Apparatus for forming metal oxide coating and method for forming metal oxide coating

JP7873858B2Active Publication Date: 2026-06-15NIPPON TECH CO LTD

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Patent Information

Authority / Receiving Office: JP · JP
Patent Type: Patents
Current Assignee / Owner: NIPPON TECH CO LTD
Filing Date: 2023-07-31
Publication Date: 2026-06-15

Application Information

Patent Timeline

31 Jul 2023

Application

15 Jun 2026

Publication

JP7873858B2

IPC: C23C8/18; C21D1/76; C21D11/00; C21D9/67; F27D7/06; F27B5/04

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Application Domain

Muffle furnacesMaintainance of heating chambers

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Abstract

To efficiently deposit a triiron tetroxide film using gas without using water vapor.SOLUTION: A metal oxide film deposition method comprises: an arrangement step of arranging a metal workpiece in a heat treatment furnace; a substitution step of substituting air in the heat treatment furnace with inert gas or carbon dioxide; a heating step of heating the inside of the heat treatment furnace after the substitution step; and a film deposition step of depositing a triiron tetroxide film on the workpiece by changing the inside of the heat treatment furnace after the heating step into a carbon dioxide atmosphere.SELECTED DRAWING: Figure 2

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Claims

[Claim 1] The process involves placing iron alloy workpieces inside a heat treatment furnace, A replacement step in which the air inside the heat treatment furnace is replaced with an inert gas or carbon dioxide, A heating step for raising the temperature inside the heat treatment furnace after the substitution step, A coating formation step is performed in which, after the heating step, the pressure inside the heat treatment furnace is set to atmospheric pressure or higher, the temperature is set to 450°C to 550°C, and a carbon dioxide atmosphere is created without supplying water vapor, thereby forming a triiron tetroxide coating on the workpiece. A method for forming a metal oxide film, characterized by comprising the following: [Claim 2] The coating formation step is characterized by convection of the carbon dioxide. The method for forming a metal oxide film according to claim 1. [Claim 3] The coating formation step is characterized by introducing at least oxygen into the heat treatment furnace, which is already in a carbon dioxide atmosphere. The method for forming a metal oxide film according to claim 1. [Claim 4] The coating formation step is characterized in that carbon dioxide is continuously supplied into the heat treatment furnace. The method for forming a metal oxide film according to claim 1.