Method for manufacturing a mask device

Abstract

To provide a method for manufacturing a mask device, capable of preventing a frame from deforming.SOLUTION: A frame supports a mask including a plurality of open holes in the state of pulling the mask. A method for manufacturing a mask device comprises steps of: fixing the mask to the frame in the state of pulling the mask; and inserting the frame into the inside of a case in the state of supporting the frame from below by the fork of a lifter. The case includes: a side part including a bottom; a lower end positioned on the side of the bottom and an upper end positioned on the side opposite to the lower end and having a side part opening reaching the upper end; a closing tool capable of being brought into a closing state of closing the side part opening and an opening state of opening the side part opening; a frame support tool including a frame support surface for supporting the frame above the bottom; and a cover positioned above the upper end of the side part.SELECTED DRAWING: Figure 4

Description

【Technical Field】 【0001】 Embodiments of the present disclosure relate to a method for manufacturing a mask device. 【Background Art】 【0002】 In the field of display devices used in portable devices such as smartphones and tablet PCs, organic EL display devices have attracted attention. As a method and apparatus for manufacturing organic semiconductor devices such as organic EL display devices, a method and apparatus for forming pixels in a desired pattern using a mask in which through holes are formed in a desired pattern are known. For example, first, a mask fixed to a frame is combined with a substrate for an organic EL display device. Subsequently, a vapor deposition material containing an organic material is attached to the substrate through the through holes of the mask. By performing such a vapor deposition process, pixels having a vapor deposition layer containing a vapor deposition material can be formed on the substrate in a pattern corresponding to the pattern of the through holes of the vapor deposition mask. 【Prior Art Documents】 【Patent Documents】 【0003】 【Patent Document 1】 Japanese Patent No. 5382259 【Summary of the Invention】 【Problems to be Solved by the Invention】 【0004】 If the frame is deformed, it is conceivable that the positional accuracy of the through holes of the mask fixed to the frame decreases, and the positional accuracy of the vapor deposition material attached to the substrate also decreases. Therefore, it is required to handle the frame so as to suppress deformation of the frame. 【Means for Solving the Problems】 【0005】 A case for housing a frame according to an embodiment of the present disclosure is a bottom portion, and A side portion including a lower end located on the bottom side and an upper end located on the opposite side of the lower end, wherein a side opening is formed that reaches the upper end, A closing device that can take a closed state in which the side opening is closed and an open state in which the side opening is open, A frame support including a frame support surface that supports the frame above the bottom, The system includes a cover located above the upper end of the side portion. [Effects of the Invention] 【0006】 According to this disclosure, deformation of the frame can be suppressed. [Brief explanation of the drawing] 【0007】 [Figure 1] This figure shows an example of a vapor deposition apparatus equipped with a mask. [Figure 2] This is a cross-sectional view showing an example of an organic EL display device manufactured using a vapor deposition apparatus. [Figure 3] This is a plan view showing an example of a mask device. [Figure 4] This is a perspective view showing an example of a case where the door is in the closed position. [Figure 5] This is a perspective view showing an example of a case where the door is in the open position. [Figure 6] This is a plan view showing an example of a case with the cover removed. [Figure 7] This is a plan view showing the frame removed from the case in Figure 6. [Figure 8] This is a perspective view showing an example of a case frame support. [Figure 9] This is a cross-sectional view showing an example of a frame support. [Figure 10] This is a cross-sectional view showing an example of a case in which the frame is housed. [Figure 11] This is a cross-sectional view showing the case in Figure 10 with the cover removed and the door open. [Figure 12]It is a plan view showing a state where the cover is removed from the case of FIG. 10 and the door is opened. [Figure 13] It is a plan view showing a process of inserting a fork into the case through a side opening of the case. [Figure 14] It is a cross-sectional view showing a process of inserting a fork into the case through a side opening of the case. [Figure 15A] It is a cross-sectional view showing a process of lifting a frame by a fork. [Figure 15B] It is a cross-sectional view showing a frame being lifted by a fork. [Figure 16] It is a plan view showing an example of a case with the cover removed. [Figure 17A] It is a cross-sectional view of the case of FIG. 16. [Figure 17B] It is a cross-sectional view of the case of FIG. 16. [Figure 18] It is a plan view showing an example of a case with the cover removed. [Figure 19] It is a plan view showing an example of a case with the cover removed and the door opened. [Figure 20] It is a plan view showing an example of a case with the cover removed and the door opened. [Figure 21] It is a plan view showing an example of a case with the cover removed. [Figure 22] It is a plan view showing an example of a lifter 70. [Figure 23] It is a cross-sectional view of the fork and the receiver of FIG. 22 along line C-C. 【Embodiments for Carrying Out the Invention】 【0008】 In this specification and the drawings, unless otherwise specifically explained, terms that mean substances that form the basis of a certain structure, such as "substrate", "base material", "plate", "sheet", "film", etc., are not distinguished from each other based only on the difference in name. 【0009】 In this specification and these drawings, unless otherwise specified, terms that define shapes, geometric conditions, and their degrees, such as "parallel" and "orthogonal," as well as values ​​of lengths and angles, shall be interpreted not strictly, but to include a range that allows for the expectation of similar functionality. 【0010】 In this specification and these drawings, unless otherwise specified, when a component or region is described as being "on top of," "below," "upper side," "lower side," or "upward" or "downward" of another component or region, this includes cases where one component is in direct contact with another. Furthermore, it also includes cases where another component is located between one component and another, i.e., where they are indirectly in contact. In addition, unless otherwise specified, the terms "up," "upper side," or "upward," or "down," "lower side," or "downward," may be used with the direction of up and down reversed. 【0011】 In this specification and these drawings, unless otherwise specified, identical or similarly functioning parts are denoted by the same or similar reference numerals, and repeated descriptions may be omitted. Furthermore, the dimensional ratios in the drawings may differ from the actual ratios for illustrative purposes, and some components may be omitted from the drawings. 【0012】 Unless otherwise specified in this specification and these drawings, one embodiment of this specification may be combined with other embodiments to the extent that it does not conflict with the other embodiments. Furthermore, other embodiments may be combined with each other to the extent that it does not conflict with the other embodiments. 【0013】 In this specification and these drawings, unless otherwise specified, when disclosing multiple steps in a method such as a manufacturing method, other steps not disclosed may be performed between the disclosed steps. Furthermore, the order of the disclosed steps is arbitrary as long as it does not create a contradiction. 【0014】 In this specification and these drawings, unless otherwise specified, a numerical range represented by the symbol "~" includes the numbers before and after the symbol "~". For example, the numerical range defined by the expression "34~38 mass%" is the same as the numerical range defined by the expression "34 mass% or more and 38 mass% or less". 【0015】 Hereinafter, one embodiment of the present disclosure will be described in detail with reference to the drawings. Note that the embodiment described below is merely one example of the embodiments of the present disclosure, and the present disclosure is not construed to be limited to these embodiments only. 【0016】 A first aspect of this disclosure is a case for housing a frame, The bottom and, A side portion including a lower end located on the bottom side and an upper end located on the opposite side of the lower end, wherein a side opening is formed that reaches the upper end, A closing device that can take a closed state in which the side opening is closed and an open state in which the side opening is open, A frame support including a frame support surface that supports the frame above the bottom, The case comprises a cover located above the upper end of the side portion. 【0017】 A second aspect of this disclosure is that the case according to the first aspect described above may include a bottom support that supports the bottom from below. 【0018】 A third aspect of this disclosure is that, in the case of the second aspect described above, the bottom support may include a caster. 【0019】 A fourth aspect of the present disclosure is that, in the case of each of the first to third aspects described above, the closure may include a door that is rotatable around an axis attached to the side or the bottom. 【0020】 A fifth aspect of the present disclosure is that, in the case of each of the first to third aspects described above, the closure may include a closure member that is separable from the side. 【0021】 A sixth aspect of this disclosure is that, in the case of each of the first to fifth aspects described above, the frame support may include a frame base comprising a resin and constituting the frame support surface. 【0022】 A seventh aspect of this disclosure is the case according to the sixth aspect described above, wherein the frame support is located between the frame base and the bottom and includes a support column made of metal. 【0023】 An eighth aspect of the present disclosure is the case according to the sixth or seventh aspect described above, wherein the frame base includes a projection that protrudes upward from the frame support surface along the inner surface of the side, The frame support may include a pressing device made of resin, which is attached to the upper surface of the protrusion, and which includes a pressing device that has a facing region facing the frame support surface of the frame base. 【0024】 A ninth aspect of the present disclosure is that, in the cases of each of the first to eighth aspects described above, the bottom may include a guide for guiding the foam inserted through the side opening. 【0025】 A tenth aspect of the present disclosure is that, in the case of the ninth aspect described above, the guide may include a guide projection projecting upward from the bottom. 【0026】 An eleventh aspect of this disclosure is the case according to each of the first to tenth aspects described above, wherein the side opening includes a first side opening and a second side opening. The side portion may include an intermediate support located between the first side opening and the second side opening, extending vertically from the bottom portion to the cover. 【0027】 A twelfth aspect of the present disclosure is the case according to each of the first to eleventh aspects described above, wherein the side portion includes a pair of first side portions and a pair of second side portions, the dimensions of the first side portions being 1200 mm or more, and the dimensions of the second side portions being 1800 mm or more. 【0028】 A thirteenth aspect of the present disclosure is the case according to the twelfth aspect described above, wherein the side opening is formed in the second side, the ratio of the distance from the first side to the side opening to the dimensions of the second side is 0.1 or more, and the ratio of the distance from the second first side to the side opening to the dimensions of the second side is 0.1 or more. 【0029】 A fourteenth aspect of this disclosure is a method for removing frames housed in cases according to each of the first and thirteenth aspects described above, The steps include inserting the fork between the lower surface of the frame and the bottom of the case through the side opening which is in the open state, The removal method comprises the step of raising the fork to lift the frame, which is supported by the frame support, using the fork. 【0030】 A fifteenth aspect of the present disclosure is the removal method according to the fourteenth aspect described above, wherein the frame may support a mask including through holes in a stretched state. 【0031】 A sixteenth aspect of this disclosure is a storage method for housing a frame in a case according to each of the first to thirteenth aspects described above, The steps include inserting the frame and the fork supporting the frame from below into the case through the open side opening, The storage method comprises the steps of lowering the fork and placing the frame on the frame support surface of the frame support. 【0032】 A 17th aspect of this disclosure is the storage method according to the 16th aspect described above, wherein the frame may support the mask, which includes through holes, in a stretched state. 【0033】 The eighteenth aspect of this disclosure is the case according to each of the first to thirteenth aspects described above, A frame housing comprising a frame supported by the frame support of the case, and 【0034】 A 19th aspect of this disclosure is a frame housing according to the 16th aspect described above, wherein the frame may support a mask including through holes in a stretched state. 【0035】 According to one embodiment of the present disclosure, the frame housed in the case can be easily removed. Therefore, deformation of the frame caused by the process of removing the frame from the case can be suppressed. 【0036】 First, the vapor deposition apparatus 1, which includes a frame and a mask device, will be described with reference to Figure 1. The vapor deposition apparatus 1 performs a vapor deposition process in which a vapor deposition material is deposited onto an object. 【0037】 The deposition apparatus 1 may include a deposition source 6, a heater 8, and a mask device 40 inside. The deposition apparatus 1 may also further include an exhaust means for creating a vacuum atmosphere inside the deposition apparatus 1. The deposition source 6 is, for example, a crucible and contains a deposition material 7 such as an organic light-emitting material. The heater 8 heats the deposition source 6 to evaporate the deposition material 7 under a vacuum atmosphere. The mask device 40 is positioned opposite the crucible 6. 【0038】 As shown in Figure 1, the masking device 40 may include at least one mask 50 and a frame 41 that supports the mask 50. The frame 41 may include a first frame surface 41a to which the mask 50 is fixed and a second frame surface 41b located on the opposite side of the first frame surface 41a. The frame 41 may also include an opening 42 that penetrates from the first frame surface 41a to the second frame surface 41b. The mask 50 may be fixed to the frame 41 so as to cross the opening 42 in a plan view. The frame 41 may also support the mask 50 while pulling it in the plane direction to prevent the mask 50 from bending. 【0039】 As shown in Figure 1, the mask device 40 is positioned inside the deposition apparatus 1 such that the mask 50 faces the substrate 110, which is the object to which the deposition material 7 is to be deposited. The mask 50 includes a plurality of through holes 56 through which the deposition material 7 flying from the deposition source 6 passes. In the following description, the surface of the mask 50 that is on the side facing the substrate 110 will be referred to as the first surface 55a, and the surface that is on the opposite side of the first surface 55a will be referred to as the second surface 55b. 【0040】 As shown in Figure 1, the deposition apparatus 1 may be equipped with a magnet 4 positioned on the side of the substrate 110 opposite to the mask 50. By providing the magnet 4, the mask 50 can be attracted to the magnet 4 by magnetic force. This reduces or eliminates the gap between the mask 50 and the substrate 110. This suppresses the occurrence of shadows during the deposition process and improves the dimensional and positional accuracy of the deposition layer formed on the substrate 110. Although not shown, an electrostatic chuck that utilizes electrostatic force may be used to attract the mask 50 to the substrate 110. Shadow refers to the phenomenon in which the adhesion of the deposition material to the substrate 110 is hindered by the wall surface of the through hole 56. 【0041】 Figure 2 is a cross-sectional view showing an example of an organic EL display device 100 manufactured using the deposition apparatus 1 shown in Figure 1. The organic EL display device 100 may comprise a substrate 110 and pixels having a deposition layer 98 containing a deposition material 7 attached to the substrate 110. Although not shown, the organic EL display device 100 may further comprise electrodes electrically connected to the pixels containing the deposition layer 98. The electrodes may be pre-installed on the substrate 110 before the deposition material 7 is deposited on the substrate 110 by the deposition process. Furthermore, the organic EL display device 100 may further comprise other components, such as a sealing member that seals the space around the pixels containing the deposition layer 98 from the outside. Therefore, the organic EL display device 100 in Figure 2 can also be said to be an organic EL display device intermediate produced in an intermediate stage of manufacturing an organic EL display device. 【0042】 Furthermore, if you want to display multiple colors, prepare a separate deposition apparatus 1 equipped with a mask 50 corresponding to each color, and load the substrate 110 into each deposition apparatus 1 in sequence. This allows, for example, the deposition of red organic light-emitting material, green organic light-emitting material, and blue organic light-emitting material onto the substrate 110 in sequence. 【0043】 Next, the mask 50 will be described in detail. Figure 3 is a plan view showing the mask device 40 as seen from the first surface 55a side of the mask 50. As shown in Figure 3, the mask device 40 may comprise a plurality of masks 50. In this embodiment, the shape of each mask 50 may be a rectangle extending in a first direction D1. In the mask device 40, the plurality of masks 50 are arranged in a second direction D2 that intersects the first direction D1, which is the longitudinal direction of the mask 50. Each mask 50 may be fixed to the frame 41 at both ends in the longitudinal direction of the mask 50, for example, by welding. 【0044】 The frame 41 may have a rectangular contour including a pair of first regions 411 extending in a first direction D1 and a pair of second regions 412 extending in a second direction D2. As shown in Figure 3, the second region 412 to which the mask 50 is fixed may be longer than the first region 411. The opening 42 of the frame 41 may be surrounded by the pair of first regions 411 and the pair of second regions 412. 【0045】 The dimensions L1 of the first region 411 in the first direction D1 and L2 of the second region 412 in the second direction D2 are determined according to the dimensions of the substrate 110. When a large substrate 110 such as an 8th, 9th, or 10th generation substrate is used, dimensions L1 and L2 will also be larger. 【0046】 The dimension L1 of the first region 411 may be, for example, 1000 mm or more, 1500 mm or more, or 2000 mm or more. The dimension L1 may be, for example, 3000 mm or less, 3500 mm or less, or 4000 mm or less. The range of dimension L1 may be defined by a first group consisting of 1000 mm, 1500 mm, and 2000 mm, and / or a second group consisting of 3000 mm, 3500 mm, and 4000 mm. The range of dimension L1 may be defined by a combination of any one value included in the first group and any one value included in the second group. The range of dimension L1 may be defined by a combination of any two values ​​included in the first group. The range of dimension L1 may be defined by a combination of any two values ​​included in the second group. For example, it may be 1000mm or more but 4000mm or less, 1000mm or more but 3500mm or less, 1000mm or more but 3000mm or less, 1000mm or more but 2000mm or less, 1000mm or more but 1500mm or less, 1500mm or more but 4000mm or less, 1500mm or more but 3500mm or less, 1500mm or more but 3000mm or less, 1500mm or more but 2000mm or less, 2000mm or more but 4000mm or less, 2000mm or more but 3500mm or less, 2000mm or more but 3000mm or more but 3000mm or more but 4000mm or less, 3000mm or more but 3500mm or more but 4000mm or less. 【0047】 The dimension L2 of the second area 412 may be, for example, 1600 mm or more, 2100 mm or more, or 2600 mm or more. The dimension L2 may be, for example, 3300 mm or less, 3800 mm or less, or 4300 mm or less. The range of dimension L2 may be defined by a first group consisting of 1600 mm, 2100 mm, and 2600 mm, and / or a second group consisting of 3300 mm, 3800 mm, and 4300 mm. The range of dimension L2 may be defined by a combination of any one value from the first group and any one value from the second group. The range of dimension L2 may be defined by a combination of any two values ​​from the first group. The range of dimension L2 may be defined by a combination of any two values ​​from the second group. For example, it may be 1600mm or more and 4300mm or less, 1600mm or more and 3800mm or less, 1600mm or more and 3300mm or less, 1600mm or more and 2600mm or less, 1600mm or more and 2100mm or less, 2100mm or more and 4300mm or less, 2100mm or more and 3800mm or less, 2100mm or more and 3300mm or less, 2100mm or more and 3300mm or less, 2100mm or more and 2600mm or less, 2600mm or more and 4300mm or less, 2600mm or more and 3800mm or less, 2600mm or more and 3300mm or less, 3300mm or more and 4300mm or less, 3300mm or more and 3800mm or more and 4300mm or less. 【0048】 When a large circuit board 110 is used, the weight of the frame 41 also increases. The weight of the frame 41 may be, for example, 70 kg or more, 100 kg or more, or 150 kg or more. The weight of the frame 41 may be, for example, 300 kg or less, 400 kg or less, or 500 kg or less. The weight range of the frame 41 may be defined by a first group consisting of 70 kg, 100 kg, and 150 kg, and / or a second group consisting of 300 kg, 400 kg, and 500 kg. The weight range of the frame 41 may be defined by a combination of any one value from the first group and any one value from the second group. The weight range of the frame 41 may be defined by a combination of any two values ​​from the first group. The weight range of the frame 41 may be defined by a combination of any two values ​​from the second group. For example, it could be 70kg or more but 500kg or less, 70kg or more but 400kg or less, 70kg or more but 300kg or less, 70kg or more but 150kg or less, 70kg or more but 100kg or less, 100kg or more but 500kg or less, 100kg or more but 400kg or less, 100kg or more but 300kg or less, 100kg or more but 150kg or less, 150kg or more but 500kg or less, 150kg or more but 400kg or less, 150kg or more but 300kg or less, 300kg or more but 500kg or less, 300kg or more but 400kg or more but 500kg or less. 【0049】 The mask device 40 may be fixed to the frame 41 and may include a member that partially overlaps the mask 50 in the thickness direction of the mask 50. For example, the mask device 40 may include a support member 43 that extends in a second direction D2 intersecting the first direction D1 and supports the mask 50 from below. The support member 43 may be in contact with the mask 50. Alternatively, the support member 43 may indirectly support the mask 50 from below via other members. Although not shown in the figures, the mask device 40 may also include a member fixed to the frame 41 that overlaps the gap between two adjacent masks 50. 【0050】 As shown in Figure 3, the mask 50 may have a pair of ear portions 51 that overlap the frame 41 and an intermediate portion 52 located between the ear portions 51. The intermediate portion 52 may have at least one effective region 53 and a peripheral region 54 located around the effective region 53. In the example shown in Figure 3, the intermediate portion 52 includes a plurality of effective regions 53 arranged at predetermined intervals along a first direction D1. The peripheral region 54 surrounds the plurality of effective regions 53. The effective region 53 may include a plurality of through holes 56 through which the deposition material 7 passes. The deposition material that passes through each through hole 56 of the effective region 53 and adheres to the substrate 110 may constitute the above-described deposition layer 98. 【0051】 The opening dimension r of the through-hole 56 is determined according to the dimensions of the vapor-deposited layer 98 formed on the substrate 110. The opening dimension r of the through-hole 56 is the dimension in plan view of the through-hole 56 that penetrates the metal plate constituting the mask 50. The opening dimension r can be defined by the light transmitted through the through-hole 56. For example, parallel light along the normal direction of the mask 50 is incident on one of the first surface 55a or the second surface 55b of the mask 50, transmitted through the through-hole 56, and emitted from the other surface 55a or the second surface 55b. The dimension of the area occupied by the emitted light in the planar direction of the mask 50 is then adopted as the opening dimension r of the through-hole 56. 【0052】 The opening dimension r of the through hole 56 may be, for example, 10 μm or more, 15 μm or more, 20 μm or more, or 25 μm or more. Alternatively, the opening dimension r of the through hole 56 may be, for example, 40 μm or less, 45 μm or less, 50 μm or less, or 55 μm or less. The range of the opening dimension r of the through hole 56 may be defined by a first group consisting of 10 μm, 15 μm, 20 μm, and 25 μm, and / or a second group consisting of 40 μm, 45 μm, 50 μm, and 55 μm. The range of the opening dimension r of the through hole 56 may be defined by a combination of any one value included in the first group and any one value included in the second group. The range of the opening dimension r of the through hole 56 may be defined by a combination of any two values ​​included in the first group. The range of the opening dimension r of the through hole 56 may be determined by any two combinations of values ​​included in the second group described above.For example, it may be 10 μm or more and 55 μm or less, 10 μm or more and 50 μm or less, 10 μm or more and 45 μm or less, 10 μm or more and 40 μm or less, 10 μm or more and 25 μm or less, 10 μm or more and 20 μm or less, 10 μm or more and 15 μm or less, 15 μm or more and 55 μm or less, 15 μm or more and 50 μm or less, 15 μm or more and 45 μm or less, 15 μm or more and 40 μm or less, 15 μm or more and 25 μm or less, 15 μm or more and 20 μm or less, or 20 μm or more and 55 μm or less. The size may be 20 μm or more and 50 μm or less, 20 μm or more and 45 μm or less, 20 μm or more and 40 μm or less, 20 μm or more and 25 μm or less, 25 μm or more and 55 μm or less, 25 μm or more and 50 μm or less, 25 μm or more and 45 μm or less, 25 μm or more and 40 μm or less, 40 μm or more and 55 μm or less, 40 μm or more and 50 μm or less, 40 μm or more and 45 μm or less, 45 μm or more and 55 μm or less, 45 μm or more and 50 μm or less, or 50 μm or more and 55 μm or less. 【0053】 When a display device such as an organic EL display device is manufactured using the mask 50, one effective region 53 may correspond to the display area of ​​one organic EL display device. Furthermore, one effective region 53 may correspond to multiple display areas. Although not shown in the figures, multiple effective regions 53 may also be arranged in the width direction of the mask 50 at predetermined intervals. 【0054】 The effective area 53 may have a rectangular outline in plan view. Alternatively, the effective area 53 may have various outline shapes depending on the shape of the display area of ​​the organic EL display device. For example, the effective area 53 may have a circular outline. 【0055】 Next, the materials for the mask 50 and frame 41 of the masking apparatus 40 will be described. As the main material for the mask 50 and frame 41, an iron alloy containing nickel can be used. The iron alloy may also contain cobalt in addition to nickel. For example, as the material for the mask 50 and frame 41, an iron alloy can be used in which the total content of nickel and cobalt is 28% by mass or more and 54% by mass or less, and the cobalt content is 0% by mass or more and 6% by mass or less. This makes it possible to reduce the difference between the thermal expansion coefficient of the mask 50 and frame 41 and the thermal expansion coefficient of the glass substrate 110. As a result, it is possible to suppress the decrease in dimensional accuracy and positional accuracy of the vapor deposition layer 98 formed on the substrate 110 due to thermal expansion of the mask 50, frame 41, substrate 110, etc. 【0056】 The nickel and cobalt content in the iron alloy constituting the mask 50 and frame 41 may be 28% by mass or more and 38% by mass or less in total. In this case, specific examples of iron alloys include Invar, Super Invar, and Ultra Invar. Invar is an iron alloy containing 34% by mass or more and 38% by mass or less nickel, with the remainder being iron and unavoidable impurities. Super Invar is an iron alloy containing 30% by mass or more and 34% by mass or less nickel, cobalt, the remainder being iron and unavoidable impurities. Ultra Invar is an iron alloy containing 28% by mass or more and 34% by mass or less nickel, 2% by mass or more and 7% by mass or less cobalt, 0.1% by mass or more and 1.0% by mass or less manganese, 0.10% by mass or less silicon, 0.01% by mass or less carbon, the remainder being iron and unavoidable impurities. 【0057】 The nickel and cobalt content in the iron alloy constituting the mask 50 and frame 41 may be 38% by mass or more and 54% by mass or less in total. In this case, specific examples of iron alloys include low thermal expansion Fe-Ni plated alloys. A low thermal expansion Fe-Ni plated alloy is an iron alloy containing 38% by mass or more and 54% by mass or less nickel, with the remainder being iron and unavoidable impurities. 【0058】 If the temperatures of the mask 50, frame 41, and substrate 110 do not reach high temperatures during the vapor deposition process, it is not necessary to make the thermal expansion coefficients of the mask 50 and frame 41 the same as those of the substrate 110. In this case, materials other than the iron alloys described above may be used as the iron alloys constituting the mask 50 and frame 41. For example, iron alloys other than the nickel-containing iron alloys described above, such as chromium-containing iron alloys, may be used. As an example of a chromium-containing iron alloy, an iron alloy commonly referred to as stainless steel can be used. In addition, alloys other than iron alloys, such as nickel or nickel-cobalt alloys, may be used. 【0059】 The thickness T1 of the mask 50 may be, for example, 8 μm or more, 10 μm or more, 13 μm or more, or 15 μm or more. Alternatively, the thickness T1 of the mask 50 may be, for example, 20 μm or less, 30 μm or less, 40 μm or less, or 50 μm or less. The range of the thickness T1 of the mask 50 may be defined by a first group consisting of 8 μm, 10 μm, 13 μm, and 15 μm, and / or a second group consisting of 20 μm, 30 μm, 40 μm, and 50 μm. The range of the thickness T1 of the mask 50 may be defined by a combination of any one value included in the first group and any one value included in the second group. The range of the thickness T1 of the mask 50 may be defined by a combination of any two values ​​included in the first group. The range of the thickness T1 of the mask 50 may be defined by a combination of any two values ​​included in the second group. For example, it may be 8 μm or more and 50 μm or less, 8 μm or more and 40 μm or less, 8 μm or more and 30 μm or less, 8 μm or more and 20 μm or less, 8 μm or more and 15 μm or less, 8 μm or more and 13 μm or less, 8 μm or more and 10 μm or less, 10 μm or more and 50 μm or less, 10 μm or more and 40 μm or less, 10 μm or more and 30 μm or less, 10 μm or more and 20 μm or less, 10 μm or more and 15 μm or less, 10 μm or more and 13 μm or less, 13 μm or more and 50 μm or less, 1 It may be 3 μm or more and 40 μm or less, 13 μm or more and 30 μm or less, 13 μm or more and 20 μm or less, 13 μm or more and 15 μm or less, 15 μm or more and 50 μm or less, 15 μm or more and 40 μm or less, 15 μm or more and 30 μm or less, 15 μm or more and 20 μm or less, 20 μm or more and 50 μm or less, 20 μm or more and 40 μm or less, 20 μm or more and 30 μm or less, 30 μm or more and 50 μm or less, 30 μm or more and 40 μm or less, or 40 μm or more and 50 μm or less. 【0060】 By setting the thickness T1 of the mask 50 to 50 μm or less, the proportion of the deposition material 7 that gets caught on the wall surface of the through-hole 56 before passing through the through-hole 56 can be reduced. This improves the utilization efficiency of the deposition material 7. Furthermore, by setting the thickness T1 of the mask 50 to 8 μm or more, the strength of the mask 50 can be ensured, and damage or deformation of the mask 50 can be suppressed. 【0061】 The thickness T2 of frame 41 may be, for example, 5 mm or more, 10 mm or more, 15 mm or more, or 20 mm or more. Alternatively, the thickness T2 of frame 41 may be, for example, 25 mm or less, 30 mm or less, 35 mm or less, or 40 mm or less. The range of the thickness T2 of frame 41 may be defined by a first group consisting of 5 mm, 10 mm, 15 mm, and 20 mm, and / or a second group consisting of 25 mm, 30 mm, 35 mm, and 40 mm. The range of the thickness T2 of frame 41 may be defined by a combination of any one value from the first group and any one value from the second group. The range of the thickness T2 of frame 41 may be defined by a combination of any two values ​​from the first group. The range of the thickness T2 of frame 41 may be defined by a combination of any two values ​​from the second group.For example, it may be 5mm or more and 40mm or less, 5mm or more and 35mm or less, 5mm or more and 30mm or less, 5mm or more and 25mm or less, 5mm or more and 20mm or less, 5mm or more and 15mm or less, 5mm or more and 10mm or less, 10mm or more and 40mm or less, 10mm or more and 35mm or less, 10mm or more and 30mm or less, 10mm or more and 25mm or less, 10mm or more and 20mm or less, 10mm or more and 15mm or less, 15mm or more and 40mm or less, 1 It may be 5mm or more and 35mm or less, 15mm or more and 30mm or less, 15mm or more and 25mm or less, 15mm or more and 20mm or less, 20mm or more and 40mm or less, 20mm or more and 35mm or less, 20mm or more and 30mm or less, 20mm or more and 25mm or less, 25mm or more and 40mm or less, 25mm or more and 35mm or less, 25mm or more and 30mm or less, 30mm or more and 40mm or less, 30mm or more and 35mm or less, or 35mm or more and 40mm or less. 【0062】 By making the thickness T2 of the frame 41 5 mm or more, deformation such as bending of the frame 41 can be suppressed. Furthermore, by making the thickness T2 of the frame 41 40 mm or less, the weight of the frame 41 can be suppressed. This improves the handling of the frame 41. For example, the frame 41 can be transported using a small lifter. 【0063】 A contact-type measurement method will be used to measure the thickness T1 of the mask 50 and the thickness T2 of the frame 41. For the contact-type measurement method, the HEIDENHAIM-METRO "MT1271" length gauge manufactured by Heidenhaim, which is equipped with a ball bush guide plunger, will be used. 【0064】 Next, an overview of the case 10 that houses the frame 41 of the mask device 40 will be described. Figure 4 is a perspective view showing an example of the case 10 in a closed state, and Figure 5 is a perspective view showing an example of the case 10 in an open state. The case 10 may include a bottom 15, side parts 20, frame support 25, closure 30, and cover 35. 【0065】 Figure 6 is a plan view showing an example of case 10 with the cover 35 removed. Case 10 may have a contour corresponding to the frame 41 in plan view. For example, the contour of case 10 in plan view may be rectangular, similar to the frame 41. 【0066】 The frame 41 may be housed in the case 10 with the first region 411 and the second region 412 parallel to each other horizontally. In this case, the bottom 15 of the case 10 may be a plate member that extends horizontally. The material of the bottom 15 may be aluminum, stainless steel, or the like. A bottom support 16 that supports the bottom 15 from below may be attached to the bottom 15. In this case, when the case 10 is placed on the floor, a gap can be created between the floor surface and the bottom 15. This allows the base 74 of the lifter 70, which will be described later, to be inserted into the gap between the floor surface and the bottom 15. 【0067】 The bottom support 16 may include a caster 161 that is rotatable around an axis extending parallel to the plane direction of the bottom 15. By rotating the caster 161, the case 10 can be moved on the floor. 【0068】 The distance H1 from the floor surface to the bottom 15 may be, for example, 50 mm or more, 100 mm or more, 150 mm or more, or 200 mm or more. Alternatively, the distance H1 may be, for example, 250 mm or less, 300 mm or less, 350 mm or less, or 400 mm or less. The range of distance H1 may be defined by a first group consisting of 50 mm, 100 mm, 150 mm, and 200 mm, and / or a second group consisting of 250 mm, 300 mm, 350 mm, and 400 mm. The range of distance H1 may be defined by a combination of any one value from the first group and any one value from the second group. The range of distance H1 may be defined by a combination of any two values ​​from the first group. The range of distance H1 may be defined by a combination of any two values ​​from the second group.For example, it may be 50mm or more and 400mm or less, 50mm or more and 350mm or less, 50mm or more and 300mm or less, 50mm or more and 250mm or less, 50mm or more and 200mm or less, 50mm or more and 150mm or less, 50mm or more and 100mm or less, 100mm or more and 400mm or less, 100mm or more and 350mm or less, 100mm or more and 300mm or less, 100mm or more and 250mm or less, 100mm or more and 200mm or less, 100mm or more and 150mm or less, 150mm or more and 400mm or less, 1 It may be 50mm or more and 350mm or less, 150mm or more and 300mm or less, 150mm or more and 250mm or less, 150mm or more and 200mm or less, 200mm or more and 400mm or less, 200mm or more and 350mm or less, 200mm or more and 300mm or less, 200mm or more and 250mm or less, 250mm or more and 400mm or less, 250mm or more and 350mm or less, 250mm or more and 300mm or less, 300mm or more and 400mm or less, 300mm or more and 350mm or less, or 350mm or more and 400mm or less. 【0069】 Next, the side portion 20 will be described. The side portion 20 includes a lower end 201 located on the bottom portion 15 side and an upper end 202 located on the opposite side of the lower end 201, and may extend vertically from the bottom portion 15 side to the cover 35 side. For example, the side portion 20 may be a plate member that extends vertically. Aluminum, stainless steel, and the like may be used as the material for the side portion 20. 【0070】 The side portion 20 may be made of a separate component from the bottom portion 15. Alternatively, the side portion 20 may be integrally formed with the bottom portion 15. 【0071】 As shown in Figure 6, the side portion 20 may have a rectangular contour in plan view, including a first side portion 21 extending in a first direction D1 and a second side portion 22 extending to the second side portion 22. The frame 41 may be housed in the case 10 such that the first region 411 of the frame 41 is parallel to the first side portion 21 of the side portion 20 of the case 10, and the second frame surface 41b is parallel to the second side portion 22 of the side portion 20. The second side portion 22 of the side portion 20 may be longer than the first side portion 21. 【0072】 The dimension L3 of the first side portion 21 in the first direction D1 and the dimension L4 of the second side portion 22 in the second direction D2 are determined according to the dimensions of the frame 41. When a large substrate 110 is used, the frame 41 becomes larger, and dimensions L3 and L4 also become larger. 【0073】 The dimension L3 of the first side portion 21 may be, for example, 1200 mm or more, 1700 mm or more, or 2200 mm or more. L3 may be, for example, 3200 mm or less, 3700 mm or less, or 4200 mm or less. The range of L3 may be defined by a first group consisting of 1200 mm, 1700 mm, and 2200 mm, and / or a second group consisting of 3200 mm, 3700 mm, and 4200 mm. The range of L3 may be defined by a combination of any one value included in the first group and any one value included in the second group. The range of L3 may be defined by a combination of any two values ​​included in the first group. The range of L3 may be defined by a combination of any two values ​​included in the second group. For example, it may be 1200mm or more and 4200mm or less, 1200mm or more and 3700mm or less, 1200mm or more and 3200mm or less, 1200mm or more and 2200mm or less, 1200mm or more and 1700mm or less, 1700mm or more and 4200mm or less, 1700mm or more and 3700mm or less, 1700mm or more and 3200mm or less, 1700mm or more and 3200mm or less, 1700mm or more and 2200mm or less, 2200mm or more and 4200mm or less, 2200mm or more and 3700mm or less, 2200mm or more and 3200mm or less, 3200mm or more and 4200mm or less, 3200mm or more and 3700mm or more and 4200mm or less. 【0074】 The dimension L4 of the second side portion 22 may be, for example, 1800 mm or more, 2300 mm or more, or 2800 mm or more. L4 may be, for example, 3500 mm or less, 4000 mm or less, or 4500 mm or less. The range of L4 may be defined by a first group consisting of 1800 mm, 2300 mm, and 2800 mm, and / or a second group consisting of 3500 mm, 4000 mm, and 4500 mm. The range of L4 may be defined by a combination of any one value included in the first group and any one value included in the second group. The range of L4 may be defined by a combination of any two values ​​included in the first group. The range of L4 may be defined by a combination of any two values ​​included in the second group. For example, it may be 1800mm or more and 4500mm or less, 1800mm or more and 4000mm or less, 1800mm or more and 3500mm or less, 1800mm or more and 2800mm or less, 1800mm or more and 2300mm or less, 2300mm or more and 4500mm or less, 2300mm or more and 4000mm or less, 2300mm or more and 3500mm or less, 2300mm or more and 2800mm or less, 2800mm or more and 4500mm or less, 2800mm or more and 4000mm or less, 2800mm or more and 3500mm or less, 3500mm or more and 4500mm or less, 3500mm or more and 4000mm or more and 4500mm or less. 【0075】 A side opening 23 reaching the upper end 202 may be formed in a part of the side portion 20, as shown in Figure 5. The side opening 23 may extend from the lower end 201 to the upper end 202, as shown in Figure 5. Alternatively, although not shown, the side opening 23 may reach the upper end 202 but not the lower end 201. 【0076】 As shown in Figures 5 and 6, the side opening 23 may be formed in the second side portion 22 of the side portion 20. Alternatively, the side opening 23 may include a first side opening 231 and a second side opening 232 located in the second side portion 22 of the side portion 20. In this case, the side portion 20 may include an intermediate support 24 located between the first side opening 231 and the second side opening 232. As shown in Figure 5, the intermediate support 24 may extend vertically from the bottom portion 15 to the cover 35. By providing the intermediate support 24, it is possible to suppress the reduction in rigidity of the side portion 20 and the deformation of the side portion 20 when the side opening 23 is open. As the intermediate support 24, a support column including aluminum, stainless steel, etc., can be used. 【0077】 Next, the closing device 30 will be described. The closing device 30 is an element that can take on a closed state in which the side opening 23 is closed, and an open state in which the side opening 23 is open. The closing device 30 may include a door 31 that can close the side opening 23. The door 31 may be rotatable around a shaft 311 attached to the side 20, as shown in Figures 4 and 5. Although not shown, the shaft 311 of the door 31 may be attached to the bottom 15. 【0078】 As shown in Figure 4, a handle 312 may be provided on the outer surface of the door 31. A fastener 313 may also be provided on the inner surface of the door 31. Furthermore, a fastener 241 may be provided on the side 20, which fixes the fastener 313 through interaction with it. For example, one of the fasteners 313 and 241 may be a magnetic material such as iron, and the other may be a magnet that attracts magnetic materials. As shown in Figure 5, the fastener 241 may be attached to the intermediate support 24. "Inner surface" refers to the surface of the case 10 component that is located on the side in which the frame 41 is housed. "Outer surface" refers to the surface located on the opposite side of the "inner surface". 【0079】 In the example shown in Figure 6, the frame 41 housed in the case 10 may be supported from below by a frame support 25 (not shown). In this case, the case 10 may be equipped with a retainer 28 located above the frame 41 and fixed to the frame support 25. This prevents the frame 41 housed in the case 10 from being displaced vertically. 【0080】 Next, the cover 35 will be described. The cover 35 is located above the upper end 202 of the side portion 20 and may be a plate member that extends horizontally. The cover 35 can prevent foreign matter from entering the inside of the case 10. Aluminum, stainless steel, or the like may be used as the material for the cover 35. 【0081】 Next, the frame support 25 will be described with reference to Figures 7 to 9. Figure 7 is a plan view showing the frame 41 removed from the case 10 in Figure 6. Figure 8 is a perspective view showing an example of the frame support 25. Figure 9 is a cross-sectional view showing an example of the frame support 25. 【0082】 The frame support 25 is a member that supports the frame 41 from below, above the bottom 15. As shown in Figure 7, the frame support 25 may be installed on the bottom 15 at multiple locations inside the case 10. At least one frame support 25 may be installed for each first side 21 or each second side 22. For example, two or more frame support 25 may be installed on one first side 21, and two or more frame support 25 may be installed on one second side 22. As shown in Figure 7, a frame support 25 may not be installed at the door 31. 【0083】 As shown in Figures 8 and 9, the frame support 25 may include a frame base 26 and a support column 27. The frame base 26 is a member that includes a frame support surface 261 that supports the frame 41 from below. The frame base 26 may contain resin. For example, the frame support surface 261 may be made of resin. This makes it possible to suppress damage to the frame 41 caused by contact with the frame base 26 compared to the case where the frame support surface 261 is made of metal. As the resin that makes up the frame support surface 261, polyvinyl chloride, silicone resin, etc., can be used. Note that the part of the frame base 26 other than the frame support surface 261 may contain a material other than resin. For example, the frame base 26 may include a main body containing metal such as aluminum or stainless steel, and a resin sheet such as a silicone resin sheet located on the upper surface of the main body and making up the frame support surface 261. The resin sheet functions as a cushioning material, which makes it possible to suppress damage to the frame 41 caused by contact with the frame base 26. 【0084】 As shown in Figure 9, the frame base 26 may include an outer surface 263 that faces the inner surface 203 of the side portion 20. The outer surface 263 may or may not be in contact with the inner surface 203. 【0085】 In Figure 9, the symbol L5 represents the distance from the outer surface 263 to the inner end of the frame support surface 261. The distance L5 is measured along the normal direction of the inner surface 203 of the side portion 20 to which the frame base 26 is attached. The distance L5 is determined according to the width of the frame 41. The distance L5 may be, for example, 60 mm or more, 100 mm or more, or 150 mm or more. The distance L5 may be, for example, 250 mm or less, 300 mm or less, or 400 mm or less. The range of the distance L5 may be determined by a first group consisting of 60 mm, 100 mm, and 150 mm, and / or a second group consisting of 250 mm, 300 mm, and 400 mm. The range of the distance L5 may be determined by a combination of any one value from the first group and any one value from the second group. The range of the distance L5 may be determined by a combination of any two values ​​from the first group. The range of distance L5 may be determined by any two combinations of values ​​included in the second group described above. For example, it may be 60mm or more and 400mm or less, 60mm or more and 300mm or less, 60mm or more and 250mm or less, 60mm or more and 150mm or less, 60mm or more and 100mm or less, 100mm or more and 400mm or less, 100mm or more and 300mm or less, 100mm or more and 250mm or less, 100mm or more and 150mm or less, 150mm or more and 400mm or less, 150mm or more and 300mm or less, 150mm or more and 250mm or less, 250mm or more and 400mm or less, 250mm or more and 300mm or more and 400mm or less. 【0086】 The support column 27 is located between the frame base 26 and the bottom 15 and is a component that includes metal. Aluminum, stainless steel, or other materials can be used for the support column 27. 【0087】 As shown in Figures 8 and 9, the frame base 26 may include a projection 262 that protrudes upward from the frame support surface 261 along the inner surface 203 of the side portion 20. The height of the projection 262 may be greater than or equal to the thickness of the frame 41. In this case, the aforementioned retaining device 28 may be attached to the upper surface of the projection 262 by fasteners 282 or the like. 【0088】 In Figure 9, the symbol L6 represents the width of the protrusion 262. The width L6 is the maximum dimension of the protrusion 262 measured along the normal direction of the inner surface 203 of the side portion 20 to which the frame base 26 is attached. The width L6 may be, for example, 20 mm or more, 40 mm or more, or 70 mm or more. The width L6 may be, for example, 100 mm or less, 150 mm or less, or 200 mm or less. The range of the width L6 may be defined by a first group consisting of 20 mm, 40 mm, and 70 mm, and / or a second group consisting of 100 mm, 150 mm, and 200 mm. The range of the width L6 may be defined by a combination of any one value from the first group and any one value from the second group. The range of the width L6 may be defined by a combination of any two values ​​from the first group. The range of the width L6 may be defined by a combination of any two values ​​from the second group. For example, it may be 20mm or more and 200mm or less, 20mm or more and 150mm or less, 20mm or more and 100mm or less, 20mm or more and 70mm or less, 20mm or more and 40mm or less, 40mm or more and 200mm or less, 40mm or more and 150mm or less, 40mm or more and 100mm or less, 40mm or more and 70mm or less, 70mm or more and 200mm or less, 70mm or more and 150mm or less, 70mm or more and 100mm or less, 100mm or more and 200mm or less, 100mm or more and 150mm or less, and 150mm or more and 200mm or less. 【0089】 As shown in Figure 9, the retainer 28 may include an opposing region 281 that faces the frame support surface 261 of the frame base 26 in the vertical direction. The opposing region 281 may overlap the frame 41 housed in the case 10 in a plan view. 【0090】 The opposing region 281 of the retainer 28 may or may not be in contact with the frame 41. If the opposing region 281 of the retainer 28 is not in contact with the frame 41, the gap between the opposing region 281 of the retainer 28 and the frame 41 may be, for example, 1 mm or more, 2 mm or more, 3 mm or more, or 5 mm or more. Alternatively, the gap may be, for example, 10 mm or less, 20 mm or less, 30 mm or less, or 50 mm or less. The range of the gap may be defined by a first group consisting of 1 mm, 2 mm, 3 mm, and 5 mm, and / or a second group consisting of 10 mm, 20 mm, 30 mm, and 50 mm. The range of the gap may be defined by a combination of any one value from the first group and any one value from the second group. The range of the gap may be defined by a combination of any two values ​​from the first group. The range of the gap may be determined by any two combinations of values ​​included in the second group described above.For example, it may be 1 mm or more and 50 mm or less, 1 mm or more and 30 mm or less, 1 mm or more and 20 mm or less, 1 mm or more and 10 mm or less, 1 mm or more and 5 mm or less, 1 mm or more and 3 mm or less, 1 mm or more and 2 mm or less, 2 mm or more and 50 mm or less, 2 mm or more and 30 mm or less, 2 mm or more and 20 mm or less, 2 mm or more and 10 mm or less, 2 mm or more and 5 mm or less, 2 mm or more and 3 mm or less, 3 mm or more and 50 mm or less, 3 mm It may be 30mm or less, 3mm or more and 20mm or less, 3mm or more and 10mm or less, 3mm or more and 5mm or less, 5mm or more and 50mm or less, 5mm or more and 30mm or less, 5mm or more and 20mm or less, 5mm or more and 10mm or less, 10mm or more and 50mm or less, 10mm or more and 30mm or less, 10mm or more and 20mm or less, 20mm or more and 50mm or less, 20mm or more and 30mm or less, or 30mm or more and 50mm or less. 【0091】 The retaining clip 28 may contain resin. For example, the lower surface of the opposing region 281 of the retaining clip 28 may be made of resin. This makes it possible to suppress damage to the frame 41 caused by contact with the retaining clip 28 compared to when the retaining clip 28 is made of metal. As the resin of the retaining clip 28, polyvinyl chloride, silicone resin, etc., can be used. Note that the part of the retaining clip 28 other than the lower surface of the opposing region 281 may contain a material other than resin. For example, the retaining clip 28 may comprise a body containing metal such as aluminum or stainless steel, and a resin sheet such as a silicone resin sheet located on the lower surface of the body and forming the lower surface of the retaining clip 28. The resin sheet functions as a cushioning material, which makes it possible to suppress damage to the frame 41 caused by contact with the retaining clip 28. 【0092】 As shown in Figure 9, the retainer 28 may include an outer surface 283 that faces the inner surface 203 of the side portion 20. The outer surface 283 may or may not be in contact with the inner surface 203. 【0093】 In Figure 9, the symbol L7 represents the distance from the outer surface 283 to the inner end of the lower surface of the retainer 28. The distance L7 is greater than the width L6 of the protrusion 262. The distance L7 may be, for example, 30 mm or more, 50 mm or more, or 100 mm or more. The distance L7 may be, for example, 150 mm or less, 200 mm or less, or 250 mm or less. The range of the distance L7 may be defined by a first group consisting of 30 mm, 50 mm, and 100 mm, and / or a second group consisting of 150 mm, 200 mm, and 250 mm. The range of the distance L7 may be defined by a combination of any one value from the first group and any one value from the second group. The range of the distance L7 may be defined by a combination of any two values ​​from the first group. The range of the distance L7 may be defined by a combination of any two values ​​from the second group. For example, it may be 30mm or more and 250mm or less, 30mm or more and 200mm or less, 30mm or more and 150mm or less, 30mm or more and 100mm or less, 30mm or more and 50mm or less, 50mm or more and 250mm or less, 50mm or more and 200mm or less, 50mm or more and 150mm or less, 50mm or more and 100mm or less, 100mm or more and 250mm or less, 100mm or more and 200mm or less, 100mm or more and 150mm or less, 150mm or more and 250mm or less, 150mm or more and 200mm or more and 250mm or less. 【0094】 As shown in Figure 9, the upper surface of the frame 41 may include a third frame surface 41c that is located vertically on the second frame surface 41b side and horizontally outward from the first frame surface 41a to which the mask 50 is fixed. In this case, the opposing region 281 of the retainer 28 may overlap with the third frame surface 41c of the frame 41 in a plan view. The frame 41 may also include an inner side surface 41d that is displaced outward as it moves from the first frame surface 41a side toward the second frame surface 41b side. "Outward" refers to the side of the frame 41 that is away from the center point of the opening 42 in a plan view. 【0095】 As shown in Figure 9, the retainer 28 includes an upper surface 284. The upper surface 284 is located opposite the lower surface of the retainer 28 that faces the frame 41 in the vertical direction D3. As shown in Figure 9, the upper surface 284 may be located above the first frame surface 41a. This prevents the worker or equipment from coming into contact with the frame 41 or the mask 50 fixed to the frame 41 when the worker or equipment removes the retainer 28. Although not shown, the upper surface 284 may be located on the same plane as the first frame surface 41a, or it may be located below the first frame surface 41a. 【0096】 Next, the method for removing the frame 41 stored in case 10 will be explained with reference to Figures 10 to 15B. Figure 10 is a cross-sectional view showing an example of case 10 in which the frame 41 is stored. The case 10 in which the frame 41 is stored is also called the frame storage unit. Figures 11 and 12 are a cross-sectional view and a plan view showing the case 10 in Figure 10 with the cover 35 removed and the door 31 opened. Figures 13 and 14 are a plan view and a cross-sectional view showing the process of inserting the fork 71 into case 10 through the side opening 23 of case 10. Figure 15A is a cross-sectional view showing the process of lifting the frame 41 with the fork 71. The cross-sectional views in Figures 10, 11, 14 and 15A are cross-sectional views when case 10 is cut at the position of line AA shown in Figure 6. 【0097】 First, as shown in Figures 11 and 12, remove the cover 35 from the upper end 202 of the side portion 20. Also, move the closing device 30, such as the door 31, to open the side opening 23 of the side portion 20. If the case 10 is equipped with a retaining device 28, the worker or tool removes the retaining device 28. 【0098】 Furthermore, a lifter 70 is prepared as shown in Figure 12. The lifter 70 may include a fork 71, a fork frame 72, a frame 73, and a base 74. The fork 71 may be attached to the fork frame 72. The fork frame 72 may be driven vertically along the frame 73 by a drive mechanism (not shown). The base 74 may support the frame 73 from below. The base 74 may be supported from below by a moving mechanism such as casters. Alternatively, the base 74 may be supported from below by a member that does not move along the floor surface 9, such as a support column (not shown). 【0099】 As shown in Figure 12, the second side portion 22 includes a first boundary surface 221 and a second boundary surface 222. The first boundary surface 221 defines the first end of the side opening 23 in the second direction D2. The second boundary surface 222 defines the second end of the side opening 23 in the second direction D2. Reference numeral L8 represents the distance in the second direction D2 from the first side portion 21 to the first boundary surface 221. Reference numeral L9 represents the distance in the second direction D2 from the second side portion 21 to the second boundary surface 222. Distances L8 and L9 may be determined such that the fork 71 contacts the second region 412 at a position a certain distance from the first region 411. This allows for larger distances L10 and L11, which will be described later. 【0100】 Distances L8 and L9 may be, for example, 200 mm or more, 300 mm or more, or 500 mm or more. Distances L8 and L9 may be, for example, 700 mm or less, 1000 mm or less, or 1300 mm or less. The range of distances L8 and L9 may be defined by a first group consisting of 200 mm, 300 mm, and 500 mm, and / or a second group consisting of 700 mm, 1000 mm, and 1300 mm. The range of distances L8 and L9 may be defined by a combination of any one value included in the first group and any one value included in the second group. The range of distances L8 and L9 may be defined by a combination of any two values ​​included in the first group. The range of distances L8 and L9 may be defined by a combination of any two values ​​included in the second group. For example, it may be 200mm or more and 1300mm or less, 200mm or more and 1000mm or less, 200mm or more and 700mm or less, 200mm or more and 500mm or less, 200mm or more and 300mm or less, 300mm or more and 1300mm or less, 300mm or more and 1000mm or less, 300mm or more and 700mm or less, 300mm or more and 500mm or less, 500mm or more and 1300mm or less, 500mm or more and 1000mm or less, 500mm or more and 700mm or less, 700mm or more and 1300mm or less, 700mm or more and 1000mm or less, and 1000mm or more and 1300mm or less. Distance L8 may be the same as distance L9 or it may be different. 【0101】 The ratios L8 / L4 and L9 / L4, which are the ratios of distances L8 and L9 to dimension L4 of the second side portion 22, may be, for example, 0.1 or greater, 0.15 or greater, or 0.20 or greater. L8 / L4 and L9 / L4 may be, for example, 0.25 or less, 0.30 or less, or 0.35 or less. The range of L8 / L4 and L9 / L4 may be defined by a first group consisting of 0.1, 0.15, and 0.20, and / or a second group consisting of 0.25, 0.30, and 0.35. The range of L8 / L4 and L9 / L4 may also be defined by a combination of any one value included in the first group and any one value included in the second group. The range of L8 / L4 and L9 / L4 may also be defined by a combination of any two values ​​included in the first group. The ranges for L8 / L4 and L9 / L4 may be determined by any two combinations of values ​​included in the second group described above. For example, they may be between 0.1 and 0.35, between 0.1 and 0.30, between 0.1 and 0.25, between 0.1 and 0.20, between 0.1 and 0.15, between 0.15 and 0.35, between 0.15 and 0.30, between 0.15 and 0.25, between 0.15 and 0.20, between 0.20 and 0.35, between 0.20 and 0.30, between 0.20 and 0.25, between 0.25 and 0.35, and between 0.30 and 0.35. 【0102】 Next, as shown in Figures 13 and 14, an insertion step is performed in which the forks 71 are inserted through the side openings 23 between the lower surface of the frame 41 and the bottom 15 of the case 10 along the first direction D1. For example, one of the two forks 71 is inserted into the first side opening 231 and the other into the second side opening 232. In this embodiment, since the frame 41 is supported above the bottom 15 by the frame support 25 described above, the forks 71 can be inserted as shown in Figure 14. 【0103】 As shown in Figure 14, the maximum distance H2 of the base 74 or caster 75 from the floor surface 9 may be less than the distance H1 from the floor surface 9 to the bottom 15. This allows the base 74 and caster 75 of the lifter 70 to be inserted between the floor surface 9 and the bottom 15 of the case 10. 【0104】 Next, as shown in Figure 15A, the fork 71 is raised to perform a lifting step in which the frame 41, which is supported by the frame support 25, is lifted by the fork 71. For example, as shown in Figure 15A, the fork 71 is raised to a position above the upper end 202 of the side portion 20 of the case 10. In this way, the frame 41 can be removed from the case 10. 【0105】 Figure 15B is a cross-sectional view showing the frame 41 being lifted by the fork 71. Figure 15B is a cross-sectional view when the case 10 is cut at the position of line BB shown in Figure 13. The frame 41 includes an opening 42. The weight of the frame 41 including the opening 42 is less than that of the frame 41 without the opening 42. Therefore, when the frame 41 is lifted by the fork 71 in a state parallel to the horizontal direction, the frame 41 is less likely to bend. If a member without an opening, such as a glass plate, were to be lifted by the fork 71, a large bending is expected to occur. 【0106】 In Figure 15B, the symbols L10 and L11 represent the dimensions of the portion of the frame 41 located outside the fork 71. By increasing the distances L8 and L9 mentioned above, the dimensions L10 and L11 can be increased. This makes it easier for the fork 71 to place the frame 41 on a platform such as a stage. 【0107】 Subsequently, the frame 41 may be brought into a mounting device for attaching the mask 50 to the frame 41. For example, the frame 41 may be placed on a stage inside the mounting device using a fork 71. In the mounting device, the mask 50 may be attached to the frame 41 such that the mask 50, which includes the through hole 56, is supported by the frame 41 while being pulled in the planar direction of the mask 50. In this way, a mask device 40 comprising the frame 41 and the mask 50 can be obtained. 【0108】 After the mask device 40 is manufactured by attaching the mask 50 to the frame 41, the mask device 40 may be housed in the case 10. Figures 16 and 17A are a plan view and a cross-sectional view of the case 10 with the mask device 40 housed inside and the cover 35 removed. As shown in Figure 17A, the upper surface 284 of the retainer 28 may be located below the first surface 55a of the mask 50. 【0109】 Figure 17B is a cross-sectional view showing another example of case 10 with the cover 35 removed. As shown in Figure 17B, the upper surface 284 of the retainer 28 may be located above the first surface 55a of the mask 50. 【0110】 In a storage method for storing the mask device 40 or frame 41 in case 10, the reverse procedure of the removal method described above may be performed. 【0111】 For example, first, an insertion step is performed in which the frame 41 and the fork 71 supporting the frame 41 from below are inserted into the case 10 through the open side opening 23. Next, a lowering step is performed in which the fork 71 is lowered and the frame 41 is placed on the frame support surface 261 of the frame support member 25. After that, the fork 71 is withdrawn from the case 10. Then, the door 31 is moved to close the side opening 23. Finally, the cover 35 is placed over the upper end 202 of the side 20. In this way, the case 10 in which the frame 41 or the mask device 40 is housed can be obtained. 【0112】 Alternatively, the above-described removal method may be used to remove the mask device 40 stored in case 10. 【0113】 According to this embodiment, the frame 41 or mask device 40 can be removed from the case 10 using a machine such as a lifter 70. Therefore, the stability of the removal process can be increased compared to when a person lifts the frame 41 or mask device 40 and removes it from the case 10. This makes it possible to suppress damage such as deformation to the frame 41 or mask device 40. 【0114】 It is possible to make various modifications to the embodiment described above. Other embodiments will be described below, with reference to the drawings as needed. In the following description and the drawings used therein, parts that can be configured in the same way as the embodiment described above will be given the same reference numerals as those used for the corresponding parts in the embodiment described above, and redundant explanations will be omitted. In addition, if it is clear that the effects and advantages obtained in the embodiment described above can also be obtained in other embodiments, the explanation may be omitted. 【0115】 In the above-described embodiment, an example was shown in which a side opening 23 is formed on the second side portion 22 of the side portion 20 of the case 10, which is longer than the first side portion 21. However, the embodiment is not limited to this, and as shown in Figure 18, a side opening 23 may be formed on the first side portion 21, which is shorter than the second side portion 22, and a closing device 30 such as a door 31 may be provided in the side opening 23. 【0116】 In the above-described embodiment, an example was shown in which the door 31 is rotatable around the axis 311. However, the form of the door 31 is not particularly limited. For example, as shown in Figure 19, the door 31 may be configured to slide along the second direction D2. 【0117】 In the example shown in Figure 19, the dimensions of case 10 in the first direction D1 are larger than those in the example shown in Figure 6 by the thickness of the door 31. From the standpoint of miniaturizing case 10, case 10 shown in Figure 6 is more advantageous than the case shown in Figure 19. 【0118】 In the above-described embodiment, an example was shown in which the closing device 30 provided in the side opening 23 includes a door 31 that is rotatable around an axis 311 attached to the side 20 or bottom 15. That is, an example was shown in which the closing device 30 is attached to the side 20 or bottom 15 in both the closed and open states. However, the invention is not limited to this, and the closing device 30 may include a closing member 32 that is detachable from the side 20, as shown in Figure 20. That is, the closing device 30 may be an element that is detachable from the side 20 in the open state. The closing member 32 may be, for example, a plate. If the closing device 30 is a member that is detachable from the side 20 in the open state, the closing device 30 may be an integral member with the cover 35, or it may be a separate member from the cover 35. 【0119】 Figure 21 is a plan view showing an example of the case 10 with the cover 35 removed and the frame 41 not housed inside. As shown in Figure 21, the bottom 15 may include a guide 18 for guiding the fork 71 inserted through the side opening 23. This prevents the insertion direction of the fork 71 from deviating from the first direction D1 or the second direction D2. 【0120】 The guide 18 may include, for example, guide projections 181 that protrude upward from the bottom 15. In this case, the space between the guide projections 181 may serve as an entry path for the fork 71. The width of the entry path is determined by the distance W between the guide projections 181 in a direction perpendicular to the insertion direction of the fork 71. 【0121】 The distance W may be, for example, 100 mm or more, 150 mm or more, 200 mm or more, or 250 mm or more. Alternatively, the distance W may be, for example, 300 mm or less, 350 mm or less, 400 mm or less, or 450 mm or less. The range of the distance W may be defined by a first group consisting of 100 mm, 150 mm, 200 mm, and 250 mm, and / or a second group consisting of 300 mm, 350 mm, 400 mm, and 450 mm. The range of the distance W may also be defined by a combination of any one value from the first group and any one value from the second group. The range of the distance W may also be defined by a combination of any two values ​​from the first group. The range of the distance W may also be defined by a combination of any two values ​​from the second group.For example, it may be 100mm or more and 450mm or less, 100mm or more and 400mm or less, 100mm or more and 350mm or less, 100mm or more and 300mm or less, 100mm or more and 250mm or less, 100mm or more and 200mm or less, 100mm or more and 150mm or less, 150mm or more and 450mm or less, 150mm or more and 400mm or less, 150mm or more and 350mm or less, 150mm or more and 300mm or less, 150mm or more and 250mm or less, 150mm or more and 200mm or less, or 200mm or more and 450mm or less. It may be 200mm or more and 400mm or less, 200mm or more and 350mm or less, 200mm or more and 300mm or less, 200mm or more and 250mm or less, 250mm or more and 450mm or less, 250mm or more and 400mm or less, 250mm or more and 350mm or less, 250mm or more and 300mm or less, 300mm or more and 450mm or less, 300mm or more and 400mm or less, 300mm or more and 350mm or less, 350mm or more and 450mm or less, 350mm or more and 400mm or less, or 400mm or more and 450mm or less. 【0122】 Figure 22 is a plan view showing an example of a lifter 70. The lifter 70 may include a support 76 located on the fork 71. When the lifter 70 lifts the frame 41, the support 76 is positioned between the frame 41 and the fork 71. 【0123】 The support member 76 may contain resin. This helps to prevent damage to the frame 41 caused by contact with the lifter 70. Polyvinyl chloride, silicone resin, and the like can be used as the resin constituting the support member 76. 【0124】 Figure 23 is a cross-sectional view of the fork 71 and support 76 of Figure 22 along line CC. The support 76 may include a first part 761, a second part 762, and a third part 763. The first part 761 supports the frame 41 from below. The second part 762 and the third part 763 may protrude above the first part 761. The frame 41 may be positioned horizontally between the second part 762 and the third part 763. The second part 762 and the third part 763 can prevent the frame 41 from moving horizontally.

Claims

[Claim 1] A method for manufacturing a mask device comprising a mask and a frame, The mask includes a plurality of through holes, The frame supports the mask while it is being pulled, The aforementioned manufacturing method is A step of fixing the mask to the frame while the mask is being pulled taut, The process involves inserting the frame into the case while the frame is supported from below by the lifter's forks, The case includes a lowering step in which the fork is lowered inside the case, The aforementioned case is, The bottom and, A side portion including a lower end located on the bottom side and an upper end located on the opposite side of the lower end, wherein a side opening is formed that reaches the upper end, A closing device that can take a closed state in which the side opening is closed and an open state in which the side opening is open, A frame support including a frame support surface that supports the frame above the bottom, The side portion comprises a cover located above the upper end of the side portion, A method for manufacturing a mask device, wherein in the lowering step, the fork is lowered inside the case so that the frame is placed on the frame support surface of the frame support.

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