A robot system for transporting substrates, and a method for correcting at least one of the placement and removal positions of substrates by the substrate transport robot.

Abstract

To provide a substrate transport robot system that can shorten a time required to correct the position of a substrate in a horizontal plane.SOLUTION: In a substrate transfer robot system 100, a control unit 13 acquires a center position 20a of a target member 20 in a horizontal plane on the basis of a first tangent line TL1 corresponding to the outer peripheral edge 20b of the target member 20 obtained using a detection unit 14 by approaching the target member 20 with a hand 12 from a first direction in the horizontal plane and a second tangent line TL2 corresponding to the outer peripheral edge 20b of the target member 20 obtained using the detection unit 14 by approaching the target member 20 with the hand 12 from a second direction in a horizontal plane different from the first direction.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] This disclosure relates to a substrate transfer robot system and a method for correcting at least one of the placement position and the pickup position of a substrate by the substrate transfer robot.

Background Art

[0002] Conventionally, a substrate transfer robot that corrects the placement position of a substrate in a horizontal plane is known. For example, in Patent Document 1, based on the center position of a target in a specified horizontal plane and the relative positional relationship in the horizontal plane between the center position of the target and the substrate placement location that has been acquired in advance, a substrate transfer robot that corrects the placement position of a substrate in the horizontal plane is disclosed. The target is arranged at a predetermined position with respect to the substrate placement location in order to correct the placement position of the substrate in the horizontal plane.

[0003] The substrate transfer robot disclosed in Patent Document 1 identifies the center position of the target in the horizontal plane as follows. First, the hand attached to the tip of the robot arm is brought close to the target until the target begins to be detected by the sensor. Then, the hand is swung. Based on the detected signal of the sensor that has changed by swinging the hand, the offset amount of the hand is calculated. Based on the calculated offset amount, the position of the hand is shifted. Then, the swinging of the hand, the calculation of the offset amount of the hand, the shifting of the position of the hand, etc. are repeated until the center position of the target in the horizontal plane is identified.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the substrate transport robot described in Patent Document 1, it is necessary to repeatedly swing the hand, calculate the offset amount of the hand, shift the position of the hand, etc., in order to determine the center position of the target in the horizontal plane, so it is thought that the time required to determine the position of the target in the horizontal plane will be relatively long. In other words, it is thought that the time required to correct the placement position of the substrate in the horizontal plane will be relatively long. Although not described in Patent Document 1, the same problems as when correcting the pick-up position of the substrate in the horizontal plane are likely to occur in a substrate transport robot like the one described in Patent Document 1. For this reason, a configuration is desired that can shorten the time required to correct at least one of the placement position and pick-up position of the substrate in the horizontal plane.

[0006] This disclosure is made to solve the above-mentioned problems, and one of its objectives is to provide a substrate transport robot system that can reduce the time required to correct at least one of the placement and removal positions of a substrate in the horizontal plane, and a method for correcting at least one of the placement and removal positions of a substrate by a substrate transport robot. [Means for solving the problem]

[0007] To achieve the above objective, a substrate transport robot system according to the first aspect of this disclosure comprises a substrate transport robot for transporting substrates, a horizontal target member having a circular shape when viewed from above and below, for correcting at least one of the placement position and pick-up position of the substrate in the horizontal plane, and a control unit, wherein the substrate transport robot comprises a robot arm, a hand attached to the tip of the robot arm, and a detection unit positioned on the hand for detecting the outer edge of the horizontal target member, and the control unit brings the hand closer to the horizontal target member from a first direction in the horizontal plane and obtains the horizontal target using the detection unit. Based on a first tangent corresponding to the outer edge of the target member and a second tangent corresponding to the outer edge of the horizontal target member obtained using the detection unit by approaching the horizontal target member from a second direction in the horizontal plane different from the first direction, the center position of the horizontal target member in the horizontal plane is obtained. Based on the obtained center position of the horizontal target member in the horizontal plane and the previously obtained relative positional relationship in the horizontal plane between the center position of the horizontal target member and the substrate placement location, at least one of the placement position and pick-up position of the substrate in the horizontal plane is corrected.

[0008] In the substrate transport robot system according to the first aspect of this disclosure, as described above, the control unit acquires the center position of the horizontal target member in the horizontal plane based on a first tangent corresponding to the outer edge of the horizontal target member acquired using a detection unit by approaching the horizontal target member from a first direction in the horizontal plane with the hand, and a second tangent corresponding to the outer edge of the horizontal target member acquired using a detection unit by approaching the horizontal target member from a second direction in the horizontal plane different from the first direction with the hand. As a result, by acquiring each of the first and second tangents by 1 degree, the center position of the horizontal target member can be immediately acquired based on the first and second tangents. In other words, the center position of the horizontal target member in the horizontal plane can be acquired more quickly compared to cases where the hand's swing, the calculation of the hand's offset amount, the hand's position shift, etc. are repeated in order to determine the center position of the target member in the horizontal plane. This makes it possible to quickly correct at least one of the placement position and pickup position of the substrate in the horizontal plane. As a result, the time required to correct at least one of the placement and removal positions of the substrate in the horizontal plane can be reduced.

[0009] Furthermore, in order to achieve the above objective, a method for correcting at least one of the placement position and pick-up position of a substrate by a substrate transport robot according to the second aspect of this disclosure comprises a robot arm, a hand attached to the tip of the robot arm, and a detection unit that has a circular shape when viewed from above and below and detects a horizontal target member for correcting at least one of the placement position and pick-up position of a substrate in a horizontal plane, wherein the hand is brought close to the horizontal target member from a first direction in the horizontal plane, and the detection unit is located at the end of the robot arm The system includes: using a unit to obtain a first tangent to the outer edge of the horizontal target member; bringing the hand close to the horizontal target member from a second direction in the horizontal plane different from the first direction, and using a detection unit to obtain a second tangent to the outer edge of the horizontal target member; obtaining the center position of the horizontal target member based on the obtained first tangent and the obtained second tangent; and correcting at least one of the placement position and pick-up position of the substrate in the horizontal plane based on the obtained center position and the previously obtained relative positional relationship between the center position and the substrate placement location in the horizontal plane.

[0010] In the method for correcting the placement and pickup positions of a substrate by a substrate transport robot according to the second aspect of this disclosure, as described above, the hand is brought close to the horizontal target member from a first direction in the horizontal plane, and the detection unit is used to acquire a first tangent to the outer edge of the horizontal target member. The hand is also brought close to the horizontal target member from a second direction in the horizontal plane different from the first direction, and the detection unit is used to acquire a second tangent to the outer edge of the horizontal target member. The center position of the horizontal target member is then acquired based on the acquired first tangent and the acquired second tangent. As a result, similar to the substrate transport robot system according to the first aspect, once the first and second tangents are acquired, the center position of the horizontal target member can be immediately acquired based on the first and second tangents. Consequently, similar to the substrate transport robot system according to the first aspect, the time required to correct the placement position of the substrate in the horizontal plane can be reduced. [Effects of the Invention]

[0011] According to this disclosure, as described above, it is possible to provide a substrate transport robot system that can shorten the time required to correct at least one of the placement position and removal position of a substrate in a horizontal plane, and a method for correcting at least one of the placement position and removal position of a substrate by a substrate transport robot. [Brief explanation of the drawing]

[0012] [Figure 1] This is a plan view showing the overall configuration of a substrate transport robot system according to one embodiment of the present disclosure. [Figure 2] This is a perspective view showing a substrate transport robot according to one embodiment of the present disclosure. [Figure 3] This figure illustrates the acquisition of a first tangent in a substrate transport robot system according to one embodiment of the present disclosure. [Figure 4]This figure illustrates the acquisition of a second tangent in a substrate transport robot system according to one embodiment of the present disclosure. [Figure 5] This figure illustrates how to obtain the center position of a target member in a substrate transport robot system according to one embodiment of the present disclosure. [Figure 6] This figure illustrates how to obtain the position of a target member in the vertical direction in a robot system for transporting substrates according to one embodiment of the present disclosure. [Figure 7] This figure illustrates how the inclination of the coordinate system of the substrate placement area relative to the coordinate system of the robot arm in a substrate transport robot system according to one embodiment of the present disclosure is obtained. [Figure 8] This figure shows a state in a substrate transport robot system according to one embodiment of the present disclosure where the direction in which the hand approaches the target member is not perpendicular to the direction of the detected light. [Figure 9] This figure illustrates how to obtain the inclination in a direction perpendicular to the direction of the detected light with respect to the direction in which the hand approaches the target member in a substrate transport robot system according to one embodiment of the present disclosure. [Figure 10] This figure shows a state in a substrate transport robot system according to one embodiment of the present disclosure, where the direction in which the hand approaches the target member is perpendicular to the direction of the detected light. [Figure 11] This is a correction flow for the placement of a substrate in a substrate transport robot system according to one embodiment of the present disclosure. [Modes for carrying out the invention]

[0013] The embodiments of this disclosure will be described below with reference to the drawings.

[0014] [Configuration of a robot system for transporting circuit boards] Referring to Figures 1 to 10, the configuration of a substrate transport robot system 100 according to one embodiment of the present disclosure will be described.

[0015] (Overall configuration of the robot system for transporting circuit boards) As shown in FIG. 1, the substrate transfer robot system 100 includes a substrate transfer robot 10 and a target member 20. Note that the target member 20 is an example of a horizontal target member, a first horizontal target member, and a vertical target member.

[0016] The substrate transfer robot 10 is a robot that transfers the substrate W to the placement area 200 of the substrate W. The placement area 200 of the substrate W is, for example, a FOUP (Front Opening Unify Pod).

[0017] The target member 20 is a member for correcting the placement position PP of the substrate W in the horizontal plane and in the vertical direction by the substrate transfer robot 10. That is, the target member 20 is a member for performing correction to make the placement position PP of the substrate W coincide with the placement area 200 of the substrate W. The target member 20 is arranged at a predetermined position set in advance with respect to the placement area 200 of the substrate W. That is, the relative positional relationship in the horizontal plane between the center position 20a of the target member 20 and the placement area 200 of the substrate W does not change. The target member 20 has a circular shape when viewed from the vertical direction.

[0018] (Configuration of the substrate transfer robot) As shown in FIG. 2, the substrate transfer robot 10 includes a robot arm 11, a hand 12, and a control unit 13.

[0019] The robot arm 11 is a horizontally articulated robot arm. The robot arm 11 is controlled by the control unit 13 to operate a plurality of joint portions.

[0020] The control unit 13 controls the operation of the robot arm 11, the operation of the hand 12, etc. The control unit 13 includes a processor such as a CPU (Central Processing Unit) and a memory such as a ROM (Read Only Memory) and a RAM (Random Access Memory).

[0021] The hand 12 is attached to the tip of the robot arm 11. The hand 12 holds the substrate W. The hand 12 includes a bifurcated first tip 12a and a second tip 12b.

[0022] As shown in Figure 3, the robot arm 11 is equipped with a detection unit 14. The detection unit 14 is a mapping sensor that detects the presence or absence of a substrate W in the substrate W placement area 200. The detection unit 14 is located on the hand 12. The detection unit 14 is a transmissive sensor that detects a target member 20 based on whether or not detection light DL passing through the space S between the first tip 12a and the second tip 12b is blocked. In Figure 3, an example is shown where the detection light DL is directed from the second tip 12b to the first tip 12a, but the detection light DL may also be directed from the first tip 12a to the second tip 12b.

[0023] (Correction of the horizontal position of the substrate) As shown in Figure 3, the control unit 13 approaches the target member 20 from a first direction in the horizontal plane and uses the detection unit 14 to acquire a first tangent line TL1 (see Figure 5) corresponding to the outer edge 20b of the target member 20. Specifically, the control unit 13 controls the movement of the robot arm 11 so that the hand 12 approaches the target member 20 from a first direction in the horizontal plane until the outer edge 20b of the target member 20 is detected by the detection unit 14. Then, the control unit 13 acquires the first tangent line TL1 as a straight line along the direction of the detected light DL at the position of the hand 12 where the outer edge 20b of the target member 20 is detected by the detection unit 14. Note that the direction in which the hand 12 approaches the target member 20 is parallel to the Y direction of the coordinate system C1 of the robot arm 11.

[0024] Then, as shown in Figure 4, the control unit 13 approaches the target member 20 from a second direction in the horizontal plane, different from the first direction, and uses the detection unit 14 to acquire a second tangent TL2 (see Figure 5) corresponding to the outer edge 20b of the target member 20. Specifically, the control unit 13 controls the movement of the robot arm 11 so that the hand 12 approaches the target member 20 from a second direction in the horizontal plane until the outer edge 20b of the target member 20 is detected by the detection unit 14. Then, the control unit 13 acquires the second tangent TL2 as a straight line along the direction of the detected light DL at the position of the hand 12 where the outer edge 20b of the target member 20 is detected by the detection unit 14.

[0025] Then, as shown in Figure 5, the control unit 13 obtains the center position 20a of the target member 20 in the horizontal plane based on the first tangent line TL1 and the second tangent line TL2. Specifically, the control unit 13 obtains the intersection point of the perpendicular PL1 of the first tangent line TL1 and the perpendicular PL2 of the second tangent line TL2 as the center position 20a of the target member 20. In order to improve the accuracy of obtaining the center position 20a of the target member 20 in the horizontal plane, the control unit 13 may use, for example, the radius R of the target member 20 in addition to the first tangent line TL1 and the second tangent line TL2 when obtaining the center position 20a of the target member 20 in the horizontal plane.

[0026] The control unit 13 then corrects the placement position PP of the substrate W in the horizontal plane based on the acquired center position 20a of the target member 20 in the horizontal plane and the previously acquired relative positional relationship in the horizontal plane between the center position 20a of the target member 20 and the placement area 200 of the substrate W. Specifically, the control unit 13 corrects the placement position PP of the substrate W in the horizontal plane based on the acquired center position 20a of the target member 20 in the horizontal plane and the previously acquired relative positional relationship in the horizontal plane between the center position 20a of the target member 20 and the center position 200a of the placement area 200 of the substrate W. The control unit 13 has previously acquired the relative positional relationship in the horizontal plane between the center position 20a of the target member 20 and the center position 200a of the placement area 200 of the substrate W before correcting the placement position PP of the substrate W in the horizontal direction.

[0027] (Correction of the placement of the circuit board in the vertical direction) As shown in Figure 6, the control unit 13 acquires the position 20c of the target member 20 in the vertical direction based on the timing at which the detection unit 14 switches between detecting and not detecting the target member 20 in the vertical direction, obtained by moving the hand 12 vertically relative to the target member 20. Specifically, the control unit 13 moves the hand 12 vertically relative to the target member 20 from a state where the outer edge 20b of the target member 20 is detected by the detection unit 14 to a state where the outer edge 20b of the target member 20 is not detected by the detection unit 14. Then, based on the position of the hand 12 in the vertical direction at the timing at which the detection unit 14 switches between detecting and not detecting the outer edge 20b of the target member 20, the control unit 13 acquires the position 20c of the target member 20 in the vertical direction.

[0028] The control unit 13 then corrects the vertical position PP of the substrate W based on the acquired vertical position 20c of the target member 20 and the previously acquired vertical relative positional relationship between the position of the target member 20 and the substrate W placement area 200. The control unit 13 has previously acquired the vertical relative positional relationship between the position P of the target member 20 and the substrate W placement area 200 before correcting the vertical position PP of the substrate W.

[0029] (Acquiring the inclination of the coordinate system of the substrate's placement location relative to the coordinate system of the robot arm in the horizontal plane) As shown in Figure 7, the coordinate system C2 of the substrate W placement area 200 may be tilted relative to the coordinate system C1 of the robot arm 11 in the horizontal plane. In this case, the accuracy of correcting the placement position PP of the substrate W in the horizontal plane decreases. Therefore, when correcting the placement position PP of the substrate W in the horizontal plane, it is preferable for the substrate transport robot 10 to recognize the tilt α of the coordinate system C2 of the substrate W placement area 200 relative to the coordinate system C1 of the robot arm 11 in the horizontal plane. Thus, before correcting the placement position PP of the substrate W in the horizontal plane, the substrate transport robot 10 acquires the tilt α of the coordinate system C2 of the substrate W placement area 200 relative to the coordinate system C1 of the robot arm 11 in the horizontal plane, as follows.

[0030] The substrate transport robot system 100 includes a target member 21. Similar to the target member 20, the target member 21 is a member for correcting the placement position PP of the substrate W in the horizontal plane and vertical direction by the substrate transport robot 10. The target member 21 is positioned in a different location from the target member 20 in the horizontal plane. Specifically, the target member 21 is positioned on the opposite side of the target member 20. Furthermore, the target member 21 is positioned in the horizontal plane such that the line connecting the center position 20a of the target member 20 and the center position 21a of the target member 21 is parallel to the X direction of the coordinate system C2 of the substrate W placement area 200. Note that the target member 21 is an example of a second horizontal target member and a vertical target member.

[0031] Then, the control unit 13 obtains the center position 20a of the target member 20 and the center position 21a of the target member 21 in the horizontal plane using the method described above.

[0032] The control unit 13 then acquires the inclination α of the coordinate system C2 of the substrate W placement area 200 with respect to the coordinate system C1 of the robot arm 11, based on the center position 20a of the target member 20 in the horizontal plane, the center position 21a of the target member 21 in the horizontal plane, and the previously acquired relative positional relationship in the horizontal plane between the center position 20a of the target member 20 and the center position 21a of the target member 21. Specifically, the control unit 13 acquires the angle in the X direction of the coordinate system C2 of the substrate W placement area 200 with respect to the X direction of the coordinate system C1 of the robot arm 11 in the horizontal plane as the inclination α of the coordinate system C2 of the substrate W placement area 200 with respect to the coordinate system C1 of the robot arm 11. Note that the control unit 13 has previously acquired the relative positional relationship in the horizontal plane between the center position 20a of the target member 20 and the center position 21a of the target member 21 before correcting the horizontal placement position PP of the substrate W.

[0033] (Calibrate the robot arm's coordinate system so that the direction in which the hand approaches the target object is perpendicular to the direction of the detected light.)

[0034] As shown in Figure 8, there are cases where the direction in which the hand 12 approaches the target member 20 and the direction of the detection light DL are not orthogonal, such as when the detection unit 14 is mounted to the hand 12 so as to be offset from the design position. In this case, the accuracy of the correction of the placement position PP of the substrate W in the horizontal plane decreases. Therefore, when correcting the placement position PP of the substrate W in the horizontal plane, it is preferable for the substrate transport robot 10 to ensure that the direction in which the hand 12 approaches the target member 20 and the direction of the detection light DL are orthogonal. Thus, before correcting the placement position PP of the substrate W in the horizontal plane, the substrate transport robot 10 calibrates the coordinate system C1 of the robot arm 11 so that the direction in which the hand 12 approaches the target member 20 and the direction of the detection light DL are orthogonal, as shown below.

[0035] First, as shown in Figure 9, the control unit 13 approaches the target member 20 while changing the position where the detection light DL is blocked, and obtains the orientation of the detection light DL relative to the hand 12 based on multiple positions of the hand 12 where the detection light DL is blocked. Specifically, the control unit 13 approaches the target member 20 with the hand 12 and obtains a first position P1 of the hand 12 where the detection light DL is blocked. Then, the control unit 13 approaches the target member 20 while moving the hand 12 in the X direction, and obtains a second position P2 of the hand 12 where the detection light DL is blocked and which is different from the first position P1. Then, the control unit 13 obtains the direction of the straight line connecting the first position P1 and the second position P2 of the hand 12 with respect to the X direction of the coordinate system C1 of the robot arm 11 as the slope β of the detection light DL with respect to the direction perpendicular to the direction in which the hand 12 is approaching. Note that three or more positions where the detection light DL is blocked may be obtained in order to obtain the orientation of the detection light DL relative to the hand 12.

[0036] Then, as shown in Figure 10, the control unit 13 calibrates the coordinate system C1 of the robot arm 11 based on the direction of the acquired detection light DL so that the direction in which the hand 12 approaches the target member 20 is orthogonal to the direction of the detection light DL. Specifically, based on the inclination β of the detection light DL with respect to the direction orthogonal to the direction in which the hand 12 approaches the target member 20, the control unit 13 converts the coordinate system C1 of the robot arm 11 (see Figure 8), in which the direction in which the hand 12 approaches the target member 20 and the direction of the detection light DL are not orthogonal to the direction of the hand 12 approaching the target member 20, to the coordinate system C3 of the robot arm 11, in which the direction in which the hand 12 approaches the target member 20 and the direction of the detection light DL are orthogonal to the direction of the detection light DL.

[0037] [Method for correcting the placement of circuit boards using a circuit board transport robot] Referring to Figure 11, the method for correcting the placement position PP of the substrate W by the substrate transport robot 10 will be explained. In the following explanation of the method for correcting the placement position PP of the substrate W by the substrate transport robot 10, only the correction of the placement position PP of the substrate W in the horizontal plane will be explained.

[0038] First, as shown in Figure 11, in step S1, the hand 12 is brought close to the target member 20 from a first direction in the horizontal plane, and the detection unit 14 is used to acquire the first tangent line TL1 corresponding to the outer peripheral edge 20b of the target member 20.

[0039] Next, in step S2, the hand 12 is brought closer to the target member 20 from a second direction in the horizontal plane, different from the first direction, and the detection unit 14 is used to acquire a second tangent line TL2 corresponding to the outer peripheral edge 20b of the target member 20.

[0040] Next, in step S3, the center position 20a of the target member 20 is obtained based on the acquired first tangent TL1 and the acquired second tangent TL2.

[0041] Next, in step S4, the placement position PP of the substrate W in the horizontal plane is corrected based on the acquired center position 20a of the target member 20 in the horizontal plane and the previously acquired relative positional relationship in the horizontal plane between the center position 20a of the target member 20 and the placement area 200 of the substrate W.

[0042] [Effects of the Embodiment] In this embodiment, the following effects can be obtained.

[0043] (Effectiveness of the robot system for transporting circuit boards) In this embodiment, the control unit 13 acquires the center position 20a of the target member 20 in the horizontal plane based on a first tangent TL1 corresponding to the outer edge 20b of the target member 20, which is acquired using the detection unit 14 by approaching the target member 20 from a first direction in the horizontal plane with the hand 12, and a second tangent TL2 corresponding to the outer edge 20b of the target member 20, which is acquired using the detection unit 14 by approaching the target member 20 from a second direction in the horizontal plane different from the first direction with the hand 12. As a result, by acquiring the first tangent TL1 and the second tangent TL2 one degree each, the center position 20a of the target member 20 can be immediately acquired based on the first tangent TL1 and the second tangent TL2. In other words, the center position 20a of the target member 20 in the horizontal plane can be acquired quickly compared to the case where the hand 12 is swung, the offset amount of the hand 12 is calculated, the position of the hand 12 is shifted, etc., in order to determine the center position 20a of the target member 20 in the horizontal plane. This allows for rapid correction of the substrate W's position PP within the horizontal plane. As a result, the time required to correct the substrate W's position PP within the horizontal plane can be reduced.

[0044] In this embodiment, the detection unit 14 detects the position of the target member 20 for correcting the vertical position PP of the substrate W. The control unit 13 then acquires the vertical position of the target member 20 based on the timing at which the detection unit 14 switches between detecting and not detecting the target member 20 in the vertical direction, obtained by moving the hand 12 vertically relative to the target member 20. The control unit 13 also corrects the vertical position PP of the substrate W based on the acquired vertical position of the target member 20 and the previously acquired vertical relative positional relationship between the position of the target member 20 and the substrate W placement area 200. This allows for correction of the vertical position PP of the substrate W in addition to the horizontal position PP of the substrate W.

[0045] Furthermore, in this embodiment, the target member 20 is a member for correcting the position PP of the substrate W in the horizontal plane and in the vertical direction. This allows the correction of the position PP of the substrate W in the horizontal plane and in the vertical direction to be performed using a common target member 20. As a result, even when correcting the position PP of the substrate W in the vertical direction in addition to the position PP of the substrate W in the horizontal plane is required, the configuration can be simplified without adding a member for correcting the position PP of the substrate W in the vertical direction.

[0046] Furthermore, in this embodiment, the substrate transport robot system 100 includes a target member 21 positioned in a different location in the horizontal plane from the target member 20, in addition to the target member 20. The control unit 13 then acquires the inclination α of the coordinate system C2 of the substrate W placement area 200 with respect to the coordinate system C1 of the robot arm 11 in the horizontal plane, based on the center position 20a of the target member 20 in the horizontal plane, the center position 21a of the target member 21 in the horizontal plane, and the previously acquired relative positional relationship between the center position 20a of the target member 20 and the center position 21a of the target member 21 in the horizontal plane. As a result, even if the coordinate system C2 of the substrate W placement area 200 is inclined with respect to the coordinate system C1 of the robot arm 11 in the horizontal plane, the substrate transport robot 10 can recognize the inclination α of the coordinate system C2 of the substrate W placement area 200 with respect to the coordinate system C1 of the robot arm 11 in the horizontal plane. This makes it possible to suppress the decrease in the accuracy of correcting the placement position PP of the substrate W in the horizontal plane, which occurs due to the inclination of the coordinate system C2 of the substrate W placement area 200 relative to the coordinate system C1 of the robot arm 11 in the horizontal plane. Furthermore, the center position 20a of the target member 20 and the center position 21a of the target member 21 in the horizontal plane can be obtained more quickly than when repeatedly performing the swing of the hand 12, calculating the offset amount of the hand 12, shifting the position of the hand 12, etc., as described above. In other words, even when the inclination α of the coordinate system C2 of the substrate W placement area 200 relative to the coordinate system C1 of the robot arm 11 in the horizontal plane is obtained, the time required to correct the placement position PP of the substrate W in the horizontal plane can be reduced.

[0047] In this embodiment, the hand 12 includes a bifurcated first tip 12a and a second tip 12b. The detection unit 14 is a transmissive sensor that detects the target member 20 based on whether or not the detection light DL passing through the space S between the first tip 12a and the second tip 12b is blocked. The control unit 13 approaches the target member 20 with the hand 12 while changing the position where the detection light DL is blocked, and acquires the orientation of the detection light DL relative to the hand 12 based on multiple positions of the hand 12 where the detection light DL is blocked. The control unit 13 also calibrates the coordinate system C1 of the robot arm 11 based on the acquired orientation of the detection light DL so that the direction in which the hand 12 approaches the target member 20 and the orientation of the detection light DL are orthogonal. This makes it easy to make the direction in which the hand 12 approaches the target member 20 and the orientation of the detection light DL orthogonal, even if they are not orthogonal. This makes it possible to suppress a decrease in the accuracy of correcting the position PP of the substrate W in the horizontal plane, which occurs when the direction in which the hand 12 approaches the target member 20 is not orthogonal to the direction of the detection light DL.

[0048] (Effectiveness of the method for correcting the placement of circuit boards using a robot for transporting circuit boards) In this embodiment, the hand 12 is brought close to the target member 20 from a first direction in the horizontal plane, and the detection unit 14 is used to acquire a first tangent TL1 of the outer edge 20b of the target member 20. The hand 12 is also brought close to the target member 20 from a second direction in the horizontal plane different from the first direction, and the detection unit 14 is used to acquire a second tangent TL2 of the outer edge 20b of the target member 20. Based on the acquired first tangent TL1 and the acquired second tangent TL2, the center position 20a of the target member 20 is acquired. As a result, similar to the substrate transport robot system 100, once the first tangent TL1 and the second tangent TL2 are acquired, the center position 20a of the target member 20 can be immediately acquired based on the first tangent TL1 and the second tangent TL2. Consequently, similar to the substrate transport robot system 100, the time required to correct the placement position PP of the substrate W in the horizontal plane can be reduced.

[0049] [Differentiation] The embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. The scope of this disclosure is indicated by the claims rather than the description of the embodiments above, and further includes all modifications (modifications) within the meaning and scope equivalent to the claims.

[0050] For example, in the above embodiment, the control unit 13 is shown to calibrate the coordinate system C1 of the robot arm 11 so that the direction in which the hand 12 approaches the target member 20 is orthogonal to the direction of the detected light DL, based on the direction of the acquired detected light DL. However, the disclosure is not limited to this. In the disclosure, the control unit does not need to calibrate the coordinate system of the robot arm so that the direction in which the hand approaches the target member is orthogonal to the direction of the detected light, based on the direction of the acquired detected light. In that case, it is preferable that the detection unit is positioned relative to the hand so that the direction in which the hand approaches the target member is orthogonal to the direction of the detected light.

[0051] Furthermore, in the above embodiment, an example was shown in which the detection unit 14 is a transmissive sensor that detects the target member 20 based on whether or not the detection light DL passing through the space S between the first tip portion 12a and the second tip portion 12b is blocked, but the present disclosure is not limited to this. In this disclosure, the detection unit may be a reflective sensor. Also, the detection unit may be a sensor that does not use detection light. In that case, the hand does not have to be bifurcated.

[0052] Furthermore, in the above embodiment, an example was shown in which the control unit 13 acquires the inclination α of the coordinate system C2 of the substrate W placement area 200 with respect to the coordinate system C1 of the robot arm 11 in the horizontal plane, based on the center position 20a of the target member 20 in the horizontal plane, the center position 21a of the target member 21 in the horizontal plane, and the previously acquired relative positional relationship between the center position 20a of the target member 20 and the center position 21a of the target member 21 in the horizontal plane. However, the disclosure is not limited to this. In this disclosure, the control unit may acquire the inclination of the coordinate system of the substrate placement area with respect to the coordinate system of the robot arm in the horizontal plane by a method other than the method described above. Also, the control unit does not have to acquire the inclination of the coordinate system of the substrate placement area with respect to the coordinate system of the robot arm in the horizontal plane. In that case, it is preferable that the robot arm and the substrate placement area are arranged so that the coordinate system of the substrate placement area is not inclined with respect to the coordinate system of the robot arm in the horizontal plane.

[0053] Furthermore, while the above embodiment shows an example in which the substrate transport robot system 100 includes a target member 21 positioned in a different location in the horizontal plane from the target member 20, the disclosure is not limited thereto. In this disclosure, the substrate transport robot system may include only one target member.

[0054] Furthermore, while the above embodiment shows an example where the target member 20 is a member for correcting the position PP of the substrate W in the horizontal plane and in the vertical direction, the present disclosure is not limited thereto. In this disclosure, the target member for correcting the position of the substrate in the horizontal plane and the target member for correcting the position of the substrate W in the vertical direction may be separate members.

[0055] Furthermore, in the above embodiment, an example was shown in which the substrate transport robot 10 corrects the placement position PP of the substrate W in the vertical direction in addition to correcting the placement position PP of the substrate W in the horizontal direction, but the present disclosure is not limited to this. In the present disclosure, the substrate transport robot may correct only the placement position of the substrate W in the horizontal direction without correcting the placement position of the substrate W in the vertical direction.

[0056] Furthermore, in the above embodiment, an example was shown in which the control unit 13, which is provided in the substrate transport robot 10 and controls the movement of the robot arm 11, acquires the center position 20a of the target member 20 in the horizontal plane and corrects the placement position PP of the substrate W in the horizontal plane, but the disclosure is not limited to this. In this disclosure, the control unit that controls the movement of the robot arm and the like, and the control unit that acquires the center position of the target member in the horizontal plane and corrects the acquired center position of the target member in the horizontal plane with the placement position of the substrate in the horizontal plane, may be separate control units. Also, the substrate transport robot does not need to be provided with a control unit that acquires the center position of the target member in the horizontal plane and corrects the acquired center position of the target member in the horizontal plane with the placement position of the substrate in the horizontal plane.

[0057] Furthermore, although the above embodiment shows an example in which the placement position PP of the substrate W is corrected, the disclosure is not limited thereto. In this disclosure, instead of correcting the placement position of the substrate, the removal position of the substrate may be corrected, or both the placement position and the removal position of the substrate may be corrected. When the removal position of the substrate is corrected, the target member becomes a member for correcting the removal position of the substrate to match the placement position of the substrate.

[0058] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, dedicated processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuits. In this disclosure, a circuit, unit, or means is hardware that performs the enumerated functions, or hardware programmed to perform the enumerated functions. The hardware may be hardware disclosed herein, or other known hardware that is programmed or configured to perform the enumerated functions. If the hardware is a processor, which is considered a type of circuit, then the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or the processor.

[0059] [Aspect] Those skilled in the art will understand that the exemplary embodiments described above are specific examples of the following embodiments.

[0060] (Item 1) A robot for transporting circuit boards, A horizontal target member having a circular shape when viewed from above and below, for correcting at least one of the placement position and position of the substrate in the horizontal plane, It comprises a control unit and, The aforementioned substrate transport robot is A robotic arm and A hand attached to the tip of the robot arm, The hand is equipped with a detection unit that detects the outer edge of the horizontal target member, The control unit, Based on the first tangent line corresponding to the outer edge of the horizontal target member obtained using the detection unit by approaching the horizontal target member with the hand from a first direction in the horizontal plane, and the second tangent line corresponding to the outer edge of the horizontal target member obtained using the detection unit by approaching the horizontal target member with the hand from a second direction in the horizontal plane different from the first direction, the center position of the horizontal target member in the horizontal plane is obtained. A robot system for transporting substrates, which corrects at least one of the placement position and the pick-up position of the substrate in a horizontal plane based on the acquired center position of the horizontal target member in a horizontal plane and the previously acquired relative positional relationship in a horizontal plane between the center position of the horizontal target member and the substrate placement area.

[0061] (Item 2) The system further comprises vertical target members for correcting at least one of the placement position and the removal position of the substrate in the vertical direction, The detection unit detects the position of the upper and lower target member, The control unit, The position of the vertical target member in the vertical direction is obtained based on the timing at which the detection unit switches between a state in which the vertical target member is detected and a state in which it is not detected, obtained by moving the hand in the vertical direction relative to the vertical target member, A substrate transport robot system according to item 1, which corrects at least one of the placement position and the pick-up position of the substrate in the vertical direction based on the acquired vertical position of the vertical target member and the previously acquired vertical relative positional relationship between the position of the vertical target member and the placement area of ​​the substrate in the vertical direction.

[0062] (Item 3) The substrate transport robot system according to item 2, wherein the upper and lower target member is the same target member as the horizontal target member.

[0063] (Item 4) The horizontal target member includes a first horizontal target member and a second horizontal target member positioned in a horizontal plane at a different location from the first horizontal target member. A robot system for transporting substrates according to any one of items 1 to 3, wherein the control unit acquires the inclination of the coordinate system of the substrate placement area with respect to the coordinate system of the robot arm in a horizontal plane, based on the center position of the first horizontal target member in a horizontal plane, the center position of the second horizontal target member in a horizontal plane, and the previously acquired relative positional relationship in the horizontal plane between the center position of the first horizontal target member and the center position of the second horizontal target member.

[0064] (Item 5) The hand includes a first tip and a second tip that are branched in a bifurcated manner. The detection unit is a transmissive sensor that detects the horizontal target member based on whether or not the detection light passing through the space between the first tip and the second tip is blocked. The control unit, The hand is brought closer to the horizontal target member while changing the position where the detection light is blocked, and the direction of the detection light relative to the hand is obtained based on multiple positions of the hand where the detection light is blocked. A robot system for transporting substrates according to any one of items 1 to 4, wherein the coordinate system of the robot arm is calibrated so that the direction in which the hand approaches the horizontal target member is orthogonal to the direction of the detected light, based on the direction of the detected light acquired.

[0065] (Item 6) A method for correcting at least one of the placement and pick-up positions of a substrate by a substrate transport robot that transports a substrate, comprising: a robot arm; a hand attached to the tip of the robot arm; and a detection unit having a circular shape when viewed from above and below, for detecting a horizontal target member for correcting at least one of the placement position and pick-up position of a substrate in a horizontal plane, wherein the substrate transport robot transports the substrate, The hand is brought close to the horizontal target member from a first direction in the horizontal plane, and the detection unit is used to obtain a first tangent corresponding to the outer edge of the horizontal target member. The hand is brought close to the horizontal target member from a second direction in the horizontal plane different from the first direction, and the detection unit is used to obtain a second tangent corresponding to the outer edge of the horizontal target member. Based on the acquired first tangent and the acquired second tangent, the center position of the horizontal target member is obtained. A method for correcting at least one of the placement position and pick-up position of a substrate by a substrate transport robot, comprising: correcting at least one of the placement position and pick-up position of the substrate in a horizontal plane based on the acquired center position and the previously acquired relative positional relationship in a horizontal plane between the center position and the substrate placement location. [Explanation of Symbols]

[0066] 10. Robot for transporting circuit boards 11 Robot Arm 12 Hands 12a 1st tip 12b 2nd tip 13 Control Unit 14 Detection unit 20 Target members (horizontal target member, first horizontal target member, vertical target member) 20a (Center position of the target member (horizontal target member, first horizontal target member)) 20c (Position of target members in the vertical direction (horizontal target member, first horizontal target member, vertical target member)) 21 Target members (horizontal target member, second horizontal target member, vertical target member) 21a (Center position of the target member (horizontal target member, second horizontal target member, vertical target member)) 100 Robot system for transporting circuit boards 200 (Circuit board) storage area C1 (Coordinate system of the robot arm in the horizontal plane) C2 (coordinate system for the placement of the substrate in the horizontal plane) DL detection light PP (Plankhead) placement S (space between the first tip and the second tip) TL1 First tangent TL2 Second tangent W board α (the inclination of the coordinate system of the substrate's location relative to the coordinate system of the robot arm in the horizontal plane)

Claims

1. A robot for transporting circuit boards, A horizontal target member having a circular shape when viewed from above and below, for correcting at least one of the placement position and position of the substrate in the horizontal plane, It comprises a control unit and, The aforementioned substrate transport robot is A robotic arm and A hand attached to the tip of the robot arm, The hand is equipped with a detection unit that detects the outer edge of the horizontal target member, The control unit, Based on the first tangent line corresponding to the outer edge of the horizontal target member obtained using the detection unit by approaching the horizontal target member with the hand from a first direction in the horizontal plane, and the second tangent line corresponding to the outer edge of the horizontal target member obtained using the detection unit by approaching the horizontal target member with the hand from a second direction in the horizontal plane different from the first direction, the center position of the horizontal target member in the horizontal plane is obtained. A robot system for transporting substrates, which corrects at least one of the placement position and the pick-up position of the substrate in a horizontal plane based on the acquired center position of the horizontal target member in a horizontal plane and the previously acquired relative positional relationship in a horizontal plane between the center position of the horizontal target member and the substrate placement area.

2. The system further comprises vertical target members for correcting at least one of the placement position and the removal position of the substrate in the vertical direction, The detection unit detects the position of the upper and lower target member, The control unit, The position of the vertical target member in the vertical direction is obtained based on the timing at which the detection unit switches between a state in which the vertical target member is detected and a state in which it is not detected, obtained by moving the hand in the vertical direction relative to the vertical target member. A robot system for transporting substrates according to claim 1, wherein at least one of the placement position and the pick-up position of the substrate in the vertical direction is corrected based on the acquired vertical position of the vertical target member and the previously acquired vertical relative positional relationship between the position of the vertical target member and the placement area of ​​the substrate.

3. The substrate transport robot system according to claim 2, wherein the upper and lower target member is the same target member as the horizontal target member.

4. The horizontal target member includes a first horizontal target member and a second horizontal target member positioned in a horizontal plane at a different location from the first horizontal target member. The substrate transport robot system according to claim 1, wherein the control unit acquires the inclination of the coordinate system of the substrate placement area with respect to the coordinate system of the robot arm in the horizontal plane, based on the center position of the first horizontal target member in the horizontal plane, the center position of the second horizontal target member in the horizontal plane, and the previously acquired relative positional relationship in the horizontal plane between the center position of the first horizontal target member and the center position of the second horizontal target member.

5. The hand includes a first tip and a second tip that are branched in a bifurcated manner. The detection unit is a transmissive sensor that detects the horizontal target member based on whether or not the detection light passing through the space between the first tip and the second tip is blocked. The control unit, The hand is brought closer to the horizontal target member while changing the position where the detection light is blocked, and the direction of the detection light relative to the hand is obtained based on multiple positions of the hand where the detection light is blocked. The robot system for transporting substrates according to claim 1, wherein the coordinate system of the robot arm is calibrated so that the direction in which the hand approaches the horizontal target member is orthogonal to the direction of the detected light, based on the direction of the detected light acquired.

6. A method for correcting at least one of the placement and pick-up positions of a substrate by a substrate transport robot that transports a substrate, comprising: a robot arm; a hand attached to the tip of the robot arm; and a detection unit having a circular shape when viewed from above and below, for detecting a horizontal target member for correcting at least one of the placement position and pick-up position of a substrate in a horizontal plane, wherein the substrate transport robot transports the substrate, The hand is brought close to the horizontal target member from a first direction in the horizontal plane, and the detection unit is used to obtain a first tangent corresponding to the outer edge of the horizontal target member. The hand is brought close to the horizontal target member from a second direction in the horizontal plane different from the first direction, and the detection unit is used to obtain a second tangent corresponding to the outer edge of the horizontal target member. Based on the acquired first tangent and the acquired second tangent, the center position of the horizontal target member is obtained. A method for correcting at least one of the placement position and pick-up position of a substrate by a substrate transport robot, comprising: correcting at least one of the placement position and pick-up position of the substrate in a horizontal plane based on the acquired center position and the previously acquired relative positional relationship in a horizontal plane between the center position and the substrate placement location.

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