Image processing device, inspection device, review device, image processing method, inspection method, and review method

The image processing apparatus addresses noise and false defect detection by standardizing evaluation parameters, improving precision and accuracy in image processing across varying brightness levels.

JP7887390B2Inactive Publication Date: 2026-07-09LASERTEC CORP

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
LASERTEC CORP
Filing Date
2023-12-01
Publication Date
2026-07-09
Estimated Expiration
Not applicable · inactive patent

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Abstract

To provide an image processing device, a review apparatus, an image processing method, and a review method, which can perform highly accurate image processing.SOLUTION: An image processing device 40 includes: an evaluation parameter acquisition section 41 that acquires an evaluation parameter as information about each pixel of a plurality of pixels included in a comparison image on the basis of information about each pixel of a plurality of pixels included in a reference image 100 and information about each pixel of a plurality of pixels included in an evaluation image 200; a statistical value acquisition section 42 that acquires a statistical value of the evaluation parameters for a plurality of predetermined specific pixels in the comparison image; a standardized evaluation parameter acquisition section 43 that acquires a standardized evaluation parameter as information about each pixel of a plurality of pixels included in a standardized image 400 by standardizing the evaluation parameter of each pixel of the plurality of pixels included in the comparison image on the basis of the statistical value; and an evaluation section 45 that evaluates the standardized evaluation parameter.SELECTED DRAWING: Figure 1
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