Manufacturing line management methods

Abstract

To provide a method of managing a manufacturing line that allows for efficiently carrying out processing according to a job.SOLUTION: According to one embodiment, there is provided a method of managing a manufacturing line. The method of managing a manufacturing line includes determining a capability-variation characteristic of each resource based on an actual result of throughput in a process area of a manufacturing line. The manufacturing line is arranged with a plurality of process areas, and each of the process areas includes a plurality of resources. The method of managing a manufacturing line also includes determining the number of additional resources for achieving the quota of the process area based on the number of resources and the determined capability-variation characteristic in the process area.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] This embodiment relates to a method for managing a production line.

Background Art

[0002] In a production line, when a job is input into a process area including a plurality of resources, the resources operate to process the job. In a production line, it is desired to be able to process jobs efficiently.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Patent Document 3

Patent Document 4

Patent Document 5

Patent Document 6

Summary of the Invention

Problems to be Solved by the Invention

[0004] One embodiment aims to provide a method for managing a production line that can process jobs efficiently.

Means for Solving the Problems

[0005] According to one embodiment, a method for managing a production line is provided. In the method for managing a production line, the production line inside of the process area During the specified period for each resource throughput of We find the parameters that statistically represent the distribution, and the parameters Based on Process areaThe capacity fluctuation characteristics are determined. A manufacturing line consists of multiple process areas. Each of the process areas contains multiple resources. In the manufacturing line management method, the number of additional resources required to achieve the quota for a process area is determined based on the number of resources in the process area and the determined capacity fluctuation characteristics. [Brief explanation of the drawing]

[0006] [Figure 1] A diagram showing the configuration of the manufacturing line in the first embodiment. [Figure 2] A diagram showing the fluctuations in resource throughput and job inflow in the first embodiment. [Figure 3] A diagram showing the functional configuration of the management system in the first embodiment. [Figure 4] A figure showing the probability distribution of throughput in the process area in the first embodiment. [Figure 5] A diagram showing the hardware configuration of the management system in the first embodiment. [Figure 6] A flowchart illustrating the operation of the management system in the first embodiment. [Figure 7] A diagram showing the functional configuration of the management system in a modified example of the first embodiment. [Figure 8] A figure showing the probability distribution of throughput in the process area in a modified example of the first embodiment. [Figure 9] A flowchart illustrating the operation of the management system in a modified example of the first embodiment. [Figure 10] A diagram showing the functional configuration of the management system in the second embodiment. [Figure 11] A figure showing the probability distribution of the number of resources that can operate for a recipe in the second embodiment. [Figure 12] A flowchart illustrating the operation of the management system in the second embodiment. [Figure 13] A diagram showing the functional configuration of the management system in the third embodiment. [Figure 14] A diagram illustrating the operation of the management system in the third embodiment. [Figure 15] A flowchart illustrating the operation of the management system in the third embodiment. [Figure 16] A diagram showing the functional configuration of a management system combining the first to third embodiments. [Modes for carrying out the invention]

[0007] The manufacturing line control method according to the embodiments will be described in detail below with reference to the attached drawings. However, the present invention is not limited to these embodiments.

[0008] (First embodiment) The manufacturing line management method according to the first embodiment manages a manufacturing line having multiple process areas. Each process area contains multiple resources. In the manufacturing line, when a job is submitted to a process area, the resources become active and process the job. The manufacturing line management method incorporates measures to ensure that jobs are processed efficiently on the manufacturing line. Here, a job refers to the object to be processed by the resources.

[0009] Figure 1 shows the configuration of the manufacturing line in the first embodiment. A manufacturing plant for producing the product has multiple manufacturing lines P and P'. Figure 1 shows two manufacturing lines P and P' as an example, but a manufacturing plant may have three or more manufacturing lines.

[0010] As shown in Figure 1, the manufacturing line P has multiple process areas S1, S2, ...S Q A number of process areas S1, S2, ...S are arranged. Q is an integer greater than or equal to 2. Q This corresponds to multiple processes in the manufacturing method of the product to be manufactured. Similarly, the manufacturing line P' has multiple process areas S1', S2', ...S Q ' is arranged. When the object to be manufactured is a semiconductor device, the multiple processes include processes such as coating, exposure, development, etching, cleaning, impurity introduction, and heat treatment of the semiconductor substrate.

[0011] The following explanation will focus on one production line P, but the same principles apply to other production lines P'.

[0012] Each process area S1~S Q One or more resources E are allocated from resource group M. Resource group M includes multiple resources Ei. i is an identifier for resource E and may be an integer of 1 or more. If the object to be manufactured is a semiconductor device, each resource E is a semiconductor manufacturing device that performs the processing of that process. If the process is a coating process, resource E includes a coating device. If the process is an exposure process, resource E includes an exposure device. If the process is a development process, resource E includes a development device. If the process is an etching process, resource E includes an etching device. If the process is a cleaning process, resource E includes a cleaning device. If the process is an impurity introduction process, resource E includes an ion implantation device. If the process is a heat treatment process, resource E includes a heat treatment device.

[0013] Manufacturing line P has a target t to be achieved. The target t indicates the number of products (e.g., number of circuit boards) that should be output from manufacturing line P per unit time. The unit time may be one day. Each process area S1~S Q The quotas may be evenly distributed across the quota t of the manufacturing line P. Multiple process areas S1~S Q The difference in processing time between each process area S1~S Q This can be absorbed by changing the number of resources.

[0014] In manufacturing line P, the throughput of manufacturing line P may not meet the target t because the capacity of resource E and the inflow of jobs into resource E fluctuate. The capacity of resource E is the job processing rate by resource E, and indicates the number of jobs that resource E can process per unit time (e.g., number of circuit boards). A job is an object that resource E should process (e.g., a circuit board). The unit time may be one day. The inflow of jobs indicates the number of jobs fed into resource E per unit time. The throughput of manufacturing line P indicates the number of jobs that manufacturing line P outputs per unit time.

[0015] For example, suppose that manufacturing line P includes process area S1 and process area S2 as shown in Figure 2. Figure 2 is a diagram showing the fluctuations in resource capacity and job inflow. Process area S1 and process area S2 are consecutive processes.

[0016] In process area S1, the capacity of resource E fluctuates over time as shown in Figure 2(a), and the job inflow fluctuates over time as shown in Figure 2(b). In the next process area S2, the capacity of resource E hardly fluctuates over time as shown in Figure 2(c), but the job inflow fluctuates over time as shown in Figure 2(d). In this case, the throughput of the manufacturing line P, which includes process areas S1 and S2, fluctuates over time as shown in Figure 2(e), and there are times when the target t cannot be achieved.

[0017] Each manufacturing line P, as shown in Figures 1 and 2, can be managed by a management system 1 as shown in Figure 3. Figure 3 is a diagram showing the functional configuration of the management system 1. The management system 1 determines the capacity fluctuation characteristics of each resource E based on the actual throughput of each process area S in the manufacturing line P. Based on the number of resources in each process area S and the capacity fluctuation characteristics of each resource E, the management system 1 determines the number of additional resources needed to achieve the quota t for each process area S. Functionally, the management system 1 includes a control unit 6, an acquisition unit 5, a storage unit 2, an evaluation unit 3, and a calculation unit 4.

[0018] The storage unit 2 stores the management program PG. The management program PG includes a plurality of processes for performing predetermined management. The predetermined management includes management regarding how many resources E should be added in order to achieve the norm t in each process area S.

[0019] The control unit 6 comprehensively controls each part of the management system 1 according to the management program PG. The acquisition unit 5 acquires the parameter 2a under the control of the control unit 6. The parameter 2a includes the number of resources, the throughput history, the norm to be achieved, etc. in each process area S1 to S of the production line P. Q The acquisition unit 5 may acquire the parameter 2a according to an input from the user. The acquisition unit 5 may acquire the parameter 2a via a communication medium such as a wired communication line or a wireless communication line.

[0020] The storage unit 2 may receive the parameter 2a from the acquisition unit 5 and store it as a database under the control of the control unit 6. The database includes resource information, throughput information, norm information, etc. The resource information is information in which the number of resources, the identifier of the production line P, and the identifier of the process area S are associated for a plurality of production lines P and a plurality of process areas S. The throughput information is information in which the time information, the actual throughput, the identifier of the production line P, and the identifier of the process area S are associated for a plurality of production lines P and a plurality of process areas S. The norm information is information in which the norm to be achieved, the identifier of the production line P, and the identifier of the process area S are associated for a plurality of production lines P and a plurality of process areas S. Also, the storage unit 2 may store the calculation result of the calculation unit 4.

[0021] The evaluation unit 3 performs evaluation under the control of the control unit 6. The evaluation unit 3 acquires the throughput information from the storage unit 2. Based on the throughput information, the evaluation unit 3 can specify the actual throughput of the process area S for each process area S1 to S of the production line P. The evaluation unit 3 for each process area S1 to S Q can identify the actual throughput of the process area S. QBased on the actual throughput of process area S, the capacity fluctuation characteristics of each resource E in process area S are determined. The evaluation unit 3 analyzes the throughput of each resource E as an output according to its capacity and can determine parameters that show the throughput distribution (e.g., mean value, standard deviation) as parameters that show the capacity fluctuation characteristics of resource E.

[0022] For example, suppose n resources E1 to En are located in process area S1. The distribution of throughput for n resources E can be understood as the distribution of the probability of throughput occurring. The distribution of throughput for n resources E can be considered to follow a normal distribution approximately as shown in Figure 4(a). Figure 4 is a diagram showing the probability distribution of throughput in process area S. In Figure 4(a), the vertical axis represents the probability of throughput occurring, and the horizontal axis represents the amount of throughput. Figure 4(a) shows the distribution of throughput probability for n resources E1 to En, but the throughput probability for each individual resource E can also be considered to follow a normal distribution approximately as shown in Figure 4(a).

[0023] The evaluation unit 3 averages the actual throughput of resource E1 over a predetermined period (for example, the past three months) to determine the average throughput μ1 of resource E1. The evaluation unit 3 takes the mean square of the difference between the actual throughput of resource E1 over the predetermined period and the average throughput μ1 to determine the standard deviation σ1 of resource E1's throughput.

[0024] The evaluation unit 3 averages the actual throughput of resource E2 over a predetermined period to determine the average throughput μ2 of resource E2. The evaluation unit 3 takes the mean square of the difference between the actual throughput of resource E2 over the predetermined period and the average throughput μ2 to determine the standard deviation σ2 of resource E2's throughput.

[0025] The evaluation unit 3 averages the actual throughput of resource En over a predetermined period to determine the average throughput μn of resource En. The evaluation unit 3 takes the mean square of the difference between the actual throughput of resource En and the average throughput μn over the predetermined period to determine the standard deviation σn of resource En's throughput.

[0026] The evaluation unit 3 shown in Figure 3 is located in other process areas S2~S Q Similarly, the capacity fluctuation characteristics of each resource E in the process area S can be determined.

[0027] The evaluation unit 3 supplies the required capacity fluctuation characteristics along with the identification information of the process area S to the calculation unit 4.

[0028] The calculation unit 4 performs calculations under the control of the control unit 6. The calculation unit 4 calculates each process area S1 to S of the manufacturing line P. Q The number of resources is read from the storage unit 2. The calculation unit 4 reads the number of resources for each process area S1 to S of the manufacturing line P. Q The evaluation unit 3 obtains the capacity fluctuation characteristics of each resource E. The calculation unit 4 calculates each process area S1 to S Q Based on the number of resources in process area S and the capacity fluctuation characteristics of the resources in process area S, the number of additional resources in process area S required to achieve the quota t for process area S is determined.

[0029] For example, the calculation unit 4 can determine the number of additional resources m required to achieve the target t for process area S1 as a value such that the boundary corresponding to the total p% in the throughput distribution of resource E in process area S is greater than or equal to the target t. The calculation unit 4 can determine the number of additional resources m required to achieve the target t for process area S1 as m that satisfies the following equation 1. The calculation unit 4 may also determine the number of additional resources m as the largest integer m that satisfies the following equation 1.

number

[0030] In equation 1, i represents the identifier of resource E. i is a variable that can take values ​​(integers) between 1 and n+m, inclusive.

[0031] μi(i=1~n) is the average throughput of resources E1~En and is obtained from evaluation unit 3. μi(i=n+1~m) is the average throughput of the additional resource Ei(i=n+1~m) and is determined by calculation unit 4. Calculation unit 4 may also average the average throughputs μ1~μn of resources E1~En to obtain the average throughput μi(i=n+1~m) for each additional resource Ei(i=n+1~m).

[0032] σi(i=1~n) is the standard deviation of the throughput of resources E1~En and is obtained from evaluation unit 3. σi(i=n+1~m) is the standard deviation of the throughput of the additional resource Ei(i=n+1~m) and is calculated by calculation unit 4. Calculation unit 4 may also average the standard deviations σ1~σn of the throughput of resources E1~En to obtain the standard deviation σi(i=n+1~m) of each additional resource Ei(i=n+1~m).

[0033] t is the quota for process area S1. The quota t can be extracted from the quota information read from the memory unit 2.

[0034] n is the number of resources in process area S1. The number of resources n can be extracted from the resource number information read from the storage unit 2.

[0035] k is a coefficient that indicates the range to be covered in order to achieve the target t in the throughput distribution of resource E in process area S. The range to be covered can be determined experimentally in advance and set in the calculation unit 4.

[0036] For example, suppose the throughput of multiple resources E1 to En in process area S1 is distributed as shown in Figure 4(a), and we want to cover p% of the total from the side with the highest throughput in that distribution. If the throughput corresponding to that p% is μp, then the second term on the left side of Equation 1 represents the distance from the throughput μavg at the center of the distribution to the throughput μp.

[0037] As illustrated in Figure 4(b), if p=99.9%, k=3.00. If p=97.7%, k=2.00. If p=95.0%, k=1.65. If p=90.0%, k=1.28. If p=84.1%, k=1.00.

[0038] Similarly, the calculation unit 4 processes the process area S2~S Q Regarding this as well, the number of additional resources m required to achieve the quota t is calculated using formula 1. The calculation unit 4 calculates each process area S1 to S Q The calculation result 2b of the additional resource number m is supplied to the storage unit 2.

[0039] As a result, the memory unit 2 processes each process area S1 to S Q The calculation result 2b of the additional resource number m is stored in the storage unit 2. The control unit 6, in response to the fact that the calculation result 2b has been stored in the storage unit 2, or in response to a request from the user, etc., processes each process area S1 to S Q The user may be notified of the calculation result 2b of the additional resource number m by visual and / or auditory means.

[0040] Management system 1 can be implemented using the hardware shown in Figure 5. Figure 5 is a diagram showing the hardware configuration of management system 1.

[0041] The management system 1 has the following hardware configuration: a processor 17, ROM (Read Only Memory) 18, RAM (Random Access Memory) 13, a human interface 14, a communication interface 15, a storage device 16, and a bus 19.

[0042] The processor 17 includes a CPU (Central Processing Unit), etc. The processor 17 corresponds to the control unit 6, evaluation unit 3, and calculation unit 4. The control unit 6, evaluation unit 3, and calculation unit 4 are functionally configured by being deployed on RAM 13 either all at once during compilation or sequentially as processing progresses, through the execution of a management program PG by the processor 17.

[0043] ROM18 stores static data. ROM18 corresponds to storage unit 2.

[0044] RAM13 can temporarily store information and provides a work area and other resources to the processor 17. RAM13 corresponds to the storage unit 2.

[0045] The human interface 14 acts as an intermediary between humans and computers. The human interface 14 has an input device 14a and an output device 14b.

[0046] The input device 14a includes devices capable of receiving requests from a human, such as a keyboard, mouse, or touch panel. The input device 14a corresponds to the acquisition unit 5.

[0047] Output device 14b is a device capable of outputting visual and / or auditory information to humans, such as a display, printer, indicator, or speaker.

[0048] The communication interface 15 can connect to an external device via a communication medium. When an external device is connected via a communication medium, the communication interface 15 can receive information from the external device or transmit information to the external device.

[0049] The storage device 16 is a device capable of storing information non-volatilely, such as an HDD (Hard Disk Drive) or an SSD (Solid State Drive). The storage device 16 stores programs and various data necessary to operate the processor 17. The storage device 16 may also store a management program PG. The storage device 16 corresponds to the storage unit 2.

[0050] The processor 17, ROM 18, RAM 13, human interface 14, communication interface 15, and storage device 16 are connected to each other via a bus 19 so that they can communicate with one another.

[0051] Next, the operation of management system 1 will be explained using Figure 6. Figure 6 is a flowchart showing the operation of management system 1.

[0052] In the management system 1, the acquisition unit 5 acquires parameter 2a (ST1). For example, the acquisition unit 5 acquires parameter 2a in response to input from the user, or via a communication medium such as a wired communication line or a wireless communication line. Parameter 2a is used for each process area S1~S of the manufacturing line P. Q This includes the number of resources, throughput history, and targets to be achieved. The storage unit 2 may receive parameter 2a from the acquisition unit 5 and store it as a database. The database includes resource information, throughput information, target information, etc.

[0053] The evaluation unit 3 evaluates each process area S1 to S Q The capacity fluctuation characteristics of each resource E are determined (ST2). For example, the evaluation unit 3 acquires throughput information. Based on the throughput information, the evaluation unit 3 determines the capacity fluctuation characteristics of each process area S1 to S of the manufacturing line P. Q Regarding this, the actual throughput of process area S can be identified. The evaluation unit 3 evaluates each process area S1 to S Q Based on the actual throughput of process area S, the capacity fluctuation characteristics of each resource E in process area S are determined.

[0054] The calculation unit 4 processes each process area S1 to S Q Based on the number of resources and the capacity fluctuation characteristics obtained in ST2, the number of additional resources m required for process area S to achieve the quota t for process area S is determined (ST3).

[0055] For example, the calculation unit 4 reads resource count information from the storage unit 2, and uses the resource count information to determine each process area S1 to S of the manufacturing line P. Q Extract the number of resources for each process area S1~S of the manufacturing line P. Calculation unit 4 calculates the number of resources for each process area S1~S Q The evaluation unit 3 obtains the capacity fluctuation characteristics of each resource E. The calculation unit 4 calculates each process area S1 to S Q Based on the number of resources in process area S and the capacity fluctuation characteristics of resource E in process area S, the number of additional resources m in process area S required to achieve the quota t for process area S is determined. The calculation unit 4 calculates each process area S1 to S Q The number of additional resources m required to achieve the quota t may be calculated using formula 1. The calculation unit 4 may also calculate the number of additional resources m as the largest integer m that satisfies formula 1. The calculation unit 4 calculates each process area S1 to S Q The calculation result 2b of the additional resource number m is supplied to the storage unit 2. The storage unit 2 processes each process area S1 to S Q The calculation result 2b of the additional resource count m is stored.

[0056] The control unit 6 controls each process area S1 to S Q The calculation result 2b of the additional resource number m is notified to the user (ST4). For example, the control unit 6 notifies the user of the calculation result 2b when it is stored in the storage unit 2, or when requested by the user, etc., for each process area S1 to S Q The user may be notified of the calculation result 2b of the additional resource number m by visual and / or auditory means.

[0057] As described above, in the first embodiment, the management system 1 determines the number of additional resources m required to achieve the quota t for each process area S of the manufacturing line P, based on the number of resources in the process area S and the capacity fluctuation characteristics of the process area S. This allows the number of additional resources m for the process area S to be determined at an appropriate level, which can then be communicated to the user, prompting the user to add resources at an appropriate level. Therefore, the number of resources required to achieve the quota t can be secured for each manufacturing line P.

[0058] In addition, the management system 1a according to a modified version of the first embodiment may determine the allowable throughput variation of the process area or each resource instead of the number of additional resources m. In this case, if resources can be added, the management system 1a determines the number of additional resources m for process area S to achieve the quota t for process area S, based on the number of resources in process area S and the capacity variation characteristics of each resource E, for example, following the procedure shown in Figure 6. If resources cannot be added, the management system 1a determines the allowable throughput variation of process area S or each resource E to achieve the quota t for process area S, based on the number of resources in process area S, as described below.

[0059] As shown in Figure 7, the management system 1a has a calculation unit 4a instead of the calculation unit 4 (see Figure 3). Figure 7 is a diagram showing the functional configuration of the management system 1a in a modified example of the first embodiment.

[0060] In the management system 1a, the control unit 6 determines whether resources can be added and supplies the determination result to the calculation unit 4a. If resources can be added, the calculation unit 4a determines the number of additional resources m required to achieve the quota t for the process area S, based on the number of resources in the process area S and the capacity fluctuation characteristics obtained by the evaluation unit 3. If resources cannot be added, the calculation unit 4a determines the allowable throughput fluctuation for the process area or each resource required to achieve the quota t for the process area S, based on the number of resources in the process area S and the capacity fluctuation characteristics obtained by the evaluation unit 3.

[0061] For example, the calculation unit 4a calculates the allowable throughput variation Σσ of process area S1 in order to achieve the target t for process area S1. 2 The sum of σ satisfies the following equation 2. 2 It can be calculated as follows: The calculation unit 4a calculates the allowable throughput variation Σσ of the process area S1. 2 The largest Σσ that satisfies the following equation 2. 2 You may also request it as follows:

number

[0062] In equation 2, μi(i=1~n) is the average throughput of resources E1~En, and is obtained from evaluation unit 3. μi(i=n+1~m) is the average throughput of additional resources Ei(i=n+1~m), and is determined by calculation unit 4a.

[0063] t is the quota for process area S1. The quota t can be extracted from the quota information read from the memory unit 2.

[0064] n is the number of resources in process area S1. n is an integer greater than or equal to 1. The number of resources n can be extracted from the resource number information read from storage unit 2.

[0065] k is a coefficient that indicates the range to be covered in order to achieve the target t in the throughput distribution of resource E in process area S. The range to be covered can be determined experimentally in advance and set in the calculation unit 4a.

[0066] For example, suppose the throughput of multiple resources E1~En in process area S1 is distributed as shown in Figure 8, and we want to cover p% of the total throughput starting from the side with the highest throughput in that distribution. Figure 8 is a diagram showing the probability distribution of throughput in process area S. If μp is the throughput corresponding to p% of the entire distribution, then the left side of equation 2 is 1 / k of the square of the distance from the throughput μavg at the center of the distribution to the throughput μp. 2 It represents.

[0067] As illustrated in Figure 4(b), if p=99.9%, k=3.00. If p=97.7%, k=2.00. If p=95.0%, k=1.65. If p=90.0%, k=1.28. If p=84.1%, k=1.00.

[0068] Furthermore, the calculation unit 4a can determine the allowable throughput variation σ of each resource E1 to En in the process area S1 in order to achieve the target t, as σ that satisfies the following equation 3. The calculation unit 4a may also determine the allowable throughput variation σ of each resource E1 to En as the maximum σ that satisfies the following equation 3.

number

[0069] Furthermore, the calculation unit 4a may determine the threshold throughput based on the number of resources in the process area S and the capacity fluctuation characteristics obtained by the evaluation unit 3. The calculation unit 4a can determine the threshold throughput μt of the process area S1 required to achieve the quota t using the following formula 4.

number

[0070] The threshold throughput μt shown in Equation 4 corresponds to the minimum throughput required to cover p% of the total throughput from the highest throughput side in the throughput distribution of each resource E1 to En in process area S1, as shown in Figure 8.

[0071] Furthermore, the operation of the management system 1a differs from that of the first embodiment in the following respects, as shown in Figure 9. Figure 9 is a flowchart illustrating the operation of the management system 1a in a modified example of the first embodiment.

[0072] In the management system 1a, after the same processing as ST1 to ST2 explained with reference to Figure 6 is performed, the control unit 6 determines whether resources can be added (ST11).

[0073] For example, the acquisition unit 5 may acquire information indicating that resources can be added in response to user input or by receiving it via a communication medium such as a wired or wireless communication line. When the control unit 6 receives information indicating that resources can be added via the acquisition unit 5, it determines that resources can be added (Yes in ST11) and notifies the calculation unit 4a of this. The calculation unit 4a performs the processing in ST3 to ST4.

[0074] The acquisition unit 5 may acquire information indicating that resources cannot be added, either in response to input from the user or by receiving it via a communication medium such as a wired communication line or a wireless communication line. When the control unit 6 receives information indicating that resources cannot be added via the acquisition unit 5, it determines that resources cannot be added (No in ST11) and notifies the calculation unit 4a of this.

[0075] In response to a notification that additional resources cannot be added, the calculation unit 4a determines the allowable throughput variation of the process area or each resource E1 to En in order to achieve the quota t of the process area S, based on the number of resources in the process area S and the capacity variation characteristics obtained by the evaluation unit 3 (ST12).

[0076] For example, the calculation unit 4a calculates each process area S1 to S of the manufacturing line P. Q The number of resources is read from the storage unit 2. The calculation unit 4a calculates the number of resources for each process area S1 to S of the manufacturing line P. Q The performance fluctuation characteristics of each resource E are obtained from the evaluation unit 3.

[0077] The calculation unit 4a calculates each process area S1 to S Q Based on the number of resources in process area S and the characteristics of throughput fluctuations of resource E in process area S, the allowable throughput fluctuation Σσ of process area S in order to achieve the quota t of process area S is determined. 2 The calculation unit 4a determines each process area S1 to S Q Regarding this, the allowable throughput variation Σσ of process area S in order to achieve the quota t. 2This can also be calculated using formula 2. The calculation unit 4a calculates the allowable throughput variation Σσ of the process area S1. 2 The largest Σσ that satisfies equation 2 2 You may also request it as follows:

[0078] The calculation unit 4a calculates each process area S1 to S Q Based on the number of resources in process area S and the throughput variation characteristics of resources E1 to En in process area S, the allowable throughput variation σ of each resource E1 to En to achieve the quota t of process area S is determined. The calculation unit 4a calculates each process area S1 to S Q Regarding this, the allowable throughput variation σ of each resource E1 to En required to achieve the quota t may be calculated using Equation 3. The calculation unit 4a may also calculate the allowable throughput variation σ of each resource E1 to En as the maximum σ that satisfies Equation 3.

[0079] The calculation unit 4a calculates the allowable throughput variation Σσ of each process area S. 2 Alternatively, the calculation result 2b of the allowable throughput variation σ of each resource E is supplied to the storage unit 2. The storage unit 2 receives the allowable throughput variation Σσ of each process area S. 2 Alternatively, the calculation result 2b of the allowable throughput variation σ for each resource E is stored.

[0080] The control unit 6 controls the allowable throughput variation Σσ of each process area S. 2 Alternatively, the calculation result 2b of the allowable throughput variation σ for each resource E is notified to the user (ST13). For example, the control unit 6 notifies the user of the allowable throughput variation Σσ of each process area S in response to the calculation result 2b being stored in the storage unit 2, or in response to a request from the user, etc. 2 Alternatively, the calculation result 2b of the allowable throughput variation σ for each resource E may be communicated to the user by visual and / or auditory means.

[0081] Thus, in the management system 1a, when it is possible to add resources, the number of additional resources m required to achieve the quota t for each process area S of the manufacturing line P is determined based on the number of resources in the process area S and the capacity fluctuation characteristics of the process area S. This allows the number of additional resources m for the process area S to be determined at an appropriate level, which can then be communicated to the user, prompting the user to add resources at an appropriate level.

[0082] Furthermore, in the management system 1a, if it is not possible to add resources, the allowable throughput variation Σσ of each process area S of the manufacturing line P is calculated based on the number of resources in the process area S and the capacity variation characteristics of the process area S. 2 Alternatively, the allowable throughput variation σ of each resource E in process area S is determined. This determines the allowable throughput variation Σσ of process area S. 2 Alternatively, the system can notify the user of the allowable throughput fluctuation σ for each resource E, and prompt the user to take measures to suppress throughput fluctuations, such as stopping each resource E1 to En at regular intervals for maintenance.

[0083] (Second embodiment) Next, the management system 101 according to the second embodiment will be described. The following description will focus on the differences from the first embodiment.

[0084] In the first embodiment, the number of additional resources for the process area required to achieve the quota is determined, while in the second embodiment, the number of resources required for each recipe required to achieve the quota is determined. A recipe corresponds to a combination of job type and process area. Here, the job type will be referred to as the product name. A job refers to the object to be processed by resource E. The product name refers to the type of object to be processed by resource E.

[0085] The management system 101 may be configured as shown in Figure 10. Figure 10 is a diagram showing the functional configuration of the management system 101 in the second embodiment. Based on the number of resources in the process area S and the actual throughput of the process area S, the management system 101 determines the probability distribution of the number of resources that can operate in the process area S for recipes corresponding to combinations of job type and process area. Based on the probability distribution of the number of resources that can operate in the process area S, the management system 101 determines the number of resources required for a recipe to achieve the quota t of the process area S.

[0086] The management system 101 has an evaluation unit 103 and a calculation unit 104 instead of the evaluation unit 3 and calculation unit 4 (see Figure 3) in its functional configuration.

[0087] The memory unit 2 may store quota information for process area S and quota information for recipe RP. The quota information for process area S is the same as the quota information in the first embodiment. The quota information for recipe RP is the quota information in the first embodiment subdivided for each recipe RP. The quota information for recipe RP is information that associates the quota to be achieved with the identifier of the production line P, the identifier of the process area S, and the identifier of the recipe RP for multiple production lines P, multiple process areas S, and multiple recipe RPs. RP This is predetermined in accordance with the quota t of process area S. When multiple recipes RP_1 to PR_r are processed in process area S, the quota t of recipe RP_1 is predetermined. RP This is the quota for multiple recipes RP_1~PR_r. RP The sum can be determined so that it is evenly distributed across the quota t of process area S.

[0088] The evaluation unit 103 performs evaluations under the control of the control unit 6. The evaluation unit 103 acquires resource count information. The evaluation unit 103 extracts the number of resources in each process area S from the resource count information. The evaluation unit 103 acquires throughput information. Based on the throughput information, the evaluation unit 103 can identify the actual number of resources used in the process area S for each of the multiple recipe RPs processed on the manufacturing line P. A recipe RP is a combination of product name and process.

[0089] The evaluation unit 103 calculates the probability distribution of the number of resources that can operate in process area S for each recipe RP, based on the number of resources in process area S and the actual number of resources that have operated in process area S. The number of resources that can operate will be called the number of available resources. The evaluation unit 103 may calculate multiple probability distributions for the number of available resources by changing the number of resources allocated to each recipe RP.

[0090] Assume that multiple recipes RP_1 to PR_r are processed in process area S1, where r is an integer greater than or equal to 2. The evaluation unit 103 can determine multiple probability distributions DS for recipe RP_1.

[0091] The trial to determine the probability distribution of the number of movable resources can be considered a Bernoulli trial, as it has only two possible outcomes: "works" or "stops." In this Bernoulli trial, the number of trials can be the number of resources assigned to the recipe. The probability distribution obtained by performing trials to determine whether a resource "works" or "stops" for the number of trials equal to the number of resources assigned to the recipe can be obtained as a binomial distribution.

[0092] For example, the evaluation unit 103 can determine the probability distribution of the number of movable resources based on the actual number of resources that operated in the process area S, as a probability distribution that collects the probabilities shown in the following equation 5.

number

[0093] In equation 5, j is the number of active resources (number of operational resources).

[0094] v is the number of resources to be allocated to recipe RP_1 in process area S1. The evaluation unit 103 reads resource count information from storage unit 2 and extracts the number of resources n in process area S from the resource count information. The evaluation unit 103 determines the number of resources v to be allocated to recipe RP_1 from the number of resources n in process area S.

[0095] vj is the number of resources to be stopped.

[0096] vCj represents the number of combinations of choosing j items from v items.

[0097] p is the probability of operation. p can take values ​​between 0 and 1 (inclusive). 1-p is the probability of stopping. j (1-p) v-j This indicates the probability that j units of resource E are operating and vj units of resource E are stopped. The evaluation unit 103 acquires throughput information and, based on the throughput information, can identify the actual number of resources that operated in the process area S. Based on the actual number of resources that operated in the process area S, the evaluation unit 103 determines the probability p j (1-p) v-j It is possible to find this.

[0098] The evaluation unit 103 determines the number of resources v to be allocated to recipe RP_1, then calculates the probability shown in equation 5 while changing the number of movable resources j from 0 to v, plots the results for each value of the number of movable resources j, and can determine the probability distribution DS.

[0099] The evaluation unit 103 may obtain multiple probability distributions DS1 to DS4, as shown in Figure 11, for recipe RP_1 while changing the number of resources v to be allocated. Figure 11 is a diagram showing the probability distribution of the number of resources that can operate (number of operational resources) for recipe RP_1. In Figures 11(a) to 11(d), the vertical axis represents the number of operational resources, and the horizontal axis represents the probability of occurrence.

[0100] If v = 5 (units), the evaluation unit 103 can determine the probability distribution DS1 based on the actual number of resources that operated in the process area S, as shown in Figure 11(a). The probability distribution DS1 has an average value of 4 units and is a slightly asymmetrical distribution with a greater probability of 5 units than of 3 units.

[0101] If v = 6 (units), the evaluation unit 103 can determine the probability distribution DS2 based on the actual number of resources that operated in the process area S, as shown in Figure 11(b). The probability distribution DS2 has an average of 5 units and is a slightly asymmetrical distribution with a greater probability of 6 units than of 4 units.

[0102] If v = 8 (units), the evaluation unit 103 can determine the probability distribution DS3 based on the actual number of resources that operated in the process area S, as shown in Figure 11(c). The probability distribution DS3 has an average value of 7 units and is a slightly asymmetrical distribution with a lower-lower probability of 8 units being less than the probability of 6 units being 8 units.

[0103] If v = 11 (units), the evaluation unit 103 can determine the probability distribution DS4 based on the actual number of resources that operated in the process area S, as shown in Figure 11(d). The probability distribution DS4 has an average value of 9 units and is a slightly asymmetrical distribution with a greater probability of 10 units than of 8 units.

[0104] The evaluation unit 103 can similarly determine multiple probability distributions DS for other recipes RP_2 to RP_r processed in process area S1. Q Similarly, multiple probability distributions DS can be obtained for each of the multiple recipe RPs processed by the system.

[0105] The evaluation unit 103 supplies the obtained multiple probability distributions DS, along with the identification information of the process area S and the identification information of the recipe RP, to the calculation unit 104.

[0106] The calculation unit 104 performs calculations under the control of the control unit 6. Based on the probability distribution DS obtained by the evaluation unit 103, the calculation unit 104 determines the number of resources v required for the recipe RP to achieve the quota t of the process area S. For each recipe RP, the calculation unit 104 obtains the multiple probability distributions DS obtained from the evaluation unit 103 and determines the quota t of the recipe RP. RP The data is read from memory unit 2. The calculation unit 104 calculates the quota t of recipe RP based on multiple probability distributions DS. RP Determine the number of resources v required for the recipe RP to achieve the goal. The recipe RP quota t RP This is the quota for recipe RP (for example, recipe RP_1) that corresponds to the quota t of process area S.

[0107] For example, the calculation unit 104 calculates the quota t for recipe RP_1 processed in process area S1. RP The number of resources v required to achieve the target t RP The value can be determined such that the cumulative probability of having a smaller number of movable resources is less than 100ε% of the total. The calculation unit 104 calculates the quota t for recipe RP_1. RP The number of resources v required to achieve this can be determined as v that satisfies the following equation 6. The calculation unit 104 may also determine the number of resources v as the smallest integer v that satisfies the following equation 6.

number

[0108] In equation 6, vCjp j (1-p) v-j The part shown is the same as in equation 5. The left side of equation 6 is the number of movable resources from 0 to t. RP This shows the cumulative probability of getting -1.

[0109] ε is the error rate, representing the percentage of the entire probability distribution DS that is not covered. If we want to cover q% of the entire probability distribution DS, then ε = 1 - q / 100. If q = 99%, then ε = 0.01.

[0110] The calculation unit 104 may determine whether the multiple probability distributions DS1 to DS4 of recipe RP_1 obtained by the evaluation unit 103 satisfy equation 6, and determine the number of resources v required for recipe RP_1 according to the result of the determination.

[0111] For example, let ε = 0.01. If v = 5 (units), the calculation unit 104 calculates the cumulative probability of the portion PP1 enclosed by the dotted line in Figure 11(a). The portion PP1 is calculated based on the number of movable resources in the probability distribution DS1, where the number of movable resources is t RP It is a smaller portion. The calculation unit 104 compares the cumulative probability of part PP1 with ε. The calculation unit 104 finds that the cumulative probability of part PP1 is greater than ε, so it does not satisfy equation 6, and the quota t RP To achieve this, we determine that the number of resources v=5 (units) is insufficient.

[0112] When v = 6 (units), the calculation unit 104 calculates the cumulative probability of the portion PP2 enclosed by the dotted line in Figure 11(b). The portion PP2 is calculated based on the number of movable resources in the probability distribution DS2, which is equal to the number of units. RP It is a smaller portion. The calculation unit 104 compares the cumulative probability of part PP2 with ε. The calculation unit 104 finds that the cumulative probability of part PP2 is greater than ε, so it does not satisfy equation 6, and the quota t RP To achieve this, we determine that the number of resources v=6 (units) is insufficient.

[0113] When v = 8 (units), the calculation unit 104 calculates the cumulative probability of the portion PP3 enclosed by the dotted line in Figure 11(c). The portion PP3 is calculated based on the number of movable resources in the probability distribution DS3, which is equal to the number of units. RP It is a smaller portion. The calculation unit 104 compares the cumulative probability of part PP3 with ε. The calculation unit 104 finds that the cumulative probability of part PP3 is smaller than ε, so it satisfies equation 6 and the quota t RP We determine that a resource count of v=8 (units) is sufficient to achieve this.

[0114] When v = 11 (units), the calculation unit 104 calculates the cumulative probability of the portion PP4 enclosed by the dotted line in Figure 11(d). The portion PP4 is calculated based on the number of movable resources in the probability distribution DS4, where the number of movable resources is equal to the quota t. RPIt is a smaller portion. The calculation unit 104 compares the cumulative probability of part PP4 with ε. The calculation unit 104 finds that the cumulative probability of part PP4 is smaller than ε, so it satisfies equation 6. Here, since equation 6 is already satisfied at v=8 (units), the calculation unit 104 finds that the quota t RP To achieve this, we determine that the number of resources v=11 (units) is excessive.

[0115] In the cases of Figures 11(a) to 11(d), the calculation unit 104 calculates the quota t. RP Determine the required number of resources for recipe RP_1 to achieve this by setting v=8 (units).

[0116] Similarly, the calculation unit 104 also calculates the quota t for the other recipes RP_2 to RP_r in process area S1. RP The number of resources v required for each recipe RP_2 to RP_r to achieve the goal is calculated using formula 6. The calculation unit 104 calculates the process area S2 to S Q Regarding each recipe RP, there is a quota t RP The number of resources v required for recipes RP_2 to RP_r to achieve the goal is calculated using formula 6. The calculation unit 104 supplies the calculation result 2c of the number of resources v required for each recipe RP to the storage unit 2.

[0117] Furthermore, the operation of the management system 101 differs from that of the first embodiment in the following respects, as shown in Figure 12. Figure 12 is a flowchart illustrating the operation of the management system 101 in the second embodiment. Figure 12 illustrates the operation for one process area S (S1 in this case), but the operation for other process areas S is similar.

[0118] In the management system 101, after the process of ST1, as explained using Figure 6, is performed, the control unit 6 selects the recipe RP (in this case, recipe RP_1) to be processed from among multiple recipes RP_1 to PR_r in the process area S1 (ST21). The control unit 6 notifies the evaluation unit 103 and the calculation unit 104 of the selected recipe RP to be processed.

[0119] The evaluation unit 103 determines the probability distribution of the number of resources that can operate in process area S1 for the recipe RP_1 to be processed, based on the number of resources in process area S1 and the actual number of resources that have operated in process area S1 (ST22).

[0120] For example, the evaluation unit 103 reads resource count information from the storage unit 2 and extracts the number of resources n in the process area S1 from the resource count information. The evaluation unit 103 determines the number of resources v to be allocated to recipe RP_1 from the number of resources n in the process area S1. After determining the number of resources v to be allocated to recipe RP_1, the evaluation unit 103 can calculate the probability shown in equation 5 while changing the number of movable resources j from an integer value between 0 and v, plot the results for each value of the number of movable resources j, and obtain the probability distribution. At this time, the evaluation unit 103 can obtain multiple probability distributions DS as shown in Figure 11 for recipe RP_1 while changing the number of resources v to be allocated.

[0121] Based on the probability distribution DS obtained in ST22, the calculation unit 104 calculates the number of resources v required for the recipe to achieve the quota t in process area S1 (ST23).

[0122] For example, the calculation unit 104 obtains multiple probability distributions DS from the evaluation unit 103 for the recipe RP to be processed. Based on the multiple probability distributions DS, the calculation unit 104 determines the quota t for recipe RP_1. RP Determine the number of resources v required for recipe RP_1 to achieve the goal. RP This is the quota for recipe RP_1 corresponding to the quota t in process area S1.

[0123] The calculation unit 104 calculates the quota t for recipe RP_1. RP The number of resources v required to achieve this can be determined as v that satisfies equation 6. The calculation unit 104 may also determine the number of resources v as the smallest integer v that satisfies equation 6.

[0124] The calculation unit 104 supplies the calculation result 2c of the number of resources v required for recipe RP_1 to the storage unit 2. The storage unit 2 stores the calculation result 2c of the number of resources v required for recipe RP_1.

[0125] The control unit 6 determines whether there are any unselected recipe RPs among the multiple recipes RP_1 to PR_r (ST24). If there are unselected recipe RPs (Yes in ST24), the control unit 6 returns to ST21. If there are no unselected recipe RPs (No in ST24), the control unit 6 notifies the user of the calculated number of resources v required for each recipe RP in process area S1 (ST4).

[0126] As described above, in the second embodiment, for each of the multiple recipes RP processed in each process area S of the manufacturing line P, the number of resources v required for each recipe to achieve the quota t of the process area S is determined. For each recipe RP, the probability distribution of the number of available resources is determined, and based on the probability distribution of the number of available resources, the quota t of the recipe RP is determined. RP The number of resources v required for each recipe RP to achieve the goal can be determined. This allows for the appropriate determination of the number of resources v required for each recipe RP processed in process area S, informing the user of this, and encouraging the user to allocate the required number of resources to each recipe RP at an appropriate level.

[0127] (Third embodiment) Next, the management system 201 according to the third embodiment will be described. The following description will focus on the differences from the first and second embodiments.

[0128] In the second embodiment, the number of resources required to achieve the quota is determined for each recipe, but in the third embodiment, the total processing capacity of each resource E is weighted according to the number of resources required and allocated to each recipe.

[0129] The management system 201 may be configured as shown in Figure 13. Figure 13 is a diagram showing the functional configuration of the management system 201 in a third embodiment. The management system 201 determines the weight of each recipe RP according to the number of resources v required for each recipe RP in each process area S. The management system 201 allocates the total processing capacity of each resource E to the recipe RP according to the weight of each recipe RP.

[0130] The management system 201, in terms of its functional configuration, has calculation units 2041, 2042, and 2043 instead of calculation unit 4 (see Figure 3), and further has selection units 2071 and 2072.

[0131] The storage unit 2 may store quota information for process area S and quota information for recipe RP. The quota information for process area S is the same as the quota information in the first embodiment. The quota information for recipe RP is the same as the quota information for recipe RP in the second embodiment. The storage unit 2 also stores a calculation result 2d which includes the required number of resources v for each of the multiple recipe RPs processed in the multiple process areas S, and the processing capacity of each recipe RP determined by the calculation unit 2043.

[0132] The calculation unit 2041 performs calculations under the control of the control unit 6. The calculation unit 2041 reads the actual throughput of each resource E in the process area S from the storage unit 2. Based on the actual throughput of each resource E, the calculation unit 2041 determines the availability rate of each resource E. The availability rate of resource E is the ratio of the availability time of resource E in a unit of time. The availability time of resource E is the time that resource E is operating. If resource E operates for 80% of the availability time in a unit of time, the availability rate is 0.80. The unit time may be the same as the unit of experience mentioned in the first embodiment, or it may be 1 day = 1440 (min). The calculation unit 2041 may also determine the availability time of each resource E using the following formula 7.

number

[0133] For example, as shown in Figure 14, let's assume that the availability rate for resources E1 to E5 is all 0.80. Figure 14 is a diagram illustrating the operation of the management system 201 in the third embodiment. In this case, the calculation unit 2041 calculates the availability time for resources E1 to E5 to be 1440 (min) × 0.80 = 1152 (min) for each resource.

[0134] The calculation unit 2041 shown in Figure 13 supplies the calculated operating time of each resource E to the calculation unit 2043.

[0135] The selection unit 2071 performs selection processing under the control of the control unit 6. The selection unit 2071 reads the quota information of recipe RP from the storage unit 2. The selection unit 2071 selects the quotas t of multiple recipes RP_1 to RP_r to be processed in process area S from the quota information of recipe RP. RP Extracts the following. The selection unit 2071 selects the quota t for each recipe RP_1 to RP_r. RP This is supplied to the calculation unit 2042.

[0136] The selection unit 2072 performs selection processing under the control of the control unit 6. The selection unit 2072 reads the calculation result 2d of the required number of resources v for each of the multiple recipes RP processed in the process area S from the storage unit 2. The selection unit 2072 then calculates the reciprocal of the required number of resources for each recipe RP, 1 / v, according to the calculation result 2d.

[0137] For example, as shown in Figure 14, the required resource counts for recipes RP_1, RP_2, and RP_3 are 5, 4, and 5, respectively. Recipes RP_1 and RP_3 are processed using resources E1 to E5, and recipe RP_2 is processed using resources E1 to E4. The selection unit 2072 calculates the reciprocals 1 / v of the required resource counts for recipes RP_1, RP_2, and RP_3 as 0.20, 0.25, and 0.20, respectively.

[0138] The selection unit 2072 shown in Figure 13 supplies the reciprocal of the required number of resources for each recipe RP, 1 / v, to the calculation unit 2042.

[0139] The calculation unit 2042 determines the weight of each recipe RP according to the reciprocal of the required number of resources for each recipe RP in each process area S, which is 1 / v. The calculation unit 2042 determines the quota t for each recipe RP_1 to RP_r. RP The selection unit 2071 retrieves the value, and the reciprocal of the required number of resources for each recipe RP, 1 / v, is retrieved from the selection unit 2072.

[0140] The calculation unit 2042 may determine the weight of each recipe RP in accordance with the reciprocal of the number of resources required for each recipe RP, 1 / v, so that the throughput is equalized among multiple recipes RP_1 to RP_r. The calculation unit 2042 may also determine the weight based on the concept of the harmonic mean. For each process area S, the calculation unit 2042 may determine the weight in accordance with the ratio of the reciprocal of the number of resources required for that recipe RP (1 / v) to the sum of the reciprocals of the number of resources required for multiple recipes RP_1 to RP_r (1 / v).

[0141] The calculation unit 2042 may select a recipe of interest RP (for example, recipe RP_1) from among several recipes RP_1 to RP_r, and determine the weight of the recipe of interest RP using the following formula 8.

number

[0142] In equation 8, [picth] is the processing speed per unit quantity of job (e.g., one circuit board) by resource E. [MAX charge] is the amount of jobs that resource E can process in parallel (e.g., the number of circuit boards that can be processed in parallel). Multiplying the quota (quantity) by [picth] (time / quantity) and dividing by [MAX charge] (number of parallel processes) will convert the quota into time.

[0143] The numerator on the right-hand side of Equation 8 represents the product of the time calculated from the quota and the reciprocal of the required number of resources, 1 / v, with the value becoming larger as the required number of resources v decreases. The denominator on the right-hand side of Equation 9 represents the sum of the products of the time calculated from the quota and the reciprocal of the required number of resources, 1 / v, for multiple recipes RP_1 to RP_r. The right-hand side of Equation 8 represents a weight that becomes larger for recipes RP with fewer required resources v.

[0144] For example, let's look at resource E1 shown in Figure 14. If we set the maximum charge count to 1, then the quota t for each recipe RP_1 to RP_3 is... RP All of these values ​​are 69, and the picth values ​​for recipes RP_1, RP_2, and RP_3 are 20, 30, and 24. The reciprocals of the required resource counts for recipes RP_1, RP_2, and RP_3, 1 / v, are 0.20, 0.25, and 0.20. The calculation unit 2042 calculates the weights of recipes RP_1 to RP_3 using formula 8 as follows. Weight of recipe RP_1 = (69 × 20 ÷ 1 × 0.20) / (69 × 20 ÷ 1 × 0.20 + 69 × 30 ÷ 1 × 0.25 + 69 × 24 ÷ 1 × 0.20) ≈ 0.26 Weight of recipe RP_2 = (69 × 30 ÷ 1 × 0.25) / (69 × 20 ÷ 1 × 0.20 + 69 × 30 ÷ 1 × 0.25 + 69 × 24 ÷ 1 × 0.20) ≈ 0.48 Weight of recipe RP_3 = (69 × 20 ÷ 1 × 0.20) / (69 × 20 ÷ 1 × 0.20 + 69 × 30 ÷ 1 × 0.25 + 69 × 24 ÷ 1 × 0.20) ≈ 0.26

[0145] Comparing the weights of recipes RP_1 to RP_3, the weight of recipe RP_2, which requires fewer resources (4 units), is greater than the weights of recipes RP_1 and RP_3, which require more resources (5 units).

[0146] The calculation unit 2042 can also determine the weights of recipes RP_1 to RP_3 for other resources E2 to E5 using formula 8.

[0147] Similarly, the calculation unit 2042 shown in Figure 13 may determine the weights of other recipe RPs using equation 8. The calculation unit 2042 supplies the weights of each recipe RP in process area S to the calculation unit 2043.

[0148] The calculation unit 2043 performs calculations under the control of the control unit 6. The calculation unit 2043 may allocate the total processing capacity of each resource E to each recipe RP according to the weight of each recipe RP and determine the processing capacity of each recipe RP.

[0149] Here, the total processing capacity of each resource E corresponds to the operating time of each resource E. The calculation unit 2043 allocates the operating time of each resource E as processing time according to the weights of the multiple recipe RPs processed by each resource E, and converts the allocated processing time into processing capacity. In this way, the calculation unit 2043 can allocate the total processing capacity of each resource E to each recipe RP according to the weight of each recipe RP.

[0150] The calculation unit 2043 obtains the operational time of each resource E from the calculation unit 2041. The calculation unit 2043 obtains the weight of each recipe RP from the calculation unit 2042. The calculation unit 2043 uses the operational time of resource E and the weight of the recipe RP to determine the processing time of the recipe RP.

[0151] The calculation unit 2043 may select a recipe of interest RP (for example, recipe RP_1) from among several recipes RP_1 to RP_r, and determine the processing time of the recipe of interest RP using the following formula 9.

number

[0152] The right-hand side of equation 9 represents the allocation of the operational time of resource E as processing time for recipe RP according to the weight of recipe RP.

[0153] For example, let's focus on resource E1 shown in Figure 14. The calculation unit 2043 calculates the processing time for recipes RP_1 to RP_3 using equation 9 as follows: Processing time for recipe RP_1 = 1152 (min) × 0.26 ≈ 299 (min) Processing time for recipe RP_2 = 1152 (min) × 0.48 ≈ 553 (min) Processing time for recipe RP_3 = 1152 (min) × 0.26 ≈ 299 (min)

[0154] The calculation unit 2043 can also determine the processing time for recipes RP_1 to RP_3 for other resources E2 to E5 using formula 9.

[0155] The calculation unit 2043 shown in Figure 13 converts the processing time of the recipe RP into the processing capacity of the recipe RP.

[0156] The calculation unit 2043 may select a recipe RP of interest (for example, recipe RP_1) from among multiple recipes RP_1 to RP_r, and convert the processing time of the recipe RP of interest into the processing capacity of the recipe RP using the following formula 10.

number

[0157] The right-hand side of equation 10 represents converting the processing time of recipe RP into the processing capacity of recipe RP by dividing it by the processing speed of resource E.

[0158] For example, let's focus on resource E1 shown in Figure 14. If the maximum charge count is 1, the picth values ​​for recipes RP_1, RP_2, and RP_3 are 20, 30, and 24, respectively. The calculation unit 2043 converts the processing time of recipes RP_1 to RP_3 into the processing capacity of recipe RP using formula 10, as follows. Processing capacity of recipe RP_1 = 299 ÷ (20 ÷ 1) ≈ 15.0 Processing capacity for recipe RP_2 = 553 ÷ (30 ÷ 1) ≈ 18.4 Processing capacity of recipe RP_1 = 299 ÷ (24 ÷ 1) ≈ 12.4

[0159] The calculation unit 2043 can also convert the processing time of recipes RP_1 to RP_3 for other resources E2 to E5 into the processing capacity of recipe RP using formula 10.

[0160] We will refer to the total processing capacity as the sum of the processing capabilities of multiple resources E1 to E5 for each recipe RP. The total processing capacities for recipes RP_1 to RP_3 are 88.8, 73.6, and 73.6, respectively. If we define the achievement rate of the quota as total processing capacity divided by the quota, then the achievement rates of the quotas for recipes RP_1 to RP_3 are 1.28, 1.06, and 1.06, respectively. It can be confirmed that the achievement rate for all of recipes RP_1 to RP_3 is greater than 1, meaning that the quota has been met.

[0161] Similarly, the calculation unit 2043 may convert the processing time of other recipe RPs into the processing capacity of the recipe RPs using formula 10. The calculation unit 2043 supplies the calculation result 2d of the processing capacity of each recipe RP to the storage unit 2.

[0162] Furthermore, the operation of the management system 201 differs from that of the first embodiment in the following respects, as shown in Figure 15. Figure 15 is a flowchart illustrating the operation of the management system 201 in the third embodiment. Figure 15 illustrates the operation for one process area S (S1 in this case), but the operation for other process areas S is similar.

[0163] In the management system 201, after the ST1 process described in Figure 6 is performed, the control unit 6 selects the recipe RP (here, recipe RP_1) to be processed from among multiple recipes RP_1 to PR_r in the process area S1 (ST31). The control unit 6 notifies the selection units 2071, 2072 and the calculation units 2041, 2042, 2043 of the selected recipe RP_1 to be processed.

[0164] The selection units 2071, 2072 and the calculation unit 2042 determine the weight of the recipe RP_1 to be processed according to the number of resources v required for the recipe RP_1 to be processed (ST32).

[0165] The selection unit 2071 reads out the quota information of the recipe RP from the storage unit 2. The selection unit 2071 extracts the quotas t RP of the plurality of recipes RP_1 to RP_r processed in the process area S1 from the quota information of the recipe RP. The selection unit 2071 supplies the quota t RP of each recipe RP to the calculation unit 2042.

[0166] The selection unit 2072 reads out the calculation result 2d of the required resource number v of each of the plurality of recipes RP_1 to RP_r processed in the process area S1 from the storage unit 2. The selection unit 2072 obtains the reciprocal 1 / v of the required resource number of each recipe RP according to the calculation result 2d. The selection unit 2072 supplies the reciprocal 1 / v of the required resource number of each recipe RP to the calculation unit 2042.

[0167] The calculation unit 2042 obtains the reciprocal 1 / v of the required resource number of each recipe RP from the selection unit 2072.

[0168] The calculation unit 2042 may obtain the weight of each recipe RP so that the throughput is equalized among the plurality of recipes RP_1 to RP_r according to the reciprocal 1 / v of the required resource number of each recipe RP. The calculation unit 2042 may obtain the weight based on the concept of harmonic mean. The calculation unit 2042 may obtain the weight according to the ratio of the reciprocal 1 / v of the required resource number of the recipe RP_1 to be processed to the sum of the reciprocals 1 / v of the required resource numbers of the plurality of recipes RP_1 to RP_r for each process area S. The calculation unit 2042 may obtain the weight of the recipe RP_1 by Equation 8.

[0169] The calculation unit 2042 supplies the weight of the recipe RP_1 to be processed in the process area S1 to the calculation unit 2043.

[0170] The calculation units 2041 and 2043 distribute the total processing capacity of the resource E to the recipe RP_1 to be processed according to the weight of each recipe RP (ST33).

[0171] The calculation unit 2041 reads the actual throughput of each resource E in the process area S1 from the storage unit 2. Based on the actual throughput of each resource E, the calculation unit 2041 calculates the availability rate of each resource E. The availability rate of resource E is the ratio of the availability time of resource E in a unit of time (for example, one day). The availability time of resource E is the time that resource E is operating. The calculation unit 2041 may also calculate the availability time of each resource E using formula 7.

[0172] The calculation unit 2041 supplies the calculated operating time of each resource E to the calculation unit 2043.

[0173] The calculation unit 2043 obtains the operational time of each resource E from the calculation unit 2041. The calculation unit 2043 obtains the weights of recipe RP_1 from the calculation unit 2042. The calculation unit 2043 calculates the operational time of resource E and the quota t of recipe RP_1. RP The processing time for recipe RP_1 is determined using the ratio and the weights of recipe RP_1. The calculation unit 2043 may also determine the processing time for recipe RP using formula 9.

[0174] The calculation unit 2043 converts the processing time of recipe RP_1 into the processing capacity of recipe RP_1. The calculation unit 2043 may also convert the processing time of recipe RP_1 into the processing capacity of recipe RP_1 using formula 10.

[0175] The calculation unit 2043 supplies the calculation result 2d of the processing capacity of recipe RP_1 to the storage unit 2. The storage unit 2 stores the calculation result 2d of the processing capacity of recipe RP_1.

[0176] The control unit 6 determines whether there are any unselected recipe RPs among the multiple recipes RP_1 to PR_r (ST34). If there are any unselected recipe RPs (Yes in ST34), the control unit 6 returns to ST31. If there are no unselected recipe RPs (No in ST34), the control unit 6 notifies the user of the calculation result 2d of the processing capacity of each recipe RP (ST4).

[0177] As described above, in the third embodiment, the total processing capacity of each resource E is weighted according to the number of required resources and allocated to each recipe RP. For example, a weight may be determined according to the ratio of the reciprocal of the number of required resources of the target recipe RP (1 / v) to the sum of the reciprocals of the number of required resources of multiple recipes RP_1 to RP_r (1 / v). This allows for equalization of throughput among multiple recipes RP_1 to RP_r, and enables efficient allocation of the total processing capacity of each resource E to multiple recipe RPs while allowing each resource E to operate as much as possible. As a result, the robustness of the manufacturing line P can be improved while achieving the target t.

[0178] For example, when distributing the total processing capacity of multiple resources E to multiple recipe RPs, one might consider distributing them in a way that minimizes the total processing time. In this case, concentrating processing on a specific resource E for each recipe RP tends to result in shorter processing times. As a result, processing for each recipe RP becomes biased towards a specific resource E, increasing the number of resources E that stop or extending the downtime of resources E. This can potentially reduce the robustness of the manufacturing line P. In other words, if some of the resources E in the manufacturing line P stop due to trouble or other reasons, the throughput of the manufacturing line P may decrease significantly.

[0179] In contrast, in the third embodiment, throughput can be equalized among multiple recipes RP_1 to RP_r, and the total processing capacity of each resource E can be efficiently distributed to each recipe RP while keeping each resource E running as much as possible. As a result, the number of resources E that are stopped in the manufacturing line P can be reduced, and the downtime of resources E can be shortened. Therefore, the robustness of the manufacturing line P can be improved while achieving the target t.

[0180] Furthermore, as shown in Figure 16, a management system 301 may be constructed by combining the first to third embodiments. Figure 16 is a diagram showing the functional configuration of the management system 301 that combines the first to third embodiments.

[0181] The management system 301 has the following functional configuration: a control unit 6, an acquisition unit 5, a storage unit 2, an evaluation unit 3, a calculation unit 4 (or calculation unit 4a), an evaluation unit 103, a calculation unit 104, calculation units 2041, 2042, and 2043, and selection units 2071 and 2072.

[0182] The configuration and operation of the control unit 6 are obtained by merging the configuration and operation of the control unit 6 in the first embodiment, the configuration and operation of the control unit 6 in the second embodiment, and the configuration and operation of the control unit 6 in the third embodiment.

[0183] The configuration and operation of the acquisition unit 5 are obtained by merging the configuration and operation of the acquisition unit 5 in the first embodiment, the configuration and operation of the acquisition unit 5 in the second embodiment, and the configuration and operation of the acquisition unit 5 in the third embodiment.

[0184] The configuration and operation of the storage unit 2 are obtained by merging the configuration and operation of the storage unit 2 in the first embodiment, the configuration and operation of the storage unit 2 in the second embodiment, and the configuration and operation of the storage unit 2 in the third embodiment. The calculation result 2e stored in the storage unit 2 is obtained by merging the calculation result 2a of the first embodiment, the calculation result 2b of the first embodiment, and the calculation result 2c of the third embodiment.

[0185] The configuration and operation of the evaluation unit 3 are the same as those in the first embodiment.

[0186] The configuration and operation of the calculation unit 4 are the same as those in the first embodiment. The calculation unit 4 may be replaced with the calculation unit 4a in a modified example of the first embodiment. The configuration and operation of the calculation unit 4a are the same as those in a modified example of the first embodiment.

[0187] The configuration and operation of the evaluation unit 103 are the same as those in the second embodiment.

[0188] The configuration and operation of the calculation unit 104 are the same as those in the second embodiment.

[0189] The configuration and operation of the calculation unit 2041 are the same as those in the third embodiment.

[0190] The configuration and operation of the calculation unit 2042 are the same as those in the third embodiment.

[0191] The configuration and operation of the calculation unit 2043 are the same as those in the third embodiment.

[0192] The configuration and operation of the selection unit 2071 are the same as those in the third embodiment.

[0193] The configuration and operation of the selection unit 2072 are the same as those in the third embodiment.

[0194] Such a management system 301 can determine the number of additional resources m required for the process area S at an appropriate level, notify the user of this, and encourage the user to add resources E at an appropriate level. Therefore, it is possible to ensure that the number of resources required to achieve the quota t is secured for each manufacturing line P.

[0195] Such a management system 301 can determine the required number of resources v for each recipe RP processed in the process area S at an appropriate level, inform the user of this, and encourage the user to allocate the required number of resources to each recipe RP at an appropriate level.

[0196] This management system 301 also allows for equalization of throughput among multiple recipes RP_1 to RP_r, and efficiently distributes the total processing capacity of each resource E to multiple recipes RP while keeping each resource E running as much as possible. As a result, the robustness of the manufacturing line P can be improved while achieving the target t.

[0197] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of Symbols]

[0198] 1,1a Management system, 2 Storage unit, 3,103 Evaluation unit, 4,4a,104,2041~2043 Calculation unit,2071,2072 Selection unit, 5 Acquisition unit, 6 Control unit.

Claims

1. The process involves determining a parameter that statistically represents the throughput distribution of each resource in a process area within a manufacturing line, where each process area contains multiple resources, over a predetermined period, and determining the capacity fluctuation characteristics of the process area based on the parameter. Based on the number of resources in the aforementioned process area and the capacity fluctuation characteristics obtained, the number of additional resources required to achieve the quota for the aforementioned process area is determined. A method for managing a manufacturing line equipped with the following features.

2. Determining the number of additional resources is, If additional resources are available, the process area is to determine the number of additional resources needed to achieve the quota for that process area, based on the number of resources in that process area and the determined capacity fluctuation characteristics. The aforementioned management method is, If additional resources are not available, the system further comprises determining the allowable throughput variation of the process area or each resource in order to achieve the quota for the process area, based on the number of resources in the process area. A method for managing a manufacturing line according to claim 1.

3. Based on the number of resources in the aforementioned process area and the actual throughput of the aforementioned process area, the probability distribution of the number of resources that can operate in the aforementioned process area is determined for recipes corresponding to combinations of job type and process area, Based on the probability distribution obtained above, the number of resources required for the recipe to achieve the quota for the process area is determined, Furthermore, it is equipped with A method for managing a manufacturing line according to claim 1.

4. The weights of the recipes are determined according to the number of resources required for each recipe, The total processing capacity of each resource is allocated to the recipe according to the weight of the recipe, Furthermore, it is equipped with The method for managing a manufacturing line according to claim 3.

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