Hybrid type pressure sensor

Abstract

The present invention relates to a hybrid pressure sensor. A hybrid pressure sensor according to one embodiment of the present invention comprises: a lower electrode including a first electrode into which current flows and a second electrode into which current flows; an upper electrode positioned facing the lower electrode; and a pressure-reducing layer positioned between the lower electrode and the upper electrode and including a material that generates a piezoelectric effect, wherein the first electrode and the second electrode are separated from each other.

Description

Technology Field

[0001] The present invention relates to a hybrid pressure sensor. Background Technology

[0003] A pressure sensor detects changes in force or pressure applied to the sensor, converts this into an electrical signal using a pressure-reducing element, and produces an analog electrical signal corresponding to the pressure or a switching output that operates at a specific pressure value.

[0004] Electronic pressure sensors obtain an output by converting pressure into electrical signals such as resistance, capacitance, and voltage. Electronic pressure sensors are characterized by high precision, a long lifespan due to the absence of mechanical moving parts, and high responsiveness, but they have high manufacturing costs. Mechanical pressure sensors convert pressure into displacement and obtain a switching output by turning a mechanical switch on or off using this displacement. Compared to electronic pressure sensors, mechanical pressure sensors are cheaper and do not require power, but they have a short lifespan and low responsiveness.

[0005] Published Patent Application No. 10-2017-0070173 discloses a piezoelectric film structure and a sensor, as well as a display assembly utilizing the same. In the disclosed structure, a piezoelectric layer is positioned between an upper conductive layer and a lower conductive layer, and electrical connections are made to the upper conductive layer and the lower conductive layer, respectively. The current input to the upper conductive layer (or lower conductive layer) passes through the piezoelectric layer and the lower conductive layer (or upper conductive layer) in sequence and is output. When a piezoelectric effect occurs due to pressure, pressure can be measured by detecting a change in a signal (voltage or current). Prior art literature

[0007] Republic of Korea Published Patent Application No. 10-2017-0070173 The problem to be solved

[0008] The objective of the present invention is to provide a hybrid pressure sensor. means of solving the problem

[0010] To achieve the above objectives, a hybrid pressure sensor according to one embodiment of the present invention comprises: a lower electrode including a first electrode into which current flows and a second electrode into which current flows; an upper electrode positioned facing the lower electrode; and a pressure-reducing layer positioned between the lower electrode and the upper electrode and including a material that generates a piezoelectric effect, wherein the first electrode and the second electrode are separated from each other.

[0011] In one embodiment, the first electrode and the second electrode each comprise: a first partial electrode formed in a straight shape; a second partial electrode attached to one end of the first partial electrode and formed in one of an arch shape, a fork shape, an L shape, or a straight shape; and a third partial electrode having one end attached to the second partial electrode and formed in a straight shape.

[0012] In one embodiment, a plurality of third partial electrodes included in the first electrode and a plurality of third partial electrodes included in the second electrode are positioned spaced apart from each other while alternating in a certain direction.

[0013] In one embodiment, the pressure-reducing layer is in the shape of an ellipse or a polygon and overlaps with the second partial electrode and the third partial electrode.

[0014] In one embodiment, the upper electrode is in the shape of an ellipse or a polygon and overlaps with the pressure-sensitive layer.

[0015] In one embodiment, the pressure-sensitive layer is composed of a conductor and a polymer material, the conductor is composed of one or more of carbon, carbon nanotubes (CNT), and tungsten, and the polymer material is composed of one or more of epoxy, phenoxy, and polyimide.

[0016] In one embodiment, the lower electrode, the upper electrode, and the pressure-reducing layer are further sealed with respect to a first film and a second film.

[0017] In one embodiment, the first film and the second film are each composed of one or more of polyethylene terephthalate, polyimide, polyurethane, polycarbonate, methyl polymethacrylate, polypropylene (PP), and polyethylene naphthalate.

[0018] In one embodiment, the adhesive layer is further included, which is located between the first film and the second film where the lower electrode, the upper electrode, and the pressure-sensitive layer are not located, and which attaches the first film and the second film.

[0019] In one embodiment, it further includes a first electrical terminal connected to the first electrode and a second electrical terminal connected to the second electrode. Effects of the invention

[0021] A hybrid pressure sensor according to one embodiment of the present invention comprises an upper electrode, a lower electrode having a first electrode and a second electrode separated from each other, and a pressure-reducing layer located between the upper electrode and the lower electrode and generating a piezoelectric effect, wherein current introduced into the first electrode can flow out to the second electrode through the pressure-reducing layer and the upper electrode.

[0022] Since the resistance formed across the upper electrode, the pressure-reducing layer, and the first electrode, and the resistance formed across the upper electrode, the pressure-reducing layer, and the second electrode continuously decrease as the force applied to the sensor increases, the range of pressure that can be measured can be increased and the pressure sensing performance can be improved. Brief explanation of the drawing

[0024] FIG. 1a is an exploded perspective view of a hybrid pressure sensor according to one embodiment of the present invention. FIG. 1b and FIG. 1c respectively show a cross-section of the lower surface of a hybrid pressure sensor according to one embodiment of the present invention. FIG. 1d shows the shape of an upper electrode, a lower electrode, and a pressure-reducing layer in one embodiment of the present invention. FIG. 2 shows a circuit formed between an electrode and a pressure-reducing layer in one embodiment of the present invention. Figures 3a and 3b show comparative examples of pressure sensors. Figure 4 is a graph showing the resistance of each part of a shunt-type pressure sensor. Figure 5 is a graph showing the pressure measured when force is applied in one embodiment of the present invention. FIG. 6 shows a plan view of a hybrid pressure sensor according to one embodiment of the present invention. Specific details for implementing the invention

[0025] The present invention may be implemented with various modifications without departing from the spirit, and may have one or more embodiments. Furthermore, the embodiments described in the “specific details for implementing the invention” and “drawings,” etc., in the present invention are examples for specifically explaining the present invention and do not limit or restrict the scope of the rights of the present invention.

[0026] Accordingly, anything that a person skilled in the art to which the present invention pertains can easily deduce from the “specific details for carrying out the invention” and “drawings,” etc., of the present invention may be interpreted as falling within the scope of the present invention.

[0027] In addition, the size and shape of each component shown in the drawings may be exaggerated for the purpose of explaining the embodiments and do not limit the actual size and shape of the invention.

[0028] Unless specifically defined otherwise in the specification of the present invention, terms used therein may have the same meaning as generally understood by those skilled in the art to which the present invention pertains.

[0029] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[0031] FIG. 1a is an exploded perspective view of a hybrid pressure sensor according to one embodiment of the present invention. FIG. 1b and FIG. 1c respectively show a cross-section of the lower surface of a hybrid pressure sensor according to one embodiment of the present invention. FIG. 1d shows the shape of an upper electrode, a lower electrode, and a pressure-reducing layer in one embodiment of the present invention.

[0032] A hybrid pressure sensor (1) according to one embodiment of the present invention includes a pressure-reducing layer located between electrodes, and can change an electrical signal output by a piezoelectric effect generated in the pressure-reducing layer.

[0033] The lower electrode (10) may be composed of a conductive material. The lower electrode (10) may include a first electrode (11) and a second electrode (12) separated from each other.

[0034] The first electrode (11) and the second electrode (12) can each be divided into a first partial electrode (a, a'), a second partial electrode (b, b'), and a third partial electrode (c, c'). The first partial electrode (a, a') can be formed in a straight line by extending in the first direction (D1) or the direction opposite to the first direction (D1'). The second partial electrode (b, b') can be formed in an arch shape attached to one end of the first partial electrode (a, a'). Alternatively, the second partial electrode (b, b') can be formed in a fork shape ('U' shape), an L shape ('L' shape), or a straight line shape, and is not limited to a specific shape. A plurality of third partial electrodes (c, c') have one end attached to the second partial electrode (b, b') and can be formed in a straight line by extending alternately in the second direction (D2) or the direction opposite to the second direction (D2'), and can be positioned spaced apart from each other in the first direction (D1) or the direction opposite to the first direction (D1'). When the hybrid pressure sensor (1) is viewed in the third direction (D3) or the direction opposite to the third direction (D3'), the second partial electrode (b, b') and the third partial electrode (c, c') may appear in the form of ribs. In this case, the direction opposite to the third direction (D3') may be the same as the direction of gravity.

[0035] Two first partial electrodes (a, a') can each be connected to an electrical terminal (21, 22). The electrical terminal (21, 22) can be connected to an external device and can output an electrical signal that changes in response to pressure to the external device. The external device receives the electrical signal and can calculate the degree of pressure from the magnitude or amount of change of the electrical signal. The electrical terminal (21, 22) can be made of a conductive material. Current can flow from the external device to the first electrode (11) or the second electrode (12), and current can flow out from the second electrode (12) or the first electrode (11) to the external device.

[0036] The pressure-reducing layer (30) may be located in a third direction (D3) or in the opposite direction (D3') of the third direction from the lower electrode (10). The pressure-reducing layer (30) may be located adjacent to the second part electrode (b, b') and the third part electrode (c, c'). The pressure-reducing layer (30) may be formed in an elliptical shape. Alternatively, the pressure-reducing layer (30) may be formed in various shapes such as a circle, a polygon (triangle, square, pentagon, ...), or a shape with a surface, and is not limited to a specific shape. When the hybrid pressure sensor (1) is viewed in the third direction (D3) or in the opposite direction (D3') of the third direction, the pressure-reducing layer (30) may overlap with the second part electrode (b, b') and the third part electrode (c, c').

[0037] The pressure-sensitive layer (30) may include a material that generates a piezoelectric effect. For example, lanthanum gallium silicate (La3Ga5SiO2), which is a crystalline material. 14 It may be composed of one or more of ), gallium phosphate (GaPO4), lithium niobium (LiNbO3), lithium tantalum (LiTaO3), quartz, berlinite (AlPO4), Rochelle salt (KNaC4H4O6·4H2O), topaz (Al2SiO4(F,OH)2), tourmaline, and lead titanate (PbTiO3). Alternatively, the pressure-sensitive layer (30) may be randomly oriented and composed of lead zicconicate titanate (PZT, Pb[Zr]), which is a ferroelectric material. x Ti 1-x ]O3, 0≤x≤1), potassium niobium (KNbO3), sodium tungstate (Na2WO3), zinc oxide (Zn x O y It may be composed of one or more of ). Or the pressure-sensitive layer (30) may be made of lead-free piezoelectric ceramic materials such as potassium sodium niobium ((K,Na)NbO3), bismuth iron oxide (BiFeO3), sodium niobium (NaNbO3), barium titanate (BaTiO3), or bismuth titanium oxide (Bi4Ti3O). 12It may be composed of one or more of ), sodium bismuth titaniumate (NaBi(TiO3)2).

[0038] Alternatively, the pressure-sensitive layer (30) may be made of a conductor such as carbon, carbon nanotubes (CNT), or tungsten, and a polymer material such as epoxy, phenoxy, or polyimide (PI).

[0039] As pressure is applied to the hybrid pressure sensor (1), the electrical resistance or capacitance of the material constituting the pressure-reducing layer (30) changes, and in response, the current and voltage passing through the pressure-reducing layer (30) change. And as the electrical characteristics change, the electrical signal output through the electrical terminals (21, 21) also changes.

[0040] The upper electrode (40) may be composed of a conductive material. The upper electrode (40) may be located in a third direction (D3) or in the opposite direction (D3') of the third direction from the pressure reduction layer (30). The upper electrode (40) may be located adjacent to the pressure reduction layer (30). The upper electrode (40) may be formed in an elliptical shape, and the surface adjacent to the pressure reduction layer (30) may have the same area as the pressure reduction layer (30). Alternatively, the upper electrode (40) may be formed in various shapes such as a circle, a polygon (triangle, square, pentagon, ...), or a shape with a surface, and is not limited to a specific shape. When the hybrid pressure sensor (1) is viewed in the third direction (D3) or in the opposite direction (D3') of the third direction, the upper electrode (40) may overlap with the pressure reduction layer (30). And the upper electrode (40) may be positioned facing the lower electrode (10). The upper electrode (40) may not be connected to the lower electrode (10) by a wire and may not be directly connected to an external device.

[0041] Although the lower electrode (10) and the upper electrode (40) are shown in one embodiment of the present invention, the lower electrode (10) in the hybrid pressure sensor (1) may not always be located at the bottom (direction of gravity) and the upper electrode (40) may not always be located at the top (opposite direction of gravity). For example, the lower electrode (10) may be located in the direction of gravity or opposite direction of gravity, and the upper electrode (40) may be located in the opposite direction of gravity or in the direction of gravity.

[0042] The first film (50) may be located in the opposite direction (D3') of the third direction or in the third direction (D3) from the lower electrode (10). The first film (50) may be located adjacent to the lower electrode (10). When the hybrid pressure sensor (1) is viewed in the third direction (D3) or in the opposite direction (D3') of the third direction, the first film (50) may overlap with the lower electrode (10).

[0043] The second film (60) may be located in a third direction (D3) or in the opposite direction (D3') from the upper electrode (40). The second film (60) may be located adjacent to the upper electrode (40). When the hybrid pressure sensor (1) is viewed in the third direction (D3) or in the opposite direction (D3'), the second film (60) may overlap with the upper electrode (40). The first film (50) and the second film (60) seal other components of the hybrid pressure sensor (1), thereby protecting the components.

[0044] The first film (50) and the second film (60) may be made of one or more of, for example, polyethylene terephthalate (PET), polyimide (PI), polyurethane (PU), polycarbonate (PC), polymethyl methacrylate (PMMA), polypropylene (PP), and polyethylene naphthalate (PEN).

[0045] The adhesive layer (70) may be located between the first film (50) and the second film (60) where the lower electrode (10), the pressure-sensitive layer (30), and the upper electrode (40) are not located. The first film (50) and the second film (60) may be attached to each other. When the hybrid pressure sensor (1) is viewed in the third direction (D3) or the opposite direction of the third direction (D3'), the adhesive layer (70) may not overlap with the lower electrode (10), the pressure-sensitive layer (30), and the upper electrode (40). The adhesive layer (70) may be made of a polyethylene (PE)-based synthetic resin.

[0046] The pressure-sensing area of ​​the hybrid pressure sensor (1) can be formed in a shape other than an ellipse. As shown in FIG. 1d, the pressure-reducing layer (30) and the upper electrode (40) can have a square shape rather than an ellipse shape. When the hybrid pressure sensor (1) is viewed from a third direction (D3) or the opposite direction of the third direction (D3'), the pressure-reducing layer (30) can overlap with the upper electrode (40).

[0047] The second part electrode (b, b') of the lower electrode (10) can be formed in an L-shape ('n' shape). A plurality of third part electrodes (c, c') can be formed in a straight line shape with one end attached to the second part electrode (b, b') and extending alternately in the second direction (D2) or the opposite direction of the second direction (D2'), and can be positioned spaced apart from each other in the first direction (D1) or the opposite direction of the first direction (D1'). When the hybrid pressure sensor (1) is viewed in the third direction (D3) or the opposite direction of the third direction (D3'), the second part electrode (b, b') and the third part electrode (c, c') can overlap with the pressure reduction layer (30) and the upper electrode (40).

[0048] FIG. 2 shows a circuit formed between an electrode and a pressure-reducing layer in one embodiment of the present invention.

[0049] A first resistance (R1) may be formed across the first electrode (11), the pressure reduction layer (30), and the upper electrode (40). Alternatively, a first resistance (R1) may be formed across the second electrode (12), the pressure reduction layer (30), and the upper electrode (40).

[0050] A second resistance (R2) with a value close to 0 can be formed on the upper electrode (40).

[0051] A third resistor (R3) may be formed across the upper electrode (40), the pressure-reducing layer (30), and the second electrode (12). Alternatively, a third resistor (R3) may be formed across the upper electrode (40), the pressure-reducing layer (30), and the first electrode (11).

[0052] When current flows into the first electrical terminal (21), it passes through the first partial electrode (a), the second partial electrode (b), the third partial electrode (c), and the pressure reduction layer (30) in order, reaching the upper electrode (40). Then, from the upper electrode (40), it can flow out through the pressure reduction layer (30), the third partial electrode (c'), the second partial electrode (b'), and the first partial electrode (a') in order, reaching the second electrical terminal (22).

[0053] The thickness of the pressure-reducing layer (30) changes due to pressure applied in the third direction (D3) or the opposite direction of the third direction (D3'), and the magnitude of the resistance formed in the lower electrode (10), the pressure-reducing layer (30), and the upper electrode (40) may change in response to the change in thickness. When the magnitude of the resistance changes, the magnitude of the current flowing out through the second electrical terminal (22) changes, so the degree of pressure can be measured by detecting the change in the magnitude of the current. Alternatively, when the magnitude of the resistance changes, the magnitude of the voltage between the first electrical terminal (21) and the second electrical terminal (22) changes, so the degree of pressure can be measured by detecting the change in the magnitude of the voltage.

[0054] Figures 3a and 3b show comparative examples of pressure sensors. Figure 4 is a graph showing the resistance of each part in a shunt-type pressure sensor.

[0055] The true type pressure sensor (200) of the comparative example illustrated in FIG. 3a may include an upper electrode (210) and a lower electrode (220), an upper pressure-reducing layer (230) and a lower pressure-reducing layer (240) located between the upper electrode (210) and the lower electrode (220), a first electrical terminal (251) connected to the lower electrode (220), a second electrical terminal (252) connected to the upper electrode (210), films (261, 262) sealing other components, and an adhesive layer (270) that attaches the two films (261, 262) to each other.

[0056] When current flows in through the second electrical terminal (252), it may flow out to the first electrical terminal (251) via the upper electrode (210), upper pressure reduction layer (230), lower pressure reduction layer (240), and lower electrode (220). Alternatively, when current flows in through the first electrical terminal (251), it may flow out to the second electrical terminal (252) via the lower electrode (220), lower pressure reduction layer (240), upper pressure reduction layer (230), and upper electrode (210).

[0057] The magnitude of the resistance formed in the upper pressure reduction layer (230) and the lower pressure reduction layer (240) changes due to the pressure applied to the pressure sensor (200), and the magnitude of the current flowing out from the pressure sensor (200) can change in response.

[0058] In this comparative example, since two or more pressure-sensitive layers must be provided, the manufacturing cost and manufacturing time of the pressure sensor may increase.

[0059] The shunt-type pressure sensor (300) of the comparative example illustrated in FIG. 3b may include a first electrode (311) and a second electrode (312) separated from each other, a pressure-reducing layer (320) located adjacent to the first electrode (311) and the second electrode (312), a first electrical terminal (331) connected to the first electrode (311), a second electrical terminal (332) connected to the second electrode (312), films (341, 342) sealing other components, and an adhesive layer (350) attaching the two films (341, 342) to each other.

[0060] The first electrode (311) and the second electrode (312) may each be identical to the first electrode (11) and the second electrode (12) in one embodiment of the present invention.

[0061] When current flows in through the first electrical terminal (331), it passes through the first partial electrode, the second partial electrode, the third partial electrode, and the pressure reduction layer (320) in order, then passes through the third partial electrode, the second partial electrode, and the first partial electrode in order, and then can flow out through the second electrical terminal (332).

[0062] A fourth resistor (R4) may be formed between the pressure reduction layer (320) and the first electrode (311), a fifth resistor (R5) may be formed in the pressure reduction layer (320), and a sixth resistor (R6) may be formed between the pressure reduction layer (320) and the second electrode (312). The amount of change in the fifth resistor (R5) due to pressure may be smaller than the amount of change in the fourth resistor (R4) and the sixth resistor (R6).

[0063] As shown in FIG. 4, when a force of 1 kg is applied, the fourth resistor (R4) to the sixth resistor (R6) may be equal to 100 kΩ. When a force of 5 kg is applied, the fourth resistor (R4) and the sixth resistor (R6) may be reduced to 10 kΩ, and the fifth resistor (R5) may be reduced to 90 kΩ. When a force of 10 kg is applied, the fourth resistor (R4) and the sixth resistor (R6) may be reduced to 1 kΩ, and the fifth resistor (R5) may be reduced to 88 kΩ. When a force of 15 kg is applied, the fourth resistor (R4) and the sixth resistor (R6) may be reduced to 0.8 kΩ, and the fifth resistor (R5) may be reduced to 87 kΩ.

[0064] Thus, compared to the amount of change in resistance formed between the pressure-reducing layer (320) and the first electrode (311) or the second electrode (312), since the amount of change in resistance formed in the pressure-reducing layer (320) is small, the amount of change in total resistance can be reduced as the pressure applied to the shunt-type pressure sensor (300) increases. This shows that as the magnitude of the pressure increases, the pressure sensing performance may be degraded.

[0065] Figure 5 is a graph showing the pressure measured when force is applied in one embodiment of the present invention.

[0066] The pressure measured when an object of different weight is placed on or force is applied to the hybrid pressure sensor (1) according to one embodiment of the present invention and the shunt pressure sensor (300) according to a comparative example, respectively.

[0067] In the comparative example, the shunt-type pressure sensor (300) can increase the pressure measured in correspondence with the magnitude of the force up to a certain magnitude (F). When a force exceeding the certain magnitude (F) is applied, the amount of change in the measured pressure decreases significantly and can reach a saturation state.

[0068] This is because as the magnitude of the force applied to the shunt-type pressure sensor (300) increases, the amount of change in resistance formed in the pressure-reducing layer (320) decreases, thereby affecting the amount of change in total resistance.

[0069] In one embodiment of the present invention, the pressure sensor (10) can increase the pressure measured in response to the magnitude of the force. Since the resistance formed across the upper electrode (10), the pressure reduction layer (30), and the first electrode (11), and the resistance formed across the upper electrode (10), the pressure reduction layer (30), and the second electrode (12) continuously decreases as the applied force increases, the range of pressure that can be measured can be increased and the pressure sensing performance can be improved.

[0070] FIG. 6 shows a plan view of a hybrid pressure sensor according to one embodiment of the present invention.

[0071] In one embodiment of the present invention, the hybrid pressure sensor may comprise a plurality of hybrid pressure sensors (1) illustrated and described in FIGS. 1a to 1d. The hybrid pressure sensor (1) may operate as a single sensing node.

[0072] A hybrid pressure sensor (100) can be configured by arranging multiple sensing nodes in a matrix form. Although the multiple sensing nodes are shown to be arranged in a two-dimensional matrix form to form a square shape, they may also be formed in a one-dimensional array form, a circle, an ellipse, a polygon other than a square, etc., and are not limited to a specific shape.

[0073] The hybrid pressure sensor (100) may include a film sheet (110) that seals a sensing node and electrodes (121, 122) connected to electrical terminals of the sensing node.

[0074] A hybrid pressure sensor (100) can measure pressure corresponding to the location where a sensing node is located. By detecting a change in the magnitude of the current flowing in and out at each sensing node, the degree of pressure at the location where the sensing node is located can be measured. Alternatively, by detecting a change in the magnitude of the voltage between electrical terminals at each sensing node, the degree of pressure at the location where the sensing node is located can be measured.

[0075] Accordingly, the magnitude of pressure can be measured at the point where force is applied to a person or object. Furthermore, even if the force applied to the sensing node increases, the resistance value formed between the lower electrode, the pressure-sensitive layer, and the upper electrode continuously decreases; thus, the measurable pressure range is increased, preventing a degradation in pressure sensing performance.

[0077] Although embodiments of the present invention have been described above, the present invention is not limited to the above embodiments. Various modifications may be made within the scope of the detailed description of the invention and the attached drawings, provided that such modifications do not depart from the spirit of the invention and do not impair its effects. Furthermore, it is obvious that such embodiments fall within the scope of the present invention. Explanation of the symbols

[0079] 1 : Hybrid pressure sensor 10: First electrode 20: Electrical terminal 30: Pressure relief layer 40: Second electrode 50: Film 1 60: Film 2 70: Adhesive layer

Claims

Claim 1 A hybrid pressure sensor comprising: a lower electrode including a first electrode into which current flows and a second electrode into which current flows; an upper electrode positioned facing the lower electrode; and a pressure-sensitive layer positioned between the lower electrode and the upper electrode and comprising a material that generates a piezoelectric effect, wherein the first electrode and the second electrode are separated from each other. Claim 2 A hybrid pressure sensor according to claim 1, wherein the first electrode and the second electrode each comprise: a first partial electrode formed in a straight line shape; a second partial electrode attached to one end of the first partial electrode and formed in one of an arch shape, a fork shape, an L shape, or a straight line shape; and a third partial electrode having one end attached to the second partial electrode and formed in a straight line shape. Claim 3 A hybrid pressure sensor according to claim 2, wherein a plurality of third partial electrodes included in the first electrode and a plurality of third partial electrodes included in the second electrode are positioned spaced apart from each other while alternating in a certain direction. Claim 4 A hybrid pressure sensor according to claim 2, wherein the pressure-reducing layer is in the shape of an ellipse or a polygon and overlaps with the second partial electrode and the third partial electrode. Claim 5 A hybrid pressure sensor according to claim 4, wherein the upper electrode is in the shape of an ellipse or a polygon and overlaps with the pressure-reducing layer. Claim 6 A hybrid pressure sensor according to claim 1, wherein the pressure-sensitive layer is composed of a conductor and a polymer element, the conductor is composed of one or more of carbon, carbon nanotubes (CNT), and tungsten, and the polymer element is composed of one or more of epoxy, phenoxy, and polyimide. Claim 7 A hybrid pressure sensor according to claim 1, further comprising a first film and a second film that seal the lower electrode, the upper electrode, and the pressure-reducing layer in between. Claim 8 A hybrid pressure sensor according to claim 7, wherein the first film and the second film are each composed of one or more of polyethylene terephthalate, polyimide, polyurethane, polycarbonate, polymethyl methacrylate, polypropylene (PP), and polyethylene naphthalate. Claim 9 A hybrid pressure sensor according to claim 7, further comprising an adhesive layer that attaches the first film and the second film, located where the lower electrode, the upper electrode, and the pressure-sensitive layer are not located between the first film and the second film. Claim 10 A hybrid pressure sensor according to claim 1, further comprising a first electrical terminal connected to the first electrode and a second electrical terminal connected to the second electrode.

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