Ultrasonic water jet nozzle and method for manufacturing workpiece

Abstract

To increase an amplitude quantity of ultrasonic vibrations in an ultrasonic water injection nozzle.SOLUTION: In an ultrasonic water injection nozzle 2, high-frequency power is supplied for an ultrasonic diaphragm 3 via two pairs of electrodes, a circular positive electrode 36 and a negative electrode 39 and an annular positive electrode 37 and negative electrode 39. Thus, it is possible to increase (for example, to double) a current amount flowing in the ultrasonic diaphragm 3 in comparison with when only a pair of electrodes is used. Therefore, it is possible to increase an amplitude quantity of ultrasonic vibration 600 of the ultrasonic diaphragm 3 propagated to the ultrasonic water 501. As a result, it is possible to give large ultrasonic vibrations to a release layer 105 of an ingot 100. Thus, with the release layer 105 as an interface, it is possible to release a workpiece 107 from the ingot 100 in a short time.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to an ultrasonic water injection nozzle and method of manufacturing the workpiece .

Background Art

[0002] In an ultrasonic water injection nozzle that injects ultrasonic water in which ultrasonic waves have propagated to clean a cleaning object, as disclosed in Patent Document 1, an ultrasonic vibration plate is disposed in a storage portion that temporarily stores water. High-frequency power is supplied to this ultrasonic vibration plate, and water in which ultrasonic waves have propagated is injected from the storage portion to perform cleaning.

[0003] In addition to cleaning a cleaning object, the ultrasonic water injection nozzle is also used for peeling a workpiece from an ingot, as disclosed in Patent Document 2.

Prior Art Documents

[0007] The present invention provides an ultrasonic water spray nozzle (this ultrasonic water spray nozzle) for spraying ultrasonic water in which ultrasonic vibrations have been propagated onto an object, comprising: a dome-shaped ultrasonic vibrator that receives high-frequency power to oscillate ultrasonic vibrations; a water reservoir that supports the outer periphery of the ultrasonic vibrator and temporarily stores water on the concave side of the ultrasonic vibrator; a water supply port for supplying water to the water reservoir; and a spray port that faces the concave side of the ultrasonic vibrator and sprays the water in the water reservoir, wherein the ultrasonic vibrator comprises a circular positive electrode positioned in the center of the convex side, an annular positive electrode positioned outside the circular positive electrode with an annular gap, and a negative electrode connected to the concave side, wherein the circular positive electrode and the negative electrode are connected to a first high-frequency power supply, and the annular positive electrode and the negative electrode are connected to a second high-frequency power supply. A portion of the negative electrode wraps around to the convex side of the ultrasonic diaphragm, and a negative electrode terminal for connecting the negative electrode to the first high-frequency power supply and the second high-frequency power supply is formed on the portion of the negative electrode that is on the convex side. By supplying high-frequency power to the circular positive electrode and the annular positive electrode, the ultrasonic vibrating plate is vibrated, and ultrasonic water is sprayed from the nozzle. This ultrasonic water jet nozzle may include an amplification plate that protrudes outward from the outer circumference of the ultrasonic vibrating plate, and a case that supports the amplification plate and forms the water reservoir. In this ultrasonic water jet nozzle, the first high-frequency power supply and the second high-frequency power supply may be two separate power supplies. The first high-frequency power supply may supply a first high-frequency power to the circular positive electrode and the negative electrode, and the second high-frequency power supply may supply a second high-frequency power having the same frequency as the first high-frequency power to the annular positive electrode and the negative electrode. The present invention relates to a method for manufacturing a workpiece using the ultrasonic water jet nozzle, and includes a holding step of holding the back surface of an ingot having a release layer on its surface side with a holding table, and a peeling step of peeling the workpiece from the ingot using the release layer as an interface by spraying ultrasonic water from the nozzle of the ultrasonic water jet nozzle onto the surface of the ingot while moving the ingot and the ultrasonic water jet nozzle relative to each other parallel to the surface of the ingot held on the holding table. [Effects of the Invention]

[0008] This ultrasonic water spray nozzle is configured to vibrate an ultrasonic diaphragm by supplying high-frequency power to its circular positive electrode and annular positive electrode, thereby spraying ultrasonic water from the nozzle. In other words, this ultrasonic water spray nozzle supplies high-frequency power to the ultrasonic diaphragm via two pairs of electrodes: a circular positive electrode and a negative electrode, and an annular positive electrode and a negative electrode. This makes it possible to increase the amount of current flowing through the ultrasonic diaphragm compared to using only one pair of electrodes. Therefore, the amplitude of the ultrasonic vibration of the ultrasonic diaphragm that is propagated to the ultrasonic water can be increased.

[0009] Therefore, when using this ultrasonic water jet nozzle to detach a workpiece from an ingot, a large ultrasonic vibration can be applied to the workpiece being detached, allowing for detachment in a short time. Furthermore, when using this ultrasonic water jet nozzle to clean a workpiece, the cleaning time can be shortened, and large amounts of dirt can be removed from the workpiece. [Brief explanation of the drawing]

[0010] [Figure 1] This is a perspective view showing the configuration of an ultrasonic water jet device. [Figure 2] This is an explanatory diagram showing the configuration of an ultrasonic water jet device. [Figure 3] This is a cross-sectional view showing the configuration of an ultrasonic water jet nozzle. [Figure 4] This is a top view showing the electrodes of an ultrasonic water jet nozzle. [Modes for carrying out the invention]

[0011] Figure 1 is a perspective view showing the configuration of the ultrasonic water jet device 1 according to this embodiment. In this embodiment, the ultrasonic water jet device 1 is used to jet ultrasonic water onto an ingot 100, which is the object to be worked on as shown in Figure 2, in order to separate the workpiece 107 from the ingot 100.

[0012] The ingot 100 is formed from, for example, SiC and has a cylindrical shape. The ingot 100 has a release layer 105 formed on its surface 101 side by a laser processing device (not shown). The ultrasonic water jet device 1 separates the workpiece 107 from the ingot 100 using this release layer 105 as a starting point.

[0013] As shown in Figures 1 and 2, the ultrasonic water jet device 1 comprises a holding table 10 for holding the ingot 100, an ultrasonic water jet nozzle 2 for jetting ultrasonic water, a moving mechanism 4 for moving the ultrasonic water jet nozzle 2 relative to the ingot 100, and a control unit 70 for controlling the operation of the ultrasonic water jet device 1.

[0014] As shown in Figure 2, the ingot 100 is held by the holding table 10 from the back side 102. The holding table 10 comprises a disc-shaped holding portion 11 and a frame 12 that supports the holding portion 11. The holding portion 11 is a plate made of porous material and has a holding surface 13 formed flush with the upper surface of the frame 12. The holding portion 11 is connected to a suction source (not shown), and the suction force of the suction source is transmitted to the holding surface 13. As a result, the holding table 10 can hold the ingot 100 by suction using the holding surface 13.

[0015] Furthermore, the holding table 10 is configured to be movable vertically by a lifting mechanism (not shown) consisting of an air cylinder or the like. This lifting mechanism raises the holding table 10 to position it at the loading and unloading height for the ingot 100. The lifting mechanism also lowers the holding table 10, which is holding the ingot 100, to position it at the peeling work height within the housing 14.

[0016] The holding table 10 is housed in the internal space of the housing 14 shown in Figure 1. The housing 14 comprises an outer wall 120 surrounding the holding table 10 and a bottom plate 122. The bottom plate 122 is integrally connected to the lower part of the outer wall 120 and has a through hole (not shown) in the center through which the spindle 41 is inserted. In addition, in FIG. 1, a part of the outer wall 120 of the housing 14 is cut away to show the inside of the housing 14.

[0017] The housing 14 is supported by a plurality of legs 124. The upper ends of the legs 124 are fixed to the lower surface of the bottom plate 122. A drain hole (not shown) is formed through the bottom plate 122 in the thickness direction. A member (such as a drain hose) for discharging the used water to the outside of the housing 14 is connected to this drain hole.

[0018] The moving mechanism 4 relatively moves the ultrasonic water injection nozzle 2 parallel to the surface 101 of the ingot 100 held on the holding table 10. As shown in FIG. 2, the moving mechanism 4 includes a rotating mechanism 40 that rotates the ingot 100 held by the holding portion 11, and a slide mechanism 44 that moves the ultrasonic water injection nozzle 2 in a horizontal direction (a direction parallel to the XY plane (surface 101)).

[0019] The rotating mechanism 40 is disposed below the holding table 10. The rotating mechanism 40 rotates the ingot 100 held by the holding portion 11 about a rotation axis A1 passing through the center of the holding portion 11. The rotating mechanism 40 includes a spindle 41, a spindle motor 42 that rotationally drives the spindle 41, and an encoder 43. <L

[0020] The upper end of the spindle 41 is fixed to the lower surface of the frame body 12 in the holding table 1 and extends in the Z-axis direction. The spindle motor 42 is connected to the lower end side of the spindle 41. When the spindle motor 42 rotates the spindle 41 as shown by the arrow Rz, the holding table 10 is rotated. As a result, the ingot 100 held on the holding table 10 is rotated. The encoder 43 detects the rotation angle of the holding table 10 by detecting the rotation angle of the spindle motor 42.

[0021] The slide mechanism 44 is configured to pivotally move the ultrasonic water injection nozzle 2 in a horizontal direction, which is a direction parallel to the surface 101 of the ingot 100.

[0022] The slide mechanism 44 includes a horizontally extending swivel arm 45, a swivel shaft 48 that supports and rotates the swivel arm 45, a swivel motor 46 connected to the lower end of the swivel shaft 48, and an encoder 47 for detecting the rotation angle of the swivel motor 46.

[0023] As shown in Figure 1, the swivel shaft 48 is erected on the bottom plate 122 of the housing 14 via bearings (not shown). The tip of the swivel shaft 48 supports the base end of the swivel arm 45. An ultrasonic water jet nozzle 2 is disposed on the tip end of the swivel arm 45. The swivel motor 46 rotates the swivel shaft 48, thereby causing the swivel arm 45 to rotate. The encoder 47 detects the rotation angle of the swivel motor 46, and in doing so, detects the horizontal position of the ultrasonic water jet nozzle 2 disposed on the tip of the swivel arm 45.

[0024] The ultrasonic water injection nozzle 2 injects ultrasonic water, in which ultrasonic vibrations have been transmitted to the object to be worked on. In this embodiment, as shown in Figure 2, the ultrasonic water injection nozzle 2 injects ultrasonic water onto the object to be worked on, the ingot 100, to separate the workpiece 107 from the ingot 100. As shown in Figures 2 and 3, the ultrasonic water injection nozzle 2 comprises a case 20 for temporarily storing water 500 supplied from a water source 60, an injection port 241 formed on the lower surface of the case 20, and an ultrasonic vibrating plate 3 disposed inside the case 20 facing the injection port 241.

[0025] The case 20 comprises a bottom plate 21, a top plate 22 facing the bottom plate 21 in the Z-axis direction, and a substantially cylindrical side wall 23 connecting the bottom plate 21 and the top plate 22. The tip of the swivel arm 45 shown in Figure 1 is fixed to the upper surface of the top plate 22.

[0026] The inside of the case 20 is divided into two chambers, upper and lower, by the ultrasonic vibrator 3: a first chamber 221 above the ultrasonic vibrator 3 and a second chamber 222 below the ultrasonic vibrator 3. A water supply port 231 is formed through the side wall 23 of the lower second chamber 222.

[0027] The water supply port 231 is used to supply water 500 to the second chamber 222, which is located between the ultrasonic vibrating plate 3 and the nozzle 241 inside the case 20. This water supply port 231 is connected to a water source 60 via a flexible resin tube or the like. The water source 60 is equipped with a pump or the like and is configured to supply water 500 such as pure water. The water 500 supplied from the water source 60 is temporarily stored in the second chamber 222 of the case 20.

[0028] The bottom plate 21 has a nozzle portion 24 that protrudes in the -Z direction. The nozzle portion 24 gradually decreases in diameter towards the tip. The nozzle portion 24 is equipped with a nozzle 241 at its tip for injecting water 500 from the second chamber 222 of the case 20. The nozzle portion 24 may also have a shape that does not decrease in diameter towards the nozzle 241.

[0029] The disc-shaped ultrasonic vibrator 3 is positioned within the case 20, facing the nozzle 241. The ultrasonic vibrator 3 is formed in a circular dome shape when viewed from above, and is a concave spherical plate with a concave bottom surface that faces the nozzle 241. In other words, the nozzle 241 is positioned to face the concave surface of the ultrasonic vibrator 3.

[0030] The ultrasonic vibrator 3 is configured to receive high-frequency power and emit ultrasonic vibrations. As shown in Figure 3, the ultrasonic vibrator 3 propagates ultrasonic vibrations 600 to the water 500 stored in the second chamber 222 of the case 20.

[0031] As shown in Figure 3, the ultrasonic vibrating plate 3 comprises a concave spherical plate-shaped dome portion 30 and a flange portion 31 that extends radially outward from the outer edge of the dome portion 30.

[0032] The dome portion 30 is made of a piezoelectric plate, for example, a piezoelectric element which is a type of ceramic. The lower surface 261 of the dome portion 30 forms a concave surface of the ultrasonic vibrating plate 3, while the upper surface 262 of the dome portion 30 forms a convex surface of the ultrasonic vibrating plate 3.

[0033] The annular flange portion 31 of the ultrasonic vibrating plate 3 is integrally formed with the dome portion 30 and extends radially outward from the outer peripheral edge of the dome portion 30. This flange portion 31, like the dome portion 30, is composed of a piezoelectric element or the like.

[0034] Furthermore, as shown in Figures 3 and 4, the ultrasonic vibrating plate 3 is equipped with a circular positive electrode 36 positioned in the center of the upper surface 262 of the dome portion 30, an annular positive electrode 37 positioned outside the circular positive electrode 36 with an annular gap between them, and a negative electrode terminal 38 connected to the lower surface 261 of the dome portion 30.

[0035] The annular positive electrode 37 is positioned on the upper surface 262 of the dome portion 30 such that it concentrically surrounds the circular positive electrode 36 with an annular gap between them. The negative electrode terminal 38 is arranged in an annular shape on the upper surface of the flange portion 31, with an annular gap outside the annular positive electrode 37. As shown in Figure 3, the negative electrode terminal 38 is electrically connected to the negative electrode 39, which is formed to cover the lower surface 261 of the dome portion 30. The negative electrode 39 is connected to the lower surface 261 of the dome portion 30 and is made of, for example, a metal layer. The outer periphery of the negative electrode 39 wraps around the outer edge of the flange portion 31 and is formed to cover the lower and upper surfaces of the flange portion 31. The negative electrode terminal 38 is formed on the upper surface of the flange portion 31 that is covered by the outer periphery of the negative electrode 39, thereby electrically connecting the negative electrode terminal 38 and the negative electrode 39. Note that the negative electrode 39 is not shown in Figure 4.

[0036] Furthermore, as shown in Figures 2 and 3, a first high-frequency power supply 91 is connected to the circular positive electrode 36 and the negative electrode terminal 38 connected to the negative electrode 39 of the ultrasonic vibrating plate 3. The first high-frequency power supply 91 supplies first high-frequency power to the ultrasonic vibrating plate 3 via the circular positive electrode 36 and the negative electrode terminal 38. As a result, the entire ultrasonic vibrating plate 3 vibrates ultrasonically due to the first high-frequency power.

[0037] Meanwhile, a second high-frequency power supply 92 is connected to the annular positive electrode 37 of the ultrasonic vibrating plate 3 and the negative electrode terminal 38 connected to the negative electrode 39. The second high-frequency power supply 92 supplies second high-frequency power to the ultrasonic vibrating plate 3 via the annular positive electrode 37 and the negative electrode terminal 38. As a result, the entire ultrasonic vibrating plate 3 vibrates ultrasonically due to the second high-frequency power.

[0038] The second high-frequency power may have the same frequency and amplitude as the first high-frequency power, or it may have a different frequency and amplitude than the first high-frequency power.

[0039] The ultrasonic vibrations of the ultrasonic vibrator 3 are radiated as ultrasonic vibrations 600 from the concave lower surface 261 of the ultrasonic vibrator 3 toward the water 500 temporarily stored in the second chamber 222 of the case 20. In other words, in this embodiment, the lower surface 261 becomes a radiation surface that radiates ultrasonic vibrations 600.

[0040] Furthermore, the ultrasonic water jet nozzle 2 is equipped with an amplification plate 32 that protrudes outward from the outer circumference of the flange portion 31 of the ultrasonic vibrating plate 3. The end of the outer circumference portion of this amplification plate 32 is supported by the side wall 23 of the second chamber 222 of the case 20, and the dome portion 30 is hollow fixed within the case 20. The portion of the amplification plate 32 that is not supported by the side wall 23 amplifies the ultrasonic vibration 600.

[0041] Thus, the second chamber 222 of case 20 supports the flange portion 31, which is the outer peripheral portion of the ultrasonic diaphragm 3, via the amplification plate 32, and functions as a water reservoir that temporarily holds water on the concave side of the ultrasonic diaphragm 3. In other words, case 20 is configured to support the amplification plate 32 and form the second chamber 222, which is a water reservoir.

[0042] The control unit 70 shown in Figure 1 includes a CPU that performs calculations according to a control program, and a storage medium such as memory. The control unit 7 executes various processes and provides overall control over each component of the ultrasonic water jet device 1. For example, the control unit 70 controls each component of the ultrasonic water jet device 1 to perform a peeling operation that separates the workpiece 107 from the ingot 100 held on the holding table 10.

[0043] The peeling operation using the ultrasonic water jet device 1 will be described below.

[0044] First, as shown in Figure 2, the operator places the holding table 10 on the holding surface 13 so that the center of the ingot 100 roughly coincides with the center of the holding surface 13 of the holding table 10. Then, the control unit 70 activates a suction source (not shown) to transmit suction force to the holding surface 13. As a result, the holding surface 13 of the holding table 10 suction-holds the back surface 102 of the ingot 100.

[0045] Subsequently, the control unit 70 controls the rotation mechanism 40 to rotate the holding table 10, which holds the ingot 100, in the direction of arrow R2. The control unit 70 also controls the slewing motor 46 of the slide mechanism 44 to rotate the slewing shaft 48 in the direction of arrow R1. As a result, the slewing arm 45 is moved, and the ultrasonic water injection nozzle 2 moves from its retracted position outside the holding table 10 to above the ingot 100, so that the nozzle opening 241 of the ultrasonic water injection nozzle 2 faces the surface 101 of the ingot 100.

[0046] Subsequently, the control unit 70 starts supplying water 500 from the water source 60. The water 500 passes through the water supply port 231 and is temporarily stored in the second chamber 222 of the case 20 in the ultrasonic water injection nozzle 2.

[0047] A predetermined amount of water 500 is accumulated in the second chamber 222 of case 20, and when the pressure in the second chamber 222 rises, the water 500 is ejected downward from the nozzle 241. The amount of water 500 in the second chamber 222 is maintained at a predetermined level by the continuous supply of water 500 from the water source 60.

[0048] Furthermore, at this time, the control unit 70 controls the first high-frequency power supply 91 to supply first high-frequency power to the circular positive electrode 36 and the negative electrode 39 connected to the negative electrode terminal 38 (see Figure 3) on the ultrasonic vibrating plate 3. In addition, the control unit 70 controls the second high-frequency power supply 92 to supply second high-frequency power to the annular positive electrode 37 and the negative electrode 39 connected to the negative electrode terminal 38 on the ultrasonic vibrating plate 3.

[0049] As a result, the first and second high-frequency powers repeatedly switch the voltage on and off at a predetermined frequency, causing the dome portion 30 to expand and contract vertically. This expansion and contraction motion then becomes mechanical ultrasonic vibration. In other words, the first and second high-frequency powers are supplied at the same frequency.

[0050] As a result, the entire ultrasonic vibrator 3, including the dome portion 30, causes the water 500 to vibrate ultrasonically. That is, ultrasonic vibrations 600 amplified by the amplification plate 32 are propagated from the ultrasonic vibrator 3 to the water 500 temporarily stored in the second chamber 222 of the case 20. The ultrasonic vibrations 600 propagated to the water 500 concentrate toward the nozzle 241. In other words, the focal point of the ultrasonic vibrations 600 is formed near the nozzle 241.

[0051] Due to the propagation of these ultrasonic vibrations, ultrasonic water 501, which is water on which the ultrasonic vibrations 600 have propagated, is ejected outward from the nozzle opening 241 of the nozzle section 24. In this embodiment, as shown in Figure 2, ultrasonic water 501 is ejected from the nozzle opening 241 of the nozzle section 24 toward the surface 101, which is the end face of the ingot 100 on which the workpiece 107 is generated.

[0052] Furthermore, at this time, the control unit 70 moves the ingot 100 and the ultrasonic water injection nozzle 2 relative to each other in a direction parallel to the surface 101 of the ingot 100. In this embodiment, the swivel arm 45 is swiveled by the swivel motor 46, causing the ultrasonic water injection nozzle 2 to swivel above the ingot 100, which is rotating together with the holding table 10, so as to reciprocate between the center and the outer edge of the ingot 100. As a result, ultrasonic water 501 is sprayed over the entire surface 101 of the ingot 100.

[0053] By spraying the ultrasonic water 501 in this manner, the plate-like workpiece 107 is separated from the ingot 100, using the peeling layer 105 of the ingot 100 as the interface. In addition, the surface 101 of the ingot 100 is cleaned by spraying the ultrasonic water 501.

[0054] After the workpiece 107 is detached, the control unit 70 holds the workpiece 107 using a transport member (not shown) and transports it to the outside of the ultrasonic water jet device 1.

[0055] As described above, the ultrasonic water spray nozzle 2 according to this embodiment is configured to vibrate the ultrasonic vibrating plate 3 by supplying a first high-frequency power to the circular positive electrode 36 and a second high-frequency power to the annular positive electrode 37, thereby spraying ultrasonic water from the nozzle 241.

[0056] In other words, the ultrasonic water jet nozzle 2 supplies high-frequency power to the ultrasonic vibrator 3 via two pairs of electrodes: a circular positive electrode 36 and a negative electrode 39, and an annular positive electrode 37 and a negative electrode 39. This makes it possible to increase the amount of current flowing through the ultrasonic vibrator 3 (for example, by doubling it) compared to when only one pair of electrodes is used. Therefore, the amplitude of the ultrasonic vibration 600 of the ultrasonic vibrator 3 propagated to the ultrasonic water 501 can be increased. As a result, a large ultrasonic vibration can be applied to the peeling layer 105 of the ingot 100. For this reason, the workpiece 107 can be peeled from the ingot 100 in a short time using the peeling layer 105 as an interface.

[0057] Furthermore, it is preferable that the control unit 70 matches the period of the first high-frequency power applied to the circular positive electrode 36 and the negative electrode 39 with the period of the second high-frequency power applied to the annular positive electrode 37 and the negative electrode 39. This allows the amplitude of the ultrasonic vibrating plate 3, which is vibrated by the first and second high-frequency powers, to be increased effectively, and thus the amplitude of the ultrasonic vibration 600 can be easily increased.

[0058] Furthermore, in this embodiment, the ultrasonic vibrating plate 3 that generates ultrasonic vibrations 600 is held to the side wall 23 of the case 20 via an amplification plate 32. Therefore, when high-frequency power is supplied to the ultrasonic vibrating plate 3, the ultrasonic vibrating plate 3 becomes more susceptible to vibration. This allows for the effective propagation of large-amplitude ultrasonic vibrations 600, amplified by the amplification plate 32, to the water 500.

[0059] In this embodiment, the dome portion 30 and flange portion 31 of the ultrasonic vibrating plate 3 are composed of piezoelectric elements. However, the dome portion 30 and flange portion 31 may be composed of vibrating elements other than piezoelectric elements.

[0060] Furthermore, when spraying ultrasonic water 501 from the nozzle 241 onto the surface 101 of the ingot 100 to peel off the workpiece 107, it is preferable to keep the distance between the nozzle 241 and the surface 101 of the ingot 100 constant, regardless of the thickness of the ingot 100. For this purpose, a lifting mechanism that raises and lowers the holding table 10 may be used. Alternatively, the moving mechanism 4 of the ultrasonic water spraying device 1 may be equipped with a nozzle lifting mechanism that raises and lowers the ultrasonic water spraying nozzle 2, and the ultrasonic water spraying nozzle 2 may be raised and lowered by this nozzle lifting mechanism.

[0061] Furthermore, the ultrasonic water jet device 1 can also function as a cleaning device for cleaning a workpiece. This workpiece may be, for example, a workpiece 107 that has been detached from an ingot 100. In this case, the upper surface of the workpiece, which is held by the holding table 10, can be cleaned by spraying ultrasonic water from the ultrasonic water jet nozzle 2 onto the upper surface of the workpiece. Since the ultrasonic water jet device 1 can apply ultrasonic vibrations of a large amplitude to the workpiece, it is possible to shorten the cleaning time and remove large amounts of dirt from the workpiece.

[0062] Furthermore, in this embodiment, the ultrasonic water jet device 1 is equipped with two high-frequency power supplies, a first high-frequency power supply 91 and a second high-frequency power supply 92. In this regard, the first high-frequency power supply 91 and the second high-frequency power supply 92 may be a single power supply capable of outputting the first high-frequency power and the second high-frequency power individually. [Explanation of symbols]

[0063] 1: Ultrasonic water jet device, 2: Ultrasonic water jet nozzle, 3: Ultrasonic diaphragm, 4: Moving mechanism, 10: Holding table, 11: Holding part, 12: Frame, 13: Holding surface, 14: Housing, 20: Case, 21: Bottom plate, 22: Top plate, 23: Side wall, 24: Nozzle section 30: Dome section, 31: Flange section, 32: Amplifier plate, 36: Circular positive electrode, 37: Ring-shaped positive electrode, 38: Negative electrode terminal, 39: Negative electrode, 40: Rotation mechanism, 41: Spindle, 42: Spindle motor, 43: Encoder, 44: Sliding mechanism, 45: Swivel arm, 46: Swivel motor, 47: Encoder, 48: Swivel shaft, 60: Water source, 70: Control unit, 91: First high-frequency power supply, 92: Second high-frequency power supply, 100: Ingot, 101: Front surface, 102: Back surface, 105: Detachment layer, 107: Workpiece, 120: Outer wall, 122: Bottom plate, 124: Legs, 221: First chamber, 222: Second chamber, 231: Water supply port, 241: Jet port, 261: Bottom surface, 262: Top surface, 500: Water, 501: Ultrasonic water, 600: Ultrasonic vibration

Claims

1. An ultrasonic water spray nozzle that sprays ultrasonic water in which ultrasonic vibrations have been propagated to an object, A dome-shaped ultrasonic vibrator that receives high-frequency power and emits ultrasonic vibrations, The ultrasonic vibrating plate is supported by a water reservoir that temporarily stores water on the concave side of the ultrasonic vibrating plate, a water supply port that supplies water to the water reservoir, and a nozzle that faces the concave side of the ultrasonic vibrating plate and sprays water from the water reservoir. The ultrasonic diaphragm comprises a circular positive electrode positioned in the center of the convex side, an annular positive electrode positioned outside the circular positive electrode with an annular gap between them, and a negative electrode connected to the concave side. The circular positive electrode and the negative electrode are connected to a first high-frequency power supply, and the annular positive electrode and the negative electrode are connected to a second high-frequency power supply. A portion of the negative electrode wraps around to the convex side of the ultrasonic vibrating plate, and a negative electrode terminal for connecting the negative electrode to the first high-frequency power supply and the second high-frequency power supply is formed on the portion of the negative electrode that is on the convex side. An ultrasonic water spray nozzle that vibrates an ultrasonic vibrating plate by supplying high-frequency power to the circular positive electrode and the annular positive electrode, thereby spraying ultrasonic water from the nozzle.

2. The device comprises an amplification plate extending outward from the outer circumference of the ultrasonic vibrating plate, and a case that supports the amplification plate and forms the water reservoir. The ultrasonic water jet nozzle according to claim 1.

3. The first high-frequency power supply and the second high-frequency power supply are two separate power supplies, The first high-frequency power supply provides a first high-frequency power to the circular positive electrode and the negative electrode, and the second high-frequency power supply provides a second high-frequency power having the same frequency as the first high-frequency power to the annular positive electrode and the negative electrode. The ultrasonic water jet nozzle according to claim 1.

4. A method for manufacturing a plate-shaped workpiece using an ultrasonic water jet nozzle according to any one of claims 1 to 3, A holding step in which the back surface of an ingot having a delamination layer on the surface side is held by a holding table, The process includes a peeling step in which the ingot and the ultrasonic water spray nozzle are moved relative to each other parallel to the surface of the ingot held on the holding table, and ultrasonic water is sprayed onto the surface of the ingot from the nozzle of the ultrasonic water spray nozzle, thereby peeling the workpiece from the ingot with the peeling layer as the interface, A method for manufacturing a workpiece.

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