's torque, a constant speed drive that maintains the motor's torque within a predetermined deviation, and a deceleration drive that decreases the motor's torque, and may further include an acceleration time setting unit for setting the duration of the acceleration drive.

[0012] The reference value setting unit may set the collision judgment reference value according to the rate of change of the motor's torque value with respect to the set acceleration drive time.

[0013] The collision detection unit further includes a measurement cycle setting unit that sets the measurement cycle of the motor's torque value according to the set acceleration drive time, and the measurement cycle setting unit may set the measurement cycle of the motor's torque value to be shorter than the set acceleration drive time.

[0014] The torque measuring unit may measure the torque value of the motor at least twice during the acceleration drive.

[0015] The torque measuring unit may measure the torque value of the motor at least at the starting point of the acceleration drive.

[0016] An operating method for a substrate transport device according to another embodiment of the present invention may include the steps of: providing power via a motor to move an end effector on which a substrate is supported; measuring the torque value of the motor multiple times with a time difference; calculating the torque difference value of two measured torque values; and determining a collision of the end effector based on the calculated torque difference value.

[0017] The method for operating the substrate transport device further includes the steps of setting a collision judgment criterion value and, in the process of determining a collision of the end effector, stopping the motor drive or driving the motor in the reverse direction if a collision of the end effector is determined, wherein in the process of determining a collision of the end effector, a collision of the end effector may be determined if the calculated torque difference value is greater than or equal to the set collision judgment criterion value.

[0018] The method of operating the substrate transport device further includes a step of recording the measurement position of the torque value, and the step of stopping the motor drive or driving the motor in the reverse direction may include a step of stopping the motor drive after driving the motor to the previous measurement position.

[0019] The method for operating the substrate transport device further includes a step of storing the measured torque value of the motor, and in the step of measuring the torque value of the motor, the torque value of the motor is measured at a predetermined period, and in the step of calculating the torque difference value, the torque difference value between the torque measurement value of the current period and the torque measurement value of the previous period may be calculated for each predetermined period.

[0020] The process of moving the end effector includes an acceleration process in which the motor torque is increased to move it, a constant velocity process in which the motor torque is kept within a predetermined deviation to move it, and a deceleration process in which the motor torque is decreased to move it, and may further include a process of setting the time of the acceleration process.

[0021] In the process of setting the aforementioned reference value, the collision judgment reference value may be set according to the rate of change of the motor's torque value with respect to the set acceleration process time.

[0022] The operation method of the substrate transfer device further includes a process of setting a measurement period of the torque value of the motor according to the set time of the acceleration process, and in the process of setting the measurement period, the measurement period of the torque value of the motor may be set to be shorter than the set time of the acceleration process.

[0023] In the process of measuring the torque value of the motor, the torque value of the motor may be measured at least two or more times in the acceleration process.

[0024] In the process of measuring the torque value of the motor, the torque value of the motor may be measured at least at the starting point of the acceleration process.

Advantages of the Invention

[0025] The substrate transfer device according to an embodiment of the present invention calculates a torque difference value between two torque measurement values measured with a time difference using a collision detection unit, and based on this, determines a collision of the end effector, thereby effectively detecting a collision of the end effector. Through this, the motor can be stopped or rotated in the reverse direction to minimize damage caused by the collision of the end effector.

[0026] That is, by using two torque measurement values measured with a time difference instead of the absolute amount (or absolute value) of torque, and using the torque change amount (or per unit time) associated with the change over time to determine the collision of the end effector, the collision of the end effector can be detected regardless of the moving speed and moving distance of the end effector. It is possible to effectively detect a collision of the end effector both when the end effector moves while accelerating or decelerating and when the end effector moves at a constant speed, and it is also unnecessary to vary the collision determination reference value in细分 according to the moving speed and moving distance of the end effector.

Brief Description of the Drawings

[0027] [Figure 1] A schematic diagram showing a substrate transport device according to one embodiment of the present invention. [Figure 2] A graph showing torque measurements for each period and the torque measurement for the immediately preceding period related to one embodiment of the present invention. [Figure 3] A conceptual diagram illustrating the calculation of torque difference values ​​related to one embodiment of the present invention. [Figure 4] A procedure diagram showing a method for operating a substrate transport apparatus according to another embodiment of the present invention. [Modes for carrying out the invention]

[0028] Embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. However, the present invention is not limited in any way to the embodiments disclosed below and can be embodied in a variety of different forms, and these embodiments are provided merely to complete the disclosure of the present invention and to fully inform a person of ordinary skill of the scope of the invention. In describing the present invention, the same reference numerals are used for the same components, and the drawings may be partially exaggerated in size to accurately illustrate embodiments of the present invention, and in the drawings, the same reference numerals refer to the same components.

[0029] Figure 1 is a schematic diagram showing a substrate transport device according to one embodiment of the present invention, where Figure 1(a) is a plan view of the substrate transport device and Figure 1(b) is a block diagram of the collision detection unit.

[0030] Referring to Figure 1, a substrate transport device 100 according to one embodiment of the present invention may include an end effector 110 on which a substrate 10 is supported, a motor 120 that provides power for moving the end effector 110, a collision detection unit 130 that detects collisions with the end effector 110, and a control unit 140 that controls the driving of the motor 120 in response to collision detection by the collision detection unit 130.

[0031] The end-effector 110 is capable of supporting the substrate 10 and can extend in a first direction. For example, the end-effector 110 may have the shape of a fork with a plurality of fingers arranged (or aligned) in a second direction intersecting the first direction so as to be aligned in the first direction, and can contact the lower surface of the substrate 10 and support the substrate 10. Here, the second direction may be one of the horizontal directions that intersects the first direction, and if the first direction is the front-to-back direction, it may be the left-to-right direction. The end-effector 110 may also be made from a ceramic material such as quartz, aluminum oxide (Al2O3), aluminum nitride (AlN), silicon carbide (SiC), titanium dioxide (TiO2), or silicon dioxide (SiO2). In this case, the substrate 10 may be a wafer, but is not particularly limited thereto, and may be a glass substrate or the like.

[0032] On the other hand, the end effectors 110 may consist of multiple units arranged in multiple stages (or in a third direction that intersects both the first and second directions) (or stacked), with each stage (i.e., each of the multiple end effectors) supporting a substrate 10, allowing two or more substrates 10 corresponding to the number of end effectors 110 to be transported at once.

[0033] The motor 120 can provide power for moving the end effector 110, and the end effector 110 can be moved through the mechanical movement of the arms 111, 112, and 113 connected to the end effector 110 by the power. For example, the motor 120 can provide power to the arms 111, 112, and 113 by rotating the rotation axes 21, 22, and 23, and the rotation speed of the rotation axes 21, 22, and 23 can be controlled by the control unit 140. In this case, as shown in Figure 1(a), the end of the arms 111, 112, and 113 can be connected to each other, and the end effector 110 can be moved by joint movement caused by the rotation of the rotation axes 21, 22, and 23, or the end effector 110 can be moved by moving the arm 113 to which the end effector 110 is connected along a guide rail (not shown) by the rotational force of the motor 120.

[0034] For example, if joint movement is performed by the rotation of rotation axes 21, 22, and 23, the substrate transport device 100 of the present invention may be equipped with three arms 111, 112, and 113 and three rotation axes 21, 22, and 23. One end of the first arm 111 is fixed (or connected) to the first rotation axis 21, and it can rotate around the first rotation axis 21.

[0035] Furthermore, one end of the second arm 112 may be connected to the other end of the first arm 111 by a second rotation axis 22, and the second arm 112 can rotate on an axis about the second rotation axis 22.

[0036] Furthermore, the third arm 113 may have one end connected to the other end of the second arm 112 by the third rotation axis 23, or its other end connected to the end effector 110, and can rotate on an axis about the third rotation axis 23.

[0037] The first axis of rotation 21, the second axis of rotation 22, and the third axis of rotation 23 allow the first arm 111, the second arm 112, and the third arm 113 to rotate on their respective axes, thereby changing (or moving) the position of the end effector 110.

[0038] The collision detection unit 130 can detect collisions with the end effector 110 and can communicate whether a collision has been detected to the control unit 140 so that the motor 120 can be controlled. For example, when the collision detection unit 130 detects a collision with the end effector 110, it can generate a collision detection signal and transmit it to the control unit 140.

[0039] The control unit 140 can control the drive of the motor 120 in response to collision detection by the collision detection unit 130, and can control the rotational speed of the rotating shafts 21, 22, and 23. For example, when a collision detection signal is transmitted from the collision detection unit 130, the control unit 140 can generate a control signal for controlling the rotational speed of the rotating shafts 21, 22, and 23 and transmit it to the motor 120.

[0040] Here, the collision detection unit 130 may include a torque measurement unit 131 that measures the torque value of the motor 120, a difference value calculation unit 132 that calculates a torque difference value (D) between two torque measurements taken with a time difference, and a collision determination unit 133 that determines whether the end effector 110 has collided based on the torque difference value D. The torque measurement unit 131 can measure the torque value of the motor 120 and can sense the speed of the rotation shafts 21, 22, 23 of the motor 120 and / or the rotation angles of the rotation shafts 21, 22, 23. For example, the torque measurement unit 131 may include an encoder, a tacho generator, etc. that senses the speed of the rotation shafts 21, 22, 23 of the motor 120, the rotation angles of the rotation shafts 21, 22, 23, or the rotation torque of the rotation shafts 21, 22, 23. In this case, the torque value of the motor 120 can be measured by converting the value (or amount of current) supplied to the motor 120 when the motor 120 is driven into the torque of the motor 120.

[0041] Figure 2 is a graph showing the (current) torque measurement for each period and the torque measurement for the immediately preceding period. Here, the dashed rectangle indicates the region (or time point) where the end effector collision occurred.

[0042] Referring to Figure 2, the difference value calculation unit 132 can calculate the torque difference value D between two torque measurements taken with a time difference, and can calculate the torque difference value D between the currently measured torque measurement (or current torque measurement) and the torque measurement measurement (or previous torque measurement) taken (a predetermined time) earlier. Here, the difference value calculation unit 132 can calculate the torque difference value D in real time by subtracting (or subtracting) the torque measurement measurement taken a predetermined time earlier (i.e., the previous torque measurement) from the torque measurement measurement taken in real time (i.e., the current torque measurement), and can also express the torque difference value D as an absolute value.

[0043] The collision determination unit 133 can determine whether the end effector 110 has collided based on the torque difference value D, and can determine that the end effector 110 has collided if the torque difference value D is equal to or greater than the critical torque difference value (or collision determination criterion value). In other words, the collision determination unit 133 does not compare the torque measurement value measured in real time with the torque critical value, but rather can determine whether the end effector 110 has collided by comparing the torque difference value D, obtained by subtracting (or subtracting) the torque measurement value measured before a predetermined time from the torque measurement value measured in real time, with the critical torque difference value.

[0044] Conventionally, the torque value of the motor 120 was measured while moving the end effector 110 in the same manner as during the transport (process) of the substrate transport device 100. A torque critical value was set to be approximately 1.5 to 2 times higher than the highest value (or maximum value) of the measured torque value of the motor 120. If the torque measurement value measured in real time during transport by the substrate transport device 100 exceeded the torque critical value, it was determined that the end effector 110 was colliding, and the motor 120 was stopped. In such a case, the torque value of the motor 120 generated during acceleration driving is (very) larger than the torque value of the motor 120 generated during constant-speed driving. As a result, the torque critical value, which is larger than the torque value of the motor 120 generated during acceleration driving, becomes far larger than the torque measurement value (or the torque value of the motor generated during constant-speed driving) that is normally (or generally) measured during constant-speed driving of the motor 120. Consequently, the difference between the torque critical value and the torque measurement value normally measured during constant-speed driving of the motor 120 becomes very large, making it difficult to effectively detect the collision of the end effector 110 that occurs during constant-speed driving of the motor 120.

[0045] To solve this problem, it is conceivable to divide the motor 120 into acceleration drive, constant speed drive, and deceleration drive depending on the speed of the motor 120's rotating shafts 21, 22, and 23 (or the rotational speed of the rotating shafts), and specify the torque critical value for each drive (or for each of the acceleration drive, constant speed drive, and deceleration drive of the motor) (so that they are different). However, in such a case, the time for each drive will differ depending on the distance and / or speed of the end effector 110, and the maximum value of the torque of the motor 120 measured during the transport (process) will differ for each drive (especially the maximum value of the torque of the motor measured during transport in the acceleration drive of the motor). This presents a problem in that it becomes necessary to specify the torque critical value for each drive anew each time the distance and / or speed of the end effector 110 changes.

[0046] However, the substrate transport device 100 of the present invention determines the collision of the end effector 110 by comparing the torque difference value D with the critical torque difference value. Therefore, a single critical torque difference value can effectively detect the collision of the end effector 110 that occurs in all drives (accelerated drive of the motor, constant speed drive of the motor, and deceleration drive of the motor). Furthermore, since the critical torque difference value does not have a strong correlation with the highest value of the torque value of the motor 120 measured during transport in each drive, there is no problem of having to set (or specify) the critical torque difference value anew each time the travel distance and / or travel speed of the end effector 110 changes (and there is no need to specify it).

[0047] Furthermore, the collision sensing unit 130 may further include a reference value setting unit 134 for setting a collision judgment criterion value. The reference value setting unit 134 can set a collision judgment criterion value, and the collision judgment criterion value may not be the torque critical value, but rather the critical torque difference value that indicates a sudden change in the torque measurement value (or that the current torque measurement value has suddenly become much larger than the previous torque measurement value). For example, the reference value setting unit 134 can experimentally (or empirically) measure the torque value (average value) of the motor 120 due to the collision of the end effector 110 in advance, and appropriately set (or determine) the collision judgment criterion value between the torque value of the motor 120 due to the collision of the end effector 110 measured in advance and the maximum value of the amount of change in the torque value per unit time under normal conditions (or the torque difference value).

[0048] Therefore, the collision determination unit 133, while determining whether the end effector 110 has collided based on the torque difference value D, can determine that the end effector 110 has collided if the torque difference value D is equal to or greater than the collision determination criterion value, and can determine that the end effector 110 has collided if it has confirmed that the torque difference value D has become larger than or equal to the critical torque difference value. When the end effector 110 has collided, the currently measured torque value suddenly becomes very large, so the torque difference value D can also suddenly become large, and can become equal to or greater than the collision determination criterion value (i.e., equal to or greater than the critical torque difference value). As a result, when the torque difference value D is equal to or greater than the collision determination criterion value, the collision determination unit 133 recognizes that the currently measured torque value has suddenly become very large and can determine that the end effector 110 has collided.

[0049] In this case, the control unit 140 can stop driving the motor 120 or drive the motor 120 in the reverse direction if the collision detection unit 133 determines that the end effector 110 has collided. If the collision detection unit 133 determines that the end effector 110 has collided, the control unit 140 can stop driving the motor 120 or drive the motor 120 in the reverse direction. By stopping the motor 120, damage caused by the collision of the end effector 110 (for example, damage to the substrate transport device and / or the object of collision or defects in the substrate) can be reduced, and by driving the motor 120 in the reverse direction, damage caused by the collision of the end effector 110 can be minimized as much as possible.

[0050] Furthermore, the collision sensing unit 130 may further include a measurement position storage unit 135 for recording the measurement position of the torque value. The measurement position storage unit 135 can record (or store) the measurement position of the torque value, and it is possible to determine at what position the torque value of the motor 120 was measured. For example, the position of the end effector 110 (as a result of the motor's operation) can be recorded using the measurement position of the torque value, or the measurement position of the torque value can be recorded using the rotation angle and / or rotation speed of the rotating shafts 21, 22, and 23.

[0051] Through this, the control unit 140 can drive the motor 120 to the previous measurement position (for example, the immediately preceding measurement position) and then stop driving the motor 120. If the collision determination unit 133 determines that the end effector 110 has collided, the control unit 140 can drive the motor 120 in the reverse direction, and by driving the motor 120 in the reverse direction, it can adjust (or move) the position of the end effector 110 or the rotation angle (or rotation speed) of the rotation axes 21, 22, and 23 to the previous measurement position, and then stop driving the motor 120 at the previous measurement position. Here, the previous measurement position may also be the immediate preceding measurement position, and damage to the end effector 110 due to collision can be checked (or inspected). If maintenance of the end effector 110 is performed at the previous measurement position (i.e., the immediate preceding measurement position), or if the damage to the end effector 110 due to collision is very minor, the transport (process) can be continued again while measuring (or recording) the torque value of the motor 120 and the measurement position of the torque value (periodically) from the previous measurement position.

[0052] Therefore, the substrate transport apparatus 100 according to the present invention allows the control unit 140 to drive the motor 120 in the reverse direction to the previous measurement position using the measurement position memory unit 135, thereby minimizing damage caused by collisions of the end effector 110, facilitating maintenance, allowing for confirmation of damage caused by collisions of the end effector 110, and / or improving the continuity of the transport (process) after maintenance.

[0053] Figure 3 is a conceptual diagram illustrating the calculation of torque difference values ​​according to one embodiment of the present invention. Figure 3(a) is a magnified portion of the graph showing torque measurements for each period and the torque measurement for the immediately preceding period. Figure 3(b) is a graph showing the torque difference between the torque measurement for each period and the torque measurement for the immediately preceding period. Here, Figure 3(a) is a graph showing a magnified portion of the dotted rectangle in Figure 2, and the dotted rectangle in Figure 3(b) shows the portion where the end effector collision occurred, similar to the dotted rectangle in Figure 2.

[0054] Referring to Figures 2 and 3, the torque measuring unit 131 can measure the torque value of the motor 120 at a predetermined period T, and the difference value calculation unit 132 can calculate the torque difference value D between the torque measurement value of the current period and the torque measurement value of the previous period for each predetermined period T. The torque measuring unit 131 can measure the torque value of the motor 120 at a predetermined period T, and according to the predetermined period T, it can determine (or identify) the object (i.e., torque measurement values ​​measured at different times) to be compared (or calculated) with the currently measured torque measurement value. At this time, the currently measured torque measurement value can be compared with the torque measurement value measured in the previous period (or the torque measurement value of the previous period), and the torque measurement value measured in the previous period can be subtracted (or subtracted) from the currently measured torque measurement value.

[0055] Here, the difference value calculation unit 132 can calculate a torque difference value D between the torque measurement value of the current period (i.e., the torque measurement value currently measured) and the torque measurement value of the previous period (i.e., the torque measurement value measured in the previous period) for each predetermined period T. This allows the torque difference value D to be calculated in real time while the torque measurement value of the current period is measured in real time, and the collision of the end effector 110 can be determined by comparing the torque difference value D calculated for each predetermined period T with the collision judgment criterion value. Through this, the collision of the end effector 110 can be detected (or determined) over the entire duration of the transport (process).

[0056] The collision detection unit 130 may further include a measurement value storage unit 136 that stores the measured torque value of the motor 120. The measurement value storage unit 136 can store the measured torque value of the motor 120 and can measure and record (or store) the torque measurement value for the current period in real time. At this time, when the measured torque value of the motor 120 is stored in the measurement value storage unit 136, the measurement position storage unit 135 can record the measurement position of the torque value. Through this, the torque measurement value for the immediately preceding period can be read and compared (or calculated) with the torque measurement value for the current period that is currently being measured. On the other hand, the measurement value storage unit 136 can repeatedly store (or write) and update (or erase) data, and in such cases, the storage capacity becomes smaller and the processing speed becomes faster.

[0057] When a stationary object is driven (or moved) and then stopped again, it will be accelerated and then decelerated. For stable driving (or movement), the object can be driven (or moved) at a constant speed between acceleration and deceleration.

[0058] For this purpose, the driving of the motor 120 may include an acceleration drive in which the torque of the motor 120 increases, a constant speed drive in which the torque of the motor 120 is kept within a predetermined deviation, and a deceleration drive in which the torque of the motor 120 decreases. The acceleration drive accelerates (or accelerates the movement) of the rotational speed of the stopped end effector 110 and / or the rotating shafts 21, 22, 23, and for this purpose the torque of the motor 120 may increase.

[0059] Constant speed drive involves moving the end effector 110 (or rotating the rotation axis) at a constant speed, thereby ensuring that the torque of the motor 120 is kept within a predetermined deviation.

[0060] The reduction drive reduces (or moves) the rotational speed of the end effector 110 and / or the rotating shafts 21, 22, and 23 to stop them, which may reduce the torque of the motor 120.

[0061] In the acceleration drive described above, the torque of the motor 120 increases significantly, which may cause the torque difference value D between the current torque measurement and the previous torque measurement to increase. When the torque difference value D increases, the collision judgment criterion value also increases, and when the collision judgment criterion value increases, the sensitivity of the end effector 110 to detect collisions may decrease. In particular, in the constant speed drive described above, the average value of the torque difference value D is very low and close to "0", so even if the torque difference value D increases due to a collision of the end effector 110, it will not exceed the increased collision judgment criterion value, which may cause the end effector 110 to fail to detect a collision.

[0062] The substrate transport device 100 according to the present invention may further include an acceleration time setting unit 150 for setting the acceleration drive time.

[0063] The acceleration time setting unit 150 can set the time of the acceleration drive and adjust the amount of change in the torque value per unit time (or per cycle T) during the acceleration drive. For example, the acceleration time setting unit 150 can adjust the time of the acceleration drive to lower the maximum value of the amount of change in the torque value per unit time (or the torque difference value) during the acceleration drive, thereby lowering the collision judgment criterion value determined according to the maximum value of the amount of change in the torque value per unit time.

[0064] In this case, the maximum value of the change in the torque value per unit time can be lower the smaller the maximum torque value in the acceleration drive and the longer the acceleration drive time, and the acceleration drive time can be appropriately determined according to the travel distance of the end effector 110. When the travel distance of the end effector 110 is shortened, the acceleration drive time must be relatively shortened, and the maximum torque value in the acceleration drive also decreases. On the other hand, if the travel distance of the end effector 110 is sufficiently long, the maximum torque value in the acceleration drive will increase for smooth (or high-speed) transport (process), and the acceleration drive time can be set (to a longer) so that the maximum value of the change in the torque value per unit time decreases according to the increased maximum torque value in the acceleration drive.

[0065] Here, the reference value setting unit 134 can set the collision judgment reference value according to the rate of change (or amount of change) of the torque value of the motor 120 with respect to the set acceleration drive time. If the rate of change of the torque value of the motor 120 with respect to the set acceleration drive time (amount of change of the motor's torque value / the set acceleration drive time) is large, the torque difference value D (or the amount of change of the torque value per unit time) will be large during the acceleration drive, and the collision judgment reference value can be set to a large value. Conversely, if the rate of change of the torque value of the motor 120 with respect to the set acceleration drive time is small, the torque difference value D will be small during the acceleration drive, and as a result, the collision judgment reference value can be set to a small value. In other words, the reference value setting unit 134 can set the collision judgment reference value in proportion to the rate of change of the torque value of the motor 120 with respect to the set acceleration drive time.

[0066] At this time, the maximum torque value in the acceleration drive is fixed (or determined) according to the distance traveled by the end effector 110 (experimentally or empirically), so the collision judgment criterion value can be set according to the set acceleration drive time, and the maximum value of the change in the torque value per unit time (in the acceleration drive) is determined according to the set acceleration drive time. Only when the collision judgment criterion value becomes greater than the maximum value of the change in the torque value per unit time can it be prevented from determining that a collision has occurred with the end effector 110 even if a collision with the end effector 110 has not occurred. Therefore, the criterion value setting unit 134 can set the collision judgment criterion value to be greater than the maximum value of the change in the torque value per unit time according to the set acceleration drive time.

[0067] Furthermore, the collision detection unit 130 may further include a measurement period setting unit 137 that sets a measurement period T for the torque value of the motor 120 according to the set acceleration drive time. The measurement period setting unit 137 can set a measurement period T for the torque value of the motor 120 according to the set acceleration drive time, thereby enabling the measurement of the torque value of the motor 120 at the set period (i.e., the predetermined period), and by measuring the torque value of the motor 120 at each set period T, it is possible to detect (or determine) a collision of the end effector 110 in real time by comparing it with the torque measurement value of the immediately preceding period.

[0068] For example, the measurement cycle setting unit 137 can set the measurement cycle T for the torque value of the motor 120 so that the torque value of the motor 120 is measured at least once during the acceleration drive, according to the set acceleration drive time, and can set the measurement cycle T for the torque value of the motor 120 so that the torque value of the motor 120 is measured at least twice or more in order to detect a collision of the end effector 110 that is effective during the acceleration drive. When the torque value of the motor 120 is measured for the first time during the acceleration drive, the torque value of the motor 120 measured first (or initially) can be compared (or calculated) to "0", and the measured torque value of the motor 120 can be the same as the torque difference value D.

[0069] At this time, the measurement cycle setting unit 137 can set the measurement cycle T of the motor 120's torque value to be shorter than the set acceleration drive time. In order to detect the collision of the end effector 110 during the acceleration drive, the torque value of the motor 120 must be measured at least once during the acceleration drive. For this reason, the measurement cycle setting unit 137 can set the measurement cycle T of the motor 120's torque value to be shorter than the set acceleration drive time. As a result, the collision of the end effector 110 can be detected even during the acceleration drive, and the collision of the end effector 110 that occurs in all drives (acceleration drive of the motor, constant speed drive of the motor, and deceleration drive of the motor) can be effectively detected.

[0070] For example, the measurement cycle setting unit 137 can set the measurement cycle T of the motor 120's torque value to be as short as 4 to 12 milliseconds (ms), and can set the measurement cycle T of the motor 120's torque value to a short time (e.g., 4 to 12 ms) that prevents or minimizes damage to the end effector 110 and the circuit board 10.

[0071] Furthermore, the torque measuring unit 131 can measure the torque value of the motor 120 at least twice during the acceleration drive (section). If the torque value of the motor 120 is not measured even once during the acceleration drive (section), the collision of the end effector 110 cannot be detected during the acceleration drive (section). If the torque value of the motor 120 is measured only once during the acceleration drive (section), the measured torque value of the motor 120 is the same as the torque difference value D, so the maximum value of the torque value of the motor 120 becomes larger, and the collision judgment criterion value inevitably becomes larger. When the collision judgment criterion value increases, the sensitivity of the end effector 110 to collision detection decreases, and in particular, the sensitivity of the end effector 110 to collision detection decreases during constant-speed driving. Therefore, the torque measuring unit 131 can measure the torque value of the motor 120 at least twice during the acceleration driving (section) so that the sensitivity of the end effector 110 to collision detection improves in all driving modes (acceleration driving of the motor, constant-speed driving of the motor, and deceleration driving of the motor).

[0072] Here, the torque measuring unit 131 can measure the torque value of the motor 120 at least at the starting point (or the start time) of the acceleration drive. The torque measuring unit 131 can measure the torque value of the motor 120 at the origin (or the starting point of the acceleration drive), can measure the torque value of the motor 120 at the origin before starting the acceleration drive, and can also measure the torque value of the motor 120 at the origin during period 0 T. The torque value of the motor 120 measured at the starting point (or the origin) of the acceleration drive can be compared with (or calculated) the torque value of the motor 120 that is first measured after the acceleration drive is started, and the torque difference value D can be calculated by subtracting (or subtracting) the torque value of the motor 120 measured at the starting point of the acceleration drive (or the torque measurement value for period 0) from the torque value of the motor 120 that is first measured (or the torque measurement value for period 1). As a result, even if only the torque value of the motor 120 for one period T is measured during the acceleration drive, the torque difference value D can be calculated by subtracting (or subtracting) the torque value measured for period 0 (or the torque value of the motor measured at the starting point of the acceleration drive) from the torque value measured for period 1 (or T), thereby detecting the collision of the end effector 110 during the acceleration drive.

[0073] On the other hand, the calculation of the torque measurement value for one period T compared to the torque measurement value for zero period T can be performed in the difference value calculation unit 132, or it can be performed in other components of the collision sensing unit 130. In this case, the torque measurement value for zero period T does not have to be "0", it may be less than 0, or it may be forcibly fixed to "0". If it is forcibly fixed to "0", the torque value of the motor 120 can not be measured directly (or substantially) at the starting point of the acceleration drive, and the torque measurement value for one period T can be calculated as the torque difference value D in the difference value calculation unit 132 without calculation.

[0074] Figure 4 is a procedure diagram showing an operation method of a substrate transport apparatus according to another embodiment of the present invention.

[0075] Based on Figure 4, the operation method of the substrate transport apparatus according to another embodiment of the present invention will be described in more detail, but matters that overlap with those previously described in relation to the substrate transport apparatus according to one embodiment of the present invention will be omitted.

[0076] An operating method for a substrate transport apparatus according to another embodiment of the present invention may include the steps of: moving an end effector on which a substrate is supported by providing power via a motor (S100); measuring the torque value of the motor multiple times with a time difference (S200); calculating the torque difference value between two measured torque values ​​(S300); and determining a collision of the end effector based on the calculated torque difference value (S400).

[0077] First, power is provided via a motor to move the end effector on which the substrate is supported (S100). Power is provided via a motor to move the end effector on which the substrate is supported, and through this, the substrate can be transported. Here, the control unit can control the drive of the motor and adjust (or adjust) the movement of the end effector.

[0078] Next, the torque value of the motor is measured multiple times with a time difference (S200). The torque value of the motor can be measured multiple times during the movement of the end effector, and the torque measuring unit of the collision sensing unit can measure the torque value of the motor multiple times with a time difference. For example, the torque measuring unit can measure the torque value of the motor at predetermined intervals.

[0079] Next, the torque difference value between the two measured torque values ​​is calculated (S300). The torque value of the motor can be measured multiple times, and the torque difference value between two torque values ​​measured with a time difference can be calculated. The difference value calculation unit of the collision sensing unit can calculate the torque difference value between two torque values ​​from among multiple torque values ​​measured multiple times with a time difference. For example, the torque difference value between the currently measured torque value (or the current torque value) and the torque value measured (or the previous torque value) (a predetermined time) earlier can be calculated. The torque difference value can be calculated in real time by subtracting (or subtracting) the torque value measured (i.e., the previous torque value) measured a predetermined time earlier from the torque value measured in real time (i.e., the current torque value). The torque difference value can also be shown as an absolute value.

[0080] Then, based on the calculated torque difference value, a collision of the end effector is determined (S400). Based on the calculated torque difference value, a collision of the end effector can be determined, and the collision determination unit of the collision sensing unit can determine a collision of the end effector based on the torque difference value, and if the torque difference value is greater than or equal to the critical torque difference value (or collision determination criterion value), it can be determined that a collision of the end effector has occurred. For example, instead of comparing the torque measurement value measured in real time with the torque critical value, the collision determination unit can determine a collision of the end effector by comparing the torque difference value obtained by subtracting (or subtracting) the torque measurement value measured before a predetermined time from the torque measurement value measured in real time with the critical torque difference value.

[0081] The method for operating the substrate transport apparatus according to the present invention may further include a step of setting a collision judgment criterion value (S50) and a step of stopping the motor drive or driving the motor in the reverse direction (S500) when a collision of the end effector is determined in the step of determining the collision of the end effector (S400).

[0082] A collision judgment criterion value can be set (S50). The reference value setting unit of the collision sensing unit can set the collision judgment criterion value, and the collision judgment criterion value may not be a torque critical value, but rather the critical torque difference value that indicates a sudden change in the torque measurement value (or that the current torque measurement value has suddenly become much larger than the previous torque measurement value). For example, the reference value setting unit can experimentally (or empirically) measure the torque value (average value) of the motor due to the collision of the end effector in advance, and appropriately set (or determine) the collision judgment criterion value between the torque value of the motor due to the collision of the end effector measured in advance and the maximum value of the amount of change in the torque value per unit time under normal conditions (or the torque difference value).

[0083] Furthermore, if the collision of the end effector is determined during the process of determining the collision of the end effector (S400), the motor can be stopped or driven in the reverse direction (S500). The control unit can stop the motor or drive the motor in the reverse direction if the collision determination unit determines that the end effector has collided during the process of determining the collision of the end effector (S400). If the collision determination unit determines that the end effector has collided, the control unit can stop the motor or drive the motor in the reverse direction, thereby reducing damage caused by the collision of the end effector (for example, damage to the substrate transport device and / or the object to be collided with, or defects in the substrate) by stopping the motor's operation, and minimizing damage caused by the collision of the end effector by driving the motor in the reverse direction.

[0084] In the process of determining the collision of the end effector (S400), if the calculated torque difference value is greater than or equal to the set collision judgment criterion value, it can be determined that a collision of the end effector has occurred. In the process of determining the collision of the end effector (S400), the collision judgment unit determines the collision of the end effector based on the torque difference value, and if the torque difference value is greater than or equal to the set collision judgment criterion value, it can be determined that a collision of the end effector has occurred, and it can be determined that a collision of the end effector has occurred after confirming that the torque difference value has become larger than or equal to the critical torque difference value. When a collision of the end effector occurs, the currently measured torque value suddenly becomes very large, so the torque difference value also suddenly becomes large and becomes greater than or equal to the collision judgment criterion value (i.e., greater than or equal to the critical torque difference value). As a result, when the torque difference value is greater than or equal to the collision judgment criterion value, the collision judgment unit recognizes that the currently measured torque value has suddenly become very large and can determine that a collision of the end effector has occurred.

[0085] The method for operating the substrate transport apparatus according to the present invention may further include a step (S250) of recording the measurement position of the torque value.

[0086] The measurement position of the torque value can be recorded (S250). The measurement position storage unit of the collision sensing unit can record (or store) the measurement position of the torque value, and it is possible to determine at what position the torque value of the motor was measured. For example, the position of the end effector (as a result of the motor's operation) can be recorded using the measurement position of the torque value, or the measurement position of the torque value can be recorded using the rotation angle and / or rotation speed of the rotating shaft.

[0087] Furthermore, the process of stopping the motor's operation or driving the motor in the reverse direction (S500) may include the process of driving the motor to the previous measurement position and then stopping the motor's operation (S510).

[0088] The motor can be driven to the previous measurement position and then stopped (S510). The control unit can drive the motor to the previous measurement position (for example, the immediate preceding measurement position) and then stop the motor. If the collision determination unit determines that the end effector has collided, the control unit can drive the motor in the reverse direction, and by driving the motor in the reverse direction, the position of the end effector or the rotation angle (or rotation speed) of the rotation axis can be adjusted (or moved) to the previous measurement position, and the motor can be stopped at the previous measurement position. Here, the previous measurement position may also be the immediate preceding measurement position, and damage caused by the collision of the end effector can be confirmed (or inspected). If maintenance of the end effector is performed at the previous measurement position (i.e., the immediate preceding measurement position), or if the damage caused by the collision of the end effector is very minor, the transport (process) can be continued again from the previous measurement position while measuring (or recording) the torque value of the motor and the measurement position of the torque value (periodically).

[0089] Therefore, the operating method of the substrate transport apparatus according to the present invention allows the measurement position of the torque value to be recorded and the motor to be driven in the reverse direction to the previous measurement position, thereby minimizing damage caused by collisions with the end effector, facilitating maintenance, and improving the ability to confirm damage caused by collisions with the end effector and / or the continuity of the transport (process) after maintenance.

[0090] The method for operating the substrate transport apparatus according to the present invention may further include a step (S240) of storing the measured torque value of the motor.

[0091] The measured torque value of the motor can be stored (S240). The measurement value storage unit of the collision sensing unit can store the measured torque value of the motor and can measure and record (or store) the torque measurement value for the current period in real time. At this time, when the measured torque value of the motor is stored in the measurement value storage unit, the measurement position storage unit can record the measurement position of the torque value. Through this, the torque measurement value for the immediately preceding period can be read and compared (or calculated) with the torque measurement value for the current period that is currently being measured. On the other hand, the torque value of the motor stored in the measurement value storage unit is (periodically) updatable. That is, the measurement value storage unit can repeatedly store (or write) and update (or erase), and in such cases the storage capacity becomes smaller and the processing speed becomes faster.

[0092] In the process of measuring the torque value of the motor (S200), the torque value of the motor can be measured at a predetermined period, and in the process of calculating the torque difference value (S300), the torque difference value between the torque measurement value of the current period and the torque measurement value of the previous period can be calculated for each predetermined period. In the process of measuring the torque value of the motor (S200), the torque measuring unit can measure the torque value of the motor at a predetermined period, and according to the predetermined period, it can determine (or identify) the object to be compared (or calculated) with the currently measured torque value (i.e., torque measurement values ​​measured at different times). At this time, the currently measured torque value can be compared with the torque measurement value measured in the previous period (or the torque measurement value of the previous period), and the torque measurement value measured in the previous period can be subtracted (or subtracted) from the currently measured torque value.

[0093] Furthermore, in the process of calculating the torque difference value (S300), the difference value calculation unit can calculate the torque difference value between the torque measurement value of the current period (i.e., the torque measurement value currently measured) and the torque measurement value of the previous period (i.e., the torque measurement value measured in the previous period) at each predetermined period. This makes it possible to calculate the torque difference value in real time while measuring the torque measurement value of the current period in real time, and to determine the collision of the end effector by comparing the torque difference value calculated at each predetermined period with the collision judgment criterion value. Through this, it is possible to sense (or determine) the collision of the end effector over the entire duration of the transport (process).

[0094] The process of moving the end effector (S100) may include an acceleration process (S110) in which the torque of the motor is increased to move it, a constant velocity process (S120) in which the torque of the motor is kept within a predetermined deviation to move it, and a deceleration process (S130) in which the torque of the motor is decreased to move it.

[0095] The acceleration process (S110) which increases the torque of the motor to move the stationary end effector and / or the rotating shaft accelerates (or accelerates its movement), and for this purpose, the torque of the motor may be increased.

[0096] The constant-velocity process (S120) that moves the motor while maintaining the motor's torque within a predetermined deviation moves the end effector (or rotates the rotation shaft) at a constant speed, and for this purpose, the motor's torque may be maintained within a predetermined deviation.

[0097] The deceleration process (S130) that reduces the torque of the motor to move it reduces the rotational speed of the end effector and / or the rotating shaft (or moves it at a reduced speed) to stop the end effector and / or the rotating shaft, and as a result the torque of the motor may decrease.

[0098] Here, during the acceleration process (S110), the torque of the motor increases significantly, which may cause the torque difference between the current torque measurement and the previous torque measurement to increase. When the torque difference increases, the collision judgment criterion also increases, and when the collision judgment criterion increases, the sensitivity of the end effector's collision detection may decrease. In particular, during the constant velocity process (S120), the average value of the torque difference is very low and close to "0", so even if the torque difference increases due to a collision with the end effector, it will not exceed the increased collision judgment criterion, which may cause the end effector to fail to detect a collision.

[0099] The method for operating the substrate transport apparatus according to the present invention may further include a step (S40) for setting the time of the acceleration process (S110).

[0100] The time of the acceleration process (S110) can be set (S40). The acceleration time setting unit can set the time of the acceleration process (S110) and adjust the amount of change in the torque value per unit time (or per cycle T) during the acceleration process (S110). For example, the acceleration time setting unit can adjust the time of the acceleration process (S110) to lower the maximum value of the amount of change in the torque value per unit time (or the torque difference value) during the acceleration process (S110), thereby lowering the collision judgment criterion value determined according to the maximum value of the amount of change in the torque value per unit time.

[0101] In this case, the maximum value of the change in the torque value per unit time can be lower the smaller the maximum torque value in the acceleration process (S110) and the longer the duration of the acceleration process (S110), and the duration of the acceleration process (S110) can be appropriately determined according to the travel distance of the end effector. When the travel distance of the end effector becomes shorter, the duration of the acceleration process (S110) inevitably becomes shorter relatively, and the maximum torque value in the acceleration process (S110) also becomes smaller. On the other hand, if the travel distance of the end effector is sufficiently long, the maximum torque value in the acceleration process (S110) becomes larger for smooth (or high-speed) transport (process), and the duration of the acceleration process (S110) can be set (to be longer) so that the maximum value of the change in the torque value per unit time becomes lower according to the increased maximum torque value in the acceleration process (S110).

[0102] In the process of setting the reference value (S50), the collision judgment reference value can be set according to the rate of change (or amount of change) of the motor's torque value with respect to the set acceleration process (S110) time. If the rate of change of the motor's torque value with respect to the set acceleration process (S110) time (amount of change of the motor's torque value / set acceleration process time) is large, the torque difference value (or the amount of change of the torque value per unit time) in the acceleration process (S110) will be large, and as a result, the collision judgment reference value can be set to a large value. Conversely, if the rate of change of the motor's torque value with respect to the set acceleration process (S110) time is small, the torque difference value in the acceleration process (S110) will be small, and as a result, the collision judgment reference value can be set to a small value. In other words, the reference value setting unit can set the collision judgment reference value in proportion to the rate of change of the motor's torque value with respect to the set acceleration process (S110) time.

[0103] At this time, the maximum torque value in the acceleration process (S110) is fixed (or determined) according to the distance traveled by the end effector (experimentally or empirically), so the collision judgment criterion value can be set according to the set time of the acceleration process (S110), and the maximum value of the amount of change of the torque value per unit time (in the acceleration process) is determined according to the set time of the acceleration process (S110). Only when the collision judgment criterion value becomes greater than the maximum value of the amount of change of the torque value per unit time can it be prevented from determining that a collision of the end effector has occurred even if a collision of the end effector has not occurred. Therefore, in the process of setting the criterion value (S50), the criterion value setting unit can set the collision judgment criterion value so that it is greater than the maximum value of the amount of change of the torque value per unit time according to the set time of the acceleration process (S110).

[0104] The method for operating the substrate transport apparatus according to the present invention may further include a step (S45) of setting the measurement period of the torque value of the motor according to the set time of the acceleration process (S110).

[0105] The measurement period for the motor's torque value can be set according to the set time of the acceleration process (S110) (S45). The measurement period setting unit of the collision detection unit can set the measurement period for the motor's torque value according to the set time of the acceleration process (S110), thereby enabling the measurement of the motor's torque value at the set period (i.e., the predetermined period), and by measuring the motor's torque value at each set period, the collision of the end effector can be detected (or determined) in real time by comparing it with the torque measurement value of the immediately preceding period.

[0106] For example, the measurement cycle setting unit can set the measurement cycle for the motor torque value so that the torque value of the motor is measured at least once during the acceleration process (S110) according to the set time of the acceleration process (S110), or it can set the measurement cycle for the motor torque value so that the torque value of the motor is measured at least twice or more in order to effectively detect the collision of the end effector during the acceleration process (S110). If the torque value of the motor is measured for the first time during the acceleration process (S110), the torque value of the motor measured first (or initially) can be compared (or calculated) to "0", and the measured torque value of the motor can be the same as the torque difference value.

[0107] In the process of setting the measurement period (S45), the measurement period of the motor torque value can be set to be shorter than the set acceleration process (S110) time. In the process of setting the measurement period (S45), the measurement period setting unit can set the measurement period of the motor torque value to be shorter than the set acceleration process (S110) time. In order to detect the collision of the end effector during the acceleration process (S110), the motor torque value must be measured at least once during the acceleration process (S110), and for this reason, the measurement period setting unit can set the measurement period of the motor torque value to be shorter than the set acceleration process (S110) time. As a result, the collision of the end effector can be detected even during the acceleration process (S110), and the collision of the end effector occurring during the process of moving the end effector (S100) (or the overall process of moving the end effector including the acceleration process, the constant velocity process and the deceleration process) can be effectively detected.

[0108] For example, the measurement cycle setting unit can set the measurement cycle of the motor's torque value to be as short as 4 to 12 milliseconds (ms), and can set the measurement cycle of the motor's torque value to a short time (e.g., 4 to 12 ms) that prevents or minimizes damage to the end effector and the circuit board.

[0109] In the process of measuring the torque value of the motor (S200), the torque value of the motor can be measured at least twice during the acceleration process (S110). In the process of measuring the torque value of the motor (S200), the torque measuring unit can measure the torque value of the motor at least twice during the acceleration process (S110). If the torque value of the motor is not measured even once during the acceleration process (S110), the collision of the end effector cannot be detected during the acceleration process (S110). If the torque value of the motor is measured only once during the acceleration process (S110), the measured torque value of the motor is the same as the torque difference value, so the maximum value of the torque value of the motor becomes larger, and the collision judgment criterion value inevitably becomes larger. When the collision judgment criterion value becomes large, the sensitivity of the end effector's collision detection decreases, and in particular, the sensitivity of the end effector's collision detection decreases during the constant velocity process (S120). Therefore, the torque measuring unit can measure the torque value of the motor at least twice during the acceleration process (S110) so that the sensitivity of the end effector's collision detection improves during all of the end effector's movement processes (all of the acceleration process, the constant velocity process, and the deceleration process).

[0110] In the process of measuring the torque value of the motor (S200), the torque value of the motor can be measured at least at the starting point (or the start time) of the acceleration process (S110). In the process of measuring the torque value of the motor (S200), the torque measuring unit can measure the torque value of the motor at least at the starting point (or the origin) of the acceleration process (S110). The torque measuring unit can measure the torque value of the motor at the origin (or the starting point of the acceleration process), can measure the torque value of the motor at the origin before starting the acceleration process (S110), and can also measure the torque value of the motor at the origin at period 0 (or the start time of the acceleration process). The torque value of the motor measured at the start point (or the origin) of the acceleration process (S110) can be compared (or calculated) with the torque value of the motor first measured when the end effector starts moving during the acceleration process (S110). The torque difference value can then be calculated by subtracting (or deducting) the torque value of the motor measured at the start point of the acceleration process (S110) (or the torque value measured for 0 cycles) from the torque value of the motor measured first (or the torque value measured for 1 cycle). As a result, even if only the torque value of the motor for 1 cycle is measured during the acceleration process (S110), the collision of the end effector during the acceleration process can be detected by calculating the torque difference value by subtracting (or deducting) the torque value measured for 0 cycles (or the torque value of the motor measured at the start point of the acceleration process) from the torque value measured for 1 cycle.

[0111] Thus, in this invention, by calculating the torque difference between two torque measurements taken with a time difference using a collision sensing unit, and judging the collision of the end-effector based on this, the collision of the end-effector can be effectively detected, and through this, the motor can be stopped or rotated in the reverse direction, thereby minimizing damage caused by the collision of the end-effector. In other words, by judging the collision of the end-effector using the amount of torque change over time, using two torque measurements taken with a time difference rather than the absolute amount of torque, the collision of the end-effector can be detected regardless of the movement speed and distance of the end-effector, and the collision of the end-effector can be effectively detected both when the end-effector is moving while accelerating or decelerating and when the end-effector is moving at a constant speed, and it becomes unnecessary to subdivide and change the collision judgment criteria value according to the movement speed and distance of the end-effector.

[0112] Although preferred embodiments of the present invention have been illustrated and described above, the present invention is not limited in any way to the embodiments described above. A person with ordinary skill in the art to which the present invention belongs will understand that various modifications can be made and other equivalent embodiments can be adopted without departing from the gist of the present invention as claimed in the claims. Therefore, the scope of technical protection of the present invention should be defined by the appended claims.

Claims

1. The end effector that supports the circuit board, A motor that provides power for moving the end effector and is capable of accelerated driving with increased torque, A collision detection unit that detects collisions with the end effector, A control unit controls the drive of the motor in response to the collision detection by the collision detection unit, An acceleration time setting unit for setting the acceleration drive time, Equipped with, The aforementioned collision sensing unit A torque measuring unit for measuring the torque value of the motor, A difference value calculation unit calculates the torque difference between two torque measurements taken with a time difference, A collision determination unit that determines the collision of the end effector based on the torque difference value, A reference value setting unit for setting collision judgment criteria values, A measurement cycle setting unit sets the measurement cycle of the motor's torque value according to the set acceleration drive time, Equipped with, The collision determination unit determines that the end effector has collided if the torque difference value is equal to or greater than the collision determination criterion value. The control unit, when the collision detection unit determines that the end effector has collided, stops the motor from driving or drives the motor in the reverse direction. The measurement cycle setting unit sets the measurement cycle of the motor torque value to be shorter than the set acceleration drive time, in a substrate transport device.

2. The collision sensing unit further includes a measurement position storage unit that records the measurement position of the torque value, The substrate transport apparatus according to claim 1, wherein the control unit drives the motor to the previous measurement position and then stops driving the motor.

3. The collision sensing unit further comprises a measurement value storage unit that stores the measured torque value of the motor, The torque measuring unit measures the torque value of the motor at a predetermined period, The substrate transport apparatus according to claim 1, wherein the difference value calculation unit calculates a torque difference value between the torque measurement value of the current period and the torque measurement value of the previous period at each predetermined period.

4. The drive of the aforementioned motor is Constant speed drive in which the torque of the motor is maintained within a predetermined deviation, The reduction drive reduces the torque of the motor, A substrate transport apparatus according to claim 1, including the following:

5. The substrate transport apparatus according to claim 1, wherein the reference value setting unit sets the collision judgment reference value according to the rate of change of the motor torque value with respect to the set acceleration drive time.

6. The substrate transport apparatus according to claim 1, wherein the torque measuring unit measures the torque value of the motor at least twice during the acceleration drive.

7. The substrate transport apparatus according to claim 1, wherein the torque measuring unit measures the torque value of the motor at least at the starting point of the acceleration drive.

8. The process involves providing power via a motor to move the end effector on which the circuit board is supported, The process involves the torque measuring unit of the collision sensing unit that detects the collision of the end effector measuring the torque value of the motor multiple times with a time difference, The collision sensing unit's difference value calculation unit performs a process of calculating the torque difference value of two measured torque values, The collision judgment unit of the collision sensing unit determines the collision of the end effector based on the calculated torque difference value, The collision detection unit's reference value setting unit performs a process of setting a collision judgment reference value, In the process of determining the collision of the end effector, if the collision determination unit determines that the end effector has collided, the control unit that controls the motor's drive stops the motor's drive or drives the motor in the reverse direction based on the collision detection by the collision sensing unit. Includes, The process of moving the end effector includes an acceleration process in which the torque of the motor is increased to move it. The acceleration time setting unit includes a process for setting the time of the acceleration process, The collision sensing unit's measurement cycle setting unit performs a process of setting the measurement cycle of the motor's torque value according to the set acceleration process time, It further includes, In the process of determining the collision of the end effector, the collision determination unit determines that the end effector has collided if the calculated torque difference value is equal to or greater than the set collision determination criterion value. In the process of setting the measurement cycle, the acceleration time setting unit sets the measurement cycle of the motor torque value so that it is shorter than the set acceleration process time.

9. The process further includes recording the measurement position of the torque value, The method for operating a substrate transport apparatus according to claim 8, wherein the process of stopping the motor's operation or driving the motor in the reverse direction includes the process of stopping the motor's operation after driving it to the previous measurement position.

10. The process further includes storing the measured torque value of the motor, In the process of measuring the torque value of the motor, the torque value of the motor is measured at a predetermined period, In the process of calculating the torque difference value, the method of operating a substrate transport apparatus according to claim 8, wherein, for each predetermined period, the torque difference value between the torque measurement value of the current period and the torque measurement value of the immediately preceding period is calculated.

11. The process of moving the aforementioned end effector is as follows: A constant-velocity process for moving the motor while maintaining its torque within a predetermined deviation, A deceleration process that reduces the torque of the motor to move it, A method for operating a substrate transport apparatus according to claim 8, further comprising:

12. In the process of setting the reference value, the collision judgment reference value is set according to the rate of change of the motor torque value with respect to the set acceleration process time, as described in claim 8.

13. The method for operating a substrate transport apparatus according to claim 8, wherein, in the process of measuring the torque value of the motor, the torque value of the motor is measured at least twice or more during the acceleration process.

14. The method for operating a substrate transport apparatus according to claim 8, wherein, in the process of measuring the torque value of the motor, the torque value of the motor is measured at least at the starting point of the acceleration process.

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