Shower head having a face plate with multiple plenums and a central gas distribution port

KR1020260113282APending Publication Date: 2026-07-21LAM RES CORP
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Patent Information

Authority / Receiving Office
KR · KR
Patent Type
Applications
Current Assignee / Owner
LAM RES CORP
Filing Date
2024-11-13
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

Conventional showerheads in semiconductor fabrication systems face issues with non-uniform gas distribution, particularly in the central region of the substrate, leading to depletion of process gases and contamination between multiple showerheads, due to complications arising from dual-plenum designs where inner gas inlets block outer inlets and central gas distribution ports are absent.

Method used

A dual-plenum showerhead design with center-fed plenums and isolated gas passages, featuring a first and second gas passage with respective inlets, and a face plate with distributed gas distribution ports, along with center-feeding plenums and columns to ensure uniform gas distribution and prevent contamination, using a carrier assembly for fixed positioning and annular gas curtains.

Benefits of technology

The design ensures uniform gas distribution across the substrate, preventing gas depletion and contamination, thereby enhancing processing consistency and efficiency in semiconductor fabrication.

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Abstract

The showerhead includes a first gas passage having a first inlet and a second gas passage having a second inlet. The showerhead further includes a face-to-face plate surface having a plurality of first gas distribution ports distributed across the face-to-face plate surface and fluidically connected to the first gas passage. The face-to-face plate surface further includes a plurality of second gas distribution ports distributed across the face-to-face plate surface and fluidly connected to the second gas passage. The showerhead further includes a first center-feed plenum fluidly interposed between the first gas passage and the first gas distribution ports. The showerhead further includes a second center-feed plenum fluidly interposed between the second gas passage and the second gas distribution ports. The first gas distribution ports include a central first gas distribution port located at the center of the face-to-face plate surface.
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