Entrance group 3D

Abstract

An inlet assembly, an abatement apparatus and a method are disclosed. The inlet assembly is for an abatement apparatus for treating an exhaust stream from a semiconductor processing tool and includes a combustion chamber module defining a plenum configured to supply combustion reactants to the combustion chamber, the combustion chamber module having a mounting, the mounting configured to interconnect with a common head defining at least one gallery configured to supply the combustion reactants, the mounting comprising a plurality of supply openings positioned for fluid communication of the combustion reactants between the gallery and the plenum. In this manner, the mounting adapted to the combustion chamber module can interconnect with a standard head or a common head, thereby supplying combustion reactants from the gallery of the common head through the mounting to the plenum of the combustion chamber module. This allows the common head to be used for different combustion chamber modules, thereby reducing the number of parts required for assembly and maintenance of the abatement apparatus.

Description

Technical Field

[0005] ,

[0001] The field of the present invention relates to an inlet assembly, a decontamination device and method.

Background Art

[0002] Decontamination devices such as radiant burners or other forms of decontamination devices are known and are typically used to treat exhaust gas streams from manufacturing process tools used, for example, in the semiconductor industry or the flat panel display manufacturing industry. During such manufacturing, residual perfluorinated compounds (PFCs) and other compounds are present in the exhaust gas stream pumped from the process tool. PFCs are difficult to remove from the exhaust gas, and emissions to the environment are undesirable because they are known to have a relatively high greenhouse gas effect.

[0003] Known radiant burners, such as those described in European Publication No. 0,694,735, use combustion to remove PFCs and other compounds from the exhaust gas stream. Typically, the exhaust gas stream is a nitrogen stream containing PFCs and other compounds. The exhaust gas stream is carried to a combustion chamber laterally surrounded by the outlet surface of a perforated gas burner. In some cases, a treatment material such as fuel gas can be mixed with the exhaust gas stream before entering the combustion chamber. Fuel gas and air are simultaneously supplied to the perforated burner to affect combustion at the outlet surface. Combustion products from the perforated burner react with the exhaust stream mixture to combust the compounds in the exhaust stream.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] [[ID=XXX]] While various configurations for pollution control devices exist, each has its own drawbacks. Therefore, there is a need to provide improved configurations for pollution control devices. [Means for solving the problem]

[0006] According to a first aspect, an inlet assembly is provided for a decontamination device for treating an exhaust flow from a semiconductor processing tool, the inlet assembly comprising a combustion chamber module defining a plenum configured to supply combustion reactants to a combustion chamber, the combustion chamber module having a mounting base configured to interconnect with a common head defining at least one gallery configured to supply combustion reactants, the mounting base comprising a plurality of supply openings positioned for fluid communication of combustion reactants between the gallery and the plenum.

[0007] The first aspect recognizes that a problem with abatement systems is that each combustion chamber must be carefully configured to suit the flow rate and type of exhaust flow in order to ensure proper abatement. This means that various, often custom-made, parts must be manufactured to provide abatement systems that are suitable for operation under a variety of different conditions. For example, the configuration of the feed nozzles that deliver the exhaust flow to the abatement chambers may vary depending on the exhaust flow and / or its flow rate. The size of the abatement chambers may also vary. Having feed nozzles and abatement chambers with different configurations may lead to the need for parts with different configurations, which can be problematic as it increases the inventory of parts needed to manufacture and maintain the abatement system.

[0008] Accordingly, an inlet assembly is provided. The inlet assembly may be for a filtration device. The filtration device can process the exhaust flow from a semiconductor processing tool. The inlet assembly may comprise a combustion chamber module. The combustion chamber module may define a plenum. The plenum may be configured or positioned to supply combustion reactants to the combustion chamber of the combustion chamber module. The combustion chamber module may have a mounting base. The mounting base may be configured to interconnect with a common head. The common head may define at least one gallery or chamber. The gallery may be configured or positioned to supply combustion reactants. The mounting base may comprise a plurality of supply openings. The supply openings may be positioned or positioned to provide fluid communication of combustion reactants between the gallery and the plenum. Thus, a mounting base adapted to a combustion chamber module interconnects with a standard head or common head, thereby supplying combustion reactants from the gallery of the common head through the mounting base to the plenum of the combustion chamber module. This allows a common head to be used for different combustion chamber modules, which reduces the number of parts required for assembling and maintaining the abatement system.

[0009] The plenum can surround the combustion and filling chamber. The supply opening can lie on top of the plenum or be positioned to align with the plenum. Thus, the supply opening can be positioned to align with the plenum.

[0010] The supply opening can be positioned to extend around or be positioned around the outer circumference or periphery of the mounting base.

[0011] The inlet assembly may comprise multiple combustion chamber modules. Each combustion chamber module may have a mounting base configured to interconnect with one of a corresponding gallery of a common head. Each mounting base may have multiple supply openings positioned for fluid communication of combustion reactants between its gallery and the corresponding plenum. Thus, the common head may comprise multiple separate gallerys, each supplying combustion reactants to the corresponding combustion chamber module through the mounting base. This allows each combustion chamber module to be supplied independently of the other combustion chamber modules.

[0012] The mounting base of at least one combustion chamber module can be configured or positioned to interconnect with multiple galleries of a common head. The mounting base may have multiple supply openings positioned or positioned for fluid communication of combustion reactants between those galleries and its plenum. Thus, two or more galleries in the common head can supply a combustion chamber module. This allows an increased amount of combustion reactants to be supplied to the combustion chamber module.

[0013] Each combustion chamber module may be configured or positioned to receive or position within at least one exhaust flow nozzle that can extend from a common head. A supply opening may be positioned to avoid the location of each exhaust flow nozzle. Thus, the exhaust flow nozzles can extend through the common head and mounting base, and the supply opening is positioned away from the location of the exhaust flow nozzles.

[0014] The mounting base can define at least one exhaust nozzle opening. The exhaust nozzle opening can be positioned or configured to receive a corresponding exhaust nozzle. Thus, the exhaust nozzle can extend from the common head through the mounting base to the combustion chamber.

[0015] The mounting base may include at least one discharge nozzle seal positioned to surround each corresponding discharge nozzle.

[0016] Each discharge nozzle seal can be configured to fluidly separate the corresponding discharge nozzle from the combustion reactants.

[0017] The combustion chamber module may be provided with at least one exhaust nozzle seal groove configured to receive a corresponding exhaust nozzle seal.

[0018] The supply opening can be positioned or located to avoid each discharge flow nozzle seal.

[0019] The mounting base may include an outer seal configured to contain combustion reaction materials.

[0020] The common head can be configured to include at least one additional exhaust nozzle that can be removed for an enhanced combustion chamber module. The nozzle can extend from the common head. Thus, the common head can have additional exhaust nozzles when needed, but these additional exhaust nozzles can be removed when not needed. This allows the common head to support different types of combustion chamber modules.

[0021] The combustion chamber module can be an enhanced combustion module. The mounting base can be configured to receive at least one additional exhaust flow nozzle extending from the common head. The supply opening can be positioned to avoid the location of each additional exhaust flow nozzle. Thus, the supply opening is positioned away from any of the exhaust flow nozzles that may extend from the common head.

[0022] The mounting base for the reinforced combustion chamber module can be configured or positioned to receive multiple exhaust flow nozzles extending from a common head.

[0023] The mounting base of the enhanced combustion chamber module can be configured or arranged to interconnect with a plurality of galleries of a common head.

[0024] The combustion chamber module can be other than the enhanced combustion chamber module. In such a case, the outer peripheral seal can be positioned to be offset to avoid the position of at least one additional exhaust flow nozzle.

[0025] The mounting base other than the enhanced combustion chamber module can be configured or arranged to receive a single exhaust flow nozzle extending from the common head.

[0026] The mounting base other than the enhanced combustion chamber module can be configured to interconnect with a single gallery of the common head.

[0027] Each outer peripheral seal can follow a curved or non - linear path to avoid at least one additional exhaust flow nozzle.

[0028] The supply opening can be positioned to avoid the outer peripheral seal.

[0029] The supply opening can be positioned to follow a displaced path extending around the outer periphery of the mounting base.

[0030] [[ID=二十九]]The inlet assembly can include a common head having an inlet configured to supply a combustion reactant exhaust flow to a gallery.

[0031] The inlet assembly can include a common head having a plurality of inlets configured to supply an exhaust flow to corresponding plural galleries.

[0032] The inlet assembly can include a combustion chamber module.

[0033] The inlet assembly can include an exhaust flow nozzle.

[0034] The combustion chamber module may include a perforated sleeve configured or positioned to define the combustion chamber.

[0035] According to a second embodiment, a pollution control device is provided that includes the inlet assembly of the first embodiment.

[0036] The pollution control device may have the features of the inlet assembly described above.

[0037] According to a third aspect, a method is provided, which includes the steps of: preparing a combustion chamber module defining a plenum configured to supply combustion reactants to its combustion chamber; and a mounting base configured to interconnect with a common head defining at least one gallery configured to supply combustion reactants; and preparing a plurality of supply openings in the mounting base positioned for fluid communication of combustion reactants between the gallery and the plenum.

[0038] This method may include surrounding the combustion chamber around the plenum and positioning the supply opening to lie above the plenum.

[0039] This method may include positioning the supply opening so that it extends around the outer circumference of the mounting base.

[0040] This method may include: preparing multiple combustion chamber modules; configuring each mounting base to interconnect with a corresponding one of multiple galleries in a common head; and positioning multiple supply openings in each mounting base for fluid communication of combustion reactants between the galleries and the corresponding plenum.

[0041] The method may include configuring the mounting base of at least one combustion chamber module to interconnect with a plurality of galleries of a common head, and positioning a plurality of supply openings in the mounting base for fluid communication of combustion reactants between those galleries and its plenum.

[0042] The method may include configuring each combustion chamber module to receive at least one exhaust flow nozzle extending from a common head, and positioning the supply opening to avoid the location of each exhaust flow nozzle.

[0043] The method may include defining at least one discharge flow nozzle opening, and the mounting base defines and positions at least one discharge flow nozzle opening to receive the corresponding discharge flow nozzle.

[0044] This method may include preparing at least one discharge nozzle seal on a mounting base and positioning at least one discharge nozzle seal to surround each corresponding discharge nozzle.

[0045] This method may include configuring each discharge nozzle seal to fluidly separate the corresponding discharge nozzle from the combustion reactants.

[0046] This method may include receiving a discharge nozzle seal in at least one corresponding discharge nozzle seal groove.

[0047] This method may include positioning the supply opening to avoid each discharge flow nozzle seal.

[0048] This method may include preparing an outer seal on the mounting base and configuring the outer seal to contain the combustion reaction products.

[0049] The method may include configuring the common head to include, for an enhanced flow combustion chamber module, at least one additional exhaust flow nozzle extending from the common head in a removable manner.

[0050] The method may include preparing a combustion chamber module as an enhanced combustion chamber module, configuring a mounting base to receive at least one additional exhaust flow nozzle extending from a common head, and positioning the supply opening to avoid the location of each additional exhaust flow nozzle.

[0051] This method may include configuring the mounting base of the reinforced combustion chamber module to accommodate multiple exhaust flow nozzles extending from a common head.

[0052] This method may include configuring the mounting base for the reinforced combustion chamber module to interconnect with multiple galleries of a common head.

[0053] This method may include displacing the outer seal to avoid the location of at least one additional exhaust flow nozzle if the combustion chamber module is not a reinforced combustion chamber module.

[0054] This method may include configuring a mounting base other than the reinforced combustion chamber module to accept a single exhaust flow nozzle extending from a common head.

[0055] This method may include configuring mounting bases other than the reinforced combustion chamber module to interconnect with a single gallery of the common head.

[0056] This method may include each outer seal following a curved path to avoid at least one additional discharge flow nozzle.

[0057] This method may include positioning the supply opening to avoid the outer perimeter seal.

[0058] This method may include positioning the supply opening so as to follow a displacement path extending around the outer circumference of the mounting base.

[0059] This method may include preparing a common head having an inlet configured to supply combustion reaction materials to a gallery.

[0060] This method may include preparing a common head having multiple inlets configured to supply combustion reaction materials to a plurality of corresponding galleries.

[0061] This method may include preparing a combustion chamber module.

[0062] This method may include preparing a discharge nozzle.

[0063] This method may include preparing a combustion chamber module comprising a perforated sleeve configured to define a combustion chamber.

[0064] Further specific preferred embodiments are described in the attached independent and dependent claims. Features of the dependent claims may be combined with features of the independent claims as appropriate and in combinations other than those expressly described in the claims.

[0065] When a feature of a device is described as being capable of operating to produce a certain function, it should be understood that this includes features of the device that produce that function, or that are adapted or configured to produce that function.

[0066] Embodiments of the present invention will now be further described with reference to the accompanying drawings. [Brief explanation of the drawing]

[0067] [Figure 1A] This is a cross-sectional perspective view of a component of a modular pollution control device according to one embodiment. [Figure 1B] This is a cross-sectional perspective view of a component of a modular pollution control device according to one embodiment. [Figure 1C] This is a cross-sectional perspective view of a component of a modular pollution control device according to one embodiment. [Figure 2] The components of a pollution control device according to one embodiment are shown. [Figure 3] A mounting base according to one embodiment is shown in more detail. [Figure 4] The components of a pollution control device according to one embodiment are shown. [Figure 5] A mounting base according to one embodiment is shown in more detail. [Modes for carrying out the invention]

[0068] Before describing the embodiments in further detail, an overview is provided. The embodiments provide a configuration that utilizes one or more common head configurations that can be used to support different types of combustion chamber modules. The common head has at least one opening through which an inlet nozzle extends to deliver one or more exhaust flows into the combustion chamber of the combustion chamber module. The common head at least partially defines one or more galleries from which combustion reactants are supplied. Each combustion chamber module has a mounting base that interconnects the combustion chamber module to the common head. The mounting base has at least one opening through which an inlet nozzle passes, allowing for full fluid communication of the exhaust flow into the combustion chamber of the combustion chamber module. The combustion chamber is typically defined by a perforated sleeve, which defines a plenum between the perforated sleeve and the housing of the combustion chamber module, and the plenum is used to deliver combustion reactants for ignition on the inner surface of the sleeve within the combustion chamber. The mounting base has a supply opening that supplies combustion reactants from the galleries to the plenum. These supply openings lie above the plenum and are positioned on the mounting base in a location that avoids the location of other structures within the common head, such as the inlet nozzle, inspection window, pilot supply port, and purge supply port. This allows for the assembly of combustion chamber modules and mounting bases of various configurations using the common head, which helps reduce the inventory of parts required for different configurations of the abatement system.

[0069] Abatement device Figure 1A is a perspective view of the components of a modular abatement device 10 according to one embodiment. Figure 1B is a cross-sectional view of Figure 1A showing a cross-sectional view of the pilot module 20. Figure 1C is a cross-sectional view of Figure 1A showing a cross-sectional view of the combustion chamber module 30. Figure 1D is a cross-sectional view showing the combustion chamber module 30 in more detail.

[0070] A housing 40 is provided, which defines a common housing chamber in which a combustion chamber module 30 is installed (as shown in Figure 1C). A common head 150 is provided, which covers the upstream opening of the housing 40. The head 150 receives an exhaust inlet 60 for supplying exhaust flow, a combustion reactant inlet 70 for supplying combustion reactants such as fuel, a pilot module inlet 110 for supplying fuel, and a purge inlet 160 for supplying intermodule purge gas such as nitrogen. Downstream of the housing 40 is a weir 170, which defines a wet wall chamber 180, and the wet wall chamber 180 has walls through which a fluid such as water flows during operation. In this embodiment, there are two combustion chamber modules 30 arranged linearly within the housing 40, but different configurations of the combustion chamber modules 30 sharing a common housing and common head are possible, as will be described in detail below.

[0071] Between the head 150 and the combustion chamber module 30, there is a mounting base 50 that holds the combustion chamber module 30 in place within the housing 40. The depth of this mounting base 50 can vary to accommodate combustion chamber modules 30 of different lengths while ensuring that each combustion chamber module 30 is discharged into the weir 170 at the same position.

[0072] Each combustion chamber module 30 has a module housing 80 in which a perforated sleeve 90 is mounted. The perforated sleeve 90 defines a combustion chamber 120 in which the supplied exhaust flow is processed. Each combustion chamber module 30 is provided with an exhaust inlet 60 that carries the exhaust flow to be processed into the combustion chamber of that combustion chamber module 30. The perforated sleeve 90 is slightly spaced away from the module housing 80 to define a plenum 100. A combustion reactant inlet 70 carries the processing material, such as fuel, through a mounting base 50 into the plenum 100 of each combustion chamber module 30. Thus, each combustion chamber module 30 is essentially self-sufficient, and its operation does not affect other combustion chamber modules 30 in the housing 40. Figure 2 shows the components of a decontamination device 10A according to one embodiment. A common head 150A is provided, which defines openings 760A, 770A sized to receive the inlet assembly. In this embodiment, opening 760A receives inlet assembly 780A, while opening 770A remains unused, empty, or closed. Common head 150A defines gallery 790A having inlets (not shown) for receiving combustion reactants, in this case fuel and oxidizer.

[0073] A pair of mounting bases 50A are provided, which are attached to the downstream surface of the common head 150A. Each mounting base 50A has a supply opening 810A that extends through the mounting base 50A. A combustion chamber module 30A is attached to the downstream surface of each mounting base 50A. The combustion chamber module 30A has an opening to receive the inlet assembly 780A. The combustion chamber module 30A also includes a perforated sleeve 90A, which has an upstream ceiling 200 and a sloping, flared wall 180A that defines the combustion chamber 120A. The outer surface of the perforated sleeve 90A and the inner surface of the housing that holds the combustion chamber module 30A define the plenum 100A. The supply opening 810A is positioned to lie above the plenum 100A.

[0074] Figure 3 shows the mounting bases 50A in more detail. Each mounting base 50A surrounds the inlet assembly 780A and is equipped with a seal 840A that cooperates with the common head 150A. In addition, a periphery seal 850A extends around the outer circumference of the mounting base 50A and similarly cooperates with the common head 150A. These seals 840A and 850A, cooperating with the common head 150A, hold the combustion reactants in the region between the seals within the gallery 790A. Thus, all the supply openings 810A are positioned between these seals 840A and 850A, and the combustion reactants are supplied to each. The supply openings 810A are generally positioned around the outer circumference of the mounting bases 50A so as to lie over the upstream portion of the plenum 100A. However, to avoid the position of opening 770A (in this case, opening 770A is unused), both the supply openings 810A and the periphery seals 850A are offset away from the position of opening 770A. In other words, the supply opening 810A and the surrounding seal 850A are positioned along a non-linear path that curves (joggles) in the vicinity of the opening 770A.

[0075] Figure 4 shows the components of the abatement device 10B according to one embodiment. This configuration is similar to that described above and has the same common head 150A. However, in this configuration, an additional inlet assembly 780B is provided, which is received by an opening 770A, and further, a single mounting base 50B is provided, which holds a single combustion chamber module 30B.

[0076] The mounting base 50B is mounted on the downstream surface of the common head 150A. The mounting base 50B has a supply opening 810B that extends through the mounting base 50B. The combustion chamber module 30B is mounted on the downstream surface of the mounting base 50B. The combustion chamber module 30B has an opening that receives the inlet assemblies 780A and 780B. The combustion chamber module 30B also includes a perforated sleeve 90B, which has an upstream ceiling 200B and a sloping, flared wall 180B that defines the combustion chamber 120B. The outer surface of the perforated sleeve 90B and the inner surface of the housing that holds the combustion chamber module 30B define the plenum 100B. The supply opening 810B is positioned to lie above the plenum 100B.

[0077] Figure 5 shows the mounting base 50B in more detail. The mounting base 50B comprises a seal 840A surrounding the inlet assembly 780A and a seal 840B surrounding the inlet assembly 780B and cooperating with the common head 150A. In addition, a perimeter seal 850B extends around the outer circumference of the mounting base 50B and similarly cooperates with the common head 150A. These seals 840A, 840B, and 850B cooperating with the common head 150A hold the combustion reactants in the region between the seals within the gallery 790A. Thus, all the supply openings 810B are positioned between these seals 840A, 840B, and 850B, and the combustion reactants are supplied to each of them. The supply openings 810B are generally positioned around the outer circumference of the mounting base 50B so as to lie over the upstream portion of the plenum 100B. However, both the supply opening 810B and the surrounding seal 850B are similarly displaced away from locations where further openings may occur. That is, the supply opening 810B and the surrounding seal 850B are positioned along a non-linear path that curves near locations where further openings may occur.

[0078] Therefore, it can be seen that combustion chamber modules of different configurations can be mounted on the same common head using different mounting base configurations without interfering with the supply of combustion reactants to the plenum.

[0079] Several embodiments provide a modular architecture for abatement systems that allows standard burner elements to be arranged in a mosaic-like fashion to form arrays of different system configurations. This enables a harmonized design, where the combination and rearrangement of burner elements can form a leak-free seal at the common head, resulting in reduced inventory and enabling upgrades / future guarantees.

[0080] Unlike existing methods that require a different head for each module combination and rearrangement because there is overlap between the purging area and the premixed supply area between modules, and both of these occupy the same space as the auxiliary inlet location on the double-width module, some embodiments provide novel geometries that avoid these problems, enabling significant reductions in cost, complexity, and design work.

[0081] By curving the seal groove and repositioning multiple fuel and air premixing ports, the seal locations can be standardized. Specifically, the seal around the auxiliary inlet of the dual module coincides with the curvature of the surrounding seal groove.

[0082] While exemplary embodiments of the present invention have been disclosed in detail with reference to the accompanying drawings, it will be understood that the present invention is not limited to the exact embodiments and that various changes and modifications can be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims and equivalents. [Explanation of Symbols]

[0083] 10;10A;10B Abatement device 20 Pilot Modules 30;30A;30B Combustion Chamber Module 40 Housing 50; 50A; 50B Mounting base 60 Discharge inlet 70 Combustion Reactant Inlet 80 Module Housing 90;90A;90B Perforated Sleeve 100;100A;100B Plenum 110 Pilot Module Entrance 120; 120A; 120B Combustion Chamber 150; 150A Common Head 160 Purge entrance 170 Weir 180 Wet Wall Room 180A; 180B Wall 200;200B Ceiling 760A;770A opening 780A;780B Inlet assembly 790A Gallery 810A;810B Supply opening 840A; 840B seal 850A; 850B Peripheral seal

Claims

1. An inlet assembly for a pollution control device that processes the discharge flow from a semiconductor processing tool, It comprises multiple combustion chamber modules that define a plenum configured to supply combustion reactants to the combustion chamber, Each of the aforementioned combustion chamber modules is It has a mounting base configured to interconnect with one of a plurality of galleryes of a common head that define at least one gallery configured to supply the combustion reactant, Each of the mounting bases is an inlet assembly comprising a plurality of supply openings positioned for fluid communication of the combustion reactants between the gallery and the corresponding plenum.

2. The inlet assembly according to claim 1, wherein the plenum surrounds the combustion chamber and the supply opening is positioned to lie horizontally on the plenum.

3. The inlet assembly according to claim 1, wherein the supply opening is positioned to extend around the outer circumference of the mounting base.

4. The inlet assembly according to claim 1, wherein the mounting base of at least one of the combustion chamber modules is configured to interconnect with a plurality of gallery of the common head, and the mounting base comprises a plurality of supply openings positioned for fluid communication of the combustion reactants between the gallery and the plenum.

5. The inlet assembly according to claim 1, wherein each of the combustion chamber modules is configured to receive at least one exhaust flow nozzle extending from the common head through the mounting base to the combustion chamber, and the supply opening is positioned to avoid the location of each of the exhaust flow nozzles.

6. The inlet assembly according to claim 5, wherein the mounting base defines at least one discharge nozzle opening positioned to receive the corresponding discharge nozzle.

7. The inlet assembly according to claim 5, wherein the mounting base includes at least one discharge nozzle seal positioned to surround each of the corresponding discharge nozzles.

8. The inlet assembly according to claim 7, wherein the supply opening is positioned to avoid each of the discharge flow nozzle seals.

9. The inlet assembly according to claim 5, wherein the mounting base is provided with an outer peripheral seal configured to contain the combustion reaction products.

10. The inlet assembly according to claim 1, wherein the common head can be configured to include at least one additional exhaust flow nozzle detachably extending from the common head through the mounting base to the combustion chamber.

11. The inlet assembly according to claim 10, wherein the mounting base is configured to receive the at least one additional discharge flow nozzle, and the supply opening is positioned to avoid the location of each of the additional discharge flow nozzles.

12. The mounting base of the combustion chamber module is It is configured to accept a plurality of the aforementioned discharge flow nozzles, and It is configured to interconnect with multiple galleries of the aforementioned common head, The entrance assembly according to claim 11, which is at least one of the following.

13. The inlet assembly according to claim 11, wherein the outer seal configured to contain the combustion reaction material is offset to avoid the position of the at least one additional discharge flow nozzle.

14. The aforementioned mounting base is It is configured to accept the single discharge flow nozzle, or The entrance assembly according to claim 11, configured to be interconnected with a single gallery of the common head.

15. The inlet assembly according to claim 10, wherein each outer seal configured to contain the combustion reaction material follows a curved path to avoid the at least one additional discharge nozzle.

16. The aforementioned supply opening is It is positioned to avoid the aforementioned outer peripheral seal, or The entrance assembly according to claim 9, which is positioned to follow a displacement path extending around the outer circumference of the mounting base.

17. The aforementioned common head is The common head having an inlet configured to supply the combustion reaction product to the gallery, The common head having multiple inlets configured to supply the combustion reaction product to a plurality of corresponding galleries, The combustion chamber module, and A discharge flow nozzle for supplying discharge flow to the combustion chamber, The entrance assembly according to claim 1, comprising at least one of the following.

18. The inlet assembly according to claim 1, wherein the combustion chamber module includes a perforated sleeve configured to define the combustion chamber.

19. A pollution control device comprising the inlet assembly described in claim 1.

20. The steps include preparing a plurality of combustion chamber modules defining a plenum configured to supply combustion reactants to the combustion chamber, and a mounting base configured to interconnect with a corresponding one of a plurality of galleries of a common head defining at least one gallery configured to supply the combustion reactants, The steps include preparing a plurality of supply openings in each of the mounting bases, positioned for fluid communication of the combustion reactants between the gallery and the corresponding plenum, Methods that include...

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