Biaxial rotary table device and machine tool

Abstract

This biaxial rotary table device comprises: a first table unit that has a first rotating body which can rotate about a first axis; a second table unit that has a second rotating body which can rotate about a second axis; a connecting plate that is fixed to the first rotating body and that supports the second table unit; a first fine adjustment member that is provided to the second table unit or the connecting plate and that relatively displaces the second table unit, in a first direction, with respect to the first table unit; and a second fine adjustment member that is provided to the second table unit or the connecting plate and that relatively displaces the second table unit, in a second direction, with respect to the first table unit.

Description

Two-axis rotary table device and machine tool

[0001] The present disclosure relates to a two-axis rotary table device that rotates a workpiece about two axes, and a machine tool equipped with the two-axis rotary table device.

[0002] Machine tools such as machining centers move a workpiece and a tool relative to one another along three linear axes. Furthermore, two-axis rotary table devices have been provided that enable five-axis machining with these machine tools. Machine tools equipped with two-axis rotary table devices are capable of tilting a workpiece around a tilt axis and rotating the workpiece around a rotation axis. For example, Japanese Patent Application Laid-Open Publication No. 2015-62973 discloses a machine tool equipped with a two-axis rotary table.

[0003] There is a demand for a two-axis rotary table device and a machine tool that can suitably perform five-axis control.

[0004] The two-axis rotary table device disclosed herein comprises a first table unit having a first rotating body rotatable around a first axis, a second table unit having a second rotating body rotatable around a second axis, a connecting plate fixed to the first rotating body of the first table unit and supporting the second table unit, a first fine adjustment member provided on the second table unit or the connecting plate and displacing the second table unit relative to the first table unit in a first direction perpendicular to the first axis and the second axis, and a second fine adjustment member provided on the second table unit or the connecting plate and displacing the second table unit relative to the first table unit in a second direction opposite to the first direction.

[0005] The machine tool of the present disclosure is detachably mountable with the two-axis rotary table device disclosed above, and has three linear axes that are perpendicular to one another.

[0006] Fig. 1 is a schematic diagram of a machine tool. Fig. 2 is a schematic diagram of a two-axis rotary table device. Fig. 3 is a schematic diagram of a two-axis rotary table device with a second table unit separated. Fig. 4 is a diagram showing the relative positions of a first axis and a second axis. Fig. 5 is a schematic diagram of the second table unit. Fig. 6 is a schematic diagram of a first connecting plate. Figs. 7A and 7B are partial cross-sectional views of the first connecting plate.

[0007] [Machine Tool 10] Figure 1 is a schematic diagram of the machine tool 10. Below, the machine tool 10 will be described using three directions: the X direction, the Y direction, and the Z direction. The X direction, the Y direction, and the Z direction are perpendicular to one another. The X direction includes the X1 direction and the X2 direction, which are opposite directions. The Y direction includes the Y1 direction and the Y2 direction, which are opposite directions. The Z direction includes the Z1 direction and the Z2 direction, which are opposite directions.

[0008] The machine tool 10 has three linear axes that are perpendicular to one another. The three linear axes are referred to as the X-axis, Y-axis, and Z-axis. The X-axis extends along the X-direction. The Y-axis extends along the Y-direction. The Z-axis extends along the Z-direction. For example, the X-axis and Y-axis are parallel to a horizontal plane. The Z-axis is parallel to a vertical plane.

[0009] The machine tool 10 functions as a machining center. The machine tool 10 includes a base 12, a saddle 14, a table 16, a column 18, and a spindle head 20. The base 12 has a guide portion 12a. The guide portion 12a is parallel to the Y-axis. The saddle 14 is attached to the base 12. The saddle 14 is guided by the guide portion 12a and is movable in the Y1 and Y2 directions along the Y-axis. The saddle 14 has a guide portion 14a. The guide portion 14a is parallel to the X-axis. The table 16 is attached to the saddle 14. The table 16 is guided by the guide portion 14a and is movable in the X1 and X2 directions along the X-axis. The column 18 extends from the base 12 in the Z1 direction. The column 18 has a guide portion 18a. The guide portion 18a is parallel to the Z-axis. The spindle head 20 is attached to the column 18. The spindle head 20 is guided by the guide portion 18a and is movable in the Z1 direction and the Z2 direction along the Z axis.

[0010] A two-axis rotary table device 22 can be attached to and detached from the table 16. A workpiece (not shown), which is an object to be machined, is fixed to the two-axis rotary table device 22. On the other hand, a tool (not shown) can be attached and detached to the spindle head 20. The workpiece and the tool face each other.

[0011] [Two-Axis Rotary Table Device 22] Figure 2 is a schematic diagram of the two-axis rotary table device 22. Figure 3 is a schematic diagram of the two-axis rotary table device 22 with the second table unit 38 separated. The two rotation axes are designated as a first axis 24 and a second axis 26. The first axis 24 extends along the Y direction. The first axis 24 is a tilt axis that oscillates the workpiece on the table 16. The second axis 26 is rotatable around the first axis 24. The second axis 26 is parallel to the XZ plane. The XZ plane is an imaginary plane that is parallel to the X and Z directions and perpendicular to the Y direction.

[0012] The biaxial rotary table device 22 includes a base portion 28, a first table unit 30, a first connecting plate 32, a support portion 34, a second connecting plate 36, and a second table unit 38. The biaxial rotary table device 22 includes the first table unit 30 and the second table unit 38, each of which can also be used as a single-axis table portion.

[0013] The base portion 28 is detachable from the table 16 of the machine tool 10 (FIG. 1). The base portion 28 supports a first table unit 30 and a support portion 34.

[0014] The first table unit 30 is fixed to the base portion 28. The first table unit 30 has a motor (not shown) and a first rotary table 40 (first rotating body). The motor supplies power to the first rotary table 40. The first rotary table 40 can rotate about the first shaft 24 by the power supplied from the motor.

[0015] As described above, the first table unit 30 can also be used as a single-axis table. For example, a holder for holding a workpiece may be attached to the first rotary table 40. This allows the first table unit 30 to rotate (tilt) the workpiece around the first axis 24.

[0016] The first connecting plate 32 is fastened to the first rotary table 40 by a plurality of bolts 46 (FIG. 3), which allows the first connecting plate 32 to rotate together with the first rotary table 40 about the first axis 24.

[0017] The support portion 34 is fixed to the base portion 28. The support portion 34 is disposed in the Y1 direction relative to the first table unit 30. The support portion 34 has a support rotary table (not shown). The support rotary table is rotatable around the first shaft 24.

[0018] The second connecting plate 36 has the same structure as the first connecting plate 32. That is, the second connecting plate 36 is fastened to the support rotary table with a plurality of socket head bolts (not shown), so that the second connecting plate 36 can rotate together with the support rotary table about the first shaft 24.

[0019] The second table unit 38 is disposed on the first axis 24 between the first connecting plate 32 and the second connecting plate 36. In other words, the second table unit 38 is disposed in the Y1 direction relative to the first table unit 30 and the first connecting plate 32, and in the Y2 direction relative to the support portion 34 and the second connecting plate 36. The second table unit 38 is fastened to the first connecting plate 32 with a plurality of bolts 56 (fastening members) (six in FIG. 3 ). Similarly, the second table unit 38 is fastened to the second connecting plate 36 with a plurality of bolts (not shown). As a result, the second table unit 38 is supported so as to be swingable about the first axis 24 by a first support unit including the first table unit 30 and the first connecting plate 32, and a second support unit including the support portion 34 and the second connecting plate 36.

[0020] The second table unit 38 has a motor (not shown) and a second rotary table 50 (second rotating body). The motor supplies power to the second rotary table 50. The second rotary table 50 can rotate about the second axis 26 by the power supplied from the motor. A workpiece is fixed to the second rotary table 50.

[0021] The second table unit 38 can swing about the first axis 24. That is, the second axis 26 can be parallel to the Z direction, or can be tilted in one direction or the other relative to the Z direction along the XZ plane.

[0022] [Misalignment of the second axis 26 with respect to the first axis 24] Figure 4 is a diagram showing the relative positions of the first axis 24 and the second axis 26. Figure 4 shows the biaxial rotary table device 22 as viewed in the Y1 direction. In the biaxial rotary table device 22, after the first table unit 30 and the second table unit 38 are combined, there is a possibility that the second axis 26 may be misaligned in the X1 direction or the X2 direction with respect to the first axis 24. Note that the amount of misalignment that occurs is very small, but the amount of misalignment is exaggerated in Figure 4.

[0023] If the second axis 26 is misaligned in the X1 or X2 direction with respect to the first axis 24, the following phenomenon occurs. For example, as shown in FIG. 4 , the position of the second table unit 38 in which the second axis 26 is parallel to the Z axis (Z direction) is referred to as the reference position. The second table unit 38 can swing from the reference position around the first axis 24 in a first swing direction (D1) and a second swing direction (D2). The first swing direction (D1) and the second swing direction (D2) are opposite to each other. The trajectory of the second axis 26 when the second table unit 38 swings from the reference position in the first swing direction (D1) is asymmetric to the trajectory of the second axis 26 when the second table unit 38 swings from the reference position in the second swing direction (D2).

[0024] If the second axis 26 is misaligned with respect to the first axis 24, the machine tool 10 needs to correct the misalignment using NC control. After combining the first table unit 30 and the second table unit 38, the amount of misalignment correction using NC control can be reduced by bringing the second axis 26 close to the first axis 24 in advance. Furthermore, by orthogonally ...

[0025] [Structure for reducing misalignment of the second axis 26 relative to the first axis 24] Below, we will provide further explanation of the first connecting plate 32 and the second table unit 38, as well as a structure for reducing misalignment of the second axis 26 relative to the first axis 24.

[0026] FIG. 5 is a schematic diagram of the second table unit 38. FIG. 6 is a schematic diagram of the first connecting plate 32. FIGS. 7A and 7B are partial cross-sectional views of the first connecting plate 32. FIGS. 7A and 7B show partial cross-sections parallel to the AC plane. Below, the first connecting plate 32 and the second table unit 38 will be described using three directions: the A direction, the B direction, and the C direction. The A direction, the B direction, and the C direction are perpendicular to each other. The A direction includes the A1 direction (first direction) and the A2 direction (second direction), which are opposite to each other. The B direction includes the B1 direction and the B2 direction, which are opposite to each other. The C direction includes the C1 direction and the C2 direction, which are opposite to each other. The B direction is parallel to the Y direction shown in FIGS. 1 to 4. The first axis 24 is perpendicular to the A direction and the C direction and extends along the B direction. The second axis 26 is perpendicular to the A direction and the B direction and extends along the C direction.

[0027] As shown in FIG. 5 , the second table unit 38 has a mounting surface 58 facing the first connecting plate 32. A protrusion 62 and a plurality of bolt holes 60 are formed on the mounting surface 58. The protrusion 62 includes a first pin 62a and a second pin 62b. The protrusion directions of the first pin 62a and the second pin 62b are parallel to the B direction. That is, the first pin 62a and the second pin 62b protrude along the first axis 24. The first pin 62a and the second pin 62b are cylindrical. In the C direction, the position of the first pin 62a is the same as the position of the second pin 62b. The first pin 62a is arranged in the A1 direction relative to the first axis 24. The second pin 62b is arranged in the A2 direction relative to the first axis 24.

[0028] As shown in FIG. 6 , the first connecting plate 32 has a mounting surface 64 that faces the second table unit 38. Directions A and C are perpendicular to the thickness direction of the first connecting plate 32. Direction B is parallel to the thickness direction of the first connecting plate 32. The mounting surface 64 is formed with a hole 70, a plurality of first through holes 66, and a plurality of second through holes 68. Each of the first through holes 66 and each of the second through holes 68 penetrates the first connecting plate 32 along direction B. The diameter of the second through holes 68 is slightly larger than the axial diameter of the bolts 56. This allows the bolts 56 to be displaced in direction A when the bolts 56 are temporarily fastened to the second through holes 68.

[0029] The bolt 46 is inserted in the B2 direction (Y2 direction) into the first through-hole 66 of the first connecting plate 32. Furthermore, the bolt 46 is screwed into a bolt hole (not shown) formed in the first rotating table 40. The bolt 46 fastens the first connecting plate 32 and the first rotating table 40 to each other.

[0030] 3, the bolt 56 is inserted in the B1 direction (Y1 direction) into the second through-hole 68 of the first connecting plate 32. Furthermore, the bolt 56 is threaded into a bolt hole 60 formed in the mounting surface 58 of the second table unit 38. The first connecting plate 32 and the second table unit 38 are fastened together by the bolt 56.

[0031] As shown in FIG. 6 , the hole portion 70 includes a first hole 70a and a second hole 70b. The first hole 70a and the second hole 70b open in the B1 direction (Y1 direction). The depth direction of the first hole 70a and the depth direction of the second hole 70b are parallel to the B direction. That is, the depth direction of the first hole 70a and the depth direction of the second hole 70b are parallel to the first axis 24. In the C direction, the position of the first hole 70a is the same as the position of the second hole 70b. The first hole 70a is arranged in the A1 direction relative to the first axis 24. The second hole 70b is arranged in the A2 direction relative to the first axis 24.

[0032] As shown in FIG. 6 , the first hole 70a is an ellipse elongated in the A direction. That is, the length (La) of the first hole 70a in the A direction is longer than the length (Lc) of the first hole 70a in the C direction. Similarly, the second hole 70b is an ellipse elongated in the A direction. That is, the length (La) of the second hole 70b in the A direction is longer than the length (Lc) of the second hole 70b in the C direction. As shown in FIG. 7A , the length (Lc) of the first hole 70a in the C direction is substantially the same as the outer diameter (R) of the first pin 62a. As shown in FIG. 7B , the length (Lc) of the second hole 70b in the C direction is substantially the same as the outer diameter (R) of the second pin 62b.

[0033] A pair of flat surfaces 71a parallel to the direction A is formed on the inner wall of the first hole 70a. Similarly, a pair of flat surfaces 71b parallel to the direction A is formed on the inner wall of the second hole 70b. The length of the flat surfaces 71a in the direction A is the same as the length of the flat surfaces 71b in the direction A. The protrusion 62 (first pin 62a, second pin 62b) can be displaced within this length range.

[0034] The first pin 62a of the second table unit 38 is inserted into the first hole 70a in the direction B2. The second pin 62b of the second table unit 38 is inserted into the second hole 70b in the direction B2. As shown in FIG. 7A , when the first pin 62a is inserted into the first hole 70a, displacement of the first pin 62a in the C direction is restricted by the pair of flat portions 71a, while displacement of the first pin 62a in the A direction is permitted. Similarly, as shown in FIG. 7B , when the second pin 62b is inserted into the second hole 70b, displacement of the second pin 62b in the C direction is restricted by the pair of flat portions 71b, while displacement of the second pin 62b in the A direction is permitted. In other words, when the protrusion 62 is inserted into the hole 70, displacement of the second table unit 38 in the C direction is restricted, while displacement of the second table unit 38 in the A direction is permitted.

[0035] As shown in FIGS. 6 and 7A , a first screw hole 76a is formed in the first side surface 72 of the first connecting plate 32, which faces the A1 direction. The first screw hole 76a extends from the first side surface 72 to the first hole 70a along the A direction. A first screw member 78a is threaded into the first screw hole 76a. The end of the first screw member 78a facing the A2 direction abuts against the first pin 62a inserted into the first hole 70a. When the first screw member 78a is displaced in the A2 direction, the first pin 62a is pushed by the first screw member 78a and displaced in the A2 direction. Furthermore, when the first screw member 78a is stopped, the first screw member 78a restricts displacement of the first pin 62a in the A1 direction.

[0036] As shown in FIGS. 6 and 7B , a second screw hole 76b is formed in the second side surface 74 of the first connecting plate 32, which faces the A2 direction. The second screw hole 76b extends from the second side surface 74 to the second hole 70b along the A direction. A second screw member 78b is threaded into the second screw hole 76b. The end of the second screw member 78b facing the A1 direction abuts against the second pin 62b inserted in the second hole 70b. When the second screw member 78b is displaced in the A1 direction, the second pin 62b is pushed by the second screw member 78b and displaced in the A1 direction. Furthermore, when the second screw member 78b is stopped, the second screw member 78b restricts the relative displacement of the second pin 62b in the A2 direction.

[0037] The first screw member 78a is a fine adjustment member that converts the amount of rotation applied to the first screw member 78a into the amount of axial displacement of the first screw member 78a to finely adjust the position of the first pin 62a. Similarly, the second screw member 78b is a fine adjustment member that converts the amount of rotation applied to the second screw member 78b into the amount of axial displacement of the second screw member 78b to finely adjust the position of the second pin 62b.

[0038] [Adjusting the Misalignment of the Second Shaft 26 with Respect to the First Shaft 24] First, the biaxial rotary table device 22 is temporarily assembled as shown in FIG. 3 . That is, the plurality of bolts 56 ( FIG. 3 ) fastening the second table unit 38 to the first connecting plate 32 are temporarily tightened. Similarly, the plurality of bolts (not shown) fastening the second table unit 38 to the second connecting plate 36 are temporarily tightened. In this state, for example, as shown in FIG. 4 , the second shaft 26 is aligned parallel to the Z direction. This causes the X direction shown in FIG. 3 to be parallel to the A direction shown in FIG. 4 and other figures. In this state, the protrusion amounts of the first screw members 78 a and the second screw members 78 b in the first screw holes 76 a and the second screw members 78 b in the second screw holes 76 b are adjusted depending on the direction of misalignment of the second shaft 26 with respect to the first shaft 24.

[0039] For example, as shown in FIG. 4 , if the second shaft 26 is misaligned in the X1 direction (A1 direction), the second screw member 78b ( FIG. 7B ) is loosened. This allows the second pin 62b to be displaced in the X2 direction (A2 direction) within the second screw hole 76b. In other words, the second table unit 38 is displaceable in the X2 direction (A2 direction). Next, the first screw member 78a ( FIG. 7A ) is tightened. This causes the first screw member 78a to push the first pin 62a in the X2 direction (A2 direction). This causes the second table unit 38 to be displaced in the X2 direction (A2 direction). When the amount of misalignment of the second shaft 26 relative to the first shaft 24 falls below the allowable amount (preferably when the first shaft 24 and the second shaft 26 are perpendicular to each other), the second screw member 78b is tightened. This determines the position of the second table unit 38 in the X direction (A direction).

[0040] For example, unlike in FIG. 4 , if the second shaft 26 is misaligned in the X2 direction (A2 direction), the first screw member 78a ( FIG. 7A ) is loosened. This allows the first pin 62a to be displaced in the X1 direction (A1 direction) within the first screw hole 76a. That is, the second table unit 38 is displaceable in the X1 direction (A1 direction). Next, the second screw member 78b ( FIG. 7B ) is tightened. This causes the second screw member 78b to push the second pin 62b in the X1 direction (A1 direction). This causes the second table unit 38 to be displaced in the X1 direction (A1 direction). When the amount of misalignment of the second shaft 26 relative to the first shaft 24 is within the allowable amount (preferably when the first shaft 24 and the second shaft 26 are perpendicular to each other), the first screw member 78a is tightened. This determines the position of the second table unit 38 in the X direction (A direction).

[0041] The second connecting plate 36 has the same structure as the first connecting plate 32. The second connecting plate 36 is also provided with screw members equivalent to the first screw member 78a and the second screw member 78b. By adjusting the positions of these screw members, the position of the second table unit 38 in the X direction (A direction) is determined.

[0042] Finally, the plurality of bolts 56 that fasten the second table unit 38 to the first connecting plate 32 are fully tightened. Similarly, the plurality of bolts (not shown) that fasten the second table unit 38 to the second connecting plate 36 are fully tightened. By performing the above steps, the first shaft 24 and the second shaft 26 can be brought close to each other (orthogonal to each other).

[0043] [Advantages of the Above-Described Embodiment] When the first table unit 30 and the second table unit 38, each of which can be used as a single-axis table unit, are combined to form the two-axis rotary table device 22, it is necessary to adjust the position of the second axis 26 relative to the first axis 24. According to the above-described embodiment, the first screw member 78a and the second screw member 78b can displace the second table unit 38 along direction A. Furthermore, the first screw member 78a and the second screw member 78b facilitate fine adjustment of the amount of displacement. This makes it easy to align the second axis 26 with high precision.

[0044] According to the above embodiment, after the first table unit 30 and the second table unit 38 are combined, the second axis 26 can be brought close to the first axis 24. This reduces the amount of misalignment correction required by NC control. Furthermore, by orthogonally orthogonally orthogonally orthogonalizing the second axis 26 to the first axis 24, misalignment correction by NC control becomes unnecessary. As a result, five-axis control by the machine tool 10 can be performed favorably.

[0045] According to the above embodiment, the first pin 62a can be displaced by the length (La) of the first hole 70a in the direction A. Similarly, the second pin 62b can be displaced by the length (La) of the second hole 70b in the direction A. In other words, the position of the second table unit 38 can be adjusted within the range of the length (La).

[0046] According to the above embodiment, the displacement of the first pin 62a in the direction C is restricted by the inner wall of the first hole 70a. Similarly, the displacement of the second pin 62b in the direction C is restricted by the inner wall of the second hole 70b. Therefore, when adjusting the misalignment of the second shaft 26 with respect to the first shaft 24, it is possible to prevent the second table unit 38 from displacing in the direction C.

[0047] 1 moves a workpiece along the X-axis and Y-axis, and moves a tool along the Z-axis. However, the machine tool 10 of the present disclosure is not limited to this. The machine tool 10 may have any structure that allows the tool and workpiece to be displaced relative to each other along the X-axis, Y-axis, and Z-axis.

[0048] In the above-described biaxial rotary table device 22, the protrusion 62 (first pin 62a, second pin 62b) is formed on the second table unit 38, and the hole 70 (first hole 70a, second hole 70b) is formed on the first connecting plate 32. However, the protrusion 62 (first pin 62a, second pin 62b) may be formed on the first connecting plate 32, and the hole 70 (first hole 70a, second hole 70b) may be formed on the second table unit 38. Similarly, the second connecting plate 36 may have the protrusion, and the second table unit 38 may have the hole.

[0049] The biaxial rotary table device 22 described above has two pins (first pin 62a and second pin 62b) and two holes (first hole 70a and second hole 70b). However, the biaxial rotary table device 22 may have one or more pin members and one or more holes. When there is one pin and one hole, the first screw hole 76a and the second screw hole 76b communicate with one hole. Furthermore, the first screw member 78a and the second screw member 78b abut against one pin.

[0050] In the above-described biaxial rotary table device 22, one pin (first pin 62a or second pin 62b) is inserted into one hole (first hole 70a or second hole 70b). However, one hole (first hole 70a or second hole 70b) may be a hole that is long in the A direction, and one pin may be inserted into the end of the hole in the A1 direction, and the other pin may be inserted into the end of the hole in the A2 direction.

[0051] The protruding direction of the protrusion 62 and the depth direction of the hole 70 do not have to be the Y direction. For example, the protrusion 62 may be an L-shaped pin with a portion parallel to the Z direction. In this case, the depth direction of the hole 70 is parallel to the Z direction.

[0052] The protrusion 62 may be a member other than a pin. For example, the protrusion 62 may be a protrusion of any shape that protrudes from the mounting surface 58 of the second table unit 38.

[0053] In the above-described biaxial rotary table apparatus 22, the second table unit 38 is clamped rotatably around the first axis 24 by a clamping section including the first table unit 30 and the first connecting plate 32, and another clamping section including the support section 34 and the second connecting plate 36. However, the biaxial rotary table apparatus 22 of the present disclosure is not limited to this. For example, the biaxial rotary table apparatus 22 does not have to include the support section 34 and the second connecting plate 36. In other words, the biaxial rotary table apparatus 22 may be supported rotatably around the first axis 24 by a clamping section including the first table unit 30 and the first connecting plate 32.

[0054] [Effects of the Above Disclosure] When the first table unit 30 and the second table unit 38, each of which can be used as a single-axis table unit, are combined to form the two-axis rotary table device 22, it is necessary to adjust the position of the second axis 26 relative to the first axis 24. According to the above embodiment, the first screw member 78a and the second screw member 78b can displace the second table unit 38 along direction A. Furthermore, the first screw member 78a and the second screw member 78b facilitate fine adjustment of the amount of displacement. This makes it easy to align the second axis 26 with high precision.

[0055] According to the above embodiment, after the first table unit 30 and the second table unit 38 are combined, the second axis 26 can be brought close to the first axis 24. This reduces the amount of misalignment correction required by NC control. Furthermore, by orthogonally orthogonally orthogonally orthogonalizing the second axis 26 to the first axis 24, misalignment correction by NC control becomes unnecessary. As a result, five-axis control by the machine tool 10 can be performed favorably.

[0056] Other Embodiments In the above embodiment, the first screw member 78a and the second screw member 78b are used as the fine adjustment members. Note that members other than the first screw member 78a and the second screw member 78b may be provided on the second table unit 38 or the first connecting plate 32 (second connecting plate 36) as the fine adjustment members. The fine adjustment members may be any members that convert the magnitude of the input amount into a smaller amount of displacement. For example, the fine adjustment members may be wedges with a tapered angle.

[0057] The fine adjustment member may be a mechanism that has a fulcrum, a force point, and a point of action, and converts the magnitude of the input amount into a smaller displacement amount by changing the distance between these points. For example, the fine adjustment member may be a mechanism that includes a lever, a cam, etc.

[0058] The fine adjustment member may be a vibration generator (such as an ultrasonic motor) that generates minute vibrations. For example, some member may push the second table unit 38 while reducing the frictional force between the first connecting plate 32 and the second table unit 38 by vibrations generated by the vibration generator. Alternatively, the second table unit 38 may be displaced relative to the first connecting plate 32 by the minute vibrations generated by the vibration generator.

[0059] [Supplementary Note] The following supplementary note is further disclosed regarding the above embodiment and modified examples.

[0060] (Appendix 1) The two-axis rotary table device (22) comprises a first table unit (30) having a first rotating body (40) rotatable around a first axis (24), a second table unit (38) having a second rotating body (50) rotatable around a second axis (26), a connecting plate (32) fixed to the first rotating body of the first table unit and supporting the second table unit, a first fine adjustment member (78a) provided on the second table unit or the connecting plate and displacing the second table unit relative to the first table unit in a first direction perpendicular to the first axis and the second axis, and a second fine adjustment member (78b) provided on the second table unit or the connecting plate and displacing the second table unit relative to the first table unit in a second direction opposite to the first direction.

[0061] (Appendix 2) In the two-axis rotating table device described in Appendix 1, the first fine adjustment member may be a first screw member that screws into the second table unit or the connecting plate, and the second fine adjustment member may be a second screw member that screws into the second table unit or the connecting plate.

[0062] (Appendix 3) In the two-axis rotating table device described in Appendix 2, one of the connecting plate and the second table unit has a hole portion (70), and the other of the connecting plate and the second table unit has a protrusion portion (62) that is inserted into the hole portion, and the length (La) of the hole portion in the first direction and the second direction may be longer than the length (R) of the protrusion in the first direction and the second direction.

[0063] (Supplementary Note 4) In the biaxial rotary table apparatus described in Supplementary Note 3, the connecting plate may have the hole, and the second table unit may have the protrusion.

[0064] (Supplementary Note 5) In the biaxial rotary table device described in Supplementary Note 3 or 4, the first screw member and the second screw member may press the protrusion within the hole.

[0065] (Supplementary Note 6) In the biaxial rotary table apparatus described in any one of Supplementary Notes 2 to 5, the first screw member and the second screw member may be screwed into the connecting plate.

[0066] (Appendix 7) In the two-axis rotary table device described in Appendix 3 or 4, the hole portion may include a first hole (70a) and a second hole (70b), and the protrusion portion may include a first pin (62a) inserted into the first hole and a second pin (62b) inserted into the second hole.

[0067] (Supplementary Note 8) In the biaxial rotary table device described in Supplementary Note 7, the first pin and the second pin may protrude along the first axis.

[0068] (Supplementary Note 9) In the biaxial rotary table device according to Supplementary Note 7 or 8, the first pin may be positioned at the same position as the second pin in a second axial direction parallel to the second axis.

[0069] (Appendix 10) In the two-axis rotary table device described in any one of Appendices 7 to 9, the connecting plate may have the first hole, the second hole, a first screw hole (76a) extending from a first side surface (72) of the connecting plate to the first hole, and a second screw hole (76b) extending from a second side surface (74) of the connecting plate to the second hole, and the first screw member may be threaded into the first screw hole, and the second screw member may be threaded into the second screw hole.

[0070] (Supplementary Note 11) In the biaxial rotary table apparatus according to any one of Supplementary Notes 1 to 10, the second table unit and the connecting plate may be detachably fastened to each other by a fastening member (56).

[0071] (Supplementary Note 12) A machine tool (10) to which the two-axis rotary table device according to any one of Supplementary Notes 1 to 11 can be detachably attached has three linear axes that are orthogonal to one another.

[0072] Although the present disclosure has been described in detail, the present disclosure is not limited to the individual embodiments described above. Various additions, substitutions, modifications, partial deletions, etc. are possible in these embodiments without departing from the gist of the present disclosure or the spirit of the present disclosure derived from the content of the claims and their equivalents. These embodiments can also be implemented in combination. For example, in the above-described embodiments, the order of each operation and the order of each process are shown as examples and are not limited to these. The same applies when numerical values ​​or mathematical expressions are used in the description of the above-described embodiments.

[0073] REFERENCE SIGNS LIST 10...machine tool 22...two-axis rotary table device 24...first axis 26...second axis 30...first table unit 32...first connecting plate (connecting plate) 38...second table unit 40...first rotary table (first rotating body) 50...second rotary table (second rotating body) 56...bolt (fastening member) 62...projection 62a...first pin 62b...second pin 70...hole 70a...first hole 70b...second hole 72...first side surface 74...second side surface 76a...first screw hole 76b...second screw hole 78a...first screw member (first fine adjustment member) 78b...second screw member (second fine adjustment member)

Claims

1. a first table unit having a first rotating body rotatable around a first axis; a second table unit having a second rotating body rotatable about a second axis; a connecting plate fixed to the first rotating body of the first table unit and supporting the second table unit; a first fine adjustment member provided on the second table unit or the connecting plate, which displaces the second table unit relatively to the first table unit in a first direction perpendicular to the first axis and the second axis; a second fine adjustment member provided on the second table unit or the connecting plate, which displaces the second table unit relatively to the first table unit in a second direction opposite to the first direction; A two-axis rotary table device comprising:

2. 2. The two-axis rotary table device according to claim 1, the first fine adjustment member is a first screw member that is screwed into the second table unit or the connecting plate, a second fine adjustment member that is a second screw member that is screwed into the second table unit or the connecting plate;

3. 3. The two-axis rotary table device according to claim 2, one of the connecting plate and the second table unit has a hole; the other of the connecting plate and the second table unit has a protrusion that is inserted into the hole, A two-axis rotary table device, wherein the length of the hole in the first direction and the second direction is longer than the length of the protrusion in the first direction and the second direction.

4. 4. The two-axis rotary table device according to claim 3, the connecting plate has the hole, The second table unit has the protrusion.

5. 5. The two-axis rotary table device according to claim 3, The first screw member and the second screw member press the protrusion within the hole.

6. 3. The two-axis rotary table device according to claim 2, The first screw member and the second screw member are screwed into the connecting plate.

7. 5. The two-axis rotary table device according to claim 3, the hole portion includes a first hole and a second hole, The protrusion includes a first pin inserted into the first hole and a second pin inserted into the second hole.

8. 8. The two-axis rotary table device according to claim 7, The two-axis rotary table device, wherein the first pin and the second pin protrude along the first axis.

9. 8. The two-axis rotary table device according to claim 7, a biaxial rotary table device, wherein the position of the first pin is the same as the position of the second pin in a second axial direction parallel to the second axis;

10. 8. The two-axis rotary table device according to claim 7, the connecting plate has the first hole, the second hole, a first screw hole extending from a first side of the connecting plate to the first hole, and a second screw hole extending from a second side of the connecting plate to the second hole; the first screw member is threadedly engaged with the first screw hole, The second screw member is threadedly engaged with the second screw hole.

11. 2. The two-axis rotary table device according to claim 1, The second table unit and the connecting plate are detachably fastened to each other by a fastening member.

12. 2. A machine tool having three linear axes perpendicular to one another, to which the two-axis rotary table device according to claim 1 can be detachably attached.