Substrate treatment apparatus and substrate treatment method

Abstract

A substrate processing device comprises a processing unit that performs a predetermined processing on a substrate, a holding support member that holds and supports the substrate, a conveying unit that includes a belt and a driving unit that displaces the holding support member in a first direction by moving said belt, a measuring unit capable of acquiring a vibration signal according to the vibration of the belt originating from the displacement of the holding support member, and a control unit. The control unit comprises a processing control unit that executes a process processing including a first processing in which a predetermined processing is performed sequentially on a plurality of substrates including the substrate by the processing unit, and a second processing in which the transfer unit performs the transfer and receipt of each of the plurality of substrates to and from the processing unit, a signal acquisition unit that acquires a vibration signal from the measuring unit, and a state determination unit that determines the state of the belt based on the vibration signal. The signal acquisition unit acquires the vibration signal during the execution period of the process processing.

Description

Technology Field

[0001] The present disclosure relates to a substrate processing apparatus and a substrate processing method. Background Technology

[0002] Patent Document 1 discloses a method for measuring the tension of a strip plate, comprising a first process for measuring air pressure fluctuations caused by vibration of the strip plate, a second process for extracting the natural frequency of the strip plate, and a third process for calculating the tension of the strip plate based on the extracted natural frequency. Prior art literature

[0003] Japanese Patent Publication No. 2005-337846 The problem to be solved

[0004] In a substrate processing apparatus that performs a predetermined process on a substrate, the substrate may be transported by a transport unit having a belt. The present disclosure provides a substrate processing apparatus and a substrate processing method capable of inspecting the condition of the belt while maintaining throughput. means of solving the problem

[0005] A substrate processing apparatus according to one aspect of the present disclosure comprises: a processing unit for performing a predetermined processing on a substrate; a holding support member for holding and supporting a substrate; a conveying unit having a belt and a driving member for displacing the holding support member in a first direction by moving said belt; a measuring unit provided in a state close to the belt and capable of acquiring a vibration signal according to the vibration of the belt originating from the displacement of the holding support member; and a control unit for controlling the processing unit, the conveying unit, and the measuring unit. The control unit comprises a processing control unit for executing a process processing including a first processing in which a predetermined processing is performed sequentially on a plurality of substrates including a substrate by the processing unit, and a second processing in which the transferring and receiving of each of the plurality of substrates to the processing unit is performed by the conveying unit; a signal acquiring unit for acquiring a vibration signal from the measuring unit; and a state determining unit for determining the state of the belt based on the vibration signal. The signal acquiring unit acquires the vibration signal during the execution period of the process processing. Effects of the invention

[0006] According to the present disclosure, a substrate processing apparatus and a substrate processing method are provided that can inspect the condition of the belt while maintaining throughput. Brief explanation of the drawing

[0007] FIG. 1 is a perspective view schematically illustrating an example of a substrate processing system. FIG. 2 is a schematic diagram illustrating an example of a coating development device. FIG. 3 is a plan view schematically illustrating an example of a return unit. FIG. 4 is a side view schematically illustrating an example of a return unit. FIG. 5(a) is a schematic diagram illustrating an example of the interior of a horizontal drive unit. FIG. 5(b) is a schematic diagram illustrating an example of a measuring unit. FIG. 6(a) is a schematic diagram illustrating an example of the interior of a lifting drive unit. FIG. 6(b) is a schematic diagram illustrating an example of the interior of a horizontal drive unit. FIG. 7 is a block diagram illustrating an example of the functional configuration of a control device. FIG. 8 is a block diagram illustrating an example of the hardware configuration of a control device. Figure 9 is a flowchart illustrating an example of a substrate processing method. FIG. 10 is a diagram illustrating an example of the processing timing of the return operation and belt inspection. Figure 11 is a flowchart illustrating an example of a belt inspection method. FIG. 12 (a) is a graph illustrating an example of a vibration signal according to the vibration of the belt. FIG. 12 (b) is a graph illustrating an example of the result of spectrum analysis of the vibration signal. Specific details for implementing the invention

[0008] Various exemplary embodiments are described below.

[0009] A substrate processing apparatus according to one exemplary embodiment comprises a processing unit that performs a predetermined processing on a substrate, a holding support member that holds and supports the substrate, a conveying unit having a belt and a driving unit that moves the belt to displace the holding support member in a first direction, a measuring unit that is positioned in close proximity to the belt and capable of acquiring a vibration signal according to the vibration of the belt originating from the displacement of the holding support member, and a control unit that controls the processing unit, the conveying unit, and the measuring unit. The control unit has a processing control unit that executes a process processing including a first processing in which a predetermined processing is performed sequentially on a plurality of substrates including the substrate by the processing unit, and a second processing in which the transferring and receiving of each of the plurality of substrates to the processing unit is performed by the conveying unit, a signal acquiring unit that acquires a vibration signal from the measuring unit, and a state determining unit that determines the state of the belt based on the vibration signal. The signal acquiring unit acquires the vibration signal during the execution period of the process processing.

[0010] In this substrate processing device, a vibration signal resulting from belt vibration is acquired during the execution period of the process, and the condition of the belt is determined based on the said vibration signal. Since this device does not require stopping the process processing by the substrate processing device to determine the condition of the belt, it becomes possible to inspect the condition of the belt while maintaining throughput.

[0011] The above-described substrate processing device may further be provided with an output unit that outputs a signal indicating that the belt's condition is not normal, based on a determination result by a condition determination unit. In this case, when it is determined that the belt's condition is not normal, it becomes possible to perform a different processing than when the belt's condition is normal.

[0012] In the second process, the processing control unit may execute a displacement process in which the holding support member is displaced along the first direction by the driving unit. The signal acquisition unit may acquire a vibration signal resulting from the belt vibration caused by the displacement in the said displacement process after the displacement process is completed. By acquiring the vibration signal after the displacement process is completed, it becomes possible to reduce the influence of disturbances included in said vibration signal.

[0013] The state determination unit may determine the state of the belt based on a vibration signal resulting from belt vibration after a predetermined time has elapsed following the completion of displacement processing. In this case, it becomes possible to further reduce the influence of disturbances included in the vibration signal.

[0014] The drive unit may further include two pulleys over which at least a portion of the belt is crossed. The measuring unit may be provided in close proximity to the portion of the belt positioned between the two pulleys. The predetermined time may be set according to the distance between the measuring unit and one of the two pulleys that is closer to the measuring unit. Since the time until the belt vibration is stopped depends on the length of the belt between the fixed end and the close position of the measuring unit, the above configuration makes it possible to determine the state appropriately according to the belt vibration.

[0015] The drive unit may further include a first pulley and a second pulley over which at least a portion of the belt is crossed, and a motor that rotates the first pulley to move the belt. The measuring unit may be positioned near the first pulley. In the displacement processing, the processing control unit may displace the holding support member by the drive unit in the direction from the second pulley toward the first pulley. In this case, it is assumed that a compressive force is applied to a portion of the belt between the member connected to the holding support member and the first pulley, accompanied by the stopping of the holding support member. Consequently, vibration in the portion of the belt increases, making it easy to acquire a vibration signal.

[0016] The drive unit may further include a slider that moves together with the holding support. The slider may be connected to a belt so as to be movable between the first pulley and the second pulley. Along the belt's path, the first pulley, the measuring unit, the slider, and the second pulley may be arranged in this order. In this case, since the vibration accompanying the movement of the slider increases in the portion of the belt between the first pulley and the slider, it is easy to acquire a vibration signal.

[0017] The processing control unit may repeat the displacement processing in the second processing. The signal acquisition unit may acquire a vibration signal corresponding to the belt vibration generated by the displacement in the said displacement processing for each displacement processing. The stop position of the holding support unit may be set to a different position for each displacement processing. The state determination unit may determine the state of the belt based on the stop position set for each displacement processing. In this case, even if the stop position is different, the stop position for each displacement processing is incorporated, making it possible to properly determine the state of the belt.

[0018] The conveying unit may further have a second driving unit that displaces the holding support member in a second direction. In the second processing, the processing control unit may execute a first displacement processing in which the holding support member is displaced by the driving unit in a first direction, and a second displacement processing in which the holding support member is displaced by the second driving unit in a second direction. The signal acquisition unit may acquire a vibration signal corresponding to the vibration of the belt caused by the displacement in the first displacement processing during a period that overlaps with at least a part of the execution period of the second displacement processing. In this case, since the operation by the conveying unit and the inspection of the belt overlap at least partially, it becomes possible to suppress the influence of the inspection of the belt on the processing including the operation of the conveying unit.

[0019] The drive unit may further include a first pulley and a second pulley arranged in a first direction over which at least a portion of the belt is traversed, a motor that moves the belt by rotating the first pulley, and a slider that moves together with a holding support. The slider may be connected to the belt so as to be movable between the first pulley and the second pulley. Along the belt's movement path, the first pulley, the measuring unit, the slider, and the second pulley may be arranged in this order. In this case, the vibration accompanying the movement of the slider increases in the portion of the belt between the first pulley and the slider, making it easy to acquire a vibration signal.

[0020] The drive unit may further include a first pulley and a second pulley arranged in a first direction over which at least a portion of the belt is traversed, and a slider that moves together with a retaining support. The slider may be connected to the belt so as to be movable between the first pulley and the second pulley. Along the belt's movement path, the measuring unit, the first pulley, the slider, and the second pulley may be arranged in this order. In this case, disturbances applied from the slider to the portion of the belt adjacent to the measuring unit are mitigated by passing through the first pulley, thereby making it possible to reduce the influence of disturbances included in the vibration signal.

[0021] A substrate processing method according to one exemplary embodiment comprises executing a process processing including a first processing step in which a predetermined processing step is performed sequentially on a plurality of substrates by a processing unit, and a second processing step in which each of the plurality of substrates is transferred to and from the processing unit by a conveying unit including a belt; acquiring a vibration signal corresponding to the vibration of the belt originating from the operation of the conveying unit by means of a measuring unit provided in proximity to the belt; and determining the state of the belt based on the vibration signal. Acquiring the vibration signal includes acquiring the vibration signal during the execution period of the process processing. In this substrate processing method, it is possible to inspect the state of the belt while maintaining throughput, similar to the substrate processing apparatus described above.

[0022] Hereinafter, an embodiment will be described with reference to the drawings. In the description, the same reference numerals are used for elements with the same function or elements with the same function, and redundant descriptions are omitted. In some of the drawings, an orthogonal coordinate system defined by the X-axis, Y-axis, and Z-axis is shown. In the following embodiment, the Z-axis corresponds to the vertical direction, and the X-axis and Y-axis correspond to the horizontal direction.

[0023] [Substrate Processing System]

[0024] The substrate processing system (1) illustrated in FIG. 1 is a system that performs the formation of a photosensitive film, exposure of the photosensitive film, and development of the photosensitive film on a work (W). The work (W) to be processed is, for example, a substrate, or a substrate in which a film or circuit, etc., is formed by performing a predetermined process. The substrate included in the work (W) is, for example, a wafer containing silicon. The work (W) (substrate) may be formed in a circular shape. The work (W) to be processed may be a glass substrate, a mask substrate, an FPD (Flat Panel Display), etc., or an intermediate obtained by performing a predetermined process on these substrates, etc. The photosensitive film is, for example, a resist film.

[0025] A substrate processing system (1) is equipped with a coating and developing device (2) and an exposure device (3). The coating and developing device (2) is a device for forming a resist film (photosensitive film) on a work (W). The exposure device (3) is a device for exposing the resist film formed on the work (W) (substrate). Specifically, the exposure device (3) irradiates an energy line onto the portion of the resist film to be exposed by a method such as immersion exposure. Before the exposure treatment by the exposure device (3), the coating and developing device (2) performs a treatment to form a resist film by applying a resist (chemical solution) to the surface of the work (W), and performs a development treatment of the resist film after the exposure treatment.

[0026] (Substrate processing device)

[0027] Hereinafter, as an example of a substrate processing device, the configuration of a coating and developing device (2) will be described. As shown in FIGS. 1 and 2, the coating and developing device (2) comprises a carrier block (4), a processing block (5), an interface block (6), and a control device (100) (control unit).

[0028] The carrier block (4) introduces a work (W) into the coating / developing device (2) and extracts a work (W) from the coating / developing device (2). For example, the carrier block (4) can support a plurality of carriers (C) for the work (W) and contains a conveying unit (A1) including a conveying arm. The carrier (C) accommodates, for example, a plurality of circular work (W). The conveying unit (A1) extracts the work (W) from the carrier (C) and transfers it to the processing block (5), and receives the work (W) from the processing block (5) and returns it to the carrier (C). The processing block (5) has processing modules (11, 12, 13, 14).

[0029] The processing module (11) incorporates a liquid treatment unit (U1), a heat treatment unit (U2), and a conveying unit (A3) for conveying the work (W) to these units. The processing module (11) forms a lower film on the surface of the work (W) by means of the liquid treatment unit (U1) and the heat treatment unit (U2). The liquid treatment unit (U1) applies a treatment liquid for forming the lower film onto the work (W). The heat treatment unit (U2) performs various heat treatments accompanying the formation of the lower film.

[0030] The processing module (12) incorporates a liquid treatment unit (U1), a heat treatment unit (U2), and a return unit (A3) for returning the workpiece (W) to these units. The processing module (12) forms a resist film on the lower film by means of the liquid treatment unit (U1) and the heat treatment unit (U2). The liquid treatment unit (U1) applies a treatment liquid (resist) for forming the resist film onto the lower film. The heat treatment unit (U2) performs various heat treatments accompanying the formation of the resist film.

[0031] The processing module (13) incorporates a liquid treatment unit (U1), a heat treatment unit (U2), and a return unit (A3) for returning the workpiece (W) to these units. The processing module (13) forms an upper layer film on the resist film by means of the liquid treatment unit (U1) and the heat treatment unit (U2). The liquid treatment unit (U1) applies a treatment liquid for forming the upper layer film onto the resist film. The heat treatment unit (U2) performs various heat treatments accompanying the formation of the upper layer film.

[0032] The processing module (14) incorporates a liquid treatment unit (U1), a heat treatment unit (U2), and a transport unit (A3) that transports the work (W) to these units. The processing module (14) performs a development treatment of the resist film that has undergone exposure treatment and a heat treatment accompanying the development treatment by the liquid treatment unit (U1) and the heat treatment unit (U2). The liquid treatment unit (U1) performs a development treatment of the resist film by applying a developer solution to the surface of the exposed work (W) and then washing it off with a rinse solution. The heat treatment unit (U2) performs various heat treatments accompanying the development treatment. Specific examples of heat treatments include heat treatment before development (PEB: Post Exposure Bake) and heat treatment after development (PB: Post Bake).

[0033] A shelf unit (U10) is provided on the carrier block (4) side within the processing block (5). The shelf unit (U10) is divided into a plurality of cells arranged in an up-and-down direction. A conveying unit (A7) including a lifting arm is provided near the shelf unit (U10). The conveying unit (A7) lifts and lowers a workpiece (W) between the cells of the shelf unit (U10).

[0034] A shelf unit (U11) is provided on the side of the interface block (6) within the processing block (5). The shelf unit (U11) is divided into a plurality of cells arranged in an up-and-down direction. Since the shelf unit (U10, U11) holds the work (W) in a waiting state (functioning as a buffer) to perform the next processing on the work (W), these shelf units (U10, U11) also correspond to processing units that perform processing on the work (W).

[0035] The interface block (6) performs the transfer of a work (W) between the exposure device (3) and the interface block (6). For example, the interface block (6) incorporates a conveying unit (A8) including a conveying arm and is connected to the exposure device (3). The conveying unit (A8) transfers the work (W) placed on the shelf unit (U11) to the exposure device (3). The conveying unit (A8) receives the work (W) from the exposure device (3) and returns it to the shelf unit (U11).

[0036] (Return Unit)

[0037] Next, with reference to FIGS. 3 and FIGS. 4, an example of a return unit (A3) in a processing module (12) will be described. The return unit (A3) returns the work (W) while holding and supporting the work (W) within the processing module (12). The return unit (A3) returns the work (W) among a plurality of processing units included in the processing module (12). In the processing module (12) illustrated in FIG. 3, two liquid processing units (U1) and two heat processing units (U2) are arranged in this order along a horizontal direction.

[0038] In the present disclosure, the direction from the heat treatment unit (U2) toward the liquid treatment unit (U1) is referred to as the "Y-axis forward direction," and the direction from the liquid treatment unit (U1) toward the heat treatment unit (U2) is referred to as the "Y-axis negative direction." The direction from the conveying unit (A3) toward the liquid treatment unit (U1) (or heat treatment unit (U2)) is referred to as the "X-axis forward direction," and the direction from the liquid treatment unit (U1) (heat treatment unit (U2)) toward the conveying unit (A3) is referred to as the "X-axis negative direction." Additionally, the vertical upward direction is referred to as the "Z-axis forward direction," and the vertical downward direction is referred to as the "Z-axis negative direction." A direction that includes either the forward or negative direction of each axis is simply referred to as the "X-axis direction," etc.

[0039] The return unit (A3) has, for example, a holding support arm (20), a horizontal drive unit (30, 50), and a lifting drive unit (70).

[0040] The holding support arm (20) (holding support part) is configured to hold and support the work (W). The holding support arm (20) holds and supports the work (W) such that the surface Wa of the work (W) faces upward. The surface Wa is the surface where the resist coating film is formed in the liquid treatment unit (U1). The holding support arm (20) may be formed to surround the periphery of the work (W) and support the periphery of the back side opposite to the surface Wa of the work (W). The transport unit (A3) performs the transfer of the work (W) to and from a processing unit, such as the liquid treatment unit (U1), by displacing the holding support arm (20) that holds and supports the work (W). That is, the transport unit (A3) brings the work (W) into one processing unit by displacing the holding support arm (20), and takes out the work (W) from the processing unit by displacing the holding support arm (20). The return unit (A3) may perform the transfer of multiple workpieces (W) to and from one processing unit.

[0041] The horizontal drive unit (30) is configured to displace the holding support arm (20) in a horizontal direction. The horizontal drive unit (30) is an actuator configured to reciprocate the holding support arm (20) along a horizontal direction by means of a power source, such as a motor. As shown in FIG. 4, the conveying unit (A3) further includes a rotary drive unit (46) and a support (48) that support the horizontal drive unit (30). The rotary drive unit (46) is a rotary actuator configured to rotate the horizontal drive unit (30) around a vertical axis of rotation by means of a power source, such as a motor. As the horizontal drive unit (30) rotates by means of the rotary drive unit (46), the direction of movement of the holding support arm (20) by the horizontal drive unit (30) changes.

[0042] For example, the horizontal drive unit (30) shown in FIG. 4 is arranged by a rotary drive unit (46) to reciprocate the holding support arm (20) in the X-axis direction. In this arrangement, the horizontal drive unit (30) moves the holding support arm (20) in the X-axis forward direction and moves the holding support arm (20) in the X-axis negative direction. As the horizontal drive unit (30) moves the holding support arm (20) in the X-axis direction (either the X-axis forward direction or the X-axis negative direction), the work (W) held and supported by the holding support arm (20) moves along the X-axis direction (first direction). The horizontal drive unit (30) is formed to extend along the direction in which the holding support arm (20) is moved (e.g., the X-axis direction). Details of the driving mechanism of the horizontal drive unit (30) will be described later. The support (48) is a member that supports the rotary drive unit (46) and the horizontal drive unit (30). A rotary drive unit (46) is provided on a base (48), and the base (48) is formed to extend, for example, along the X-axis direction. One end of the base (48) in the X-axis direction (for example, each of the two sides of the end end) is connected to a lifting drive unit (70).

[0043] The lifting drive unit (70) is configured to displace the holding support arm (20) in the vertical direction (the illustrated Z-axis direction). The lifting drive unit (70) is an actuator configured to reciprocate the holding support arm (20) along the Z-axis direction (first direction) by means of a power source such as a motor, for example. The lifting drive unit (70) supports, for example, a stand (48), moves the stand (48) in the Z-axis forward direction, and moves the stand (48) in the Z-axis negative direction. As the lifting drive unit (70) moves the stand (48) in the Z-axis direction, the holding support arm (20) (work (W)) also moves along the Z-axis direction. The lifting drive unit (70) is formed to extend along the Z-axis direction that moves the stand (48) (holding support arm (20)). Details of the lifting drive unit (70) will be described later.

[0044] Returning to FIG. 3, the horizontal drive unit (50) is configured to displace the holding support arm (20) in a horizontal direction (the illustrated Y-axis direction). The horizontal drive unit (50) is an actuator configured to reciprocate the holding support arm (20) along the Y-axis direction (first direction) by means of a power source, such as a motor. The horizontal drive unit (50) supports, for example, a lifting drive unit (70), moves the lifting drive unit (70) in the Y-axis forward direction, and moves the lifting drive unit (70) in the Y-axis negative direction. As the horizontal drive unit (50) moves the lifting drive unit (70) in the Y-axis direction, the holding support arm (20) (work (W)) also moves along the Y-axis direction. The horizontal drive unit (50) is formed to extend along the Y-axis direction. Details of the driving mechanism of the horizontal drive unit (50) will be described later.

[0045] (Details of the measurement unit and each drive unit)

[0046] Next, with reference to FIGS. 5 and 6, a measuring unit used to inspect the condition of the belt included in each driving unit will be described along with the detailed configuration of each driving unit. The coating and developing device (2) further comprises measuring units (130, 150, 170).

[0047] The measuring unit (130) is used to inspect the condition of the belt of the horizontal drive unit (30). The measuring unit (150) is used to inspect the condition of the belt of the horizontal drive unit (50). The measuring unit (170) is used to inspect the condition of the belt of the lifting drive unit (70). In the present disclosure, inspecting the condition of the belt means inspecting whether the belt can operate normally. In one example, the belt (drive unit) may not operate normally due to the deterioration of the belt over time or problems with belt adjustment, and in order to prevent these in advance, the belt is inspected using each measuring unit. Below, the drive unit and the measuring unit are described for each axis.

[0048] <Y축 방향>

[0049] Figure 5(a) illustrates details of a horizontal drive unit (50) for displacing a holding support arm (20) in the Y-axis direction. The horizontal drive unit (50) includes a belt arranged such that at least a portion of it extends along the Y-axis direction, and displaces the holding support arm (20) in the Y-axis direction by moving the belt. The horizontal drive unit (50) includes, for example, a housing (52), pulleys (56a, 56b), a belt (58), a motor (62), and a slider (54).

[0050] The housing (52) accommodates each element included in the horizontal drive unit (50). The housing (52) is formed to extend along the Y-axis direction. An opening (52a) is provided in the wall of the housing (52) facing a plurality of processing units (see FIG. 4). A part of the slider (54) protrudes out of the housing (52) from the opening (52a).

[0051] As illustrated in FIG. 5(a), pulleys (56a) (first pulley) and (56b) (second pulley) are arranged along the Y-axis direction. Pulleys (56a, 56b) are positioned at each end of the housing (52), for example, in the Y-axis direction. Pulleys (56a, 56b) are each provided within the housing (52) so as to be rotatable around a rotation axis along the X-axis direction. A belt (58) is stretched over the pulleys (56a, 56b). The belt (58) is, for example, a timing belt. A motor (62) is a power source that generates rotational torque. The motor (62) is, for example, a servo motor. The motor (62) is connected to pulley (56a) and rotates pulley (56a). When torque (driving force) from the motor (62) is transmitted to the pulley (56a), the belt (58) across the pulleys (56a, 56b) moves along the Y-axis direction.

[0052] The slider (54) is formed to extend in the X-axis direction, for example, as shown in FIG. 4. The base end of the slider (54) in the X-axis direction (the end further from the processing unit) is connected to a belt (58) within the housing (52). The front end of the slider (54) in the X-axis direction (the end closer to the processing unit) protrudes out of the housing (52) through an opening (52a). The lower end of the lifting drive unit (70), for example, is connected to the front end of the slider (54). In this way, the slider (54) is connected to the holding support arm (20) through another member and moves together with the holding support arm (20). When the belt (58) moves along the Y-axis direction by the torque of the motor (62), the slider (54) (lifting drive unit (70)) connected to the belt (58) also moves back and forth along the Y-axis direction, and as a result, the holding support arm (20) and the work (W) also move along the Y-axis direction.

[0053] In the above horizontal drive unit (50), the slider (54) is configured to be movable between pulleys (56a) and (56b). When the slider (54) is positioned at one location between the pulleys (56a, 56b), the belt (58) includes a first part (58a) that extends along the Y-axis direction and connects between the pulleys (56a, 56b), and a second part (58b) that extends along the Y-axis direction and connects between the pulleys (56a, 56b). The first part (58a) and the second part (58b) are arranged along the Z-axis direction and are approximately parallel to each other. In the example shown in FIG. 5 (a), the slider (54) is connected to the first part (58a). Hereinafter, in the first part (58a), the space between the pulley (56a) and the slider (54) is referred to as the “string (64a),” and the space between the slider (54) and the pulley (56b) is referred to as the “string (64b).”

[0054] The measuring unit (150) is configured to acquire a signal (hereinafter referred to as a "vibration signal") resulting from the vibration of the belt (58) of the horizontal drive unit (50). Specifically, the measuring unit (150) acquires a vibration signal resulting from the vibration of the belt (58) that occurs in conjunction with the movement (transport operation) of the holding support arm (20) by the horizontal drive unit (50). The measuring unit (150) acquires, for example, sound waves (air vibrations) generated by the vibration of the belt (58). The measuring unit (150) is provided in the transport unit (A3) (inside the housing (52)) in a state close to the belt (58). The measuring unit (150) may have two sensors (sensors (92, 94)) for measuring sound waves. Sensor (92) and sensor (94) have a common function.

[0055] As illustrated in FIG. 5(b), the sensor (92) and the sensor (94) are positioned to fit the belt (58). In one example, the sensor (92) and the sensor (94) are arranged along the Z-axis direction. That is, in the Z-axis direction, the sensor (92), the belt (58), and the sensor (94) are arranged in this order. Each of the sensors (92, 94) is positioned to acquire sound waves from the belt (58). The distance in the Z-axis direction between the sensor (92) and the belt (58) is approximately equal to the distance in the Z-axis direction between the sensor (94) and the belt (58). The sensor (92) acquires sound wave SW1 transmitted from the belt (58) in the Z-axis forward direction, and the sensor (94) acquires sound wave SW2 transmitted from the belt (58) in the Z-axis negative direction. In one example, each of the sensors (92, 94) is a MEMS (Micro Electro Mechanical Systems) microphone. The measurement unit (150) (each of the sensors (92, 94)) outputs an electrical signal according to the sound waves SW1 and SW2 to the control device (100).

[0056] The measuring unit (150) (sensor (92, 94)) may be positioned near the pulley (56a) to which the motor (62) is connected. In one example, the measuring unit (150) is positioned at a location where the distance from the pulley (56a) is less than or equal to 1 / 3 of the distance in the Y-axis direction between the pulley (56a) and the pulley (56b). The measuring unit (150) is positioned near the pulley (56a) on the string (64a) of the first part (58a), for example, as shown in FIG. 5(a). In this case, the slider (54) is configured to be movable between a position that does not interfere with the measuring unit (150) and a position that does not interfere with the pulley (56b).

[0057] In the above configuration, along the movement path of the belt (58) (the movement trajectory of the belt (58) accompanying the movement of the belt (58) by the motor (62)), the pulley (56a), the measuring unit (150), the slider (54), and the pulley (56b) are arranged in this order. Additionally, depending on the position of the slider (54) in the Y-axis direction, the area corresponding to each of the first part (58a) and the second part (58b) (64a, 64b) described above in the belt (58) changes. However, regardless of where the slider (54) is positioned within the movement range, the above-described arrangement relationship (arrangement relationship along the movement path of the belt (58)) of the pulley (56a), the measuring unit (150), the slider (54), and the pulley (56b) is established.

[0058] The horizontal drive unit (50) exemplified above is used, for example, to move a workpiece (W) between processing units of a processing module (12). In one example, the horizontal drive unit (50) is used to move a workpiece (W) from the liquid processing unit (U1) located at the 1st position counted from the Y-axis forward direction to the heat processing unit (U2) located at the 3rd position (see FIG. 3). Specifically, the conveying unit (A3) is positioned such that the base of the holding support arm (20) overlaps with the support (48), and the horizontal drive unit (50) moves the holding support arm (20) from a position opposite to the liquid processing unit (U1) in the X-axis direction (overlapping position in the Y-axis direction) to a position opposite to the heat processing unit (U2) in the X-axis direction. At this time, the slider (54) shown in FIG. 5 (a) moves from the pulley (56b) toward the pulley (56a) (measuring unit (150)). When the holding support arm (20) moves in the Y-axis forward direction by the horizontal drive unit (50), the slider (54) moves from the pulley (56a) (measuring unit (150)) toward the pulley (56b).

[0059] <Z축 방향>

[0060] In FIG. 6(a), details of a lifting drive unit (70) for displacing a holding support arm (20) in the Z-axis direction are shown. In FIG. 6(a), one of a pair of parts of the lifting drive unit (70) that hold a support (48) in the Y-axis direction is shown (see FIG. 3). The lifting drive unit (70) includes a belt arranged such that at least a portion of it extends along the Z-axis direction, and displaces the holding support arm (20) in the Z-axis direction by moving the belt. The lifting drive unit (70) has, for example, a housing (72), pulleys (76a, 76b), a belt (78), a motor (82), and a slider (74).

[0061] The housing (72) accommodates each element included in the lifting drive unit (70). The housing (72) is formed to extend along the Z-axis direction. An opening (72a) is provided in the wall of the housing (72) facing the support (48). A part of the slider (74) protrudes out of the housing (72) from the opening (72a).

[0062] Pulleys (76a) (first pulley) and (76b) (second pulley) are arranged along the Z-axis direction. The height position of pulley (76a) is lower than the height position of pulley (76b). Pulleys (76a, 76b) are arranged at each end of the housing (72) in the Z-axis direction, for example. Pulleys (76a, 76b) are each provided within the housing (72) so as to be rotatable around a rotation axis along the X-axis direction. A belt (78) is stretched over the pulleys (76a, 76b). The belt (78) is, for example, a timing belt. A motor (82) is a power source that generates rotational torque. The motor (82) is, for example, a servo motor. The motor (82) is connected to pulley (76a) and rotates pulley (76a). When torque (driving force) from the motor (82) is transmitted to the pulley (76a), the belt (78) across the pulleys (76a, 76b) moves along the Z-axis direction.

[0063] The slider (74) is formed to extend in the Y-axis direction, for example, as shown in FIG. 6 (a). The base end of the slider (74) in the Y-axis direction (the end further from the support (48)) is connected to the belt (78) within the housing (72). The front end of the slider (74) in the Y-axis direction (the end closer to the support (48)) protrudes out of the housing (72) through the opening (72a). The side of the end of the support (48), for example, is connected to the front end of the slider (74). In this way, the slider (74) is connected to the holding support arm (20) through another member and moves together with the holding support arm (20). As the belt (78) moves along the Z-axis direction by the torque from the motor (82), the slider (74) (support (48)) connected to the belt (78) also moves back and forth along the Z-axis direction. As the slider (74) (support (48)) moves along the Z-axis direction, the holding support arm (20) and the work (W) also move along the Z-axis direction.

[0064] In the above lifting drive unit (70), the slider (74) is configured to be movable between pulleys (76a) and (76b). When the slider (74) is positioned at one location between the pulleys (76a, 76b), the belt (78) includes a first part (78a) that extends along the Z-axis direction and connects between the pulleys (76a, 76b), and a second part (78b) that extends along the Z-axis direction and connects between the pulleys (76a, 76b). The first part (78a) and the second part (78b) are arranged along the Y-axis direction and are approximately parallel to each other. In the example shown in FIG. 5 (a), the slider (74) is connected to the first part (78a).

[0065] The measuring unit (170) is configured to acquire a vibration signal resulting from the vibration of the belt (78) of the lifting drive unit (70). Specifically, the measuring unit (170) acquires a vibration signal resulting from the vibration of the belt (78) that occurs in conjunction with the movement (transport operation) of the holding support arm (20) by the lifting drive unit (70). The measuring unit (170) acquires, for example, sound waves generated by the vibration of the belt (78). The measuring unit (170) is provided in the transport unit (A3) (inside the housing (72)) in a state close to the belt (78). The measuring unit (170) may have two sensors (sensors (92, 94)) for measuring sound waves, similar to the measuring unit (150) described above.

[0066] The sensors (92) and (94) of the measurement unit (170) are arranged to fit the belt (78). In one example, the sensors (92) and (94) are arranged along the Y-axis direction. That is, in the Y-axis direction, the sensors (92), the belt (78), and the sensors (94) are arranged in this order. The measurement unit (170) (each of the sensors (92, 94)) outputs an electrical signal according to the sound waves SW1 and SW2 from the belt (78) to the control device (100).

[0067] The measuring unit (170) (sensor (92, 94)) may be placed near the pulley (76a) to which the motor (82) is connected. The measuring unit (170) is placed near the pulley (76a) in the second part (78b) to which the slider (74) is not connected, for example as shown in FIG. 6 (a). In this case, since the slider (74) does not interfere with the measuring unit (170), it is configured to be movable between a position that does not interfere with the pulley (76a) and a position that does not interfere with the pulley (76b). The measuring unit (170) may be placed at a position where the distance from the pulley (76a) is less than or equal to 1 / 3 of the distance in the Z-axis direction between the pulley (76a) and the pulley (76b). The distance between the position (fixed position) of the measuring unit (170) and the pulley (56a) may be equal to or smaller than the distance between the top of the slider (74) and the pulley (56a) when the slider (74) is positioned at the limit position closest to the pulley (76a) during the movement range of the slider (74).

[0068] In the above configuration, the measuring unit (170), pulley (76a), slider (74), and pulley (76b) are arranged in this order along the movement path of the belt (78). Additionally, depending on the position of the slider (74) in the Z-axis direction, the area corresponding to the first part (78a) and the second part (78b) of the belt (78) changes. However, regardless of where the slider (74) is positioned within the movement range, the above-described arrangement relationship (arrangement relationship along the movement path of the belt (78)) of the measuring unit (170), pulley (76a), slider (74), and pulley (76b) is established.

[0069] The lifting drive unit (70) exemplified above is used to move the holding support arm (20) in the transfer of a work (W) to a processing unit, for example. In one example, the conveying unit (A3) moves the holding support arm (20) from one height position to a position lower than that height position by means of the lifting drive unit (70) in a state where the base end of the holding support arm (20) is positioned so as not to overlap with the support (48) (a state where the front end of the holding support arm (20) is located within the processing unit). At this time, the slider (74) shown in FIG. 6 (a) moves from the pulley (76b) toward the pulley (76a). When the holding support arm (20) moves in the Z-axis forward direction by means of the lifting drive unit (70), the slider (74) moves from the pulley (76a) toward the pulley (76b).

[0070] <X축 방향>

[0071] In FIG. 6(b), a horizontal drive unit (30) for displacing a holding support arm (20) in the X-axis direction is illustrated. The horizontal drive unit (30) includes a belt, at least a portion of which is arranged along the X-axis direction, and displaces the holding support arm (20) in the X-axis direction by moving the belt. The horizontal drive unit (30) has, for example, a housing (32), pulleys (36a, 36b, 36c, 36d), a belt (38), a motor (42), and a slider (34).

[0072] The housing (32) accommodates each element included in the horizontal drive unit (30). The housing (32) is formed to extend along the X-axis direction. For example, an opening (32a) is provided in the upper wall of the housing (32). A part of the slider (34) protrudes out of the housing (32) from the opening (32a).

[0073] Pulley (36a) (first pulley) and pulley (36b) (second pulley) are arranged along the X-axis direction. The distance in the X-axis direction between pulley (36a) and the liquid treatment unit (U1) (heat treatment unit (U2)) is smaller than the distance between pulley (36b) and the liquid treatment unit (U1). Pulleys (36a, 36b) are arranged, for example, at each end of the housing (32) in the X-axis direction. Pulley (36c) and pulley (36d) are arranged between pulleys (36a, 36b) in the X-axis direction and below pulleys (36a, 36b) in the Z-axis direction. The height position of pulley (36c) is higher than the height position of pulley (36d). In the X-axis direction, pulley (36a), pulley (36c), pulley (36d), and pulley (36b) are arranged in this order. Each pulley (36a, 36b, 36c, 36d) is provided within the housing (32) so as to be rotatable around a rotation axis following the Y-axis direction.

[0074] The belt (38) is stretched over pulleys (36a, 36b, 36c, 36d). The belt (38) is, for example, a timing belt. The motor (42) is a power source that generates rotational torque. The motor (42) is, for example, a servo motor. The motor (42) is connected to the pulley (36d) and rotates the pulley (36d). When the torque (driving force) from the motor (42) is transmitted to the pulley (36d), the belt (38) stretched over the pulleys (36a, 36b, 36c, 36d) moves along the X-axis direction between the pulleys (36a, 36b).

[0075] The slider (34) is formed to extend in the Z-axis direction, for example, as shown in FIG. 6 (b). The base end (the lower end) of the slider (34) in the Z-axis direction is connected to the belt (38) within the housing (32). The front end (the upper end) of the slider (34) in the Z-axis direction protrudes out of the housing (32) through the opening (32a). The front end of the slider (34) is connected to, for example, the base end (the part of the holding support arm (20) that does not hold the work (W)). In this way, the slider (34) is connected to the holding support arm (20) and moves together with the holding support arm (20). As the belt (38) moves along the X-axis direction by the torque of the motor (42), the slider (34) (holding support arm (20)) connected to the belt (38) also moves back and forth along the X-axis direction. As the slider (34) (holding support arm (20)) moves along the X-axis direction, the work (W) held and supported by the holding support arm (20) also moves along the X-axis direction.

[0076] In the above horizontal drive unit (30), the slider (34) is configured to be movable between pulleys (36a) and (36b). When the slider (34) is positioned at one location between the pulleys (36a, 36b), the belt (38) includes a first part (38a) that extends along the X-axis direction and connects between the pulleys (36a, 36b), and a second part (38b) that connects between the pulleys (36a, 36d). When viewed from the Y-axis direction, the second part (38b) is inclined relative to the first part (38a). In the example shown in FIG. 6 (b), the slider (34) is connected to the first part (38a).

[0077] The measuring unit (130) is configured to acquire a vibration signal resulting from the vibration of the belt (38) of the horizontal drive unit (30). Specifically, the measuring unit (130) acquires a vibration signal resulting from the vibration of the belt (38) that occurs in conjunction with the movement (transport operation) of the holding support arm (20) by the horizontal drive unit (30). The measuring unit (130) acquires, for example, sound waves generated by the vibration of the belt (38). The measuring unit (130) is provided in the transport unit (A3) (inside the housing (32)) in a state close to the belt (38). The measuring unit (130) may have two sensors (sensors (92, 94)) for measuring sound waves, similar to the measuring unit (150) described above.

[0078] The sensors (92) and (94) of the measurement unit (130) are arranged to fit the belt (38). In one example, the sensors (92) and (94) are arranged along a direction orthogonal to the second part (38b) of the belt (38). That is, in a direction orthogonal to the second part (38b), the sensors (92), the belt (38), and the sensors (94) are arranged in this order. The measurement unit (130) (each of the sensors (92, 94)) outputs an electrical signal according to the sound waves SW1 and SW2 from the belt (38) to the control device (100).

[0079] The measuring unit (130) (sensor (92, 94)) may be positioned between pulley (36a) and pulley (36d). The measuring unit (130) is positioned approximately in the center (near the approximately center pulley (36a)) between pulley (36a) and pulley (36d) of the second part (38b) where the slider (34) is not connected, for example as shown in FIG. 6(b). In this case, since the slider (34) does not interfere with the measuring unit (130), it is configured to be movable between a position that does not interfere with pulley (36a) and a position that does not interfere with pulley (36b).

[0080] In the above configuration, the measuring unit (130), pulley (36a), slider (34), and pulleys (36b, 36c, 36d) are arranged in this order along the movement path of the belt (38). Additionally, depending on the position of the slider (34) in the X-axis direction, the area corresponding to the first part (38a) and the second part (38b) of the belt (38) changes. However, even if the slider (34) is positioned at any location within the movement range, the above-described arrangement relationship (arrangement relationship along the movement path of the belt (38)) of the measuring unit (130), pulley (36a), slider (34), and pulleys (36b, 36c, 36d) is established.

[0081] The horizontal drive unit (30) exemplified above is used to move the holding support arm (20) to move a workpiece (W) in and out of a processing unit, for example. In one example, the conveying unit (A3) moves the holding support arm (20) from a position where the base of the holding support arm (20) overlaps with the support (48) in the X-axis direction, while facing the processing unit of the loading / unloading location, to a position where the base of the holding support arm (20) does not overlap with the support (48). At this time, the slider (34) shown in FIG. 6 (b) moves from the pulley (36b) toward the pulley (36a). When the holding support arm (20) is moved in the X-axis direction by the horizontal drive unit (30), the slider (34) moves from the pulley (36a) toward the pulley (36b).

[0082] (controller)

[0083] Next, an example of a control device (100) will be described with reference to FIGS. 7 and FIGS. 8. The control device (100) controls a coating / developing device (2). The control device (100) controls at least a liquid treatment unit (U1), a heat treatment unit (U2), a conveying unit (A3), and a measuring unit (130, 150, 170). The control device (100) has, for example, a processing control unit (202) and an inspection control unit (204) as functional components (hereinafter referred to as "functional modules"). The inspection control unit (204) has a signal acquisition unit (212), a data extraction unit (214), a frequency calculation unit (216), a memory unit (218), a state determination unit (220), and an output unit (222). The processing performed by each functional module corresponds to the processing performed by the control device (100).

[0084] The processing control unit (202) performs process processing for a plurality of workpieces (W). Process processing is the sequential execution of a series of processes (e.g., a series of processes from the formation of a lower film to the development process) performed in the coating and developing device (2) over a predetermined period for a plurality of workpieces (W). Process processing includes a first process of performing a predetermined process (e.g., liquid treatment or heat treatment) on a plurality of workpieces (W) by a processing unit such as a liquid treatment unit (U1) (heat treatment unit (U2)). Additionally, process processing includes a second process of performing the transfer of a plurality of workpieces (W) to a single processing unit such as a liquid treatment unit (U1) by a return unit (A3).

[0085] The second process includes a displacement process in which the holding support arm (20) is displaced by a horizontal drive unit (30) along the X-axis direction, a displacement process in which the holding support arm (20) is displaced by a horizontal drive unit (50) along the Y-axis direction, and a displacement process in which the holding support arm (20) is displaced by a lifting drive unit (70) along the Z-axis direction. Each of these three displacement processes includes a displacement process in which the holding support arm (20) is displaced in the forward direction of each axis, and a displacement process in which the holding support arm (20) is displaced in the negative direction of each axis.

[0086] The signal acquisition unit (212) acquires a vibration signal corresponding to the vibration of the belt from each of the measurement units (130, 150, 170). For example, the signal acquisition unit (212) acquires a vibration signal corresponding to the vibration of the belt by calculating the difference between two electrical signals corresponding to sound waves SW1 and SW2 from the sensors (92, 94) of each measurement unit. The signal acquisition unit (212) acquires the vibration signal during the execution period of the process processing. For example, the signal acquisition unit (212) acquires the vibration signal without stopping the series of processing (operation of the device) by the coating and developing device (2) during the operation period of the coating and developing device (2). In one example, the signal acquisition unit (212) acquires a vibration signal (vibration signal corresponding to the vibration of the belt generated by the displacement in the displacement processing) from the belt of the driving unit corresponding to the displacement processing, while the holding support arm (20) on the said axis is in a stopped state after the displacement processing of each axis is completed.

[0087] The data extraction unit (214) extracts data used for inspecting the belt (hereinafter referred to as "analysis data") from the vibration signal acquired by the signal acquisition unit (212). For example, the data extraction unit (214) extracts data from the vibration signal from the time when a first predetermined time has elapsed after the displacement processing is finished (after the holding support arm (20) is stopped) and from the time when a second predetermined time has elapsed again from the first predetermined time. The first predetermined time and the second predetermined time are set in advance and are set to a length such that sound waves corresponding to the belt's vibration can be measured after the displacement processing is finished. For example, the first predetermined time is set to a length of several tens of milliseconds to several hundred milliseconds, and the second predetermined time is set to a length of several milliseconds to several tens of milliseconds.

[0088] The frequency calculation unit (216) calculates the vibration frequency of the belt based on the analysis data extracted by the data extraction unit (214). For example, the frequency calculation unit (216) calculates a frequency spectrum by performing a Fast Fourier Transform on the analysis data, and detects (calculates) the frequency with the largest amplitude from the frequency spectrum as the vibration frequency of the belt.

[0089] The memory unit (218) stores the frequency (vibration frequency) of the belt vibration calculated by the vibration frequency calculation unit (216) for each axis. The memory unit (218) stores the vibration frequency of the belt that is repeatedly calculated by the vibration frequency calculation unit (216) for each axis during a predetermined period. The predetermined period is set in advance and may be, for example, one day, one week, one month, or several months, or it may be the period from the start of operation of the coating / developing device (2) until the shutdown of operation for maintenance, etc.

[0090] The state determination unit (220) determines the state of the belt based on the vibration signal acquired by the signal acquisition unit (212) for each axis. The state determination unit (220) determines whether the state of the belt is abnormal based on the calculated result of the belt frequency stored by the memory unit (218), for example, for each axis. In the present disclosure, the abnormal state of the belt includes not only cases where the belt is already broken, but also cases where it is close to a broken state (i.e., cases where it is highly likely to become inoperable if continued to be used as is).

[0091] The output unit (222) outputs a signal (hereinafter referred to as an "abnormal signal") indicating that the condition of the belt on the corresponding axis is not normal, according to the determination result for each axis by the condition determination unit (220). For example, when the output unit (222) indicates that the condition of the belt is abnormal according to the determination result by the condition determination unit (220), it outputs the abnormal signal to a monitor for reporting to an operator, etc. Alternatively, when the output unit (222) indicates that the condition of the belt is abnormal according to the determination result by the condition determination unit (220), it outputs the abnormal signal to the processing control unit (202) to stop a series of processing (process processing) by the coating / developing device (2).

[0092] The control device (100) is configured by one or more control computers. For example, the control device (100) has a circuit (240) as shown in FIG. 8. The circuit (240) has one or more processors (242), memory (244), storage (246), an input / output port (248), and a timer (252). The storage (246) has a memory medium readable by a computer, such as a hard disk, for example. The memory medium stores a program for executing the substrate processing method described later on the control device (100). The memory medium may be an extractable medium such as a non-volatile semiconductor memory, a magnetic disk, and an optical disk. The memory (244) temporarily stores a program loaded from the memory medium of the storage (246) and the results of operations by the processor (242).

[0093] The processor (242) executes the program in cooperation with the memory (244). The input / output port (248) performs input and output of electrical signals between the liquid processing unit (U1), the return unit (A3), and the measurement units (130, 150, 170), etc., according to a command from the processor (242). The timer (252) measures the elapsed time, for example, by counting reference pulses of a certain period. In addition, the hardware configuration of the control device (100) may be configured by a dedicated logic circuit or an ASIC (Application Specific Integrated Circuit) that integrates it.

[0094] [Substrate Processing Method]

[0095] Next, with reference to FIG. 9, a coating and developing process performed in a coating and developing device (2) as an example of a substrate processing method will be described. FIG. 9 is a flowchart illustrating an example of a coating and developing process including an exposure process, and illustrates the sequence of coating and developing processes for one work (W). First, the processing control unit (202) of the control device (100) controls a conveying unit (A1) to convey the work (W) in the carrier (C) to a shelf unit (U10), and controls a conveying unit (A7) to place the work (W) in a cell for a processing module (11).

[0096] Next, the processing control unit (202) controls the processing module (11) to form a lower layer film on the surface Wa of the work (W) (step S01). In step S01, for example, the processing control unit (202) controls the return unit (A3) to return the work (W) from the shelf unit (U10) to the liquid treatment unit (U1). Then, the processing control unit (202) controls the liquid treatment unit (U1) to form a coating film of the processing liquid for forming a lower layer film on the surface Wa of the work (W). The processing control unit (202) controls the return unit (A3) to return the work (W) with the coating film formed to the heat treatment unit (U2). Then, the processing control unit (202) controls the heat treatment unit (U2) to form a lower layer film on the surface Wa of the work (W). After that, the processing control unit (202) controls the return unit (A3) to return the work (W) after the lower layer film has been formed to the shelf unit (U10), and controls the return unit (A7) to place the work (W) into a cell for the processing module (12).

[0097] Next, the processing control unit (202) controls the processing module (12) to form a resist film on the surface Wa of the work (W) after the lower layer film is formed (step S02). In step S02, for example, the processing control unit (202) controls the return unit (A3) to return the work (W) of the shelf unit (U10) to a liquid processing unit (U1) within the processing module (12). Then, the processing control unit (202) controls the liquid processing unit (U1) to form a resist coating film on the surface Wa of the work (W). The processing control unit (202) controls the return unit (A3) to return the work (W) with the resist coating film formed to a heat treatment unit (U2). Then, the processing control unit (202) controls the heat treatment unit (U2) to form a resist film on the surface Wa of the work (W). After that, the processing control unit (202) controls the return unit (A3) to return the work (W) after the resist film has been formed to the shelf unit (U10), and controls the return unit (A7) to place the work (W) into a cell for the processing module (13).

[0098] Next, the processing control unit (202) controls the processing module (13) to form an upper layer film on the surface Wa of the work (W) after the resist film has been formed (step S03). In step S03, for example, the processing control unit (202) controls the return unit (A3) to return the work (W) to the liquid treatment unit (U1). Then, the processing control unit (202) controls the liquid treatment unit (U1) to form a coating film of the treatment liquid for forming an upper layer film on the surface Wa of the work (W). The processing control unit (202) controls the return unit (A3) to return the work (W) with the coating film formed to the heat treatment unit (U2). Then, the processing control unit (202) controls the heat treatment unit (U2) to form an upper layer film on the surface Wa of the work (W). After that, the processing control unit (202) controls the return unit (A3) to return the work (W) after the upper layer film has been formed to the shelf unit (U11).

[0099] Next, the processing control unit (202) controls the transport unit (A8) to send the work (W) of the shelf unit (U11) to the exposure device (3). Then, a control device separate from the control device (100) controls the exposure device (3) to perform exposure processing on the work (W) on which the resist film has been formed (step S04). After that, the processing control unit (202) receives the work (W) that has undergone exposure processing from the exposure device (3) and controls the transport unit (A8) to place it in a cell for the processing module (14) in the shelf unit (U11).

[0100] Next, the processing control unit (202) controls the processing module (14) to perform a development process on the work (W) after the exposure process has been performed (step S05). In step S05, for example, the processing control unit (202) controls the conveying unit (A3) to convey the work (W) to the heat treatment unit (U2), and then controls the heat treatment unit (U2) to perform a heat treatment before development on the resist film of the work (W). Then, the processing control unit (202) controls the conveying unit (A3) to convey the work (W) that has undergone the heat treatment before development to the liquid treatment unit (U1), and then controls the liquid treatment unit (U1) to perform a development process on the resist film of the work (W).

[0101] After that, the processing control unit (202) controls the return unit (A3) to return the work (W) that has undergone development processing to the heat treatment unit (U2), and then controls the heat treatment unit (U2) to perform heat treatment after development on the resist film of the work (W). Then, the processing control unit (202) controls the return unit (A3) to return the work (W) to the shelf unit (U10), and controls the return unit (A7) and the return unit (A1) to return the work (W) into the carrier (C). By the above, the coating development processing for one work (W) is completed.

[0102] In the substrate processing method exemplified above, the control device (100) (inspection control unit (204)) inspects the condition of the belt of each drive unit in parallel with the conveying operation (displacement processing) of each of the plurality of workpieces (W) in a series of process processing by the coating / developing device (2). Each conveying operation of the workpiece (W) includes the displacement processing of the holding support arm (20) in a state where it is not holding and supporting the workpiece (W), and the displacement processing of the holding support arm (20) in a state where it is holding and supporting the workpiece (W). After the displacement processing of the holding support arm (20) in the X-axis direction, the control device (100) inspects the condition of the belt (38) of the horizontal drive unit (30) using a measuring unit (130). After the displacement processing of the holding support arm (20) in the Y-axis direction, the control device (100) inspects the condition of the belt (58) of the horizontal drive unit (50) using a measuring unit (150). The control device (100) uses a measurement unit (170) to check the condition of the belt (78) of the lifting drive unit (70) after processing the displacement of the holding support arm (20) in the Z-axis direction.

[0103] FIG. 10 partially illustrates a timing chart of a conveying operation (displacement processing) of a holding support arm (20) performed in the process of forming a resist film of step S02 shown in FIG. 9, and a belt inspection performed in conjunction with said conveying operation. In part of step S02, for example, the processing control unit (202) of the control device (100) performs the operation of taking out a work (W) from a liquid treatment unit (U1), the operation of moving a work (W) from a liquid treatment unit (U1) to a heat treatment unit (U2), and the operation of bringing in a work (W) to a heat treatment unit (U2) in sequence.

[0104] In the operation of removing the workpiece (W) from the liquid treatment unit (U1), first, an "X-axis outgoing" operation is performed. In this X-axis outgoing operation, the processing control unit (202) of the control device (100) is positioned opposite the liquid treatment unit (U1) in the X-axis direction (an overlapping position in the Y-axis direction) and the holding support arm (20) is not holding and supporting the workpiece (W), and the horizontal driving unit (30) performs a displacement processing (first displacement processing) to displace the holding support arm (20) in the forward direction in the X-axis direction.

[0105] Then, a "Z-axis up" operation is performed. In this Z-axis up operation, the processing control unit (202) performs a displacement processing (second displacement processing) by means of the lifting drive unit (70) (second drive unit) to displace the holding support arm (20) in the forward direction in the Z-axis direction (second direction) in order to receive the workpiece (W) from the liquid processing unit (U1). During a period that overlaps with at least a portion of the execution period of the displacement processing by this lifting drive unit (70), an "X-axis inspection" is performed. In this X-axis inspection, the inspection control unit (204) acquires a vibration signal corresponding to the vibration of the belt (38) of the horizontal drive unit (30) caused by the displacement in the preceding X-axis forward direction displacement processing (X-axis outward operation), and performs an inspection of the belt (38) (e.g., calculation and storage of the frequency of vibration) based on the acquired vibration signal. After that, an "X-axis pulling" operation is performed. In this X-axis pulling operation, the processing control unit (202) performs a displacement processing that displaces the holding support arm (20) holding and supporting the work (W) in the X-axis direction.

[0106] Next, in the movement of the workpiece (W) from the liquid treatment unit (U1) to the heat treatment unit (U2), a "Y-axis movement" is performed. In this Y-axis movement, the processing control unit (202) performs a displacement processing (first displacement processing) by the horizontal driving unit (50) to displace the holding support arm (20) in the Y-axis direction.

[0107] Next, in the operation of bringing the workpiece (W) into the heat treatment unit (U2), first, an "X-axis outgoing" operation is performed. In this X-axis outgoing operation, the processing control unit (202) performs a displacement processing (second displacement processing) by the horizontal drive unit (30) (second drive unit) to displace the holding support arm (20) holding and supporting the workpiece (W) in the forward direction in the X-axis direction (second direction). During a period that overlaps with at least a portion of the execution period of the displacement processing by this horizontal drive unit (30), a "Y-axis inspection" is performed. In this Y-axis inspection, the inspection control unit (204) acquires a vibration signal corresponding to the vibration of the belt (58) of the horizontal drive unit (50) caused by the displacement in the preceding Y-axis negative direction displacement processing (Y-axis operation), and performs an inspection of the belt (58) based on the acquired vibration signal.

[0108] Then, a "Z-axis down" operation is performed. In this Z-axis down operation, the processing control unit (202) performs a displacement process (second displacement process) by the lifting drive unit (70) to displace the holding support arm (20) in the Z-axis direction in a negative direction so as to transfer the workpiece (W) held and supported by the holding support arm (20) to the heat treatment unit (U2). During a period that overlaps with at least a portion of the execution period of the displacement process by the lifting drive unit (70), an "X-axis inspection" is performed. In this X-axis inspection, the inspection control unit (204) acquires a vibration signal corresponding to the vibration of the belt (38) of the horizontal drive unit (30) caused by the displacement in the previous X-axis forward direction displacement process (displacement process in the X-axis forward direction that holds and supports the workpiece (W)), and performs an inspection of the belt (38) (e.g., calculation and storage of the vibration frequency) based on the acquired vibration signal.

[0109] After that, an "X-axis pulling" operation is performed. In this X-axis pulling operation, the processing control unit (202) performs a displacement processing (second displacement processing) by the horizontal drive unit (30) to displace the holding support arm (20) that is not holding and supporting the work (W) in the X-axis direction. During a period that overlaps with at least a portion of the execution period of the displacement processing by this lifting drive unit (70), a "Z-axis inspection" is performed. In this Z-axis inspection, the inspection control unit (204) acquires a vibration signal corresponding to the vibration of the belt (78) of the lifting drive unit (70) caused by the displacement in the Z-axis direction one previous time (Z-axis down operation), and performs an inspection of the belt (78) (e.g., calculation and storage of the frequency of vibration) based on the acquired vibration signal. By the above, the operation of bringing the work (W) into the heat treatment unit (U2) is completed.

[0110] Afterward, the control device (100) repeats the same conveying operation and inspection. In the inspection above, the inspection control unit (204) may repeat the calculation and memory of the vibration frequency of the belt (38) of the horizontal drive unit (30) in conjunction with the conveying operation in the X-axis negative direction, and may not perform the calculation and memory of the vibration frequency of the belt (38) in conjunction with the conveying operation in the X-axis forward direction. Alternatively, the inspection control unit (204) may repeat the calculation of the vibration frequency of the belt (38) in conjunction with the conveying operation in the X-axis forward direction, and may not perform the calculation of the vibration frequency of the belt (38) in conjunction with the conveying operation in the X-axis negative direction. In addition, unlike the example described above, the inspection control unit (204) may calculate the vibration frequency of the belt (38) in conjunction with the conveying operation in the X-axis forward direction (X-axis negative direction) in either the state where the holding support arm (20) holds and supports the work (W) or the state where it does not hold and support the work (W), and may not calculate the vibration of the belt (38) in conjunction with the conveying operation in the X-axis forward direction (X-axis negative direction) in the other state. For inspections accompanying the conveying operation in the Y-axis direction and the conveying operation in the Z-axis direction, the inspection control unit (204) may repeat the calculation of the vibration frequency of the belt in the same operation (or the same operation and state) as in the X-axis direction.

[0111] Next, with reference to FIGS. 11 and FIGS. 12, the inspection of a belt in a single-axis drive unit will be described. FIG. 11 is a flowchart illustrating an example of a processing procedure (inspection method) in which the frequency of vibration is repeatedly calculated and the belt (38) is inspected during a forward X-axis conveying operation (displacement processing).

[0112] In this inspection method, first, the control device (100) waits until the displacement processing in the X-axis forward direction is completed (step S21). In step S21, for example, the inspection control unit (204) waits until the movement of the holding support arm (20) to a position where the base of the holding support arm (20) does not overlap with the support (48) is stopped. In one example, the inspection control unit (204) obtains information from the processing control unit (202) that the rotation by the motor (62) of the horizontal drive unit (30) has stopped.

[0113] In step S21, if it is determined that the displacement processing has been completed (step S21: yes), the control device (100) acquires a vibration signal corresponding to the vibration of the belt (38) originating from the displacement processing in the X-axis forward direction (step S22). For example, the signal acquisition unit (212) acquires a vibration signal from the measurement unit (130) during the period from the time the displacement processing in the X-axis forward direction is completed until a predetermined time has elapsed. During the execution of step S22, the processing control unit (202) may perform displacement processing in an axis other than the X-axis direction, or may execute processing on the work (W) by the processing unit.

[0114] Next, the control device (100) extracts analysis data used for inspecting the belt from the vibration signal acquired by the signal acquisition unit (212) (step S23). As illustrated in FIG. 12 (a), for example, the data extraction unit (214) extracts data from the vibration signal between a first predetermined time t1 after the time of termination of displacement processing (time of stopping of the holding support arm (20)) and a second predetermined time t2 as analysis data. The first predetermined time t1 and the second predetermined time t2 are pre-set based on the time at which sound waves caused by the vibration of the belt originating from the displacement of the holding support arm (20) can be measured. The first predetermined time t1 is set as the time at which vibration accompanying the stopping of the holding support arm (20) (slider) is assumed to begin from the time of termination of displacement processing in a part of the belt to which the inspection unit is approaching. The second predetermined time t2 is set as the time during which the vibration of the belt accompanying the stopping of the holding support arm (20) (slider) is assumed to continue.

[0115] Next, the control device (100) calculates the frequency of the vibration of the belt (38) occurring in conjunction with the displacement processing of step S21 based on the analysis data extracted by the data extraction unit (214) (step S24). For example, the frequency calculation unit (216) calculates a frequency spectrum as shown in FIG. 12 (b) by performing a Fast Fourier Transform on the analysis data. Then, the frequency calculation unit (216) calculates the frequency with the largest amplitude from the calculated frequency spectrum (frequency f1 in the example shown in FIG. 12 (b)) as the frequency of the belt (38). Next, the control device (100) (memory unit (218)) stores information indicating the calculated frequency of the belt (38) (step S25).

[0116] Next, the control device (100) determines whether a predetermined period has elapsed from a predetermined reference point (step S26). In step S26, for example, the control device (100) determines whether a predetermined period (e.g., 1 day) has elapsed from the start of operation of the coating / developing device (2). In step S26, if it is determined that a predetermined period has not elapsed (step S26: No), the control device (100) repeats steps S21 to S26. Accordingly, the control device (100) (inspection control unit (204)) acquires a vibration signal corresponding to the vibration of the belt (38) caused by the displacement in each displacement processing while the processing control unit (202) repeats the execution of displacement processing. Then, the inspection control unit (204) calculates the vibration frequency of the belt (38) for each displacement processing and stores the calculated vibration frequency. As a result, multiple measurement values ​​for the vibration frequency of the belt (38) are stored in the memory unit (218).

[0117] Next, the control device (100) calculates a frequency (hereinafter referred to as "determination frequency") to be used for determining the state of the belt (38) (step S27). In step S27, for example, the state determination unit (220) calculates a statistical value for a plurality of measured values ​​of frequencies stored over a predetermined period as the determination frequency. In one example, the state determination unit (220) calculates the average value, median value, lower limit value, upper limit value, or standard deviation of a plurality of measured values ​​for the frequency of the belt (38) as the determination frequency.

[0118] Next, the control device (100) (state determination unit (220)) determines whether the determination frequency is smaller than a predetermined threshold (step S28). The threshold is pre-set and, for example, is set based on a value obtained by measuring the frequency of the belt when the tension of the belt is intentionally lowered. In step S28, if it is determined that the determination frequency is smaller than the threshold (step S28: yes), the control device (100) outputs an abnormal signal indicating that the state of the belt (38) is not normal (step S29).

[0119] In step S29, for example, the output unit (222) outputs an abnormal signal indicating that the belt (38) is faulty, or an abnormal signal indicating that the belt (38) is approaching a faulty state. In one example, the output unit (222) outputs the abnormal signal to a monitor for reporting to an operator, etc. Alternatively, the output unit (222) outputs the abnormal signal to the processing control unit (202), and the processing control unit (202), upon receiving the abnormal signal, stops the process processing by the coating / developing device (2). Meanwhile, if the judgment frequency is determined to be above the threshold (step S28: No), the control device (100) does not execute step S29. Due to the abnormality, the series of processing steps for the inspection of the belt (38) is terminated.

[0120] In the flow described above, the inspection of the belt (38) with respect to the X-axis was described, but the inspection of the belt (58) with respect to the Y-axis and the inspection of the belt (78) with respect to the Z-axis may also be performed in the same way as the inspection of the belt (38).

[0121] In step S23, the first predetermined time t1 for determining the range of data extraction may be set to a different value for each axis. The first predetermined time t1 may be set according to the distance between the measuring unit and one of the two pulleys sandwiching the measuring unit that is closer to the measuring unit. For example, as the distance between the measuring unit and the pulley increases, the first predetermined time t1 may be set to a longer value. In the example described above, the distance between the pulley (36a) of the horizontal drive unit (30) in the X-axis direction and the measuring unit (130) is greater than the distance between the pulley (56a) of the horizontal drive unit (50) in the Y-axis direction and the measuring unit (150), and greater than the distance between the pulley (76a) of the lifting drive unit (70) in the Z-axis direction and the measuring unit (170). That is, the first predetermined time t1 for the X-axis direction is longer than the first predetermined time t1 for the Y-axis direction and longer than the first predetermined time t1 for the Z-axis direction.

[0122] In the inspection of the belt (58) with respect to the Y-axis, the steps S21 to S26 described above are repeated. In this case, the inspection control unit (204) may calculate the frequency of vibration of the belt (58) for each displacement process in which the processing control unit (202) displaces the holding support arm (20) in the Y-axis direction during a predetermined period. Regarding the movement of the holding support arm (20) in the Y-axis direction, the stopping position of the holding support arm (20) (the stopping position of the slider (54)) differs depending on the processing unit of the loading / unloading location. If the stopping position of the slider (54) differs, the length of the part of the belt (58) where the measuring unit (150) is provided (the length from the slider (54) to the pulley (56a)) differs, and the frequency of vibration changes regardless of whether there is an abnormality in the condition of the belt (58).

[0123] Accordingly, in step S24, the frequency calculation unit (216) may correct the frequency of the belt (58) so that the frequency calculated according to the stopping position of the holding support arm (20) (slider (54)) corresponds to the frequency at a reference position arbitrarily determined among the stopping positions. The frequency calculation unit (216) may convert the frequency calculated from the vibration signal into a frequency in the case where the slider (54) is assumed to be stopped at the reference position by using an equation that defines the relationship between the length, tension, and unit mass of the string and the natural frequency of the string. In this case, the memory unit (218) stores information indicating the corrected frequency. Then, the state determination unit (220) determines the state of the belt (58) by comparing the statistical value for the corrected frequency with a threshold. This threshold is determined based on the state of the belt (58) in which the slider (54) is located at the reference position. As described above, the state determination unit (220) may determine the state of the belt (58) based on the vibration signal obtained from the vibration of the belt (58) and also based on the stop position set for each displacement processing.

[0124] In the inspection of the belt (78) with respect to the Z-axis, the steps S21 to S26 described above are repeated. In this case, the inspection control unit (204) may calculate the frequency of vibration of the belt (78) for each displacement process in which the processing control unit (202) displaces the holding support arm (20) in the Z-axis direction (downward) during a predetermined period.

[0125] In the example described above, the vibration signal is acquired from the time the displacement processing ends, and some data of the vibration signal is extracted by the data extraction unit (214), but the signal acquisition unit (212) may acquire the vibration signal during the period used to calculate the vibration frequency. For example, the signal acquisition unit (212) may not start acquiring the vibration signal at the time the displacement processing ends, but may start acquiring the vibration signal at the time when a first predetermined time t1 has elapsed, and stop acquiring the vibration signal at the time when a second predetermined time t2 has elapsed from the first predetermined time t1. In this case, extraction of some data by the data extraction unit (214) may not be performed. As described above, regardless of whether data is extracted, the state determination unit (220) determines the state of the belt based on the vibration signal resulting from the vibration of the belt after the first predetermined time t1 has elapsed since the displacement processing ended.

[0126] [Effect of the implementation form]

[0127] In the coating and developing device (2) and substrate processing method described above, a vibration signal due to the vibration of the belt is acquired during the execution period of the process processing, and the condition of the belt is determined based on the said vibration signal. In this device and method, since there is no need to stop the process processing by the coating and developing device (2) to determine the condition of the belt, it is possible to inspect the condition of the belt while maintaining throughput.

[0128] If the belt tension decreases due to deterioration over time, there is a risk that failures such as belt breakage or tooth skipping may occur. Since the belt tension depends on the vibration frequency of the belt, belt failures can be prevented in advance by regularly checking the belt's vibration frequency. As a method for inspecting the condition of the belt, it is thought that a series of processes performed in the coating and developing device (2) should be stopped and the belt's vibration frequency measured. However, if the operation of the coating and developing device (2) is stopped, the throughput of the workpiece (W) decreases. In contrast, with the above device and method, the belt's vibration frequency is measured without stopping the operation of the coating and developing device (2) (without stopping the process processing), so the belt tension can be inspected without decreasing the throughput.

[0129] The coating and developing device (2) described above further comprises an output unit (222) that outputs an abnormal signal indicating that the condition of the belt is not normal, based on the judgment result of the condition judgment unit (220). In this case, when it is determined that the condition of the belt is not normal, it becomes possible to perform a different process than when the condition of the belt is normal.

[0130] In the coating and developing device (2) described above, the processing control unit (202) performs a displacement processing in which the holding support arm (20) is displaced along the first direction by the driving unit during the second processing of moving the workpiece (W) into and out of each processing unit. The signal acquisition unit (212) acquires a vibration signal corresponding to the vibration of the belt caused by the displacement in the displacement processing after the displacement processing is completed. The vibration signal acquired during the execution of the displacement processing may contain a large amount of information regarding vibration caused by disturbances. In the above configuration, by acquiring the vibration signal from the end of the displacement processing, it becomes possible to reduce the influence of disturbances included in the vibration signal.

[0131] In the coating and developing device (2) described above, the state determination unit (220) determines the state of the belt based on a vibration signal resulting from the vibration of the belt after a predetermined time has elapsed since the displacement processing is completed. In the vibration signal obtained immediately after the displacement processing is completed, information regarding vibration caused by disturbances may remain. With the above configuration, it is possible to further reduce the influence of disturbances included in the vibration signal.

[0132] In the coating and developing device (2) described above, the driving unit further includes two pulleys over which at least a portion of the belt is crossed. A measuring unit may be provided in close proximity to the portion of the belt positioned between the two pulleys. A predetermined time may be set according to the distance between the measuring unit and one of the two pulleys that is closer to the measuring unit. It is assumed that the time until the belt vibration is stopped depends on the length of the belt between the fixed end and the position close to the measuring unit. In the above configuration, since the predetermined time changes according to the length of the belt between the fixed end and the measuring unit, it becomes possible to determine the state appropriately according to the belt vibration.

[0133] In the coating and developing device (2) described above, the driving unit further includes a first pulley and a second pulley over which at least a portion of the belt is crossed, and a motor that rotates the first pulley to move the belt. A measuring unit is positioned near the first pulley. In the displacement processing, the processing control unit displaces the holding support arm (20) by the driving unit in the direction from the second pulley toward the first pulley. In this case, when the holding support arm (20) stops during the displacement processing, the inertial force of the slider connected to the holding support arm (20) is generated in the direction toward the first pulley. Therefore, it is thought that a compressive force is applied to a portion of the belt between the slider and the first pulley in conjunction with the stopping of the holding support arm (20) (slider). As a result, the vibration of the portion of the belt that includes the portion of the belt and where the measuring unit is positioned increases, making it easy to acquire a vibration signal.

[0134] In the coating and developing device (2) described above, the driving unit further includes a slider that moves together with the holding support arm (20). The slider is connected to a belt so that it can move between the first pulley and the second pulley. Along the movement path of the belt, the first pulley, the measuring unit, the slider, and the second pulley are arranged in this order. When the slider moves from the second pulley toward the first pulley, the impact accompanying the stopping of the slider during displacement processing in the part of the belt between the first pulley and the slider increases, making it easier to acquire a vibration signal.

[0135] In the coating and developing device (2) described above, the processing control unit repeatedly performs displacement processing in the Y-axis direction during the second processing. The signal acquisition unit (212) acquires a vibration signal corresponding to the vibration of the belt (58) caused by the displacement in each displacement processing. The stopping position of the holding support arm (20) is set to a different position for each displacement processing. The state determination unit (220) determines the state of the belt (58) based on the stopping position set for each displacement processing. In this case, even if the stopping position of the holding support arm (20) is different, the stopping position of the holding support arm (20) for each displacement processing is added, making it possible to properly determine the state of the belt (58).

[0136] In the coating and developing device (2) described above, the conveying unit (A3) further has a second driving unit that displaces the holding support arm (20) in a second direction. The processing control unit (202) performs a first displacement processing in which the holding support arm (20) is displaced by the driving unit in a first direction, and a second displacement processing in which the holding support arm (20) is displaced by the second driving unit in a second direction, in the second processing. The signal acquisition unit (212) acquires a vibration signal corresponding to the vibration of the belt caused by the displacement in the first displacement processing during a period that overlaps with at least a part of the execution period of the second displacement processing. In this case, since the operation by the conveying unit (A3) and the inspection of the belt overlap at least partially, it becomes possible to suppress the influence on the process processing by the inspection of the belt.

[0137] In the coating and developing device (2) described above, the driving unit further comprises a first pulley and a second pulley arranged in a first direction over which at least a portion of the belt is traversed, a motor that moves the belt by rotating the first pulley, and a slider that moves together with a holding support arm (20). The slider is connected to the belt so as to be movable between the first pulley and the second pulley. Along the belt's movement path, the first pulley, the measuring unit, the slider, and the second pulley are arranged in this order. In this case, the vibration accompanying the movement of the slider increases in the portion of the belt between the first pulley and the slider, making it easy to acquire a vibration signal.

[0138] In the coating and developing device (2) described above, the driving unit further includes a first pulley and a second pulley arranged in a first direction over which at least a portion of the belt is crossed, and a slider that moves together with a holding support arm (20). The slider is connected to the belt so as to be movable between the first pulley and the second pulley. Along the movement path of the belt, the measuring unit, the first pulley, the slider, and the second pulley may be arranged in this order. In this case, the disturbance applied from the slider to the portion of the belt near the measuring unit is reduced by passing through the first pulley, making it possible to reduce the influence of the disturbance included in the vibration signal.

[0139] [Variation Example]

[0140] Although embodiments relating to the present disclosure have been described in detail above, various modifications may be added to the above embodiments within the scope of the gist of the present disclosure. The conveying unit (A3) may further comprise a separate holding support arm (20) and a separate horizontal drive unit (30) that displaces the separate holding support arm (20) at least in the X-axis direction. The horizontal drive unit (30) and the separate horizontal drive unit (30) may be arranged in a vertical direction. In this case, the coating / developing device (2) may further comprise a separate measuring unit (130) for inspecting the belt (38) of the other horizontal drive unit (30).

[0141] The conveying unit (A3) may not have any one of the three drive units, the horizontal drive unit (30), the horizontal drive unit (50), and the lifting drive unit (70), nor may it have any two of the drive units. The drive mechanisms of the horizontal drive unit (30, 50) and the lifting drive unit (70) are not limited to the examples described above, and the drive unit may have a belt arranged to extend at least in the direction of movement. In each drive unit, the belt may be stretched over three pulleys or five or more pulleys.

[0142] The measurement unit (130, 150, 170) does not need to have either of the sensors (92, 94). Additionally, when the sensors (92, 94) are positioned to fit the belt, the sound wave SW1 acquired by the sensor (92) and the sound wave SW2 acquired by the sensor (94) are in phase with the air vibration caused by the disturbance, and the air vibration caused by the belt is in opposite phase. Therefore, by making the difference between the sound wave SW1 and the sound wave SW2 a vibration signal, the air vibration caused by the belt is reinforced, and a signal is obtained in which the air vibration caused by the disturbance is reduced. The measurement unit (130, 150, 170) may be configured in any way as long as it is possible to acquire a signal corresponding to the vibration of the belt.

[0143] The placement locations of the measuring units (130, 150, 170) are not limited to the examples described above. The measuring units may be placed at any location along the belt's path of travel as long as they can acquire a vibration signal corresponding to the belt's vibration without interfering with other members (e.g., sliders). That is, the pulley, slider, and measuring units may be placed in any order along the belt's path of travel.

[0144] In the case of a transport unit other than the transport unit (A3) of the processing module (12), inspection of the belt of each drive unit may be performed in the same manner as in the transport unit (A3) of the processing module (12). The coating and developing device (2) may be equipped with a unit that performs a processing other than liquid treatment and heat treatment as a processing unit that performs a predetermined treatment on the work (W). For example, the coating and developing device (2) may be equipped with an inspection unit for inspecting the condition of the surface Wa, and the transport unit (A3) may perform the transfer of the work (W) to and from said inspection unit. The substrate processing system (1) may be configured in any way provided that it is equipped with at least one processing unit, a transport unit that performs the transfer of the work (W) to said processing unit, a measurement unit for inspecting the belt of the drive unit included in the transport unit, and a control unit.

Claims

Claim 1 A processing unit that performs a predetermined processing on a substrate, a holding support member that holds and supports the substrate, a conveying unit having a belt and a driving unit that moves the belt to displace the holding support member in a first direction, a measuring unit provided in a state close to the belt and capable of acquiring a vibration signal according to air vibration, and a control unit that controls the processing unit, the conveying unit, and the measuring unit, wherein the control unit has a processing control unit that performs conveying of the substrate by the conveying unit, a signal acquisition unit that acquires the vibration signal from the measuring unit, and a state determination unit that determines the state of the belt based on the vibration signal, wherein the processing control unit performs a displacement processing that displaces the holding support member along the first direction by the driving unit, and the state determination unit determines the state of the belt based on the vibration signal according to the air vibration, and wherein the processing control unit performs the displacement processing when either the transfer of the substrate to or from the processing unit is performed by the conveying unit, and the signal acquisition unit performs the displacement processing after the displacement processing is completed A substrate processing device that acquires the vibration signal according to the vibration of the belt caused by displacement in displacement processing. Claim 2 A substrate processing device according to claim 1, wherein the signal acquisition unit acquires the vibration signal according to the air vibration generated by the displacement in the displacement processing. Claim 3 A substrate processing device according to claim 1 or 2, wherein the driving unit further comprises a first pulley and a second pulley over which at least a portion of the belt is crossed, and a motor that rotates the first pulley to move the belt, the measuring unit is disposed near the first pulley, and the processing control unit, in the displacement processing, displaces the holding support member by the driving unit in the direction from the second pulley toward the first pulley. Claim 4 A processing unit that performs a predetermined processing on a substrate, a holding support member that holds and supports the substrate, a conveying unit having a belt and a driving unit that moves the belt to displace the holding support member in a first direction, a measuring unit provided in a state close to the belt and capable of acquiring a vibration signal according to air vibration, and a control unit that controls the processing unit, the conveying unit, and the measuring unit. The control unit has a processing control unit that performs conveying of the substrate by the conveying unit, a signal acquisition unit that acquires the vibration signal from the measuring unit, and a state determination unit that determines the state of the belt based on the vibration signal. The processing control unit performs a displacement processing that displaces the holding support member along the first direction by the driving unit, and the state determination unit determines the state of the belt based on the vibration signal according to the air vibration. The conveying unit further has a second driving unit that displaces the holding support member in a second direction, and the processing control unit performs a second displacement that displaces the holding support member by the second driving unit in the second direction. A substrate processing device that further performs processing, wherein the signal acquisition unit acquires the vibration signal according to the vibration of the belt caused by the displacement in the displacement processing during a period that overlaps with at least a part of the execution period of the second displacement processing. Claim 5 A substrate processing apparatus according to claim 1 or 2, wherein the driving unit further comprises a first pulley and a second pulley that are positioned over at least a portion of the belt and arranged in the first direction, a motor that moves the belt by rotating the first pulley, and a slider that moves together with the holding support, wherein the slider is connected to the belt so as to be movable between the first pulley and the second pulley, and the first pulley, the measuring unit, the slider, and the second pulley are arranged in this order along the movement path of the belt. Claim 6 A substrate processing apparatus according to claim 1 or 2, wherein the driving unit further comprises a first pulley and a second pulley arranged in the first direction over which at least a portion of the belt is crossed, and a slider that moves together with the holding support, wherein the slider is connected to the belt so as to be movable between the first pulley and the second pulley, and the measuring unit, the first pulley, the slider, and the second pulley are arranged in this order along the movement path of the belt. Claim 7 A method for processing a substrate, comprising: performing a predetermined treatment on a substrate; performing a displacement treatment in which the holding support member is displaced along a first direction by means of a drive member of a conveying unit having a holding support member that holds and supports the substrate and a drive member that displaces the holding support member in a first direction by moving the belt; acquiring a vibration signal according to air vibration from a measuring unit provided in proximity to the belt; determining the state of the belt based on the vibration signal; performing the displacement treatment when either the loading or unloading of the substrate is performed by the conveying unit; and acquiring the vibration signal according to the vibration of the belt generated by the displacement in the displacement treatment after the displacement treatment is completed. Claim 8 A substrate processing method comprising: performing a predetermined processing on a substrate; performing a displacement processing by the driving unit of a conveying unit having a holding support member that holds and supports the substrate, a driving unit that moves the holding support member in a first direction by moving the belt, and a second driving unit that displaces the holding support member in a second direction; performing a second displacement processing by the second driving unit that displaces the holding support member in the second direction; acquiring a vibration signal according to air vibration from a measuring unit provided in proximity to the belt; and determining the state of the belt based on the vibration signal, wherein acquiring the vibration signal includes acquiring a signal according to the vibration of the belt generated by the displacement in the displacement processing as the vibration signal during a period that overlaps with at least a part of the execution period of the second displacement processing. Claim 9 A storage medium storing a program for executing the substrate processing method described in paragraph 7 or 8 on a device.

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