Stage equipment and manipulation system

Abstract

To provide a stage device and a manipulation system with which it is possible to change the attitude of a sample within a microscope field without requiring complicated control.SOLUTION: The stage device comprises: a sample stage 30 where a sample is supported on a holding plane 30a which is perpendicular to the observation direction of a microscope 22; a planar direction movement unit (horizontal movement unit 40) capable of moving the sample stage 30 in a direction parallel to the holding plane 30a; and a rotation unit 50 capable of rotating the sample stage 30 and the planar direction movement unit, relatively to the microscope 22, around the axis of rotation that matches the center of visual field (optical axis 26) of the microscope 22. A manipulation system 10 includes the stage device, a microscope unit 20 that includes the microscope 22 whose center of visual field matches the axis of rotation, and a manipulator 60 that includes a jig 64 for manipulating a sample.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a stage device and a manipulation system.

Background Art

[0002] For example, a manipulation system is used to perform fine operations on fine substances such as cells. Generally, the manipulation system includes an XY stage movable in the horizontal direction and a manipulator for operating the fine substance, and can move the fine substance placed on the XY stage into the microscope field of view and control the movement of the manipulator under microscope observation (for example, Patent Document 1).

[0003] Further, Patent Document 2 discloses a manipulation system provided with a rotation mechanism on an XY stage movable in the horizontal direction. By providing the rotation mechanism, even when the observation direction of the fine substance is not suitable, such as when the fine substance is close to a liquid state or the manipulator is not suitable for changing the posture of the fine substance, the observation direction of the fine substance can be changed.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, in the manipulation system of Patent Document 2, the rotation axis of the rotation mechanism also moves as the XY stage moves. Therefore, in order to prevent the fine substance from moving out of the microscope field of view due to the rotation of the rotation mechanism, complicated control is required to move the XY stage in addition to rotation according to the position of the XY stage.

[0006] The present invention has been made in view of the above, and aims to provide a stage device and a manipulation system that can change the position of a sample within the field of view of a microscope without requiring complex control. [Means for solving the problem]

[0007] A stage apparatus according to one aspect of the present invention comprises: a sample stage on which a sample is supported on a holding surface perpendicular to the observation direction of the microscope; a surface direction movement unit capable of moving the sample stage in a direction parallel to the holding surface; and a rotation unit capable of rotating the sample stage and the surface direction movement unit around a rotation axis that coincides with the center of the microscope's field of view relative to the microscope.

[0008] Such a stage device allows the sample to be rotated around the center of the field of view. That is, after moving the sample to the center of the microscope's field of view using a planar movement unit, the sample can be rotated around the center of the field of view using a rotation unit to achieve the desired position, thus keeping the sample within the field of view even after rotation. Furthermore, it does not require complex control that displaces the sample in the planar direction in addition to rotating it according to its position in the planar direction, and changes in the position of the sample within the microscope's field of view can be achieved with a simple structure.

[0009] In a stage device according to one aspect of the present invention, the rotating unit includes a disc body that is rotatably supported around the rotation axis with respect to a base to which the microscope is fixed and supports the sample stage via the plane direction movement unit, and a rotating operating shaft that rotates the disc body in conjunction with rotation around the axis.

[0010] With such a stage device, the disc body can be rotated in a predetermined direction by a predetermined amount of rotation, corresponding to the rotation direction and amount of rotation of the rotating shaft. Therefore, with a simple structure, the sample stage and the sample can be rotated around the center of the field of view by a desired amount of rotation.

[0011] In a stage apparatus according to one aspect of the present invention, the surface direction movement unit includes a first direction movement unit capable of moving the sample stage in a first direction parallel to the holding surface with respect to the disc body, and a second direction movement unit capable of moving the sample stage in a second direction parallel to the holding surface with respect to the disc body and perpendicular to the first direction.

[0012] With this type of stage device, the sample stage can be moved along two axes on a plane parallel to the holding surface. Therefore, because the sample stage can be moved in the planar direction with a simple structure, the sample can be easily moved to the center of the field of view.

[0013] In a stage device according to one aspect of the present invention, the planar movement unit is attached to the upper surface side of the disc body.

[0014] With this type of stage device, the planar movement unit, after the sample has been moved to the center of the microscope's field of view, can be easily rotated around the center of the microscope's field of view, with the disc supporting the planar movement unit from below.

[0015] A manipulation system according to one aspect of the present invention comprises a stage device, a microscope unit including the microscope whose field of view center coincides with the rotation axis, and a manipulator including a jig for manipulating the sample.

[0016] This type of manipulation system allows the manipulator to rotate the sample around the center of the field of view. Therefore, when the observation direction of the sample is unsuitable and a change in orientation is required, even if the sample is nearly liquid or the manipulator's fixture is not suitable for changing the sample's position, the sample can be repositioned while remaining within the microscope's field of view. [Effects of the Invention]

[0017] According to the present invention, it is possible to provide a stage device and a manipulation system that do not require complicated control and can change the posture of a sample within a microscopic field of view.

Brief Description of the Drawings

[0018] [Figure 1] FIG. 1 is a diagram schematically showing the physical configuration of a manipulation system according to an embodiment. [Figure 2] FIG. 2 is a control block diagram of the manipulation system shown in FIG. 1. [Figure 3] FIG. 3 is a plan view for explaining an operation method of the manipulation system shown in FIG. 1. [Figure 4] FIG. 4 is an enlarged view of a main part of FIG. 3. [Figure 5] FIG. 5 is a plan view for explaining an operation method of the manipulation system shown in FIG. 1. [Figure 6] FIG. 6 is an enlarged view of a main part of FIG. 5.

Embodiments for Carrying Out the Invention

[0019] Embodiments for carrying out the present invention (embodiments) will be described in detail while referring to the drawings. The present invention is not limited by the contents described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and substantially identical ones. Furthermore, the constituent elements described below can be combined as appropriate.

[0020] (Embodiment) [Configuration of the System] First, the physical and system configuration of the manipulation system 10 according to this embodiment will be described with reference to Figures 1 and 2. Figure 1 is a schematic diagram showing the physical configuration of the manipulation system 10 according to this embodiment. Figure 2 is a control block diagram of the manipulation system 10 shown in Figure 1. Note that Figure 1 shows some of the components in cross-section. The manipulation system 10 is a system for manipulating fine materials such as cells under microscopic observation. The manipulation system 10 cuts a part of a sample 100 (see Figure 4, etc.), which is a fine material.

[0021] As shown in Figures 1 and 2, the manipulation system 10 of the embodiment comprises a base 12, a column 14 erected from one side of the base 12, a microscope unit 20, a sample stage 30, a horizontal movement unit 40, a rotation unit 50, a manipulator 60, and a controller 80. The microscope unit 20 is fixedly mounted on the base 12. The manipulator 60 is fixedly mounted on the column 14. The sample stage 30, the horizontal movement unit 40, and the rotation unit 50 constitute a stage device capable of changing the position and orientation of the sample 100 relative to the microscope field of view. The sample stage 30 is mounted on the base 12 via the horizontal movement unit 40 and the rotation unit 50.

[0022] The microscope unit 20 comprises a microscope 22 and a camera 24 including an image sensor. The microscope unit 20 is, for example, a microscope in which the microscope 22 and camera 24 are integrated into a single structure. In the embodiment, the microscope 22 and camera 24 are positioned inside the base 12 directly below the sample holding member 32 supported by the sample stage 30, and the sample 100 (see Figure 3, etc.) housed in the sample holding member 32 can be viewed from below through an opening 12a formed on the upper surface of the base 12. The optical axes 26 of the microscope 22 and camera 24 are incident perpendicular to the sample 100, etc. The optical axes 26 coincide with the center of the field of view of the microscope 22 and camera 24.

[0023] The microscope unit 20 further includes a light source (not shown) that irradiates light toward the sample holding member 32, and a focusing mechanism 28 (see Figure 2). When the microscope 22 and camera 24 are positioned directly below the sample holding member 32, as in the embodiment, the light source is positioned, for example, directly above the sample holding member 32. When light from the light source irradiates the sample 100 (see Figure 3, etc.) in the sample holding member 32, the light reflected by the sample 100 in the sample holding member 32 enters the microscope 22. The optical image of the sample 100 is magnified by the microscope 22 and then captured by the camera 24. The optical image is clearly projected by adjusting the position of the lenses of the microscope 22 and camera 24 and the distance between the lenses using the focusing mechanism 28 to focus the microscope 22 and camera 24. The microscope unit 20 allows observation of the sample 100 based on the image captured by the camera 24. In the embodiment, the camera 24 and focusing mechanism 28 are electrically connected to a controller 80, which will be described later.

[0024] The sample stage 30 is a base having a holding surface 30a capable of supporting a sample holding member 32 such as a petri dish or well plate. The holding surface 30a is a plane perpendicular to the observation direction of the microscope 22 and camera 24, and in embodiments, is a horizontal plane. The observation direction of the microscope 22 and camera 24 is the direction of the optical axis 26 incident on the sample 100, etc. In embodiments, the sample stage 30 is positioned above the microscope 22 and camera 24. The sample stage 30 is provided so as to be movable horizontally relative to the base 12 and rotatable around a rotation axis that coincides with the optical axis 26, via a horizontal movement unit 40 and a rotation unit 50. Here, "coinciding with the optical axis 26" includes at least the rotation axis being parallel to the optical axis 26 and located within the field of view of the microscope 22, and preferably, the rotation axis being located within a circle centered on the optical axis 26 with a diameter of 1 / 5 of the field of view width. Here, "parallel" also includes cases where the two are not theoretically parallel due to dimensional errors, design errors, etc.

[0025] Furthermore, the sample stage 30 is provided so as to be movable horizontally relative to the rotating unit 50 via the horizontal movement unit 40. In this embodiment, the sample stage 30 is movable in a first direction D1 and a second direction D2, respectively. The first direction D1 is horizontal and is a unidirectional direction with respect to the rotating unit 50. The second direction D2 is horizontal and is perpendicular to the first direction D1. The sample stage 30 is fixed to the moving part 42b of the first direction movement unit 42 of the horizontal movement unit 40, which will be described later.

[0026] The horizontal movement unit 40 is capable of moving the sample stage 30 in a direction parallel to the holding surface 30a, i.e., horizontally in the embodiment. The horizontal movement unit 40 moves the sample stage 30 in a first direction D1 and a second direction D2 relative to the rotation unit 50, respectively. The horizontal movement unit 40 includes, for example, a two-axis actuator. In the embodiment, the horizontal movement unit 40 includes a first-direction movement unit 42 and a second-direction movement unit 44.

[0027] The first direction movement unit 42 moves the sample stage 30 in the first direction D1 relative to the second direction movement unit 44. The first direction movement unit 42 includes a fixed part 42a and a movable part 42b. The fixed part 42a is fixed to the movable part 44b of the second direction movement unit 44. In embodiments, the fixed part 42a is attached to the upper side of the movable part 44b. The fixed part 42a supports the movable part 42b so that it can move in the first direction D1. The movable part 42b is fixed to the sample stage 30. In embodiments, the lower side of the sample stage 30 is fixed to the upper side of the movable part 44b. The first direction movement unit 42 includes, for example, a well-known ball screw 42c provided along the first direction D1 and a rotational drive source (not shown) for rotating the ball screw 42c around its axis. The movable part 42b has a through hole formed in it through which the ball screw 42c is inserted and which has an internal thread on its inner circumferential surface. The movable part 42b is screwed onto the ball screw 42c and moves in the first direction D1 as the ball screw 42c rotates around its axis. A rotational drive source (not shown) that rotates the ball screw 42c around its axis is electrically connected to a controller 80, which will be described later, in this embodiment.

[0028] The second direction movement unit 44 moves the first direction movement unit 42 in a second direction D2 relative to the rotation unit 50. The second direction movement unit 44 includes a fixed part 44a and a movable part 44b. The fixed part 44a is fixed to the rotation unit 50. In this embodiment, the fixed part 44a is attached to the upper side of the disc body 52. ​​The fixed part 44a supports the movable part 44b so that it can move in the second direction D2. The movable part 44b is fixed to the fixed part 42a of the first direction movement unit 42. The second direction movement unit 44 includes, for example, a well-known ball screw 44c provided along the second direction D2 and a rotational drive source (not shown) that rotates the ball screw 44c around an axis. The movable part 44b has a through hole formed therein, through which the ball screw 44c is inserted and which has an internal thread on its inner circumferential surface. The movable part 44b is screwed onto the ball screw 44c and moves in the first direction D1 as the ball screw 44c rotates around its axis. A rotational drive source (not shown) that rotates the ball screw 44c around its axis is electrically connected to a controller 80, which will be described later, in this embodiment.

[0029] The rotating unit 50 is capable of rotating the sample stage 30 and the horizontal movement unit 40 relative to the microscope 22 and camera 24 around a rotation axis that coincides with the center of the field of view of the microscope 22 and camera 24, i.e., the optical axis 26. In this embodiment, the rotating unit 50 includes a disc body 52, a rotating operating shaft portion 54, a bearing 56, and a rotation drive source (not shown) that rotates the rotating operating shaft portion 54 around its axis.

[0030] In this embodiment, the disc 52 is a hollow worm wheel. The disc 52 is supported on the upper surface of the base 12 via a bearing 56 so as to be rotatable around a rotation axis that coincides with the optical axis 26. The diameter of the disc 52 is larger than the diameter of the opening 12a of the base 12. The disc 52 is ring-shaped and hollow around the rotation axis so as not to obstruct the field of view of the microscope 22 and camera 24 which are located inside the base 12. The disc 52 has teeth 52a on its outer circumferential surface that mesh with the teeth 54a of the rotary operating shaft 54. The fixed portion 44a of the second directional movement unit 44 is fixed to the disc 52. The disc 52 rotates around the rotation axis that coincides with the optical axis 26 as the rotary operating shaft 54 ​​rotates around its axis.

[0031] In this embodiment, the rotary operating shaft 54 ​​is a worm gear. The rotary operating shaft 54 ​​is supported by a support portion (not shown) of the base 12 so as to be rotatable around a horizontal axis. The rotary operating shaft 54 ​​has teeth 54a on its outer circumferential surface that mesh with the teeth 52a of the disc body 52. ​​By rotating around its axis, the rotary operating shaft 54 ​​rotates the disc body 52 around a rotation axis that coincides with the optical axis 26. A rotational drive source (not shown) that rotates the rotary operating shaft 54 ​​around its axis is electrically connected to a controller 80, which will be described later, in this embodiment.

[0032] The bearing 56 supports the disc body 52 so that it can rotate around a rotation axis that coincides with the optical axis relative to the upper surface of the base 12. The inner diameter of the bearing 56 is larger than the opening 12a of the base 12. The bearing 56 is ring-shaped and hollow around the rotation axis so as not to obstruct the field of view of the microscope 22 and camera 24 which are installed inside the base 12. In this embodiment, the bearing 56 is a thrust ball bearing. The bearing 56 includes a housing raceway 56a, a plurality of balls 56b, a cage (not shown), and an axial raceway 56c.

[0033] The housing raceway 56a is ring-shaped, with its lower surface fixed around an opening 12a on the upper surface of the base 12, such that its axis coincides with the optical axis 26. An annular groove is provided on the upper surface of the housing raceway 56a, centered on the axis. Multiple balls 56b are arranged in the groove of the housing raceway 56a. Multiple balls 56b are capable of rolling within the groove. A retainer (not shown) holds the multiple balls 56b so that they are evenly distributed around the axis of the housing raceway 56a. The axis raceway 56c is ring-shaped, supported by the housing raceway 56a via the multiple balls 56b, such that its axis coincides with the optical axis 26. An annular groove is provided on the lower surface of the axis raceway 56c, centered on the axis, on which multiple balls 56b are capable of rolling. The axis raceway 56c is rotatable around its axis relative to the housing raceway 56a by the rolling of the multiple balls 56b relative to the housing raceway 56a. The lower surface of the disc body 52 is fixed to the upper surface of the shaft raceway 56c.

[0034] The manipulator 60 is a three-axis manipulator with X-axis, Y-axis, and Z-axis configurations. In this embodiment, one direction in the horizontal plane is the X-axis direction, the direction intersecting the X-axis direction in the horizontal plane is the Y-axis direction, and the direction intersecting both the X-axis direction and the Y-axis direction (i.e., the vertical direction) is the Z-axis direction. The manipulator 60 comprises a holding member 62, a jig 64, a three-axis movement unit 70, and a drive device (not shown).

[0035] The holding member 62 is inclined downward from one end to the other, and in a plan view, its longitudinal direction is parallel to the X-axis direction, with one end connected to the moving part 70b of the three-axis moving unit 70. The holding member 62 moves in three-dimensional space as its moving region by the three-axis moving unit 70. A jig 64 can be attached to the other end of the holding member 62. In this embodiment, the jig 64 is a cutter capable of cutting a portion of a sample 100 (see Figure 4, etc.), which is a fine material. In this embodiment, the blade of the jig 64 is formed parallel to the X-axis direction so that it can cut by moving from top to bottom when attached to the holding member 62.

[0036] The three-axis movement unit 70 has a fixed part 70a that is fixed to the base 12, and a movable part 70b that can move in three directions (X-axis, Y-axis, Z-axis) relative to the fixed part 70a. The movable part 70b moves in the X-axis, Y-axis, and Z-axis directions relative to the base 12 by the drive of a drive device (not shown). The three-axis movement unit 70 is electrically connected to a controller 80, which will be described later.

[0037] The three-axis movement unit 70 includes, for example, a Z-axis movement unit 72, an X-axis movement unit 74, and a Y-axis movement unit 76. The Z-axis movement unit 72 includes a movable part 70b, and the movable part 70b is movable in the Z-axis direction relative to the X-axis movement unit 74. The X-axis movement unit 74 is movable in the X-axis direction relative to the Y-axis movement unit 76. The Y-axis movement unit 76 includes a fixed part 70a, and is movable in the Y-axis direction relative to the base 12.

[0038] The controller 80 is a control device that controls each part of the manipulation system 10. The controller 80 includes an arithmetic processing unit having a microprocessor such as a CPU (Central Processing Unit), a storage device having memory such as ROM (Read Only Memory) or RAM (Random Access Memory), and hardware resources such as an input / output interface device. The functions of the controller 80 are realized by the arithmetic processing unit executing a predetermined program stored in the storage device. The controller 80 outputs control signals that cause each component to perform various functions according to the calculation results of the arithmetic processing unit.

[0039] The controller 80 controls the drive devices of the focusing mechanism 28, horizontal movement unit 40, rotation unit 50, and manipulator 60 of the microscope unit 20, and outputs control signals to each of them via drivers, amplifiers, etc. (not shown) as needed. The controller 80 acquires the video signal of the microscope image acquired by the camera 24 of the microscope unit 20. The controller 80 is connected to an operation unit 82 and an input unit 84 as information input means, and a display unit 86 as information acquisition means.

[0040] The operator can input commands to the controller 80 via the operation unit 82 and the input unit 84. The operation unit 82 includes, for example, a joystick or a dial. The input unit 84 includes, for example, a keyboard, mouse or touch panel.

[0041] If the operating unit 82 includes, for example, a three-axis joystick for operating the three-dimensional movement of the manipulator 60, a known three-axis joystick can be used, which includes, for example, a base and a handle portion that stands upright from the base. The three-axis joystick can, for example, drive the manipulator 60 in the XY direction by tilting the handle portion, and drive the manipulator 60 in the Z direction by twisting the handle portion.

[0042] Furthermore, if the operating unit 82 includes, for example, a two-axis joystick for operating the horizontal movement of the sample stage 30 and a dial for operating the rotation of the sample stage 30, a known two-axis joystick can be used, for example, one comprising a base and a handle portion that stands upright from the base. The two-axis joystick can be used to drive the horizontal movement unit 40 in the first direction D1 and the second direction D2 by operating the handle portion to tilt it, for example. The dial can be rotated to adjust the amount of rotational displacement of the disc body 52 in accordance with the direction of rotation and the amount of rotational displacement.

[0043] The display unit 86 includes, for example, a display screen such as a liquid crystal panel. The display unit 86 is configured to display, for example, microscope images acquired by the camera 24 and various control screens. If a touch panel is used as the input unit 84, the touch panel may be overlaid on the display screen of the display unit 86, allowing the operator to perform input operations while confirming the display image of the display unit 86.

[0044] [How to use the system] Next, the method for changing the position and orientation of the sample 100 relative to the field of view of the microscope 22 in the manipulation system 10 according to this embodiment will be described with reference to Figures 3 to 6. Figure 3 is a plan view illustrating the operation method of the manipulation system 10 shown in Figure 1. Figure 4 is an enlarged view of the main part of Figure 3. Figure 5 is a plan view illustrating the operation method of the manipulation system 10 shown in Figure 1. Figure 6 is an enlarged view of the main part of Figure 5.

[0045] In the following example, the position and orientation of the sample 100 are changed so that it is optimal for cutting the sample 100 along the planned cutting line CL shown in Figures 4 and 6 with the jig 64 of the manipulator 60. First, the operator supports the sample holding member 32 containing the sample 100 in the center of the sample stage 30 in the manipulation system 10. Next, the operator drives the horizontal movement unit 40 to move the sample 100 into the field of view of the microscope 22 and camera 24.

[0046] Figures 3 and 4 show the state after the sample 100 has been moved into the field of view of the microscope 22 and camera 24. In this case, it is preferable to move the sample 100 so that it aligns with the optical axis 26, which is the center of the field of view of the microscope 22 and camera 24. In the example shown in Figures 3 and 4, the sample 100 is housed in the sample holding member 32 at a position offset from the center 30b of the sample stage 30, so as shown in Figure 3, the center 30b of the sample stage 30 moves to a position offset from the optical axis 26. Also, as shown in Figure 4, after the sample 100 has been moved into the field of view of the microscope 22 and camera 24, the cutting line CL is tilted with respect to the X-axis direction, which is the direction of the blade of the jig 64.

[0047] The operator then drives the rotary unit 50 to rotate the sample stage 30 around the rotation axis of the rotary unit 50. That is, the sample 100 is rotated around the optical axis 26 to change the orientation of the sample 100. In other words, the sample stage 30 is rotated so that the planned cutting line CL of the sample 100 is parallel to the X-axis direction, which is the direction of the blade of the jig 64.

[0048] Figures 5 and 6 show the state after the sample 100 has been further repositioned in a direction that can be manipulated by the manipulator 60, following the state shown in Figures 3 and 4. Here, the sample 100 is on the optical axis 26, which is the center of the field of view of the microscope 22 and camera 24. Therefore, when changing the position of the sample 100 from the state shown in Figures 3 and 4 to the state shown in Figures 5 and 6, the sample 100 can be rotated around the optical axis 26 within the field of view of the microscope 22 and camera 24 by rotating the sample stage 30 around the rotation axis of the rotation unit 50 which coincides with the optical axis 26.

[0049] As described above, the stage device of this embodiment comprises a sample stage 30 on which a sample is supported on a holding surface 30a perpendicular to the observation direction of the microscope 22, a surface direction movement unit (horizontal movement unit 40) that can move the sample stage 30 in a direction parallel to the holding surface 30a, and a rotation unit 50 that can rotate the sample stage 30 and the surface direction movement unit around a rotation axis that coincides with the center of the field of view of the microscope 22 relative to the microscope 22.

[0050] With such a stage device, the sample 100 can be rotated around the center of the field of view (optical axis 26). That is, after moving the sample 100 to the center of the field of view of the microscope 22 using the plane movement unit (horizontal movement unit 40), the sample 100 can be rotated around the center of the field of view using the rotation unit 50 so that it is in the desired position, thereby keeping the sample 100 within the field of view even after rotation. Furthermore, it does not require complex control such as displacing in the plane direction in addition to rotation depending on the position in the plane direction (horizontal direction in this embodiment), and changes in the position of the sample 100 within the field of view of the microscope 22 can be achieved with a simple structure.

[0051] Furthermore, in the stage apparatus of this embodiment, the rotating unit 50 includes a disc body 52 that is rotatably supported around a rotation axis with respect to the base 12 to which the microscope 22 is fixed and supports the sample stage 30 via a planar movement unit (horizontal movement unit 40), and a rotating operating shaft 54 ​​that rotates the disc body 52 as it rotates around the axis.

[0052] With such a stage device, the disc body 52 can be rotated in a predetermined direction by a predetermined amount of rotation, corresponding to the rotation direction and amount of rotation of the rotating operating shaft 54. Therefore, with a simple structure, the sample stage 30 and the sample 100 can be rotated around the field of view center (optical axis 26) by a desired amount of rotation.

[0053] Furthermore, in the stage apparatus of this embodiment, the planar movement unit (horizontal movement unit 40) includes a first direction movement unit 42 that can move the sample stage 30 in a first direction D1 parallel to the holding surface 30a relative to the disc body 52, and a second direction movement unit 44 that can move the sample stage 30 in a second direction D2 parallel to the holding surface 30a and perpendicular to the first direction D1 relative to the disc body 52.

[0054] With such a stage device, the sample stage 30 can be moved along two axes on a plane parallel to the holding surface 30a. Therefore, with a simple structure, the sample stage 30 can be moved in the planar direction (horizontal direction in this embodiment), making it easy to move the sample 100 to the center of the field of view.

[0055] Furthermore, in the stage device of this embodiment, the planar movement unit (horizontal movement unit 40) is attached to the upper surface of the disc body 52.

[0056] With this type of stage device, after the sample 100 has been moved to the center of the microscope 22's field of view, the planar movement unit can be easily rotated around the center of the microscope 22's field of view, with the disc 52 supporting the planar movement unit (horizontal movement unit 40) from below.

[0057] Furthermore, the manipulation system 10 of this embodiment includes a stage device, a microscope unit 20 including a microscope 22 whose field of view center (optical axis 26) coincides with the rotation axis, and a manipulator 60 including a jig 64 for manipulating a sample.

[0058] With this manipulation system 10, the sample 100, which is the object of manipulation by the manipulator 60, can be rotated around the center of the field of view (optical axis 26). Therefore, when the observation direction of the sample 100 is unsuitable and a change of posture is required, even if the sample is close to liquid or the jig 64 of the manipulator 60 is not suitable for changing the posture of the sample 100, the posture of the sample 100 can be changed while it remains within the field of view of the microscope 22.

[0059] It should be noted that this embodiment is not limited to the above-described form. That is, it can be implemented with various modifications without departing from the core principles of this embodiment.

[0060] For example, in the embodiment shown in Figure 1, the microscope 22 and camera 24 are positioned below the sample holding member 32, but they may also be positioned above the sample holding member 32. Furthermore, in the microscope unit 20, the camera 24 may be provided separately from the microscope 22.

[0061] Furthermore, although the sample stage 30 in the embodiment is rectangular in plan view, it may also be circular. Also, although the holding surface 30a of the sample stage 30 is a horizontal plane in the embodiment, it may be a plane perpendicular to the direction of incidence of the optical axis 26 of the microscope 22 and camera 24 to the sample 100.

[0062] Furthermore, if the direction of incidence of the optical axis 26 of the microscope 22 and camera 24 to the sample 100 is inclined from the vertical axis, that is, if the holding surface 30a of the sample stage 30 is inclined with respect to the horizontal plane, the manipulation system 10 is equipped with a planar movement unit that can move the sample stage 30 in the planar direction instead of the horizontal movement unit 40.

[0063] Furthermore, the horizontal movement unit 40 and the rotation unit 50 in this embodiment are electrically connected to the controller 80 and driven based on control signals output in response to commands input to the controller 80 from the operation unit 82. However, they may also be driven by operation by an operator on an operation unit that is mechanically connected to them. [Explanation of symbols]

[0064] 10 Manipulation Systems 12 base 20 Microscope Units 22 Microscopes 24 cameras 26 Optical axis 28 Focusing mechanism 30 Sample Stages 30a Holding surface 30b center 32 Sample holding member 40 Horizontal movement unit (plane direction movement unit) 42 First Directional Movement Unit 44 Second Directional Movement Unit 50 rotation unit 52 circular discs 54 Rotating shaft section 56 Bearings 60 Manipulators 62 Retaining member 64 Jig 70 Three-axis moving unit 80 Controllers 100 samples D1 First direction D2 Second direction

Claims

1. A sample stage in which the sample is supported on a holding surface perpendicular to the observation direction of the microscope, A surface direction movement unit that can move the sample stage in a direction parallel to the holding surface, A rotating unit capable of rotating the sample stage around a main rotation axis that coincides with the center of the microscope's field of view, and rotating the plane direction movement unit around the main rotation axis that coincides with the center of the microscope's field of view, Equipped with, The aforementioned rotating unit is A disc-shaped body is supported so as to be rotatable around the main rotation axis with respect to a base on which the microscope is fixed, and supports the sample stage via the plane direction movement unit, A rotating shaft portion that rotates the disc body around the main rotation axis in conjunction with rotation around a horizontal axis, Includes, The aforementioned planar direction movement unit is Attached to the upper surface of the aforementioned disc body, A first-direction moving unit that allows the sample stage to move in the first direction by rotation of the disc body around an axis parallel to the first direction parallel to the holding surface, A second-direction moving unit that allows the sample stage to move in the second direction by rotation of the disc body around an axis parallel to the holding surface and parallel to the second direction perpendicular to the first direction, Includes, Furthermore, A stage apparatus comprising a controller that is electrically connected to the rotational drive source of the first directional movement unit, the rotational drive source of the second directional movement unit, and the rotational drive source of the rotational operating shaft, and controls the planar movement unit and the rotational unit.

2. The stage apparatus according to claim 1, A microscope unit including the microscope, the center of which is the field of view, coincides with the main rotation axis, A manipulator including a jig for manipulating the aforementioned sample, A manipulation system equipped with [a specific feature].

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