Conveying device

Abstract

To miniaturize a conveyance device.SOLUTION: A conveyance device (10) includes a truck (1) traveling along a track (101) and a transfer mechanism (4) suspended from the truck (1) to be raised / lowered. The transfer mechanism (4) has a plurality of chucks (41) each revolving around a rotation center disposed on the transfer mechanism (4).SELECTED DRAWING: Figure 1

Description

Technical Field

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[0001] The present invention relates to a conveying device.

Background Art

[0002] Conveying devices such as OHT (Over Head Hoist Transport) and OHS (Over Head Shuttle) are suitably used in fields such as semiconductor manufacturing and liquid crystal manufacturing as devices that convey an object to be conveyed to a predetermined location by a carriage running on a track. For example, Patent Document 1 discloses an OHT carriage equipped with a two-type finger mechanism that grips two carriers for storing wafers, and can individually load and unload the carriers.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0007] According to one aspect of the present invention, the conveying device can be miniaturized. [Brief explanation of the drawing]

[0008] [Figure 1] This is a front view showing the configuration of a transfer system including a transport device according to one embodiment of the present invention. [Figure 2] This is a side view showing the configuration of the above transfer system. [Figure 3] This is a top view showing the configuration of the above transfer system as seen from the ceiling. [Figure 4] This is a front view showing the above-mentioned transport device in the state where the transfer mechanism is lowered during transfer. [Figure 5] This is a side view showing the above-mentioned transport device in the state where the transfer mechanism is lowered during transfer. [Figure 6] This is a front view showing the above-mentioned transport device in a state where the transfer mechanism is rotating during transfer. [Figure 7] This is a side view showing the above-mentioned transport device in a state where the transfer mechanism is moved by the horizontal movement mechanism in a direction perpendicular to the transport direction and the transfer is performed there. [Modes for carrying out the invention]

[0009] [Configuration of the transfer system] A transfer system using a transport device according to an embodiment of the present invention will be described with reference to Figures 1 to 3. Figure 1 is a side view showing the configuration of the transfer system. Figure 2 is a side view showing the configuration of the transfer system. Figure 3 is a top view showing the configuration of the transfer system as seen from the ceiling 100 side.

[0010] As shown in Figures 1 to 3, the transfer system is installed to be suspended from the ceiling 100. The transfer system comprises a transport device 10, a track 101, and a suspension fitting 102.

[0011] The track 101 is positioned along the movement path of the transport device 10 and is supported by a plurality of suspension fittings 102 so as to be suspended from the ceiling 100. The track 101 has an upper surface portion 101a, a pair of side portions 101b, and a pair of lower surfaces 101c. The upper surface portion 101a is the part that is attached to the suspension fittings 102 and is positioned facing the ceiling 100. The side portions 101b are the side wall portions that hang down from both end edges of the upper surface portion 101a. The lower surfaces 101c are formed to be short and extend from the lower end edge of the side portions 101b toward the inner wall surface of the side portions 101b, and form a track surface on which the wheels 13, which will be described later and are provided on the trolley 1, roll.

[0012] The transport device 10 is suspended from the track 101 and travels along the track 101 in the transport direction (X1 direction or X2 direction opposite to X1 direction) to transport the container 200 (object to be transported) to the destination. The container 200 has a storage section 200a, which contains items such as wafers and reticles used in semiconductor manufacturing. A flange section 200b is provided on the upper end surface of the storage section 200a.

[0013] [Configuration of the conveying device] The transport device 10 includes a trolley 1, a lifting mechanism 2, a horizontal movement mechanism 3, a transfer mechanism 4 (transfer section), and a control unit 5.

[0014] The bogie 1 is a running mechanism that travels along the track 101. The bogie 1 has a frame 11, a drive unit 12, wheels 13, and support members 14.

[0015] Frame 11 is a structure that houses the lifting mechanism 2, the horizontal movement mechanism 3, and the transfer mechanism 4 when the carriage 1 is running. The frame 11 has an upper part 11a and a pair of vertical parts 11b. The upper part 11a is a plate-like part arranged in the horizontal direction. The vertical part 11b is a plate-like part provided so as to hang down from the edge on the side opposite to the conveyance direction of the upper part 11a. The pair of vertical parts 11b are arranged so as to face each other in parallel. The lower part and the side part of the frame 11 are open so that the lifting of the container 200 and the movement of the transfer mechanism 4 in the orthogonal direction (Y1 direction or the Y2 direction opposite to the Y1 direction) orthogonal to the conveyance direction and the horizontal plane are possible.

[0016] The drive unit 12 is a power generation source that drives the wheels 13 and is constituted by a motor or the like. The drive unit 12 has a drive shaft 12a. The drive shaft 12a is provided so as to project toward the wheel 13 side and is directly connected to the axle of the wheel 13. The wheels 13 are respectively arranged at positions where they roll on the upper end surfaces of the corresponding lower surface parts 101c.

[0017] The support member 14 is a member that supports the frame 11 so as to hang it from the drive unit 12. The support member 14 is provided so as to connect the lower end surface of the drive unit 12 and the upper end surface of the upper part 11a in the frame 11.

[0018] The lifting mechanism 2 is a mechanism that raises and lowers the transfer mechanism 4. The lifting mechanism 2 has a lifting device 2a and a plurality of lifting belts 2b.

[0019] The lifting device 2a is a device that winds up or winds down the lifting belt 2b by the rotational driving force of a motor. The lifting device 2a raises the transfer mechanism 4 by winding up the lifting belt 2b and lowers the transfer mechanism 4 by winding down the lifting belt 2b. Four lifting belts 2b are provided, one each near the four corners of the lifting device 2a, for example.

[0020] The horizontal movement mechanism 3 is a mechanism that moves (horizontally moves) the lifting device 2a in the orthogonal direction. The horizontal movement mechanism 3 will be described in detail later.

[0021] The transfer mechanism 4 is a mechanism that transfers the container 200 by picking up the container 200 placed on the port 301 (see Figure 4), which will be described later as the destination for transport, in order to transport it with the trolley 1, and then placing the container 200 that has been transported by the trolley 1 onto the port 301. The transfer mechanism 4 is suspended from the frame 11 so as to be able to move up and down by the lifting mechanism 2. The transfer mechanism 4 has a support body 40 (support part), two chucks 41 (gripping parts), and a rotating mechanism 42.

[0022] The support members 40 are rod-shaped members, and are arranged so that their longitudinal directions coincide with the X1 and X2 directions, and are parallel to each other at a constant distance from each other at the same height. The ends of one lifting belt 2b are fixed near each end of the support members 40. In this way, the support members 40 are suspended from the lifting device 2a by the two lifting belts 2b.

[0023] As will be described later, the support body 40 is provided with a support shaft 42b that supports the rotating arm 42a. Inside the support body 40, at least a portion is provided with a cavity for housing the drive device 42d, which will be described later.

[0024] The chuck 41 is a mechanism for holding the container 200. It revolves around a rotation center located in the transfer mechanism 4. The chuck 41 has a main body 41a and a pair of gripping claws 41b. The main body 41a supports the gripping claws 41b and is equipped with a drive mechanism inside that drives the gripping claws 41b to open and close in the X1 and X2 directions. The pair of gripping claws 41b have opposing tips, and in the gripping position where the distance between the tips is narrowest, the tips support the flange portion 200b of the container 200 on the lower surface side of the flange portion 200b. In the open position where the distance between the tips is widest, the pair of gripping claws 41b spread out more than the width of the flange portion 200b.

[0025] The rotation mechanism 42 is a mechanism that rotates the chuck 41 so that it revolves around a rotation center in a perpendicular direction. The rotation mechanism 42 has a pair of rotating arms 42a (arm sections), a pair of support shafts 42b, a plurality of support pins 42c, and a drive device 42d.

[0026] The rotating arm 42a is a long, narrow, strip-shaped plate member. The rotating arm 42a has two ends to which the chucks 41 are connected. The rotating arm 42a is also rotatably supported by the main body 41a of the chuck 41. When the rotating mechanism 42 is housed within the frame 11, the rotating arm 42a is stationary in a position facing vertically, as shown in Figure 1. As a result, the two chucks 41 supported by the rotating arm 42a are arranged to be aligned vertically.

[0027] The support shaft 42b is an axis that supports the rotational arm 42a in order to drive it to rotate, and constitutes the rotation center of the rotational arm 42a. The support shaft 42b is positioned so as to extend in the Y1 and Y2 directions, perpendicular to the horizontal plane, that is, in the direction perpendicular to the direction of travel (the same direction as the transport direction) in which the trolley 1 travels. One end of the support shaft 42b is fixed to the central part of the rotational arm 42a. The support shaft 42b also penetrates the inside of the support body 40, and the other end of the support shaft 42b is exposed on the side surface of the support body 40.

[0028] The support pin 42c is a pin that rotatably supports the main body 41a of the chuck 41 on the rotating arm 42a. The support pin 42c is arranged to extend in the Y1 and Y2 directions and has a shaft portion and a head portion having a diameter larger than the diameter of the shaft portion. The shaft portion of the support pin 42c passes through a hole provided at the end of the rotating arm 42a, and the portion from the tip to the center is embedded and fixed into the center of the side surface of the main body 41a. The head of the support pin 42c holds the rotating arm 42a so that it does not come off the support pin 42c.

[0029] As described above, the drive unit 42d is built into the support body 40 and rotates the support shaft 42b. The drive units 42d provided on each of the two support bodies 40 are controlled to operate in the same direction of rotation and at the same rotational speed.

[0030] The rotating arm 42a rotates around the support shaft 42b, which is rotated by the rotational driving force of the drive unit 42d. The hole at the end of the rotating arm 42a has a diameter larger than the diameter of the shaft portion of the support pin 42c. As a result, the rotating mechanism 42 supports the chuck 41 on the rotating arm 42a so that it can rotate freely around the support pin 42c as the center of rotation. Therefore, when the chuck 41 grips the container 200, the weight of the container 200 is added, causing the center of gravity to shift downward, thus keeping the container 200 in a horizontal position with respect to the conveying direction at all times, both in the non-rotating and rotating states.

[0031] Furthermore, a rotary damper may be incorporated into the support shaft 42b. This dampens vibrations caused by the inertial force acting on the point mass of the chuck 41 when the chuck 41 starts rotating and when it stops rotating, thereby reducing the effect of vibrations on the container 200.

[0032] Alternatively, the rotational driving force of the support shaft 42b may be transmitted to the support body 40 of the transfer mechanism 4 via the bevel gear structure so that the transfer mechanism 4 is always facing downwards. Specifically, the bevel gear structure, although not shown in the figures, includes a first bevel gear, a pair of second bevel gears, and a pair of gear shafts having bevel gears at both ends.

[0033] The first bevel gear is provided to have the same central axis as the support shaft 42b and is fixed, for example, to the inside of the rotating arm 42a, separated from the support shaft 42b so as not to rotate. The second bevel gear is provided to have the same central axis as the support pin 42c and is formed, for example, around the shaft portion of the support pin 42c. Therefore, a space is provided between the main body portion 41a of the chuck 41 and the inside of the rotating arm 42a for the second bevel gear to be positioned. The pair of gear shafts are each supported inside the rotating arm 42a so as to be rotatable around the axis of the gear shaft. The bevel gear provided on one end of the gear shaft (support shaft 42b side) meshes with the first bevel gear, and the bevel gear provided on the other end of the gear shaft (chuck 41 side) meshes with the second bevel gear.

[0034] In this bevel gear structure, when the rotating arm 42a rotates, the bevel gear at one end of the gear shaft rotates while meshing with the first bevel gear, causing the gear shaft to rotate around its center. This transmits the rotational driving force of the gear shaft to the second bevel gear that meshes with the bevel gear at the other end. Therefore, the second bevel gear rotates in the opposite direction to the first bevel gear, at the same angle as the rotation of the rotating arm 42a. Consequently, the transfer mechanism 4 rotates in the opposite direction to the rotation of the rotating arm 42a, at the same angle as the rotation of the rotating arm 42a. Thus, the transfer mechanism 4 always maintains a downward orientation even when the rotating arm 42a rotates.

[0035] The control unit 5 works in conjunction with a control device (not shown) that manages the entire transfer system to control the operation of the lifting mechanism 2, the horizontal movement mechanism 3, the transfer mechanism 4, and the drive unit 12. Specifically, when the trolley 1 is running, the control unit 5 controls the drive unit 12 to operate. When transferring the container 200, the control unit 5 controls the operation of the lifting mechanism 2, controls the operation of the horizontal movement mechanism 3 as needed, and controls the operation of the chuck 41 and the drive unit 42d in the transfer mechanism 4.

[0036] [Operation of the conveying device] The transfer operation of the transport device 10 configured as described above will now be explained. Figure 4 is a front view of the transport device 10 in the state where the transfer mechanism 4 is lowered during transfer. Figure 5 is a side view of the transport device 10 in the state where the transfer mechanism 4 is lowered during transfer. Figure 6 is a front view of the transport device 10 in the state where the transfer mechanism 4 is rotating during transfer.

[0037] As shown in Figures 1 and 2, the transport device 10 houses the transfer mechanism 4 within the frame 11 when transporting. In the transfer mechanism 4, the upper chuck 41 grips the container 200, while the lower chuck 41 does not grip the container 200. The container 200 gripped by the upper chuck 41 contains items that have not been processed by the device 300.

[0038] As shown in Figures 4 and 5, when the transport device 10 reaches above the transfer position of the container 200, it stops moving and lowers the transfer mechanism 4 using the lifting mechanism 2. In this state, the two chucks 41 in the transfer mechanism 4 are arranged in a vertical alignment.

[0039] When the transfer mechanism 4 descends to the transfer position, the lifting mechanism 2 stops its downward movement, and the lower chuck 41 grips the container 200 placed on the port 301. This container 200 contains the items that have been processed by the device 300. As shown in Figure 6, the transfer mechanism 4 swaps the positions of the upper and lower chucks 41 by rotating the rotating arm 42a of the rotating mechanism 42. Then, when the upper chuck 41 moves downward, the transfer mechanism 4 releases the grip of the chuck 41 and places the container 200 that was being gripped by this chuck 41 onto the port 301.

[0040] In this way, once the transfer of the container 200 is complete, the lifting mechanism 2 raises the transfer mechanism 4 to the storage position shown in Figures 1 and 2.

[0041] [Modified examples of conveying devices] As described above, the rotating mechanism 42 rotates the chuck 41 so that it revolves around a rotation center oriented in the orthogonal direction, but it may also rotate the chuck 41 so that it revolves around a rotation center oriented in the conveying direction. Such a configuration will be described below. Figure 7 is a side view showing the conveying device 10 in a state where the transfer mechanism 4 is moved in the orthogonal direction by the horizontal movement mechanism 3 and the transfer is performed.

[0042] As shown in Figure 7, the horizontal movement mechanism 3 has a support mechanism 3a and a movable mechanism 3b.

[0043] The support mechanism 3a is fixed to the lower surface of the upper part 11a of the frame 11. The support mechanism 3a has a slide rail (not shown) on its lower surface. The slide rail is formed in a straight line such that its longitudinal direction is oriented in the Y1 direction and the Y2 direction. The slide rail is also provided so as to be able to move back and forth in the Y1 direction or the Y2 direction relative to the lower surface of the support mechanism 3a.

[0044] The movable mechanism 3b is positioned on the lower end surface of the slide rail and moves back and forth in the Y1 or Y2 direction together with the slide rail. The movable mechanism 3b has a mechanism that converts rotational motion into linear motion, including a motor, pulley, belt, etc., and applies a force to the slide rail due to this linear motion in the Y1 or Y2 direction. Note that the support mechanism 3a and the movable mechanism 3b are not limited to the above configuration, and various configurations related to horizontal movement can be adopted.

[0045] Furthermore, in the transfer mechanism 4, the support shaft 42b is positioned to face the transport direction, that is, the direction in which the trolley 1 travels.

[0046] Port 301 is located below track 101. Device 300 is positioned adjacent to port 301 on the Y2 direction side of port 301.

[0047] When the transport device 10, configured as described above, retrieves a container 200 placed on the port 301 and places the gripped container 200 back on the port 301, the lifting mechanism 2 first lowers the transfer mechanism 4. When the lower chuck 41 of the transfer mechanism 4 grips the container 200 placed on the port 301, the movable mechanism 3b of the horizontal movement mechanism 3 moves in the Y1 direction to the position shown in Figure 7.

[0048] Next, when the transfer mechanism 4 rotates with the lower chuck 41 gripping the container 200, it rotates within the maximum range of rotation shown by the dashed line. This range of rotation is away from the device 300. As a result, the transfer mechanism 4 can rotate without interfering with the device 300. Therefore, the upper and lower chucks 41 can be swapped without any problems. Then, when the movable mechanism 3b of the horizontal movement mechanism 3 moves in the Y2 direction and returns to its original position, the lifting mechanism 2 raises the transfer mechanism 4.

[0049] [Other variations of the conveying device] In the conveying device 10, the frame 11 may have an expansion / contraction mechanism that expands or contracts its width in the conveying direction so that the transfer mechanism 4 can rotate while it is housing the transfer mechanism 4. The expansion / contraction mechanism, for example, uses a horizontal movement mechanism 3 or other known horizontal movement mechanism to move both ends separated from the central portion at the upper part 11a in the expansion direction (X1 direction and X2 direction) and the contraction direction (the opposite direction to when expanded).

[0050] As shown in Figure 1, when the transfer mechanism 4 rotates along the transport direction, if multiple ports 301 are located close together along the transport direction, the transfer mechanism 4 will affect the transfer operation at adjacent ports 301 when it rotates after descending to a position over a target port 301. To avoid this inconvenience, the width of the frame 11 can be expanded so that the transfer mechanism 4 can rotate while being housed within the frame 11. This increases the number of transport devices 10 that can exist within a predetermined range in the transport direction.

[0051] [Effects of the conveying device] As described above, the transport device 10 according to Embodiment 1 of the present invention comprises a trolley 1 that travels along a track 101 and a transfer mechanism 4 suspended from the trolley 1 so as to be able to move up and down. The transfer mechanism 4 has two chucks 41 that revolve around a rotation center located on the transfer mechanism 4. In this embodiment, a configuration in which the transfer mechanism 4 has two chucks 41 has been described, but the transfer mechanism 4 may have three or more chucks 41 if there are multiple.

[0052] According to the above configuration, the position of the chuck 41 can be changed by rotating it. This allows the chuck 41 to be positioned vertically. Therefore, the transport device 10 can be made smaller in the direction in which the trolley 1 travels. As a result, the number of transport devices 10 that can be placed close together in the transport direction can be increased compared to conventional devices.

[0053] The transport device 10 according to embodiment 2 of the present invention, in embodiment 1 above, comprises a transfer mechanism 4 having a rotating arm 42a having a plurality of ends to which chucks 41 are each connected, and a support body 40 that supports the rotating arm 42a and is provided with a support shaft 42b that constitutes the center of rotation.

[0054] With the above configuration, the rotating arm 42a can ensure a desired distance between the chucks 41. As a result, even when the rotating arm 42a rotates around the support shaft 42b while the chucks 41 are gripping a container 200 of a predetermined size, the rotation of the container 200 is not hindered.

[0055] In the transport device 10 according to embodiment 3 of the present invention, in embodiment 1 or 2 above, the control unit 5 controls the trolley to travel while only one of the multiple chucks 41 of the transfer mechanism 4 is gripping the container 200.

[0056] With the above configuration, one chuck 41 transports the container 200, while another chuck 41 that is not gripping the container 200 can grip the container 200 to be transported. This allows for the transport of the container 200 to its destination, as well as the picking up of other containers 200 at the destination.

[0057] In the transport device 10 according to aspect 4 of the present invention, the control unit 5 controls the trolley 1 to move while the chuck 41 is holding the container 200 from above, as described in aspect 3 above.

[0058] With the above configuration, the chuck 41 that is not gripping the container 200 can be positioned on the lower side. As a result, when the transfer mechanism 4 rotates after the lower chuck 41 has gripped the container 200 to be transported at a predetermined location, the upper chuck 41 can descend downwards and lower the container 200 it is gripping. Therefore, the container 200 can be raised and lowered efficiently. In addition, by not gripping the container 200 with the lower chuck 41, the transport device 10 in the state of transporting the container 200 can be made smaller in the vertical direction.

[0059] In the conveying device 10 according to embodiment 5 of the present invention, in any of embodiments 1 to 4 above, the support shaft 42b is arranged in a direction perpendicular to the direction of travel of the trolley 1 in the horizontal plane. This allows the chuck 41 to rotate along the conveying direction. Therefore, when there are obstacles around the track 101, the chuck 41 gripping the container 200 can be rotated without interfering with the obstacles.

[0060] In the conveying device 10 according to embodiment 6 of the present invention, the support shaft 42b is positioned in the direction of travel of the trolley 1, as in any of embodiments 1 to 4 above. This allows the chuck 41 to rotate so as to intersect the conveying direction. Therefore, when there are obstacles around the track 101, the chuck 41 gripping the container 200 can be rotated without interfering with the obstacles.

[0061] The conveying device 10 according to embodiment 7 of the present invention is equipped with a horizontal movement mechanism 3 for horizontally moving the transfer mechanism 4 in any of embodiments 1 to 6 above. As a result, if there is an obstacle in the area where the chuck 41 is rotated, the transfer mechanism 4 is rotated at the position moved by the horizontal movement mechanism 3, thereby allowing the chuck 41 gripping the container 200 to be rotated without interfering with the obstacle.

[0062] [Examples of implementation using software] The control function of the transport device 10 (hereinafter referred to as "the device") is a program that causes the device to function as a computer, and can be realized by a program that causes the computer to function as each control block of the device (especially each function of the control unit 5).

[0063] In this case, the device includes a computer having at least one control device (e.g., a processor) and at least one storage device (e.g., memory) as hardware for executing the program. By executing the program using this control device and storage device, the functions described in each of the embodiments are realized.

[0064] The above program may be recorded on one or more computer-readable recording media, not temporary ones. These recording media may or may not be provided by the above device. In the latter case, the program may be supplied to the above device via any wired or wireless transmission medium.

[0065] Furthermore, some or all of the functions of each of the above-mentioned control blocks can also be realized by logic circuits. For example, an integrated circuit in which logic circuits that function as each of the above-mentioned control blocks are formed is also included in the scope of the present invention.

[0066] [Additional Notes] The present invention is not limited to the embodiments described above, and various modifications are possible within the scope of the claims. Furthermore, embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included within the technical scope of the present invention. [Explanation of Symbols]

[0067] 1 cart 2. Lifting mechanism 3 Horizontal movement mechanism 4 Transfer mechanism (transfer section) 5. Control Unit 10 Conveying device 40 Support body (support part) 41. Chuck (gripping part) 42a Rotating arm (arm section) 42b Support shaft 101 orbit 200 containers (objects to be transported)

Claims

1. A trolley that runs along the track, The trolley is equipped with a transfer unit that is suspended so as to be able to move up and down, The transfer unit comprises a plurality of gripping parts that revolve around a rotation center located on the transfer unit and grip an object to be transported, an arm section to which each of the gripping parts is connected, and a support section that supports the arm section and is provided with a support shaft that constitutes the rotation center. The support shaft is positioned in a direction perpendicular to the horizontal plane to the direction in which the trolley travels. A conveying device in which the gripping portion is supported by the arm portion so as to be rotatable about an axis that is arranged in the same direction as the support axis with respect to the arm portion.

2. The transport device according to claim 1, further comprising a control unit that controls the trolley to travel while only one of the multiple gripping units of the transfer unit is gripping the object to be transported.

3. The transport device according to claim 2, wherein the control unit controls the trolley to travel while the gripping unit holds the object to be transported from above.

4. The conveying device according to any one of claims 1 to 3, further comprising a horizontal movement mechanism for horizontally moving the transfer section.

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