Optical deflection device and measuring device

Abstract

This optical deflection device comprises: a first mirror unit having a first mirror surface which is a reflection surface that reflects light; a second mirror unit facing the first mirror unit and having a second mirror surface which is a reflection surface that reflects light; and a support section connecting the first mirror unit and the second mirror unit while supporting the same in a swingable manner around a movable shaft. The first mirror surface and the second mirror surface are respectively disposed on surfaces different from the surfaces of the first mirror unit and the second mirror unit where the same are connected to the support section.

Description

Light deflection device and ranging device CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims priority to Japanese Patent Application No. 2022-57703, filed on March 30, 2022, the entire disclosure of which is incorporated herein by reference.

[0002] The present disclosure relates to an optical deflection device and a distance measuring device.

[0003] In recent years, devices have been developed that acquire information about surrounding objects and the like from the results of detecting electromagnetic waves such as light. For example, radar devices are known that measure the distance to a specific object by emitting laser light or the like and receiving waves reflected by the object. As an optical deflection device included in such devices, a MEMS (Micro Electro Mechanical Systems) mirror capable of wide-angle scanning and excellent angular resolution may be adopted. For example, Patent Document 1 discloses a configuration in which multiple MEMS mirrors are arranged in a matrix on a base, and each MEMS mirror is supported so as to protrude from the base. Patent Document 2 discloses an optical deflector in which multiple mirrors that deflect laser light are oscillated by a piezoelectric actuator, and each mirror is supported by a support column so as to protrude from a support base. Patent Document 3 discloses an optical scanning device that scans light deflected by an optical deflector.

[0004] JP 2016-71145 A JP 2016-110008 A JP 2009-210947 A

[0005] An optical deflection device according to one embodiment includes: a first mirror section having a first mirror surface that is a reflective surface that reflects light; a second mirror section facing the first mirror section and having a second mirror surface that is a reflective surface that reflects light; and a support section that connects the first mirror section and the second mirror section and supports them so that they can swing around a movable axis. The first mirror surface and the second mirror surface are arranged on a plane different from the plane where the first mirror section and the second mirror section are connected to the support section.

[0006] A distance measuring device according to one embodiment includes the optical deflection device according to the embodiment described above; a first irradiating unit that irradiates light onto the first mirror unit; a second irradiating unit that irradiates light onto the second mirror unit; a first detecting unit that receives the light deflected by the first mirror unit and reflected by an object, by reflecting it at the first mirror unit; and a second detecting unit that receives the light deflected by the second mirror unit and reflected by the object, by reflecting it at the second mirror unit.

[0007] FIG. 1 is a diagram showing a schematic configuration of an optical deflection device and a distance measuring device according to the first embodiment; FIG. 2 is a top view of the optical deflection device according to the first embodiment; FIG. 3 is a top view focusing on the mirror portion of the optical deflection device according to the first embodiment; FIG. 4 is a block diagram showing the functional configuration of the distance measuring device according to the first embodiment; FIG. 5 is a block diagram showing the functional configuration of the distance measuring device according to the second embodiment; FIG. 6 is a diagram showing the schematic configuration of a modified example of the distance measuring device according to the second embodiment;

[0008] In the optical deflection device or optical scanning device described above, it is desirable to be able to detect the deflection angle of the mirror with high accuracy. An object of the present disclosure is to provide an optical deflection device capable of detecting the deflection angle of the mirror with high accuracy, and a distance measuring device including such an optical deflection device. According to one embodiment, it is possible to provide an optical deflection device capable of detecting the deflection angle of the mirror with high accuracy, and a distance measuring device including such an optical deflection device. Hereinafter, an optical deflection device and a distance measuring device according to an embodiment of the present disclosure will be described with reference to the drawings.

[0009] First Embodiment FIGS. 1 to 3 are diagrams showing examples of the configuration of an optical deflection device and a distance measuring device according to a first embodiment.

[0010] As shown in FIG. 1, the optical deflection device 1 according to the first embodiment includes a first mirror section 10, a second mirror section 20, and a support section 30.

[0011] FIG. 1 is a side view of the optical deflection device 1 as viewed from the side (from a viewpoint in the positive direction of the Y-axis). FIG. 2 is a top view of the optical deflection device 1, including the first mirror unit 10, the substrate 40, the drive unit 94, the first frame 95, the second frame 96, and the connection unit 97, as viewed from above (from a viewpoint in the negative direction of the Z-axis). FIG. 3 is a diagram showing a partially enlarged view of the configuration of FIG. 2. FIG. 3 is a top view of the first mirror unit 10, the first torsion bar 91, and the second torsion bar 92 as viewed from above (from a viewpoint in the negative direction of the Z-axis). In this specification, the Z-axis direction refers to a direction perpendicular to the substrate 40. The Y-axis direction refers to a direction in which a movable axis P, described later, extends. The X-axis direction refers to a direction perpendicular to the Y-axis direction.

[0012] The first mirror unit 10 may include a first mirror surface 12. The first mirror surface 12 may have, for example, a reflective surface that reflects electromagnetic waves such as light. The first mirror surface 12 may be disposed in a direction that includes a component in the positive Z-axis direction relative to the substrate 40. The first mirror surface 12 reflects electromagnetic waves that include a component in the negative Z-axis direction, toward a direction that includes a component in the positive Z-axis direction. The first mirror surface 12 may be any surface that reflects electromagnetic waves such as light, as used in conventional general MEMS mirrors, for example. At least a portion of the reflective surface of the first mirror surface 12 may be planar. At least a portion of the reflective surface of the first mirror surface 12 may be curved.

[0013] The second mirror unit 20 may include a second mirror surface 22. The second mirror surface 22 may have, for example, a reflective surface that reflects electromagnetic waves such as light. The second mirror surface 22 may be disposed in a direction that includes a component in the negative Z-axis direction relative to the substrate 40. The second mirror surface 22 reflects electromagnetic waves that include a component in the positive Z-axis direction, toward a direction that includes a component in the negative Z-axis direction. The second mirror surface 22 may be any surface that reflects electromagnetic waves such as light, and is used in, for example, conventional general MEMS mirrors. At least a portion of the reflective surface of the second mirror surface 22 may be planar. At least a portion of the reflective surface of the second mirror surface 22 may be curved.

[0014] The first mirror portion 10 and / or the second mirror portion 20 may be formed of, for example, any material suitable for use as a MEMS mirror. The first mirror surface 12 and / or the second mirror surface 22 may be formed of, for example, any material suitable for use as a MEMS mirror.

[0015] The shape of the first mirror unit 10 and / or the second mirror unit 20 is not particularly limited and may be any shape. For example, the shape of the first mirror unit 10 and / or the second mirror unit 20 may be a square, a rectangle, a parallelogram, a polygon, a circle (disk), or the like when viewed from the Z-axis direction shown in FIG. 1 . The shape of the first mirror surface 12 and / or the second mirror surface 22 is not particularly limited and may be any shape. The shape of the first mirror surface 12 and / or the second mirror surface 22 may be a square, a rectangle, a parallelogram, a polygon, a circle (disk), or the like when viewed from the Z-axis direction shown in FIG. 1 .

[0016] The support portion 30 is formed in a columnar shape and has a first end 31 and a second end 32. The end of the support portion 30 facing in the positive direction of the Z axis is referred to as the first end 31, and the end of the support portion 30 facing in the negative direction of the Z axis is referred to as the second end 32.

[0017] The first mirror section 10 may be provided at a first end 31 of the support section 30. The second mirror section 20 may be provided at a second end 32 of the support section 30. The support section 30 may be made of any material that can withstand supporting the first mirror section 10 and the second mirror section 20, such as a MEMS mirror. Furthermore, the shape of the support section 30 is not limited to that shown in FIG. 1 and may be various other shapes. The support section 30 may have any shape, such as a cylinder or a rectangular prism.

[0018] The movable axis P about which the first mirror section 10 and the second mirror section 20 oscillate is located between the first end 31 and the second end 32 of the support section 30. The movable axis P includes a first torsion bar 91 extending in the positive direction of the Y-axis and a second torsion bar 92 extending in the negative direction of the Y-axis. The first mirror section 10 and the second mirror section 20 may oscillate about the movable axis P as a rotation axis. The support section 30 supports the first mirror section 10 and the second mirror section 20 so that they can oscillate around the movable axis P.

[0019] The movable axis P may be, for example, an axis parallel to the Y axis. The support portion 30 may extend in a direction perpendicular to the reflecting surface of the first mirror surface 12. The support portion 30 may extend in a direction perpendicular to the reflecting surface of the second mirror surface 22. The movable axis P may extend in a direction parallel to the reflecting surface of the first mirror surface 12. The movable axis P may extend in a direction parallel to the reflecting surface of the second mirror surface 22. The first mirror portion 10 and the second mirror portion 20 may swing in the directions of arrows S1 and S2 shown in FIG. 1. The first mirror portion 10 and the second mirror portion 20 may be supported by the support portion 30 so as to be able to swing relative to the substrate 40. The substrate 40 may include the movable axis P. The substrate 40 may appropriately include a drive portion 94 or a drive circuit that drives the support portion 30, the first mirror portion 10, and the second mirror portion 20. The driving unit 94 is connected to the movable axis P and drives the first mirror unit 10 and the second mirror unit 20. The first mirror unit 10 and the second mirror unit 20 may be driven by a piezoelectric element disposed in the driving unit 94, which deforms the driving unit 94, causing the first mirror unit 10 and the second mirror unit 20 to oscillate around the movable axis P as the axis of rotation. The method for driving the first mirror unit 10 and the second mirror unit 20 is not limited to the method using a piezoelectric element, and any method such as an electrostatic method or an electromagnetic method may be used.

[0020] The first mirror section 10 and the second mirror section 20 may be positioned at positions facing each other across the substrate 40. The reflective surface of the first mirror surface 12 and the reflective surface of the second mirror surface 22 may be positioned in orientations that include components in opposite directions, such as on the positive Z-axis side and the negative Z-axis side, respectively, with respect to the substrate 40.

[0021] The support portion 30 includes a first portion 30A and a second portion 30B. The first portion 30A includes a first end 31. The second portion 30B includes a second end 32. The first portion 30A is provided on the positive side of the movable axis P in the Z-axis direction, and the second portion 30B is provided on the negative side of the movable axis P in the Z-axis direction.

[0022] The first mirror section 10 may, for example, protrude perpendicularly from a predetermined movable axis P and be connected to the first portion 30A. The second mirror section 20 may, for example, protrude perpendicularly from the predetermined movable axis P and be connected to the second portion 30B.

[0023] Since the first mirror section 10 and the second mirror section 20 are connected to the support section 30, the deflection angles of the first mirror section 10 and the second mirror section 20 are linked. The absolute values ​​of the deflection angles of the first mirror section 10 and the second mirror section 20 may be the same.

[0024] The first mirror section 10 and the second mirror section 20 may be arranged parallel to each other. The first mirror section 10 and the second mirror section 20 may be arranged non-parallel to each other.

[0025] 3, the first torsion bar 91 and the second torsion bar 92 are connected to a support portion 30 that supports the first mirror portion 10. In FIG. 3, the portions hidden by the first mirror portion 10 are indicated by dashed lines.

[0026] As shown in FIG. 2 , the driver 94 includes a rectangular second frame body 96 formed to surround the support unit 30 and a connecting portion 97 connecting the second frame body 96 and the first frame body 95. The connecting portion 97 may have a bent shape with multiple folds. The first torsion bar 91 and the second torsion bar 92 are connected to the second frame body 96 of the driver 94. The first torsion bar 91 and the second torsion bar 92 are respectively connected to opposing sides of the second frame body 96 of the driver 94. The first mirror unit 10 is connected to the first end 31 of the support unit 30, and is thereby connected to the driver 94 via the first torsion bar 91 and the second torsion bar 92. The second mirror unit 20 is connected to the second end 32 of the support unit 30, and is thereby connected to the driver 94 via the first torsion bar 91 and the second torsion bar 92.

[0027] A piezoelectric element is disposed on the connection portion 97. The first torsion bar 91 and the second torsion bar 92 support the support portion 30 so that it can oscillate. The support portion 30 supports the first mirror portion 10 at a first end 31. The support portion 30 supports the second mirror portion 20 at a second end 32. The support portion 30 oscillates around the axes of the first torsion bar 91 and the second torsion bar 92, causing the first mirror portion 10 and the second mirror portion 20 to oscillate. The piezoelectric element causes bending of at least the connection portion 97, causing the first mirror portion 10 and the second mirror portion 20 to oscillate. The first frame body 95 may be fixed to the substrate 40, for example.

[0028] In addition to the above-described optical deflection device 1, the distance measuring device 3 may appropriately include an irradiation unit 60, a detection unit 70, and the like. The irradiation unit 60 may include, for example, a light source that outputs electromagnetic waves such as laser light. The light source may be, for example, a laser diode. The detection unit 70 may include a functional unit that detects light incident on the distance measuring device 3. The functional unit that detects light may be, for example, a photodiode.

[0029] The detection unit 70 may include an avalanche photodiode, which is a photodiode that has increased light-receiving sensitivity through avalanche multiplication.

[0030] The first mirror section 10 may reflect the light irradiated from the irradiation section 60 and output the light to the outside from the optical deflection device 1. The first mirror section 10 may reflect the light irradiated from the irradiation section 60. The first mirror section 10 may, for example, reflect the light irradiated from the irradiation section 60 and output the light to the outside of the optical deflection device 1.

[0031] The distance measuring device 3 may include a first fixed mirror 51. The first fixed mirror 51 may be disposed at an angle with respect to the reflecting surface of the first mirror unit 10. The first fixed mirror 51 can reflect light irradiated from the irradiation unit 60 and / or light reflected by the first mirror unit 10. The first fixed mirror 51 may be a half mirror. For example, the first fixed mirror 51 may transmit a portion of the light irradiated from the irradiation unit 60 and reflect a portion of the light reflected by the first mirror unit 10.

[0032] The second mirror section 20 may reflect light received by the optical deflection device 1. The second mirror section 20 may reflect light taken in from outside the optical deflection device 1 toward the detection section 70. The second mirror section 20 may reflect light detected by the detection section 70. For example, the second mirror section 20 may reflect light taken in from outside the optical deflection device 1 toward the detection section 70.

[0033] The distance measuring device 3 may include a second fixed mirror 52. The second fixed mirror 52 may be disposed at an angle with respect to the reflecting surface of the second mirror section 20. The second fixed mirror 52 can reflect light taken in from outside the optical deflection device 1 and / or light reflected by the second mirror section 20. The second fixed mirror 52 may be a half mirror. For example, the second fixed mirror 52 may reflect a portion of the light taken in from outside the optical deflection device 1 and transmit a portion of the light reflected by the second mirror section 20.

[0034] The distance measuring device 3 may include a drive unit 94 or a drive circuit for driving the optical deflection device 1, a housing, a lid, etc. These members are not shown in the drawings.

[0035] The light emitted by the irradiation unit 60 may be reflected by the first mirror unit 10 and scan the space outside the distance measuring device 3. The light reflected by the first mirror unit 10 may be reflected by the first fixed mirror 51 and irradiated onto an object. The reflected light irradiated onto the object and reflected therefrom enters the distance measuring device 3. The reflected light incident on the distance measuring device 3 is reflected by the second fixed mirror 52 and guided to the second mirror unit 20. The light guided to the second mirror unit 20 may be reflected by the second mirror unit 20 and enter the detection unit 70. The detection unit 70 may detect the reflected light reflected by the object. The detection unit 70 may measure the distance to the object based on the detected light.

[0036] The first mirror section 10 and the second mirror section 20 may be made of the same reflective material, or may be made of different reflective materials.

[0037] The first mirror section 10 and the second mirror section 20 may have the same mirror diameter, area, and shape. The first mirror section 10 and the second mirror section 20 may have different mirror diameters, areas, and shapes.

[0038] The area of ​​the reflective surface of the first mirror unit 10 and the area of ​​the reflective surface of the second mirror unit 20 may be the same. The area of ​​the reflective surface of the first mirror unit 10 and the area of ​​the reflective surface of the second mirror unit 20 may be different. The area of ​​the reflective surface of the second mirror unit 20 may be configured to be larger than the area of ​​the reflective surface of the first mirror unit 10. The reflective surface of the second mirror unit 20, which is larger than the reflective surface of the first mirror unit 10, can capture more reflected light, and more reflected light enters the detection unit 70, improving the sensitivity of the detection unit 70.

[0039] The mass of the first mirror section 10 and the mass of the second mirror section 20 may be the same. The mass of the first mirror section 10 and the mass of the second mirror section 20 may be different. The mass of the second mirror section 20 may be greater than the mass of the first mirror section 10. By making the mass and / or area of ​​the second mirror section 20 greater than that of the first mirror section 10, it is possible to maintain a state in which the resonance frequencies of the first mirror section 10 and the second mirror section 20 do not become too low. The frame rate of scanning by light reflected from the first mirror section 10 becomes relatively high.

[0040] The predetermined movable axis P may be a virtual one with no substance. The predetermined movable axis P may be a substance such as the first torsion bar 91 and / or the second torsion bar 92. The method for driving the first mirror unit 10 and the second mirror unit 20 may be any method, such as a piezoelectric method, an electrostatic method, or an electromagnetic method. The first mirror unit 10 and the second mirror unit 20 may be driven by a single axis having only the movable axis P. The first mirror unit 10 and the second mirror unit 20 may be driven by two or more axes having an additional movable axis in addition to the movable axis P.

[0041] The optical deflection device 1 may include a first mirror unit 10, a second mirror unit 20, and a support unit 30. The first mirror unit 10 has a first mirror surface 12 that is a reflective surface that reflects light. The second mirror unit 20 faces the first mirror unit 10 and has a second mirror surface 22 that is a reflective surface that reflects light. The support unit 30 connects the first mirror unit 10 and the second mirror unit 20 and supports them so that they can swing around a movable axis P. The first mirror surface 12 and the second mirror surface 22 may be arranged on a plane different from the plane where the first mirror unit 10 and the second mirror unit 20 are connected to the support unit 30.

[0042] For the sake of simplicity, the optical deflection device 1 is shown as having only one first mirror section 10 and one second mirror section 20. The optical deflection device 1 may have two or more first mirror sections 10 and two or more second mirror sections 20. The optical deflection device 1 may also have a mirror array composed of a plurality of first mirror sections 10 and second mirror sections 20.

[0043] 4 is a block diagram showing the functional configuration of a distance measuring device 3 including the optical deflection device 1 according to the first embodiment. The distance measuring device 3 according to the embodiment will be described below.

[0044] 4 , a distance measuring device 3 according to one embodiment includes the above-described optical deflection device 1. The distance measuring device 3 includes an irradiation unit 60 and a detection unit 70. The distance measuring device 3 may also include a control circuit 98.

[0045] The irradiation unit 60 outputs electromagnetic waves such as infrared beams. At least a portion of the electromagnetic waves output by the irradiation unit 60 is deflected by the optical deflection device 1. At least a portion of the reflected waves, which are the electromagnetic waves deflected by the optical deflection device 1 and reflected by, for example, the object 100, enter the detection unit 70. The control circuit 98 may control the driving of the detection unit 70. The distance measuring device 3 may measure the distance to the object 100 based on the output timing of the electromagnetic waves output by the irradiation unit 60 and the incident timing of the reflected waves entering the detection unit 70.

[0046] Second Embodiment Fig. 5 is a diagram showing an example of the configuration of a distance measuring device according to a second embodiment. The optical deflection device according to the second embodiment will be described below.

[0047] 5 may be configured to include the same parts as those of the distance measuring device 3. Regarding the distance measuring device 3′ according to the second embodiment, the description of the same or similar parts as those of the distance measuring device 3 may be appropriately simplified or omitted.

[0048] The distance measuring device 3′ may include a first irradiating unit 61, a first detecting unit 71, and a first prism 81 on the first mirror unit 10 side. The distance measuring device 3′ may include a second irradiating unit 62, a second detecting unit 72, and a second prism 82 on the second mirror unit 20 side.

[0049] The first prism 81 and the second prism 82 may transmit light incident from a predetermined direction and reflect light incident from a direction different from the predetermined direction. The first prism 81 and the second prism 82 may be beam splitters.

[0050] The first mirror unit 10 may reflect light incident from the first irradiating unit 61 toward the outside from the optical deflection device 1. The first mirror unit 10 may reflect light irradiated from the first irradiating unit 61. The first mirror unit 10 may, for example, reflect light irradiated from the first irradiating unit 61 and output the light to the outside of the optical deflection device 1. The first mirror unit 10 may reflect light incident on the optical deflection device 1. The first mirror unit 10 may reflect light detected by the first detecting unit 71. The first mirror unit 10 may, for example, reflect light taken in from the outside of the optical deflection device 1 toward the first prism 81.

[0051] The second mirror section 20 may reflect light incident from the second irradiating section 62 toward the outside from the optical deflection device 1. The second mirror section 20 may reflect light irradiated from the second irradiating section 62. The second mirror section 20 may, for example, reflect light irradiated from the second irradiating section 62 and output the light outside the optical deflection device 1. The second mirror section 20 may reflect light incident on the optical deflection device 1. The second mirror section 20 may reflect light detected by the second detecting section 72. The second mirror section 20 may, for example, reflect light taken in from outside the optical deflection device 1 toward the second prism 82.

[0052] The first mirror section 10 and the second mirror section 20 may have the same area and / or mass, etc. The first mirror section 10 and the second mirror section 20 may have different areas and / or masses, etc.

[0053] The first mirror unit 10 and the second mirror unit 20 may be configured to have the same optical characteristics. The first mirror unit 10 and the second mirror unit 20 may be configured to have different optical characteristics. The mirrors of the first mirror unit 10 and the second mirror unit 20 may have different wavelengths and / or polarization directions of reflected light, thereby performing scanning and detection with different characteristics.

[0054] The optical characteristics of the first mirror unit 10 and the second mirror unit 20 can be various characteristics. The optical characteristics may be, for example, reflection characteristics including reflectance. Furthermore, the first mirror unit 10 and the second mirror unit 20 may have different reflectances for electromagnetic waves of a specific wavelength. The first mirror unit 10 or the second mirror unit 20 may have a higher reflectance for light with a wavelength of 905 nm than for other wavelengths. The first mirror unit 10 or the second mirror unit 20 may have a higher reflectance for light with a wavelength of 1550 nm than for other wavelengths. By changing the optical characteristics of the first mirror unit 10 and the second mirror unit 20, it is possible to reduce the incidence of light other than the specific wavelength on the first detection unit 71 and the second detection unit 72, thereby improving the sensitivity of the first detection unit 71 and the second detection unit 72.

[0055] For example, suppose the first irradiator 61 irradiates electromagnetic waves with a wavelength of 905 nm, and the second irradiator 62 irradiates electromagnetic waves with a wavelength of 1550 nm. The first mirror unit 10 has a higher reflectance for electromagnetic waves with a wavelength of 905 nm than the second mirror unit 20. The second mirror unit 20 also has a higher reflectance for electromagnetic waves with a wavelength of 1550 nm than the first mirror unit 10. In this case, electromagnetic waves with a wavelength of 1550 nm are less likely to be incident on the first detector 71. Similarly, electromagnetic waves with a wavelength of 905 nm are less likely to be incident on the second detector 72. That is, noise incident on the first detector 71 and the second detector 72 can be reduced.

[0056] By irradiating electromagnetic waves of different wavelengths from the first irradiating unit 61 and the second irradiating unit 62, it is possible to measure the distance to an object that has a low reflectivity for the electromagnetic waves irradiated from the first irradiating unit 61 using the electromagnetic waves irradiated from the second irradiating unit 62. In other words, it is possible to use different wavelengths of electromagnetic waves depending on the object to be measured. The distance measuring device 3′ may measure the distance to the object based on the detection result of the first detecting unit 71 or the second detecting unit 72 that detects the greater number of reflected waves from the electromagnetic waves irradiated from the first irradiating unit 61 and the second irradiating unit 62 toward the same position.

[0057] The first fixed mirror 51 can reflect light reflected by the first mirror unit 10. The first fixed mirror 51 may, for example, transmit a portion of the light irradiated from the first irradiating unit 61 and reflect a portion of the light reflected by the first mirror unit 10. The first fixed mirror 51 may, for example, reflect light taken in from outside the distance measuring device 3′ toward the first mirror unit 10 and transmit the light reflected by the first mirror unit 10.

[0058] The second fixed mirror 52 can reflect light reflected by the second mirror unit 20. The second fixed mirror 52 may, for example, transmit a portion of the light irradiated from the second irradiating unit 62 and reflect a portion of the light reflected by the second mirror unit 20. The second fixed mirror 52 may, for example, reflect light taken in from outside the distance measuring device 3′ toward the second mirror unit 20 and transmit the light reflected by the second mirror unit 20.

[0059] The distance measuring device 3′ may direct the light beams scanned by the first fixed mirror 51 and the second fixed mirror 52 in the same direction by adjusting the installation angle of the first fixed mirror 51. The distance measuring device 3′ may direct the light beams scanned by the first fixed mirror 51 and the second fixed mirror 52 in the same direction by adjusting the installation angle of the second fixed mirror 52.

[0060] The first irradiating section 61 may irradiate light at least a part of which is deflected by the first mirror section 10. The second irradiating section 62 may irradiate light at least a part of which is deflected by the second mirror section 20.

[0061] The first detector 71 may detect light reflected by the first mirror section 10. The second detector 72 may detect light reflected by the second mirror section 20.

[0062] A portion of the light irradiated by the first irradiator 61 passes through the first prism 81 and the first fixed mirror 51 and is reflected by the first mirror unit 10. The light reflected by the first mirror unit 10 may be reflected by the first fixed mirror 51 and irradiated onto an object present in the external space of the distance measuring device 3′. The reflected light irradiated onto the object and reflected therefrom enters the distance measuring device 3′. The reflected light incident on the distance measuring device 3′ is reflected by the first fixed mirror 51 and guided to the first mirror unit 10. The light guided to the first mirror unit 10 is reflected by the first mirror unit 10, passes through the first fixed mirror 51, and is guided to the first prism 81. The light guided to the first prism 81 may be reflected by the first prism 81 and enter the first detector 71. The first detector 71 may detect the reflected light reflected by the object. The first detector 71 may measure the distance to the object based on the detected light.

[0063] The light irradiated by the second irradiator 62 passes through the second prism 82 and the second fixed mirror 52 and is reflected by the second mirror unit 20. The light reflected by the second mirror unit 20 may be reflected by the second fixed mirror 52 and irradiated onto an object present in the external space of the distance measuring device 3′. The light irradiated onto the object and reflected therefrom enters the distance measuring device 3′. The reflected light incident on the distance measuring device 3′ is reflected by the second fixed mirror 52 and guided to the second mirror unit 20. The light guided to the second mirror unit 20 is reflected by the second mirror unit 20, passes through the second fixed mirror 52, and is guided to the second prism 82. The light guided to the second prism 82 may be reflected by the second prism 82 and enter the second detector 72. The second detector 72 may detect the reflected light reflected by the object. The second detector 72 may measure the distance to the object based on the detected light.

[0064] In the distance measuring device 3′ shown in FIG. 5 , a third detector (not shown) may be disposed at a position where electromagnetic waves irradiated from the second irradiator 62 and reflected by the second mirror 20 are incident. The second irradiator 62 may irradiate pulsed light or continuous light. The third detector may be a single detector element or multiple detector elements spaced apart from one another, and is disposed at a position where the electromagnetic waves reflected by the second mirror 20 are incident on the third detector when the second mirror 20 is at a predetermined angle. The control circuit 98 can calculate the swing angle of the second mirror 20 based on the timing at which the electromagnetic waves reflected by the second mirror 20 are incident on the third detector. Because the first mirror 10 and the second mirror 20 are connected to each other via the support 30, the swing angle of the first mirror 10 can be calculated based on the swing angle of the second mirror 20.

[0065] 6 is a block diagram showing the functional configuration of a distance measuring device 3' according to the second embodiment. The distance measuring device 3' according to the first embodiment will be described below.

[0066] 6 , the distance measuring device 3′ includes the above-described optical deflection device 1. The distance measuring device 3′ includes a first irradiating unit 61 and a first detecting unit 71. The distance measuring device 3′ includes a second irradiating unit 62 and a second detecting unit 72. The distance measuring device 3′ may also include a control circuit 98.

[0067] The first irradiator 61 outputs electromagnetic waves such as infrared beams. At least a portion of the electromagnetic waves output by the first irradiator 61 is deflected by the optical deflector 1. At least a portion of the reflected waves, which are the electromagnetic waves deflected by the optical deflector 1 and reflected by, for example, an object 100, enter the first detector 71. The control circuit 98 may control the driving of the first detector 71. The distance measuring device 3′ may measure the distance to the object 100 based on the output timing of the electromagnetic waves output by the first irradiator 61 and the incident timing of the reflected waves entering the first detector 71.

[0068] The second irradiator 62 outputs electromagnetic waves such as infrared beams. At least a portion of the electromagnetic waves output by the second irradiator 62 is deflected by the optical deflector 1. At least a portion of the reflected waves, which are the electromagnetic waves deflected by the optical deflector 1 and reflected by, for example, an object 100, are incident on the second detector 72. The control circuit 98 may control the driving of the second detector 72. The distance measuring device 3′ may measure the distance to the object 100 based on the output timing of the electromagnetic waves output by the second irradiator 62 and the incident timing of the reflected waves incident on the second detector 72.

[0069] FIG. 7 is a diagram showing an example of a variable configuration of the distance measuring device according to the second embodiment.

[0070] The ranging device 3" shown in Figure 7 may be configured to include parts similar to those of the ranging device 3' shown in Figure 5. With regard to the ranging device 3" relating to the modified example of the second embodiment, descriptions of the same or similar content as that of the ranging device 3' will be appropriately simplified or omitted.

[0071] The distance measuring device 3" may be a distance measuring device 3' in which the installation angle of the first fixed mirror 51 and / or the second fixed mirror 52, etc. is changed. The distance measuring device 3" may have a different angle of view of the light beam scanned via the first fixed mirror 51 and the light beam scanned via the second fixed mirror 52. The distance measuring device 3" may expand the angle of view of the scanned light beam.

[0072] Although the above-described embodiments have been described as typical examples, it will be apparent to those skilled in the art that many modifications and substitutions are possible within the spirit and scope of the present disclosure. Therefore, the present disclosure should not be interpreted as being limited by the above-described embodiments, and various modifications and alterations are possible without departing from the scope of the claims. For example, multiple building blocks shown in the block diagrams of the embodiments can be combined into one, or one building block can be divided.

[0073] In each of the above-described embodiments, light may be reflected by various mirrors, such as the first fixed mirror 51 and / or the second fixed mirror 52. With such a configuration, as described above, for example, in the distance measuring device 3' shown in FIG. 2, the scanning light beams may be directed in the same direction. In this case, the phases of the first mirror unit 10 and the second mirror unit 20 may be set to be the same phase or opposite phases. Such phase changes may be realized by various mirrors that reflect the respective scanning light beams.

[0074] In addition, in the various configurations shown in FIGS. 1 to 3, for example, a band-pass filter that passes only light of a predetermined wavelength may be provided as appropriate.

[0075] Furthermore, each of the above-described embodiments may be implemented as, for example, a scanning device including the optical deflection device 1. In this case, for example, the first mirror section 10 may reflect light emitted from the optical deflection device 1. Furthermore, the second mirror section 20 may reflect light received by the optical deflection device 1.

[0076] REFERENCE SIGNS LIST 1 Optical deflection device 3, 3', 3" Distance measuring device 10 First mirror section 12 First mirror surface 20 Second mirror section 22 Second mirror surface 30 Support section 30A First portion 30B Second portion 31 First end 32 Second end 40 Substrate 51 First fixed mirror 52 Second fixed mirror 60 Irradiation section 61 First irradiation section 62 Second irradiation section 70 Detection section 71 First detection section 72 Second detection section 81 First prism 82 Second prism 91 First torsion bar 92 Second torsion bar 94 Drive section 95 First frame body 96 Second frame body 97 Connection section 100 Object P Movable axis

Claims

1. a first mirror portion having a first mirror surface which is a reflective surface that reflects light; a second mirror portion facing the first mirror portion and having a second mirror surface that is a reflective surface that reflects light; a support portion that connects the first mirror portion and the second mirror portion and supports the first mirror portion so as to be swingable around a movable axis, the first mirror surface and the second mirror surface are disposed on a surface different from a surface where the first mirror portion and the second mirror portion are connected to the support portion; Light deflection device.

2. The support portion includes a first portion and a second portion protruding from the movable shaft, the first portion is connected to the first mirror portion, The second portion is connected to the second mirror portion.

2. The optical deflection device according to claim 1.

3. An optical deflection device according to claim 1 or 2; an irradiation unit that irradiates the first mirror unit with light; a detection unit that receives the light deflected by the first mirror unit and reflected by an object by reflecting the light by the second mirror unit, Ranging device.

4. The area of ​​the second mirror portion is larger than the area of ​​the first mirror portion.

4. A distance measuring device according to claim 3.

5. An optical deflection device according to claim 1 or 2; A first irradiating unit that irradiates light onto the first mirror unit; A second irradiating unit that irradiates light onto the second mirror unit; a first detection unit that receives light that has been deflected by the first mirror unit and reflected by an object, the light being reflected by the first mirror unit; a second detection unit that receives the light that has been deflected by the second mirror unit and reflected by an object, by reflecting the light from the second mirror unit; Ranging device.

6. The first mirror portion and the second mirror portion have different reflective materials.

6. A distance measuring device according to claim 5.

7. The first mirror portion and the second mirror portion have different optical characteristics.

6. A distance measuring device according to claim 5.

8. The first detection unit detects at least a part of light that is deflected by the first mirror unit and reflected by an object, and measures a distance to the object.

6. A distance measuring device according to claim 5.

9. The second detection unit detects a deflection angle of the first mirror unit based on the detected light.

6. A distance measuring device according to claim 5.