Support device, support system, and support method

Abstract

To appropriately support the work when the work is performed on a facility.SOLUTION: Provided is a support device for supporting work when the work is performed on a facility, which includes: a reception part for receiving the position information on a position of the facility transmitted from a device possessed by a worker who performs the work on the facility; a specification part which specifies the facility based on the position information received by the reception part; and a transmission part which transmits the support information suitable for supporting the work for the facility to the device possessed by the worker who performs the work for the facility specified by the specification part.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present disclosure relates to a support device, a support system, and a support method.

Background Art

[0002] Patent Document 1 discloses a support information display method for providing information required by workers such as field engineers who perform maintenance on inspection equipment, manufacturing equipment, etc. (hereinafter simply referred to as "equipment") and information to be made known to the workers. In this support information display method, first, an image of a maintenance target part of the equipment is acquired using a camera of a head-mounted display worn by the worker. Next, support information regarding the maintenance target part in this image is estimated from a database and imaged. Next, by displaying this image on the head-mounted display, the worker can visually recognize the support information.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The technology according to the present disclosure can appropriately support the work when work is performed on equipment.

Means for Solving the Problems

[0005] One aspect of the technology relating to this disclosure is a support device for assisting work performed on equipment, comprising: a receiving unit that receives location information relating to the location of the equipment transmitted from equipment held by an operator performing work on the equipment; an identification unit that identifies the equipment based on the location information received by the receiving unit; and a transmitting unit that transmits support information suitable for assisting the work on the equipment to equipment held by an operator performing work on the equipment identified by the identification unit. The support information is transmitted as an image that can be displayed on equipment held by a worker performing work on the equipment, and the image includes an image of the equipment and images of other equipment arranged around the equipment, the image of the equipment showing the equipment in detail, and the image of the other equipment showing the other equipment in a simplified manner. . [Effects of the Invention]

[0006] According to this disclosure, when work is performed on the equipment, it is possible to appropriately support that work. [Brief explanation of the drawing]

[0007] [Figure 1] This is a schematic diagram illustrating the configuration of a support system as one embodiment of the technology disclosed herein. [Figure 2] Figure 1 is a block diagram showing an example of the hardware configuration of the support devices included in the support system shown. [Figure 3] Figure 2 shows an example of a virtual space image generated by the support device. [Figure 4] Figure 1 is a block diagram showing an example of the hardware configuration of a mobile terminal included in the support system. [Figure 5] Figure 1 shows an example of a sequence executed by the support system. [Modes for carrying out the invention]

[0008] The technology described in Patent Document 1 above is based on the premise that images of the equipment to be maintained are acquired using a camera on a head-mounted display worn by a worker such as a field engineer.

[0009] However, for example, if equipment with parts requiring maintenance is located in a customer's factory, security measures may prohibit the acquisition of video footage from the equipment's cameras. In this case, it may be impossible to estimate the parts requiring maintenance, potentially making it difficult to obtain appropriate support information.

[0010] In response to this, the technology disclosed herein eliminates the need to acquire video footage of equipment when performing maintenance or other work on the equipment, and can appropriately support such work.

[0011] Hereinafter, an embodiment of the technology relating to this disclosure will be described with reference to the drawings. However, the configuration described in the following embodiment is merely illustrative and does not limit the scope of the invention. For example, each part included in this configuration can be replaced with any other part that can perform a similar function. In addition, any additional components may be included.

[0012] Figure 1 is a schematic diagram illustrating the configuration of a support system as one embodiment of the technology described herein. The support system 1 shown in Figure 1 comprises a support device 2 and a mobile terminal 3 that can communicate with each other via an external information and communication network 100. This support system 1 allows a support worker M2 to remotely support a worker M1, such as a field engineer, working in the factory 10. The support device 2 is operated by the support worker M2. On the other hand, the mobile terminal 3 is a device carried by the worker M1 in the factory 10 and is operated by the worker M1. Multiple pieces of equipment 11 are arranged in a row in the factory 10. The number of pieces of equipment 11 is three in the configuration shown in Figure 1, but is not limited to this. These three pieces of equipment 11 may be referred to as "equipment 11A," "equipment 11B," and "equipment 11C," respectively, from the front of the page in Figure 1. In this embodiment, equipment 11 is, for example, a prober (inspection device) used for electrical inspection of semiconductor devices formed on a wafer. The work performed by worker M1 within the factory 10 is work on equipment 11A, one of the equipment 11A to equipment 11C, and in this embodiment, for example, it is maintenance of equipment 11A.

[0013] Figure 2 is a block diagram showing an example of the hardware configuration of the support device included in the support system shown in Figure 1. Figure 3 is an example of a virtual space image displayed by the support system shown in Figure 1. The support device 2 (support method) can support worker M1 when they are performing their work. As shown in Figure 2, the support device 2 comprises a device body 21, a display unit 22, and a headset 23 that are connected to each other in a communicative manner. The device body 21 has a CPU 24, a storage unit 25, a receiving unit 26, a transmitting unit 27, and an image generation unit 28. The device body 21 is not particularly limited, and for example, a desktop personal computer can be used. The display unit 22 is also not particularly limited, and for example, an organic EL display, a liquid crystal display, etc., can be used.

[0014] The CPU 24 controls the memory unit 25, the receiving unit 26, the transmitting unit 27, the image generation unit 28, the display unit 22, and the headset 23.

[0015] The memory unit 25 pre-stores support information 251 suitable for assisting with work on each piece of equipment 11, layout information 252 for each piece of equipment 11 within the factory 10, and specification information 253 indicating the specifications of each piece of equipment 11. The support information 251 is information suitable for maintenance support and includes at least one of the following: the manual for each piece of equipment 11 and the past maintenance history (history) for each piece of equipment 11. The manual for each piece of equipment 11 includes at least one of the work procedure manual and specification (design document) for each piece of equipment 11. The maintenance history includes the past malfunction history of each piece of equipment 11 and the history of corrective measures taken to resolve these malfunctions. Then, in response to a request from worker M1, support staff M2 can select the most suitable support information 251 from the manuals and maintenance history of the equipment 11 identified by the identification unit 241 (described later) and provide it to worker M1 (see Figure 5).

[0016] The configuration information 252 is obtained from a customer who owns the factory 10, for example, when the facility 11 is delivered to the factory 10. The specification information 253 includes, for example, 3D CAD data and the like as the design information of each facility 11. Further, the specification information 253 includes not only the specification information of the facility 11 with the standard specification but also information regarding equipment added for the customer or modified content in the facility 11. The specification information 253 is obtained from, for example, any one of the developer, designer, and manufacturer of each facility 11. Note that various programs executed by the CPU 24 are also stored in advance in the storage unit 25.

[0017] The receiving unit 26 receives the position information 30 regarding the position of the facility 11 (receiving step). This position information 30 is transmitted from the mobile terminal 3 (see FIG. 5). Note that the position information 30 may also include the position information of the factory 10. The position information of the factory 10 is obtained from, for example, a map application which is a web mapping platform.

[0018] The transmitting unit 27 transmits the support information 251 to the mobile terminal 3 owned by the worker M1 (transmitting step). Further, the transmitting unit 27 can also transmit the virtual space image 281 (see FIGS. 3 and 5) generated by the image generation unit 28.

[0019] The CPU 24 has a function as a specifying unit 241 that specifies the facility 11 to be maintained (specifying step). In the present embodiment, the facility 11 to be maintained is the facility 11A. The specifying unit 241 specifies the facility 11A based on the position information 30 received by the receiving unit 26 and the configuration information 252 stored in the storage unit 25.

[0020] By the way, as described above, in the factory 10, for security reasons, video acquisition of the equipment 11A by cameras may be prohibited. In this case, the specifying unit 241 cannot use the captured image of the equipment 11A for specifying the equipment 11A. Also, depending on its type, when the equipment 11A is a probe having a number of cells (inspection rooms), it is a large-sized device with a width and depth of about 2000 to 4000 mm each. Therefore, in the support system 1, if the worker M1 carrying the portable terminal 3 is near the equipment 11A, the equipment 11A can be sufficiently specified by the position information 30 from the portable terminal 3 and the arrangement information 252 (the same applies to the equipment 11B and the equipment 11C). As described above, since the support system 1 targets large-sized devices as mentioned above, the characteristic accuracy in the specifying unit 241 is ensured without excess or deficiency only by the position information 30 from the portable terminal 3.

[0021] The image generation unit 28 generates a virtual space image 281 (see FIGS. 3 and 5) simulating the equipment 11 in the actual factory 10 based on the position information 30, the arrangement information 252, and the specification information 253. The image generation unit 28 generates the virtual space image 281 shown in FIG. 3 based on the position information 30, the arrangement information 252, and the specification information 253. In the virtual space image 281, the three-dimensional external appearance image of the equipment 11A is represented by a solid line in detail. Here, "detail" means a sufficient degree for supporting maintenance work. Also, adjacent to the equipment 11A in the virtual space image 281, the three-dimensional external appearance image of the equipment 11B is simplified and represented, for example, by a two-dot chain line. Further, the position of the worker M1 may be displayed in the virtual space image 281.

[0022] The display unit 22 displays, for example, the virtual space image 281 generated by the image generation unit 28. Thereby, the support worker M2 can provide the support information 251 to the worker M1 while checking the virtual space image 281. The headset 23 is worn on the head of the support worker M2. The headset 23 has a headphone 231 and a microphone 232. Thereby, the support worker M2 can talk with the worker M1.

[0023] Figure 4 is a block diagram showing an example of the hardware configuration of a mobile terminal included in the support system shown in Figure 1. As shown in Figure 4, the mobile terminal 3 includes a CPU 31, a memory unit 32, a display unit 33, a microphone 34, a speaker 35, a GPS 36, a terminal-side receiver 37, and a terminal-side transmitter 38. The mobile terminal 3 is not particularly limited, and for example, a smartphone, a tablet terminal, a notebook personal computer, etc., can be used.

[0024] The CPU 31 is a control unit that controls the memory unit 32, display unit 33, microphone 34, speaker 35, GPS 36, terminal-side receiver 37, and terminal-side transmitter 38. The memory unit 32 has various programs pre-stored in it that the CPU 31 will execute. In the support system 1, the location information 30 related to the location of the equipment 11 is used as the location information 30 of the mobile terminal 3. This location information of the mobile terminal 3 is obtained from the GPS 36. This allows the location information 30 to be obtained as accurate location information.

[0025] The terminal-side transmitting unit 38 transmits location information 30 to the receiving unit 26 of the support device 2. A location information transmission application is installed on the mobile terminal 3. The display unit 33 displays, for example, an icon, the transmission operation unit (operation unit) 331 for performing the transmission operation to send location information 30 from the terminal-side transmitting unit 38. By operating the transmission operation unit 331, worker M1 can transmit location information 30 at any time.

[0026] The terminal-side receiving unit 37 receives support information 251 from the transmission unit 27 of the support device 2. The terminal-side receiving unit 37 can also receive the virtual space image 281 transmitted from the transmission unit 27.

[0027] The display unit 33 displays, for example, support information 251 and virtual space images 281 received by the terminal-side receiving unit 37. Thus, in this embodiment, the display unit 33 functions as a notification unit 39 that notifies support information 251 as an image. The speaker 35 can, for example, emit the voice of support worker M2 collected by the microphone 232 of the support device 2. This allows worker M1 to hear the voice of support worker M2. The speaker 35 can also generate the support information 251 received by the terminal-side receiving unit 37 as an audio. Similar to the display unit 33, the speaker 35 functions as a notification unit 39 that notifies support information 251 as an audio. The notification unit 39 allows worker M1 to accurately grasp the support information 251. Note that the notification unit 39 is not limited to notifying support information 251 as both an image and an audio; it is sufficient if it notifies at least one of these. Microphone 34 collects, for example, the voice of worker M1. This voice is emitted from headphones 231 of support device 2 and can be heard by support worker M2.

[0028] Furthermore, while performing maintenance on equipment 11A, worker M1 may not remain in one place but may move to multiple locations around equipment 11A, for example. In this case, the location information 30 also changes. At this time, it is preferable that the orientation of equipment 11A in the virtual space image 281 changes in accordance with the movement of worker M1. Therefore, the mobile terminal 3 may be configured to transmit location information 30 periodically (for example, every 60 to 120 seconds) from the start to the end of maintenance. At this time, the support device 2 is configured so that each time location information 30 is received, the image generation unit 28 generates a virtual space image 281 that follows the movement of worker M1. This allows support worker M2 to provide support information 251 according to the maintenance location while confirming the following virtual space image 281. Note that the mobile terminal 3 has a start operation unit, which is operated when maintenance is started, and an end operation unit, which is operated when maintenance is completed, provided as icons on the display unit 33.

[0029] Figure 5 shows an example of a sequence executed by the support system shown in Figure 1. As shown in Figure 5, in step S501, worker M1 operates the transmission operation unit 331 of the mobile terminal 3. As a result, in step S502, the CPU 31 of the mobile terminal 3 activates the terminal-side transmission unit 38 and transmits location information 30.

[0030] In step S503, the receiving unit 26 of the support device 2 receives location information 30. The CPU 24 then identifies the equipment 11 to be maintained using the identification unit 241, based on the location information 30 received by the receiving unit 26 and the arrangement information 252 in the storage unit 25. Here, the equipment 11 identified by the identification unit 241 is referred to as equipment 11A. In step S504, the CPU 24 generates a virtual space image 281 that mimics equipment 11A in the actual factory 10, based on the location information 30, the arrangement information 252, and the specification information 253. In step S505, the CPU 24 activates the display unit 22 to display the virtual space image 281 to the support worker M2. This allows the support worker M2 to understand that the equipment to be maintained is equipment 11A.

[0031] In step S506, worker M1 requests support information 251 necessary for the maintenance of equipment 11A from support worker M2 via the microphone 34 of the mobile terminal 3.

[0032] In step S507, support worker M2 selects the support information 251 that is deemed most suitable for the maintenance of the equipment 11A from the manual and maintenance history of all support information 251, in response to a request from worker M1 (mobile terminal 3). In step S508, the CPU 24 of the support device 2 activates the transmission unit 27 to transmit the support information 251 selected in step S507 and the virtual space image 281 generated in step S504. The support information 251 is transmitted as an image that can be displayed and audible on the mobile terminal 3.

[0033] In step S509, the CPU 31 of the mobile terminal 3 activates the display unit 33 to display support information 251 and a virtual space image 281 to the worker M1, and in some cases, the CPU 31 also generates the support information 251 audibly through the speaker 35. As a result, worker M1 can obtain the support information 251 and thus perform maintenance on the equipment 11A quickly.

[0034] Furthermore, if necessary, in step S510, support staff M2 can provide advice to worker M1 via the microphone 232 of support device 2 to supplement the support information 251. This advice may include, for example, information that is difficult to express in text or drawings. This allows worker M1 to perform maintenance on equipment 11A more quickly.

[0035] As described above, the support system 1 can identify the equipment 11 that is the target of the work from among multiple pieces of equipment 11 without requiring captured images of the equipment 11, and can provide worker M1 with support information 251 suitable for the work on that equipment 11. This makes it possible to appropriately support work on equipment 11 even if the acquisition of video footage of equipment 11 in the factory 10 is prohibited.

[0036] Furthermore, as mentioned above, the support system 1 does not require photographs of the equipment 11 to identify the equipment 11, thus maintaining security within the factory 10, that is, preventing the leakage of confidential information. In addition, since it eliminates the effort of taking photographs, support information 251 can be provided quickly.

[0037] While preferred embodiments of the present disclosure have been described above, the present disclosure is not limited to the embodiments described above, and various modifications and changes are possible within the scope of its gist. In this embodiment, the equipment 11 was a prober, but it is not limited to this, and may be, for example, a film deposition apparatus, etching apparatus, or other apparatus used in the manufacture of semiconductor devices.

[0038] In this embodiment, the work performed on equipment 11 was maintenance of equipment 11, but it is not limited to this; for example, it could be maintenance training that simulates the maintenance of equipment 11. This allows the support system 1 (support device 2) to be used for maintenance training for worker M1. When the support system 1 is used for maintenance training, worker M1 can wear VR goggles that display a virtual space image 281 and perform the maintenance training. In addition, maintenance tools and the like are also displayed in this virtual space image 281.

[0039] In this embodiment, the provision of support information 251 to worker M1 is performed by the operation of the support device 2 by support worker M2, but is not limited to this. For example, if artificial intelligence is built into the support device 2, the support information 251 may be provided by the operation of the support device 2 by this artificial intelligence. In this case, for example, the CPU 24 of the support device 2 has a trained model configured to output support information 251 when the specifications of the equipment 11, the installation environment, the current situation, etc. are input. Furthermore, it is preferable that the artificial intelligence has an automatic speech recognition function that recognizes the voice of worker M1. This allows the artificial intelligence to determine the content of the request from worker M1 and provide advice accordingly.

[0040] In this embodiment, the location information 30 is obtained from the GPS 36 of the mobile terminal 3, but it is not limited to this. For example, if the mobile terminal 3 has a built-in accelerometer or gyroscope, information obtained from these sensors can be used. [Explanation of Symbols]

[0041] 1. Support System 2 Support equipment 241 Specific part 251 Support Information 26 Receiving unit 27 Transmitter 3 Mobile devices 30 Location information 37 Terminal-side receiving unit 38 Terminal-side transmitting unit 11, 11A, 11B, 11C equipment M1 Worker (Worker)

Claims

1. A support device for assisting work performed on equipment, A receiving unit that receives location information relating to the location of the equipment transmitted from equipment held by a worker performing work on the equipment, Based on the location information received by the receiving unit, an identification unit identifies the equipment, The system includes a transmission unit that transmits support information suitable for assisting the work on the equipment to equipment used by an operator performing work on the equipment identified by the specified unit, The aforementioned support information is transmitted as an image that can be displayed on equipment owned by the worker performing the work on the equipment. The aforementioned image includes an image of the equipment and an image of other equipment arranged around the equipment, wherein the image of the equipment represents the equipment in detail, and the image of the other equipment represents the other equipment in a simplified manner, an assistive device.

2. The image of the equipment is represented by a solid line, The support device according to claim 1, wherein images of the other equipment are represented by a dashed line.

3. The support device according to claim 1, further comprising a storage unit in which the aforementioned support information is stored.

4. The aforementioned equipment is installed in multiple locations within the factory. The support device according to claim 3, wherein the storage unit stores information on the arrangement of each piece of equipment within the factory and specification information indicating the specifications of each piece of equipment.

5. The support device according to claim 4, wherein the identifying unit identifies the equipment based on the position information and the arrangement information.

6. The support device according to claim 4, comprising an image generation unit that generates a virtual space image that simulates the actual interior of the factory, based on the location information, the arrangement information, and the specification information, as an image that includes images of the equipment and images of other equipment.

7. The support device according to claim 6, further comprising a display unit for displaying the virtual space image.

8. The support device according to claim 6, wherein the transmitting unit transmits the virtual space image to equipment owned by an operator performing work on the equipment identified by the identifying unit.

9. The support device according to claim 1, wherein the support information includes at least one of the equipment's manual, which includes at least one of the equipment's work procedures and specifications, and at least one of the equipment's malfunctions and the history of corrective measures taken to resolve those malfunctions.

10. The support device according to claim 9, wherein the support information is selected from the manual and the history in response to a request from equipment held by an operator performing work on the equipment.

11. The support device according to claim 1, wherein the identifying unit does not use a photograph of the equipment to identify the equipment.

12. The support device according to claim 1, wherein the aforementioned work is maintenance of the equipment or maintenance training that simulates said maintenance.

13. A support system comprising a support device for assisting work performed on equipment, and a portable terminal capable of communicating with the support device, The aforementioned support device is A receiving unit that receives location information regarding the location of the aforementioned equipment, Based on the location information received by the receiving unit, an identification unit identifies the equipment, The system includes a transmission unit that transmits support information suitable for assisting the work on the equipment identified by the specified unit, The aforementioned mobile terminal is A terminal-side transmitting unit that transmits the location information to the receiving unit, A terminal-side receiving unit that receives the support information from the transmitting unit, The system includes a notification unit that notifies the support information received by the terminal-side receiving unit of at least one of images and sound, The aforementioned support information is transmitted as an image that can be displayed on equipment owned by the worker performing the work on the equipment. The aforementioned image includes an image of the equipment and images of other equipment arranged around the equipment, wherein the image of the equipment represents the equipment in detail, and the image of the other equipment represents the other equipment in a simplified manner, in a support system.

14. The support system according to claim 13, wherein the mobile terminal includes an operation unit that performs the transmission operation when transmitting the location information from the terminal-side transmission unit.

15. The support system according to claim 13, wherein the location information is the location information of the mobile terminal.

16. The support system according to claim 15, wherein the location information of the mobile terminal is location information obtained from GPS.

17. A support method for assisting work performed on equipment, A receiving step of receiving location information relating to the location of the equipment transmitted from equipment held by a worker performing work on the equipment, A selection step to identify the equipment based on the location information received in the receiving step, The process includes a transmission step that transmits support information suitable for assisting the work on the equipment identified in the specified step to equipment owned by an operator performing work on the equipment, The aforementioned support information is transmitted as an image that can be displayed on equipment owned by the worker performing the work on the equipment. A support method wherein the image includes an image of the equipment and an image of other equipment arranged around the equipment, the image of the equipment showing the equipment in detail and the image of the other equipment showing the other equipment in a simplified manner.

Images