Universal tube stub plug with sealing port

Abstract

To provide a universal tube stub plug with a seal port for fluid delivery substrates.SOLUTION: A fluid substrate comprises a manifold including a circular opening, and a tube stub plug inserted into the circular opening and coupled with the manifold at the circular opening, where an anti-rotation feature prevents the tube stub plug from rotating with respect to the manifold. An anti-rotation hole is defined in and extends through the tube stub plug and the manifold.SELECTED DRAWING: Figure 1B

Description

Technical Field

[0003]

[0001] The present invention relates to a fluid supply system, more specifically, a high-flow rate and / or high-temperature surface-mounted fluid supply system for use in semiconductor processing and petrochemical industries.

Background Art

[0002] Fluid supply systems are used in many modern industrial processes to regulate and manipulate the flow of fluids to control the introduction of desired substances into the process. Those skilled in the art have developed an entire class of fluid supply systems having fluid processing components removably attached to a flow substrate including fluid path conduits. By arranging such a flow substrate layout, a flow sequence is established in which the fluid processing components provide the desired fluid regulation and control. The boundary between such a flow substrate and the removable fluid processing components is standardized and there are few variations. The design of such fluid supply systems is described as a modular or surface-mounted system. Representative applications of surface-mounted fluid supply systems include gas panels used in semiconductor manufacturing equipment and sampling systems used in petrochemical refining. Many types of manufacturing equipment used to perform process steps in semiconductor manufacturing are collectively referred to as tools. Embodiments of the present invention generally relate to fluid supply systems for semiconductor processing, and particularly to surface-mounted fluid supply systems that are particularly well-suited for use in extreme flow rate and / or high-temperature applications where process fluids are heated to temperatures higher than ambient. Aspects of the present invention are applicable to the design of surface-mounted fluid supply systems, whether of a local nature or distributed around semiconductor processing tools.

[0003] Industrial process fluid supply systems have fluid pathway conduits manufactured from materials selected considering their mechanical properties and potential chemical interactions with the supplied fluid. Stainless steel is commonly chosen for its corrosion resistance and robustness, but aluminum or brass may be more suitable in situations where cost and ease of manufacture are paramount. In applications where the use of metals may be unacceptable due to the possibility of ionic contamination of the fluid, fluid pathways can also be constructed from polymer materials. The method of sealingly coupling fluid handling components to flow substrate fluid pathway conduits is typically standardized within specific surface mount system designs to minimize the number of different part numbers. Most joining methods utilize a deformable gasket interposed between the fluid component and the flow substrate to which it is mounted. The gasket may be a simple elastomer O-ring or a special metal seal ring, as described in Patent Documents 1 and 2. Controlling and supplying high-purity fluids in semiconductor manufacturing equipment has been a concern since the inception of the semiconductor electronics industry, and the construction of fluid supply systems primarily using metal seals was a key development stage. An early example of a suitable bellows-sealed valve can be found in Patent Document 3, the VCR® fitting, widely used for connecting fluid conduits, can be found in Patent Document 4, and a typical early diaphragm-sealed valve can be found, for example, in Patent Document 5. Recent commercial interest in photovoltaic solar cell manufacturing, which does not have the stringent purity requirements required to manufacture modern microprocessor devices, may see a resurgence in fluid supply systems using elastomer seals.

[0004] An assembly of fluid handling components assembled in a sequence intended to handle a single type of fluid may often be called a gas stick. An instrument subsystem consisting of several gas sticks intended to supply process fluid to a particular semiconductor processing chamber may be called a gas panel. During the 1990s, several inventors solved the maintainability and size problems of gas panels by fabricating gas sticks. The typical fluid flow path of such a gas stick consisted of a passive metal structure containing conduits through which the process fluid traveled, and was equipped with detachably mounted valves and active (and passive) fluid handling components. Passive fluid flow path elements have been variously referred to as manifolds, substrates, blocks, etc., with some inconsistency even among the achievements of individual inventors. This invention chooses to use the terms flow substrate or manifold to refer to a fluid supply system element that includes passive fluid flow paths (or multiple fluid flow paths) on which other fluid processing devices may be mounted.

[0005] The object of the present invention is to provide a universal tube stub plug with a seal port for a fluid supply substrate. Welded stubs are prone to cracking and leaking due to external forces applied to the tube stub during installation and use.

[0006] Machining tubes and / or tube stubs onto the substrate and manifold is costly due to the large amount of material that needs to be removed to create the tube stubs. Adding external modules that bolt to the ends of the substrate or manifold increases the cost, length, and complexity.

[0007] Additional information relating to fluid supply substrates is described in Patent Document 6, which is incorporated herein by reference as if it were fully described herein. [Prior art documents] [Patent Documents]

[0008] [Patent Document 1] U.S. Patent No. 5803507 [Patent Document 2] U.S. Patent No. 6,357,760 [Patent Document 3] U.S. Patent No. 3,278,156 [Patent Document 4] U.S. Patent No. 3521910 [Patent Document 5] U.S. Patent No. 5730423 [Patent Document 6] U.S. Patent No. 8496029 [Overview of the project]

[0009] This invention provides solutions to defects in the design and implementation of flow control systems when welding tube stubs to gas or fluid substrates. This invention enables users to connect gas and fluid substrates and manifolds to other fluid substrates and manifolds more powerfully and inexpensively. [Brief explanation of the drawing]

[0010] [Figure 1A] An exemplary manifold comprising a tube stub plug and a first anti-rotation mechanism, consistent with embodiments of the present invention. [Figure 1B] An exemplary manifold, comprising a tube stub plug and a first anti-rotation mechanism, consistent with embodiments of the present invention. [Figure 1C] An exemplary manifold, comprising a tube stub plug and a first anti-rotation mechanism, consistent with embodiments of the present invention. [Figure 1D] An exemplary manifold, comprising a tube stub plug and a first anti-rotation mechanism, consistent with embodiments of the present invention. [Figure 1E] An exemplary manifold, comprising a tube stub plug and a first anti-rotation mechanism, consistent with embodiments of the present invention. [Figure 2A]An exemplary manifold, comprising a tube stub plug and a second anti-rotation mechanism, consistent with embodiments of the present invention. [Figure 2B] An exemplary manifold, comprising a tube stub plug and a second anti-rotation mechanism, consistent with embodiments of the present invention. [Figure 2C] An exemplary manifold, comprising a tube stub plug and a second anti-rotation mechanism, consistent with embodiments of the present invention. [Figure 2D] An exemplary manifold, comprising a tube stub plug and a second anti-rotation mechanism, consistent with embodiments of the present invention. [Figure 2E] An exemplary manifold, comprising a tube stub plug and a second anti-rotation mechanism, consistent with embodiments of the present invention. [Figure 2F] An exemplary manifold, comprising a tube stub plug and a second anti-rotation mechanism, consistent with embodiments of the present invention. [Figure 3A] An exemplary manifold, comprising a tube stub plug and a third anti-rotation mechanism, consistent with embodiments of the present invention. [Figure 3B] An exemplary manifold, comprising a tube stub plug and a third anti-rotation mechanism, consistent with embodiments of the present invention. [Figure 3C] An exemplary manifold, comprising a tube stub plug and a third anti-rotation mechanism, consistent with embodiments of the present invention. [Figure 4A] A portion of an exemplary manifold having a non-circular shaped tube stub plug, consistent with embodiments of the present invention. [Figure 4B] A portion of an exemplary manifold having a non-circular shaped tube stub plug, consistent with embodiments of the present invention. [Figure 5A] An exemplary manifold having a tube stub plug with a stepped portion adjacent to the tube stub side of the manifold, consistent with embodiments of the present invention. [Figure 5B] An exemplary manifold having a tube stub plug with a stepped portion adjacent to the tube stub side of the manifold, consistent with embodiments of the present invention. [Figure 6A] An exemplary manifold with a tube stub plug having a stepped portion proximate to the seal surface side of the manifold, consistent with an embodiment of the present invention. [Figure 6B] An exemplary manifold with a tube stub plug having a stepped portion proximate to the seal surface side of the manifold, consistent with an embodiment of the present invention. [Figure 7A] An exemplary manifold with a tube stub plug having a stepped portion proximate to the tube stub side of the manifold, consistent with an embodiment of the present invention. The tube stub plug is fixed to the manifold using a threaded connection. [Figure 7B] An exemplary manifold with a tube stub plug having a stepped portion proximate to the tube stub side of the manifold, consistent with an embodiment of the present invention. The tube stub plug is fixed to the manifold using a threaded connection. [Figure 8A] An exemplary tube stub plug with a manifold, consistent with an embodiment of the present invention. [Figure 8B] An exemplary tube stub plug with a manifold, consistent with an embodiment of the present invention. [Figure 8C] An exemplary tube stub plug with a manifold, consistent with an embodiment of the present invention. [Figure 8D] An exemplary tube stub plug with a manifold, consistent with an embodiment of the present invention. [Figure 8E] An exemplary tube stub plug with a manifold, consistent with an embodiment of the present invention. [Figure 8F] An exemplary tube stub plug with a manifold, consistent with an embodiment of the present invention.

Mode for Carrying Out the Invention

[0011] <00001The present invention uses a separate plug having a stub at one end and a seal at the other. An opening penetrating a substrate or manifold can accept the tube stub plug. The tube stub can connect a port to another manifold, enable the processing or supply of gases or fluids, and simultaneously provide a surface mount seal on the component mounting side.

[0012] The materials and construction of tube stub plugs, as well as their placement on the substrate and manifold, vary depending on the configuration, application, and industry in which these components are used. Figures 1A to 1E show exemplary manifold-tube stub plug assemblies and a first anti-rotation mechanism consistent with embodiments of the present invention. The first embodiment may include a manifold-tube stub plug assembly 100. The assembly 100 comprises a manifold 102 and a circular tube stub plug 106, the manifold 102 having a tube stub plug hole 104, and the tube stub plug 106 having a tube stub 108 at one end and a sealing surface 110 at the other end. The tube stub plug hole 104 is machineable through the manifold 102 (see Figure 1B). It should be noted that this arrangement is also applicable to holes / tube stubs in substrates (for example, the term "substrate" can be replaced with "manifold" as described herein) that can be connected to the manifold 102 (not shown in Figures 1A to 1E).

[0013] To maintain the position of the sealing surface 110 of a seal port (as part of manifold 102) aligned with the upper surface of other seal ports on a manifold (not shown in Figures 1A and 1B), an anti-rotation retainer threaded opening 112 can be machined into the upper surface of the tube stub plug 106. An anti-rotation pin 114 (see Figure 1E) can be inserted into the anti-rotation retainer threaded opening 112.

[0014] By attaching a positioning plate (not shown in Figures 1A to 1E) to the sealing side of a manifold (e.g., manifold 102), the flatness and orientation (i.e., angle) of the tube stub plug (e.g., tube stub plug 106) relative to other sealing surfaces (i.e., sealing surface 110 and the corresponding sealing surface on the substrate (not shown)) can be fixed. During installation, a stator is inserted through the hole in the positioning plate into the corresponding hole in the manifold to hold the tube stub plug against the fixing plate, and while fixing the tube stub plug to the manifold (e.g., by welding or other means), the angle adjustment of the tube stub plug and other seals (not shown) can be maintained at the desired position and orientation.

[0015] The manifold (e.g., manifold 102) and tube stub plug (e.g., tube stub plug 106) of assembly 100, which have tube stub plugs exposed toward the welding process, can be positioned to add strength by adding a weld 116, further fixing the position and orientation of the tube stub plugs, and sealing the joint between the tube stub plugs and the manifold (or substrate (not shown)). The welding may be a continuous weld around the entire interface between the manifold and the tube stub plug (the surface of the manifold) (see, for example, weld 116A in Figures 1D-1E and weld 216A in Figure 2E), or one or more tack welds at various locations on the interface (see, for example, weld 216B in Figures 2A-2D and Figure 2F).

[0016] After welding the tube stub plug, the alignment fixture can be removed from the opposite side of the manifold (or substrate). The welding process may include, for example, Ebeam, laser, manual welding, and other standard industrial welding processes suitable for the application. An advantage of this embodiment is that when pressure is applied to the tube (for example, when force is applied to a part of the tube), the strength of the tube is increased by using the entire substrate and manifold to support the tube and / or the tube-substrate joint. This embodiment can also result in lower costs than a body that is separately mounted to the end of the substrate or manifold.

[0017] Figures 2A to 2F show exemplary manifold and tube stub plug assemblies and a second anti-rotation mechanism consistent with embodiments of the present invention. The second embodiment may include a manifold-tube stub plug assembly 200. The assembly 200 comprises a manifold 202 and a circular tube stub plug 206, the manifold 202 having a tube stub plug hole 204, and the tube stub plug 206 having a tube stub 208 at one end and a sealing surface 210 at the other end. The tube stub plug hole 204 is machineable through the manifold 202. Similar to Embodiment 1, an anti-rotation hole 212 can be drilled in the tube stub plug body to maintain the position of the sealing port with other sealing ports on the substrate and manifold. Fixing devices (not shown in Figures 2A to 2F) can be used to align the sealing surface with other sealing surfaces on the substrate and manifold. It should be noted that this arrangement is also applicable to holes / tube stubs in a substrate (for example, the term "substrate" can be replaced with "manifold" as described herein) that can be connected to a manifold 202 (not shown in Figures 2A to 2F). In this embodiment, one or more countersunk holes 218 (two in Figure 2A) can be drilled above the tube stub plug 206 and the manifold 202. The tube stub plug 206 can further be held in place by a tack weld 216 at the joint between the tube stub plug 206 inside the countersunk hole 216 and the substrate or manifold 202. The countersunk hole 218 makes it possible to ensure that the weld bead of the weld 216 does not come into contact with the surface of the substrate or manifold 202 so as not to interfere with the mounting of components to the substrate surface of the manifold 202. To maintain the flatness and angle of the tube stub plug (e.g., tube stub plug 206) relative to other sealing surfaces during assembly, fasteners (i.e., positioning plates, tacking fasteners; not shown in Figures 2A-2F) can be attached to the sealing side of the substrate and manifold (e.g., manifold 202). A welding process can be used to further secure the tube stub plug to the substrate.The welding may be a continuous weld around the entire interface between the manifold and the tube stub plug (the surface of the manifold) (see, for example, weld 216A in Figure 2E), or one or more tack welds at various locations on the interface (see, for example, welds 216B in Figures 2A-2D and 2F). The welding process may include, for example, Ebeam, laser, manual welding, and other standard industrial welding processes suitable for substrate and manifold applications.

[0018] Figure 2E shows another version of a second embodiment of the tube stub plug bonded to the substrate. This embodiment may have an anti-rotation pin 214 as shown in Figure 2E, and the tube stub plug 206 can be welded to a manifold (e.g., a continuous welded joint 216A shown in Figure 2E).

[0019] Another modification of the second embodiment shown in Figure 2F may include a manifold-tube stub plug assembly 200 comprising a manifold 202 and a tube stub plug 206. The manifold 200 may include an anti-rotation pin 210 for preventing rotation and two tack welds 216B between the tube stub plug and the manifold. For example, other numbers (1, 3, 4, 5, 6, 7, etc.) of tack welds are possible depending on the size and location of the welds. The manifold and the tube stub portion adjacent to the manifold may each have a tack weld recess that allows for the addition of tack welds without adding material on the surface of the manifold (e.g., the sealing surface side of the manifold). In other embodiments (not shown), tack welds may be performed without tack weld recesses so that the tack welds protrude above the manifold surface and the tube stub portion surface.

[0020] After tack welding the tube stub plug in the countersunk hole 218, the assembly 200 is removable from the tack fasteners (not shown in Figures 2A to 2D). Advantages of this embodiment include improved strength of the tube stub by using the entire base or manifold when pressure (e.g., force) is applied to the tube, elimination of the need for more complex final welding by using tack welding, and lower cost compared to separately attaching the body to the end of the base or manifold.

[0021] Figures 3A and 3B show exemplary manifolds with tube stub plugs and a third anti-rotation mechanism consistent with embodiments of the present invention. The third embodiment may include a manifold-tube stub plug assembly 300, comprising a manifold 302 and a tube stub plug 306, the manifold 302 including a tube stub plug opening 304, and the tube stub plug 306 having a tube stub 308 at one end and a sealing surface 310 at the other end. The shape of the tube stub plug 306 may be any suitable shape, including, for example, an ellipse, triangle, square, rectangle, or hexagon with rounded or sharp corners. The shape of the tube stub plug 306 can be determined for a given application, including, for example, space considerations. It should be noted that this arrangement is also applicable to holes / tube stubs in substrates (for example, the term “substrate” can be replaced with “manifold” as described herein) that can be connected to the manifold 302 (not shown in Figures 3A-3C). The tube stub plug 306 may have at least one fastening hole. Figures 3B and 3C show an example where there are two fastening holes so that the tube stub plug 306 can be secured to a substrate or manifold body by fasteners.

[0022] The opening 304 for the tube stub plug 306 can be machined through the manifold 302 so that the opening can receive the tube stub plug 306 configuration by having at least one threaded hole for fastening the two parts together (e.g., the tube stub plug 306 to the manifold 302). In some applications and bolted configurations, welding is not required to fasten the tube stub plug 306 to the manifold 302. If necessary / desired, welding processes described herein (e.g., tack welding or continuous welding) can be used to further fasten the tube stub plug 306 to the manifold 302. Welding processes include, for example, Ebeam, laser, manual welding, and other standard industrial welding processes suitable for substrate and manifold applications.

[0023] Advantages of this embodiment include the fact that the body of the tube stub plug can be used as an aid in aligning the rotational direction of other seals on the substrate or manifold; that it is a design that does not require welding; that the configuration and shape of the tube stub plug can be changed to suit the space on the substrate or manifold; that even if welding is required / desired to fix the tube stub plug, no welding or alignment jigs are required; that the tube stub plug can be easily replaced / changed even if the tube length is different; and that it is less expensive than attaching a separate body to the end of the substrate or manifold.

[0024] Figures 4A and 4B show exemplary manifold portions with non-circular shaped tube stub plugs consistent with embodiments of the present invention. A fourth embodiment may include a manifold-tube stub plug assembly 400. The assembly 400 comprises a manifold 402 and a tube stub plug 406, the manifold 402 including a tube stub plug opening 404, and the tube stub plug 406 having a tube stub 408 at one end and a sealing surface 410 at the other end. The shape of the tube stub plug 406 may be any suitable shape, including, for example, an ellipse, triangle, square, rectangle, or hexagon with rounded or not rounded corners. The shape of the tube stub plug 406 can be determined for a given application, including, for example, space considerations. It should be noted that this arrangement is also applicable to holes / tube stubs in substrates (for example, the term “substrate” can be replaced with “manifold” as described herein) that can be connected to the manifold 402 (not shown in Figures 4A and 4B). An opening for the tube stub plug 406 can be machined through the manifold so that the opening can receive the tube stub plug 406 configuration by having at least one threaded hole for securing two parts to each other (e.g., the tube stub plug 406 to the manifold 402). The threaded hole can be machined on the sealing side of the tube stub plug 406 body to maintain the surface position of the seal port 410 relative to other seal ports on the manifold 402. Fixing devices can be used to keep the seal surface 410 aligned with other seal surfaces on the manifold (e.g., to maintain the flatness between the tube stub plug 406 and the manifold surface, to maintain a specific orientation of the tube stub plug 406). If necessary / desired, welding processes described herein (e.g., tack welding or continuous welding) can be used to further secure the tube stub plug 406 to the manifold 402. Welding processes include, for example, Ebeam, laser, manual welding, and other standard industrial welding processes suitable for substrate and manifold applications.

[0025] Advantages of this embodiment include the fact that the body of the tube stub plug can be used as an aid in adjusting the rotational direction relative to other seals on the substrate or manifold, and that the configuration and shape of the tube stub plug can be modified to suit space constraints on the substrate and / or manifold.

[0026] Figures 5A and 5B show exemplary manifolds with tube stub plugs having stepped portions for alignment between the tube stub plugs and a sealing surface on the manifold, consistent with embodiments of the present invention. A fifth embodiment may include a manifold-tube stub plug assembly 500. The assembly 500 comprises a manifold 502 and a circular or elliptical tube stub plug 506, the manifold 502 including a tube stub plug opening 504, the tube stub plug 506 having a tube stub 508 at one end and a sealing surface 510 at the other end, and having a stepped portion on the tube side of the tube stub plug 506 (for example, closer to the sealing surface 510 from the surface of the manifold 502). This configuration of the tube stub plug 506 requires insertion of the tube stub plug 506 from the top of the manifold 502 (i.e., the sealing surface 510 side). The shape of the tube stub plug can be any suitable shape, including, for example, an ellipse, triangle, square, rectangle, or hexagon with rounded or non-rounded corners. The shape of the tube stub plug 506 can be determined for a given application, including, for example, space considerations. Round tube stub plugs (not shown in Figures 5A and 5B, but see, for example, Figures 1A-1E) are usable only if they include an anti-rotation mechanism (e.g., anti-rotation pin, tack weld, continuous weld, etc.) to align the angle / position of the seal port with other ports on the manifold. It should be noted that this arrangement is also applicable to holes / tube stubs in substrates (for example, the term “substrate” can be replaced with “manifold” as described herein) that can be connected to the manifold 502 (not shown in Figures 5A and 5B).

[0027] The opening 504 for the tube stub plug 506 is machineable through the manifold, and the tube stub plug 506 may include a stepped portion 520 (i.e., a shelf, step, etc.) on the bottom (tube stub 508) side of the tube stub plug 506. The opening 504 may also include a step corresponding to the step on the tube stub plug 506. The step 520 may be any suitable configuration for aligning the top surface of the tube stub plug with the surface of the substrate (e.g., a right angle as shown in Figure 5A). Other examples include an angled surface (e.g., wedge-shaped). The step 520 may be part of the tube stub plug 506 (e.g., 1 / 4 or 1 / 2 of the tube stub plug 506) or the step 520 may extend over the entire circumference of the tube stub plug 506. Fixtures can be used to hold the tube stub plug 506 in the manifold while welding the tube stub plug to the manifold. Welding processes include, for example, Ebeam, laser, manual welding, and other standard industrial welding processes suitable for substrate and manifold applications.

[0028] Advantages of this embodiment include the fact that the body of the tube stub plug can be used as an aid in aligning the rotational direction of other seals on the substrate or manifold, that the required welding fixtures are simple, that the configuration and shape of the tube stub plug can be modified to suit space issues on the substrate and / or manifold, and that it is less expensive than separately attaching the body to the end of the substrate or manifold.

[0029] Figures 6A and 6B show exemplary manifolds with tube stub plugs having stepped portions adjacent to the sealing surface side of the manifold, consistent with embodiments of the present invention. A sixth embodiment may include a manifold-tube stub plug assembly 600. The assembly 600 comprises a manifold 602 and a circular or elliptical tube stub plug 606, the manifold 602 including a tube stub plug opening 604, the tube stub plug 606 having a tube stub at one end and a sealing surface at the other end, and having a step on the tube side of the tube stub plug. The shape of the tube stub plug can be any suitable shape, including, for example, an ellipse, triangle, square, rectangle, or hexagon with rounded or not rounded corners. The shape of the stub can be determined for a given application, including, for example, space considerations. Round tube stub plugs are usable insofar as there is an anti-rotation mechanism (e.g., an anti-rotation pin) for aligning the angle of the sealing port with other ports on the substrate or manifold. It should be noted that this arrangement is also applicable to holes / tube stubs in substrates (for example, the term "substrate" can be replaced with "manifold" as described herein) that can be connected to the manifold 602 (not shown in Figures 6A and 6B).

[0030] Next, the opening 604 for the tube stub plug is machineable through the substrate and manifold, which have a step (i.e., a step, shelf, stepped portion) on the upper surface (sealing surface 610) side of the tube stub plug 606. The tube stub 604 may have a corresponding step that matches the contour of the step in the opening 604. This allows for alignment with the tube stub plug 606 in terms of both depth (e.g., alignment of the sealing surface) and rotational alignment (for the circular case (see, for example, Figures 1A to 1E)). Since the tube stub plug 606 is inserted into the manifold 602 from below (i.e., the side furthest from the sealing surface 610), the steps are aligned, so it is not necessary to fix the tube stub plug 606 to the manifold during welding, because the step aligns the sealing surface 610 with other sealing surfaces on the manifold. Welding processes include, for example, Ebeam, laser, manual welding, and other standard industrial welding processes suitable for substrate and manifold applications.

[0031] Advantages of this embodiment include the fact that the body of the tube stub plug can be used as an aid in aligning the rotational direction of other seals on the substrate or manifold, that a welding jig is not required to align the sealing surface of the tube stub plug with the substrate, and that it is less expensive than separately attaching the body to the end of the substrate or manifold.

[0032] Figures 7A and 7B show an exemplary manifold with a tube stub plug having a stepped portion adjacent to the tube stub side of the manifold, consistent with embodiments of the present invention. The tube stub plug is secured to the manifold using a threaded connection. A seventh embodiment may include a manifold-tube stub plug assembly 700. The assembly 700 includes a manifold 702, which includes a tube stub plug opening 704 and a circular or elliptical tube stub plug 706, the tube stub plug 706 having a tube stub 708 at one end and a sealing surface 710 at the other end, with a stepped portion on the tube side of the tube stub plug, and the manifold 702 has a corresponding stepped portion. The shape of the tube stub plug 706 can be any suitable shape, including, for example, an ellipse, triangle, square, rectangle, or hexagon with rounded or sharp corners. The shape of the tube stub plug 706 can be determined for a given application, including, for example, space considerations. Round tube stub plugs are usable insofar as they have an anti-rotation mechanism (e.g., an anti-rotation pin) to align the angle of the sealing port with other ports on the substrate or manifold. It should be noted that this arrangement is also applicable to holes / tube stubs on substrates (for example, the term "substrate" can be replaced with "manifold" as described herein) that can be connected to manifold 702 (not shown in Figures 7A and 7B).

[0033] The opening 704 for the tube stub plug 706 can be machined through a manifold equipped with a stepped shelf on the bottom (tube stub 708) side of the tube stub plug 706. The tube stub plug 706 may have a threaded portion on the tube stub 708 side (hidden from Figures 7A and 7B) which allows a nut 722 to secure the tube stub plug 706 to the manifold. The step 720 can be designed to position the upper sealing surface of the tube stub plug 706 with the other sealing surface so that the nut 722 pulls the two parts together, reducing the need to weld the tube stub plug to the substrate. In some embodiments, it may still be desirable to add tack welding or continuous welding.

[0034] Advantages of this embodiment include the fact that the body of the tube stub plug can be used as an aid in aligning the rotational direction of other seals on the substrate or manifold, that welding is not required, that the configuration and shape of the tube stub plug can be changed to suit space issues on the substrate and / or manifold, and that it is less expensive than separately attaching the body to the end of the substrate or manifold.

[0035] Figures 8A–8F show exemplary tube stub plugs with a manifold consistent with embodiments of the present invention. An eighth embodiment may include a manifold-tube stub plug assembly 800. The assembly 800 comprises a manifold 802 and a tube stub plug 806A, the manifold 802 including a tube stub plug opening 804, the tube stub plug 806A being coupled to the opening 804 on a first surface 824 of the manifold, and the tube stub 808 protruding from the tube stub plug 806 at a right angle from the first surface 824 (i.e., a right-angle tube stub, a side tube stub, a horizontal tube stub, etc.). In this embodiment, the tube stub plug 806A can be fixed to the manifold, for example, using a welded joint 816A (see cross section CC in Figure 8A). Figure 8B shows additional illustrations of the tube stub plug 806A and the welded joint 816A. It should be noted that this arrangement is also applicable to holes / tube stubs in substrates (for example, the term "substrate" can be replaced with "manifold" as described herein) that can be connected to manifold 802 (not shown in Figures 8A-8F).

[0036] Other modifications of the side tube stub are also possible. Figure 8C shows different configurations of the side tube stub, which may include, for example, a right-angle side tube stub 806A, an offset horizontal tube stub 806B, and a straight horizontal tube stub 806C. Different embodiments allow the tube stub to be positioned together with tube stubs protruding from the top surface (i.e., the first surface 824), the bottom surface (i.e., the second surface, not shown in Figures 8A-8F), or any side surface (i.e., the third surface, the fourth surface, etc., not shown in Figures 8A-8F) or any combination of surfaces of the manifold.

[0037] The tube stub can also be formed in a linear configuration designed to be mounted vertically at the bottom (or top) near the center of the substrate. Figure 8D shows an exemplary bottom tube stub 806D for bottom-mount applications (e.g., inserted into the manifold from the opposite side of the sealing surface). Figure 8E shows a cross-sectional view of the bottom-mount tube stub 806D coupled to the manifold 802. Figure 8F shows an additional view of the bottom-mount tube stub 806D with an anti-rotation pin 814 and a welded joint 816A that secures the tube stub 806D to the manifold.

[0038] Various tube stubs can accommodate the many different inlet and outlet configurations required in surface mount fluid supply systems. The basic configuration is horizontal or vertical inlets and outlets within the fluid channel. Various tube stubs can be used for top, bottom, or side inlets and outlets within the fluid channel. Any suitable material can be used for tube stubs, including, for example, stainless steel, heavy metal alloys, polymers, etc. Tube stubs can be coupled to manifolds / substrates using any suitable mounting techniques and / or fasteners, including screws, bolts, locking pins, press pins, welding, adhesives, friction, etc. Different embodiments described herein allow any tube stub configuration to be positioned with tube stubs protruding from the top surface (i.e., the first surface), bottom surface (i.e., the second surface), or any side (i.e., the third surface, fourth surface, etc.) or any combination of surfaces of the substrate.

[0039] As shown and described herein and in the patents / applications incorporated herein, the manifold or substrate body may be formed from a solid block of material and have associated weld caps, each of which may be formed from a suitable material (such as stainless steel) depending on the intended use of the flow substrate. For primarily cost reasons and in applications where the use of non-metallic materials is to be ensured (such as when ionic contamination is a concern), the body and / or weld caps of the manifold or flow substrate may also be formed (e.g., molded or machined) from polymer materials such as plastics. The use of other materials such as plastics makes it possible to realize flow substrates particularly suitable for chemical supply applications or biological applications where ionic contamination is a concern, and / or applications where cost is a concern.

[0040] The weld cap can be bonded to the manifold or substrate body using an adhesive (i.e., adhesive glue) or a similar mechanism (e.g., creating a joint using industrial metal-bonding or non-metallic bonding adhesive glue). The adhesive can be applied to the manifold or substrate body, the weld cap, or both using any application method (spray, taping, dispenser, brush, etc.). This configuration can be used for bonding metals, plastics, composites, and other non-metallic applications where welding is unsuitable. The adhesive can be selected to be resistant to the type of material flowing through the system, enabling a leak-free bond (i.e., joint, connection, etc.). The advantage of using adhesive to bond the weld cap to the manifold or substrate body is that it allows for a leak-free bond resistant to the material flowing through the system without the time and cost of welding the weld cap to the manifold or substrate body.

[0041] (Note) As a preferred embodiment, the technical concept that can be understood from the above embodiment is described below. [Item 1] A fluid substrate, A manifold including a circular opening, A tube stub plug inserted into the circular opening and coupled to the manifold at the circular opening, Equipped with, The anti-rotation mechanism prevents the tube stub plug from rotating relative to the manifold. A fluid substrate is provided, having anti-rotation holes defined in the tube stub plug and the manifold, the anti-rotation holes extending through the tube stub plug and the manifold. [Item 2] The aforementioned tube stub plug is It further features a circular shape and a tube stub plug insertion hole, The fluid substrate according to item 1, wherein the anti-rotation mechanism comprises an element coupled to the tube stub plug insertion hole, and the manifold and the tube stub plug are coupled by the element. [Item 3] Countersunk holes are defined at the interface between the manifold and the tube stub plug. The fluid substrate according to item 1, wherein the rotation of the tube stub plug is prevented by welding that constitutes the anti-rotation mechanism, and the countersunk hole is sealed by welding. It will be understood that the details of the embodiments described above, given for illustrative purposes, should not be construed as limiting the scope of the invention. Although several embodiments of the invention have been described in detail above, those skilled in the art will readily understand that many modifications are possible in the exemplary embodiments without substantially departing from the novel teachings and advantages of the invention. Accordingly, all such modifications are intended to be within the scope of the invention, and the invention is further defined in the converted application and appended claims. Furthermore, while many embodiments may be conceivable that do not achieve all the advantages of some embodiments, particularly preferred embodiments, it should not be construed that such embodiments are always outside the scope of the invention simply because they do not achieve certain advantages.

Claims

1. A fluid substrate, The fluid substrate comprises a manifold including a top surface, a bottom surface, and a circular opening. The fluid substrate comprises a tube stub plug with a tube stub, The tube stub plug defines the outer surface, The tube stub plug is aligned with the upper surface of the manifold, The tube stub plug is connected to the manifold at the circular opening, The tube stub plug comprises a sealing surface, a flow path, and an opening that constitutes the flow path, wherein the opening is provided at an off-center position on the sealing surface. The tube stub plug further comprises an anti-rotation mechanism, the anti-rotation mechanism being configured to prevent the tube stub plug from rotating relative to the manifold. The anti-rotation mechanism is defined within the outer circumferential surface of the tube stub plug, and the outer circumferential surface is configured to be positioned adjacent to the inner circumferential wall of the manifold that defines the circular opening, in a fluid substrate.

2. The rotation prevention mechanism is included in the tube stub plug, as described in claim 1.

3. The fluid substrate according to claim 1, wherein the flow path passes from the sealing surface to the tube stub and through the tube stub plug.

4. The aforementioned tube stub plug is It further has a circular shape and a tube stub plug insertion hole, The anti-rotation mechanism comprises an element coupled to the tube stub plug insertion hole, and connects the manifold and the tube stub plug. The fluid substrate according to claim 1.

5. The fluid substrate according to claim 2, wherein the rotation prevention mechanism passes through the tube stub plug.

6. The fluid substrate according to claim 1, wherein the tube stub protrudes perpendicularly from the side surface of the manifold.

7. The fluid substrate according to claim 1, wherein the tube stub plug is fixed to the manifold by a screw connection.

8. The fluid substrate according to claim 1, wherein the tube stub plug further comprises a stepped portion adjacent to the tube stub.

9. The fluid substrate according to claim 1, wherein the tube stub plug further comprises a plurality of countersunk holes.

10. The fluid substrate according to claim 9, further comprising tack welding in each of the aforementioned countersunk holes.

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