Decontamination equipment
The integration of ultrasonic transmitters and receivers in decontamination devices ensures accurate operation verification, addressing inefficiencies and damage from excessive condensation, enhancing decontamination efficiency and reducing aeration times.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- AIREX
- Filing Date
- 2021-11-04
- Publication Date
- 2026-06-22
Smart Images
Figure 0007876807000001 
Figure 0007876807000002 
Figure 0007876807000003
Abstract
Description
Technical Field
[0001] The present invention relates to a decontamination device provided with a mist circulation and dispersion means for decontaminating the interior of a clean room, an isolator device, etc., and particularly to a decontamination device provided with an ultrasonic detection means for detecting the operation of the mist circulation and dispersion means.
Background Art
[0002] In a manufacturing site for manufacturing pharmaceuticals or foods, or a medical site such as an operating room, it is important to maintain a sterile state indoors. Particularly in the decontamination of a clean room which is a working room for pharmaceutical production, it is necessary to complete a high-level decontamination validation in accordance with GMP (Good Manufacturing Practice).
[0003] In recent years, hydrogen peroxide (gas or mist) has been widely adopted for decontaminating working rooms such as clean rooms (hereinafter referred to as decontamination target rooms). This hydrogen peroxide has a strong sterilization effect, is inexpensive and easily available, and is effective as an environmentally friendly decontamination gas that finally decomposes into oxygen and water.
[0004] It is described in the following Patent Document 1 that the decontamination effect by this hydrogen peroxide is due to a condensed film of hydrogen peroxide water condensed on the surface of the decontamination target site. Therefore, in order to achieve a perfect decontamination effect in the decontamination target room, the supply amount of hydrogen peroxide may be increased to make the condensed film of hydrogen peroxide water generated thick or highly concentrated.
[0005] By the way, when an excessive amount of hydrogen peroxide is supplied to the decontamination target room, excessive condensation occurs, and there is a problem that various manufacturing facilities, precision measuring instruments installed inside the decontamination target room, or the wall surface of the decontamination target room are corroded by the condensed film of high-concentration hydrogen peroxide water generated.
[0006] Furthermore, after decontamination with hydrogen peroxide, aeration is performed to remove residual hydrogen peroxide and condensed film from inside the room being decontaminated using clean air. However, when an excessive amount of hydrogen peroxide is supplied, a problem arises in that aeration to remove the condensed film of high-concentration hydrogen peroxide that forms on the walls and other surfaces of the room being decontaminated takes a considerable amount of time.
[0007] Therefore, in Patent Document 2 below, the present inventors proposed a decontamination device that employs an ultrasonic mist circulation and dispersion means to ensure perfect decontamination by supplying an appropriate amount of decontamination agent to the room to be decontaminated, and also improves the efficiency of decontamination work by shortening the time required for tasks such as aeration. [Prior art documents] [Patent Documents]
[0008] [Patent Document 1] Special Publication No. 61-4543 [Patent Document 2] Japanese Patent Publication No. 2020-156970 [Overview of the Initiative] [Problems that the invention aims to solve]
[0009] Incidentally, while Patent Document 2 uses multiple ultrasonic transmitters in the mist circulation and dispersion means, it does not disclose a method for confirming their operation, which posed a challenge in guaranteeing the operation of the decontamination device.
[0010] Therefore, the present invention aims to address the above-mentioned problems by providing a decontamination device that can confirm that the mist circulation and dispersion means is operating accurately before, during, or after the decontamination operation, and that can guarantee the operation of the decontamination device. [Means for solving the problem]
[0011] In order to solve the above problems, the inventors of the present invention conducted diligent research and concluded that the above problems could be solved by equipping the mist circulation and dispersion means with a mechanism to operate each of the multiple ultrasonic transmitters one by one, and an ultrasonic receiver to confirm the operation of each one, and thus completed the present invention.
[0012] In other words, according to the description in claim 1, the decontamination apparatus (20) according to the present invention is, A mist supply means (30) converts a decontamination chemical solution for decontaminating the inside of the work chambers (10, 70, 80) into a decontamination mist, and supplies the decontamination mist into the inside of the work chambers. vibration board A mist circulation and dispersion means (40, 60a) that causes multiple ultrasonic transducers (46, 51, 63) provided on its surface to vibrate ultrasonically to generate an ultrasonic sound flow perpendicular to the surface of the vibrating disc (41, 42, 61), and applies the pressure due to the acoustic radiation pressure of the sound flow to the decontamination mist to circulate and disperse it within the work chamber, In a decontamination apparatus equipped with, The ultrasonic detection means (60b) includes an ultrasonic receiver for detecting the operation of the ultrasonic transmitter, The ultrasonic detection means is characterized by detecting the ultrasonic waves generated from the entirety and / or individual ultrasonic transmitters (52, 65) of the vibrating disc as they propagate through the air, and the reflected waves reflected from the inner wall surface of the work chamber or the surface of equipment placed inside the work chamber, using the ultrasonic receiver to confirm the operation of the ultrasonic transmitters.
[0013] Furthermore, according to the description in claim 2, the present invention is a decontamination apparatus as described in claim 1, The mist circulation and dispersion means includes an operation control mechanism (62) that controls the operation of a plurality of ultrasonic transducers provided in the vibrating disk, The invention is characterized by the ability to individually check the operation of each ultrasonic transmitter by operating each of the aforementioned ultrasonic transmitters one by one.
[0014] Furthermore, according to claim 3, the present invention relates to the decontamination apparatus described in claim 1 or 2, The mist circulation and dispersion means is characterized by comprising a transmission control mechanism that varies the frequency and output of the ultrasonic waves generated from a plurality of ultrasonic transmitters provided in the vibrating disk, and / or transmits the ultrasonic waves intermittently. [Effects of the Invention]
[0015] According to the above configuration, the decontamination apparatus according to the present invention is a decontamination apparatus comprising a mist supply means and a mist circulation and dispersion means, further comprising an ultrasonic detection means. The mist supply means converts a decontamination chemical solution for decontaminating the inside of a work chamber into a decontamination mist and supplies the decontamination mist into the inside of the work chamber. The mist circulation and dispersion means vibrates board The device vibrates multiple ultrasonic transducers on its surface to generate an ultrasonic acoustic flow perpendicular to the surface of the vibrating disk, and the pressure from the acoustic radiation pressure of this acoustic flow acts on the decontamination mist, causing it to circulate and disperse within the workroom. The ultrasonic detection means is equipped with an ultrasonic receiver for detecting the operation of the ultrasonic transducers. In this state, the ultrasonic detection means confirms the operation of the ultrasonic transmitters by detecting the reflected waves, which are generated from the entirety and / or individual ultrasonic transmitters of the multiple ultrasonic transmitters provided by the vibrating disc, as they propagate through the air and are reflected off the inner wall surface of the workroom or the surface of equipment placed inside the workroom, using an ultrasonic receiver.
[0016] This makes it possible to confirm that the mist circulation and dispersion means is operating correctly before, during, or after the decontamination operation, and to provide a decontamination device that can guarantee the operation of the decontamination device.
[0017] Furthermore, according to the above configuration, the mist circulation and dispersion means includes an operation control mechanism that controls the operation of multiple ultrasonic transmitters equipped in the vibrating disk. This allows the multiple ultrasonic transmitters to be operated one by one, so the operation of each ultrasonic transmitter can be individually checked. Therefore, the above effects can be demonstrated more concretely and effectively.
[0018] Further, according to the above configuration, the mist circulation dispersion means includes a carrier wave control mechanism. This carrier wave control mechanism can vary the frequency and output of the ultrasonic waves generated from the plurality of ultrasonic transducers provided in the diaphragm. Also, this carrier wave control mechanism can intermittently transmit the ultrasonic waves generated from the plurality of ultrasonic transducers provided in the diaphragm. Therefore, the above-described operational effects can be exhibited more specifically and effectively.
Brief Description of the Drawings
[0019] [Figure 1] It is a schematic cross-sectional view seen from the side of the inside of the isolator in which the decontamination device according to the invention of Patent Document 2 is arranged. [Figure 2] It is a schematic perspective view showing a state in which a plurality of ultrasonic speakers are arranged on a speaker base in the diaphragm included in the decontamination device of FIG. 1. [Figure 3] It is a conceptual diagram showing the relationship between an ultrasonic transducer and an ultrasonic receiver. [Figure 4] It is a configuration diagram of a device in which a mist circulation dispersion device and an ultrasonic detection device are integrated. [Figure 5] It is a conceptual diagram of a detection operation for confirming the operation of an ultrasonic transducer. [Figure 6] It is an internal cross-sectional view of the inside of the isolator seen from the ceiling surface side, and is a conceptual diagram showing a state of confirming the operation of the ultrasonic transducer before decontamination. [Figure 7] In the internal cross-sectional view of FIG. 6, it is a conceptual diagram showing a state of confirming the operation of the ultrasonic transducer during decontamination. [Figure 8] It is an internal cross-sectional view of the inside of the pass box provided in the isolator of FIG. 6 seen from the ceiling surface side, and is a conceptual diagram showing a state of confirming the operation of the ultrasonic transducer (1) before decontamination and (2) during decontamination.
Embodiments for Carrying Out the Invention
[0020] In this invention, "mist" is interpreted in a broad sense and includes states such as droplets of decontamination agent that are finely atomized and suspended in the air, states in which gas and droplets of decontamination agent are mixed, and states in which the decontamination agent undergoes repeated phase changes of condensation and evaporation between gas and droplets. Furthermore, the particle size is also interpreted in a broad sense, including finely divided mist, fog, droplets, etc., depending on the case.
[0021] Therefore, the mist according to the present invention may include what is sometimes called mist (sometimes defined as 10 μm or less) or fog (sometimes defined as 5 μm or less), as well as particles with larger particle sizes. In this invention, it is believed that the action of ultrasonic vibration will homogenize even droplets of 3 μm to 10 μm or larger, such as mist, fog, and liquid droplets, into ultrafine particles of 3 μm or less, thereby exhibiting a high level of decontamination effect.
[0022] The decontamination apparatus according to the present invention will be described in detail below with reference to embodiments. However, the present invention is not limited to the embodiments described below.
[0023] In this embodiment, an isolator will be used as an example of a workroom to be decontaminated. Figure 1 is a schematic cross-sectional view of the inside of an isolator in which the decontamination device according to the invention of Patent Document 2, proposed by the present inventors, is installed, viewed from the side. In addition to the mist supply device and mist circulation and dispersion device provided in the invention of Patent Document 2, the decontamination device according to the present invention is equipped with an ultrasonic detection device that detects the operation of the ultrasonic transducer. Details of the ultrasonic detection device will be described later.
[0024] First, the decontamination apparatus according to the invention of Patent Document 2 described above will be explained. In Figure 1, the isolator 10 has a decontamination apparatus 20 placed inside it. The decontamination apparatus 20 consists of a mist supply device 30, a mist circulation and dispersion device 40, and a first control device (not shown). In this embodiment, a two-fluid spray nozzle 30 is used as the mist supply device 30 and is installed on the bottom wall surface 11 of the isolator 10. In this embodiment, hydrogen peroxide (H2O2 aqueous solution) is used as the decontamination agent.
[0025] The two-fluid spray nozzle 30 atomizes hydrogen peroxide water using compressed air from a compressor (not shown) to form hydrogen peroxide mist 31, which is then supplied to the inside of the isolator 10. In this invention, the mist supply device is not limited to a two-fluid spray nozzle, nor is the mist generation mechanism and output particularly limited.
[0026] Here, the mist circulation and dispersion device 40 will be described. In this embodiment, the mist circulation and dispersion device 40 is equipped with two vibrating discs 41 and 42. The two vibrating discs 41 and 42 are positioned horizontally inside the isolator 10, with their vibrating surfaces 41a and 42a facing away from the side walls 12 and 13, at two locations: the lower right wall and the upper left wall inside the isolator 10. These two vibrating discs 41 and 42 are positioned without their disc surfaces (vibrating surfaces) facing each other. In this invention, the two vibrating discs may be positioned without their disc surfaces (vibrating surfaces) facing each other, with one or more discs arranged on one side.
[0027] Here, we will describe the vibrating disc 41 (and 42). Figure 2 is a schematic perspective view showing the vibrating disc of the decontamination device in Figure 1 with multiple ultrasonic speakers (corresponding to ultrasonic transmitters) arranged on a speaker base. In Figure 2, the vibrating disc 41 comprises a base and multiple ultrasonic transmitters. In the vibrating disc 41 of Figure 2, a speaker base 45 is used as the base, and ultrasonic speakers 46 are used as transmitters. In addition, 25 ultrasonic speakers 46 are arranged on the plane 45a of the speaker base 45, with the direction of transmission of their vibrating surfaces 46a (leftward in the diagram) unified. Note that the number of ultrasonic speakers is not particularly limited.
[0028] In this embodiment, a highly directional ultrasonic speaker was used as the ultrasonic speaker 46. Specifically, a frequency-modulated ultrasonic speaker (DC12V, 50mA) that transmits ultrasonic waves at a frequency of around 40KHz was used. The type, size, structure, output, etc., of the ultrasonic speaker are not particularly limited. Furthermore, in this invention, the vibrating disc of the mist circulation and dispersion device is not limited to an ultrasonic speaker, and the ultrasonic generation mechanism, frequency range, output, etc., are not particularly limited.
[0029] In this embodiment, by unifying the transmission direction of the vibration surfaces 46a of multiple (25) ultrasonic speakers 46 and operating these transmitters in phase, the ultrasonic waves in the forward direction of each ultrasonic speaker 46 reinforce each other, while the ultrasonic waves in the lateral direction of each ultrasonic speaker 46 cancel each other out. As a result, when the ultrasonic speakers 46 placed on the speaker base 45 vibrate ultrasonically, a highly directional acoustic flow is generated that travels vertically through the air from each vibration surface 46a. Furthermore, by controlling the frequency and output of the ultrasonic speakers 46 with a first control device (not shown), efficient decontamination operations become possible.
[0030] Next, the behavior of hydrogen peroxide mist 31 inside the isolator 10 in which the decontamination device 20 according to the above configuration is placed will be described. In Figure 1, the vibrating disc 41 located in the lower right of the diagram inside the isolator 10 has its vibrating surface 41a (the same direction as the vibrating surface 46a of the ultrasonic speaker 46) facing to the left.
[0031] In the state shown in Figure 1, when the ultrasonic speaker 46 vibrates ultrasonically, a highly directional acoustic stream 41b propagating vertically (leftward in the diagram) from the vibrating surface 41a captures the hydrogen peroxide mist 31 released from the two-fluid spray nozzle 30, and applies pressure due to acoustic radiation pressure, causing it to move in the direction of the acoustic stream 41b's propagation (leftward in the diagram). At this time, the hydrogen peroxide mist 31 is atomized into fine mist 31a by the action of ultrasonic vibrations caused by the acoustic stream 41b, and is circulated and dispersed inside the isolator 10.
[0032] Meanwhile, the vibrating disc 42, located in the upper left of the diagram inside the isolator 10, has its vibrating surface 42a (the same direction as the vibrating surface 46a of the ultrasonic speaker 46) facing to the right in the diagram. In this state, when the ultrasonic speaker 46 vibrates ultrasonically, a highly directional acoustic stream 42b, which propagates perpendicularly from the vibrating surface 42a (to the right in the diagram), is atomized by the action of the acoustic stream 41b, and the resulting acoustic radiation pressure presses on the incoming fine mist 31a, causing it to move in the direction of the acoustic stream 42b's propagation (to the right in the diagram). At this time, the fine mist 31a becomes even more stable due to the action of ultrasonic vibration by the acoustic stream 42b and is circulated and dispersed inside the isolator 10.
[0033] Thus, inside the isolator 10, the vibrating discs 41 and 42 are arranged so that their vibrating surfaces 41a and 42a do not face each other directly. If the vibrating surface 41a of vibrating disc 41 and the vibrating surface 42a of vibrating disc 42 were to face each other directly, the ultrasonic waves generated from each vibrating disc 41 and 42 would interact with each other to generate a standing wave sound field. When a standing wave sound field is generated, the fine mist 31a and 31b are not subjected to pressure by acoustic radiation pressure and are therefore unable to move. As described above, one or more vibrating discs may be arranged on one side to circulate the decontamination agent mist inside the isolator 10.
[0034] Thus, inside the isolator 10, the fine mist 31a and 31b, stabilized by the acoustic flow 41b and acoustic flow 42b, circulate in a swirling motion as indicated by the arrows (clockwise in the diagram). The acoustic flow 41b and acoustic flow 42b are stable standing longitudinal waves that propagate on a plane, and they propagate as airflow with no wind speed difference compared to direct methods from mist nozzles or fan methods.
[0035] At this time, the fine mist particles 31a and 31b are atomized by the action of ultrasonic vibration, resulting in smaller particle sizes and larger surface areas. This is thought to lead to high evaporation efficiency of the mist, with repeated cycles of evaporation and condensation. Furthermore, the fine mist particles 31a and 31b are highly atomized and form a uniform, thin condensation film on the inner wall surface of the isolator 10. Therefore, compared to conventional decontamination operations, this method does not produce a partial, uneven, or thick condensation film on the inner wall surface of the isolator 10.
[0036] In this way, the fine hydrogen peroxide mist 31a and 31b circulate inside the isolator 10, constantly undergoing evaporation, condensation, and atomization under the influence of ultrasonic vibrations. Furthermore, on the inner wall surface of the isolator 10, the constant influence of ultrasonic vibrations causes repeated re-evaporation and condensation of a uniform, thin layer of condensed film. As a result, it is believed that ultrafine hydrogen peroxide particles of 3 μm or less and hydrogen peroxide gas coexist inside the isolator 10 while undergoing phase changes, thus creating a highly decontamination environment.
[0037] Furthermore, the condensation film formed uniformly and in a thin layer on the inner wall surface of the isolator 10 undergoes repeated re-evaporation and condensation, thereby increasing the concentration of the decontamination agent in the decontamination mist and enabling efficient decontamination with a small amount of decontamination agent. In addition, because decontamination can be performed efficiently with a small amount of decontamination agent, the efficiency of aeration after decontamination is also improved, and the decontamination operation can be shortened. Moreover, as a secondary effect, the ultrasonic vibration and acoustic radiation pressure from acoustic streams 41b and 42b also have the effect of removing deposits from the inner wall surface of the isolator 10.
[0038] Next, we will describe the ultrasonic detection device, which is the core technology of the present invention. First, we will describe the ultrasonic transmitter and ultrasonic receiver. Figure 3 is a conceptual diagram showing the relationship between the ultrasonic transmitter and the ultrasonic receiver. In Figure 3(1), the transmitting surface 51a of the ultrasonic transmitter 51 and the receiving surface 52a of the ultrasonic receiver 52 face each other (their surfaces face each other directly).
[0039] In this state, an electrical signal 51b from a first control device (not shown) is converted into ultrasonic waves by an ultrasonic transmitter 51, and ultrasonic waves 53a are transmitted from the transmitting surface 51a. Next, the transmitted ultrasonic waves 53a are received by the receiving surface 52a of an ultrasonic receiver 52 and converted into an electrical signal 52b. The converted electrical signal 52b is recognized by a second control device (not shown) of the ultrasonic detection device, and it is confirmed that the ultrasonic transmitter 51 is operating correctly.
[0040] On the other hand, in Figure 3(2), the transmitting surface 51a of the ultrasonic transmitter 51 and the receiving surface 52a of the ultrasonic receiver 52 do not face each other, but both face the reflective surface 54 in the same direction.
[0041] In this state, an electrical signal 51b from a first control device (not shown) is converted into ultrasonic waves by an ultrasonic transmitter 51, and ultrasonic waves 53a are transmitted from the transmitting surface 51a. Next, the transmitted ultrasonic waves 53a are reflected (and partially attenuated in some cases) by a reflective surface 54 to become ultrasonic waves 53b. Next, the ultrasonic waves 53b are received by the receiving surface 52a of an ultrasonic receiver 52 and converted into an electrical signal 52b. The converted electrical signal 52b is recognized by a second control device (not shown) of the ultrasonic detection device, and it is confirmed that the ultrasonic transmitter 51 is operating correctly.
[0042] As mentioned above, the ultrasonic transmitter is not limited to an ultrasonic speaker, but is not particularly limited to any mechanism that can convert electrical signals into ultrasonic waves. Similarly, the ultrasonic receiver is structurally similar to the ultrasonic transmitter, and an ultrasonic speaker can also be used. Again, it is not limited to an ultrasonic speaker, but is not particularly limited to any mechanism that can convert ultrasonic waves into electrical signals.
[0043] Next, another example of a mist circulation and dispersion device equipped with multiple ultrasonic transducers and an ultrasonic detection device equipped with an ultrasonic receiver will be described. Figure 4 is a diagram of the configuration of a device in which the mist circulation and dispersion device and the ultrasonic detection device are integrated. In Figure 4, the device 60 (hereinafter referred to as the "integrated device 60"), which integrates the mist circulation and dispersion device 60a and the ultrasonic detection device 60b, consists of a vibrating disc 61, a first control device 62, and multiple ultrasonic transducers 63 (48 in Figure 4) provided by the mist circulation and dispersion device 60a, and a second control device 64 and an ultrasonic receiver 65 provided by the ultrasonic detection device 60a. The 48 ultrasonic transducers 63 are uniformly arranged on the surface of the vibrating disc 61, and one ultrasonic receiver 65 is positioned in the center of them. In addition, an LED pilot lamp 66 is provided at one end of the vibrating disc 61 to indicate the operation of the integrated device 60.
[0044] In this configuration, the first control device 62 controls the operation of the 48 ultrasonic transmitters 63 individually and independently, as well as the operation of the 48 ultrasonic transmitters 63 as a whole. On the other hand, the second control device 64 controls the operation of one ultrasonic receiver 65. In the integrated device 60, the ultrasonic transmitters 63 and ultrasonic receivers 65 are located on the same surface of the vibrating disc 61, so the ultrasonic receiver 65 detects the reflected ultrasonic waves transmitted by the ultrasonic transmitter 63, as explained in Figure 3(2) above. Alternatively, the ultrasonic transmitters 63 and ultrasonic receivers 65 may be located in different positions, so that the ultrasonic receiver 65 directly detects the ultrasonic waves transmitted by the ultrasonic transmitter 63, as explained in Figure 3(1) above.
[0045] Here, a detection operation to confirm the operation of the ultrasonic transmitter 63 using the integrated device 60 according to this embodiment will be described. Figure 5 is a conceptual diagram of the detection operation to confirm the operation of the ultrasonic transmitter. First, in Figure 5 (Operation 1), the operation of all ultrasonic transmitters is individually confirmed before decontamination. After confirming the operation of all ultrasonic transmitters as a result of Operation 1, the decontamination operation is performed. Regarding the confirmation of operation before performing the decontamination operation, a threshold may be set for the operating state.
[0046] Next, in Figure 5 (Operation 2), the operation of the vibrating disks (all ultrasonic transmitters) is checked during decontamination. After confirming that all ultrasonic transmitters are operating as a result of Operation 2, the decontamination operation is performed. If no cessation of operation of the vibrating disks is detected during decontamination, it is considered that the decontamination has been performed successfully. Note that in Operation 2, the operation of each ultrasonic transmitter is not checked individually.
[0047] Finally, in Figure 5 (Operation 3), the same operation as before decontamination is performed after decontamination to individually check the operation of all ultrasonic transmitters. As a result of Operation 3, by confirming the operation of all ultrasonic transmitters, it can be assumed that the ultrasonic transmitters were operating normally even during decontamination. At this time, a threshold may be set for the operating state of the ultrasonic transmitters. In this way, by confirming the operation of all ultrasonic transmitters in Operations 1 to 3, the operation of the decontamination device can be guaranteed.
[0048] The following provides a detailed explanation of how to verify the operation of the ultrasonic transducer for operations 1 to 3 shown in Figure 5. Here, we will use the example of a decontamination operation where two integrated units 60 (see Figure 4) are placed on one side wall inside the isolator, but this is not the only example. Note that the following explanation focuses on verifying the operation of the ultrasonic transducer, and the explanation of the mist supply device of the decontamination system is omitted.
[0049] Figure 6 is a conceptual diagram showing an internal cross-sectional view of the inside of an isolator, viewed from the ceiling side, illustrating the confirmation of the operation of the ultrasonic transmitter before decontamination. Figures 6(1) and (2) show the same isolator with the operation confirmation of two integrated devices 60 switched. In Figure 6, two integrated devices 60A and 60B are arranged on one side wall surface 70a inside the isolator 70. Furthermore, the central part of the inside of the isolator 70 schematically shows multiple pieces of equipment 71-77 used in post-decontamination work placed on the lower wall surface or suspended from the ceiling surface by support devices 78.
[0050] (Operation 1) In this state, first, as shown in Figure 6(1), the first control device 62 operates the 48 ultrasonic transmitters 63 of the integrated device 60A one by one in sequence (for example, from No. 1 to No. 48) (see Figure 4). At the same time, the second control device 64 operates the ultrasonic receiver 65 of the integrated device 60A. In Figure 6(1), the ultrasonic waves transmitted from one ultrasonic transmitter 63 are indicated by arrows. As can be seen from Figure 6(1), the transmitted ultrasonic waves are reflected by the surfaces of multiple devices 71-77 and other side walls 70b of the isolator 70, and propagate in various directions. The ultrasonic receiver 65 detects some of these reflected waves to confirm that ultrasonic waves are being transmitted from one of the operating ultrasonic transmitters 63.
[0051] In this manner, the operation of each of the 48 ultrasonic transmitters 63 in the integrated device 60A is checked sequentially. Meanwhile, after confirming the operation of all 48 ultrasonic transmitters 63 in the integrated device 60A, the system switches to the integrated device 60B and checks the operation of its 48 ultrasonic transmitters 63 (see Figure 6(2)). After confirming the operation of all ultrasonic transmitters 63 in both integrated devices 60A and 60B, the inside of the isolator 70 is decontaminated and the system proceeds to (operation 2). At this time, a threshold may be set for the operating state of the ultrasonic transmitters 63.
[0052] (Operation 2) Figure 7 is a conceptual diagram showing the operation of an ultrasonic transmitter during decontamination. In Figure 7, two integrated units 60A and 60B and several devices 71-77 are arranged inside the isolator 70, similar to Figure 6.
[0053] In this state, hydrogen peroxide mist is supplied into the isolator 70 to begin decontamination. In this case, all ultrasonic transmitters 63 of the two integrated units 60A and 60B are operating to circulate and disperse the hydrogen peroxide mist. In Figure 7, the ultrasonic waves transmitted from all ultrasonic transmitters 63 are indicated by arrows. The ultrasonic waves transmitted from all ultrasonic transmitters 63 atomize the hydrogen peroxide mist and are circulated and dispersed inside the isolator 70, causing some attenuation. As can be seen from Figure 7, the attenuated ultrasonic waves are reflected by the surfaces of multiple devices 71-77 and other side walls 70b of the isolator 70, and propagate in various directions.
[0054] The ultrasonic receivers 65 of both the two integrated devices 60A and 60B detect a portion of these reflected waves to confirm the operation of the two integrated devices 60A and 60B. However, since the attenuated ultrasonic waves undergo complex reflections inside the isolator 70, the system does not check if one of the two integrated devices 60A or 60B has stopped. Furthermore, the system does not check if one or more of the ultrasonic transmitters 63 (96 in this case) of the two integrated devices 60A and 60B have stopped.
[0055] In other words, in (Operation 2), it is possible to confirm that both of the two integrated devices 60A and 60B have completely stopped. If, in this manner, both of the two integrated devices 60A and 60B have not completely stopped, the operation proceeds to (Operation 3) as the final confirmation operation.
[0056] (Operation 3) After each decontamination and aeration process is completed, the same operation as in (Operation 1) before decontamination is performed after decontamination to individually check the operation of all ultrasonic transmitters 63. If (Operation 1) and (Operation 2) above are confirmed to be performed normally, and if the operation of all ultrasonic transmitters 63 of the two integrated devices 60A and 60B is confirmed in (Operation 3), then the operation of the decontamination device can be guaranteed, and it can be determined that the decontamination of the inside of the isolator 70 performed earlier has been carried out accurately. In addition, a threshold may be set for the operating state of the ultrasonic transmitters 63 at this time.
[0057] Next, we will explain the decontamination of the inside of a pass box when it is installed alongside an isolator. Figure 8 is a conceptual diagram showing an internal cross-sectional view of the inside of a pass box installed alongside an isolator, viewed from the ceiling side, and illustrating the operation of the ultrasonic transmitter being confirmed (1) before decontamination and (2) during decontamination. In Figure 8, one integrated unit 60A is placed on one side wall surface 80a inside the pass box 80. Furthermore, the central part of the inside of the pass box 80 schematically shows multiple devices 81 to 83 mounted on the lower wall surface.
[0058] (Operation 1) In this state, first, as shown in Figure 8(1), the first control device 62 operates the 48 ultrasonic transmitters 63 of the integrated device 60A one by one in sequence (for example, from No. 1 to No. 48) (see Figure 4). At the same time, the second control device 64 operates the ultrasonic receiver 65 of the integrated device 60A. In Figure 8(1), the ultrasonic waves transmitted from one ultrasonic transmitter 63 are indicated by arrows. As can be seen from Figure 8(1), the transmitted ultrasonic waves are reflected by the surfaces of multiple devices 81-83 and other side walls 80b of the pass box 80, and propagate in various directions. The ultrasonic receiver 65 detects some of these reflected waves to confirm that ultrasonic waves are being transmitted from one of the operating ultrasonic transmitters 63.
[0059] In this manner, the operation of each of the 48 ultrasonic transmitters 63 in the integrated device 60A is checked sequentially. After confirming the operation of all 48 ultrasonic transmitters 63 in the integrated device 60A, the inside of the pass box 80 is decontaminated and the process proceeds to (operation 2). At this time, a threshold may be set for the operating state of the ultrasonic transmitters 63. Furthermore, the decontamination of the inside of the pass box 80 may be performed simultaneously with the decontamination of the inside of the isolator 70 as described above.
[0060] (Operation 2) In Figure 8(2), the pass box 80 is arranged with one integrated unit 60A and multiple devices 81-83, similar to Figure 8(1). In this state, hydrogen peroxide mist is supplied to the inside of the pass box 80 to start decontamination. In this case, all ultrasonic transmitters 63 of the integrated unit 60A are operating to circulate and disperse the hydrogen peroxide mist. In Figure 8(2), the ultrasonic waves transmitted from all ultrasonic transmitters 63 are indicated by arrows. The ultrasonic waves transmitted from all ultrasonic transmitters 63 atomize the hydrogen peroxide mist and are circulated and dispersed inside the pass box 80, causing some attenuation. As can be seen from Figure 8(2), the attenuated ultrasonic waves are reflected by the surfaces of the multiple devices 81-83 and the other side walls 80b of the pass box 80, and propagate in various directions.
[0061] The ultrasonic receiver 65 of the integrated device 60A detects some of these reflected waves to confirm the operation of the integrated device 60A. However, since the attenuated ultrasonic waves are reflected repeatedly in a complex manner inside the pass box 80, it is not necessary to confirm that one or more of the ultrasonic transmitters 63 (48 in this case) of the integrated device 60A have stopped. In other words, in (operation 2), it is possible to confirm that the integrated device 60A has stopped completely. If the integrated device 60A has not stopped completely in this manner, the operation proceeds to (operation 3) as the final confirmation operation.
[0062] (Operation 3) After each decontamination and aeration process is completed, the same operation as in (Operation 1) before decontamination is performed after decontamination to individually check the operation of all ultrasonic transmitters 63. If (Operation 1) and (Operation 2) above are confirmed to be performed normally, and if the operation of all ultrasonic transmitters 63 of the integrated device 60A is confirmed in (Operation 3), then the operation of the decontamination device can be guaranteed, and it can be determined that the decontamination inside the pass box 80 performed earlier has been carried out accurately. In addition, a threshold may be set for the operating state of the ultrasonic transmitters 63 at this time.
[0063] As described above, according to this embodiment, it is possible to confirm that the mist circulation and dispersion means is operating accurately before, during, or after the decontamination operation, and to provide a decontamination device that can guarantee the operation of the decontamination device. [Explanation of symbols]
[0064] 10, 70...Isolator, 80...Passbox, 11...Bottom wall, 12, 13, 70a, 70b, 80a, 80b...Side walls, 14...Top wall 20...Decontamination equipment, 30...Mist supply equipment (two-fluid spray nozzle), 31...Hydrogen peroxide mist, 31a...Fine mist, 40, 60a... Mist circulation and dispersion device, 60, 60A, 60B... Integrated device, 60b... Ultrasonic detection device, 41, 42, 61... Vibrating disc, 41a, 42a... Vibrating surface, 41b, 42b...acoustic flow, 45...speaker board, 45a...plane of the speaker board, 46, 51, 63... Ultrasonic transmitters (ultrasonic speakers), 46a, 51a... Waveform surface (vibrating surface) of ultrasonic transducer, 51b, 52b... Electrical signal, 52, 65... Ultrasonic receiver (ultrasonic speaker), 52a... Wave-receiving surface (vibrating surface) of the ultrasonic receiver, 53a, 53b... Ultrasonic, 62... First control device, 64... Second control device, 66...LED pilot lamp, 71-77, 81-83...equipment, 78...support fixture.
Claims
1. A mist supply means that converts a decontamination chemical solution for decontaminating the inside of a workroom into a decontamination mist and supplies the decontamination mist into the inside of the workroom, A mist circulation and dispersion means that vibrates a vibrating disc by ultrasonically vibrating a plurality of ultrasonic transducers on its surface to generate an ultrasonic acoustic flow perpendicular to the surface of the vibrating disc, and applies the pressure due to the acoustic radiation pressure of the acoustic flow to the decontamination mist to circulate and disperse it within the work chamber, In a decontamination apparatus equipped with, The ultrasonic detection means includes an ultrasonic receiver for detecting the operation of the ultrasonic transmitter, The ultrasonic detection means is characterized in that ultrasonic waves generated from the entirety and / or individual ultrasonic transmitters of the plurality of ultrasonic transmitters provided in the vibrating disk propagate through the air, and the ultrasonic receiver detects the reflected waves reflected from the inner wall surface of the work chamber or the surface of equipment placed inside the work chamber to confirm the operation of the ultrasonic transmitter.
2. The mist circulation and dispersion means includes an operation control mechanism that controls the operation of the plurality of ultrasonic transducers provided in the vibrating disk, The decontamination apparatus according to claim 1, characterized in that the operation of each ultrasonic transmitter can be individually confirmed by operating each of the plurality of ultrasonic transmitters one by one.
3. The decontamination apparatus according to claim 1 or 2, characterized in that the mist circulation and dispersion means comprises a wave control mechanism that varies the frequency and output of ultrasonic waves generated from a plurality of ultrasonic transmitters provided in the vibrating disk, and / or intermittently transmits ultrasonic waves.