Fluid control device, fluid pressure supply device, and fluid control method

Abstract

A fluid control device (10) comprises: a pressure regulating valve control unit (76) that controls a pressure regulating valve (50) so as to output a fluid from the pressure regulating valve at a second pressure (P2) lower than a first pressure (P1) when the flowrate (F) of the fluid is determined to be equal to or lower than a threshold value (FT) continuously for a first prescribed time (TM1) or longer and when a standby mode is permitted by an operator; and a shutoff valve control unit (80) that controls a shutoff valve (54) so as to shut off supplying of the fluid to an external device (42) when a second prescribed time (TM2) has elapsed in the standby mode.

Description

Technical Field

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[0001] The present invention relates to a fluid control device, a fluid pressure supply device, and a fluid control method.

Background Art

[0002] U.S. Patent Application Publication No. 2019 / 257329 discloses a fluid control device that shifts to a hold mode when the air flow rate in the working mode becomes below a threshold value. In the hold mode, air is provided to an external fluid device at a lower pressure than in the working mode. [[ID=​​​​​​​​​​​​A first aspect of the present invention is a fluid control device for controlling a valve module comprising a pressure regulating valve capable of adjusting the pressure of a fluid supplied from a fluid source, and a shut-off valve capable of shutting off the supply of the fluid output from the pressure regulating valve to an external device, the fluid control device comprising: a flow rate acquisition unit that acquires the flow rate of the fluid passing through the valve module from a flow rate measuring instrument; a flow rate determination unit that determines whether the acquired flow rate is continuously below a threshold for a first predetermined time or longer; a pressure regulating valve control unit that, when it is determined that the flow rate acquired during an operation mode in which the fluid is output from the pressure regulating valve at a first pressure is continuously below the threshold for a first predetermined time or longer, and the operator permits a standby mode, controls the pressure regulating valve so that the fluid is output from the pressure regulating valve at a second pressure lower than the first pressure, and switches the operation mode to the standby mode; and when a second predetermined time has elapsed during the standby mode, controls the shut-off valve so that the supply of the fluid output from the pressure regulating valve to the external device is shut off, and switches the standby mode to the isolation mode.

[0006] A second aspect of the present invention is a fluid pressure supply device comprising the fluid control device of the first aspect and the valve module.

[0007] A third aspect of the present invention is a fluid control method for controlling a valve module comprising a pressure regulating valve capable of adjusting the pressure of a fluid supplied from a fluid source, and a shut-off valve capable of shutting off the supply of the fluid output from the pressure regulating valve to an external device, the method comprising: a flow rate acquisition step of acquiring the flow rate of the fluid passing through the valve module from a flow rate measuring instrument; a flow rate determination step of determining whether the acquired flow rate is continuously below a threshold for a first predetermined time or longer; a first pressure regulating valve control step of switching the operation mode to the standby mode by controlling the pressure regulating valve so that the fluid is output from the pressure regulating valve at a second pressure lower than the first pressure, if it is determined that the flow rate acquired during an operation mode in which the fluid is output from the pressure regulating valve at a first pressure is continuously below the threshold for a first predetermined time or longer, and the standby mode is permitted by the operator; and a first shut-off valve control step of switching the standby mode to the isolation mode by controlling the shut-off valve so that the supply of the fluid output from the pressure regulating valve to the external device is shut off, if a second predetermined time has elapsed during the standby mode.

[0008] According to the present invention, the amount of fluid supplied to external devices can be reduced. [Brief explanation of the drawing]

[0009] [Figure 1] Figure 1 shows the configuration of a fluid pressure supply device including a fluid control device and a valve module in one embodiment. [Figure 2] Figure 2 shows the circuit diagram of the valve module in operation mode and standby mode. [Figure 3] Figure 3 is a circuit diagram of the valve module in isolation mode. [Figure 4] Figure 4 is a time chart illustrating the changes in the flow rate and pressure of the fluid supplied to the external device. [Figure 5]Figure 5 is a flowchart showing the processing steps of the fluid control device when the operation mode switches to standby mode. [Figure 6] Figure 6 is a flowchart showing the processing steps of the fluid control device when switching from standby mode to operation mode or isolation mode. [Figure 7] Figure 7 is a flowchart showing the processing steps of the fluid control device when switching from isolation mode to operation mode. [Figure 8] Figure 8 is a circuit diagram of the valve module in operation mode. [Figure 9] Figure 9 is a circuit diagram of the valve module in standby mode. [Figure 10] Figure 10 is a circuit diagram of the valve module in isolation mode. [Figure 11] Figure 11 is a flowchart showing the processing steps of the fluid control device when switching from standby mode to operation mode or isolation mode. [Figure 12] Figure 12 is a flowchart showing the processing steps of the fluid control device when switching from isolation mode to operation mode. [Figure 13] Figure 13 is a flowchart illustrating the fluid control process performed by the fluid control device when an instruction to prohibit transition to isolation mode is received. [Figure 14] Figure 14 is a flowchart illustrating the fluid control process performed by the fluid control device when switching from isolation mode to standby mode. [Figure 15] Figure 15 is a flowchart illustrating the fluid control process performed by the fluid control device when an instruction to prohibit transition to standby mode is received. [Modes for carrying out the invention]

[0010] Figure 1 shows the configuration of a fluid pressure supply device 30, which includes a fluid control device 10 and a valve module 20, in one embodiment. The fluid control device 10 controls the valve module 20. Fluid (e.g., air) supplied from the fluid supply source 40 flows through the piping into the inlet of the valve module 20. The fluid that flows into the inlet of the valve module 20 flows through the valve module and flows out from the outlet of the valve module 20. The fluid that flows out from the outlet of the valve module 20 is supplied to an external device 42 through the piping. The valve module 20 has a pressure regulating valve 50, a flow meter 52, and a shut-off valve 54.

[0011] The pressure regulating valve 50 can adjust the pressure of the fluid supplied from the fluid supply source 40. In this embodiment, the pressure regulating valve 50 is a proportional control valve that adjusts the fluid pressure in response to an electrical signal. The pressure regulating valve 50 includes a main valve and a pilot valve that adjusts the opening degree of the main valve. The fluid supplied from the fluid supply source 40 flows into the inlet port of the pressure regulating valve 50. The inlet port of the pressure regulating valve 50 communicates with the inlet of the valve module 20 described above. The inlet port of the pressure regulating valve 50 may also be the inlet of the valve module 20 described above.

[0012] The pressure of the fluid flowing into the inlet port of the pressure regulating valve 50 is adjusted according to the opening of the main valve. The fluid with adjusted pressure flows out from the outlet port of the pressure regulating valve 50. The fluid output from the pressure regulating valve 50 goes to the shut-off valve 54.

[0013] The flow meter 52 measures the flow rate F of the fluid passing through the valve module 20. In this embodiment, the flow meter 52 measures the flow rate F of the fluid output from the pressure regulating valve 50 and heading toward the shut-off valve 54.

[0014] The shut-off valve 54 supplies the fluid output from the pressure regulating valve 50 to the external device 42 when the valve is opened. The shut-off valve 54 includes a main valve and a pilot valve for opening and closing the main valve. When the main valve of the shut-off valve 54 closes, the supply of the fluid output from the pressure regulating valve 50 to the external device 42 is blocked.

[0015] The fluid output from the pressure regulating valve 50 flows into the inlet port of the shut-off valve 54. When the main valve of the shut-off valve 54 is open, the fluid flowing into the inlet port of the shut-off valve 54 flows out from the outlet port of the shut-off valve 54. The outlet port of the shut-off valve 54 communicates with the outlet of the valve module 20 described above. The fluid flowing out from the outlet port of the shut-off valve 54 heads towards the external device 42. Thus, the supply of the fluid output from the pressure regulating valve 50 to the external device 42 is realized. Note that the outlet port of the shut-off valve 54 may be the outlet of the valve module 20 described above.

[0016] When the main valve of the shut-off valve 54 is closed, the fluid flowing into the inlet port of the shut-off valve 54 does not flow out from the outlet port of the shut-off valve 54. That is, when the main valve of the shut-off valve 54 closes, the supply of the fluid output from the pressure regulating valve 50 to the external device 42 is blocked.

[0017] The fluid control device 10 has a processing circuit 60 and a storage device 62. The processing circuit 60 includes a processor such as a CPU or GPU. The storage device 62 includes a volatile memory such as a RAM and a non-volatile memory such as a ROM or a flash memory. The volatile memory is used as the working memory of the processor. The non-volatile memory stores the programs executed by the processor and other necessary data.

[0018] The processing circuit 60 includes an interface unit 70, a timing unit 72, a flow rate determination unit 74, a pressure regulating valve control unit 76, a flow rate acquisition unit 78, and a shut-off valve control unit 80. By executing a program stored in the storage device 62, the processing circuit 60 realizes the interface unit 70, the timing unit 72, the flow rate determination unit 74, the pressure regulating valve control unit 76, the flow rate acquisition unit 78, and the shut-off valve control unit 80. At least a part of the interface unit 70, the timing unit 72, the flow rate determination unit 74, the pressure regulating valve control unit 76, the flow rate acquisition unit 78, and the shut-off valve control unit 80 may be realized by an integrated circuit such as an ASIC or an FPGA, or an electronic circuit including discrete devices.

[0019] The interface unit 70 performs two-way communication with the operator terminal 90 via wireless communication. The interface unit 70 may perform two-way communication with the operator terminal 90 via wired communication. The interface unit 70 acquires an operator's instruction from the operator terminal 90. The interface unit 70 may acquire an operator's instruction from an operating device such as a button or a slide switch (not shown) provided in the fluid pressure supply device 30. Note that the operator terminal 90 is, for example, a PC (Personal Computer) or a PLC (Programmable Logic Controller).

[0020] The timing unit 72 has a clock circuit or a timer circuit and measures time. The timing unit 72 measures a first predetermined time TM1 and a second predetermined time TM2, which will be described later, based on time information from the clock circuit or the timer circuit.

[0021] The flow rate acquisition unit 78 acquires the flow rate F measured by the flow meter 52 from the flow meter 52. For example, the flow rate F of the fluid may decrease due to the stop of the external device 42. The flow rate determination unit 74 determines whether or not the flow rate F acquired by the flow rate acquisition unit 78 is continuously less than or equal to the threshold value FT for a first predetermined time TM1 or more.

[0022] The pressure regulating valve control unit 76 controls the pressure regulating valve 50 using electrical signals. The pilot valve of the pressure regulating valve 50 operates in response to the electrical signals output from the pressure regulating valve control unit 76. The operation of the pilot valve of the pressure regulating valve 50 adjusts the opening degree of the main valve of the pressure regulating valve 50 to various levels. When the opening degree of the main valve is zero, the pressure regulating valve 50 is in a closed state.

[0023] The shut-off valve control unit 80 controls the shut-off valve 54 using electrical signals. The pilot valve of the shut-off valve 54 is activated in response to the electrical signals output from the shut-off valve control unit 80. The operation of the pilot valve of the shut-off valve 54 causes the main valve of the shut-off valve 54 to open and close.

[0024] Figure 2 is a circuit diagram of the valve module 20 in operation mode and standby mode. For fluid utilization by the external device 42, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 to adjust the pressure of the fluid supplied from the fluid supply source 40 to a first pressure P1. The mode in which the fluid is output from the pressure regulating valve 50 at the first pressure P1 is called the operation mode.

[0025] In operation mode, the main valve of the shut-off valve 54 is open. In operation mode, fluid output from the pressure regulating valve 50 at the first pressure P1 flows out from the valve module 20 and is supplied to the external device 42.

[0026] Assume that during operation mode, instruction C1, indicating that standby mode has been authorized by the operator, is received by the interface unit 70. Furthermore, assume that during operation mode, the flow rate determination unit 74 determines that the fluid flow rate F measured by the flow rate meter 52 has been continuously below the threshold FT for a first predetermined time TM1 or longer.

[0027] In this case, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 so that fluid is output from the pressure regulating valve 50 at a second pressure P2, which is lower than the first pressure P1. In other words, if the fluid flow rate F remains below the threshold FT for a first predetermined time TM1 or longer, and the operator gives instruction C1, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 to output fluid at the second pressure P2. The mode in which fluid is output from the pressure regulating valve 50 at the second pressure P2 is called the standby mode. That is, the pressure regulating valve control unit 76 switches the operation mode to the standby mode.

[0028] In standby mode, the external device 42 may be stopped, reducing the need to supply fluid at the first pressure P1. Therefore, fluid at a second pressure P2, lower than the first pressure P1, is output from the pressure regulating valve 50. The pressure regulating valve control unit 76 reduces the opening of the main valve of the pressure regulating valve 50 by instructing the pilot valve of the pressure regulating valve 50 to reduce the pressure P from the first pressure P1 to the second pressure P2. The main valve of the shut-off valve 54 remains open. In standby mode, the fluid is supplied to the external device 42 with its pressure P adjusted to the second pressure P2. Compared to operation mode, fluid consumption waste is reduced in standby mode.

[0029] Figure 3 is a circuit diagram of the valve module 20 in isolation mode. When a second predetermined time TM2 has elapsed during standby mode, the shut-off valve control unit 80 controls the shut-off valve 54 so that the supply of fluid output from the pressure regulating valve 50 to the external device 42 is shut off. Specifically, the shut-off valve control unit 80 causes the pilot valve of the shut-off valve 54 to close the main valve of the shut-off valve 54. The mode in which the supply of fluid to the external device 42 is shut off is called isolation mode. In other words, the shut-off valve control unit 80 switches from standby mode to isolation mode.

[0030] In isolation mode, the shut-off valve control unit 80 shuts off the supply of fluid to the external device 42 and opens the outlet port of the shut-off valve 54 to the atmosphere. In other words, the outlet of the valve module 20 is opened to the atmosphere.

[0031] In isolation mode, it is preferable for the pressure regulating valve control unit 76 to instruct the pilot valve of the pressure regulating valve 50 to set the opening degree of the main valve of the pressure regulating valve 50 to zero. In other words, it is preferable for the pressure regulating valve control unit 76 to close the main valve of the pressure regulating valve 50.

[0032] The pressure regulating valve 50 also has a check valve 50c. In any of the operation mode, standby mode, and isolation mode, when the fluid pressure supply device 30 is stopped, the fluid supply from the fluid supply source 40 is shut off. When the inlet port of the pressure regulating valve 50 reaches atmospheric pressure PA, the check valve 50c causes the fluid flowing out of the outlet port of the pressure regulating valve 50 to flow from the outlet port to the inlet port. Therefore, for example, when the fluid pressure supply device 30 is stopped for maintenance and inspection of the valve module 20, the safety of the inspection worker can be ensured.

[0033] Furthermore, if the power supply to the fluid pressure supply device 30 is suddenly shut off, the valve module 20 may remain in a normally closed state. When the valve module 20 is in a normally closed state, the main valve of the shut-off valve 54 closes, similar to the state shown in Figure 3. In this case, the fluid inside the valve module 20 is discharged, ensuring the safety of the inspection worker.

[0034] If the power supply to the fluid pressure supply device 30 is suddenly cut off, the valve module 20 may remain in a normally open state. When the valve module 20 is in a normally open state, both the main valve of the pressure regulating valve 50 and the main valve of the shut-off valve 54 are open, similar to the state shown in Figure 2. In this case, the fluid supply to the external device 42 can be continued.

[0035] Figure 4 is a time chart illustrating the changes in the flow rate F and pressure P of the fluid supplied to the external device 42. Figure 4 shows how the flow rate F of the fluid supplied to the external device 42 changes as time progresses from T0 to T9 and beyond. Furthermore, Figure 4 shows how the pressure P of the fluid supplied to the external device 42 changes as time progresses from T0 to T9 and beyond.

[0036] In the example shown in Figure 4, at time T0, the valve module 20 is operating in operation mode. At time T0, a fluid with a first flow rate F1 is supplied to the external device 42 at a first pressure P1. Subsequently, when the external device 42 stops and fluid consumption in the external device 42 stops, the fluid flow rate F begins to decrease. This time when the fluid flow rate F begins to decrease is defined as time T1. Subsequently, the fluid flow rate F reaches a threshold FT. This time when the fluid flow rate F reaches the threshold FT is defined as time T3.

[0037] Note that the interface unit 70 has received the operator's instruction C1 at a time prior to time T3. For example, the time at which the interface unit 70 received instruction C1 is time T2, which is later than time T1 and earlier than time T3. The timing unit 72 starts timing from time T3, when the flow rate F reaches the threshold FT.

[0038] In the example shown in Figure 4, the flow rate F remains below the threshold FT even after time T3. Time T4 is defined as the time when the timing unit 72 starts timing at time T3 and the first predetermined time TM1 has elapsed. It is also assumed that at time T4, the operator's permission to switch to standby mode has not been revoked (the switch to standby mode has not been prohibited). In this case, at time T4, the flow rate determination unit 74 determines that the flow rate F has remained below the threshold FT for a first predetermined time TM1 or longer. This determination process is called the flow rate determination process. At time T4, the pressure regulating valve control unit 76 switches the operation mode to standby mode.

[0039] The valve module 20, which operated in operation mode until time T4, operates in standby mode from time T4 to time T7. At time T4, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 to close the main valve of the pressure regulating valve 50. At time T4, the fluid flow rate F becomes zero. At time T4, the timing unit 72 starts timing again.

[0040] From time T4 to time T5, the main valve of the pressure regulating valve 50 is temporarily kept closed. During this time, the fluid is gradually consumed downstream from the valve module 20. For example, if the fluid is air, air is consumed by air purging in the piping connecting the outlet of the valve module 20 and the external device 42. Consequently, as shown in Figure 4, the fluid pressure P gradually decreases from time T4. Time T5 is defined as the time when the fluid pressure P decreases from the first pressure P1 to the second pressure P2.

[0041] At time T5, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 so that the fluid is output from the pressure regulating valve 50 at a second pressure P2. This control process is called the first pressure regulating valve control process.

[0042] At time T5, the fluid flow rate F begins to increase. The fluid pressure P remains at the second pressure P2. Time T6 is defined as the time when the fluid flow rate F reaches the second flow rate F2. From time T6 onward, the fluid at the second flow rate F2 is supplied to the external device 42 at the second pressure P2.

[0043] In standby mode, the timing unit 72 starts timing at time T4 and a second predetermined time TM2 elapses. The time when the second predetermined time TM2 has elapsed is defined as time T7. At time T7, the shut-off valve control unit 80 switches from standby mode to isolation mode. The valve module 20, which operated in standby mode from time T4 to time T7, operates in isolation mode from time T7 onward.

[0044] At time T7, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 to close its main valve. At time T7, the shut-off valve control unit 80 controls the shut-off valve 54 to close its main valve. This control process is called the first shut-off valve control process. As a result, the supply of fluid output from the pressure regulating valve 50 to the external device 42 is shut off.

[0045] Furthermore, the control of the pressure regulating valve 50 by the pressure regulating valve control unit 76 may occur after the control of the shut-off valve 54 by the shut-off valve control unit 80. At time T7, the fluid flow rate F becomes zero. At time T7, the shut-off valve control unit 80 opens the outlet port of the shut-off valve 54 (the outlet of the valve module 20) to the atmosphere. At time T7, the pressure at the outlet of the valve module 20 decreases to a pressure equal to atmospheric pressure PA.

[0046] In isolation mode, the interface unit 70 sets the time at which it receives the operator's instruction C2 as time T8. Instruction C2 indicates that the operator has instructed the system to return to operation mode. At time T8, the pressure regulating valve control unit 76 switches from isolation mode to operation mode.

[0047] The valve module 20, which operated in isolation mode from time T7 to time T8, operates in operation mode from time T8 onward. From time T8 to time T9, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 to gradually increase the fluid pressure P output from the pressure regulating valve 50 from atmospheric pressure PA to the first pressure P1 according to a predetermined rate of increase over time. In this way, the so-called soft start function is realized. The soft start function prevents the fluid pressure P output from the pressure regulating valve 50 from rising rapidly from atmospheric pressure PA to the first pressure P1. The process in which this control processing is performed is called the second pressure regulating valve control process.

[0048] At time T8, the shut-off valve control unit 80 controls the shut-off valve 54 to supply the fluid output from the pressure regulating valve 50 to the external device 42. This control process is called the second shut-off valve control process. From time T8 to time T9, the fluid flow rate F and pressure P gradually increase. From time T9 onward, fluid at a first flow rate F1 is supplied to the external device 42 at a first pressure P1.

[0049] Figure 5 is a flowchart showing the fluid control procedure performed by the fluid control device 10 when the operation mode switches to standby mode. This procedure is performed by the processing circuit 60 of the fluid control device 10 executing a program stored in the storage device 62. When this procedure is started, the valve module 20 is operating in operation mode. In operation mode, a fluid with a first flow rate F1 is supplied to the external device 42 at a first pressure P1.

[0050] When this processing procedure is initiated, in step S10, the flow rate acquisition unit 78 acquires the flow rate F measured by the flow rate measuring instrument 52 from the flow rate measuring instrument 52. The process in which the processing in step S10 is performed is called the flow rate acquisition process.

[0051] In step S12, the flow rate determination unit 74 determines whether the flow rate F acquired by the flow rate acquisition unit 78 is less than or equal to the threshold FT. If the result in step S12 is YES, the process proceeds to step S14. If the result in step S12 is NO, the process returns to step S10.

[0052] In step S14, the flow rate determination unit 74 determines whether the flow rate F has been continuously below the threshold FT for a first predetermined time TM1 or longer, as measured by the timing unit 72. If the result in step S14 is YES, the process proceeds to step S16. If the result in step S14 is NO, the process returns to step S10. The processes in steps S12 and S14 correspond to the flow rate determination process described above.

[0053] In step S16, the pressure regulating valve control unit 76 determines whether the interface unit 70 has received the operator's instruction C1. Instruction C1 indicates that the operator has authorized the standby mode. If the result in step S16 is YES, the process proceeds to step S18. If the result in step S16 is NO, it means that the transition to standby mode is prohibited. In this case, the operator has not authorized the transition to standby mode, or the operator has revoked the authorization to transition to standby mode. If the result in step S16 is NO, the process returns to step S10.

[0054] In step S18, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 so that the fluid is output from the pressure regulating valve 50 at the second pressure P2. The process in which step S18 is performed corresponds to the first pressure regulating valve control process described above. Once the process in step S18 is completed, this process procedure ends. The valve module 20 operates in standby mode.

[0055] Figure 6 is a flowchart showing the fluid control processing procedure performed by the fluid control device 10 when switching from standby mode to operation mode or isolation mode. This procedure is performed by the processing circuit 60 of the fluid control device 10 executing a program stored in the storage device 62. When this procedure is started, the valve module 20 is operating in standby mode. In standby mode, a fluid with a second flow rate F2 is supplied to the external device 42 at a second pressure P2. When this procedure is started, in step S30, the timing unit 72 starts measuring a second predetermined time TM2.

[0056] In step S32, the pressure regulating valve control unit 76 determines whether the interface unit 70 has received the operator's instruction C3. Instruction C3 indicates that transition to standby mode is prohibited. If instruction C3 is received in standby mode, instruction C3 corresponds to the cancellation of the operator's permission to transition to standby mode in step S16 of Figure 5. If the result in step S32 is YES, the process proceeds to step S34. If the result in step S32 is NO, the process proceeds to step S40.

[0057] If the answer in step S32 is YES, in step S34, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 to increase the fluid pressure P output from the pressure regulating valve 50 from the second pressure P2 to the first pressure P1 according to a predetermined rate of increase over time.

[0058] In step S36, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 so that the fluid is output from the pressure regulating valve 50 at the first pressure P1. Once the processing in step S36 is complete, this processing procedure ends. The valve module 20 operates in operation mode.

[0059] If the answer in step S32 is NO, in step S40 the timing unit 72 determines whether the second predetermined time TM2 has elapsed. If the answer in step S40 is YES, this process procedure proceeds to step S42. If the answer in step S40 is NO, this process procedure returns to step S32.

[0060] In step S42, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 to close it.

[0061] In step S44, the shut-off valve control unit 80 controls the shut-off valve 54 to close the main valve of the shut-off valve 54. This shuts off the supply of fluid output from the pressure regulating valve 50 to the external device 42. The process in which step S44 is performed corresponds to the first shut-off valve control process described above. The outlet of the valve module 20 is open to the atmosphere and is therefore at a pressure equal to atmospheric pressure PA. Once the process in step S44 is completed, this processing procedure is finished. The valve module 20 operates in isolation mode.

[0062] Figure 7 is a flowchart showing the fluid control procedure performed by the fluid control device 10 when switching from isolation mode to operation mode. This procedure is performed by the processing circuit 60 of the fluid control device 10 executing a program stored in the storage device 62. When this procedure is started, the valve module 20 is operating in isolation mode. In isolation mode, the supply of fluid output from the pressure regulating valve 50 to the external device 42 is shut off. The pressure at the outlet of the valve module 20 is equal to atmospheric pressure PA.

[0063] When this processing procedure is initiated, in step S60, the shut-off valve control unit 80 determines whether the interface unit 70 has received the operator's instruction C2. Instruction C2 indicates that the operator has instructed the system to return to operation mode. If the result in step S60 is YES, the processing procedure proceeds to step S62. If the result in step S60 is NO, the processing procedure repeats step S60.

[0064] In step S62, the shut-off valve control unit 80 controls the shut-off valve 54 to open it. In the subsequent process, when the pressure regulating valve 50 opens, the fluid output from the pressure regulating valve 50 is supplied to the external device 42. The process in which step S62 is performed corresponds to the second shut-off valve control process described above.

[0065] In step S64, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 to increase the fluid pressure P output from the pressure regulating valve 50 from atmospheric pressure PA to a first pressure P1 according to a predetermined rate of increase over time. In step S66, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 so that the fluid is output from the pressure regulating valve 50 at the first pressure P1. The processes in steps S64 and S66 correspond to the second pressure regulating valve control process described above. Once the process in step S66 is completed, this processing procedure ends. The valve module 20 operates in operation mode.

[0066] [Differentiation] The above embodiment may be modified as follows.

[0067] (Variation 1) In the above embodiment, the pressure regulating valve 50 of the valve module 20 is a proportional control valve that adjusts the fluid pressure in response to an electrical signal. The valve module 20A controlled by the fluid control device 10 according to Modification 1 includes a pressure regulating valve 50A that outputs fluid at two different pressures in response to electrical signals corresponding to on and off, a flow meter 52, a throttle valve 100, a switching valve 102, and a shut-off valve 54.

[0068] Figure 8 is a circuit diagram of valve module 20A in operation mode. A throttle valve 100 and a switching valve 102 are positioned between the pressure regulating valve 50A and the shut-off valve 54. The pressure regulating valve 50A includes a main valve 50m and a pilot valve 50p that adjusts the opening of the main valve 50m. Fluid supplied from the fluid supply source 40 at a first pressure P1 flows into the inlet port of the pressure regulating valve 50A.

[0069] In this modified example, when the electrical signal output from the pressure regulating valve control unit 76 of the fluid control device 10 to the pilot valve 50p of the pressure regulating valve 50A is off, the pressure regulating valve 50A maintains approximately the first pressure P1 of the fluid supplied from the fluid supply source 40 and outputs the fluid. When the electrical signal output from the pressure regulating valve control unit 76 to the pilot valve 50p of the pressure regulating valve 50A is on, the pressure regulating valve 50A adjusts the first pressure P1 of the fluid supplied from the fluid supply source 40 to the second pressure P2 and outputs the fluid.

[0070] As shown in Figure 8, when the valve module 20A is operating in operation mode, the electrical signal output from the pressure regulating valve control unit 76 to the pilot valve 50p of the pressure regulating valve 50A is off. The pressure regulating valve 50A outputs fluid at the first pressure P1. The shut-off valve control unit 80 controls the shut-off valve 54 to open the main valve of the shut-off valve 54.

[0071] The first pressure P1 of the fluid output from the pressure regulating valve 50A presses against the first pressure-receiving surface 102a of the switching valve 102. The first pressing force S1 of the first pressure P1 against the first pressure-receiving surface 102a acts in a direction that pushes the position of the switching valve 102 downward. The first pressure P1 of the fluid flowing out from the outlet port of the shut-off valve 54 to the external device 42 presses against the second pressure-receiving surface 102b of the switching valve 102. The second pressing force S2 of the first pressure P1 against the second pressure-receiving surface 102b acts in a direction that pushes the position of the switching valve 102 upward.

[0072] The area of ​​the first pressure-receiving surface 102a of the switching valve 102 is smaller than the area of ​​the second pressure-receiving surface 102b. In this case, the first pressing force S1 applied to the first pressure-receiving surface 102a is smaller than the second pressing force S2 applied to the second pressure-receiving surface 102b. Therefore, as shown in Figure 8, the position of the switching valve 102 is pushed up. The switching valve 102 allows the fluid output from the pressure regulating valve 50A to flow to the shut-off valve 54 without passing through the throttle valve 100. In this way, in operation mode, the fluid with the first pressure P1 output from the pressure regulating valve 50A is supplied to the external device 42.

[0073] Figure 9 is a circuit diagram of valve module 20A in standby mode. When valve module 20A is operating in standby mode, the electrical signal output from the pressure regulating valve control unit 76 to the pilot valve 50p of the pressure regulating valve 50A is ON. The pressure regulating valve 50A outputs fluid at the second pressure P2. The main valve of the shut-off valve 54 remains open.

[0074] The third pressing force S3 of the second pressure P2 against the first pressure receiving surface 102a is smaller than the fourth pressing force S4 of the second pressure P2 against the second pressure receiving surface 102b. In this case, as shown in Figure 9, the position of the switching valve 102 is pushed up. The switching valve 102 allows the fluid output from the pressure regulating valve 50A to flow to the shut-off valve 54 without passing through the throttle valve 100. In this way, in standby mode, the fluid at the second pressure P2 output from the pressure regulating valve 50A is supplied to the external device 42.

[0075] Figure 10 is a circuit diagram of valve module 20A in isolation mode. When valve module 20A operates in isolation mode, the electrical signal output from pressure regulating valve control unit 76 to the pilot valve 50p of pressure regulating valve 50A is off. Pressure regulating valve 50A outputs fluid at a first pressure P1. Alternatively, pressure regulating valve 50A may output fluid at a second pressure P2. Shut-off valve control unit 80 controls the shut-off valve 54 to close the main valve of the shut-off valve 54. Shut-off valve control unit 80 opens the outlet port of the shut-off valve 54 to the atmosphere.

[0076] The pressure at the outlet port of the shut-off valve 54 becomes equal to atmospheric pressure PA. The fifth pressing force S5 of the second pressure P2 against the first pressure receiving surface 102a is greater than the sixth pressing force S6 of atmospheric pressure PA against the second pressure receiving surface 102b. In that case, the position of the switching valve 102 is pushed down, as shown in Figure 10.

[0077] When the isolation mode is switched to operation mode, the shut-off valve control unit 80 controls the shut-off valve 54 to open the main valve of the shut-off valve 54. The pressure regulating valve 50A outputs fluid at the first pressure P1. The switching valve 102 allows the fluid output from the pressure regulating valve 50A to flow to the shut-off valve 54 via the throttle valve 100. The pressure at the outlet port of the shut-off valve 54 gradually increases.

[0078] Consequently, when the pressure of the outlet port of the shut-off valve 54 against the second pressure-receiving surface 102b becomes greater than the first pressure S1 of the first pressure P1 against the first pressure-receiving surface 102a, the position of the switching valve 102 is pushed up. In that case, as shown in Figure 8, the switching valve 102 allows the fluid output from the pressure regulating valve 50A to flow to the shut-off valve 54 without passing through the throttle valve 100. In this way, the so-called soft-start function is realized. Depending on the pressure of the fluid flowing out of the shut-off valve 54 to the external device 42, the switching valve 102 either allows the fluid output from the pressure regulating valve 50A to flow to the shut-off valve 54 via the throttle valve 100, or allows it to flow to the shut-off valve 54 without passing through the throttle valve 100.

[0079] In this modified example, the flowchart showing the processing procedure of the fluid control device 10 when the operation mode switches to standby mode is the same as in Figure 5. Therefore, the explanation of that processing procedure is omitted.

[0080] Figure 11 is a flowchart showing the fluid control procedure performed by the fluid control device 10 when switching from standby mode to operation mode or isolation mode. This procedure is performed by the processing circuit 60 of the fluid control device 10 executing a program stored in the storage device 62.

[0081] The codes assigned to the steps in this processing procedure shown in Figure 11 correspond to some of the codes assigned to the steps in the processing procedure shown in Figure 6. Since the same processing is performed in steps where the codes match, the explanation of the processing for each step shown in Figure 11 is omitted. The flowchart shown in Figure 11 does not include steps S34 and S42 shown in Figure 6. Therefore, once the processing in step S32 is completed, the processing in step S36 is performed. If the answer to step S40 is YES, this processing procedure proceeds to step S44.

[0082] Figure 12 is a flowchart showing the processing procedure of the fluid control device 10 when switching from isolation mode to operation mode. This processing procedure is performed by the processing circuit 60 of the fluid control device 10 executing a program stored in the storage device 62.

[0083] The codes assigned to the steps in the processing procedure shown in Figure 12 correspond to some of the codes assigned to the steps in the processing procedure shown in Figure 7. Since the same processing is performed in steps where the codes match, the explanation of the processing for each step shown in Figure 12 is omitted. The flowchart shown in Figure 12 does not include step S64 shown in Figure 7. Therefore, once the processing of step S62 is completed, the processing of step S66 is performed.

[0084] (Modification 2) In the above embodiment, when a second predetermined time TM2 has elapsed while in standby mode, the standby mode is switched to isolation mode. In the fluid control device 10 according to Modification 2, if the operator prohibits the transition to isolation mode, the standby mode is maintained even if a second predetermined time TM2 has elapsed while in standby mode.

[0085] Figure 13 is a flowchart illustrating the fluid control process performed by the fluid control device 10 when an instruction C4 to prohibit transition to isolation mode is received. This process is carried out by the processing circuit 60 of the fluid control device 10 executing a program stored in the storage device 62. Some of the codes assigned to the steps of this process shown in Figure 13 correspond to the codes assigned to the steps of the process shown in Figure 6. Since the same process is performed in steps where the codes match, the explanation of the process in those steps is omitted.

[0086] Unlike Figure 6, Figure 13 includes the additional step S80. If the result in step S40 is YES, the process proceeds to step S80. In step S80, the pressure regulating valve control unit 76 determines whether the interface unit 70 has received the operator's instruction C4. Instruction C4 indicates that transition to isolation mode is prohibited.

[0087] If the answer in step S80 is YES, this procedure ends. Therefore, even if the second predetermined time TM2 elapses during standby mode, the standby mode is maintained. If the answer in step S80 is NO, this procedure proceeds to step S42.

[0088] (Variation 3) In the fluid control device 10 according to Modification 3, when the operator instructs the device to return to standby mode, the isolation mode is switched to standby mode.

[0089] Figure 14 is a flowchart illustrating the fluid control process performed by the fluid control device 10 when switching from isolation mode to standby mode. This process is carried out by the processing circuit 60 of the fluid control device 10 executing a program stored in the storage device 62. Some of the codes assigned to the steps in this process shown in Figure 14 correspond to the codes assigned to the steps in the process shown in Figure 7. Since the same process is performed in steps where the codes match, the explanation of the process in those steps is omitted.

[0090] Unlike Figure 7, Figure 14 includes additional steps S90, S92, S94, and S96. If the result in step S60 is NO, the process proceeds to step S90. In step S90, the shut-off valve control unit 80 determines whether the interface unit 70 has received the operator's instruction C5. Instruction C5 indicates that the operator has instructed the system to return to standby mode. If the result in step S90 is YES, the process proceeds to step S92. If the result in step S90 is NO, the process returns to step S60.

[0091] In step S92, the shut-off valve control unit 80 controls the shut-off valve 54 to open it. In the subsequent process, when the pressure regulating valve 50 opens, the fluid output from the pressure regulating valve 50 is supplied to the external device 42.

[0092] In step S94, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 to increase the fluid pressure P output from the pressure regulating valve 50 from atmospheric pressure PA to a second pressure P2 according to a predetermined rate of increase over time. In step S96, the pressure regulating valve control unit 76 controls the pressure regulating valve 50 so that the fluid is output from the pressure regulating valve 50 at the second pressure P2. Once the processing in step S96 is complete, this processing procedure ends. The valve module 20 operates in standby mode.

[0093] (Modification 4) In the above embodiment, if the flow rate F acquired during operation mode is determined to be continuously below the threshold FT for a first predetermined time TM1 or longer, and the operator permits the standby mode, the operation mode is switched to the standby mode. In the fluid control device 10 according to Modification 4, if the operator has prohibited the transition to the standby mode in advance, the operation mode is maintained.

[0094] Figure 15 is a flowchart illustrating the fluid control processing procedure performed by the fluid control device 10 when an instruction C3 to prohibit transition to standby mode is received. This procedure is performed by the processing circuit 60 of the fluid control device 10 executing a program stored in the storage device 62. Some of the codes assigned to the steps of this procedure shown in Figure 15 correspond to the codes assigned to the steps of the procedure shown in Figure 5. Since the same processing is performed in steps where the codes match, the explanation of the processing in those steps is omitted.

[0095] Unlike Figure 5, Figure 15 includes the additional step S100. If the result in step S16 is YES, the process proceeds to step S100. In step S100, the pressure regulating valve control unit 76 determines whether the interface unit 70 has received the operator's instruction C3. Instruction C3 indicates that transition to standby mode is prohibited.

[0096] If instruction C3 has been acquired in advance in operation mode, step S100 will be YES. If step S100 is YES, this process procedure ends. The valve module 20 operates in operation mode. If step S100 is NO, this process procedure proceeds to step S18.

[0097] (Variation 5) In the above embodiment, the pressure regulating valve 50 is a proportional control valve that adjusts the fluid pressure in response to an electrical signal. The pilot valve of the pressure regulating valve 50 operates in response to an electrical signal output by the pressure regulating valve control unit 76. The pressure regulating valve control unit 76 that operates the pilot valve of the pressure regulating valve 50 may be mounted integrally with the housing of the pressure regulating valve 50. In other words, the pressure regulating valve control unit 76 and the pressure regulating valve 50 may be an integrated module MR.

[0098] Similarly, the shut-off valve control unit 80 and the shut-off valve 54 may be an integrated module MS. The interface unit 70, timing unit 72, flow rate determination unit 74, and flow rate acquisition unit 78 and the flow rate meter 52 may be an integrated module MM. Modules MR, MS, and MM are interchangeable.

[0099] For example, an old module MR currently in use can be replaced with a new module MR. An old module MS currently in use can be replaced with a new module MS. An old module MM currently in use can be replaced with a new module MM.

[0100] In the above modified example 1, the pilot valve 50p of the pressure regulating valve 50A operates in response to electrical signals corresponding to ON and OFF states. The pressure regulating valve control unit 76 that operates the pilot valve 50p of the pressure regulating valve 50A may be integrated with the housing of the main valve 50m and the pilot valve 50p of the pressure regulating valve 50A. In other words, the pressure regulating valve control unit 76 and the pressure regulating valve 50A may be an integrated module MP.

[0101] Similarly, the shut-off valve control unit 80, the shut-off valve 54, the throttle valve 100, and the switching valve 102 may be an integrated module MG. The interface unit 70, the timing unit 72, the flow rate determination unit 74, and the flow rate acquisition unit 78, and the flow rate meter 52 may be an integrated module MM. Modules MP, MG, and MM are interchangeable.

[0102] For example, an old module MP currently in use can be replaced with a new module MP. An old module MG currently in use can be replaced with a new module MG. An old module MM currently in use can be replaced with a new module MM.

[0103] (Experimental variation 6) The flow meter 52 may measure the temperature and pressure of the fluid in addition to the flow rate F of the fluid passing through the valve module 20. The flow acquisition unit 78 acquires the flow rate F, temperature, and pressure measured by the flow meter 52 from the flow meter 52. The flow acquisition unit 78 can acquire the integrated flow rate by performing calculations using the flow rate F acquired from the flow meter 52.

[0104] The interface unit 70 notifies the operator terminal 90 of information regarding the fluid flow rate F, cumulative flow rate, temperature, and pressure, as well as other information. Other information notified to the operator from the interface unit 70 includes information on the operating status of the valve module 20 and information on the body size of the fluid pressure supply device 30.

[0105] The processing circuit of the operator terminal 90 outputs the information notified by the fluid control device 10 to the display device of the operator terminal 90 by executing a program stored in the storage device of the operator terminal 90. The processing circuit of the operator terminal 90 outputs a suggested screen for a new fluid pressure supply device 30 with a body size that matches the information notified by the fluid control device 10 to the display device of the operator terminal 90 by executing a program stored in the storage device of the operator terminal 90.

[0106] [Invention obtained from the embodiment] The inventions that can be understood from the above embodiments and modified examples are described below.

[0107] (1) A fluid control device (10) controls a valve module (20) comprising a pressure regulating valve (50) capable of adjusting the pressure of the fluid supplied from a fluid supply source (40), and a shut-off valve (54) capable of shutting off the supply of the fluid output from the pressure regulating valve to an external device (42), and includes a flow rate acquisition unit (78) that acquires the flow rate (F) of the fluid passing through the valve module from a flow rate measuring instrument (52), a flow rate determination unit (74) that determines whether the acquired flow rate is continuously below a threshold (FT) for a first predetermined time (TM1) or longer, and the flow rate acquired during an operation mode in which the fluid is output from the pressure regulating valve at a first pressure (P1) However, if it is determined that the pressure remains below the threshold for a specified period of time or longer, and the operator permits the standby mode, the fluid control device includes a pressure control valve control unit (76) that controls the pressure control valve so that the fluid is output from the pressure control valve at a second pressure (P2) lower than the first pressure, thereby switching the operation mode to the standby mode. If a second predetermined period (TM2) has elapsed during the standby mode, the shut-off valve control unit (80) that controls the shut-off valve so that the supply of the fluid output from the pressure control valve to the external device is shut off, thereby switching the standby mode to the isolation mode. As a result, the fluid control device can supply fluid to the external device at a lower pressure than usual, and can also stop the fluid supply to the external device. Since the fluid supply is automatically stopped, fluid can be saved if the operation of the external device is stopped for a long period of time.

[0108] (2) The fluid output from the pressure regulating valve flows out from the outlet of the valve module and is supplied to the external device, and the shut-off valve control unit may control the shut-off valve to shut off the supply of the fluid to the external device and open the outlet of the valve module to the atmosphere. This allows the pressure at the outlet of the valve module to be rapidly reduced.

[0109] (3) In the isolation mode, if the operator instructs to return to the operation mode, the pressure regulating valve control unit may control the pressure regulating valve to output the fluid at the first pressure from the pressure regulating valve, and the shut-off valve control unit may control the shut-off valve to supply the fluid output from the pressure regulating valve to the external device. This allows switching from the isolation mode to the operation mode at an appropriate timing.

[0110] (4) In the isolation mode, if the operator instructs the system to return to the standby mode, the shut-off valve control unit may control the shut-off valve to release the shut-off of the fluid. This allows the supply of fluid to the external device at the first pressure to be resumed at an appropriate time.

[0111] (5) If the operator is prohibited from transitioning to the isolation mode, the shut-off valve control unit does not need to switch the standby mode to the isolation mode even if the second predetermined time has elapsed during the standby mode. This makes it possible to shorten the time to return to the operation mode even if the operation of the external device is stopped for a long period of time.

[0112] (6) If the standby mode is prohibited by the operator, the pressure regulating valve control unit may control the pressure regulating valve to output the fluid from the pressure regulating valve at the first pressure, thereby switching the standby mode back to the operation mode. This allows for the rapid resumption of the fluid supply to the external device at the first pressure.

[0113] (7) If the operator is prohibited from switching to the standby mode, the pressure regulating valve control unit does not need to switch the operation mode to the standby mode even if it is determined that the flow rate acquired during the operation mode has been continuously below the threshold for a first predetermined time or longer. This makes it possible to maintain the supply of fluid to the external device at the first pressure.

[0114] (8) The pressure regulating valve is a proportional control valve that adjusts the pressure of the fluid in accordance with an electrical signal, and in the isolation mode, the pressure regulating valve control unit may control the pressure regulating valve to close it. This prevents deterioration of the components constituting the valve module.

[0115] (9) The pressure regulating valve is a proportional control valve that adjusts the pressure of the fluid in response to an electrical signal, and the pressure regulating valve control unit may control the pressure regulating valve to increase the pressure of the fluid adjusted by the pressure regulating valve according to a predetermined rate of increase over time. This enables a soft startup function. If the external device to which the fluid is supplied has a cylinder, it is possible to prevent the rod from jumping out due to a sudden change in pressure.

[0116] (10) The valve module has a throttle valve (100) and a switching valve (102) between the pressure regulating valve and the shut-off valve, and the switching valve may, depending on the pressure of the fluid flowing out from the shut-off valve to the external device, either flow the fluid output from the pressure regulating valve to the shut-off valve via the throttle valve, or flow it to the shut-off valve without going through the throttle valve. This enables a soft startup function. If the external device to which the fluid is supplied has a cylinder, it is possible to prevent the rod from jumping out due to a sudden pressure change.

[0117] (11) The fluid pressure supply device (30) comprises the fluid control device and the valve module. This makes it possible to provide a fluid pressure supply device that automatically stops the supply of fluid to an external device that is stopped for a long period of time.

[0118] (12) A fluid control method for controlling a valve module (20) comprising a pressure regulating valve (50) capable of adjusting the pressure of a fluid supplied from a fluid supply source (40), and a shut-off valve (54) capable of shutting off the supply of the fluid output from the pressure regulating valve to an external device (42), includes a flow rate acquisition step of acquiring the flow rate (F) of the fluid passing through the valve module from a flow rate measuring instrument (52), a flow rate determination step of determining whether the acquired flow rate is continuously below a threshold (FT) for a first predetermined time (TM1) or longer, and a step of determining whether the flow rate acquired during the operation mode in which the fluid is output from the pressure regulating valve at a first pressure (P1) is The system includes a first pressure regulating valve control step, which, if it is determined that the pressure remains below the threshold for a specified period of time or longer and the operator permits the standby mode, controls the pressure regulating valve so that the fluid is output from the pressure regulating valve at a second pressure (P2) lower than the first pressure, thereby switching the operation mode to the standby mode; and a first shut-off valve control step, which, if a second specified period (TM2) has elapsed during the standby mode, controls the shut-off valve so that the supply of the fluid output from the pressure regulating valve to the external device is shut off, thereby switching the standby mode to the isolation mode. This makes it possible to supply fluid to the external device at a lower pressure than usual, and also makes it possible to stop the fluid supply to the external device. Since the fluid supply is automatically stopped, fluid can be saved when the operation of the external device is stopped for a long period of time.

[0119] (13) The fluid control method may further include, in the isolation mode, a second pressure regulating valve control step of controlling the pressure regulating valve so that the fluid is output from the pressure regulating valve at the first pressure when the operator instructs the operator to return to the operation mode, and a second shut-off valve control step of controlling the shut-off valve so that the fluid output from the pressure regulating valve is supplied to the external device when the second pressure regulating valve control step is performed. This makes it possible to switch from the isolation mode to the operation mode at an appropriate timing.

[0120] Furthermore, the present invention is not limited to the disclosure described above, and can take various configurations without departing from the spirit of the invention. [Explanation of Symbols]

[0121] 10…Fluid control device 20…Valve module 30... Fluid pressure supply device 40... Fluid supply source 42...External device 50...Pressure regulating valve 52... Flow meter 54... Shut-off valve 60…Processing circuit 62…Memory device 70...Interface unit 72...Timekeeping unit 74...Flow rate determination unit 76...Pressure regulating valve control unit 78...Flow rate acquisition unit 80...Shut-off valve control unit 90...Operator terminal 100...Throttle valve 102... Switching valve

Claims

1. A pressure regulating valve (50) capable of adjusting the pressure of the fluid supplied from a fluid supply source (40), A shut-off valve (54) capable of shutting off the supply of the fluid output from the pressure regulating valve to the external device (42), A fluid control device (10) that controls a valve module (20) equipped with, A flow rate acquisition unit (78) acquires the flow rate (F) of the fluid passing through the valve module from a flow rate measuring instrument (52), A flow rate determination unit (74) determines whether the acquired flow rate is continuously below a threshold (FT) for a first predetermined time (TM1) or longer, A pressure regulating valve control unit (76) controls the pressure regulating valve so that the fluid is output from the pressure regulating valve at a second pressure (P2) lower than the first pressure, and switches the operation mode to the standby mode, if the flow rate acquired during the operation mode in which the fluid is output from the pressure regulating valve at a first pressure (P1) is determined to be continuously below the threshold for a first predetermined time or longer, and the operator permits the standby mode. If a second predetermined time (TM2) elapses during the standby mode, the shut-off valve control unit (80) controls the shut-off valve to shut off the supply of the fluid output from the pressure regulating valve to the external device, thereby switching the standby mode to isolation mode. A fluid control device equipped with the following features.

2. A fluid control device according to claim 1, The fluid output from the pressure regulating valve flows out from the outlet of the valve module and is supplied to the external device. The shut-off valve control unit controls the shut-off valve to shut off the supply of the fluid to the external device and to open the outlet of the valve module to the atmosphere, and is a fluid control device.

3. A fluid control device according to claim 1, In the isolation mode, when the operator instructs the return to the operation mode, the pressure regulating valve control unit controls the pressure regulating valve to output the fluid at the first pressure from the pressure regulating valve, and the shut-off valve control unit controls the shut-off valve to supply the fluid output from the pressure regulating valve to the external device, in a fluid control device.

4. A fluid control device according to claim 1, In the isolation mode, when the operator instructs the return to the standby mode, the shut-off valve control unit controls the shut-off valve to release the shut-off of the fluid, a fluid control device.

5. A fluid control device according to claim 1, A fluid control device in which, if the operator is prohibited from transitioning to the isolation mode, the shut-off valve control unit does not switch the standby mode to the isolation mode even if the second predetermined time has elapsed during the standby mode.

6. A fluid control device according to claim 1, In the standby mode, if the operator prohibits the standby mode, the pressure regulating valve control unit controls the pressure regulating valve to output the fluid from the pressure regulating valve at a first pressure, thereby switching the standby mode to the operation mode, a fluid control device.

7. A fluid control device according to claim 1, If the operator is prohibited from switching to the standby mode, the pressure regulating valve control unit does not switch the operation mode to the standby mode even if it is determined that the flow rate acquired during the operation mode has been continuously below the threshold for a first predetermined time or longer.

8. A fluid control device according to claim 1, The pressure regulating valve is a proportional control valve that adjusts the pressure of the fluid in accordance with an electrical signal. In the isolation mode, the pressure regulating valve control unit controls the pressure regulating valve to close it, a fluid control device.

9. A fluid control device according to claim 1, The pressure regulating valve is a proportional control valve that adjusts the pressure of the fluid in accordance with an electrical signal. The pressure regulating valve control unit controls the pressure regulating valve to increase the pressure of the fluid regulated by the pressure regulating valve according to a predetermined rate of increase over time.

10. A fluid control device according to claim 3, The valve module has a throttle valve (100) and a switching valve (102) between the pressure regulating valve and the shut-off valve. The switching valve is a fluid control device that, in accordance with the pressure of the fluid flowing out of the shut-off valve to the external device, causes the fluid output from the pressure regulating valve to flow to the shut-off valve via the throttle valve, or causes it to flow to the shut-off valve without going through the throttle valve.

11. A fluid control device according to any one of claims 1 to 10, The valve module and, A fluid pressure supply device (30) is provided.

12. A pressure regulating valve (50) capable of adjusting the pressure of the fluid supplied from a fluid supply source (40), A shut-off valve (54) capable of shutting off the supply of the fluid output from the pressure regulating valve to the external device (42), A fluid control method for controlling a valve module (20) equipped with the following: A flow rate acquisition step is performed to obtain the flow rate (F) of the fluid passing through the valve module from a flow rate measuring instrument (52), A flow rate determination step that determines whether the acquired flow rate is continuously below a threshold (FT) for a first predetermined time (TM1) or longer, A first pressure regulating valve control step is performed to switch the operation mode to the standby mode by controlling the pressure regulating valve so that the fluid is output from the pressure regulating valve at a second pressure (P2) lower than the first pressure, if the flow rate acquired during the operation mode in which the fluid is output from the pressure regulating valve at a first pressure (P1) is determined to be continuously below the threshold for a first predetermined time or longer, and the operator permits the standby mode. If a second predetermined time (TM2) has elapsed during the standby mode, a first shut-off valve control step is performed to control the shut-off valve so that the supply of the fluid output from the pressure regulating valve to the external device is cut off, thereby switching the standby mode to isolation mode. A fluid control method comprising:

13. A fluid control method according to claim 12, In the isolation mode, when the operator instructs the return to the operation mode, a second pressure regulating valve control step controls the pressure regulating valve so that the fluid is output from the pressure regulating valve at a first pressure, When the second pressure regulating valve control step is performed, a second shut-off valve control step is performed to control the shut-off valve so that the fluid output from the pressure regulating valve is supplied to the external device, A fluid control method that further includes these features.

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