Multi-operational soft body vine robot

Abstract

The present disclosure relates a soft body vine robot that can extend into confined spaces and perform various tasks using interchangeable end effector tools. The vine robot includes a tubular robot body and an attachment member. An internal portion of the robot body is disposed within an external portion of the robot body. The attachment member has a first side detachably connectable to an everting tip of the robot body and a second side detachably connectable to at least one end effector. In operation, a pressure source generates pressure within the robot body to cause the internal portion of the robot body to evert along an everting direction of the robot body, the robot body everts along a desired path, and the attachment member maintains a detachable connection with the everting tip of the robot body.

Description

Atty. Docket No: 4948.158WO1 MULTI-OPERATIONAL SOFT BODY VINE ROBOT CLAIM OF PRIORITY

[0001] This application claims the benefit of priority to U.S. Patent Application Serial No. 63 / 606,429, filed on December 5, 2023, which is incorporated by reference herein in its entirety. TECHNICAL FIELD

[0002] The present disclosure generally relates to a soft body robot, and more particularly to a soft body vine robot that can extend into confined spaces and perform various operations using interchangeable end effector tools. BACKGROUND

[0003] The background description provided here is for the purpose of generally presenting the context of the disclosure. Work of the presently named inventors, to the extent it is described in this background section, as well as aspects of the description that may not otherwise qualify as prior art at the time of filing, are neither expressly nor impliedly admitted as prior art against the present disclosure.

[0004] Inspection and manipulation tasks are often required in confined spaces within chip manufacturing facilities that are hazardous or inaccessible for human operators. Example tasks include routing cables, picking up broken wafer fragments inside manufacturing tools, cleaning and drying wafers, servicing various tool such as Quad-Station Modules (QSMs), and so forth. While some tasks can be performed using rigid robotic systems, access within the cramped interiors of manufacturing tools and tight confined spaces remains extremely challenging. Moreover, interchangeable tools are often necessary to conduct varying operations such as imaging, locating objects, moving materials, cleaning, inspection, and repairing.

[0005] Soft, flexible robots have been proposed as a potential solution for accessing confined spaces. These robots can maneuver through tight, winding openings impassable by humans or rigid robots. However, mostAtty. Docket No: 4948.158WO1 existing soft robots lack the ability to reliably carry heavier functional payloads without deformation and locomotion failure. Additionally, changing tools are often burdensome because the robots usually have to be retracted before tools can be changed. SUMMARY

[0006] The present disclosure relates generally to a soft body vine robot. The vine robot includes an elongate robot body and an attachment member. An internal portion of the robot body is disposed within an external portion of the robot body. The attachment member has a first side configured to detachably connect to and move with the everting tip of the robot body and a second side configured to detachably connect to at least one end effector. When pressure is generated within the robot body, the internal portion is configured to evert. When the internal portion everts, an everting tip of the robot body moves along a desired path.

[0007] In some examples, the vine robot further includes a track mounted longitudinally along the external portion of the robot body. At least a portion of the attachment member slidably engages with and is detachably connectable to the track.

[0008] In some examples, the everting tip of the robot body accommodates a first magnet, and the attachment member includes a second magnet. The first and second magnets are configured to attract each other and maintain the detachable connection between the attachment member and the everting tip of the robot body.

[0009] In some examples, the magnetic attraction between the first magnet and the second magnet allows a wall of the everting tip of the vine robot to pass slidably therebetween as the robot body moves along the desired path.

[0010] In some examples, the first magnet is an annular magnet having a central hole. When the internal portion of the robot body everts, sections of the internal portion pass through the central hole of the annular magnet to form sections of the external portion of the robot body.Atty. Docket No: 4948.158WO1

[0011] In some examples, the robot body is configured to counteract a weight of the attachment member or the at least one end effector to direct the everting tip along the desired path.

[0012] In some examples, the robot body is pre-biased before operation to extend along the desired path.

[0013] In some examples, the desired path is non-coincident with an axial direction of the robot body.

[0014] In some examples, the pre-biasing is applied prior to the pressure generation in the robot body.

[0015] In some examples, the robot body includes a sandwiched structure of foam, fabric, and plastic.

[0016] In some examples, the pressure generated within the robot body ranges from 10 kPa to 60 kPa.

[0017] In some examples, the robot body includes one or more chemically resistant materials.

[0018] In some examples, the one or more chemically resistant materials are resistant to at least one of copper sulfate, sulfuric acid, hydrogen peroxide, hydrobromic acid, or chlorine trifluoride.

[0019] In some examples, the one or more chemically resistant materials include at least one of polytetrafluoroethylene (PTFE), fluoropolymer elastomer, or synthetic rubber.

[0020] In some examples, the at least one end effector includes a gas outlet configured to direct gas at a surface of a substrate and at least one liquid outlet configured to direct fluid at the surface of the substrate.

[0021] In some examples, the gas is a drying gas to dry fluid applied to the substrate .

[0022] In some examples, the gas outlet is coupled to a central portion of the attachment member and the at least one liquid outlet is coupled to the attachment member outside of the central portion .

[0023] In some examples, the gas includes nitrogen gas, the fluid includes deionized water, and the substrate is a wafer.Atty. Docket No: 4948.158WO1

[0024] In some examples, the at least one end effector includes a cleaning medium. The cleaning medium is configured to contact and clean a substrate based on an eversion or a retraction of the robot body, or a reciprocation between the eversion and retraction of the robot body.

[0025] In some examples, the cleaning medium includes a material carrying a cleaning agent.

[0026] In some examples, the substrate is caused to rotate when the cleaning medium contacts the substrate.

[0027] In some examples, the at least one end effector includes a camera sensor configured to detect a location of a substrate.

[0028] In some examples, the at least one end effector includes a vacuum suction cup configured to apply a vacuum to a surface of a substrate to manipulate or recover the substrate.

[0029] In some examples, a vacuum pressure drop at the vacuum suction cup is recognized as indicative of a defective or cracked substrate held by the vacuum suction cup.

[0030] In some examples, the substrate includes a fragment of a wafer.

[0031] In some examples, the vine robot includes a transceiver and the at least one end effector includes a vacuum suction cup. When the internal portion everts, the transceiver is configured to receive a location of a substrate from a camera sensor and the vacuum suction cup is configured to apply a vacuum to a surface of the substrate.

[0032] In some examples, the at least one end effector is detachably connectable to a cable for a routing of the cable at an installation. When the internal portion everts, the robot body carries the cable detachably connected to the at least one end effector to a desired location at the installation .

[0033] In some examples, the at least one end effector is detachably connectable to a cable that is disconnected from a port or a socket. In operation, the eversion of the robot body carries the cable detachably connected to the at least one end effector to a location of the port or the socket.Atty. Docket No: 4948.158WO1

[0034] In some examples, the at least one end effector is detachably connectable to a Light Detection and Ranging (LIDAR) device or a Sound Navigation and Ranging (SONAR) device. When the internal portion everts, the LIDAR device or the SONAR device is configured to query or map a zone of interest to detect an object in the zone of interest .

[0035] In some examples, at least part of the desired path is inaccessible by a human operator.

[0036] In some examples, the vine robot further includes a return mechanism deployable to cause the robot body to retract.

[0037] In some examples, the return mechanism is deployable to cause the robot body to retract when the pressure within the robot body is released.

[0038] In some examples, the return mechanism includes an extendable spring or stretchable medium connectable to the second side of the attachment member. The extendable spring or stretchable medium generates a return force on an extension of the robot body to at least assist in the retraction of the robot body when the pressure within the robot body is released.

[0039] In some examples, the return mechanism includes a cable having a first end connecting to a reel and a second end connecting to the first side of the attachment member.

[0040] The present disclosure relates generally to a vine robot assembly for servicing a Quad-Station Module (QSM). The vine robot assembly includes at least one vine robot installed in association with a respective station of the QSM. The at least one vine robot includes an extendable tubular robot body an internal pressure source, and an attachment member . An inner segment of the robot body is configured to evert out from within an outer segment of the robot body to form an extendable tip of the vine robot. The internal pressure source is connectable to the robot body. The pressure source is configured to generate pressure within the robot body to cause the inner segment to evert out along an everting direction of the robot body. The attachment member has a first side adapted to temporarily connect to the extending tip of the robot body and a second side adapted to temporarily connect to at least one interchangeable end effector tool.Atty. Docket No: 4948.158WO1

[0041] In some examples, the vine robot assembly is a collaborative vine robot assembly. Two or more vine robots of the collaborative vine robot assembly are controllable to work collaboratively to perform a service for a station of the QSM.

[0042] In some examples, the at least one vine robot is included in a plurality of vine robots including at least four vine robots. Each vine robot in the plurality of vine robots is assigned to at least one respective station of the QSM.

[0043] In some examples, the at least one end effector of a first vine robot of the vine robot assembly is configured to manipulate a substrate while a second vine robot of the vine robot assembly directs a fluid or gas at the substrate, a pedestal, or a station of the QSM.

[0044] The present disclosure relates generally to a vine robot. The vine robot includes an extendable tubular robot body and an attachment member. An inner segment of the robot body can evert out from within an outer segment of the robot body to form an extending tip of the robot body. The attachment member has a first side temporarily connectable to the extending tip of the robot body and a second side temporarily connectable to at least one interchangeable end effector tool.

[0045] In some examples, the vine robot further includes a guide track affixed longitudinally on a surface of the robot body to guide an eversion of the robot body in the everting direction.

[0046] In some examples, a portion of the attachment member engages with the guide track during the eversion of the robot body in the everting direction.

[0047] In some examples, the extending tip of the robot body accommodates a first magnet. The attachment member includes a second magnet. A magnetic attraction between the first and second magnets assists in temporarily connecting the attachment member to the extending tip of the robot body.

[0048] In some examples, a vine robot includes an extendable tubular robot body, an internal pressure source connectable to the robot body, and an attachment member. An inner segment of the robot body is configured toAtty. Docket No: 4948.158WO1 evert out from within an outer segment of the robot body to form an extendable tip of the vine robot. The internal pressure source is configured to generate pressure within the robot body to cause the inner segment to evert out along an everting direction of the robot body. The attachment member has a first side adapted to temporarily connect to the extending tip of the robot body and a second side adapted to temporarily connect to at least one interchangeable end effector tool.

[0049] In some examples, the vine robot further includes a track affixed longitudinally on an outer surface of the robot body along the everting direction. A portion of the attachment member is configured to engage with the track.

[0050] In some examples, the extending tip of the robot body accommodates a first magnet. The attachment member includes a second magnet. The first and second magnets are configured to magnetically attract each other to assist in temporarily connecting the attachment member to the extending tip end of the robot body.

[0051] The present disclosure relates generally to a vine robot for routing cables. The vine robot includes a flexible, elongate robot body adapted to extend through confined spaces in a manufacturing tool. The robot body is connectable to a pressure source configured to cause eversion of the robot body along a desired cable routing path. The vine robot further includes an attachment member designed to maintain connection with a tip end of the body during eversion and a cable routing end effector detachably connected to the attachment member. The cable routing end effector includes a cable gripping mechanism adapted to temporarily grasp a cable, a cable release mechanism to release the cable at a target destination location, and a controller configured to actuate the pressure source to cause the body to evert along the desired cable routing path, and control the cable gripping and release mechanisms to pick up a cable at a start location and release the cable at the target destination location.

[0052] The present disclosure relates generally to a method of controlling a vine robot. The method includes controlling an internal pressure source to generate pressure within a robot body of the vine robot to cause an innerAtty. Docket No: 4948.158WO1 segment of the robot body to evert out along an everting direction of the robot body to form an extending tip of the robot body, controlling the robot body to extend along a desired path, and controlling at least one interchangeable end effector tool to perform an operation, wherein the at least one interchangeable end effector tool is temporarily connectable to a second side of an attachment member of the vine robot, and wherein a first side of the end effector maintains a temporary connection with the extending tip of the robot body.

[0053] The present disclosure relates generally to a method of controlling a vine robot to route cables. The method includes controlling a pressure source to cause a connected flexible and elongate robot body to evert along a desired cable routing path, wherein the robot body is adapted to extend through confined spaces in a manufacturing tool. The method further includes during the eversion of the robot body along the desired cable routing path, controlling a cable gripping mechanism to pick up a cable at a start location, wherein the cable gripping mechanism is detachably connected to an attachment member designed to maintain connection with a tip end of the robot body. The method further includes controlling a cable release mechanism to release the cable at a target destination location, wherein the cable release mechanism is detachably connected to the attachment member.

[0054] The present disclosure relates generally to a method of controlling a vine robot assembly to service a Quad-Station Module (QSM). The method includes for each of a plurality of vine robots of the vine robot assembly, controlling an internal pressure source of the each vine robot to generate pressure within a robot body of the vine robot to cause an inner segment of the robot body to evert out along an everting direction of the robot body to form an extending tip of the robot body, controlling the robot body to extend along a desired path, and controlling at least one interchangeable end effector tool to perform a service on a respective station of the QSM, wherein the at least one interchangeable end effector tool is temporarily connected to a second side of an attachment member of the vine robot, andAtty. Docket No: 4948.158WO1 wherein a first side of the end effector maintains a temporary connection with the extending tip of the robot body.

[0055] In some examples, the vine robot assembly is a collaborative vine robot assembly. The method further includes controlling two or more vine robots of the collaborative vine robot assembly to work collaboratively to perform the service for a station of the QSM. BRIEF DESCRIPTION OF THE DRAWINGS

[0056] Some embodiments are illustrated by way of example and not limitation in the views of the accompanying drawing:

[0057] FIGS. 1A and 1B illustrate schematic views of a vine robot that includes a robot body and an internal pressure source, according to some examples.

[0058] FIGS. 2A-2C illustrate schematic views of a vine robot that includes an end effector adapter connected to a tip of the robot body, according to some examples.

[0059] FIGS. 3A and 3B illustrate schematic diagrams of pre-biasing the robot body of a vine robot, according to some examples.

[0060] FIGS. 4A-4B illustrate schematic views of a cleaning end effector tool, according to some examples.

[0061] FIG. 4C illustrates a schematic diagram of cleaning a substrate using a vine robot and the cleaning end effector tool, according to some examples.

[0062] FIG. 5 illustrates a schematic diagram of cleaning a substrate using a vine robot and a cleaning medium, according to some examples.

[0063] FIGS. 6A-6B illustrate schematic diagrams of using a vine robot assembly to perform a service on a Quad Service Module (QSM), according to some examples.

[0064] FIG. 7 illustrates schematic diagram of using a vine robot to locate and pick up a substrate, according to some examples.

[0065] FIGS.8A-8B illustrate schematic diagrams of using a vine robot to route a cable, according to some examples.Atty. Docket No: 4948.158WO1

[0066] FIG. 9 illustrate schematic diagram of using a vine robot to map a zone of interest, according to some examples.

[0067] FIGS. 10-11 illustrate schematic views of two return mechanisms of a vine robot, according to some examples.

[0068] FIG. 12 is a flow chart illustrating a method of controlling a vine robot to perform an operation, according to some examples.

[0069] FIG. 13 is a block diagram illustrating an example of a machine upon which one or more examples may be implemented, or by which one or more examples may be controlled. DETAILED DESCRIPTION

[0070] The description that follows includes systems, methods, techniques, instruction sequences, and computing machine program products that embody illustrative embodiments of the present disclosure. In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of example embodiments. It will be evident, however, to one skilled in the art that the present disclosure may be practiced without these specific details.

[0071] A portion of the disclosure of this patent document may contain material that is subject to copyright protection. The copyright owner has no objection to the facsimile reproduction by anyone of the patent document or the patent disclosure, as it appears in the Patent and Trademark Office patent files or records, but otherwise reserves all copyright rights whatsoever. The following notice applies to any data as described below and in the drawings that form a part of this document: Copyright Lam Research Corporation, 2023, All Rights Reserved.

[0072] As mentioned above, soft, flexible robots have been proposed as a potential solution for accessing confined spaces. These robots can maneuver through tight, winding openings impassable by humans or rigid robots. However, most existing soft robots lack the ability to reliably carry heavier functional payloads without deformation and locomotion failure. Additionally, changing tools are often burdensome because the robots usually have to be retracted before tools can be changed. Therefore, a needAtty. Docket No: 4948.158WO1 exists for soft robots that can extend great distances, conform to irregular topologies, and deploy interchangeable tools by reliably carrying heavier payloads and providing easy to attach / detach interfaces.

[0073] The present disclosure provides a vine robot and methods for controlling a vine robot to perform various operations in confined spaces. The vine robot has a tubular, flexible robot body that can evert itself inside- out. This eversion of the robot body allows it to extend like a vine growing out. An internal pressure source generates pressure within the robot body to cause the eversion. The inner layer is pushed out by the pressure to become the new outer layer as the robot body extends. An end effector adapter (also referred to as an attachment member) connects interchangeable end effector tools to the extending tip of the robot body. Magnets help the adapter temporarily attach to the everting tip as the body keeps extending. The vine robot can bring the end effector tools into confined spaces hazardous or inaccessible for humans. The end effectors can perform operations like cleaning, gripping, and releasing objects, taking photos, and more. The end effectors can be easily swapped without retracting the robot body. Controllers steer the vine robot's movement and control the end effectors to operate.

[0074] The examples provided in the present disclosure are for illustrative purposes only. Persons having ordinary skill in the art may modify the examples under the teachings of the present disclosure and such modifications are within the scope of protection of the present disclosure. For example, some examples that depict a single vine robot may be modified to include multiple vine robots. Such modification falls within the scope of protection of the present disclosure.

[0075] FIGS. 1A and 1B illustrate schematic views of a vine robot 100 that includes a robot body 102 and an internal pressure source 108, according to some examples. As shown in FIGS. 1A and 1B, the vine robot 100 includes an elongated, tubular robot body 102. The robot body includes an inner (internal) portion 106 and an outer (external) portion 104. The inner portion 106 is disposed within the outer portion 104. The internal pressure source 108 is fluidly connected to one or more internal spaces or volumes locatedAtty. Docket No: 4948.158WO1 within the robot body 102 (e.g., internal spaces or volumes enclosed by the inner portion 106 and the outer portion 104) as shown in FIG. 1A.

[0076] During operation, the internal pressure source 108 may provide continuous pressure to the internal space within the robot body 102. In some examples, the outer portion 104 is rigidly fixed at its base and the base does not move under action of the applied internal pressure. The inner portion 106 is wound on a rotatable reel inside the internal space and is free to evert upon application of the internal pressure. The provided pressure causes a portion of the inner portion 106 to progressively evert out through a through hole 110 and extend along the arrow directions. This eversion continuously turns the inner portion 106 out to form the new outer portion 104 of the robot body 102. Thereby, the robot body 102 can controllably elongate along desired path.

[0077] The internal pressure source 108 may be an original standalone source like a pump, a compressor, or a pressure chamber. Alternatively, it could be a hose or a pipe that is connected to an original pressure source located separately from the vine robot 100. Accordingly, the vine robot 100 may or may not include the original pressure source.

[0078] In some examples, the pressure level generated needs to be sufficiently high to cause the eversion of the inner portion 106, but not excessively high to damage the materials of the robot body 102. Typical internal pressure range could be 10 kPa to 60 kPa. Higher pressures allow more forceful eversion and pushing through confined spaces, but the maximum pressure is limited by the strength of the robot body 102. In order to withstand the pressure, the robot body can be made of stiffer materials and structures, such as a sandwiched structure of foam, fabric, and plastic. Additionally, considering that the working environment of the vine robot 100 may include toxic and corrosive substances (e.g., copper sulfate, hydrofluoric acid, phosphoric acid, sulfuric acid, nitric acid, hydrogen peroxide, isopropyl alcohol, acetone, arsine, hydrobromic acid, chlorine trifluoride, boron trichloride, etc.), the robot body 102 may be made of or at least include chemically resistant materials. Example chemically resistant materials include polytetrafluoroethylene (PTFE), fluoropolymer elastomer,Atty. Docket No: 4948.158WO1 synthetic rubbers, polyethylene, polyvinylidene fluoride (PVDF), ethylene chlorotrifluoroethylene (ECTFE), fiberglass, carbon fiber, but they are not limiting. Other chemically resistant materials are possible.

[0079] In some examples, a part of a return mechanism (e.g., a spring, a string), a part of an end effector tool (e.g., cables of a camera sensor, a supply tube of a liquid or gas, a tether) may pass through the through hole 110.

[0080] As described above, the robot body 102 of the soft vine robot 100 could be constructed from composite materials and structures that provide enhanced stiffness and pressure resistance while still allowing flexibility and elongation. Potential options include multi-layer laminates of fabrics, plastics, and rubbers bonded together; carbon fiber or fiberglass threads woven or wound into flexible tubular shapes; thermoset plastics like epoxy or polyester resins which can be molded into stiff, pressurized tubes; structural foams such as PVC or polyurethane; ballistic fabrics such as Kevlar or ultra-high molecular weight polyethylene (UHMWPE), or the like, or any combination thereof.

[0081] FIGS. 2A-2C illustrate schematic views of a vine robot 100 that includes an end effector adapter 208 connected to a tip 204 of the robot body 202, according to some examples. As shown in FIGS. 2A and 2B, which show cross-sectional and exploded schematic views of the vine robot 100, respectively, the robot body 202 has a tip section (or tip) 204 that continuously extends its position when the robot body 202 everts. The end effector adapter 208 may have two main sides: a proximal side 218 facing inwardly or toward the tip 204 and a distal side 220 facing outwardly or away from the tip 204.

[0082] The proximal side of the end effector adapter 208 may be detachably connected to the tip section 204 of the robot body 202. For example, the end effector adapter 208 may encompass or be coupled to a connecting piece 210. The tip section 204 can include at least one first magnet 206 and the connecting piece 210 can include at least one second magnet 212. The at least one first magnet 206 and the at least one second magnet 212 may be of opposite polarities and attract each other stronglyAtty. Docket No: 4948.158WO1 enough to maintain the temporary connection between the end effector adapter 208 and the robot body 202. It should be noted magnets are merely an example of causing the attraction between the tip section 204 and the end effector adapter 208 while allowing the wall of the everting tip 204 to pass slidably between. Alternative examples, may include suction cups, electrostatic attractions, etc.

[0083] The magnet 206 may be a singular annular ring positioned within and encircling a portion the tip 204. For example, as shown in FIG. 2B, the magnet 206 can be an annular ring encircling the inner portion 222 of body 202 such that the magnet 206 is situated between outer and inner portions 222 and 224 where the tip 204 everts. The magnet 212 can be a single magnetic piece or include two or more magnetic segments 226a-226d strategically placed adjacent to the tip 204 and the adapter 208. For instance, as shown in the cross-sectional view of FIG. 2A, the magnet 212 can be a single annular ring of similar shape and size as magnet 206. Alternatively, or additionally, as shown in FIG. 2B, the magnet 212 can comprise magnetic segments 226a-226d arranged at desired points (e.g., circumferentially, or otherwise) along or within the connecting piece 210 (e.g., within recesses or apertures). In such examples, the magnet 212 (or magnetic segments 226a-226d) can be said to be situated or arranged along a plane adjacent the tip 204 of the robot 100. In some examples, the connecting piece can itself be a part of or make up the entirety of magnet 212. The magnetic attraction between the magnets 206, 212 allows the wall of the everting tip 204 to pass slidably between the magnets 206, 212 as the robot body 202 extends. During eversion of the robot body 202, a central hole in the annular magnet 206 allows the inner portion 106 of the robot body 202 to pass through the magnet 206, turning itself inside out at the tip 204 to form new outer portion 104. It should be noted that ^inner portion,^ ^inner layer,^ and ^inner section^ may be used interchangeably in the present disclosure. Similarly, ^outer portion,^ ^outer layer,^ and ^outer section^ may be used interchangeably in the present disclosure.

[0084] In some examples, cables, tubes, or tethers from end effector tools can also pass through the magnets 206, 212 to connect back to a base of theAtty. Docket No: 4948.158WO1 main robot body 202, for instance, when the magnets 206, 212 are both annular magnetic rings. Alternatively, the connecting piece 210 can include an aperture (not shown) extending from its proximate side 218 to its distal side 220 to allow objects to pass from an end effector tool through the adapter 208.

[0085] The distal side 220 of the end effector adapter 208 provides an interface to be attached to interchangeable end effectors (or end effector tools), such as grippers, cameras, sensors, nozzles, using threaded ports, snap fittings, rail mounts, or other quick attachment mechanisms. This allows easy exchange of end effectors like liquid / gas nozzles, grippers, cameras, and sensors without internal disassembly. The end effectors can be used individually or collectively for different tasks.

[0086] Referring to FIG. 2C, a track (guide track) 216 is affixed along an everting direction (longitudinally) on the exterior surface of the robot body 202. A coupling ring 214 is connected to the end effector adapter 208 and engages with the track 216. As the robot body 202 everts and the tip 204 extends forward, the engagement between the coupling ring 214 and track 216 prevents torsion / twisting of the end effector adapter 208.

[0087] FIGS. 3A and 3B illustrate schematic diagrams of pre-biasing a robot body of a vine robot, according to some examples. As shown in FIG. 3A, the robot body ideally everts in a horizontal path 304 towards the target 308. However, due to the weight 306 (e.g., resulting from the end effector adapter and / or end effector tool(s), as well as the weight of the robot body itself), the robot body may evert in a curved path 302 deflected downwards and unable to reach the target 308.

[0088] The example of FIG. 3B seeks to provide a solution to this potential problem using pre-biasing of the vine robot body. As shown in FIG. 3B, the robot body is pre-biased upwards into an arc shape (such that it may evert along path 310 if there is no weight 306). When pressurized, the weight 306 may then counter act the weight 306 and cause the pre-biased robot body 100 to evert along the corrected path 312 towards the target 308.

[0089] In some examples, a higher pressure can be injected into the robot body to increase its load bearing capacity (or in other words, to make theAtty. Docket No: 4948.158WO1 body stiffer or rigid). In order to withstand the higher pressure without bursting, the robot body can be made of stiffer composite materials and structures. Potential options include polymeric foam, fabric reinforcement, and plastic coatings; multi-layer laminates of fabrics, plastics, and rubbers bonded together; carbon fiber or fiberglass threads woven or wound into flexible tubular shapes; thermoset plastics like epoxy or polyester resins which can be molded into stiff, pressurized tubes; structural foams such as PVC or polyurethane; ballistic fabrics such as Kevlar or ultra-high molecular weight polyethylene (UHMWPE), or the like, or any combination thereof.

[0090] The pre-biasing adjustment can compensate for effects like gravity and payload weight to achieve non-axial eversion paths, such as eversion around corners or following curving routes. To be general, prior to pressurization and eversion, the flexible robot body can be bent, twisted, or curved into a pre-biased shape such that it everts along the desired path when pressurized, even when the desired path, or part thereof is non- coincident with an axial direction of the robot body.

[0091] FIGS. 4A-4B illustrate schematic views of a cleaning end effector tool 402, according to some examples. The cleaning end effector tool 402 may include a gas outlet 404 and at least one liquid outlet 406. The at least one liquid outlet 406 may each have a nozzle 408 bent outwards so that a wide area can be covered when spraying liquid. In some examples, the gas outlet is connected to a center of the end effector adapter and the at least one liquid outlet is connected to at least one off-center position on the end effector adapter, but it is not limiting. The gas outlet 404 and the at least one liquid outlet 406 may be connected via tubes passing through the central through hole 110 to supplies such as tanks or pumps. Alternatively, the gas outlet 404 and the at least one liquid outlet 406 may be connected to supplies installed on or near the end effector adapter 208.

[0092] FIG. 4C illustrates a schematic diagram of using the vine robot and cleaning end effector tool 402 to clean a substrate 410, according to some examples. During operation, the vine robot everts to position the cleaning end effector 402 near the substrate 410. The at least one liquid outlet 406 sprays cleaning liquid 412 onto the surface of the substrate 410. The gasAtty. Docket No: 4948.158WO1 outlet 404 then blows a drying gas 414 onto the same surface of the substrate 410 to dry the applied liquid 412.

[0093] In some examples, the drying gas 414 includes nitrogen or clean dry air, the cleaning liquid 412 includes deionized water or solvents, and the substrate 410 may be a semiconductor wafer. The coordinated spraying and drying prevents streaking on the wafer surface.

[0094] FIG. 5 illustrates a schematic diagram of using a vine robot 100 and a cleaning medium end effector 504 to clean a substrate 506, according to some examples. The cleaning medium 504 is connected to the end effector adapter 208 of the vine robot 100 via a connecting mechanism 502. The connecting mechanism 502 may include a clamp, a fastener, an adhesive, a magnet, a hinge, a spring, or the like, or any combination thereof.

[0095] The cleaning medium 504 is configured to contact and scrub the surface of the substrate 506 to remove contaminants and residues. The contact occurs due to the eversion, retraction, or linear reciprocating motion of the robot body, which makes the attached cleaning medium 504 scrub across the substrate surface. In some examples, the substrate 506 is rotated during cleaning. The linear reciprocating motion of the robot body enables the attached cleaning medium 504 to cover a wide area of the rotating substrate surface 506.

[0096] In some examples, the cleaning medium 504 is an abrasive pad or brush that can scour the substrate surface. In other examples, the cleaning medium 504 is a soft wiping material wetted with a cleaning solvent. The cleaning medium 504 may also include specialized surfaces or be soaked with cleaning agents tailored to the specific contaminants on the surface of the substrate 506.

[0097] In some examples, the cleaning contact pressure / speed can be controlled by the eversion / retraction speed. Multiple cleaning mediums 504 attached along the robot body could clean different areas of the substrate 506 simultaneously.

[0098] FIGS. 6A-6B illustrate schematic diagrams of using a collaborative vine robot assembly to service a quad-station module (QSM) 600, according to some examples.Atty. Docket No: 4948.158WO1

[0099] As shown in FIGS. 6A and 6B, the collaborative vine robot assembly includes four vine robots - vine robot A 602, vine robot B 604, vine robot C 606, and vine robot D 608. The four vine robots are positioned on the sides (or corners) of the QSM 600, with each vine robot assigned to service at least one of the four QSM process stations. The vine robots can work collaboratively to perform services on a process station or the entire QSM 600. For example, vine robot A 602 and vine robot D 608 collaboratively work to service process station 1614.

[0100] In some examples, the vine robot A 602 is equipped with a pick- and-place end effector 610 to manipulate wafers, scrub the station surfaces, or pick off debris. Vine robot D 608 is equipped with a fluid delivery and vacuuming end effector 612 to aspirate spills, spray cleaning fluids, or provide rinsing.

[0101] The collaborative vine robots enable automated servicing of all sides of the QSM 600. Their thin body design allows them to reach confined spaces in the stations. The robots can service the stations concurrently, improving efficiency. Additionally, the modular end effectors allow different vine robots to be equipped with tools tailored to their assigned servicing tasks. The vine robots could also exchange end effectors to adapt to changing station service needs.

[0102] FIG. 7 illustrates schematic diagram of using a vine robot 100 to locate and pick up a substrate 704, according to some examples. The manufacturing tool 700 contains multiple process modules 702 that are difficult and hazardous for human operators to access. When a substrate 704 like a wafer fragment breaks off inside the tool 700, the vine robot 100 can be deployed to safely locate and retrieve it. As shown in FIG. 7, the end effector adapter 208 is equipped with a camera sensor 706 and a vacuum suction cup 708. The internal pressure source 108 everts the robot body 102 into the confined spaces of the processing tool 700 along a desired path.

[0103] The camera sensor 706 visually searches for the broken substrate piece 704. Upon detection, the vine robot 100 maneuvers the vacuum suction cup 708 to make contact and apply suction to the substrate surface 704. This securely holds the substrate 704 for retrieval. The vine robot 100Atty. Docket No: 4948.158WO1 can then retract, safely extracting the broken substrate piece 704 without needing human entry into the hazardous tool 700. In some examples, the vine robot 100 as illustrated in FIG. 7 can be used to hold and maneuver various kinds of substrates besides wafer fragments, including but not limited to dropped components inside process chambers, cables needing routing between modules, and hazardous chemicals. When the vacuum suction cup 708 applies the vacuum to the substrate 704, a pressure drop may indicate that the substrate has a defect or a crack.

[0104] In the example of FIG. 7, the vine robot 100 uses the onboard camera sensor 706 to detect the location of the substrate 704. However, the vine robot 100 can also receive the location of the substrate 704 from other external sensors or vision systems through a wired or wireless network. For instance, existing camera sensors mounted around the manufacturing tool 700 may detect the substrate 704 and provide location signals to guide the vine robot 100 to retrieve and place the substrate 704.

[0105] In general, besides the example of FIG.7, the vine robot 100 can utilize either signals received from an onboard sensor (e.g., camera sensor 706) or an external sensor device to direct and control its maneuvers and / or retrieval operations.

[0106] FIGS.8A-8B illustrate schematic diagrams of using a vine robot 100 to route a cable 802, according to some examples. As shown in FIG. 8A, before operation, the vine robot 100 is temporarily connected to one end 804 of the cable 802 via a cable routing end effector.

[0107] Referring to FIG. 8B, during operation, the internal pressure source 108 everts the robot body along a desired cable routing path that goes through narrow, enclosed area or space? 808. The end effector adapter 208 maintains a connection with the extending tip of the robot body 102. The attached cable routing end effector grips the cable end 804 and routes the cable 802 as the vine robot 100 everts. This allows the vine robot 100 to thread the gripped cable 802 through confined spaces 808 that are inaccessible for human operators. The vine robot 100 can then release the cable 802 at a target destination point. Meanwhile, the other end 806 of theAtty. Docket No: 4948.158WO1 cable 802 remains stationary at its original location. This enables efficient and adaptable routing of cables without manual labor in tight spaces.

[0108] In some examples, the cable end 804 may originally be connected to a port or a socket at a first location (e.g., the target destination points on the right). The cable end 804 may became disconnected (either accidentally or intentionally) from the port or socket and move to a second location (e.g., the original location on the left). The vine robot 100 may grip the cable end 804 using a cable routing end effector. The vine robot 100 then everts its body 102 through confined spaces 808 to route the cable 802 back to the original port or socket. An operator could then conveniently reattach cable 802 to the port or socket.

[0109] In some examples, the detection of disconnection and the reattachment can be performed automatically. Specifically, a processor may detect, by a camera sensor mounted on the vine robot 100 or an external camera sensor, that the cable 802 is disconnected from its original port or socket. The processor may then control the vine robot 100 to route the cable 802 to the original port or socket and control a robotic arm to reconnect the cable into the port or socket.

[0110] FIG. 9 illustrate schematic diagram of using a vine robot 100 to map a zone of interest, according to some examples. As shown in FIG. 9, a sensing device 902 (e.g., a Light Detection and Ranging (LIDAR) device, a Sound Navigation and Ranging (SONAR) device) is detachably connected to the end effector adaptor 208 of the vine robot 100. The robot body of the vine robot 100 can extend the sensing device 902 into confined spaces and around obstacles. The sensing device 902 queries the environment and maps the boundaries 904 of the zone of interest. It also detects the presence of any unidentified objects 906. This allows the vine robot 100 to safely scout hazardous or tight areas that are inaccessible to human operators. In some examples, the vine robot 100 can survey manufacturing tools, ventilation ducts, pipes, storage tanks, equipment interiors, collapsed buildings, and other cramped areas.

[0111] FIGS. 10-11 illustrate schematic views of two return mechanisms of a vine robot, according to some examples. After operation, the pressureAtty. Docket No: 4948.158WO1 within the robot body is released, the robot body needs to retract along the original path. Either or both of these two return mechanisms may be deployed to cause or assist the retraction of the robot body. As shown in FIG. 10, a string 1006 is configured to pass through a through hole in the robot body. A proximal end of the string is connected to a shaft 1004 and a distal end of the string is connected to a stretchable medium (e.g., a coiled spring 1002). In some examples, the coiled spring 1002 is installed on the end effector adapter. When the vine robot 100 extends, the coiled spring 1002 tightens and stores a tension force. After the pressure within the robot body is released, the tension force causes the robot body to retract.

[0112] Referring to FIG. 11, a cable 1102 is configured to pass through a through hole in the robot body. A proximal end of the cable 1102 is connected to a reel 1104 and a distal end of the cable 1102 is connected to a proximal side of the end effector adaptor. After the pressure within the robot body is released, the reel 1104 can be actuated to rotate in an anticlockwise direction to help the retraction of the robot body.

[0113] FIG. 12 is a flow chart illustrating a method of controlling a vine robot to perform an operation, according to some examples.

[0114] Some present examples include methods. With reference to FIG. 12, a method 1200 of controlling a vine robot includes, at step 1202, controlling an internal pressure source to generate pressure within a robot body of the vine robot to cause an inner segment of the robot body to evert out along an everting direction of the robot body to form an extending tip of the robot body, at step 1204, controlling the robot body to extend along a desired path, and at step 1206, controlling at least one interchangeable end effector tool to perform an operation.

[0115] For example, the method 1200 can be used to control the vine robot to route cables. The method 1200 may include, at step 1202, controlling a pressure source to cause a connected flexible and elongate robot body to evert along a desired cable routing path, wherein the robot body is adapted to extend through confined spaces in a manufacturing tool. The method 1200 also include, at step 1204, controlling the robot body to extend along a desired path, and at step 1206, controlling a cable gripping mechanism toAtty. Docket No: 4948.158WO1 pick up a cable at a start location and controlling a cable release mechanism to release the cable at a target destination location.

[0116] As another example, the method 1200 can be used to control a vine robot assembly to service a Quad-Station Module (QSM). For example, the method 1200 includes controlling two or more vine robots of the vine robot assembly to work collaboratively to perform a service for a station of the QSM.

[0117] FIG. 13 is a block diagram illustrating an example of a machine or controller 1300 by which one or more example embodiments described herein may be implemented or controlled. In alternative embodiments, the controller 1300 may operate as a standalone device or may be connected (e.g., networked) to other machines. In a networked deployment, the controller 1300 may operate in the capacity of a server machine, a client machine, or both in server-client network environments. In an example, the controller 1300 may function as a peer machine in a peer-to-peer (P2P) (or other distributed) network environment. Further, while only a single controller 1300 is illustrated, the term ^machine^ (controller) shall also be taken to include any collection of machines (controllers) that individually or jointly execute a set (or multiple sets) of instructions to perform any one or more of the methodologies discussed herein, such as via cloud computing, software as a service (SaaS), or other computer cluster configurations. In some examples, and referring to FIG. 13, a non-transitory machine-readable medium includes Instructions 1324 that, when read by a controller 1300, cause the controller to control operations in methods comprising at least the non-limiting example operations described herein.

[0118] EXAMPLES

[0119] Some embodiments herein may include the following examples.

[0120] Example 1. A vine robot comprising: an elongate robot body having an external portion and an internal portion disposed within the external portion, wherein the internal portion is configured to evert when pressure is generated within the robot body, wherein when the internal portion everts, an everting tip of the robot body moves along a desired path; and an attachment member having a first side configured to detachablyAtty. Docket No: 4948.158WO1 connect to and move with the everting tip of the robot body and a second side configured to detachably connect to at least one end effector.

[0121] Example 2. The vine robot of example 1, further comprising: a track mounted longitudinally along the external portion of the robot body, wherein at least a portion of the attachment member slidably engages with and is detachably connectable to the track.

[0122] Example 3. The vine robot of example 1 or example 2, wherein the everting tip of the robot body accommodates a first magnet and the attachment member includes a second magnet, wherein the first and second magnets are configured to attract each other and maintain the detachable connection between the attachment member and the everting tip of the robot body.

[0123] Example 4. The vine robot of example 3, wherein a magnetic attraction between the first magnet and the second magnet allows a wall of the everting tip of the vine robot to pass slidably therebetween as the robot body moves along the desired path.

[0124] Example 5. The vine robot of example 3 or example 4, wherein the first magnet is an annular magnet having a central hole, wherein when the internal portion of the robot body everts, sections of the internal portion pass through the central hole of the annular magnet to form sections of the external portion of the robot body.

[0125] Example 6. The vine robot of any one of examples 1-5, wherein the robot body is configured to counteract a weight of the attachment member or the at least one end effector to direct the everting tip along the desired path.

[0126] Example 7. The vine robot of any one of examples 1-6, wherein the robot body is pre-biased before operation to extend along the desired path.

[0127] Example 8. The vine robot of example 7, wherein the desired path is non-coincident with an axial direction of the robot body.

[0128] Example 9. The vine robot of example 7 or example 8, wherein the pre-biasing is applied prior to the pressure generation in the robot body.

[0129] Example 10. The vine robot of any one of examples 1-9, wherein the robot body comprises a sandwiched structure of foam, fabric, and plastic.Atty. Docket No: 4948.158WO1

[0130] Example 11. The vine robot of any one of examples 1-10, wherein the pressure generated within the robot body ranges from 10 kPa to 60 kPa.

[0131] Example 12. The vine robot of any one of examples 1-11, wherein the robot body comprises one or more chemically resistant materials.

[0132] Example 13. The vine robot of example 12, wherein the one or more chemically resistant materials are resistant to at least one of copper sulfate, sulfuric acid, hydrogen peroxide, hydrobromic acid, or chlorine trifluoride.

[0133] Example 14. The vine robot of example 12 or example 13, wherein the one or more chemically resistant materials comprise at least one of polytetrafluoroethylene (PTFE), fluoropolymer elastomer, or synthetic rubber.

[0134] Example 15. The vine robot of any one of examples 1-14, wherein the at least one end effector includes a gas outlet configured to direct gas at a surface of a substrate and at least one liquid outlet configured to direct fluid at the surface of the substrate.

[0135] Example 16. The vine robot of example 15, wherein the gas is a drying gas to dry fluid applied to the substrate.

[0136] Example 17. The vine robot of example 15 or example 16, wherein the gas outlet is coupled to a central portion of the attachment member and the at least one liquid outlet is coupled to the attachment member outside of the central portion.

[0137] Example 18. The vine robot of any one of examples 15-17, wherein the gas includes nitrogen gas, the fluid includes deionized water, and the substrate is a wafer.

[0138] Example 19. The vine robot of any one of examples 1-18, wherein the at least one end effector includes a cleaning medium, wherein the cleaning medium is configured to contact and clean a substrate based on an eversion or a retraction of the robot body, or a reciprocation between the eversion and retraction of the robot body.

[0139] Example 20. The vine robot of example 19, wherein the cleaning medium includes a material carrying a cleaning agent.Atty. Docket No: 4948.158WO1

[0140] Example 21. The vine robot of example 19 or example 20, wherein the substrate is caused to rotate when the cleaning medium contacts the substrate.

[0141] Example 22. The vine robot of any one of examples 1-21, wherein the at least one end effector includes a camera sensor configured to detect a location of a substrate.

[0142] Example 23. The vine robot of any one of examples 1-22, wherein the at least one end effector includes a vacuum suction cup configured to apply a vacuum to a surface of a substrate to manipulate or recover the substrate.

[0143] Example 24. The vine robot of example 23, wherein a vacuum pressure drop at the vacuum suction cup is recognized as indicative of a defective or cracked substrate held by the vacuum suction cup.

[0144] Example 25. The vine robot of any one of examples 22-24, wherein the substrate includes a fragment of a wafer.

[0145] Example 26. The vine robot of any one of examples 1-25, wherein the vine robot further comprises a transceiver and the at least one end effector includes a vacuum suction cup, wherein when the internal portion everts, the transceiver is configured to receive a location of a substrate from a camera sensor and the vacuum suction cup is configured to apply a vacuum to a surface of the substrate.

[0146] Example 27. The vine robot of any one of examples 1-26, wherein the at least one end effector is detachably connectable to a cable for a routing of the cable at an installation, wherein when the internal portion everts, the robot body carries the cable detachably connected to the at least one end effector to a desired location at the installation.

[0147] Example 28. The vine robot of any one of examples 1-27, wherein the at least one end effector is detachably connectable to a cable that is disconnected from a port or a socket, wherein when the internal portion everts, the robot body carries a cable detachably connected to the at least one end effector to a location of the port or the socket.Atty. Docket No: 4948.158WO1

[0148] Example 29. The vine robot of any one of examples 1-28, wherein the at least one end effector is detachably connectable to a Light Detection and Ranging (LIDAR) device or a Sound Navigation and Ranging (SONAR) device, wherein when the internal portion everts, the LIDAR device or the SONAR device is configured to query or map a zone of interest to detect an object in the zone of interest.

[0149] Example 30. The vine robot of any one of examples 1-29, wherein at least part of the desired path is inaccessible by a human operator.

[0150] Example 31. The vine robot of any one of examples 1-30, further comprising: a return mechanism deployable to cause the robot body to retract.

[0151] Example 32. The vine robot of example 31, wherein the return mechanism is deployable to cause the robot body to retract when the pressure within the robot body is released.

[0152] Example 33. The vine robot of example 31 or example 32, wherein the return mechanism includes an extendable spring or stretchable medium connectable to the second side of attachment member, the extendable spring or stretchable medium generating a return force on an extension of the robot body to at least assist in a retraction of the robot body when the pressure within the robot body is released.

[0153] Example 34. The vine robot of any one of examples 31-33, wherein the return mechanism includes a cable having a first end connecting to a reel and a second end connecting to the first side of the attachment member.

[0154] Example 35. A vine robot assembly for servicing a Quad-Station Module (QSM), the vine robot assembly comprising: at least one vine robot installed in association with a respective station of the QSM, wherein the at least one vine robot includes: an extendable tubular robot body, wherein an inner segment of the robot body is configured to evert out from within an outer segment of the robot body to form an extendable tip of the vine robot; an internal pressure source connectable to the robot body, wherein the pressure source is configured to generate pressure within the robot body to cause the inner segment to evert out along an everting direction of the robot body; and an attachment member having a first side adapted to temporarilyAtty. Docket No: 4948.158WO1 connect to the extending tip of the robot body and a second side adapted to temporarily connect to at least one interchangeable end effector tool.

[0155] Example 36. The vine robot assembly of example 35, wherein the vine robot assembly is a collaborative vine robot assembly and wherein two or more vine robots of the collaborative vine robot assembly are controllable to work collaboratively to perform a service for a station of the QSM.

[0156] Example 37. The vine robot assembly of example 35 or example 36, wherein the at least one vine robot is included in a plurality of vine robots comprising at least four vine robots, each vine robot in the plurality of vine robots assigned to at least one respective station of the QSM.

[0157] Example 38. The vine robot assembly of any one of examples 35- 37, wherein the at least one end effector of a first vine robot of the vine robot assembly is configured to manipulate a substrate while a second vine robot of the vine robot assembly directs a fluid or gas at the substrate, a pedestal, or a station of the QSM.

[0158] Example 39.vine robot comprising: an extendable tubular robot body, wherein an inner segment of the robot body can evert out from within an outer segment of the robot body to form an extending tip of the robot body, wherein the inner segment of the robot body is configured to evert out along an everting direction of the robot body when an internal pressure source generates pressure within the robot body, wherein when the inner segment everts, the robot body extends along a desired path; and an attachment member having a first side temporarily connectable to the extending tip of the robot body and a second side temporarily connectable to at least one interchangeable end effector tool, wherein when the inner segment everts, the attachment member maintains a temporary connection with the extending tip of the robot body.

[0159] Example 40. The vine robot of example 39, further comprising: a guide track affixed longitudinally on a surface of the robot body to guide an eversion of the robot body in the everting direction.

[0160] Example 41. The vine robot of example 39 or example 40, wherein a portion of the attachment member engages with the guide track during the eversion of the robot body in the everting direction.Atty. Docket No: 4948.158WO1

[0161] Example 42. The vine robot of any one of examples 39-41, wherein the extending tip of the robot body accommodates a first magnet and the attachment member includes a second magnet, wherein a magnetic attraction between the first and second magnets assists in temporarily connecting the attachment member to the extending tip of the robot body.

[0162] Example 43. A vine robot comprising: an extendable tubular robot body, wherein an inner segment of the robot body is configured to evert out from within an outer segment of the robot body to form an extendable tip of the vine robot; an internal pressure source connectable to the robot body, wherein the pressure source is configured to generate pressure within the robot body to cause the inner segment to evert out along an everting direction of the robot body; and an attachment member having a first side adapted to temporarily connect to the extending tip of the robot body and a second side adapted to temporarily connect to at least one interchangeable end effector tool.

[0163] Example 44. The vine robot of example 43, further comprising: a track affixed longitudinally on an outer surface of the robot body along the everting direction, wherein a portion of the attachment member is configured to engage with the track.

[0164] Example 45. The vine robot of example 43 or example 44, wherein the extending tip of the robot body accommodates a first magnet and the attachment member comprises a second magnet, wherein the first and second magnets are configured to magnetically attract each other to assist in temporarily connecting the attachment member to the extending tip end of the robot body.

[0165] Example 46. A vine robot for routing cables, the vine robot comprising: a flexible, elongate robot body adapted to extend through confined spaces in a manufacturing tool; the robot body connectable to a pressure source configured to cause eversion of the robot body along a desired cable routing path; an attachment member designed to maintain connection with a tip end of the body during eversion; and a cable routing end effector detachably connected to the attachment member , the cable routing end effector comprising: a cable gripping mechanism adapted toAtty. Docket No: 4948.158WO1 temporarily grasp a cable; a cable release mechanism to release the cable at a target destination location; and a controller configured to: actuate the pressure source to cause the body to evert along the desired cable routing path; and control the cable gripping and release mechanisms to pick up a cable at a start location and release the cable at the target destination location.

[0166] Example 47. A method of controlling a vine robot, the method comprising: controlling an internal pressure source to generate pressure within a robot body of the vine robot to cause an inner segment of the robot body to evert out along an everting direction of the robot body to form an extending tip of the robot body; controlling the robot body to extend along a desired path; and controlling at least one interchangeable end effector tool to perform an operation, wherein the at least one interchangeable end effector tool is temporarily connectable to a second side of an end effector adaptor of the vine robot, and wherein a first side of the end effector maintains a temporary connection with the extending tip of the robot body.

[0167] Example 48. A method of controlling a vine robot to route cables, the method comprising: controlling a pressure source to cause a connected flexible and elongate robot body to evert along a desired cable routing path, wherein the robot body is adapted to extend through confined spaces in a manufacturing tool; and during an eversion of the robot body along the desired cable routing path, controlling a cable gripping mechanism to pick up a cable at a start location, wherein the cable gripping mechanism is detachably connected to an attachment member designed to maintain connection with a tip end of the robot body; and controlling a cable release mechanism to release the cable at a target destination location, wherein the cable release mechanism is detachably connected to the attachment member.

[0168] Example 49. A method of controlling a vine robot assembly to service a Quad-Station Module (QSM), the method comprising: for each of a plurality of vine robots of the vine robot assembly, controlling an internal pressure source of the each vine robot to generate pressure within a robot body of the vine robot to cause an inner segment of the robot body to evert out along an everting direction of the robot body to form an extending tip ofAtty. Docket No: 4948.158WO1 the robot body; controlling the robot body to extend along a desired path; and controlling at least one interchangeable end effector tool to perform a service on a respective station of the QSM, wherein the at least one interchangeable end effector tool is temporarily connected to a second side of an end effector adaptor of the vine robot, and wherein a first side of the end effector maintains a temporary connection with the extending tip of the robot body.

[0169] Example 50. The method of example 49, wherein the vine robot assembly is a collaborative vine robot assembly and wherein the method further comprises: controlling two or more vine robots of the collaborative vine robot assembly to work collaboratively to perform the service for a station of the QSM.

[0170] Examples, as described herein, may include, or may operate by logic, a number of components, or mechanisms. Circuitry is a collection of circuits implemented in tangible entities that include hardware (e.g., simple circuits, gates, logic, etc.). Circuitry membership may be flexible over time and underlying hardware variability. Circuitries include members that may, alone or in combination, perform specified operations when operating. In an example, hardware of the circuitry may be immutably designed to conduct a specific operation (e.g., hardwired). In an example, the hardware of the circuitry may include variably connected physical components (e.g., execution units, transistors, simple circuits, etc.) including a Computer- Readable Medium physically modified (e.g., magnetically, electrically, by moveable placement of invariant massed particles, etc.) to encode instructions of the specific operation. In connecting the physical components, the underlying electrical properties of a hardware constituent are changed (for example, from an insulator to a conductor or vice versa). The instructions enable embedded hardware (e.g., the execution units or a loading mechanism) to create members of the circuitry in hardware via the variable connections to conduct portions of the specific operation when in operation. Accordingly, the Computer-Readable Medium is communicatively coupled to the other components of the circuitry when the device is operating. In an example, any of the physical components may beAtty. Docket No: 4948.158WO1 used in more than one member of more than one circuitry. For example, under operation, execution units may be used in a first circuit of a first circuitry at one point in time and reused by a second circuit in the first circuitry, or by a third circuit in a second circuitry, at a different time.

[0171] The machine (e.g., computer system) controller 1300 may include a hardware processor 1302 (e.g., a central processing unit (CPU), a hardware processor core, or any combination thereof), a GPU 1332 (graphics processing unit), a main memory 1304, and a static memory 1306, some or all of which may communicate with each other via an interlink 1318 (e.g., a bus) The controller 1300 may further include a display device 1308, an alphanumeric input device 1310 (e.g., a keyboard), and a UI navigation device 1312 (e.g., a mouse or other user interface). In an example, the display device 1308, alphanumeric input device 1312, and UI navigation device 1312 may be a touch screen display. The controller 1300 may additionally include a mass storage device 1314 (e.g., drive unit), a signal generation device 1316 (e.g., a speaker), a network interface device 1320, and one or more sensors 1330, such as a Global Positioning System (GPS) sensor, compass, accelerometer, or another sensor. The controller 1300 may include an output controller 1328, such as a serial (e.g., universal serial bus (USB)), parallel, or other wired or wireless (e.g., infrared (IR), near field communication (NFC), etc.) connection to communicate with or control one or more peripheral devices (e.g., a printer, card reader, etc.).

[0172] The mass storage device 1314 may include a machine-readable medium 1322 on which is stored one or more sets of data structures or instructions 1324 (e.g., software) embodying or utilized by any one or more of the techniques or functions described herein. The instructions 1324 may as shown also reside, completely or at least partially, within the main memory 1304, within the static memory 1306, within the hardware processor 1302, or within the GPU 1332 during execution thereof by the controller 1300. In an example, one or any combination of the hardware processor 1302, the GPU 1332, the main memory 1304, the static memory 1306, or the mass storage device 1314 may constitute the machine-readable medium 1322.Atty. Docket No: 4948.158WO1

[0173] While the machine-readable medium 1322 is illustrated as a single medium, the term ^machine-readable medium^ may include a single medium, or multiple media (e.g., a centralized or distributed database, and / or associated caches and servers) configured to store the one or more instructions 1324. The term ^machine-readable medium^ may include any medium that can store, encode, or carry instructions 1324 for execution by the controller 1300 and that cause the controller 1300 to perform any one or more of the techniques of the present disclosure, or that can store, encode, or carry data structures used by or associated with such instructions 1324. Non-limiting machine-readable medium examples may include solid-state memories, and optical and magnetic media. In an example, a massed machine-readable medium comprises a machine-readable medium 1322 with a plurality of particles having invariant (e.g., rest) mass. Accordingly, massed machine- readable media are not transitory propagating signals. Specific examples of massed machine-readable media may include non-volatile memory, such as semiconductor memory devices (e.g., electrically programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM)) and flash memory devices; magnetic disks, such as internal hard disks and removable disks; magneto-optical disks; and CD-ROM and DVD-ROM disks. The instructions 1324 may further be transmitted or received over a communications network 1326 using a transmission medium via the network interface device 1320.

[0174] Although examples have been described with reference to specific example embodiments or methods, it will be evident that various modifications and changes may be made to these embodiments without departing from the broader scope of the embodiments. Accordingly, the specification and drawings are to be regarded in an illustrative rather than a restrictive sense. The accompanying drawings that form a part hereof, show by way of illustration, and not of limitation, specific embodiments in which the subject matter may be practiced. The embodiments illustrated are described in sufficient detail to enable those skilled in the art to practice the teachings disclosed herein. Other embodiments may be utilized and derivedAtty. Docket No: 4948.158WO1 therefrom, such that structural and logical substitutions and changes may be made without departing from the scope of this disclosure. This detailed description, therefore, is not to be taken in a limiting sense, and the scope of various embodiments is defined only by the appended claims, along with the full range of equivalents to which such claims are entitled.

[0175] Such embodiments of the inventive subject matter may be referred to herein, individually and / or collectively, by the term ^invention^ merely for convenience and without intending to voluntarily limit the scope of this application to any single invention or inventive concept if more than one is in fact disclosed. Thus, although specific embodiments have been illustrated and described herein, it should be appreciated that any arrangement calculated to achieve the same purpose may be substituted for the specific embodiments shown. This disclosure is intended to cover any and all adaptations or variations of various embodiments. Combinations of the above embodiments, and other embodiments not specifically described herein, will be apparent to those of skill in the art upon reviewing the above description.

Claims

Atty. Docket No: 4948.158WO1 CLAIMS 1. A vine robot comprising: an elongate robot body having an external portion and an internal portion disposed within the external portion, wherein the internal portion is configured to evert when pressure is generated within the robot body, wherein when the internal portion everts, an everting tip of the robot body moves along a desired path; and an attachment member having a first side configured to detachably connect to and move with the everting tip of the robot body and a second side configured to detachably connect to at least one end effector.

2. The vine robot of claim 1, further comprising: a track mounted longitudinally along the external portion of the robot body, wherein at least a portion of the attachment member slidably engages with and is detachably connectable to the track.

3. The vine robot of claim 1, wherein the everting tip of the robot body accommodates a first magnet and the attachment member includes a second magnet, wherein the first and second magnets are configured to attract each other and maintain the detachable connection between the attachment member and the everting tip of the robot body.

4. The vine robot of claim 3, wherein a magnetic attraction between the first magnet and the second magnet allows a wall of the everting tip of the vine robot to pass slidably therebetween as the robot body moves along the desired path.

5. The vine robot of claim 3, wherein the first magnet is an annular magnet having a central hole, wherein when the internal portion of the robot body everts, sections of the internal portion pass through the central hole of the annular magnet to form sections of the external portion of the robot body.Atty. Docket No: 4948.158WO1 6. The vine robot of claim 1, wherein the robot body is configured to counteract a weight of the attachment member or the at least one end effector to direct the everting tip along the desired path.

7. The vine robot of claim 1, wherein the robot body is pre-biased before operation to extend along the desired path.

8. The vine robot of claim 7, wherein the desired path is non-coincident with an axial direction of the robot body.

9. The vine robot of claim 8, wherein the pre-biasing is applied prior to the pressure generation in the robot body.

10. The vine robot of claim 1, wherein the robot body comprises a sandwiched structure of foam, fabric, and plastic.

11. The vine robot of claim 1, wherein the pressure generated within the robot body ranges from 10 kPa to 60 kPa.

12. The vine robot of claim 1, wherein the robot body comprises one or more chemically resistant materials.

13. The vine robot of claim 12, wherein the one or more chemically resistant materials are resistant to at least one of copper sulfate, sulfuric acid, hydrogen peroxide, hydrobromic acid, or chlorine trifluoride.

14. The vine robot of claim 12, wherein the one or more chemically resistant materials comprise at least one of polytetrafluoroethylene (PTFE), fluoropolymer elastomer, or synthetic rubber.

15. The vine robot of claim 1, wherein the at least one end effector includes a gas outlet configured to direct gas at a surface of a substrate and at least one liquid outlet configured to direct fluid at the surface of the substrate.Atty. Docket No: 4948.158WO1 16. The vine robot of claim 15, wherein the gas is a drying gas to dry fluid applied to the substrate.

17. The vine robot of claim 15, wherein the gas outlet is coupled to a central portion of the attachment member and the at least one liquid outlet is coupled to the attachment member outside of the central portion.

18. The vine robot of claim 15, wherein the gas includes nitrogen gas, the fluid includes deionized water, and the substrate is a wafer.

19. The vine robot of claim 1, wherein the at least one end effector includes a cleaning medium, wherein the cleaning medium is configured to contact and clean a substrate based on an eversion or a retraction of the robot body, or a reciprocation between the eversion and retraction of the robot body.

20. The vine robot of claim 19, wherein the cleaning medium includes a material carrying a cleaning agent.

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