Reaction tube transport jig and method for transporting reaction tubes

Abstract

To provide a technology that allows easy exchange of reaction tubes.SOLUTION: A reaction tube transport jig that transports reaction tubes between multiple processing portions included in a substrate processing device includes a first cart movable on a first plane, a second cart loaded on the first cart and movable on a second plane having a different height from the first plane, and a third cart loaded on the second cart, movable on a third plane having a different height from the second plane, and holding the reaction tube.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present disclosure relates to a reaction tube transfer jig and a method for transferring a reaction tube.

Background Art

[0002] In a vertical heat treatment apparatus for batch processing of a plurality of substrates, a configuration in which a plurality of process modules are provided for one loader module is known (see, for example, Patent Document 1). Each process module accommodates and processes a plurality of substrates inside a reaction tube. Further, a cart for placing and transporting a reaction tube, which is a component of a semiconductor manufacturing apparatus, is known (see, for example, Patent Document 2).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] The present disclosure provides a technique for easily replacing a reaction tube.

Means for Solving the Problems

[0005] A reaction tube transfer jig according to an aspect of the present disclosure is a reaction tube transfer jig for transferring a reaction tube between a plurality of processing units included in a substrate processing apparatus, including a first cart movable on a first plane, a second cart loaded on the first cart and movable on a second plane having a height different from that of the first plane, and a third cart loaded on the second cart and movable on a third plane having a height different from that of the second plane and holding the reaction tube. The second trolley comprises a second frame, a rotary table that can rotate horizontally relative to the second frame, a second guide rail attached to the rotary table for guiding the movement of the third trolley, and a second fixing device attached to the second frame for fixing the reaction tube to the second frame. .

Effects of the Invention

[0006] According to this disclosure, the reaction tube can be easily replaced. [Brief explanation of the drawing]

[0007] [Figure 1] Perspective view (1) showing an example of a substrate processing device. [Figure 2] Perspective view (2) showing an example of a substrate processing device. [Figure 3] Perspective view (3) showing an example of a substrate processing device. [Figure 4] Schematic diagram showing the substrate transport section and batch processing section. [Figure 5] Perspective view showing an example of a reaction tube transport jig. [Figure 6] Schematic diagram showing the first bogie (1) [Figure 7] Schematic diagram showing the first bogie (2) [Figure 8] Schematic diagram showing the first bogie (3) [Figure 9] Schematic diagram showing the first bogie (4) [Figure 10] Schematic diagram showing the first bogie (5) [Figure 11] Schematic diagram showing the second bogie (1) [Figure 12] Schematic diagram showing the second bogie (2) [Figure 13] Schematic diagram showing the second bogie (3) [Figure 14] Schematic diagram showing the second bogie (4) [Figure 15] Schematic diagram showing the second bogie (5) [Figure 16] Schematic diagram showing the third bogie [Figure 17] Figure (1) illustrating how to install the reaction tube. [Figure 18] Figure (2) illustrating how to install the reaction tube. [Figure 19] Figure (3) illustrates how to install the reaction tube. [Figure 20] Figure (4) illustrates how to install the reaction tube. [Figure 21] Figure (5) illustrates how to install the reaction tube. [Figure 22] Figure for explaining the method of attaching the reaction tube (6) [Figure 23] Figure for explaining the method of attaching the reaction tube (7) [Figure 24] Figure for explaining the method of attaching the reaction tube (8)

Embodiments for Carrying out the Invention

[0008] Hereinafter, non-limiting exemplary embodiments of the present disclosure will be described with reference to the accompanying drawings. In all the accompanying drawings, the same or corresponding members or components are denoted by the same or corresponding reference numerals, and redundant descriptions are omitted.

[0009] 〔Substrate Processing Apparatus〕 Referring to FIGS. 1 to 4, the substrate processing apparatus 1 according to the embodiment will be described. FIGS. 1 to 3 are perspective views showing the substrate processing apparatus 1 according to the embodiment, which are views when the substrate processing apparatus 1 is viewed from different directions. FIG. 4 is a schematic view showing the substrate transfer unit 3 and the batch processing unit 4, which is a view when the inside of the substrate transfer unit 3 and the batch processing unit 4 is viewed from the rear.

[0010] The substrate processing apparatus 1 is installed, for example, in a clean room. The substrate processing apparatus 1 includes a loading / unloading unit 2, a substrate transfer unit 3, and a plurality of batch processing units 4.

[0011] The loading / unloading unit 2 is installed on the floor F. The loading / unloading unit 2 has a front surface 2a where the cassette C is loaded or unloaded and a rear surface 2b opposite to the front surface 2a. The front surface 2a is located on the negative side in the Y-axis direction of the loading / unloading unit 2. The rear surface 2b is located on the positive side in the Y-axis direction of the loading / unloading unit 2. The cassette C is a container that accommodates a plurality of (for example, 25) substrates W. The cassette C is, for example, a FOUP (Front-Opening Unified Pod). The substrate W is, for example, a semiconductor wafer. The inside of the loading / unloading unit 2 is, for example, in an air atmosphere.

[0012] The loading / unloading section 2 has load ports 21. The load ports 21 are provided on the negative side of the loading / unloading section 2 in the X-axis direction and the negative side of the Y-axis direction. Two load ports 21 are provided along the X-axis direction. Cassettes C are placed on the load ports 21. Cassettes C are loaded into or unloaded from the load ports 21. The load ports 21 may be provided in multiple stages in the vertical direction (Z-axis direction). The number of load ports 21 is not particularly limited.

[0013] The substrate transport unit 3 is positioned on the positive Y-axis side of the loading / unloading unit 2. The substrate transport unit 3 extends along a first direction (Y-axis direction) perpendicular to the rear surface 2b of the loading / unloading unit 2. The substrate transport unit 3 is installed on the floor F. One substrate transport unit 3 is provided in common for multiple batch processing units 4. That is, multiple batch processing units 4 have a common substrate transport unit 3. The substrate transport unit 3 has a substrate transport device 31. The substrate transport device 31 transports substrates W between the loading / unloading unit 2 and each of the multiple batch processing units 4. The substrate transport device 31 has multiple picks 31p. In this case, the substrate transport device 31 can transport multiple substrates W simultaneously. Therefore, the time required to transport the substrates W can be reduced. The number of picks 31p is not particularly limited.

[0014] Multiple batch processing units 4 are arranged on the negative side of the X-axis direction of the substrate transport unit 3. Multiple batch processing units 4 are arranged adjacent to each other along the longitudinal direction (Y-axis direction) of the substrate transport unit 3. In the illustrated example, four batch processing units 4 are arranged adjacent to each other along the longitudinal direction of the substrate transport unit 3. Each batch processing unit 4 processes multiple substrates (e.g., 25 to 150) W at once. The interior of each batch processing unit 4 is maintained in an inert gas atmosphere, such as a nitrogen gas atmosphere. In this case, oxidation of the substrates W in the batch processing unit 4 can be suppressed. The batch processing unit 4 is an example of a processing unit. Each batch processing unit 4 includes a heat treatment unit 41, a load unit 42, a gas supply unit 43, an exhaust unit 44, a process module control unit 45, a forced air cooling unit 46, a gas control unit 47, a floor box 48, and guide rails 49a, 49b.

[0015] The heat treatment unit 41 performs a predetermined heat treatment on multiple substrates W. The heat treatment unit 41 includes a reaction tube 411 and a heater 412.

[0016] The reaction tube 411 houses the substrate holder 414. The substrate holder 414 holds the substrate W in a substantially horizontal position with a predetermined gap in the vertical direction. The substrate holder 414 is made of a heat-resistant material such as quartz or silicon carbide. The reaction tube 411 is provided with a gas introduction port 411a and an exhaust port 411b.

[0017] The gas introduction port 411a introduces gas into the reaction tube 411. The gas introduction port 411a is located on the positive side of the X-axis direction of the reaction tube 411. It is preferable that the location of the gas introduction port 411a is the same among multiple batch processing units 4. In this case, the length of the piping between the gas supply unit 43 and the gas introduction port 411a can be made the same among multiple batch processing units 4. This reduces variations in processing due to differences between machines.

[0018] The exhaust port 411b exhausts the gas inside the reaction tube 411. The exhaust port 411b is located on the negative side of the reaction tube 411 in the X-axis direction. That is, the exhaust port 411b is located on the opposite side from the gas introduction port 411a. It is preferable that the position of the exhaust port 411b is the same among multiple batch processing units 4. In this case, the exhaust conductance can be matched among multiple batch processing units 4. This reduces variations in processing due to differences between machines.

[0019] A heater 412 is provided around the reaction tube 411. The heater 412 has, for example, a cylindrical shape. The heater 412 heats each substrate W housed in the reaction tube 411. A shutter 415 is provided below the reaction tube 411. The shutter 415 is configured to move horizontally between a position that closes the opening at the lower end of the reaction tube 411 and a position that does not close it. The shutter 415 closes the opening at the lower end of the reaction tube 411 until a substrate holder 414 is removed from the reaction tube 411 and the next substrate holder 414 is loaded.

[0020] The load unit 42 is located below the heat treatment unit 41. The load unit 42 is installed on the floor F via a floor box 48. The floor box 48 may be integrated into the load unit 42. The load unit 42 transfers each substrate W housed in the reaction tube 411 to the substrate transport unit 3. A substrate holder 414 is placed on the load unit 42 via a heat-insulating cylinder 416 on top of a lid 417. The lid 417 is supported by a lifting mechanism 418. The lifting mechanism 418 moves the lid 417 up and down to load or unload the substrate holder 414 into or out of the reaction tube 411. The lifting mechanism 418 includes, for example, a ball screw. The load unit 42 also functions as a space for cooling each substrate W processed in the heat treatment unit 41. The lifting mechanism 418 holds and moves the third trolley 150, which will be described later, up and down.

[0021] The gas supply unit 43 is located on the side of the heat treatment unit 41 where the substrate transport section 3 is located. The gas supply unit 43 supplies the processing gas to the gas introduction port 411a. Preferably, the gas supply unit 43 is located on the same side as the gas introduction port 411a. In this case, the length of the piping between the gas supply unit 43 and the gas introduction port 411a can be shortened. This results in effects such as a reduction in the amount of piping materials and piping heaters used, a reduction in the power consumption of the piping heaters, a reduction in the purge range during maintenance, and a reduction in the risk of impurities entering the reaction tube 411. The gas supply unit 43 is located at approximately the same height as the reaction tube 411. The gas supply unit 43 includes a flow rate controller, an on / off valve, etc.

[0022] The exhaust unit 44 is positioned on the side opposite to the side where the substrate transport section 3 of the heat treatment unit 41 is located. Preferably, the exhaust unit 44 is positioned on the same side as the exhaust port 411b. The exhaust unit 44 has an inverted L-shape when viewed from the Y-axis direction. The exhaust unit 44 forms a maintenance passage B1 between itself and the load unit 42. The maintenance passage B1 is a maintenance passage through which workers can enter and exit. Workers can easily perform maintenance on the multiple batch processing units 4 arranged in the front-to-back direction in the maintenance passage B1.

[0023] The exhaust unit 44 has one end connected to the exhaust port 411b, and the other end extends downward, penetrates the floor F, and is connected to an exhaust device (not shown) located below the floor F. The exhaust device evacuates the inside of the reaction tube 411 through the exhaust port 411b and the exhaust unit 44, thereby reducing the pressure. The exhaust device includes a vacuum pump, valves, etc.

[0024] The forced air cooling unit 46 is a unit that generates a refrigerant supplied to the heater 412. The refrigerant is, for example, air. The forced air cooling unit 46 includes a heat exchanger, blower, valves, piping, etc. The forced air cooling unit 46 is located on the negative side of the X-axis direction of the heat treatment unit 41. The refrigerant supplied from the forced air cooling unit 46 is supplied to the space between the reaction tube 411 and the heater 412. This allows the reaction tube 411 to be cooled in a short time.

[0025] The process module control unit 45 and the gas control unit 47 are located on the ceiling of the heat treatment unit 41. The process module control unit 45 and the gas control unit 47 control the operation of each part of the batch processing unit 4. The process module control unit 45 and the gas control unit 47 include various control devices.

[0026] The floor box 48 is installed on the floor F. The floor box 48 has a first upper surface 48a and a second upper surface 48b. A load unit 42 is installed on the first upper surface 48a. The second upper surface 48b is exposed to the maintenance passage B1. The second upper surface 48b is lower in height than the first upper surface 48a.

[0027] Guide rail 49a is detachably attached to the positive side of the maintenance passage B1 in the X-axis direction. For example, guide rail 49a is attached to the side of floor box 48. Guide rail 49b is detachably attached to the negative side of the maintenance passage B1 in the X-axis direction. For example, guide rail 49b is attached to the side of exhaust unit 44. Guide rails 49a and 49b each extend along the Y-axis direction. Guide rails 49a and 49b are attached, for example, when replacing reaction tube 411. Guide rail 49a is provided with a plurality of engaging portions 49c. The plurality of engaging portions 49c are provided at positions corresponding to each of the plurality of batch processing units 4 in the Y-axis direction. The engaging portions 49c engage with the engaged portions 140 of the second bogie 130, which will be described later, thereby pulling the second bogie 130 towards the load unit 42 and fixing it in place.

[0028] As explained above, with the substrate processing apparatus 1, multiple batch processing units 4 are arranged for one substrate transport unit 3. Therefore, the installation area of ​​the substrate processing apparatus 1 can be reduced compared to the case where one batch processing unit 4 is arranged for one substrate transport unit 3. As a result, productivity per unit area is improved.

[0029] [Reaction tube transport jig] Referring to Figures 5 to 16, the reaction tube transport jig 100 according to the embodiment will be described.

[0030] Figure 5 is a perspective view showing an example of a reaction tube transport jig 100. The reaction tube transport jig 100 holds and transports reaction tubes 411 between multiple batch processing units 4. The reaction tube transport jig 100 is used, for example, in a cleanroom. The reaction tube transport jig 100 comprises a first trolley 110, a second trolley 130, and a third trolley 150.

[0031] Figures 6 to 10 are schematic diagrams showing the first bogie 110. Figure 6 is a perspective view of the first bogie 110. Figure 7 is a view of the first bogie 110 from the direction of arrow A11 in Figure 6. Figure 8 is a view of the first bogie 110 from the direction of arrow A12 in Figure 6. Figure 9 is a view of the first bogie 110 from the direction of arrow A13 in Figure 6. Figure 10 is a view of the first bogie 110 from the direction of arrow A14 in Figure 6.

[0032] The first trolley 110 is configured to be movable on a first plane. The first plane is, for example, the floor F inside a clean room. The first trolley 110 has a frame 111, casters 112, a handle 113, an adjustable foot 114, a guide rail 115, a connecting block 116, and a bracket 117.

[0033] The frame 111 is formed in a rectangular frame shape. Casters 112, handles 113, adjuster feet 114, guide rails 115, connecting blocks 116, and brackets 117 are attached to the frame 111. Frame 111 is an example of the first frame.

[0034] The casters 112 are attached to the four corners of the frame 111. The casters 112 are, for example, cleanroom-compatible casters. The casters 112 allow the first trolley 110 to move freely horizontally on a first plane. The casters 112 may include, for example, swivel casters whose direction of travel is rotatable and fixed casters whose direction of travel is fixed. The casters 112 may include, for example, casters with a locking mechanism. The material of the wheels of the casters 112 is, for example, pneumatic rubber. In this case, vibrations during the movement of the first trolley 110 can be suppressed. The diameter of the wheels of the casters 112 is, for example, 210 mm.

[0035] The handle 113 is mounted on the positive X-axis side of the frame 111. The handle 113 extends along the Y-axis. The operator can move the first carriage 110 along the X-axis and Y-axis by gripping the handle 113.

[0036] The adjuster feet 114 are attached to the four corners of the frame 111, similar to the casters 112. The adjuster feet 114 adjust the height of the frame 111 by making contact with the first plane, thereby moving the casters 112 away from the first plane. By moving the casters 112 away from the first plane and making contact with the first plane, the first trolley 110 is fixed on the first plane. The adjuster feet 114 adjust the height of the frame 111 so that the surface on which the second trolley 130 moves on the guide rail 115 is at the same height as the second plane, which will be described later. The adjuster feet 114 are configured to allow adjustment of the height of the frame 111 within a range of ±5 mm from the reference position. The adjuster feet 114 are an example of a height adjustment mechanism.

[0037] Two guide rails 115 are provided spaced apart in the X-axis direction. Each guide rail 115 is attached to the upper surface of the frame 111. Each guide rail 115 extends along the Y-axis direction. The guide rails 115 guide the second bogie 130 to move along the Y-axis direction. Guide rail 115 is an example of a first guide rail.

[0038] The connecting block 116 is attached to the negative side of the frame 111 in the Y-axis direction. The connecting block 116 is used to fix the first bogie 110 to the floor box 48. The connecting block 116 is an example of a first fastener.

[0039] Bracket 117 is attached to the upper surface of frame 111 and to the positive Y-axis side of guide rail 115. Bracket 117 is used to secure the second bogie 130, which is mounted on guide rail 115.

[0040] Figures 11 to 15 are schematic diagrams showing the second bogie 130. Figure 11 is a perspective view of the second bogie 130. Figure 12 is a view of the second bogie 130 from the direction of arrow A21 in Figure 11. Figure 13 is a view of the second bogie 130 from the direction of arrow A22 in Figure 11. Figure 14 is a view of the second bogie 130 from the direction of arrow A23 in Figure 11. Figure 15 is a view of the second bogie 130 from the direction of arrow A24 in Figure 11.

[0041] The second trolley 130 is loaded on top of the first trolley 110. The second trolley 130 is configured to be movable on a second plane. The second plane is a plane at a different height from the first plane, for example, a plane located higher than the first plane. The second plane is, for example, the second upper surface 48b of the floor box 48. The second trolley 130 has a frame 131, casters 132, a handle 133, a stopper 134, a holding part 135, a guide rail 136, a supplementary rail 137, a bracket 138, a bracket 139, and an engaging part 140.

[0042] Frame 131 is formed in the shape of a rectangular parallelepiped. Casters 132, handles 133, stoppers 134, retaining parts 135, supplementary rails 137, brackets 138 and 139 are attached to frame 131. Frame 131 is an example of a second frame.

[0043] The casters 132 are attached to the four corners of the lower part of the frame 131. The casters 132 are, for example, cleanroom-compatible casters. The casters 132 move the second trolley 130 horizontally on the guide rail 115 and on the second plane. The casters 132 are, for example, fixed wheels with a fixed direction of travel. The casters 132 may include, for example, casters with a locking mechanism. The material of the wheels of the casters 132 is, for example, nylon. The diameter of the wheels of the casters 132 is, for example, 100 mm or more.

[0044] The handle 133 is mounted on the upper part of the frame 131 on the positive Y-axis side. The handle 133 extends along the X-axis. The operator can grasp the handle 133 and move the second trolley 130 along the Y-axis.

[0045] The stopper 134 is mounted on the lower part of the frame 131 on the positive Y-axis side. The stopper 134 contacts the second plane, thereby fixing the second trolley 130 on the second plane. Since the stopper 134 is mounted on the same side as the handle 133, the operator can move the second trolley 130 using the handle 133 and fix the second trolley 130 using the stopper 134 from the same side of the second trolley 130.

[0046] The holding section 135 is attached to the upper part of the frame 131. The holding section 135 holds the third trolley 150 so that it can rotate horizontally relative to the frame 131. The holding section 135 has a fixed table 135a, a rotating mechanism 135b, a rotating table 135c, and a rotation stopper 135d. The holding section 135 may have a shock absorber to mitigate the rotational impact of the rotating table 135c.

[0047] The fixed table 135a is fixed to the top of the frame 131. The fixed table 135a has a rectangular plate shape. The fixed table 135a can be raised and lowered relative to the frame 131, for example. In this case, the height of the frame 131 can be adjusted so that the surface on which the third trolley 150 on the guide rail 136 moves is at the same height as the third plane described later. The fixed table 135a is configured to be adjustable in height, for example, within a range of ±10 mm from the reference position.

[0048] The rotating mechanism 135b supports the rotary table 135c so that it can rotate horizontally relative to the fixed table 135a.

[0049] The rotary table 135c has a rectangular plate shape. The rotary table 135c is configured to be rotatable between a 0° position and a 90° position via a rotation mechanism 135b. The 90° position is the position rotated 90° counterclockwise from the 0° position. The rotary table 135c is fixed to the stationary table 135a by, for example, a rest-position type plunger. Notches 135e are formed at the corners on the positive X-axis side and the negative Y-axis side when the rotary table 135c is in the 0° position.

[0050] The rotation stopper 135d stops the rotation of the rotary table 135c.

[0051] Two guide rails 136 are provided on the upper surface of the rotary table 135c, spaced apart from each other. The guide rails 136 extend along the Y-axis direction when the rotary table 135c is in the 0° position. The guide rails 136 are not provided in positions corresponding to the notches 135e. The guide rails 136 guide the movement of the third bogie 150. Guide rail 136 is an example of a second guide rail.

[0052] The supplement rail 137 is mounted on the positive X-axis and positive Y-axis sides of the fixed table 135a. The supplement rail 137 is horizontally rotatable. When the rotary table 135c is in the 90° position, the supplement rail 137 engages the guide rail 136 and guides the movement of the third trolley 150 together with the guide rail 136.

[0053] Bracket 138 is attached to the rotary table 135c. Bracket 138 is used to secure the third trolley 150, which is loaded on the second trolley 130, to the rotary table 135c.

[0054] The bracket 139 is attached to three different sides of the top of the frame 131. The bracket 139 is used to fix the reaction tube 411 to the frame 131 when the reaction tube 411 is placed on the third trolley 150 which is loaded on the second trolley 130. Fixing the reaction tube 411 to the frame 131 prevents damage to the reaction tube 411 when the first trolley 110 or the second trolley 130 is moved. The bracket 139 is an example of a second fixing device.

[0055] The engaged portion 140 is attached to the lower part of the frame 131 on the positive side in the X-axis direction. The engaged portion 140 is configured to engage with the engaging portion 49c attached to the guide rail 49a described above. When the engaging portion 49c engages with the engaged portion 140, the second bogie 130 is pulled towards the load unit 42 and fixed in place.

[0056] Figure 16 is a schematic diagram showing the third bogie 150, and is a perspective view of the third bogie 150.

[0057] The third trolley 150 is loaded on top of the second trolley 130. The third trolley 150 is configured to be movable on a third plane. The third plane is a plane at a different height from the first and second planes, for example, a plane that is higher than the second plane. The third plane is, for example, the top surface of the lifting mechanism 418. The third trolley 150 has a frame 151, wheels 152, and a handle 153.

[0058] The frame 151 has a rectangular plate shape with a circular opening 151a formed therein. The frame 151 holds the reaction tube 411 at its upper surface.

[0059] The wheels 152 are attached to the four corners of the lower part of the frame 151. The wheels 152 move the third bogie 150 horizontally on the guide rail 136 and on the third plane. The wheels 152 are, for example, made of engineering plastic bearings.

[0060] The handle 153 is attached to the frame 151. The operator can move the third trolley 150 by gripping the handle 153.

[0061] [Method for transporting reaction tubes] Referring to Figures 1 to 16, as well as Figures 17 to 24, an example of a method for transporting the reaction tube 411 between multiple batch processing units 4 provided by the substrate processing apparatus 1 will be described, specifically a method for attaching the reaction tube 411 to a batch processing unit 4. The following description will use the case where the reaction tube 411 is attached to a batch processing unit 4 adjacent to the loading / unloading unit 2 among the multiple batch processing units 4 as an example. However, the reaction tube 411 can be similarly attached to other batch processing units 4 among the multiple batch processing units 4.

[0062] First, as shown in Figure 5, the second trolley 130 is loaded onto the first trolley 110, and the second trolley 130 is secured to the first trolley 110 using brackets 117. Next, the third trolley 150 is loaded onto the second trolley 130, and the third trolley 150 is secured to the second trolley 130 using brackets 138. Then, the reaction tube 411 is placed on the third trolley 150, and the reaction tube 411 is secured to the second trolley 130 using brackets 139.

[0063] Next, as shown in Figure 17, the first trolley 110 is moved to a position on the positive side of the floor box 48 in the Y-axis direction and adjacent to the entrance of the maintenance passage B1. Then, the height of the frame 111 is adjusted using the adjuster foot 114 (see Figure 6) so that the surface on which the second trolley 130 moves on the first trolley 110 is at the same height as the second upper surface 48b of the floor box 48. Next, the first trolley 110 is fixed to the positive side of the floor box 48 in the Y-axis direction using the connecting block 116 (see Figure 6). Alternatively, the first trolley 110 may be fixed to the positive side of the floor box 48 in the Y-axis direction before placing the reaction tube 411 on the third trolley 150. Next, the fixing of the second trolley 130 by the bracket 117 is released.

[0064] Next, as shown in Figure 18, the second trolley 130 is moved to the negative side of the second upper surface 48b of the floor box 48 in the Y-axis direction and stopped at a position corresponding to the batch processing unit 4 to which the reaction tube 411 is to be installed. At this time, if there are gaps or steps on the second upper surface 48b of the floor box 48, a base plate may be placed in the area through which the casters 132 pass on the second upper surface 48b in order to move the second trolley 130 smoothly.

[0065] Next, as shown in Figure 19, the engaging portion 49c (see Figure 4) is engaged with the engaged portion 140 (see Figure 11) of the second bogie 130, thereby pulling the second bogie 130 towards the load unit 42 and fixing it in place. The second bogie 130 is also fixed in place by the stopper 134 (see Figure 11). Then, the fixing of the reaction tube 411 by the bracket 139 (see Figure 11) is released.

[0066] Next, as shown in Figures 20(a) and 20(b), the rotary table 135c is rotated 90° counterclockwise and fixed to the fixed table 135a by the plunger. Then, the supplement rail 137 is rotated to engage the guide rail 136. Next, the third bogie 150 is released from its fixed position by the bracket 138.

[0067] Next, as shown in Figure 21, the third trolley 150 is moved to the positive X-axis direction, which is perpendicular to the Y-axis direction, and stopped on the lifting mechanism 418 inside the load unit 42. The lifting mechanism 418 is moved to the trolley transfer position in advance before moving the third trolley 150. The trolley transfer position is directly below the mounting position of the reaction tube 411.

[0068] Next, as shown in Figures 22(a) and 22(b), the lifting mechanism 418 raises the third bogie 150 within the load unit 42. Figure 22(b) shows the third bogie 150 as viewed from the direction of arrow A31 in Figure 22(a).

[0069] Next, as shown in Figures 23(a) and 23(b), the reaction tube 411 is stopped in its mounting position and installed inside the heat treatment unit 41. Figure 23(b) is a view of the third trolley 150 from the direction of arrow A32 in Figure 23(a).

[0070] Next, as shown in Figures 24(a) and 24(b), the lifting mechanism 418 lowers the third bogie 150 and stops it at the bogie transfer position. Figure 24(b) is a view of the third bogie 150 from the direction of arrow A33 in Figure 24(a).

[0071] Next, the third bogie 150 is moved to the negative side in the X-axis direction and stopped on the second bogie 130. Then, the third bogie 150 is fixed on the second bogie 130 using the bracket 138.

[0072] Next, the second bogie 130 is moved to the positive side of the Y-axis and stopped on top of the first bogie 110. Then, the second bogie 130 is fixed on top of the first bogie 110 using the bracket 117.

[0073] Next, the first bogie 110 is released from its fixed position by the connecting block 116. Then, the adjuster foot 114 is moved away from the floor F and the caster 112 is placed on the floor F. Next, the first bogie 110 is moved to a predetermined retracted position.

[0074] By following the above procedure, the reaction tube 411 can be attached to the batch processing unit 4 of the substrate processing device 1.

[0075] Furthermore, the reaction tube 411 attached to the batch processing unit 4 of the substrate processing device 1 can be removed by following the reverse procedure of how the reaction tube 411 was installed.

[0076] As described above, the reaction tube transport jig 100 according to the embodiment comprises a first trolley 110, a second trolley 130 loaded on the first trolley 110, and a third trolley 150 loaded on the second trolley 130 and holding the reaction tubes 411. The first trolley 110 is movable on a first plane, the second trolley 130 is movable on a second plane at a different height from the first plane, and the third trolley 150 is movable on a third plane at a different height from the second plane. This allows the reaction tubes 411 to be transported along a transport path that includes planes of different heights, and allows the direction of movement of the reaction tubes 411 to be changed in a narrow workspace. Therefore, the reaction tubes 411 can be easily replaced.

[0077] The embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. The above embodiments may be omitted, replaced, or modified in various ways without departing from the scope and spirit of the appended claims.

[0078] In the above embodiment, the case in which the reaction tube in the batch processing unit has a single-tube structure has been described, but the disclosure is not limited thereto. For example, the reaction tube may have a double-tube structure including an inner tube and an outer tube. In this case, by using a trolley capable of holding the inner tube as the third trolley, the inner tube can be attached and detached in the same manner as the reaction tube transport method described above. Furthermore, by using a trolley capable of holding the outer tube as the third trolley, the outer tube can be attached and detached in the same manner as the reaction tube transport method described above. Alternatively, a trolley capable of holding the reaction tube, inner tube, and outer tube may be used as the third trolley. [Explanation of Symbols]

[0079] 1. Substrate processing device 4. Batch Processing Unit 100 Reaction tube transport jig 110 First bogie 130 Second bogie 150 Third bogie 411 Reaction tube

Claims

1. A reaction tube transport jig for transporting reaction tubes between multiple processing units provided in a substrate processing apparatus, A first trolley that can move on a first plane, A second trolley is loaded onto the first trolley and is movable on a second plane that is at a different height from the first plane, A third carriage is loaded onto the second carriage, is movable on a third plane at a different height from the second plane, and holds the reaction tube; Equipped with, The aforementioned second bogie is, The second frame and A rotary table that can rotate horizontally relative to the second frame, A second guide rail is attached to the aforementioned rotating table and guides the movement of the third trolley, A second fixing device attached to the second frame and used to fix the reaction tube to the second frame, Having, Reaction tube transport jig.

2. The aforementioned first bogie is, The first frame and, A height adjustment mechanism attached to the first frame for adjusting the height of the first frame, A first guide rail is attached to the first frame and guides the movement of the second trolley, A reaction tube transport jig according to claim 1, having the following features.

3. The first trolley is attached to the first frame and has a first fastener for fixing the first frame to the substrate processing apparatus. The reaction tube transport jig according to claim 2.

4. A method for transporting a reaction tube between multiple processing units provided in a substrate processing apparatus, (a) A step of moving the first trolley, on which the second and third trolleys are loaded, to a position on the first plane adjacent to the substrate processing apparatus, (b) After step (a), move the second trolley to a position on a second plane formed on the substrate processing apparatus and adjacent to one of the plurality of processing units, (c) After step (b), move the third trolley onto the third plane formed in the one processing unit and directly below the mounting position where the reaction tube is attached, (d) A step of raising the third carriage after step (c), (e) Between step (b) and step (c), a step of horizontally rotating the second trolley, A method for transporting reaction tubes, comprising the following:

5. A method for transporting a reaction tube between multiple processing units provided in a substrate processing apparatus, (a) A step of moving the first trolley, on which the second and third trolleys are loaded, to a position on the first plane adjacent to the substrate processing apparatus, (b) After step (a), move the second trolley to a position on a second plane formed on the substrate processing apparatus and adjacent to one of the plurality of processing units, (c) After step (b), move the third trolley onto the third plane formed in the one processing unit and directly below the mounting position where the reaction tube is attached, (d) A step of raising the third carriage after step (c), It has, Step (c) includes moving the third carriage along a direction perpendicular to the direction of movement of the second carriage, Method for transporting reaction tubes.

6. (f) A step of placing the reaction tube on the third trolley before step (b), (g) A step of attaching the reaction tube to the one processing unit after step (d), A method for transporting reaction tubes according to claim 4 or 5, comprising:

7. (h) The step of placing the reaction tube on the third trolley after step (d), A method for transporting a reaction tube according to claim 4 or 5.

Images