Clean room facility

Abstract

Provided is a clean room facility in which the temperatures of a plurality of clean rooms can be set to appropriate temperatures by means of a simple configuration. A clean room facility (100) comprises a plurality of clean rooms including a first clean room and a second clean room, a chamber (C1) provided as one common space above the ceilings of the plurality of clean rooms, an air conditioner (32), a plurality of air supply fans (1a-4a), at least one air return fan (11a, 12a), and a duct shaft (DS2) for guiding air from the prescribed second clean room to the chamber (C1). The second clean room is provided on the downstream side of the first clean room in the flow direction of air inside the chamber (C1). An air flow channel inside the chamber (C1) is throttled on the upstream side of the duct shaft (DS2).

Description

Clean Room Facility

[0001] The present disclosure relates to clean room facilities.

[0002] Clean rooms with high levels of air purity are used in regenerative medicine, pharmaceutical manufacturing, etc. Regarding such clean rooms, for example, Patent Document 1 discloses a configuration in which "the spaces above the ceiling of each of a plurality of clean rooms are included in the chamber as a single common space."

[0003] Patent No. 7181425

[0004] As described above, in the technology described in Patent Document 1, the chamber above the ceiling serves as a single common space for multiple clean rooms. In such a configuration, if the heat loads during air conditioning differ among the multiple clean rooms, there is a possibility that a clean room with a low heat load (e.g., a changing room) may become too cold. Even in a configuration where multiple clean rooms share a common chamber, it is desirable to maintain each clean room at an appropriate temperature, but Patent Document 1 does not describe such a technology.

[0005] Therefore, an object of the present disclosure is to provide a clean room facility that is capable of maintaining the temperatures of multiple clean rooms at appropriate levels with a simple configuration.

[0006] In order to solve the above-mentioned problems, the clean room facility of the present disclosure comprises a plurality of clean rooms including a first clean room and a second clean room, a chamber provided as a single common space above the ceiling of the plurality of clean rooms, an air conditioner whose blowing side is connected to the chamber via a duct, a plurality of supply air fans that supply air from the chamber to each of the plurality of clean rooms, a return air fan that returns air from at least one of the plurality of clean rooms to the chamber, and a duct shaft that guides air from a predetermined second clean room to the chamber, wherein the second clean room is provided downstream of the first clean room in the air flow direction in the chamber, and the air flow path in the chamber is narrowed upstream of the duct shaft.

[0007] According to the present disclosure, it is possible to provide a clean room facility that is capable of maintaining the temperatures of multiple clean rooms at appropriate temperatures with a simple configuration.

[0008] FIG. 1 is an explanatory diagram showing the layout of each room in a clean room facility according to a first embodiment. FIG. 2 is an explanatory diagram showing the air flow in a clean room facility according to a second modified example of the first embodiment. FIG. 3 is an explanatory diagram showing the air flow in a clean room facility according to a second modified example of the first embodiment. FIG. 4 is an explanatory diagram showing the air flow in a clean room facility according to a third embodiment. FIG. 5 is an explanatory diagram showing the air flow in a clean room facility according to a fourth embodiment. FIG. 6 is an explanatory diagram showing the air flow in a clean room facility according to a fifth embodiment. FIG. 7 is an explanatory diagram showing the air flow in a clean room facility according to a reference embodiment. FIG. 8 is an explanatory diagram showing the air flow in a clean room facility according to a combination of the first embodiment and the reference embodiment.

[0009] First Embodiment Configuration of Clean Room Facility Fig. 1 is an explanatory diagram showing the layout of each room in a clean room facility 100 according to a first embodiment. Note that Fig. 1 does not show an outside air processing unit 31 (see Fig. 2), which will be described later. The shaded areas in Fig. 1 indicate the ranges of convex portions 51 and 52 provided in a chamber C1 (see Fig. 2) above the ceiling of each clean room. The open arrow X in Fig. 1 indicates the direction in which air flows through the chamber C1 (see Fig. 2).

[0010] The clean room facility 100 is a facility that adjusts the temperature, pressure, cleanliness, etc. of multiple clean rooms such as a preparation room R1, a pass room R2, and a changing room R3. Such a clean room facility 100 is used, for example, for cell culture processing and the production of sterile preparations (vaccines, injections, eye drops, etc.).

[0011] In the example of Figure 1, the clean room facility 100 has "multiple clean rooms" including a preparation room R1 (first clean room), a pass room R2 (second clean room), and a changing room R3 (second clean room).

[0012] The anteroom R4 is a general room for which cleanliness is not specifically controlled. Predetermined preprocessing, analysis, etc. are performed in the anteroom R4. For example, a control panel, monitoring device, or utility device for equipment (not shown) used in the preparation room R1 may be provided in the anteroom R4. The changing room R3 is a clean room where workers undress and put on clothes, and is provided between the preparation room R1 and the anteroom R4. A door 21 allows people to enter and exit between the anteroom R4 and the changing room R3. Another door 22 allows people to enter and exit between the changing room R3 and the preparation room R1. The changing room R3 has a lower room pressure and cleanliness than the preparation room R1.

[0013] The passroom R2 is a clean room used for carrying in and out samples, and is provided between the preparation room R1 and the front room R4. In the example of Fig. 1, people can enter and exit between the front room R4 and the passroom R2 through a door 23. In addition, people can enter and exit between the passroom R2 and the preparation room R1 through another door 24.

[0014] To prevent sample contamination, the pressure in the pass room R2 may be set higher than the pressure in the preparation room R1 and the front room R4. This prevents dust from entering the preparation room R1 from the front room R4 via the pass room R2 when people pass through the doors 23 and 24. It also prevents the sample (aerosol) from leaking from the preparation room R1 to the front room R4 via the pass room R2.

[0015] The preparation room R1 is a clean room where sample preparation and the like are performed. Examples of such "samples" include, but are not limited to, cells and sterile preparations. Because sample preparation is performed in the preparation room R1, the cleanliness level of the preparation room R1 is higher than that of the pass room R2 and the changing room R3. The machine room M1 is a room where an air conditioner 32 is installed. Note that the ceiling of the machine room M1 may be the ceiling of the clean room facility 100 (see FIG. 2), or a separate ceiling may be installed for the machine room M1. The air conditioner 32 is a device that adjusts the temperature, humidity, etc. of the air supplied to the chamber C1 (see FIG. 2). For example, an air handling unit or a package air conditioner may be used as the air conditioner 32.

[0016] The duct shaft DS1 shown in Fig. 1 is an air guide pipe through which air from the preparation room R1 flows, and extends in the vertical direction (see also Fig. 2). Another duct shaft DS2 is an air guide pipe that guides air flowing out of the pass room R2 to the chamber C1 (see Fig. 2), and also extends in the vertical direction. Both of these duct shafts DS1 and DS2 communicate with the chamber C1 (see Fig. 2). Note that the layout of the clean room facility 100 shown in Fig. 1 is an example and is not limited to this.

[0017] Fig. 2 is an explanatory diagram showing the air flow in the clean room facility 100. As shown in Fig. 2, the clean room facility 100 includes an outside air processing unit 31, an air conditioner 32, a chamber C1, and pressure sensors 41 and 42. In addition to the components described above, the clean room facility 100 also includes fan filter units 1 to 4 on the supply air side, fan filter units 11 and 12 on the return air side, and convex portions 51 and 52.

[0018] The outside air processing unit 31 is a device that takes in outside air and supplies it to the air conditioner 32. As shown in FIG. 2, the outside air processing unit 31 includes a filter 31a and a fan 31b. The filter 31a collects dust from the outside air taken in through the duct D1. The fan 31b is a blower that sends the air that has passed through the filter 31a to the air conditioner 32 through the duct D2. As shown in FIG. 2, a damper 61 is installed in the duct D1. The damper 61 is set to a predetermined opening degree during a trial run of the outside air processing unit 31 and is maintained at the predetermined opening degree during subsequent normal operation.

[0019] The air conditioner 32 is a device that adjusts the temperature, humidity, etc. of the air flowing toward the chamber C1. As shown in Fig. 2, the air conditioner 32 includes an inlet 32a, a filter 32b, a cooling coil 32c, a fan 32d, and an inverter 32e. The inlet 32a is a cylindrical body that merges the air flowing through the ducts D2 and D3 and guides the merged air to the filter 31a. The upstream end of the duct D3 is connected to the duct shaft DS1, and the downstream end is connected to the inlet 32a.

[0020] The filter 32b collects dust from the air flowing through the inlet 32a toward the cooling coil 32c. The cooling coil 32c is a heat exchanger that exchanges heat between the air that has passed through the filter 32b and a refrigerant that flows through a heat transfer tube (not shown). The fan 32d is a blower that sends the air cooled by the cooling coil 32c into the chamber C1 through the duct D4. The inverter 32e drives the motor (not shown) of the fan 32d in a predetermined manner.

[0021] As shown in Fig. 2, the blowing side of the air conditioner 32 is connected to the chamber C1 via a duct D4. Air cooled by the air conditioner 32 is introduced into the chamber C1 via the duct D4. As shown in Fig. 2, a damper 62 is installed in the duct D4. The damper 62 is set to a predetermined opening degree during a test run of the air conditioner 32, and is maintained at the predetermined opening degree during subsequent air conditioning operation.

[0022] 2 is a space above the ceiling of each clean room. That is, the chamber C1 is provided as a single common space above the ceiling of multiple clean rooms such as the preparation room R1, the pass room R2, and the changing room R3. The chamber C1 is formed by the ceiling panels 71-73 of the preparation room R1, the pass room R2, and the changing room R3, an upper panel C1a, and a side panel C1b.

[0023] The upper plate C1a is higher than the ceiling plates 71 to 73 of each clean room and is generally parallel to these ceiling plates 71 to 73. The side plates C1b extend downward from the edge of the upper plate C1a and are connected to the ceiling plates 71 to 73. In the example of Figure 2, a space A1 separate from the chamber C1 is provided above the upper plate C1a, but the configuration may also be such that this space A1 is not provided.

[0024] 2 are devices that supply air from the chamber C1 to the preparation chamber R1 and are embedded in the ceiling board 71 of the preparation chamber R1. The fan filter unit 1 includes an air supply fan 1a and a filter 1b. The air supply fan 1a is a blower that supplies air from the chamber C1 to the preparation chamber R1.

[0025] The filter 1b is provided on the outlet side of the air supply fan 1a to capture dust particles from the air flowing from the air supply fan 1a to the preparation chamber R1. For example, a HEPA (High Efficiency Particulate Air Filter) or a ULPA (Ultra Low Penetration Air Filter) may be used as this filter 1b. The other fan filter unit 2 used to supply air to the preparation chamber R1 also has a similar configuration.

[0026] Fan filter unit 3 is a device that supplies air from chamber C1 to pass room R2, and is embedded in ceiling board 72 of pass room R2. Another fan filter unit 4 is a device that supplies air from chamber C1 to changing room R3, and is embedded in ceiling board 73 of changing room R3. These fan filter units 3 and 4 have the same configuration as the fan filter units 1 and 2 described above, so their description will be omitted. In this way, multiple air supply fans 1a to 4a are provided that supply air from chamber C1 to each of the multiple "clean rooms."

[0027] The fan filter unit 11 is a device for discharging air from the preparation chamber R1 into the duct shaft DS1 and is installed in the duct shaft DS1. As shown in Fig. 2, the fan filter unit 11 includes a return air fan 11a and a filter 11b. The return air fan 11a is a blower that returns air from the preparation chamber R1 to the chamber C1 and the air conditioner 32 via the duct shaft DS1. The filter 11b collects dust from the air flowing from the preparation chamber R1 toward the return air fan 11a and is installed on the suction side of the return air fan 11a.

[0028] Another fan filter unit 12 is a device that returns air from the pass room R2 to the chamber C1, and is installed in the duct shaft DS2. Note that the fan filter unit 12 has the same configuration as the fan filter unit 11 described above, and therefore its description will be omitted. In this way, return air fans 11a and 12a are provided that return air from multiple "clean rooms" to the chamber C1.

[0029] The air in the changing room R3 is exhausted to the front room R4 through the opening E3. A micro-differential pressure damper (not shown) that opens and closes in response to the pressure difference between the changing room R3 and the front room R4 may be provided. The air in the front room R4 is exhausted to the outside through a gap in a door or the like (not shown). The flow rate of air taken into the clean room facility 100 by the outside air processing unit 31 and the flow rate of air leaving the clean room facility 100 are set to be approximately equal overall.

[0030] The supply air fan filter units 1 to 4 and the return air fan filter units 11 and 12 are controlled by a control device (not shown). Each of the fan filter units 1 to 4, 11, and 12 may have a built-in control device, or multiple fan filter units may be connected to a single control device via wiring.

[0031] The rotation speed of the return air fan 11a is controlled to maintain the room pressure in the preparation room R1 at a predetermined set pressure (target pressure). Similarly, the rotation speed of another return air fan 12a is controlled to maintain the room pressure in the pass room R2 at a predetermined set pressure. The rotation speeds of the supply air fans 1a to 4a may be constant or may be adjusted as appropriate.

[0032] 2 is a sensor that detects the room pressure in the preparation chamber R1 and is installed in the preparation chamber R1. The detected value of the pressure sensor 41 is used to control the fan filter unit 11 on the return air side of the preparation chamber R1. Another pressure sensor 42 is a sensor that detects the room pressure in the pass room R2 and is installed in the pass room R2. The detected value of the pressure sensor 42 is used to control the fan filter unit 12 on the return air side of the pass room R2.

[0033] Although not shown in Fig. 2, temperature sensors for detecting room temperatures are installed in the preparation room R1, the bathroom R2, and the changing room R3. The values ​​detected by these temperature sensors are used to control the air conditioner 32.

[0034] As described above, the duct shaft DS1 is an air guide pipe through which air from the preparation chamber R1 flows, and extends in the vertical direction. As the fan filter unit 11 is driven, part of the air that flows out from the preparation chamber R1 into the duct shaft DS1 is guided to the air conditioner 32 via the duct D3, and the rest is returned to the chamber C1. The duct shaft DS2 is an air guide pipe that guides air from the pass room R2 (a predetermined second clean room) to the chamber C1, and extends in the vertical direction.

[0035] 2 are members for narrowing the air flow path in the chamber C1 on the upstream side of the duct shaft DS2. The reason for providing the protrusions 51 and 52, their configuration, etc. will be described in detail below.

[0036] <Clean Room Temperature> The preparation room R1 is often equipped with equipment such as an incubator (not shown) and a safety cabinet (not shown). These equipment generate heat while in operation, so in order to maintain the preparation room R1 at a predetermined set temperature (e.g., 22°C), cooled air is supplied to the chamber C1 from the air conditioner 32 via the duct D4.

[0037] As described above, chamber C1 is provided as a single common space above the ceiling of preparation room R1, bathroom R2, and changing room R3. If protrusions 51 and 52 were not provided, the low-temperature air supplied to chamber C1 via duct D4 would be blown directly into bathroom R2 and changing room R3. These bathrooms R2 and changing room R3 often do not have any equipment that generates heat during operation. This can cause bathroom R2 and changing room R3 to become too cold, which can lead to workers feeling chilly when changing clothes in changing room R3, for example.

[0038] Incidentally, the set temperatures of the bathroom R2 and the changing room R3 may be higher than the set temperature of the preparation room R1, but may also be approximately equal to the set temperature of the preparation room R1. Even if the set temperatures (e.g., 22°C) of the preparation room R1, bathroom R2, and changing room R3 are all the same, low-temperature air (e.g., 18°C) is supplied from the air conditioner 32 to the chamber C1 to cool the preparation room R1, which contains equipment that generates heat during operation. If the convex portions 51 and 52 were not provided, the low-temperature air flowing through the chamber C1 would be supplied directly to the bathroom R2 and the changing room R3, increasing the likelihood that the actual temperatures of the bathroom R2 and the changing room R3 would fall below the set temperature (e.g., 22°C).

[0039] Therefore, in the first embodiment, the convex portions 51 and 52 are provided upstream of the duct shaft DS2 in the chamber C1. This increases the flow path resistance near the convex portions 51 and 52, preventing the low-temperature air supplied to the chamber C1 from flowing downstream of the convex portions 51 and 52, thereby preventing the pass room R2 and the changing room R3 from becoming too cold.

[0040] As shown in FIG. 1 , a pass room R2 (second clean room) and a changing room R3 (second clean room) are provided downstream of the preparation room R1 (first clean room) in the air flow direction (arrow X1) in the chamber C1. The aforementioned "first clean room" is a clean room to which low-temperature air is supplied to maintain an appropriate temperature. Such a "first clean room" is often a room with a relatively high heat load from air conditioning, such as the preparation room R1. The "second clean room" is a clean room in which the supply of low-temperature air is suppressed and air with a slightly higher temperature than the "first clean room" is supplied. Such a "second clean room" is often a room with a relatively low heat load from air conditioning, such as the pass room R2 and the changing room R3.

[0041] The distinction between "first clean room" and "second clean room" does not necessarily have to be determined solely based on the magnitude of the heat load of the air conditioning, but can be determined appropriately at the design stage, taking into consideration the overall layout and ease of use of the clean room facility 100. For example, in the example of Fig. 2, pass room R2 is the "second clean room," but in another configuration (see Fig. 3) described below, pass room R2 may also be the "first clean room."

[0042] Of the protrusions 51 and 52 shown in FIG. 2 , one of the protrusions 51 is fixed to the underside of the upper plate C1a of the chamber C1 with screws or the like and protrudes downward from this upper plate C1a. That is, the protrusion 51 is provided so as to protrude vertically from the upper plate C1a of the chamber C1 into the space within the chamber C1. The other protrusion 52 is fixed to the upper surface of the ceiling plate 71 of the preparation chamber R1 with screws or the like and protrudes upward from this ceiling plate 71. That is, the protrusion 52 is provided so as to protrude vertically from the ceiling plate 71 of the preparation chamber R1 (first clean room) into the space within the chamber C1. These protrusions 51 and 52 face each other in the vertical direction.

[0043] In the example of Fig. 2, the cross-sectional shape of the protrusions 51, 52 is rectangular, but other shapes are also possible. The constituent material of the protrusions 51, 52 may be the same material as the insulating panels forming the preparation room R1, the pass room R2, and the changing room R3, or may be made of metal or resin. The protrusions 51, 52 may have a hollow structure or a solid structure.

[0044] 1, in a plan view, the protrusions 51, 52 extend in an elongated manner along a boundary line L1 between the preparation room R1 (first clean room) and the pass room R2 or changing room R3 (second clean room) on the preparation room R1 side of the boundary line L1. In other words, the protrusions 51, 52 extend in an elongated manner in a direction perpendicular to the air flow direction (arrow X1 in FIG. 1) in the chamber C1 (see FIG. 2).

[0045] 1, both longitudinal ends of the protrusions 51, 52 extend to the side surfaces of the preparation chamber R1 (side surfaces parallel to the air flow direction in the chamber C1) in a plan view. In other words, the protrusions 51, 52 are provided so as to span the entire width of the preparation chamber R1. The protrusions 51, 52 may be in contact with the side surfaces of the chamber C1 or may be spaced a predetermined distance from the side surfaces.

[0046] The convex portions 51 and 52 are provided on the upstream side of the duct shaft DS2 in the direction of air flow in the chamber C1 (arrow X1 in FIG. 1 ). The air flow path in the chamber C1 is narrowed on the upstream side of the duct shaft DS2 by the convex portions 51 and 52. Here, "narrowing" the air flow path in the chamber C1 means that the cross-sectional area of ​​the flow path when the air flows through the chamber C1 is reduced at a predetermined location.

[0047] More specifically, in the air flow direction in chamber C1 (see FIG. 2), convex portions 51 and 52 are provided between the duct shaft DS2 and the most downstream of the plurality of air supply fans 1a, 2a that supply air to preparation room R1 (first clean room) (i.e., air supply fan 2a). As described above, duct shaft DS2 is an air guide pipe for returning air that has flowed out of pass room R2 (second clean room) to chamber C1.

[0048] With this configuration, the air flowing through chamber C1 is less likely to be guided downstream of convex portions 51, 52. Therefore, most of the low-temperature air cooled by air conditioner 32 is supplied to preparation room R1 by air supply-side fan filter units 1, 2. As a result, preparation room R1, which contains equipment that generates heat while in operation, can be cooled appropriately, and the pass-out room R2 and changing room R3 can be prevented from becoming too cold.

[0049] Furthermore, air introduced into chamber C1 via duct shaft DS2 is less likely to be introduced upstream of convex portions 51 and 52 (upstream in the direction of air flow in chamber C1). As a result, most of the air introduced from pass room R2 to chamber C1 via duct shaft DS2 is supplied to pass room R2 and changing room R3 by fan filter units 3 and 4. In this way, a short-circuit flow occurs downstream of convex portions 51 and 52, preventing pass room R2 and changing room R3 from becoming too cold. Even if a short-circuit flow occurs, the cleanliness of pass room R2 and changing room R3 can be appropriately maintained by ensuring the ventilation frequency of those rooms.

[0050] It is also advisable to locate at least one of the "second clean rooms" such as the changing room R3 at the downstream end of the multiple clean rooms in the direction of air flow in the chamber C1. Since the air temperature tends to be higher closer to the downstream end of the chamber C1, this can effectively prevent the changing room R3 from becoming too cold.

[0051] <Effects> According to the first embodiment, the convex portions 51, 52 are provided upstream of the duct shaft DS2 in the direction of air flow in the chamber C1. This allows the preparation room R1 (first clean room), which has a relatively large heat load from air conditioning, to be cooled appropriately. Furthermore, it is possible to prevent the pass room R2 (second clean room) and the changing room R3 (second clean room), which have a smaller heat load from air conditioning than the preparation room R1, from being overcooled.

[0052] Furthermore, since the spaces upstream and downstream of the convex portions 51, 52 in the chamber C1 are connected, the pressure in the internal space of the chamber C1 can be made uniform. Furthermore, the configuration is simple, with the convex portions 51, 52 provided in the chamber C1, and there is no need to heat the bathroom R2 or the changing room R3 with a heat source such as a heater (not shown), which reduces construction costs and electricity costs.

[0053] First Modification of First Embodiment In the first embodiment, a configuration in which both convex portions 51 and 52 (see FIG. 2) are provided in chamber C1 has been described, but it is also possible to omit one of convex portions 51 and 52. That is, a "convex portion" may be provided that protrudes vertically into the space within chamber C1 from at least one of the ceiling plate 71 of preparation chamber R1 (first clean room) and the upper plate C1a of chamber C1. Even with this configuration, it is possible to appropriately cool preparation chamber R1 while preventing the passing room R2 and the changing room R3 from becoming too cold.

[0054] Second Modification of First Embodiment In the first embodiment, the case where air is exhausted from the changing room R3 (see FIG. 2) to the front room R4 through the opening E3 has been described, but this is not limited to this. That is, a duct shaft DS3 (see FIG. 3) may be separately provided to return air from the changing room R3 to the chamber C1. Such a configuration will be described using FIG. 3.

[0055] FIG. 3 is an explanatory diagram showing the air flow in a clean room facility 100A according to a second modified example of the first embodiment. As shown in FIG. 3, a duct shaft DS3 is provided between the pass room R2 and the changing room R3. The duct shaft DS3 is an air conduit for returning air flowing out of the changing room R3 to the chamber C1. The duct shaft DS3 extends vertically and communicates with the chamber C1. The fan filter unit 13 is a device for returning air from the changing room R3 to the chamber C1 via the duct shaft DS3 and is installed in the duct shaft DS3. The rotation speed of the return air fan 13a of the fan filter unit 13 is appropriately adjusted based on detection by a pressure sensor 43 in the changing room R3.

[0056] 3, the convex portions 51 and 52 are provided on the upstream side of the duct shaft DS3 in the air flow direction in the chamber C1. More specifically, the convex portions 51 and 52 are provided between the fan filter unit 3 that supplies air to the pass room R2 and the duct shaft DS3 in the air flow direction in the chamber C1.

[0057] The convex portion 51 is installed on the underside of the upper plate C1a of the chamber C1 and protrudes downward from the upper plate C1a. The other convex portion 52 is installed on the upper surface of the ceiling plate 72 of the pass room R2 and protrudes upward from this ceiling plate 72. These convex portions 51, 52 face each other in the vertical direction. In the example of FIG. 3, the preparation room R1 and pass room R2 are the "first clean room," and the changing room R3 is the "second clean room." This configuration not only allows the preparation room R1 and pass room R2 to be cooled appropriately, but also prevents the changing room R3 from becoming too cold. Furthermore, the clean air from the changing room R3 can be reused.

[0058] Second Embodiment The second embodiment differs from the first embodiment in that a plate-shaped upper floor slab E1 (see FIG. 4) is provided to separate the floor and the upper floor of the clean room facility 100B (see FIG. 4). The second embodiment also differs from the first embodiment in that a covering member 53 (see FIG. 4) is provided to cover the beam B1 (see FIG. 4) instead of the protrusions 51 and 52 (see FIG. 2) of the first embodiment. Note that the rest of the second embodiment is the same as the first embodiment. Therefore, only the parts that differ from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0059] FIG. 4 is an explanatory diagram showing the air flow in the clean room facility 100B according to the second embodiment. While the outside air processing unit 31 (see FIG. 2) is not shown in FIG. 4, it is assumed that the outside air processing unit 31 is provided, as in the first embodiment. In the example shown in FIG. 4, a plate-shaped upper floor slab E1 is provided to separate the clean room facility 100B from the upper floor. Such an upper floor slab E1 is made of, for example, thick concrete. A beam B1 is installed on the underside of the upper floor slab E1. This beam B1 penetrates the upper plate C1a of the chamber C1 and protrudes downward (or the upper plate C1a is formed to avoid the beam B1). In other words, the beam B1 is provided to protrude vertically into the space within the chamber C1. Furthermore, the beam B1 is provided upstream of the duct shaft DS2 in the air flow direction (arrow X1 in FIG. 1) in the chamber C1, and extends elongatedly in a direction perpendicular to this air flow direction. The range over which the beam B1 extends is the same as the range over which the protrusion 51 of the first embodiment extends (see FIG. 1).

[0060] The covering member 53 shown in FIG. 4 covers the beam B1 within the chamber C1 space and is generally U-shaped in cross section. Specifically, the covering member 53 includes a pair of opposing side plates 53a, 53b and a bottom plate 53c connecting the lower ends of these side plates 53a, 53b. Near both ends of the covering member 53 in cross section are fixed to the lower surface of the upper plate C1a of the chamber C1 with screws or the like. The covering member 53 extends in an elongated shape in a direction perpendicular to the air flow direction (arrow X1 in FIG. 1 ) in the chamber C1 while covering the beam B1. Because the beam B1 is covered by the covering member 53 in this manner, it is possible to prevent any problems in ensuring thermal insulation and maintaining cleanliness compared to a configuration in which the beam B1 is exposed to the chamber C1.

[0061] 4, a predetermined gap is provided between the covering member 53 and the beam B1, but at least a portion of the inner surface of the covering member 53 may be in contact with the beam B1. The material of the covering member 53 may be the same as the material of the insulating panels forming the preparation room R1, the pass room R2, and the changing room R3, or may be made of metal or resin.

[0062] The positions of both ends of the covering member 53 in the longitudinal direction may be substantially the same as the positions of both ends of the beam B1, or may extend further than both ends of the beam B1. As shown in Figure 4, the covering member 53 is provided between the duct shaft DS2 and the most downstream of the multiple air supply fans 1a, 2a that supply air to the preparation room R1 (first clean room) (i.e., air supply fan 2a) in the air flow direction in the chamber C1.

[0063] By providing the covering member 53 in this manner, the flow path of the air flowing through the chamber C1 is narrowed upstream of the duct shaft DS2. This allows the preparation room R1 to be cooled appropriately, while also preventing the pass room R2 and the changing room R3 from becoming too cold. Note that the position of the covering member 53 in the air flow direction does not necessarily have to be strictly between the air supply fan 2a and the duct shaft DS2; a configuration in which a portion of the covering member 53 overlaps the vertical projection plane (not shown) of the duct shaft DS2 is also acceptable.

[0064] 4, the case where a part of the beam B1 is present in the chamber C1 has been described, but the same can be said for the case where at least a part of a cylindrical body such as a duct (not shown) is present in the chamber C1 instead of the beam B1. In this case, the duct (not shown) is covered by the covering member 53.

[0065] <Effects> According to the second embodiment, even if a part of the beam B1 is present in the chamber C1, it is possible to provide a clean room such as the preparation chamber R1 below this beam B1. This makes it easier to ensure the area of ​​the clean room and increases the degree of freedom in layout at the design stage.

[0066] Third Embodiment In the third embodiment, a porous plate 54 (see FIG. 5) having a plurality of holes 54a (see FIG. 5) is provided instead of the protrusions 51, 52 (see FIG. 2) described in the first embodiment. The remaining features are the same as those of the first embodiment. Therefore, only the differences from the first embodiment will be described, and a description of the overlapping features will be omitted.

[0067] FIG. 5 is an explanatory diagram showing the air flow in the clean room facility 100C according to the third embodiment. The perforated plate 54 shown in FIG. 5 is a rectangular plate for narrowing the flow path of the air flowing through the chamber C1 on the upstream side of the duct shaft DS2. The perforated plate 54 has a plurality of holes 54a. The perforated plate 54 is disposed in the chamber C1 and extends in the vertical direction. The upper end of the perforated plate 54 is fixed to the lower surface of the upper plate C1a of the chamber C1. The lower end of the perforated plate 54 is fixed to the upper surface of the ceiling plate 71 of the preparation chamber R1.

[0068] The perforated plate 54 extends in a direction perpendicular to the air flow direction (arrow X1 in FIG. 1 ) in the chamber C1. The extent of the perforated plate 54 in this direction is the same as the extent of the protrusions 51 and 52 (see FIG. 1 ) in the first embodiment. The perforated plate 54 is disposed between the most downstream of the multiple air supply fans 1a and 2a (i.e., air supply fan 2a) that supply air to the preparation room R1 (first clean room) and the duct shaft DS2. The perforated plate 54 may be made of the same material as the insulating panels forming the preparation room R1, the pass room R2, and the changing room R3, or may be made of metal or resin.

[0069] <Effects> According to the third embodiment, by providing the perforated plate 54, the flow path of the air flowing through the chamber C1 is narrowed upstream of the duct shaft DS2. Therefore, the preparation room R1 can be appropriately cooled with a simple configuration, and excessive cooling of the pass room R2 and the changing room R3 can be prevented. Furthermore, since the spaces upstream and downstream of the perforated plate 54 in the chamber C1 are connected via the multiple holes 54a, the pressure in the internal space of the chamber C1 can be made uniform.

[0070] Fourth Embodiment In the fourth embodiment, a configuration is provided in which a wind guide plate 55 (see FIG. 6) is provided instead of the protrusions 51, 52 (see FIG. 2) described in the first embodiment. Note that the rest is the same as in the first embodiment. Therefore, only the parts that are different from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0071] FIG. 6 is an explanatory diagram showing the air flow in the clean room facility 100D according to the fourth embodiment. The air guide plate 55 shown in FIG. 6 is a rectangular plate for narrowing the flow path of air passing through the chamber C1 on the upstream side of the duct shaft DS2, and is disposed in the chamber C1 at a predetermined inclination. The lower end of the air guide plate 55 is fixed to the upper surface of the ceiling plate 71 of the preparation chamber R1. More specifically, the lower end of the air guide plate 55 is disposed in the duct shaft DS2 near a plane F1 including the inner surface of the sidewall 81 on the preparation chamber R1 (first clean room) side. The upper end of the air guide plate 55 is spaced a predetermined distance from the upper plate C1a of the chamber C1.

[0072] The air guide plate 55 is inclined so that the horizontal distance from the plane F1 increases the closer it is to its upper end. This makes it easier for air rising through the duct shaft DS2 to be guided to the spaces above the pass room R2 and the changing room R3 in the chamber C1. This makes it easier for a short circuit to occur through the duct shaft DS2.

[0073] The air guide plate 55 extends in a narrow, elongated shape perpendicular to the air flow direction (arrow X1 in FIG. 1 ) in the chamber C1. The extent of the air guide plate 55 in this direction is the same as the extent of the protrusions 51 and 52 (see FIG. 1 ) in the first embodiment. The air guide plate 55 is located between the most downstream of the multiple air supply fans 1a and 2a (i.e., air supply fan 2a) that supply air to the preparation room R1 (first clean room) and the duct shaft DS2. The material of the air guide plate 55 may be the same as the insulating panels forming the preparation room R1, the pass room R2, and the changing room R3, or it may be made of metal or resin.

[0074] <Effects> According to the fourth embodiment, by providing the air guide plate 55, the flow path of the air flowing through the chamber C1 is narrowed on the upstream side of the duct shaft DS2, which prevents low-temperature air from flowing downstream of the air guide plate 55. In addition, a short-circuit flow via the duct shaft DS2 is more likely to occur. Therefore, the preparation room R1 can be cooled appropriately, and the pass room R2 and the changing room R3 can be prevented from becoming too cold.

[0075] Fifth Embodiment In the fifth embodiment, instead of the convex portions 51, 52 (see FIG. 2) described in the first embodiment, the height position of the ceiling board 71 (see FIG. 7) of the preparation room R1 is set higher than the bathroom R2 and the changing room R3. Furthermore, in the fifth embodiment, the height position of an area S2 (see FIG. 7) including the projection surface S1 (see FIG. 7) of the duct shaft DS2 on the upper board C1a of the chamber C1 is set lower than other areas. Note that the rest of the fifth embodiment is the same as the first embodiment. Therefore, only the parts that are different from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0076] 7 is an explanatory diagram showing the air flow in the clean room facility 100E according to the fifth embodiment. As shown in Fig. 7, the height position of the ceiling board 71 of the preparation room R1 (first clean room) is higher than the height position of the ceiling board 72 of the pass room R2 (second clean room) and the height position of the ceiling board 73 of the changing room R3 (second clean room). Furthermore, on the upper board C1a of the chamber C1, the height position of a region S2 including the vertical projection plane S1 of the duct shaft DS2 is lower than the height position of the upstream side of this region S2.

[0077] 7 is included in the upper plate C1a of the chamber C1. The range of the region S2 in the direction perpendicular to the air flowing through the chamber C1 is the same as the range of the convex portions 51 and 52 (see FIG. 1) in the first embodiment.

[0078] In the example of Figure 7, the region S2 including the projection plane S1 extends to a predetermined location above the pass room R2 in the air flow direction (arrow X1 in Figure 1) in the chamber C1, but this is not limited to this. For example, the range of the region S2 may coincide with the projection plane S1 of the duct shaft DS2. Furthermore, the region S2 may extend to near the downstream end of the chamber C1 in the air flow direction.

[0079] <Effects> According to the fifth embodiment, the vertical distance between the downstream end of the ceiling panel 71 of the preparation room R1 and the upstream end of the plate C11a in the direction of air flow in the chamber C1 is relatively short. In other words, the air flow path in the chamber C1 is narrowed upstream of the duct shaft DS2. This prevents the low-temperature air supplied to the chamber C1 from being directly supplied to the pass room R2 or the changing room R3.

[0080] <<Reference Embodiment>> The reference embodiment (see FIG. 8) differs from the first embodiment in that the protrusions 51, 52 (see FIG. 2) are not provided. The reference embodiment also differs from the first embodiment in the arrangement of the fan filter units 3, 4 (see FIG. 8) on the air supply side of the pass-room R2 and the changing room R3. The rest of the reference embodiment is the same as the first embodiment. Therefore, only the parts that differ from the first embodiment will be described, and a description of the overlapping parts will be omitted.

[0081] 8 is an explanatory diagram showing the air flow in a clean room facility 100F according to a reference embodiment. As shown in Fig. 8, a duct shaft DS2 is provided with a supply air fan filter unit 3 and a return air fan filter unit 12. That is, inside the duct shaft DS2, a supply air fan 3a is provided to supply air to the pass room R2 (a predetermined second clean room), and a return air fan 12a is provided to return air from the pass room R2 to the chamber C1.

[0082] Furthermore, the height position of the supply air fan 3a in the duct shaft DS2 is higher than the height position of the return air fan 12a in the duct shaft DS2. As the return air fan 12a is driven, air flowing out of the pass room R2 rises through the duct shaft DS2, and most of this air is returned to the pass room R2 by the supply air fan 3a. In this manner, in the reference embodiment, a short-circuit flow is generated inside the duct shaft DS2. The same can be said for the supply air-side fan filter unit 4 and the return air-side fan filter unit 13 in another duct shaft DS3.

[0083] <Effects> According to the reference embodiment, the preparation room R1 can be cooled appropriately, and the pass room R2 and the changing room R3 can be prevented from becoming too cold. Furthermore, since there is no particular need to install the air supply fan filter units 3 and 4 above the pass room R2 or the changing room R3 in the chamber C1, the height position of the upper plate C1a in this portion (the portion above the pass room R2 or the changing room R3) can be lowered. Therefore, the height position of the clean room facility 100F can be lowered in part, thereby making it more compact.

[0084] <Combination of First Embodiment and Referential Embodiment> It is also possible to combine the first embodiment shown in FIGS. 1 and 2 with the referential embodiment shown in FIG. 8 to form a configuration as shown in FIG.

[0085] FIG. 9 is an explanatory diagram showing the air flow in a clean room facility 100G according to a combination of the first embodiment and the reference embodiment. As shown in FIG. 9 , the clean room facility 100G includes convex portions 51 and 52. The convex portions 51 and 52 are components for narrowing the flow path of air passing through the chamber C1 on the upstream side of the duct shaft DS3. In the example of FIG. 9 , the convex portion 51 is provided at a predetermined location on the upper plate C1a of the chamber C1. The convex portion 52 is also provided on the upper surface of the ceiling plate 72 (similar to FIG. 8 ) of the pass room R2. These convex portions 51 and 52 face each other in the vertical direction.

[0086] The duct shaft DS3 is also provided with a supply air fan filter unit 4 and a return air fan filter unit 13. This allows a short-circuit flow to occur inside the duct shaft DS3. Note that instead of the arrangement of the protrusions 51, 52 shown in Figure 9, the protrusions 51, 52 may be provided on the upstream side of the duct shaft DS2.

[0087] 9, the low-temperature air supplied to chamber C1 is less likely to be guided to the area downstream of protrusions 51 and 52. Furthermore, because a short-circuit flow occurs inside duct shaft DS3, most of the air flowing from changing room R3 into duct shaft DS3 is returned to changing room R3. This allows the preparation room R1 and passing room R2 to be cooled appropriately while preventing changing room R3 from becoming too cold.

[0088] Although the clean room facility 100 and the like according to the present disclosure have been described above in each embodiment, they are not limited to these descriptions and various modifications can be made. For example, in the first embodiment, the convex portions 51, 52 extend vertically and elongatedly relative to the air flow direction (arrow X1 in FIG. 1 ) in the chamber C1. However, this is not limiting. That is, the extension direction of the convex portions 51, 52 may be inclined at a predetermined angle relative to the air flow direction in a plan view, or may be bent in a crank shape in a plan view.

[0089] Furthermore, in the configuration of the first embodiment (see FIG. 2 ), a portion of the air in the duct shaft DS2 may be returned to the chamber C1 by the return air fan 12a, and the remainder may be exhausted through the gap in the door. This configuration is also included in the definition of the return air fan 12a "returning air" to the chamber C1. The arrangement and number of return air fans can be changed as appropriate. For example, the return air fan may be arranged to return air from at least one of the multiple clean rooms to the chamber C1. Furthermore, in the first embodiment (see FIG. 2 ), the case where two supply air fans 1a, 2a supply air to the preparation room R1 (first clean room) is described. However, the number of supply air fans may be one or more. In other words, it is sufficient that one or more supply air fans are provided to supply air to the "first clean room." If there is only one supply air fan supplying air to the "first clean room," the "most downstream supply air fan among the supply air fans" is that one supply air fan. The same can be said for the second to fifth embodiments and the reference embodiment.

[0090] Furthermore, in the first modified example of the first embodiment (see FIG. 3 ), a configuration in which two protrusions 51, 52 are provided has been described, but this is not limiting. For example, in addition to the configuration shown in FIG. 3 , an additional protrusion may be provided on the upstream side of the duct shaft DS2. With this configuration, the degree to which low-temperature air flows into the changing room R3 is lower than that into the passing room R2. Therefore, not only can the passing room R2 be prevented from becoming too cold, but the changing room R3 in particular can be prevented from becoming too cold.

[0091] In the second modified example of the first embodiment (see FIG. 3), a convex portion 52 is provided on the ceiling plate 72 of the bathroom R2, and the other convex portion 51 is provided on the upper plate C1a so as to face the convex portion 52. However, this is not limitative. For example, instead of the arrangement of the convex portions 51, 52 shown in FIG. 3, a convex portion 52 may be provided on the ceiling plate 71 of the preparation room R1, and the other convex portion 51 may be provided on the upper plate C1a so as to face the convex portion 52. Even with this configuration, it is possible to prevent the bathroom R2 and the changing room R3 from becoming too cold.

[0092] Although the second embodiment has been described with reference to the case where a portion of the beam B1 is present in the chamber C1 (see FIG. 4), this is not limiting. That is, the covering member 53 may be provided so as to cover the beam B1 or a duct that protrudes vertically into the space within the chamber C1.

[0093] In the fourth embodiment (see FIG. 6 ), the lower end of the air guide plate 55 is fixed to the ceiling plate 71 of the preparation chamber R1, but this is not limiting. For example, the air guide plate 55 may be translated upward from the arrangement shown in FIG. 6 so that its upper end is fixed to the upper plate C1 a of the chamber C1 and its lower end is spaced apart from the ceiling plate 71 of the preparation chamber R1.

[0094] In the fifth embodiment (see FIG. 7), the plate member C11a of the chamber C1 may be omitted, and the height position of the ceiling board 71 of the preparation room R1 may be made higher than the bathroom R2 and the changing room R3. Even in this configuration, by appropriately adjusting the height position of the ceiling board 71 at the design stage, it is possible to prevent the bathroom R2 and the changing room R3 from becoming too cold.

[0095] Furthermore, in the fifth embodiment, a configuration in which a plate member C11a (see FIG. 7) forming a portion of the upper surface of the chamber C1 is provided has been described, but this is not limited thereto. That is, the thickness of the upper plate C1a may be substantially uniform, with a predetermined step provided near the boundary of the region S2. Even with this configuration, the same effects as those of the fifth embodiment can be achieved. Furthermore, in each of the embodiments and the reference embodiment, a configuration in which air is returned from the preparation chamber R1 to the chamber C1 via the duct shaft DS1 in response to the operation of the return air-side fan filter unit 11 (see FIG. 2). However, this is not limited thereto. For example, the return air-side fan filter unit 11 may be omitted, and air flowing from the preparation chamber R1 into the duct shaft DS1 through a predetermined gap (e.g., a gap in a door) may be directly guided to the air conditioner 32 via the duct D3. In this case, the opening at the upper end of the duct shaft DS1 may be closed.

[0096] Furthermore, the respective embodiments can be combined as appropriate. For example, the first embodiment and the second embodiment can be combined to provide a covering member 53 (second embodiment: see FIG. 4) that covers the beam B1, and to provide protrusions 51, 52 at predetermined locations (first embodiment: see FIG. 2). Various other combinations are also possible, such as combining any of the first to fourth embodiments (see FIGS. 1 to 6) with the fifth embodiment (see FIG. 7). Furthermore, any of the first to fifth embodiments (see FIGS. 1 to 7) with the reference embodiment (see FIG. 8) can also be combined.

[0097] In the first embodiment, the "first clean room" is the preparation room R1, and the "second clean room" is the pass room R2 and the changing room R3. However, the types and numbers of rooms corresponding to the "first clean room" and the "second clean room" can be changed as appropriate. The clean room facility may also include additional rooms (clean rooms or general rooms) that do not correspond to the "first clean room" and the "second clean room." Such a configuration is also included in the clean room facility's definition of "including multiple clean rooms, including the first clean room and the second clean room." The clean room facility may also include multiple chambers separated by plates. At least one of the convex portions 51 and 52 (see FIGS. 2 and 3), the covering member 53 (see FIG. 4), the perforated plate 54 (see FIG. 5), and the air guide plate 55 (see FIG. 2) may be provided in one or more of the multiple chambers. Such a configuration is also included in the clean room facility's definition of "the air flow path in the chamber is narrowed upstream of the duct shaft." In the first embodiment, the clean room facility 100 is described as being equipped with an outside air processing unit 31 (see FIG. 2), but the outside air processing unit 31 may be omitted as appropriate. The same applies to the second to fifth embodiments and the reference embodiment. In each embodiment, the clean room, such as the preparation room R1, is used as a positive pressure room, but depending on the application, the clean room may be used as a negative pressure room.

[0098] In addition, although each embodiment has been described with reference to cases where the clean room facility 100 is used for cell culture processing or pharmaceutical manufacturing, the present invention is not limited to this. For example, each embodiment can be applied to various fields such as the manufacturing of semiconductors, precision machinery, and liquid crystal panels, the food industry, the cosmetics industry, and experiments using radioactive materials.

[0099] Furthermore, each embodiment has been described in detail to clearly explain the present disclosure, and is not necessarily limited to having all of the described configurations. Furthermore, it is possible to add, delete, or replace some of the configurations of the embodiments with other configurations. Furthermore, the above-described mechanisms and configurations are those considered necessary for explanation, and do not necessarily represent all of the mechanisms and configurations of the product.

[0100] DESCRIPTION OF SYMBOLS 1a, 2a, 3a, 4a Air supply fan 11a, 12a, 13a Return air fan 31 Outdoor air processing unit 32 Air conditioner 41, 42, 43 Pressure sensor 51, 52 Convex portion 53 Covering member 54 Perforated plate 54a Hole 55 Air guide plate 71, 72, 73 Ceiling plate 100, 100A, 100B, 100C, 100D, 100E, 100F, 100G Clean room facility B1 Beam C1 Chamber C1a Top plate C1b Side plate D4 Duct DS2, DS3 Duct shaft E1 Upper floor slab F1 Plane R1 Preparation room (first clean room) R2 Pass room (first clean room / second clean room) R3 Changing room (second clean room) S1 Projection plane S2 Area

Claims

1. A clean room facility comprising: a plurality of clean rooms including a first clean room and a second clean room; a chamber provided above the ceiling of the plurality of clean rooms as a single common space; an air conditioner whose blowing side is connected to the chamber via a duct; a plurality of supply air fans which supply air from the chamber to each of the plurality of clean rooms; a return air fan which returns air from at least one of the plurality of clean rooms to the chamber; and a duct shaft which guides air from a predetermined one of the second clean rooms to the chamber, wherein the second clean room is provided downstream of the first clean room in the air flow direction in the chamber, and the air flow path in the chamber is narrowed upstream of the duct shaft.

2. A clean room facility as described in claim 1, characterized in that it comprises a convex portion protruding in the vertical direction from at least one of the ceiling panel of the first clean room and the upper panel of the chamber into the space within the chamber, the convex portion being provided between the duct shaft and the one or more supply air fans that supply air to the first clean room, the supply air fans being located most downstream in the air flow direction in the chamber.

3. A clean room facility as described in claim 1, further comprising a covering member that covers within the space of the chamber a beam or duct that is arranged to protrude vertically into the space within the chamber, the covering member being disposed between the duct shaft and the one or more air supply fans that supply air to the first clean room, the one that is located most downstream in the air flow direction in the chamber.

4. The clean room facility according to claim 1, further comprising a perforated plate having a plurality of holes and disposed in the chamber, the perforated plate being disposed between the duct shaft and the one or more supply air fans which supply air to the first clean room and are located most downstream in the air flow direction in the chamber.

5. A clean room facility as described in claim 1, further comprising an air guide plate arranged in the chamber in a predetermined inclined state, the air guide plate being provided between the duct shaft and the most downstream of the one or more air supply fans supplying air to the first clean room in the air flow direction in the chamber, the lower end of the air guide plate being arranged near a plane including the inner surface of the side wall on the first clean room side of the duct shaft, and the air guide plate being inclined such that the horizontal distance between the plane and the air guide plate becomes longer the closer it is to its upper end.

6. The clean room facility according to claim 1, characterized in that the height position of the ceiling plate of the first clean room is higher than the height position of the ceiling plate of the second clean room.

7. A clean room facility as described in claim 6, characterized in that the height position of an area including the vertical projection of the duct shaft on the upper plate of the chamber is lower than the height position of the upstream side of said area in the air flow direction in the chamber.

8. The clean room facility according to claim 1, characterized in that at least one of the second clean rooms is provided at the downstream end of the plurality of clean rooms in the air flow direction in the chamber.

9. The clean room facility of claim 1, wherein a supply air fan is provided inside the duct shaft to supply air to a designated second clean room, and a return air fan is provided inside the duct shaft to return air from the second clean room to the chamber, and the height position of the supply air fan in the duct shaft is higher than the height position of the return air fan in the duct shaft.

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