Diffusion-couple synthesis method using a graphene synthesis tool

Abstract

A diffusion-couple synthesis method using a modified or unchanged commercial bonding tool comprising: providing a substrate load which comprises at least two prepared substrates; wherein said tool can apply pressure and elevated temperature to said substrate within a process chamber; placing said substrate load within said process chamber; applying said pressure and said elevated temperature; wherein each of said at least two prepared substrates comprises a carbon source disposed directly atop a diffusion layer, the diffusion layer disposed directly atop an oxide layer, and a device substrate with the oxide layer disposed atop, one of said at least two prepared substrates is disposed above another, wherein the device substrate of one of said at least two prepared substrates is directly atop said carbon source of other of said at least two prepared substrates; and forming graphene at an interface between said oxide layer and said diffusion layer of each of said at least two prepared substrates.