X-ray inspection apparatus, escalator inspection apparatus and method

Abstract

To provide an X-ray inspection device with which it is possible to three-dimensionally grasp the state of a difficult-to-see inspection object in a nondestructive manner and highly accurately determine degradation.SOLUTION: Provided is an X-ray inspection device that grasps the state of a difficult-to-see inspection object in a nondestructive manner by X-ray images. The X-ray inspection device comprises: an X-ray irradiation unit that irradiates the inspection object with X-rays; a plurality of X-ray detection units that acquire X-ray images of the inspection object using the X-rays irradiated from the X-ray irradiation unit; and an analysis unit that determines the state of a three-dimensional structure of the inspection object having been constructed by analyzing the X-ray images of the inspection object obtained from the plurality of X-ray detection units on the basis of the three-dimensional structure. The X-ray detection units are provided with a metal body that detects the X-ray dose having passed through the inspection object or the X-ray dose having been scattered by the inspection object, and that is located in the periphery of the inspection object constituting a secondary X-ray generation unit. The X-ray detection units are also capable of detecting the amount of a secondary X-ray that is generated from irradiated X-rays by being scattered by the metal body and that has passed through the inspection object or has been reflected thereby.SELECTED DRAWING: Figure 1

Description

Technical Field

[0005] ,

[0001] The present invention relates to an X-ray inspection apparatus, an escalator inspection apparatus, and a method.

Background Art

[0002] Conventionally, there has been a technique for non-destructively imaging the internal structure of an escalator handrail (hereinafter also referred to as a "handrail"). For example, Patent Document 1 describes a method of imaging the disconnection or entanglement of a steel cord (hereinafter also referred to as a "cord") built into a handrail using X-rays and diagnosing its deterioration state.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the above-mentioned Patent Document 1, X-rays are irradiated from the upper surface of the handrail for imaging, a planar perspective image of the cord built into the handrail (hereinafter abbreviated as an "upper surface image") is obtained, and the upper surface image is analyzed to diagnose the disconnection or entanglement of the cord. On the other hand, it has been found that a part of the cord has risen to the surface of the handrail due to disconnection or entanglement, which is a cause of deterioration. However, there is a problem that an abnormal change in the vertical movement (hereinafter, even if it is not vertical, it is conveniently referred to as "vertical movement") of the cord in the thickness direction across the front and back of the handrail cannot be detected in the X-ray fluoroscopic image from the upper surface.

[0005] X-ray inspection equipment for this type of escalator can irradiate X-rays from the side, rather than from the front side in the thickness direction of the handrail (hereinafter referred to as "top" or "upper surface" for convenience), to capture a lateral fluoroscopic image (hereinafter abbreviated as "lateral image"), and it is possible to detect the vertical movement of the cord from this lateral image. However, while the lateral image alone can only capture the vertical movement of the cord, it is difficult to grasp the state of the cord's disconnection or entanglement, so it is difficult to make a diagnosis based solely on the lateral image.

[0006] Therefore, it is desirable to perform diagnosis using a combination of frontal and lateral views. However, if this requires a large-scale X-ray inspection system, the burden of maintaining and inspecting the escalator will increase accordingly. Alternatively, if a single X-ray source is used for irradiation in two directions, the arrangement of the X-ray source must be changed for top and side irradiation, which complicates the system configuration.

[0007] This invention has been made in consideration of the above points, and its objective is to provide an X-ray inspection device that can non-destructively grasp the condition of an object that is difficult to inspect visually and determine its deterioration. [Means for solving the problem]

[0008] The present invention, which solves the above problems, is an X-ray inspection apparatus for determining the state of an object to be inspected by X-ray imaging, comprising: a first X-ray irradiation unit that irradiates the object to be inspected with X-rays; a second X-ray irradiation unit that irradiates the object to be inspected with X-rays from a direction different from that of the first X-ray irradiation unit; an X-ray detection unit that detects X-rays transmitted through the object to be inspected and / or scattered from the object to be inspected using X-rays irradiated from the first X-ray irradiation unit and the second X-ray irradiation unit; and a state determination unit that determines the state of the object to be inspected using the X-rays detected by the detection unit. [Effects of the Invention]

[0009] The present invention provides an X-ray inspection device that can non-destructively ascertain the condition of an object that is difficult to inspect visually and determine its deterioration. [Brief explanation of the drawing]

[0010] [Figure 1] This is a flowchart showing the procedure of an escalator inspection method (hereinafter also referred to as "this method") according to an embodiment of the present invention. [Figure 2] This is an example of an X-ray image of a handrail that has been photographed and judged for deterioration by an escalator inspection device according to an embodiment of the present invention (hereinafter also referred to as the "X-ray inspection device" or "second embodiment device"), and shows (a) the top surface of the handrail 10, (b) the side surface, and (c) the front cross section, along with their respective measurement images, with the handrail shown in the front cross section. [Figure 3] To illustrate the features of the second form of the device, (a) is a front view comparing the first form of the device 99 and (b) the second form of the device 100, with the handrail 10 being a front cross-sectional view. [Figure 4] This is a front view comparing a pair of the second embodiment of the device: (a) when a metal ball 31 is used 101 and (b) when a wire 32 is used 102, with the handrail being a front cross-sectional view. [Figure 5] This is a diagram of a second-mode apparatus that uses a "slit and line detector" 4 to compare a pair of images: (a) a front view 103 when the wire 32 is used in combination, and (b) a side view 104 when the wire 32 is used in combination. [Figure 6] This is a side view of the second configuration apparatus 107, in which the X-ray tube arrangement angle has been changed, compared to Figure 5(b). [Figure 7] This is a front view of a second-mode device comparing (a) a case where multiple single wires are arranged 108 and (b) a case where the area is surrounded by a light-gathering body 109, in order to obtain focus in the illumination area by the convex lens action of multiple wires 32, with the handrail 10 being a front cross-sectional view. [Figure 8] This is a front view of the second embodiment of the device comparing two cases: (a) when a single curved metal plate 33 is used to surround the irradiation area 110, and (b) when multiple flat metal plates 34 are used 111. The handrail 10 is also shown in a front cross-sectional view. [Figure 9]Figure 7(b) is a front view of modified example 112, in which the light-gathering elements are arranged in a different configuration to obtain a convex lens effect, and the handrail 10 is a front cross-sectional view. [Modes for carrying out the invention]

[0011] Hereinafter, with reference to the drawings, an X-ray inspection apparatus (second form apparatus), an escalator inspection apparatus (second form apparatus), and an escalator inspection method using the same (this method) according to embodiments of the present invention will be described in detail. The X-ray inspection apparatus is suitable for a variety of applications, as it allows for non-destructive assessment of the condition of an object to be inspected that is difficult to see due to being encased in other materials. The escalator inspection apparatus exemplified here is an X-ray inspection apparatus specifically designed for escalator inspection, and its procedure will be described in this method. Here, second form apparatuses 100 to 112 refer to both the X-ray inspection apparatus and the escalator inspection apparatus, and are collectively referred to as second form apparatus 100.

[0012] As mentioned above, it is desirable for the second type of apparatus to perform diagnosis using a combination of frontal and lateral images. If visible light is sufficient instead of an X-ray source, it is easy to change the direction of propagation using general optical lenses, prisms, or mirrors, and two sources in different directions can be obtained from one source. However, X-rays have the characteristic that their direction cannot be changed by lenses, etc., so it is not easy to generate two X-ray sources in different directions from a single fixed X-ray source.

[0013] In other words, in order to irradiate the handrail 10 from the side with X-rays using a single X-ray source, it becomes necessary to place the X-ray source next to the handrail 10. Also, an X-ray source placed on the top surface of the handrail 10 can support its load with the handrail 10. However, the load of an X-ray source intended to be placed on the side of the handrail 10 does not act in the direction supported by the handrail 10, so it becomes necessary for an operator to grip and support it from the side of the handrail 10. Therefore, even if one attempts to generate two X-ray sources in different directions in this type of escalator inspection device without any modifications, it will become a large and cumbersome device, increasing the burden on the operator handling it and reducing work efficiency.

[0014] On the other hand, in order to obtain X-ray images of the upper surface and the side surface of the handrail 10 in different directions, it is necessary to install a total of two X-ray sources, one for upper surface irradiation and one for side surface irradiation. Therefore, the second embodiment apparatus enables the desired effect to be obtained with only one X-ray source instead of installing a total of two X-ray sources. First, the procedure of this method using the second embodiment apparatus will be described below in outline.

[0015] FIG. 1 is a flowchart showing the procedure of this method, and the state of the inspection object is analyzed by X-ray images in this procedure. Although the processing may proceed in the order of S1 to S5, S6 to S10, S11 in the order of the S numbers in FIG. 1, the order of S1, S6, S2 to S5, S7 to S11 may also be used, or the order of S6 to S10, S1 to S5, S11 may also be used. The following description is merely an example. The second embodiment apparatus and the inspection object may be set to face each other and may have a control function for fully automating the subsequent operations, or each procedure may be performed manually. Also, detailed descriptions of the control function and computer program for automation are omitted.

[0016] First, the second embodiment apparatus photographs the handrail 10 from above (S1), arranges the state data with the distance or time from the reference point as the axis, and creates an upper surface photographed image associated with the long handrail 10. Next, the second embodiment apparatus photographs the handrail 10 from the side (S6), arranges the state data with the distance or time from the reference point as the axis, and creates a side surface photographed image associated with the long handrail 10.

[0017] After S1, a profile 24 (see FIG. 2) obtained by performing addition average processing (S2) on the upper surface image in the width direction of the handrail 10 is calculated, differential processing (S3) is performed in the longitudinal direction to calculate the amount of variation, the amount of variation is subjected to threshold processing (S4) to calculate a region with a large variation, and an abnormal tag 23 (FIG. 2) is attached (S5).

[0018] Similarly, after S6, a profile 25 obtained by performing an addition average process (S7) on the side image in the height direction of the handrail 10 is calculated, a difference process (S8) is performed in the longitudinal direction to calculate a variation amount, the variation amount is subjected to a threshold process (S9) to calculate a region with a large variation, and an abnormal tag 23 (FIG. 2) is attached (S10).

[0019] With the distance or time from the reference point as the axis, the abnormal region tag 23 of the top image and the abnormal region tag 23 of the side image are overlaid, and a region determined to be abnormal in either is extracted as an abnormal region (S11). The measurement of the distance or time from the reference point is performed using, for example, an encoder (not shown) attached to the second form device. By extracting a region where either the top or side tag is abnormal, it becomes possible to widely extract abnormal regions. It is also conceivable to overlay the abnormal region tag 23 of the top image and the abnormal region tag 23 of the side image with the distance or time from the reference point as the axis, and extract a region determined to be abnormal in both as an abnormal region. By extracting a region where both the top and side tags are abnormal, it becomes possible to narrow down the abnormal region.

[0020] For the imaging, there are conceivable forms in which an operator manually moves the second form device above the handrail 10 to acquire an image, and in which the second form device is attached to the handrail 10 and the handrail 10 is moved in its original operating state to acquire an image. When performing manually, since the moving speed of the device is not stable, the distance from the reference point is used. When performing automatically, it becomes possible to improve accuracy by using both time and distance.

[0021] As described above, the escalator inspection device to be implemented in the near future inspects by driving the escalator with the device attached so as to sandwich the handrail 10 only at the inspection time. However, in the future, a system configuration that also takes into account permanent remote monitoring is conceivable. For this purpose as well, means for solving the problems of being small, lightweight, and simplified are disclosed in the present invention.​​​Figure 2 shows an example of an X-ray image of a deteriorated handrail 10 taken by the second type of apparatus. Figure 2(a) is an image of the handrail 10 taken from above, Figure 2(b) is an image of the handrail 10 taken from the side, and Figure 2(c) is a cross-sectional view of the handrail 10 perpendicular to the longitudinal axis. In Figure 2(a), in a normal state, the multiple cords 11-18 embedded in the handrail 10 are arranged almost parallel to each other in the longitudinal direction. The handrail 10 is moved by being pushed out by rollers, but the pressure of the rollers can disrupt the twist of the embedded cords 11-18, and some of the cords 13-18 may become tangled or come loose, leading to damage.

[0023] In Figure 2(a), the area enclosed by the white dashed line indicates an abnormal state. For example, in Figure 2(a), when a profile 24 is drawn by vertically averaging the image, in the normal area, codes 11 to 18 are arranged in parallel and therefore show almost the same value, while in the abnormal area, codes 13 to 18 overlap or are missing, causing fluctuations in the value.

[0024] Therefore, the profile 24 is scanned horizontally, and areas with large fluctuations in values ​​are identified as abnormal and tagged with an abnormality tag 23. Also, in Figure 2(b) of the image taken from the side, the normal codes 11 and 12 are fixed near the center of the handrail 10, so they are at almost the same height and the images overlap. When a part of code 19 rises up on the surface of the handrail 10, it indicates an abnormality as shown in the area enclosed by the white dashed line.

[0025] For example, in Figure 2(b), when a profile 25 is drawn by performing vertical averaging on the image, in the normal region codes 11 to 18 overlap and show almost the same value, while in the abnormal region code 19 stands out, causing a fluctuation in the value. Therefore, the profile 25 is scanned horizontally, and regions with large fluctuations in value are determined to be abnormal (S4, S9), and abnormal tags 23 are added (S5, S10).

[0026] Figure 3 is a front view comparing (a) the first-form device 99 and (b) the second-form device 100 in order to explain the features of the second-form device, and the handrail 10 is shown as a front cross-sectional view. In the front views of the old and new X-ray inspection devices 99 and 100 shown in Figure 3, the longitudinal axis of the handrail 10 extends perpendicular to the plane of the paper.

[0027] An X-ray tube 1 is installed on the upper surface of the handrail 10, and X-rays that pass through the handrail 10 are detected by a detector 21. In the first embodiment apparatus 99 of Figure 3(a), an X-ray tube 2 is installed on the side, and X-rays that pass through the handrail 10, which is the subject, are detected by a detector 22. In the second embodiment apparatus of Figure 3(b), a metal body 30 is installed on the side. The metal of the metal body 30 is preferably an alloy or element containing at least one of copper, tungsten, gold, and aluminum, with copper being particularly preferred. The metal body 30 also includes the metal sphere 31, metal wire 32, and metal plates 33, 34, which will be described later.

[0028] The metal body 30 of the second-form device 100 is preferably made of a metal species having the following properties. Specifically, a metal species is suitable in which the energy of the X-rays incident on the metal body 30 and the energy of the fluorescent X-rays generated from the metal body are far apart, so that the X-rays incident on the metal body 30 and the fluorescent X-rays generated from the metal body can be easily separated. Examples of such metal species include the aforementioned copper, tungsten, gold, and aluminum. These alloys and their mixing ratios can be adjusted as appropriate.

[0029] The metal body 30 can be a metal plate, cylinder, or sphere. In Figure 3, as an example, a metal sphere is used as the metal body 30, and the X-ray source is a point. X-rays generated in the X-ray tube are irradiated onto the metal body 30, and scattered X-rays and fluorescent X-rays are generated in all directions from the metal body 30. Of the X-rays generated in all directions, the X-rays that pass through the handrail 10 are detected by the detector 22. In this way, multiple X-ray sources can be created with a single X-ray tube.

[0030] Figure 4 is a front view comparing a pair of the second embodiment of the device: (a) when a metal sphere 31 is used 101 and (b) when a wire 32 is used 102, with the handrail 10 being a front cross-sectional view. In Figure 3(b), the metal body 30 is placed only on the side, but in Figure 4, a configuration in which the metal body 30 is also placed on the top surface is shown. In Figure 4(a), the metal body 30 is the metal sphere 31, and the X-rays generated by this point light source that are incident straight onto the detector are extracted by the slit 7 and detected by the detection element 8. Hereinafter, this detection configuration will be referred to as "slit + detection element" 3.

[0031] In Figure 4(b), a cylindrical wire 32 is used as the metal body 30, extending the X-ray source from a point to a straight line, and detecting it using a line detector. Here, a row of slits is placed in front of each detection element of the line detector to extract X-rays that are incident straight onto the element. This detection configuration is hereafter referred to as "slit + line detection element" 4. This makes it possible to create a continuous X-ray source, and when combined with a line detector, it is possible to obtain an image of a wide area at once.

[0032] Figure 5 is a diagram of the second form of the apparatus, comparing (a) a front view 103 when the wire 32 is used in combination with the "slit and line detector" 4, and (b) a side view 104 when the wire 32 is used in combination with the detector. While Figure 4 shows a system for detecting X-rays that have passed through codes 11 to 18, Figure 5 shows a configuration for detecting X-rays that have been backscattered by codes 11 to 18. Since the detector can be installed on the same side as the X-ray tube, it is not necessary to remove the handrail 10 from its base, and an apparatus that can be mounted on the handrail 10 is possible.

[0033] Figure 6 is a side view of the second configuration apparatus 107, in which the X-ray tube arrangement angle is changed compared to Figure 5(b). In Figure 6, the X-ray tube is positioned downwards and obliquely to irradiate the metal body 30 with X-rays. A long cylindrical wire 32 is used as the metal body 30 in the direction perpendicular to the plane of the paper (the width direction of the handrail 10), and a line detector is used with the comb of slits facing perpendicular to the axis of the wire 32, in the direction perpendicular to the plane of the paper (the width direction of the handrail 10). The entire width of the handrail 10 can be photographed at once, continuous shooting is possible while the escalator is in automatic operation, and images can be collected efficiently.

[0034] Figure 7 is a front view of the second-mode apparatus comparing (a) the case where multiple single wires are arranged 108 and (b) the case where the area is surrounded by a light-gathering body 109, in order to obtain focus in the irradiation area by the convex lens effect of multiple wires 32, with the handrail 10 being a front cross-sectional view. As shown in Figure 7, a configuration is shown in which multiple metal bodies 30 are installed to create multiple radiation sources. In Figure 7, the second-mode apparatuses 108 and 109 are shown using metal wires 32 as the metal bodies 30. By using multiple radiation sources, the second-mode apparatuses 108 and 109 enable CT imaging to obtain cross-sectional images by photographing the subject from various angles.

[0035] For example, when the handrail 10 in Figure 2(b) is viewed from the direction of the arrow, a cross-sectional image is obtained as shown in Figure 2(c). Using the cross-sectional image, the cross-section of the code 15, which is closest to the upper surface of the handrail 10, is shown in white. This makes it possible to identify which of the codes 11 to 18 is floating on the surface. Figure 7(b) shows a second-mode apparatus 109 in which light-gathering bodies 43, 44, and 46 are placed between the X-ray tube and the metal body 30 to enhance the X-rays incident on the metal body 30. The second-mode apparatus 109 can improve the signal-to-noise ratio of the image and thus improve image quality.

[0036] Figure 8 is a front view of the second embodiment of the device, comparing a pair of cases: (a) using a single curved metal plate 33 to surround the irradiation area 110, and (b) using multiple flat metal plates 34 111. The handrail is also shown in a front cross-sectional view. In Figure 8(a), a continuous curved metal plate 33 is used, and in (b), metal plate pieces 34 are used. Multiple radiation sources can be efficiently created.

[0037] Generally, X-ray tubes generate divergent X-rays, but Figure 9 shows the case of parallel X-rays 112. Figure 9 is a front view of modified 112, in which the light-gathering elements of Figure 7(b) are arranged in a different configuration to obtain a convex lens effect, and the handrail 10 is a front cross-sectional view. The second form of the device 112 in Figure 9 comprises light-gathering elements 44, 45, and 48 whose lengths are appropriately adjusted, and the same number of wires 32, and their interrelationships are also optimally adjusted.

[0038] In the configurations shown in Figures 7, 8, and 9, the detector is set up with the comb of the slit facing the direction of the X-rays to be detected (indicated by the arrows in thick lines) from each metal body 30 toward the handrail 10. If a line detector with a long orientation parallel to the plane of the paper (the width direction of the handrail 10) is used as the detector, the entire width of the handrail 10 can be imaged at once.

[0039] Furthermore, all of the configurations shown in Figures 3 to 8 can be implemented not only for divergent light but also for parallel light. The X-ray diagnostic device 100 needs to be sealed to prevent X-ray leakage to the outside. Moreover, the X-ray intensity of the second configuration device is incomparably weaker than that of medical devices, etc., and is set to a level that is harmless to humans and animals, making it safe.

[0040] When detecting transmitted X-rays, one possible configuration is to house the X-ray tube and metal body 30 in the upper box, the detector in the lower box, and sandwich the handrail 10 between the upper and lower boxes. When detecting scattered X-rays, one possible configuration is to house the X-ray tube, metal body 30, and detector in the right-hand box, cover the handrail 10 from the right side, and then cover it with the left-hand box.

[0041] In the explanation above, images acquired from two directions, top and side, were used, but the method is not limited to these directions. It is also possible to use images acquired from two directions, such as bottom and side, diagonal upper right and diagonal upper left, diagonal upper right and diagonal lower right, etc.

[0042] Furthermore, as mentioned above, it is also possible to use images from multiple directions, not just two. As a means of acquiring images from multiple directions, the method of simultaneous capture was described above. It is also possible to measure the images from each direction individually and then use the state data later, based on the encoder information, according to time or distance.

[0043] As described above, the second-type device is a device for non-destructively inspecting the internal structure of the handrail 10, and uses X-rays to create a three-dimensional image of the arrangement of the internal cords. The second-type device is designed to acquire images taken from multiple directions, and is therefore designed to allow a single X-ray source to be converted into multiple sources.

[0044] In other words, the second-mode apparatus irradiates metal bodies 30, such as metal spheres 31, metal plates 33, 34, or metal wires 32, arranged around the handrail 10, with X-rays from a single X-ray source fixed to the upper surface of the handrail 10. At this time, scattered X-rays and fluorescent X-rays generated by the metal bodies 30 can be used as secondary X-rays. The metal bodies 30 at this time are converted into multiple sources as secondary X-ray sources.

[0045] The second-mode apparatus 100 uses the multi-source secondary X-rays described above to irradiate the handrail 10 with X-rays from multiple directions, thereby enabling the acquisition of not only a frontal image but also lateral images and other images. The second-mode apparatus 100 adds three-dimensional information to the codes 11-18 embedded in the handrail 10 by combining and analyzing images taken from multiple directions, such as top and lateral images, thereby enabling high-precision determination of the deterioration state of the internal structure of the handrail 10.

[0046] The second-form apparatus 100 and this method improve diagnostic accuracy and allow non-destructive inspection of the internal structure of the handrail 10 by creating a three-dimensional image of the arrangement of the codes 11-18 embedded in the handrail 10 using X-rays. Therefore, the second-form apparatus is suitable for inspecting objects that are difficult to see because they are contained in opaque materials.

[0047] The second form of the device 100 can be summarized as follows. [1] As shown in Figures 1, 4, and 5, the second embodiment apparatus 100 non-destructively grasps the state of an object to be inspected by obtaining an X-ray image of the object to be inspected, such as a rubber tire, or fibers contained in rubber or other materials, and comprises an X-ray irradiation unit, a plurality of X-ray detection units, and an analysis unit. The X-ray irradiation unit irradiates the object with X-rays. The plurality of X-ray detection units acquire an X-ray image of the object to be inspected using the X-rays irradiated from the X-ray irradiation unit. The analysis unit determines the state of the object to be inspected based on the three-dimensional structure constructed by analyzing the X-ray images of the object obtained from the plurality of X-ray detection units.

[0048] The second-mode apparatus 100 irradiates the object to be inspected with X-rays and uses multiple X-ray detection units to acquire, for example, a side view in addition to a front view. The second-mode apparatus can add three-dimensional information to the object to be inspected by combining and analyzing images taken from multiple directions, such as a top view and a side view. As a result, the second-mode apparatus can non-destructively grasp the condition of an object that is difficult to see and determine its deterioration with high accuracy.

[0049] [2] As shown in Figures 3(b) and 4, in the second embodiment of the apparatus described in [1] above, the X-ray detection unit should detect the amount of X-rays irradiated from the X-ray irradiation unit and transmitted through the subject. Detecting the amount of X-rays transmitted through the subject makes it easier to produce contrast for heavy materials such as the steel cords 11-18 of the handrail. [3] As shown in Figure 5, in the second embodiment of the apparatus described in [1] above, the X-ray detection unit may also detect the amount of X-rays irradiated by the X-ray irradiation unit and scattered by the subject. Detecting the amount of X-rays scattered by the subject makes it easier to produce contrast for light materials such as plastic steps.

[0050] [4] As shown in Figures 4 and 5, the second embodiment of the apparatus described in [1] further comprises a metal body 30 arranged around the subject and constituting a secondary X-ray generation unit, wherein the X-rays irradiated from the X-ray irradiation unit are scattered by the metal body 30 to become secondary X-rays, and the amount of X-rays transmitted through or scattered by the subject can also be detected by the X-ray detection unit.

[0051] [5] As shown in Figure 2, the second form of the apparatus described in [1] above is further equipped with an encoder unit for measuring the distance from a reference point, and it is preferable to use an image in which the state data of the object to be inspected is arranged in correspondence with the distance information obtained by the encoder unit. The second form of the apparatus is particularly suitable when the object to be inspected is contained within a long belt-shaped material, and the inspection is carried out by moving the X-ray inspection apparatus in the longitudinal direction of the material, and inspection information is collected continuously.

[0052] In other words, the second-type device can read and associate state data of the object being inspected, specifying its distance from a reference point based on the acquired distance information. This makes it easier to identify the location and understand the state of objects that are difficult to see in a large inspection area.

[0053] [6] In the second form of the apparatus described in [5] above, it is preferable that the encoder unit is also capable of measuring the elapsed time from a reference time, and that it is possible to arrange the state data of the object to be inspected in correspondence with the time information obtained from the encoder unit. As shown in Figure 2, the second form of the apparatus is particularly suitable when it is contained within a belt-shaped material, moves automatically in the longitudinal direction of the material as it performs the inspection, and continuously collects inspection information.

[0054] [7] In the second form of apparatus described in [1] above, the amount of X-rays emitted from the X-ray irradiation unit is to be varied in energy according to the amount of X-rays detected based on the X-ray transmittance or reflectance of at least one of the objects to be inspected and other materials that enclose the objects to be inspected. This allows for the acquisition of high-quality images by suppressing the amount of energy to the minimum necessary.

[0055] [8] As shown in Figure 4, in the second form of the apparatus described in [1] above, it is preferable to generate a stereoscopic image by detecting from two or more directions. This would allow for the prevention of oversights through high-quality images, similar to the concept of medical CT scans.

[0056] [9] In the second embodiment apparatus described in [4] above, the metal species of the metal body 30 is preferably an alloy or element containing at least one of copper, tungsten, gold, and aluminum. Copper is particularly preferred. A metal species is suitable in which the energy of the X-rays incident on the metal body 30 and the energy of the fluorescent X-rays generated from the metal body are far apart, so that the X-rays incident on the metal body 30 and the fluorescent X-rays generated from the metal body can be easily separated.

[0057]

[10] The second form of the device 100 is suitable as an escalator inspection device 100 for non-destructively determining the condition of steel cords 11 to 18 arranged inside the handrail 10 of an escalator by obtaining X-ray images of the steel cords 11 to 18. The second form of the device 100 includes an X-ray irradiation unit that irradiates the subject with X-rays, a plurality of X-ray detection units that acquire X-ray images of the steel cords 11 to 18 using the X-rays irradiated onto the subject from the X-ray irradiation unit, and an analysis unit that determines the condition of the steel cords 11 to 18 based on the three-dimensional structure constructed by analyzing the X-ray images of the subject obtained from the plurality of X-ray detection units. Such a second form of device 100 adds three-dimensional information to the cords 11 to 18 embedded in the handrail 10 by analyzing a combination of images taken from multiple directions, such as top and side views, thereby improving diagnostic accuracy and enabling non-destructive inspection of the deterioration state of the internal structure of the handrail 10.

[0058] Although this invention describes embodiments for carrying out the invention primarily with handrails as the target, the device configuration allows it to be used not only for handrails but also for quality inspections and foreign object contamination inspections of various industrial products in general. [Explanation of Symbols]

[0059] 1,2 X-ray tube, 3 slit + detector, 4 slit + line detector, 7 slit, 8 detection element, 10 handrail, 11-18 steel cord (cord), 15 partially raised cord, 21,22 detector, 23 tag, 24,25 profile, 30 metal body, 31 metal sphere, 32 metal wire, 33,34 metal plate, 43-46,48 light concentrator, 99 X-ray inspection device (first form device), 100-112 X-ray inspection device / escalator inspection device (second form device)

Claims

1. An X-ray inspection device that uses X-ray images to determine the condition of an object being inspected, An X-ray irradiation unit that irradiates the object to be inspected with X-rays, A secondary X-ray generator is provided which X-rays emitted from the X-ray irradiation unit are incident on the object to be inspected to generate fluorescent X-rays, and these fluorescent X-rays are irradiated onto the object to be inspected so that X-rays from a different direction than those emitted from the X-ray irradiation unit are irradiated onto the object to be inspected. An X-ray detection unit that uses the X-rays from the X-ray irradiation unit and the X-rays from the secondary X-ray generation unit to detect X-rays that pass through and / or scatter from the object to be inspected, A state determination unit that determines the state of the object to be inspected using the X-rays detected by the X-ray detection unit, Equipped with, The secondary X-ray generating unit includes a metal body positioned around the object to be inspected. The aforementioned metal body is an alloy or element containing at least one of copper, tungsten, gold, and aluminum. X-ray inspection equipment.

2. It further includes an encoder unit for measuring the distance from a reference point. The state determination unit generates state data of the object to be inspected in association with the distance information obtained by the encoder unit, and determines the state of the object to be inspected based on the state data. The X-ray inspection apparatus according to claim 1.

3. It further includes an encoder unit that measures the elapsed time from a reference time, The state determination unit generates state data of the object to be inspected in association with the time information obtained from the encoder unit, and determines the state of the object to be inspected based on the state data. The X-ray inspection apparatus according to claim 1.

4. The system includes an X-ray image calculation unit that calculates an X-ray image from the multi-directional detection results detected by the aforementioned X-ray detection unit. The state determination unit determines the state of the object to be inspected using the calculation result of the X-ray image calculation unit. The X-ray inspection apparatus according to claim 1.

5. The object to be inspected is a steel cord placed inside the handrail of an escalator. The X-ray inspection apparatus according to claim 1, wherein the state determination unit analyzes the X-ray image obtained from the steel cord to construct the three-dimensional structure of the steel cord and determines the state of the steel cord based on the three-dimensional structure.

Images